JP2020046514A - Positioning device - Google Patents
Positioning device Download PDFInfo
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- JP2020046514A JP2020046514A JP2018174192A JP2018174192A JP2020046514A JP 2020046514 A JP2020046514 A JP 2020046514A JP 2018174192 A JP2018174192 A JP 2018174192A JP 2018174192 A JP2018174192 A JP 2018174192A JP 2020046514 A JP2020046514 A JP 2020046514A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
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- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
Description
本発明は、位置決め装置に関する。 The present invention relates to a positioning device.
フラットパネルディスプレイまたは半導体デバイス等のような微細加工が要求される物品の製造に使用される露光装置では、高い解像力を得るために、光学素子の位置を精密に調整する必要がある。また、光学素子の位置の調整後においては、光学素子を通して形成される像のコントラストが光学素子の振動によって低下しないように、光学素子が高い剛性で支持される必要がある。このような用途において直動ステージのような位置決め装置が使用されうる。 2. Description of the Related Art In an exposure apparatus used for manufacturing an article requiring fine processing such as a flat panel display or a semiconductor device, it is necessary to precisely adjust the position of an optical element in order to obtain a high resolution. After the position of the optical element is adjusted, the optical element needs to be supported with high rigidity so that the contrast of an image formed through the optical element does not decrease due to the vibration of the optical element. In such an application, a positioning device such as a linear motion stage can be used.
本願との関連性は低いが、特許文献１には、光モジュールを支持構造体に連結する連結装置が開示されている。この連結装置は、光モジュールの支持区分を支持構造体に連結するための複数の連結ユニットを有する。 Although not very relevant to the present application, Patent Document 1 discloses a connecting device for connecting an optical module to a support structure. The coupling device has a plurality of coupling units for coupling a support section of the optical module to a support structure.
光学素子等の物体の位置および姿勢を精密に調整することが要求される装置に搭載される位置決め装置では、物体を位置決めし固定する度に物体の位置および姿勢が変化しないこと、即ち物体の固定作業における再現性が要求される。また、このような位置決め装置には、固定後に高い剛性を有することが要求される。 In a positioning device mounted on a device that requires precise adjustment of the position and orientation of an object such as an optical element, the position and orientation of the object do not change each time the object is positioned and fixed, that is, fixing of the object. Work reproducibility is required. Further, such a positioning device is required to have high rigidity after being fixed.
本発明は、固定作業における高い再現性と高い剛性を提供するために有利な技術を提供することを目的とする。 An object of the present invention is to provide an advantageous technique for providing high reproducibility and high rigidity in a fixing operation.
本発明の１つの側面は、位置決め装置に係り、前記位置決め装置は、第１方向に平行な第１面を有する第１部材と、前記第１方向に交差する第２方向に互いに離隔しかつ前記第１方向に平行に配置されるように前記第１部材に固定された第１レールおよび第２レールと、前記第１レールによって支持され前記第１レールに沿って移動可能な第１ブロックおよび第２ブロックと、前記第２レールによって支持され前記第２レールに沿って移動可能な第３ブロックと、前記第１面に対面する第２面を有し、前記第１ブロック、前記第２ブロックおよび前記第３ブロックに固定された第２部材と、前記第１面と前記第２面とが接触するように前記第１部材および前記第２部材を相互に締結する締結部と、を備え、前記第１部材および前記第２部材は、剛性部材である。 One aspect of the present invention relates to a positioning device, wherein the positioning device is separated from a first member having a first surface parallel to a first direction in a second direction intersecting the first direction, and A first rail and a second rail fixed to the first member so as to be arranged in parallel with a first direction; a first block supported by the first rail and movable along the first rail; A first block, the second block, and a third block supported by the second rail and movable along the second rail; and a second surface facing the first surface. A second member fixed to the third block, and a fastening portion for mutually fastening the first member and the second member so that the first surface and the second surface are in contact with each other; The first member and the second member are It is a rigid member.
本発明によれば、固定作業における高い再現性と高い剛性を提供するために有利な技術が提供される。 According to the present invention, an advantageous technique is provided for providing high reproducibility and high rigidity in a fixing operation.
以下、本発明をその例示的な実施形態を通して説明する。 Hereinafter, the present invention will be described through exemplary embodiments.
図１および図２には、本発明の第１実施形態の位置決め装置１００の構成が示されている。位置決め装置１００は、第１部材１と、第１レール２１と、第２レール２２と、第１ブロック３１と、第２ブロック３２と、第３ブロック３３と、第４ブロック３４と、第２部材４と、締結部５とを備えうる。第１部材１は、Ｘ方向（第１方向）に平行な第１面Ｓ１を有しうる。第１部材１は、例えば、互いに対向する２つの第１面Ｓ１を有しうる。第１部材１は、底面部ＢＰと、底面部ＢＰの２つの端部からそれぞれ延びる２つの側面部ＳＰとを含みうる。底面部ＢＰおよび２つの側面部ＳＰは、それぞれ板形状を有しうる。２つの第１面Ｓ１は、２つの側面部ＳＰにそれぞれ設けられうる。換言すると、１つの第１側面部ＳＰに１つの第１面Ｓ１が設けられうる。第１レールＬ１および第２レールＬ２は、Ｘ方向に直交するＹ方向（第２方向）に互いに離隔しかつＸ方向に平行に配置されるように第１部材１に固定されうる。ここで、第１レールＬ１および第２レールＬ２が相互に離隔する方向は、Ｘ方向に直交するＹ方向である必要は必ずしもなく、包括的には、Ｘ方向に交差する方向であればよい。第１レールＬ１および第２レールＬ２は、底面部ＢＰの上面の上に配置されうる。底面部ＢＰの上面は、平坦面でありうる。 1 and 2 show the configuration of a positioning device 100 according to a first embodiment of the present invention. The positioning device 100 includes a first member 1, a first rail 21, a second rail 22, a first block 31, a second block 32, a third block 33, a fourth block 34, and a second member. 4 and a fastening portion 5. The first member 1 can have a first surface S1 parallel to the X direction (first direction). The first member 1 can have, for example, two first surfaces S1 facing each other. The first member 1 may include a bottom portion BP and two side portions SP extending from two ends of the bottom portion BP. The bottom part BP and the two side parts SP may each have a plate shape. The two first surfaces S1 can be provided on the two side surfaces SP, respectively. In other words, one first side surface SP may be provided on one first side surface portion SP. The first rail L1 and the second rail L2 can be fixed to the first member 1 so as to be separated from each other in the Y direction (second direction) orthogonal to the X direction and arranged in parallel with the X direction. Here, the direction in which the first rail L1 and the second rail L2 are separated from each other does not necessarily need to be the Y direction orthogonal to the X direction, but may be any direction that comprehensively intersects the X direction. The first rail L1 and the second rail L2 may be arranged on the upper surface of the bottom part BP. The upper surface of the bottom portion BP may be a flat surface.
