JP2020047356A - Wiring circuit board - Google Patents

Abstract

To provide a wiring circuit board that can suppress wiring from being exposed from a second insulating layer.SOLUTION: There is provided a wiring circuit board including: a conductive pattern 4 including a base insulating layer 3, wiring 42 and element terminals 43 on a suspension board 1 with a circuit; a cover insulating layer 5 covering the conductive pattern 4; and a first penetration portion 10 penetrating through the base insulating layer 3 and the cover insulating layer 5 in a thickness direction, the base insulating layer 3 including: a base thin-walled portion 38 and a base thick-walled portion 39 adjacent to the first penetration portion 10, and the wiring 42 including: a thick-walled corresponding portion 55 arranged on the base thick-walled portion 39; and a thin-walled corresponding portion 54 arranged on the base thin-walled portion 38, and the cover insulating layer 5 including: a cover thick-walled portion 58 and a cover thin-walled portion 59 arranged on a peripheral portion of the first penetration portion 10.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a printed circuit board.

  The printed circuit board is used for various industrial products such as electronic and electric devices. As such a wired circuit board, for example, a suspension board with a circuit on which a slider having a magnetic head and a piezoelectric element for displacing the slider are mounted is known.

  For example, a supporting substrate, a base insulating layer, a conductor pattern, and a cover insulating layer are provided in order from the lower side to the upper side, and the conductor pattern includes a wiring and a terminal for connecting to the piezoelectric element, A suspension board with a circuit in which terminals are exposed from a supporting substrate and a base insulating layer when viewed from below is proposed (for example, see Patent Document 1).

  In order to manufacture such a suspension board with circuit, first, a base insulating layer is formed on the upper surface of the support substrate by gradation exposure so as to have a predetermined pattern including a thick portion and a thin portion. After that, a conductor pattern is formed on the base insulating layer so that the terminal is located on the upper surface of the thin portion and the wiring is located on the upper surface of the thick portion. Next, a cover insulating layer is formed on the base insulating layer so as to cover the conductor pattern.

  Thereafter, a part of the support substrate is removed so that the thin portion is exposed, and then the thin portion is etched from below (the support substrate side) by wet etching, so that the terminal is viewed from below the support substrate and the base insulating layer. To expose. Thus, a suspension board with circuit is manufactured.

JP 2018-41520 A

  However, in the suspension board with circuit described in Patent Literature 1, the base insulating layer is formed in a predetermined pattern corresponding to the conductor pattern, so that the base insulating layer is not disposed in a portion that does not correspond to the conductor pattern. Therefore, a region where the base insulating layer is not provided may be formed around the terminal. Usually, the conductor pattern and the cover insulating layer are not arranged in the region where the base insulating layer is not arranged, and a through portion penetrating the suspension board with circuit in the thickness direction is formed.

  Therefore, in the manufacture of the suspension board with circuit described in Patent Document 1, when the penetrating portion is exposed from the support substrate together with the thin portion when a part of the support substrate is removed, an etching solution for etching the thin portion becomes a base. There is a case where intrusion enters from the insulating layer side to the cover insulating layer side through the through portion.

  Then, the etchant that has entered the cover insulating layer side may etch the cover insulating layer and expose the wiring located around the terminals.

  The present invention provides a printed circuit board that can prevent the wiring from being exposed from the second insulating layer.

  The present invention [1] provides a first insulating layer, a wiring disposed on one side of the first insulating layer in the thickness direction of the first insulating layer, and the first insulating layer viewed from the other side in the thickness direction. A conductor layer having terminals exposed from the layer, a second insulation layer disposed on one side of the first insulation layer in the thickness direction so as to cover the conductor layer, the first insulation layer and the second insulation layer. A penetrating portion penetrating a second insulating layer in the thickness direction, wherein the first insulating layer has a first thin portion adjacent to the penetrating portion, and a first thin portion which is thicker than the first thin portion. A thick portion corresponding to the first thick portion, the first thick portion being continuous with the first thick portion, wherein the wiring is arranged so as not to overlap the penetrating portion, and is arranged on one side of the first thick portion in the thickness direction. And a thin corresponding portion disposed on one side of the first thin portion in the thickness direction. Wherein the terminal does not overlap with the penetrating portion, or is arranged so as to overlap with the penetrating portion so that at least a part of the penetrating portion is opened, and the second insulating layer is arranged at a peripheral portion of the penetrating portion. And a second thin portion which is thinner than the second thick portion and is continuous with the second thick portion.

  According to such a configuration, since the second thick portion of the second insulating layer is located at the peripheral edge of the penetrating portion, the etchant for etching the first insulating layer passes through the first portion through the penetrating portion. Even if the etching liquid penetrates from the insulating layer side to the second insulating layer side, the etching solution etches the relatively thick second thick portion.

  Therefore, compared with the case where the etchant invading the second insulating layer side etches the relatively thin second thin portion, the thinner portion of the wiring arranged in the first thin portion is exposed. Can be suppressed. As a result, it is possible to suppress the wiring from being exposed from the second insulating layer.

  In the invention [2], the first thin portion may include an opening arranged at a distance from the through portion, and the terminal may be arranged so as not to overlap with the through portion. And the thin corresponding portion includes a first wiring closest to the through portion, wherein the first wiring includes a first end on the through portion side, and a first end. A second end portion opposite to the penetrating portion, and the second thick portion is disposed so as to overlap at least the first end portion when viewed from the thickness direction. 1].

  According to such a configuration, since the second thick portion is arranged so as to overlap at least the first end when viewed from the thickness direction, it is possible to reliably suppress the first wiring from being exposed. .

  According to a third aspect of the present invention, the terminal includes a second terminal arranged so as to overlap with the penetrating portion so that at least a part of the penetrating portion is opened, and the thin portion corresponds to the second terminal. The printed circuit board according to [1] or [2], including a second wiring to be connected, wherein the second thick portion is disposed so as to overlap with the second wiring when viewed from the thickness direction. including.

  According to such a configuration, since the second thick portion is disposed so as to overlap with the second wiring connected to the second terminal when viewed from the thickness direction, it is ensured that the second wiring is exposed. Can be suppressed.

  In the invention [4], the terminal may include a third terminal arranged so as to overlap with the through-hole so that at least a part of the through-hole is opened, and the thin-walled portion may be connected to the third terminal. A third wiring connected to the third terminal, wherein the second thick portion overlaps the third terminal when viewed from the thickness direction such that at least a part of the one surface in the thickness direction of the third terminal is exposed. And the printed circuit board according to any one of the above [1] to [3].

  According to such a configuration, since the second thick portion is disposed so as to overlap with the third terminal when viewed from the thickness direction, it is ensured that the third wiring connected to the third terminal is exposed. Can be suppressed.

  According to the wired circuit board of the present invention, it is possible to suppress the wiring from being exposed from the second insulating layer.

FIG. 1 is a plan view of a suspension board with circuit according to a first embodiment of the present invention. FIG. 2 shows a plan view of the metal support layer and the conductor pattern shown in FIG. FIG. 3 is a plan view showing a state where the second cover insulating layer is removed from the suspension board with circuit shown in FIG. FIG. 4 is a sectional view taken along the line AA of the suspension board with circuit shown in FIG. FIG. 5 is a sectional view taken along line BB of the suspension board with circuit shown in FIG. FIG. 6A is an explanatory diagram for explaining the method for manufacturing the suspension board with circuit shown in FIG. 1, and shows a step of forming a prebase layer corresponding to a peripheral portion of an element terminal on a metal support layer. FIG. 6B is an explanatory diagram for explaining the method for manufacturing the suspension board with circuit shown in FIG. 1, and shows a step of forming a prebase layer corresponding to a peripheral portion of an external terminal on a metal support layer. FIG. 7A shows a step of forming element terminals on the pre-base layer, following FIG. 6A. FIG. 7B shows a step of forming an external connection terminal on the pre-base layer, following FIG. 6B. FIG. 8A shows a step of forming the first cover insulating layer so as to cover the element terminals, following FIG. 7A. FIG. 8B shows a step of forming the first cover insulating layer so as to expose the external connection terminals, following FIG. 7B. FIG. 9A shows a step of forming a first dam section on the peripheral edge of the first penetration section, following FIG. 8A. FIG. 9B shows a step of forming the second weir portion at the peripheral portion of the second cover opening, following FIG. 8B. FIG. 10A shows a step of forming the first exposed portion, following FIG. 9A. FIG. 10B shows a step of forming the second exposed portion, following FIG. 9B. FIG. 11A shows a step of forming an etching resist so as to be in close contact with the inner peripheral surface of the first penetrating portion, following FIG. 10A. FIG. 11B shows a step of forming an etching resist so as to be in close contact with the inner peripheral surface of the second cover opening, following FIG. 10B. FIG. 12A is a sectional view of the suspension board with circuit according to the second embodiment of the present invention, taken along the line AA. FIG. 12B is a BB cross-sectional view of the suspension board with circuit according to the second embodiment of the present invention. FIG. 13A is a plan view showing the periphery of a slider connection terminal in a suspension board with circuit according to a third embodiment of the present invention. 13B is a cross-sectional view of the suspension board with circuit shown in FIG. 13A taken along the line CC. FIG. 14 is a sectional view of a suspension board with circuit according to a fourth embodiment of the present invention, taken along line CC. FIG. 15A is a plan view showing the periphery of an inspection terminal in a suspension board with circuit according to a fifth embodiment of the present invention. FIG. 15B is a cross-sectional view of the suspension board with circuit shown in FIG. 15A taken along the line DD. FIG. 16A is a plan view showing the periphery of an inspection terminal in a sixth embodiment of the suspension board with circuit of the present invention. FIG. 16B is a cross-sectional view of the suspension board with circuit shown in FIG. 16A taken along the line EE.

