JP2020019993A - Evaporation source, and film deposition apparatus - Google Patents

Abstract

To suppress entanglement of a first linear member and a second linear member and troubles at a connection of these members to a rotary table.SOLUTION: An evaporation source 100 is equipped with a fixed table 110 fixed at the position of a mounting hole 11a formed on a bottom plate 11 of a chamber, a rotary table 120 installed rotatably to the fixed table 110, a plurality of evaporation source units 150 arranged on the rotary table 120, a plurality of first connections 160 to witch a plurality of first pipes L11 arranged so as to pass through an open hole 210 are connected, and a plurality of second connections 170 to witch a plurality of first wires L21 arranged so as to pass through the open hole 210 are connected. A plurality of the first connections 160 are positioned closer to the rotation center of the rotary table 120 and higher in the vertical than a plurality of the second connections 170. A guide member 180 is installed so as to separate a plurality of the first pipes L11 and a plurality of the second connections 170.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a rotary evaporation source in which a plurality of evaporation source units rotate and an evaporation apparatus.

  BACKGROUND ART Conventionally, there has been known an evaporation source in which a plurality of evaporation source units are rotatably provided so that an evaporation source unit for evaporating a material can be changed. Here, pipes for circulating the cooling liquid and electric wires for supplying electricity are connected to the plurality of evaporation source units, respectively. As a method for providing a plurality of pipes and electric wires while allowing a plurality of evaporation source units to rotate, a technique using a rotary joint is known. However, in the case of this method, there is a problem that it is difficult to eliminate the leakage of the cooling liquid because the rotation mechanism is provided at a connection portion such as a pipe.

  On the other hand, there is also known a rotary evaporation source in which a rotary table for rotating an evaporation source unit is alternately rotated one rotation in a forward direction and one rotation in a reverse direction. In the case of this method, the connection portion of the pipe (the first linear member) and the electric wire (the second linear member) is fixed, and there is no rotation mechanism. Almost no. However, in the case of this method, the connection between the pipe and the wiring with the turntable moves with the rotation of the turntable. Therefore, if the space for arranging the piping and the wiring is narrow, the piping and the wiring may be entangled with each other, or the connecting portion between the piping and the turntable may be hindered.

JP 2012-1764 A

  SUMMARY OF THE INVENTION An object of the present invention is to provide an evaporation source capable of suppressing the first linear member and the second linear member from becoming entangled with each other and obstructing a connection portion between the first linear member and the second linear member. And a vapor deposition device.

  The present invention employs the following means in order to solve the above problems.

That is, the evaporation source of the present invention is:
A fixing table fixed to a position of a mounting hole formed in a bottom plate of the chamber configured so that the inside thereof has a reduced pressure atmosphere;
A turntable rotatably provided with respect to the fixed stand,
A plurality of evaporation source units each having at least a crucible, a heater for heating the crucible, and a cooling unit for cooling the crucible, and provided on the rotary table,
At least one first linear member extending from a first device provided below the floor on which the chamber is installed and connected to at least one first linear member provided so as to pass through a through hole formed in the floor. Connection part,
At least one second connection portion extending from a second device provided under the floor and connected to at least one second linear member provided to pass through a through hole formed in the floor;
An evaporation source comprising:
All the first connection portions are located at a position closer to the rotation center side of the turntable than all the second connection portions, and are provided vertically upward,
A guide member for partitioning between all the first linear members and all the second connection portions is provided.

Further, other evaporation sources of the present invention include:
A fixing table fixed to a position of a mounting hole formed in a bottom plate of the chamber configured so that the inside thereof has a reduced pressure atmosphere;
A turntable rotatably provided with respect to the fixed stand,
A plurality of evaporation source units each having at least a crucible, a heater for heating the crucible, and a cooling unit for cooling the crucible, and provided on the rotary table,
At least one first linear member extending from a first device provided below the floor on which the chamber is installed and connected to at least one first linear member provided so as to pass through a through hole formed in the floor. Connection part,
At least one second connection portion extending from a second device provided under the floor and connected to at least one second linear member provided to pass through a through hole formed in the floor;
An evaporation source comprising:
All the second connection portions are provided at a position closer to the rotation center side of the turntable than all the first connection portions, and are provided vertically below,
A guide member for partitioning between all the first linear members and all the second connection portions is provided.

