JP2019207948A - Substrate processing method and substrate processing apparatus - Google Patents

Abstract

To provide a substrate processing method and a substrate processing apparatus capable of suppressing or preventing generation of particles on a peripheral edge portion of a substrate.SOLUTION: A processing unit 2 executes a first holding step T1 for achieving and maintaining a first holding state which holds a substrate by a first holding unit and does not hold the substrate by a second holding unit in parallel with the initial stage of a spin-dry step S7 and a second holding step T2, after the first holding step T1, for achieving and maintaining a second holding state which holds the substrate by the second holding unit and does not hold the substrate by the first holding unit in parallel with the initial stage of the spin-dry step S7.SELECTED DRAWING: Figure 15

Description

  The present invention relates to a substrate processing method and a substrate processing apparatus. Examples of substrates to be processed include semiconductor wafers, liquid crystal display substrates, plasma display substrates, FED (Field Emission Display) substrates, optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, and photomasks. Substrate, ceramic substrate, solar cell substrate and the like.

  In a semiconductor device manufacturing process, for example, a single-wafer type substrate processing apparatus that processes substrates one by one includes, for example, a spin chuck that horizontally holds and rotates a substrate, and a main substrate that is held by the spin chuck. And a processing liquid supply unit for supplying the processing liquid to the surface. As the spin chuck, a pinch type chuck that holds a substrate horizontally by bringing a plurality of pinching pins into contact with the peripheral edge of the substrate and pinching the substrate in a horizontal direction may be employed. In the clamping chuck, the plurality of clamping pins are provided at appropriate intervals on the circumference corresponding to the outer peripheral shape of the substrate.

  In a typical substrate processing process, a chemical process is performed in which a chemical liquid as a processing liquid is supplied to a substrate held by a spin chuck. In the chemical liquid process, the chemical liquid supplied to the substrate receives a centrifugal force due to the rotation of the substrate and is discharged from the peripheral portion. Thereafter, a rinsing process is performed in which a rinsing liquid as a processing liquid is supplied to the substrate. In the rinsing step, the rinsing liquid supplied to the substrate receives a centrifugal force due to the rotation of the substrate and is discharged from the peripheral portion. Thereafter, a spin dry process for removing the rinse liquid adhering to the main surface of the substrate is performed. In the spin dry process, when the substrate is rotated at a high speed, the rinse liquid adhering to the substrate is shaken off and removed (dried). A common rinse solution is deionized water.

Japanese Patent Laid-Open No. 9-38595

  After completion of the rinsing process, the rinsing liquid remains between the holding part of the holding pin and the peripheral part of the substrate. The remaining rinse liquid (the rinse liquid remaining between the sandwiching portion and the peripheral portion of the substrate) may contain a chemical solution. When the spin dry process is performed in this state, the chemical liquid contained in the rinse liquid may be dried, and particles may be generated at the peripheral edge of the main surface of the substrate. That is, it has been demanded to suppress or prevent the occurrence of particle contamination due to the spin dry process being performed while the liquid remains between the sandwiching portion and the peripheral portion of the substrate.

  Accordingly, one object of the present invention is to provide a substrate processing method and a substrate processing apparatus capable of suppressing or preventing the generation of particles at the peripheral edge of the substrate.

  In order to achieve the above-mentioned object, the invention according to claim 1 has at least three first holding portions that can contact a peripheral portion of the substrate, and the at least three first holding portions are provided on the substrate. A first sandwiching unit that sandwiches the substrate by contacting the peripheral portion and a first sandwiching unit provided separately from the first sandwiching unit and having at least three second sandwiching portions that can contact the peripheral portion of the substrate. And the substrate processing apparatus including a substrate holding and rotating device including a second holding unit that holds the substrate by contacting the peripheral edge of the substrate with the at least three second holding portions. A substrate processing method for performing a process using a chemical solution on the substrate, while rotating the substrate held by the substrate holding and rotating device around a rotation axis passing through a central portion of the substrate, A rinsing step for supplying a rinsing liquid to the main surface of the substrate, and a swing-off speed at which the rinsing liquid can be shaken off from the main surface of the substrate without supplying the rinsing liquid to the main surface of the substrate In parallel with at least one of the spin drying step of rotating around the rotation axis and the rinsing step and the spin drying step, the at least three second holding portions are separated from the peripheral portion of the substrate, By bringing the three first clamping portions into contact with the peripheral edge portion of the substrate, a first clamping state is achieved in which the substrate is sandwiched by the first sandwiching unit and the substrate is not sandwiched by the second sandwiching unit. The first clamping step for maintaining the first clamping state for a predetermined first period, and after the first clamping step, in parallel with the spin dry step, By bringing the at least three second clamping parts into contact with the peripheral edge of the substrate while separating at least three first clamping parts from the peripheral edge of the substrate, the second clamping unit causes the substrate to be brought into contact with the peripheral edge of the substrate. And a second clamping step of realizing a second clamping state in which the substrate is not clamped by the first clamping unit and maintaining the second clamping state for a predetermined second period. I will provide a.

According to this method, in parallel with at least one of the rinsing process and the spin drying process, the first sandwiching state in which the substrate is sandwiched by the first sandwiching unit and the substrate is not sandwiched by the second sandwiching unit is maintained ( First clamping step). In the first clamping state, each second clamping part is separated from the peripheral edge part of the substrate.
In the first clamping step, each second clamping part rotates around the rotation axis while being separated from the peripheral edge of the substrate. Therefore, even if the liquid is attached to the second holding part before the start of the first holding process, centrifugal force acts on the liquid attached to the second holding part as the substrate rotates. Thus, the liquid is shaken off from the second clamping unit. Therefore, at the end of the first clamping step, the liquid is removed from the second clamping unit.

After completion of the first clamping process, in parallel with the spin drying process, a second clamping state is maintained in which the substrate is sandwiched by the second sandwiching unit and the substrate is not sandwiched by the first sandwiching unit (the second sandwiching state). Clamping process). In the second clamping state, each first clamping part is separated from the peripheral part of the substrate, and the second clamping part is in contact with the peripheral part of the substrate.
Since the second sandwiching portion from which the liquid has already been removed comes into contact with the peripheral portion of the substrate, there is no liquid between the second sandwiching portion and the peripheral portion of the substrate in the second sandwiching step. That is, in the second clamping step, the substrate can be sandwiched by the second sandwiching unit without causing a liquid containing a chemical solution to be present between the second sandwiching portion and the peripheral portion of the substrate.

  Further, in the second clamping step, the first clamping part rotates around the rotation axis while the first clamping parts are separated from the peripheral edge of the substrate. Therefore, even if the liquid is attached to the first holding part before the start of the second holding process, a large centrifugal force acts on the liquid attached to the first holding part as the substrate rotates, Thereby, the liquid is shaken off from the first clamping unit. Therefore, the liquid is removed from the first clamping unit after the second clamping process is completed.

  Thereafter, when the substrate is sandwiched by the second sandwiching unit, the already-dried first sandwiching portion comes into contact with the peripheral portion of the substrate. At this time, there is no liquid between the first clamping part and the peripheral part of the substrate. That is, in the step subsequent to the second clamping step, the substrate can be clamped by the first clamping unit without causing the liquid containing the chemical liquid to exist between the first clamping portion and the peripheral edge portion of the substrate.

Therefore, the spin dry process can be executed while suppressing or preventing the liquid containing the chemical liquid from remaining between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, the generation of particles at the peripheral edge of the substrate can be suppressed or prevented.
The method according to claim 2, wherein the method is configured to apply a chemical solution to the main surface of the substrate while rotating the substrate held by the substrate holding and rotating device around the rotation axis before the rinsing step. The chemical | medical solution process which supplies may be further included.

  According to this method, the chemical liquid process is performed prior to the rinsing process. Depending on the type of the chemical solution, the temperature of the chemical solution, and the material of the sandwiching portion, the chemical solution may permeate into the sandwiching portion in the chemical solution process. Then, the soaked chemical solution oozes out into the rinsing liquid remaining between the first sandwiching portion and the peripheral edge portion of the substrate or between the second sandwiching portion and the peripheral edge portion of the substrate. At the end of the process, the chemical solution may be contained in the rinsing liquid remaining between the first sandwiching portion and the peripheral portion of the substrate or between the second sandwiching portion and the peripheral portion of the substrate. If the spin dry process is performed in this state, particles may be generated at the peripheral edge of the substrate.

According to this method, the spin dry process can be executed while suppressing or preventing the liquid containing the chemical liquid from remaining between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, the occurrence of particle contamination can be suppressed or prevented.
As described in claim 3, the chemical solution may contain a sulfuric acid-containing solution.
The sulfuric acid-containing liquid is generally used for substrate processing in a state having a very high liquid temperature. In this case, depending on the material of the pin, the sulfuric acid-containing liquid may penetrate into the pin. If the sulfuric acid-containing liquid oozes out in the rinsing liquid remaining between the sandwiching portion and the peripheral portion of the substrate during the spin dry process, particles may be generated at the peripheral portion of the substrate.

According to this method, the spin dry process can be executed while suppressing or preventing the liquid containing the sulfuric acid-containing liquid from remaining between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, even when a sulfuric acid-containing liquid is used as the chemical liquid, the generation of particles at the peripheral edge of the substrate can be suppressed or prevented.
According to a fourth aspect of the present invention, the first period is a period in which the rinsing liquid can be shaken off from the at least three first holding portions, and the second period is the at least three third periods. The substrate processing method according to any one of claims 1 to 3, wherein the rinse liquid can be shaken off from the two clamping portions.

According to this method, the second clamping unit can be dried at the end of the first clamping process. Further, the first clamping unit can be dried at the end of the second clamping process. Thereby, the remaining of the liquid containing the chemical solution between the first and second sandwiching portions and the peripheral portion of the substrate during the spin dry process can be more effectively suppressed.
According to a fifth aspect of the present invention, in the first clamping state, the method causes the at least three second clamping portions spaced apart from the peripheral edge portion of the substrate to contact the peripheral edge portion of the substrate. A first transition step of transitioning from the first sandwiched state to a sandwiched state in which the substrate is sandwiched by the first sandwiching unit and the second sandwiching unit, and in the both sandwiched state, the substrate A second transition step in which the at least three first sandwiching portions in contact with the peripheral portion of the substrate are separated from the peripheral portion of the substrate to transition from the both sandwiched states to the second sandwiched state. Furthermore, it is a substrate processing method as described in any one of Claims 1-4.

According to this method, since the first clamping state is transited from the first clamping state to the second clamping state once, the first clamping state is changed to the second clamping state without stopping the rotation of the substrate. Transition can be made.
According to a sixth aspect of the present invention, the method clamps the substrate by the first clamping unit and the second clamping unit in parallel with the spin dry process after the second clamping process. The substrate processing method according to any one of claims 1 to 5, further comprising a both-clamping step for realizing a both-clamping state.

According to this method, after the second clamping process, in parallel with the spin dry process, a both-clamping state in which the substrate is clamped by the first clamping unit and the second clamping unit is realized (both clamping processes). . Thereby, it is possible to rotate a board | substrate at a faster speed than a 1st clamping process or a 2nd clamping process after a 2nd clamping process.
According to a seventh aspect of the present invention, the spin dry process can shake off the rinse liquid from the main surface of the substrate in parallel with the first clamping process and the second clamping process. In parallel with the first spin-drying step of rotating around the rotation axis at a first drying speed and the sandwiching step, the rinse liquid can be shaken off from the main surface of the substrate, and the first The substrate processing method according to claim 6, further comprising a second spin drying step of rotating around the rotation axis at a second drying speed higher than the first drying speed.

According to this method, since the substrate can be rotated at a higher second drying speed in the spin drying process, the substrate can be satisfactorily shaken and dried.
The invention according to claim 8 is the substrate processing method according to any one of claims 1 to 7, wherein the first clamping step is executed in parallel with the spin dry step.
If the first clamping step is executed in parallel with the rinsing step, the rinse liquid from the substrate may fall on the second clamping portion that is separated from the peripheral edge of the substrate. Further, since the rotation speed of the substrate is slow, there is a possibility that the centrifugal force acting on each second clamping part rotating while being separated from the peripheral part in the first clamping process is not increased.

  On the other hand, according to this method, since the first clamping step is executed in parallel with the spin drying step, the rinsing liquid from the substrate is applied to the second clamping portion that is separated from the peripheral portion of the substrate. There is no risk of falling. Further, since the rotation speed of the substrate is high enough to shake off the rinsing liquid, the centrifugal force acting on each of the second holding portions rotating while being separated from the peripheral portion in the first holding step is large. Thereby, in a 1st clamping process, a 2nd clamping part can be dried more favorably.

