JP2020046394A - Three-dimensional shape measuring device and three-dimensional shape measuring program - Google Patents

Abstract

To provide a three-dimensional shape measuring device and a three-dimensional shape measuring program that allow a user to easily and intuitively grasp the relationship between a desired geometric reference and the shape of a measurement object.SOLUTION: Stereoscopic shape data showing a stereoscopic shape of a measurement object is generated. On the basis of the generated stereoscopic shape data, an image including the stereoscopic shape of the measurement object is displayed on a display unit as a stereoscopic shape image SI such that its attitude can be changed. Designation of a geometric reference element is received on the stereoscopic shape image SI. On the basis of the received reference element, a geometric reference for measuring the shape of the measurement object is specified. A distance image having a mode according to the distance between at least portion of the measurement object and the geometric reference is displayed superimposed on the stereoscopic shape image SI on the display unit.SELECTED DRAWING: Figure 19

Description

  The present invention relates to a three-dimensional shape measuring device and a three-dimensional shape measuring program for measuring a three-dimensional shape of an object to be measured.

  A three-dimensional shape measuring device is used to grasp the surface shape of a measurement object. In a three-dimensional shape measuring apparatus, data indicating a three-dimensional shape of a measurement target is acquired using, for example, the principle of triangulation. The acquired data is analyzed by an application program for dimension measurement, and the shape and dimensions of the measurement target are calculated.

  In the three-dimensional measurement device described in Patent Document 1 as such a three-dimensional shape measurement device, reference three-dimensional shape data serving as a reference when comparing shapes is held. As the reference three-dimensional shape data, for example, CAD data created using CAD (Computer Aided Design) is used.

  The cross-sectional profile of the measured three-dimensional shape data obtained by measuring the shape of the measurement object and the cross-sectional profile of the reference three-dimensional shape data are superimposed and displayed on the measurement screen. At this time, the area between the two profiles is colored according to the difference between the cross-sectional profile of the measured three-dimensional shape data and the cross-sectional profile of the reference three-dimensional shape data. Thereby, the user can easily grasp the difference between the actual shape of the measurement object and the predetermined shape.

JP 2018-31746 A

  However, in the three-dimensional measurement device of Patent Document 1, the user needs to prepare reference three-dimensional shape data in advance before analyzing the shape of the measurement target using the measured three-dimensional shape data. Creating and preparing such reference three-dimensional shape data is troublesome for the user. Further, the present invention is not limited to the above example, and if the deviation of the shape of each part of the measurement target from a desired geometric reference can be grasped, the convenience of the three-dimensional measuring device is improved.

  An object of the present invention is to provide a three-dimensional shape measuring apparatus and a three-dimensional shape measuring program that enable a user to easily and intuitively grasp a relationship between a desired geometric reference and the shape of a measurement object. It is.

  (1) A three-dimensional shape measuring apparatus according to a first aspect of the invention is based on a shape data generation unit that generates three-dimensional shape data indicating a three-dimensional shape of a measurement target, and a three-dimensional shape data generated by the shape data generation unit. A display control unit for displaying an image including the three-dimensional shape of the measurement object as a three-dimensional shape image on a display unit so that the posture can be changed, and an element receiving unit for receiving designation of a geometric element on the three-dimensional shape image displayed on the display unit And, based on the geometric element received by the element receiving unit, comprising a specifying unit that specifies a geometric reference relating to the three-dimensional shape of the measurement target as a geometric reference, the display control unit, at least a part of the measurement target A display mode of a part corresponding to at least a part of the three-dimensional image is set according to a distance from the geometric reference specified by the specifying unit.

  In the three-dimensional shape measuring device, three-dimensional shape data of the measurement target is generated, and a three-dimensional shape image based on the generated three-dimensional shape data is displayed on the display unit. The specification of the geometric element is received on the three-dimensional shape image, and the geometric reference is specified based on the received geometric element. A display mode of a part of the three-dimensional image corresponding to at least a part of the measurement target is set according to a distance between at least a part of the measurement target and the geometric reference.

  Thereby, the user specifies a geometric element on the three-dimensional shape image of the measurement target object, and visually recognizes the three-dimensional shape image displayed on the display unit, thereby displaying a relationship between the desired geometric reference and the shape of the measurement target object. Can be grasped easily and intuitively.

  Setting the display mode of the part of the three-dimensional image means switching the display mode of the part of the three-dimensional image from a predetermined original display mode to a display mode corresponding to the distance. In other words, setting the display mode of the portion of the three-dimensional image means changing the display mode of the portion of the three-dimensional image from a predetermined original display mode to a display mode corresponding to the distance. . In other words, setting the display mode of the portion of the three-dimensional image means that the display mode of the portion of the three-dimensional image is changed from a predetermined original display mode to a display mode corresponding to the distance. .

  (2) The specifying unit may further specify at least a part of the display mode to be set based on the geometric element received by the element receiving unit.

  In this case, the user can easily and intuitively grasp the relationship between the desired geometric element and the shape of the desired portion of the measurement object by specifying the geometric element on the three-dimensional shape image of the measurement object. Becomes possible.

  (3) The display mode may be a color corresponding to a distance between at least a part and the geometric reference.

  In this case, the user can more intuitively grasp the relationship between the desired geometric reference and the shape of at least a part of the measurement target.

  (4) The display control unit causes the display unit to display an index representing a geometric comparison result between at least a part and the geometric reference specified by the specifying unit, and the index displayed on the display unit emphasizes the comparison result. As shown, the display mode of the index may be adjustable.

  In this case, the user can more intuitively grasp the geometric comparison result between the desired geometric reference and the shape of at least a part of the measurement target.

  (5) The three-dimensional shape measuring apparatus irradiates a stage holding unit, a stage held by the stage holding unit, on which the measurement target is mounted, and measurement light having a pattern on the measurement target mounted on the stage. A head unit including a light projecting unit for emitting light, a light receiving unit for receiving the measurement light reflected by the object to be measured, and outputting a light receiving signal indicating a received light amount, and fixedly connecting the head unit and the stage holding unit. The shape data generation unit may further include a connection unit, and the shape data generation unit may generate, as the three-dimensional shape data, point cloud data representing the three-dimensional shape of the measurement target based on the light receiving signal output by the light receiving unit.

  According to the above configuration, since the light projecting unit, the light receiving unit, and the stage holding unit are provided integrally, the positional relationship between the light receiving unit and the stage is uniquely determined. Therefore, point cloud data can be obtained with high accuracy. Therefore, the shape of the measurement object can be measured with high accuracy based on the three-dimensional shape data.

  (6) The three-dimensional shape measurement device calculates a distance between at least a part and the geometric reference based on the three-dimensional shape data, and sets a correspondence between the display mode and the distance based on the calculated distance. The display control unit may further include a setting unit, and the display control unit may set a display mode of a part corresponding to at least a part of the three-dimensional image based on the correspondence set by the correspondence setting unit.

  In this case, the user does not need to determine the correspondence between the display mode and the distance. Further, according to the above configuration, it is possible to set more appropriate correspondence based on the three-dimensional shape data.

  (7) The three-dimensional shape measuring device includes an operation unit operated by a user to specify one geometric element for specifying one geometric reference for one measurement object, and an operation unit operated by the user. A template storage unit that stores an operation procedure as template information, and for another measurement target, another geometric element for specifying another geometric reference corresponding to one geometric reference, a three-dimensional shape of one measurement target. The image processing apparatus may further include a template specifying unit that specifies based on the data, the three-dimensional shape data of the other measurement object, and the template information stored in the template storage unit.

  In this case, when the user wants to set mutually corresponding geometric references for a plurality of measurement objects having a common shape, the user does not need to specify a geometric element for each measurement object.

  (8) A three-dimensional shape measurement program according to a second aspect of the invention is a three-dimensional shape measurement program executable by a processing device, and includes a process of generating three-dimensional shape data indicating a three-dimensional shape of a measurement object. Processing for displaying an image including the three-dimensional shape of the measurement object on the display unit as a three-dimensional shape image based on the obtained three-dimensional shape data so that the posture can be changed, and specifying a geometric element on the three-dimensional shape image displayed on the display unit The processing for causing the processing device to execute the process of receiving the received information and the process of specifying the geometric reference regarding the three-dimensional shape of the measurement target as the geometric reference based on the received geometric element, Including a process of setting a display mode of a part corresponding to at least a part of the three-dimensional image according to a distance between at least a part of the target object and the specified geometric reference

  According to the three-dimensional shape measurement program, three-dimensional shape data of the measurement target is generated, and a three-dimensional shape image based on the generated three-dimensional shape data is displayed on the display unit. The specification of the geometric element is received on the three-dimensional shape image, and the geometric reference is specified based on the received geometric element. A display mode of a part of the three-dimensional image corresponding to at least a part of the measurement target is set according to a distance between at least a part of the measurement target and the geometric reference.

  Thereby, the user specifies a geometric element on the three-dimensional shape image of the measurement target object, and visually recognizes the three-dimensional shape image displayed on the display unit, thereby displaying a relationship between the desired geometric reference and the shape of the measurement target object. Can be grasped easily and intuitively.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to grasp | ascertain the relationship between a desired geometric reference | standard and the shape of a measurement object easily and intuitively.

1 is a block diagram illustrating a configuration of a three-dimensional shape measuring device according to an embodiment of the present invention. FIG. 2 is a schematic diagram illustrating a configuration of a measurement unit of the three-dimensional shape measurement device in FIG. 1. It is a typical external appearance perspective view of a measurement part. FIG. 4 is a schematic side view of the measurement unit in FIG. 3. It is a figure for explaining the principle of a triangulation method. FIG. 4 is a diagram for describing an example of generating a plurality of three-dimensional shape data by capturing an image of a measurement target from a plurality of directions. It is a flowchart which shows the procedure of preparation of shape measurement. It is a flowchart of a shape measurement process. FIG. 9 is a diagram for describing a setting example of a measurement condition. FIG. 9 is a diagram for describing a setting example of a measurement condition. FIG. 9 is a diagram for describing a setting example of a measurement condition. FIG. 9 is a diagram for describing a setting example of a measurement condition. It is an appearance perspective view showing an example of a measuring object. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. FIG. 7 is a diagram for describing one usage example of a display mode setting function. It is a figure for explaining other examples of use of a display mode setting function. It is a figure for explaining other examples of use of a display mode setting function. It is a figure for explaining other examples of use of a display mode setting function. It is a figure for explaining other examples of use of a display mode setting function. It is a figure for explaining other examples of use of a display mode setting function. FIG. 14 is a diagram for explaining still another use example of the display mode setting function. FIG. 14 is a diagram for explaining still another use example of the display mode setting function. FIG. 14 is a diagram for explaining still another use example of the display mode setting function. FIG. 3 is a functional block diagram of a CPU for realizing a display mode setting function according to one embodiment of the present invention. It is a flowchart which shows the basic flow of the display mode setting process based on a display mode setting program. It is a figure showing an example of a geometrical element setting screen for explaining a parallel plane extraction function. It is a figure showing an example of a geometrical element setting screen for explaining a parallel plane extraction function. It is a figure showing an example of a geometric element setting screen for explaining a vertical plane extraction function. It is a figure showing an example of a geometric element setting screen for explaining a vertical plane extraction function. It is a figure showing an example of a geometrical element setting screen for explaining an area extraction function. It is a figure showing an example of a geometrical element setting screen for explaining an area extraction function. FIG. 7 is a diagram illustrating an example of an alignment screen displayed on a display unit. FIG. 7 is a diagram illustrating an example of an alignment screen displayed on a display unit. It is an appearance perspective view showing other examples of a measuring object. FIG. 11 is a diagram for describing one use example of a contrast highlighting function. FIG. 11 is a diagram for describing one use example of a contrast highlighting function. FIG. 11 is a diagram for describing one use example of a contrast highlighting function.

  Hereinafter, a three-dimensional shape measuring apparatus according to an embodiment of the present invention will be described with reference to the drawings.

[1] Configuration of Three-Dimensional Shape Measuring Apparatus FIG. 1 is a block diagram showing a configuration of a three-dimensional shape measuring apparatus according to one embodiment of the present invention. FIG. 2 is a schematic diagram showing a configuration of a measuring unit of the three-dimensional shape measuring apparatus 500 of FIG. Hereinafter, a three-dimensional shape measuring apparatus 500 according to the present embodiment will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the three-dimensional shape measuring apparatus 500 includes a measuring unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400. The measurement unit 100 is, for example, an imaging device integrated with light emission and light reception, and includes a light emission unit 110, a light reception unit 120, an illumination light output unit 130, a stage 140, and a control board 150.

  The measurement unit 100 may include a plurality of light emitting units 110. Further, measuring section 100 may include a plurality of light receiving sections 120. In the present embodiment, measurement unit 100 includes two light emitting units 110 and two light receiving units 120. Hereinafter, when distinguishing the two light emitting units 110, one light emitting unit 110 is referred to as a light emitting unit 110A and the other light emitting unit 110 is referred to as a light emitting unit 110B. When distinguishing the two light receiving units 120, one light receiving unit 120 is called a light receiving unit 120A and the other light receiving unit 120 is called a light receiving unit 120B.

  FIG. 2 shows two light emitting units 110 and one light receiving unit 120 among the two light emitting units 110 and two light receiving units 120. The light projecting unit 110 and the light receiving unit 120 are arranged so as to be arranged in one direction at a position obliquely above the stage 140. Details of the arrangement of the light projecting unit 110 and the light receiving unit 120 will be described later. As shown in FIG. 2, each light projecting unit 110 includes a measurement light source 111, a pattern generation unit 112, and a plurality of lenses 113 and 114. The light receiving unit 120 includes a camera 121 and a lens 122. An object S to be measured is placed on the stage 140.