Further, the vapor deposition device of the present invention,
Said chamber;
Said evaporation source;
It is characterized by having.

  As described above, according to the present invention, it is possible to prevent the first linear member and the second linear member from becoming entangled or from interfering with the connection between the first linear member and the turntable. can do.

FIG. 1 is a schematic configuration diagram of a vapor deposition apparatus including an evaporation source according to Embodiment 1 of the present invention. FIG. 2 is an internal configuration diagram of a vapor deposition apparatus including the evaporation source according to the first embodiment of the present invention. FIG. 3 is a plan view of the evaporation source according to the first embodiment of the present invention. FIG. 4 is a schematic cross-sectional view illustrating an installation state of the evaporation source according to the first embodiment of the present invention. FIG. 5 is a schematic cross-sectional view illustrating an installed state of the evaporation source according to the second embodiment of the present invention.

  Embodiments for carrying out the present invention will be illustratively described in detail below based on embodiments with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention only to them unless otherwise specified. .

(Example 1)
First Embodiment With reference to FIGS. 1 to 4, an evaporation source and a vapor deposition apparatus according to a first embodiment of the present invention will be described.

<Evaporation equipment>
With reference to FIG. 1 and FIG. 2, a vapor deposition apparatus including an evaporation source according to the present embodiment will be described. FIG. 1 is a schematic configuration diagram of a vapor deposition apparatus including an evaporation source according to Embodiment 1 of the present invention. In FIG. 1, a schematic configuration of the vapor deposition apparatus is shown in a sectional view. FIG. 2 is an internal configuration diagram of a vapor deposition apparatus including the evaporation source according to the first embodiment of the present invention, and shows a schematic configuration of the inside of a chamber of the vapor deposition apparatus as viewed from above.

  The vapor deposition apparatus 1 includes a chamber 10 configured such that the inside thereof is evacuated (a reduced-pressure atmosphere) by a vacuum pump 20, and a plurality of evaporation sources 100 arranged inside the chamber 10. The evaporation source 100 plays a role of evaporating or sublimating a material (for example, metal (eg, silver)) of a substance to be deposited on the substrate 30 by heating the material. The substance evaporated or sublimated by the plurality of evaporation sources 100 adheres to the substrate 30 installed inside the chamber 10 to form a thin film on the substrate 30. In the illustrated example, a case where five evaporation sources 100 are provided is shown, but the number of evaporation sources 100 is not limited. Above the plurality of evaporation sources 100 in the vertical direction, evaporation source shutters 40 that can open and close the upper portions of the evaporation sources 100 are provided. In FIG. 2, the evaporation source shutter 40 indicated by a solid line shows a state in which the upper part of the evaporation source 100 is opened, and the substances evaporated or sublimated from the respective evaporation sources 100 can move toward the substrate 30. Further, in FIG. 2, the evaporation source shutter 40 </ b> X indicated by a dotted line shows a state in which the upper part of the evaporation source 100 is blocked to block the material to be deposited and stop the deposition on the substrate 30.

  The plurality of evaporation sources 100 are fixed to the positions of the plurality of mounting holes 11a formed in the bottom plate 11 of the chamber 10, respectively. In addition, a cooling liquid circulation device 300 as a first device and a power supply 400 as a second device are provided below the floor 200 on which the chamber 10 is installed. Hereinafter, for convenience of explanation, the floor on which the coolant circulation device 300 and the power supply 400 are installed is referred to as a first floor F1, and the floor on which the chamber 10 is installed is referred to as a second floor F2. Then, first pipes L11 as a plurality of first linear members extending from the cooling liquid circulation device 300 installed on the first floor F1 are connected to the respective evaporation sources 100. Further, first wirings L21 as a plurality of second linear members extending from a power supply 400 installed on the first floor F1 are also connected to the respective evaporation sources 100. The plurality of first pipes L11 and first wirings L21 are provided so as to pass through through holes 210 formed in the floor 200.

