JP2020047631A - Thermoelectric element, power generation device, electronic device, and manufacturing method of thermoelectric element - Google Patents

Abstract

To provide a thermoelectric element, a power generation device, an electronic device, and a manufacturing method of the thermoelectric element that can stabilize the amount of generated electric energy.SOLUTION: A thermoelectric element 1 that converts thermal energy into electric energy includes a first substrate 11a having a first main surface 11af, a second substrate 11b having a second main surface 11bf facing the first main surface 11af, a first electrode portion 12a separated from the second substrate 11b and a second electrode portion 12b having a different work function from the first electrode portion 12a, a support portion 13 provided between the first substrate 11a and the second substrate 11b, separated from the first electrode portion 12a and the second electrode portion 12b, and containing metal, and an intermediate portion 14 provided between the first electrode portion 12a and the second electrode portion 12b and containing nanoparticles.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a thermoelectric element that converts heat energy into electric energy, a power generation device, an electronic device, and a method for manufacturing a thermoelectric element.

  2. Description of the Related Art In recent years, thermoelectric elements that generate electrical energy using thermal energy have been actively developed. Patent Document 1 discloses a thermoelectric element utilizing an electron emission phenomenon caused by an absolute temperature, which occurs between electrodes having a work function difference. Such a thermoelectric element can generate power even when the temperature difference between the electrodes is small as compared to a thermoelectric element using the temperature difference between the electrodes (Seebeck effect). For this reason, utilization for more various uses is expected.

  Patent Document 1 discloses that an emitter electrode layer, a collector electrode layer, and an electrically insulating material which is dispersedly arranged on the surfaces of the emitter electrode layer and the collector electrode layer and separates the emitter electrode layer and the collector electrode layer at submicron intervals. A thermoelectric element is disclosed in which the work function of the emitter electrode layer is smaller than the work function of the collector electrode layer, and the particle diameter of the spherical nano beads is 100 nm or less.

Japanese Patent No. 6147901

  Here, in a thermoelectric element using a pair of electrode parts having different work functions, the amount of electric energy generated is affected by the distance between the electrode parts (inter-electrode gap). In particular, as the variation in the gap between the electrodes worsens, the amount of generated electric energy tends to become unstable.

  In this regard, in the technology disclosed in Patent Document 1, each electrode layer is separated using spherical nanobeads. For this reason, the deterioration of the gap between the electrodes caused by the variation of the diameter of the spherical beads is not taken into consideration, and the amount of generated electric energy may be unstable. Under the circumstances described above, it is desired to stabilize the amount of electric energy generated.

  Accordingly, the present invention has been devised in view of the above-described problems, and has as its object to provide a thermoelectric element, a power generation device, an electronic device, and a thermoelectric element capable of stabilizing the amount of electric energy generated. It is to provide a manufacturing method.

  A thermoelectric element according to a first aspect of the present invention is a thermoelectric element that converts heat energy into electric energy. The thermoelectric element is provided with a first substrate having a first main surface and separated from the first main surface in a first direction, A second substrate having a second main surface opposed to the first main surface; a first electrode portion provided on the first main surface and separated from the second substrate; provided on the second main surface A second electrode unit that is separated from the first substrate and the first electrode unit and has a work function different from that of the first electrode unit, and is provided between the first substrate and the second substrate. A supporting portion that is separated from the first electrode portion and the second electrode portion and that includes a metal; an intermediate portion that is provided between the first electrode portion and the second electrode portion and that includes nanoparticles; It is characterized by having.

  The thermoelectric element according to a second invention is the thermoelectric device according to the first invention, wherein the thermoelectric element is provided on a first through hole penetrating the first substrate in the first direction and on a surface of the first substrate facing the first main surface. And a first connection wiring electrically connected to the first electrode portion and the first wiring layer via the first through hole.

  A thermoelectric element according to a third aspect of the present invention is the thermoelectric element according to the second aspect, wherein the thermoelectric element is provided on a second through hole penetrating the second substrate in the first direction, and on a surface of the second substrate facing the second main surface. A second wiring layer, and a second connection wiring electrically connected to the second electrode portion and the second wiring layer via the second through hole.

  A thermoelectric element according to a fourth aspect of the present invention is the thermoelectric element according to the first aspect, further comprising a lead wiring in contact with the first electrode portion and the support portion.

  The thermoelectric element according to a fifth aspect is the thermoelectric element according to any one of the first to fourth aspects, wherein an inter-electrode gap between the first electrode part and the second electrode part is 10 μm or less, and the nanoparticle Has a diameter of 1/10 or less of the gap between the electrodes.

  In a thermoelectric element according to a sixth aspect, in any one of the first to fifth aspects, the nanoparticles have an insulating film provided on a surface, and the thickness of the insulating film is 20 nm or less. It is characterized by.

  A thermoelectric element according to a seventh aspect is characterized in that, in any one of the first to sixth aspects, the intermediate portion contains a solvent having a boiling point of 60 ° C. or more.

  A thermoelectric element according to an eighth aspect is characterized in that, in any one of the first to sixth aspects, the intermediate portion shows a state in which only the nanoparticles are filled.

  A power generation device according to a ninth invention is a power generation device including a thermoelectric element that converts heat energy into electric energy, wherein the thermoelectric element includes a first substrate having a first main surface, and a first main surface. A second substrate provided in the first direction and having a second main surface facing the first main surface; and a first electrode portion provided on the first main surface and separated from the second substrate. A second electrode unit provided on the second main surface, separated from the first substrate and the first electrode unit, and having a work function different from that of the first electrode unit; A metal support portion provided between the second substrate and the first electrode portion and the second electrode portion, the metal portion being provided between the first electrode portion and the second electrode portion; And an intermediate portion containing nanoparticles.

  An electronic device according to a tenth aspect is an electronic device including: a thermoelectric element that converts heat energy into electric energy; and an electronic component that can be driven by using the thermoelectric element as a power supply. An element, a first substrate having a first main surface, a second substrate having a second main surface provided to be spaced apart from the first main surface in a first direction, and having a second main surface facing the first main surface; A first electrode portion provided on a first main surface and separated from the second substrate; and a first electrode provided on the second main surface and separated from the first substrate and the first electrode portion. A second electrode unit having a work function different from that of the first unit, the first substrate, and a support provided between the second substrate and separated from the first electrode unit and the second electrode unit and including a metal; And an intermediate part provided between the first electrode part and the second electrode part and containing nanoparticles. And wherein the Rukoto.

  A method for manufacturing a thermoelectric element according to an eleventh aspect is a method for manufacturing a thermoelectric element that converts thermal energy into electric energy, wherein a first supporting portion including a metal is formed on a first main surface of a first substrate. Forming a second supporting portion including a metal on the second main surface of the second substrate, and forming a first electrode portion separated from the first supporting portion on the first main surface. An electrode part forming step of forming a second electrode part having a work function different from that of the first electrode part, the electrode part being separated from the second support part on the second main surface; An intermediate part forming step of forming an intermediate part containing nanoparticles, wherein the first support part and the second support part are arranged such that the first electrode part and the second electrode part are opposed to each other in a first direction. And a joining step of joining the supporting portion.

  A method for manufacturing a thermoelectric element according to a twelfth aspect, in the eleventh aspect, wherein a wiring layer forming step of forming a first wiring layer on a surface of the first substrate facing the first main surface; Forming a first through-hole penetrating through the first through hole in a first direction, and a first connection electrically connected to the first electrode portion and the first wiring layer via the first through-hole. A connection wiring forming step of forming a wiring, wherein the intermediate part forming step forms the intermediate part via the first through hole after the joining step.

  In a method for manufacturing a thermoelectric element according to a thirteenth aspect, in the twelfth aspect, the wiring layer forming step includes forming the first wiring layer and simultaneously forming the first wiring layer on a surface of the second substrate facing the second main surface. Forming a second wiring layer and forming the first through hole at the same time as forming the first through hole, and forming a second through hole penetrating the second substrate in the first direction; Forming the first connection wiring and simultaneously forming a second connection wiring electrically connected to the second electrode portion and the second wiring layer via the second through-hole at the same time as forming the first connection wiring. I do.

  According to the first to tenth aspects, the support portion includes a metal. For this reason, thickness variation of the support portion along the first direction can be suppressed as compared with a support portion using spherical nanobeads or the like. As a result, the gap between the electrodes can be formed with high accuracy, and the amount of electric energy generated can be stabilized.

  According to the first to tenth aspects of the invention, the support portion is provided separately from the first electrode portion and the second electrode portion. For this reason, it is possible to prevent a decrease in the area of each of the electrode portions facing each other due to the formation of the support portion. This makes it possible to improve the amount of electric energy generated irrespective of the shape of the support portion.

  In particular, according to the second aspect, the first connection wiring is electrically connected to the first electrode portion and the first wiring layer via the first through hole. For this reason, the first connection wiring can be connected to the first electrode portion inside the thermoelectric element. This makes it possible to suppress the deterioration of the first connection wiring connected to the first electrode unit.

  In particular, according to the second aspect, the first through hole penetrates the first substrate in the first direction. Therefore, the filling of the intermediate portion can be easily performed through the first through hole. This makes it possible to simplify the manufacturing process. In addition, when it becomes necessary to replace the intermediate part due to the use of the thermoelectric element, the intermediate part can be easily replaced.

  In particular, according to the third aspect, the second connection wiring is electrically connected to the second electrode portion and the second wiring layer via the second through hole. For this reason, the second connection wiring can be connected to the second electrode portion inside the thermoelectric element. Accordingly, it is possible to suppress the deterioration of each connection wiring connected to each electrode unit. Further, the second connection wiring can be formed in the same structure as the first connection wiring, so that the manufacturing process can be simplified.

  In particular, according to the fourth aspect, the lead wiring is in contact with the first electrode portion and the support portion. For this reason, it is possible to facilitate the electrical connection between the first electrode portion and the external wiring and the inspection of the thermoelectric element.

