JP2020030160A - Diffraction ring imaging device - Google Patents

Abstract

To highly accurately set a distance between an irradiation point and an imaging plane to a setting value in a diffraction ring imaging device capable of photographing a diffraction ring to be photographed by irradiating it with an X-ray even when a measurement portion is narrow.SOLUTION: In a motor 27 having a through-hole allowing an X-ray emitted from an X-ray emitter 10 to get through formed inside an output shaft, a table 16 to which an imaging plate 15 is fixed is fixed to the output shaft, and a camera part 45 of a fiber camera is fixed to a lateral face. The table 16 has an LED light emitter 40 fixed thereto, and an electric power is supplied to the LED light emitter 40 via a wireless power supply transformer 30. A part where an optical axis of LED light crosses an emitted X-ray is set to a part where a distance between an irradiation point and an imaging plate takes a setting value. By adjusting a position of a device so that when the motor 27 is rotated and the LED light is emitted from the LED light emitter 40, an irradiation pattern of a circle to be reflected in an imaging image of the fiber camera becomes a point, the distance between the irradiation point and the imaging plate becomes the setting value.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a diffraction ring imaging apparatus that irradiates a measurement target with X-rays and images a diffraction ring on an imaging surface using X-rays diffracted by the measurement target.

  2. Description of the Related Art Conventionally, an object to be measured is irradiated with X-rays at a predetermined incident angle, and an X-ray diffraction ring (hereinafter referred to as a diffraction ring) is formed by the X-ray diffracted by the object to be measured, and the shape of the formed diffraction ring There is known an X-ray diffraction measuring apparatus that detects the residual stress of an object to be measured by performing analysis by the cos α method. In such an X-ray diffraction measurement device, a measurement site is narrow, such as inside a pipe or a hole, and a diffraction ring imaging device capable of imaging a diffraction ring even in a position where a normal X-ray diffraction measurement device cannot image a diffraction ring. There is an apparatus disclosed in Patent Document 1. In this device, a motor having a through hole in an output shaft is provided in the X-ray emitting direction of an X-ray emitter that radially emits X-rays, and a table on which an imaging plate is attached is attached to the motor. When X-rays are emitted from the line emitter through the motor and the through-hole of the table, diffracted X-rays generated at the measurement location are received by an imaging plate, and an image of the diffraction ring is taken. In addition, this apparatus is provided with an angle changing mechanism that can make an angle formed by the central axis of the X-ray emitter and the through hole of the motor and the table any angle, and greatly changes the attitude of the apparatus. Without being performed, the diffraction ring can be imaged by irradiating the measurement location with an X-ray at an appropriate incident angle. In addition, the diffraction ring imaged on the imaging plate can be read by setting the device to a dedicated diffraction ring reader, and the diffraction ring reader calculates the residual stress after reading the diffraction ring. You can do it. By using the diffraction ring imaging device and the diffraction ring reading device, even when the measurement place is in a narrow place, the apparatus can be set near the measurement place to image the diffraction ring and measure the residual stress.

Japanese Patent No. 6198088

  However, the diffraction ring imaging device disclosed in Patent Document 1 does not have a function of detecting a distance from an X-ray irradiation point to an imaging plate (hereinafter, referred to as a distance between an irradiation point and an imaging surface), and thus a distance between an irradiation point and an imaging surface. Is calculated from the radius of the imaged diffraction ring, or after reading the diffraction ring at the measurement location, spraying metal powder such as iron powder on the measurement location (creating a state of zero residual stress), and imaging the diffraction ring again It is obtained by a method of calculating from the radius of the diffracted ring imaged by the above method. However, since the diffraction ring imaged at the measurement location has a residual stress, it does not become a perfect circle, and there is a problem that the calculated distance between the irradiation point and the imaging surface is inaccurate. In addition, when an image is shot by spraying a metal powder such as an iron powder onto the measurement location, the shape becomes a perfect circle, and the distance between the irradiation point and the imaging surface can be obtained with a certain degree of accuracy. In addition, since it is necessary to perform the operation of spraying the metal powder in a narrow place, there is a problem that the measurement efficiency is extremely poor. Also, an angle formed by a plane (hereinafter, referred to as a reference plane) including the line at the X-ray incident angle and the rotation angle 0 of the imaging plate and the optical axis of the emitted X-ray, and the normal line of the measurement object at the X-ray irradiation point. (Hereinafter, referred to as a reference plane tilt angle) is obtained by using the method disclosed in Japanese Patent No. 5967491 to change the circumferential half-value width or the circumferential X-ray peak intensity change curve of the imaged diffraction ring. Seeking from. However, if the diffraction ring is not clearly imaged, that is, if the X-ray intensity distribution in the radial direction is not a normal distribution at all locations in the circumferential direction of the diffraction ring, an accurate value cannot be obtained. There is a problem.

  The present invention has been made to solve this problem, and an object of the present invention is to provide a diffraction ring imaging apparatus that irradiates a measurement target with X-rays and images a diffraction ring on an imaging surface with X-rays diffracted by the measurement target. In addition, as disclosed in Patent Document 1, in a diffraction ring imaging device capable of imaging a diffraction ring even when a measurement point is narrow, a diffraction ring imaging device capable of accurately setting a distance between an irradiation point and an imaging surface to a set value. Is to provide. It is still another object of the present invention to provide a diffraction ring imaging apparatus capable of accurately setting a X-ray incident angle to a set value and accurately setting a reference plane tilt angle to zero.

  In order to achieve the above object, a feature of the present invention is that an X-ray emitter that emits X-rays radially around its own central axis and an emission direction of X-rays emitted from the X-ray emitter are arranged. A motor having a first through-hole through which an emitted X-ray passes, provided in a rotation output shaft such that the center axis of the output shaft coincides with the center axis of the first through-hole. And a table-like diffraction ring imaging means attached to the output shaft of the motor, wherein the second through-hole has a central axis coinciding with the central axis of the first through-hole. A diffracting ring for imaging a diffracting ring on an imaging plane perpendicular to the center axis of a second through hole by diffracted X-rays generated by the object when an X-ray is emitted and an object is emitted in the emitted direction. An imaging unit, and an optical axis and light of X-rays attached to the diffraction ring imaging unit and emitted from the second through hole. Are visible light emitting means for emitting visible parallel light so that they intersect, or emitting visible focused light so as to be focused on the optical axis of the X-ray emitted from the second through hole. A visible light emitting means in which the distance from the point at which the optical axis of the parallel light or the visible focused light intersects the optical axis of the X-ray emitted from the second through hole to the imaging surface is set, and a diffraction ring. A diffractive ring imager provided with a camera arranged near the imaging means and for imaging near a point where the optical axis of the visible parallel light or the visible focused light intersects with the optical axis of the X-ray emitted from the second through-hole. Device.

  According to this, when the visible light is emitted from the visible light emitting means and the visible light emitting means attached to the diffraction ring imaging means is rotated by driving the motor, the center axis of the output shaft of the motor and the second through hole are rotated. Since the optical axis of the X-ray emitted from the object coincides with the optical axis of the X-ray, the irradiation pattern formed by the visible light is a circle centered on the point where the optical axis of the emitted X-ray intersects the surface of the object. Then, since the distance from the point where the optical axis of the visible light intersects the optical axis of the emitted X-ray to the imaging surface is set to the irradiation point-imaging surface distance, the position of the diffraction ring imaging device is adjusted. By setting the irradiation pattern formed by visible light to a point, the distance between the irradiation point and the imaging surface can be set to a set value. In addition, it is possible to know the degree of deviation from the set value of the distance between the irradiation point and the imaging surface from the radius of the irradiation pattern of the circle. Then, even if the measurement location is in a narrow place and it is difficult to see the irradiation pattern of the circle with the naked eye, the irradiation pattern of the circle can be seen from the image captured by the camera. Therefore, according to this diffraction ring imaging device, the distance between the irradiation point and the imaging surface can be accurately set to a set value.

  Further, another feature of the present invention is that the diffraction ring image pickup device includes a holder for fixing the X-ray emitter and connecting the motor, and a holder attached to the holder and having a tilt angle of 0 when reset and the center of the X-ray emitter. Tilt angle detecting means for detecting tilt angles in two directions perpendicular to the axis and perpendicular to each other. A line having a rotation angle of 0 on the imaging surface of the diffraction ring imaging means is detected by the tilt angle detecting means. That is, it is perpendicular to one of the directions.

  According to this, after resetting the tilt angle detecting means so that the optical axis of the X-ray emitted from the second through-hole is perpendicular to the measurement location, and then changing the attitude of the diffraction ring imaging device, One of the two inclination angles detected by the inclination angle detecting means is the X-ray incident angle, and the other inclination angle is the reference plane inclination angle. Therefore, if the attitude of the diffraction ring imaging device is adjusted with reference to the tilt angle detected by the tilt angle detecting means, the X-ray incident angle can be accurately set to a set value, and the reference plane tilt angle can be accurately set to 0. it can. The tilt angle in the vertical direction of the line at the rotation angle 0 of the imaging surface detected by the tilt angle detecting means is the reference plane tilt angle, and the tilt angle in the other direction is the X-ray incident angle.

  Another feature of the present invention is that the diffraction ring imaging device includes a jig mounting block that is connected to the holder and connected to the motor, and that can be used to mount a dedicated jig. When the device is mounted, the device has a bottom surface in the direction of the central axis of the first through hole, protrudes from the bottom surface, is perpendicular to the central axis of the first through hole, and intersects with the central axis of the first through hole. The point is that the point has a plane portion at the center.

  According to this, when the diffraction ring imaging device is attached to a dedicated jig and the dedicated jig is brought into contact with the surface of the measurement location, the optical axis of the easily emitted X-ray becomes perpendicular to the measurement location. This can improve the accuracy of the X-ray incident angle and the reference plane tilt angle detected by the tilt angle detecting means when the attitude of the diffraction ring imaging device is changed.

