JP2020033587A - Tempering heat treatment apparatus and heat treatment method - Google Patents

Abstract

To prevent a workpiece from being heated by a jig in a tempering treatment.SOLUTION: The tempering heat treatment apparatus 10 includes: an induction heating coil 11 for induction heating a workpiece W for tempering; a jig 12 that mounts and supports the workpiece W, and has a metal part 13 for contacting with the workpiece W; a coil touch mechanism 14 that detects the coil touching by a current flowing through the metal part 13; a cooling mechanism 15 including a flow path 16 through which the cooling water flows to cool the jig 12 and an adjuster 17 that regulates the flow rate of the cooling water.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a tempering heat treatment apparatus and a heat treatment method.

  For example, a manufacturing process of a bearing ring included in a rolling bearing includes a quenching process and a tempering process as a heat treatment process. Patent Literature 1 discloses heat treatment of a bearing ring of a hub unit for a vehicle. In the tempering process, an induction heating coil (hereinafter, referred to as a "coil") approaches a track ring (hereinafter, referred to as a "work") placed on a jig, and the work is heated by the coil (induction heating). Conventionally, as a material of the jig, a fluororesin which is strong against heat and is not affected by induction heating has been adopted.

JP 2007-186109 A

  In the tempering process, a coil touch mechanism is provided in the heat treatment apparatus for quality control because the coil is brought close to the work (that is, the coil gap is small). The coil touch mechanism detects an abnormality when the coil contacts the work when heating the work. A work detected as abnormal is treated as a defective product. When the coil contacts the work, current flows from the coil to the jig via the work. Therefore, the coil touch mechanism has a configuration for detecting a current flowing through the jig. For this reason, in the jig, a portion that comes into contact with the work needs to be made of metal.

  For tempering, the work placed on the jig is heated by a coil to a required temperature, which is maintained for the required time, and then the work is cooled. In order to improve the production efficiency, another work is heated and the temperature is maintained during a time period for cooling the work. For this purpose, the work heated and maintained on the jig is transferred to another receiving stand and cooled in different areas. The work is cooled in the next step, but the jig is repeatedly used without cooling.

  Then, heat is accumulated in the metal portion included in the jig due to heat transfer from the heated work. When the heating of the work is repeated, the temperature of the metal part of the jig rises and is maintained at a high temperature (near the heating temperature of the work, for example, around 200 ° C.). Since the time cycle of each process for tempering is various, for example, the work may remain on the jig before the start of heating, or the time required to maintain the temperature of the heated work may elapse. However, the work may not proceed to the next cooling step. In such a case, since the workpiece remains on the jig, it is heated by the metal portion of the jig for a longer time than expected. As a result, the work softens more than the required hardness, and may adversely affect the heat treatment quality. In addition, 200 degreeC which is the temperature rise of the metal part of a jig is an illustration, and changes with conditions.

  Therefore, an object of the present invention is to prevent a work from being heated by a jig in a tempering process.

  The heat treatment apparatus for tempering of the present invention includes an induction heating coil for performing induction heating for tempering a work, a jig having a metal part for placing and supporting the work and contacting the work, and a jig having the metal part. The apparatus includes a coil touch mechanism for detecting a coil touch based on a flowing current, a flow path for flowing cooling water for cooling the jig, and a cooling mechanism having an adjustment unit for adjusting a flow rate of the cooling water.

  According to this heat treatment apparatus for tempering, even if the metal part of the jig is heated by the heated work, the jig can be cooled by the cooling water. By adjusting the flow rate of the cooling water, the temperature of the jig can be kept at a low temperature. Therefore, in the tempering process, for example, it is possible to prevent the work heated by the induction heating coil from being further heated by the jig. The “adjustment of the flow rate” includes the case where the flow rate is set to zero.

  Further, the jig has a bottom wall, a side wall including the metal part, and a side wall provided along an outer peripheral portion of the bottom wall, and a distance between the bottom wall and the bottom wall. And a space formed by being surrounded by the bottom wall portion, the side wall portion, and the lid portion. In this case, the jig can be cooled widely.