In the ninth aspect of the present invention, the first clamping step and the second clamping step are executed again in parallel with the spin dry step after the second clamping step. The substrate processing method according to claim 8.
According to this method, the first clamping step and the second clamping step are executed a plurality of times. Therefore, the spin dry process can be executed while more effectively suppressing the remaining of the liquid containing the chemical liquid between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, the generation of particles at the peripheral edge of the substrate can be more effectively suppressed.

  In order to achieve the above object, an invention according to claim 10 is a substrate processing apparatus for performing a process using a chemical solution on a substrate, wherein at least three of the substrate processing devices capable of contacting the peripheral edge of the substrate are provided. A first sandwiching unit having one sandwiching portion and capable of sandwiching the substrate by the at least three first sandwiching portions; and a peripheral edge of the substrate provided separately from the first sandwiching unit A second holding unit capable of holding the substrate by the at least three second holding parts, the first holding unit, A rotation unit that rotates the second clamping unit around a rotation axis passing through a central portion of the substrate; and a clamping drive unit that drives the first clamping unit and the second clamping unit. Substrate holding and rotating device, rinsing liquid supply unit for supplying rinsing liquid to the main surface of the substrate held by the substrate holding and rotating device, the rotating unit, the nipping drive unit, and the rinsing liquid supply A control device for controlling a unit, wherein the control device rotates the substrate held by the substrate holding / rotating device while rotating the substrate around a rotation axis passing through a central portion of the substrate by the rotating unit. A rinsing step of supplying a rinsing liquid to the main surface of the substrate by the liquid supply unit, and without supplying a rinsing liquid to the main surface of the substrate, the substrate is removed from the main surface of the substrate by the rotating unit. A spin-drying process in which the rinsing liquid is rotated around the rotation axis at a swing-off speed at which the rinsing liquid can be shaken off; In parallel with at least one of the spin drying steps, the clamping drive unit moves the at least three second clamping parts to the peripheral edge of the substrate in order to shake off the rinse liquid from the at least three second clamping parts. The at least three first holding portions are brought into contact with the peripheral edge portion of the substrate while being spaced apart from each other, thereby holding the substrate by the first holding unit and not holding the substrate by the second holding unit. A first clamping step that realizes the first clamping state and maintains the first clamping state for a predetermined period; and after the first clamping step, in parallel with the spin dry step, the at least three first In order to shake off the rinsing liquid from the sandwiching portion, the at least three first sandwiching portions are separated from the peripheral portion of the substrate by the sandwiching drive unit. However, by bringing the at least three second holding parts into contact with the peripheral edge of the substrate, the second holding unit holds the substrate by the second holding unit and does not hold the substrate by the first holding unit. Provided is a substrate processing apparatus that executes a second clamping step that realizes the state and maintains the second clamping state for a predetermined period.

According to this configuration, in parallel with at least one of the rinsing process and the spin dry process, the first sandwiching state in which the substrate is sandwiched by the first sandwiching unit and the substrate is not sandwiched by the second sandwiching unit is maintained ( First clamping step). In the first clamping state, each second clamping part is separated from the peripheral edge part of the substrate.
In the first clamping step, each second clamping part rotates around the rotation axis while being separated from the peripheral edge of the substrate. Therefore, even if the liquid is attached to the second holding part before the start of the first holding process, centrifugal force acts on the liquid attached to the second holding part as the substrate rotates. Thus, the liquid is shaken off from the second clamping unit. Therefore, at the end of the first clamping step, the liquid is removed from the second clamping unit.

After completion of the first clamping process, in parallel with the spin drying process, a second clamping state is maintained in which the substrate is sandwiched by the second sandwiching unit and the substrate is not sandwiched by the first sandwiching unit (the second sandwiching state). Clamping process). In the second clamping state, each first clamping part is separated from the peripheral part of the substrate, and the second clamping part is in contact with the peripheral part of the substrate.
Since the second sandwiching portion from which the liquid has already been removed comes into contact with the peripheral portion of the substrate, there is no liquid between the second sandwiching portion and the peripheral portion of the substrate in the second sandwiching step. That is, in the second clamping step, the substrate can be sandwiched by the second sandwiching unit without causing a liquid containing a chemical solution to be present between the second sandwiching portion and the peripheral portion of the substrate.

  Further, in the second clamping step, the first clamping part rotates around the rotation axis while the first clamping parts are separated from the peripheral edge of the substrate. Therefore, even if the liquid is attached to the first holding part before the start of the second holding process, a large centrifugal force acts on the liquid attached to the first holding part as the substrate rotates, Thereby, the liquid is shaken off from the first clamping unit. Therefore, the liquid is removed from the first clamping unit after the second clamping process is completed.

  Thereafter, when the substrate is sandwiched by the second sandwiching unit, the already-dried first sandwiching portion comes into contact with the peripheral portion of the substrate. At this time, there is no liquid between the first clamping part and the peripheral part of the substrate. That is, in the step subsequent to the second clamping step, the substrate can be clamped by the first clamping unit without causing the liquid containing the chemical liquid to exist between the first clamping portion and the peripheral edge portion of the substrate.

Therefore, the spin dry process can be executed while suppressing or preventing the liquid containing the chemical liquid from remaining between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, the generation of particles at the peripheral edge of the substrate can be suppressed or prevented.
According to an eleventh aspect of the present invention, the controller controls the main surface of the substrate while rotating the substrate held by the substrate holding and rotating device around the rotation axis before the rinsing step. The substrate processing apparatus according to claim 10, further executing a chemical liquid process for supplying a chemical liquid.

  According to this structure, a chemical | medical solution process is performed prior to a rinse process. Depending on the type of the chemical solution, the temperature of the chemical solution, and the material of the sandwiching portion, the chemical solution may permeate into the sandwiching portion in the chemical solution process. Then, the soaked chemical solution oozes out into the rinsing liquid remaining between the first sandwiching portion and the peripheral edge portion of the substrate or between the second sandwiching portion and the peripheral edge portion of the substrate. At the end of the process, the chemical solution may be contained in the rinsing liquid remaining between the first sandwiching portion and the peripheral portion of the substrate or between the second sandwiching portion and the peripheral portion of the substrate. If the spin dry process is performed in this state, particles may be generated at the peripheral edge of the substrate.

According to this method, the spin dry process can be executed while suppressing or preventing the liquid containing the chemical liquid from remaining between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, the occurrence of particle contamination can be suppressed or prevented.
As recited in claim 12, the chemical solution may contain a sulfuric acid-containing solution.
The sulfuric acid-containing liquid is generally used for substrate processing in a state having a very high liquid temperature. In this case, depending on the material of the pin, the sulfuric acid-containing liquid may penetrate into the pin. If the sulfuric acid-containing liquid oozes out in the rinsing liquid remaining between the sandwiching portion and the peripheral portion of the substrate during the spin dry process, particles may be generated at the peripheral portion of the substrate.

According to this method, the spin dry process can be executed while suppressing or preventing the liquid containing the sulfuric acid-containing liquid from remaining between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, even when a sulfuric acid-containing liquid is used as the chemical liquid, the generation of particles at the peripheral edge of the substrate can be suppressed or prevented.
According to a thirteenth aspect of the present invention, the first period is a period during which the rinsing liquid can be shaken off from the at least three first holding portions, and the second period is the at least three third periods. It is a substrate processing apparatus as described in any one of Claims 10-12 which is the period which can shake off the rinse liquid from 2 clamping parts.

According to this structure, the 2nd clamping part can be dried at the time of completion | finish of a 1st clamping process. Further, the first clamping unit can be dried at the end of the second clamping process. Thereby, the remaining of the liquid containing the chemical solution between the first and second sandwiching portions and the peripheral portion of the substrate during the spin dry process can be more effectively suppressed.
According to a fourteenth aspect of the present invention, the control device causes the at least three second sandwiching portions spaced apart from the peripheral portion of the substrate to contact the peripheral portion of the substrate in the first sandwiching state. Thus, in the first transition step of transitioning from the first sandwiched state to a both sandwiched state in which the substrate is sandwiched by the first sandwiching unit and the second sandwiching unit, and in the both sandwiched state, A second transition step in which the at least three first sandwiching portions in contact with the peripheral portion of the substrate are separated from the peripheral portion of the substrate to transition from the both sandwiched states to the second sandwiched state; The substrate processing apparatus according to claim 10, further executing.

According to this configuration, since the first clamping state is transited from the first clamping state to the second clamping state once, the first clamping state is changed to the second clamping state without stopping the rotation of the substrate. Transition can be made.
According to a fifteenth aspect of the present invention, the control device clamps the substrate by the first clamping unit and the second clamping unit in parallel with the spin dry process after the second clamping process. The substrate processing apparatus according to claim 10, further executing a both-holding step for realizing a both-holding state.

According to this configuration, after the second clamping process, in parallel with the spin drying process, a both-clamping state in which the substrate is clamped by the first clamping unit and the second clamping unit is realized (both clamping processes). . Thereby, it is possible to rotate a board | substrate at a faster speed than a 1st clamping process or a 2nd clamping process after a 2nd clamping process.
According to a sixteenth aspect of the present invention, in the spin dry process, the control device moves the substrate from the main surface of the substrate in parallel with the first sandwiching process and the second sandwiching process. In parallel with the first spin-drying step of rotating around the rotation axis at a first drying speed capable of shaking off the substrate and the both clamping steps, the rinse liquid is shaken off from the main surface of the substrate. The substrate processing apparatus according to claim 15, wherein a second spin drying step of rotating around the rotation axis at a second drying speed faster than the first drying speed is performed.

According to this configuration, since the substrate can be rotated at a higher second drying speed in the spin dry process, the substrate can be satisfactorily shaken and dried.
The invention according to claim 17 is the substrate processing apparatus according to any one of claims 10 to 16, wherein the control device executes the first clamping step in parallel with the spin dry step. is there.

If the first clamping step is executed in parallel with the rinsing step, the rinse liquid from the substrate may fall on the second clamping portion that is separated from the peripheral edge of the substrate. Further, since the rotation speed of the substrate is slow, there is a possibility that the centrifugal force acting on each second clamping part rotating while being separated from the peripheral part in the first clamping process is not increased.
On the other hand, according to this configuration, since the first clamping process is executed in parallel with the spin dry process, the rinse liquid from the substrate is applied to the second clamping part that is separated from the peripheral part of the substrate. There is no risk of falling. Further, since the rotation speed of the substrate is high enough to shake off the rinsing liquid, the centrifugal force acting on each of the second holding portions rotating while being separated from the peripheral portion in the first holding step is large. Thereby, in a 1st clamping process, a 2nd clamping part can be dried more favorably.

The invention according to claim 18 is characterized in that, after the second clamping step, the control device again executes the first clamping step and the second clamping step in parallel with the spin dry step. Item 18. The substrate processing apparatus according to any one of Items 10 to 17.
According to this configuration, the first clamping step and the second clamping step are executed a plurality of times. Therefore, the spin dry process can be executed while more effectively suppressing the remaining of the liquid containing the chemical liquid between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, the generation of particles at the peripheral edge of the substrate can be more effectively suppressed.

The invention according to claim 19 is the substrate processing apparatus according to any one of claims 10 to 18, wherein the first holding part and the second holding part include a resin member.
According to this configuration, when the first clamping unit and the second clamping unit include the resin member, the processing using the chemical solution is performed while the substrate is clamped by the first clamping unit and the second clamping unit. By applying to the substrate, there is a possibility that the chemical solution may permeate into the first sandwiching portion and the second sandwiching portion. In the rinsing step, the rinsing liquid may remain between the first sandwiching portion and the peripheral portion of the substrate or between the second sandwiching portion and the peripheral portion of the substrate. If the spin dry process is performed in a state where the chemical liquid soaked in the chemical liquid process is oozed out into the rinse liquid, there is a possibility that particle contamination occurs on the main surface of the substrate.

According to this configuration, the spin dry process can be executed while suppressing or preventing the liquid containing the chemical liquid from remaining between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, even when the first sandwiching portion and the second sandwiching portion include a resin member, the generation of particles at the peripheral portion of the substrate can be suppressed or prevented.
The invention according to claim 20 is the substrate processing apparatus according to claim 19, wherein the resin member contains carbon.

