JP2019178063A - Manufacturing method of glass panel unit - Google Patents

Abstract

To provide a manufacturing method of a glass panel unit, for obtaining a glass panel unit having no exhaust port and no exhaust pipe and excellent in heat insulation property.SOLUTION: A manufacturing method of a glass panel unit includes an assembly step, a sealing step and a removing step. The assembly step is a step for preparing a temporary assembly (100) having a first glass substrate (200), a second glass substrate (300), a frame body (410), an interior space (500), a partition (420) partitioning into a first space (510) and a second space (520), an aeration path (600) connecting the first space and the second space, and an exhaust port (700) connectin the second space and an exterior space. The sealing step is step for obtaining an assembly (110) by forming a seal (40) surrounding a vacuum space serially with the frame body and a partition wall (42). The removing step is a step for obtaining a glass panel unit by cutting linearly the assembly along the longitudinal direction of the partition wall so as to divide into two, and removing an unnecessary part having the second space from the assembly.SELECTED DRAWING: Figure 11

Description

  The present invention relates to a method for manufacturing a glass panel unit.

  Document 1 (International Publication No. 2013/172344) discloses a double glazing. In the double-glazed glass disclosed in Document 1, a decompressed space is formed between a pair of plate glasses.

  The decompressed space is formed by exhausting the space between the pair of plate glasses with a vacuum pump. In order to exhaust the space between the pair of glass plates with a vacuum pump, it is necessary to form an exhaust port in one of the pair of glass panels in advance and connect the exhaust port to the intake port of the vacuum pump with an exhaust pipe.

  In Literature 1, after exhausting, the space is divided by a region forming material arranged in the space to form a partial region that does not include the exhaust port. Then, a partial area | region is cut out by cut | disconnecting a pair of plate glass. Thereby, a multi-layer glass having no exhaust port and exhaust pipe is obtained.

  In Document 1, it is necessary to heat a region forming material in order to form a partial region. However, when the region forming material is heated, gas may be released from the region forming material. After the partial region is formed, the degree of vacuum in the partial region cannot be improved by the vacuum pump, so the gas from the region forming material may deteriorate the degree of vacuum in the partial region. As a result, a double-glazed glass having desired heat insulation performance may not be obtained.

  This invention is made | formed in view of this point, The objective is to obtain a glass panel unit which does not have an exhaust port and an exhaust pipe, and has good heat insulation performance.

  The manufacturing method of the glass panel unit of 1 aspect which concerns on this invention is the 1st glass substrate, the 2nd glass substrate arrange | positioned so as to oppose the 1st glass substrate, the 1st glass substrate, and the 2nd glass A frame disposed between the substrate and airtightly bonding the first glass substrate and the second glass substrate, and an interior surrounded by the first glass substrate, the second glass substrate, and the frame. A space, a partition that divides the internal space into a first space and a second space, an air passage that connects the first space and the second space, and an exhaust port that connects the second space and the external space; An assembly step of preparing a temporary assembly comprising: the first space is evacuated through the ventilation path, the second space, and the exhaust port to form a vacuum space, and the partition is deformed to deform the ventilation path. By forming a partition wall that blocks the front of the frame body The first glass substrate and the second glass substrate are hermetically bonded from the portion corresponding to the vacuum space and the partition, and the portion corresponding to the vacuum space in the frame and the partition are in series. A sealing step of forming a seal surrounding the vacuum space to obtain an assembly; and cutting the assembly in a straight line along the longitudinal direction of the partition wall; and a predetermined portion having the vacuum space and the second space And removing the unnecessary part having the second space from the assembly to obtain a glass panel unit that is the predetermined part having the vacuum space. .

It is a schematic sectional drawing of the glass panel unit of 1st embodiment. It is a schematic plan view of the glass panel unit of 1st embodiment. It is a schematic sectional drawing of the temporary assembly of the glass panel unit of 1st embodiment. It is a schematic plan view of the temporary assembly in the first embodiment. It is a schematic plan view of the assembly product of the glass panel unit of 1st embodiment. It is explanatory drawing of the manufacturing method of the glass panel unit of 1st embodiment. It is explanatory drawing of the manufacturing method of the glass panel unit of 1st embodiment. It is explanatory drawing of the manufacturing method of the glass panel unit of 1st embodiment. It is explanatory drawing of the manufacturing method of the glass panel unit of 1st embodiment. It is explanatory drawing of the manufacturing method of the glass panel unit of 1st embodiment. It is explanatory drawing of the manufacturing method of the glass panel unit of 1st embodiment. It is a schematic sectional drawing of the glass panel unit of 2nd embodiment. FIG. 13A is a schematic cross-sectional view of the assembly product of the third embodiment, and FIG. 13B is a schematic perspective view of a second glass substrate of the temporary assembly product of the third embodiment.

