JP2019523453A - Euvリソグラフィ用の反射光学素子 - Google Patents
Euvリソグラフィ用の反射光学素子 Download PDFInfo
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- JP2019523453A JP2019523453A JP2019504056A JP2019504056A JP2019523453A JP 2019523453 A JP2019523453 A JP 2019523453A JP 2019504056 A JP2019504056 A JP 2019504056A JP 2019504056 A JP2019504056 A JP 2019504056A JP 2019523453 A JP2019523453 A JP 2019523453A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
- G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/067—Construction details
Abstract
Description
12 EUV放射源
13 コレクタミラー
14 照明系
15 第1ミラー
16 第2ミラー
17 マスク
18 第3ミラー
19 第4ミラー
20 投影系
21 ウェハ
50 コレクタミラー
51 基板
52 研磨層
53 保護層
54 多層系
55 プライ対
56 アブソーバ
57 スペーサ
58 微細構造層
58’ 微細構造副層
58'' 副層
59 付着促進層
60 機能層
61 微細構造層として構成された機能層
Claims (15)
- 基板と5nm〜20nmの波長域の放射線を反射する反射コーティングとを備えたEUVリソグラフィ用の反射光学素子であって、機能層(60、61)が前記反射コーティング(54)と前記基板(51)との間に配置され、前記機能層により、前記基板のうち前記反射コーティングに面する側における水素の原子パーセント濃度が2倍以上低減されることを特徴とする反射光学素子。
- 請求項1に記載の反射光学素子において、前記機能層(60、61)は、スズ、銀、モリブデン、ルテニウム、イリジウム、ニッケル、鉄、コバルト、銅、アルミニウム、白金、亜鉛、マンガン、鉛、金、パラジウム、タングステン、タンタル、それらの合金、酸化物、ホウ化物、窒化物、及び炭化物の群の材料のうち1つ又は複数を含むことを特徴とする反射光学素子。
- 請求項1又は2に記載の反射光学素子において、前記機能層(61)は、微細構造層として構成されることを特徴とする反射光学素子。
- 請求項1又は2に記載の反射光学素子において、前記微細構造層(58)は、前記反射コーティング(54)と前記基板(51)との間に配置されることを特徴とする反射光学素子。
- 請求項4に記載の反射光学素子において、前記微細構造層(58)は、ニッケルリン、ニッケルホウ素、銅、銀、金、白金、イリジウム、タンタル、チタン、ジルコニウム、タングステン、モリブデン、及びニオブの群の1つ又は複数の材料を含むことを特徴とする反射光学素子。
- 請求項4又は5に記載の反射光学素子において、前記機能層(60)は、前記反射コーティング(54)と前記微細構造層(58)との間及び/又は前記微細構造層(58)と前記基板(51)との間及び/又は前記微細構造(58)内に配置されることを特徴とする反射光学素子。
- 請求項1〜6のいずれか1項に記載の反射光学素子において、研磨層(52)が、前記機能層(60)又は前記基板(51)又は前記微細構造層(58)又は微細構造層として構成された前記機能層(61)の上に配置されることを特徴とする反射光学素子。
- 請求項7に記載の反射光学素子において、前記研磨層(52)は、アモルファスシリコン、二酸化ケイ素、窒化ケイ素、窒化ガリウム、及び窒化アルミニウムの群の1つ又は複数の材料を含むことを特徴とする反射光学素子。
- 請求項7又は8に記載の反射光学素子において、前記機能層(60)は、前記研磨層(52)と前記反射コーティング(54)との間に配置されることを特徴とする反射光学素子。
- 請求項1〜9のいずれか1項に記載の反射光学素子において、前記基板(51)は、ケイ素、炭化ケイ素、シリコン含浸炭化ケイ素、石英ガラス、チタンドープ石英ガラス、ガラス、ガラスセラミックの群の材料のうち1つ又は複数を含むことを特徴とする反射光学素子。
- 請求項1〜10のいずれか1項に記載の反射光学素子において、付着促進層(59)が前記基板上に配置され、前記付着促進層は、少なくとも1つのプライからなり、ルテニウム、クロム、白金、イリジウム、銅、銀、金、ニッケル、ニッケルリン、タンタル、チタン、ジルコニウム、タングステン、モリブデン、及びニオブからなる群の1つ又は複数の材料を含むことを特徴とする反射光学素子。
- 請求項1〜11のいずれか1項に記載の反射光学素子において、前記反射コーティングは、5nm〜20nmの波長域の動作波長の屈折率の実部が小さい材料と、5nm〜20nmの波長域の動作波長の屈折率の実部が大きい材料との交互配置層(56、57)を含む層系を含む多層系(54)として構成されることを特徴とする反射光学素子。
- 請求項1〜12のいずれか1項に記載の反射光学素子において、該反射光学素子はコレクタミラー(13、50)として構成されることを特徴とする反射光学素子。
- 請求項1〜13のいずれか1項に記載の反射光学素子を有するEUVリソグラフィ装置の光学系。
- 請求項14に記載の光学系又は請求項1〜13のいずれか1項に記載の反射光学素子を有するEUVリソグラフィ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102016213831.6 | 2016-07-27 | ||
DE102016213831.6A DE102016213831A1 (de) | 2016-07-27 | 2016-07-27 | Reflektives optisches Element für die EUV-Lithographie |
PCT/EP2017/068061 WO2018019645A1 (de) | 2016-07-27 | 2017-07-17 | Reflektives optisches element für die euv-lithographie |
Publications (2)
