JP2019179192A - Illumination device, structured illumination device and structured illumination microscope device - Google Patents

Illumination device, structured illumination device and structured illumination microscope device Download PDF

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JP2019179192A
JP2019179192A JP2018069352A JP2018069352A JP2019179192A JP 2019179192 A JP2019179192 A JP 2019179192A JP 2018069352 A JP2018069352 A JP 2018069352A JP 2018069352 A JP2018069352 A JP 2018069352A JP 2019179192 A JP2019179192 A JP 2019179192A
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diffracted light
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liquid crystal
polarization direction
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JP7084184B2 (en
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中村　学
Manabu Nakamura
学 中村
近藤　真哉
Masaya Kondo
近藤　　真哉
半田　正人
Masato Handa
正人 半田
篤司 鶴旨
Tokuji Tsurumune
篤司 鶴旨
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Nikon Corp
Citizen Fine Device Co Ltd
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Abstract

To provide an illumination device of structured illumination light, a structured illumination device and a structured illumination microscope device, which can appropriately process a plurality of diffracted luminous fluxes at different wavelengths without using a mechanically operated component.SOLUTION: The illumination device includes: a diffraction element that diffracts light at a first wavelength to emit a first diffracted luminous flux and diffracts light at a second wavelength different from the first wavelength to emit a second diffracted luminous flux; an optical modulation element (liquid crystal element 15A) that controls the polarization direction of the first diffracted luminous flux and the polarization direction of the second diffracted luminous flux by voltages; and a control unit that control the optical modulation element. The optical modulation element has a first region (first transmission region 20B) to control the polarization direction of at least a part of the first diffracted luminous flux by voltages and a second region (second transmission region 20C) to control the polarization direction of at least a part of the second diffracted luminous flux by voltages. The control unit controls voltages applied to the first region and voltages applied to the second region.SELECTED DRAWING: Figure 4

Description

本発明は、照明装置、構造化照明装置及び構造化照明顕微鏡装置に関する。   The present invention relates to an illumination device, a structured illumination device, and a structured illumination microscope device.

顕微鏡装置において、光学系の分解能を越えた観察を可能とする超解像顕微鏡がある。この超解像顕微鏡の一形態として、空間変調された照明光により標本を照明して変調画像を取得し、その変調画像を復調することにより、標本の超解像画像を生成する構造化照明顕微鏡（ＳＩＭ：Structured Illumination Microscopy）が知られている（例えば、特許文献１を参照）。この手法においては、光源から射出された光束を回折格子等により複数の光束に分岐し、それらの光束を標本の近傍で互いに干渉させることで形成された干渉縞で標本を照明することにより、標本の変調画像を取得している。   In a microscope apparatus, there is a super-resolution microscope that allows observation beyond the resolution of an optical system. As one form of this super-resolution microscope, a structured illumination microscope that generates a super-resolution image of a specimen by illuminating the specimen with spatially modulated illumination light to obtain a modulated image and demodulating the modulated image (SIM: Structured Illumination Microscopy) is known (see, for example, Patent Document 1). In this method, the sample is illuminated by the interference fringes formed by branching the light beam emitted from the light source into a plurality of light beams by a diffraction grating or the like and causing these light beams to interfere with each other in the vicinity of the sample. The modulated image is acquired.

米国再発行特許発明第３８３０７号明細書US Reissue Patent No. 38307 Specification

本発明の一つの側面によれば、照明装置が提供される。この照明装置は、第１波長の光を回折させて第１回折光を出射し、第１波長と異なる第２波長の光を回折させて第２回折光を出射する回折素子と、第１回折光の偏光方向および第２回折光の偏光方向を電圧により制御する光変調素子と、光変調素子を制御する制御部と、を備え、光変調素子は、第１回折光の少なくとも一部の偏光方向を電圧により制御する第１領域と、第２回折光の少なくとも一部の偏光方向を電圧により制御する第２領域とを有し、制御部は、第１領域に印加される電圧と、第２領域に印加される電圧とを制御する。   According to one aspect of the present invention, a lighting device is provided. The illuminating device diffracts light having a first wavelength to emit first diffracted light, diffracts light having a second wavelength different from the first wavelength, and emits second diffracted light, and a first diffraction A light modulation element that controls the polarization direction of the light and the polarization direction of the second diffracted light by a voltage, and a control unit that controls the light modulation element, wherein the light modulation element is a polarization of at least a part of the first diffracted light. A first region in which the direction is controlled by voltage, and a second region in which the polarization direction of at least a part of the second diffracted light is controlled by voltage, and the control unit includes a voltage applied to the first region, The voltage applied to the two regions is controlled.

実施形態に係る顕微鏡装置１００の概略構成図である。1 is a schematic configuration diagram of a microscope apparatus 100 according to an embodiment. 光変調ユニット１０２の模式図である。3 is a schematic diagram of a light modulation unit 102. FIG. 各レーザ光の回折について説明するための模式図である。It is a schematic diagram for demonstrating the diffraction of each laser beam. 液晶素子１５Ａの概略正面図である。It is a schematic front view of liquid crystal element 15A. 液晶素子１５Ａの概略側面断面図である。It is a schematic side sectional view of the liquid crystal element 15A. 透明電極２３の概略正面図である。3 is a schematic front view of a transparent electrode 23. FIG. 第２液晶素子１６Ａの概略正面図である。It is a schematic front view of the 2nd liquid crystal element 16A. 回転領域透明電極の概略正面図である。It is a schematic front view of a rotation area | region transparent electrode. 第３液晶素子１６Ｂの概略正面図である。It is a schematic front view of the 3rd liquid crystal element 16B. 青色レーザ光に対する処理について説明するための模式図である。It is a schematic diagram for demonstrating the process with respect to a blue laser beam. 赤色レーザ光に対する処理について説明するための模式図である。It is a schematic diagram for demonstrating the process with respect to a red laser beam. 印加する電圧と、回折光に生じる位相差の関係を表すグラフである。It is a graph showing the relationship between the voltage to apply and the phase difference which arises in diffracted light. 試料画像の一例を示す模式図である。It is a schematic diagram which shows an example of a sample image.

以下、添付図面を参照して、本発明に係る照明装置について詳細に説明する。ただし、本発明の技術的範囲はそれらの実施の形態に限定されず、特許請求の範囲に記載された発明とその均等物に及ぶ点に留意されたい。   Hereinafter, an illumination device according to the present invention will be described in detail with reference to the accompanying drawings. However, it should be noted that the technical scope of the present invention is not limited to these embodiments, but extends to the invention described in the claims and equivalents thereof.

図１は、実施形態に係る顕微鏡装置の概略構成図である。図１に示されるように、構造化照明顕微鏡装置である顕微鏡装置１００は、光源１０１と、光変調ユニット１０２と、コリメータ１０３と、ビームスプリッタ１０４と、対物レンズ１０５と、集光レンズ１０６と、受光素子１０７と、制御部１０８と、表示装置１０９とを有する。光変調ユニット１０２及び制御部１０８は、光源１０１から出射された光をコリメータ１０３へ向けて出射する照明装置を構成する。ただし、照明装置は、本実施形態において示される光変調ユニット１０２の全ての構成要素を有していなくてもよい。また、照明装置は、本実施形態において示される光変調ユニット１０２の構成要素以外の構成要素を有していてもよい。   FIG. 1 is a schematic configuration diagram of a microscope apparatus according to the embodiment. As shown in FIG. 1, a microscope apparatus 100 which is a structured illumination microscope apparatus includes a light source 101, a light modulation unit 102, a collimator 103, a beam splitter 104, an objective lens 105, a condenser lens 106, A light receiving element 107, a control unit 108, and a display device 109 are included. The light modulation unit 102 and the control unit 108 constitute an illumination device that emits the light emitted from the light source 101 toward the collimator 103. However, the lighting device may not have all the components of the light modulation unit 102 shown in the present embodiment. Moreover, the illuminating device may have components other than the component of the light modulation unit 102 shown in this embodiment.

光変調ユニット１０２の下方には、光軸ＯＡ１に沿って配置される光源１０１が描かれている。また光変調ユニット１０２の側方には、光軸ＯＡ１と直交し、コリメータ１０３によって規定される光軸ＯＡ２に沿って一列に配置されたコリメータ１０３及びビームスプリッタ１０４が描かれている。光軸ＯＡ２と直交し、対物レンズ１０５と集光レンズ１０６とによって規定される光軸ＯＡ３に沿ってビームスプリッタ１０４、対物レンズ１０５、集光レンズ１０６及び受光素子１０７が一列に配置される。なお、構造化照明光としての干渉縞を試料（標本）に投影する構造化照明装置は、光源１０１、光変調ユニット１０２、コリメータ１０３、ビームスプリッタ１０４及び対物レンズ１０５を有する。なお、構造化照明装置に制御部１０８が設けられていてもよい。また、構造化照明装置に光源１０１が設けられていなくてもよい。   A light source 101 arranged along the optical axis OA1 is depicted below the light modulation unit 102. Further, on the side of the light modulation unit 102, a collimator 103 and a beam splitter 104 which are orthogonal to the optical axis OA1 and arranged in a line along the optical axis OA2 defined by the collimator 103 are drawn. A beam splitter 104, an objective lens 105, a condensing lens 106, and a light receiving element 107 are arranged in a line along an optical axis OA3 orthogonal to the optical axis OA2 and defined by the objective lens 105 and the condensing lens 106. Note that a structured illumination apparatus that projects interference fringes as structured illumination light onto a sample (specimen) includes a light source 101, a light modulation unit 102, a collimator 103, a beam splitter 104, and an objective lens 105. Note that the control unit 108 may be provided in the structured lighting device. Further, the light source 101 may not be provided in the structured lighting device.

光源１０１は、直線偏光である照明光（レーザ光）を出力する。そのために、光源１０１は、例えば、半導体レーザを有する。あるいは、光源１０１は、アルゴンイオンレーザといったガスレーザ、またはYAGレーザといった固体レーザを有していてもよい。光源１０１から出力されるレーザ光は光変調ユニット１０２に出射される。光源１０１から出力されるレーザ光が直線偏光でない場合、光源１０１とコリメータ１０３との間に、レーザ光を直線偏光にするために光学素子が配置されてもよい。さらにまた、光源１０１からの光は、例えば、光ファイバを介して光変調ユニット１０２に出射するようにしてもよい。   The light source 101 outputs illumination light (laser light) that is linearly polarized light. For this purpose, the light source 101 includes, for example, a semiconductor laser. Alternatively, the light source 101 may include a gas laser such as an argon ion laser or a solid-state laser such as a YAG laser. Laser light output from the light source 101 is emitted to the light modulation unit 102. When the laser light output from the light source 101 is not linearly polarized light, an optical element may be disposed between the light source 101 and the collimator 103 to make the laser light linearly polarized light. Furthermore, the light from the light source 101 may be emitted to the light modulation unit 102 via an optical fiber, for example.

光源１０１は、所定の波長域に含まれる互いに異なる波長を有する光を出力する第１光源１０１Ａ及び第２光源１０１Ｂを有する。第１光源１０１Ａが出力する光は、例えば450nm〜495nmの波長域に含まれる波長を有する青色レーザ光であり、第２光源１０１Ｂが出力する光は、例えば620nm〜750nmの波長域に含まれる波長を有する赤色レーザ光である。   The light source 101 includes a first light source 101A and a second light source 101B that output light having different wavelengths included in a predetermined wavelength range. The light output from the first light source 101A is, for example, blue laser light having a wavelength included in the wavelength range of 450 nm to 495 nm, and the light output from the second light source 101B is, for example, a wavelength included in the wavelength range of 620 nm to 750 nm. Is a red laser beam.

光変調ユニット１０２に入射された、光源１０１から放射されたレーザ光は、光変調ユニット１０２から出射され、光軸ＯＡ２からの複数の放射方向の何れかに沿った複数の次数の回折光に分離される。各次数の回折光の偏光方向は、顕微鏡装置１００の利用者によって設定された方向に回転される。例えば、各次数の回折光の偏光方向は、試料２００にＳ偏光で入射するように回転されてもよい。なお、各回折光の回折方向又はレーザ光を回折させる回折格子の位相は、モアレ縞の画像の撮影の度に変更される。各次数の回折光は、コリメータ１０３により集光されビームスプリッタ１０４により反射された後、対物レンズ１０５の瞳面（後側焦点面）において集光される。対物レンズ１０５の瞳面（後側焦点面）において集光された各次数の回折光は、対物レンズ１０５から平行光となって射出し、試料２００の表面または内部に設定された、観察対象となる物体面上において干渉縞が形成される。物体面で反射または散乱され、あるいは物体面から蛍光発光した光は、再び対物レンズ１０５を通った後、ビームスプリッタ１０４を直進する。その後、物体面で反射または散乱され、あるいは物体面から蛍光発光した光は、集光レンズ１０６によって受光素子１０７上に集光される。このように、コリメータ１０３、ビームスプリッタ１０４及び対物レンズ１０５は、青色レーザ光による各次数の回折光を干渉させて青色干渉縞を形成し、赤色レーザ光による各次数の回折光を干渉させて赤色干渉縞を形成し、青色干渉縞及び赤色干渉縞で標本を照明する照明光学系として機能する。   The laser light emitted from the light source 101 and incident on the light modulation unit 102 is emitted from the light modulation unit 102 and separated into a plurality of orders of diffracted light along any one of a plurality of radiation directions from the optical axis OA2. Is done. The polarization direction of the diffracted light of each order is rotated in the direction set by the user of the microscope apparatus 100. For example, the polarization direction of each order of diffracted light may be rotated so as to enter the sample 200 as S-polarized light. The diffraction direction of each diffracted light or the phase of the diffraction grating that diffracts the laser light is changed every time a moire fringe image is taken. The diffracted lights of respective orders are collected by the collimator 103, reflected by the beam splitter 104, and then collected on the pupil plane (rear focal plane) of the objective lens 105. The diffracted lights of respective orders collected on the pupil plane (rear focal plane) of the objective lens 105 are emitted as parallel light from the objective lens 105 and are set on the surface or inside of the sample 200 as an observation target. Interference fringes are formed on the object plane. The light reflected or scattered by the object plane or fluorescently emitted from the object plane again passes through the objective lens 105 and then travels straight through the beam splitter 104. Thereafter, the light reflected or scattered on the object plane or fluorescently emitted from the object plane is condensed on the light receiving element 107 by the condenser lens 106. As described above, the collimator 103, the beam splitter 104, and the objective lens 105 interfere with each order of diffracted light by the blue laser light to form a blue interference fringe, and cause each order of diffracted light by the red laser light to interfere with the red light. It functions as an illumination optical system that forms interference fringes and illuminates the specimen with blue and red interference fringes.