  The following first and second embodiments relate to a method for manufacturing a glass panel unit, and in particular, to a method for manufacturing a glass panel unit for heat insulation.

  1 and 2 show a glass panel unit (finished product of a glass panel unit) 10 according to the first embodiment. The glass panel unit 10 of the first embodiment is a vacuum heat insulating glass unit. The vacuum heat insulating glass unit is a kind of multilayer glass panel including at least a pair of glass panels, and has a vacuum space between the pair of glass panels.

  The glass panel unit 10 of the first embodiment includes a first glass panel 20, a second glass panel 30, a seal 40, a vacuum space 50, a gas adsorber 60, and a plurality of spacers 70.

  The glass panel unit 10 of the first embodiment is a predetermined part separated from the assembly 110 shown in FIG. Specifically, as shown in FIG. 11, the glass panel unit 10 of the first embodiment is a part obtained by removing the unnecessary part 11 from the assembly 110.

  The assembly 110 is obtained by performing a predetermined process on the temporary assembly 100 shown in FIGS. 3 and 4.

  The temporary assembly 100 includes a first glass substrate 200, a second glass substrate 300, a frame body 410, an internal space 500, a partition 420, an air passage 600, an exhaust port 700, a gas adsorber 60, A plurality of spacers 70.

  The first glass substrate 200 includes a glass plate 210 that defines the planar shape of the first glass substrate 200 and a coating 220.

  The glass plate 210 is a rectangular flat plate, and has a first surface (lower surface in FIG. 3) and a second surface (upper surface in FIG. 3) parallel to each other in the thickness direction. The first surface and the second surface of the glass plate 210 are both flat. The material of the glass plate 210 is, for example, soda lime glass, high strain point glass, chemically tempered glass, alkali-free glass, quartz glass, neoceram, or physically tempered glass.

  The coating 220 is formed on the first plane of the glass plate 210. The coating 220 is an infrared reflecting film. The coating 220 is not limited to the infrared reflective film, and may be a film having desired physical characteristics.

  The second glass substrate 300 includes a glass plate 310 that defines the planar shape of the second glass substrate 300. The glass plate 310 is a rectangular flat plate and has a first surface (upper surface in FIG. 3) and a second surface (lower surface in FIG. 3) in the thickness direction parallel to each other. Both the first surface and the second surface of the glass plate 310 are flat surfaces.

  The planar shape and planar size of the glass plate 310 are the same as those of the glass plate 210 (that is, the planar shape of the second glass substrate 300 is the same as that of the first glass substrate 200). The thickness of the glass plate 310 is the same as that of the glass plate 210. The material of the glass plate 310 is, for example, soda lime glass, high strain point glass, chemically tempered glass, alkali-free glass, quartz glass, neoceram, or physically tempered glass.

  The second glass substrate 300 is composed only of the glass plate 310. That is, the glass plate 310 is the second glass substrate 300 itself. The second glass substrate 300 is disposed so as to face the first glass substrate 200. Specifically, the first glass substrate 200 and the second glass substrate 300 are disposed such that the first surface of the glass plate 210 and the first surface of the glass plate 310 are parallel to and face each other.

  The frame 410 is arrange | positioned between the 1st glass substrate 200 and the 2nd glass substrate 300, and joins the 1st glass substrate 200 and the 2nd glass substrate 300 airtightly. Thus, an internal space 500 surrounded by the frame body 410, the first glass substrate 200, and the second glass substrate 300 is formed.

  The frame 410 is formed of a thermal adhesive (a first thermal adhesive having a first softening point). The first thermal adhesive is, for example, a glass frit. The glass frit is, for example, a low melting point glass frit. The low melting point glass frit is, for example, a bismuth glass frit, a lead glass frit, or a vanadium glass frit.