<First embodiment>
A suspension board with circuit 1 as a first embodiment of a wired circuit board of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the suspension board with circuit 1 has a substantially flat band shape extending in a predetermined direction.

  In FIG. 1, the thickness direction of the drawing is the thickness direction (first direction) of the suspension board with circuit 1, the near side of the drawing is one side of the thickness direction (one side of the first direction), and the far side of the drawing is the other side of the thickness direction. (The other side in the first direction).

  In FIG. 1, the vertical direction in the drawing is the longitudinal direction of the suspension board with circuit 1 (a second direction orthogonal to the first direction), and the upper side in the drawing is one side in the longitudinal direction (one side in the second direction) and the lower side in the drawing. The side is the other side in the longitudinal direction (the other side in the second direction).

  In FIG. 1, the left-right direction in the drawing is the width direction of the suspension board with circuit 1 (third direction orthogonal to the first direction and the second direction), and the right side in the drawing is one side in the width direction (one side in the third direction). ), The left side of the paper is the other side in the width direction (the other side in the third direction). Specifically, the directions follow the direction arrows described in each figure.

  Hereinafter, unless otherwise specified, the thickness direction of the suspension board with circuit 1 is simply referred to as the thickness direction, the longitudinal direction of the suspension board with circuit 1 is simply referred to as the longitudinal direction, and the width direction of the suspension board with circuit 1 is simply referred to as the width direction. And

  As shown in FIGS. 4 and 5, the suspension board with circuit 1 includes a metal support layer 2, a base insulating layer 3 as an example of a first insulating layer, a conductive pattern 4 as an example of a conductive layer, and a second conductive layer. A cover insulating layer 5 as an example of the insulating layer. More specifically, the suspension board with circuit 1 has a laminated structure, in which the metal support layer 2, the base insulating layer 3, the conductor pattern 4, and the cover insulating layer 5 are placed on one side from the other side in the thickness direction. It is provided in order toward the side.

1-1. Metal Support Layer As shown in FIG. 2, the metal support layer 2 is a metal support that supports the conductor pattern 4, and extends in the longitudinal direction. In FIG. 2, for convenience, the metal support layer 2 and the conductor pattern 4 are indicated by solid lines, the base insulating layer 3 is indicated by virtual lines, and the cover insulating layer 5 is omitted.

  The metal support layer 2 includes a gimbal part 20 and a main body part 21.

  The gimbal part 20 is located at one end of the metal support layer 2 in the longitudinal direction. The gimbal section 20 includes a frame section 22, a stage 23, and a plurality of stage connection sections 24.

  The frame portion 22 has a rectangular frame shape when viewed from the thickness direction, and defines the opening 22A. The frame 22 surrounds the stage 23.

  The stage 23 is arranged in the opening 22A at an interval with respect to the frame portion 22. The stage 23 has an H shape when viewed from the thickness direction. The stage 23 includes a first stage 26, a second stage 27, and a stage connecting unit 28.

  The first stage 26 is located at one end of the stage 23 in the longitudinal direction. The first stage 26 has a rectangular shape when viewed from the thickness direction.

  The second stage 27 is located at the other end of the stage 23 in the longitudinal direction. The second stage 27 is located at an interval from the first stage 26 on the other side in the longitudinal direction. The second stage 27 has a rectangular shape extending in the width direction when viewed from the thickness direction.

  The stage connecting portion 28 is located between the first stage 26 and the second stage 27 in the longitudinal direction. The stage connecting part 28 connects the widthwise central part of the other end in the longitudinal direction of the first stage 26 and the central part in the widthwise direction of one end in the longitudinal direction of the second stage 27.

  A plurality (two) of stage connecting portions 24 connect the second stage 27 and the frame portion 22. Each of the plurality of stage connection portions 24 has an L-shape when viewed from the thickness direction, and includes a first portion 24A and a second portion 24B.

  The first portion 24A extends from one end of the second stage 27 in the width direction to one side in the longitudinal direction. The first portion 24A is arranged at an interval in the width direction with respect to the stage connecting portion 28. The second portion 24B extends outwardly in the width direction continuously from one end of the first portion 24A in the longitudinal direction, and is connected to the frame portion 22.

  The other end of the first stage 26 in the longitudinal direction (more specifically, an imaginary line extending in the width direction from the other end of the first stage 26 in the width direction), the one end of the second stage 27 in the longitudinal direction, and the stage The width direction edge of the connecting portion 28 and the width direction inner edge of each first portion 24A (more specifically, the imaginary line obtained by extending the width direction inner edge of each first portion 24A in the longitudinal direction) One exposure part 20A is partitioned.

  The first exposed portion 20A has a rectangular shape extending in the longitudinal direction when viewed from the thickness direction, and penetrates the metal support layer 2 in the thickness direction. The two first exposed portions 20A are arranged at intervals in the width direction so as to sandwich the stage connecting portion 28.

  The main body 21 is a portion supported by a load beam (not shown), and is located on the other side in the longitudinal direction with respect to the frame 22. The main body 21 extends from the other end of the frame 22 in the longitudinal direction to the other longitudinal side. The main body 21 has a second exposed portion 21A.

  The second exposed portion 21A is located at the other end of the main body 21 in the longitudinal direction. The second exposed portion 21A is an opening penetrating the main body 21 in the thickness direction. The second exposed portion 21A has a rectangular shape extending in the longitudinal direction when viewed from the thickness direction.

  Examples of the material for the metal support layer 2 include a metal material such as stainless steel. The thickness of the metal support layer 2 is, for example, 10 μm or more, preferably 15 μm or more, for example, 35 μm or less, and preferably 25 μm or less.

1-2. Base Insulating Layer As shown in FIG. 4, the base insulating layer 3 is disposed on one side of the metal supporting layer 2 in the thickness direction, specifically, on one surface of the metal supporting layer 2 in the thickness direction. The base insulating layer 3 has a predetermined pattern corresponding to the conductor pattern 4. As shown in FIG. 2, the base insulating layer 3 includes a gimbal base 30 and a main body base 31.

  The gimbal base 30 is disposed so as to overlap the gimbal portion 20 when viewed from the thickness direction. The gimbal base 30 includes a first gimbal base 33, a second gimbal base 34, a gimbal base connecting portion 35, and a plurality of base limiters 32.

  The first gimbal base 33 has a rectangular shape when viewed from the thickness direction. The first gimbal base 33 is disposed on the first stage 26 except for the other end in the longitudinal direction. The other end in the longitudinal direction of the first gimbal base 33 is located on the other longitudinal side than the first stage 26. A central portion in the width direction of the other end in the longitudinal direction of the first gimbal base 33 is disposed on one end in the longitudinal direction of the stage connecting portion 28.

  The other end in the longitudinal direction of the first gimbal base 33 includes a plurality of first terminal arrangement portions 33A. The plurality (two) of the first terminal arrangement portions 33A are portions of the first gimbal base 33 that overlap with one longitudinal end of the plurality (two) of the first exposed portions 20A when viewed from the thickness direction. . The plurality (two) of the first terminal arrangement portions 33A are arranged at intervals in the width direction so as to sandwich one end in the longitudinal direction of the stage connecting portion 28 when viewed from the thickness direction.

  As shown in FIG. 4, each of the plurality of first terminal arrangement portions 33A has a first opening 33B as an example of an opening.

  The first opening 33B is arranged at a substantially central portion of the first terminal arrangement portion 33A. The first opening 33B penetrates the first terminal arrangement portion 33A in the thickness direction and communicates with the first exposed portion 20A. The inner peripheral surface of the first opening 33B intersects the thickness direction, and is inclined so as to widen from the other side in the thickness direction to one side.

  As shown in FIG. 2, the second gimbal base 34 is located at an interval on the other side in the longitudinal direction with respect to the first gimbal base 33. The second gimbal base 34 has a rectangular shape extending in the width direction when viewed from the thickness direction.

  The second gimbal base 34 includes a second stage 27, a second longitudinal portion of the stage connecting portion 28, a second longitudinal portion of each first portion 24A, and a longitudinal (A concave portion surrounded by the second stage 27, the plurality of stage connection portions 24, and the other longitudinal side portion of the frame portion 22), and the other longitudinal side portion of the first exposed portion 20A. And overlap at once.