第１ブロック３１および第２ブロック３２は、ガイドとして機能する第１レール２１によって支持され、第１レール２１に沿ってＸ方向に移動可能である。第３ブロック３３および第４ブロック３４は、ガイドとして機能する第２レール２２によって支持され、第２レール２２に沿ってＸ方向に移動可能である。第１ブロック３１、第２ブロック３２、第３ブロック３３および第４ブロック３４は、第１ブロック３１の重心、第２ブロック３２の重心、第３ブロック３３の重心および第４ブロック３４の重心を頂点とする四角形、好ましくは長方形を構成するように配置されうる。後述の第６実施形態として例示されるように、第４ブロック３４は取り除かれてもよい。この場合、第１ブロック３１、第２ブロック３２および第３ブロック３３は、第１ブロック３１の重心、前記第２ブロック３２の重心および第３ブロック３３の重心を頂点とする三角形を構成するように配置される。 The first block 31 and the second block 32 are supported by the first rail 21 functioning as a guide, and are movable in the X direction along the first rail 21. The third block 33 and the fourth block 34 are supported by the second rail 22 functioning as a guide, and are movable in the X direction along the second rail 22. The first block 31, the second block 32, the third block 33, and the fourth block 34 have the vertex of the center of gravity of the first block 31, the center of gravity of the second block 32, the center of gravity of the third block 33, and the center of gravity of the fourth block 34. , Preferably a rectangle. The fourth block 34 may be removed as exemplified in a sixth embodiment described later. In this case, the first block 31, the second block 32, and the third block 33 form a triangle having vertices at the center of gravity of the first block 31, the center of gravity of the second block 32, and the center of gravity of the third block 33. Be placed.
第２部材４は、第１面Ｓ１に対面する第２面Ｓ２を有し、第１ブロック３１、第２ブロック３２、第３ブロック３３および第４ブロック３４に固定される。第１部材１が２つの第１面Ｓ１を有する場合、それに対応するように、第２部材４は、２つの第２面Ｓ１を有する。第２部材４は、第２部材４が第１ブロック３１、第２ブロック３２、第３ブロック３３および第４ブロック３４に固定された状態かつ第１部材１に固定されない状態で、Ｘ方向に移動可能である。 The second member 4 has a second surface S2 facing the first surface S1, and is fixed to the first block 31, the second block 32, the third block 33, and the fourth block 34. When the first member 1 has two first surfaces S1, the second member 4 has two second surfaces S1 correspondingly. The second member 4 moves in the X direction in a state where the second member 4 is fixed to the first block 31, the second block 32, the third block 33, and the fourth block 34 but not fixed to the first member 1. It is possible.
締結部５は、第１面Ｓ１と第２面Ｓ２とが接触するように第１部材１および第２部材４を相互に締結する。締結部５は、第１ブロック３１、第２ブロック３２、第３ブロック３３および第４ブロック３４にそれぞれ対応する第１締結具５１、第２締結具５２、第３締結具５３および第４締結具５４を含みうる。第１締結具５１、第２締結具５２、第３締結具５３および第４締結具５４の各々は、例えば、雄ネジを有するボルトであり、第１部材１に設けられた長丸穴５５を介して、第２部材４に設けられた雌ネジ５６にネジ締結されうる。長丸穴５５の長手方向は、第２部材４が移動可能なＸ方向と一致していて、長丸穴５５の長手方向の長さと締結具５１、５２、５３、５４の直径との差異がＸ方向における第２部材４のストローク（可動範囲）を決定しうる。第２部材４の位置の調整および姿勢は、締結具５１、５２、５３、５４を緩めた状態でなされる。第１部材１に対する第２部材４の固定（ロック）は、締結具５１、５２、５３、５４を締め付けること、即ち、締結具５１、５２、５３、５４を第１部材１の長丸穴５５を介して第２部材４の雌ネジ５６にネジ締結することによってなされうる。 The fastening portion 5 fastens the first member 1 and the second member 4 to each other such that the first surface S1 and the second surface S2 come into contact with each other. The fastening part 5 includes a first fastener 51, a second fastener 52, a third fastener 53, and a fourth fastener corresponding to the first block 31, the second block 32, the third block 33, and the fourth block 34, respectively. 54. Each of the first fastener 51, the second fastener 52, the third fastener 53, and the fourth fastener 54 is, for example, a bolt having a male screw, and has an oblong hole 55 provided in the first member 1. Through this, it can be screwed to the female screw 56 provided on the second member 4. The longitudinal direction of the elongated hole 55 coincides with the X direction in which the second member 4 can move, and the difference between the longitudinal length of the elongated hole 55 and the diameter of the fasteners 51, 52, 53, 54 is different. The stroke (movable range) of the second member 4 in the X direction can be determined. Adjustment and posture of the position of the second member 4 are performed with the fasteners 51, 52, 53, 54 loosened. The fixing (locking) of the second member 4 to the first member 1 is performed by tightening the fasteners 51, 52, 53, 54, that is, by fastening the fasteners 51, 52, 53, 54 to the oblong hole 55 of the first member 1. By screwing to the female screw 56 of the second member 4 via
図２に例示されるように、Ｘ方向における第１締結具５１の位置は、Ｘ方向における第１ブロック３１の２つの端面の間（矢印ＡＲで示される範囲内）にあることが好ましい。同様に、Ｘ方向における第２締結具５２の位置は、それぞれ、Ｘ方向における第２ブロック３２の２つの端面の間（矢印ＡＲで示される範囲内）にあることが好ましい。同様に、Ｘ方向における第３締結具５３の位置は、Ｘ方向における第３ブロック３３の２つの端面の間（矢印ＡＲで示される範囲内）にあることが好ましい。同様に、Ｘ方向における第４締結具５４の位置は、Ｘ方向における第４ブロック３４の２つの端面の間（矢印ＡＲで示される範囲内）にあることが好ましい。また、第１締結具５１、第２締結具５２、第３締結具５３および第４締結具５４は、同一平面（ＸＹ平面に平行な面）内に配置されることが好ましい。以上の構成は、第１部材１に対して第２部材４を固定（ロック）する操作による第１部材１に対する第２部材４の相対的な位置および姿勢の変化を一定にすること、即ち第１部材１に対する第２部材４の固定作業における再現性を向上させるために有利である。 As illustrated in FIG. 2, it is preferable that the position of the first fastener 51 in the X direction be between two end surfaces of the first block 31 in the X direction (within a range indicated by an arrow AR). Similarly, the position of the second fastener 52 in the X direction is preferably between the two end surfaces of the second block 32 in the X direction (within the range indicated by the arrow AR). Similarly, the position of the third fastener 53 in the X direction is preferably between two end faces of the third block 33 in the X direction (within the range indicated by the arrow AR). Similarly, the position of the fourth fastener 54 in the X direction is preferably between two end faces of the fourth block 34 in the X direction (within the range indicated by the arrow AR). Further, it is preferable that the first fastener 51, the second fastener 52, the third fastener 53, and the fourth fastener 54 are arranged in the same plane (a plane parallel to the XY plane). The above configuration makes the change in the relative position and posture of the second member 4 relative to the first member 1 due to the operation of fixing (locking) the second member 4 to the first member 1 constant, that is, This is advantageous for improving the reproducibility in the operation of fixing the second member 4 to the one member 1.