  The frame 410 has a rectangular frame shape. The planar shape of the frame 410 is the same as that of the glass plates 210 and 310, but the planar size of the frame 410 is smaller than the glass plates 210 and 310. The frame body 410 is formed along the outer periphery of the second glass substrate 300. That is, the frame 410 is formed so as to surround almost all the region on the second glass substrate 300.

  The first glass substrate 200 and the second glass substrate 300 are melted by the frame body 410 by once melting the first thermal adhesive of the frame body 410 at a predetermined temperature (first melting temperature) Tm1 equal to or higher than the first softening point. Airtightly joined.

  The partition 420 is disposed in the internal space 500. The partition 420 divides the internal space 500 into a sealed space, that is, a first space 510 that is sealed when the glass panel unit 10 is completed and becomes a vacuum space 50, and an exhaust space, that is, a second space 520 that communicates with the exhaust port 700. Partition. The partition 420 has a first end side in the length direction of the second glass substrate 300 (left and right direction in FIG. 4) from the center of the second glass substrate 300 so that the first space 510 is larger than the second space 520. (The right end side in FIG. 4).

  The partition 420 includes a wall portion 421 and a pair of blocking portions 422 (a first blocking portion 4221 and a second blocking portion 4222). The wall portion 421 is formed along the width direction of the second glass substrate 300 (the vertical direction in FIG. 4). However, both ends in the length direction of the wall portion 421 are not in contact with the frame body 410. The pair of blocking portions 422 extend from both ends in the length direction of the wall portion 421 to the first end side in the length direction of the second glass substrate 300.

  The partition 420 is formed of a thermal adhesive (second thermal adhesive having a second softening point). The second thermal adhesive is, for example, a glass frit. The glass frit is, for example, a low melting point glass frit. The low melting point glass frit is, for example, a bismuth glass frit, a lead glass frit, or a vanadium glass frit. The second thermal adhesive is the same as the first thermal adhesive, and the second softening point and the first softening point are equal.

  The ventilation path 600 connects the first space 510 and the second space 520 in the internal space 500. The ventilation path 600 includes a first ventilation path 610 and a second ventilation path 620. The first air passage 610 is a space formed between the first blocking portion 4221 and the portion of the frame 410 that faces the first blocking portion 4221. The second ventilation path 620 is a space formed between the second blocking portion 4222 and the portion of the frame 410 that faces the second blocking portion 4222. In the first embodiment, a plurality of ventilation paths 600 are formed.

  The exhaust port 700 is a hole that connects the second space 520 and the external space. The exhaust port 700 is used for exhausting the first space 510 through the second space 520 and the ventilation path 600. The exhaust port 700 is formed in the second glass substrate 300 so as to connect the second space 520 and the external space. Specifically, the exhaust port 700 is located at a corner portion of the second glass substrate 300.

  The gas adsorber 60 is disposed in the first space 510. Specifically, the gas adsorber 60 has a long shape, and extends along the width direction of the second glass substrate 300 on the second end side (left end side in FIG. 5) in the length direction of the second glass substrate 300. Is formed. That is, the gas adsorber 60 is disposed at the end of the first space 510 (vacuum space 50). In this way, the gas adsorber 60 can be made inconspicuous. Further, the gas adsorber 60 is located away from the partition 420 and the ventilation path 600. For this reason, when the first space 510 is exhausted, the possibility that the gas adsorber 60 prevents the exhaust can be reduced.

  The gas adsorber 60 is used to adsorb unnecessary gas (residual gas or the like). The unnecessary gas is, for example, a gas released from the frame body 410 and the partition 420 when the frame body 410 and the partition 420 are heated.

  The gas adsorber 60 has a getter. A getter is a material that has the property of adsorbing molecules smaller than a predetermined size. The getter is, for example, an evaporation type getter. The evaporable getter has a property of releasing adsorbed molecules when the temperature is higher than a predetermined temperature (activation temperature). Therefore, even if the adsorption ability of the evaporable getter is reduced, the adsorption ability of the evaporable getter can be recovered by heating the evaporable getter to the activation temperature or higher. The evaporative getter is, for example, a zeolite or an ion exchanged zeolite (eg, a copper ion exchanged zeolite).

  The gas adsorber 60 includes the getter powder. Specifically, the gas adsorber 60 is formed by applying a solution in which getter powder is dispersed. In this case, the gas adsorber 60 can be made small. Therefore, the gas adsorber 60 can be disposed even if the vacuum space 50 is narrow.