  Further, another feature of the present invention is that the holder of the diffraction ring imaging device is configured such that the angle of the first through hole with respect to the center axis of the X-ray emitter is set around the axis perpendicular to the direction of the rotation angle 0 line on the imaging surface. And an angle changing mechanism that can be set to an arbitrary angle, and the holder is configured to display an angle at which the angle of the first through hole with respect to the center axis of the X-ray emitter can be read. .

  According to this, the angle of the first through hole with respect to the center axis of the X-ray emitter is set to the set value of the X-ray incident angle by the angle changing mechanism, and then the optical axis of the emitted X-ray is set with respect to the measurement point. If the center axis of the X-ray emitter is made approximately perpendicular to the measurement point, the incident angle of the X-ray is set near the set value, and the inclination angle of the reference plane is set near 0. can do. Therefore, it becomes easy to adjust the attitude of the diffraction ring imaging device with reference to the tilt angle detected by the tilt angle detecting means.

  Further, another feature of the present invention is that the diffraction ring imaging device detects the irradiation pattern formed by the visible light when the motor is driven to emit the visible light from the visible light emitting means. In accordance with the magnitude and sign of the tilt angle in the vertical direction of the line having the rotation angle 0 of the imaging surface, and the magnitude and sign of the deviation from the set value of the tilt angle in the other direction detected by the tilt angle detecting means. Thus, there is provided a light emission control means for controlling the light emission of the visible light emission means.

  According to this, it is not necessary to confirm the tilt angle by looking at the numerical value of the tilt angle detected by the tilt angle detecting means. The attitude of the diffraction ring imaging apparatus may be adjusted so that the incident angle of the line is a set value and the illumination pattern has a reference plane inclination angle of 0. This adjustment is performed before the adjustment of the position of the diffraction ring image pickup device with respect to the irradiation pattern of the circle formed by the visible light. Note that the change in the irradiation pattern is determined based on the magnitude and sign of the deviation from the set value of the incident angle of the X-ray and the magnitude and sign of the inclination angle of the reference plane. A method is conceivable in which two vectors in a direction perpendicular to are defined, and the location and range of the circular irradiation pattern are determined based on the direction and magnitude of a composite vector of those vectors. However, the change in the irradiation pattern may be any as long as the posture of the diffraction ring imaging device can be easily adjusted while watching the irradiation pattern.

1 is an overall configuration diagram of a diffraction ring imaging device according to an embodiment of the present invention. FIG. 2 is a partial sectional view of a diffraction ring imaging device main body in the diffraction ring imaging device of FIG. 1. FIG. 3 is an enlarged view of a diffraction ring imaging part in the diffraction ring imaging device body of FIG. 2. FIG. 3 is a diagram of a motor fixing plate in the diffraction ring imaging device main body of FIG. 2 as viewed from above. FIG. 3 is an overall external view of a jig for mounting the diffraction ring imaging device main body of FIG. 2 when the optical axis of the output X-ray is perpendicular to the surface of the measurement location. FIG. 7 is a diagram illustrating a state in which a diffraction ring imaging device body is inserted into a cylindrical hole and the bottom surface of the hole is measured. FIG. 7 is a diagram illustrating a state in which a diffraction ring imaging device body is inserted into a cylindrical hole and a side surface of the hole is measured. FIG. 3 is an overall external view of a jig for mounting the diffraction ring imaging device main body in FIG. 2 when irradiating a measurement location with an X-ray to image the diffraction ring. FIG. 3 is an overall external view of a jig for adjusting a distance between an irradiation point and an imaging surface when a diffraction ring imaging device main body is inserted into a cylindrical hole and a side surface of the hole is measured. It is the figure which looked at the front-end | tip part of the jig of FIG. 9 from the upper part which removed the housing | casing upper surface of the expansion-contraction rod storage part. FIG. 4 is a diagram illustrating a relationship between an X-ray incident angle and a reference plane inclination angle, and an irradiation pattern of a circle formed by LED light. FIG. 9 is an overall external view of a jig for turning a handle of a gonio stage in the jig of FIG. 8. It is the figure which removed the side surface of the housing | casing of the long part and the short part in the jig of FIG. 12, and was seen from the lateral direction.

  A configuration of a diffraction ring imaging apparatus according to an embodiment of the present invention will be described with reference to FIGS. 1 is an overall configuration diagram of a diffraction ring imaging device, FIG. 2 is a partial cross-sectional view of a diffraction ring imaging device main body, and FIG. 3 is an enlarged view of a diffraction ring imaging portion in the diffraction ring imaging device main body. This diffraction ring imaging device is an improvement of the diffraction ring imaging device described in Patent Document 1 of the prior art document, and portions having the same configuration as the diffraction ring imaging device shown in Patent Document 1 have already been described in Patent Document 1. Therefore, only a brief explanation will be given. Note that parts having the same configuration as the diffraction ring imaging device disclosed in Patent Document 1 are denoted by the same reference numerals in the drawings.

  As shown in FIG. 1, the diffraction ring imaging device 1 includes a diffraction ring imaging device main body 5, a high voltage power supply 6, a fiber camera 4, a control device 95, a computer device 90, and the like. The diffraction ring imaging device main body 5 is inserted into the measurement object OB inside, and X-rays are radiated to a measurement location to image the diffraction ring on the imaging plate 15. The X-ray diffraction measurement can be performed on various metals, but in this embodiment, the material of the measurement point is iron, and the object to be measured OB is any material as long as the bottom or side surface of the cylindrical hole is iron. It is OK.

  As shown in FIG. 2, the diffraction ring imaging device main body 5 has an X-ray emitter 10 set inside a cylindrical holder 7, and when set, the central axis of the holder 7 and the central axis of the X-ray emitter 10. Approximately matches. The bottom of the holder 7 is provided with a large-diameter hole 7a. When power is supplied from the high-voltage power supply 6, the X-ray emitter 10 passes through the hole 7a and emits X-rays downward in FIG. I do. The X-ray is an X-ray that spreads radially around the central axis of the X-ray emitter 10 as shown by a dashed line in FIG. The high-voltage power supply 6 includes a control circuit therein, and when an X-ray emission command is input from the controller 91, the high-voltage power supply 6 supplies power of the set intensity to the X-ray emitter 10; Stop the power that you are doing. When a command for diffracting ring imaging is input from the input device 92, the controller 91 outputs a command for X-ray emission to the high-voltage power supply 6, and outputs a stop command after a set time has elapsed.

  As shown in FIG. 2, the cylindrical holder 7 has a male thread cut on the upper part, and an upper lid 8 with a female thread can be screwed in. The X-ray emitter 10 is attached to the holder 7. When the upper lid 8 is set and screwed into the holder 7, the X-ray emitter 10 is fixed in the holder 7. The upper lid 8 has a hole 8a at the center so that a cable 9 for connection to a high-voltage power supply 6 emitted from an X-ray emitter 10 can be passed through.

  The motor 27 is fixed to the motor fixing plate 13 by tightening the two screws 14 into the holes 13a through the holes 29a of the two fixing plates 29. The two connecting portions 12 of the motor fixing plate 13 It is fixed to the holder 7 by being screwed into the hole 7b through the hole 12a of the connecting portion 12. Thus, the motor 27 is disposed below the holder 7, that is, in the X-ray emission direction. The motor 27 includes a cable for supplying electric power for driving the motor 27 to rotate, and a cable for transmitting an index signal and a pulse train signal output from an encoder in the motor 27. These cables are connected to a motor of a control device 95 described later. Although connected to the drive circuit 99, they are omitted from FIGS. 1 to 3 for clarity.

  FIG. 4 is a view of the motor fixing plate 13 as viewed from above. The chain line indicates the motor 27 fixed to the motor fixing plate 13. As shown in FIG. 4, the motor fixing plate 13 has a hole having the same diameter as the motor 27 around the center axis, and the X-rays emitted radially are irradiated on the bottom surface of the motor 27. The strength of the connection between the holder 7 and the motor fixing plate 13 by tightening the screw 11 is such that the motor fixing plate 13 is fixed with the central axis of the output shaft of the motor 27 with respect to the central axis of the cylindrical holder 7 at an arbitrary angle. Strength that can be. Thereby, the center axis of the output shaft of the motor 27 can be fixed at an arbitrary angle with respect to the center line of the X-rays radially emitted from the X-ray emitter 10.

  As shown in FIG. 3, a through hole 13 b is provided on a side surface of the motor fixing plate 13 at a position symmetrical with respect to a center axis of the motor fixing plate 13. The through hole 13b is a hole for inserting a fixing rod in the vertical projection jig 80 when setting the diffraction ring imaging device main body 5 to the vertical projection jig 80 described later. The vertical positioning jig 80 will be described later. Also, when the diffraction ring imaged on the imaging plate 15 is read by the diffraction ring reader, it is a hole for inserting a fixing rod in the diffraction ring reader. This diffraction ring reader is the same as the diffraction ring reader disclosed in Patent Document 1 of the prior art document, and therefore the description is omitted.

  The output shaft 27a of the motor 27 has a through hole 27a1 having a cylindrical shape and a circular cross section. A through hole 27b is provided on the opposite side of the output shaft 27a of the motor 27, and on the inner peripheral surface of the through hole 27b, In order to reduce the inside diameter of a part of the through hole 27b, a cylindrical passage member 28 having a through hole 28a is fixed. The table 16 has a disk shape and is fixed to the tip of the output shaft 27a of the motor 27. The table 16 has a projecting portion 17 projecting downward from the center of the lower surface, and a thread is formed on the outer peripheral surface of the projecting portion 17. An imaging plate 15 is mounted on the lower surface of the table 16, and a through hole 15 a is provided in the center of the imaging plate 15. A projection 17 is passed through the through hole 15 a, and a nut is provided on the outer peripheral surface of the projection 17. The imaging plate 15 is fixed between the fixture 18 and the table 16 by screwing the fixture 18 in the shape of a screw.