  In particular, according to the fifth aspect, the diameter of the nanoparticles is 1/10 or less of the gap between the electrodes. For this reason, an intermediate part containing nanoparticles can be easily formed between the first electrode part and the second electrode part. This makes it possible to improve workability when manufacturing the thermoelectric element.

  In particular, according to the sixth aspect, the nanoparticles have the insulating film provided on the surface. For this reason, the electrons generated from the first electrode unit can easily move between the nanoparticles by, for example, a tunnel effect or the like. This makes it possible to increase the amount of electric energy generated.

  In particular, according to the seventh aspect, the intermediate portion contains a solvent having a boiling point of 60 ° C. or higher. Therefore, even when the thermoelectric element is used in an environment at room temperature or higher, vaporization of the solvent can be suppressed. This makes it possible to suppress deterioration of the thermoelectric element due to evaporation of the solvent.

  In particular, according to the eighth aspect, the intermediate portion shows a state where only the nanoparticles are filled. For this reason, even when the thermoelectric element is used in a high-temperature environment, there is no need to consider vaporization of the solvent and the like. This makes it possible to suppress deterioration of the thermoelectric element in a high-temperature environment.

  According to the eleventh invention to the thirteenth invention, in the joining step, the first support portion containing a metal and the second support portion containing a metal are joined. For this reason, thickness variation of the support portion along the first direction can be suppressed as compared with a support portion using spherical nanobeads or the like. As a result, the gap between the electrodes can be formed with high accuracy, and the amount of electric energy generated can be stabilized.

  According to the eleventh invention to the thirteenth invention, in the electrode part forming step, the first electrode part separated from the first support part is formed, and the second electrode part separated from the second support part is formed. For this reason, when joining each support part, it can prevent that the area which each electrode part opposes decreases. This makes it possible to improve the amount of electric energy generated irrespective of the shape of each support.

  In particular, according to the twelfth aspect, in the connection wiring forming step, the first connection wiring electrically connected to the first electrode portion and the first wiring layer is formed through the first through hole. For this reason, the first connection wiring can be connected to the first electrode portion inside the thermoelectric element. This makes it possible to suppress the deterioration of the first connection wiring connected to the first electrode unit.

  In particular, according to the twelfth aspect, in the through-hole forming step, a first through-hole penetrating the first substrate in the first direction is formed. Therefore, the filling of the intermediate portion can be easily performed through the first through hole. This makes it possible to simplify the manufacturing process. In addition, when it becomes necessary to replace the intermediate part due to the use of the thermoelectric element, the intermediate part can be easily replaced.

  In particular, according to the thirteenth aspect, in the connection wiring forming step, the second connection wiring electrically connected to the second electrode portion and the second wiring layer is formed through the second through hole. For this reason, the second connection wiring can be connected to the second electrode portion inside the thermoelectric element. Accordingly, it is possible to suppress the deterioration of each connection wiring connected to each electrode unit. Further, the second connection wiring can be formed in the same structure as the first connection wiring, so that the manufacturing process can be simplified.

FIG. 1A is a schematic cross-sectional view illustrating an example of a power generator and a thermoelectric element according to the first embodiment, and FIG. 1B is a schematic plan view taken along line 1B-1B in FIG. FIG. FIG. 2A is a schematic cross-sectional view illustrating an example of the intermediate portion, and FIG. 2B is a schematic cross-sectional view illustrating another example of the intermediate portion. FIG. 3 is a flowchart illustrating an example of the method for manufacturing a thermoelectric element according to the first embodiment. 4A to 4C are schematic diagrams illustrating an example of a method for manufacturing a thermoelectric element according to the first embodiment. FIGS. 5A and 5B are schematic cross-sectional views illustrating an example of a method for manufacturing a thermoelectric element according to the first embodiment. FIG. 6A is a schematic cross-sectional view illustrating an example of a power generator and a thermoelectric element according to the second embodiment, and FIG. 6B is a schematic plan view taken along line 6B-6B in FIG. FIG. FIG. 7A is a schematic cross-sectional view illustrating an example of a power generator and a thermoelectric element according to the third embodiment, and FIG. 7B is a schematic plan view taken along line 7B-7B in FIG. FIG. FIG. 8 is a flowchart illustrating an example of a method for manufacturing a thermoelectric element according to the third embodiment. 9A to 9D are schematic cross-sectional views illustrating an example of a method for manufacturing a thermoelectric element according to the third embodiment. FIGS. 10A to 10C are schematic cross-sectional views illustrating an example of a method for manufacturing a thermoelectric element according to the third embodiment. FIG. 11A is a schematic cross-sectional view illustrating an example of a power generator and a thermoelectric element according to the fourth embodiment, and FIG. 11B is a schematic plan view taken along line 11B-11B in FIG. FIG. 11C is a schematic plan view illustrating a modified example of the thermoelectric element according to the fourth embodiment. FIG. 12A is a schematic cross-sectional view illustrating an example of a power generator and a thermoelectric element according to the fifth embodiment, and FIG. 12B is a schematic plan view taken along line 12B-12B in FIG. FIG. FIGS. 13A to 13D are schematic block diagrams illustrating an example of an electronic device including a thermoelectric element. FIGS. 13E to 13H illustrate a power generation device including a thermoelectric element. It is a schematic block diagram which shows the example of the electronic device provided.

  Hereinafter, an example of each of a thermoelectric element, a power generation device, an electronic device, and a method for manufacturing a thermoelectric element according to an embodiment of the present invention will be described with reference to the drawings. In each of the drawings, a height direction in which the electrode units are stacked is defined as a first direction Z, and a plane direction that intersects with the first direction Z, for example, one plane direction that is orthogonal to the first direction Z is defined as a second direction X. Another plane direction that intersects, for example, is orthogonal to each of the two directions X is defined as a third direction Y.

(1st Embodiment)
<Generator 100>
FIG. 1 is a schematic diagram illustrating an example of a power generator 100 and a thermoelectric element 1 according to the first embodiment. FIG. 1A is a schematic cross-sectional view illustrating an example of the power generation device 100 and the thermoelectric element 1 according to the first embodiment, and FIG. 1B is along a line 1B-1B in FIG. It is a schematic plan view.

  As shown in FIG. 1, the power generation device 100 includes a thermoelectric element 1, a first wiring 101, and a second wiring 102. The thermoelectric element 1 converts heat energy into electric energy. The power generation device 100 including the thermoelectric element 1 is mounted or installed on, for example, a heat source (not shown), and uses the heat energy of the heat source to generate the electric energy generated by the thermoelectric element 1 using the first wiring 101 and the first wiring 101. Output to the load R via the second wiring 102. One end of the load R is electrically connected to the first wiring 101, and the other end is electrically connected to the second wiring 102. The load R indicates, for example, an electrical device. The load R is driven using the power generator 100 as a main power supply or an auxiliary power supply.

  As a heat source of the thermoelectric element 1, for example, an electronic device or an electronic component such as a CPU (Central Processing Unit), a light emitting element such as an LED (Light Emitting Diode), an engine such as an automobile, and a production facility of a factory, a human body, and sunlight , And ambient temperature. For example, electronic devices, electronic components, light emitting elements, engines, production facilities, and the like are artificial heat sources. The human body, sunlight, environmental temperature, etc. are natural heat sources. The power generation device 100 including the thermoelectric element 1 can be provided inside a mobile device such as an IoT (Internet of Things) device or a wearable device, or a self-contained sensor terminal, and can be used as a substitute or auxiliary for a battery. Further, the power generation device 100 can be applied to a larger power generation device such as a solar power generation.

<Thermoelectric element 1>
The thermoelectric element 1 converts, for example, the heat energy generated by the artificial heat source or the heat energy of the natural heat source into electric energy to generate a current. The thermoelectric element 1 can be provided not only in the power generation device 100 but also in the mobile device, the self-standing sensor terminal, or the like. In this case, the thermoelectric element 1 itself serves as a substitute part or auxiliary part of the battery, such as the mobile device or the self-contained sensor terminal.

  The thermoelectric element 1 includes a substrate 11, a first electrode unit 12a, a second electrode unit 12b, a support unit 13, and an intermediate unit 14.

  The substrate 11 has a first substrate 11a and a second substrate 11b. The first substrate 11a has a first main surface 11af crossing the first direction Z. The second substrate 11b is provided apart from the first main surface 11af in the first direction Z. The second substrate 11b has a second main surface 11bf facing the first main surface 11af and intersecting with the first direction Z.

  The first electrode portion 12a is provided in contact with the first main surface 11af. The first electrode unit 12a is separated from the second substrate 11b. The second electrode portion 12b is provided in contact with the second main surface 11bf. The second electrode portion 12b faces the first substrate 11a and the first electrode portion 12a while being separated from each other. The second electrode unit 12b has a work function different from that of the first electrode unit 12a.

  The support 13 is provided between the first substrate 11a and the second substrate 11b. The support 13 is connected to the first main surface 11af and the second main surface 11bf. The support part 13 is separated from the first electrode part 12a and the second electrode part 12b. The support 13 includes metal.

  The intermediate part 14 is provided between the first electrode part 12a and the second electrode part 12b. The intermediate portion 14 includes nanoparticles, and may include, for example, a solvent in which the nanoparticles are dispersed.

  The thermoelectric element 1 includes a gap portion 14a. The gap portion 14a includes, for example, a space isolated from the outside. The gap portion 14a is partitioned by, for example, each of the first electrode portion 12a, the second electrode portion 12b, and the support portion 13. The intermediate part 14 is provided in the gap part 14a. The intermediate portion 14 is in contact with, for example, each of the first electrode portion 12a, the second electrode portion 12b, and the support portion 13 in the gap portion 14a. The inside of the thermoelectric element 1 indicates a portion including the gap portion 14a, and the outside of the thermoelectric device 1 indicates a portion separated from the gap portion 14a.