According to this structure, when the 1st clamping part and the 2nd clamping part contain the resin member containing carbon, carbon falls out from a resin member by deterioration with time. And it is possible that a fine space | gap generate | occur | produces in the resin member after carbon has fallen off, and a chemical | medical solution osmose | permeates a 1st clamping part and a 2nd clamping part by a chemical | medical solution entering into the space | gap.
According to this configuration, the spin dry process can be executed while suppressing or preventing the liquid containing the chemical liquid from remaining between the first and second sandwiching portions and the peripheral portion of the substrate. Therefore, even when the first sandwiching portion and the second sandwiching portion include a resin member containing carbon, generation of particles at the peripheral portion of the substrate can be suppressed or prevented.

FIG. 1 is an illustrative plan view for explaining an internal layout of a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a schematic view of the inside of the processing unit provided in the substrate processing apparatus as viewed in the horizontal direction. FIG. 3 is a side view for explaining a more specific configuration of the spin chuck provided in the processing unit. FIG. 4 is a plan view for explaining a more specific configuration of the spin chuck. FIG. 5A is an enlarged cross-sectional view showing a configuration in the vicinity of the first clamping pin. FIG. 5A shows a state where the first clamping unit is in the contact position. FIG. 5B is an enlarged cross-sectional view showing a configuration in the vicinity of the first clamping pin. FIG. 5B shows a state where the first clamping unit is in the separated position. FIG. 6A is an enlarged cross-sectional view showing the configuration in the vicinity of the second clamping pin. FIG. 6A shows a state where the second clamping unit is in the contact position. FIG. 6B is an enlarged cross-sectional view showing the configuration in the vicinity of the second clamping pin. FIG. 6B shows a state where the second sandwiching portion is in the separated position. 7A to 7B are schematic views showing the states of the first clamping unit and the second clamping unit. 8A and 8B are schematic diagrams illustrating states of the first clamping unit and the second clamping unit. 9A and 9B are schematic views showing the states of the first clamping unit and the second clamping unit. 10A and 10B are schematic diagrams illustrating states of the first clamping unit and the second clamping unit. FIGS. 11A and 11B are schematic diagrams illustrating states of the first clamping unit and the second clamping unit. 12A and 12B are schematic diagrams illustrating states of the first clamping unit and the second clamping unit. FIG. 13 is a block diagram for explaining an electrical configuration of a main part of the substrate processing apparatus. FIG. 14 is a flowchart for explaining an example of substrate processing by the processing unit. FIG. 15 is a timing chart for explaining the second rinsing step and the spin dry step. 16A and 16B are schematic diagrams for explaining the SPM process and the first rinsing process. 16C and 16D are schematic diagrams for explaining the SC1 step and the second rinsing step. 16E to 16G are schematic diagrams for explaining the spin dry process. FIG. 17 is a timing chart for explaining a part of the first modification processing example by the processing unit. FIG. 18 is a timing chart for explaining a part of the second modification processing example by the processing unit. FIG. 19 is a timing chart for explaining a part of a third modification processing example by the processing unit. FIG. 20 is a timing chart for explaining a part of the fourth modification processing example by the processing unit.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic view of a substrate processing apparatus according to an embodiment of the present invention as viewed from above. The substrate processing apparatus 1 is a single wafer processing apparatus that processes substrates W such as silicon wafers one by one. In this embodiment, the substrate W is a disk-shaped substrate. The substrate processing apparatus 1 includes a plurality of processing units 2 that process a substrate W with a processing liquid and a rinsing liquid, and a load port on which a substrate container C that stores a plurality of substrates W processed by the processing unit 2 is placed LP, an indexer robot IR and a substrate transfer robot CR that transfer the substrate W between the load port LP and the processing unit 2, and a control device 3 that controls the substrate processing apparatus 1. The indexer robot IR transports the substrate W between the substrate container C and the substrate transport robot CR. The substrate transport robot CR transports the substrate W between the indexer robot IR and the processing unit 2. The plurality of processing units 2 have the same configuration, for example.

FIG. 2 is a schematic cross-sectional view for explaining a configuration example of the processing unit 2.
The processing unit 2 holds a box-shaped chamber 4 having an internal space, and a single substrate W in the chamber 4 in a horizontal posture, and places the substrate W around a vertical rotation axis A1 passing through the center of the substrate W. A spin chuck (substrate holding and rotating device) 5 to be rotated and sulfuric acid for supplying a sulfuric acid-containing liquid as an example of a chemical solution to the surface (main surface, for example, a pattern forming surface) of the substrate W held by the spin chuck 5 A contained liquid supply unit 6; an SC1 supply unit 7 for supplying SC1 (mixed liquid containing NH ₄ OH and H ₂ O ₂ ) to the surface of the substrate W held by the spin chuck 5; and a spin chuck. The blocking member 8 that faces the upper surface of the substrate W held by the substrate 5 and the inside of the blocking member 8 are inserted vertically and rinsed toward the center of the upper surface of the substrate W held by the spin chuck 5. The Including the central axis nozzle 9 for discharging the untreated fluid, and rinse liquid supply unit 10 for supplying a rinse liquid to the center axis nozzle 9, a cylindrical processing cup 11 surrounding the spin chuck 5.

  The chamber 4 includes a box-shaped partition wall 14 that houses the spin chuck 5 and an FFU (fan filter unit) as a blower unit that sends clean air (air filtered by a filter) from the upper part of the partition wall 14 into the partition wall 14. 15 and an exhaust duct 16 for discharging the gas in the chamber 4 from the lower part of the partition wall 14. The FFU 15 is disposed above the partition wall 14 and attached to the ceiling of the partition wall 14. The FFU 15 sends clean air of low humidity downward from the ceiling of the partition wall 14 into the chamber 4. The exhaust duct 16 is connected to the bottom of the processing cup 11 and guides the gas in the chamber 4 toward an exhaust processing facility provided in a factory where the substrate processing apparatus 1 is installed. Therefore, a downflow (downflow) that flows downward in the chamber 4 is formed by the FFU 15 and the exhaust duct 16. The processing of the substrate W is performed in a state where a down flow is formed in the chamber 4.

As the spin chuck 5, a clamping chuck that holds the substrate W horizontally with the substrate W sandwiched in the horizontal direction is employed. A specific configuration of the spin chuck 5 will be described later.
The sulfuric acid-containing liquid supply unit 6 includes a sulfuric acid-containing liquid nozzle 18, a nozzle arm 19 with the sulfuric acid-containing liquid nozzle 18 attached to the tip, and a nozzle that moves the sulfuric acid-containing liquid nozzle 18 by moving the nozzle arm 19 Mobile unit 20 (see FIG. 13). The sulfuric acid-containing liquid supplied from the sulfuric acid-containing liquid supply unit 6 is, for example, SPM (sulfuric acid / sulfuric acid / hydrogen sulfate mixed solution containing H ₂ SO ₄ (sulfuric acid) and H ₂ O ₂ (hydrogen peroxide water)). hydrogen peroxide mixture)).

The sulfuric acid-containing liquid nozzle 18 is, for example, a straight nozzle that discharges SPM as an example of the sulfuric acid-containing liquid in a continuous flow state. The sulfuric acid-containing liquid nozzle 18 is attached to the nozzle arm 19 in a vertical posture that discharges SPM in a vertical direction, an inclined direction, or a horizontal direction toward the upper surface of the substrate W, for example. The nozzle arm 19 extends in the horizontal direction.
The nozzle moving unit 20 moves the sulfuric acid-containing liquid nozzle 18 horizontally by horizontally moving the nozzle arm 19 around the swing axis. The nozzle moving unit 20 includes a motor and the like. The nozzle moving unit 20 includes a processing position where the SPM discharged from the sulfuric acid-containing liquid nozzle 18 is deposited on the upper surface of the substrate W, and a retreat position where the sulfuric acid-containing liquid nozzle 18 is set around the spin chuck 5 in plan view. In between, the sulfuric acid containing liquid nozzle 18 is moved horizontally. In this embodiment, the processing position is, for example, a central position at which the SPM discharged from the sulfuric acid-containing liquid nozzle 18 is deposited on the central portion of the upper surface of the substrate W.

The sulfuric acid-containing liquid supply unit 6 further includes a sulfuric acid supply unit 21 that supplies H ₂ SO ₄ to the sulfuric acid-containing liquid nozzle 18 and a hydrogen peroxide solution supply unit 22 that supplies H ₂ O ₂ to the sulfuric acid-containing liquid nozzle 18. Including.
The sulfuric acid supply unit 21 includes a sulfuric acid pipe 23 having one end connected to the sulfuric acid-containing liquid nozzle 18 and a sulfuric acid valve 24 for opening and closing the sulfuric acid pipe 23. The sulfuric acid pipe 23 is supplied with H ₂ SO ₄ kept at a predetermined high temperature from a sulfuric acid supply source. The sulfuric acid supply unit 21 may further include a sulfuric acid flow rate adjusting valve that adjusts the flow rate of H ₂ SO ₄ flowing through the sulfuric acid piping 23 by adjusting the opening degree of the sulfuric acid piping 23. The sulfuric acid flow rate adjusting valve includes a valve body having a valve seat provided therein, a valve body that opens and closes the valve seat, and an actuator that moves the valve body between an open position and a closed position. The same applies to other flow rate adjusting valves.

The hydrogen peroxide solution supply unit 22 includes a hydrogen peroxide solution pipe 25 having one end connected to the sulfuric acid-containing liquid nozzle 18 and a hydrogen peroxide solution valve 26 for opening and closing the hydrogen peroxide solution pipe 25. The hydrogen peroxide solution pipe 25 is supplied with H ₂ O _{2 at a} normal temperature (about 23 ° C.) whose temperature is not adjusted from a hydrogen peroxide solution supply source. The hydrogen peroxide solution supply unit 22 further includes a hydrogen peroxide solution adjustment valve that adjusts the flow rate of H ₂ O ₂ flowing through the hydrogen peroxide solution pipe 25 by adjusting the opening of the hydrogen peroxide solution pipe 25. It may be.

When the sulfuric acid valve 24 and the hydrogen peroxide water valve 26 are opened, H ₂ SO ₄ from the sulfuric acid pipe 23 and H ₂ O ₂ from the hydrogen peroxide water pipe 25 are supplied into the casing of the sulfuric acid-containing liquid nozzle 18. And thoroughly mixed (stirred) in the casing. This _mixture, H 2 SO ₄ and _H 2 _{O 2} and is mingled _evenly, a mixed solution of _H 2 SO ₄ and _H 2 _{O 2} by reaction of H 2 SO ₄ and _{H 2 O} 2 (SPM) is generated Is done. SPM contains peroxymonosulfuric acid (Peroxymonosulfuric acid; H ₂ SO ₅ ) having a strong oxidizing power, and is heated to a temperature (100 ° C. or higher, for example, 160 to 220 ° C.) higher than the temperature of H ₂ SO ₄ before mixing. It is done. The generated high-temperature SPM is discharged from a discharge port opened in the casing of the sulfuric acid-containing liquid nozzle 18.

  The SC1 supply unit 7 includes an SC1 nozzle 28, a nozzle arm 29 having the SC1 nozzle 28 attached to the tip thereof, and a nozzle moving unit 30 that moves the SC1 nozzle 28 by moving the nozzle arm 29 (see FIG. 13). Including. The nozzle moving unit 30 moves the SC1 nozzle 28 horizontally by horizontally moving the nozzle arm 29 around the swing axis. The nozzle moving unit 30 includes a motor and the like. The nozzle moving unit 30 has a processing position where SC1 discharged from the SC1 nozzle 28 is deposited on the surface of the substrate W (a jet of SC1 droplets discharged from the SC1 nozzle 28 is sprayed on the surface of the substrate W); The SC1 nozzle 28 is moved horizontally between the SC1 nozzle 28 and the retracted position set around the spin chuck 5 in plan view. Further, the nozzle moving unit 30 has a liquid landing position of SC1 discharged from the SC1 nozzle 28 (a spraying position of a jet of droplets of SC1 discharged from the SC1 nozzle 28) at the center of the surface of the substrate W and the substrate W. The sulfuric acid-containing liquid nozzle 18 is moved horizontally so as to move between the peripheral portions of the surface.