  The table 16, the protrusion 17, and the fixture 18 are also provided with through holes 16a, 17a, 18a, respectively, and the through holes 16a, 17a, 18a are coaxial with the through holes 28a, 27b, 27a1. As a result, part of the X-rays emitted to the bottom surface of the motor 27 is emitted through these through holes, and is emitted from the through hole 18a because the inner diameter of the through hole 28a and the inner diameter of the through hole 18a are small. The X-ray is an X-ray having the same optical axis as the central axis of these through holes (the same as the central axis of the output shaft of the motor 27).

  As described above, X-rays are emitted from the X-ray emitter 10 radially. Therefore, unless the angle of the central axis of the output shaft of the motor 27 with respect to the central axis of the holder 7 is increased by a predetermined value or more, the emitted X-rays are emitted. Part of the line enters the through hole 28a and exits from the through hole 18a. The connecting portion 12 can fix the center axis of the output shaft of the motor 27 at an arbitrary angle with respect to the center axis of the holder 7, so that the direction of the center axis of the holder 7 does not need to be changed. The irradiation direction of the X-ray emitted from the through hole 18a can be largely changed. In addition, a plurality of lines are drawn on the side surface of the holder 7 where the vertical edge of the connecting portion 12 contacts, and these lines indicate the center axis of the output shaft of the motor 27 with respect to the center axis of the holder 7. The numerical value of the angle of (optical axis of the output X-ray) is shown. Therefore, by aligning the vertical edge of the connecting portion 12 with the line indicating the numerical value of the desired angle among these lines, the central axis of the output shaft of the motor 27 with respect to the central axis of the holder 7 is set at the desired angle. Can be

  As shown in FIG. 3, a hole 16b is formed near the side surface of the disc-shaped table 16 from the lower surface to the upper surface, and an LED light emitter 40 is attached to the hole 16b. The LED light emitter 40 emits LED light whose optical axis crosses the optical axis of the X-ray emitted from the through hole 18a (the central axis of the through holes 28a to 18a and the central axis of the output shaft of the motor 27), The LED light is substantially parallel, but is slightly focused so as to be focused at the intersection. The position of the LED light emitter 40 is adjusted so that the distance from the intersection to the imaging plate 15 is equal to the set value of the irradiation point-imaging plane distance. The LED light emitting device 40 has a collimating lens 43 attached near the lower surface of the table 16 in the hole 16b, and a fixture 42 attached near the upper surface of the table 16 in the hole 16b so that the end is fitted to the upper surface. The LED light source 41 is attached. The LED light source 41 includes a rectifying element, and emits light when AC power is supplied from the cable 44.

  The supply of AC power to the LED light source 41 is performed via the wireless power supply transformer 30. The wireless power supply transformer 30 transmits electric power by an electromagnetic induction method, and includes a power transmission side unit 31 and a power reception side unit 32 each wound with a coil 33, and is attached so as to surround an output shaft of the motor 27. I have. The power transmitting unit 31 is attached to the motor 27 and does not rotate, and the power receiving unit 32 is attached to the upper surface of the table 16 and rotates. When an AC current flows through the coil of the power transmitting unit 31, an AC current also flows through the coil of the power transmitting unit 31 by electromagnetic induction, and an AC current flows from the terminal 34 to the LED light source 41 via the cable 44. Since the supply of the AC power via the wireless power supply transformer 30 can be performed even when the motor 27 rotates, the supply of the AC power to the LED light source 41 can be performed even when the motor 27 rotates. Note that the terminals of the power transmission unit 31 are omitted from FIGS. 2 and 3 to make the drawings easier to see. Further, the wireless power supply transformer 30 having various structures is commercially available, and one used in the present embodiment is one of them.

  As described above, since the supply of the AC power to the LED light source 41 can be performed even when the motor 27 rotates, the motor 27 is rotated, and the LED light emitter 40 is rotated around the center axis of the output shaft of the motor 27. The LED light can be emitted in such a manner as to rotate. When the LED light is irradiated in this manner, the irradiation pattern drawn by the LED light on the surface of the measurement object OB is such that the center axis of the output shaft of the motor 27 (the optical axis of the emitted X-ray) intersects the surface of the measurement object OB. A circle centered on the point where If the center axis of the output shaft of the motor 27 coincides with the normal of the surface of the object OB, it is a perfect circle, and if it has an angle, it is an ellipse. As described above, the distance from the point where the optical axis of the LED light emitted from the LED light emitting device 40 intersects the optical axis of the emitted X-ray to the imaging plate 15 is determined by setting the distance between the irradiation point and the imaging surface. When the position of the diffraction ring imaging device main body 5 is adjusted and the distance between the irradiation point and the imaging surface is set to the set value, the irradiation pattern drawn by the LED light becomes a point. Therefore, by rotating the motor 27 to emit the LED light from the LED light emitting device 40 and adjusting the position of the diffraction ring imaging device main body 5 so that the irradiation pattern drawn by the LED light becomes a point, the distance between the irradiation point and the imaging surface is adjusted. The distance can be set to a set value.

  As shown in FIG. 1, when the measurement location is inside a cylindrical hole, it is difficult to visually confirm the irradiation pattern drawn by the LED light. For this reason, a fiber camera 4 is provided for imaging the periphery of the point where the optical axis of the LED light intersects with the optical axis of the emitted X-ray, so that the illumination pattern drawn by the LED light can be confirmed from the captured image. Has become. As shown in FIG. 2, the camera unit 45 of the fiber camera 4 is fixed to a fixing tool 47, and the fixing tool 47 is fixed to a side surface of the motor 27 by welding or screwing. The axis is before and after the vicinity of the point where the axis intersects the optical axis of the emitted X-ray. A cable 46 coming out of the camera section 45 is connected to a display 48 made of liquid crystal or the like so that the display 48 allows the user to view a captured image.

  As shown in FIGS. 1 and 2, an inclination sensor 35 is attached to a side surface of the holder 7 so that the inclination angle of the diffraction ring imaging device main body 5 with respect to the direction of gravity can be detected. The inclination sensor 35 may be of any principle as long as the inclination angle can be accurately detected, and a commercially available one having an appropriate size may be selected. A pocket-like set portion 36 is provided on the side surface of the holder 7, and the tilt sensor 35 can be fixed by inserting the tilt sensor 35 into the set portion and mounting the retainer 37 on the upper end of the set portion. It has become. The tilt sensor 35 detects tilt angles in two directions perpendicular to the central axis of the holder 7 (the central axis of the X-ray emitter 10) with respect to the direction of gravity. The direction of the central axis of the three screws 11 and the direction perpendicular to this direction. In other words, the direction of the rotation axis when the angle of the center axis of the output shaft of the motor 27 with respect to the center axis of the holder 7 is changed, and the direction perpendicular to this direction. The direction of the rotation axis is parallel to the imaging plate 15, and the line of the rotation angle 0 of the imaging plate 15 is defined as a vertical line passing through the center of the imaging plate 15 and parallel to the direction of the rotation axis. Is done. Therefore, in other words, the tilt angle detected by the tilt sensor 35 is perpendicular to the direction of the line at the rotation angle 0 of the imaging plate 15 in the imaging plate 15 (vertical direction of the reference plane) and perpendicular to this direction. Direction.

  The control device 95 includes various circuits therein, and controls the motor 27, the LED light emitting device 40, and the tilt sensor 35 of the diffraction ring imaging device body 5 according to a command from the controller 91, and also controls the tilt sensor 35 for control. Input the digital data of the slope output by. The cable 38 coming out of the tilt sensor 35 is connected to an arithmetic circuit 98 in the control device 95. The tilt sensor 35 receives power for operation from the arithmetic circuit 98, and starts and stops data output. Command is input. Then, when a data output start command is input, digital data of two inclination angles detected at set intervals is output to the arithmetic circuit 98, and when a stop command is input, the output is stopped. When an operation start command is input from the controller 91, the arithmetic circuit 98 outputs a data output start command to the tilt sensor 35 and inputs digital data of tilt angles in two directions. When a reset command is input from the controller 91, a command to start data output and a command to stop after a set time are output to the tilt sensor 35, and the input digital data of the tilt angle is stored in the memory and thereafter input. The stored tilt angle is subtracted from the tilt angle to obtain a normal tilt angle. The reset command from the controller 91 is performed by the operator inputting the reset of the tilt angle from the input device 92, and the tilt angle from the attitude of the diffraction ring imaging device body 5 intended by the operator is calculated by the arithmetic circuit 98. Is calculated.

  As described above, the tilt angle detected by the tilt sensor 35 is a direction perpendicular to the reference plane and a direction perpendicular to this direction and perpendicular to the center axis of the holder 7. In the latter case, the direction of the tilt angle with respect to the center axis of the holder 7 is not limited as long as it is a direction perpendicular to the reference plane (direction included in the reference plane). Therefore, the tilt angle calculated by the arithmetic circuit 98 after inputting the reset of the tilt angle can be regarded as the direction perpendicular to the reference plane and the direction of the line at the rotation angle 0 of the imaging plate 15. For this reason, the center axis of the output shaft of the motor 27 (the optical axis of the emitted X-ray) is perpendicular to the plane of the measurement point of the measurement object OB, and the reset of the tilt angle is input. If the angle of the central axis of the output shaft of the motor 27 (optical axis of the emitted X-ray) with respect to the angle is not changed, the inclination angle calculated by the arithmetic circuit 98 thereafter becomes the incident angle of the X-ray and the reference plane inclination angle. .