第１部材１に対する第２部材４の固定の前は、第２部材４は、第１〜第４ブロック３１〜３４に固定されているのみであり、また、一般に、レール２１とブロック３１、３２、レール２２とブロック３３、３４との結合部は、回転に対する剛性が低い。したがって、締結部５の締結による第１部材１に対する第２部材４の固定のための操作において、締結部５に加えられるモーメントよって、第２部材４がＹ軸に平行な軸の周りで回転しうる。上記のようなブロック３１〜３４および締結具５１〜５４の配置は、第２部材４の固定時における上記のような第２部材４の回転を抑え、第１部材１に対する第２部材４の固定作業における再現性を向上させるために有利である。第１部材１に対して第２部材４を固定する作業における再現性を向上させるためには、締結具５１〜５４の締め付け順を決めておき、毎回同じ締め付け順で締結具５１〜５４の締め付けを行うことが好ましい。また、締結具５１〜５４の締め付けトルクを一定値にすることが好ましい。 Before the second member 4 is fixed to the first member 1, the second member 4 is only fixed to the first to fourth blocks 31 to 34. In general, the rail 21 and the blocks 31, 32 are fixed. The joint between the rail 22 and the blocks 33 and 34 has low rigidity against rotation. Therefore, in an operation for fixing the second member 4 to the first member 1 by fastening the fastening portion 5, the second member 4 rotates around an axis parallel to the Y axis due to a moment applied to the fastening portion 5. sell. The arrangement of the blocks 31 to 34 and the fasteners 51 to 54 as described above suppresses the rotation of the second member 4 as described above when the second member 4 is fixed, and fixes the second member 4 to the first member 1. This is advantageous for improving reproducibility in operation. In order to improve the reproducibility in the work of fixing the second member 4 to the first member 1, the tightening order of the fasteners 51 to 54 is determined in advance, and the fasteners 51 to 54 are tightened in the same tightening order each time. Is preferably performed. Further, it is preferable that the tightening torque of the fasteners 51 to 54 be a constant value.
第２部材４が第１部材１に対して移動可能な状態においては、第１部材１の第１面Ｓ１と第２部材４の第２面Ｓ２との間に僅かな間隙がある。換言すると、第１部材１の第１面Ｓ１と第２部材４の第２面Ｓ２との間に僅かな間隙が状態において、第２部材４が第１部材１に対して移動可能である。締結部５によって第１部材１と第２部材４とが相互に締結あるいは固定された状態では、第１部材１が僅かに変形し、第１部材１の第１面Ｓ１と第２部材４の第２面Ｓ２とが接触している。第１部材１および第２部材４は、高い剛性を有する剛性部材であり、締結部５によって相互に締結あるいは固定された第１部材１および第２部材４で構成される構造体は、１つの剛性部材であるとみなすことができる。剛性部材という用語は、弾性部材および可撓性部材のような容易に変形する部材（例えば、板バネ）とは区別される用語である。Ｘ方向に垂直な断面において、締結部５によって締結された第１部材１および第２部材４で構成される構造体は、中空の四角柱形状を有しうる。このような構造体は、高い剛性を有しうる。 When the second member 4 is movable with respect to the first member 1, there is a slight gap between the first surface S1 of the first member 1 and the second surface S2 of the second member 4. In other words, the second member 4 is movable with respect to the first member 1 with a slight gap between the first surface S1 of the first member 1 and the second surface S2 of the second member 4. In a state where the first member 1 and the second member 4 are mutually fastened or fixed by the fastening portion 5, the first member 1 is slightly deformed, and the first surface S1 of the first member 1 and the second member 4 are The second surface S2 is in contact. The first member 1 and the second member 4 are rigid members having high rigidity, and the structure constituted by the first member 1 and the second member 4 mutually fastened or fixed by the fastening portion 5 is one. It can be considered a rigid member. The term rigid member is a term that is distinguished from easily deformable members (e.g., leaf springs) such as elastic members and flexible members. In a cross section perpendicular to the X direction, the structure including the first member 1 and the second member 4 fastened by the fastening portion 5 may have a hollow quadrangular prism shape. Such a structure may have high rigidity.