  The measurement light source 111 of each of the light emitting units 110A and 110B is, for example, a blue LED (light emitting diode). The measurement light source 111 may be another light source such as a halogen lamp. Light emitted from the measurement light source 111 (hereinafter, referred to as measurement light) is appropriately condensed by the lens 113, and then enters the pattern generation unit 112.

  The pattern generation unit 112 is, for example, a DMD (digital micromirror device). The pattern generation unit 112 may be an LCD (Liquid Crystal Display), an LCOS (Liquid Crystal on Silicon), or a mask. The measurement light that has entered the pattern generation unit 112 is converted into a predetermined pattern and a predetermined intensity (brightness) and emitted. The measurement light emitted from the pattern generation unit 112 is converted into light having a diameter larger than the size of the measurement target S by the lens 114, and is then applied to the measurement target S on the stage 140.

  The measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110A are arranged so as to be substantially parallel to the optical axis of the light receiving unit 120. Similarly, the measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110B are arranged so as to be substantially parallel to the optical axis of the light receiving unit 120. On the other hand, the lenses 114 of the light projecting units 110A and 110B are arranged so as to be offset with respect to the measurement light source 111, the lens 113, and the pattern generating unit 112. Accordingly, the optical axes of the light projecting units 110A and 110B are inclined with respect to the optical axis of the light receiving unit 120, and the measurement light is emitted from both sides of the light receiving unit 120 toward the measurement target S, respectively.

  The measurement light reflected by the measurement target S above the stage 140 is condensed and imaged by the lens 122 of the light receiving unit 120, and is received by the imaging element 121 a of the camera 121.

  In order to widen the field of view of the light receiving unit 120, the light receiving unit 120 is configured to have a certain angle of view. In the present embodiment, the imaging field of view of the light receiving unit 120 means a region in space where imaging can be performed by the light receiving unit 120. The angle of view of the light receiving unit 120 is determined by, for example, the dimensions of the image sensor 121a and the focal length of the lens 122. If a wide field of view is not required, a telecentric optical system may be used for the light receiving unit 120. Here, the magnifications of the lenses 122 of the two light receiving units 120 provided in the measuring unit 100 are different from each other. Thus, by selectively using the two light receiving units 120, the measurement target S can be imaged at two different magnifications. The two light receiving units 120 are preferably arranged such that the optical axes of the two light receiving units 120 are parallel to each other.

  The camera 121 is, for example, a CCD (Charge Coupled Device) camera. The imaging device 121a is, for example, a monochrome CCD (charge coupled device). The image sensor 121a may be another image sensor such as a CMOS (complementary metal oxide semiconductor) image sensor. From each pixel of the image sensor 121a, an analog electric signal corresponding to the amount of received light (hereinafter, referred to as a received light signal) is output to the control board 150.

  The illumination light output unit 130 emits red wavelength light, green wavelength light, and blue wavelength light to the measurement target S in a time-division manner. According to this configuration, a color image of the measurement target S can be captured by the light receiving unit 120 using the monochrome CCD.

  When the color CCD has sufficient resolution and sensitivity, the image sensor 121a may be a color CCD. In this case, the illumination light output unit 130 does not need to irradiate the measurement target S with red, green, and blue wavelength light in a time-division manner, and irradiates the measurement target S with white light. Therefore, the configuration of the illumination light source 320 can be simplified.

  An A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted on the control board 150. The light receiving signal output from the camera 121 is sampled at a constant sampling cycle by the A / D converter of the control board 150 and converted into a digital signal under the control of the control unit 300. Digital signals output from the A / D converter are sequentially stored in a FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data. Here, when the camera 121 is, for example, a monochrome CMOS camera, and a digital electric signal corresponding to the amount of received light is output from each pixel of the image sensor 121a to the control board 150, the A / D converter is necessarily required. is not.

  As shown in FIG. 1, the PC 200 includes a CPU (central processing unit) 210, a ROM (read only memory) 220, a working memory 230, a storage device 240, and an operation unit 250. The operation unit 250 includes a keyboard and a pointing device. As the pointing device, a mouse or a joystick is used.

  The ROM 220 stores a system program. The working memory 230 is composed of a RAM (random access memory) and is used for processing various data. The storage device 240 is composed of a hard disk or the like. The storage device 240 stores a three-dimensional shape measurement program. The three-dimensional shape measurement program includes a shape measurement program and a display mode setting program described later. The storage device 240 is used to store various data such as pixel data provided from the control board 150.

  CPU 210 generates image data based on pixel data provided from control board 150. Further, the CPU 210 performs various processes on the generated image data using the work memory 230, and causes the display unit 400 to display an image based on the image data. Further, the CPU 210 gives a drive signal to the later-described stage drive unit 146 through the control board 150. The display unit 400 is configured by, for example, an LCD panel or an organic EL (electroluminescence) panel. The display unit 400 displays an image (hereinafter, referred to as a live image) based on image data acquired in real time by the camera 121 of the light receiving unit 120, for example.

  As shown in FIG. 2, the stage 140 includes a stage base 141 and a stage plate 142. The stage plate 142 is disposed on the stage base 141. The stage plate 142 has a mounting surface on which the measurement target S is mounted. The stage plate 142 may be provided with a mounting portion (for example, a screw hole) for mounting a clamp or a jig. Stage plate 142 according to the present embodiment has a disk shape.

  A substantially cylindrical effective region MR is set in the space above the stage plate 142. The effective region MR is a region that can be irradiated with measurement light by the light projecting units 110A and 110B and can be imaged by the light receiving unit 120. The imaging field of view of the light receiving unit 120 is determined by the magnification, depth of focus, angle of view, and the like of the lens 122 included in the light receiving unit 120.

  The stage 140 is attached to the rotation mechanism 143. The rotation mechanism 143 is fixed to an installation section 161 (FIG. 4) described later. Further, the rotation mechanism 143 includes, for example, an encoder and a stepping motor. The rotating mechanism 143 is driven by the stage operating unit 145 or the stage driving unit 146 in FIG. 1, and rotates the stage 140 around a rotation axis Ax that passes through the center thereof and extends in the vertical direction. The user can rotate the stage 140 by manually operating the stage operation unit 145. The stage driving unit 146 rotates the mounting surface of the stage plate 142 relative to the light receiving unit 120 by supplying a current to the rotation mechanism 143 based on a driving signal given from the PC 200 through the control board 150. be able to.

  When the stage 140 rotates, a signal output from the encoder of the rotation mechanism 143 is sent to the PC 200 through the control board 150. Thereby, CPU 210 in FIG. 1 detects the amount of rotation (rotational position) of stage plate 142 from a predetermined reference angle.

  The control unit 300 includes a control board 310 and an illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light emitting unit 110, the light receiving unit 120, and the control board 150 based on a command from the CPU 210 of the PC 200. The control board 310 and the illumination light source 320 may be mounted on the measurement unit 100.

  Illumination light source 320 includes, for example, three LEDs that emit red light, green light, and blue light. By controlling the brightness of the light emitted from each LED, light of any color can be generated from the illumination light source 320. Light generated from the illumination light source 320 (hereinafter, referred to as illumination light) is output from the illumination light output unit 130 of the measurement unit 100 through a light guide member (light guide) 330. Note that the illumination light source 320 may be provided in the measurement unit 100 without providing the illumination light source 320 in the control unit 300. In this case, the light guide member 330 is not required.

  Here, in the measuring unit 100, these components are connected so that the positional relationship among the plurality of light emitting units 110, the plurality of light receiving units 120, the illumination light output unit 130, and the stage 140 is fixed. .

  FIG. 3 is a schematic external perspective view of the measuring unit 100. In FIG. 3, the appearance of the measurement unit 100 is indicated by a thick solid line, and some components provided inside the measurement unit 100 are indicated by a dotted line. As shown in FIG. 3, measuring section 100 includes pedestal 170. The pedestal 170 is provided with two light emitting units 110, two light receiving units 120, an illumination light output unit 130, and a control board 150. In this state, the positional relationship among the two light emitting units 110, the two light receiving units 120, and the illumination light output unit 130 is fixed by the pedestal 170. The two light receiving units 120 are arranged so as to be vertically arranged. Further, the illumination light output unit 130 has an elliptical cylindrical shape, and is arranged so as to surround the two light receiving units 120. At one end of the illumination light output unit 130, an illumination light exit 131 having an elliptical shape is formed. Further, the two light emitting units 110 are arranged so as to be arranged side by side with the two light receiving units 120 and the illumination light output unit 130 interposed therebetween.

  The pedestal 170 is further provided with a head casing 180 that accommodates two light projecting units 110, two light receiving units 120, an illumination light output unit 130, and a part of the control board 150. The head unit 190 is configured by the two light emitting units 110, the two light receiving units 120, the illumination light output unit 130, the control board 150, the pedestal 170, and the head casing 180.

  The measurement section 100 further includes an installation section 161 and a stand section 162. The installation portion 161 has a flat bottom surface and is formed to extend in one direction with a substantially constant width. The installation section 161 is installed on a horizontal installation surface such as the upper surface of a table.

  The stand 162 is connected to one end of the installation part 161 and is formed to extend upward from one end of the installation part 161. The rotation mechanism 143 of FIG. 2 is fixed at a position near the other end of the installation section 161. The stage 140 is rotatably held by the rotation mechanism 143.

  The pedestal 170 is configured to be detachable from the upper end of the stand 162. By mounting the pedestal 170 of the head unit 190 to the stand unit 162, the head unit 190 and the installation unit 161 are fixedly connected by the stand unit 162. Thereby, the positional relationship between the stage 140, the two light emitting units 110, and the two light receiving units 120 is kept constant.

  Each light projecting unit 110 is positioned such that an irradiation area irradiated with the measurement light includes the stage 140 and a space above the stage 140. The measurement light is guided obliquely downward from the respective light projecting units 110 with respect to the measurement target S. Further, each light receiving unit 120 is positioned such that the optical axis extends obliquely downward and the imaging field of view of camera 121 in FIG. 2 includes stage 140 and the space above it. In FIG. 3, the irradiation region IR of each light projecting unit 110 is indicated by a two-dot chain line, and the imaging field of view TR1 of one light receiving unit 120A is indicated by a single dot chain line. Each of the light receiving units 120A and 120B is fixed in a state where the optical axis of the optical system (the optical axis of the lens 122 in FIG. 2) forms a predetermined angle (for example, 45 degrees) with respect to the mounting surface of the stage plate 142. Is done.

  As shown in FIG. 3, a part of the irradiation region IR of the two light projecting units 110A and 110B and a part of the imaging field of view TR1 of the light receiving unit 120A overlap in the space above the stage 140. An effective area MR1 corresponding to the light receiving unit 120A is set at a position where the irradiation regions IR of the light projecting units 110A and 110B and the imaging field of view TR1 of the light receiving unit 120A overlap.

  The two light receiving units 120A and 120B provided in the measuring unit 100 of this example are different from each other in magnification, depth of focus, and angle of view of the lens 122. Specifically, the magnification of the lens 122 of the light receiving unit 120B is higher than the magnification of the lens 122 of the light receiving unit 120A. Further, the depth of focus of the lens 122 of the light receiving unit 120B is smaller than the depth of focus of the lens 122 of the light receiving unit 120A. Further, the angle of view of the lens 122 of the light receiving unit 120B is smaller than the angle of view of the lens 122 of the light receiving unit 120A. In this case, the imaging field of view of the light receiving unit 120B is smaller than the imaging field of view TR1 of the light receiving unit 120A. Thereby, the effective area MR1 corresponding to one light receiving unit 120A is set on the stage 140 in a relatively wide range. On the other hand, the effective area corresponding to the other light receiving section 120B is set on the stage 140 in a range narrower than the effective area MR1 corresponding to the light receiving section 120A.

  FIG. 4 is a schematic side view of the measuring unit 100 of FIG. In FIG. 4, the optical axis A1 of the optical system of the light receiving unit 120A is indicated by a thick dashed line, and the effective area MR1 of the light receiving unit 120A is indicated by a thick dotted line. The optical axis A2 of the optical system of the light receiving unit 120B is indicated by a dashed line, and the effective area MR2 of the light receiving unit 120B is indicated by a dotted line.

  In the measuring section 100 according to the present embodiment, as shown in FIG. 4, the optical axis A2 is located lower than the optical axis A1. The optical axes A1 and A2 are parallel to each other. The effective area MR1 corresponding to the light receiving unit 120A is set, for example, around an intersection F1 between the rotation axis Ax of the stage 140 and the focal plane of the optical system of the light receiving unit 120A. The effective area MR2 corresponding to the light receiving unit 120B is set, for example, around an intersection F2 between the rotation axis Ax of the stage 140 and the focal plane of the optical system of the light receiving unit 120B.

  In the measuring unit 100 shown in FIGS. 3 and 4, a three-dimensional coordinate system (hereinafter, referred to as an apparatus coordinate system) unique to the measuring unit 100 is defined in a space on the stage 140 including the effective regions MR1 and MR2. Is done. The apparatus coordinate system of the present example includes an X axis, a Y axis, and a Z axis that are orthogonal to the origin. In the following description, a direction parallel to the X axis of the apparatus coordinate system is called an X direction, a direction parallel to the Y axis is called a Y direction, and a direction parallel to the Z axis is called a Z direction. Further, the direction rotating about an axis parallel to the Z axis is referred to as a θ direction. The X direction and the Y direction are orthogonal to each other in a plane parallel to the mounting surface of the stage plate 142. The Z direction is orthogonal to a plane parallel to the mounting surface of the stage plate 142. 3 and 4, the X direction, the Y direction, the Z direction, and the θ direction are indicated by arrows.