  The plurality of spacers 70 are used to maintain the distance between the first glass substrate 200 and the second glass substrate 300 at a predetermined distance. That is, the plurality of spacers 70 are used to maintain the distance between the first glass panel 20 and the second glass panel 30 at a desired value.

  The plurality of spacers 70 are arranged in the first space 510. Specifically, the plurality of spacers 70 are arranged at intersections of virtual rectangular grids. For example, the interval between the plurality of spacers 70 is 2 cm. However, the size of the spacers 70, the number of the spacers 70, the interval between the spacers 70, and the arrangement pattern of the spacers 70 can be selected as appropriate.

  The spacer 70 has a cylindrical shape having a height substantially equal to the predetermined interval. For example, the spacer 70 has a diameter of 1 mm and a height of 100 μm. Each spacer 70 may have a desired shape such as a prismatic shape or a spherical shape.

  The spacer 70 is formed using a transparent material. However, each spacer 70 may be formed using an opaque material as long as it is sufficiently small. The material of the spacer 70 is selected so that the spacer 70 is not deformed in a first melting process, an exhaust process, and a second melting process, which will be described later. For example, the material of the spacer 70 is selected to have a softening point (softening temperature) that is higher than the first softening point of the first thermal adhesive and the second softening point of the second thermal adhesive.

  Such a temporary assembly 100 is subjected to the predetermined processing in order to obtain the assembly 110.

  In the predetermined processing, the first space 510 is evacuated to the vacuum space 50 through the ventilation path 600, the second space 520, and the exhaust port 700 at a predetermined temperature (exhaust temperature) Te. The exhaust temperature Te is set higher than the activation temperature of the getter of the gas adsorber 60. As a result, the exhaust of the first space 510 and the recovery of the getter adsorption capability can be performed simultaneously.

  In the predetermined process, the partition 420 is deformed to form the partition wall 42 that closes the ventilation path 600, thereby forming the seal 40 surrounding the vacuum space 50 (see FIG. 5). Since the partition 420 contains the second thermal adhesive, the partition 420 is deformed by temporarily melting the second thermal adhesive at a predetermined temperature (second melting temperature) Tm2 that is equal to or higher than the second softening point. 42 can be formed. The first melting temperature Tm1 is lower than the second melting temperature Tm2. Thereby, when joining the 1st glass substrate 200 and the 2nd glass substrate 300 with the frame 410, it can prevent that the partition 420 deform | transforms and the ventilation path 600 is obstruct | occluded.

  The partition 420 is modified such that the first blocking part 4221 closes the first ventilation path 610 and the second blocking part 4222 blocks the second ventilation path 620. The partition wall 42 obtained by deforming the partition 420 in this way separates the vacuum space 50 from the second space 520 (spatially). The partition (second portion) 42 and the portion (first portion) 41 corresponding to the vacuum space 50 in the frame 410 constitute the seal 40 surrounding the vacuum space 50.

  As shown in FIG. 5, the assembly 110 obtained in this way includes a first glass substrate 200, a second glass substrate 300, a seal 40, a vacuum space 50, a second space 520, and gas adsorption. A body 60 and a plurality of spacers 70 are provided.

  As described above, the vacuum space 50 is formed by exhausting the first space 510 via the second space 520 and the exhaust port 700. In other words, the vacuum space 50 is the first space 510 whose degree of vacuum is a predetermined value or less. The predetermined value is, for example, 0.1 Pa. Since the vacuum space 50 is completely sealed by the first glass substrate 200, the second glass substrate 300, and the seal 40, it is separated from the second space 520 and the exhaust port 700.

  The seal 40 completely surrounds the vacuum space 50 and bonds the first glass substrate 200 and the second glass substrate 300 in an airtight manner. The seal 40 has a rectangular frame shape and includes a first portion 41 and a second portion 42. The first portion 41 is a portion corresponding to the vacuum space 50 in the frame 410. That is, the first portion 41 is a portion facing the vacuum space 50 in the frame body 410. The first portion 41 is substantially U-shaped and constitutes three sides of the four sides of the seal 40. The second portion 42 is a partition wall obtained by deforming the partition 420. The second portion 42 is I-shaped and constitutes the remaining one of the four sides of the seal 40.