第１部材１の第１面Ｓ１と第２部材４の第２面Ｓ２との間隙は、第１部材１（の側面部ＳＰ）の変形量より小さくする必要がある。これは、該間隙の管理は、第１部材１および第２部材４の公差を適切に設定することでなされうる。以下に１つの設計例を挙げる。締結部５の締結具５１〜５４がネジサイズＭ５のボルトでありうる。この場合、典型的な軸力は、３０００Ｎ程度である。第１部材１の材質は、ステンレスでありうる。第１部材１は、第１面Ｓ１を有する側面部ＳＰの厚さが５ｍｍ、底面部ＢＰの上面から締結具５１〜５４までの距離が５０ｍｍ、第１部材１のＸ方向の長さが３００ｍｍでありうる。この例では、第１部材１の変形量は、６．２μｍ程度である。第１部材１の第１面Ｓ１と第２部材４の第２面Ｓ２との間隙は、例えば６μｍ以下であり、好ましくは５μｍ以下である。第１部材１の第１面Ｓ１と第２部材４の第２面Ｓ２との間隙が小さすぎると、第２部材４を移動させる際に第１面Ｓ１と第２面Ｓ２とが接触し、第２部材４を移動させるために要する力が過剰に大きくなりうる。したがって、該間隙は、少なくとも１μｍであることが好ましい。この構成における実験において、固定作業における回転角度に関する再現性は、±０．７μｒａｄであった。一方、本実施形態に従わない構成では、固定作業における回転角度に関する再現性は、±３０μｒａｄであった。 The gap between the first surface S1 of the first member 1 and the second surface S2 of the second member 4 needs to be smaller than the amount of deformation of the first member 1 (side surface portion SP). This can be done by appropriately setting the tolerance of the first member 1 and the second member 4 for the gap. One design example is described below. The fasteners 51 to 54 of the fastening part 5 may be bolts of the screw size M5. In this case, a typical axial force is about 3000N. The material of the first member 1 can be stainless steel. The first member 1 has a thickness of the side surface portion SP having the first surface S1 of 5 mm, a distance from the upper surface of the bottom surface portion BP to the fasteners 51 to 54 of 50 mm, and a length of the first member 1 in the X direction of 300 mm. It can be. In this example, the amount of deformation of the first member 1 is about 6.2 μm. The gap between the first surface S1 of the first member 1 and the second surface S2 of the second member 4 is, for example, 6 μm or less, and preferably 5 μm or less. If the gap between the first surface S1 of the first member 1 and the second surface S2 of the second member 4 is too small, the first surface S1 and the second surface S2 come into contact when the second member 4 is moved, The force required to move the second member 4 can be excessively large. Therefore, the gap is preferably at least 1 μm. In the experiment with this configuration, the reproducibility of the rotation angle in the fixing operation was ± 0.7 μrad. On the other hand, in a configuration that does not follow this embodiment, the reproducibility of the rotation angle in the fixing operation was ± 30 μrad.
位置決め装置１００は、更に光学素子等の物体を備えうる。該物体は、第２部材４に固定され、第１部材１に対する第２部材４の位置決めによって位置決めされうる。光学素子は、例えば、ミラーまたはレンズでありうる。光学素子を備える位置決め装置は、例えば、露光装置の一部を構成しうる。 The positioning device 100 may further include an object such as an optical element. The object is fixed to the second member 4 and can be positioned by positioning the second member 4 with respect to the first member 1. The optical element can be, for example, a mirror or a lens. The positioning device including the optical element can constitute, for example, a part of an exposure device.
第１部材１に対する第２部材４（および第２部材４に固定される光学素子等の物体）の位置決めは、調整機構によって第１部材１に対して第２部材４を相対的に移動させることによってなされうる。該調整機構は、例えば、押しネジとバネとを含む手動の調整機構であってもよく、この場合、押しネジの回転によって第１部材１に対する第２部材４の位置を調整することができる。手動の調整機構は、位置決め装置１００の構造の単純化、低コスト化に寄与しうる。また、手動の調整機構は、アクチュエータ等の発熱源がない点で、発熱による光学素子等の物体の変形を抑えるために有効である。 Positioning of the second member 4 (and an object such as an optical element fixed to the second member 4) with respect to the first member 1 is performed by moving the second member 4 relative to the first member 1 by an adjustment mechanism. Can be done by The adjusting mechanism may be, for example, a manual adjusting mechanism including a push screw and a spring. In this case, the position of the second member 4 with respect to the first member 1 can be adjusted by rotating the push screw. The manual adjustment mechanism can contribute to simplification of the structure of the positioning device 100 and cost reduction. Further, the manual adjustment mechanism is effective in suppressing deformation of an object such as an optical element due to heat generation because there is no heat source such as an actuator.
一方、第１部材１に対する第２部材４の位置決めのための調整機構は、アクチュエータを含む電動の調整機構であってもよい。アクチュエータは、例えば、ステッピングモーターまたはリニアモーター等でありうる。ステッピングモーターは、汎用アクチュエータであるために比較的安価であり、また、駆動パルス数で位置を制御できるため、精密な駆動が容易であるという点で優れている。リニアモーターは、直線駆動アクチュエータであるため、ステッピングモーターの様な回転駆動アクチュエータを用いる場合に必要となる回転運動を直進運動に変換するボールネジなどの機構が不要となる。そのため、構造が簡素になるという点で優れている。アクチュエータの発熱によって、第２部材４に取り付けられる光学素子、更には周囲の光学素子を変形させないように、冷却機構を設けるか、駆動を短時間で完了させ、駆動後は電源を切るなどの運用が望ましい。 On the other hand, the adjustment mechanism for positioning the second member 4 with respect to the first member 1 may be an electric adjustment mechanism including an actuator. The actuator may be, for example, a stepping motor or a linear motor. Since the stepping motor is a general-purpose actuator, it is relatively inexpensive, and its position can be controlled by the number of driving pulses, so that it is excellent in that precise driving is easy. Since the linear motor is a linear drive actuator, there is no need for a mechanism such as a ball screw for converting a rotational motion necessary for using a rotary drive actuator such as a stepping motor into a linear motion. Therefore, it is excellent in that the structure is simplified. In order to prevent the optical element attached to the second member 4 and the surrounding optical elements from being deformed by the heat generated by the actuator, a cooling mechanism is provided, or the driving is completed in a short time, and the power is turned off after the driving. Is desirable.
第１部材１に対する第２部材４の相対的な位置を検出するためにセンサーが設けられうる。このようなセンサーとしては、例えば、接触式の電気マイクロメータ、非接触式の光学センサー、リニアエンコーダー等が採用されうる。接触式のセンサーは設置時の調整作業が簡単である点で優れており、非接触式のセンサーはヒステリシスがない点で優れており、リニアエンコーダーはストロークを長くしやすいという点で優れている。 A sensor may be provided to detect the position of the second member 4 relative to the first member 1. As such a sensor, for example, a contact-type electric micrometer, a non-contact-type optical sensor, a linear encoder, or the like can be employed. The contact type sensor is superior in that the adjustment work at the time of installation is easy, the non-contact type sensor is superior in that there is no hysteresis, and the linear encoder is superior in that the stroke is easily lengthened.