  Here, the floor 200 is a floor 200 of a building such as a factory, and a beam or the like is provided therein. Therefore, the through hole 210 cannot be formed at a free position. Therefore, depending on the position where the vapor deposition apparatus 1 is disposed, the first pipe L11 and the first wiring L21 may have to be largely bypassed. In particular, when the vapor deposition device 1 is miniaturized, the space between the chamber 10 and the floor 200 becomes narrow, and the arrangement space for the first pipe L11 and the first wiring L21 becomes narrow. Thereby, the first pipe L11 and the first wiring L21 may be bent at substantially a right angle below the evaporation source 100 in some cases. The first pipe L11 is a tubular member made of a resin material or the like.

<Evaporation source>
In particular, with reference to FIGS. 3 and 4, the evaporation source 100 according to the present embodiment will be described in more detail. FIG. 3 is a plan view of the evaporation source according to the embodiment of the present invention. In FIG. 3, a part of each member is shown in perspective for easy understanding of the configuration of each member. In the figure, the dotted line is a transparent part. FIG. 4 is a schematic cross-sectional view showing an installed state of the evaporation source according to the embodiment of the present invention. Note that the cross-sectional view of the evaporation source in FIG. 4 corresponds to the AA cross-sectional view in FIG.

The evaporation source 100 is provided in the fixed base 110 fixed to the position of the mounting hole 11 a formed in the bottom plate 11 of the chamber 10, a rotary base 120 rotatably provided with respect to the fixed base 110, and the rotary base 120. A plurality of evaporation source units 150 are provided.

  The fixing base 110 includes a cylindrical body 111, an outward flange 112 provided at a vertically upper end of the body 111, and an inward flange provided at a vertically lower end of the body 111. 113. A cover 114 having an opening 114a is fixed above the body 111 in the vertical direction. The cover 114 allows only the substance evaporated or sublimated from the evaporation source unit 150 located directly below the opening 114a to move toward the substrate 30, and the other substances evaporated or sublimated from the other evaporation source units 150 Has the role of blocking. Accordingly, the substance moves toward the substrate 30 only from a predetermined position, so that a desired film can be formed on the substrate 30 with high accuracy.

  The turntable 120 includes a first cylindrical portion 121, a bottom plate portion 122 provided at a lower end of the first cylindrical portion 121, a second cylindrical portion 123 provided below the bottom plate portion 122, and a lower portion than the second cylindrical portion 123. , And an inward flange portion 125 provided below the gear portion 124. The first cylindrical portion 121 and the second cylindrical portion 123 are provided concentrically, and the latter has a smaller diameter than the former. Further, the evaporation source 100 is provided with a bearing 140 for enabling the turntable 120 to rotate with respect to the fixed stand 110. The inner ring side of the bearing 140 is fixed between the second cylindrical portion 123 and the gear portion 124 of the rotary table, and the outer ring side is fixed to the tip of the inward flange portion 113 of the fixing table 110.

  A motor 130 is fixed to the outward flange 112 of the fixing base 110. A gear 131 fixed to the rotation shaft of the motor 130 and a gear portion 124 provided on the turntable 120 mesh with each other. Thus, when the rotation shaft of the motor 130 rotates, the gear portion 124 rotates via the gear 131, and the turntable 120 rotates.