[2] Three-dimensional shape data indicating the three-dimensional shape of the object to be measured (1) Shape measurement by triangular ranging method In the measuring unit 100, the shape of the measuring object S is measured by the triangular ranging method. FIG. 5 is a diagram for explaining the principle of the triangulation method. In FIG. 5, the X direction, the Y direction, the Z direction, and the θ direction defined together with the device coordinate system are indicated by arrows.

  As shown in FIG. 5, the angle α between the optical axis of the measurement light emitted from the light projecting unit 110 and the optical axis of the measurement light incident on the light receiving unit 120 (the optical axis of the light receiving unit 120) is set in advance. You. The angle α is larger than 0 degree and smaller than 90 degrees.

  When the measurement target S is not mounted on the stage 140, the measurement light emitted from the light projecting unit 110 is reflected by the point O on the mounting surface of the stage 140 and enters the light receiving unit 120. On the other hand, when the measurement target S is placed on the stage 140, the measurement light emitted from the light projecting unit 110 is reflected by the point A on the surface of the measurement target S and enters the light receiving unit 120.

  Assuming that the distance between the point O and the point A in the X direction is d, the height h of the point A of the measurement target S with respect to the mounting surface of the stage 140 is given by h = d ÷ tan (α). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between the point O and the point A in the X direction based on the pixel data of the measurement target S provided by the control board 150. Further, the CPU 210 calculates a height h of the point A on the surface of the measurement target S based on the measured distance d. By calculating the heights of all points on the surface of the measurement target S, it is possible to specify the coordinates expressed in the apparatus coordinate system for all points irradiated with the measurement light. Thereby, the three-dimensional shape of the measurement target S is measured.

  In order to irradiate all points on the surface of the measurement target S with measurement light, measurement lights having various patterns are emitted from the light projecting unit 110 in FIG. The pattern of the measurement light is controlled by the pattern generation unit 112 in FIG.

  For example, as the first pattern, measurement light having a linear cross section parallel to the Y direction (hereinafter, referred to as linear measurement light) is emitted from the light projecting unit 110. As the second pattern, measurement light (hereinafter, referred to as sinusoidal measurement light) having a linear cross section parallel to the Y direction and having a pattern in which the intensity changes sinusoidally in the X direction is projected. The light is emitted from the unit 110 a plurality of times (four times in this example). Further, as a third pattern, measurement light having a linear cross section parallel to the Y direction and arranged in the X direction (hereinafter, referred to as stripe measurement light) is emitted from the light projecting unit 110 a plurality of times (this example). Are emitted 16 times). Further, as a fourth pattern, a measuring light (hereinafter, referred to as a code-like measuring light) having a linear cross section parallel to the Y direction and having a bright portion and a dark portion arranged in the X direction is projected. (In this example, four times). The proportions of the bright and dark portions of the coded measurement light are 50%, respectively.

  The above-described method of scanning the linear measurement light on the measurement target S is generally called a light-section method. On the other hand, a method of irradiating the measurement target S with the sine wave measurement light, the stripe measurement light, or the code measurement light is classified as a pattern projection method. Among the pattern projection methods, a method of irradiating the measurement target S with the sine wave measurement light or the stripe measurement light is classified as a phase shift method, and a method of irradiating the measurement target S with the code measurement light is a space code. Classified into laws.

  In measurement section 100 according to the present embodiment, measurement light can be projected from a plurality of (two in this example) directions different from each other on measurement object S mounted on stage 140. Thereby, when there is a part that cannot be measured by the measuring light projected from the light projecting unit 110A, the shape of the unmeasurable part is measured using the measuring light projected from the light projecting unit 110B. be able to. Similarly, when there is a part that cannot be measured by the measuring light projected from the light projecting unit 110B, the shape of the unmeasurable part is measured using the measuring light projected from the light projecting unit 110A. be able to. As a result, unmeasurable portions of the measurement target S can be reduced.

  Although the above-described light sectioning method, pattern projection method, phase shift method, and space code method each have disadvantages and advantages, they all have in common that they use the principle of triangulation. Based on image data (hereinafter, referred to as pattern image data) of the measurement target S onto which the measurement light having the predetermined pattern is projected, point cloud (point cloud) data representing a three-dimensional shape of the measurement target S is generated. You.

  In the following description, the point cloud data representing the three-dimensional shape of the measurement target S will be referred to as three-dimensional shape data. The three-dimensional shape data includes position data of a plurality of points on the surface of the measurement target S. The position data represents, for example, coordinates in the X, Y, and Z directions. In this case, assuming that data of an arbitrary point in the three-dimensional shape data is Pn (n is a natural number), Pn can be represented by (Xn, Yn, Zn) using, for example, a coordinate value of a device coordinate system. Note that the three-dimensional shape data may be constituted by surface information data generated based on the point cloud data, and may include data in another format such as a polygon mesh. An image representing the three-dimensional shape of the measurement target S can be displayed based on the three-dimensional shape data. Hereinafter, an image including the three-dimensional shape of the measurement target S displayed based on the three-dimensional shape data is referred to as a three-dimensional shape image.

  In the present embodiment, the three-dimensional shape image is an image showing a state in which the three-dimensional shape data is projected on an arbitrary plane in which a two-dimensional coordinate system is defined, and is used to receive designation of a measurement location by a user. It is an image. The user can designate a plane on which the three-dimensional shape data is projected as a direction in which the measurement target S is viewed (the position of the light receiving unit 120 with respect to the measurement target S). Thereby, the posture (direction) of the measurement target S represented by the three-dimensional shape image changes.

(2) Synthesis of a plurality of three-dimensional shape data If the position and orientation of the measurement target S with respect to the light projecting unit 110 and the light receiving unit 120 are constant, only a part of the measurement target S is irradiated with the measurement light. Further, only light reflected by a part of the measurement target S enters the light receiving unit 120. Therefore, it is not possible to obtain three-dimensional shape data over a wide range of the surface of the measurement target S. Therefore, by changing the position or orientation of the measurement target S, the measurement target S is imaged from a plurality of different directions, and a plurality of three-dimensional shape data respectively corresponding to the plurality of imaging directions is acquired. A plurality of three-dimensional shape data may be combined.

  FIG. 6 is a diagram illustrating an example in which a plurality of three-dimensional shape data is generated by imaging the measurement target S from a plurality of directions. For example, as shown in FIG. 6A, after the position and orientation of the measurement target S are adjusted on the stage 140 by the user, the measurement target S is first imaged by using the measurement light. Three-dimensional shape data is generated. FIG. 6D shows an example of the three-dimensional shape image obtained as a result. The three-dimensional shape data is generated based on the measurement light reflected on the surface of the measurement target S and incident on the light receiving unit 120. Therefore, three-dimensional shape data is generated for a portion of the surface of the measurement target S that is visible from the position of the light receiving unit 120, but a portion of the surface of the measurement target S that is not visible from the position of the light receiving unit 120. Cannot generate three-dimensional shape data.

  Therefore, as shown in FIG. 6B, after the stage 140 is rotated by a fixed angle by the rotation mechanism 143 of FIG. 2, the measurement object S is imaged using the measurement light, so that the second three-dimensional shape data is obtained. Is generated. In the example of FIG. 6B, when the stage 140 is viewed from above, the stage 140 is rotated approximately 45 degrees counterclockwise from the state of FIG. 6A. FIG. 6E shows an example of the three-dimensional shape image acquired by the above. As described above, when the stage 140 rotates, a portion of the surface of the measurement target S that is visible from the position of the light receiving unit 120 and a portion that is not visible also change with the rotation. As a result, three-dimensional shape data including a part not acquired at the time of the first imaging is generated.

  Further, as shown in FIG. 6C, after the stage 140 is rotated by a fixed angle by the rotation mechanism 143 of FIG. 2, the measurement object S is imaged using the measurement light, so that the third three-dimensional shape data is obtained. Is generated. In the example of FIG. 6C, when the stage 140 is viewed from above, the stage 140 is rotated approximately 45 degrees counterclockwise from the state of FIG. 6B. FIG. 6F shows an example of the three-dimensional shape image acquired thereby.

  By repeating the rotation of the stage 140 and the imaging of the measurement target S in this manner, a plurality of three-dimensional shape data respectively corresponding to a plurality of imaging directions are generated.

  At the time of the plurality of imagings, the rotation position (rotation angle) of the stage 140 is detected by the CPU 210 in FIG. The positional relationship between the two light emitting units 110 and two light receiving units 120 and the rotation axis Ax of the stage 140 is kept constant. Parameters (hereinafter, device parameters) indicating these relative positions are stored in advance in, for example, the storage device 240 in FIG. The device parameters are represented, for example, in a device coordinate system.

  In this case, based on the device parameters and the rotational position of the stage 140, the position data included in the plurality of three-dimensional shape data may be represented by a virtual common three-dimensional coordinate system based on a part of the stage 140. Then, coordinate conversion of each three-dimensional shape data can be executed.

  In this example, as described above, a plurality of three-dimensional shape data is coordinate-transformed so as to be represented by a common three-dimensional coordinate system, and the plurality of coordinate-converted three-dimensional shape data are synthesized by pattern matching of a portion overlapping each other. Is done. Thereby, the three-dimensional shape data over a wide range of the outer surface of the measurement target S is generated.

[3] Texture Image Data Representing the Appearance of the Measurement Object In the measurement unit 100, the illumination light output unit 130 irradiates the measurement object S with illumination light, or the light projecting units 110A and 110B transmit the measurement object S to the measurement object S. Image data (hereinafter, referred to as texture image data) representing the appearance (surface state) of the measurement target S is generated in a state where the uniform measurement light is irradiated. The uniform measurement light is measurement light having no pattern and can be used instead of illumination light. Hereinafter, such measurement light is referred to as uniform measurement light. The surface state of the measurement target S includes, for example, a pattern or a color. Hereinafter, an image represented by the texture image data is referred to as a texture image.

  Various examples of the texture image data will be described. For example, a plurality of texture image data may be acquired while the focal position of the light receiving unit 120 is relatively changed with respect to the measurement target S. In this case, by combining a plurality of texture image data, texture image data in which the entire surface of the measurement target S is in focus (hereinafter, referred to as all-focus texture image data) is generated. When generating all-focus texture image data, the measuring unit 100 needs to be provided with a focal point moving mechanism that moves the focal position of the light receiving unit 120.

  Also, a plurality of texture image data may be acquired under a plurality of different imaging conditions. The imaging conditions include, for example, the exposure time of the light receiving unit 120, the intensity (brightness) of the illumination light from the illumination light output unit 130, the intensity (brightness) of the uniform measurement light from the light projecting unit 110, and the like. In this case, by performing a well-known high dynamic (HDR) synthesis using the obtained plurality of texture image data, texture image data in which blackout and overexposure are suppressed (hereinafter, referred to as HDR texture image data). ) Is generated.

  Further, the imaging condition may be changed while the focal position is changed. Specifically, the focus of the light receiving unit 120 is relatively changed to a plurality of positions with respect to the measurement target S, and texture image data is acquired at each position under a plurality of different imaging conditions. By synthesizing the plurality of acquired texture image data, texture image data in which the entire surface of the measurement target S is in focus and blackouts and overexposures are suppressed is generated.

  Each texture image data includes texture information (information representing an optical surface state) representing the color or luminance of each point of the measurement target S. On the other hand, the above-mentioned three-dimensional shape data does not include information on the optical surface state of the measured object S. Therefore, by combining the three-dimensional shape data and any of the texture image data, three-dimensional shape data with texture in which texture information is added to the three-dimensional shape data is generated.

  The textured three-dimensional shape data includes position data of a plurality of points on the surface of the measurement target S and data indicating the color or luminance of the point associated with the position data of each point. In this case, assuming that data of an arbitrary point in the textured three-dimensional shape data is TPn (n is a natural number), TPn is, for example, a coordinate value of a device coordinate system and components of three primary colors of red, green, and blue (R, G , B) and (Xn, Yn, Zn, Rn, Gn, Bn). Alternatively, TPn can be represented by (Xn, Yn, Zn, In) using, for example, a coordinate value of a device coordinate system and a luminance value (I). The textured three-dimensional shape data may be configured by surface information data generated based on the point cloud data.

  In the following description, a texture image represented by texture image data acquired at a constant focus position and imaging conditions is referred to as a normal texture image, an image represented by all-focus texture image data is referred to as an all-focus texture image, An image represented by HDR texture image data is called an HDR texture image. The image represented by the textured three-dimensional shape data is called a textured three-dimensional shape image.

  In the present embodiment, the textured three-dimensional shape image is an image showing a state where the textured three-dimensional shape data is projected on an arbitrary plane in which a two-dimensional coordinate system is defined, and the user designates a measurement location. This is an image for accepting. The user can specify a plane on which the textured three-dimensional shape data is projected as a direction in which the measurement target S is viewed (the position of the light receiving unit 120 with respect to the measurement target S). Accordingly, the direction of the measurement target S represented by the textured three-dimensional shape image changes.

  As described above, in order to generate the texture image data, the measurement target S is imaged using the illumination light or the uniform measurement light. Here, as described above, the illumination light output unit 130 has the illumination light exit 131 formed so as to surround the two light receiving units 120. With such a configuration, at least a part of the illumination light emitted from the emission port 131 irradiates the measurement target S in a state substantially parallel to the optical axis of the light receiving unit 120. Accordingly, when the measurement target S is imaged using the illumination light, a shadow component is not easily generated in the generated texture image data. Therefore, it is preferable to use illumination light when generating texture image data.