  Such an assembly 110 is cut along a cutting line 900 shown in FIG. 5, and has a portion (glass panel unit) 10 having a vacuum space 50 and a second space 520 as shown in FIG. It is divided into a portion (unnecessary portion) 11.

  As shown in FIGS. 1 and 2, the glass panel unit 10 includes a first glass panel 20, a second glass panel 30, a seal 40, a vacuum space 50, a gas adsorber 60, and a plurality of spacers 70. And comprising. Since the seal 40, the vacuum space 50, the gas adsorber 60, and the plurality of spacers 70 have already been described, they will not be described in detail here.

  The first glass panel 20 is a portion corresponding to the vacuum space 50 in the first glass substrate 200. The first glass panel 20 includes a main body 21 that defines a planar shape of the first glass panel 20 and a coating 22.

  The main body 21 is a portion corresponding to the vacuum space 50 in the glass plate 210 of the first glass substrate 200. The material of the main body 21 is the same as that of the glass plate 210. The main body 21 has a rectangular shape, and has a first surface (a lower surface in FIG. 1) and a second surface (an upper surface in FIG. 1) in the thickness direction parallel to each other. Both the first surface and the second surface of the main body 21 are flat surfaces.

  The coating 22 is formed on the first surface of the main body 21. The coating 22 is a portion corresponding to the vacuum space 50 in the coating 220 of the first glass substrate 200. The physical properties of the coating 22 are the same as the coating 220.

  The second glass panel 30 is a portion corresponding to the vacuum space 50 in the second glass substrate 300. An exhaust port 700 for forming the vacuum space 50 exists in the portion 320 corresponding to the second space 520 in the second glass substrate 300, and the exhaust pipe 810 is connected to the portion 320. Therefore, the second glass panel 30 does not have the exhaust port 700.

  The second glass panel 30 includes a main body 31 that defines the planar shape of the first glass panel 20. The main body 31 is a portion corresponding to the vacuum space 50 in the glass plate 310 of the second glass substrate 300. Therefore, the material of the main body 31 is the same as that of the glass plate 310.

  The main body 31 has a rectangular shape, and has a first surface (upper surface in FIG. 1) and a second surface (lower surface in FIG. 1) parallel to each other in the thickness direction. Both the first surface and the second surface of the main body 31 are flat surfaces. The planar shape of the main body 31 is the same as that of the main body 21 (that is, the planar shape of the second glass panel 30 is the same as that of the first glass panel 20).

  The second glass panel 30 is composed only of the main body 31. That is, the main body 31 itself is the second glass panel 30.

  The first glass panel 20 and the second glass panel 30 are arranged so that the second surface of the main body 21 and the first surface of the main body 31 are parallel to and opposed to each other. That is, the second surface of the main body 21 is directed to the outside of the glass panel unit 10, and the first surface of the main body 21 is directed to the inside of the glass panel unit 10. Further, the first surface of the main body 31 is directed to the inside of the glass panel unit 10, and the second surface of the main body 31 is directed to the outside of the glass panel unit 10.

  Next, the manufacturing method of the glass panel unit 10 of 1st embodiment is demonstrated with reference to FIGS.

  The manufacturing method of the glass panel unit 10 of 1st embodiment has a preparatory process, an assembly process, a sealing process, and a removal process. Note that the preparation step may be omitted.

  In the arranging step, the first glass substrate 200, the second glass substrate 300, the frame body 410, the partition 420, the internal space 500, the air passage 600, the exhaust port 700, and the gas adsorber 60 are obtained in order to obtain the temporary assembly 100. It is a process of forming. The arranging step has first to sixth steps. In addition, you may change the order of a 2nd-6th process suitably.

  The first step is a step of forming the first glass substrate 200 and the second glass substrate 300 (substrate forming step). For example, in the first step, the first glass substrate 200 and the second glass substrate 300 are produced. In the first step, the first glass substrate 200 and the second glass substrate 300 are cleaned as necessary.

  The second step is a step of forming the exhaust port 700. In the second step, the exhaust port 700 is formed in the second glass substrate 300. In the second step, the second glass substrate 300 is cleaned as necessary.

  The third step is a step of forming the frame body 410 and the partition 420 (seal material forming step). In the third step, the material of the frame 410 (first thermal adhesive) and the material of the partition 420 (second thermal adhesive) are used for the second glass substrate 300 (first surface of the glass plate 310) using a dispenser or the like. ) Apply on top.