  The second gimbal base 34 includes a plurality (two) of second terminal arrangement portions 34A. The plurality (two) of the second terminal arrangement portions 34A are portions of the second gimbal base 34 that overlap the other longitudinal side portions of the plurality (two) of the first exposed portions 20A when viewed from the thickness direction. . The plurality (two) of the second terminal arrangement portions 34A are arranged at intervals in the width direction so as to sandwich the other end in the longitudinal direction of the stage connecting portion 28 when viewed from the thickness direction.

  As shown in FIG. 4, each of the plurality of second terminal arrangement portions 34A is arranged at an interval on the other side in the longitudinal direction with respect to the first terminal arrangement portion 33A. Each of the plurality of second terminal arrangement portions 34A has a second opening 34B as an example of an opening.

  The second opening 34B is arranged at the other end in the longitudinal direction of the second terminal arrangement part 34A. The second opening 34B penetrates through the second terminal arrangement portion 34A in the thickness direction, and communicates with the first exposed portion 20A. The inner peripheral surface of the second opening 34B intersects with the thickness direction, and is inclined so as to widen from the other side in the thickness direction to one side.

  As shown in FIG. 2, the gimbal base connecting portion 35 is located between the first gimbal base 33 and the second gimbal base 34 in the longitudinal direction. The gimbal base connecting portion 35 connects a central portion in the width direction of the other edge in the longitudinal direction of the first gimbal base 33 and a central portion in the width direction of one edge in the longitudinal direction of the second gimbal base 34.

  The gimbal base connecting portion 35 is disposed at a longitudinal central portion of the stage connecting portion 28 except for both ends 35A in the width direction. Both end portions 35A in the width direction of the gimbal base connection portion 35 are located outside in the width direction from both end edges in the width direction of the stage connection portion 28, and the widths of a plurality (two) of the first exposed portions 20A as viewed in the thickness direction. Overlaps the inner edge in the direction.

  The other end in the longitudinal direction of each first terminal arrangement portion 33A, the one end in the longitudinal direction of each second terminal arrangement portion 34A, and the end in the width direction of the gimbal base connecting portion 35 are formed into first base through grooves 36. Partition. In the suspension board with circuit 1, two first base through-grooves 36 are arranged at intervals in the width direction so as to sandwich the gimbal base connecting portion 35.

  Each of the plurality of (two) first base through-grooves 36 has a U-shape that is open outward in the width direction when viewed from the thickness direction. Each first base through groove 36 penetrates through the first terminal arrangement portion 33A in the thickness direction, and communicates with the first exposed portion 20A.

  The plurality of base limiters 32 adjust the spring characteristics of the stage 23. Each of the plurality of base limiters 32 connects one end of the first gimbal base 33 in the width direction to one end of the frame 22 in the longitudinal direction.

  The main body base 31 is located on the other side in the longitudinal direction with respect to the second gimbal base 34, and is disposed on the main body 21. The main body base 31 extends continuously from the other end of the second gimbal base 34 in the longitudinal direction toward the other side in the longitudinal direction. The main body base 31 has a through hole 37.

  The through-hole 37 is located at the other end in the longitudinal direction of the main body base 31, and is arranged so as to overlap the second exposed portion 21A when viewed from the thickness direction. The through-hole 37 penetrates the main body base 31 in the thickness direction, and communicates with the second exposed portion 21A.

  More specifically, the through hole 37 has a rectangular shape slightly smaller than the second exposed portion 21A, and the entire through hole 37 is included in the second exposed portion 21A when viewed from the thickness direction. The periphery of the through-hole 37 is located inside the periphery of the second exposed portion 21A. Therefore, as shown in FIG. 5, the peripheral portion 37A of the through hole 37 in the main body base 31 is exposed through the second exposed portion 21A when viewed from the other side in the thickness direction. The peripheral portion 37A of the through hole 37 in the main body base 31 has a rectangular frame shape surrounding the through hole 37 when viewed from the thickness direction (see FIG. 2). The inner peripheral surface of the through-hole 37 intersects the thickness direction, and is inclined so as to widen from the other side to the one side in the thickness direction.

  As shown in FIGS. 4 and 5, the base insulating layer 3 has a base thin portion 38 as an example of a relatively thin first thin portion and an example of a relatively thick first thick portion. And a base thick portion 39.

  The base thin portion 38 is a portion of the insulating base layer 3 that is exposed from the first exposed portion 20A and the second exposed portion 21A when viewed from the other side in the thickness direction. Specifically, when viewed from the other side in the thickness direction, the base thin portion 38 includes an element terminal peripheral portion 38A exposed from the first exposed portion 20A, an external terminal peripheral portion 38B exposed from the second exposed portion 21A, including.

  In the present embodiment, two element terminal peripheral portions 38A are arranged at intervals in the width direction. The plurality (two) of the element terminal peripheral portions 38A are arranged at intervals in the width direction so as to sandwich the stage connecting portion 28 when viewed from the thickness direction (see FIG. 2).

  As shown in FIG. 4, each of the plurality of element terminal peripheral parts 38A includes a first terminal arrangement part 33A having a first opening 33B, a second terminal arrangement part 34A having a second opening 34B, and a gimbal base. The widthwise end portion 35A of the connecting portion 35 (see FIG. 2) and the first base through groove 36 are included. In each element terminal peripheral portion 38A, the first terminal arrangement portion 33A and the second terminal arrangement portion 34A are adjacent to the first base through groove 36 in the longitudinal direction, and the width direction end of the gimbal base connecting portion 35 is in the width direction. Is adjacent to the first base through groove 36 (see FIG. 2). The first opening 33 </ b> B is disposed on one side in the longitudinal direction with respect to the first base through groove 36, and the second opening 34 </ b> B is on the other side in the longitudinal direction with respect to the first base through groove 36. Are spaced apart from each other.

  As shown in FIG. 5, the external terminal peripheral portion 38B is disposed in the second exposed portion 21A when viewed from the thickness direction. The external terminal peripheral portion 38B includes a peripheral portion 37A of the through hole 37 in the main body base 31 and the through hole 37. In the external terminal peripheral portion 38B, the peripheral edge 37A of the through hole 37 of the main body base 31 is adjacent to the through hole 37 in both the longitudinal direction and the width direction.

  The thickness of the base thin portion 38 is, for example, 0.5 μm or more, preferably 1 μm or more, for example, 20 μm or less, preferably 10 μm or less.

  As shown in FIGS. 4 and 5, the base thick portion 39 is thicker than the base thin portion 38 and is continuous with the base thin portion 38. The base thick portion 39 is a portion of the base insulating layer 3 other than the base thin portion 38. Specifically, the base thick portion 39 includes a first gimbal base 33 excluding the first terminal arrangement portion 33A, a second gimbal base 34 excluding the second terminal arrangement portion 34A, and a gimbal excluding the width direction end 35A. It includes a base connecting portion 35 (see FIG. 2), a main body base 31 excluding a peripheral portion 37A of the through-hole 37, and a plurality of base limiters 32 (see FIG. 2).

  The thickness of the base thick portion 39 is, for example, 5 μm or more, preferably 8 μm or more, for example, 50 μm or less, and preferably 30 μm or less.

  Examples of the material of the base insulating layer 3 include a synthetic resin such as a polyimide resin.

1-3. Conductor Pattern As shown in FIG. 3, the conductor pattern 4 includes a plurality of slider connection terminals 40, a plurality of element terminals 43 as an example of a terminal and a first terminal, and a plurality of external terminals as an example of a terminal and a second terminal. A connection terminal 41 and a plurality of wirings 42 are provided.

  The plurality of slider connection terminals 40 are electrically connected to the slider via a bonding material (for example, solder) when a slider (not shown) including the magnetic head is mounted on the suspension board with circuit 1. .

  The plurality of slider connection terminals 40 are located so as to overlap the first stage 26 (see FIG. 2) when viewed from the thickness direction. Each of the plurality of slider connection terminals 40 has a rectangular shape extending in the longitudinal direction when viewed from the thickness direction. The plurality of slider connection terminals 40 are arranged at an interval in the width direction on one side in the thickness direction of the first gimbal base 33 (specifically, one surface in the thickness direction).

  As shown in FIG. 4, the plurality of element terminals 43 are electrically connected to the piezoelectric element 7 via a bonding material (for example, solder) when the piezoelectric element 7 is mounted on the suspension board with circuit 1. You. Two element terminals 43 are arranged on each element terminal peripheral portion 38A.

  The two element terminals 43 arranged on each element terminal peripheral portion 38A include a first element terminal 43A and a second element terminal 43B.

  43 A of 1st element terminals are arrange | positioned at 33 A of 1st terminal arrangement | positioning parts. The first element terminal 43A is filled in the first opening 33B, and is exposed from the base insulating layer 3 and the metal support layer 2 via the first exposed portion 20A when viewed from the other side in the thickness direction.

  The second element terminal 43B is arranged in the second terminal arrangement portion 34A, and is arranged at an interval on the other side in the longitudinal direction with respect to the first element terminal 43A. The second element terminal 43B is filled in the second opening 34B, and is exposed from the base insulating layer 3 and the metal support layer 2 via the first exposed portion 20A when viewed from the other side in the thickness direction. That is, the first element terminal 43A and the second element terminal 43B are arranged so as not to overlap the first base through groove 36, and are located on both longitudinal sides of the first base through groove 36.