  In the memory of the arithmetic circuit 98, the number of pulses of the pulse train signal output by the encoder from the encoder in the motor 27 until the position of the LED light emitting device 40 is on the line with the rotation angle 0 after the index signal is output from the encoder in the motor 27. And the number of pulses of the pulse train signal output by the encoder when the motor 27 makes one rotation. The set value of the X-ray incident angle input from the controller 91 is also stored in the memory. Then, when an operation start command is input from the controller 91, it is supplied to the LED light source 41 from the stored pulse number and the set values of the X-ray incident angle and the calculated inclination angle at set time intervals. The timing at which the drive signal turns ON and the timing at which the drive signal turns OFF are calculated and output to an ON-OFF control circuit 97 described later. This timing is calculated by the number of pulses of the pulse train signal output from the encoder after the encoder in the motor 27 outputs the index signal. The timing at which the drive signal is turned on and the timing at which the drive signal is turned off, which is calculated by the arithmetic circuit 98, will be described later in detail.

  The light emission signal supply circuit 96 outputs a drive signal for causing the LED light source 41 to emit light when a light emission start command is input from the controller 91, and stops the output of the drive signal when a stop command is input. The ON-OFF control circuit 97 re-stores the number of pulses in which the drive signal is turned on and the number of pulses in which the drive signal is turned off from the arithmetic circuit 98 in the memory. The ON-OFF control circuit 97 counts the number of pulses of the pulse train signal input from the encoder in the motor 27, and resets the count to 0 every time an index signal is input from the encoder. When the accumulated count reaches the stored ON pulse number, the driving signal input from the light emission signal supply circuit 96 is output. When the OFF pulse number is reached, the drive signal input from the light emission signal supply circuit 96 is output. To stop. Thereby, when the motor 27 rotates and the LED light emitting device 40 emits the LED light, the irradiation pattern drawn by the LED light becomes a circle with a missing portion.

  When a rotation start command is input from the controller 91, the motor drive circuit 99 outputs a drive signal for rotating the motor 27 to the motor 27. At this time, a pulse train signal output from an encoder in the motor 27 is input, and the intensity of the drive signal outputted to the motor 27 is controlled so that the number of pulses per unit time of the pulse train signal becomes a set value. Thus, the motor 27 rotates at the set rotation speed. Further, when a command for a rotation angle of 0 is input from the controller 91, the motor drive circuit 99 outputs a drive signal for rotating the motor 27 at an extremely low speed, and stops outputting the drive signal at the timing when the index signal is input. Accordingly, by imaging the diffraction ring after outputting the command of the rotation angle 0 from the controller 91, the line of the rotation angle 0 of the imaging plate 15 becomes constant, as shown in Patent Document 1 of the prior art document. When the diffraction ring is read by the diffracted ring reader, if the circumferential position of the irradiation point of the laser beam irradiated on the imaging plate 15 in the table 16 is acquired, the pulse of the index signal and the pulse train signal output by the encoder is obtained. A line with a rotation angle of 0 can be detected by the number.

  The computer device 90 includes a controller 91, an input device 92, and a display device 93. The controller 91 is an electronic control device mainly including a microcomputer including a CPU, a ROM, a RAM, a large-capacity storage device, and the like, and is controlled by an input from an input device 92 and execution of a stored program by the input. A command is output to each circuit of the device 95 and the high voltage power supply 6. Thus, various operations of the diffraction ring imaging device 1 are performed by inputting from the input device 92.

  A description will be given of a method of imaging the diffraction ring by irradiating the measurement location of the measurement object OB with X-rays using the diffraction ring imaging apparatus 1 configured as described above. First, the operator looks at the line indicating the angle drawn on the holder 7 of the diffraction ring imaging device main body 5 and the vertical edge of the connecting portion 12 while checking the output shaft of the motor 27 with respect to the center axis of the holder 7. The angle of the central axis is set to the set value of the X-ray incident angle or (90 ° −the set value of the X-ray incident angle). The difference between the two is that the measurement location is the bottom or the side of the cylindrical hole. Next, in this state, the fixing rods 86 and 87 of the vertical setting jig 80 shown in FIG. 5 are inserted into the through holes 13 b of the motor fixing plate 13 of the diffraction ring imaging device main body 5, so that the vertical setting jig 80 is obtained. Is set to the diffraction ring imaging device main body 5. The vertical projection jig 80 has columns 83, 84 attached to a flat base 81, an elongated block 85 attached to the upper ends of the columns 83, 84, and two fixing rods 86, on the side surfaces of the elongated block 85. 87 is attached. At the center of the base 81, there is a cylindrical flat portion 82. The bottom surface of the flat portion 82 protrudes from the bottom surface of the base 81, and when the vertical positioning jig 80 is placed on a flat surface, the flat portion 82 Only the bottom surface of is contacted with the plane. When the diffraction ring imaging device main body 5 is set on the vertical projection jig 80, the fixture 18 of the diffraction ring imaging device main body 5 is located near the upper surface of the flat portion 82. The center axis of the output shaft of the motor 27 (the optical axis of the emitted X-ray) is perpendicular to the top and bottom surfaces of the plane portion 82, and the point at which the center axis of the output shaft of the motor 27 intersects the plane portion 82 is The center of the top and bottom surfaces of the portion 82.

  The operator brings the vertical setting jig 80 on which the diffraction ring imaging device main body 5 is set into contact with the measurement location of the measurement object OB. As a result, the center axis of the output shaft of the motor 27 (the optical axis of the emitted X-ray) is perpendicular to the measurement location of the measurement object OB. Next, the operator inputs a reset of the tilt angle from the input device 92 in this state. As a result, the inclination angle calculated by the arithmetic circuit 98 thereafter is the normal direction of the measurement point of the measurement object OB regardless of the angle of the measurement point of the measurement object OB with respect to the direction of gravity. Are the inclination angles in two directions perpendicular to. Specifically, the tilt angles in the two directions are the incident angle of the X-ray and the tilt angle of the reference plane when the measurement location is irradiated with the X-ray.

  When the measurement location of the measurement object OB is the bottom surface of the cylindrical hole, as shown in FIG. 6A, the diffraction ring imaging device main body 5 attached to the vertical projection jig 80 is placed on the bottom surface of the cylindrical hole. Alternatively, when the center line of the cylindrical hole has an angle with respect to the direction of gravity, the vertical holding jig 80 and the diffraction ring imaging device main body 5 are held and brought into contact with the bottom surface of the cylindrical hole. If the bottom surface of the cylindrical hole is highly precisely parallel to the surface where the hole is formed, place it on the surface as shown by the dotted line in FIG. You may contact. For example, when the object of diffraction ring imaging is a steel frame inside a building, and a hole is drilled in the wall of the building to perform diffraction ring imaging, the surface of the steel frame and the surface of the wall are usually parallel with high precision. Therefore, such a method can be adopted. Then, when imaging the diffraction ring by irradiating the measurement location with X-rays, if the center axis of the holder 7 is made perpendicular to the measurement location as shown in FIG. The angle of the central axis of the output shaft of the motor 27 with respect to the central axis is set to the set value of the X-ray incident angle, so that the incident angle of the X-ray to the measurement point becomes the set value. It should be noted that the accuracy of setting is not high when setting the angle of the center axis of the output shaft of the motor 27 with respect to the center axis of the holder 7 or when setting the center axis of the holder 7 perpendicular to the measurement point. , The X-ray incidence angle is a value near the set value.

  When the measurement point of the measurement object OB is the side surface of the cylindrical hole, if the position when viewed in a cross section perpendicular to the center axis of the hole is the same, the side surface at the upper end of the hole is usually Since the side faces of the measurement location are parallel, as shown in FIG. 7A, the vertical holding jig 80 and the diffraction ring imaging device main body 5 are held and brought into contact with the upper end of the hole. If the center axis of the cylindrical hole is perpendicular to the direction of gravity, the diffraction ring imaging device main body 5 attached to the vertical positioning jig 80 may be placed on the side surface of the hole. When irradiating the measurement location of the measurement object OB with X-rays to image the diffraction ring, the central axis of the holder 7 may be parallel to the measurement location as shown in FIG. 7B. First, since the angle of the center axis of the output shaft of the motor 27 with respect to the center axis of the holder 7 is set to (90 ° -the setting value of the X-ray incidence angle), the incidence angle of the X-ray to the measurement point becomes the setting value. . Also in this case, the X-ray incident angle is a value near the set value.

  As described above, when irradiating the measurement location of the measurement object OB with the X-rays from the diffraction ring imaging apparatus main body 5 to image the diffraction angle, the center axis of the holder 7 is set to be perpendicular or parallel to the measurement location. In this case, the incident angle of the X-ray to the measurement point becomes a value near the set value. Then, in order to make the center axis of the holder 7 perpendicular or parallel to the measurement location, the diffraction ring imaging device main body 5 is attached to a jig shown in Patent Document 1 of the prior art, The jig shown in Patent Document 1 has difficulty in finely adjusting the position and orientation of the diffraction ring imaging device main body 5 with the jig disclosed in Patent Document 1. That is, in order to make the illumination pattern of the LED light formed when the LED light is emitted from the LED light emitting device 40 while rotating the motor 27, the position of the diffraction ring imaging device main body 5 needs to be finely adjusted. Since the X-ray incidence angle with respect to the measurement location is a value near the set value, it is necessary to finely adjust the attitude of the diffraction ring imaging device main body 5 in order to set the angle to the set value. The fixture shown does not have the ability to make this fine adjustment. Therefore, the diffraction ring imaging jig 3 shown in FIG. 8 is used as a jig that enables these fine adjustments. This jig 3 for imaging a diffraction ring is an improvement of the jig shown in Patent Document 1, and is different from the jig shown in Patent Document 1 in that a jig in a vertical direction is used. The point is that a telescopic unit that can finely adjust the length and a two-axis goniometer that can finely adjust the attitude of the diffraction ring imaging device main body 5 are provided. All other components are the same as those of the jig shown in Patent Document 1, and portions having the same structure are given the same numbers as those of the jig shown in Patent Document 1. Therefore, the portions already described in detail in Patent Document 1 will be described only briefly.

