JP2019204673A5 - - Google Patents

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Publication number
JP2019204673A5
JP2019204673A5 JP2018098995A JP2018098995A JP2019204673A5 JP 2019204673 A5 JP2019204673 A5 JP 2019204673A5 JP 2018098995 A JP2018098995 A JP 2018098995A JP 2018098995 A JP2018098995 A JP 2018098995A JP 2019204673 A5 JP2019204673 A5 JP 2019204673A5
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JP
Japan
Prior art keywords
magnet
coil
stage
support stage
permanent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018098995A
Other languages
English (en)
Japanese (ja)
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JP2019204673A (ja
JP7016289B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2018098995A priority Critical patent/JP7016289B2/ja
Priority claimed from JP2018098995A external-priority patent/JP7016289B2/ja
Priority to US17/043,950 priority patent/US11417496B2/en
Priority to PCT/JP2019/008226 priority patent/WO2019225110A1/ja
Publication of JP2019204673A publication Critical patent/JP2019204673A/ja
Publication of JP2019204673A5 publication Critical patent/JP2019204673A5/ja
Application granted granted Critical
Publication of JP7016289B2 publication Critical patent/JP7016289B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018098995A 2018-05-23 2018-05-23 ステージ装置、荷電粒子線装置および真空装置 Active JP7016289B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018098995A JP7016289B2 (ja) 2018-05-23 2018-05-23 ステージ装置、荷電粒子線装置および真空装置
US17/043,950 US11417496B2 (en) 2018-05-23 2019-03-01 Stage device, charged particle beam apparatus, and vacuum apparatus
PCT/JP2019/008226 WO2019225110A1 (ja) 2018-05-23 2019-03-01 ステージ装置、荷電粒子線装置および真空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018098995A JP7016289B2 (ja) 2018-05-23 2018-05-23 ステージ装置、荷電粒子線装置および真空装置

Publications (3)

Publication Number Publication Date
JP2019204673A JP2019204673A (ja) 2019-11-28
JP2019204673A5 true JP2019204673A5 (enExample) 2021-03-04
JP7016289B2 JP7016289B2 (ja) 2022-02-04

Family

ID=68616775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018098995A Active JP7016289B2 (ja) 2018-05-23 2018-05-23 ステージ装置、荷電粒子線装置および真空装置

Country Status (3)

Country Link
US (1) US11417496B2 (enExample)
JP (1) JP7016289B2 (enExample)
WO (1) WO2019225110A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7573396B2 (ja) * 2020-09-04 2024-10-25 株式会社ニューフレアテクノロジー θステージ機構及び電子ビーム検査装置
JP7491827B2 (ja) 2020-12-14 2024-05-28 株式会社日立製作所 荷電粒子線装置
CN112596350B (zh) * 2021-03-08 2021-06-01 上海隐冠半导体技术有限公司 一种六自由度微动装置及电子束装备
JP7674975B2 (ja) * 2021-09-17 2025-05-12 株式会社日立製作所 ステージ装置、荷電粒子線装置および真空装置
JP2023159700A (ja) * 2022-04-20 2023-11-01 株式会社日立ハイテク ステージ装置、荷電粒子線装置、及び光学式検査装置
WO2025203221A1 (ja) * 2024-03-26 2025-10-02 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3745167B2 (ja) 1998-07-29 2006-02-15 キヤノン株式会社 ステージ装置、露光装置およびデバイス製造方法ならびにステージ駆動方法
US20020137358A1 (en) 2001-02-08 2002-09-26 Mike Binnard Multiple point support assembly for a stage
JP2005209670A (ja) 2004-01-20 2005-08-04 Canon Inc 磁気浮上装置

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