締結具５１〜５４としてのボルトと第１部材１との間には、ワッシャが配置されうる。ここで、ボルトの座面より大きい直径を有するワッシャが用いられてもよいし、該座面より小さい直径を有するワッシャが用いられてもよく、両者では、互いに異なる効果が期待される。ボルトの座面より大きい直径を有するワッシャを用いる場合、第１部材１に加わる圧縮応力を緩和することができるので、より大きな力で第１部材１と第２部材４とを相互に締結することができる。一方、ボルトの座面より小さい直径を有するワッシャを用いる場合、ボルトを締めつける際に第１部材１に加わるモーメントを小さくできるので、固定作業における再現性を向上させることができる。 A washer may be arranged between the bolts serving as the fasteners 51 to 54 and the first member 1. Here, a washer having a diameter larger than the seat surface of the bolt may be used, or a washer having a diameter smaller than the seat surface may be used, and both are expected to have different effects. When a washer having a diameter larger than the seat surface of the bolt is used, the compressive stress applied to the first member 1 can be reduced, so that the first member 1 and the second member 4 are mutually fastened with a larger force. Can be. On the other hand, when a washer having a smaller diameter than the seat surface of the bolt is used, the moment applied to the first member 1 when tightening the bolt can be reduced, so that the reproducibility in the fixing operation can be improved.
第１部材１の第１面Ｓ１と第２部材４の第２面Ｓ２との間隙を管理するために、第１部材１と第２部材Ｓ２の公差が管理されうる。あるいは、第１部材１および第２部材４を準備した後に第１部材１の第１面Ｓ１と第２部材４の第２面Ｓ２の一方または双方を加工してもよい。例えば、第１部材１と第２部材４の一方の仕上がり寸法を計測し、この計測の結果に基づいて他方を加工してもよい。この場合、一方の加工に要求される精度を緩和することができる。第１部材１および第２部材４の材料としては、例えば、アルミニウム、ステンレス、鉄またはセラミックなどの、高いヤング率を有する材料が適している。 To manage the gap between the first surface S1 of the first member 1 and the second surface S2 of the second member 4, the tolerance between the first member 1 and the second member S2 can be managed. Alternatively, after preparing the first member 1 and the second member 4, one or both of the first surface S1 of the first member 1 and the second surface S2 of the second member 4 may be processed. For example, the finished dimensions of one of the first member 1 and the second member 4 may be measured, and the other may be processed based on the measurement result. In this case, the precision required for one processing can be relaxed. As a material of the first member 1 and the second member 4, a material having a high Young's modulus, such as aluminum, stainless steel, iron or ceramic, is suitable.
また、第１部材１および第２部材４の材料がアルミニウムである場合、第１部材１および第２部材４の厚さは１．５ｍｍ以上１０．０ｍｍ以下であることが望ましい。また、第１部材１および第２部材４の材料がステンレスまたは鉄である場合、第１部材１および第２部材４の厚さは１．０ｍｍ以上８．０ｍｍ以下であることが望ましい。また、第１部材１および第２部材４の材料がセラミックである場合、第１部材１および第２部材４の厚さは０．６ｍｍ以上５．０ｍｍ以下であることが望ましい。このような厚さの限定を満たす第１部材１および第２部材４は、十分に高い剛性を有し、剛性部材として理解することができる。 When the material of the first member 1 and the second member 4 is aluminum, the thickness of the first member 1 and the second member 4 is desirably 1.5 mm or more and 10.0 mm or less. When the material of the first member 1 and the second member 4 is stainless steel or iron, the thickness of the first member 1 and the second member 4 is desirably 1.0 mm or more and 8.0 mm or less. When the material of the first member 1 and the second member 4 is ceramic, it is desirable that the thickness of the first member 1 and the second member 4 be 0.6 mm or more and 5.0 mm or less. The first member 1 and the second member 4 satisfying such a limitation on the thickness have sufficiently high rigidity and can be understood as rigid members.
レール２１、２２およびブロック３１、３２、３３、３４を構成する機構としては、リニヤガイド（登録商標）などの、転動体を介して可動体を案内する直動案内機構が好適である。そのような直動案内機構は、摩擦係数が小さいため、調整のしやすさの点で優れている。さらに、転動体とレール、および、転動体とブロックとの間に隙間がない構成を有する直動案内機構は、第２部材４の移動あるいは駆動時のガタが小さいので、調整のしやすさの点で優れている。 As a mechanism constituting the rails 21 and 22 and the blocks 31, 32, 33 and 34, a linear guide mechanism such as a linear guide (registered trademark) for guiding a movable body through a rolling element is preferable. Such a linear motion guide mechanism is excellent in the ease of adjustment because of its small coefficient of friction. Further, the linear motion guide mechanism having a configuration in which there is no gap between the rolling element and the rail and between the rolling element and the block has a small backlash when the second member 4 is moved or driven, so that the adjustment is easy. Excellent in point.
図３には、本発明の第２実施形態の位置決め装置１００の構成が示されている。第２実施形態として言及しない事項は、第１実施形態に従いうる。第２実施形態では、第１部材１は、底面部７と、底面部７の２つの端部からそれぞれ延びる２つの側面部６とを含み、２つの側面部６のそれぞれが第１面Ｓ１を有する。第１部材１は、底面部７と２つの側面部６とが締結具３００によって相互に締結されて構成される。締結具３００による締結を解除することによって、底面部７および２つの側面部６は、３つの部材に分離される。第２実施形態では、第２部材４の寸法に合わせて２つの側面部６を底面部７に取り付ければよいので、第２部材４、ならびに、２つの側面部６および底面部７に要求される加工精度を緩和することができる。 FIG. 3 shows a configuration of a positioning device 100 according to a second embodiment of the present invention. Items not mentioned in the second embodiment can follow the first embodiment. In the second embodiment, the first member 1 includes a bottom surface portion 7 and two side surface portions 6 extending from two ends of the bottom surface portion 7, respectively, and each of the two side surface portions 6 defines the first surface S1. Have. The first member 1 is configured such that the bottom surface portion 7 and the two side surface portions 6 are mutually fastened by the fastener 300. By releasing the fastening by the fastener 300, the bottom portion 7 and the two side portions 6 are separated into three members. In the second embodiment, since the two side portions 6 may be attached to the bottom portion 7 in accordance with the dimensions of the second member 4, the second member 4 and the two side portions 6 and the bottom portion 7 are required. Processing accuracy can be reduced.
図８に例示されるように、２つの側面部６を底面部７に締結するための締結具３００（ボルト）は、締結部５から等距離の位置に配置されることが、固定作業における再現性を向上させる観点で好ましい。 As illustrated in FIG. 8, the fastener 300 (bolt) for fastening the two side portions 6 to the bottom portion 7 is disposed at a position equidistant from the fastening portion 5. It is preferable from the viewpoint of improving the properties.