The SC1 nozzle 28 discharges a jet of SC1 droplets onto the surface of the substrate W held on the spin chuck 5 (discharges SC1 in the form of a spray). The SC1 nozzle 28 has a form of a known two-fluid nozzle (for example, see Japanese Patent Application Laid-Open No. 2017-005230) that ejects a small droplet of SC1. The SC1 supply unit 7 switches the SC1 pipe 32 to supply the SC1 pipe 32 for supplying liquid SC1 from the SC1 supply source to the SC1 nozzle 28 and the supply and stop of supply of SC1 from the SC1 pipe 32 to the SC1 nozzle 28. The gas pipe 34 is opened and closed in order to switch the supply and stop of gas supply from the gas pipe 34 to the SC1 nozzle 28, the SC1 valve 33 that opens and closes the gas, the gas pipe 34 that supplies the gas from the gas supply source to the SC1 nozzle 28. And a gas valve 35. As an example of the gas supplied to the SC1 nozzle 28, an inert gas such as nitrogen gas (N ₂ ) can be exemplified, but other than that, for example, dry air or clean air can be employed. The SC1 nozzle 28 may have a form of a straight nozzle that discharges SC1 in a continuous flow mode instead of a form of a two-fluid nozzle.

While the gas valve 35 is opened and gas is discharged from the gas discharge port of the SC1 nozzle 28, the SC1 valve 33 is opened and SC1 is discharged from the liquid discharge port. By causing the gas to collide (mix), it is possible to generate the fine droplets of SC1, and the SC1 can be ejected in a spray form.
The blocking member 8 includes a blocking plate 41 and a rotating shaft 42 provided on the blocking plate 41 so as to be integrally rotatable. The blocking plate 41 has a disk shape having a diameter substantially equal to or larger than that of the substrate W. The blocking plate 41 has a substrate facing surface 41a formed of a circular horizontal flat surface facing the entire surface of the substrate W on the lower surface thereof.

The rotation shaft 42 is provided so as to be rotatable around a rotation axis A <b> 2 (an axis that coincides with the rotation axis A <b> 1 of the substrate W) extending vertically through the center of the blocking plate 41. The rotating shaft 42 is cylindrical. The rotation shaft 42 is supported by a support arm 43 extending horizontally above the blocking plate 41 so as to be relatively rotatable.
A cylindrical through-hole 40 is formed in the central portion of the blocking plate 41 so as to vertically penetrate the blocking plate 41 and the rotating shaft 42. The central axis nozzle 9 is inserted vertically into the through hole 40. That is, the center axis nozzle 9 penetrates the blocking plate 41 and the rotating shaft 42 vertically.

  The central shaft nozzle 9 includes a cylindrical casing that extends vertically inside the through hole 40. The lower end of the central axis nozzle 9 opens to the substrate facing surface 41a to form a discharge port 9a. The central axis nozzle 9 is supported by the support arm 43 so as not to rotate with respect to the support arm 43. The central shaft nozzle 9 moves up and down together with the blocking plate 41, the rotating shaft 42, and the support arm 43. A rinse liquid supply unit 10 is connected to the upstream end of the central shaft nozzle 9.

  The rinse liquid supply unit 10 includes a rinse liquid pipe 44 that guides the rinse liquid to the central axis nozzle 9 and a rinse liquid valve 45 that opens and closes the rinse liquid pipe 44. The rinse liquid is water, for example. In this embodiment, the water is any of pure water (deionized water), carbonated water, electrolytic ionic water, hydrogen water, ozone water, and ammonia water having a diluted concentration (for example, about 10 to 100 ppm). When the rinsing liquid valve 45 is opened, the rinsing liquid from the rinsing liquid supply source is supplied from the rinsing liquid pipe 44 to the central axis nozzle 9. Thereby, the rinse liquid is discharged downward from the discharge port 9a of the central axis nozzle 9.

An inert gas supply unit 46 is connected to the central axis nozzle 9. The inert gas supply unit 46 includes an inert gas pipe 47 connected to the upstream end of the central shaft nozzle 9 and an inert gas valve 48 interposed in the middle of the inert gas pipe 47. The inert gas is, for example, nitrogen gas (N ₂ ). When the inert gas valve 48 is opened, the inert gas is discharged downward from the discharge port 9a of the central axis nozzle 9. When the inert gas valve 48 is closed, the discharge of the inert gas from the discharge port 9a is stopped.

The shield plate 41 is coupled to a shield plate rotating unit 49 having a configuration including an electric motor or the like. The shielding plate rotating unit 49 rotates the shielding plate 41 and the rotation shaft 42 around the rotation axis A <b> 2 with respect to the support arm 43.
The support arm 43 is coupled with a blocking member lifting / lowering unit 50 including an electric motor, a ball screw, and the like. The blocking member lifting / lowering unit 50 lifts and lowers the blocking member 8 (the blocking plate 41 and the rotating shaft 42) and the central axis nozzle 9 together with the support arm 43 in the vertical direction.

  The blocking member lifting / lowering unit 50 has the blocking plate 41 in the blocking position where the substrate facing surface 41a is close to the upper surface of the substrate W held by the spin chuck 5 (shown by a broken line in FIG. 2; shown in FIGS. Position) and a retracted position (shown by a solid line in FIG. 2) retracted upward from the blocking position. The blocking member lifting / lowering unit 50 can hold the blocking plate 41 at the blocking position, the intermediate position (the position shown in FIGS. 16B and 16D), and the retracted position. The space between the substrate facing surface 41a and the upper surface of the substrate W in the state where the blocking plate 41 is in the blocking position is not completely isolated from the surrounding space. There is no gas inflow from. That is, the space is substantially isolated from the surrounding space.

  As shown in FIG. 2, the processing cup 11 is disposed outward (in a direction away from the rotation axis A <b> 1) from the substrate W held by the spin chuck 5. The processing cup 11 surrounds a spin base 51 described below. When a liquid such as a chemical solution, a rinse solution, or a protective solution is supplied to the substrate W while the spin chuck 5 is rotating the substrate W, the liquid supplied to the substrate W is shaken off around the substrate W. When these liquids are supplied to the substrate W, the upper end portion 11a of the processing cup 11 is disposed above the spin base 51 described below. Therefore, the liquid discharged around the substrate W is received by the processing cup 11. Then, the liquid received by the processing cup 11 is sent to a recovery device or a waste liquid device (not shown).

  FIG. 3 is a side view for explaining a more specific configuration of the spin chuck 5. FIG. 4 is a plan view for explaining a more specific configuration of the spin chuck 5. 5A and 5B are enlarged cross-sectional views showing the configuration in the vicinity of the first clamping pin 52A. 6A and 6B are enlarged cross-sectional views showing a configuration in the vicinity of the second holding pin 52B. FIG. 3 is a view of FIG. 4 as viewed from the section line III-III.

  As shown in FIG. 2 and FIG. 3, the spin chuck 5 includes a spin base 51 that can rotate around a rotation axis A <b> 1 along the vertical direction, and a circumferential direction Y of the spin base 51 at the peripheral edge of the upper surface of the spin base 51. A plurality of (six in this embodiment) sandwiching pins 52A and 52B planted at substantially equal intervals along the rotation axis 53, a rotation shaft 53 fixed to the lower surface of the rotation center of the spin base 51, and a rotation shaft 53 And a spin motor 54 that rotates the motor around the rotation axis A1. All of the holding pins provided in the spin chuck 5 are pins on which the support portions (the first holding unit 55 and the second holding unit 56) that come into contact with the peripheral portion of the substrate W are movable. The six sandwiching pins 52 </ b> A and 52 </ b> B and the spin base 51 rotate with the rotation of the rotation shaft 53.

  As shown in FIG. 4, the six clamping pins 52A and 52B include a group (first clamping unit) in which three clamping pins 52A that are not adjacent to each other and three clamping pins 52B that are not adjacent to each other are simultaneously opened and closed. 55 or a second clamping unit 56). In other words, the six sandwiching pins 52 </ b> A and 52 </ b> B are included in the third sandwiching pin 52 </ b> A (hereinafter referred to as “first sandwiching pin 52 </ b> A”) included in the first sandwiching unit 55 and the second sandwiching unit 56. And three sandwiching pins 52B (hereinafter referred to as “second sandwiching pins 52B”). The first clamping pins 52A and the second clamping pins 52B are alternately arranged in the circumferential direction Y. Paying attention to the first clamping unit 55, the three first clamping pins 52A are arranged at equal intervals (120 ° intervals). If attention is paid to the second clamping unit 56, the three second clamping pins 52B are arranged at equal intervals (120 ° intervals).

  As shown in FIGS. 5A and 5B, each first holding pin 52 </ b> A includes a first shaft portion 61 and a first holding portion 62 formed integrally with the upper end of the first shaft portion 61. The first shaft portion 61 and the first clamping portion 62 are each formed in a cylindrical shape. The first clamping part 62 is provided eccentric from the central axis of the first shaft part 61. The surface connecting the upper end of the first shaft portion 61 and the lower end of the first holding portion 62 is a first taper that descends from the first holding portion 62 toward the peripheral surface of the first shaft portion 61. A surface 63 is formed.

As shown in FIGS. 5A and 5B, each first clamping pin 52A is attached to the spin base 51 so that the first shaft portion 61 can rotate around the rotation axis A3 coaxial with the center axis. Yes. More specifically, a first support shaft 65 supported on the spin base 51 via a first bearing 64 is provided at the lower end portion of the first shaft portion 61.
As shown in FIGS. 5A and 5B, the first holding pin 52 </ b> A includes a conductive member 70. The conductive member 70 includes a first shaft portion 61 and a first clamping portion 62. The conductive member 70 is grounded via the first support shaft 65. The conductive member 70 is formed of a composite material having chemical resistance and conductivity. A specific example of the composite material is a material containing a resin and carbon. The conductive member 70 has a mode in which a carbon material is dispersed in a resin member formed of resin. The carbon contained in the conductive member 70 is, for example, carbon fiber (carbon fiber). The carbon contained in the conductive member 70 may be carbon powder or particles. Specific examples of the resin contained in the conductive member 70 are PFA (tetrafluoroethylene-perfluoroalkylvinyl ether copolymer), PCTFE (Poly Chloro Tri Furuoro Ethylene), PTFE (polytetrafluoroethylene), and PEEK (polyetheretherketone).

  As shown in FIGS. 5A and 5B, the central axis of the first clamping unit 62 is deviated from the rotation axis A3. Therefore, by the rotation of the first shaft portion 61, the first holding portion 62 is moved away from the rotation axis A1 (the center axis) is away from the rotation axis A1 (the position shown in FIG. 5B), and the center axis is the rotation axis A1. It will be displaced between the approaching position (position shown in FIG. 5A) approaching. In a state where the first sandwiching pin 52 </ b> A is located at the separation position, a predetermined gap is formed between the peripheral end surface (peripheral end portion) of the substrate W and the first sandwiching portion 62.

  As shown in FIGS. 3 and 4, the spin chuck 5 further includes a first opening / closing unit 57 for opening and closing the three first holding pins 52 </ b> A at once. The first opening / closing unit 57 includes a first drive magnet 66 provided in a one-to-one correspondence with each first holding pin 52A, and a first one provided in a one-to-one correspondence with each first holding pin 52A. A biasing magnet 67, a first opening / closing magnet 68 provided in a one-to-one correspondence with each first holding pin 52A, and a first magnet for raising and lowering the plurality of first opening / closing magnets 68 collectively. And a lifting unit 69.

  The first drive magnet 66 is fixed to the lower end of the first support shaft 65 of each first clamping pin 52A. As the first drive magnet 66 rotates about the rotation axis A3, the first holding pin 52A rotates about the rotation axis A3. The first drive magnet 66 is a permanent magnet and extends in a longitudinal direction along the horizontal. The magnetic pole directions of the three first driving magnets 66 corresponding to the plurality of (for example) three first clamping pins 52A are such that the substrate W rotates when no external force is applied to the first clamping pins 52A. Common in the radial direction.

The first urging magnet 67 is disposed adjacent to the corresponding first holding pin 52A and closer to the direction away from the rotation axis A1 than the center position of the first holding pin 52A. . The first urging magnet 67 exerts a magnetic force on the corresponding first driving magnet 66.
The first opening / closing magnet 68 has an arc shape centered on the rotation axis A1. The three first opening / closing magnets 68 are at a common height position. The three first opening / closing magnets 68 are arranged at equal intervals in the circumferential direction Y on a circumference coaxial with the rotation axis A1.

  The 1st magnet raising / lowering unit 69 is the structure containing the cylinder provided so that expansion-contraction was possible for the up-down direction, for example, and is supported by the said cylinder. Moreover, the 1st magnet raising / lowering unit 69 may be comprised using the electric motor. The first magnet lifting unit 69 may include a plurality (for example, three) of individual lifting units that individually lift and lower the first opening / closing magnet 68.