  The diffraction ring imaging jig 3 has mounting rings 68 and 69, and the diffraction ring imaging device main body 5 is mounted on the mounting rings 68 and 69. The attachment rings 68 and 69 are fixed to a long rod 67 whose direction is the same as the central axis direction of the telescopic pipe 51 described later and whose position is different in the vertical direction of the central axis direction. When fixed to the mounting rings 68, 69, the central axis of the holder 7 is substantially coincident with the central axis of a telescopic pipe 51 described later. The jig 3 is provided with a handle 70, and the operator holds the handle 70 and inserts the diffraction ring imaging device main body 5 attached to the diffraction ring imaging jig 3 into the hole of the measurement object OB. Can be. The handle 70 is attached to the telescopic bar built-in unit 77. The telescopic bar built-in unit 77 has a component in which the telescopic bar is fixed at the center of a disk that is pressed upward by an elastic body such as a spring. There is a threaded hole in the upper part of the telescopic rod built-in unit 77. By screwing the screw 79 attached to the knob 78 into this hole, the disk pressed upward can be pushed downward. Thereby, the telescopic rod fixed to the center of the disk moves downward, and the telescopic rod comes out of the hole formed at the lower part of the telescopic rod built-in unit 77 and is connected to the upper end of the telescopic pipe 51 described later. Therefore, the portion below the telescopic rod built-in unit 77 is moved downward by screwing the screw 79 attached to the knob 78. Thereby, fine adjustment of the vertical position of the diffraction ring imaging device main body 5 can be performed. The telescopic pipe 51 connected to the telescopic rod can change the entire length by moving a small-diameter pipe into and out of a large-diameter pipe, such as a pointer pen that expands and contracts. When the handle 70 is aligned with the surface of the object OB where the hole is formed, the fixture 18 (the exit of the X-ray) of the diffraction ring imaging apparatus main body 5 is positioned near the measurement point. You can let it come.

  Also, the jig 3 is provided with four pressing portions 50 at an end portion of the telescopic pipe 51 at intervals of 90 degrees in a direction perpendicular to the central axis of the jig 3 (the central axis of the telescopic pipe 51). When the columnar button 60 is pressed down and the stopper 64 is removed, the telescopic bars 53 housed in the four housing sections 52 extend. The jig 3 can be fixed inside the measurement object OB by the respective extension rods 53 being extended and the roller 58 at the tip pushing the wall of the hole of the measurement object OB. At this time, since the lengths of the expansion and contraction rods 53 become equal in order to equalize the pushing forces in the four directions, the diffraction ring imaging device main body 5 can be positioned near the center axis of the hole of the measurement object OB. The internal structure of the pressing portion 50 has been described in detail in Patent Literature 1, and a description thereof will be omitted.

  At the lower part of the four pressing portions 50, a square flat plate 71 spans the four connecting members 76 over the respective storage portions 52, and is screwed to the flat plate through holes formed in the connecting members 76. Are connected by A biaxial goniometer is connected to the lower part of the flat plate 71 by screwing it to the lower goniometer 72 through a hole formed in the flat plate 71. The two-axis goniometer stage includes a lower goniometer stage 72 and an upper goniometer stage 74. The lower goniometer stage 72 rotates the handle 73 so that the upper stage moves downward around a rotation axis perpendicular to the center axis of the telescopic pipe 51. Change the tilt angle with respect to the stage. This rotation axis is parallel to the central axis of the two storage sections 52 and substantially perpendicular to the direction of the rotation axis that changes the angle of the motor 27 with respect to the holder 7 of the attached diffraction ring imaging device body 5. The upper gonio stage 74 rotates the handle 75 to change the inclination angle of the upper stage with respect to the lower stage around a rotation axis perpendicular to the central axis of the telescopic pipe 51. If the inclination angle of the lower gonio stage 72 is 0 as shown in FIG. 8, this rotation axis is parallel to the central axes of the two storage sections 52. Further, it is substantially parallel to the direction of the rotation axis for changing the angle of the motor 27 with respect to the holder 7 of the attached diffraction ring imaging device main body 5.

  A long rod 67 on which mounting rings 68 and 69 are mounted is mounted on the upper stage of the upper gonio stage 74, and a concave portion is formed on the plane of the upper stage to fit the upper lid 8 of the diffraction ring imaging device main body 5. ing. Further, a groove is formed in which a cable 9 for supplying high-voltage power, which is projected from the upper lid 8 from the concave portion toward the edge of the upper stage, is fitted. By fitting the upper lid 8 of the diffraction ring imaging device main body 5 into the concave portion of the upper stage, the diffraction ring imaging device main body 5 is always attached to the diffraction ring imaging jig 3 in the same posture. The direction of the rotation axis that changes the angle of 27 is substantially perpendicular and substantially parallel to the rotation axes of the lower gonio stage 72 and the upper gonio stage 74.

  The operator sets the expansion / contraction pipe 51 of the diffraction ring imaging jig 3 to an appropriate length, attaches the diffraction ring imaging device body 5 to the diffraction ring imaging jig 3, and places the diffraction ring imaging device in the hole of the measurement object OB. When the main body 5 is inserted, the fixture 18, which is the tip of the diffractive ring imaging device main body 5, is near the measurement location, the X-ray incident angle is near the set value, and the reference plane tilt angle is near 0. However, when the measurement location is the bottom surface of the hole of the measurement object OB, the bottom surface is not necessarily perpendicular to the center axis of the hole, and the angle of the center axis of the output shaft of the motor 27 with respect to the center axis of the holder 7 cannot be adjusted. The X-ray incident angle and the reference plane inclination angle are different from the set value and 0 because the angle drawn on the holder 7 and the vertical edge of the connecting portion 12 are displayed. In addition, the distance between the irradiation point and the imaging surface also deviates from the set value. Therefore, the position and orientation of the diffraction ring imaging device main body 5 are adjusted as described later, the X-ray incident angle and the distance between the irradiation point and the imaging surface are set to the set values, and the reference plane inclination angle is set to 0.

  First, the operator inputs a position and orientation adjustment start from the input device 92. Accordingly, the controller 91 outputs a rotation command and a light emission command to the motor drive circuit 99 and the light emission signal supply circuit 96, the motor 27 rotates, the LED light is emitted from the LED light emitter 40, and the measurement of the measurement object OB is performed. A circular irradiation pattern is formed at the location. The controller 91 outputs an operation start to the arithmetic circuit 98, and the arithmetic circuit 98 calculates the LED light source 41 based on the tilt angle calculated from the tilt angle input from the tilt sensor 35, that is, the X-ray incident angle and the reference plane tilt angle. , And starts outputting to the ON-OFF control circuit 97. As a result, the irradiation pattern of the circle formed at the measurement location becomes defective due to the magnitude and sign of the X-ray incidence angle and the reference plane inclination angle. Next, the operator operates the fiber camera 4 and causes the display 48 to display the irradiation pattern of the LED light formed at the measurement location.

  Next, the worker adjusts the position of the diffraction ring imaging device main body 5 so that the pattern of irradiation of the circle by the LED light has an appropriate size. When the measurement location is the bottom of the hole of the measurement object OB, the knob 78 at the upper end of the diffraction ring imaging jig 3 is rotated to adjust the vertical position of the diffraction ring imaging device main body 5. At this time, the knob 78 is rotated in the direction of moving upward from the point where the circular irradiation pattern becomes a point, and the diffraction ring imaging device main body 5 is moved upward so that the circular irradiation pattern has an appropriate size. To When the measurement location is the side surface of the hole of the measurement object OB, since the diffraction ring imaging jig 3 does not have a function of moving the diffraction ring imaging device main body 5 in the horizontal direction, the horizontal direction shown in FIG. The diffraction ring imaging jig 3 is moved in the lateral direction using the movement jig 100.

  The jig 100 for lateral movement has a U-shaped pressing part 102 at one end of a long rectangular parallelepiped elastic bar storage part 101 and is attached to the tip of an elastic rod 104 at the other end. There is a U-shaped pressing portion 103. The telescopic bar 104 is out of a hole at the side of the end of the telescopic bar storage unit 101, and moves in the longitudinal direction of the telescopic bar storage unit 101 by rotating the rotary bar 106 attached to the knob 107. . FIG. 10 is a view of the telescopic bar storage unit 101 in which the telescopic bar 104 at the location where the telescopic bar 104 is outside is removed and viewed from above. The rotating bar 106 is connected to a gear 108, and the gear 108 engages a tooth formed on a side surface of the telescopic bar 104. Rollers 109 and 110 are provided so as to sandwich the telescopic bar 104 together with the gear 108. When the gear 108 rotates, the telescopic bar 104 rotates together and moves in the longitudinal direction. Thus, when the rotating bar 106 is rotated, the telescopic bar 104 moves in the longitudinal direction of the telescopic bar storage unit 101. When the gear 108 attempts to rotate counterclockwise, the stopper 111 attempts to rotate clockwise, but is pressed by the spring 114 of the release button 105 via the disc-shaped flat plate 113 as shown in FIG. The gear 108 cannot rotate clockwise from the position, and the gear 108 cannot rotate counterclockwise. Also, when the gear 108 rotates clockwise, the stopper 111 rotates counterclockwise, but the flat plate 113 of the release button 105 is connected to the telescopic rod storage unit 101 where the diameter of the connected shaft 112 is large. 10 does not move below the position shown in FIG. 10, the stopper 111 rotates until the teeth of the gear 108 disengage, and the gear 108 rotates clockwise. it can. That is, the telescopic bar 104 moves in the direction of going out of the telescopic bar storage unit 101, but cannot move in the direction of being stored in the telescopic bar storage unit 101. When the button portion 116 of the release button 105 is pressed, the spring 114 contracts and the flat plate 113 moves in the direction of the fixed end 115, and the stopper 111 can also rotate clockwise, whereby the gear 108 rotates counterclockwise. The telescopic bar 104 can also be moved in the direction of being stored in the telescopic bar storage unit 101.