  As shown in FIG. 2, the plurality of external connection terminals 41 are arranged so as to overlap with the through-hole 37 such that at least a part of the through-hole 37 is opened. Each of the plurality of external connection terminals 41 has a rectangular shape extending over the entire width of the through hole 37 when viewed from the thickness direction. The plurality of external connection terminals 41 are arranged in the through-hole 37 at intervals in the longitudinal direction.

  The plurality of external connection terminals 41 include a plurality of first external connection terminals 41A and a plurality of second external connection terminals 41B. The multiple (six) first external connection terminals 41A correspond to the multiple (six) slider connection terminals 40. The multiple (two) second external connection terminals 41B correspond to the multiple (two) second element terminals 43B. The plurality of second external connection terminals 41B are located at the center in the longitudinal direction of the plurality of external connection terminals 41, and the plurality of first external connection terminals 41A are on both sides in the longitudinal direction of the plurality of second external connection terminals 41B. Placed in

  As shown in FIG. 5, each of the plurality of external connection terminals 41 is exposed from the metal support layer 2 and the base insulating layer 3 via the second exposed portion 21A when viewed from the other side in the thickness direction.

  As shown in FIGS. 4 and 5, the plurality of wirings 42 are arranged on one side in the thickness direction of the base insulating layer 3, specifically, the base insulating layer so as not to overlap the first base through groove 36 and the through hole 37. 3 is arranged on one surface in the thickness direction.

  As shown in FIG. 3, the plurality of wirings 42 include a plurality of slider signal wirings 44, a plurality of ground wirings 46, and a plurality of element power supply wirings 45.

  Each of the plurality (six) of the slider signal wirings 44 electrically connects the slider connection terminal 40 to the first external connection terminal 41A.

  As shown in FIG. 5, each of the plurality of slider signal wirings 44 includes a first external terminal connection part 47 as an example of a second wiring, and a signal wiring main body 48.

  The two first external terminal connection portions 47 are arranged at intervals in the width direction so as to sandwich the first external connection terminal 41A. Each of the two first external terminal connection portions 47 overlaps with the second exposed portion 21A when viewed from the thickness direction, and on the peripheral portion 37A of the through hole 37 in the main body base 31, that is, the thickness of the external terminal peripheral portion 38B. It is arranged on one side in the direction. Each first external terminal connection part 47 is connected to the first external connection terminal 41A.

  Each first external terminal connection portion 47 extends on the main body base 31 so as to form a step with the first external connection terminal 41A continuously from the widthwise end of the first external connection terminal 41A. Specifically, the first external terminal connection portion 47 is continuous from the width direction end of the first external connection terminal 41 </ b> A, along the inner peripheral surface of the through hole 37, toward the first side in the thickness direction. After extending away from the terminal 41A, it extends in the width direction along one surface in the thickness direction of the peripheral portion 37A.

  As shown in FIG. 2, the signal wiring main body 48 electrically connects the slider connection terminal 40 and the first external terminal connection portion 47. The signal wiring main body 48 of the plurality of slider signal wirings 44 is divided into two wiring groups 48A. Each wiring group 48A includes a plurality (three) of signal wiring bodies 48 arranged to be parallel to each other.

  One of the two wiring groups 48A is routed on one side in the width direction on the gimbal base 30, and the other of the two wiring groups 48A is routed on the other side in the width direction on the gimbal base 30.

  More specifically, the wiring group 48A first makes a continuous U-turn on one end in the longitudinal direction of the slider connection terminal 40 on the first gimbal base 33, and passes over the end in the width direction (one end or the other end). It is drawn to be.

  Next, the wiring group 48A bends inward in the width direction (one side or the other side) and extends in the width direction, and then passes between the two first element terminals 43A in the width direction so as to pass between the two first element terminals 43A. And extend in the longitudinal direction.

  Next, the wiring group 48A passes through the gimbal base connecting portion 35, reaches one end in the longitudinal direction of the second gimbal base 34, and passes between the first base through groove 36 and the second element terminal 43B in the longitudinal direction. It is bent outward (one side or the other side) in the width direction and extends in the width direction so as to pass. Therefore, each wiring group 48A includes a terminal peripheral portion 48B arranged on one side in the thickness direction of the second terminal arrangement portion 34A between the first base through groove 36 and the second element terminal 43B.

  After that, the wiring group 48A is routed on the second gimbal base 34 and the main body base 31, and is connected to the first external terminal connection part 47.

  As shown in FIG. 4, each of the plurality (two) of ground wirings 46 grounds the first element terminal 43A to the first stage 26. Each of the plurality of ground wires 46 includes a first element terminal connection part 49 and a ground wire main body 50.

  The first element terminal connection portion 49 has a rectangular frame shape surrounding the first element terminal 43A when viewed from the thickness direction. The first element terminal connection part 49 is continuous with the entire periphery of the first element terminal 43A, and is formed on the first terminal arrangement part 33A, that is, the element terminal peripheral part 38A so as to form a step with the external connection terminal 41. Extends to one side in the thickness direction.

  More specifically, the first element terminal connecting portion 49 is continuous from the entire periphery of the first element terminal 43A, along the inner peripheral surface of the first opening 33B, toward the first side in the thickness direction, and the first element terminal 43A. After that, the first terminal arrangement portion 33A reaches one surface in the thickness direction of the first terminal arrangement portion 33A and extends along one surface in the thickness direction of the first terminal arrangement portion 33A.

  The ground wiring main body 50 extends on the first gimbal base 33 continuously from one end in the longitudinal direction of the first element terminal connection portion 49, and then penetrates the first gimbal base 33 and contacts the first stage 26 ( Ground).

  As shown in FIG. 2, each of the plurality (two) of element power supply wires 45 electrically connects the second element terminal 43B and the second external connection terminal 41B. Each of the plurality of element power supply wirings 45 includes a second element terminal connection part 51, a second external terminal connection part 52, and a power supply wiring main body 53.

  The second element terminal connection portion 51 has a rectangular frame shape surrounding the second element terminal 43B when viewed from the thickness direction. The second element terminal connection portion 51 is continuous with the entire periphery of the second element terminal 43B, and is arranged on the second terminal arrangement portion 34A, that is, on one side in the thickness direction of the element terminal peripheral portion 38A.

  More specifically, the second element terminal connecting portion 51 is continuous from the entire periphery of the second element terminal 43B, along the inner peripheral surface of the second opening 34B, and goes to one side in the thickness direction. After that, the second terminal arrangement portion 34A reaches one surface in the thickness direction of the second terminal arrangement portion 34A and extends along one surface in the thickness direction of the second terminal arrangement portion 34A.

  The second external terminal connection part 52 has the same configuration as the first external terminal connection part 47 except that it is connected to the second external connection terminal 41B instead of the first external connection terminal 41A (see FIG. 5). . Therefore, a detailed description of the second external terminal connection unit 52 is omitted.

  The power supply wiring main body 53 electrically connects the second element terminal connection portion 51 (see FIG. 4) and the second external terminal connection portion 52. The power supply wiring main body 53 is continuously routed on the second gimbal base 34 and the main body base 31 sequentially from the other end in the longitudinal direction of the second element terminal connection part 51 (see FIG. 4), and the second external connection is performed. The terminal 41 </ b> B is connected to a second external terminal connection part 52 which is continuous with the other end in the width direction.

  As shown in FIGS. 4 and 5, such a plurality of wirings 42 include a thin-wall corresponding portion 54 and a thick-wall corresponding portion 55.

  The thin corresponding portion 54 is a portion of the wiring 42 that is arranged on one side in the thickness direction of the base thin portion 38 (specifically, one surface in the thickness direction). The thin corresponding portion 54 includes a first thin corresponding portion 54A disposed on the element terminal peripheral portion 38A and a second thin corresponding portion 54B disposed on the external terminal peripheral portion 38B.

  As shown in FIG. 4, the first thin corresponding portion 54A includes a first element terminal connection portion 49, a second element terminal connection portion 51, and a terminal peripheral portion 48B of the wiring group 48A.

  In the following, of the plurality (three) of signal wiring bodies 48 included in the terminal peripheral portion 48B, the signal wiring body 48 closest to the first base through groove 36 is referred to as a first wiring as an example of a first wiring. Assume that the main body is 48C.

  The first wiring body 48C is not connected to the first element terminal 43A, and is located on the opposite side of the first element terminal 43A with respect to the first base through groove 36. The first wiring main body 48C is located at one longitudinal end of the plurality of signal wiring main bodies 48 in the terminal peripheral portion 48B. The first wiring main body 48C includes a first side surface 48D as an example of a first end portion, and a second side surface 48E as an example of a second end portion.

  The first side surface 48D is one end surface of the first wiring main body 48C in the longitudinal direction, and is a side surface on the first base through groove 36 side. The second side surface 48E is the other end surface of the first wiring main body 48C in the longitudinal direction, and is the side surface opposite to the first base through groove 36 with respect to the first side surface 48D.