なお、理解を容易にするために図示していないが、顕微鏡装置１００は、光路上に、球面収差用補償光学系などの各種の補償光学系、または光路を曲げるためのミラーを有していてもよい。   Although not shown for ease of understanding, the microscope apparatus 100 has various compensation optical systems such as a spherical aberration compensation optical system or a mirror for bending the optical path on the optical path. Also good.

受光素子１０７は、アレイ状に配列された複数のCCD、C-MOSなどの撮像素子を有し、構造化照明光である干渉縞と試料の構造により生じるモアレ縞の画像を生成し、そのモアレ縞の画像を制御部１０８へ出力する。受光素子１０７は、モアレ縞の画像として、青色干渉縞で照明された標本の像である青色変調像及び赤色干渉縞で照明された標本の像である赤色変調像を生成する。   The light receiving element 107 includes a plurality of CCD, C-MOS, and other imaging elements arranged in an array, generates an image of moire fringes generated by the interference fringes that are structured illumination light and the structure of the sample, and the moire. The fringe image is output to the control unit 108. The light receiving element 107 generates, as moire fringe images, a blue modulated image that is an image of a specimen illuminated with a blue interference fringe and a red modulated image that is an image of a specimen illuminated with a red interference fringe.

制御部１０８は、例えば、プロセッサと、メモリと、制御部１０８を顕微鏡装置１００の各部と接続するためのインターフェース回路とを有する。制御部１０８は、光源１０１に対して所定の電力を供給することにより、光源１０１にレーザ光を出力させる。制御部１０８は、不図示の駆動回路を介して光変調ユニット１０２が有する液晶素子に印加する電圧を制御することで、光変調ユニット１０２から出力される各次数の回折光の回折方向、レーザ光を回折させる回折格子の位相などを制御する。   The control unit 108 includes, for example, a processor, a memory, and an interface circuit for connecting the control unit 108 to each unit of the microscope apparatus 100. The control unit 108 supplies laser light to the light source 101 by supplying predetermined power to the light source 101. The control unit 108 controls the voltage applied to the liquid crystal element included in the light modulation unit 102 via a drive circuit (not shown), whereby the diffraction direction of each order of diffracted light output from the light modulation unit 102, the laser light The phase of the diffraction grating that diffracts the light is controlled.

制御部１０８は、受光素子１０７から受信した複数のモアレ縞の画像から試料２００の物体面の超解像画像（標本の復調像であり、以下では、便宜上試料画像と呼ぶ）を生成し、表示装置１０９に表示する。なお、複数のモアレ縞の画像から試料画像を得るための画像演算の詳細は、例えば、WO2006/109448に開示されている。   The control unit 108 generates and displays a super-resolution image (a demodulated image of the sample, hereinafter referred to as a sample image for convenience) from the plurality of moire fringe images received from the light receiving element 107. Display on the device 109. Note that details of image calculation for obtaining a sample image from a plurality of moire fringe images are disclosed in, for example, WO2006 / 109448.

表示装置１０９は、例えば、タッチパネル式の表示装置、液晶ディスプレイ、有機ＥＬ（Electro−Luminescence）ディスプレイ等であり、制御部１０８が生成した画像等を出力する。   The display device 109 is, for example, a touch panel display device, a liquid crystal display, an organic EL (Electro-Luminescence) display, and the like, and outputs an image generated by the control unit 108.

図２は、光変調ユニット１０２の模式図である。   FIG. 2 is a schematic diagram of the light modulation unit 102.

光変調ユニット１０２は、第１光源１０１Ａ及び第２光源１０１Ｂから出射されたレーザ光を、複数の方向のうちの何れか一つの方向に沿って回折させて複数の次数の回折光を生成する。そのために、光変調ユニット１０２は、光軸ＯＡ２に沿って、回折素子１１側から順に、回折素子１１と、第１位相変調素子１２と、偏光ビームスプリッタ１３と、第２位相変調素子１４と、光変調サブユニット１０とを有する。光変調サブユニット１０は、シャッター素子１５と、偏光方向回転素子１６とを有する。ただし、光変調サブユニット１０は、本実施形態において示される光変調サブユニット１０の全ての構成要素を有していなくてもよい。また、光変調サブユニット１０は、本実施形態において示される光変調サブユニット１０の構成要素以外の構成要素を有していてもよい。   The light modulation unit 102 diffracts the laser light emitted from the first light source 101A and the second light source 101B along any one of a plurality of directions to generate a plurality of orders of diffracted light. Therefore, the light modulation unit 102 includes, in order from the diffraction element 11 side along the optical axis OA2, the diffraction element 11, the first phase modulation element 12, the polarization beam splitter 13, the second phase modulation element 14, And a light modulation subunit 10. The light modulation subunit 10 includes a shutter element 15 and a polarization direction rotating element 16. However, the light modulation subunit 10 may not have all the components of the light modulation subunit 10 shown in the present embodiment. Further, the light modulation subunit 10 may have components other than the components of the light modulation subunit 10 shown in the present embodiment.

回折素子１１は、空間光変調素子であり、構造化照明で利用される複数の位相の内の選択された一つの位相を有し、複数の方向の内の選択された一つの方向に沿ってレーザ光を回折させて複数の次数の回折光を生成するための回折格子を表示させる。回折素子１１は、第１光源１０１Ａが出射した青色レーザ光を回折させて複数の０次及び±１次の青色回折光を生成して出射し、第２光源１０１Ｂが出射した赤色レーザ光を回折させて複数の０次及び±１次の赤色回折光を生成して出射する。そのために、回折素子１１は、例えば、液晶層の少なくとも一方の面（すなわち、反射側の面）に、２次元に配列された複数の画素ごとに独立した駆動電極を有する液晶素子で構成される。このような液晶素子は、液晶層の他方の面（すなわち、透過側の面）に、光を制御する領域全体を覆うように設けられた透明電極と各画素の駆動電極との間に印加する電圧を画素ごとに調節することで、画素ごとに独立して透過率または屈折率を調節できる。本実施形態では、回折素子１１として、例えば、Liquid crystal on silicon(LCOS)といった、反射型の液晶素子を利用する。   The diffractive element 11 is a spatial light modulation element, has a selected one of a plurality of phases used in structured illumination, and is along a selected one of a plurality of directions. A diffraction grating for diffracting the laser light to generate a plurality of orders of diffracted light is displayed. The diffraction element 11 diffracts the blue laser light emitted from the first light source 101A to generate and emit a plurality of 0th and ± 1st order blue diffracted lights, and diffracts the red laser light emitted from the second light source 101B. Thus, a plurality of 0th-order and ± 1st-order red diffracted lights are generated and emitted. For this purpose, the diffractive element 11 is composed of, for example, a liquid crystal element having independent drive electrodes for each of a plurality of pixels arranged two-dimensionally on at least one surface of the liquid crystal layer (that is, the surface on the reflection side). . Such a liquid crystal element is applied between the transparent electrode provided on the other surface of the liquid crystal layer (that is, the surface on the transmission side) so as to cover the entire light control region and the drive electrode of each pixel. By adjusting the voltage for each pixel, the transmittance or the refractive index can be adjusted independently for each pixel. In the present embodiment, a reflective liquid crystal element such as Liquid crystal on silicon (LCOS) is used as the diffraction element 11.

制御部１０８は、回折素子１１の各画素に印加する電圧を調節することで、任意の回折方向に各レーザ光を回折させる回折格子を表示させることができる。例えば、各レーザ光を、所定の方向に回折させる場合、制御部１０８は、その方向に、透過率または屈折率が周期的に変化するように、回折素子１１に回折格子を表示させる。   The control unit 108 can display a diffraction grating that diffracts each laser beam in an arbitrary diffraction direction by adjusting a voltage applied to each pixel of the diffraction element 11. For example, when each laser beam is diffracted in a predetermined direction, the control unit 108 causes the diffraction element 11 to display a diffraction grating so that the transmittance or the refractive index periodically changes in that direction.

また、制御部１０８は、干渉縞（構造化照明）の位相をシフトするために、回折素子１１に表示させる回折格子の各格子線の位置を、格子線と直交する方向、すなわち各レーザ光が回折する方向に沿って、位相に応じた量だけシフトさせる。   Further, the control unit 108 shifts the position of each grating line of the diffraction grating displayed on the diffraction element 11 in a direction perpendicular to the grating line, that is, each laser beam is shifted in order to shift the phase of the interference fringes (structured illumination). Shift along the direction of diffraction by an amount corresponding to the phase.

図３は、回折素子１１による各レーザ光の回折について説明するための模式図である。ただし、図３において、第１位相変調素子１２は、図示されていない。   FIG. 3 is a schematic diagram for explaining the diffraction of each laser beam by the diffraction element 11. However, in FIG. 3, the first phase modulation element 12 is not shown.

第２光源１０１Ｂが出射する赤色レーザ光２１１Ｂの波長は、第１光源１０１Ａが出射する青色レーザ光２１１Ａの波長より長い。そのため、図３に示すように、回折素子１１の格子法線と、赤色レーザ光２１１Ｂを回折素子１１で回折した±１次の赤色回折光２１２Ｂ、２１３Ｂとのなす回折角は、回折素子１１の格子法線と、青色レーザ光２１１Ａを回折素子１１で回折した±１次の青色回折光２１２Ａ、２１３Ａとのなす回折角より大きくなる。ただし、回折素子１１から出射された±１次の赤色回折光２１２Ｂ、２１３Ｂと、回折素子１１から出射された±１次の青色回折光２１２Ａ、２１３Ａは、偏光ビームスプリッタ１３を透過する際に、偏光ビームスプリッタ１３の表面や内部で屈折する場合があるが、そのような屈折は、ここでは考慮されていない。   The wavelength of the red laser light 211B emitted from the second light source 101B is longer than the wavelength of the blue laser light 211A emitted from the first light source 101A. Therefore, as shown in FIG. 3, the diffraction angle formed by the grating normal of the diffraction element 11 and the ± first-order red diffracted lights 212B and 213B obtained by diffracting the red laser light 211B by the diffraction element 11 is It becomes larger than the diffraction angle formed by the grating normal line and the ± first-order blue diffracted lights 212A and 213A obtained by diffracting the blue laser light 211A by the diffraction element 11. However, when the ± first-order red diffracted light 212B and 213B emitted from the diffraction element 11 and the ± first-order blue diffracted light 212A and 213A emitted from the diffraction element 11 pass through the polarization beam splitter 13, Although there is a case where the light is refracted on or inside the polarization beam splitter 13, such refraction is not considered here.

以下、第１光源１０１Ａおよび第２光源１０１Ｂから同時に青色レーザ光２１１Ａと赤色レーザ光２１１Ｂが射出される場合について説明するが、第１光源１０１Ａおよび第２光源１０１Ｂから青色レーザ光２１１Ａと赤色レーザ光２１１Ｂとは同時に射出されなくてもよい。回折素子１１は、０次の赤色回折光及び青色回折光を光軸ＯＡ２の方向に向かって同時に回折させる。また、回折素子１１は、光軸ＯＡ２からの複数の放射方向の内の第１の方向に沿って＋１次の青色回折光及び赤色回折光を同時に回折させ、さらに第１の方向とは光軸ＯＡ２を中心として線対称となる方向に沿って−１次の青色回折光及び赤色回折光を同時に回折させる。同様に、回折素子１１は、第１の方向から時計回りに120°回転した第２の方向に沿って＋１次の青色回折光及び赤色回折光を同時に回折させ、さらに第２の方向とは光軸ＯＡ２を中心として線対称となる方向に沿って−１次の青色回折光及び赤色回折光を同時に回折させる。同様に、回折素子１１は、第２の方向から時計回りに120°回転した第３の方向に沿って＋１次の青色回折光及び赤色回折光を同時に回折させ、さらに第３の方向とは光軸ＯＡ２を中心として線対称となる方向に沿って−１次の青色回折光及び赤色回折光を同時に回折させる。このように、回折素子１１は、０次及び±１次の赤色回折光及び青色回折光を７つの方向に向かって回折させる。   Hereinafter, the case where the blue laser light 211A and the red laser light 211B are simultaneously emitted from the first light source 101A and the second light source 101B will be described. The blue laser light 211A and the red laser light are emitted from the first light source 101A and the second light source 101B. It is not necessary to inject simultaneously with 211B. The diffractive element 11 simultaneously diffracts the 0th-order red diffracted light and blue diffracted light toward the optical axis OA2. The diffractive element 11 simultaneously diffracts the + 1st order blue diffracted light and red diffracted light along a first direction among a plurality of radiation directions from the optical axis OA2, and the first direction is the optical axis. The −1st order blue diffracted light and red diffracted light are simultaneously diffracted along a line symmetric with respect to OA2. Similarly, the diffractive element 11 simultaneously diffracts the + 1st order blue diffracted light and red diffracted light along the second direction rotated 120 ° clockwise from the first direction, and the second direction is the light. The −1st order blue diffracted light and red diffracted light are simultaneously diffracted along a line symmetric with respect to the axis OA2. Similarly, the diffractive element 11 simultaneously diffracts the + 1st order blue diffracted light and red diffracted light along the third direction rotated clockwise by 120 ° from the second direction, and the third direction is the light. The −1st order blue diffracted light and red diffracted light are simultaneously diffracted along a line symmetric with respect to the axis OA2. As described above, the diffraction element 11 diffracts the 0th-order and ± 1st-order red diffracted light and blue diffracted light in seven directions.

第１位相変調素子１２は、例えばλ／２波長板であり、偏光ビームスプリッタ１３と回折素子１１の間に配置され、回折素子１１から出射された各回折光の偏光方向を、各回折光が偏光ビームスプリッタ１３を効率よく透過するように調整する。   The first phase modulation element 12 is a λ / 2 wavelength plate, for example, and is disposed between the polarization beam splitter 13 and the diffraction element 11, and each diffracted light has a polarization direction of each diffracted light emitted from the diffractive element 11. It adjusts so that it may permeate | transmit the polarizing beam splitter 13 efficiently.

