JP2019515271A - 多スペクトル撮像デバイス - Google Patents
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- 238000000701 chemical imaging Methods 0.000 title claims description 14
- 239000011159 matrix material Substances 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 125000006850 spacer group Chemical group 0.000 claims description 20
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000005516 engineering process Methods 0.000 claims description 5
- 102100038546 Fibronectin type III and SPRY domain-containing protein 1 Human genes 0.000 claims description 4
- 101001030521 Homo sapiens Fibronectin type III and SPRY domain-containing protein 1 Proteins 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000005530 etching Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 101001022847 Homo sapiens E3 ubiquitin-protein ligase MYCBP2 Proteins 0.000 description 4
- 101001126102 Homo sapiens Pleckstrin homology domain-containing family B member 1 Proteins 0.000 description 4
- 102100030462 Pleckstrin homology domain-containing family B member 1 Human genes 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- 101100491376 Arabidopsis thaliana APL gene Proteins 0.000 description 2
- 101100243901 Halobacterium salinarum (strain ATCC 700922 / JCM 11081 / NRC-1) phr gene Proteins 0.000 description 2
- 101100077149 Human herpesvirus 8 type P (isolate GK18) K5 gene Proteins 0.000 description 2
- 101100385336 Natronomonas pharaonis (strain ATCC 35678 / DSM 2160 / CIP 103997 / JCM 8858 / NBRC 14720 / NCIMB 2260 / Gabara) cry gene Proteins 0.000 description 2
- 101150049436 PHR2 gene Proteins 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- BJAARRARQJZURR-UHFFFAOYSA-N trimethylazanium;hydroxide Chemical compound O.CN(C)C BJAARRARQJZURR-UHFFFAOYSA-N 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0213—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using attenuators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0076—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a detector
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
- G01J2003/2806—Array and filter array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
- G01J2003/2813—2D-array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
- G01J2003/2826—Multispectral imaging, e.g. filter imaging
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Spectrometry And Color Measurement (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
Description
フィルタマトリクス製造歩留まり、及び
マイクロレンズアレイ製造歩留まり
上記の製造作業を重ねると、全体歩留まりは減少するという結果となる。
Claims (10)
- ピクセルのマトリクスから構成された感光性検出器(DET)と、
該ピクセルのマトリクスに対応するマイクロレンズ(ML1,ML2,ML3)のアレイと、
該ピクセルのマトリクスに対応する、個別のフィルタ(λ1,λ2,λ3)のマトリクスによって形成されるフィルタモジュール(MF)と、を備えた多スペクトル撮像デバイスであって、
該マイクロレンズのアレイは該検出器と直接接触し、該フィルタモジュールは、該マイクロレンズのアレイと接触した基板上に製造された多スペクトル撮像デバイス。 - 該フィルタモジュール(MF)は、その周縁で接着剤によって該検出器(DET)に結合された請求項1に記載の多スペクトル撮像デバイス。
- 該フィルタモジュール(MF)がアライメントパターンを備えた請求項1または2に記載の多スペクトル撮像デバイス。
- 該フィルタモジュール(MF)がスペーサー(SP)によって隔てられた2枚のミラー(MIR1,MIR1;M1,M2)から構成され、該フィルタモジュールは複数のフィルタセル(IF11,IF12,...,IF44)を有し、該フィルタセルのそれぞれは少なくとも2個のフィルタ(FP1,FP2)を有する請求項1から3のいずれかに記載の多スペクトル撮像デバイス。
- 該フィルタ(FP1,FP2,FP3)の少なくとも1個が帯域伝送機能を有する請求項4に記載の多スペクトル撮像デバイス。