  The pressing portion 102 of the lateral moving jig 100 is pressed against the flat plate 71 and the side surface of the lower gonio stage 72 by sandwiching the pressing portion 102 between the storage portions 52 of the diffraction ring imaging jig 3, and the rotating rod 106 is rotated. Then, the telescopic bar 104 is extended. In this way, the telescopic rod 104 surrounds the cover 57 of the diffraction ring imaging jig 3 and hits the side surface of the hole of the measurement object OB. And the center axis of the diffraction ring imaging jig 3, that is, the center axis of the diffraction ring imaging apparatus main body 5 is on the opposite side to the direction in which the expansion rod 104 extends. Move in the direction. When it is desired to return to the direction opposite to the direction in which the diffraction ring imaging device main body 5 is moved, the release button 105 is pressed, and the rotating rod 106 is rotated to the opposite side to contract the telescopic rod 104.

  After the illumination pattern of the circle formed by the LED light has an appropriate size, the operator adjusts the attitude of the diffraction ring imaging device main body 5 while looking at the position where the illumination pattern has a chip. Here, the lack of the irradiation pattern of the circle will be described. As described above, the tilt angles calculated by the arithmetic circuit 98 are the X-ray incident angle and the reference plane tilt angle. The arithmetic circuit 98 stores the set value of the X-ray incident angle input from the controller 91 in the memory. First, the arithmetic circuit 98 determines the deviation from the set value of the X-ray incident angle and the zero of the reference plane inclination angle. Calculate the deviation from. The magnitude and direction of the vector in the line direction of the rotation angle 0 of the imaging plate 15 and the magnitude and direction of the vector in the vertical direction (normal direction of the reference plane) are determined from the magnitude and sign of the displacement. Calculate the magnitude and direction of the composite vector of the two vectors. The direction of the composite vector is calculated by a rotation angle in which the line direction of the rotation angle 0 of the imaging plate 15 in the two-dimensional direction is 0 ° and one round is 360 °. Next, the magnitude of the combined vector is multiplied by an appropriate multiple (for example, 5 times), and the magnitude of the rotation angle missing in the circle is calculated. If the multiple is five, the missing rotation angle is 5 ° when the deviation angle is 1 °. Next, an angle obtained by adding a half of the rotation angle lacking in the direction rotation angle and a rotation angle obtained by subtraction are calculated, and the encoder in the motor 27 stored in advance is output when the motor 27 makes one rotation. These rotation angles are multiplied by the value obtained by dividing the number of pulses by 360 °. This is a value that represents the position of the rotation angle between the position where the chipping starts and the position where the chipping ends, by the number of pulses of the pulse train signal of the encoder. Next, after the encoder stored in advance outputs the index signal, the number of pulses of the pulse train signal output by the encoder is added until the position of the LED light emitting device 40 is on the line with the rotation angle of 0, When the number of pulses of the pulse train signal output when the encoder 27 outputs one rotation of the motor 27 exceeds the number of pulses, the number of pulses is subtracted. Accordingly, in order to form a chip in the irradiation pattern of the circle, the timing at which the drive signal supplied to the LED light source 41 is turned on and the timing at which the drive signal is turned off are determined by the number of pulses of the pulse train signal output after the encoder outputs the index signal. Is calculated as The location and the size of the chip of the irradiation pattern of the circle represent the direction and magnitude of the deviation from the set value of the X-ray incident angle and the direction and magnitude of the deviation of the reference plane inclination angle from 0. Therefore, the worker adjusts the posture of the diffraction ring image pickup device main body 5 so that the irradiation pattern of the circle looks at the captured image displayed on the display 48 of the fiber camera 4 so that the irradiation pattern of the circle is not chipped.

  FIG. 11 shows an irradiation pattern of a circle formed by LED light with respect to the X-ray incident angle calculated by the arithmetic circuit 98 and the reference plane inclination angle, with the setting value of the X-ray incident angle being 35 °. In FIG. 11, the deviation from the set value of the X-ray incident angle and the deviation of the reference plane inclination angle from 0 are increased in order to easily understand the lack of the irradiation pattern. If the X-ray incident angle is the set value of 35 ° and the reference plane tilt angle is 0 °, the irradiation pattern of the circle is not missing, but the deviation of the X-ray incident angle from the set value and the reference plane tilt angle of 0 ° The larger the deviation from, the larger the lack of the circular irradiation pattern, and the position of the lack of the circular irradiation pattern changes depending on the direction of the deviation obtained by combining the two deviations. Therefore, the operator can know in which direction and how much the attitude of the diffraction ring imaging device main body 5 should be changed from the position and size of the circular irradiation pattern.

  In order to change the attitude of the diffraction ring imaging device main body 5, the inclination angles of the two-axis gonio stages 72 and 74 of the diffraction ring imaging jig 3 are rotated by rotating the handles 73 and 75. If the measurement point in the hole of the object to be measured OB is close to the upper end of the hole and the diameter of the hole of the object to be measured OB is large, an operator may put his hand in the hole and directly rotate the handle 73 and the handle 75. . However, if the measurement point in the hole of the measurement object OB is deep from the upper end of the hole or the diameter of the hole of the measurement object OB is small, it is difficult for the operator to directly turn the handle 73 and the handle 75 by hand. become. In such a case, a handle rotating jig 120 shown in FIG. 12 is used. The handle rotation jig 120 has an L-shape including a long part 121 and a short part 123, and the handle 122 at the upper end of the long part 121 is rotated to form the short part 123. The rotating part 124 at the end can be rotated. The inside of the rotating portion 124 where the teeth are formed is large enough to fit the handles 73 and 75 of the biaxial goniometer stages 72 and 74, and the handle 73 or the handle 75 is fitted inside the rotating portion 124. When the handle 122 is rotated, the inclination of the biaxial gonio stages 72 and 74 can be changed.

  FIG. 13 is a view of the handle rotation jig 120 viewed from the lateral direction with the casings of the long part 121 and the short part 123 removed. The handle 122 is connected to a gear 125, the rotating part 124 is connected to a gear 129, and a gear 127 is provided at a position where the long part 121 and the short part 123 overlap, and the gear 127 and the gear 129 The chain-shaped belt 128 rotates in conjunction with it. Further, a gear of the same size is provided on the back side of the gear 127 in FIG. 13 and is connected to the gear 127 so as to rotate in conjunction with the gear 125 and the chain belt 126. Therefore, when the handle 122 is rotated, the gears located behind the gear 125 and the gear 127 rotate, and further, the gear 127 and the gear 129 rotate, so that the rotating part 124 rotates. After the operator sets the diffraction ring imaging device main body 5 on the diffraction ring imaging jig 3, if it is difficult to directly rotate the handles 73 and 75 of the two-axis gonio stages 72 and 74, the two handles are used. After fitting the rotating part 124 of the rotating jig 120 to the handle 73 and the handle 75, the diffraction ring imaging jig 3 is inserted into the hole of the measurement object OB. In addition, when the depth of the hole of the measurement object OB is various, it is preferable to prepare a plurality of jigs 120 for rotating the handle in which the length of the elongated portion 121 is changed.

  After changing the attitude of the diffraction ring imaging device main body 5 in this way so that the irradiation pattern of the circle displayed in the captured image displayed on the display 48 of the fiber camera 4 does not become chipped, the operator sets the diffraction ring. By rotating the knob 78 of the imaging jig 3 or the knob 107 of the lateral movement jig 100, the position of the diffraction ring imaging device body 5 is adjusted so that the irradiation pattern of the circle becomes a dot. . Thereby, the distance between the irradiation point and the imaging surface and the X-ray incident angle become the set values, and the reference plane inclination angle becomes 0. Next, the operator inputs the end of the position and orientation adjustment from the input device 93. As a result, a stop command is output from the controller 91 to each circuit of the control device 95, the irradiation of the LED light from the LED light emitter 40 and the rotation of the motor 27 are stopped, and the operation of the arithmetic circuit 98 is stopped. Next, the controller 91 outputs a command of the rotation angle 0 to the motor drive circuit 99 after the set time has elapsed, whereby the motor 27 rotates at a very low speed and the timing at which the encoder in the motor 27 outputs the index signal. Rotation stops. The index signal is also input to the controller 91, and the controller 91 takes measures to invalidate the input from the input device 92 until the index signal is input.

  Next, the operator inputs a diffraction ring imaging command from the input device 91. Thereby, the controller 91 outputs an X-ray emission command to the high-voltage power supply 6, and high-voltage power is supplied from the high-voltage power supply 6 to the X-ray emitter 10, and X-rays are transmitted from the through-hole 18 a of the fixture 18. Then, the diffraction ring is imaged on the imaging plate 15, and the controller 91 outputs a stop command to the high-voltage power supply 6 when a set time has elapsed after outputting the power supply command, and X The emission of the line stops. This completes the diffraction ring imaging, and when the operator is using the lateral movement jig 100, the operator presses the release button 105 and rotates the knob 107 to contract the telescopic rod 104 as described above. Then, the jig 100 for lateral movement is removed, and the jig 3 for imaging the diffraction ring is taken out of the hole of the measurement object OB. Thereafter, the operator removes the diffraction ring imaging device main body 5 from the jig 3 for setting the diffraction ring imaging, sets the diffraction ring imaging device on the diffraction ring reading device, and performs the operation of reading the diffraction ring and calculating the residual stress with the device. This operation and the operation of the apparatus are described in Patent Document 1 of the prior art, except that the set values are used for the distance between the irradiation point and the imaging surface and the X-ray incidence angle in the calculation of the residual stress. The description is omitted here.