  As shown in the example of FIG. 6, when a plurality of three-dimensional shape data is generated by imaging the measurement target S from a plurality of directions, illumination light or uniform measurement is performed together with imaging using the measurement light. Imaging using light may be performed. In this case, a plurality of texture image data respectively corresponding to the plurality of three-dimensional shape data can be generated. Therefore, by combining a plurality of three-dimensional shape data and a plurality of texture image data, textured three-dimensional shape data representing a three-dimensional shape and a surface state over a wide range of the outer surface of the measurement target S can be generated. .

[4] Shape Measurement (1) Preparation for Shape Measurement First, the user prepares for shape measurement before measuring the measurement target S. FIG. 7 is a flowchart showing a procedure for preparing for shape measurement. Hereinafter, the procedure for preparing for shape measurement will be described with reference to FIGS. 1, 2, and 7. FIG. First, the user places the measurement target S on the stage 140 (Step S1). Next, the user irradiates the measurement target S with measurement light from the light projecting unit 110 (step S2). At this time, a live image of the measurement target S is displayed on the display unit 400. Subsequently, the user adjusts the brightness of the acquired live image and the position and orientation of the measurement target S while viewing the live image displayed on the display unit 400 (hereinafter, referred to as first adjustment). Is performed (step S3). The brightness of the live image acquired in step S3 can be adjusted by changing at least one of the amount of measurement light and the exposure time of the light receiving unit 120. In the present embodiment, one of the light amount of the measurement light and the exposure time of the light receiving unit 120 is adjusted in order to make the brightness of the live image acquired using the measurement light suitable for observation.

  In step S2, any of the above-described first to fourth patterns of measurement light may be applied to the measurement target S, or the uniform measurement light may be applied to the measurement target S. In step S3, when no shadow is generated at a location to be measured on the measurement target S (hereinafter, referred to as a measurement location), the user does not need to adjust the position and orientation of the measurement target S, The light amount of the measurement light or the exposure time of the light receiving unit 120 may be adjusted.

  Next, the user stops the irradiation of the measurement light and irradiates the measurement target S with the illumination light from the illumination light output unit 130 (step S4). At this time, a live image of the measurement target S is displayed on the display unit 400. Subsequently, the user adjusts the brightness of the acquired live image (hereinafter, referred to as a second adjustment) while viewing the live image displayed on the display unit 400 (Step S5). The brightness of the live image acquired in step S5 can be adjusted by changing at least one of the amount of illumination light and the exposure time of the light receiving unit 120, similarly to the example of step S3. In the present embodiment, one of the amount of illumination light and the exposure time of the light receiving unit 120 is adjusted in order to make the brightness of a live image obtained using illumination light suitable for observation.

  Next, the user checks the live image displayed on the display unit 400, and the light amount, the exposure time of the light receiving unit 120, and the position and orientation of the measurement target S (hereinafter, referred to as an observation state) are appropriate. It is determined whether or not this is the case (step S6). In step S6, the measurement target S may be irradiated with the measurement light, the illumination light may be irradiated, or the measurement light and the illumination light may be sequentially irradiated.

  If it is determined in step S6 that the observation state is not appropriate, the user returns to the processing in step S2. On the other hand, if it is determined in step S6 that the observation state is appropriate, the user ends the preparation for shape measurement.

  In the above example, the second adjustment is performed after the first adjustment, but the first adjustment may be performed after the second adjustment. In this case, the user adjusts the position and orientation of the measurement target S in the second adjustment, and confirms that a desired portion of the measurement target S is irradiated with the measurement light during the first adjustment. Is also good. If the desired portion of the measurement target S is not irradiated with the measurement light, the position and orientation of the measurement target S are readjusted, and the light amount of the illumination light or the exposure time of the light receiving unit 120 is again adjusted as a second adjustment. May be adjusted.

  Here, at the time of the second adjustment in step S5, the user may select the type of the texture image to be acquired. The types of texture images include, for example, a normal texture image, an all-focus texture image, and an HDR texture image. In this case, by performing the second adjustment, the optimal light amount condition of the illumination light for generating the texture image data of the selected texture image or the condition of the exposure time of the light receiving unit 120 corresponding to the illumination light is satisfied. It may be set automatically.

(2) Shape Measurement Processing After the user prepares for the shape measurement in FIG. 7, the shape measurement processing of the measurement target S is performed. FIG. 8 is a flowchart of the shape measurement process. The shape measurement process is started by the CPU 210 of FIG. 1 executing a shape measurement program in response to a user's instruction to start the shape measurement process.

  First, the CPU 210 irradiates the measurement target S with measurement light to acquire pattern image data (step S41). The acquired pattern image data is stored in the working memory 230.

  Next, the CPU 210 generates three-dimensional shape data indicating the three-dimensional shape of the measurement target S by processing the acquired pattern image data using a predetermined algorithm (step S42). The generated three-dimensional shape data is stored in the working memory 230.

  Next, the CPU 210 irradiates the measurement target S with illumination light or uniform measurement light, and acquires texture image data (step S43). The acquired texture image data is stored in the working memory 230.

  Next, the CPU 210 generates textured three-dimensional shape data by combining the three-dimensional shape data generated in step S42 with the texture image data obtained in step S43 (step S44).

  Here, before the start of the shape measurement processing, predetermined data generation conditions are stored in the storage device 240 of FIG. The data generation condition includes information on three-dimensional shape data to be generated in the shape measurement process. For example, as shown in the example of FIG. 6, when a plurality of three-dimensional shape data obtained by performing imaging from a plurality of directions is combined to generate one three-dimensional shape data, the plurality of three-dimensional shape data is Stage 140 (FIG. 2) needs to be rotated to generate. Therefore, the rotation position of the stage 140, the rotation direction of the stage 140, the number of times of imaging, and the like for each imaging are stored in the storage device 240 as data generation conditions.

  After the process of step S44, the CPU 210 determines whether or not all imaging of the measurement target S has been completed based on a preset generation condition (step S45). If not all imaging has been completed, the CPU 210 rotates the stage 140 (FIG. 2) by a predetermined pitch based on the generation conditions (step S46), and returns to the process of step S41.

  When all imaging is completed in step S45, the CPU 210 synthesizes a plurality of pieces of three-dimensional shape data generated by repeating the processing of step S42 a plurality of times, and generates the data by repeating the processing of step S44 a plurality of times. A plurality of textured three-dimensional shape data is synthesized (step S47). If the processes of steps S41 to S45 have been performed only once, the process of step S47 is omitted. In this way, three-dimensional shape data and three-dimensional shape data with texture used for measurement of the measurement target S are generated.

  Next, based on the generated three-dimensional shape data or textured three-dimensional shape data, CPU 210 causes display unit 400 to display a three-dimensional shape image or textured three-dimensional shape image of measurement target S (step S48). In this case, the user can appropriately select either the three-dimensional image or the three-dimensional image with texture as the image to be displayed on the display unit 400.

  Thereafter, the CPU 210 sets the measurement conditions in response to the operation of the operation unit 250 in FIG. 1 by the user, and measures the measurement location based on the set measurement conditions (step S49). The setting of the measurement condition will be described later. Thus, the shape measurement processing ends.

  In the shape measurement processing described above, the processing of steps S41 to S45, S47, and S48 is mainly performed by the shape data generation unit 211 in FIG.

(3) Setting of measurement conditions The measurement conditions include measurement locations and measurement items. When the measurement condition is set, for example, a three-dimensional shape image is displayed on the display unit 400 by the processing in step S48 described above. The user can specify the direction in which the measurement target S is viewed (the position of the light receiving unit 120 with respect to the measurement target S) by operating the operation unit 250 in FIG. In this case, the CPU 210 adjusts the orientation of the observation target S on the display unit 400 so that the state of viewing the measurement target S from the specified direction is reproduced in response to the designation of the direction by the user. The displayed three-dimensional shape image is displayed.

  By visually recognizing the three-dimensional shape image, the user designates a measurement location on the three-dimensional shape image while roughly grasping the shape of each part of the measurement target S. At this time, the user can specify a geometric shape (for example, a point, a straight line, a circle, a surface, a sphere, a cylinder, a cone, or the like) including the measurement location in order to specify the measurement location. In addition, the user can specify measurement items for the specified geometric shape. The measurement item is a type of a parameter to be measured at a measurement location of the measurement target S specified by the user, and includes a distance, a height, a diameter, an area, and the like.

  9 to 12 are diagrams for explaining examples of setting measurement conditions. FIG. 9 shows an example of a three-dimensional shape image SI displayed on the display unit 400 in the process of step S48 for the measurement target S on which one element is mounted on the substrate. In the three-dimensional shape image SI of FIG. 9, images B1I and B2I of the measurement target S that indicate the substrate and the element, respectively, are clearly distinguished.

  For example, by operating the pointer PI displayed on the screen of the display unit 400, the user designates a portion of the image B2I corresponding to the upper surface of the element as a measurement location, as shown in FIG. Next, the user operates the pointer PI to designate a portion of the image B1I corresponding to the upper surface of the board as a measurement location, as shown in FIG.

  Here, at the time of setting the measurement conditions, it is preferable that the measurement location specified by the user is displayed in a different mode from other portions. In the examples of FIG. 10 and FIG. 11, the measurement points designated by the user are hatched. This allows the user to easily identify the measurement location specified by the user.

  Subsequently, the user specifies a distance between two measurement points (planes) specified as measurement items. Thus, the distance between the upper surface of the substrate and the upper surface of the element is calculated based on the point cloud data corresponding to the upper surface of the substrate and the point cloud data corresponding to the upper surface of the element. As a result, as shown in FIG. 12, the calculation result is displayed on the display unit 400 as a measurement result. In the example of FIG. 12, “zz (mm)” is displayed as the distance between the upper surface of the substrate and the upper surface of the element.

[5] Display Mode Setting Function (1) Outline of Display Mode Setting Function The three-dimensional shape measuring apparatus 500 measures using three-dimensional shape data or textured three-dimensional shape data obtained by the processing of steps S41 to S47 of the shape measurement process. It has a display mode setting function for more accurately grasping the shape of each part of the object S.

  The display mode setting function sets a geometric reference (hereinafter, referred to as a geometric reference) regarding the three-dimensional shape of the measurement target S for the measurement target S for which the three-dimensional shape data has been generated, and sets the set geometric reference. Is a function for setting the display mode of at least a part of the three-dimensional shape image of the measurement target S based on. In the present embodiment, setting at least a part of the display mode of the three-dimensional image means that at least a part of the display mode of the three-dimensional image is determined based on a geometric reference from a predetermined original display mode. It means to switch to the display mode. In other words, setting at least a part of the display mode of the three-dimensional image refers to another display mode in which at least a part of the display mode of the three-dimensional image is determined based on a geometric reference from a predetermined original display mode. Means to change. In other words, setting at least a part of the display mode of the three-dimensional image means that at least a part of the display mode of the three-dimensional image is determined based on a geometrical reference from a predetermined original display mode. It means to make an embodiment.

  According to the display mode setting function, the display mode of a portion corresponding to at least a part of the measurement target S in the three-dimensional shape image is determined by a distance between the at least a part of the measurement target S and the set geometric reference. (Hereinafter, referred to as a comparison distance). In the present embodiment, a color corresponding to the comparison distance is set as the display mode.

  The geometric criterion is a geometric criterion composed of points, lines, or planes represented in the device coordinate system. Further, in the display mode setting function, it is also possible to set a portion of the measurement target S to be set as a display mode (hereinafter, referred to as a measurement target portion). The measurement target portion may be a part of the measurement target S or may be the entire measurement target S.

(2) One usage example of display mode setting function Hereinafter, a basic usage example of the display mode setting function will be described. FIG. 13 is an external perspective view illustrating an example of the measurement target S. The measurement object S in FIG. 13 has a structure in which a step is formed on the upper surface of a member having a substantially rectangular parallelepiped shape, and a hollow that opens upward is formed in the center of the upper surface.

  The upper surface includes an upper step surface s11 and a lower step surface s12 parallel to each other. The dent has a rectangular bottom surface s21 parallel to the upper step surface s11 and the lower step surface s12. A vertical surface s22 is formed from one side of the bottom surface s21 to the upper step surface s11. An inclined surface s23 is formed from the other side facing one side of the bottom surface s21 to the lower step surface s12. The vertical surface s22 is perpendicular to the bottom surface s21, and the inclined surface s23 is inclined with respect to the bottom surface s21. Further, the measurement target S has one end face s31 and the other end face s32 facing each other in the longitudinal direction. The vertical surface s22, the one end surface s31, and the other end surface s32 are parallel to each other.

  14 to 25 are diagrams for explaining one usage example of the display mode setting function. In this example, the user sets the display mode setting function for the measurement target S in FIG. 13 in order to grasp the details of the positional relationship between the upper surface s11, the lower surface s12, the bottom surface s21, the vertical surface s22, and the inclined surface s23. It is assumed that is used. It is assumed that the three-dimensional shape data of the measurement target S in FIG. 13 is stored in the storage device 240 in FIG. 1 in advance.

  In response to the user's instruction to use the display mode setting function, a geometric element setting screen SC1 is displayed on the display section 400 of FIG. 1 as shown in FIG. The geometric element setting screen SC1 is a screen on which a user specifies a geometric element (hereinafter, referred to as a geometric element) for specifying the geometric reference or the measurement target portion on the three-dimensional shape image SI. is there.

  In the geometric element setting screen SC1, the display area of the display unit 400 is divided into a main display area ma and a sub display area sa. In the geometric element setting screen SC1, the main display area ma and the sub display area sa are arranged side by side.