偏光ビームスプリッタ１３は、第１光源１０１Ａ及び第２光源１０１Ｂから出射されたレーザ光を回折素子１１へ向けて反射させるとともに、第１位相変調素子１２から出射された回折光を透過させる。   The polarization beam splitter 13 reflects the laser light emitted from the first light source 101 </ b> A and the second light source 101 </ b> B toward the diffraction element 11 and transmits the diffracted light emitted from the first phase modulation element 12.

第２位相変調素子１４は、例えばλ／２波長板であり、偏光ビームスプリッタ１３と光変調サブユニット１０の間に配置され、レーザ光の偏光方向を調整する。   The second phase modulation element 14 is a λ / 2 wavelength plate, for example, and is arranged between the polarization beam splitter 13 and the light modulation subunit 10 and adjusts the polarization direction of the laser light.

シャッター素子１５は、入射した複数の±１次の青色回折光及び複数の±１次の赤色回折光を選択的に透過させる。そのために、シャッター素子１５は、光軸ＯＡ２に沿って、回折素子１１側から順に、液晶素子１５Ａと検光子１５Ｂとを有する。   The shutter element 15 selectively transmits a plurality of incident ± 1st order blue diffracted lights and a plurality of ± 1st order red diffracted lights. Therefore, the shutter element 15 includes a liquid crystal element 15A and an analyzer 15B in order from the diffraction element 11 side along the optical axis OA2.

図４は、回折光が入射する側から見た液晶素子１５Ａの概略正面図であり、図５は、図４の矢印Ａ、Ａ’で示される線における、液晶素子１５Ａの概略側面断面図である。   4 is a schematic front view of the liquid crystal element 15A viewed from the side where the diffracted light is incident, and FIG. 5 is a schematic side sectional view of the liquid crystal element 15A along the lines indicated by arrows A and A ′ in FIG. is there.

図５に示すように、液晶素子１５Ａは、液晶層２０と、光軸ＯＡ２に沿って液晶層２０の両側に略平行に配置された透明基板２１、２２と、透明基板２１と液晶層２０の間に配置された透明電極２３と、液晶層２０と透明基板２２の間に配置された対向電極２４とを有する光変調素子として構成される。液晶層２０は、例えばネマティック液晶を含む。液晶層２０に含まれる液晶分子２７は、透明基板２１及び２２と、シール部材２８との間に封入されている。液晶層２０の厚さは、液晶素子１５Ａが半波長板として動作するのに十分な厚さ、例えば、5μmとされる。ただし、液晶素子１５Ａは、本実施形態において示される液晶素子１５Ａの構成要素の全てを有していなくてもよい。また、液晶素子１５Ａは、本実施形態において示される液晶素子１５Ａの構成要素以外の構成要素を有していてもよい。   As shown in FIG. 5, the liquid crystal element 15 </ b> A includes a liquid crystal layer 20, transparent substrates 21 and 22 disposed substantially parallel to both sides of the liquid crystal layer 20 along the optical axis OA <b> 2, and the transparent substrate 21 and the liquid crystal layer 20. The light modulation element includes a transparent electrode 23 disposed therebetween and a counter electrode 24 disposed between the liquid crystal layer 20 and the transparent substrate 22. The liquid crystal layer 20 includes, for example, nematic liquid crystal. Liquid crystal molecules 27 contained in the liquid crystal layer 20 are sealed between the transparent substrates 21 and 22 and the seal member 28. The thickness of the liquid crystal layer 20 is set to a thickness sufficient for the liquid crystal element 15A to operate as a half-wave plate, for example, 5 μm. However, the liquid crystal element 15A may not have all the components of the liquid crystal element 15A shown in the present embodiment. Further, the liquid crystal element 15A may have components other than the components of the liquid crystal element 15A shown in the present embodiment.

透明基板２１、２２は、例えば、ガラスまたは樹脂など、光源１０１が発するレーザ光に対して透明な材料により形成される。透明電極２３、２４は、例えば、ＩＴＯ（Indium Tin Oxide）と呼ばれる、酸化インジウムに酸化スズを添加した材料により形成される。透明電極２３と液晶層２０の間には配向膜２５が配置され、対向電極２４と液晶層２０の間には配向膜２６が配置される。配向膜２５、２６は、液晶分子２７を所定の方向に配向させる。   The transparent substrates 21 and 22 are made of a material that is transparent to laser light emitted from the light source 101, such as glass or resin. The transparent electrodes 23 and 24 are formed of, for example, a material called ITO (Indium Tin Oxide) in which tin oxide is added to indium oxide. An alignment film 25 is disposed between the transparent electrode 23 and the liquid crystal layer 20, and an alignment film 26 is disposed between the counter electrode 24 and the liquid crystal layer 20. The alignment films 25 and 26 align the liquid crystal molecules 27 in a predetermined direction.

図４に示すように、液晶層２０は、光軸ＯＡ２の延長線が通過する位置に配置された円形状の中央透過領域２０Ａと、中央透過領域２０Ａを囲うドーナツ形状を有する第１透過領域２０Ｂと、第１透過領域２０Ｂを囲うドーナツ形状を有する第２透過領域２０Ｃとを有する。第１透過領域２０Ｂは、光軸ＯＡ２に直交する面内で円周方向に沿って６等分に分割された６個の小領域２０Ｂ１〜２０Ｂ６を有する。また、第２透過領域２０Ｃは、光軸ＯＡ２に直交する面内で円周方向に沿って６等分に分割された６個の小領域２０Ｃ１〜２０Ｃ６を有する。   As shown in FIG. 4, the liquid crystal layer 20 includes a circular central transmission region 20A disposed at a position where an extension of the optical axis OA2 passes, and a first transmission region 20B having a donut shape surrounding the central transmission region 20A. And a second transmission region 20C having a donut shape surrounding the first transmission region 20B. The first transmission region 20B has six small regions 20B1 to 20B6 divided into six equal parts along the circumferential direction in a plane orthogonal to the optical axis OA2. Further, the second transmission region 20C has six small regions 20C1 to 20C6 divided into six equal parts along the circumferential direction in a plane orthogonal to the optical axis OA2.

中央透過領域２０Ａは、各回折光のうちの０次の青色回折光及び赤色回折光が入射する位置に配置され、第１透過領域２０Ｂは、±１次の青色回折光が透過する位置に配置され、第２透過領域２０Ｃは、±１次の赤色回折光が透過する位置に配置される。   The central transmission region 20A is disposed at a position where 0th-order blue diffracted light and red diffracted light are incident, and the first transmission region 20B is disposed at a position where ± 1st-order blue diffracted light is transmitted. The second transmission region 20C is arranged at a position where ± 1st-order red diffracted light is transmitted.

第１透過領域２０Ｂの小領域２０Ｂ１には、第１の方向に沿って回折された＋１次の青色回折光が入射し、小領域２０Ｂ１と中央透過領域２０Ａを挟んで対向する小領域２０Ｂ４には、第１の方向とは光軸ＯＡ２を中心として線対称となる方向に沿って回折された−１次の青色回折光が入射する。また、小領域２０Ｂ２には、第２の方向に沿って回折された＋１次の青色回折光が入射し、小領域２０Ｂ２と中央透過領域２０Ａを挟んで対向する小領域２０Ｂ５には、第２の方向とは光軸ＯＡ２を中心として線対称となる方向に沿って回折された−１次の青色回折光が入射する。さらに、小領域２０Ｂ３には、第３の方向に沿って回折された＋１次の青色回折光が入射し、小領域２０Ｂ３と中央透過領域２０Ａを挟んで対向する小領域２０Ｂ６には、第３の方向とは光軸ＯＡ２を中心として線対称となる方向に沿って回折された−１次の青色回折光が入射する。   The + 1st order blue diffracted light diffracted along the first direction is incident on the small region 20B1 of the first transmission region 20B, and the small region 20B4 facing the small region 20B1 across the central transmission region 20A is input. The first-order blue diffracted light diffracted along a direction that is line-symmetric about the optical axis OA2 is incident on the first direction. Further, the + 1st order blue diffracted light diffracted along the second direction is incident on the small region 20B2, and the second region 20B5 facing the small region 20B2 across the central transmission region 20A has a second region. The first-order blue diffracted light diffracted along a direction that is line-symmetric about the optical axis OA2 is incident. Further, + 1st order blue diffracted light diffracted along the third direction is incident on the small region 20B3, and the third region 20B6 facing the small region 20B3 with the central transmission region 20A interposed therebetween The first-order blue diffracted light diffracted along a direction that is line-symmetric about the optical axis OA2 is incident.

第２透過領域２０Ｃの小領域２０Ｃ１には、第１の方向に沿って回折された＋１次の赤色回折光が入射し、小領域２０Ｃ１と中央透過領域２０Ａを挟んで対向する小領域２０Ｃ４には、第１の方向とは光軸ＯＡ２を中心として線対称となる方向に沿って回折された−１次の赤色回折光が入射する。また、小領域２０Ｃ２には、第２の方向に沿って回折された＋１次の赤色回折光が入射し、小領域２０Ｃ２と中央透過領域２０Ａを挟んで対向する小領域２０Ｃ５には、第２の方向とは光軸ＯＡ２を中心として線対称となる方向に沿って回折された−１次の赤色回折光が入射する。さらに、小領域２０Ｃ３には、第３の方向に沿って回折された＋１次の赤色回折光が入射し、小領域２０Ｃ３と中央透過領域２０Ａを挟んで対向する小領域２０Ｃ６には、第３の方向とは光軸ＯＡ２を中心として線対称となる方向に沿って回折された−１次の赤色回折光が入射する。   The + 1st order red diffracted light diffracted along the first direction is incident on the small region 20C1 of the second transmission region 20C, and the small region 20C4 facing the small region 20C1 with the central transmission region 20A interposed therebetween The first-order red diffracted light diffracted along a direction that is line-symmetric about the optical axis OA2 is incident on the first direction. The + 1st order red diffracted light diffracted along the second direction is incident on the small region 20C2, and the second region 20C5 facing the small region 20C2 across the central transmission region 20A has a second region. The first-order red diffracted light diffracted along a direction that is line-symmetric about the optical axis OA2 is incident. Further, the + 1st order red diffracted light diffracted along the third direction is incident on the small region 20C3, and the third region 20C6 opposed to the small region 20C3 across the central transmission region 20A has the third region 20C3. The first-order red diffracted light diffracted along a direction that is line-symmetric about the optical axis OA2 is incident.

液晶層２０の各透過領域（小領域）に封入された液晶分子２７は、例えば、ホモジニアス配向される。各液晶分子２７は、入射する回折光の偏光方向２０２に対して45°（75°-30°）をなす方向２０４に配向される。   The liquid crystal molecules 27 sealed in each transmission region (small region) of the liquid crystal layer 20 are, for example, homogeneously aligned. Each liquid crystal molecule 27 is aligned in a direction 204 that forms 45 ° (75 ° -30 °) with respect to the polarization direction 202 of incident diffracted light.

図６は、回折光が入射する側から見た透明電極２３の概略正面図である。   FIG. 6 is a schematic front view of the transparent electrode 23 viewed from the side on which the diffracted light is incident.

透明電極２３は、液晶層２０の中央透過領域２０Ａ、第１透過領域２０Ｂ及び第２透過領域２０Ｃのそれぞれに電圧を印加する中央透明電極２３Ａ、第１透明電極２３Ｂ及び第２透明電極２３Ｃを有する。第１透明電極２３Ｂは、第１透過領域２０Ｂを複数の小領域２０Ｂ１〜Ｂ６に分割するために、各小領域２０Ｂ１〜Ｂ６に電圧を印加する複数の電極２３Ｂ１〜Ｂ６を有する。第２透明電極２３Ｃは、第２透過領域２０Ｃを複数の小領域２０Ｃ１〜Ｃ６に分割するために、各小領域２０Ｃ１〜Ｃ６に電圧を印加する複数の電極２３Ｃ１〜Ｃ６を有する。各電極２３Ａ、Ｂ１〜Ｂ６、Ｃ１〜Ｃ６は、液晶層２０の各領域毎に、各領域の回折光が入射する側の面を覆い、互いに絶縁されている。各電極２３Ａ、Ｂ１〜Ｂ６、Ｃ１〜Ｃ６は、それぞれ配線２３Ａ’、Ｂ１’〜Ｂ６ ’、Ｃ１’〜Ｃ６ ’を介して制御部１０８に接続される。   The transparent electrode 23 includes a central transparent electrode 23A, a first transparent electrode 23B, and a second transparent electrode 23C that apply a voltage to each of the central transmission region 20A, the first transmission region 20B, and the second transmission region 20C of the liquid crystal layer 20. . The first transparent electrode 23B has a plurality of electrodes 23B1 to B6 that apply a voltage to each of the small regions 20B1 to B6 in order to divide the first transmission region 20B into a plurality of small regions 20B1 to B6. The second transparent electrode 23C includes a plurality of electrodes 23C1 to C6 that apply a voltage to each of the small regions 20C1 to C6 in order to divide the second transmissive region 20C into a plurality of small regions 20C1 to C6. The electrodes 23A, B1 to B6, and C1 to C6 cover the surface of the liquid crystal layer 20 where the diffracted light is incident and are insulated from each other. The electrodes 23A, B1 to B6, and C1 to C6 are connected to the control unit 108 via wirings 23A ', B1' to B6 ', and C1' to C6 ', respectively.

対向電極２４は、中央透明電極２３Ａ、第１透明電極２３Ｂ及び第２透明電極２３Ｃと対向する透明なベタ電極である。   The counter electrode 24 is a transparent solid electrode that faces the central transparent electrode 23A, the first transparent electrode 23B, and the second transparent electrode 23C.

検光子１５Ｂは、偏光方向が所定の方向である回折光のみを透過させる。検光子１５Ｂは、例えば偏光板である。   The analyzer 15B transmits only diffracted light whose polarization direction is a predetermined direction. The analyzer 15B is, for example, a polarizing plate.