  As can be understood from the above description, in the above-described embodiment, the diffraction ring imaging device is configured to emit the X-rays radially around its own central axis, and to emit the X-rays from the X-ray emitter 10. A motor 27 arranged in the direction of emission of X-rays, wherein through-holes 28a, 27b, 27a1 through which the emitted X-rays pass are provided in the rotation output shaft, and the central axis of the output shaft and the through-holes 28a, 27b, 27a1. And a table 16 attached to the output shaft of the motor 27, an imaging plate 15, etc., which constitutes a diffraction ring imaging means, and includes a through-hole 28a, 27b, 27a1. It has through holes 16a, 17a, 18a whose central axes coincide with each other, and X-rays are emitted through the through holes 16a, 17a, 18a. Diffraction ring imaging means for imaging the diffraction ring on the imaging plate 15 which intersects perpendicularly with the central axis of the second through-hole by the diffracted X-rays generated in the above step; LED light emitter 40 that emits visible focused LED light so as to be focused on the optical axis of the X-ray emitted from the LED, and the optical axis of the focused LED light is emitted from through holes 16a, 17a, and 18a. The LED light emitter 40 whose distance from the point intersecting with the optical axis of the X-ray to be set to the imaging plate 15 is set to a set value, and the optical axis of the visible and converging LED light arranged near the diffraction ring imaging means. Is a diffraction ring image pickup device 1 including a fiber camera 4 for picking up an image near a point intersecting the optical axis of the X-ray emitted from the through holes 16a, 17a, 18a.

  According to this, when the LED light is emitted from the LED light emitting device 40 and the motor 27 is driven to rotate the LED light emitting device 40 attached to the diffraction ring image pickup means, the output shaft of the motor 27 and the central axis of the output shaft are penetrated. Since the optical axes of the X-rays emitted from the holes 16a, 17a and 18a coincide with each other, the irradiation pattern formed by the LED light is centered on the point where the optical axis of the emitted X-rays intersects the surface of the object. It becomes a circle. If the distance from the point where the optical axis of the LED light intersects the optical axis of the emitted X-ray to the imaging plate 15 is set to the set value of the irradiation point-imaging plane distance, the position of the diffraction ring imaging device body 5 Is adjusted to make the irradiation pattern formed by the LED light into a point, whereby the distance between the irradiation point and the imaging surface can be set to a set value. Further, it is possible to know the degree of deviation from the set value of the distance between the irradiation point and the imaging surface from the radius of the irradiation pattern of the circle. Then, even if the measurement location is in a narrow place and it is difficult to see the irradiation pattern of the circle with the naked eye, the irradiation pattern of the circle can be seen from the image captured by the fiber camera 4. Therefore, according to the diffraction ring imaging device 1, the distance between the irradiation point and the imaging surface can be accurately set to a set value.

  Further, in the above embodiment, the diffraction ring imaging apparatus 1 has the holder 7 that fixes the X-ray emitter 10 and connects the motor 27 and the holder 7 that is attached to the holder 7 and sets a tilt angle of 0 when a reset command is input. A tilt sensor 35 for detecting tilt angles in two directions perpendicular to the central axis of the X-ray emitter 10 and mutually perpendicular to each other is provided with an arithmetic circuit 98, and a line having a rotation angle of 0 on the imaging plate 15 of the diffraction ring imaging means is tilted. The sensor 35 and the arithmetic circuit 98 are perpendicular to one of two directions for detecting the tilt angle.

  According to this, after inputting a reset command to the arithmetic circuit 98 such that the optical axis of the X-rays emitted from the through holes 16a, 17a, 18a is perpendicular to the measurement location, the diffraction ring imaging device main body 5 If the posture is changed, one of the two inclination angles detected by the inclination sensor 35 and the arithmetic circuit 98 is the X-ray incident angle, and the other inclination angle is the reference plane inclination angle. Therefore, by adjusting the attitude of the diffraction ring imaging device body 5 with reference to the tilt angle detected by the tilt sensor 35 and the arithmetic circuit 98, the X-ray incident angle is set to a set value with high accuracy, and the reference plane tilt angle is accurately set. Can be zero.

  Further, in the above-described embodiment, the diffraction ring imaging device main body 5 includes the motor fixing plate 13 that is connected to the holder 7 and connected to the motor 27, and to which the vertical projection jig 80 can be attached. When the diffraction ring imaging device main body 5 is attached, it has a bottom surface in the direction of the central axis of the through holes 28a, 27b, 27a1, protrudes from the bottom surface and is perpendicular to the central axis of the through holes 28a, 27b, 27a1, and It has a plane portion 82 whose center is located at a point that intersects with the central axes of 28a, 27b, and 27a1.

  According to this, if the diffraction ring imaging device main body 5 is attached to the vertical projection jig 80 and the vertical projection jig 80 is brought into contact with the surface of the measurement location, the optical axis of the easily emitted X-ray can be moved with respect to the measurement location. The X-ray incident angle and the reference plane inclination angle detected by the inclination sensor 35 and the arithmetic circuit 98 when the posture of the diffraction ring imaging device main body 5 is changed are improved. can do.

  In the above embodiment, the holder 7 of the diffraction ring imaging device main body 5 adjusts the angle of the through holes 28a, 27b, 27a1 with respect to the center axis of the X-ray emitter 10 in the direction of the line at the rotation angle 0 in the imaging plate 15. The holder 7 is provided with an angle changing mechanism including a connecting portion 12 and a screw 11 which can be set to an arbitrary angle around an axis perpendicular to the axis. The holder 7 has a through hole 28a, 27b, 27a1 with respect to the central axis of the X-ray emitter 10. Lines and angles from which angles can be read are displayed.

  According to this, the angles of the through holes 28a, 27b, 27a1 with respect to the center axis of the X-ray emitter 10 are set to the set value of the X-ray incident angle by the angle changing mechanism including the connecting portion 12, the screw 11, and the like. If the optical axis of the emitted X-rays is perpendicular to the measurement location, and then the central axis of the X-ray emitter 10 is perpendicular to the measurement location, the X-ray incidence angle will be close to the set value. And the reference plane tilt angle can be set to a value near 0. Therefore, it becomes easy to adjust the attitude of the diffraction ring imaging device body 5 with reference to the tilt angle detected by the tilt sensor 35 and the arithmetic circuit 98 thereafter.

  In the above embodiment, the diffraction ring imaging device main body 5 is configured such that when the motor 27 is driven to emit the LED light from the LED light emitting device 40, the irradiation pattern formed by the LED light The magnitude and sign of the tilt angle in the vertical direction of the line at the rotation angle 0 of the imaging plate 15 detected by the arithmetic circuit 98 and the deviation from the set value of the tilt sensor 35 and the tilt angle in the other direction detected by the arithmetic circuit 98 in the other direction. An ON-OFF control circuit 97 and an arithmetic program in an arithmetic circuit 98 for controlling the light emission of the LED light emitting device 40 are provided so as to change according to the size and the sign.

  According to this, it is not necessary to confirm the inclination angle by looking at the numerical value of the inclination angle detected by the inclination sensor 35 and the arithmetic circuit 98, and to observe the illumination pattern of the circle formed by the LED light from the image captured by the fiber camera 4. The posture of the diffraction ring imaging apparatus main body 5 may be adjusted so that the irradiation pattern has an X-ray incident angle at a set value and the reference plane tilt angle is 0. This adjustment is performed before the adjustment of the position of the diffraction ring image pickup device main body 5 at the point of the irradiation pattern of the circle formed by the LED light. In addition, the change of the irradiation pattern in the above-described embodiment is specifically based on the magnitude and sign of the deviation from the set value of the incident angle of the X-ray and the magnitude and sign of the inclination angle of the reference plane, and the rotation angle of the imaging plate 15 is 0. Two vectors, a direction parallel to the line and a direction perpendicular to this direction, are determined, and a lacking portion of the irradiation pattern of a circle is determined based on the magnitude and direction of a composite vector of the vectors.

  The implementation of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the purpose of the present invention.

  In the above embodiment, when the motor 27 is driven to emit the LED light from the LED light emitter 40, the irradiation pattern of the circle formed by the LED light formed at the measurement location is changed to the set value of the incident angle of the X-ray. And the sign of the reference plane inclination angle from 0 and the sign and the sign of the deviation from 0, and the direction of adjusting the inclination of the diffraction ring imaging device main body 5 can be known from the position and the size of the notch. I made it possible. However, as long as the direction of adjusting the tilt of the diffraction ring imaging device main body 5 can be known, any method of changing the irradiation pattern of the circle may be used. For example, instead of chipping, the drive signal intensity may be reduced to create a thin portion in the circular illumination pattern, or conversely, the drive signal intensity may be increased to create a dark portion in the circular illumination pattern Is also good.

  Further, in the above embodiment, the pattern of irradiation of the circle by the LED light is changed by the magnitude and sign of the deviation from the set value of the incident angle of the X-ray and the magnitude and sign of the deviation of the reference plane inclination angle from 0. However, if the measurement efficiency is not regarded as important, instead, the display device 93 is arranged next to the display 48 of the fiber camera 4 so that the numerical values of the X-ray incident angle and the reference plane inclination angle are displayed. Is also good.

  Further, in the above embodiment, the angle of the center axis of the output shaft of the motor 27 (the optical axis of the emitted X-ray) with respect to the center axis of the holder 7 (X-ray emitter 10) can be set at an arbitrary angle. And the set angle can be read by seeing where the vertical edge of the connecting portion 12 is located on the line indicating the angle displayed on the holder 7. I made it. However, as long as the set angle can be read, whatever is displayed on the holder 7 may be used. For example, the tip of the connection portion 12 on the side where the screw 11 is provided may be formed in a triangular shape, and the display may be displayed on the holder 7 so that the apex of the triangle points to the scale at which the angle is indicated.