  Hereinafter, the configurations of the thermoelectric element 1 and the power generator 100 according to the first embodiment will be described in more detail.

<< First substrate 11a, second substrate 11b >>
The thickness of each of the first substrate 11a and the second substrate 11b along the first direction Z is, for example, not less than 10 μm and not more than 2 mm. As each material of the first substrate 11a and the second substrate 11b, a plate-shaped material having an insulating property can be selected. Examples of the insulating material include silicon, quartz, glass such as Pyrex (registered trademark), and insulating resin.

  The first substrate 11a and the second substrate 11b may be in the form of a thin plate or, for example, a flexible film. For example, when the first substrate 11a or the second substrate 11b is formed into a flexible film, for example, PET (polyethylene terephthalate), PC (polycarbonate), polyimide, or the like can be used.

  The first electrode part 12a, the second electrode part 12b, the support part 13, and the intermediate part 14 are sandwiched between the first substrate 11a and the second substrate 11b (inside the thermoelectric element 1). For this reason, by providing the first substrate 11a and the second substrate 11b, deterioration of the first electrode portion 12a, the second electrode portion 12b, the support portion 13, and the intermediate portion 14 due to external force or environmental change can be prevented. Deformation can also be suppressed. Therefore, the durability of the thermoelectric element 1 can be improved.

<< First electrode portion 12a, second electrode portion 12b >>
The first electrode portion 12a and the second electrode portion 12b are formed in a rectangular shape when viewed from the first direction Z, for example, as shown in FIG. The first electrode portion 12a is electrically connected to the first wiring 101 via, for example, a wiring inserted into the first substrate 11a (not shown) and the first terminal 111. The second electrode portion 12b is electrically connected to the second wiring 102 via, for example, a wiring inserted into the second substrate 11b (not shown) and the second terminal 112. Note that the first terminal 111 and the second terminal 112 may be omitted. The location of the wiring (not shown) is arbitrary.

  The first electrode unit 12a includes, for example, platinum (work function: about 5.65 eV), and the second electrode unit 12b includes, for example, tungsten (work function: about 4.55 eV). The electrode part having a large work function functions as an anode (collector electrode), and the electrode part having a small work function functions as a cathode (emitter electrode). In the thermoelectric element 1 according to the present embodiment, the first electrode portion 12a is described as an anode, and the second electrode portion 12b is described as a cathode. Note that the first electrode unit 12a may be used as a cathode and the second electrode unit 12b may be used as an anode.

  In the thermoelectric element 1, an electron emission phenomenon caused by an absolute temperature, which occurs between the first electrode portion 12a and the second electrode portion 12b having a work function difference, can be used. Therefore, the thermoelectric element 1 can convert heat energy into electric energy even when the temperature difference between the first electrode portion 12a and the second electrode portion 12b is small. Further, the thermoelectric element 1 converts heat energy into electric energy even when there is no temperature difference between the first electrode portion 12a and the second electrode portion 12b or when using a single heat source. Can be.

  The thickness of each of the first electrode portion 12a and the second electrode portion 12b along the first direction Z may be, for example, 1 nm or more and 1 mm or less, preferably 1 nm or more and 1 μm or less, more preferably 1 nm or more and 50 nm or less. The distance (gap between electrodes) along the first direction Z between the first electrode portion 12a and the second electrode portion 12b is, for example, a finite value of 10 μm or less. More preferably, it is 10 nm or more and 100 nm or less.

  By setting the thickness of each of the first electrode portion 12a and the second electrode portion 12b along the first direction Z and the gap between the electrodes within the above ranges, for example, the first direction Z of the thermoelectric element 1 can be set. Can be made thinner. This is effective, for example, when stacking a plurality of thermoelectric elements 1 along the first direction Z. In addition, it is possible to suppress variations in the planes of the electrode portions 12a and 12b, and to improve the stability of the amount of generated electric energy. In addition to the above, by setting the gap between the electrodes within the above range, electrons can be efficiently emitted, and electrons can be transferred from the second electrode portion 12b (cathode) to the first electrode portion 12a (anode). Can be moved efficiently.

  The material of the first electrode portion 12a and the material of the second electrode portion 12b can be selected from, for example, the following metals.

Platinum (Pt)
Tungsten (W)
Aluminum (Al)
Titanium (Ti)
Niobium (Nb)
Molybdenum (Mo)
Tantalum (Ta)
Rhenium (Re)
In the thermoelectric element 1, a work function difference may be generated between the first electrode portion 12a and the second electrode portion 12b. Therefore, it is possible to select a metal other than the above as a material of the first electrode portion 12a and the second electrode portion 12b. As a material of the first electrode portion 12a and the second electrode portion 12b, an alloy, an intermetallic compound, and a metal compound can be selected in addition to metal. The metal compound is a compound of a metal element and a nonmetal element. An example of such a metal compound is, for example, lanthanum hexaboride (LaB ₆ ).

  As the material of the first electrode portion 12a and the second electrode portion 12b, a non-metallic conductive material can be selected. Examples of the nonmetallic conductive material include silicon (Si: for example, p-type Si or n-type Si), and a carbon-based material such as graphene.

If a material other than a refractory metal is selected as the material of the first electrode portion 12a or the second electrode portion 12b, the advantages described below can be further obtained. In this specification, the high melting point metal is, for example, W, Nb, Mo, Ta, and Re. When, for example, Pt is used for the first electrode portion 12a (anode), it is preferable to use at least one of Al, Si, Ti, and LaB ₆ for the second electrode portion 12b (cathode).

  The melting points of Al and Ti are lower than the melting point of the high melting point metal. Therefore, Al and Ti can provide an advantage that they can be easily processed as compared with the above-mentioned refractory metals.

  Si is easier to form than the refractory metal. Therefore, from Si, the advantage that the productivity of the thermoelectric element 1 is further improved in addition to the ease of the processing described above can be further obtained.

The melting point of LaB ₆ is higher than the melting point of Nb. However, the melting point of LaB ₆ is lower than the melting points of W, Mo, Ta, and Re. LaB ₆ is easier to process than W, Mo, Ta, and Re. In addition, the work function of LaB ₆ is about 2.5~2.7eV. LaB ₆ easily emits electrons as compared with the high melting point metal. Therefore, from LaB ₆ , the advantage that the power generation efficiency of the thermoelectric element 1 can be further improved can be further obtained.

  In addition, each structure of the 1st electrode part 12a and the 2nd electrode part 12b may be made into the laminated structure containing the said material other than the single layer structure containing the said material.

<<< support part 13 >>>
The support 13 has a first support 13a and a second support 13b. The first support portion 13a and the second support portion 13b are formed in a hollow rectangular shape when viewed from the first direction Z, as shown in FIG. 1B, for example, and each of the electrode portions 12a, 12b and the intermediate portion 14 is formed. Enclose. The first support portion 13a and the second support portion 13b are provided in contact with each other along the first direction Z.

  The first support portion 13a is in contact with the first main surface 11af and is separated from the second main surface 11bf. The distance between the first support part 13a and the first electrode part 12a is larger than, for example, the inter-electrode gap. The second support portion 13b is in contact with the second main surface 11bf and is separated from the first main surface 11af. The distance between the second support part 13b and the second electrode part 12b is larger than, for example, the inter-electrode gap.

  The first support portion 13a has the same shape as the second support portion 13b, and may have, for example, a shape different from the second support portion 13b. Here, the “different shape” indicates that at least one of the thickness in the first direction Z, the width in the second direction X, and the length in the third direction Y is different. The first support portion 13a is provided on the same plane as the side surface or the end surface of the second support portion 13b on the side surface intersecting with the second direction X or the end surface intersecting with the third direction Y, for example, provided on the same plane. It is not necessary.

  As the material of the first support portion 13a and the second support portion 13b, a metal is used, for example, gold, nickel, tungsten, tantalum, molybdenum, lead, platinum, silver, or tin is used, and a laminate of gold and chromium is used. Or a laminate of gold and nickel. Since the supporting portions 13a and 13b include metal, the thickness of the supporting portions 13a and 13b when forming the supporting portions 13a and 13b can be easily controlled. For example, deformation due to pressing from the substrates 11a and 11b is suppressed, and Variations in thickness at the portions 13a and 13b can be prevented. In particular, when gold is used on the surfaces of the support portions 13a and 13b, the gold exposed on the surfaces of the support portions 13a and 13b can be easily bonded to each other using, for example, a thermocompression bonding method. Thereby, the gap between the electrodes can be formed with high accuracy.

<< intermediate part 14 >>
The intermediate part 14 is a part for moving electrons emitted from the second electrode part 12b (cathode) to the first electrode part 12a (anode), for example, as shown in FIG. FIG. 2A is a schematic cross-sectional view illustrating an example of the intermediate section 14. As shown in FIG. 2A, the intermediate portion 14 includes, for example, a plurality of nanoparticles 141 and a solvent 142. The plurality of nanoparticles 141 are dispersed in the solvent 142. The intermediate portion 14 is obtained, for example, by filling the solvent 142 in which the nanoparticles 141 are dispersed into the gap portion 14a.

  The nanoparticles 141 include, for example, a conductive material. The value of the work function of the nanoparticles 141 is, for example, between the value of the work function of the first electrode unit 12a and the value of the work function of the second electrode unit 12b. For example, the plurality of nanoparticles 141 include a work function in a range from 3.0 eV to 5.5 eV. Thereby, the electrons e emitted between the first electrode unit 12a and the second electrode unit 12b are transferred from the second electrode unit 12b (cathode) to the first electrode unit 12a (anode) via the nanoparticles 141, for example. ). This makes it possible to increase the amount of electric energy generated as compared with the case where the nanoparticles 141 are not present in the intermediate portion 14.