Alternatively, the jig has a bottom wall portion, and a side wall portion including the metal portion and provided along an outer peripheral portion of the bottom wall portion, and the cooling mechanism includes: It is good also as composition which has a piping member provided along the above-mentioned bottom wall part. In this case, the jig can be efficiently cooled by providing the pipe member at a necessary place.
In this case, the piping member may be separated from the bottom wall, but the piping member is preferably provided in contact with the bottom wall. In this case, the jig can be cooled more efficiently.
Further, the pipe member is provided on the bottom wall portion, and an outlet for discharging cooling water flowing in the pipe member to the outside is provided in a part of the pipe member, and the jig is provided in the jig. Preferably, a drain hole for discharging the cooling water on the bottom wall to the outside of the jig is provided. In this case, the jig can be more efficiently cooled by the cooling water flowing through the piping member.

  Alternatively, the heat treatment apparatus for tempering further includes a base board on which the jig is detachably mounted, wherein a space is formed between the base board and the jig, and the jig is provided in a range of the space. A flow path hole that opens toward the base plate may be formed inside the base board, and the space may be the flow path. In this case, the jig can be cooled by the cooling water flowing through the flow passage hole provided in the base board even when the jig is changed in accordance with the change of the work (for example, the change of the shape). Becomes

  Further, the present invention is a heat treatment method for performing tempering by heating a work placed on a jig by an induction heating coil, wherein the jig has a current based on a current flowing through a metal portion that comes into contact with the work. Heating the work with the induction heating coil while detecting the coil touch on the work, and adjusting the flow rate of the cooling water with the jig at least in a time zone while the work is being heated. Cooling while cooling.

  According to this heat treatment method, even if the metal part of the jig is heated by the heated work, the jig can be cooled by the cooling water. By adjusting the flow rate of the cooling water, the temperature of the jig can be kept at a low temperature. Therefore, in the tempering process, for example, it is possible to prevent the work heated by the induction heating coil from being further heated by the jig.

  According to the present invention, it is possible to prevent the work from being heated by the jig in the tempering process.

It is sectional drawing which shows an example of the heat treatment apparatus for tempering. It is sectional drawing of the heat processing apparatus provided with the flow path of a different form. It is an enlarged view which shows the modification of a piping member. It is sectional drawing of the heat processing apparatus provided with the flow path of a different form.

  FIG. 1 is a cross-sectional view illustrating an example of a heat treatment apparatus 10 for tempering. The heat treatment 10 for tempering of the present embodiment (hereinafter, referred to as “heat treatment device 10”) is used for tempering the quenched work W. The work W is a steel part. The work W of the present embodiment is a race of a vehicle bearing device (a so-called hub unit), and the work W in the illustrated example is an outer ring. The work W may be other than the race. The work W has a cylindrical shape as a whole. The work W in the illustrated example has a cylindrical tubular portion Wa and a flange portion Wb extending radially outward from the tubular portion Wa. The work W is placed on the jig 12 such that the center line of the work W is aligned in the vertical direction. In this state, the work W is heated, the temperature of the work W is maintained for a required time, and then cooled.

  The heating of the work W is performed by the heat treatment apparatus 10 of FIG. Cooling is provided by other devices. The heat treatment apparatus 10 includes an induction heating coil 11 (hereinafter, referred to as “coil 11”), a jig 12, a coil touch mechanism 14, and a cooling mechanism 15. Further, the heat treatment apparatus 10 includes a base board 26 and a holding member 33.

  The coil 11 is connected to a power supply device (not shown) to which an AC voltage is applied. Thereby, the work W is induction-heated. The coil 11 of the present embodiment is installed on a radially outward side of the workpiece W. The coil 11 is arranged in a state of approaching the work W. That is, a gap (coil gap) between the work W and the coil 11 is small. The work W is entirely heated by low-frequency induction heating.

