JP2019524458A - マニホールドを有するマイク流体デバイス - Google Patents
マニホールドを有するマイク流体デバイス Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0061—Packages or encapsulation suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0809—Geometry, shape and general structure rectangular shaped
- B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0214—Biosensors; Chemical sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
Abstract
Description
Claims (15)
- 装置であって、
マイクロ流体デバイスを含むダイと、
前記ダイの周囲に形成されたポリマー基板と、
前記ダイの上の前記ポリマー基板に、前記ダイと同じ側の前記ポリマー基板の側面において取り付けられた別個の流体マニホールドであって、前記ダイに流体を送るための流体マニホールド
を備える装置。 - 前記ダイは、薄膜回路の上に形成されたマイクロメートルスケールの流体通路を備え、該流体通路は、前記マニホールドからの流体を前記マイクロ流体デバイスの構成要素に伝えることからなる、請求項1の装置。
- 前記ポリマー基板は、前記ダイの周囲にすき間がない状態で形成される、請求項1の装置。
- 前記ダイの上面は、前記基板の上面と同じ平面上にある、請求項1の装置。
- 前記マニホールドは、成形プラスチックから形成される、請求項1の装置。
- 前記マニホールドは、金属またはプラスチックまたはセラミックから形成された管を備える、請求項1の装置。
- 前記マニホールドから前記ダイ内の前記マイクロ流体デバイスの対応する部分に流体を送るために、前記ダイと前記マニホールドとの間にリソグラフィーによりパターン形成された材料からなるマイクロ流体ルーティング層をさらに備える、請求項1の装置。
- 前記マニホールドから前記ダイへの流路が、前記基板の上面の一部を、前記マニホールドと前記ダイの間の流体インターフェースの一部として含むように、前記マニホールドの少なくとも一部が、前記ダイから離れて前記基板に取り付けられる、請求項1の装置。
- 装置を形成する方法であって、
半導体ダイ中にマイクロ流体デバイスを形成するステップと、
前記ダイの周囲にポリマー基板を形成するステップと、
前記ダイの上の前記基板に別個のマニホールドを取り付けるステップであって、前記マニホールドは、前記ダイの前記マイクロ流体デバイスに流体を伝えるためのチャンネルを提供することからなる、ステップ
を含む方法。 - 前記ポリマー基板は、前記ダイをすき間なく囲む、請求項9の方法。
- 前記ポリマー基板の上面は、前記ダイの上面と同じ平面上にある、請求項9の方法。
- 前記マニホールドを形成するためにプラスチックを射出成形するステップをさらに含む請求項9の方法。
- 台に支持された剥離テープ上に前記半導体ダイを配置するステップと、
前記基板を前記ダイの周囲に成形するステップと、
前記マニホールドを前記基板に取り付ける前に、前記台及び前記剥離テープを取り外すステップ
をさらに含む請求項9の方法。 - 前記ダイ中にマイクロメートルスケールの流体通路を形成するステップと、
前記ダイの前記マイクロメートルスケールの流体通路を、前記マニホールドのミリメートルスケールの流体チャンネルに位置合わせするステップ
をさらに含む請求項9の方法。 - 装置であって、
マイクロ流体デバイスを含むダイと、
ポリマー基板と前記ダイの間にすき間がない状態で、前記ダイの周囲に形成された該ポリマー基板であって、前記ダイの上面は、該ポリマー基板の上面と同じ平面上にあることからなる、ポリマー基板と、
プラスチックまたは金属またはセラミックから形成されて、前記ポリマー基板に取り付けられた別個の流体マニホールドであって、前記ダイの前記マイクロ流体デバイスに流体を送るための流体チャンネルを有する流体マニホールド
を備える装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2016/044051 WO2018022014A1 (en) | 2016-07-26 | 2016-07-26 | Microfluidic device with manifold |
Publications (2)
Publication Number | Publication Date |
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JP2019524458A true JP2019524458A (ja) | 2019-09-05 |
JP6722773B2 JP6722773B2 (ja) | 2020-07-15 |
Family
ID=61017527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018564956A Expired - Fee Related JP6722773B2 (ja) | 2016-07-26 | 2016-07-26 | マニホールドを有するマイク流体デバイス |
Country Status (6)
Country | Link |
---|---|
US (1) | US11597646B2 (ja) |
EP (1) | EP3436400B1 (ja) |
JP (1) | JP6722773B2 (ja) |
CN (1) | CN109415199B (ja) |
TW (1) | TWI637159B (ja) |
WO (1) | WO2018022014A1 (ja) |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
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US6209928B1 (en) | 1998-06-04 | 2001-04-03 | The Regents Of The University Of California | Microfluidic interconnects |
AU2001234996A1 (en) | 2000-02-11 | 2001-08-20 | Yale University | Planar patch clamp electrodes |
US6548895B1 (en) | 2001-02-21 | 2003-04-15 | Sandia Corporation | Packaging of electro-microfluidic devices |
EP1511744A4 (en) | 2002-05-13 | 2009-10-21 | Icagen Inc | Bis-benzimidazoles and related compounds as potassium channel modulators |