  As an example of the material of the nanoparticles 141, at least one of gold and silver can be selected. The intermediate portion 14 may include at least a part of the nanoparticles 141 having a work function between the work function of the first electrode portion 12a and the work function of the second electrode portion 12b. Therefore, as the material of the nanoparticles 141, a conductive material other than gold and silver can be selected.

  The particle diameter of the nanoparticles 141 is, for example, a finite value of 1/10 or less of the gap between the electrodes. Specifically, the particle diameter of the nanoparticles 141 is 2 nm or more and 10 nm or less. The nanoparticles 141 may have, for example, an average particle diameter (for example, D50) of 3 nm or more and 8 nm or less. The average particle size can be measured, for example, by using a particle size distribution measuring device. As the particle size distribution measuring device, for example, a particle size distribution measuring device using a laser diffraction scattering method (for example, Nanotrac WaveII-EX150 manufactured by MicrotracBEL) may be used. When the particle diameter of the nanoparticles 141 is, for example, 1/10 or less of the gap between the electrodes, the intermediate portion 14 including the nanoparticles 141 is easily formed in the gap portion 14a. Thereby, workability can be improved in the manufacturing process of the thermoelectric element 1.

  The nanoparticles 141 have, for example, an insulating film 141a on the surface. As an example of the material of the insulating film 141a, at least one of an insulating metal compound and an insulating organic compound can be selected. Examples of the insulating metal compound include, for example, silicon oxide and alumina. Examples of the insulating organic compound include alkanethiol (for example, dodecanethiol). The thickness of the insulating film 141a is a finite value of, for example, 20 nm or less. If such an insulating film 141a is provided on the surface of the nanoparticles 141, the electrons e can be, for example, between the second electrode portion 12b (cathode) and the nanoparticles 141, and between the nanoparticles 141 and the first electrode portions 12a. (Anode) can be moved using the tunnel effect. Therefore, for example, an improvement in the power generation efficiency of the thermoelectric element 1 can be expected.

  As the solvent 142, for example, a liquid having a boiling point of 60 ° C. or higher can be used. Therefore, in an environment at room temperature (for example, 15 ° C. to 35 ° C.) or more, even when the thermoelectric element 1 is used, vaporization of the solvent 142 can be suppressed. Thereby, the deterioration of the thermoelectric element 1 due to the vaporization of the solvent 142 can be suppressed. As an example of the liquid, at least one of an organic solvent and water can be selected. Examples of the organic solvent include methanol, ethanol, toluene, xylene, tetradecane, and alkanethiol. The solvent 142 is preferably a liquid having a high electric resistance value and an insulating property.

  FIG. 2B is a schematic cross-sectional view illustrating another example of the intermediate portion 14. As shown in FIG. 2B, the intermediate portion 14 may not include the solvent 142 but include only the nanoparticles 141.

  Since the intermediate portion 14 includes only the nanoparticles 141, for example, even when the thermoelectric element 1 is used in a high-temperature environment, there is no need to consider vaporization of the solvent 142. This makes it possible to suppress the deterioration of the thermoelectric element 1 in a high-temperature environment.

<< First Wiring 101 and Second Wiring 102 >>
The first wiring 101 is electrically connected to the first electrode unit 12a via a terminal 111 and a wiring inserted through the first substrate 11a (not shown). The second wiring 102 is electrically connected to the second electrode unit 12b via a terminal 112 and a wiring inserted into the second substrate 11b (not shown).

  A material having conductivity is used for each of the first wiring 101 and the second wiring 102. Examples of the material of each of the first wiring 101 and the second wiring 102 include nickel, copper, silver, gold, tungsten, and titanium. The structure of each of the first wiring 101 and the second wiring 102 can be arbitrarily designed as long as the current generated in the thermoelectric element 1 can be supplied to the load R.

<Operation of thermoelectric element 1>
When heat energy is given to the thermoelectric element 1, for example, electrons e are emitted from the second electrode portion 12b (cathode) toward the intermediate portion 14. The emitted electrons e move from the intermediate part 14 to the first electrode part 12a (anode) (see FIG. 2). In this case, the current flows from the first electrode unit 12a toward the second electrode unit 12b. In this way, heat energy is converted to electrical energy.

  The amount of the emitted electrons e depends not only on the thermal energy but also on the difference between the work function of the first electrode 12a (anode) and the work function of the second electrode 12b (cathode). Also, the amount of emitted electrons e tends to increase as the work function of the second electrode portion 12b is lower.

  The amount of the moving electrons e can be increased by, for example, increasing the work function difference between the first electrode unit 12a and the second electrode unit 12b or reducing the gap between the electrodes. For example, the amount of electric energy generated by the thermoelectric element 1 can be increased by considering at least one of increasing the work function difference and decreasing the gap between the electrodes.

<First Embodiment: Method for Manufacturing Thermoelectric Element 1>
Next, an example of a method for manufacturing the thermoelectric element 1 will be described. FIG. 3 is a flowchart illustrating an example of the method for manufacturing the thermoelectric element 1 according to the present embodiment. 4A to 5B are schematic diagrams illustrating an example of a method for manufacturing the thermoelectric element 1 according to the present embodiment.

<< Supporting part forming step S110 >>
First, as shown in FIG. 4A, for example, a first support 13a is formed on a first main surface 11af of a first substrate 11a, and a second support is formed on a second main surface 11bf of a second substrate 11b. 13b is formed (support part forming step S110). Each of the support portions 13a and 13b is formed in a hollow rectangular shape when viewed from the first direction Z, for example, as shown in FIG.

  In the support part forming step S110, in addition to forming each of the support parts 13a and 13b under a vacuum environment using, for example, a sputtering method or a vapor deposition method, a normal pressure environment using, for example, a screen printing method, an inkjet method, a spray printing method, or the like. Each support 13a, 13b may be formed below. Metal is used for each of the support portions 13a and 13b, and for example, gold is used. For example, when a laminate of gold and chromium or a laminate of gold and nickel is used as each of the support portions 13a and 13b, chromium or nickel is formed on each of the main surfaces 11af and 11bf, and gold is formed thereon. Is done. Thus, the gold is exposed on the upper surfaces of the support portions 13a and 13b.

<< electrode part forming step S120 >>
Next, as shown in FIG. 4B, for example, a first electrode portion 12a is formed on the first main surface 11af, and a second electrode portion 12b is formed on the second main surface 11bf (electrode portion forming step). S120). Each of the electrode portions 12a and 12b is formed in a quadrangular shape surrounded by the support portions 13a and 13b when viewed from the first direction Z, for example, as shown in FIG. Each of the electrode portions 12a and 12b is formed separately from each of the support portions 13a and 13b. Each of the electrode portions 12a and 12b is formed thinner than each of the support portions 13a and 13b.

  In the electrode part forming step S120, the electrode parts 12a and 12b may be formed by using, for example, a sputtering method or a vapor deposition method, or may be formed by using, for example, a screen printing method, an inkjet method, a spray printing method, or the like. For example, platinum is used for the first electrode portion 12a, aluminum is used for the second electrode portion 12b, and the above-described materials may be used.

<< intermediate part forming step S130 >>
Next, the intermediate portion 14 is formed (intermediate portion forming step S130). In the intermediate portion forming step S130, for example, as shown in FIG. 5A, the intermediate portion 14 is formed on the first electrode portion 12a and in a portion surrounded by the first support portion 13a. In the intermediate part forming step S130, the intermediate part 14 may be formed, for example, on the second electrode part 12b and in a portion surrounded by the second support part 13b.

  In the intermediate portion forming step S130, the intermediate portion 14 is formed on the first electrode portion 12a or the like by using, for example, an inkjet method. At this time, for example, the intermediate portion 14 may be formed thicker than the thickness of the first support portion 13a. Accordingly, in a bonding step S140 described later, the intermediate portion 14 is also formed in a portion surrounded by the second support portion 13b, and a gap between each of the electrode portions 12a and 12b and a gap surrounded by each of the support portions 13a and 13b. The part 14a can be filled with the intermediate part 14. In addition, as the intermediate part 14, for example, a solvent 142 in which the nanoparticles 141 are dispersed in advance is used.

<< Joining step S140 >>
Next, the first support portion 13a and the second support portion 13b are joined so that the first electrode portion 12a and the second electrode portion 12b face each other while being separated in the first direction Z (joining step S140). ). In the joining step S140, for example, as shown in FIG. 5B, the upper surface of the first support 13a and the upper surface of the second support 13b are joined. At this time, the electrode portions 12a and 12b, the support portions 13a and 13b, and the intermediate portion 14 are sandwiched between the substrates 11a and 11b to form a gap portion 14a.

  In the joining step S140, the support portions 13a and 13b are joined by bringing the upper surfaces of the support portions 13a and 13b into contact with each other and heating them by, for example, a thermocompression bonding method. In this case, the gap between the electrodes in each of the electrode portions 12a and 12b depends on the thickness of each of the support portions 13a and 13b and the thickness of each of the electrode portions 12a and 12b.

  Through the above-described steps, the thermoelectric element 1 according to the present embodiment is formed. By connecting the first terminal 111, the second terminal 112, the first wiring 101, the second wiring 102, and the like shown in FIG. 1A to the formed thermoelectric element 1, the power generation device according to the present embodiment is connected. 100 can be formed. Note that, for example, before performing the support part forming step S110, the electrode part forming step S120 may be performed.

  According to the present embodiment, the support 13 includes metal. For this reason, thickness variation of the support portion 13 along the first direction Z can be suppressed as compared with a support portion using spherical nanobeads or the like. As a result, the gap between the electrodes can be formed with high accuracy, and the amount of electric energy generated can be stabilized.

  Further, according to the present embodiment, the support portion 13 is provided separately from the first electrode portion 12a and the second electrode portion 12b. For this reason, it is possible to prevent a decrease in the area of each of the electrode portions 12a and 12b facing each other due to the formation of the support portion 13. This makes it possible to improve the amount of electric energy generated irrespective of the shape of the support portion 13.