  The jig 12 has a bottomed cylindrical shape. More specifically, the jig 12 includes a bottom wall portion 18 having a disk shape and a side wall portion 20 provided along an outer peripheral portion 19 of the bottom wall portion 18. The side wall portion 20 is provided to extend upward from the outer peripheral portion 19. The side wall 20 has a cylindrical shape. As described above, the work W has the cylindrical portion Wa and the flange portion Wb. A part of the cylindrical part Wa (a part on the lower side in the illustrated example) is housed on the inner peripheral side of the side wall part 20, and the flange part Wb is a part of the upper part of the side wall part 20 (a side wall main body described later). (30). Thereby, the jig 12 can support the work W placed thereon. The work W is placed on the jig 12 such that the center line of the work W matches the center line C of the jig 12.

  The side wall section 20 has a guide section 29 and a side wall main body section 30. The guide portion 29 is made of fluororesin and is attached to the side wall main body 30. The guide portion 29 is located with a gap radially outward of a part of the work W, and prevents the work W from being displaced in the radial direction. Since the guide portion 29 is relatively close to the coil 11, it is made of a fluororesin so as not to be affected by induction heating. The side wall main body 30 is made of metal, and in this embodiment, made of stainless steel. The side wall main body 30 and the bottom wall 18 are formed of the same member. That is, the bottom wall portion 18 and the side wall main body portion 30 are made of stainless steel. The flange portion Wb is placed on the side wall main body 30, and the work W comes into contact with the side wall main body 30. Thereby, the work W and the side wall main body 30 are in a state where they can be electrically connected.

  The jig 12 shown in FIG. The lid 21 is also made of the same material as the bottom wall 18. The lid portion 21 is a plate-shaped member, and is provided so as to be fitted on the inner peripheral side of the side wall portion 20. The lid portion 21 is provided above the bottom wall portion 18 with an interval from the bottom wall portion 18. The lid 21 is detachably attached to the bottom wall 18 with bolts or the like. As described above, most of the jig 12 is made of metal. The jig 12 has a side wall main body 30 and a bottom wall 18 as the metal part 13 that comes into contact with the work W.

  The holding member 33 holds and supports the workpiece W placed on the jig 12 from above. The work W is stabilized on the jig 12 by the pressing member 33.

  The base board 26 is a board-shaped member provided on a stand (not shown). The base board 26 is made of metal (for example, stainless steel). The jig 12 is placed on the base board 26. The jig 12 is attached to the base board 26 by bolts or the like (not shown). The jig 12 can be removed from the base board 26 by removing the bolts. The jig 12 (the metal part 13) and the base board 26 are in contact with each other, and are in a state where they can be electrically connected.

  When the coil 11 comes into contact with the workpiece W during induction heating of the workpiece W by the coil 11, current flows from the coil 11 to the workpiece W. As described above, the work W, the jig 12 and the base board 26 are in a state where they can be electrically connected. Therefore, the coil touch mechanism 14 of the present embodiment is connected to the base board 26 through the electric wires 31. The coil touch mechanism 14 has a configuration in which a current flowing through the metal portion 13 of the jig 12 is detected through the base board 26. Note that the electric wire 31 may be connected to the metal portion 13 of the jig 12. As described above, the coil touch mechanism 14 detects a coil touch based on the current flowing through the metal part 13 for quality control. As the configuration of the coil touch mechanism 14, a conventionally known configuration is employed.

  The heated work W is placed on the metal part 13 of the jig 12. For this reason, the temperature of the metal portion 13 rises due to the heat transfer from the work W. Therefore, the cooling mechanism 15 cools the jig 12 with cooling water in order to suppress a rise in the temperature of the jig 12. The cooling mechanism 15 has a flow path 16 through which cooling water flows. In the embodiment shown in FIG. 1, a space 22 formed by being surrounded by the bottom wall 18, the side wall 20, and the lid 21 of the jig 12 is the flow path 16 through which the cooling water flows.