偏光方向回転素子１６は、光変調ユニット１０２が出力する回折光の偏光方向が、利用者によって設定された方向になるように、シャッター素子１５を透過した青色回折光及び赤色回折光の偏光方向を回転する。そのために、偏光方向回転素子１６は、第２液晶素子１６Ａ及び第３液晶素子１６Ｂを有する。   The polarization direction rotating element 16 changes the polarization directions of the blue diffracted light and the red diffracted light transmitted through the shutter element 15 so that the polarization direction of the diffracted light output from the light modulation unit 102 is the direction set by the user. Rotate. For this purpose, the polarization direction rotating element 16 includes a second liquid crystal element 16A and a third liquid crystal element 16B.

図７は、回折光が入射する側から見た第２液晶素子１６Ａの概略正面図である。   FIG. 7 is a schematic front view of the second liquid crystal element 16A viewed from the side where the diffracted light enters.

第２液晶素子１６Ａも、シャッター素子１５が有する液晶素子１５Ａと同様に、第２液晶層と、光軸ＯＡ２に沿って液晶層２０の両側に略平行に配置された二つの第２透明基板と、一方の第２透明基板と第２液晶層の間に配置された回転領域透明電極と、他方の第２液晶層と第２透明基板の間に配置された第２対向電極とを有する。第２液晶層及び第２透明基板は、それぞれ液晶素子１５Ａの液晶層２０及び透明基板２１、２２と同様の構成を有する。   Similarly to the liquid crystal element 15A included in the shutter element 15, the second liquid crystal element 16A includes a second liquid crystal layer and two second transparent substrates disposed substantially parallel to both sides of the liquid crystal layer 20 along the optical axis OA2. , A rotating region transparent electrode disposed between one second transparent substrate and the second liquid crystal layer, and a second counter electrode disposed between the other second liquid crystal layer and the second transparent substrate. The second liquid crystal layer and the second transparent substrate have the same configuration as the liquid crystal layer 20 and the transparent substrates 21 and 22 of the liquid crystal element 15A, respectively.

第２液晶層は、中央透過領域２０Ａと対向する中央回転領域３０Ａと、第１透過領域２０Ｂと対向する第１回転領域３０Ｂと、第２透過領域２０Ｃと対向する第２回転領域３０Ｃとを有する。即ち、中央透過領域２０Ａと中央回転領域３０Ａ、第１透過領域２０Ｂと第１回転領域３０Ｂ、及び、第２透過領域２０Ｃと第２回転領域３０Ｃは、それぞれ光軸ＯＡ２方向に投影した位置が等しくなるように設定される。ただし、第１回転領域３０Ｂ及び第２回転領域３０Ｃは、第１透過領域２０Ｂ及び第２透過領域２０Ｃと異なり、複数の小領域に分割されない。   The second liquid crystal layer includes a central rotation area 30A that faces the central transmission area 20A, a first rotation area 30B that faces the first transmission area 20B, and a second rotation area 30C that faces the second transmission area 20C. . That is, the central transmission region 20A and the central rotation region 30A, the first transmission region 20B and the first rotation region 30B, and the second transmission region 20C and the second rotation region 30C are projected at the same position in the direction of the optical axis OA2. Is set to be However, unlike the first transmission region 20B and the second transmission region 20C, the first rotation region 30B and the second rotation region 30C are not divided into a plurality of small regions.

中央回転領域３０Ａは、各回折光の内の０次の青色回折光及び赤色回折光が入射する位置に配置され、第１回転領域３０Ｂは、±１次の青色回折光が透過する位置に配置され、第２回転領域３０Ｃは、±１次の赤色回折光が透過する位置に配置される。   The central rotation region 30A is disposed at a position where the 0th-order blue diffracted light and red diffracted light are incident, and the first rotation region 30B is disposed at a position where ± 1st-order blue diffracted light is transmitted. The second rotation region 30C is arranged at a position where ± 1st-order red diffracted light is transmitted.

また、第２液晶層の各回転領域に封入された液晶分子は、液晶素子１５Ａの液晶分子２７と同様にホモジニアス配向されるが、各液晶分子の配向方向は、液晶素子１５Ａの液晶分子２７の配向方向と異なる。各液晶分子は、入射する回折光の偏光方向２０２に対して60°（75°-15°）をなす方向２０５に配向される。   The liquid crystal molecules enclosed in each rotation region of the second liquid crystal layer are homogeneously aligned similarly to the liquid crystal molecules 27 of the liquid crystal element 15A, but the alignment direction of each liquid crystal molecule is the liquid crystal molecule 27 of the liquid crystal element 15A. Different from orientation direction. Each liquid crystal molecule is aligned in a direction 205 that forms 60 ° (75 ° -15 °) with respect to the polarization direction 202 of incident diffracted light.

図８は、回折光が入射する側から見た回転領域透明電極３３の概略正面図である。   FIG. 8 is a schematic front view of the rotating region transparent electrode 33 as viewed from the side where the diffracted light is incident.

回転領域透明電極３３は、第２液晶層の中央回転領域３０Ａ、第１回転領域３０Ｂ及び第２回転領域３０Ｃのそれぞれに電圧を印加する中央回転領域透明電極３３Ａ、第１回転領域透明電極３３Ｂ及び第２回転領域透明電極３３Ｃを有する。各電極３３Ａ〜３３Ｃは、第２液晶層の各回転領域毎に、各回転領域の回折光が入射する側の面を覆い、互いに絶縁されている。各電極３３Ａ〜３３Ｃは、それぞれ配線３３Ａ’〜３３Ｃ’を介して制御部１０８に接続される。   The rotation area transparent electrode 33 includes a center rotation area transparent electrode 33A, a first rotation area transparent electrode 33B, and a voltage applied to each of the center rotation area 30A, the first rotation area 30B, and the second rotation area 30C of the second liquid crystal layer. It has the 2nd rotation field transparent electrode 33C. Each electrode 33A-33C covers the surface on the side where the diffracted light enters in each rotation region for each rotation region of the second liquid crystal layer, and is insulated from each other. The electrodes 33A to 33C are connected to the control unit 108 via wirings 33A 'to 33C', respectively.

一方、第２対向電極は、中央回転領域透明電極３３Ａ、第１回転領域透明電極３３Ｂ及び第２回転領域透明電極３３Ｃと対向する透明なベタ電極である。   On the other hand, the second counter electrode is a transparent solid electrode facing the central rotation region transparent electrode 33A, the first rotation region transparent electrode 33B, and the second rotation region transparent electrode 33C.

図９は、回折光が入射する側から見た第３液晶素子１６Ｂの概略正面図である。   FIG. 9 is a schematic front view of the third liquid crystal element 16B as viewed from the side on which the diffracted light is incident.

第３液晶素子１６Ｂも、第２液晶素子１６Ａと同様の構成を有する。ただし、第３液晶素子１６Ｂの液晶層の各回転領域に封入された液晶分子は、入射する回折光の偏光方向２０２に対して120°（75°-（-45°））をなす方向２０７に配向される。   The third liquid crystal element 16B also has the same configuration as the second liquid crystal element 16A. However, the liquid crystal molecules enclosed in the rotation regions of the liquid crystal layer of the third liquid crystal element 16B are in a direction 207 that forms 120 ° (75 ° − (− 45 °)) with respect to the polarization direction 202 of the incident diffracted light. Oriented.

なお、変形例によれば、第２液晶素子１６Ａ及び第３液晶素子１６Ｂの内の何れか一方又は両方は省略されてもよい。   According to the modification, either one or both of the second liquid crystal element 16A and the third liquid crystal element 16B may be omitted.

制御部１０８は、シャッター素子１５による選択的透過と、偏光方向回転素子１６による偏光方向の回転とを制御する。   The control unit 108 controls selective transmission by the shutter element 15 and rotation of the polarization direction by the polarization direction rotation element 16.

図１０は、第１光源１０１Ａが出射した青色レーザ光２１１Ａに対する処理について説明するための模式図である。   FIG. 10 is a schematic diagram for explaining processing for the blue laser light 211A emitted from the first light source 101A.

図１０に示すように、第１光源１０１Ａが出射した青色レーザ光２１１Ａの偏光方向は、第１光源１０１Ａから出射されたときは鉛直方向２２１を向いている。この青色レーザ光２１１Ａは、光軸ＯＡ２に対して直交する方向から偏光ビームスプリッタ１３に入射され、偏光ビームスプリッタ１３により回折素子１１へ向けて反射され、回折素子１１に入射する。回折素子１１から出射した０次又は特定の方向に沿って回折された±１次の青色回折光は、第１位相変調素子１２により偏光方向を調整され、偏光ビームスプリッタ１３に入射される。偏光ビームスプリッタ１３は、第１位相変調素子１２から出射された青色回折光のうち、水平成分２２２のみを透過させ、第２位相変調素子１４に入射させる。第２位相変調素子１４は、偏光ビームスプリッタ１３から出射された青色回折光の偏光方向を水平方向に対して反時計回りに75°をなす方向２２３に回転させる。第２位相変調素子１４から出射した青色回折光は、液晶素子１５Ａに入射する。   As shown in FIG. 10, the polarization direction of the blue laser light 211A emitted from the first light source 101A is directed in the vertical direction 221 when emitted from the first light source 101A. The blue laser light 211A enters the polarization beam splitter 13 from a direction orthogonal to the optical axis OA2, is reflected toward the diffraction element 11 by the polarization beam splitter 13, and enters the diffraction element 11. The ± first-order blue diffracted light emitted from the diffraction element 11 and diffracted along the specific direction is adjusted in polarization direction by the first phase modulation element 12 and is incident on the polarization beam splitter 13. The polarization beam splitter 13 transmits only the horizontal component 222 out of the blue diffracted light emitted from the first phase modulation element 12 and makes it incident on the second phase modulation element 14. The second phase modulation element 14 rotates the polarization direction of the blue diffracted light emitted from the polarization beam splitter 13 in a direction 223 that forms 75 ° counterclockwise with respect to the horizontal direction. The blue diffracted light emitted from the second phase modulation element 14 enters the liquid crystal element 15A.

制御部１０８は、液晶素子１５Ａの第１透過領域２０Ｂの内、入射した±１次の青色回折光の回折方向に対応する小領域２０Ｂ１〜Ｂ６からその±１次の青色回折光が出射して検光子１５Ｂを透過するように、液晶素子１５Ａの対向電極２４及び各第１透明電極２３Ｂ１〜Ｂ６間に印加される電圧を制御する。即ち、制御部１０８は、第１透過領域２０Ｂの内の中央透過領域２０Ａを挟んで相互に対向する２個の小領域から出射する±１次の青色回折光の偏光方向が同じになり、その２個の小領域から±１次の青色回折光が出射して検光子１５Ｂを同時に透過するように、液晶素子１５Ａの対向電極２４及び各第１透明電極２３Ｂ１〜Ｂ６間に印加される電圧を制御する。また、制御部１０８は、液晶素子１５Ａの中央透過領域２０Ａから出射した０次の青色回折光が検光子１５Ｂを透過しないように、液晶素子１５Ａの対向電極２４及び中央透明電極２３Ａ間に印加される電圧を制御する。   The control unit 108 emits the ± 1st order blue diffracted light from the small regions 20B1 to B6 corresponding to the diffraction direction of the incident ± 1st order blue diffracted light in the first transmission region 20B of the liquid crystal element 15A. The voltage applied between the counter electrode 24 of the liquid crystal element 15A and the first transparent electrodes 23B1 to B6 is controlled so as to pass through the analyzer 15B. That is, the control unit 108 has the same polarization direction of ± first-order blue diffracted light emitted from two small regions facing each other across the central transmission region 20A in the first transmission region 20B. The voltage applied between the counter electrode 24 of the liquid crystal element 15A and each of the first transparent electrodes 23B1 to B6 so that ± 1st order blue diffracted light is emitted from the two small regions and simultaneously transmitted through the analyzer 15B. Control. Further, the control unit 108 is applied between the counter electrode 24 and the central transparent electrode 23A of the liquid crystal element 15A so that the 0th-order blue diffracted light emitted from the central transmission region 20A of the liquid crystal element 15A does not pass through the analyzer 15B. Control the voltage.

前述したように、液晶素子１５Ａの液晶分子２７は、入射する±１次の青色回折光の偏光方向に対して時計回りに45°をなす方向（図４の方向２０４）に配向されている。制御部１０８は、検光子１５Ｂを透過させる±１次の青色回折光が入射する小領域を半波長板として機能させないように、その小領域に印加される電圧を制御し、その小領域に入射した±１次の青色回折光の偏光方向を回転させない（偏光方向は図４の矢印２０２の方向、即ち、図１０の方向２２４になる）。一方、制御部１０８は、検光子１５Ｂを透過させない光が入射する小領域を半波長板として機能させるように、その小領域に印加される電圧を制御し、その小領域に入射した±１次の青色回折光の偏光方向を時計回りに90°回転させる（偏光方向は図４の矢印２０３の方向、即ち、図１０の方向２２４と直交する方向になる）。この半波長板として機能させる小領域に入射する光は、例えば迷光である。また、制御部１０８は、液晶素子１５Ａの中央透過領域２０Ａに入射した０次の青色回折光の偏光方向を時計回りに90°回転させる（偏光方向は図４の矢印２０３の方向、即ち、図１０の方向２２４と直交する方向になる）。液晶素子１５Ａを透過した０次又は±１次の青色回折光は、検光子１５Ｂに入射する。   As described above, the liquid crystal molecules 27 of the liquid crystal element 15A are aligned in a direction (direction 204 in FIG. 4) that forms 45 ° clockwise with respect to the polarization direction of the incident ± first-order blue diffracted light. The control unit 108 controls the voltage applied to the small area so that the small area where the ± first-order blue diffracted light transmitted through the analyzer 15B is incident does not function as a half-wave plate, and enters the small area. The polarization direction of the ± first-order blue diffracted light is not rotated (the polarization direction is the direction of the arrow 202 in FIG. 4, that is, the direction 224 in FIG. 10). On the other hand, the control unit 108 controls the voltage applied to the small area so that the small area where the light that does not transmit through the analyzer 15B is incident functions as a half-wave plate, and ± 1st order incident on the small area The polarization direction of the blue diffracted light is rotated 90 ° clockwise (the polarization direction is the direction of the arrow 203 in FIG. 4, that is, the direction orthogonal to the direction 224 in FIG. 10). The light that enters the small region that functions as the half-wave plate is, for example, stray light. Further, the control unit 108 rotates the polarization direction of the zero-order blue diffracted light incident on the central transmission region 20A of the liquid crystal element 15A by 90 ° in the clockwise direction (the polarization direction is the direction of the arrow 203 in FIG. 10 directions 224 are orthogonal to each other). The 0th-order or ± 1st-order blue diffracted light transmitted through the liquid crystal element 15A is incident on the analyzer 15B.