図４には、本発明の第３実施形態の位置決め装置１００の構成が示されている。第３実施形態として言及しない事項は、第１又は第２実施形態に従いうる。第３実施形態では、第２部材４は、上面部９１と、上面部９１の２つの端部からそれぞれから延びる２つの側面部９２とを含み、２つの側面部９２のそれぞれが第２面Ｓ２を有する。２つ第２面Ｓ２は、１つの平面内に位置するように構成されうる。また、第１部材１は、例えば、第１面Ｓ１を有する平板部材で構成されうる。第１部材１と第２部材４とは、締結部５によって相互に締結されうる。 FIG. 4 shows a configuration of a positioning device 100 according to a third embodiment of the present invention. Items not mentioned as the third embodiment can follow the first or second embodiment. In the third embodiment, the second member 4 includes an upper surface portion 91 and two side surface portions 92 extending from two ends of the upper surface portion 91, respectively, and each of the two side surface portions 92 is the second surface S2. Having. The two second surfaces S2 may be configured to be located in one plane. In addition, the first member 1 can be configured by, for example, a flat plate member having the first surface S1. The first member 1 and the second member 4 can be mutually fastened by the fastening portion 5.
締結部５によって第１部材１と第２部材４とが相互に締結されていない状態で、第１面Ｓ１と第２面Ｓ２との間には僅かな間隙があり、第２部材４は、Ｘ方向に移動可能である。第２部材４が位置決めされた後、締結部５によって第１部材１と第２部材４とが相互に締結あるいは固定される。締結部５によって第１部材１と第２部材４とが相互に締結あるいは固定された状態では、第１部材１が僅かに変形し、第１部材１の第１面Ｓ１と第２部材４の第２面Ｓ２とが接触している。第１部材１および第２部材４は、高い剛性を有する剛性部材であり、締結部５によって相互に締結あるいは固定された第１部材１と第２部材４で構成される構造体は、１つの剛性部材であるとみなすことができる。 In a state where the first member 1 and the second member 4 are not mutually fastened by the fastening portion 5, there is a slight gap between the first surface S1 and the second surface S2, and the second member 4 It is movable in the X direction. After the positioning of the second member 4, the first member 1 and the second member 4 are mutually fastened or fixed by the fastening portion 5. In a state where the first member 1 and the second member 4 are mutually fastened or fixed by the fastening portion 5, the first member 1 is slightly deformed, and the first surface S1 of the first member 1 and the second member 4 are The second surface S2 is in contact. The first member 1 and the second member 4 are rigid members having high rigidity, and a structure constituted by the first member 1 and the second member 4 mutually fastened or fixed by the fastening portion 5 is one. It can be considered a rigid member.
第１面Ｓ１と第２面Ｓ２との間に、締結部５による第１部材１および第２部材４の変形（第１面Ｓ１と第２面Ｓ２との間隙に影響を与える変形）よりも小さい間隙が形成されるように、第２部材４、レール２１、２２、ブロック３１〜３４の寸法が管理されうる。あるいは、レール２１、２２とブロック３１〜３４の実際の寸法を計測し、第１面Ｓ１と第２面Ｓ２との間に適切な間隙が形成されるように第２部材４が加工されてもよい。第３実施形態は、固定作業に関して第１部材１の下方から締結部５にアクセスするための選択肢を提供する。 Between the first surface S1 and the second surface S2, the deformation of the first member 1 and the second member 4 by the fastening portion 5 (deformation that affects the gap between the first surface S1 and the second surface S2). The dimensions of the second member 4, the rails 21 and 22, and the blocks 31 to 34 can be controlled so that a small gap is formed. Alternatively, the actual dimensions of the rails 21 and 22 and the blocks 31 to 34 are measured, and the second member 4 is processed so that an appropriate gap is formed between the first surface S1 and the second surface S2. Good. The third embodiment provides an option for accessing the fastening portion 5 from below the first member 1 for the fixing operation.
図５には、本発明の第４実施形態の位置決め装置１００の構成が示されている。第４実施形態は、第３実施形態の変形例を提供し、第４実施形態として言及しない事項は、第３実施形態、あるいは、第３実施形態を介して第１又は第２実施形態に従いうる。第４実施形態では、第２部材４は、上面部９１と、上面部９１の２つの端部からそれぞれ延びる２つの側面部９２とを含み、２つの側面部９２のそれぞれが第２面Ｓ２を有する。２つ第２面Ｓ２は、１つの平面内に位置するように構成されうる。第２部材４は、上面部９１と２つの側面部９２とが締結具５００によって相互に締結されて構成されうる。締結具５００による締結を解除することによって、上面部１２および２つの側面部１１は、３つの部材に分離される。第４実施形態では、レール２１、２２、ブロック３１〜３４、側面部１１に対して要求される加工精度を緩和することができる。 FIG. 5 shows a configuration of a positioning device 100 according to a fourth embodiment of the present invention. The fourth embodiment provides a modification of the third embodiment, and matters not mentioned as the fourth embodiment may follow the third embodiment, or the first or second embodiment via the third embodiment. . In the fourth embodiment, the second member 4 includes an upper surface portion 91 and two side surface portions 92 extending from two ends of the upper surface portion 91, each of the two side surface portions 92 defining the second surface S2. Have. The two second surfaces S2 may be configured to be located in one plane. The second member 4 may be configured such that the upper surface portion 91 and the two side surface portions 92 are mutually fastened by the fastener 500. By releasing the fastening by the fastener 500, the upper surface portion 12 and the two side surface portions 11 are separated into three members. In the fourth embodiment, the processing accuracy required for the rails 21 and 22, the blocks 31 to 34, and the side surface 11 can be relaxed.
図６には、本発明の第５実施形態の位置決め装置１００の構成が示されている。第５実施形態として言及しない事項は、第１乃至第４実施形態のいずれか又は組み合わせに従いうる。第５実施形態では、第２部材４と第１部材１の２つの側面部ＳＰとが締結部５によって締結される点で第１実施形態と共通している。一方、第１実施形態の具体例では、締結部５を構成する締結具５１〜５４がボルトであるのに対して、第５実施形態の具体例では、締結部５がクランプ構造体１５である点で両者は相違している。 FIG. 6 shows a configuration of a positioning device 100 according to a fifth embodiment of the present invention. Items not mentioned as the fifth embodiment can follow any one or combination of the first to fourth embodiments. The fifth embodiment is common to the first embodiment in that the second member 4 and the two side surfaces SP of the first member 1 are fastened by the fastening portion 5. On the other hand, in the specific example of the first embodiment, the fasteners 51 to 54 constituting the fastening portion 5 are bolts, whereas in the specific example of the fifth embodiment, the fastening portion 5 is the clamp structure 15. They differ in that respect.