  The three-dimensional shape image SI is displayed in the main display area ma. The user can change the posture of the measurement target S in the three-dimensional shape image SI to a desired posture by performing a drag operation or the like on the main display area ma.

  In the sub-display area sa, an element type selection field es, a name input field f01, a return button b01, a setting button b02, and a display mode button b03 are displayed. In the element type selection field es, a plurality of item icons ic respectively corresponding to a plurality of geometric element types are displayed. Types of geometric elements include planes, cylinders, cones, spheres and points.

  In this example, the user sets the geometric element by specifying the type of the geometric element, the position and the name of the element to be set on the device coordinate system. Specifically, the user designates the type of the element by operating one of the plurality of item icons ic displayed in the element type selection field es. At this time, the designated item icon ic is highlighted, for example. In the example of FIG. 14, when the item icon ic corresponding to the plane is operated, the state where the item icon ic is highlighted is indicated by hatching.

  Next, the user inputs a desired name for the element to be set in the name input field f01. In the name input field f01, a name according to a method predetermined according to the type of the designated element may be automatically input.

  Further, the user specifies the position of the element on the three-dimensional shape image SI displayed in the main display area ma. For example, the user specifies a plurality of portions on the three-dimensional shape image SI corresponding to three or more portions of the measurement target S by a single click operation in a state where the plane is specified as the type of the element. In this case, the position and size of a plane on the device coordinate system defined by three or more portions of the measurement target S are determined. The plane on the device coordinate system defined by the three or more parts may be a plane including a plurality of parts, or may be a plane fitted to the plurality of parts.

  Alternatively, the user specifies a portion on the three-dimensional shape image SI corresponding to a desired flat portion of the measurement target S by a double-click operation in a state where the plane is specified as the element type. In this case, the position and size of a plane on the device coordinate system corresponding to the plane portion of the measurement target S are determined.

  The return button b01 is a button for the user to instruct cancellation of use of the display mode setting function. The user operates the return button b01 while the geometric element setting screen SC1 is displayed on the display unit 400. Thereby, the display state of the display unit 400 returns to the state at the time of normal shape measurement (for example, the state shown in FIGS. 9 to 12).

  The setting button b02 is a button for the user to instruct the setting of the geometric element. As described above, the user operates the setting button b02 after designating the type of the geometric element, the position and the name of the element to be set on the device coordinate system. Thereby, a series of specified contents is stored in the storage device 240 of FIG. 1 for each geometric element (geometric element setting).

  When the geometric element is set, an image indicating the set geometric element is superimposed and displayed on the three-dimensional shape image SI in the main display area ma, as indicated by a dotted line and hatching in FIG. Thereby, the user can easily grasp the geometric element set by the user. In this example, the geometric elements “plane 1”, “plane 2”, and “plane 0” respectively corresponding to the upper surface s11, the lower surface s12, the bottom surface s21, the vertical surface s22, and the inclined surface s23 of the measurement target S in FIG. , “Plane 3” and “Plane 4” are set.

  The display mode button b03 is a button for the user to instruct the setting of the display mode according to the above-mentioned comparison distance for the three-dimensional shape image SI displayed in the main display area ma. The setting of the display mode according to the comparison distance is performed based on one or a plurality of geometric elements set on the geometric element setting screen SC1.

  After setting a desired geometric element, the user operates the display mode button b03. Thereby, as shown in FIG. 16, the screen displayed on the display unit 400 switches from the geometric element setting screen SC1 to the display mode setting screen SC2. In the display mode setting screen SC2, as in the example of the geometric element setting screen SC1, the display area of the display unit 400 is divided into a main display area ma and a sub-display area sa.

  Immediately after the screen switching, the display state of the main display area ma is maintained at the display state before the switching. On the other hand, in the sub-display area sa, a correspondence setting column dc, a target pull-down menu m11, a reference pull-down menu m12, a return button b04, an OK button b05, and a geometric element button b06 are displayed.

  As described above, in the display mode setting function according to the present embodiment, color setting according to the comparison distance is performed as a display mode of a portion corresponding to at least a part of the measurement target S in the three-dimensional shape image. Will be The correspondence setting column dc displays buttons, sliders, and the like for setting the correspondence between the comparison distance and the color.

  Specifically, a color display bar 411, a distance reference adjustment bar 412, a color range adjustment bar 413, other setting buttons 414, and a corresponding automatic setting button 415 are displayed in the correspondence setting column dc.

  In the color display bar 411, a plurality of types of colors that can be displayed in the three-dimensional image SI are displayed in a row corresponding to a comparison distance previously associated as a plurality of types of display modes. In the predetermined drawings after FIG. 16, a plurality of different types of dot patterns are shown instead of the plurality of types of colors displayed in the three-dimensional image SI. A color display bar 411 shown in FIG. 16 shows six types of dot patterns having different densities stepwise. These dot patterns represent, for example, blue, light blue, green, yellow, orange, and red in order of decreasing density from decreasing density. Thus, the color located at the center of the colors arranged in the color display bar 411 in the order of spectrum is referred to as a reference color.

  Distance reference adjustment bar 412 includes a slider. By operating the slider of the distance reference adjustment bar 412, the user can set a reference value (hereinafter, referred to as a reference color distance) of the comparison distance corresponding to the reference color. For example, when a horizontal plane is set as the geometric reference and the reference color distance is set to 10.00 mm, when the measurement target portion is separated from the plane by 10.00 mm, the measurement target portion is separated from the measurement target portion by 10.00 mm. The image will be represented by the reference color.

  The color range adjustment bar 413 includes a slider. By operating the slider of the color range adjustment bar 413, the user can set the range of the comparison distance to be represented by a plurality of types of colors displayed on the color display bar 411. For example, when 5.00 mm is set as the range of the comparison distance, a range of ± 5.00 mm around the reference color distance is associated with any of the colors displayed on the color display bar 411.

  The automatic correspondence setting button 415 is a button for the user to instruct that the correspondence between the comparison distance and the display mode (color in this example) should be automatically set. When a geometric reference and a measurement target portion are set by operating a target pull-down menu m11 and a reference pull-down menu m12 described later, a comparison distance is calculated based on the three-dimensional shape data of the measurement target S. When the corresponding automatic setting button 415 is operated, the reference value and the expression of the comparison distance are displayed so that the calculated minimum value and maximum value of the comparison distance are displayed in at least one of the colors displayed on the color display bar 411. The range of the comparison distance to be performed is automatically set by the CPU 210 of FIG.

  The other setting button 414 is a button for setting the handling of the contrast distance with respect to the geometric reference, the inversion of the color, and the correction of the contrast distance. When the other setting button 414 is operated, the other setting window SW shown in FIG. 17 is displayed on the display mode setting screen SC2. In the other setting window SW, three check boxes 421, 422, and 423 are displayed.

  When a plane is set as a geometric reference, the contrast distance from the plane to the portion of the measuring object S is usually calculated as a positive or negative value with respect to the plane. Therefore, for example, when the reference color distance is set to 10.00 mm and the range of the comparison distance is set to 5.00 mm, as shown by hatching in FIG. Only the comparison distance calculated with a positive value is associated with the color shown in the color display bar 411.

  On the other hand, when a plane is set as a geometric reference, an absolute value of a value calculated as a distance from the plane to the portion of the measurement target S is set as a comparison distance. In this case, the color represented by the color display bar 411 is associated with the comparison distance calculated with a positive value based on the plane, and the color display bar is also associated with the comparison distance originally calculated with a negative value. The color represented by 411 is associated with the color. Therefore, for example, when the reference color distance is set to 10.00 mm and the range of the comparison distance is set to 5.00 mm, as shown by hatching in FIG. The color represented by the color display bar 411 is associated with the comparison distance calculated in the range of 5.00 mm to 15.00 mm and in the range of -15.00 mm to -5.00 mm.

  As described above, the check box 421 is used to set whether or not to convert the calculated comparison distance into an absolute value and use it when the plane is set as the geometric reference.

  The check box 422 is used, when a plane is set as a geometric reference, to invert the correspondence of a color to a previously associated contrast distance.

  The check box 423 is used to correct the calculated comparison distance when a cone axis (center axis) is set as a geometric reference. The correction of the comparison distance performed by checking the check box 423 is called cone correction. Details of the cone correction will be described later.

  The target pull-down menu m11 in FIG. 16 is used when the user specifies a geometric element (hereinafter, referred to as a target element) for specifying the measurement target portion. In the target pull-down menu m11, one or more preset geometric elements are displayed in response to a user operation. Further, a combination of one or more set geometric elements and the like are displayed. Thus, the user can specify a desired target element by operating the target pull-down menu m11. In the target pull-down menu m11, the entire measurement target S may be displayed as a target element candidate in response to a user operation.

  The reference pull-down menu m12 is used when a user specifies a geometric element (hereinafter, referred to as a reference element) for specifying a geometric reference. In the reference pull-down menu m12, one or more preset geometric elements are displayed in response to a user operation. Further, a geometric element having a specific relationship with the set geometric element is displayed. For example, when a geometric element of a cylinder is set in advance, the axis (center axis) of the cylinder and the like are displayed. If geometric elements of two planes parallel to each other are set in advance, a plane (middle plane) located between the two planes is displayed. Thus, the user can specify a desired reference element by operating the reference pull-down menu m12.

  The return button b04 is a button for the user to instruct to cancel the use of the display mode setting function, like the return button b01 in FIG. The geometric element button b06 is a button for instructing the user to set a new geometric element. When the user wants to set a new geometric element while the display mode setting screen SC2 is displayed, the user operates the geometric element button b06. Thereby, the screen displayed on the display unit 400 switches from the display mode setting screen SC2 to the geometric element setting screen SC1 again.

  The OK button b05 is a button for instructing the user to apply the display mode set in the correspondence setting column dc to the part of the three-dimensional shape image SI corresponding to the measurement target part. The user sets the correspondence between the distance and the color, specifies the target element, specifies the reference element, and then operates the OK button b05. Thereby, the color of the part of the three-dimensional image SI corresponding to the measurement target part is changed to a color corresponding to the comparison distance based on the set correspondence relationship, the specified target element, and the reference element.

  In FIG. 19, the geometric element “plane 0” in FIG. 15 is designated as the reference element, and the geometric elements “plane 0”, “plane 1”, “plane 2”, “plane 3” and “plane 3” in FIG. A display example of the three-dimensional shape image SI when “plane 4” (all of the set geometric elements) is designated and the OK button b05 is operated is shown.

  As described above, the upper surface s11, the lower surface s12, and the bottom surface s21 corresponding to the geometric elements “plane 1”, “plane 2”, and “plane 0” in the measurement target S in FIG. 13 are parallel to each other. Thereby, in the three-dimensional shape image SI, the image of each part specified by the geometric elements “plane 1”, “plane 2”, and “plane 0” is displayed in a single color.

  On the other hand, the vertical surface s22 corresponding to the geometric element “plane 3” in the measurement target S of FIG. 13 is perpendicular to the bottom surface s21, and the inclined surface s23 corresponding to the geometric element “plane 4” is relative to the bottom surface s21. It is inclined. Thereby, in the three-dimensional shape image SI, the images of the respective parts specified by the geometric elements “plane 3” and “plane 4” are displayed in a plurality of colors arranged in one direction.

  In this state, the user can change the posture of the measurement target S in the three-dimensional shape image SI as shown in FIGS. Thereby, it is possible to easily grasp the positional relationship of each part of the measurement target S based on the geometric element “plane 0” from a plurality of different viewpoints.

  The user operates the other setting button 414 in the display state of FIG. 19 to FIG. 21 to check the check box 422 in FIG. 17 to invert the correspondence of the color to the comparison distance previously associated. Can be. In this case, as shown in FIG. 22, the plurality of types of colors displayed on the color display bar 411 are inverted with respect to the plurality of types of colors displayed on the color display bar 411 of FIG. Further, the color of the portion corresponding to the measurement target portion in the three-dimensional shape image SI changes according to the inverted correspondence relationship.

  In the examples of FIGS. 19 to 21, portions corresponding to the portions specified by the geometric elements “plane 1”, “plane 2”, and “plane 0” in the three-dimensional shape image SI are displayed in a single color. You. In this case, by visually recognizing the three-dimensional shape image SI, the user obtains the upper surface s11 and the lower surface s12 of the measurement target S corresponding to the geometric elements “plane 1”, “plane 2”, and “plane 0”, respectively. And that the bottom surface s21 is parallel to each other.

  However, in the examples of FIGS. 19 to 21, portions corresponding to the portions specified by the geometric elements “plane 3” and “plane 4” in the three-dimensional shape image SI are displayed in a plurality of types of colors. In this case, even if the user visually recognizes the three-dimensional shape image SI, whether the inclined surface s23 and the vertical surface s22 of the measurement target S corresponding to the geometric elements “plane 3” and “plane 4” are parallel to each other. It is difficult to know whether or not.

  In such a case, the user can set a new geometric element by operating the geometric element button b06. For example, as shown in FIG. 23, the above-described geometric elements “plane 3” and “plane 4” are reset, and the geometric elements corresponding to one end face s31 and the other end face s32 of the measurement target S in FIG. 13 respectively. “Plane 5” and “plane 6” are newly set.

  In this case, as shown in FIG. 24, the user operates the reference pull-down menu m12 on the display mode setting screen SC2 to specify the middle surface of the geometric elements “plane 5” and “plane 6” as the reference element. be able to.