検光子１５Ｂは、液晶素子１５Ａに入射した±１次の青色回折光の偏光方向（方向２２３）と平行な偏光方向（方向２２５）を有する青色回折光のみを透過させる。図１０に示す例において、０次の青色回折光は、検光子１５Ｂを透過せず、±１次の青色回折光は、検光子１５Ｂを透過する。検光子１５Ｂを透過した±１次の青色回折光は、第２液晶素子１６Ａの第１回転領域３０Ｂに入射する。   The analyzer 15B transmits only blue diffracted light having a polarization direction (direction 225) parallel to the polarization direction (direction 223) of ± first-order blue diffracted light incident on the liquid crystal element 15A. In the example shown in FIG. 10, the 0th-order blue diffracted light does not pass through the analyzer 15B, and the ± 1st-order blue diffracted light passes through the analyzer 15B. The ± 1st-order blue diffracted light transmitted through the analyzer 15B is incident on the first rotation region 30B of the second liquid crystal element 16A.

なお、検光子１５Ｂは、液晶素子１５Ａに入射した回折光の偏光方向と直交する偏光方向を有する回折光のみを透過させるように配置されてもよい。その場合、制御部１０８は、検光子１５Ｂを透過させる回折光が入射する液晶素子１５Ａの小領域を半波長板として機能させ、検光子１５Ｂを透過させない回折光が入射する液晶素子１５Ａの小領域を半波長板として機能させないように、小領域に印加される電圧を制御する。   The analyzer 15B may be arranged so as to transmit only diffracted light having a polarization direction orthogonal to the polarization direction of the diffracted light incident on the liquid crystal element 15A. In this case, the control unit 108 causes the small area of the liquid crystal element 15A, which receives the diffracted light transmitted through the analyzer 15B, to function as a half-wave plate, and the small area of the liquid crystal element 15A, which receives the diffracted light not transmitted through the analyzer 15B. Is controlled so as not to function as a half-wave plate.

制御部１０８は、利用者による設定に応じて、第２液晶素子１６Ａの第１回転領域３０Ｂにおいて、入射した±１次の青色回折光の偏光方向を回転するように、第２対向電極及び第１回転領域透明電極３３Ｂ間に印加される電圧を制御する。   The control unit 108 controls the second counter electrode and the second counter electrode so as to rotate the polarization direction of the incident ± first-order blue diffracted light in the first rotation region 30B of the second liquid crystal element 16A according to the setting by the user. The voltage applied between the 1-rotation region transparent electrodes 33B is controlled.

前述したように、第２液晶素子１６Ａの液晶分子は、入射する±１次の青色回折光の偏光方向に対して時計回りに60°をなす方向（図７の方向２０５）に配向されている。制御部１０８は、±１次の青色回折光の偏光方向を回転させる場合、第２液晶素子１６Ａの第１回転領域３０Ｂを半波長板として機能させるように、第１回転領域３０Ｂに印加される電圧を制御し、その±１次の青色回折光の偏光方向を時計回りに120°回転させる（偏光方向は図７の矢印２０６の方向、即ち、図１０の方向２２６の方向になる）。一方、制御部１０８は、±１次の青色回折光の偏光方向を回転させない場合、第２液晶素子１６Ａの第１回転領域３０Ｂを半波長板として機能させないように、第１回転領域３０Ｂに印加される電圧を制御し、その±１次の青色回折光の偏光方向を回転させない（偏光方向は図７の矢印２０２の方向になる）。   As described above, the liquid crystal molecules of the second liquid crystal element 16A are aligned in a direction (direction 205 in FIG. 7) that forms 60 ° clockwise with respect to the polarization direction of the incident ± first-order blue diffracted light. . When the polarization direction of the ± 1st-order blue diffracted light is rotated, the control unit 108 is applied to the first rotation region 30B so that the first rotation region 30B of the second liquid crystal element 16A functions as a half-wave plate. The voltage is controlled, and the polarization direction of the ± 1st-order blue diffracted light is rotated 120 ° clockwise (the polarization direction is the direction of the arrow 206 in FIG. 7, that is, the direction 226 in FIG. 10). On the other hand, when the polarization direction of ± first-order blue diffracted light is not rotated, the control unit 108 applies the first rotation region 30B of the second liquid crystal element 16A to the first rotation region 30B so as not to function as a half-wave plate. The polarization direction of the ± 1st order blue diffracted light is not rotated (the polarization direction is the direction of the arrow 202 in FIG. 7).

同様に、制御部１０８は、利用者による設定に応じて、第３液晶素子１６Ｂの第１回転領域４０Ｂにおいて、入射した±１次の青色回折光の偏光方向を回転するように、第３液晶素子１６Ｂの第２対向電極及び第１回転領域透明電極間に印加される電圧を制御する。   Similarly, the control unit 108 controls the third liquid crystal so as to rotate the polarization direction of the incident ± first-order blue diffracted light in the first rotation region 40B of the third liquid crystal element 16B according to the setting by the user. The voltage applied between the second counter electrode of the element 16B and the first rotation region transparent electrode is controlled.

前述したように、第３液晶素子１６Ｂの液晶分子は、入射する±１次の青色回折光の偏光方向に対して時計回りに120°をなす方向（図９の方向２０７）に配向されている。制御部１０８は、±１次の青色回折光を回転させる場合、第３液晶素子１６Ｂの第１回転領域４０Ｂを半波長板として機能させるように、第１回転領域４０Ｂに印加される電圧を制御し、その±１次の青色回折光の偏光方向を時計回りに240°回転させる（偏光方向は図９の矢印２０８の方向、即ち、図１０の方向２２７の方向になる）。一方、制御部１０８は、±１次の青色回折光の偏光方向を回転させない場合、第３液晶素子１６Ｂの第１回転領域を半波長板として機能させないように、第１回転領域４０Ｂに印加される電圧を制御し、その±１次の青色回折光の偏光方向を回転させない（偏光方向は図７の矢印２０２の方向になる）。   As described above, the liquid crystal molecules of the third liquid crystal element 16B are aligned in a direction (direction 207 in FIG. 9) that forms 120 ° clockwise with respect to the polarization direction of the incident ± first-order blue diffracted light. . When the ± first-order blue diffracted light is rotated, the controller 108 controls the voltage applied to the first rotation region 40B so that the first rotation region 40B of the third liquid crystal element 16B functions as a half-wave plate. Then, the polarization direction of the ± 1st-order blue diffracted light is rotated clockwise by 240 ° (the polarization direction is the direction of the arrow 208 in FIG. 9, ie, the direction 227 in FIG. 10). On the other hand, when the polarization direction of the ± 1st-order blue diffracted light is not rotated, the control unit 108 is applied to the first rotation region 40B so that the first rotation region of the third liquid crystal element 16B does not function as a half-wave plate. The polarization direction of the ± 1st-order blue diffracted light is not rotated (the polarization direction is the direction of arrow 202 in FIG. 7).

図１０に示す方向２２８は、検光子１５Ｂを透過し、第３液晶素子１６Ｂにより偏光方向を回転された青色回折光の偏光方向を表す。   A direction 228 shown in FIG. 10 represents the polarization direction of the blue diffracted light that is transmitted through the analyzer 15B and whose polarization direction is rotated by the third liquid crystal element 16B.

図１１は、第２光源１０１Ｂが出射した赤色レーザ光２１１Ｂに対する処理について説明するための模式図である。図１１に示す赤色レーザ光２１１Ｂに対する処理は、図１０に示す青色レーザ光２１１Ａに対する処理と同時に実行される。   FIG. 11 is a schematic diagram for explaining processing for the red laser light 211B emitted from the second light source 101B. The process for the red laser light 211B shown in FIG. 11 is executed simultaneously with the process for the blue laser light 211A shown in FIG.

図１１に示すように、第２光源１０１Ｂが出射した赤色レーザ光２１１Ｂの偏光方向も、第１光源１０１Ａが出射した青色レーザ光２１１Ａの偏光方向と同様に、第２光源１０１Ｂから出射されたときは鉛直方向２３１を向いている。その後、青色レーザ光２１１Ａと同様に、赤色レーザ光２１１Ｂは回折素子１１に入射し、回折素子１１から出射した０次又は特定の方向に沿って回折された±１次の赤色回折光は、各部を介して液晶素子１５Ａに入射する。   As shown in FIG. 11, when the polarization direction of the red laser light 211B emitted from the second light source 101B is emitted from the second light source 101B in the same manner as the polarization direction of the blue laser light 211A emitted from the first light source 101A. Faces in the vertical direction 231. Thereafter, similar to the blue laser light 211A, the red laser light 211B enters the diffraction element 11, and the ± first-order red diffracted light diffracted along the 0th order or specific direction emitted from the diffraction element 11 Through the liquid crystal element 15A.

制御部１０８は、液晶素子１５Ａの第２透過領域２０Ｃの内、入射した±１次の赤色回折光の回折方向に対応する小領域２０Ｃ１〜Ｃ６からその±１次の赤色回折光が出射して検光子１５Ｂを透過するように、液晶素子１５Ａの対向電極２４及び各第２透明電極２３Ｃ１〜Ｃ６間に印加される電圧を制御する。即ち、制御部１０８は、液晶素子１５Ａの第２透過領域２０Ｃの内の±１次の青色回折光を透過させた２個の小領域のそれぞれと隣接する２個の小領域から出射する±１次の赤色回折光の偏光方向が同じになり、その２個の小領域から±１次の赤色回折光が同時に出射して検光子１５Ｂを透過するように、液晶素子１５Ａの対向電極２４及び各第２透明電極２３Ｃ１〜Ｃ６間に印加される電圧を制御する。また、制御部１０８は、液晶素子１５Ａの中央透過領域２０Ａから出射する０次の赤色回折光が検光子１５Ｂを透過しないように、液晶素子１５Ａの対向電極２４及び中央透明電極２３Ａ間に印加される電圧を制御する。   The control unit 108 emits the ± 1st order red diffracted light from the small regions 20C1 to C6 corresponding to the diffraction direction of the incident ± 1st order red diffracted light in the second transmission region 20C of the liquid crystal element 15A. The voltage applied between the counter electrode 24 of the liquid crystal element 15A and each of the second transparent electrodes 23C1 to C6 is controlled so as to pass through the analyzer 15B. That is, the control unit 108 emits light from two small regions adjacent to each of the two small regions that transmit the ± 1st-order blue diffracted light in the second transmission region 20C of the liquid crystal element 15A. The polarization direction of the next red diffracted light is the same, and the ± 1st order red diffracted light is simultaneously emitted from the two small regions and transmitted through the analyzer 15B. The voltage applied between the second transparent electrodes 23C1 to C6 is controlled. Further, the control unit 108 is applied between the counter electrode 24 and the central transparent electrode 23A of the liquid crystal element 15A so that the 0th-order red diffracted light emitted from the central transmission region 20A of the liquid crystal element 15A does not pass through the analyzer 15B. Control the voltage.

このように、制御部１０８は、液晶素子１５Ａの第１透過領域２０Ｂの内、対応する小領域から±１次の青色回折光が出射して検光子１５Ｂを透過するように、液晶素子１５Ａの対向電極２４及び各第１透明電極２３Ｂ１〜Ｂ６間に印加される電圧を制御し、且つ同時に、液晶素子１５Ａの第２透過領域２０Ｃの内、対応する小領域から±１次の赤色回折光が出射して検光子１５Ｂを透過するように、液晶素子１５Ａの対向電極２４及び各第２透明電極２３Ｃ１〜Ｃ６間に印加される電圧を制御する。これにより、制御部１０８は、各方向に沿って回折された±１次の青色回折光及び赤色回折光を、各方向毎に同時にシャッター素子１５を透過させて、超解像画像を生成するために利用することができる。   As described above, the control unit 108 allows the ± first-order blue diffracted light to be emitted from the corresponding small region of the first transmission region 20B of the liquid crystal element 15A and transmitted through the analyzer 15B. The voltage applied between the counter electrode 24 and the first transparent electrodes 23B1 to B6 is controlled, and at the same time, ± 1st-order red diffracted light is emitted from a corresponding small region in the second transmissive region 20C of the liquid crystal element 15A. The voltage applied between the counter electrode 24 of the liquid crystal element 15A and the second transparent electrodes 23C1 to C6 is controlled so as to be emitted and transmitted through the analyzer 15B. As a result, the control unit 108 transmits the first-order blue diffracted light and red diffracted light diffracted along each direction through the shutter element 15 simultaneously in each direction to generate a super-resolution image. Can be used.

制御部１０８は、液晶素子１５Ｂを透過させる±１次の赤色回折光が入射する小領域については半波長板として機能させないように、その小領域に印加される電圧を制御し、その小領域に入射した±１次の赤色回折光の偏光方向を回転させない。一方、制御部１０８は、液晶素子１５Ｂを透過させる±１次の赤色回折光が入射する小領域については半波長板として機能するように、その小領域に印加される電圧を制御し、その小領域に入射した±１次の赤色回折光の偏光方向を時計回りに90°回転させる。この半波長板として機能させる小領域は、前述の半波長板として機能させない小領域以外の小領域であり、この半波長板として機能させる小領域に入射する光は、例えば迷光である。また、制御部１０８は、液晶素子１５Ａの中央透過領域２０Ａが半波長板として機能するように、中央透過領域２０Ａに印加される電圧を制御し、中央透過領域２０Ａに入射した０次の赤色回折光の偏光方向を時計回りに90°回転させる。液晶素子１５Ａを透過した０次又は±１次の赤色回折光は、検光子１５Ｂに入射する。   The control unit 108 controls the voltage applied to the small area so that the small area where the ± first-order red diffracted light transmitted through the liquid crystal element 15B is incident does not function as a half-wave plate. The polarization direction of the incident ± first-order red diffracted light is not rotated. On the other hand, the control unit 108 controls the voltage applied to the small area so that it functions as a half-wave plate for the small area where the ± first-order red diffracted light that is transmitted through the liquid crystal element 15B is incident. The polarization direction of the ± 1st-order red diffracted light incident on the region is rotated 90 ° clockwise. The small region that functions as the half-wave plate is a small region other than the small region that does not function as the half-wave plate, and the light incident on the small region that functions as the half-wave plate is, for example, stray light. Further, the control unit 108 controls the voltage applied to the central transmission region 20A so that the central transmission region 20A of the liquid crystal element 15A functions as a half-wave plate, and the 0th-order red diffraction incident on the central transmission region 20A. Rotate the polarization direction of light 90 ° clockwise. The 0th-order or ± 1st-order red diffracted light transmitted through the liquid crystal element 15A is incident on the analyzer 15B.