第１部材１は、底面部ＢＰと、底面部ＢＰの２つの端部からそれぞれ延びる２つの側面部ＳＰとを含みうる。各側面部ＳＰは、第１面Ｓ１を有する。第２部材４は、上面部１２と、上面部１２の２つの端部からそれぞれ延びる２つの側壁部１４とを有しうる。各側壁部１４は、第２面Ｓ２を有する。クランプ構造体１５は、側面部ＳＰと側壁部１４とを相互に押し付けるように、換言すると、第１面Ｓ１と第２面Ｓ２とが接触するように、第１部材１および第２部材４をクランプしうる。第１実施形態の具体例では、長丸穴５５の寸法によって第２部材４のストローク（可動範囲）が制限されるが、第５実施形態は、第２部材４のストロークを拡大するために有利である。 The first member 1 may include a bottom portion BP and two side portions SP extending from two ends of the bottom portion BP. Each side surface part SP has a first surface S1. The second member 4 may have an upper surface portion 12 and two side wall portions 14 extending from two ends of the upper surface portion 12, respectively. Each side wall portion 14 has a second surface S2. The clamp structure 15 pushes the first member 1 and the second member 4 such that the side surface portion SP and the side wall portion 14 are pressed against each other, in other words, the first surface S1 and the second surface S2 are in contact with each other. Can be clamped. In the specific example of the first embodiment, the stroke (movable range) of the second member 4 is limited by the size of the oblong hole 55, but the fifth embodiment is advantageous for increasing the stroke of the second member 4. It is.
締結部５は、クランプ構造体１５に付随するボルト１７を含みうる。クランプ動作は、ボルト１７の締め付けによってなされる。締結部５は、ボルト１７の緩みを防止する緩み止めナット１６を含んでもよい。締結部５は、例えば、ボルト１７の先端が側面部ＳＰに当接する構造を有しうるが、この場合、ボルト１７をその先端が丸い丸先タイプのものとすることが好ましい。この場合、締結時に側面部ＳＰに傷が生じこと、そして、その傷によって固定作業の再現性が低下することが抑制される。また、丸先タイプの採用は、ボルト１７と側面部ＳＰとの接触面積を小さくし、締結時にボルト１７から第１部材１に加わるモーメントを小さくすることを可能にする。これは、固定作業の再現性の向上に寄与しうる。 Fastener 5 may include a bolt 17 associated with clamp structure 15. The clamping operation is performed by tightening the bolt 17. The fastening part 5 may include a locking nut 16 for preventing the bolt 17 from loosening. The fastening portion 5 may have, for example, a structure in which the tip of the bolt 17 abuts on the side surface portion SP. In this case, it is preferable that the bolt 17 be of a rounded tip type. In this case, it is possible to prevent the side surface SP from being damaged at the time of fastening, and to prevent the reproducibility of the fixing operation from being reduced due to the damage. Further, the use of the rounded tip type makes it possible to reduce the contact area between the bolt 17 and the side surface portion SP, and to reduce the moment applied to the first member 1 from the bolt 17 at the time of fastening. This can contribute to improving the reproducibility of the fixing operation.
同様に、クランプ構造体１５が第２部材４の側壁部１４に接触する部分の面積を小さくすることも、クランプ構造体１５から第２部材４に加わるモーメントを小さくし固定作業の再現性を向上することに寄与しうる。 Similarly, reducing the area of the portion where the clamp structure 15 contacts the side wall portion 14 of the second member 4 also reduces the moment applied to the second member 4 from the clamp structure 15 and improves the reproducibility of the fixing operation. Can contribute to
図７には、本発明の第６実施形態の位置決め装置１００の構成が示されている。第２実施形態として言及しない事項は、第１乃至第５実施形態のいずれか又は組み合わせに従いうる。第１実施形態の説明において簡単に言及されたように、ブロックの個数は３個でもよい。第７実施形態の位置決め装置１００は、第１ブロック３１、第２ブロック３２および第３ブロック３３を備える一方、第４ブロック３４を備えていない。第１ブロック３１および第２ブロック３２は、ガイドとして機能する第１レール２１によって支持され、第１レール２１に沿ってＸ方向に移動可能である。第３ブロック３３は、ガイドとして機能する第２レール２２によって支持され、第２レール２２に沿ってＸ方向に移動可能である。 FIG. 7 shows a configuration of a positioning device 100 according to a sixth embodiment of the present invention. Items not mentioned in the second embodiment can follow any one or combination of the first to fifth embodiments. As briefly mentioned in the description of the first embodiment, the number of blocks may be three. The positioning device 100 of the seventh embodiment includes the first block 31, the second block 32, and the third block 33, but does not include the fourth block 34. The first block 31 and the second block 32 are supported by the first rail 21 functioning as a guide, and are movable in the X direction along the first rail 21. The third block 33 is supported by the second rail 22 functioning as a guide, and is movable in the X direction along the second rail 22.
第１レール２１は、第１ブロック３１を支持する第１レール部分と、第２ブロック３２を支持する第２レール部分とに分割されてもよい。この場合、第１レール部分と第２レール部分とは、同一直線上に配置されてもよいし、互いに平行な２つの直線上に振り分けて配置されてもよい。 The first rail 21 may be divided into a first rail part supporting the first block 31 and a second rail part supporting the second block 32. In this case, the first rail portion and the second rail portion may be arranged on the same straight line, or may be arranged on two parallel straight lines.
第１ブロック３１、第２ブロック３２および第３ブロック３３は、第１ブロック３１の重心、前記第２ブロック３２の重心および第３ブロック３３の重心を頂点とする三角形を構成するように配置される。ここで、好ましくは、第１ブロック３１、第２ブロック３２および第３ブロック３３は、第１ブロック３１の重心と第２ブロック３２の重心とを結ぶ線分を底辺とする二等辺三角形を構成するように配置される。 The first block 31, the second block 32, and the third block 33 are arranged so as to form a triangle having a vertex at the center of gravity of the first block 31, the center of gravity of the second block 32, and the center of gravity of the third block 33. . Here, preferably, the first block 31, the second block 32, and the third block 33 form an isosceles triangle whose base is a line connecting the center of gravity of the first block 31 and the center of gravity of the second block 32. Are arranged as follows.