  As shown in FIGS. 6A and 6B, each second clamping pin 52 </ b> B includes a second shaft portion 71 and a second clamping portion 72 formed integrally with the upper end of the second shaft portion 71. The second shaft portion 71 and the second holding portion 72 are each formed in a cylindrical shape. The second clamping portion 72 is provided eccentric from the central axis of the second shaft portion 71. The surface connecting the upper end of the second shaft portion 71 and the lower end of the second holding portion 72 is a second taper that descends from the second holding portion 72 toward the peripheral surface of the second shaft portion 71. A surface 73 is formed.

As shown in FIGS. 6A and 6B, each second clamping pin 52B is attached to the spin base 51 so that the second shaft portion 71 can rotate about a rotation axis A4 coaxial with the center axis. Yes. More specifically, a second support shaft 75 that is supported by the spin base 51 via a second bearing 74 is provided at the lower end portion of the second shaft portion 71.
As shown in FIGS. 6A and 6B, the second holding pin 52 </ b> B includes a conductive member 80. The conductive member 80 includes a second shaft portion 71 and a second clamping portion 72. The conductive member 80 is grounded via the second support shaft 75. The conductive member 80 is formed of a composite material having chemical resistance and conductivity. A specific example of the composite material is a material containing a resin and carbon. The conductive member 80 has a mode in which a carbon material is dispersed in a resin member formed of resin. The carbon contained in the conductive member 80 is, for example, carbon fiber (carbon fiber). The carbon contained in the conductive member 80 may be carbon powder or particles. Specific examples of the resin contained in the conductive member 80 are PFA (tetrafluoroethylene-perfluoroalkylvinyl ether copolymer), PCTFE (Poly Chloro Tri Furuoro Ethylene), PTFE (polytetrafluoroethylene), and PEEK (polyetheretherketone).

  As shown in FIGS. 6A and 6B, the center axis of the second clamping part 72 is deviated from the rotation axis A4. Therefore, due to the rotation of the second shaft portion 71, the second sandwiching portion 72 is moved away from the rotation axis A1 (the center axis) is away from the rotation axis A1 (position shown in FIG. 6B), and the center axis is the rotation axis A1. It will be displaced between the approaching position (position shown in FIG. 6A) approaching. In a state where the second clamping pin 52B is located at the separation position, a predetermined gap is formed with the peripheral end surface (peripheral end portion) of the substrate W.

  As shown in FIGS. 3 and 4, the spin chuck 5 further includes a second opening / closing unit 58 for collectively opening and closing the three second holding pins 52 </ b> B. The second opening / closing unit 58 includes a second drive magnet 76 provided in a one-to-one correspondence with each second holding pin 52B, and a second one provided in a one-to-one correspondence with each second holding pin 52B. A biasing magnet 77, a second opening / closing magnet 78 provided in a one-to-one correspondence with each second clamping pin 52B, and a second magnet for raising and lowering the plurality of second opening / closing magnets 78 collectively. And a lifting unit 79.

  The second drive magnet 76 is fixed to the lower end of the second support shaft 75 of each second holding pin 52B. As the second drive magnet 76 rotates about the rotation axis A4, the second clamping pin 52B rotates about the rotation axis A4. The second drive magnet 76 is a permanent magnet and extends in the longitudinal direction along the horizontal. The magnetic pole directions of the three second driving magnets 76 corresponding to the three plural (for example) second holding pins 52B are the rotations of the substrate W in the state where no external force is applied to the second holding pins 52B. Common in the radial direction.

  The second urging magnet 77 is disposed adjacent to the corresponding second holding pin 52B and closer to the direction away from the rotation axis A1 than the center position of the second holding pin 52B. . The second urging magnet 77 exerts a magnetic force on the corresponding second driving magnet 76. The magnetic pole direction of each second biasing magnet 77 is opposite to the magnetic pole direction of each first biasing magnet 67 with respect to the rotational radius direction of the substrate W. The first urging magnets 67 and the second urging magnets 77 are alternately arranged in the circumferential direction Y.

  The second opening / closing magnet 78 has an arc shape centered on the rotation axis A1. The three second opening / closing magnets 78 are at a common height position. The three second opening / closing magnets 78 are arranged at equal intervals in the circumferential direction Y on the circumference coaxial with the rotation axis A1. The three first opening / closing magnets 68 and the three second opening / closing magnets 78 are alternately arranged in the circumferential direction Y.

The magnetic pole directions of the three first opening / closing magnets 68 and the magnetic pole directions of the three second opening / closing magnets 78 are directions along the rotational radius direction of the spin base 51. The magnetic pole direction of each first opening / closing magnet 68 and the magnetic pole direction of each second opening / closing magnet 78 are opposite to each other. When the outer peripheral surface of the first opening / closing magnet 68 is, for example, N-pole, the outer peripheral surface of the second opening / closing magnet 78 has an S-polarity of opposite polarity. For example, it is the structure containing the cylinder provided so that expansion-contraction in the up-down direction was supported by the said cylinder. Moreover, the 2nd magnet raising / lowering unit 79 may be comprised using the electric motor. Further, the second magnet lifting unit 79 may include a plurality (for example, three) of individual lifting units that individually lift and lower the second opening / closing magnet 78.

The first opening / closing magnets 68 and the second opening / closing magnets 78 are alternately arranged in the circumferential direction Y at intervals of 60 °. The first clamping pins 52A and the second clamping pins 52B are also arranged in the circumferential direction Y at 60 ° intervals.
5A and 5B, the first opening / closing magnet 68 and the first clamping pin 52A are aligned in the circumferential direction Y (opposite each other). In this state, FIG. 5A shows a state where the first opening / closing magnet 68 is in the lower position, and FIG. 5B shows a state where the first opening / closing magnet 68 is in the upper position. As shown in FIG. 5A, when the first opening / closing magnet 68 is in the lower position, the magnetic force from the first opening / closing magnet 68 does not act on the first driving magnet 66. Therefore, the first drive magnet 66 is disposed so that, for example, the north pole faces inward in the rotational radius direction and the south pole faces outward in the rotational radius direction. In this state, the first clamping pin 52A is located at the contact position. That is, in a state where the first opening / closing magnet 68 is in the lower position, the first holding portion 62 of the first holding pin 52A is disposed at the contact position.

  From the state shown in FIG. 5A, the first opening / closing magnet 68 is raised and disposed at the upper position. When the upper surface of the first opening / closing magnet 68 approaches the first driving magnet 66, a separation force is generated between the first opening / closing magnet 68 and the first driving magnet 66. Therefore, the first clamping pin 52 </ b> A rotates about the rotation axis A <b> 3 against the repulsive magnetic force of the first urging magnet 67. Thereby, the 1st clamping part 62 moves to a separation position from a contact position. That is, in a state where the first opening / closing magnet 68 is in the upper position, the first holding portion 62 of the first holding pin 52A is disposed in the separated position.

  6A and 6B, the second opening / closing magnet 78 and the second clamping pin 52B are aligned in the circumferential direction Y (opposite each other). In this state, FIG. 6A shows a state where the second opening / closing magnet 78 is in the lower position, and FIG. 6B shows a state where the second opening / closing magnet 78 is in the upper position. As shown in FIG. 5A, in the state where the second opening / closing magnet 78 is in the lower position, the magnetic force from the second opening / closing magnet 78 does not act on the second driving magnet 76. Therefore, the second drive magnet 76 is disposed, for example, such that the south pole faces inward in the rotational radius direction and the north pole faces outward in the rotational radius direction. In this state, the second clamping pin 52B is located at the contact position. That is, in a state where the second opening / closing magnet 78 is in the lower position, the second holding portion 72 of the second holding pin 52B is arranged at the contact position.

  From the state shown in FIG. 6A, the second opening / closing magnet 78 is raised and disposed at the upper position. When the upper surface of the second opening / closing magnet 78 approaches the second driving magnet 76, a separation force is generated between the second opening / closing magnet 78 and the second driving magnet 76. Therefore, the second clamping pin 52 </ b> B rotates about the rotation axis A <b> 4 against the repulsive magnetic force of the second urging magnet 77. Thereby, the 2nd clamping part 72 moves to a separation position from a contact position. That is, in a state where the second opening / closing magnet 78 is in the upper position, the second holding portion 72 of the second holding pin 72A is disposed in the separated position.

  FIG. 7A to FIG. 12B are schematic views showing the states of the first clamping unit 55 and the second clamping unit 56. 7A, 8A, 9A, 10A, 11A, and 12A, the first driving magnet 66, the second driving magnet 76, the first biasing magnet 67, the second biasing magnet 77, The states of the first opening / closing magnet 68 and the second opening / closing magnet 78 are shown, and FIGS. 10B, 11B, 12B, 13B, 14B, 15B show the opening / closing states of the holding pins 52A, 52B. Here, the reason why the opening / closing magnet 67 and / or the opening / closing magnet 78 is not shown in the plan view is that the opening / closing magnet 67 is retracted downward.

  7A and 7B, the first opening / closing magnet 68 and the second opening / closing magnet 78, and the first holding pin 52A and the second holding pin 52B are aligned in the circumferential direction Y (opposing each other). The first opening / closing magnet 68 and the second opening / closing magnet 78 are both in the upper position. In this state, as shown in FIG. 7B, each of the three first sandwiching pins 52A and the three second sandwiching pins 52B has a sandwiching section (the first sandwiching section 62 and the second sandwiching section 72). An open state (open) located in the separated position is exhibited.

  8A and 8B, the first opening / closing magnet 68 and the second opening / closing magnet 78, and the first holding pin 52A and the second holding pin 52B are aligned in the circumferential direction Y (opposing each other). The first opening / closing magnet 68 and the second opening / closing magnet 78 are both in the lower position. In this state, as shown in FIG. 7B, each of the three first sandwiching pins 52A and the three second sandwiching pins 52B has a sandwiching section (the first sandwiching section 62 and the second sandwiching section 72). The closed state (close) located in the clamping position is exhibited.

  9A and 9B and FIGS. 10A and 10B, the first opening / closing magnet 68 and the second opening / closing magnet 78, and the first holding pin 52A and the second holding pin 52B are aligned in the circumferential direction Y, respectively. The first opening / closing magnet 68 is in the upper position and the second opening / closing magnet 78 is in the lower position. 9A and 9B show the spin base 51 in a non-rotating state, and FIGS. 10A and 10B show the spin base 51 in a rotating state. Regardless of the rotation / non-rotation of the spin base 51, the three first holding pins 52A exhibit an open state in which the first holding portion 62 is located at the separated position, and the three second holding pins 52A. The clamping pin 52B exhibits a closed state (close) in which the second clamping unit 72 is located at the contact position.

  11A and 11B and FIGS. 12A and 12B, the first opening / closing magnet 68 and the second opening / closing magnet 78, and the first holding pin 52A and the second holding pin 52B are aligned in the circumferential direction Y, respectively. The first opening / closing magnet 68 is in the lower position and the second opening / closing magnet 78 is in the upper position. 11A and 11B show the spin base 51 in a non-rotating state, and FIGS. 12A and 12B show the spin base 51 in a rotating state. Regardless of the rotation / non-rotation of the spin base 51, the three first clamping pins 52A exhibit a closed state in which the first clamping part 62 is located at the contact position, and the second clamping part 72 is An open state (open) located in the separated position is exhibited.

FIG. 13 is a block diagram for explaining an electrical configuration of a main part of the substrate processing apparatus 1.
The control device 3 is configured using, for example, a microcomputer. The control device 3 includes an arithmetic unit such as a CPU, a fixed memory device, a storage unit such as a hard disk drive, and an input / output unit. The storage unit stores a program executed by the arithmetic unit.

  Further, the control device 3 performs the spin motor 54, the first magnet lifting unit 69, the second magnet lifting unit 79, the blocking plate rotating unit 49, the blocking member lifting unit 50, and the nozzle moving unit 20 in accordance with a predetermined program. , 30 etc. are controlled. Further, the control device 3 opens and closes the sulfuric acid valve 24, the hydrogen peroxide solution valve 26, the SC1 valve 33, the gas valve 35, the rinse liquid valve 45, the inert gas valve 48, and the like according to a predetermined program.

  FIG. 14 is a flowchart for explaining an example of substrate processing by the processing unit 2. FIG. 15 is a timing chart for explaining the second rinsing step S6 and the spin dry step S7. 16A to 16G are schematic diagrams for explaining each process of the substrate processing example. A substrate processing example will be described with reference to FIGS. 15 and 16A to 16G will be referred to as appropriate.