透明電極２３と対向電極２４の間に電圧が印加されると、液晶分子２７は、その電圧に応じて電圧が印加された方向に対して平行になる方向に傾く。図５に示すように、液晶分子２７の長軸方向と、電圧が印加された方向（図５のｚ軸方向）とがなす角度をψとすれば、液晶層２０を透過する回折光の光軸ＯＡ２と、液晶分子２７の長軸方向とは角度ψをなす。このとき、液晶分子２７を図５のｚ軸方向からｘｙ平面に投影した場合の投影像の長軸方向に平行な偏光成分に対する液晶分子の屈折率（液晶分子を図５のｚ軸方向から見た場合の見かけ上の屈折率）をnψとすると、no≦nψ≦neとなる。ただし、noは液晶分子２７の長軸方向に直交する偏光成分に対する屈折率であり、neは液晶分子２７の長軸方向に平行な偏光成分に対する屈折率である。 When a voltage is applied between the transparent electrode 23 and the counter electrode 24, the liquid crystal molecules 27 are inclined in a direction parallel to the direction in which the voltage is applied according to the voltage. As shown in FIG. 5, if the angle formed by the major axis direction of the liquid crystal molecules 27 and the direction in which the voltage is applied (z-axis direction in FIG. 5) is ψ, the light of diffracted light transmitted through the liquid crystal layer 20. The axis OA2 and the major axis direction of the liquid crystal molecules 27 form an angle ψ. At this time, when the liquid crystal molecules 27 are projected from the z-axis direction of FIG. 5 onto the xy plane, the refractive index of the liquid crystal molecules with respect to the polarization component parallel to the major axis direction of the projected image (the liquid crystal molecules are viewed from the z-axis direction of FIG. 5). the apparent refractive index) when the when n [psi, a n o ≦ n ψ ≦ n e . However, n o is the refractive index for polarized light component perpendicular to the long axis of the liquid crystal molecules 27, n e is the refractive index for parallel polarization component in the longitudinal direction of the liquid crystal molecules 27.

液晶層２０に含まれる液晶分子２７がホモジニアス配向されており、液晶層２０の厚さがdである場合、液晶分子２７の配向方向に平行な偏光成分（液晶分子２７を図５のｚ軸方向からｘｙ平面に投影した場合の投影像の長軸方向に平行な偏光成分）の光路長はnψdとなり、液晶分子２７の配向方向に直交する偏光成分（液晶分子２７を図５のｚ軸方向からｘｙ平面に投影した場合の投影像の短軸方向に平行な偏光成分）の光路長はnodとなる。即ち、液晶分子２７の配向方向に平行な偏光成分と液晶分子２７の配向方向に直交する偏光成分との間に、光路長差Δnd(=nψd-nod)が生じる。したがって、透明電極２３と対向電極２４の間に印加する電圧を調節することにより、液晶分子２７の配向方向に平行な偏光成分と、液晶分子２７の配向方向に直交する偏光成分との光路長差を調節できる。しかしながら、この光路長差によって各偏光成分の間に生じる位相差は回折光の波長に応じて異なるため、各偏光成分の間に半波長分の位相差を生じさせるために印加すべき電圧は回折光の波長に応じて異なる。 When the liquid crystal molecules 27 contained in the liquid crystal layer 20 are homogeneously aligned and the thickness of the liquid crystal layer 20 is d, the polarization component parallel to the alignment direction of the liquid crystal molecules 27 (the liquid crystal molecules 27 are changed to the z-axis direction in FIG. 5). The optical path length of the polarization component parallel to the major axis direction of the projected image when projected onto the xy plane from the optical axis is n ψ d, and the polarization component orthogonal to the alignment direction of the liquid crystal molecules 27 (the liquid crystal molecules 27 are z-axis in FIG. 5). the optical path length of the polarized light component parallel to the short axis direction of the projection image) when projected in a direction in the xy plane becomes n o d. That is, between the orthogonal polarization components parallel polarization component and the alignment direction of liquid crystal molecules 27 in the alignment direction of liquid crystal molecules 27, the optical path length difference Δnd (= n ψ dn o d ) occurs. Accordingly, by adjusting the voltage applied between the transparent electrode 23 and the counter electrode 24, the optical path length difference between the polarization component parallel to the alignment direction of the liquid crystal molecules 27 and the polarization component orthogonal to the alignment direction of the liquid crystal molecules 27. Can be adjusted. However, since the phase difference generated between each polarization component due to this optical path length difference differs depending on the wavelength of the diffracted light, the voltage to be applied to generate a half-wave phase difference between each polarization component is diffracted. It depends on the wavelength of light.

図１２は、各波長を有する回折光毎に、透明電極２３と対向電極２４の間に印加する電圧と、各電圧を印加したときに回折光の相互に直交する二つの偏光成分の間に生じる位相差の関係を表すグラフである。   FIG. 12 shows, for each diffracted light having each wavelength, a voltage applied between the transparent electrode 23 and the counter electrode 24, and two polarized components of the diffracted light orthogonal to each other when each voltage is applied. It is a graph showing the relationship of a phase difference.

図１２の横軸は、透明電極２３と対向電極２４の間に印加する電圧（実行電圧）[Vrms]を示し、縦軸は、位相差量を示す。この位相差量の単位は、一波長であり、位相差量に各光の波長を乗じた値が光路長差となる。   The horizontal axis in FIG. 12 indicates the voltage (execution voltage) [Vrms] applied between the transparent electrode 23 and the counter electrode 24, and the vertical axis indicates the phase difference amount. The unit of this phase difference amount is one wavelength, and a value obtained by multiplying the phase difference amount by the wavelength of each light is the optical path length difference.

図１２に示すように、例えば、波長405[nm]の青色回折光に対して、半波長（0.5波長）分の位相差を生じさせるためには略5.0[Vrms]の電圧を印加する必要がある。一方、波長647[nm]の赤色回折光に対して、半波長分の位相差を生じさせるためには略3.3[Vrms]の電圧を印加する必要がある。即ち、液晶層２０を半波長板として機能させるために印加する電圧は、液晶層２０に透過させる光の波長に応じて異なる。したがって、液晶層２０を半波長板として機能させるために液晶層２０全体に同じ電圧を印加した場合、青色回折光及び赤色回折光の内の少なくとも一方の回折光に対する位相変調精度が低下し、所望の回折光を適切に透過させることができなくなる。   As shown in FIG. 12, for example, a voltage of approximately 5.0 [Vrms] needs to be applied in order to generate a phase difference of half wavelength (0.5 wavelength) with respect to blue diffracted light having a wavelength of 405 [nm]. is there. On the other hand, a voltage of approximately 3.3 [Vrms] needs to be applied in order to generate a phase difference of half a wavelength for red diffracted light having a wavelength of 647 [nm]. That is, the voltage applied to cause the liquid crystal layer 20 to function as a half-wave plate varies depending on the wavelength of light transmitted through the liquid crystal layer 20. Therefore, when the same voltage is applied to the entire liquid crystal layer 20 in order to make the liquid crystal layer 20 function as a half-wave plate, the phase modulation accuracy with respect to at least one of the blue diffracted light and the red diffracted light is lowered, and the desired It becomes impossible to transmit the diffracted light properly.

そこで、制御部１０８は、入射する回折光の波長が異なる液晶素子１５Ａの第１透過領域２０Ｂと第２透過領域２０Ｃとで、液晶層２０を半波長板として機能させるために液晶素子１５Ａの対向電極２４及び各第１透明電極２３Ｂ１〜Ｂ６間に印加する電圧と、対向電極２４及び各第２透明電極２３Ｃ１〜Ｃ６間に印加する電圧とを、入射する回折光の波長に応じて異ならせる。なお、各電極間に印加される電圧の値は、図１２に示したグラフ等に基づいて定められる。このように、制御部１０８は、液晶素子１５Ａの第１透過領域２０Ｂに入射する回折光及び第２透過領域２０Ｃに入射する回折光について、相互に直交する二つの偏光成分の間に生じる位相差がそれぞれ各回折光の波長の半分となるように、液晶素子１５Ａの第１透過領域２０Ｂ及び第２透過領域２０Ｃに印加される電圧を制御する。これにより、制御部１０８は、第１透過領域２０Ｂを透過した±１次の青色回折光の偏光方向、及び、第２透過領域２０Ｃを透過した±１次の赤色回折光の偏光方向を回転させる角度が、各回折光の波長に関わらず一定（90°）となるように制御する。   Therefore, the control unit 108 opposes the liquid crystal element 15A so that the liquid crystal layer 20 functions as a half-wave plate in the first transmissive region 20B and the second transmissive region 20C of the liquid crystal element 15A having different wavelengths of incident diffracted light. The voltage applied between the electrode 24 and each of the first transparent electrodes 23B1 to B6 and the voltage applied between the counter electrode 24 and each of the second transparent electrodes 23C1 to C6 are made different according to the wavelength of incident diffracted light. The value of the voltage applied between the electrodes is determined based on the graph shown in FIG. As described above, the control unit 108 generates a phase difference between two polarization components orthogonal to each other with respect to the diffracted light incident on the first transmission region 20B and the diffracted light incident on the second transmission region 20C of the liquid crystal element 15A. The voltage applied to the first transmissive region 20B and the second transmissive region 20C of the liquid crystal element 15A is controlled so that each becomes half the wavelength of each diffracted light. Accordingly, the control unit 108 rotates the polarization direction of the ± 1st order blue diffracted light transmitted through the first transmission region 20B and the polarization direction of the ± 1st order red diffracted light transmitted through the second transmission region 20C. The angle is controlled to be constant (90 °) regardless of the wavelength of each diffracted light.

これにより、シャッター素子１５は、波長の異なる複数の回折光の各偏光方向を同時に、検光子１５Ｂが透過させる角度又はその角度と直交する角度に精度良く回転させることが可能となり、特定の小領域に入射した各回折光を精度良く透過させ、他の小領域に入射した各回折光を精度良く遮断させることが可能となる。   Thereby, the shutter element 15 can simultaneously rotate each polarization direction of a plurality of diffracted lights having different wavelengths with high accuracy to an angle transmitted by the analyzer 15B or an angle orthogonal to the angle. It is possible to transmit each diffracted light incident on the light with high accuracy and to block each diffracted light incident on another small region with high accuracy.

検光子１５Ｂは、偏光方向が、液晶素子１５Ａに入射した±１次の赤色回折光の偏光方向（方向２３３）と平行な偏光方向（方向２３５）又は直交する偏光方向を有する赤色回折光のみを透過させる。図１１に示す例において、０次の赤色回折光は、検光子１５Ｂを透過せず、±１次の赤色回折光は、検光子１５Ｂを透過する。検光子１５Ｂを透過した±１次の赤色回折光は、第２液晶素子１６Ａの第２回転領域３０Ｃに入射する。   The analyzer 15B receives only red diffracted light having a polarization direction (direction 235) parallel to or perpendicular to the polarization direction (direction 233) of ± first-order red diffracted light incident on the liquid crystal element 15A. Make it transparent. In the example shown in FIG. 11, the 0th-order red diffracted light does not pass through the analyzer 15B, and the ± 1st-order red diffracted light passes through the analyzer 15B. The ± 1st order red diffracted light transmitted through the analyzer 15B is incident on the second rotation region 30C of the second liquid crystal element 16A.

制御部１０８は、利用者による設定に応じて、第２液晶素子１６Ａの第２回転領域３０Ｃにおいて、入射した±１次の赤色回折光の偏光方向を回転するように、第２対向電極及び各第２回転領域透明電極３３Ｃ間に印加される電圧を制御する。   The control unit 108 controls the second counter electrode and each of the second counter electrode and each of the second rotation regions 30C of the second liquid crystal element 16A to rotate the polarization direction of the incident ± first-order red diffracted light according to the setting by the user. The voltage applied between the second rotating region transparent electrodes 33C is controlled.

このように、制御部１０８は、第２液晶素子１６Ａの第１回転領域３０Ｂにおいて±１次の青色回折光の偏光方向を回転させ、且つ同時に、第２液晶素子１６Ａの第２回転領域３０Ｃにおいて±１次の赤色回折光の偏光方向を回転させるように電圧を制御する。これにより、制御部１０８は、±１次の青色回折光及び赤色回折光の偏光方向を同時に回転させて、超解像画像を生成するために利用することができる。   As described above, the control unit 108 rotates the polarization direction of the ± 1st-order blue diffracted light in the first rotation region 30B of the second liquid crystal element 16A, and at the same time, in the second rotation region 30C of the second liquid crystal element 16A. The voltage is controlled so as to rotate the polarization direction of the ± 1st-order red diffracted light. Accordingly, the control unit 108 can be used to generate a super-resolution image by simultaneously rotating the polarization directions of the ± first-order blue diffracted light and red diffracted light.

制御部１０８は、±１次の赤色回折光の偏光方向を回転させる場合、第２液晶素子１６Ａの第２回転領域３０Ｃを半波長板として機能させるように、第２回転領域３０Ｃに印加される電圧を制御し、その±１次の赤色回折光の偏光方向を時計回りに120°回転させる。一方、制御部１０８は、±１次の赤色回折光の偏光方向を回転させない場合、第２液晶素子１６Ａの第２回転領域３０Ｃを半波長板として機能させないように、第２回転領域３０Ｃに印加される電圧を制御し、その±１次の赤色回折光の偏光方向を回転させない。   When the polarization direction of the ± 1st-order red diffracted light is rotated, the control unit 108 is applied to the second rotation region 30C so that the second rotation region 30C of the second liquid crystal element 16A functions as a half-wave plate. The voltage is controlled, and the polarization direction of the ± 1st-order red diffracted light is rotated 120 ° clockwise. On the other hand, when the polarization direction of the ± 1st-order red diffracted light is not rotated, the control unit 108 applies the second rotation region 30C of the second liquid crystal element 16A to the second rotation region 30C so as not to function as a half-wave plate. The polarization direction of the ± 1st order red diffracted light is not rotated.