  According to the present embodiment, the diameter of the nanoparticles 141 is 1/10 or less of the gap between the electrodes. Therefore, the intermediate portion 14 including the nanoparticles 141 can be easily formed between the first electrode portion 12a and the second electrode portion 12b. Thereby, when manufacturing the thermoelectric element 1, it is possible to improve the workability.

  Further, according to the present embodiment, the nanoparticles 141 have the insulating film 141a provided on the surface. Therefore, the electrons e generated from the first electrode portion 12a can easily move between the nanoparticles 141 due to, for example, a tunnel effect. This makes it possible to increase the amount of electric energy generated.

  Further, according to the present embodiment, the intermediate section 14 includes the solvent 142 having a boiling point of 60 ° C. or higher. Therefore, even when the thermoelectric element 1 is used in an environment at room temperature or higher, vaporization of the solvent 142 can be suppressed. Accordingly, it is possible to suppress the deterioration of the thermoelectric element 1 due to the vaporization of the solvent 142.

  Further, according to the present embodiment, the intermediate portion 14 shows a state where only the nanoparticles 141 are filled. Therefore, even when the thermoelectric element 1 is used in a high-temperature environment, there is no need to consider vaporization of the solvent 142 and the like. This makes it possible to suppress the deterioration of the thermoelectric element 1 in a high-temperature environment.

  Further, according to the present embodiment, in the joining step S140, the first support portion 13a containing a metal and the second support portion 13b containing a metal are joined. For this reason, thickness variation of the support portion 13 along the first direction Z can be suppressed as compared with a support portion using spherical nanobeads or the like. As a result, the gap between the electrodes can be formed with high accuracy, and the amount of electric energy generated can be stabilized.

  Further, according to the present embodiment, in the electrode part forming step S120, the first electrode part 12a separated from the first support part 13a is formed, and the second electrode part 12b separated from the second support part 13b is formed. For this reason, when joining each support part 13a, 13b, it can prevent that the area which each electrode part 12a, 12b opposes decreases. This makes it possible to improve the amount of electric energy generated irrespective of the shape of each of the support portions 13a and 13b.

(2nd Embodiment)
Next, a power generator 100 and a thermoelectric element 1 according to a second embodiment will be described. FIG. 6 is a schematic diagram illustrating an example of the power generator 100 and the thermoelectric element 1 according to the second embodiment. FIG. 6A is a schematic cross-sectional view illustrating an example of the power generation device 100 and the thermoelectric element 1 according to the second embodiment, and FIG. 6B is along the line 6B-6B in FIG. It is a schematic plan view.

  The difference between the above-described embodiment and the second embodiment lies in that a through-hole 15 and a sealing portion 18 are provided. The description of the same configuration as that described above is omitted.

<<< through hole 15 >>>
The through hole 15 penetrates the substrate 11 in the first direction Z, for example, as shown in FIG. The through-hole 15 may penetrate, for example, at least one of the first electrode portion 12a and the second electrode portion 12b in the first direction Z.

  The through-hole 15 has, for example, at least one of the first through-hole 15a and the second through-hole 15b, and is provided with one or more. The first through hole 15a penetrates the first substrate 11a in the first direction Z, and penetrates, for example, the first electrode portion 12a. The second through-hole 15b penetrates the second substrate 11b in the first direction Z, and penetrates, for example, the second electrode portion 12b.

  As shown in FIG. 6B, for example, the through-hole 15 may be formed in a circular shape when viewed from the first direction Z, or may be formed in an elliptical shape or a groove shape, for example. The through-hole 15 may be formed in a tapered shape narrowing from the outside to the inside of the thermoelectric element 1, or may be formed in, for example, an inverted tapered shape, a bowing shape, or a straight shape.

<< sealing part 18 >>
The sealing portion 18 covers the outside of the through hole 15 and is provided on the penetrated substrate 11. For example, at least a part of the sealing portion 18 may be provided in the through hole 15. The sealing portion 18 has at least one of the first sealing portion 18a and the second sealing portion 18b, and is provided according to the number of the through holes 15.

  As a material of the sealing portion 18, for example, an insulating resin is used. As an example of the insulating resin, a fluorine-based insulating resin can be given.

  By having the through hole 15 and the sealing portion 18, for example, in the above-described method for manufacturing the thermoelectric element 1, the intermediate portion forming step S130 can be performed after the bonding step S140. That is, after the joining step S140, the intermediate portion 14 is filled from at least one through hole 15, and suction (vacuum) is performed from the other through holes 15. Thereafter, a sealing portion 18 is formed to close the through hole 15. Thereby, the intermediate portion 14 can be easily formed with respect to the gap portion 14a, and for example, the manufacturing process can be simplified.

  According to this embodiment, as in the above-described embodiment, the support portion 13 includes metal. For this reason, thickness variation of the support portion 13 along the first direction Z can be suppressed as compared with a support portion using spherical nanobeads or the like. As a result, the gap between the electrodes can be formed with high accuracy, and the amount of electric energy generated can be stabilized.

  Further, according to the present embodiment, similarly to the above-described embodiment, the support portion 13 is provided separately from the first electrode portion 12a and the second electrode portion 12b. For this reason, it is possible to prevent a decrease in the area of each of the electrode portions 12a and 12b facing each other due to the formation of the support portion 13. This makes it possible to improve the amount of electric energy generated irrespective of the shape of the support portion 13.

  According to the present embodiment, the through-hole 15 penetrates the substrate 11 in the first direction Z. For this reason, the filling of the intermediate portion 14 through the through hole 15 can be easily performed. This makes it possible to simplify the manufacturing process. Further, when it is necessary to replace the intermediate portion 14 with the use of the thermoelectric element 1, the replacement of the intermediate portion 14 can be easily performed.

(Third embodiment)
Next, a power generator 100 and a thermoelectric element 1 according to a third embodiment will be described. FIG. 7 is a schematic diagram illustrating an example of the power generator 100 and the thermoelectric element 1 according to the third embodiment. FIG. 7A is a schematic cross-sectional view illustrating an example of the power generation device 100 and the thermoelectric element 1 according to the third embodiment, and FIG. 7B is along the line 7B-7B in FIG. It is a schematic plan view.

  The difference between the second embodiment described above and the third embodiment is that the second embodiment has a wiring layer 16 and a connection wiring 17. The description of the same configuration as that of the above-described embodiment will be omitted.

<< wiring layer 16 >>
The wiring layer 16 is provided on the outside (front surface) of the thermoelectric element 1 as shown in FIG. 7, for example. The wiring layer 16 is provided on a main surface of the substrate 11 opposite to the main surface on which the electrode portions 12a and 12b are provided.

  The wiring layer 16 has, for example, at least one of a first wiring layer 16a and a second wiring layer 16b. The first wiring layer 16a is provided on a surface of the first substrate 11a facing the first main surface 11af. That is, the first substrate 11a is sandwiched between the first wiring layer 16a and the first electrode unit 12a. The second wiring layer 16b is provided on a surface of the second substrate 11b facing the second main surface 11bf. That is, the second substrate 11b is sandwiched between the second wiring layer 16b and the second electrode unit 12b.

  The thickness of the wiring layer 16 along the first direction Z is, for example, not less than 100 nm and not more than 10 μm. As a material of the wiring layer 16, a conductive material is used, for example, gold, a laminate of gold and chromium, or a laminate of gold and nickel is used.

<< connection wiring 17 >>
The connection wiring 17 is electrically connected to each of the electrode portions 12 a and 12 b and the wiring layer 16 via the through hole 15. The connection wiring 17 is provided, for example, on the side surface of the through hole 15 and contacts the intermediate portion 14.

  The connection wiring 17 has, for example, at least one of a first connection wiring 17a and a second connection wiring 17b. The first connection wiring 17a is electrically connected to the first electrode portion 12a and the first wiring layer 16a via the first through hole 15a. For this reason, the connection portion between the first connection wiring 17a and the first electrode portion 12a is provided inside the thermoelectric element 1. The second connection wiring 17b is electrically connected to the second electrode portion 12b and the second wiring layer 16b via the second through hole 15b. For this reason, the connection portion between the second connection wiring 17b and the second electrode portion 12b is provided inside the thermoelectric element 1. The connection points are particularly easily deteriorated portions of the connection wirings 17a and 17b. By providing the connection points inside the thermoelectric element 1, the durability of the thermoelectric element 1 can be increased.

  The connection wiring 17 is formed, for example, on the side surface of the through hole 15 with a thickness of 100 nm or more and 10 μm or less. As a material of the connection wiring 17, a conductive material is used, for example, gold.

  For example, the first sealing portion 18a covers at least a part of the first through hole 15a, the first connection wiring 17a, and the first wiring layer 16a. Therefore, the connection portion between the first wiring layer 16a and the first connection wiring 17a can be covered by the first sealing portion 18a. For example, the second sealing portion 18b covers at least a part of the second through hole 15b, the second connection wiring 17b, and the second wiring layer 16b. For this reason, the connection portion between the second wiring layer 16b and the second connection wiring 17b can be covered by the second sealing portion 18b. The connection portion is a portion which is particularly easily deteriorated among the connection wirings 17a and 17b, and is provided on the outside of the thermoelectric element 1. Therefore, the connection portion is covered with the sealing portions 18a and 18b, so that the thermoelectric element is protected. The durability of the element 1 can be improved.

<Third embodiment: manufacturing method of thermoelectric element 1>
Next, an example of a method for manufacturing the thermoelectric element 1 will be described. FIG. 8 is a flowchart illustrating an example of a method for manufacturing the thermoelectric element 1 according to the present embodiment. FIGS. 9A to 10C are schematic cross-sectional views illustrating an example of a method for manufacturing the thermoelectric element 1 according to the present embodiment.