  The base board 26 is provided with a first hole 41 penetrating vertically. At the center of the bottom wall portion 18, a second hole 42 penetrating in the up-down direction that is continuous with the first hole 41 is provided. The second hole 42 is open at the center of the space 22. One end of the external pipe 40 is connected to the first hole 41. The other end of the external pipe 40 is connected to a pump 39 for sending cooling water to the flow path 16 side. The cooling mechanism 15 includes, in addition to the external pipe 40, a valve 38 for adjusting the flow rate of the cooling water flowing through the external pipe 40, a flow meter 37 for measuring the flow rate of the cooling water flowing through the external pipe 40, and a control panel 35. Have. The cooling water sent out by the pump 39 is supplied from the tank 36. The flow meter 37 measures the flow rate of the cooling water flowing through the external piping 40 and outputs the measurement result to the control panel 35. The control panel 35 performs control to determine the opening of the valve 38 based on the measurement result. As described above, a required amount of cooling water is supplied from the pump 39 to the space 22 (the flow path 16) of the jig 12 through the external pipe 40, the first hole 41, and the second hole 42.

  A drain hole 32 is formed in the outer edge of the space 22. The drain hole 32 is a hole that connects the space 22 and the outside of the jig 12. A drain pipe (not shown) is connected to the drain hole 32, and the cooling water supplied to the space 22 flows out of the jig 12 through the drain hole 32. The outflowing cooling water returns to the tank 36. Since the drain hole 32 is formed at the outer edge of the space 22, the cooling water flows (radially) from the center of the space 22 toward the outer edge of the space 22.

  As described above, the flow rate of the cooling water supplied to the flow path 16 for cooling the jig 12 is adjusted by the flow meter 37. Thereby, the cooling water whose flow rate is controlled flows through the space 22. In the embodiment of FIG. 1, the control panel 35, the flow meter 37, and the valve 38 constitute the adjusting unit 17 for adjusting the flow rate of the cooling water. Note that the valve 38 may be omitted, and the output of the pump 39 may be adjusted based on the measurement result of the flow meter 37. Also in this case, the flow rate of the cooling water is adjusted. As described above, the cooling mechanism 15 has the adjusting unit 17 that adjusts the flow rate of the cooling water. The adjustment of the flow rate of the cooling water by the adjusting unit 17 includes a case where the flow rate is set to zero (adjusted to zero).

[Modified Example of Channel 16 (Part 1)]
FIG. 2 is a cross-sectional view of the heat treatment apparatus 10 including the flow path 16 having a different configuration. The jig 12 included in the heat treatment apparatus 10 (hereinafter, referred to as a “second heat treatment apparatus 10”) illustrated in FIG. And a side wall portion 20 provided along. The side wall part 20 has a side wall main body part 30. Since the side wall main body 30 is made of metal (made of stainless steel), the side wall 20 includes the metal portion 13. The above points are the same as the jig 12 provided in the first heat treatment apparatus 10 shown in FIG. In the second jig 12, the lid 21 of FIG. 1 is omitted. Instead, a piping member 23 is provided along the bottom wall portion 18. The piping member 23 is provided on the bottom wall 18 along a horizontal plane.

  An external pipe 40 is connected to a part of the pipe member 23 via a first hole 41 and a second hole 42. A drain pipe (not shown) is connected to the other part of the pipe member 23. The cooling water sent out by the pump 39 passes through the inside of the pipe member 23. As described above, the cooling mechanism 15 of the second heat treatment apparatus 10 includes, as the flow path 16, the piping member 23 provided along the bottom wall 18. In the first heat treatment apparatus 10 (FIG. 1) and the second heat treatment apparatus 10 (FIG. 2), the same components are denoted by the same reference numerals. The description of the same configuration is omitted.

  In the embodiment shown in FIG. 2, the piping member 23 is provided in contact with the bottom wall 18. The pipe member 23 is preferably made of a material having relatively high thermal conductivity (metal such as copper or stainless steel). Since the pipe member 23 is in contact with the bottom wall portion 18, the cooling effect of the jig 12 by the cooling water is enhanced.

  As shown in FIG. 2, the jig 12 may be provided with a second flow path 48 through which cooling water flows, separately from the piping member 23. A part of the outer peripheral part 19 of the bottom wall part 18 is formed with a concave circumferential groove 34 that is continuous in the circumferential direction. A cylindrical peripheral wall member 47 is provided on the base board 26 and on the outer peripheral side of the bottom wall portion 18. With the jig 12 resting on the base board 26, the peripheral wall member 47 closes the concave peripheral groove 34 from the side. This closed space becomes the second flow path 48 through which the cooling water flows.