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JP2019523453A true JP2019523453A (ja) | 2019-08-22 |
JP7018429B2 JP7018429B2 (ja) | 2022-02-10 |
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JP2019504056A Active JP7018429B2 (ja) | 2016-07-27 | 2017-07-17 | Euvリソグラフィ用の反射光学素子 |
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Country | Link |
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US (1) | US10649340B2 (ja) |
EP (1) | EP3491468B1 (ja) |
JP (1) | JP7018429B2 (ja) |
DE (1) | DE102016213831A1 (ja) |
WO (1) | WO2018019645A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102017200667A1 (de) | 2017-01-17 | 2018-07-19 | Carl Zeiss Smt Gmbh | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage oder ein Inspektionssystem |
DE102019212736A1 (de) * | 2019-08-26 | 2021-03-04 | Carl Zeiss Smt Gmbh | Optisches Element zur Reflexion von EUV-Strahlung und EUV-Lithographiesystem |
DE102020212869A1 (de) | 2020-10-12 | 2021-11-04 | Carl Zeiss Smt Gmbh | Verfahren zum Bilden einer Wasserstoff-Schutzschicht |
DE102021202483A1 (de) * | 2021-03-15 | 2022-09-15 | Carl Zeiss Smt Gmbh | Verfahren zur Herstellung eines reflektiven optischen Elements für den extrem ultravioletten Wellenlängenbereich sowie reflektives optisches Element |
DE102021206168A1 (de) | 2021-06-16 | 2022-12-22 | Carl Zeiss Smt Gmbh | Verfahren zum Abscheiden einer Deckschicht, reflektives optisches Element für den EUV-Wellenlängenbereich und EUV-Lithographiesystem |
DE102021214362A1 (de) | 2021-12-15 | 2023-06-15 | Carl Zeiss Smt Gmbh | Verfahren zur Herstellung einer Schutzabdeckung und EUV-Lithographiesystem |
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JP2012503318A (ja) * | 2008-09-19 | 2012-02-02 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 反射光学素子とその製造方法 |
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2016
- 2016-07-27 DE DE102016213831.6A patent/DE102016213831A1/de active Pending
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2017
- 2017-07-17 JP JP2019504056A patent/JP7018429B2/ja active Active
- 2017-07-17 WO PCT/EP2017/068061 patent/WO2018019645A1/de unknown
- 2017-07-17 EP EP17740385.4A patent/EP3491468B1/de active Active
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2019
- 2019-01-25 US US16/257,811 patent/US10649340B2/en active Active
Patent Citations (3)
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JP2012503318A (ja) * | 2008-09-19 | 2012-02-02 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 反射光学素子とその製造方法 |
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Publication number | Publication date |
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WO2018019645A1 (de) | 2018-02-01 |
DE102016213831A1 (de) | 2018-02-01 |
EP3491468A1 (de) | 2019-06-05 |
JP7018429B2 (ja) | 2022-02-10 |
US20190171108A1 (en) | 2019-06-06 |
EP3491468B1 (de) | 2024-02-21 |
US10649340B2 (en) | 2020-05-12 |
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