  As shown in FIG. 8, similarly to the above-described embodiment, a support part forming step S110 and an electrode part forming step S120 are performed (for example, FIG. 9A).

<< wiring layer forming step S150 >>
Next, the first wiring layer 16a is formed on the surface of the first substrate 11a facing the first main surface 11af (wiring layer forming step S150). In the wiring layer forming step S150, as shown in FIG. 9B, for example, simultaneously with forming the first wiring layer 16a, or before and after the formation, the second wiring layer 16b is formed on the surface facing the second main surface 11bf. It may be formed. Each of the wiring layers 16a and 16b may be formed in a square shape, for example, as viewed from the first direction Z, or may be formed in a shape excluding, for example, a portion where a through hole 15 described later is formed.

  In the wiring layer forming step S150, the wiring layers 16a and 16b may be formed using, for example, a sputtering method or a vapor deposition method, or may be formed using, for example, a screen printing method, an inkjet method, a spray printing method, or the like.

<< Protective film forming step S160 >>
Next, as shown in FIG. 9C, for example, a protective film 9 covering the first electrode portion 12a and the second electrode portion 12b may be formed (protective film forming step S160). The protective film 9 may be formed, for example, so as to cover at least the opposing surfaces of the electrode portions 12a and 12b described later and to expose a portion connected to the connection wiring 17 described later. Note that the protective film 9 may be formed so as to cover the support portions 13a and 13b. By forming the protective film 9, the surface of each of the electrode portions 12a and 12b can be protected in a later step. Thereby, a change in the work function of each of the electrode portions 12a and 12b can be prevented.

  In the protection film forming step S160, the protection film 9 is formed in a pattern by using, for example, a photolithography method. As the protective film 9, for example, a known photoresist is used.

<<< through hole forming step S170 >>>
Next, a first through hole 15a penetrating the first substrate 11a in the first direction Z is formed (through hole forming step S170). In the through-hole forming step S170, for example, as shown in FIG. 9D, the second through-hole 15b penetrating the second substrate 11b in the first direction Z at the same time as when the first through-hole 15a is formed or before and after the formation. May be formed. The through holes 15a and 15b are formed, for example, at positions where the electrode portions 12a and 12b and the wiring layers 16a and 16b are not formed on the substrates 11a and 11b. In the through hole forming step S170, at least a part of each of the electrode portions 12a and 12b and the wiring layers 16a and 16b may be removed to form the through holes 15a and 15b.

  In the through-hole forming step S170, the respective through-holes 15a and 15b may be formed using, for example, a sandblast method, or may be formed using, for example, an anisotropic etching method. The positions and the numbers of the through holes 15a and 15b are arbitrary.

<< connection wiring forming step S180 >>
Next, a first connection wiring 17a electrically connected to the first electrode portion 12a and the first wiring layer 16a is formed through the first through hole 15a (connection wiring formation step S180). In the connection wiring forming step S180, for example, when a plurality of first through holes 15a are formed, the first connection wiring 17a is formed on a side surface of at least one first through hole 15a. In the connection wiring forming step S180, as shown in FIG. 10A, for example, at the same time as the formation of the first connection wiring 17a, or before and after the formation of the first connection wiring 17a, the second electrode portion 12b and the second electrode portion 12b are formed via the second through hole 15b. A second connection wiring 17b electrically connected to the wiring layer 16b may be formed.

  In the connection wiring forming step S180, the connection wirings 17a and 17b are formed by using, for example, a sputtering method. For example, gold is used for the connection wirings 17a and 17b.

  When the protective film 9 is formed in the protective film forming step S160, for example, as shown in FIG. 10B, the protective film 9 is removed after the connection wiring forming step S180. When a plurality of electrode portions 12a, 12b and the like are formed using a single substrate 11, they are appropriately divided after the connection wiring forming step S180.

  Next, similarly to the above-described embodiment, a bonding step S140 and an intermediate portion forming step S130 are performed (for example, FIG. 10C). According to the present embodiment, the intermediate portion forming step S130 can be performed after the joining step S140. In the intermediate portion forming step S130, the intermediate portion 14 is formed between the first electrode portion 12a and the second electrode portion 12b via, for example, the first through hole 15a. In the intermediate portion forming step S130, nanoparticles and the like may be filled through the through holes 15, and nanoparticles and the like may be filled through the second through holes 15b instead of the first through holes 15a.

  Then, for example, the sealing portion 18 shown in FIG. 7A is formed, and the thermoelectric element 1 according to the present embodiment is formed. The power generation device 100 according to the present embodiment can be formed by connecting the terminals 111 and 112, the wirings 101 and 102, and the like to the formed thermoelectric element 1. Note that the sealing portion 18 that covers a part of the through hole 15 may be formed before performing the intermediate portion forming step S130.

  According to this embodiment, as in the above-described embodiment, the support portion 13 includes metal. For this reason, thickness variation of the support portion 13 along the first direction Z can be suppressed as compared with a support portion using spherical nanobeads or the like. As a result, the gap between the electrodes can be formed with high accuracy, and the amount of electric energy generated can be stabilized.

  Further, according to the present embodiment, similarly to the above-described embodiment, the support portion 13 is provided separately from the first electrode portion 12a and the second electrode portion 12b. For this reason, it is possible to prevent a decrease in the area of each of the electrode portions 12a and 12b facing each other due to the formation of the support portion 13. This makes it possible to improve the amount of electric energy generated irrespective of the shape of the support portion 13.

  Further, according to the present embodiment, the through-hole 15 penetrates the substrate 11 in the first direction Z, as in the above-described embodiment. For this reason, the filling of the intermediate portion 14 through the through hole 15 can be easily performed. This makes it possible to simplify the manufacturing process. Further, when it is necessary to replace the intermediate portion 14 with the use of the thermoelectric element 1, the replacement of the intermediate portion 14 can be easily performed.

  According to the present embodiment, the first connection wiring 17a is electrically connected to the first electrode unit 12a and the first wiring layer 16a via the first through hole 15a. Therefore, the first connection wiring 17a can be connected to the first electrode portion 12a inside the thermoelectric element 1. This makes it possible to suppress the deterioration of the first connection wiring 17a connected to the first electrode unit 12a.

  According to the present embodiment, the second connection wiring 17b is electrically connected to the second electrode portion 12b and the second wiring layer 16b via the second through hole 15b. Therefore, the second connection wiring 17b can be connected to the second electrode portion 12b inside the thermoelectric element 1. This makes it possible to suppress the deterioration of the connection wires 17a and 17b connected to the electrode portions 12a and 12b. Further, since the second connection wiring 17b can be formed with the same structure as the first connection wiring 17a, the manufacturing process can be simplified.

  Further, according to the present embodiment, as in the above-described embodiment, in the joining step S140, the first support portion 13a containing a metal and the second support portion 13b containing a metal are joined. For this reason, thickness variation of the support portion 13 along the first direction Z can be suppressed as compared with a support portion using spherical nanobeads or the like. As a result, the gap between the electrodes can be formed with high accuracy, and the amount of electric energy generated can be stabilized.

  Further, according to the present embodiment, similarly to the above-described embodiment, the electrode portion forming step S120 forms the first electrode portion 12a separated from the first support portion 13a, and forms the first electrode portion 12a separated from the second support portion 13b. Two electrode portions 12b are formed. For this reason, when joining each support part 13a, 13b, it can prevent that the area which each electrode part 12a, 12b opposes decreases. This makes it possible to improve the amount of electric energy generated irrespective of the shape of each of the support portions 13a and 13b.

  Further, according to the present embodiment, in the connection wiring forming step S180, the first connection wiring 17a electrically connected to the first electrode portion 12a and the first wiring layer 16a via the first through hole 15a is formed. I do. Therefore, the first connection wiring 17a can be connected to the first electrode portion 12a inside the thermoelectric element 1. This makes it possible to suppress the deterioration of the first connection wiring 17a connected to the first electrode unit 12a.

  Further, according to the present embodiment, in the through-hole forming step S170, the first through-hole 15a penetrating the first substrate 11a in the first direction Z is formed. For this reason, the filling of the intermediate portion 14 can be easily performed through the first through hole 15a. This makes it possible to simplify the manufacturing process. Further, when it is necessary to replace the intermediate portion 14 with the use of the thermoelectric element 1, the replacement of the intermediate portion 14 can be easily performed.

  According to the present embodiment, the connection wiring forming step S180 forms the second connection wiring 17b that is electrically connected to the second electrode portion 12b and the second wiring layer 16b via the second through hole 15b. I do. Therefore, the second connection wiring 17b can be connected to the second electrode portion 12b inside the thermoelectric element 1. This makes it possible to suppress the deterioration of the connection wires 17a and 17b connected to the electrode portions 12a and 12b. Further, since the second connection wiring 17b can be formed with the same structure as the first connection wiring 17a, the manufacturing process can be simplified.

  Further, according to the present embodiment, in the protective film forming step S160, the protective film 9 that covers the first electrode unit 12a and the second electrode unit 12b is formed. Therefore, the surface of each of the electrode portions 12a and 12b can be protected in a later step. Thus, it is possible to prevent a change in the work function of each of the electrode portions 12a and 12b, and it is possible to suppress a variation in the amount of generated electric energy.

(Fourth embodiment)
Next, a power generator 100 and a thermoelectric element 1 according to a fourth embodiment will be described. FIG. 11 is a schematic diagram illustrating an example of the power generator 100 and the thermoelectric element 1 according to the fourth embodiment. FIG. 11A is a schematic cross-sectional view illustrating an example of the power generation device 100 and the thermoelectric element 1 according to the fourth embodiment, and FIG. 11B is along a line 11B-11B in FIG. FIG. 11C is a schematic plan view illustrating a modified example of the thermoelectric element 1 according to the fourth embodiment.

  The difference between the first embodiment described above and the fourth embodiment is that the support portion 13 has a first support group 13f and a second support group 13s. The description of the same configuration as that of the above-described embodiment will be omitted.