  Further, in the above embodiment, the angle of the center axis of the output shaft of the motor 27 (the optical axis of the emitted X-ray) with respect to the center axis of the holder 7 (X-ray emitter 10) can be set at an arbitrary angle. The angle can be set to a structure. However, if the measurement location is limited to the bottom surface of the hole and the X-ray incidence angle can be set to a constant value, the center axis of the output shaft of the motor 27 with respect to the center axis of the holder 7 (X-ray emitter 10) can be used. The attitude of the motor 27 with respect to the holder 7 may be fixed so that the angle becomes the set value of the incident angle of the X-ray.

  In the above embodiment, the diffraction ring imaging device main body 5 is set on the vertical projection jig 80, and the flat portion 82 of the vertical projection jig 80 is brought into contact with the measurement location, thereby the center axis of the output shaft of the motor 27 is set. (The optical axis of the outgoing X-ray) was made perpendicular to the measurement location. However, if the center axis of the output shaft of the motor 27 can be made perpendicular to the measurement point, the vertical setting jig 80 may not be used. For example, the distance between the irradiation point and the imaging surface can be limited, and if there is no problem in reading the diffraction ring by the diffraction ring reader, the diameter of the upper surface of the fixture 18 of the diffraction ring imaging device main body 5 is set to be smaller than that of the present embodiment. The size may be increased and the fixture 18 may directly contact the measurement location.

  In the above embodiment, the tilt sensor 35 is attached to the diffraction ring imaging device main body 5, the optical axis of the output X-ray is made perpendicular to the measurement location, and then a reset command is input to the arithmetic circuit 98. The X-ray incident angle and the reference plane tilt angle can be calculated, and the irradiation pattern of the LED light is changed according to the deviation of these values from the set values and zero. Then, while observing the irradiation pattern of the LED light, the attitude of the diffraction ring imaging device main body 5 is adjusted by the two-axis gonio stages 72 and 74 of the diffraction ring imaging jig 3, and the X-ray incident angle and the reference plane inclination angle are adjusted. The set value and 0 were set. However, even if the X-ray incident angle is not set to the set value, the residual stress can be calculated if the value of the X-ray incident angle can be detected. Therefore, the two-axis goniometer stages 72 and 74 are changed to one-axis goniometer stages. Only the adjustment for setting the reference plane inclination angle to 0 may be performed, and the X-ray incident angle may be calculated only. If the inclination angle of the reference plane does not greatly deviate from 0, since the change in the measurement direction of the residual stress is small, the adjustment of the inclination angle of the reference plane to 0 is not performed, and the imaging plate is calculated from the calculated inclination angle of the reference plane. The remaining stress may be calculated by correcting the 15 rotation angle 0 line, and the attitude of the diffraction ring imaging device body 5 may not be adjusted. That is, the biaxial goniometer stages 72 and 74 may be eliminated from the diffraction ring imaging jig 3. If the object to be measured OB is limited to one in which the diffraction ring is clearly imaged, the tilt sensor 35 and the arithmetic circuit 98 are also eliminated, and the X-ray incident angle and the reference plane tilt angle are described in Japanese Patent No. 5967491. Using the method shown, the calculation may be performed from the change curve of the half value width in the circumferential direction of the imaged diffraction ring or the change curve of the X-ray peak intensity in the circumferential direction.

  Further, in the above embodiment, the LED light emitting device 40 attached to the table 16 of the diffraction ring imaging device main body 5 emits the LED light converged on the optical axis of the emitted X-ray. Thus, parallel LED light having a reduced cross-sectional diameter may be emitted. Further, since the emitted light may be a visible focused light or a parallel light, a laser light or an SLD light may be emitted instead of the LED light.

  In the above-described embodiment, the wireless power supply transformer 30 is used as a means for supplying power to the LED light emitting device 40 attached to the table 16 even when the table 16 is rotated. However, any other means may be used as long as it can supply power to the device attached to the rotating body. For example, a slip ring may be attached to the upper surface of the motor 27 and the output shaft to supply power to the LED light emitter 40.

  In the above embodiment, the means for imaging the diffraction ring is the imaging plate 15 attached to the table 16 with the fixture 18. However, other means may be used as long as the diffraction ring can be imaged. For example, an X-ray image sensor such as an X-ray CCD having a plane having the same width as the imaging plate 15 is provided, and when X-rays are irradiated from the X-ray emitter 10, an electric signal output from each pixel of the X-ray image sensor is provided. For detecting the intensity distribution of the diffracted X-rays. In this case, the signal output from the X-ray image sensor needs to be extracted from a rotating body such as a slip ring attached to the upper surface of the motor 27 and the output shaft via a device capable of transmitting the signal.

DESCRIPTION OF SYMBOLS 1 ... Diffraction ring imaging device, 3 ... Diffraction ring imaging jig, 4 ... Fiber camera, 5 ... Diffraction ring imaging device main body, 6 ... High voltage power supply, 7 ... Holder, 8 ... Top cover, 9 ... Cable, 10 ... X Line emitter, 12 connecting part, 13 motor fixing plate, 15 imaging plate, 16 table, 17 projecting part, 18 fixing fixture, 28a, 27b, 27a1, 16a, 17a, 18a through hole, 27 ... Motor, 28 ... Path member, 29 ... Fixing plate, 30 ... Wireless power supply transformer, 31 ... Power transmission side unit, 32 ... Power reception side unit, 33 ... Coil, 34 ... Terminal, 35 ... Tilt sensor, 36 ... Set part, 37 ... Holding, 38 ... Cable, 40 ... LED light emitting device, 41 ... LED light source, 42 ... Fixing tool, 43 ... Collimating lens, 44 ... Cable, 45 ... Camera part, 46 ... Cable 47: fixing device, 48: display, 50: pressing part, 51: telescopic pipe, 52: storage part, 53: telescopic rod, 58: roller, 60: cylindrical button, 64: stopper, 67: long rod, 68, 69 mounting ring, 70 handle, 71 flat plate, 72 lower goniometer, 73 handle, 74 upper goniometer, 75 handle, 76 connecting member, 77 telescopic rod built-in unit, 78 ... knob, 79 ... screw, 80 ... vertical jig, 81 ... base, 82 ... plane, 83,84 ... post, 85 ... long block, 86,87 ... fixed rod, 90 ... computer device, 91 ... Controller, 92 ... Input device, 93 ... Display device, 95 ... Control device, 100 ... Jig for lateral movement, 101 ... Telescopic rod storage part, 102,103 ... Tightening part, 104 ... Telescopic rod, 1 5 Release button, 106 Rotating rod, 107 Knob, 108 Gear, 109, 110 Roller, 111 Stopper, 112 Shaft, 113 Plate, 114 Spring, 115 Fixed end, 116 Button part, Reference numeral 120: handle rotating jig, 121: long part, 122: handle, 123: short part, 124: rotating part, 125, 127, 129: gear, 126, 128: belt, OB: object to be measured

Claims (5)

An X-ray emitter that radially emits X-rays around its own central axis,
A motor arranged in an emission direction of X-rays emitted from the X-ray emitter, wherein a first through-hole for allowing the emitted X-rays to pass is provided in a rotation output shaft, with a center axis of the output shaft and A motor provided so that a central axis of the first through hole is coincident with the motor;
A table-like diffraction ring imaging unit attached to an output shaft of the motor, the table including a second through-hole having a central axis coinciding with a central axis of the first through-hole, wherein the second through-hole is provided. X-rays are emitted by passing through, and when there is an object in the emitted direction, the diffraction ring is imaged on the imaging surface that intersects perpendicularly with the center axis of the second through hole by the diffracted X-rays generated by the object. Diffractive ring imaging means;
X that is attached to the diffraction ring imaging means and emits visible parallel light such that the optical axis of the X-ray emitted from the second through hole intersects with the optical axis, or X emitted from the second through hole Visible light emitting means for emitting visible focused light so as to be focused on the optical axis of a line, wherein the optical axis of the visible parallel light or the visible focused light is emitted from the second through hole. A visible light emitting unit in which a distance from a point intersecting the optical axis of the X-ray to the imaging surface is set to a set value;
A camera arranged near the diffractive ring imaging means, for imaging near a point where the optical axis of the visible parallel light or the visible focused light intersects the optical axis of the X-ray emitted from the second through hole; A diffraction ring imaging device comprising: The diffraction ring imaging device according to claim 1,
A holder for fixing the X-ray emitter and connecting the motor;
Tilt angle detection means attached to the holder and detecting tilt angles in two directions perpendicular to the center axis of the X-ray emitter and perpendicular to each other, with the tilt angle being 0 when resetting is provided;
A line having a rotation angle of 0 on the imaging surface of the diffraction ring imaging unit is perpendicular to one of two directions in which the inclination angle detection unit detects the inclination angle. apparatus. The diffraction ring imaging device according to claim 2,
A jig mounting block, which is connected to the holder and connected to the motor, and is capable of mounting a dedicated jig,
The dedicated jig has a bottom surface in a central axis direction of the first through hole when the diffraction ring imaging device is attached, and protrudes from the bottom surface and is perpendicular to a central axis of the first through hole. A diffractive ring imaging device having a flat portion centered on a point intersecting with a center axis of the first through hole. In the diffraction ring imaging device according to claim 2 or 3,
The holder is capable of changing an angle of the first through hole with respect to a central axis of the X-ray emitter to an arbitrary angle around an axis perpendicular to a direction of a line having a rotation angle of 0 on the imaging surface. Equipped with a mechanism,
The diffraction ring imaging device, wherein a display is provided on the holder so that an angle of the first through hole with respect to a center axis of the X-ray emitter can be read. In the diffraction ring imaging device according to any one of claims 2 to 4,
When the visible light is emitted from the visible light emitting means by driving the motor, the irradiation pattern formed by the visible light is perpendicular to the line at the rotation angle 0 of the imaging surface detected by the tilt angle detecting means. And the light emission of the visible light emitting means is controlled so as to change in accordance with the magnitude and sign of the inclination angle in the above, and the magnitude and sign of the deviation from the set value of the inclination angle in the other direction detected by the inclination angle detection means. A diffraction ring image pickup device comprising:

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