  A gasket G for sealing a gap between end faces between the outward flange portion 112 and the bottom plate 11 of the chamber 10 is provided on the upper surface side of the outward flange portion 112 of the fixing base 110. Further, a packing P is provided between the outer peripheral surface of the second cylindrical portion 123 of the turntable 120 and the tip of the inward flange portion 113 of the fixed base 110. The packing P is slidably provided on at least one of the outer peripheral surface of the second cylindrical portion 123 and the tip of the inward flange portion 113 of the fixing base 110, and has an annular shape therebetween. It has the function of sealing the gap. By providing the gasket G and the packing P as described above, the inside of the chamber 10 is evacuated (decompressed atmosphere) while the space outside the fixed base 110 remains in the atmospheric state (A) by the evacuation operation by the vacuum pump 20 (V).

  A plurality of evaporation source units 150 fixed to the bottom plate 122 are provided inside the first cylindrical portion 121 of the turntable 120. Each of the plurality of evaporation source units 150 includes a crucible 151 containing a material of a substance to be deposited on the substrate 30, a case 152 containing the crucible 151, and a heater 153 for heating the crucible 151. Further, inside the case 152, a flow path 152a through which a cooling liquid for cooling the crucible 151 flows is provided. The flow channel 152a functions as a cooling unit for cooling the crucible 151.

In the evaporation source 100 configured as described above, by supplying electricity to the heater 153 of the evaporation source unit 150 located immediately below the opening 114a in the cover 114, the crucible 151 of the evaporation source unit 150 is heated. You. As a result, the material in the crucible 151 evaporates or sublimes, and is deposited on the substrate 30 through the opening 114a. Then, at an appropriate timing (such as when the material is exhausted), the rotating table 1 is
By rotating 20, the evaporation source unit 150 used for vapor deposition can be replaced. Therefore, according to the rotary evaporation source 100 according to the present embodiment, continuous vapor deposition can be performed for a long period of time.

  Here, in the evaporation source 100 according to the present embodiment, a rotary joint method is not adopted as a method of providing a plurality of pipes and electric wires while rotating the plurality of evaporation source units 150 by the turntable 120. That is, the evaporation source 100 according to the present embodiment employs a method in which the turntable 120 is alternately rotated by one rotation in the forward direction and the reverse direction. Hereinafter, the configuration relating to the piping as the first linear member and the wiring as the second linear member will be described in more detail.

<Configuration of First Linear Member (Piping) and Second Linear Member (Wiring)>
As described above, the first pipes L11 as a plurality of first linear members extending from the coolant circulation device 300 installed on the first floor F1 and the first wirings as a plurality of second linear members extending from the power supply 400. L21 is connected to the evaporation source 100. The first pipe L11 is a pipe for supplying and discharging the coolant circulated through the flow channel 152a provided in each of the plurality of evaporation source units 150. Further, the first wiring L21 is an electric wire for supplying electricity to the heater 153. The plurality of first pipes L11 are connected to the second pipes L12 connected to the flow paths 152a of the cases 152 provided in the respective evaporation source units 150 by the first connection portions 160, respectively. Further, the plurality of first wirings L21 are respectively connected to the second wirings L22 connected to the heaters 153 provided in each of the evaporation source units 150 by the second connection portions 170. The second connection section 170 is a connector for connecting the wires.

  Here, it is desirable to arrange the first connection part 160 and the second connection part 170 at the lower position as much as possible from the viewpoint of connection work and maintenance. However, the first connection part 160 must be provided on the bottom plate part 122. This is because a passage through which the coolant flows must be formed in the bottom plate 122 that separates the region in the vacuum (decompressed atmosphere) state (V) from the region in the atmospheric state (A). On the other hand, in the case of the electric wiring, since there is no such restriction, the second connection portion 170 is provided below the inward flange portion 125. As described above, the plurality of first connection portions 160 are provided vertically above the plurality of second connection portions 170. Further, the plurality of first connection portions 160 are located closer to the rotation center of the turntable 120 than the plurality of second connection portions 170 so that the plurality of first pipes L11 and the plurality of first wirings L21 are not easily entangled. It is provided at a biased position.