  This substrate processing example is a resist removal process for removing the resist from the upper surface of the substrate W. The resist is mainly composed of a resin (polymer), a photosensitive agent, an additive, and a solvent. When the substrate processing example is performed on the substrate W by the processing unit 2, the substrate W after the ion implantation processing at a high dose is carried into the chamber 4 (S1 in FIG. 14). It is assumed that the substrate W has not undergone a process for ashing the resist.

The control device 3 moves the hand H (see FIG. 1) of the substrate transport robot CR (see FIG. 1) holding the substrate W in the chamber 4 while all the nozzles and the like are retracted from above the spin chuck 5. By entering the inside, the substrate W is delivered to the spin chuck 5 with its surface facing upward.
The control device 3 controls the first magnet lifting unit 69 and the second magnet lifting unit 79 to move the first opening / closing magnet 68 and the second opening / closing magnet 78 from the upper position to the lower position. Lower and hold in the down position. Thereby, all of the first clamping unit 62 and the second clamping unit 72 are driven from the separated position to the contact position and are held at the contact position. As a result, the substrate W is sandwiched between the three first sandwiching pins 52A and the three second sandwiching pins 52B (both sandwiched states).

The control device 3 starts the rotation of the substrate W by the spin motor 54 (S2 in FIG. 14). The substrate W is raised to a predetermined liquid processing speed (within 300 to 1500 rpm, for example, 500 rpm) and maintained at the liquid processing speed.
When the rotation speed of the substrate W reaches the liquid processing speed, the control device 3 executes a sulfuric acid-containing liquid process (chemical liquid process) S3 as shown in FIG. 16A.

Specifically, the control device 3 controls the nozzle moving unit 20 to move the sulfuric acid-containing liquid nozzle 18 from the retracted position to the processing position. Further, the control device 3 opens the sulfuric acid valve 24 and the hydrogen peroxide water valve 26 at the same time. As a result, H ₂ SO ₄ is supplied to the sulfuric acid-containing liquid nozzle 18 through the sulfuric acid pipe 23, and H ₂ O ₂ is supplied to the sulfuric acid-containing liquid nozzle 18 through the hydrogen peroxide water pipe 25. H ₂ SO ₄ and H ₂ O ₂ are mixed inside the sulfuric acid-containing liquid nozzle 18, and high temperature (for example, 160 to 220 ° C.) SPM is generated. The SPM is discharged from the discharge port of the sulfuric acid-containing liquid nozzle 18 and reaches the central portion of the surface of the substrate W.

  The SPM discharged from the sulfuric acid-containing liquid nozzle 18 lands on the surface of the substrate W and then flows outward along the surface of the substrate W by centrifugal force. Therefore, SPM is supplied to the entire surface of the substrate W, and an SPM liquid film covering the entire surface of the substrate W is formed on the substrate W. As a result, the resist and the SPM chemically react, and the resist on the substrate W is removed from the substrate W by the SPM. The SPM that has moved to the peripheral edge of the substrate W is scattered from the peripheral edge of the substrate W toward the side of the substrate W, and is processed after being received by the processing cup 11.

  Further, in the sulfuric acid-containing liquid step S3, the control device 3 controls the nozzle moving unit 20 so that the sulfuric acid-containing liquid nozzle 18 is positioned at the peripheral position facing the peripheral edge of the surface of the substrate W and the center of the upper surface of the substrate W You may make it move between the center positions which oppose a part. In this case, the SPM liquid deposition position on the upper surface of the substrate W is scanned over the entire upper surface of the substrate W. Thereby, the entire upper surface of the substrate W can be processed uniformly.

When a predetermined period has elapsed since the start of the SPM discharge, the control device 3 closes the sulfuric acid valve 24 and the hydrogen peroxide solution valve 26 and stops the SPM discharge from the sulfuric acid-containing liquid nozzle 18. Thereby, sulfuric-acid containing liquid process S3 is complete | finished. Thereafter, the control device 3 controls the nozzle moving unit 20 to return the sulfuric acid-containing liquid nozzle 18 to the retracted position.
In the sulfuric acid-containing liquid process S3, the high-temperature SPM falls on the first sandwiching pin 52A and the second sandwiching pin 52B that sandwich the substrate W. Since this SPM contains sulfuric acid and has a high temperature (for example, 160 to 220 ° C.), there is a possibility that the first sandwiching pin 52A and the second sandwiching pin 52B including the resin material may permeate. In particular, since the resin member that is the base material of the first holding pin 52A and the second holding pin 52B contains carbon fiber, the carbon fiber is detached from the resin member over time, and a void is formed in the resin member. There is a risk of being. When the SPM enters the gap, the chemical solution soaks into the first holding part and the second holding part.

  Next, as shown in FIG. 16B, a first rinsing step (S4 in FIG. 14) is performed in which the SPM adhering to the surface of the substrate W is washed away using a rinsing liquid. Specifically, the control device 3 controls the blocking member lifting / lowering unit 50 so that the blocking member 8 disposed at the retracted position is moved to the rinse processing position (see FIG. 16B) set between the retracted position and the blocking position. To the rinsing position. Further, the control device 3 opens the rinse liquid valve 45. Thereby, the rinse liquid is discharged from the discharge port 9a of the central axis nozzle 9 toward the center of the surface of the substrate W rotating at the liquid processing speed. The rinse liquid discharged from the central axis nozzle 9 is deposited on the center of the surface of the substrate W covered with SPM. The rinsing liquid that has landed on the center of the surface of the substrate W receives the centrifugal force generated by the rotation of the substrate W and flows on the surface of the substrate W toward the peripheral edge of the substrate W. As a result, the SPM on the substrate W is washed away by the rinse liquid and discharged around the substrate W. As a result, the SPM and the resist (and the resist residue) are washed away over the entire surface of the substrate W. The rinse liquid that has moved to the peripheral edge of the substrate W is scattered from the peripheral edge of the substrate W toward the side of the substrate W, is received by the processing cup 11, and then processed.

When a predetermined period elapses from the start of the first rinsing step S4, the control device 3 closes the rinsing liquid valve 45 and stops the discharge of the rinsing liquid from the discharge port 9a of the central shaft nozzle 9. Moreover, the control apparatus 3 controls the interruption | blocking member raising / lowering unit 50, and raises the interruption | blocking member 8 to a retracted position.
Next, as shown in FIG. 16C, an SC1 process (S5 in FIG. 14) for cleaning the surface of the substrate W using SC1 is performed. Specifically, in the SC1 step S5, the control device 3 controls the nozzle moving unit 30 to move the SC1 nozzle 28 from the retracted position to the processing position. Thereafter, the control device 3 opens the SC1 valve 33 and the gas valve 35. As a result, as shown in FIG. 16C, the SC1 droplet jet is ejected from the SC1 nozzle 28. Further, the control device 3 controls the nozzle moving unit 30 in parallel with the ejection of the SC1 droplet jet from the SC1 nozzle 28 so that the SC1 nozzle 28 is positioned between the center position and the peripheral position of the substrate W. Move back and forth (half scan). Thereby, the SC1 liquid landing position from the SC1 nozzle 28 can be reciprocated between the center of the surface of the substrate W and the peripheral edge of the surface of the substrate W. Thereby, the entire area of the surface of the substrate W can be scanned for the liquid deposition position of SC1. By supplying SC1 to the surface of the substrate W, the resist residue can be removed from the surface of the substrate W. Further, the sulfur component can be removed from the surface of the substrate W by supplying SC1 to the surface of the substrate W.

When a predetermined period elapses from the start of the SC1 discharge, the control device 3 closes the SC1 valve 33 and the gas valve 35, and stops the discharge of the SC1 droplet jet from the SC1 nozzle 28. Thereby, SC1 process S5 is complete | finished. Thereafter, the control device 3 controls the nozzle moving unit 30 to return the SC1 nozzle 28 to the retracted position.
Next, as shown in FIG. 16D, a second rinsing step (S6 in FIG. 14) is performed in which SC1 adhering to the surface of the substrate W is washed away using a rinsing liquid. Specifically, the control device 3 controls the blocking member lifting / lowering unit 50 to lower the blocking member 8 disposed at the retracted position to the rinse processing position and hold it at the rinse processing position. Further, the control device 3 opens the rinse liquid valve 45. Thereby, the rinse liquid is discharged from the discharge port 9a of the central axis nozzle 9 toward the center of the surface of the substrate W rotating at the liquid processing speed. The rinse liquid discharged from the central axis nozzle 9 is deposited on the center of the surface of the substrate W covered with SC1. The rinsing liquid that has landed on the center of the surface of the substrate W receives the centrifugal force generated by the rotation of the substrate W and flows on the surface of the substrate W toward the periphery of the substrate W. As a result, the SC1 on the substrate W is washed away by the rinse liquid and discharged around the substrate W. As a result, the SC1 and the resist residue are washed away over the entire surface of the substrate W. The rinse liquid that has moved to the peripheral edge of the substrate W is scattered from the peripheral edge of the substrate W toward the side of the substrate W, is received by the processing cup 11, and then processed.

When a predetermined period has elapsed from the start of the second rinsing step S6, the control device 3 closes the rinsing liquid valve 45 and stops the discharge of the rinsing liquid from the discharge port 9a of the central shaft nozzle 9. Further, the control device 3 controls the blocking member lifting / lowering unit 50 to lower the blocking member 8 to the blocking position.
In the second rinsing step S6, in a state where the first clamping unit 62 and the second clamping unit 72 are in the clamping position, the peripheral edge of the substrate W, the first clamping unit 62, and the second clamping unit 72 Are in contact via a strong pressing force. However, even in such a state, the rinse liquid enters between the peripheral edge portion of the substrate W and the first and second sandwiching portions 62 and 72 by the action of the capillary force of the rinse solution. The rinsing liquid that has entered in this way is difficult to discharge. Therefore, at the end of the second rinsing step S6 or at the end of the second rinsing step S6, the rinsing liquid remains between the peripheral portion of the substrate W and the first and second holding portions 62 and 72.

Next, as shown in FIGS. 16E to 16G, a spin dry process (S7 in FIG. 14) for drying the substrate W is performed. In the spin dry step S7, the substrate W is rotated at a predetermined drying speed (for example, 1000 to several thousand rpm), so that the liquid is put around the substrate W by a large centrifugal force applied to the liquid adhering to the substrate W. It is a process of shaking off.
Specifically, the control device 3 controls the blocking member elevating unit 50 to lower the blocking member 8 toward the blocking position and hold it at the blocking position. In this state, the control device 3 controls the shield plate rotation unit 49 to rotate the shield plate 41 around the rotation axis A2 in synchronization with the substrate W. Further, the control device 3 opens the inert gas valve 48 and discharges the inert gas from the discharge port 9a. In this state, the control device 3 controls the spin motor 54 to accelerate the rotation of the substrate W to the drying speed and maintain it at the drying speed. Thereby, a large centrifugal force is applied to the liquid on the substrate W, and the liquid adhering to the substrate W is shaken off around the substrate W.

  By the way, at the end of the second rinsing step S6 or at the end of the second rinsing step S6, the rinsing liquid remaining between the peripheral edge portion of the substrate W and the first holding portion 62 and the second holding portion 72 is removed. May contain SPM. This is considered to be caused by the SPM soaked into the resin member of the first sandwiching pin 52A and the second sandwiching pin 52B soaking into the rinse liquid. In this state, if the spin dry process (S7 in FIG. 14) described below is executed, there is a possibility that particle contamination occurs on the surface of the substrate W. In order to prevent the occurrence of such particle contamination, the spin drying step S7 is performed as follows.

  Specifically, the control device 3 controls the spin motor 54 to accelerate the rotation of the substrate W to the first drying speed V1 (for example, in the range of 800 to 2500 rpm, for example, 1500 rpm), and the first drying speed. V1 is maintained (first spin dry process). The first drying speed V1 is a speed at which the liquid on the substrate W can be shaken out around the substrate W, but is relatively low. Therefore, there is a problem that if the substrate W is rotated at the first drying speed V1 over the entire period of the spin drying step S7, it takes a long time.

  As shown in FIG. 15, the control device 3 is in parallel with the initial stage of the spin dry step S7 (the state in which the rinsing liquid is attached to the surface of the substrate W and the first holding unit 62 and the second holding unit 72). The first holding unit 55 (three first holding pins 52A) holds the substrate W and the second holding unit 56 does not hold the substrate W (see FIG. 16E), A second clamping state (see FIG. 16F) in which the substrate W is sandwiched by the first sandwiching unit 56 (three second sandwiching pins 52B) and the substrate W is not sandwiched by the first sandwiching unit 55 is sequentially executed.