  As shown in FIG. 5, the second thin corresponding portion 54B includes a plurality of first external terminal connection portions 47 and a plurality of second external terminal connection portions 52 (see FIG. 2).

  As shown in FIG. 3, the thick corresponding portion 55 is a portion of the wiring 42 that is arranged on one side in the thickness direction of the base thick portion 39 (specifically, one surface in the thickness direction). This is a part other than the corresponding part 54. More specifically, the thick-walled portion 55 includes a plurality of slider connection terminals 40, a plurality of signal wiring bodies 48 excluding the terminal peripheral portion 48B, a plurality of ground wiring bodies 50, and a plurality of power supply wiring bodies 53. Including.

  Examples of the material of the conductor pattern 4 include a conductor material such as copper. The thickness of the conductor pattern 4 is, for example, 1 μm or more, preferably 3 μm or more, for example, 20 μm or less, and preferably 12 μm or less.

1-4. Cover Insulating Layer As shown in FIG. 4, the cover insulating layer 5 covers one side in the thickness direction of the base insulating layer 3, specifically, It is arranged in the direction. In the present embodiment, the cover insulating layer 5 is configured by stacking a first cover insulating layer 8 and a second cover insulating layer 9.

  As shown in FIG. 3, the first insulating cover layer 8 covers the conductor pattern 4 so that the plurality of slider connection terminals 40 and the plurality of external connection terminals 41 are exposed. In FIG. 3, the second cover insulating layer 9 is omitted for convenience.

  The first cover insulating layer 8 has a first cover opening 8A, a plurality of first cover through grooves 8B, and a second cover opening 8C.

  The first cover opening 8A exposes one surface in the thickness direction of the plurality of slider connection terminals 40. The first cover opening 8A is disposed so as to overlap the first gimbal base 33 when viewed from the thickness direction.

  As shown in FIG. 4, each of the plurality of (two) first cover penetration grooves 8B penetrates the first cover insulating layer 8 in the thickness direction, and the plurality (two) of the first bases in the thickness direction. It communicates with the through groove 36. The first cover through groove 8B has the same shape and size as the first base through groove 36 when viewed from the thickness direction. The end face of the first cover insulating layer 8 facing the first cover through groove 8B is flush with the end face of the first terminal arrangement portion 33A facing the first base through groove 36.

  The first cover through groove 8B and the first base through groove 36 penetrate the base insulating layer 3 and the cover insulating layer 5 in the thickness direction, and constitute the first through portion 10 as an example of the through portion. . That is, the suspension board with circuit 1 includes the first through portion 10.

  As shown in FIG. 5, the second cover opening 8C exposes one surface in the thickness direction of the plurality of external connection terminals 41 (see FIG. 3). The second cover opening 8C penetrates the first cover insulating layer 8 in the thickness direction, and communicates with the through hole 37 in the thickness direction. The second cover opening 8C has the same shape and size as the through-hole 37 when viewed from the thickness direction.

  The second cover opening 8C and the through-hole 37 penetrate the insulating base layer 3 and the insulating cover layer 5 in the thickness direction, and constitute the second through-hole 11 as an example of the through-hole. That is, the suspension board with circuit 1 includes the second penetrating portion 11.

  Examples of the material of the first cover insulating layer 8 include a synthetic resin such as a polyimide resin. The thickness of the first insulating cover layer 8 (the dimension between one surface in the thickness direction of the conductor pattern 4 and one surface in the thickness direction of the first insulating cover layer 8) is, for example, 1 μm or more, preferably 2 μm or more, for example. It is 10 μm or less, preferably 8 μm or less.

  As shown in FIGS. 4 and 5, the second cover insulating layer 9 is disposed on one side in the thickness direction of the first cover insulating layer 8, specifically, on one surface in the thickness direction of the first cover insulating layer 8. Is done.

  As shown in FIG. 1, the second insulating cover layer 9 includes a plurality of first dams 90 and a second dam 91.

  The plurality (two) of the first dams 90 are arranged so as to overlap with the plurality (two) of the element terminal peripheral portions 38A when viewed from the thickness direction (see FIG. 2). A plurality (two) of the first dams 90 are arranged at intervals in the width direction. Each of the plurality of first dams 90 is located at the periphery of the first cover penetration groove 8B, that is, at the periphery of the first penetration part 10. Each first weir portion 90 has an L-shape when viewed from the thickness direction, and includes a weir main body 90A and a projecting portion 90B.

  The weir main body 90A is disposed along the peripheral edge on the other longitudinal side of the first cover through groove 8B, and has a linear rectangular shape extending in the width direction. As shown in FIG. 4, the weir main body 90A is disposed so as to overlap at least the first side surface 48D of the first wiring main body 48C when viewed from the thickness direction. In the present embodiment, the weir main body 90A overlaps the entire first wiring main body 48C when viewed from the thickness direction. One longitudinal end face of the weir main body 90A is flush with the end face of the first cover insulating layer 8 facing the first cover through groove 8B.

  As shown in FIG. 1, the protruding portion 90B is disposed along the widthwise inner peripheral edge of the first cover through groove 8B, and continues from the widthwise inner end of the weir main body 90A toward one side in the longitudinal direction. Protrude. The protruding portion 90B is disposed so as to overlap the width direction end 35A of the gimbal base connecting portion 35 when viewed from the thickness direction (see FIG. 2).

  The second weir portion 91 is disposed so as to overlap with the external terminal peripheral portion 38B when viewed from the thickness direction (see FIG. 2). The second weir portion 91 is located at the peripheral portion of the second cover opening 8C, that is, at the peripheral portion of the second penetration portion 11. Two second dams 91 are arranged at intervals in the width direction so as to sandwich the plurality of external connection terminals 41.

  Each of the two second dams 91 is arranged along the width direction edge of the second cover opening 8C, and has a straight rectangular shape extending in the longitudinal direction. As shown in FIG. 5, each of the two second dams 91 overlaps with the plurality of first external terminal connection portions 47 and the plurality of second external terminal connection portions 52 at a time when viewed from the thickness direction. Placed in The inner end face in the width direction of the second dam portion 91 is flush with the end face of the first cover insulating layer 8 facing the second cover opening 8C.

  In addition, as shown in FIG. 1, one end in the longitudinal direction of the two second dams 91 is connected by a connecting portion 99. The connecting portion 99 is arranged along one longitudinal edge of the second cover opening 8C.

  As a material of the second insulating cover layer 9, for example, the same synthetic resin as that of the first insulating cover layer 8 can be used. The thickness of the second insulating cover layer 9 (the dimension between one surface in the thickness direction of the first insulating cover layer 8 and one surface in the thickness direction of the second insulating cover layer 9) is, for example, 1 μm or more, preferably 2 μm or more. For example, it is 10 μm or less, preferably 8 μm or less.

  Such a cover insulating layer 5 includes a cover thick portion 58 as an example of a relatively thick second thick portion, and a cover thin portion 59 as an example of a relatively thin second thin portion. .

  In the present embodiment, the cover thick portion 58 is a portion of the cover insulating layer 5 where the first cover insulating layer 8 and the second cover insulating layer 9 are stacked. Specifically, the thick cover portion 58 includes a first thick cover portion 58A where the first dam portion 90 and the first cover insulating layer 8 overlap, and a second dam portion 91 and the first cover insulating layer 8. And an overlapping second cover thick portion 58B.

  The first cover thick portion 58A is located at the peripheral portion of the first penetrating portion 10 and is arranged so as to overlap at least the first side surface 48D of the first wiring main body 48C when viewed from the thickness direction.

  The second cover thick portion 58 </ b> B is located at a peripheral portion of the second penetrating portion 11, and is collectively formed with the plurality of first external terminal connection portions 47 and the plurality of second external terminal connection portions 52 when viewed from the thickness direction. They are arranged to overlap.

  The thickness (dimension between one surface in the thickness direction of the conductor pattern 4 and one surface in the thickness direction of the second cover insulating layer 9) of the cover thick portion 58 is, for example, 2 μm or more, preferably 4 μm or more. For example, it is 20 μm or less, preferably 16 μm or less.

  The cover thin portion 59 is thinner than the cover thick portion 58 and is continuous with the cover thick portion 58. The cover thin portion 59 is a portion of the cover insulating layer 5 other than the cover thick portion 58, that is, a portion composed of only the first cover insulating layer 8.

2. Manufacturing of Suspension Board with Circuit Next, a method of manufacturing the suspension board with circuit 1 will be described with reference to FIGS. 6A to 10B.

  In order to manufacture the suspension board with circuit 1, first, as shown in FIGS. 6A and 6B, the pre-base layer 100 is placed on one side in the thickness direction of the metal support layer 2 (specifically, on one side in the thickness direction). Is formed by gradation exposure.

  Specifically, a varnish containing a photosensitive synthetic resin is applied on the metal support layer 2 and dried to form a base film. Thereafter, the base film is subjected to gradation exposure so that portions having different thicknesses are formed, and then the base film is developed and, if necessary, heat-cured.

  As a result, a pre-base layer 100 having a relatively thick base forming portion 101 and a relatively thin removed portion 102 is formed.