  However, as described above, depending on the positional relationship between the vapor deposition device 1 and the through-hole 210 formed in the floor 200, the first pipe L11 and the first wiring L21 may be bent substantially at right angles below the evaporation source 100. It may be. Therefore, if no countermeasure is taken in such a case, when the turntable 120 rotates, the first pipe L11 becomes entangled with the first wiring L21 or the first pipe L11 is connected to the second connection L21. There is a possibility that the second connecting portion 170 may be hindered by colliding with the portion 170 (connector). For example, it may cause electrical connection failure.

Therefore, in the evaporation source 100 according to the present embodiment, a guide member 180 that partitions between the plurality of first pipes L11 and the plurality of second connection portions 170 is provided. The guide member 180 is fixed to the bottom surface of the inward flange 125 of the turntable 120. Further, the lower end of the guide member 180 is configured to be located vertically lower than the lower end of the second connection portion 170. More specifically, the guide member 180 is a cylindrical member (in the present embodiment, provided such that a plurality of first pipes L11 pass therethrough and a plurality of second connection portions 170 are disposed outside thereof. In this case, it is constituted by a cylindrical member). Here, the turntable 120
When rotates, the guide member 180 and the first pipe L11 and the guide member 180 and the first wiring L21 can slide. Therefore, it is desirable that the guide member 180 be made of a resin material (for example, nylon monomer, PA6 (6 nylon)) as a sliding material in order to reduce sliding resistance and reduce wear. It is also preferable to provide a fluorine coating layer on the surface of the guide member 180 by subjecting the surface of the guide member 180 to fluorine processing.

<Excellent points of the evaporation source and the vapor deposition apparatus according to the present embodiment>
According to the evaporation source 100 according to the present embodiment, the plurality of first pipes L11 and the plurality of second connection portions 170 are partitioned by the guide member 180. Therefore, it is possible to prevent the plurality of first pipes L11 and the plurality of first wirings L21 from becoming entangled. In addition, since the first pipe L11 can be prevented from colliding with the second connecting portion 170, it is possible to prevent the second connecting portion 170 from being hindered. From the above, since the arrangement space for the first pipe L11 and the first wiring L21 can be reduced, it is possible to cope with downsizing of the vapor deposition apparatus 1. In addition, the degree of freedom of arrangement of the vapor deposition device 1 is increased.

(Example 2)
FIG. 5 shows a second embodiment of the present invention. In the present embodiment, a configuration will be described in which the configuration regarding the arrangement of the first connection portion and the second connection portion is different from that in the first embodiment. Other configurations and operations are the same as those of the first embodiment. Therefore, the same components are denoted by the same reference numerals and description thereof will be omitted.

  FIG. 5 is a schematic cross-sectional view illustrating an installed state of the evaporation source according to the second embodiment of the present invention. The configuration of the entire vapor deposition apparatus is the same as that described in the first embodiment, and a description thereof will be omitted. The basic configuration of the evaporation source other than the configuration related to the arrangement of the first connection unit 160 and the second connection unit 170 is the same as that described in the first embodiment, and a description thereof will be omitted.

  Also in the present embodiment, the first pipe L11 as a plurality of first linear members extending from the coolant circulating device 300 installed on the first floor F1 and the second pipe as a plurality of second linear members extending from the power supply 400 are provided. One wiring L21 is connected to the evaporation source 100. The first pipe L11 is a pipe for supplying and discharging the coolant circulated through the flow channel 152a provided in each of the plurality of evaporation source units 150. Further, the first wiring L21 is an electric wire for supplying electricity to the heater 153. The plurality of first pipes L11 are connected to the second pipes L12 connected to the flow paths 152a of the cases 152 provided in the respective evaporation source units 150 by the first connection portions 160, respectively. Further, the plurality of first wirings L21 are respectively connected to the second wirings L22 connected to the heaters 153 provided in each of the evaporation source units 150 by the second connection portions 170. The second connection section 170 is a connector for connecting the wires.