  Specifically, at the same time as the start of rotation of the substrate W at the first drying speed V1 or when a predetermined period has elapsed from the start of rotation of the substrate W at the first drying speed V1, the control device 3 The second magnet lifting / lowering unit 79 is controlled so that the second opening / closing magnet 78 that has been in the lower position is raised toward the upper position and held in the upper position. Thereby, the 2nd clamping part 72 of the 2nd clamping pin 52B moves to a separation | spacing position from a contact position. Thereby, the first clamping state as described above is realized. And in this state, it is maintained for a predetermined first period Te1 (first clamping step T1). During the first period Te1, when the spin base 51, the first holding pin 52A, and the second holding pin 52B are rotated at the first drying speed V1, the first holding pin 52A and the second holding pin It is set to a period sufficient for the liquid adhering to 52B to shake off (for example, about 3 seconds).

  In the first clamping step T1, the second clamping parts 72 rotate around the rotation axis A1 while the second clamping parts 72 are separated from the peripheral edge of the substrate W. Therefore, a large centrifugal force accompanying the rotation of the substrate W acts on the rinse liquid adhering to the second clamping unit 72 before the start of the first clamping process T1. Thereby, the rinse liquid is shaken off from the second clamping unit 72. Therefore, at the end of the first clamping step T1, the second clamping unit 72 is dry.

  When a first period Te1 (for example, about 3 seconds) elapses from the realization of the first clamping state, the control device 3 controls the second magnet lifting unit 79 to place the second opening / closing magnet 78 in the lower position. Is lowered and held in the lower position. Thereby, the 2nd clamping part 72 of the 2nd clamping pin 52B moves to a contact position from a separation position. Thereby, the both clamping state which clamps the board | substrate W with the six clamping pins 52A and 52B is implement | achieved (1st transition process).

  Thereafter, the control device 3 controls the first magnet lifting / lowering unit 69 to raise the first opening / closing magnet 68 which has been in the lower position so far toward the upper position, and holds the first opening / closing magnet 68 in the upper position. Thereby, the 1st clamping part 62 of 52 A of 1st clamping pins moves to a separation position from a contact position. Thereby, the 2nd clamping state as mentioned above is implement | achieved (2nd transition process). And in this state, it is maintained for a predetermined second period Te2 (second clamping step T2). During the second period Te2, when the spin base 51, the first holding pin 52A, and the second holding pin 52B are rotated at the first drying speed V1, the first holding pin 52A and the second holding pin It is set to a period sufficient for the liquid adhering to 52B to shake off (for example, about 3 seconds).

  In the second clamping step T2, the first clamping parts 62 rotate around the rotation axis A1 while the first clamping parts 62 are separated from the peripheral edge of the substrate W. Therefore, a large centrifugal force accompanying the rotation of the substrate W acts on the rinse liquid adhering to the first clamping unit 62 before the start of the second clamping process T2. Thereby, the rinse liquid is shaken off from the first clamping unit 62. Therefore, at the end of the second clamping step T2, the first clamping unit 62 is dry.

  When a second period Te2 (for example, about 3 seconds) elapses from the realization of the second clamping state, the control device 3 controls the first magnet lifting unit 69 to move the first opening / closing magnet 68 to the lower position. Is lowered and held in the lower position. Thereby, the 1st clamping part 62 of 52 A of 1st clamping pins moves to a contact position from a separation position. Thus, as shown in FIG. 16G, a both-clamping state in which the substrate W is clamped by the six clamping pins 52A and 52B is realized (both clamping process T3).

  At this time, the first sandwiching portion 62 that is already dried contacts the peripheral portion of the substrate W. At this time, there is no rinsing liquid between the first clamping part 62 and the peripheral edge of the substrate W in both clamping processes T3. That is, in both clamping processes T3, the substrate W can be clamped by the first clamping unit 55 without causing the rinse liquid to exist between the first clamping unit 62 and the peripheral edge of the substrate W.

  Thereafter, the control device 3 controls the spin motor 54 to rotate the substrate W at a second drying speed V2 that is faster than the first drying speed V1 (for example, in the range of about 1200 to about 2000 rpm, for example, about And is maintained at the second drying speed V2 (second spin drying step). As a result, an even greater centrifugal force is applied to the liquid on the substrate W, and the liquid adhering to the substrate W is shaken off around the substrate W. In this way, the liquid is removed from the substrate W, and the substrate W is dried.

  When a predetermined period has elapsed since the start of the spin drying step S7, the control device 3 controls the spin motor 54 to stop the rotation of the substrate W by the spin chuck 5 (S8 in FIG. 14). Further, the control device 3 controls the shield plate rotation unit 49 to stop the rotation of the shield plate 41. Further, the control device 3 controls the blocking member lifting / lowering unit 50 to raise the blocking member 8 and retract it to the retracted position.

  Next, the substrate W is unloaded from the chamber 4 (S9 in FIG. 14). First, the control device 3 releases the clamping by the first clamping pin 52A and the second clamping pin 52B. Specifically, the control device 3 controls the first magnet lifting unit 69 and the second magnet lifting unit 79 to move the first opening / closing magnet 68 and the second opening / closing magnet 78 from the lower position. Ascend toward the upper position and hold in the upper position. As a result, all of the first clamping unit 62 and the second clamping unit 72 are driven from the contact position to the separation position and are held at the separation position. Thereby, the holding of the substrate W by the three first holding pins 52A and the three second holding pins 52B is released.

  Further, the control device 3 causes the hand H of the substrate transport robot CR to enter the chamber 4. And the control apparatus 3 hold | maintains the board | substrate W by which clamping by the clamping pins 52A and 52B was cancelled | released in the hand H of the board | substrate conveyance robot CR. Thereafter, the control device 3 retracts the hand H of the substrate transport robot CR from the chamber 4. Thereby, the substrate W from which the resist is removed from the surface (pattern forming surface) is carried out of the chamber 4.

As described above, according to one embodiment of the present invention, in parallel with the initial stage of the spin dry step S7, the first holding unit 55 holds the substrate W and the second holding unit 56 does not hold the substrate W. 1 is maintained (first clamping step T1). In the first clamping state, each second clamping part 72 is separated from the peripheral edge part of the substrate W.
In the first clamping step T1, the second clamping parts 72 rotate around the rotation axis A1 while the second clamping parts 72 are separated from the peripheral edge of the substrate W. Therefore, even if the rinsing liquid adheres to the second clamping part 72 before the start of the first clamping process T1, the rinsing liquid adhering to the second clamping part 72 increases with the rotation of the substrate W. Centrifugal force acts, whereby the rinse liquid is shaken off from the second sandwiching portion 72. Therefore, at the end of the first clamping step T1, the second clamping unit 72 is dry.

  After the first clamping step T1, the second clamping state in which the substrate W is clamped by the second clamping unit 56 and the substrate W is not clamped by the first clamping unit 55 is maintained in parallel with the spin drying step S7. (Second clamping step T2). In the second clamping state, each first clamping part 62 is separated from the peripheral part of the substrate W, and each second clamping part 72 is in contact with the peripheral part of the substrate W.

Since the already-dried second sandwiching portion 72 contacts the peripheral portion of the substrate W, a rinsing liquid is provided between the second sandwiching portion 72 and the peripheral portion of the substrate W in the second sandwiching step T2. Does not exist. That is, in the second sandwiching step T2, the substrate W can be sandwiched by the second sandwiching unit 56 without the rinsing liquid being present between the second sandwiching portion 72 and the peripheral portion of the substrate W.
Further, in the second clamping step T2, the first clamping unit 62 rotates around the rotation axis A1 while the first clamping units 62 are separated from the peripheral edge of the substrate W. Therefore, even if the rinsing liquid adheres to the first clamping part 62 before the start of the second clamping process T2, the rinsing liquid adhering to the first clamping part 62 increases with the rotation of the substrate W. Centrifugal force acts, whereby the rinse liquid is shaken off from the first clamping unit 62. Therefore, at the end of the second clamping step T2, the first clamping unit 62 is dry.

  Thereafter, in both clamping steps T3, when the substrate W is sandwiched by the second sandwiching unit 56, the first sandwiching portion 62 that has already been dried comes into contact with the peripheral portion of the substrate W. At this time, there is no rinsing liquid between the first clamping part 62 and the peripheral edge of the substrate W in both clamping processes T3. That is, in both clamping processes T3, the substrate W can be clamped by the first clamping unit 55 without causing the rinse liquid to exist between the first clamping unit 62 and the peripheral edge of the substrate W.

Accordingly, the spin dry step S7 is performed while suppressing or preventing the rinsing liquid from remaining between the first sandwiching portion 62 and the peripheral portion of the substrate W and between the second sandwiching portion 72 and the peripheral portion of the substrate W. Can be executed. Therefore, the occurrence of particle contamination can be suppressed or prevented.
In addition, since the first clamping process T1 is started after the start of the spin dry process S7 (that is, executed in parallel with the spin dry process S7), the second sandwiching process T1 is separated from the peripheral edge of the substrate W. There is no possibility that the rinsing liquid from the substrate W falls on the sandwiching portion 72. Further, in this case, since the rotation speed of the substrate W is high enough to shake off the rinsing liquid, it acts on each of the second holding portions 72 rotating while being separated from the peripheral edge portion of the substrate W in the first holding step T1. The centrifugal force is large. Thereby, in the 1st clamping process T1, the 2nd clamping part 72 can be dried more favorably.

As mentioned above, although one Embodiment of this invention was described, this invention can also be implemented with another form.
For example, as in the first modification example shown in FIG. 17, after the second clamping step T2, the first clamping step T1 and the second clamping step T2 are executed again in parallel with the spin dry step S7. You may do it. FIG. 17 shows a case where a total of two pairs of the first clamping step T1 and the second clamping step T2 are performed, but a total of three or more pairs may be performed. By performing the first clamping step T1 and the second clamping step T2 a plurality of times, between the first clamping unit 62 and the peripheral portion of the substrate W, and between the second clamping unit 72 and the peripheral portion of the substrate W, The spin dry step S7 can be executed while further effectively suppressing the remaining of the rinse liquid during Therefore, the occurrence of particle contamination can be suppressed more effectively.

Further, as in the second modification example shown in FIG. 18, the first clamping step T1 may be started before the end of the second rinsing step S6, not after the start of the spin dry step S7. Good.
Further, as in the third modification example shown in FIG. 19, the rotation speed of the substrate W is lower than the first drying speed V1 when switching from the first clamping process T1 to the second clamping process T2. It may be once lowered to a switching speed (for example, about 200 rpm). In this case, the switching from the first clamping step T1 to the second clamping step T2 can be performed without applying a large load to the first clamping unit 55 and the second clamping unit 56.

Further, as in the fourth modification example shown in FIG. 20, the substrate is kept at the first drying speed V1 without increasing the rotation of the substrate W to the second drying speed V2 in parallel with the both clamping steps T3. W may continue to rotate.
Also, the first to fourth modification processing examples can be appropriately combined.
Further, in the substrate processing example and the first to fourth modification processing examples shown in FIGS. 14 and 15, the second clamping step is performed in parallel with the spin dry step S7 after the final second clamping step T2. T2 may continue to be maintained.

  Further, in the substrate processing example and the first to fourth modified processing examples shown in FIGS. 14 and 15, the first period Te1 and the second clamping step T2 for executing the first clamping step T1 are executed. It is assumed that the second period Te2 is a period sufficient for the liquid adhering to the first clamping pin 52A and the second clamping pin 52B to shake off. The period may be such that the liquid is removed to such an extent that the chemical component contained in the rinse liquid attached to the pinching pins 52A and 52B is not transferred.

  Further, in the substrate processing examples shown in FIGS. 14 and 15 and the first to fourth modified processing examples, a first charge removal liquid supply step for supplying a charge removal solution to the surface of the substrate W prior to the sulfuric acid-containing solution step S3. May be executed. The neutralizing liquid is, for example, carbonated water. In this case, the occurrence of electrostatic discharge due to the carry-in charging of the substrate W can be effectively suppressed. When carbonated water is used as the rinsing liquid, carbonated water from a common carbonated water supply unit may be used as the first charge eliminating liquid supply step.