- 該フィルタセルの少なくとも一部(IF11,IF12,IF13,IF14)は、第1の帯に一直線に配置されている請求項4または5に記載の多スペクトル撮像デバイス。
- 該フィルタセルの少なくとも一部(IF21−IF24)は、第1の帯とは別で第1の帯に平行な第2の帯に一直線に配置されている請求項6に記載の多スペクトル撮像デバイス。
- 該フィルタ(FP1,FP2,FP3)の隣接する少なくとも二個がクロストーク障壁によって隔てられている請求項4から7のいずれかに記載の多スペクトル撮像デバイス。
- 該フィルタ(FP1,FP2,FP3)の少なくとも1個がパンクロマチックである請求項4から8のいずれかに記載の多スペクトル撮像デバイス。
- 該検出器(DET)はCMOS技術で一体化されている請求項1から9のいずれかに記載の多スペクトル撮像デバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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FR16/00716 | 2016-04-29 | ||
FR1600716A FR3050831B1 (fr) | 2016-04-29 | 2016-04-29 | Dispositif d'imagerie multispectrale |
PCT/FR2017/000076 WO2017187029A1 (fr) | 2016-04-29 | 2017-04-27 | Dispositif d'imagerie multispectrale |
Publications (2)
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JP2019515271A true JP2019515271A (ja) | 2019-06-06 |
JP7303633B2 JP7303633B2 (ja) | 2023-07-05 |
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JP2018555601A Active JP7303633B2 (ja) | 2016-04-29 | 2017-04-27 | 多スペクトル撮像デバイス |
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Country | Link |
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US (1) | US11143554B2 (ja) |
EP (1) | EP3449228B1 (ja) |
JP (1) | JP7303633B2 (ja) |
CN (1) | CN109791073B (ja) |
CA (1) | CA3021613C (ja) |
FR (1) | FR3050831B1 (ja) |
TW (1) | TW201807386A (ja) |
WO (1) | WO2017187029A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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FR3050831B1 (fr) | 2016-04-29 | 2018-04-27 | Silios Technologies | Dispositif d'imagerie multispectrale |
CN109037254A (zh) * | 2018-07-24 | 2018-12-18 | 南通通富微电子有限公司 | 一种影像传感器制备方法、影像传感器和电子设备 |
FR3084459B1 (fr) | 2018-07-30 | 2020-07-10 | Silios Technologies | Capteur d'imagerie multispectrale pourvu de moyens de limitation de la diaphonie |
DE102018221530A1 (de) * | 2018-12-12 | 2020-06-18 | Robert Bosch Gmbh | LiDAR-System sowie Kraftfahrzeug |
CN110375852B (zh) * | 2019-06-28 | 2020-11-17 | 中国科学院西安光学精密机械研究所 | 多条带微窄带滤光片阵列光谱成像芯片及其实现方法 |
FR3116899B1 (fr) | 2020-11-30 | 2023-07-21 | Silios Tech | Imageur multispectral à domaine spectral élargi. |
CN113048907B (zh) * | 2021-02-08 | 2022-04-22 | 浙江大学 | 一种基于宏像素分割的单像素多光谱成像方法及装置 |
CN113596308A (zh) * | 2021-07-30 | 2021-11-02 | 苏州多感科技有限公司 | 图像传感器以及优化成像效果的方法 |
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2017
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- 2017-04-27 JP JP2018555601A patent/JP7303633B2/ja active Active
- 2017-04-27 CN CN201780026382.7A patent/CN109791073B/zh active Active
- 2017-04-27 WO PCT/FR2017/000076 patent/WO2017187029A1/fr active Application Filing
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US11143554B2 (en) | 2021-10-12 |
EP3449228B1 (fr) | 2022-09-21 |
TW201807386A (zh) | 2018-03-01 |
CN109791073B (zh) | 2022-03-01 |
CA3021613C (fr) | 2023-03-07 |
FR3050831A1 (fr) | 2017-11-03 |
JP7303633B2 (ja) | 2023-07-05 |
WO2017187029A1 (fr) | 2017-11-02 |
EP3449228A1 (fr) | 2019-03-06 |
FR3050831B1 (fr) | 2018-04-27 |
US20190145823A1 (en) | 2019-05-16 |
CN109791073A (zh) | 2019-05-21 |
CA3021613A1 (fr) | 2017-11-02 |
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