  Further, as described in the first embodiment, it is desirable that the first connection portion 160 and the second connection portion 170 be provided at the lower position as much as possible. However, the first connection portion 160 is provided on the bottom plate portion 122. I have to provide it. On the other hand, in the case of electric wiring, there is no such restriction. Therefore, in this embodiment, a hole through which the wiring passes is provided at the center of the bottom plate portion 122, and a bottomed cylindrical portion 122a is provided below this hole. The second connecting portion 170 is provided below the bottom of the bottomed cylindrical portion 122a. As described above, the plurality of first connection portions 160 are provided vertically above the plurality of second connection portions 170. Further, the plurality of second connection portions 170 are located closer to the rotation center of the turntable 120 than the plurality of first connection portions 160 so that the plurality of first pipes L11 and the plurality of first wirings L21 are not easily entangled. It is provided at a biased position.

  Further, in the evaporation source 100 according to the present embodiment, a guide member 180 that partitions between the plurality of first pipes L11 and the plurality of second connection portions 170 is provided. The guide member 180 is fixed to the bottom surface of the bottomed cylindrical portion 122a of the turntable 120. Further, the lower end of the guide member 180 is configured to be located vertically lower than the lower end of the second connection portion 170. More specifically, the guide member 180 is a cylindrical member provided in such a manner that a plurality of first pipes L11 pass therethrough and a plurality of second connection portions 170 are arranged inside thereof (in the present embodiment). In this case, it is constituted by a cylindrical member). The material and the like of the guide member 180 are as described in the first embodiment.

  It goes without saying that the same effect as that of the first embodiment can be obtained also in the evaporation source 100 according to the present embodiment configured as described above.

(Other)
In the first and second embodiments, a configuration in which a plurality of first pipes L11, first connection portions 160, first wirings L21, and second connection portions 170 are provided for one evaporation source 100 is shown. Was. However, in the present invention, the case where only one first pipe L11 and the first connection part 160 are provided for one evaporation source 100, and the case where the first wiring L21 and the second connection part 170 are one evaporation source 100 The case where only one is provided is also included. That is, the second pipes L12 respectively connected to the plurality of evaporation source units 150 can be integrated into one pipe (collecting pipe) inside the turntable 120. In this case, only one first pipe L11 and one first connection portion 160 need be provided for one evaporation source 100. Also, the second wiring L22 connected to each of the plurality of evaporation source units 150 can be similarly integrated into one wiring inside the turntable 120. In this case, only one first wiring L21 and one second connection portion 170 need be provided for one evaporation source 100.

  DESCRIPTION OF SYMBOLS 1 ... Vapor deposition apparatus, 10 ... Chamber, 11 ... Bottom plate, 11a ... Mounting hole, 100 ... Evaporation source, 110 ... Fixed base, 120 ... Rotating base, 150 ... Evaporation source unit, 151 ... Crucible, 153 ... Heater, 160 ... No. 1 connection portion, 170: second connection portion, 180: guide member, 200: floor, 210: through hole, L11: first piping, L12: first piping, L21: second wiring, L22: second wiring

That is, the evaporation source of the present invention is:
A fixing table fixed to a position of a mounting hole formed in a bottom plate of the chamber configured so that the inside thereof has a reduced pressure atmosphere;
A turntable rotatably provided with respect to the fixed stand,
A plurality of evaporation source units each having at least a crucible, a heater for heating the crucible, and a cooling unit for cooling the crucible, and provided on the rotary table,
At least one first linear member extending from a first device provided below the floor on which the chamber is installed and connected to at least one first linear member provided so as to pass through a through hole formed in the floor. Connection part,
At least one second connection portion extending from a second device provided under the floor and connected to at least one second linear member provided to pass through a through hole formed in the floor;
An evaporation source comprising:
All of the first connecting portion, rather than all of the second connecting portion, a position biased toward the rotational center side of the turntable, and, with disposed on a vertically upward,
Wherein the guide member for partitioning between all of the first linear member and all of the second connecting portion are provided.