  The vertical plane s22 of the measurement target S is parallel to the virtual plane specified by the middle plane of the geometric elements “plane 5” and “plane 6,” and the inclined plane s23 is inclined. Therefore, when the OK button b05 is operated in a state where the middle surfaces of the geometric elements “plane 5” and “plane 6” are specified as the reference elements, as shown in FIG. The part corresponding to the part specified by “plane 3” is displayed in a single color. On the other hand, as shown in FIG. 24, the portion corresponding to the portion specified by the geometric element “plane 4” in the three-dimensional shape image SI is displayed in a plurality of colors arranged in one direction. Thereby, the user visually recognizes the three-dimensional shape image SI of FIGS. 24 and 25, and thereby the inclined surface s23 and the vertical surface s22 of the measurement target S corresponding to the geometric elements “plane 3” and “plane 4” are formed. It can be easily grasped that they are not parallel to each other.

  The user operates the other setting button 414 in the display states of FIGS. 24 and 25 and checks the check box 421 in FIG. 17 to compare the vertical plane s22 and the inclined plane s23 with the middle plane as a reference. Distances can be displayed in the same correspondence color. Thereby, the user can easily compare the distance from the central portion in the longitudinal direction of the measurement target S to the vertical surface s22 with the distance from the central portion in the longitudinal direction of the measurement target S to the inclined surface s23. Can be.

(3) Another Use Example of Display Mode Setting Function FIGS. 26 to 30 are diagrams for explaining another use example of the display mode setting function. In this example, a paper cup without a handle will be described as the measurement target S. With the geometric element setting screen SC1 displayed on the display unit 400, the geometric elements “cone 1” and “plane 10” are set as shown in FIG. The geometric element “cone 1” corresponds to the entire side surface (outer peripheral surface) of the measurement target S, and the geometric element “plane 10” corresponds to a virtual plane that covers the opening end of the measurement target S.

  Thereafter, with the display mode setting screen SC2 displayed on the display unit 400, as shown in FIG. 27, the geometric element “plane 10” is designated as the reference element, and the set geometric element “cone 1” is displayed. Specified as the target element. In this case, a three-dimensional shape image SI including a display mode corresponding to the contrast distance based on the geometric element “plane 10” is displayed.

  According to the three-dimensional shape image SI illustrated in FIG. 27, a plurality of types of colors indicated by the color display bar 411 are displayed in a portion indicating the side surface of the measurement target S, but are displayed side by side. It is not possible to grasp the swelling or the dent that has occurred.

  Therefore, as shown in FIG. 28, the axis (center axis) of the geometric element “cone 1” is designated as the reference element, and the set geometric element “cone 1” is designated as the target element. Thereby, in the three-dimensional shape image SI, a portion indicating the side surface of the measurement target S is displayed in a color corresponding to the comparison distance with respect to the axis of the geometric element “cone 1”. The comparison distance in the present example is a distance from the central axis of the measurement target S to the side surface. Therefore, according to the three-dimensional shape image SI of FIG. 28, it is easier to grasp that a local shape change portion exists on the side surface of the measurement target S as compared with the three-dimensional shape image SI of FIG.

  Here, the user can perform the above cone correction by operating the other setting button 414 in the display state of FIG. 28 and checking the check box 423 of FIG. The cone correction will be described.

  The sides of an ideal cone have a constant slope with respect to the direction in which the axis of the cone extends. In this case, as shown in FIG. 29A, the length of the perpendicular pl of the axis ax extending from the axis ax of the cone to the side surface of the cone increases at a constant rate as the distance from the vertex pp increases. Therefore, in the three-dimensional shape image SI in which the display mode is set using the axis of the cone as a geometric reference and the side surface of the cone as a target element, a color change component due to the shape of the cone appears in the axial direction of the cone.

  Therefore, in the cone correction, the contrast distance is corrected so that the color change component due to the shape of the cone is removed. More specifically, as shown in FIG. 29B, a reference position α is determined on the axis ax in the set conical geometric element. The length d2 of the perpendicular from the axis ax to the side surface at an arbitrary position β on the axis ax is equal to the length d1 of the perpendicular from the axis ax to the side surface at the reference position α. An arithmetic expression corresponding to the position is obtained. The comparison distance actually calculated is corrected based on the calculation formula calculated in this manner.

  The corrected comparison distance indicates a constant value because the measurement target portion has an ideal conical shape. On the other hand, the measurement target portion shows a large value due to local deviation from the ideal conical shape.

  Thereby, in the three-dimensional shape image SI in which the display mode is set based on the comparison distance after the cone correction, a local change in the shape of the side surface of the measurement target S is conspicuous as shown in FIG. Therefore, the user can accurately grasp the presence of the local shape change portion on the side surface of the measurement target S together with the shape. According to the example of FIG. 30, it can be seen that local swelling has occurred on a part of the side surface of the measurement target S.

(4) Still Another Use Example of Display Mode Setting Function FIGS. 31 to 33 are diagrams for explaining still another use example of the display mode setting function. In this example, the light bulb is described as the measurement target S. With the geometric element setting screen SC1 displayed on the display unit 400, the geometric elements “sphere 1” and “plane 11” are set as shown in FIG. The geometric element “sphere 1” corresponds to the entire bulb of the measurement object S, and the geometric element “plane 10” corresponds to a virtual plane near the lower end of the base of the measurement object S and orthogonal to the central axis of the bulb.

  Then, with the display mode setting screen SC2 displayed on the display unit 400, as shown in FIG. 32, the geometric element “plane 11” is designated as the reference element, and the set geometric element “sphere 1” is displayed. Specified as the target element. In this case, in the three-dimensional shape image SI, a portion indicating the entire bulb of the measurement target S is displayed in a color corresponding to the contrast distance with reference to the geometric element “plane 11”.

  According to the three-dimensional shape image SI shown in FIG. 32, a plurality of types of colors shown in the color display bar 411 are displayed in a row indicating the bulb of the measurement target S, but the valve of the measurement target S is displayed. Bulges or dents generated on the outer surface cannot be grasped.

  Therefore, as shown in FIG. 33, the center of the geometric element “sphere 1” is specified as the reference element, and the entire outer surface of the valve of the measurement target S specified by the geometric element “sphere 1” is specified as the target element. Is done. In this case, in the three-dimensional shape image SI, a portion indicating the entire bulb of the measurement target S is displayed in a color corresponding to the contrast distance with reference to the center of the geometric element “sphere 1”. The comparison distance in this example is a distance from the center of the valve of the measurement target S to the outer surface of the valve. Therefore, according to the three-dimensional shape image SI of FIG. 33, it is possible to accurately grasp that there is a local shape change portion on the outer surface of the valve of the measurement target S together with the shape as compared with the three-dimensional shape image SI of FIG. be able to.

(5) Functional Configuration of CPU 210 for Realizing Display Mode Setting Function FIG. 34 is a functional block diagram of CPU 210 for realizing the display mode setting function according to an embodiment of the present invention. As shown in FIG. 34, the CPU 210 includes a shape data generating unit 211, a display control unit 212, a specifying unit 213, an element receiving unit 214, and a correspondence setting unit 215. These components are realized by the CPU 210 executing the display mode setting program stored in the storage device 240. Note that some or all of the plurality of components included in the CPU 210 may be realized by hardware such as an electronic circuit.

  The shape data generation unit 211 generates point group data representing the three-dimensional shape of the measurement target S as three-dimensional shape data based on the light receiving signal output by the light receiving unit 120, and causes the storage device 240 to store the data. The display control unit 212 causes the display unit 400 to display an image including the three-dimensional shape of the measurement target S as the three-dimensional shape image SI so as to be changeable in posture based on the three-dimensional shape data stored in the storage device 240. Further, the display control unit 212 sets the display mode of a portion corresponding to the measurement target portion in the three-dimensional shape image SI based on the correspondence set by the correspondence setting unit 215 described later. Further, the display control unit 212 causes the display unit 400 to display the stereoscopic image SI including the set display mode.

  The element accepting unit 214 accepts a designation of a geometric element on the three-dimensional shape image SI displayed on the display unit 400 based on an operation of the operation unit 250 by the user. The element accepting unit 214 accepts designation of a reference element and a target element using the set geometric element based on the operation of the operation unit 250 by the user.

  The specifying unit 213 specifies a geometric reference relating to the three-dimensional shape of the measurement target S as a geometric reference based on the reference element received by the element receiving unit 214. In addition, the specifying unit 213 specifies a measurement target portion of the measurement target S for which a display mode is to be set, based on the target element received by the element reception unit 214.

  The correspondence setting unit 215 sets the correspondence between the comparison distance and the color (display mode) based on the operation of the operation unit 250 by the user. Note that the correspondence setting unit 215 may set the correspondence between the contrast distance and the color based on the distance between the three-dimensional shape data of the measurement target portion specified by the specifying unit 213 and the geometric reference. For example, the correspondence setting unit 215 may set the correspondence between the comparison distance and the color such that the calculated minimum value and maximum value of the comparison distance are displayed in different types of colors.

(6) Display Mode Setting Process FIG. 35 is a flowchart showing a basic flow of the display mode setting process based on the display mode setting program. In this example, it is assumed that in the initial state, three-dimensional shape data of the measurement target S is generated in advance by the shape data generation unit 211 in FIG. 34 and stored in the storage device 240 in FIG.

  The display mode setting process is started in response to an instruction from the user to use the display mode setting function. When the display mode setting process is started, the display control unit 212 in FIG. 34 reads the three-dimensional shape data of the measurement target S stored in the storage device 240 (Step S11). The display control unit 212 causes the display unit 400 of FIG. 1 to display a three-dimensional shape image SI of the measurement target S based on the read three-dimensional shape data (step S12).

  Next, the element accepting unit 214 in FIG. 34 accepts the designation of a geometric element on the three-dimensional shape image SI displayed on the display unit 400 (Step S13). In this case, information indicating the accepted geometric element is stored in the storage device 240.

  Next, the element accepting unit 214 accepts designation of a reference element using the designated geometric element (Step S14). Therefore, the specifying unit 213 in FIG. 34 specifies a geometric reference for measuring the shape of the measurement target S based on the reference element received by the element receiving unit 214 (Step S15). In this case, information indicating the specified geometric reference is stored in the storage device 240.

  Next, the element receiving unit 214 receives the specification of the target element using the set geometric element (Step S16). Therefore, the specifying unit 213 in FIG. 34 specifies the measurement target portion of the measurement target S based on the target element received by the element reception unit 214 (Step S17). In this case, information indicating the specified measurement target portion is stored in the storage device 240.

  Next, the correspondence setting unit 215 in FIG. 34 sets the correspondence between the comparison distance and the color (display mode) based on the operation of the operation unit 250 by the user (step S18).

  After that, the display control unit 212 sets the color of the part corresponding to the measurement target part in the three-dimensional image SI based on the correspondence set by the correspondence setting unit 215, and includes the color corresponding to the comparison distance. The three-dimensional shape image SI is displayed on the display unit 400 (step S19). Thus, the display mode setting process ends.

  The series of processes in steps S14 to S19 is performed, for example, by operating the OK button b05 on the display mode setting screen SC2.

  In the display mode setting process of FIG. 35, for example, after the process of step S19, the process of step S13 and the subsequent processes may be performed again in response to the operation of the operation unit 250 by the user. In this case, the stereoscopic image SI including the new display mode is displayed on the display unit 400 in the process of step S19 performed again.

[6] Effect In the three-dimensional shape measuring apparatus 500 according to the present embodiment, three-dimensional shape data of the measurement target S is generated, and a three-dimensional shape image SI based on the generated three-dimensional shape data is displayed on the display unit 400. You. One or more geometric elements are designated on the three-dimensional image SI based on the operation of the operation unit 250 by the user. The designation of the reference element is further received using any of the designated geometric elements, and the geometric reference is specified based on the reference element. In addition, the specification of the target element is further received using any of the specified geometric elements, and the measurement target portion is specified based on the target element. The display mode of the portion corresponding to the measurement target portion in the three-dimensional shape image SI is set according to the comparison distance between the measurement target portion and the geometric reference. A three-dimensional image SI including a display mode corresponding to the comparison distance is displayed on the display unit 400. Thereby, the user can easily and intuitively recognize the relationship between the desired geometric reference and the shape of the desired portion of the measurement target S by visually recognizing the three-dimensional shape image SI including the display mode corresponding to the comparison distance. It becomes possible to grasp.

  Further, in three-dimensional shape measuring apparatus 500 according to the present embodiment, since light projecting units 110A and 110B, light receiving units 120A and 120B and stage 140 are provided integrally, light receiving units 120A and 120B and stage 140 are provided. The positional relationship with is uniquely determined. Therefore, point cloud data as three-dimensional shape data can be obtained with high accuracy. Therefore, the shape of the measurement target S can be measured with high accuracy based on the three-dimensional shape data.

[7] Other Embodiments (1) Parallel Plane Extraction Function The three-dimensional shape measuring apparatus 500 may have a parallel plane extraction function to assist a user in setting a geometric element. The parallel plane extraction function of the present example, when a plane geometric element is set, extracts a plane part of the measurement target S parallel to the set geometric element based on the three-dimensional shape data, and extracts the extracted plane part. Is a function of superimposing and displaying the extracted image indicating the above on the three-dimensional shape image SI.

  FIGS. 36 and 37 are diagrams illustrating an example of the geometric element setting screen SC1 for describing the parallel plane extraction function. In the geometric element setting screen SC1 of the present example, the three-dimensional shape image SI of the measurement target S in FIG. 13 is shown in the main display area ma. In the three-dimensional shape measuring apparatus 500 having the parallel plane extraction function, a parallel plane extraction button b11 is displayed in the sub-display area sa of the geometric element setting screen SC1.