  FIG. 3 is an enlarged view showing a modified example of the piping member 23. FIG. 3 mainly shows a central portion of the bottom wall portion 18 and its periphery. The piping member 23 is provided on the bottom wall 18 along a horizontal plane. The piping member 23 is provided with a gap in the vertical direction from the bottom wall 18. An outlet 24 composed of a hole is provided in a part of the pipe member 23. The outlet 24 allows the cooling water flowing in the piping member 23 to flow out (outside the piping member 23). Thereby, the cooling water flows on the bottom wall portion 18. The jig 12 is provided with a drain hole 32. In the present embodiment, the drain hole 32 is provided in the bottom wall portion 18. The drain hole 32 discharges the cooling water on the bottom wall 18 out of the jig 12. The drain hole 32 has the same configuration and function as the drain hole 32 of the first heat treatment apparatus 10 (FIG. 1).

  The outlet 24 of the pipe member 23 opens at a position above the center of the bottom wall 18. The drain hole 32 is formed at the outer edge of the bottom wall 18. For this reason, the cooling water flows (radially) from the center of the bottom wall portion 18 toward the outer edge portion. In FIG. 3, the piping member 23 is provided apart from the bottom wall 18, but may be in contact with the bottom wall 18. Further, the opening direction of the outlet 24 may be other than downward, or may be horizontal.

[Modified Example of Channel 16 (Part 2)]
FIG. 4 is a cross-sectional view of the heat treatment apparatus 10 including the flow path 16 having a different configuration. In the heat treatment apparatus 10 shown in FIG. 4 (hereinafter, referred to as “third heat treatment apparatus 10”), a flow path between the base board 26 and the jig 12 for cooling the jig 12 with cooling water. 16 are provided. More specifically, a flow path hole 28 is formed inside the base board 26. The flow path hole 28 is opened on the lower surface of the base board 26, and an external pipe 40 is connected to this opening. The flow path hole 28 is branched in the base board 26, and the flow path hole 28 is opened at a plurality of positions on the upper surface of the base board 26.

  A concave portion 43 and a convex portion 44 are provided between the upper center of the base board 26 and the lower center of the jig 12. When the jig 12 is placed on the base board 26, the concave portion 43 and the convex portion 44 are fitted. Thereby, the jig 12 is positioned with respect to the base board 26 in the horizontal direction. An annular space 27 is formed between the base board 26 and the jig 12 in a state where the concave portion 43 and the convex portion 44 are fitted. A flow path hole 28 opens toward the jig 12 in the range of this space 27. The cooling water supplied to the flow path hole 28 through the external pipe 40 flows out of the opening (opening 45) of the flow path hole 28 and flows through the space 27. This space 27 becomes the flow path 16 for cooling the jig 12 with the cooling water. A plurality of openings 45 are formed along the circumferential direction. Although not shown, a peripheral groove connecting the plurality of openings 45 may be formed in the upper surface of the base board 26. In the first heat treatment apparatus 10 (FIG. 1) and the third heat treatment apparatus 10 (FIG. 4), the same components are denoted by the same reference numerals. The description of the same configuration is omitted.

[Regarding Heat Treatment Apparatus 10 of Each Embodiment]
1 to 4 includes an induction heating coil 11 for performing induction heating to temper the work W, and a jig 12 for supporting the work W thereon. The jig 12 has a metal part 13 that comes into contact with the workpiece W. The heat treatment apparatus 10 includes a coil touch mechanism 14, and the coil touch mechanism 14 detects a coil touch based on a current flowing through the metal part 13. The heat treatment apparatus 10 further includes a cooling mechanism 15. The cooling mechanism 15 has a flow path 16 through which cooling water for cooling the jig 12 flows, and an adjusting unit 17 for adjusting the flow rate of the cooling water.