In the above-described substrate processing example, a first cleaning step of cleaning the surface of the substrate W with the first cleaning chemical may be performed prior to the sulfuric acid-containing liquid step S3. An example of such first cleaning chemical solution is hydrofluoric acid (HF).
Further, in the above-described substrate processing example, a hydrogen peroxide solution supplying process for supplying H ₂ O ₂ to the upper surface (front surface) of the substrate W is performed prior to the first rinsing process S4 after the sulfuric acid-containing liquid process S3. May be. In this case, the control device 3 closes only the sulfuric acid valve 24 while keeping the hydrogen peroxide solution valve 26 open. As a result, only H ₂ O ₂ is supplied to the sulfuric acid-containing liquid nozzle 18, and H ₂ O ₂ is discharged from the discharge port of the sulfuric acid-containing liquid nozzle 18. The thermal influence on the hydrogen peroxide solution supply process can be mitigated, and the sulfur component remaining (S remaining) on the surface of the substrate W can be prevented or suppressed. Further, when the hydrogen peroxide solution supply process is provided, the SC1 process can be abolished.

  Prior to the spin drying step S7, an organic solvent (drying liquid) having a low surface tension such as IPA (isopropyl alcohol) is supplied to replace the rinsing liquid on the upper surface of the substrate W with the organic solvent. A process may be performed. Further, the step of replacing the supplied organic solvent with the water repellent and forming the water repellent film on the upper surface of the substrate W may be performed after the organic solvent replacement step.

Further, the first clamping step T1 and the second clamping step T2 are executed not only in the period from the end of the second rinsing step S6 to the spin dry step S7, but also in the beginning and middle of the second rinsing step S6. You may do it.
Further, in the substrate processing example of FIG. 14, the resist removal process has been described as an example, but the process is not limited to the resist, and may be a process of removing other organic substances using SPM.

Further, the nozzle for discharging the rinsing liquid may be provided in a separate member from the blocking member 8 instead of the central axis nozzle 9 integrated with the blocking member 8.
In addition, the first clamping unit 55 and the second clamping unit 56 have been described as including the three clamping pins 52A and 52B, respectively, but may include four or more clamping pins 52A and 52B, respectively. .

Further, as a spin chuck 5 that can switch the holding state of the substrate W between the first holding state and the second holding state, as shown in JP-A-2004-111902, a mechanical structure such as a link structure is used. It is also possible to employ a method of switching between the first clamping state and the second clamping state using.
In the above-described embodiment, the sulfuric acid-containing liquid supply unit 6 is described as an example of a nozzle mixing type in which H ₂ SO ₄ and H ₂ O ₂ are mixed inside the sulfuric acid-containing liquid nozzle 18. In addition, a mixing part connected via a pipe is provided on the upstream side of the sulfuric acid-containing liquid nozzle 18, and a pipe mixing type in which mixing of H ₂ SO ₄ and H ₂ O ₂ is performed in this mixing part is adopted. You can also.

Further, the sulfuric acid-containing liquid supplied to the surface of the substrate W in the sulfuric acid-containing liquid step S3 may be sulfuric acid (concentrated sulfuric acid) or SOM (sulfuric acid ozone (a liquid in which ozone is dispersed in sulfuric acid)) in addition to SPM. Good. Further, the sulfuric acid-containing liquid supplied to the surface of the substrate W in the chemical liquid process is not limited to the sulfuric acid-containing liquid, but may be other chemical liquids.
Further, the substrate processing example may not include the sulfuric acid-containing liquid step S3. For example, even when the sulfuric acid-containing liquid step S3 is not included, in the processing unit 2, when the treatment is performed using the sulfuric acid-containing liquid in the past, at the end of the rinsing process or at the end of the rinsing process, The rinsing liquid remaining between the first holding pin 52A and the second holding pin 52B and the peripheral portion of the substrate W contains a sulfuric acid-containing liquid or the like. In this case, the present invention can be suitably applied.

  In the above-described embodiment, the case where the substrate processing apparatus 1 is an apparatus for processing the surface of the substrate W made of a semiconductor wafer has been described. However, the substrate processing apparatus is a substrate for a liquid crystal display, an organic EL (electroluminescence) display. Even devices that process substrates such as FPD (Flat Panel Display) substrates, optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, photomask substrates, ceramic substrates, solar cell substrates, etc. Good.

  In addition, various design changes can be made within the scope of matters described in the claims.

1: substrate processing device 2: processing unit 3: control device 5: spin chuck (substrate holding and rotating device)
10: Rinse solution supply unit 54: Spin motor (rotary unit)
55: 1st clamping unit 56: 2nd clamping unit 57: 1st opening / closing unit (clamping drive unit)
58: Second opening / closing unit (clamping drive unit)
62: 1st clamping part 72: 2nd clamping part A1: Rotation axis line Te1: 1st period Te2: 2nd period V1: 2nd drying speed V2: 2nd drying speed W: Substrate Y: Circumference direction

Claims (20)

A first clamping unit that has at least three first clamping parts that can come into contact with the peripheral edge of the substrate, and that holds the substrate by contacting the peripheral edge of the substrate with the at least three first clamping parts. And at least three second sandwiching portions that are provided separately from the first sandwiching unit and are capable of contacting the periphery of the substrate, and the at least three second sandwiching portions are the periphery of the substrate. A substrate processing method that is executed in a substrate processing apparatus including a substrate holding and rotating device that includes a second clamping unit that clamps the substrate by contacting the substrate, and performing a process using a chemical solution on the substrate. And
A rinsing step of supplying a rinsing liquid to the main surface of the substrate while rotating the substrate held by the substrate holding and rotating device around a rotation axis passing through a central portion of the substrate;
A spin drying step of rotating the substrate around the rotation axis at a swing-off speed at which the rinse liquid can be shaken off from the main surface of the substrate without supplying a rinse liquid to the main surface of the substrate;
In parallel with at least one of the rinsing step and the spin drying step, the at least three first holding portions are separated from the peripheral portion of the substrate while the at least three second holding portions are separated from the peripheral portion of the substrate. Is brought into contact with the first holding unit to realize a first holding state in which the substrate is not held by the second holding unit, and the first holding state is set to a predetermined first. A first clamping step for maintaining the period of
After the first clamping step, in parallel with the spin drying step, the at least three second clamping portions are placed on the substrate while separating the at least three first clamping portions from the peripheral edge of the substrate. By bringing the substrate into contact with the peripheral edge, the second holding unit holds the substrate and realizes a second holding state in which the substrate is not held by the first holding unit. A substrate processing method including a second clamping step of maintaining the second period.   The method further includes a chemical solution step of supplying a chemical solution to the main surface of the substrate while rotating the substrate held by the substrate holding and rotating device around the rotation axis before the rinsing step. The substrate processing method as described.   The substrate processing method according to claim 2, wherein the chemical solution includes a sulfuric acid-containing solution. The first period is a period in which the rinsing liquid can be shaken off from the at least three first holding parts,
The substrate processing method according to claim 1, wherein the second period is a period in which the rinsing liquid can be shaken off from the at least three second holding portions. In the first clamping state, by bringing the at least three second clamping parts spaced apart from the peripheral part of the substrate into contact with the peripheral part of the substrate, the first clamping state causes the first clamping state to occur. A first transition step of transitioning to a sandwiching state in which the substrate is sandwiched by the sandwiching unit and the second sandwiching unit;
In the both sandwiched state, the at least three first sandwiching portions that are in contact with the peripheral portion of the substrate are separated from the peripheral portion of the substrate, thereby transitioning from the both sandwiched state to the second sandwiched state. The substrate processing method as described in any one of Claims 1-4 further including the 2nd transition process to perform.   After the second clamping step, in parallel with the spin dry step, further includes a both clamping step for realizing a both clamping state in which the substrate is clamped by the first clamping unit and the second clamping unit. The substrate processing method as described in any one of Claims 1-5. The spin dry process includes
In parallel with the first clamping step and the second clamping step, the substrate is rotated around the rotation axis at a first drying speed capable of shaking off the rinse liquid from the main surface of the substrate. Spin drying process of
In parallel with the both sandwiching steps, the substrate can be rinsed from the main surface of the substrate with the rinsing liquid shaken, and rotated about the rotation axis at a second drying speed higher than the first drying speed. The substrate processing method of Claim 6 including 2 spin dry processes.   The substrate processing method according to claim 1, wherein the first clamping step is executed in parallel with the spin dry step.   The said 1st clamping process and the said 2nd clamping process are performed again after the said 2nd clamping process in parallel with the said spin dry process, As described in any one of Claims 1-8. Substrate processing method. A substrate processing apparatus for performing a process using a chemical on a substrate,
A first sandwiching unit having at least three first sandwiching portions that can contact a peripheral edge of the substrate, and capable of sandwiching the substrate by the at least three first sandwiching portions; A second clamping unit that is provided separately from the clamping unit, has at least three second clamping units that can contact the peripheral edge of the substrate, and is capable of clamping the substrate by the at least three second clamping units. Two clamping units, a rotation unit that rotates the first clamping unit and the second clamping unit around a rotation axis that passes through the center of the substrate, the first clamping unit, and the second clamping unit A substrate holding and rotating device including a clamping drive unit that drives the unit;
A rinsing liquid supply unit for supplying a rinsing liquid to the main surface of the substrate held by the substrate holding and rotating device;
A control device for controlling the rotation unit, the clamping drive unit and the rinse liquid supply unit;
While the control device rotates the substrate held by the substrate holding and rotating device around the rotation axis passing through the central portion of the substrate by the rotation unit, the rinse liquid supply unit causes the main surface of the substrate to be rotated. A rinsing step of supplying a rinsing liquid, and a swinging speed at which the rinsing liquid can be shaken off from the main surface of the substrate by the rotating unit without supplying the rinsing liquid to the main surface of the substrate. In parallel with at least one of the spin drying step of rotating around the rotation axis, the rinsing step and the spin drying step, the nip driving unit is configured to shake off the rinsing liquid from the at least three second nip portions. The at least three second holding portions are separated from the peripheral edge of the substrate while the at least three second holding portions are separated from each other. A first holding state in which the substrate is held by the first holding unit and the substrate is not held by the second holding unit by bringing one holding portion into contact with the peripheral edge of the substrate; In order to shake off the rinsing liquid from the at least three first clamping portions in parallel with the spin-drying process after the first clamping process for maintaining the first clamping state for a predetermined period and the first clamping process. Further, the at least three second sandwiching portions are brought into contact with the peripheral portion of the substrate while the at least three first sandwiching portions are separated from the peripheral portion of the substrate by the sandwiching drive unit. A second holding state in which the board is held by the two holding units and the board is not held by the first holding unit, and the second holding state is maintained for a predetermined period. Performing a second holding step of lifting, the substrate processing apparatus.   Prior to the rinsing step, the control device further executes a chemical solution step of supplying a chemical solution to the main surface of the substrate while rotating the substrate held by the substrate holding and rotating device around the rotation axis. The substrate processing apparatus according to claim 10.   The substrate processing apparatus according to claim 11, wherein the chemical solution includes a sulfuric acid-containing solution. The first period is a period in which the rinsing liquid can be shaken off from the at least three first holding parts,
The substrate processing apparatus according to claim 10, wherein the second period is a period in which the rinsing liquid can be shaken off from the at least three second holding portions.   In the first clamping state, the control device brings the at least three second clamping parts spaced apart from the peripheral part of the substrate into contact with the peripheral part of the substrate, whereby the first clamping state From the first transition step in which the substrate is sandwiched by the first sandwiching unit and the second sandwiching unit, and in the sandwiching state, the substrate is in contact with the peripheral portion of the substrate. The second transition step of making a transition from the both sandwiched states to the second sandwiched state by further separating the at least three first sandwiched portions from the peripheral edge of the substrate is further executed. The substrate processing apparatus according to claim 13.   Both sandwiching which realizes a sandwiching state in which the control device sandwiches the substrate by the first sandwiching unit and the second sandwiching unit in parallel with the spin dry process after the second sandwiching process. The substrate processing apparatus as described in any one of Claims 10-14 which performs a process further.   In the spin dry process, the control device can swing the rinse liquid from the main surface of the substrate in parallel with the first sandwiching process and the second sandwiching process. In parallel with the first spin-drying step of rotating around the rotation axis at a speed and the both clamping steps, the rinse liquid can be shaken off from the main surface of the substrate, and the first drying speed The substrate processing apparatus according to claim 15, wherein a second spin drying step of rotating about the rotation axis at a faster second drying speed is performed.   The substrate processing apparatus according to claim 10, wherein the control device executes the first clamping process in parallel with the spin dry process.   18. The control device according to claim 10, wherein after the second clamping process, the first clamping process and the second clamping process are executed again in parallel with the spin dry process. 2. The substrate processing apparatus according to 1.   The substrate processing apparatus according to claim 10, wherein the first clamping unit and the second clamping unit include a resin member.   The substrate processing apparatus according to claim 19, wherein the resin member contains carbon.

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