  For example, as shown in FIG. 36, the user operates the parallel plane extraction button b11 after setting the geometric element “plane 0” corresponding to the bottom surface s21 of the measurement target S in FIG. In this case, the CPU 210 determines, based on the three-dimensional shape data of the measurement target S, a portion of the measurement target S having a parallelism within a predetermined range with respect to the geometric element “plane 0” set immediately before. (Hereinafter, referred to as a parallel portion) is determined. When a parallel portion exists, the CPU 210 extracts the three-dimensional shape data of the parallel portion from the three-dimensional shape data of the measurement target S.

  In this case, the CPU 210 does not have to extract the portion of the measurement target S corresponding to the reference geometric element “plane 0”, or may extract it. In this example, the CPU 210 does not extract the portion of the measurement target S corresponding to the geometric element “plane 0”.

  Further, based on the extracted three-dimensional shape data, the CPU 210 superimposes and displays the extracted image indicating the extracted parallel part on the three-dimensional shape image SI as shown in FIG. In the example of FIG. 37, the extracted images are superimposed and displayed on portions of the three-dimensional shape image SI corresponding to the upper surface s11 and the lower surface s12 of the measurement target S in FIG. The extracted image is displayed in a form (for example, a color) that can be distinguished from the set geometric element.

  Furthermore, a name is given on the three-dimensional shape image SI so that the parallel portion can be individually identified for each extracted image. In the example of FIG. 37, the names of “extraction e1” and “extraction e2” are given to the two extracted images, respectively.

  In this state, the user selects a desired extracted image on the three-dimensional image SI and operates the setting button b02 to set a new geometric element based on the parallel portion corresponding to the selected extracted image. can do. Further, the user can select a desired extracted image on the three-dimensional shape image SI and delete the extracted image.

  The geometric element serving as a reference for extracting a parallel portion does not need to be set immediately before the operation of the parallel plane extraction button b11, and may be selected by the user from a plurality of set geometric elements.

(2) Vertical plane extraction function The three-dimensional shape measuring apparatus 500 may have a vertical plane extraction function for assisting a user in setting a geometric element. The vertical plane extraction function of the present example, when a plane geometric element is set, extracts a plane part of the measuring object S perpendicular to the set geometric element based on the three-dimensional shape data, and extracts the extracted plane part. Is a function of superimposing and displaying the extracted image indicating the above on the three-dimensional shape image SI.

  FIGS. 38 and 39 are diagrams illustrating an example of the geometric element setting screen SC1 for describing the vertical plane extraction function. In the geometric element setting screen SC1 of this example, a three-dimensional shape image SI of the measurement target S made of an electronic component is shown in the main display area ma. In the three-dimensional shape measuring apparatus 500 having a vertical plane extraction function, a vertical plane extraction button b12 is displayed in the sub-display area sa of the geometric element setting screen SC1.

  Here, it is assumed that the electronic component serving as the measurement target S in the present example has a substantially rectangular package for housing the integrated circuit. On each of both sides of the package, a plurality of strip-shaped leads are drawn from inside the package. The plurality of strip-shaped leads are arranged in the longitudinal direction of the package. Each strip-shaped lead is bent so as to extend downward from both sides of the package. The portion of each strip-shaped lead extending in the vertical direction with respect to the upper surface of the package is substantially perpendicular.

  For example, as shown in FIG. 38, the user operates the vertical plane extraction button b12 after setting the geometric element “plane 50” corresponding to the upper surface of the electronic component package. In this case, the CPU 210 determines, based on the three-dimensional shape data of the measurement target S, a portion of the measurement target S having a perpendicularity within a predetermined range with respect to the geometric element “plane 50” set immediately before. (Hereinafter, referred to as a vertical portion) is determined. When a vertical portion exists, the CPU 210 extracts the three-dimensional shape data of the vertical portion from the three-dimensional shape data of the measurement target S.

  Further, based on the extracted three-dimensional shape data, the CPU 210 superimposes and displays the extracted image indicating the extracted vertical portion on the three-dimensional shape image SI as shown in FIG. In the example of FIG. 39, the extracted images are superimposed and displayed on portions of the three-dimensional shape image SI corresponding to the outer surfaces of the plurality of band-shaped leads of the electronic component. The extracted image is displayed in a form (for example, a color) that can be distinguished from the set geometric element.

  Further, a name is provided on the three-dimensional shape image SI so that the vertical portion can be individually identified for each extracted image. In the example of FIG. 39, the names of “extraction e1” to “extraction e14” are respectively assigned to the 14 extracted images.

  In this state, the user selects a desired extracted image on the three-dimensional shape image SI and operates the setting button b02 to set a new geometric element based on the vertical portion corresponding to the selected extracted image. can do. Further, the user can select a desired extracted image on the three-dimensional shape image SI and delete the extracted image.

  The geometric element serving as a reference for extracting the vertical part does not need to be set immediately before the operation of the parallel plane extraction button b11, and may be selected by the user from a plurality of set geometric elements.

(3) Region Extraction Function The three-dimensional shape measuring apparatus 500 may have a region extraction function for assisting a user in setting a geometric element. The region extraction function of this example extracts a plane portion of the measurement target S located in the selected region based on the three-dimensional shape data when a specific region is selected on the three-dimensional shape image SI by the user. This is a function of superimposing and displaying an extracted image showing the extracted plane portion on the three-dimensional shape image SI.

  FIGS. 40 and 41 are diagrams illustrating an example of the geometric element setting screen SC1 for describing the region extraction function. In the geometric element setting screen SC1 of this example, a three-dimensional image SI of the measurement target S made of an electronic component is shown in the main display area ma, as in the examples of FIGS. 38 and 39. The electronic component serving as the measurement target S in this example is the same as the electronic component of the measurement target S shown in FIGS. 38 and 39. In the three-dimensional shape measuring apparatus 500 having an area extraction function, an area extraction button b13 is displayed in the sub-display area sa of the geometric element setting screen SC1.

  For example, after operating the region extraction button b13, the user selects a desired region on the three-dimensional image SI as indicated by a thick dashed line in FIG. The selection of this area is performed, for example, by the user performing a single click operation on a plurality of portions on the three-dimensional image SI.

  In this case, based on the three-dimensional shape data of the measurement target S, the CPU 210 determines that the portion of the measurement target S corresponding to the image in the selected region has a plane portion having a size equal to or larger than a predetermined size (hereinafter, a portion within the region) Is determined. When there is a part in the region, the CPU 210 extracts the three-dimensional shape data of the part in the region from the three-dimensional shape data of the measurement target S.

  Further, based on the extracted three-dimensional shape data, the CPU 210 superimposes and displays the extracted image showing the extracted portion in the area on the three-dimensional shape image SI as shown in FIG. In the example of FIG. 41, the extracted images are superimposed and displayed on portions of the three-dimensional shape image SI that are located in the region selected by the user and correspond to the outer surfaces of the plurality of band-shaped leads of the electronic component.

  Further, a name is provided on the three-dimensional shape image SI so that a portion in the region can be individually identified for each extracted image. In the example of FIG. 39, the names of “extraction e1” to “extraction e7” are given to the seven extracted images, respectively.

  In this state, the user selects a desired extracted image on the three-dimensional shape image SI and operates the setting button b02 to create a new geometric element based on the portion in the area corresponding to the selected extracted image. Can be set. Further, the user can select a desired extracted image on the three-dimensional shape image SI and delete the extracted image.

(4) Template Setting Function The three-dimensional shape measuring apparatus 500 may have a template setting function for assisting a user to specify a geometric element, a reference element, and a target element. The template setting function according to the present embodiment is configured to perform various operations performed on one measurement target S in the case of sequentially performing shape measurement of the same content on a plurality of measurement targets S having the same shape. This function automatically reproduces S.

  In the template setting function, the measurement target S to be used as a reference is determined in advance by the user. Hereinafter, the measurement target S that is set as a reference is referred to as a reference target. By operating the operation unit 250, the user generates three-dimensional shape data for the reference target object, specifies geometric elements, specifies the reference element, specifies the target element, and the like. In this case, the CPU 210 stores, as template information, an operation procedure for specifying a geometric element, specifying a reference element, and specifying a target element for the reference target object, based on the operation content of the operation unit 250 by the user.

  Thereafter, the user generates three-dimensional shape data for another measurement target S having the same shape as the reference target, and then instructs use of the template setting function. In this case, the CPU 210 specifies a geometric element corresponding to the geometric element specified for the reference target object for another measurement target S based on the stored template information. The CPU 210 also specifies the reference element and the target element corresponding to the reference element and the target element specified for the reference target object for the other measurement target S based on the template information.

  Thereby, after specifying the geometric element, the reference element, and the target element for the reference target object, the user can perform measurement without repeating the same operation again for another measurement target S having the same shape. It is possible to confirm the three-dimensional shape image SI in which the color of the target portion is represented by a color corresponding to the contrast distance. Therefore, the convenience of the three-dimensional shape measuring apparatus 500 is improved.

  By the way, in order to effectively use the template setting function, it is necessary to accurately grasp the positional relationship between the three-dimensional shape data of the reference object and the three-dimensional shape data of another measurement object S. For example, when the attitude of the reference object and the attitude of another measurement object S at the time of generating the three-dimensional shape data are significantly different from each other, it is necessary to specify an appropriate geometric element or the like even using the template information. Can not.

  Therefore, in this example, when the use of the template setting function is instructed, a process of matching the three-dimensional shape data of another measurement target S with the three-dimensional shape data of the reference target as pre-processing (hereinafter referred to as a matching process). Call).

  When the matching process is started, a matching screen is displayed on the display unit 400. 42 and 43 are diagrams illustrating an example of the alignment screen displayed on the display unit 400. FIG. In the alignment screen SC3, the display area of the display unit 400 is divided into a first main display area ma1, a second main display area ma2, a third main display area ma3, and a sub display area sa.

  A three-dimensional image SI of another measurement target S is displayed in the first main display area ma1, and a three-dimensional image SI of the reference target is displayed in the second main display area ma2. In the third main display area ma3, the degree of matching of the three-dimensional shape data of the other measurement target S with the three-dimensional shape data of the reference target is displayed as an image. Specifically, the three-dimensional shape image SI of the reference target object and the three-dimensional shape image of another measurement target S are displayed in different colors according to a common coordinate system. In the examples of FIGS. 42 and 43, two different colors are indicated by dot patterns and hatching.

  In the sub-display area sa, an element type selection field es, a positioning element display field et, a return button b21, and an apply button b22 are displayed. In the element type selection field es, a plurality of item icons ic respectively corresponding to a plurality of geometric element types are displayed as in the above embodiment. The positioning element display field et will be described later.

  With the fitting screen SC3 displayed on the display unit 400, the user can change the posture of another measurement target S on the three-dimensional shape image SI displayed in the first main display area ma1. In addition, the user can change the attitude of the reference target on the three-dimensional shape image SI displayed in the second main display area ma2.

  Therefore, the user compares the three-dimensional shape image SI including the other measurement object S and the three-dimensional shape image SI including the reference target object, and uses a portion having a common shape and corresponding to each other as a positioning element. Specify three sets. At this time, the user can select the type of the positioning element to be designated by operating any of the plurality of item icons ic displayed in the element type selection field es.

  The positioning element display field et of the sub-display area sa indicates whether three sets of positioning elements have been specified for the other measurement target S and the reference target. In the example of FIG. 42, three sets of alignment elements are not specified at all.

  The user operates the item icon ic corresponding to the plane, for example, to specify the first set of alignment elements. After that, on the three-dimensional shape image SI including the other measurement target S and the three-dimensional shape image SI including the reference target, corresponding planar portions are designated by a double-click operation. This completes the designation of the first set of alignment elements (“plane A” in FIG. 43) for the other measurement target S and the reference target.

  Next, in the same procedure as the designation of the first alignment element, the user adjusts the second and third alignment elements (“plane B” and “plane B” in FIG. 43) for the other measurement object S and the reference object. “Plane C”) are sequentially designated. At this time, as shown in FIG. 43, the designated positioning elements are sequentially and identifiably displayed on the three-dimensional shape image SI displayed in the first main display area ma1 and the second main display area ma2.

  When three sets of alignment elements are specified, the CPU 210 determines that three parts of the other measurement object S corresponding to the three sets of alignment elements are three of the reference objects corresponding to the three sets of alignment elements. The coordinate transformation of the three-dimensional shape data of the other measurement target S is performed so as to match the two portions.

  By accurately aligning the three-dimensional shape data of the other measurement target S with the three-dimensional shape data of the reference target, the three-dimensional shape image SI displayed in the third main display area ma3 as shown in FIG. The position and orientation of the reference object and the position and orientation of the other measurement object S match.

  The user operates the apply button b22 when it is determined that there is no problem while checking the display state of the third main display area ma3 on the alignment screen SC3. Thereby, the alignment process is completed. The return button b21 is a button for the user to instruct cancellation of the matching process. The user operates the return button b21 with the fitting screen SC3 displayed on the display unit 400. Thereby, the display state of the display unit 400 returns to the state at the time of normal shape measurement (for example, the state shown in FIGS. 9 to 12).

  In the example of FIG. 43, “Plane A”, “Plane B”, and “Plane C” are designated as three alignment elements, but “Plane B” and “Plane C” of these elements are The planes are parallel to each other. When performing the above-described alignment using three surfaces, it is desirable that the three alignment elements are set so as to intersect with each other. Accordingly, for example, in the example of FIG. 43, “plane D” indicated by a dashed line may be designated as the alignment element instead of “plane B”. In this case, by using the alignment elements “plane A”, “plane C”, and “plane D” that intersect with each other, it is possible to perform three-dimensional shape data alignment with higher accuracy.