  The base forming portion 101 is formed in a portion corresponding to the above-described base insulating layer 3. The removed portion 102 is formed in a portion corresponding to the first opening 33B, the second opening 34B, and the through-hole 37 described above.

  Next, as shown in FIGS. 7A and 7B, the conductor pattern 4 is placed on one side in the thickness direction of the pre-base layer (specifically, one surface in the thickness direction) by, for example, an additive method or a subtractive method. To form a pattern.

  Specifically, a plurality of element terminals 43 and a plurality of external connection terminals 41 are formed on the removed portion 102, and a plurality of slider connection terminals 40 (see FIG. 1) and a plurality of wirings 42 are formed on the base formation portion 101. .

  Next, as shown in FIGS. 8A and 8B, the first cover insulating layer 8 is coated on one side in the thickness direction of the pre-base layer 100 (specifically, one surface in the thickness direction) with the conductor pattern 4. Then, it is formed in the above-mentioned pattern.

  Specifically, a varnish containing a photosensitive synthetic resin is applied on the pre-base layer 100 and the conductor pattern 4 and dried to form a first cover film. Then, after exposing and developing the 1st cover film, it heat-hardens as needed.

  Next, as shown in FIGS. 9A and 9B, the second cover insulating layer 9 is formed on one side in the thickness direction of the first cover insulating layer 8 (specifically, one surface in the thickness direction) in the above-described pattern. Form.

  Specifically, a varnish containing a photosensitive synthetic resin is applied on the first cover insulating layer 8 and dried to form a second cover film. Then, after exposing and developing the second cover film, it is cured by heating as necessary.

  Next, as shown in FIGS. 10A and 10B, the metal support layer 2 is externally processed so as to have the above-described pattern, thereby forming a plurality of first exposed portions 20A and second exposed portions 21A.

  Thereby, as shown in FIG. 10A, the first etched portion 100A of the pre-base layer 100 corresponding to the element terminal peripheral portion 38A is exposed from the other side in the thickness direction via the first exposed portion 20A.

  The first etched portion 100A includes a removed portion 102 corresponding to the first opening 33B and the second opening 34B, a base forming portion 101 corresponding to the first terminal disposing portion 33A and the second terminal disposing portion 34A, and a first And a penetrating portion 10.

  Also, as shown in FIG. 10B, the second etched portion 100B of the pre-base layer 100 corresponding to the external terminal peripheral portion 38B is exposed from the other side in the thickness direction via the second exposed portion 21A.

  The second etched portion 100B includes a removed portion 102 corresponding to the through hole 37 and a base forming portion 101 corresponding to the peripheral portion 37A of the through hole 37 in the main body base 31.

  Next, as shown in FIGS. 11A and 11B, an etching resist 105 is formed so as to cover portions other than the first etching portion 100A and the second etching portion 100B.

  Specifically, the etching resist 105 includes one surface in the thickness direction of the cover insulating layer 5, one surface in the thickness direction of the pre-base layer 100 exposed from the cover insulating layer 5, and the metal support layer exposed from the pre-base layer 100 and the cover insulating layer 5. 2, one surface and side surfaces in the thickness direction of the conductor pattern 4 (the slider connection terminal 40 and the external connection terminal 41) exposed from the cover insulating layer 5, and the inner peripheral surface (first surface) of the first through portion 10. The end surface of the first insulating cover layer 8 facing the cover through groove 8B and the end surface of the first terminal arrangement portion 33A facing the first base through groove 36, and the inner peripheral surface of the second cover opening 8C (the second cover opening 8C). (The end face of the first insulating cover layer 8).

  Next, the first etched portion 100A and the second etched portion 100B are etched from the other side in the thickness direction by, for example, wet etching.

  As a result, as shown in FIG. 11A, in the first etched portion 100A, the removed portion 102 is removed to expose the element terminal 43, and the base forming portion 101 is thinned, so that the first terminal arrangement portion 33A and the first A two-terminal arrangement portion 34A is formed (see FIG. 4).

  Further, as shown in FIG. 11B, in the second etched portion 100B, the removed portion 102 is removed, the through hole 37 is formed, the external connection terminal 41 is exposed, and the base forming portion 101 is thinned, A peripheral portion 37A of the through hole 37 is formed (see FIG. 5).

  Thus, the suspension board with circuit 1 is manufactured.

  However, in the above-described etching step, when the etching solution enters the interface between the etching resist 105 and the inner peripheral surface of the first through portion 10 or after the through hole 37 is formed, the etching solution is There is a case where it enters the interface with the two cover openings 8C.

  Then, the infiltrating etchant may flow from the base insulating layer 3 side to the cover insulating layer 5 side, etch the cover insulating layer 5, and expose the wiring 42 located around the terminal.

  On the other hand, as shown in FIGS. 4 and 5, in the suspension board with circuit 1, the first cover thick portion 58 </ b> A is located at the peripheral portion of the first penetrating portion 10, and the second cover thick portion 58 </ b> B It is located at the periphery of the two through-holes 11.

  For this reason, as shown in FIGS. 11A and 11B, when the pre-base layer 100 is etched to expose the element terminals 43 and the external connection terminals 41 from the other side in the thickness direction, the etching solution flows through the penetrating portion (the first penetrating portion). The relatively thick cover thick portion 58 is etched even if it goes around from the base insulating layer 3 side to the cover insulating layer 5 side through 10 and / or the second penetration portion 11).

  Therefore, as shown in FIGS. 4 and 5, even if the wiring 42 is routed in the vicinity of the terminal, it is possible to prevent the thin corresponding portion 54 of the wiring 42 arranged on the base thin portion 38 from being exposed. it can. As a result, it is possible to prevent the wiring 42 from being exposed from the insulating cover layer 5 while improving the degree of freedom in the arrangement of the wiring 42.

  In addition, since the exposure of the wiring 42 from the cover insulating layer 5 can be suppressed, relatively strict etching conditions can be set, and the element terminal 43 and the external connection terminal 41 can be stably exposed.

  As shown in FIG. 4, the element terminal peripheral portion 38A includes a first opening 33B that is arranged at an interval with respect to the first through portion 10 (the first base through groove 36), and the element terminal 43 includes: It includes a first element terminal 43A filled in the first opening 33B. And the 1st cover thick part 58A is arrange | positioned so that it may overlap with the 1st side surface 48D of the 1st wiring main body 48C, when seen from the thickness direction. Therefore, the first wiring main body 48C closest to the first penetrating portion 10 in the terminal peripheral portion 48B of the wiring group 48A can be reliably prevented from being exposed.

  As shown in FIG. 5, the plurality of external connection terminals 41 are arranged so as to overlap with the second through-hole 11 (through-hole 37) so that at least a part of the second through-hole 11 is opened, and the second cover The thick portion 58 </ b> B is disposed so as to collectively overlap the first external terminal connection portion 47 and the second external terminal connection portion 52 connected to the plurality of external connection terminals 41 when viewed from the thickness direction. Therefore, it is possible to reliably suppress the first external terminal connection portion 47 and the second external terminal connection portion 52 from being exposed.

<Second embodiment>
Next, a second embodiment of the present invention will be described with reference to FIGS. 12A and 12B. In the second embodiment, the same members as those in the above-described first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  In the first embodiment, as shown in FIGS. 4 and 5, the cover insulating layer 5 is formed from two different insulating layers (a first cover insulating layer 8 and a second cover insulating layer 9). The present invention is not limited to this.

  In the second embodiment, as shown in FIG. 12A and FIG. 12B, the cover insulating layer 5 is formed of one insulating layer.

  In order to form such a cover insulating layer 5, first, similarly to the first embodiment, a laminate in which the conductor pattern 4 shown in FIGS. 7A and 7B is formed on the pre-base layer 100 is prepared. Next, a varnish containing a photosensitive synthetic resin is applied on the pre-base layer 100 and the conductor pattern 4 and dried to form a cover film. Thereafter, the cover film is subjected to gradation exposure so that the cover thick portion 58 and the cover thin portion 59 are formed, and then the cover film is developed and, if necessary, heated and cured. Thereby, the cover insulating layer 5 integrally including the cover thick portion 58 and the cover thin portion 59 is formed.

  According to the second embodiment, the same operation and effect as those of the first embodiment can be obtained.

<Third embodiment to sixth embodiment>
Next, third to sixth embodiments of the present invention will be described with reference to FIGS. 13A to 16B. In the third to sixth embodiments, the same members as those in the above-described first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  In the above-described first and second embodiments, as an example of the terminal, the element terminal 43 and the external connection terminal 41 can be cited. However, the terminal of the present invention is formed from the base insulating layer 3 when viewed from the other side in the thickness direction. There is no particular limitation as long as it is exposed.

  As the terminals of the present invention, for example, a slider connection terminal 70 (an example of a third terminal), a light emitting element connection terminal 70A (an example of a third terminal), an inspection terminal 71 (an example of a first terminal), and a jig contact portion 72 (an example of a first terminal) An example of two terminals).

  In the third embodiment, as shown in FIGS. 13A and 13B, the slider connection terminal 70 is configured as an example of a terminal. In this case, the first stage 26 has a third exposed portion 26A penetrating the first stage 26 in the thickness direction.