  When the material of the partition 420 is applied onto the second glass substrate 300, the application starts from one end of both ends of the wall portion 421 (the first blocking portion 4221 and the blocking portion 422 serving as the second blocking portion 4222). Is done. And it coat | covers to the other edge part of the both ends of the wall part 421, and complete | finishes. At this time, it is difficult to adjust the distance from the frame 410 at the start and end positions of the applied wall 421. The distance from the frame 410 at the end where the air passage 600 is formed between the wall 421 to be coated and the frame 410 is the width of the air passage 600 and is therefore required to be within a predetermined range. It is done. Therefore, at both ends of the wall portion 421, blocking portions 422 extending from both ends in the length direction of the wall portion 421 in the direction intersecting with the length direction are formed. In the first embodiment, the blocking portion 422 extends to the first end side in the length direction of the second glass substrate 300, but may extend to the opposite side.

  The material of the frame 410 and the material of the partition 420 are dried and temporarily fired. For example, the second glass substrate 300 to which the material of the frame body 410 and the material of the partition 420 are applied is heated at 480 ° C. for 20 minutes. Note that the first glass substrate 200 may be heated together with the second glass substrate 300. That is, the first glass substrate 200 may be heated under the same conditions as the second glass substrate 300 (20 minutes at 480 ° C.). Thereby, the difference of the curvature of the 1st glass substrate 200 and the 2nd glass substrate 300 can be reduced.

  The fourth step is a step of forming the spacer 70 (spacer forming step). In the fourth step, a plurality of spacers 70 are formed in advance, and the plurality of spacers 70 are arranged at predetermined positions on the second glass substrate 300 using a chip mounter or the like. The plurality of spacers 70 may be formed using a photolithography technique and an etching technique. In this case, the plurality of spacers 70 are formed using a photocurable material or the like. Alternatively, the plurality of spacers 70 may be formed using a known thin film forming technique.

  The fifth step is a step of forming the gas adsorbent 60 (gas adsorbent forming step). In the fifth step, the gas adsorber 60 is formed by applying a solution in which getter powder is dispersed to a predetermined position of the second glass substrate 300 and drying the solution.

  When the first to fifth steps are completed, the frame 410, the partition 420, the ventilation path 600, the exhaust port 700, the gas adsorbent 60, and the plurality of spacers 70 as shown in FIG. 6 are formed. Two glass substrates 300 are obtained.

  The sixth step is a step (arrangement step) for arranging the first glass substrate 200 and the second glass substrate 300. In the fifth step, the first glass substrate 200 and the second glass substrate 300 are arranged so that the first surface of the glass plate 210 and the first surface of the glass plate 310 are parallel to and face each other.

  The assembly process is a process of preparing the temporary assembly product 100. Specifically, in the assembly process, the first glass substrate 200 and the second glass substrate 300 are joined to prepare the temporary assembly 100. That is, the assembly process is a process (first melting process) in which the first glass substrate 200 and the second glass substrate 300 are hermetically bonded by the frame body 410.

  In the first melting step, the first glass substrate 200 and the second glass substrate 300 are hermetically bonded by once melting the first thermal adhesive at a predetermined temperature (first melting temperature) Tm1 that is equal to or higher than the first softening point. To do. Specifically, the first glass substrate 200 and the second glass substrate 300 are arranged in a melting furnace and heated at a first melting temperature Tm1 for a predetermined time (first melting time) tm1 (see FIG. 9).

  In the first melting temperature Tm1 and the first melting time tm1, the first glass substrate 200 and the second glass substrate 300 are hermetically bonded by the thermal adhesive of the frame 410, but the air passage 600 is blocked by the partition 420. It is set so that it does not occur. That is, the lower limit of the first melting temperature Tm1 is the first softening point, but the upper limit of the first melting temperature Tm1 is set so that the ventilation path 600 is not blocked by the partition 420. For example, when the first softening point and the second softening point are 434 ° C., the first melting temperature Tm1 is set to 440 ° C. The first melting time tm1 is, for example, 10 minutes. In the first melting step, gas is released from the frame 410, and this gas is adsorbed by the gas adsorber 60.

  The temporary assembly 100 shown in FIG. 8 is obtained by the assembly process (first melting process) described above.