(5) Contrast highlighting function The three-dimensional shape measuring apparatus 500 may have a contrast highlighting function for allowing a user to easily understand the result of geometric comparison of the measurement target portion with respect to the geometric reference. When the geometric reference extending in one direction and the measurement target portion of the measurement target S extending in the other direction are specified, the contrast highlighting function of the present example indicates the inclination direction of the measurement target portion with respect to the geometric reference. It includes a function of superimposing and displaying an index (hereinafter, referred to as an inclination index) on the three-dimensional shape image SI. Further, the contrast highlighting function of the present example adjusts the display mode of the tilt indicator so that the tilt direction of the measurement target portion with respect to the geometric reference (hereinafter, simply referred to as the tilt direction) is emphasized. Including features. Hereinafter, a usage example of the contrast highlighting function will be described.

  FIG. 44 is an external perspective view illustrating another example of the measurement target S. The measurement target S in FIG. 44 includes a first member p1, a second member p2, and a third member p3 having a flat rectangular parallelepiped shape. The first member p1 and the second member p2 are connected by a third member p3 so as to oppose each other at an interval. Circular first through holes h1 and second through holes h2 are formed in the first member p1 and the second member p2, respectively.

  When the user wants to know in which direction the central axis of the second through hole h2 is inclined with respect to the central axis of the first through hole h1 with respect to the measurement object S in FIG. The three-dimensional shape data for the measurement target S in FIG. 44 is generated. Thereafter, the user uses the contrast highlighting function.

  FIGS. 45 to 47 are diagrams for explaining one usage example of the contrast highlighting function. As shown in FIG. 45, in the three-dimensional shape measuring apparatus 500 having the contrast highlighting function, a tilt confirmation button b31 is displayed in the sub-display area sa of the geometric element setting screen SC1.

  For example, in a state where the three-dimensional shape image SI corresponding to the measurement target S in FIG. 44 is displayed in the main display area ma, the user may input a geometric element corresponding to the inner peripheral surface of the first through hole h1 in FIG. "Cylinder 1" is set. Further, the user sets a geometric element “cylinder 2” corresponding to the inner peripheral surface of the second through hole h2 in FIG. Thereafter, the user operates the tilt confirmation button b31.

  Thereby, as shown in FIG. 46, the screen displayed on the display unit 400 switches from the geometric element setting screen SC1 to the tilt confirmation screen SC4. The tilt confirmation screen SC4 is basically the same as the above-described display mode setting screen SC2 except that a tilt confirmation setting field eu is displayed instead of the correspondence setting field dc.

  A check box 431 and an emphasis degree adjustment bar 432 are displayed in the inclination confirmation setting column eu. The check box 431 is used to set whether or not to display the tilt index so as to emphasize the direction of the tilt when the axis is specified as the geometric reference and the measurement target portion. By checking the check box 431, the user can display the inclination index so as to emphasize the direction of the inclination.

  The emphasis degree adjustment bar 432 includes a slider. By operating the slider of the emphasis degree adjustment bar 432, the user can adjust the emphasis degree of the inclination direction indicated by the inclination index.

  In this example, as shown in FIG. 46, the user specifies the axis of the geometric element “cylinder 2” as the target element and specifies the axis of the geometric element “cylinder 1” as the reference element. In this case, as shown by a dashed line in FIG. 46, an image indicating the axis of the geometric element “cylinder 1” and the axis of the geometric element “cylinder 2” is superimposed and displayed on the three-dimensional shape image SI.

  In this state, when the OK button b05 is operated, the inclination indicating the inclination direction of the axis of the geometric element “cylinder 2” with respect to the axis of the geometric element “cylinder 1” as shown by a white arrow in FIG. The index is superimposed on the three-dimensional image SI.

  Here, if the inclination angle of the axis of the geometric element “cylinder 2” with respect to the axis of the geometric element “cylinder 1” is small, the user can visually recognize the inclination index, It is difficult to grasp in which direction the axis of the geometric element “cylinder 2” is inclined. Therefore, the user checks the check box 431 and operates the emphasis degree adjustment bar 432. In this case, as shown in FIG. 47, the inclination direction of the axis of the geometric element “cylinder 2” with respect to the axis of the geometric element “cylinder 1” is highlighted by the inclination index. Specifically, the intersection angle of the target axis (in this example, the axis of the geometric element “cylinder 2”) with respect to the reference axis (in this example, the axis of the geometric element “cylinder 1”) is determined by the inclination index. Displayed too large. Thereby, the user can easily grasp the direction in which the axis of the geometric element “cylinder 2” is inclined with respect to the axis of the geometric element “cylinder 1”.

  In the three-dimensional shape measuring apparatus 500 having the contrast highlighting function, the display control unit 212 in FIG. 34 determines the direction of the inclination as a result of the geometric comparison between the specified measurement target portion and the geometric reference. The displayed inclination index is displayed on the display unit 400. In addition, the display control unit 212 adjusts the display mode of the tilt indicator in response to the operation of the operation unit 250 by the user so that the tilt direction is emphasized.

(6) Others In the above embodiment, after one or a plurality of geometric elements are specified and set, the reference element is specified using any of the set geometric elements, but the present invention is not limited to this. . When specifying a geometric element, the geometric element may be specified as a reference element. Similarly, in the above embodiment, after one or a plurality of geometric elements are set, the target element is specified using any of the set geometric elements, but the present invention is not limited to this. When specifying a geometric element, the geometric element may be specified as a target element.

  In the above embodiment, a monocular camera is used for the light receiving units 120A and 120B, but a compound eye camera may be used instead of or in addition to the monocular camera. Also, a plurality of light receiving units 120A and a plurality of light receiving units 120B may be used, and stereoscopic shape data may be generated by a stereo method. Further, in the above embodiment, two light projecting units 110 are used, but if three-dimensional shape data can be generated, only one light projecting unit 110 may be used, or three or more light projecting units 110 may be used. The light unit 110 may be used.

  When acquiring texture image data using uniform measurement light from the light projecting unit 110, the illumination light output unit 130 and the illumination light source 320 may not be provided. It is also possible to generate texture image data by synthesizing pattern image data. In this case, the illumination light output unit 130 and the illumination light source 320 may not be provided.

  In the above embodiment, the pattern image data and the texture image data are acquired by the common light receiving units 120A and 120B, but the light receiving unit for acquiring the three-dimensional shape data and the live image data and the texture image data are acquired. May be provided separately from the light receiving unit.

  In the above embodiment, the point cloud data is generated by the triangulation method, but the point cloud data may be generated by another method such as the TOF (Time Of Flight) method.

[8] Correspondence relationship between each component of the claims and each unit of the embodiment Hereinafter, an example of correspondence between each component of the claims and each unit of the embodiment will be described. Not limited.

  In the above embodiment, the shape data generation unit 211 is an example of a shape data generation unit, the display control unit 212 is an example of a display control unit, the element reception unit 214 is an example of an element reception unit, and the identification unit Reference numeral 213 denotes an example of the specifying unit, and the three-dimensional shape measuring device 500 is an example of the three-dimensional shape measuring device.

  In addition, the inclination index is an example of the index, the installation unit 161 and the rotating mechanism 143 are examples of the stage holding unit, the stage 140 is an example of the stage, and the light emitting units 110, 110A, and 110B are the examples of the light emitting unit. The light receiving units 120, 120A, and 120B are examples of light receiving units, the head unit 190 is an example of a head unit, and the stand unit 162 is an example of a connecting unit.

  Furthermore, the correspondence setting unit 215 is an example of a correspondence setting unit, the operation unit 250 is an example of an operation unit, the CPU 210 is an example of a template storage unit and a template designation unit, and the PC 200 is an example of a processing device. .

  Various other elements having the configuration or function described in the claims may be used as the constituent elements in the claims.

  100: measuring unit, 110, 110A, 110B: light projecting unit, 111: measuring light source, 112: pattern generating unit, 113, 114, 122: lens, 120, 120A, 120B: light receiving unit, 121: camera, 121a: imaging Element, 130 illumination light output unit, 131 emission port, 140 stage, 141 stage base, 142 stage plate, 143 rotating mechanism, 145 stage operation unit, 146 stage drive unit, 150, 310 control Substrate, 161, installation section, 162, stand section, 170, pedestal, 180, head casing, 190, head section, 200, PC, 210, CPU, 211, shape data generation section, 212, display control section, 213, identification Unit, 214: element receiving unit, 215: correspondence setting unit, 220: ROM, 230: working memory, 2 0 storage device, 250 operation unit, 300 control unit, 320 illumination light source, 330 light guide member, 400 display unit, 411 color display bar, 412 distance reference adjustment bar, 413 color range adjustment bar , 414: Other setting button, 415: Corresponding automatic setting button, 421, 422, 423, 431: Check box, 432: Enhancement degree adjustment bar, 500: Three-dimensional shape measuring device, A1, A2: Optical axis, Ax: Rotation Axis, ax axis, b01, b04, b21 return button, b02 setting button, b03 display mode button, b05 OK button, b06 geometric element button, b11 parallel plane extraction button, b12 vertical plane extraction button , B13: area extraction button, B1I, B2I: image, b22: apply button, b31: tilt confirmation button, dc: correspondence setting column, es: required Type selection field, et ... Positioning element display field, f01 ... Name input field, F1, F2 ... Intersection point, h1 ... First through hole, h2 ... Second through hole, ic ... Item icon, IR ... Irradiation area, m11: target pull-down menu, m12: reference pull-down menu, ma: main display area, ma1: first main display area, ma2: second main display area, ma3: third main display area, MR, MR1, MR2 ... valid area , P1 first member, p2 second member, p3 third member, PI pointer, pl perpendicular, pp vertex, S target object, s11 upper surface, s12 lower surface, s21: bottom surface, s22: vertical surface, s23: inclined surface, s31: one end surface, s32: other end surface, sa: sub-display area, SC1: geometric element setting screen, SC2: display mode setting screen, SC3: matching screen, SC4: Incline Confirmation screen, SI: 3D shape image, SW: Other setting window, TR1: Imaging field of view

Claims (8)

A shape data generating unit that generates three-dimensional shape data indicating a three-dimensional shape of the measurement object,
Based on the three-dimensional shape data generated by the shape data generating unit, a display control unit that displays an image including the three-dimensional shape of the measurement target on the display unit so that the orientation can be changed as a three-dimensional shape image,
On the three-dimensional shape image displayed on the display unit, an element receiving unit that receives designation of a geometric element,
Based on the geometric element received by the element receiving unit, comprising a specifying unit that specifies a geometric reference regarding the three-dimensional shape of the measurement target as a geometric reference,
The display control unit, according to a distance between at least a part of the measurement target and the geometric reference specified by the specifying unit, a display mode of a part corresponding to the at least part of the three-dimensional shape image 3D shape measuring device to set. The three-dimensional shape measuring apparatus according to claim 1, wherein the specifying unit further specifies the at least a part in which the display mode is to be set, based on the geometric element received by the element receiving unit. The three-dimensional shape measuring apparatus according to claim 1, wherein the display mode is a color corresponding to a distance between the at least a part and the geometric reference. The display control unit causes the display unit to display an index representing a geometric comparison result between the at least a portion and the geometric reference specified by the specifying unit, and displays the index displayed on the display unit as a comparison result. 3. The three-dimensional shape measuring apparatus according to claim 1, wherein a display mode of the index can be adjusted so as to emphasize. A stage holder,
A stage that is held by the stage holding unit and on which an object to be measured is placed;
A light projecting unit that irradiates a measurement light having a pattern to the measurement object mounted on the stage, and a light receiving unit that receives the measurement light reflected by the measurement object and outputs a light reception signal representing a light reception amount. A head section including
A connection unit that fixedly connects the head unit and the stage holding unit,
5. The shape data generation unit according to claim 1, wherein, based on a light reception signal output by the light reception unit, point group data representing a three-dimensional shape of the measurement target is generated as the three-dimensional shape data. Item 3. The three-dimensional shape measuring device according to item 1. A correspondence setting unit that calculates a distance between the at least a part and the geometric reference based on the three-dimensional shape data and sets a correspondence between the display mode and the distance based on the calculated distance,
6. The display control unit according to claim 1, wherein the display control unit sets a display mode of a part corresponding to the at least a part of the three-dimensional image based on the correspondence set by the correspondence setting unit. 3. The three-dimensional shape measuring device according to claim 1. An operation unit operated by a user to specify one geometric element for specifying one geometric criterion for one measurement target;
A template storage unit that stores an operation procedure of the operation unit by a user as template information,
For another measurement object, another geometric element for specifying another geometric criterion corresponding to the one geometric criterion, the three-dimensional shape data of the one measurement object, and the three-dimensional shape of the other measurement object. The three-dimensional shape measuring apparatus according to any one of claims 1 to 6, further comprising a template designating unit that designates based on shape data and template information stored in the template storage unit. A three-dimensional shape measurement program executable by a processing device,
A process of generating three-dimensional shape data indicating a three-dimensional shape of the measurement object;
Based on the generated three-dimensional shape data, a process of displaying an image including the three-dimensional shape of the measurement target on the display unit so that the orientation can be changed as a three-dimensional shape image,
A process of receiving designation of a geometric element on the three-dimensional shape image displayed on the display unit;
Based on the received geometric element, a process of specifying a geometric reference relating to the three-dimensional shape of the measurement target as a geometric reference, causing the processing device to execute the processing,
The processing to be displayed on the display unit, according to a distance between at least a part of the measurement target and the specified geometric reference, a display mode of a part corresponding to the at least part of the three-dimensional shape image. A three-dimensional shape measurement program including a setting process.

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