また、液晶素子１５Ａと同様に、制御部１０８は、第２液晶素子１６Ａの第１回転領域３０Ｂと第２回転領域３０Ｃとで、第２液晶層を半波長板として機能させるために第２対向電極及び第１回転領域透明電極３３Ｂ間に印加する電圧と、第２対向電極及び第２回転領域透明電極３３Ｃ間に印加する電圧とを、入射する回折光の波長に応じて異ならせる。このように、制御部１０８は、第２液晶素子１６Ａの第１回転領域３０Ｂ及び第２回転領域３０Ｃを透過させる各回折光において相互に直交する二つの偏光成分の間に生じる位相差がそれぞれ各回折光の波長の半分となるように、第２液晶素子１６Ａの第１回転領域３０Ｂ及び第２回転領域３０Ｃに印加される電圧を制御する。これにより、制御部１０８は、第２液晶素子１６Ａの第１回転領域３０Ｂを透過した±１次の青色回折光の偏光方向、及び、第２回転領域３０Ｃを透過した±１次の赤色回折光の偏光方向を回転させる角度が、各回折光の波長に関わらず一定（120°）となるように、第２液晶素子１６Ａの第１回転領域３０Ｂ及び第２回転領域３０Ｃに印加される電圧を制御する。   Further, similarly to the liquid crystal element 15A, the control unit 108 performs the second counter operation so that the second liquid crystal layer functions as a half-wave plate in the first rotation area 30B and the second rotation area 30C of the second liquid crystal element 16A. The voltage applied between the electrode and the first rotation region transparent electrode 33B and the voltage applied between the second counter electrode and the second rotation region transparent electrode 33C are made different according to the wavelength of the incident diffracted light. As described above, the control unit 108 has a phase difference generated between two polarization components orthogonal to each other in each diffracted light transmitted through the first rotation region 30B and the second rotation region 30C of the second liquid crystal element 16A. The voltage applied to the first rotation region 30B and the second rotation region 30C of the second liquid crystal element 16A is controlled so as to be half the wavelength of the diffracted light. Accordingly, the control unit 108 causes the polarization direction of the ± 1st order blue diffracted light transmitted through the first rotation region 30B of the second liquid crystal element 16A and the ± 1st order red diffracted light transmitted through the second rotation region 30C. The voltage applied to the first rotation region 30B and the second rotation region 30C of the second liquid crystal element 16A is set so that the angle at which the polarization direction is rotated is constant (120 °) regardless of the wavelength of each diffracted light. Control.

これにより、第２液晶素子１６Ａは、波長の異なる複数の光の各偏光方向を同時に、所望の角度に精度良く回転させることが可能となる。   Accordingly, the second liquid crystal element 16A can simultaneously rotate the polarization directions of a plurality of light beams having different wavelengths to a desired angle with high accuracy.

また、制御部１０８は、液晶素子１５Ａの第１透過領域２０Ｂ及び第２透過領域２０Ｃと異なり、第２液晶素子１６Ａの第１回転領域３０Ｂ及び第２回転領域３０Ｃのそれぞれにおいて、回折光の偏光方向の回転を一括して制御する。これにより、制御部１０８は、偏光方向の回転制御に係る処理負荷が増大することを抑制できる。   In addition, unlike the first transmission region 20B and the second transmission region 20C of the liquid crystal element 15A, the control unit 108 polarizations the diffracted light in each of the first rotation region 30B and the second rotation region 30C of the second liquid crystal element 16A. Control the rotation of the direction at once. Thereby, the control part 108 can suppress that the processing load concerning the rotation control of a polarization direction increases.

同様に、制御部１０８は、利用者による設定に応じて、第３液晶素子１６Ｂの第２回転領域４０Ｃにおいて、入射した±１次の赤色回折光の偏光方向を回転するように、第３液晶素子１６Ｂの第２対向電極及び各第２回転領域透明電極間に印加される電圧を制御する。   Similarly, the control unit 108 rotates the third liquid crystal so as to rotate the polarization direction of the incident ± first-order red diffracted light in the second rotation region 40C of the third liquid crystal element 16B according to the setting by the user. The voltage applied between the second counter electrode of the element 16B and each second rotation region transparent electrode is controlled.

制御部１０８は、±１次の赤色回折光の偏光方向を回転させる場合、第３液晶素子１６Ｂの第２回転領域４０Ｃを半波長板として機能させるように、第２回転領域４０Ｃに印加される電圧を制御し、その±１次の赤色回折光の偏光方向を時計回りに240°回転させる。一方、制御部１０８は、±１次の赤色回折光の偏光方向を回転させない場合、第３液晶素子１６Ｂの第２回転領域４０Ｃを半波長板として機能させないように、第２回転領域４０Ｃに印加される電圧を制御し、その±１次の赤色回折光の偏光方向を回転させない。   When the polarization direction of the ± 1st order red diffracted light is rotated, the control unit 108 is applied to the second rotation region 40C so that the second rotation region 40C of the third liquid crystal element 16B functions as a half-wave plate. The voltage is controlled, and the polarization direction of the ± 1st-order red diffracted light is rotated 240 ° clockwise. On the other hand, when the polarization direction of the ± 1st-order red diffracted light is not rotated, the control unit 108 applies the second rotation region 40C to the second rotation region 40C so that the second rotation region 40C of the third liquid crystal element 16B does not function as a half-wave plate. The polarization direction of the ± 1st order red diffracted light is not rotated.

図１１に示す方向２３８は、検光子１５Ｂを透過し、第３液晶素子１６Ｂにより偏光方向を回転された赤色回折光の偏光方向を表す。図１０及び図１１に示すように、光変調ユニット１０２が出力する波長の異なる複数の回折光の偏光方向は、同一の方向を向いている。このように、光変調ユニット１０２は、青色レーザ光と赤色レーザ光のそれぞれに対して、独立して、各色レーザ光の波長に応じた適切な量の位相変調を行うことが可能となり、青色レーザ光と赤色レーザ光に対する処理を同時且つ適切に実行することが可能となる。   A direction 238 shown in FIG. 11 represents the polarization direction of the red diffracted light that has been transmitted through the analyzer 15B and whose polarization direction has been rotated by the third liquid crystal element 16B. As shown in FIGS. 10 and 11, the polarization directions of a plurality of diffracted lights having different wavelengths output from the light modulation unit 102 are in the same direction. In this way, the light modulation unit 102 can independently perform an appropriate amount of phase modulation according to the wavelength of each color laser beam for each of the blue laser beam and the red laser beam. It is possible to execute the processing for the light and the red laser beam simultaneously and appropriately.

図１３は、制御部１０８によって生成される試料画像の一例を示す模式図である。   FIG. 13 is a schematic diagram illustrating an example of a sample image generated by the control unit 108.

図１３に示す画像Ｊは、第１光源１０１Ａが出射した青色レーザ光に基づいて生成された試料画像の一例である。画像Ａ〜Ｉに示される各矩形は、回折素子１１に表示される回折格子の各格子線の概念図を示す。   An image J shown in FIG. 13 is an example of a sample image generated based on the blue laser light emitted from the first light source 101A. Each rectangle shown in the images A to I shows a conceptual diagram of each grating line of the diffraction grating displayed on the diffraction element 11.

画像Ａ〜Ｃは、液晶素子１５Ａの第１透過領域２０Ｂの小領域２０Ｂ１、Ｂ４を透過させた青色回折光に基づいて生成されたモアレ縞の画像である。画像Ｄ〜Ｆは、液晶素子１５Ａの第１透過領域２０Ｂの小領域２０Ｂ２、Ｂ５を透過させた青色回折光に基づいて生成されたモアレ縞の画像である。画像Ｇ〜Ｉは、液晶素子１５Ａの第１透過領域２０Ｂの小領域２０Ｂ３、Ｂ６を透過させた青色回折光に基づいて生成されたモアレ縞の画像である。画像Ａ〜Ｃ、Ｄ〜Ｆ、Ｇ〜Ｉのそれぞれにおいて、回折素子１１に表示させる回折格子の各格子線の位置は、各格子線と直交する方向、すなわち各レーザ光が回折する方向に沿ってシフトしている。試料画像Ｊは、画像Ａ〜Ｉを合成することにより生成される。試料画像Ｊは、回折方向、及び、回折格子の位相が異なる複数の回折光を用いて生成されるため、高解像度に生成される。   Images A to C are images of moire fringes generated based on the blue diffracted light transmitted through the small regions 20B1 and B4 of the first transmission region 20B of the liquid crystal element 15A. Images D to F are images of moire fringes generated based on the blue diffracted light transmitted through the small regions 20B2 and B5 of the first transmission region 20B of the liquid crystal element 15A. Images G to I are images of moire fringes generated based on blue diffracted light transmitted through the small regions 20B3 and B6 of the first transmission region 20B of the liquid crystal element 15A. In each of the images A to C, D to F, and G to I, the position of each grating line of the diffraction grating displayed on the diffraction element 11 is along the direction orthogonal to each grating line, that is, the direction in which each laser beam is diffracted. Shifting. The sample image J is generated by combining the images A to I. Since the sample image J is generated using a plurality of diffracted lights having different diffraction directions and diffraction grating phases, the sample image J is generated with high resolution.

なお、第２光源１０１Ｂが出射した赤色レーザ光に基づく試料画像も同様に、液晶素子１５Ａの第２透過領域２０Ｃの小領域２０Ｃ１、Ｃ４を透過させた各位相の回折格子による赤色回折光に基づく三つの画像と、小領域２０Ｃ２、Ｃ５を透過させた各位相の回折格子による赤色回折光に基づく三つの画像と、小領域２０Ｃ３、Ｃ６を透過させた各位相の回折格子による赤色回折光に基づく三つの画像とを合成することにより生成される。   Similarly, the sample image based on the red laser light emitted from the second light source 101B is also based on the red diffracted light by the diffraction grating of each phase transmitted through the small regions 20C1 and C4 of the second transmissive region 20C of the liquid crystal element 15A. Three images, three images based on the red diffracted light by the diffraction grating of each phase transmitted through the small regions 20C2 and C5, and three colors based on the red diffracted light by the diffraction grating of each phase transmitted through the small regions 20C3, C6 It is generated by combining three images.

顕微鏡装置１００は、このような青色レーザ光に基づく試料画像及び赤色レーザ光に基づく試料画像を同時に生成することができるため、試料画像の生成に要する時間を短縮することができる。   Since the microscope apparatus 100 can simultaneously generate the sample image based on the blue laser light and the sample image based on the red laser light, the time required for generating the sample image can be shortened.

以上説明してきたように、本発明の一つの実施形態に係る照明装置は、各回折光の偏光方向を液晶素子によって制御するので、機械的に作動する部品をなくすことができる。また、照明装置は、機械的に作動する部品をなくすことにより、回折格子の位相及び回折方向を変更する際に要する時間を短縮できるので、顕微鏡装置１００は、個々のモアレ縞の画像を撮影するのに要する時間を短縮でき、結果として、試料画像の生成に要する時間を短縮できる。さらに、液晶素子は、波長の異なる複数の回折光を透過させる領域を別個に有し、各領域から各回折光が同時に透過するように各領域に印加する電圧を制御する。これにより、照明装置は、波長の異なる複数の回折光に対して、独立して、各回折光の波長に応じた適切な量の位相変調を行うことが可能となり、波長の異なる複数の回折光を同時且つ適切に処理することが可能となる。   As described above, since the illumination device according to one embodiment of the present invention controls the polarization direction of each diffracted light by the liquid crystal element, it can eliminate mechanically operated parts. In addition, since the illumination apparatus can reduce the time required to change the phase and diffraction direction of the diffraction grating by eliminating mechanically actuated parts, the microscope apparatus 100 captures images of individual moire fringes. As a result, the time required for generating the sample image can be shortened. Furthermore, the liquid crystal element has a separate region for transmitting a plurality of diffracted lights having different wavelengths, and controls the voltage applied to each region so that each diffracted light is transmitted simultaneously from each region. Accordingly, the lighting device can independently perform an appropriate amount of phase modulation according to the wavelength of each diffracted light with respect to the plurality of diffracted lights having different wavelengths. Can be processed simultaneously and appropriately.

なお、本発明は上記の実施形態に限られない。例えば、第１光源１０１Ａ及び第２光源１０１Ｂが出射する光は、青色レーザ光及び赤色レーザ光に限定されず、他の波長を有する色のレーザ光でもよい。また、光源１０１は、３つ以上の色のレーザ光を同時に出射するように構成されてもよい。その場合、液晶素子１５Ａの各透過領域と、第２液晶素子１６Ａ及び第３液晶素子１６Ｂの各回転領域は、光源１０１が出射する各色のレーザ光の各次の回折光が入射する位置に設けられる。また、制御部１０８は、各透過領域、各回転領域を半波長板として機能させるために各領域に印加する電圧を、光源１０１が出射するレーザ光の波長に応じて異ならせる。   The present invention is not limited to the above embodiment. For example, the light emitted from the first light source 101A and the second light source 101B is not limited to blue laser light and red laser light, and may be laser light of a color having another wavelength. Further, the light source 101 may be configured to emit laser beams of three or more colors simultaneously. In that case, each transmission region of the liquid crystal element 15A and each rotation region of the second liquid crystal element 16A and the third liquid crystal element 16B are provided at positions where the respective diffracted lights of the respective colors of laser light emitted from the light source 101 are incident. It is done. Further, the control unit 108 varies the voltage applied to each region in order to cause each transmission region and each rotation region to function as a half-wave plate according to the wavelength of the laser light emitted from the light source 101.

また他の変形例によれば、回折素子１１は、液晶層の少なくとも一方の表面に、２次元に配列された複数の画素ごとに独立した透明電極を有する、透過型の液晶素子であってもよい。この場合には、光源１０１は、各レーザ光が光軸ＯＡ２に沿って回折素子１１に入射するように配置される。そして回折素子１１によって回折された回折光は、レーザ光が入射した側の面と反対側であり、かつ、第１位相変調素子１２と対向する側の面から出射する。   According to another modification, the diffractive element 11 may be a transmissive liquid crystal element having a transparent electrode independent for each of a plurality of pixels arranged two-dimensionally on at least one surface of the liquid crystal layer. Good. In this case, the light source 101 is arranged so that each laser beam is incident on the diffraction element 11 along the optical axis OA2. The diffracted light diffracted by the diffraction element 11 is emitted from the surface opposite to the surface on which the laser light is incident and on the surface facing the first phase modulation element 12.

さらに他の変形例によれば、シャッター素子１５は、中央透過領域２０Ａにおいて、０次の回折光を選択的に透過させてもよい。その場合、偏光方向回転素子１６は、シャッター素子１５を透過した０次の回折光の偏光方向を中央回転領域において回転させてもよい。これにより、±１次の回折光に加えて、０次の回折光を、試料画像を生成するために利用することができ、試料画像の解像度をより高くすることができる。   According to another modification, the shutter element 15 may selectively transmit 0th-order diffracted light in the central transmission region 20A. In that case, the polarization direction rotating element 16 may rotate the polarization direction of the 0th-order diffracted light transmitted through the shutter element 15 in the central rotation region. Thereby, in addition to ± 1st order diffracted light, 0th order diffracted light can be used to generate the sample image, and the resolution of the sample image can be further increased.

さらに他の変形例によれば、偏光方向回転素子１６が有する第２液晶素子１６Ａ及び／又は第３液晶素子１６Ｂとして、シャッター素子１５が有する液晶素子１５Ａと同一の構造を有する素子が用いられてもよい。これにより、部品の共通化を図ることが可能となり、光変調ユニット１０２のコストを低減することができる。   According to another modification, an element having the same structure as the liquid crystal element 15A included in the shutter element 15 is used as the second liquid crystal element 16A and / or the third liquid crystal element 16B included in the polarization direction rotating element 16. Also good. This makes it possible to share components and reduce the cost of the light modulation unit 102.

なお、シャッター素子１５及び偏光方向回転素子１６を有する光変調サブユニット１０は、顕微鏡装置１００又は光変調ユニット１０２とは独立したパッケージとして提供されてもよい。   The light modulation subunit 10 including the shutter element 15 and the polarization direction rotation element 16 may be provided as a package independent of the microscope apparatus 100 or the light modulation unit 102.

また、図１１に示す赤色レーザ光２１１Ｂに対する処理は、図１０に示す青色レーザ光２１１Ａに対する処理と同時に実行されなくてもよい。   Further, the process for the red laser light 211B shown in FIG. 11 may not be executed simultaneously with the process for the blue laser light 211A shown in FIG.

以上のように、当業者は、本発明の範囲内で、実施される形態に合わせて様々な変更を行うことができる。   As described above, those skilled in the art can make various modifications in accordance with the embodiment to be implemented within the scope of the present invention.

液晶素子を用いて各回折光の偏光方向を調節する場合、液晶素子内の液晶分子の傾きを変更することにより、各回折光の偏光方向を変更する。しかしながら、各回折光の偏光方向を一定量回転させるための液晶分子の傾きの変更量は、各回折光の波長によって異なるため、波長の異なる複数の回折光の偏光方向を同時に適切に調節することは困難である。このような問題に対し、本発明に係る照明装置は、機械的に作動する部品を利用せず、且つ、波長の異なる複数の回折光を適切に処理することができるという効果を奏する。   When adjusting the polarization direction of each diffracted light using a liquid crystal element, the polarization direction of each diffracted light is changed by changing the inclination of the liquid crystal molecules in the liquid crystal element. However, since the amount of change in the tilt of the liquid crystal molecules for rotating the polarization direction of each diffracted light by a certain amount varies depending on the wavelength of each diffracted light, the polarization directions of a plurality of diffracted lights having different wavelengths must be adjusted appropriately at the same time. It is difficult. In response to such a problem, the lighting device according to the present invention has an effect that it can appropriately process a plurality of diffracted lights having different wavelengths without using mechanically operated components.

１００ 顕微鏡装置
１０２ 光変調ユニット
１０８ 制御部
１０ 光変調サブユニット
１１ 回折素子
１５ シャッター素子
１５Ａ 液晶素子
１５Ｂ 検光子
１６ 偏光方向回転素子
１６Ａ 第２液晶素子
１６Ｂ 第３液晶素子
２０ 液晶層
２３ 透明電極
２４ 対向電極 DESCRIPTION OF SYMBOLS 100 Microscope apparatus 102 Light modulation unit 108 Control part 10 Light modulation subunit 11 Diffraction element 15 Shutter element 15A Liquid crystal element 15B Analyzer 16 Polarization direction rotation element 16A Second liquid crystal element 16B Third liquid crystal element 20 Liquid crystal layer 23 Transparent electrode 24 Opposite electrode

Claims (18)

第１波長の光を回折させて第１回折光を出射し、第１波長と異なる第２波長の光を回折させて第２回折光を出射する回折素子と、
前記第１回折光の偏光方向及び前記第２回折光の偏光方向を電圧により制御する光変調素子と、
前記光変調素子を制御する制御部と、を備え、
前記光変調素子は、
前記第１回折光の少なくとも一部の偏光方向を電圧により制御する第１領域と、
前記第２回折光の少なくとも一部の偏光方向を電圧により制御する第２領域とを有し、
前記制御部は、第１領域に印加される電圧と、前記第２領域に印加される電圧とを制御する、
ことを特徴とする照明装置。 A diffraction element that diffracts light of a first wavelength to emit first diffracted light, diffracts light of a second wavelength different from the first wavelength, and emits second diffracted light;
A light modulation element that controls a polarization direction of the first diffracted light and a polarization direction of the second diffracted light by a voltage;
A control unit for controlling the light modulation element,
The light modulation element is
A first region for controlling a polarization direction of at least a part of the first diffracted light by a voltage;
A second region for controlling a polarization direction of at least a part of the second diffracted light by a voltage,
The controller controls a voltage applied to the first region and a voltage applied to the second region;
A lighting device characterized by that. 前記第１領域に印加される電圧は、前記第２領域に印加される電圧と異なる、請求項１に記載の照明装置。   The lighting device according to claim 1, wherein a voltage applied to the first region is different from a voltage applied to the second region. 前記光変調素子は、前記第１領域に対応する第１電極、前記第２領域に対応する第２電極、前記第１電極及び前記第２電極と対向する対向電極、並びに、前記第１電極及び前記第２電極と前記対向電極との間に配置された液晶層を有し、
前記第１回折光の偏光方向を制御する電圧は、前記第１電極と前記対向電極との間に印加され、
前記第２回折光の偏光方向を制御する電圧は、前記第２電極と前記対向電極との間に印加される、請求項１または２に記載の照明装置。 The light modulation element includes a first electrode corresponding to the first region, a second electrode corresponding to the second region, a counter electrode facing the first electrode and the second electrode, and the first electrode and Having a liquid crystal layer disposed between the second electrode and the counter electrode;
A voltage for controlling the polarization direction of the first diffracted light is applied between the first electrode and the counter electrode,
The illumination device according to claim 1, wherein a voltage for controlling a polarization direction of the second diffracted light is applied between the second electrode and the counter electrode. 前記光変調素子と、検光子とを有するシャッター素子を有し、
前記シャッター素子は、前記第１回折光の少なくとも一部及び第２回折光の少なくとも一部を選択的に透過させる、請求項１〜３の何れか一項に記載の照明装置。 A shutter element having the light modulation element and an analyzer;
The lighting device according to any one of claims 1 to 3, wherein the shutter element selectively transmits at least a part of the first diffracted light and at least a part of the second diffracted light. 前記第１領域は、複数の第１小領域を有し、
前記第２領域は、複数の第２小領域を有し、
前記制御部は、前記複数の第１小領域のそれぞれに印加される電圧と、前記複数の第２小領域のそれぞれに印加される電圧とを制御する、請求項１〜４の何れか一項に記載の照明装置。 The first region has a plurality of first small regions,
The second region has a plurality of second small regions,
5. The control unit according to claim 1, wherein the control unit controls a voltage applied to each of the plurality of first small regions and a voltage applied to each of the plurality of second small regions. The lighting device described in 1. 前記光変調素子は、前記複数の第１小領域に対応する複数の電極と、前記複数の第２小領域に対応する複数の電極とを有する、請求項５に記載の照明装置。   The lighting device according to claim 5, wherein the light modulation element includes a plurality of electrodes corresponding to the plurality of first small regions and a plurality of electrodes corresponding to the plurality of second small regions. 前記制御部は、前記第１領域の少なくとも一部及び前記第２領域の少なくとも一部が半波長板として機能するように、前記第１領域に印加される電圧及び前記第２領域に印加される電圧を制御する、請求項１〜６の何れか一項に記載の照明装置。   The controller is applied to the voltage applied to the first region and the second region so that at least a part of the first region and at least a part of the second region function as a half-wave plate. The lighting device according to claim 1, wherein the voltage is controlled. 前記第１領域は、所定の円領域を囲うドーナツ形状を有し、
前記第２領域は、前記第１領域を囲うドーナツ形状を有する、請求項１〜７の何れか１項に記載の照明装置。 The first region has a donut shape surrounding a predetermined circular region;
The lighting device according to claim 1, wherein the second region has a donut shape surrounding the first region. 前記第１領域は、前記円領域の円周方向に沿って分割された複数の第１小領域を有し、
前記第２領域は、前記円領域の円周方向に沿って分割された複数の第２小領域を有する、請求項８に記載の照明装置。 The first region has a plurality of first small regions divided along the circumferential direction of the circular region,
The lighting device according to claim 8, wherein the second region has a plurality of second small regions divided along a circumferential direction of the circular region. 前記光変調素子は、前記複数の第１小領域のそれぞれに対応する複数の電極と、前記複数の第２小領域のそれぞれに対応する複数の電極とを有する、請求項９に記載の照明装置。   The lighting device according to claim 9, wherein the light modulation element includes a plurality of electrodes corresponding to each of the plurality of first small regions and a plurality of electrodes corresponding to each of the plurality of second small regions. . 前記第１領域は、前記円領域の円周方向に沿って分割された６個の第１小領域を有し、
前記第２領域は、前記円領域の円周方向に沿って分割された６個の第２小領域を有する、請求項９に記載の照明装置。 The first region has six first small regions divided along the circumferential direction of the circular region,
The lighting device according to claim 9, wherein the second region has six second small regions divided along a circumferential direction of the circular region. 前記光変調素子は、前記６個の第１小領域のそれぞれに対応する６個の電極と、前記６個の第２小領域のそれぞれに対応する６個の電極とを有する、請求項１１に記載の照明装置。   The light modulation element includes six electrodes corresponding to each of the six first small regions and six electrodes corresponding to each of the six second small regions. The lighting device described. 前記制御部は、
前記第１領域内の前記円領域を挟んで相互に対向する２個の前記第１小領域から出射する前記第１回折光の偏光方向が同じになるように、前記第１小領域に印加される電圧を制御し、
前記第２領域内の前記円領域を挟んで相互に対向する２個の前記第２小領域から出射する第２回折光の偏光方向が同じになるように、前記第２小領域に印加される電圧を制御する、請求項９〜１２の何れか１項に記載の照明装置。 The controller is
Applied to the first small region so that the polarization directions of the first diffracted light emitted from the two first small regions facing each other across the circular region in the first region are the same. Control the voltage
Applied to the second small region so that the polarization directions of the second diffracted light emitted from the two second small regions facing each other across the circular region in the second region are the same. The lighting device according to any one of claims 9 to 12, which controls a voltage. 前記制御部は、前記第１領域に入射した前記第１回折光の偏光方向を回転させる角度、及び、前記第２領域に入射した前記第２回折光の偏光方向を回転させる角度が、前記第１波長及び前記第２波長に関わらず一定となるように制御する、請求項１〜１３の何れか１項に記載の照明装置。   The control unit has an angle for rotating the polarization direction of the first diffracted light incident on the first region and an angle for rotating the polarization direction of the second diffracted light incident on the second region. The lighting device according to claim 1, wherein the lighting device is controlled to be constant regardless of one wavelength and the second wavelength. 前記光変調素子は、前記第１回折光の偏光方向および前記第２回折光の偏光方向を同時に制御する、請求項１〜１４の何れか１項に記載の照明装置。   The lighting device according to claim 1, wherein the light modulation element simultaneously controls a polarization direction of the first diffracted light and a polarization direction of the second diffracted light. 請求項１〜１５の何れか１項に記載の照明装置と、
前記第１回折光の少なくとも一部を干渉させて第１干渉縞を形成し、前記第２回折光の少なくとも一部を干渉させて第２干渉縞を形成し、前記第１干渉縞及び前記第２干渉縞で標本を照明する照明光学系と、
を備える構造化照明装置。 The lighting device according to any one of claims 1 to 15,
At least a part of the first diffracted light is caused to interfere to form a first interference fringe, and at least a part of the second diffracted light is caused to interfere to form a second interference fringe, the first interference fringe and the first interference fringe An illumination optical system that illuminates the specimen with two interference fringes;
A structured lighting device comprising: 請求項１６に記載の構造化照明装置と、
前記第１干渉縞で照明された前記標本の像である第１変調像及び前記第２干渉縞で照明された前記標本の像である第２変調像を撮像する撮像素子と、
を備える構造化照明顕微鏡装置。 A structured lighting device according to claim 16;
An imaging device that captures a first modulated image that is an image of the specimen illuminated by the first interference fringe and a second modulated image that is an image of the specimen illuminated by the second interference fringe;
A structured illumination microscope apparatus comprising: 前記撮像素子が生成する画像に基づき前記標本の復調像を生成する演算手段を更に備える、請求項１７に記載の構造化照明顕微鏡装置。   The structured illumination microscope apparatus according to claim 17, further comprising arithmetic means for generating a demodulated image of the specimen based on an image generated by the imaging element.
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