  The heat treatment method performed by the heat treatment apparatus 10 having the above configuration is as follows. That is, the method is a heat treatment method in which the workpiece W placed on the jig 12 is heated by the induction heating coil 11 to perform tempering, and includes a work heating step and a jig cooling step. The work heating step is a step of heating the work W by the induction heating coil 11 while detecting a coil touch on the work W based on a current flowing through the metal part 13 of the jig 12 that comes into contact with the work W. The jig cooling step is a step of cooling the jig 12 with cooling water while adjusting the flow rate thereof at least during a time period during which the work W is heated (the work heating step).

  In order to temper the work W, the work W is heated to a required temperature, and then maintained at the required temperature for a required time while the work W is placed on the jig 12. When the work W is heated by the coil 11 in the time zone in which the temperature of the work W is maintained, this time zone is also included in the work heating step. Further, even during a time period in which the work W is not heated, the jig 12 may be cooled while adjusting the flow rate thereof with cooling water. This time zone is also included in the jig cooling step.

  According to the heat treatment apparatus 10 of each embodiment and the heat treatment method performed by the heat treatment apparatus 10, even if the metal part 13 of the jig 12 is heated by the heated work W, the jig 12 is cooled by the cooling water. can do. By adjusting the flow rate of the cooling water, the temperature of the jig 12 can be maintained at a low temperature (for example, 60 ° C. or less) that does not affect the heat treatment quality. Therefore, for example, it is possible to prevent the work W heated by the induction heating coil 11 from being further heated by the jig 12. Further, it is possible to prevent the work W placed on the jig 12 from being heated by the jig 12 before the heating is started. The temperature of the jig 12 of 60 ° C. is an example, and varies depending on quality conditions.

  The jig 12 is cooled by the cooling water, and the flow rate of the cooling water is controlled by the adjusting unit 17 so as to keep the temperature of the jig 12 constant, thereby suppressing the thermal expansion and thermal contraction of the jig 12. Can be. When the thermal expansion of the jig 12 increases, the work W placed on the jig 12 may come into contact with the coil 11 because the coil gap is small as described above. However, according to the heat treatment apparatus 10 of each of the above embodiments, the thermal expansion of the jig 12 is suppressed, and the work W can be prevented from contacting the coil 11.

  In each of the above embodiments, most of the jig 12 except for the guide portion 29 is made of metal. For this reason, it becomes easier to manufacture the jig 12 with high accuracy as compared with the case where the entire jig 12 is made of a fluororesin. Further, when the jig 12 is made of metal, additional processing is facilitated. For example, the heat treatment apparatus 10 can have a function of detecting the seating of the work W. That is, as shown in FIG. 1, an air hole 46 that allows air to pass through is formed in the side wall main body 30 of the jig 12. The air hole 46 opens at the upper surface of the side wall main body 30 where a part of the work W contacts. In a state where air is supplied from an air source (not shown) to the air hole 46, a part of the work W is placed on the upper surface of the side wall main body 30, and when the work W closes the air hole 46, the air hole 46 is closed. The pressure of the air to flow has a predetermined value. On the other hand, for example, when the work W is placed on the upper surface of the side wall main body 30 in an inclined state, the work W does not block the air holes 46. Then, the air pressure does not reach the predetermined value. By detecting the pressure of the air flowing through the air holes 46 as described above, it is determined whether or not the work W is placed on the jig 12 with the center line of the work W coinciding with the center line C of the jig 12. Can be detected. By making the jig 12 made of metal, it becomes easy to additionally provide the air hole 46 in the jig 12.

  In the case of the first heat treatment apparatus 10 shown in FIG. 1, the lid 21 is provided above the bottom wall 18 at an interval from the bottom wall 18. A space 22 formed by being surrounded by the bottom wall portion 18, the side wall portion 20, and the lid portion 21 is the flow path 16 through which the cooling water passes. According to this configuration, the cooling water can contact the bottom wall 18, the side wall 20, and the lid 21. Therefore, the jig 12 can be cooled widely.