  The support part 13 has a first support group 13f and a second support group 13s, for example, as shown in FIG. When viewed from the first direction Z, the first support group 13f and the second support group 13s are provided apart from each other with the electrode portions 12a and 12b interposed therebetween.

  The first support group 13f has a first support portion 13a and a second support portion 13b. The second support group 13s has a third support portion 13c and a fourth support portion 13d. The third support portion 13c is in contact with the first main surface 11af and is separated from the second main surface 11bf. The fourth support portion 13d is in contact with the second main surface 11bf and is separated from the first main surface 11af.

  The first support group 13f and the second support group 13s extend in the third direction Y, for example, as shown in FIG. At this time, the intermediate portion 14 is surrounded by the first support group 13f, the second support group 13s, and a pair of sealing portions 21 connected between the support groups 13f and 13s. In this case, for example, the intermediate portion forming step S130 can be performed after the above-described bonding step S140. That is, after the joining step S140, the thermoelectric element 1 can be formed by forming the intermediate portion 14 and forming the sealing portion 21 via a space not surrounded by the support groups 13f and 13s.

  By providing the support groups 13f and 13s described above, the material used for the support portion 13 can be reduced. This makes it possible to reduce the material cost. In addition, it is possible to reliably prevent the solvent 142 from evaporating due to the execution of the bonding step S140.

  In addition to the above, for example, as shown in FIG. 11C, the support groups 13f and 13s may extend in the second direction X and the third direction Y. That is, the support groups 13f and 13s are provided in an L shape when viewed from the first direction Z.

  By providing each of the support groups 13f and 13s in an L shape, it is possible to suppress a variation in the gap between the electrodes in the second direction X. Further, since the support groups 13f and 13s are separated from each other, the intermediate portion forming step S130 can be performed after the above-described bonding step S140.

  According to this embodiment, as in the above-described embodiment, the support portion 13 includes metal. For this reason, thickness variation of the support portion 13 along the first direction Z can be suppressed as compared with a support portion using spherical nanobeads or the like. As a result, the gap between the electrodes can be formed with high accuracy, and the amount of electric energy generated can be stabilized.

  Further, according to the present embodiment, similarly to the above-described embodiment, the support portion 13 is provided separately from the first electrode portion 12a and the second electrode portion 12b. For this reason, it is possible to prevent a decrease in the area of each of the electrode portions 12a and 12b facing each other due to the formation of the support portion 13. This makes it possible to improve the amount of electric energy generated irrespective of the shape of the support portion 13.

(Fifth embodiment)
Next, a power generator 100 and a thermoelectric element 1 according to a fifth embodiment will be described. FIG. 12 is a schematic diagram illustrating an example of the power generator 100 and the thermoelectric element 1 according to the fifth embodiment. FIG. 12A is a schematic cross-sectional view illustrating an example of the power generation device 100 and the thermoelectric element 1 according to the fifth embodiment, and FIG. 12B is along the line 12B-12B in FIG. It is a schematic plan view.

  The difference between the above-described fourth embodiment and the fifth embodiment is that the fourth embodiment has an extraction wiring 19. The description of the same configuration as that of the above-described embodiment will be omitted.

<<< Drawer wiring 19 >>
The lead wiring 19 is in contact with the first electrode part 12a and the support part 13, for example, as shown in FIG. At this time, by providing the first terminal 111 or the like that is in contact with the support portion 13 on the outside of the thermoelectric element 1, electrical connection between the first electrode portion 12a and the first wiring 101 or the like can be easily realized. Becomes

  As the material of the lead wiring 19, the same metal as that of the support portion 13 is used, for example, gold. For this reason, in the above-described bonding step S140, the lead wire 19 and the support portion 13 are brought into contact with each other and heated by using, for example, a thermocompression bonding method, whereby the bonding can be easily performed.

  The lead wiring 19 has, for example, at least one of a first lead wiring 19a and a second lead wiring 19b. The first extraction wiring 19a is electrically connected to the first electrode portion 12a and the first wiring 101. The second extraction wiring 19b is electrically connected to the second electrode portion 12b and the second wiring 102.

  The first extraction wiring 19a is provided, for example, on the first main surface 11af, and is in contact with the first electrode portion 12a and the first support group 13f. The first extraction wiring 19a may be provided integrally with the first support group 13f, for example. At this time, by providing the first terminal 111 and the like that are in contact with the first support group 13f on the outside of the thermoelectric element 1, electrical connection between the first electrode portion 12a and the first wiring 101 and the like can be easily realized. Becomes possible.

  For example, as shown in FIG. 12B, the first lead-out wiring 19a may extend from the inside (gap portion 14a) of the thermoelectric element 1 to the outside. At this time, by providing the first terminal 111 and the like that are in contact with the first extraction wiring 19a on the external side, electrical connection between the first electrode portion 12a and the first wiring 101 and the like can be easily realized. . For example, by providing the width of the first substrate 11a in the second direction X larger than the width of the second substrate 11b in the second direction X, the first terminal 111 and the like that are in contact with the first extraction wiring 19a on the external side are provided. It can be easily provided.

  The second extraction wiring 19b is provided, for example, on the second main surface 11bf, and is in contact with the second electrode portion 12b and the second support group 13s. The second extraction wiring 19b may be provided integrally with the second support group 13s, for example. At this time, by providing the second terminal 112 and the like in contact with the second support group 13s on the outside of the thermoelectric element 1, the electrical connection between the second electrode portion 12b and the second wiring 102 and the like can be easily realized. Becomes possible.

  The lead wiring 19 may have, for example, a third lead wiring 19c. The third extraction wiring 19c is provided on the first main surface 11af, and is in contact with the second support group 13s on the outside of the thermoelectric element 1. That is, the third extraction wiring 19c is electrically connected to the second electrode unit 12b via the second support group 13s and the second extraction wiring 19b. At this time, by providing the second terminal 112 and the like in contact with the third extraction wiring 19c, it is possible to easily realize the electrical connection between the second electrode portion 12b and the second wiring 102 and the like. Note that, for example, by providing the width of the first substrate 11a in the second direction X larger than the width of the second substrate 11b in the second direction X, the second terminals 112 and the like that are in contact with the third extraction wiring 19c are easily provided. It becomes possible. In addition, the connection portion between the third extraction wiring 19c and the first extraction wiring 19a can be provided on the same surface. This makes it possible to easily carry out the electrical connection between the lead wirings 19a and 19c and the external wiring, the inspection of the thermoelectric element 1, and the like.

  According to this embodiment, as in the above-described embodiment, the support portion 13 includes metal. For this reason, thickness variation of the support portion 13 along the first direction Z can be suppressed as compared with a support portion using spherical nanobeads or the like. As a result, the gap between the electrodes can be formed with high accuracy, and the amount of electric energy generated can be stabilized.

  Further, according to the present embodiment, similarly to the above-described embodiment, the support portion 13 is provided separately from the first electrode portion 12a and the second electrode portion 12b. For this reason, it is possible to prevent a decrease in the area of each of the electrode portions 12a and 12b facing each other due to the formation of the support portion 13. This makes it possible to improve the amount of electric energy generated irrespective of the shape of the support portion 13.

  Further, according to the present embodiment, the extraction wiring 19 is in contact with the first electrode portion 12a and the support portion 13. For this reason, it is possible to facilitate the electrical connection between the first electrode portion 12a and the external wiring and the inspection of the thermoelectric element 1.

(Sixth embodiment)
<Electronic equipment>
The thermoelectric element 1 and the power generation device 100 described above can be mounted on, for example, an electronic device. Hereinafter, some of the embodiments of the electronic device will be described.

  FIGS. 13A to 13D are schematic block diagrams illustrating an example of an electronic device 500 including the thermoelectric element 1. FIGS. 13E to 13H are schematic block diagrams illustrating an example of an electronic device 500 including the power generation device 100 including the thermoelectric element 1.

  As shown in FIG. 13A, an electronic device 500 (electric product) includes an electronic component 501 (electronic component), a main power supply 502, and an auxiliary power supply 503. Each of the electronic device 500 and the electronic component 501 is an electrical device (electrical device).

  The electronic component 501 is driven using the main power supply 502 as a power supply. Examples of the electronic component 501 include, for example, a CPU, a motor, a sensor terminal, and lighting. When the electronic component 501 is, for example, a CPU, the electronic device 500 includes an electronic device that can be controlled by a built-in master (CPU). When the electronic component 501 includes, for example, at least one of a motor, a sensor terminal, and lighting, the electronic device 500 includes an external master or an electronic device that can be controlled by a person.

  The main power supply 502 is, for example, a battery. The battery includes a rechargeable battery. A plus terminal (+) of main power supply 502 is electrically connected to a Vcc terminal (Vcc) of electronic component 501. The negative terminal (−) of the main power supply 502 is electrically connected to a GND terminal (GND) of the electronic component 501.

  The auxiliary power supply 503 is a thermoelectric element. The thermoelectric element includes at least one of the thermoelectric elements 1 described in each of the embodiments. The anode (for example, the first electrode portion 12a) of the thermoelectric element 1 connects the GND terminal (GND) of the electronic component 501, the minus terminal (-) of the main power supply 502, or the GND terminal (GND) and the minus terminal (-). It is electrically connected to the wiring to be connected. The cathode (for example, the second electrode portion 12b) of the thermoelectric element 1 connects the Vcc terminal (Vcc) of the electronic component 501, the plus terminal (+) of the main power supply 502, or the Vcc terminal (Vcc) and the plus terminal (+). It is electrically connected to the wiring to be connected. In the electronic device 500, the auxiliary power supply 503 is used together with, for example, the main power supply 502, and is used as a power supply for assisting the main power supply 502 or as a power supply for backing up the main power supply 502 when the capacity of the main power supply 502 is cut off. be able to. When the main power supply 502 is a rechargeable battery, the auxiliary power supply 503 can also be used as a power supply for charging the battery.