  The first gimbal base 33 has a second through hole 33C. 33 C of 2nd through-holes are arrange | positioned so that it may overlap with 26 A of 3rd exposure parts, when seen from the thickness direction. The second through-hole 33C penetrates the first gimbal base 33 in the thickness direction, and communicates with the second through-hole 33C.

  More specifically, one end edge of the second through hole 33C in the longitudinal direction is located on the other longitudinal side than one end edge of the third exposed portion 26A in the longitudinal direction. Therefore, the one peripheral edge 33D in the longitudinal direction of the second through hole 33C in the first gimbal base 33 is exposed from the first stage 26 via the third exposed portion 26A when viewed from the other side in the thickness direction. One peripheral edge 33D in the longitudinal direction of the second through hole 33C is included in the base thin portion 38.

  The first gimbal base 33, which is continuous with the one peripheral edge 33 </ b> D in the longitudinal direction of the second through-hole 33 </ b> C, is disposed on the metal support layer 2 and is included in the base thick portion 39.

  The conductor pattern 4 includes a plurality of slider connection terminals 70 and a plurality of slider signal wirings 73.

  When the slider 6 is mounted on the suspension board with circuit 1, a bonding material (for example, solder) is disposed on one surface in the thickness direction of the slider connection terminal 70, and the slider connection terminal 70 is electrically connected to the slider 6. Connected.

  The plurality of slider connection terminals 70 are arranged so as to overlap with the second through-hole 33C so that at least a part of the second through-hole 33C is opened. Each of the plurality of slider connection terminals 70 is adjacent to one peripheral edge 33D of the second through hole 33C, and protrudes from one peripheral edge 33D of the second through hole 33C toward the other longitudinal side. The plurality of slider connection terminals 70 are arranged at intervals in the width direction in the second through-hole 33C. The plurality of slider connection terminals 70 are exposed from the metal support layer 2 and the base insulating layer 3 via the third exposed portions 26A when viewed from the other side in the thickness direction.

  Each of the plurality of slider signal wires 73 electrically connects the slider connection terminal 70 to the first external connection terminal 41A (see FIG. 5). Each of the plurality of slider signal wirings 73 includes a slider terminal connection part 74 as an example of a third wiring, a signal wiring main body 83, and a plurality of first external terminal connection parts 47 (see FIG. 5).

  The slider terminal connection part 74 is connected to the slider connection terminal 70. The slider terminal connection portion 74 is continuous with one end in the longitudinal direction of the slider connection terminal 70, and forms a step with the slider connection terminal 70 so as to form a step with the slider connection terminal 70. The portion 33D extends to one side in the thickness direction of the base thin portion 38. Such a slider terminal connection portion 74 is included in the thin corresponding portion 54.

  The signal wiring main body 83 electrically connects the slider terminal connection part 74 and the first external terminal connection part 47 (see FIG. 5). The signal wiring main body 83 is routed on the base thick portion 39. Such a signal wiring main body 83 is included in the thick corresponding portion 55.

  The first cover insulating layer 8 has a first cover opening 8A. The first cover opening 8A exposes at least a part of one surface in the thickness direction of the plurality of slider connection terminals 70. One end in the longitudinal direction of the first cover opening 8A is located on the other side in the longitudinal direction than one end in the longitudinal direction of the second through-hole 33C.

  The first cover opening 8A and the second through-hole 33C penetrate the insulating base layer 3 and the insulating cover layer 5 in the thickness direction, and constitute the third penetrating part 12 as an example of the penetrating part. That is, the suspension board with circuit 1 includes the third penetration portion 12.

  The second insulating cover layer 9 includes a third dam 92. The third dam portion 92 is arranged so as to collectively overlap the plurality of slider terminal connection portions 74 when viewed from the thickness direction. The third weir 92 is located at the periphery of the first cover opening 8A, that is, at the periphery of the third penetration portion 12. The third weir portion 92 is arranged along the peripheral edge on one side in the longitudinal direction of the first cover opening 8A, and has a linear rectangular shape extending in the width direction.

  Such a cover insulating layer 5 includes a third cover thick portion 58C where the third dam portion 92 and the first cover insulating layer 8 overlap. The third cover thick portion 58C is included in the cover thick portion 58. The third cover thick portion 58C is located at the peripheral portion of the third penetrating portion 12 so that at least a part of one surface in the thickness direction of the slider connection terminal 70 is exposed to the slider connection terminal 70 when viewed from the thickness direction. They are arranged to overlap.

  Therefore, the exposure of the slider terminal connection portion 74 connected to the slider connection terminal 70 can be reliably suppressed.

  According to the third embodiment, the same operation and effect as those of the first embodiment can be obtained.

  In the fourth embodiment, as shown in FIG. 14, the light emitting element connection terminal 70A is configured as an example of a terminal. The fourth embodiment has the same configuration as the third embodiment including the slider connection terminal 70, and the slider 6 having the light emitting element 15 is mounted on the suspension board with circuit 1. In this case, when the slider 6 is mounted on the suspension board with circuit 1, the light emitting element 15 is inserted into the third penetration portion 12 on the other side in the longitudinal direction with respect to the light emitting element connection terminal 70 </ b> A. Then, a bonding material (for example, solder or the like) is disposed on the other surface in the thickness direction of the light emitting element connection terminal 70A, and the light emitting element 15 and the light emitting element connection terminal 70A are electrically connected.

  According to the fourth embodiment, the same operation and effect as those of the first embodiment can be obtained.

  In the fifth embodiment, as shown in FIGS. 15A and 15B, the inspection terminal 71 is configured as an example of a terminal. In this case, the metal support layer 2 has a fourth exposed portion 2A penetrating the metal support layer 2 in the thickness direction.

  In addition, the insulating base layer 3 includes an inspection terminal arrangement portion 3A that overlaps the fourth exposed portion 2A when viewed from the thickness direction. Such an inspection terminal arrangement portion 3A is included in the base thin portion 38.

  The inspection terminal arrangement portion 3A has a plurality of third openings 3B as an example of the opening. The plurality of third openings 3B are arranged at intervals in the width direction. Each of the plurality of third openings 3B penetrates the inspection terminal arrangement portion 3A in the thickness direction, and communicates with the fourth exposed portion 2A.

  Further, the base insulating layer 3 continuous with the inspection terminal arrangement portion 3A is arranged on the metal support layer 2 and is included in the base thick portion 39.

  Further, the conductor pattern 4 includes a plurality of test terminals 71 and a plurality of test wirings 75.

  The inspection terminal 71 is brought into contact with a probe (not shown) to apply a voltage in the continuity inspection of the suspension board with circuit 1.

  Each of the plurality of inspection terminals 71 is filled in the third opening 3B, and is exposed from the base insulating layer 3 and the metal support layer 2 via the fourth exposed portion 2A when viewed from the other side in the thickness direction. .

  Each of the plurality of test wirings 75 is arranged so as not to overlap a fourth penetrating portion 13 described later, and electrically connects the test terminal 71 and the slider signal wiring 44. Each of the plurality of inspection wirings 75 includes an inspection terminal connection portion 76 and an inspection wiring main body 77.

  The inspection terminal connection portion 76 has a rectangular frame shape surrounding the inspection terminal 71 when viewed from the thickness direction. The inspection terminal connection portion 76 is continuous with the entire periphery of the inspection terminal 71, and extends on the inspection terminal arrangement portion 3A, that is, to one side in the thickness direction of the base thin portion 38 so as to form a step with the inspection terminal 71. ing. Such an inspection terminal connection portion 76 is included in the thin corresponding portion 54.

  The inspection terminal connection portion 76 has a longitudinal one-side portion 78 as an example of a first wiring and a longitudinal other-side portion 79. One longitudinal side portion 78 of the inspection terminal connection portion 76 is located on one side in the longitudinal direction with respect to the inspection terminal 71, and the other longitudinal side portion 79 of the inspection terminal connection portion 76 is elongated with respect to the inspection terminal 71. It is located on the opposite side of the one side portion 78 in the direction.

  One longitudinal side portion 78 of the inspection terminal connection portion 76 has a first end 78A and a second end 78B.

  The first end portion 78A is one end portion in the longitudinal direction of the inspection terminal connection portion 76, and is located on the opposite side of the inspection terminal 71 with respect to the second end portion 78B. The second end 78B is continuous with the inspection terminal 71 and is an end opposite to the first end 78A.

  The inspection wiring body 77 is routed on one side in the thickness direction of the base thick portion 39 continuously from the other side portion 79 in the longitudinal direction of the inspection terminal connection portion 76. Such an inspection wiring main body 77 is included in the thick corresponding portion 55.

  The first cover insulating layer 8 is disposed on one side in the thickness direction of the base insulating layer 3 (specifically, one surface in the thickness direction) so as to cover the plurality of inspection wirings 75. The first cover insulating layer 8 has a third cover opening 8D. The third cover opening 8D exposes one surface of the inspection terminal 71 in the thickness direction.