Further, other evaporation sources of the present invention include:
A fixing table fixed to a position of a mounting hole formed in a bottom plate of the chamber configured so that the inside thereof has a reduced pressure atmosphere;
A turntable rotatably provided with respect to the fixed stand,
A plurality of evaporation source units each having at least a crucible, a heater for heating the crucible, and a cooling unit for cooling the crucible, and provided on the rotary table,
At least one first linear member extending from a first device provided below the floor on which the chamber is installed and connected to at least one first linear member provided so as to pass through a through hole formed in the floor. Connection part,
At least one second connection portion extending from a second device provided under the floor and connected to at least one second linear member provided to pass through a through hole formed in the floor;
An evaporation source comprising:
All of the second connecting portion, than all of the first connecting portion, a position biased toward the rotational center side of the turntable, and, together with the provided vertically downward,
Wherein the guide member for partitioning between all of the first linear member and all of the second connecting portion are provided.

Claims (11)

A fixing table fixed to a position of a mounting hole formed in a bottom plate of the chamber configured so that the inside thereof has a reduced pressure atmosphere;
A turntable rotatably provided with respect to the fixed stand,
A plurality of evaporation source units each having at least a crucible, a heater for heating the crucible, and a cooling unit for cooling the crucible, and provided on the rotary table,
At least one first linear member extending from a first device provided below the floor on which the chamber is installed and connected to at least one first linear member provided so as to pass through a through hole formed in the floor. Connection part,
At least one second connection portion extending from a second device provided under the floor and connected to at least one second linear member provided to pass through a through hole formed in the floor;
An evaporation source comprising:
All the first connection portions are located at a position closer to the rotation center side of the turntable than all the second connection portions, and are provided vertically upward,
An evaporation source comprising a guide member for partitioning between all first linear members and all second connection portions.   The said guide member is a cylindrical member provided so that all the 1st linear members may pass through inside and all the 2nd connection parts may be arrange | positioned outside the said member. Evaporation source. A fixing table fixed to a position of a mounting hole formed in a bottom plate of the chamber configured so that the inside thereof has a reduced pressure atmosphere;
A turntable rotatably provided with respect to the fixed stand,
A plurality of evaporation source units each having at least a crucible, a heater for heating the crucible, and a cooling unit for cooling the crucible, and provided on the rotary table,
At least one first linear member extending from a first device provided below the floor on which the chamber is installed and connected to at least one first linear member provided so as to pass through a through hole formed in the floor. Connection part,
At least one second connection portion extending from a second device provided under the floor and connected to at least one second linear member provided to pass through a through hole formed in the floor;
An evaporation source comprising:
All the second connection portions are provided at a position closer to the rotation center side of the turntable than all the first connection portions, and are provided vertically below,
An evaporation source comprising a guide member for partitioning between all first linear members and all second connection portions.   The said guide member is a cylindrical member provided so that all the 1st linear members may pass through the outer side, and all the 2nd connection parts may be arrange | positioned inside the guide member. Evaporation source.   The evaporation source according to any one of claims 1 to 4, wherein a lower end of the guide member is located vertically below a lower end of the second connection portion.   The evaporation source according to any one of claims 1 to 5, wherein the rotary table is configured to repeat one rotation each in a forward direction and a reverse direction with respect to the fixed table.   The evaporation source according to any one of claims 1 to 6, wherein the guide member is made of a resin material that is a sliding material.   The evaporation source according to any one of claims 1 to 7, wherein a fluorine coating layer is provided on a surface of the guide member.   9. The method according to claim 1, wherein the first linear member is a pipe for supplying and discharging a cooling liquid circulated through a flow path provided in each of the plurality of evaporation source units. The evaporation source as described.   The evaporation source according to any one of claims 1 to 9, wherein the second linear member is an electric wire for supplying electricity to the heater. Said chamber;
An evaporation source according to any one of claims 1 to 10,
A vapor deposition apparatus comprising: