JP2019179039A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2019179039A5 JP2019179039A5 JP2019117416A JP2019117416A JP2019179039A5 JP 2019179039 A5 JP2019179039 A5 JP 2019179039A5 JP 2019117416 A JP2019117416 A JP 2019117416A JP 2019117416 A JP2019117416 A JP 2019117416A JP 2019179039 A5 JP2019179039 A5 JP 2019179039A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- fixed
- force
- force receiving
- deformed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims 8
- 238000001514 detection method Methods 0.000 claims 2
- 230000005489 elastic deformation Effects 0.000 claims 2
- 239000003990 capacitor Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Claims (3)
ＸＹＺ三次元座標系に対して固定された円環状の固定体、および力ないしモーメントの作用により前記固定体に対して相対移動する円環状の受力体のうちいずれか一方の構成要素と、
前記一方の構成要素を取り囲むと共に当該構成要素に接続され、力ないしモーメントの作用により弾性変形を生じる変形部を含む変形体と、
前記変形体を取り囲むと共に当該変形体に接続され、前記固定体および前記受力体のうち他方の構成要素と、
前記変形体に生じる弾性変形に基づいて、前記受力体に作用した力ないしモーメントを示す電気信号を出力する検出回路と、を備え、
前記固定体、前記変形体及び前記受力体は、互いに同心であるように配置され、
前記変形体は、前記固定体に接続された２つの固定部と、前記受力体に接続され、当該変形体の周方向において前記固定部と交互に位置付けられた２つの受力部と、隣接する前記固定部と前記受力部との間に位置付けられた４つの変形部と、を有し、
前記検出回路は、前記変形部に設けられた少なくとも1つの電極を含む変位電極と、
前記固定体或いは前記受力体に設けられ、前記変位電極に対向するとともに少なくとも1つの電極を有する固定電極とを有し、
前記変位電極と前記固定電極のいずれか一方は少なくとも２つの電極を有することを特徴とする力覚センサ。 A force sensor for detecting at least one of a force in each axis direction and a moment around each axis in an XYZ three-dimensional coordinate system,
One of a ring-shaped fixed body fixed to the XYZ three-dimensional coordinate system, and a ring-shaped force receiving body that moves relatively to the fixed body by the action of force or moment;
A deformed body including a deformed portion that surrounds the one component and is connected to the component and generates elastic deformation by the action of force or moment;
Around the deformed body and connected to the deformed body, the other of the fixed body and the force receiving element,
A detection circuit that outputs an electric signal indicating a force or a moment applied to the force receiving body based on the elastic deformation generated in the deformable body,
The fixed body, the deformed body and the force receiving body are arranged so as to be concentric with each other,
The deformed body is adjacent to two fixed portions connected to the fixed body and two force receiving portions connected to the force receiving member and alternately positioned with the fixed portion in the circumferential direction of the deformed body. And four deformed portions positioned between the fixed portion and the force receiving portion,
The detection circuit, a displacement electrode including at least one electrode provided in the deformation portion,
A fixed electrode provided on the fixed body or the force receiving body and facing the displacement electrode and having at least one electrode;
A force sensor, wherein one of the displacement electrode and the fixed electrode has at least two electrodes.
前記固定電極が少なくとも２つの電極を有する場合、前記固定電極の一の電極と、前記変位電極の電極とにより第１の容量素子が構成され、前記固定電極の他の電極と、前記変位電極の電極とにより第２の容量素子が構成され、When the fixed electrode has at least two electrodes, one electrode of the fixed electrode and the electrode of the displacement electrode form a first capacitor, and the other electrode of the fixed electrode and the electrode of the displacement electrode A second capacitive element is constituted by the electrodes;
前記受力体に作用した力ないしモーメントによって、第１の容量素子が第１電気信号を出力し、第２の容量素子が第２電気信号を出力し、The first capacitance element outputs a first electric signal, the second capacitance element outputs a second electric signal by a force or a moment applied to the force receiving member,
第１電気信号と第２電気信号の変化に基づいて、前記力覚センサが正常に機能しているか否かを判断することを特徴とする請求項１に記載の力覚センサThe force sensor according to claim 1, wherein it is determined whether or not the force sensor is functioning normally based on a change in the first electric signal and the second electric signal.
前記変形体の前記固定部、前記受力部、前記湾曲部は同一材料により一体に形成されている、The fixed portion, the force receiving portion, and the curved portion of the deformable body are integrally formed of the same material,
ことを特徴とする請求項１または２に記載の力覚センサ。The force sensor according to claim 1 or 2, wherein:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019117416A JP6685568B2 (en) | 2019-06-25 | 2019-06-25 | Force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019117416A JP6685568B2 (en) | 2019-06-25 | 2019-06-25 | Force sensor |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019030866A Division JP6552026B2 (en) | 2019-02-22 | 2019-02-22 | Force sensor |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020052854A Division JP6804122B2 (en) | 2020-03-24 | 2020-03-24 | Force sensor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019179039A JP2019179039A (en) | 2019-10-17 |
| JP2019179039A5 true JP2019179039A5 (en) | 2020-03-26 |
| JP6685568B2 JP6685568B2 (en) | 2020-04-22 |
Family
ID=68278394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019117416A Active JP6685568B2 (en) | 2019-06-25 | 2019-06-25 | Force sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6685568B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3550276A4 (en) * | 2018-02-09 | 2019-12-11 | Tri-Force Management Corporation | Force sensor |
| JP6804122B2 (en) * | 2020-03-24 | 2020-12-23 | 株式会社トライフォース・マネジメント | Force sensor |
| JP6893717B2 (en) * | 2020-03-24 | 2021-06-23 | 株式会社トライフォース・マネジメント | Force sensor |
| JP6923988B2 (en) * | 2020-11-25 | 2021-08-25 | 株式会社トライフォース・マネジメント | Force sensor |
| JP6938074B1 (en) * | 2021-02-18 | 2021-09-22 | 株式会社トライフォース・マネジメント | Torque sensor |
| JP7308548B2 (en) * | 2021-02-18 | 2023-07-14 | 株式会社トライフォース・マネジメント | torque sensor |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4398277A (en) * | 1981-07-27 | 1983-08-09 | Minnesota Mining And Manufacturing Company | Conductive elastomeric fabric and body strap |
| JPH07117470B2 (en) * | 1986-07-15 | 1995-12-18 | 株式会社リコー | Force detector |
| JPH0676933B2 (en) * | 1989-08-22 | 1994-09-28 | 株式会社昭和測器 | Maybe force / force detector |
| US5142906A (en) * | 1990-07-09 | 1992-09-01 | Westinghouse Electric Corp. | Apparatus for measuring valve stem loads in a motor operated valve assembly |
| JP4907050B2 (en) * | 2003-03-31 | 2012-03-28 | 株式会社ワコー | Force detection device |
| JP5568768B2 (en) * | 2003-03-31 | 2014-08-13 | 株式会社トライフォース・マネジメント | Force detection device |
| JP5490619B2 (en) * | 2010-06-09 | 2014-05-14 | 東亜バルブエンジニアリング株式会社 | Thrust torque sensor for valves |
| JP4948630B2 (en) * | 2010-08-05 | 2012-06-06 | 株式会社トライフォース・マネジメント | Torque sensor |
| WO2013014803A1 (en) * | 2011-07-27 | 2013-01-31 | 株式会社トライフォース・マネジメント | Dynamic sensor |
| JP6092326B2 (en) * | 2015-07-29 | 2017-03-08 | 株式会社トライフォース・マネジメント | Torque sensor |
| CN109073486B (en) * | 2017-03-06 | 2019-11-26 | 三角力量管理株式会社 | Force sensor |
| JP6404514B2 (en) * | 2018-03-05 | 2018-10-10 | 株式会社トライフォース・マネジメント | Force sensor |
| JP6494056B2 (en) * | 2018-08-22 | 2019-04-03 | 株式会社トライフォース・マネジメント | Force sensor |
-
2019
- 2019-06-25 JP JP2019117416A patent/JP6685568B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2019179039A5 (en) | ||
| US10557766B2 (en) | Torque sensor for detecting occurrence of metal fatigue in an elastic body | |
| JP2019023639A5 (en) | ||
| KR102242625B1 (en) | Torque sensor | |
| US11085836B2 (en) | Force sensor that detects at least one of a force in each axial direction and a moment around each axis in an XYZ three-dimensional coordinate system | |
| CN104272073B (en) | Force transducer | |
| JP2012037300A5 (en) | ||
| JP2018132442A5 (en) | ||
| US20120073370A1 (en) | Micromechanical structure | |
| JP2019174477A5 (en) | ||
| KR101449407B1 (en) | Highly Sensitive Tactile Sensor using Interlocking of Piezoelectric Element | |
| JP2009198337A (en) | Sensor device | |
| JP2016193668A (en) | Grip detection device | |
| JP2018200259A5 (en) | ||
| JP2018146537A (en) | Dielectric Elastomer Sensor System and Dielectric Elastomer Sensor Element | |
| CN107850502B (en) | Torque sensor | |
| JP2022111489A (en) | Triaxial force sensor | |
| CN111537113A (en) | Pressure sensing detection device | |
| JP2016540474A (en) | Equipment for wear monitoring in multiple overhead lines | |
| JP2020012844A5 (en) | ||
| US11740150B2 (en) | Electrostatic capacity sensor | |
| WO2008044404A1 (en) | Strain gauge sensor | |
| JP6265430B2 (en) | Multi-axis sensor and method of manufacturing multi-axis sensor | |
| JP2017187399A (en) | Tactile sensor and shearing force detection method | |
| JP2020034581A5 (en) |