US6772513B1 (en) * | 2002-06-27 | 2004-08-10 | Sandia Corporation | Method for making electro-fluidic connections in microfluidic devices |
US6806543B2 (en) * | 2002-09-12 | 2004-10-19 | Intel Corporation | Microfluidic apparatus with integrated porous-substrate/sensor for real-time (bio)chemical molecule detection |
US7932098B2 (en) | 2002-10-31 | 2011-04-26 | Hewlett-Packard Development Company, L.P. | Microfluidic system utilizing thin-film layers to route fluid |
US7338637B2 (en) | 2003-01-31 | 2008-03-04 | Hewlett-Packard Development Company, L.P. | Microfluidic device with thin-film electronic devices |
WO2005079985A1 (de) | 2004-02-17 | 2005-09-01 | Ibidi Gmbh | Vorrichtung für mikrofluiduntersuchungen |
US7267431B2 (en) * | 2004-06-30 | 2007-09-11 | Lexmark International, Inc. | Multi-fluid ejection device |
US20080311000A1 (en) | 2004-09-03 | 2008-12-18 | Koninklijke Philips Electronics, N.V. | Micro-Fluidic System |
WO2008042482A2 (en) | 2006-06-19 | 2008-04-10 | The Regents Of The University Of California | Disposable, high pressure microfluidic chips |
US7762647B2 (en) | 2007-09-25 | 2010-07-27 | Eastman Kodak Company | MEMS printhead based compressed fluid printing system |
JP5215892B2 (ja) | 2009-01-29 | 2013-06-19 | Towa株式会社 | Memsパッケージの製造方法 |
US8500979B2 (en) * | 2009-12-31 | 2013-08-06 | Intel Corporation | Nanogap chemical and biochemical sensors |
US9132422B2 (en) | 2010-06-03 | 2015-09-15 | Spinomix, S.A. | Fluidic interfacing system and assembly |
WO2012154729A1 (en) | 2011-05-09 | 2012-11-15 | President And Fellows Of Harvard College | A microfluidic module and uses thereof |
US8382253B1 (en) * | 2011-08-25 | 2013-02-26 | Hewlett-Packard Development Company, L.P. | Fluid ejection device and methods of fabrication |
EP2872652A4 (en) * | 2012-04-18 | 2016-03-09 | Pathogenetix Inc | DEVICES AND METHODS FOR PREPARING AND ANALYZING NUCLEIC ACIDS |
EP2875706A4 (en) * | 2012-07-18 | 2016-03-23 | Univ Virginia Patent Found | HEAT TRANSFER DEVICE FOR HIGH HEAT FLUX APPLICATIONS, AND ASSOCIATED METHODS |
US10160145B2 (en) | 2013-09-03 | 2018-12-25 | STRATEC CONSUMABLES GmbH | Microfluidic device |
-
2016
- 2016-07-26 US US16/098,991 patent/US11597646B2/en active Active
- 2016-07-26 CN CN201680087191.7A patent/CN109415199B/zh active Active
- 2016-07-26 JP JP2018564956A patent/JP6722773B2/ja not_active Expired - Fee Related
- 2016-07-26 WO PCT/US2016/044051 patent/WO2018022014A1/en active Application Filing
- 2016-07-26 EP EP16910691.1A patent/EP3436400B1/en active Active
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2017
- 2017-07-24 TW TW106124780A patent/TWI637159B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN109415199A (zh) | 2019-03-01 |
EP3436400B1 (en) | 2020-04-08 |
CN109415199B (zh) | 2023-04-28 |
EP3436400A4 (en) | 2019-05-15 |
EP3436400A1 (en) | 2019-02-06 |
TWI637159B (zh) | 2018-10-01 |
WO2018022014A1 (en) | 2018-02-01 |
US11597646B2 (en) | 2023-03-07 |
TW201809627A (zh) | 2018-03-16 |
US20190144268A1 (en) | 2019-05-16 |
JP6722773B2 (ja) | 2020-07-15 |
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