  As shown in FIG. 13B, the main power supply 502 may be the thermoelectric element 1. The anode of the thermoelectric element 1 is electrically connected to a GND terminal (GND) of the electronic component 501. The cathode of the thermoelectric element 1 is electrically connected to a Vcc terminal (Vcc) of the electronic component 501. An electronic device 500 shown in FIG. 13B includes a thermoelectric element 1 used as a main power supply 502 and an electronic component 501 that can be driven using the thermoelectric element 1. The thermoelectric element 1 is an independent power supply (for example, an off-grid power supply). Therefore, the electronic device 500 can be, for example, a self-standing type (stand-alone type). Moreover, the thermoelectric element 1 is an energy harvesting type (energy harvesting type). The electronic device 500 illustrated in FIG. 13B does not require battery replacement.

  As shown in FIG. 13C, the electronic component 501 may include the thermoelectric element 1. The anode of the thermoelectric element 1 is electrically connected to, for example, a GND wiring of a circuit board (not shown). The cathode of the thermoelectric element 1 is electrically connected to, for example, a Vcc wiring of a circuit board (not shown). In this case, the thermoelectric element 1 can be used as the auxiliary power supply 503 of the electronic component 501, for example.

  As shown in FIG. 13D, when the electronic component 501 includes the thermoelectric element 1, the thermoelectric element 1 can be used as, for example, the main power supply 502 of the electronic component 501.

  As shown in each of FIGS. 13E to 13H, the electronic device 500 may include the power generation device 100. The power generation device 100 includes the thermoelectric element 1 as a source of electric energy.

  The embodiment shown in FIG. 13D includes a thermoelectric element 1 in which an electronic component 501 is used as a main power supply 502. Similarly, the embodiment shown in FIG. 13H includes the power generation device 100 in which the electronic component 501 is used as a main power supply. In these embodiments, the electronic component 501 has an independent power supply. Therefore, the electronic component 501 can be, for example, a self-standing type. The self-contained electronic component 501 can be effectively used, for example, in an electronic device that includes a plurality of electronic components and in which at least one electronic component is separated from another electronic component. An example of such an electronic device 500 is a sensor. The sensor includes a sensor terminal (slave) and a controller (master) remote from the sensor terminal. Each of the sensor terminal and the controller is an electronic component 501. If the sensor terminal includes the thermoelectric element 1 or the power generator 100, the sensor terminal becomes a self-supporting sensor terminal, and there is no need to supply power by wire. Since the thermoelectric element 1 or the power generation device 100 is an energy harvesting type, there is no need to replace the battery. The sensor terminal can also be considered as one of the electronic devices 500. The sensor terminal considered to be the electronic device 500 further includes, for example, an IoT wireless tag in addition to the sensor terminal of the sensor.

  13 (a) to 13 (h), the electronic device 500 uses the thermoelectric element 1 for converting heat energy into electric energy and the thermoelectric element 1 as a power source. And an electronic component 501 that can be driven.

  The electronic device 500 may be an autonomous type (autonomous type) having an independent power supply. Examples of the autonomous electronic device include, for example, a robot. Further, the electronic component 501 including the thermoelectric element 1 or the power generation device 100 may be an autonomous type including an independent power supply. An example of the autonomous electronic component is, for example, a movable sensor terminal.

  While some embodiments of the present invention have been described above, these embodiments have been presented by way of example only, and are not intended to limit the scope of the inventions. For example, these embodiments can be implemented in appropriate combinations. The present invention can be embodied in various novel forms other than the above-described embodiments. Therefore, each of the above-described several embodiments can be variously omitted, replaced, or changed without departing from the gist of the present invention. Such new forms and modifications are included in the scope and gist of the present invention, and are also included in the scope of the invention described in the claims and the equivalents of the invention described in the claims.

1: thermoelectric element 11: substrate 11a: first substrate 11af: first main surface 11b: second substrate 11bf: second main surface 12a: first electrode portion 12b: second electrode portion 13: support portion 13a: first support Part 13b: Second support part 13c: Third support part 13d: Fourth support part 13f: First support group 13s: Second support group 14: Intermediate part 14a: Gap part 141: Nanoparticle 141a: Insulating film 142: Solvent 15: Through hole 15a: First through hole 15b: Second through hole 16: Wiring layer 16a: First wiring layer 16b: Second wiring layer 17: Connection wiring 17a: First connection wiring 17b: Second connection wiring 18: Sealing part 18a: First sealing part 18b: Second sealing part 19: Lead wiring 19a: First lead wiring 19b: Second lead wiring 19c: Third lead wiring 21: Seal part 100: Power generation device 101: First wiring 10 : Second wiring 111: first terminal 112: second terminal 500: electronic device 501: electronic component 502: main power supply 503: auxiliary power supply 9: protective film R: load S110: support section forming step S120: electrode section forming step S130 : Intermediate part forming step S140: Bonding step S150: Wiring layer forming step S160: Protective film forming step S170: Through hole forming step S180: Connection wiring forming step Z: First direction X: Second direction Y: Third direction e: Electronic

Claims (13)

A thermoelectric element that converts heat energy into electric energy,
A first substrate having a first main surface;
A second substrate provided in the first direction at a distance from the first main surface and having a second main surface facing the first main surface;
A first electrode unit provided on the first main surface and separated from the second substrate;
A second electrode unit provided on the second main surface, separated from the first substrate and the first electrode unit, and having a work function different from that of the first electrode unit;
A support portion provided between the first substrate and the second substrate, separated from the first electrode portion and the second electrode portion, and including a metal;
An intermediate portion provided between the first electrode portion and the second electrode portion, the intermediate portion including nanoparticles;
A thermoelectric element comprising: A first through hole passing through the first substrate in the first direction;
A first wiring layer provided on a surface of the first substrate facing the first main surface;
A first connection wiring electrically connected to the first electrode unit and the first wiring layer via the first through hole;
The thermoelectric element according to claim 1, further comprising: A second through hole passing through the second substrate in the first direction;
A second wiring layer provided on a surface of the second substrate facing the second main surface;
A second connection wiring electrically connected to the second electrode portion and the second wiring layer via the second through hole;
The thermoelectric element according to claim 2, further comprising: The thermoelectric element according to claim 1, further comprising a lead-out wiring in contact with the first electrode portion and the support portion. A gap between the electrodes between the first electrode portion and the second electrode portion is 10 μm or less;
The thermoelectric element according to any one of claims 1 to 4, wherein a diameter of the nanoparticle is 1/10 or less of the gap between the electrodes. The nanoparticles have an insulating film provided on the surface,
The thermoelectric element according to any one of claims 1 to 5, wherein the thickness of the insulating film is 20 nm or less. The thermoelectric element according to any one of claims 1 to 6, wherein the intermediate portion includes a solvent having a boiling point of 60 ° C or higher. The thermoelectric element according to claim 1, wherein the intermediate portion shows a state in which only the nanoparticles are filled. A power generator including a thermoelectric element that converts heat energy into electric energy,
The thermoelectric element,
A first substrate having a first main surface;
A second substrate provided in the first direction at a distance from the first main surface and having a second main surface facing the first main surface;
A first electrode unit provided on the first main surface and separated from the second substrate;
A second electrode unit provided on the second main surface, separated from the first substrate and the first electrode unit, and having a work function different from that of the first electrode unit;
A support portion provided between the first substrate and the second substrate, separated from the first electrode portion and the second electrode portion, and including a metal;
An intermediate portion provided between the first electrode portion and the second electrode portion, the intermediate portion including nanoparticles;
A power generator comprising: An electronic device that includes a thermoelectric element that converts heat energy into electric energy, and an electronic component that can be driven using the thermoelectric element as a power supply,
The thermoelectric element,
A first substrate having a first main surface;
A second substrate provided in the first direction at a distance from the first main surface and having a second main surface facing the first main surface;
A first electrode unit provided on the first main surface and separated from the second substrate;
A second electrode unit provided on the second main surface, separated from the first substrate and the first electrode unit, and having a work function different from that of the first electrode unit;
A support portion provided between the first substrate and the second substrate, separated from the first electrode portion and the second electrode portion, and including a metal;
An intermediate portion provided between the first electrode portion and the second electrode portion, the intermediate portion including nanoparticles;
An electronic device comprising: A method for manufacturing a thermoelectric element that converts heat energy into electric energy,
Forming a first supporting portion including a metal on the first main surface of the first substrate, and forming a second supporting portion including the metal on the second main surface of the second substrate;
A first electrode portion is formed on the first main surface to be separated from the first support portion, and is separated from the second support portion on the second main surface to have a work function different from that of the first electrode portion. An electrode part forming step of forming a second electrode part having:
Forming an intermediate portion including nanoparticles on the first electrode portion;
A joining step of joining the first support portion and the second support portion so that the first electrode portion and the second electrode portion face each other while being separated from each other in a first direction;
A method for manufacturing a thermoelectric element, comprising: A wiring layer forming step of forming a first wiring layer on a surface of the first substrate facing the first main surface;
A through-hole forming step of forming a first through-hole penetrating the first substrate in a first direction;
A step of forming a first connection wiring electrically connected to the first electrode portion and the first wiring layer via the first through hole;
Further comprising
The method for manufacturing a thermoelectric device according to claim 11, wherein, in the intermediate part forming step, the intermediate part is formed via the first through hole after the joining step. Forming the first wiring layer and, at the same time, forming a second wiring layer on a surface of the second substrate facing the second main surface,
In the through hole forming step, simultaneously with forming the first through hole, a second through hole that penetrates the second substrate in the first direction is formed.
In the connecting wiring forming step, at the same time as forming the first connecting wiring, forming a second connecting wiring electrically connected to the second electrode portion and the second wiring layer via the second through hole. The method for manufacturing a thermoelectric element according to claim 12, wherein

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