  The second insulating cover layer 9 includes a fourth dam 93. The fourth weir portion 93 is disposed so as to overlap at least the first end portion 78A of the inspection terminal connection portion 76 when viewed from the thickness direction. The fourth weir 93 has a straight rectangular shape extending in the width direction.

  Such a cover insulating layer 5 includes a fourth cover thick portion 58D where the fourth dam portion 93 and the first cover insulating layer 8 overlap. The fourth cover thick portion 58D is included in the cover thick portion 58.

  The fourth cover thick portion 58 </ b> D is located at the peripheral portion of the fourth through portion 13 provided in the suspension board with circuit 1.

  The fourth penetrating portion 13 penetrates the base insulating layer 3 and the cover insulating layer 5 in the thickness direction, and is located on the opposite side of the inspection terminal 71 with respect to the fourth cover thick portion 58D.

  That is, the fourth penetrating portion 13 is arranged at an interval from the third opening 3B, and the inspection terminal 71 is arranged so as not to overlap with the fourth penetrating portion 13. Further, one longitudinal side portion 78 of the inspection terminal connection portion 76 is closest to the fourth penetration portion 13 of the inspection terminal connection portion 76, and the first end portion 78A is an end portion on the fourth penetration portion 13 side. The second end portion 78B is located on the opposite side of the fourth end portion 13 with respect to the first end portion 78A.

  According to the fifth embodiment, the same operation and effect as those of the first embodiment can be obtained.

  In the sixth embodiment, as shown in FIGS. 16A and 16B, the jig contact portion 72 is configured as an example of a terminal. In this case, the metal support layer 2 has a fifth exposed portion 2B penetrating the metal support layer 2 in the thickness direction. The fifth exposed portion 2B has a semicircular shape that is open toward one side in the longitudinal direction when viewed from the thickness direction.

  In addition, the insulating base layer 3 includes a second base through groove 3C overlapping the fifth exposed portion 2B when viewed from the thickness direction. The second base through groove 3C has a semicircular shape slightly smaller than the fifth exposed portion 2B, and the entire second base through groove 3C is included in the fifth exposed portion 2B when viewed from the thickness direction. ing. The peripheral edge of the second base through groove 3C is located radially inward of the peripheral edge of the fifth exposed portion 2B. Therefore, the peripheral portion 3D of the second base through groove 3C in the base insulating layer 3 is exposed from the metal support layer 2 via the fifth exposed portion 2B when viewed from the other side in the thickness direction. The peripheral portion 3D of the second base through groove 3C has a semicircular shape along the peripheral edge of the fifth exposed portion 2B when viewed from the thickness direction. The peripheral portion 3D of the second base through groove 3C is included in the base thin portion 38.

  Further, the base insulating layer 3 that is continuous with the peripheral portion 3D of the second base through groove 3C is disposed on the metal support layer 2 and is included in the base thick portion 39.

  The conductor pattern 4 includes a jig contact portion 72 and a wiring 80.

  The jig contact portion 72 is brought into contact with a jig (not shown) during suspension processing.

  The jig contact portion 72 is arranged so as to overlap the second base through groove 3C so that at least a part of the second base through groove 3C is opened. The jig contact portion 72 is adjacent to the inner peripheral surface of the second base through groove 3C, and protrudes radially inward of the second base through groove 3C. The jig contact portion 72 has a semicircular shape along the second base through groove 3C when viewed from the thickness direction. The jig contact portion 72 is exposed from the metal support layer 2 and the base insulating layer 3 via the fifth exposed portion 2B when viewed from the other side in the thickness direction.

  The wiring 80 is arranged so as not to overlap with a later-described fifth penetrating portion 14. The wiring 80 includes a connection portion 81 as an example of a second wiring, and a wiring main body 82.

  The connection portion 81 is disposed so as to overlap the peripheral portion 3D of the second base through groove 3C in the insulating base layer 3 when viewed from the thickness direction. The connecting portion 81 is continuous with the radially outer end of the jig contact portion 72, and is formed on the peripheral portion 3D of the second base through groove 3C, that is, the base thin portion so as to form a step with the jig contact portion 72. 38 extends to one side in the thickness direction. Such a connecting portion 81 is included in the thin-walled corresponding portion 54.

  The wiring main body 82 is routed on one side in the thickness direction of the base thick portion 39 continuously to the connecting portion 81. Such a wiring body 82 is included in the thick portion 55.

  The first insulating cover layer 8 is disposed on one side in the thickness direction of the base insulating layer (specifically, one surface in the thickness direction) so as to cover the wiring 80. The first cover insulating layer 8 has a second cover through groove 8E. The second cover through groove 8E exposes one surface in the thickness direction of the jig contact portion 72.

  The second cover through groove 8E and the second base through groove 3C penetrate the base insulating layer 3 and the cover insulating layer 5 in the thickness direction, and constitute a fifth through portion 14 as an example of the through portion. . That is, the suspension board with circuit 1 includes the fifth penetrating portion 14.

  Further, the second insulating cover layer 9 includes a fifth dam portion 94. The fifth weir portion 94 is arranged so as to overlap with the connection portion 81 when viewed from the thickness direction. The fifth weir portion 94 has a semicircular arc shape extending in the circumferential direction of the jig contact portion 72.

  Such a cover insulating layer 5 includes a fifth cover thick portion 58E where the fifth dam portion 94 and the first cover insulating layer 8 overlap. The fifth cover thick portion 58E is included in the cover thick portion 58. The fifth cover thick portion 58 </ b> E is located at the peripheral portion of the fifth penetrating portion 14 and is arranged so as to overlap the connecting portion 81 when viewed from the thickness direction.

  According to the sixth embodiment, the same operation and effect as those of the first embodiment can be obtained.

<Modification>
In the first to sixth embodiments described above, the suspension board with circuit 1 including the metal support layer 2 is given as an example of the wired circuit board of the present invention. It is not limited to. The printed circuit board of the present invention may be, for example, a flexible printed circuit board without the metal support layer 2.

  The arrangement of the cover thick portion 58 is not particularly limited as long as it is located at the peripheral portion of the through portion. For example, the thick cover portion 58 may be arranged along one longitudinal edge of the first through portion 10 so as to overlap with the other longitudinal end of the first element terminal connection portion 49.

  According to these modifications, the same operation and effect as those of the first embodiment can be obtained. Further, the first to sixth embodiments and the modifications can be appropriately combined.

DESCRIPTION OF SYMBOLS 1 Suspension board with a circuit 3 Base insulating layer 4 Conductive pattern 5 Cover insulating layer 10 First penetration part 11 Second penetration part 12 Third penetration part 13 Fourth penetration part 14 Fifth penetration part 38 Base thin part 39 Base thick part 42 Wiring 48C First Wiring Main Body 54 Thin Corresponding Portion 55 Thick Corresponding Portion 58 Cover Thick Portion 59 Cover Thin Portion 70 Slider Connection Terminal 70A Light Emitting Element Connection Terminal 71 Inspection Terminal 72 Jig Contact 78 Side portion 78A First end 78B Second end

Claims (4)

A first insulating layer;
A conductor layer including a wiring disposed on one side of the first insulating layer in a thickness direction of the first insulating layer, and a terminal exposed from the first insulating layer as viewed from the other side in the thickness direction;
A second insulating layer disposed on one side of the first insulating layer in the thickness direction so as to cover the conductor layer;
A penetrating part penetrating the first insulating layer and the second insulating layer in the thickness direction,
The first insulating layer includes:
A first thin portion adjacent to the penetrating portion;
A first thick portion that is thicker than the first thin portion and is continuous with the first thin portion;
The wiring is
Arranged so as not to overlap with the penetrating portion,
A thick corresponding portion disposed on one side of the first thick portion in the thickness direction;
A thin corresponding portion disposed on one side of the first thin portion in the thickness direction,
The terminal does not overlap with the through portion, or is arranged so as to overlap with the through portion so that at least a part of the through portion is opened,
The second insulating layer includes:
A second thick portion located at a peripheral portion of the through portion;
And a second thin portion which is thinner than the second thick portion and is continuous with the second thick portion. The first thin portion includes an opening arranged at an interval with respect to the penetrating portion,
The terminal includes a first terminal that is arranged so as not to overlap with the penetrating portion and is filled in the opening.
The thin-walled portion includes a first wiring closest to the through portion,
The first wiring includes a first end on the penetrating portion side, and a second end opposite to the penetrating portion with respect to the first end,
2. The printed circuit board according to claim 1, wherein the second thick portion is disposed so as to overlap at least the first end when viewed from the thickness direction. 3. The terminal includes a second terminal disposed so as to overlap with the through portion so that at least a part of the through portion is opened,
The thin-walled portion includes a second wiring connected to the second terminal,
The printed circuit board according to claim 1, wherein the second thick portion is disposed so as to overlap the second wiring when viewed from the thickness direction. The terminal includes a third terminal disposed so as to overlap with the through portion so that at least a part of the through portion is opened,
The thin-walled portion includes a third wiring connected to the third terminal,
The second thick portion is disposed so as to overlap with the third terminal when viewed from the thickness direction such that at least a part of the one surface in the thickness direction of the third terminal is exposed. The printed circuit board according to claim 1.

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