  In the case of the second heat treatment apparatus 10 shown in FIGS. 2 and 3, the cooling mechanism 15 has a pipe member 23 provided along the bottom wall 18 as a flow path 16 through which cooling water passes. According to this configuration, the jig 12 can be efficiently cooled by providing the pipe member 23 at a necessary location. Note that the arrangement of the piping member 23 may be other than that shown in FIGS. 2 and 3. In particular, in the case of the embodiment shown in FIG. 3, an outlet 24 is provided in a part of the pipe member 23, and the jig 12 discharges the cooling water on the bottom wall portion 18 to the outside of the jig 12. A drain hole 32 is provided. According to this configuration, the jig 12 can be more efficiently cooled by the cooling water flowing through the piping member 23.

  The third heat treatment apparatus 10 shown in FIG. 4 includes a base board 26 on which the jig 12 is detachably mounted. A space 27 is formed between the base board 26 and the jig 12, and a flow path hole 28 opening toward the jig 12 is formed inside the base board 26 in the space 27. The space 27 serves as the flow path 16 through which the cooling water passes. Even if the size of the jig 12 is changed in accordance with the size of the work W or the like, the flow path 16 is not formed within the range of the jig 12 (that is, in the jig 12). It will be easier. That is, even when the jig 12 is changed in accordance with a change in the work W (for example, a change in the shape), the jig 12 is cooled by the cooling water flowing through the flow path hole 28 provided in the base board 26. It is possible to do.

  The embodiment disclosed this time is an example in all respects and is not restrictive. The scope of rights of the present invention is not limited to the above-described embodiment, but includes all modifications within a scope equivalent to the configuration described in the claims.

10: Heat treatment for tempering 11: Induction heating coil 12: Jig 13: Metal part 14: Coil touch mechanism 15: Cooling mechanism 16: Flow path 17: Adjusting section 18: Bottom wall section 19: Outer circumference section 20: Side wall section 21 : Cover 22: Space 23: Piping member 24: Outlet 26: Base board 27: Space 28: Channel hole 32: Drain hole W: Work

Claims (7)

An induction heating coil for induction heating to temper the workpiece,
A jig having a metal part that supports and supports the work and that comes into contact with the work,
A coil touch mechanism that detects a coil touch based on a current flowing through the metal part,
A flow path for flowing cooling water for cooling the jig, and a cooling mechanism having an adjusting unit for adjusting a flow rate of the cooling water,
A heat treatment apparatus for tempering, comprising: The jig includes a bottom wall portion, a side wall portion including the metal portion and provided along an outer peripheral portion of the bottom wall portion, and a space between the bottom wall portion and the bottom wall portion above the bottom wall portion. And a provided lid portion,
The tempering heat treatment apparatus according to claim 1, wherein a space formed by being surrounded by the bottom wall, the side wall, and the lid is the flow path. The jig has a bottom wall portion and a side wall portion including the metal portion and provided along an outer peripheral portion of the bottom wall portion,
The tempering heat treatment apparatus according to claim 1, wherein the cooling mechanism includes a pipe member provided along the bottom wall as the flow path.   The heat treatment apparatus for tempering according to claim 3, wherein the pipe member is provided in contact with the bottom wall portion. The piping member is provided on the bottom wall portion,
An outlet is provided in a part of the pipe member to allow cooling water flowing in the pipe member to flow out,
The heat treatment apparatus for tempering according to claim 3 or 4, wherein the jig is provided with a drain hole for discharging the cooling water on the bottom wall to the outside of the jig. A base board on which the jig is detachably mounted, further comprising:
A space is formed between the base board and the jig, and a flow path hole that opens toward the jig in a range of the space is formed inside the base board,
The heat treatment apparatus for tempering according to claim 1, wherein the space serves as the flow path. A heat treatment method for performing tempering by heating a work placed on a jig by an induction heating coil,
A step of heating the work by the induction heating coil while detecting a coil touch on the work based on a current flowing through a metal part of the jig and having contact with the work,
At least in a time period during which the work is being heated, a step of cooling the jig while adjusting the flow rate of the cooling water with the cooling water,
A heat treatment method comprising:

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