第２部材４は、第１ブロック３１、第２ブロック３２および第３ブロック３３に固定され、第１面Ｓ１に対面する第２面Ｓ２を有する。第２部材４は、第２部材４が第１ブロック３１、第２ブロック３２および第３ブロック３３に固定された状態かつ第１部材１に固定されない状態で、Ｘ方向に移動可能である。締結部５は、第１部材１および第２部材４を相互に締結する。 The second member 4 is fixed to the first block 31, the second block 32, and the third block 33, and has a second surface S2 facing the first surface S1. The second member 4 is movable in the X direction in a state where the second member 4 is fixed to the first block 31, the second block 32, and the third block 33 but not fixed to the first member 1. The fastening part 5 fastens the first member 1 and the second member 4 to each other.
１：第１部材、２１：第１レール、２２：第２レール、３１〜３４：ブロック、４：第２部材、５：締結部 1: first member, 21: first rail, 22: second rail, 31 to 34: block, 4: second member, 5: fastening portion
Claims (15)
前記第１方向に交差する第２方向に互いに離隔しかつ前記第１方向に平行に配置されるように前記第１部材に固定された第１レールおよび第２レールと、
前記第１レールによって支持され前記第１レールに沿って移動可能な第１ブロックおよび第２ブロックと、
前記第２レールによって支持され前記第２レールに沿って移動可能な第３ブロックと、
前記第１面に対面する第２面を有し、前記第１ブロック、前記第２ブロックおよび前記第３ブロックに固定された第２部材と、
前記第１面と前記第２面とが接触するように前記第１部材および前記第２部材を相互に締結する締結部と、を備え、
前記第１部材および前記第２部材は、剛性部材である、
ことを特徴とする位置決め装置。 A first member having a first surface parallel to the first direction;
A first rail and a second rail fixed to the first member so as to be spaced apart from each other in a second direction intersecting the first direction and arranged in parallel with the first direction;
A first block and a second block supported by the first rail and movable along the first rail;
A third block supported by the second rail and movable along the second rail;
A second member having a second surface facing the first surface and fixed to the first block, the second block, and the third block;
A fastening portion for fastening the first member and the second member to each other so that the first surface and the second surface are in contact with each other,
The first member and the second member are rigid members;
A positioning device characterized by the above-mentioned.
前記第１方向における前記第１締結具の位置は、前記第１方向における前記第１ブロックの２つの端面の間にあり、前記第１方向における前記第２締結具の位置は、前記第１方向における前記第２ブロックの２つの端面の間にあり、前記第１方向における前記第３締結具の位置は、前記第１方向における前記第３ブロックの２つの端面の間にある、
ことを特徴とする請求項１に記載の位置決め装置。 The fastening unit includes a first fastener, a second fastener, and a third fastener,
The position of the first fastener in the first direction is between two end faces of the first block in the first direction, and the position of the second fastener in the first direction is the first direction. Between the two end faces of the second block in the first direction, the position of the third fastener in the first direction is between the two end faces of the third block in the first direction,
The positioning device according to claim 1, wherein:
ことを特徴とする請求項１又は２に記載の位置決め装置。 The first member has two first surfaces including the first surface, and the two first surfaces face each other.
The positioning device according to claim 1 or 2, wherein:
前記２つの第１面は、前記２つの側面部にそれぞれ設けられる、
ことを特徴とする請求項３に記載の位置決め装置。 The first member includes a bottom surface, and two side surfaces extending from two ends of the bottom surface, respectively.
The two first surfaces are provided on the two side surfaces, respectively.
The positioning device according to claim 3, wherein:
ことを特徴とする請求項４に記載の位置決め装置。 The first member is configured by fastening the bottom surface portion and the two side surface portions to each other,
The positioning device according to claim 4, wherein:
ことを特徴とする請求項４又は５に記載の位置決め装置。 The second member and the two side portions are mutually fastened by a clamp structure;
The positioning device according to claim 4 or 5, wherein:
前記２つの第１面は、前記２つの側面部にそれぞれ設けられる、
ことを特徴とする請求項３に記載の位置決め装置。 The second member includes an upper surface portion and two side surface portions respectively extending from two ends of the upper surface portion,
The two first surfaces are provided on the two side surfaces, respectively.
The positioning device according to claim 3, wherein:
ことを特徴とする請求項７に記載の位置決め装置。 The upper surface portion and the two side surface portions are mutually fastened by bolts;
The positioning device according to claim 7, wherein:
前記第２部材は、前記第１ブロック、前記第２ブロック、前記第３ブロックおよび前記第４ブロックに固定される、
ことを特徴とする請求項１乃至８のいずれか１項に記載の位置決め装置。 A fourth block supported by the second rail and movable along the second rail;
The second member is fixed to the first block, the second block, the third block, and the fourth block,
The positioning device according to any one of claims 1 to 8, wherein:
ことを特徴とする請求項９に記載の位置決め装置。 The first block, the second block, the third block, and the fourth block each have a vertex at the center of gravity of the first block, the center of gravity of the second block, the center of gravity of the third block, and the center of gravity of the fourth block. Are arranged to form a rectangle,
The positioning device according to claim 9, wherein:
前記第１方向における前記第４締結具の位置は、前記第１方向における前記第４ブロックの２つの端面の間にある、
ことを特徴とする請求項１０に記載の位置決め装置。 The fastener further includes a fourth fastener,
A position of the fourth fastener in the first direction is between two end faces of the fourth block in the first direction;
The positioning device according to claim 10, wherein:
ことを特徴とする請求項１乃至８のいずれか１項に記載の位置決め装置。 The first block, the second block, and the third block have a vertex at a center of gravity of the first block, a center of gravity of the second block, and a center of gravity of the third block, and a center of gravity of the first block and the second block. It is arranged to form an isosceles triangle with the line segment connecting the center of gravity of the block as the base.
The positioning device according to any one of claims 1 to 8, wherein:
ことを特徴とする請求項１２に記載の位置決め装置。 The first rail is separated into a first rail portion supporting the first block and a second rail portion supporting the second block;
13. The positioning device according to claim 12, wherein:
ことを特徴とする請求項１乃至１３のいずれか１項に記載の位置決め装置。 In a cross section perpendicular to the first direction, the structure constituted by the first member and the second member fastened by the fastening portion has a hollow quadrangular prism shape,
The positioning device according to any one of claims 1 to 13, wherein:
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| JP7190298B2 (en) | 2022-12-15 |
| CN110908247B (en) | 2024-01-16 |
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