  The sealing step is a step of obtaining the assembly 110 by performing the predetermined processing on the temporary assembly 100. The sealing process includes an exhaust process and a melting process (second melting process). That is, the exhaust process and the second melting process correspond to the predetermined process.

  The evacuation step is a step of evacuating the first space 510 through the ventilation path 600, the second space 520, and the exhaust port 700 to a vacuum space 50 at a predetermined temperature (exhaust temperature) Te.

  Exhaust is performed using, for example, a vacuum pump. As shown in FIG. 8, the vacuum pump is connected to the temporary assembly 100 by an exhaust pipe 810 and a seal head 820. For example, the exhaust pipe 810 is joined to the second glass substrate 300 so that the inside of the exhaust pipe 810 and the exhaust port 700 communicate with each other. Then, a seal head 820 is attached to the exhaust pipe 810, whereby the suction port of the vacuum pump is connected to the exhaust port 700.

  The first melting step, the evacuation step, and the second melting step include the first glass substrate 200 and the second glass substrate 300 (frame body 410, partition 420, air passage 600, exhaust port 700, gas adsorber 60, and a plurality of spacers. The second glass substrate 300 on which the 70 is formed is performed while being placed in the melting furnace. Therefore, the exhaust pipe 810 is joined to the second glass substrate 300 at least before the first melting step.

  In the exhaust process, the first space 510 is exhausted through the ventilation path 600, the second space 520, and the exhaust port 700 for a predetermined time (exhaust time) te at the exhaust temperature Te (see FIG. 9).

  The exhaust temperature Te is set higher than the activation temperature (for example, 350 ° C.) of the getter of the gas adsorbent 60 and lower than the first softening point and the second softening point (for example, 434 ° C.). For example, the exhaust temperature Te is 390 ° C.

  In this way, the frame 410 and the partition 420 are not deformed. Further, the getter of the gas adsorber 60 is activated, and molecules (gas) adsorbed by the getter are released from the getter. Then, the molecules (that is, gas) released from the getter are discharged through the first space 510, the ventilation path 600, the second space 520, and the exhaust port 700. Therefore, in the exhaust process, the adsorption capacity of the gas adsorber 60 is recovered.

  The exhaust time te is set so that a vacuum space 50 having a desired degree of vacuum (for example, a degree of vacuum of 0.1 Pa or less) is obtained. For example, the exhaust time Te is set to 120 minutes.

  The second melting step is a step of forming the seal 40 that surrounds the vacuum space 50 by deforming the partition 420 to form the partition wall 42 that closes the ventilation path 600. In the second melting step, the partition wall 420 is formed by deforming the partition 420 by once melting the second thermal adhesive at a predetermined temperature (second melting temperature) Tm2 that is equal to or higher than the second softening point. Specifically, the first glass substrate 200 and the second glass substrate 300 are heated at a second melting temperature Tm2 for a predetermined time (second melting time) tm2 in a melting furnace (see FIG. 9).

  The second melting temperature Tm2 and the second melting time tm2 are set such that the second thermal adhesive softens and the partition wall 42 that blocks the air passage 600 is formed. The lower limit of the second melting temperature Tm2 is the second softening point (434 ° C.). However, since the second melting step is intended to deform the partition 420, unlike the first melting step, the second melting temperature Tm2 is higher than the first melting temperature (440 ° C.) Tm1. For example, the second melting temperature Tm2 is set to 460 ° C. The second melting time tm2 is, for example, 30 minutes.

  When the partition wall 42 is formed, the vacuum space 50 is separated from the second space 520. Therefore, the vacuum space 50 cannot be exhausted with the vacuum pump. Until the second melting step is completed, the frame body 410 and the partition wall 42 are heated, and thus gas may be released from the frame body 410 and the partition wall 42. However, the gas released from the frame 410 and the partition wall 42 is adsorbed by the gas adsorber 60 in the vacuum space 50. Therefore, the vacuum degree of the vacuum space 50 is prevented from deteriorating. That is, it is prevented that the heat insulation of the glass panel unit 10 deteriorates.

  Even in the first melting step, since the frame body 410 and the partition wall 42 are heated, gas may be released from the frame body 410 and the partition wall 42. Since the gas released from the frame 410 and the partition wall 42 is adsorbed by the gas adsorber 60, the adsorbing capacity of the gas adsorber 60 may be reduced by the first melting step. However, in the exhaust process, the first space 510 is exhausted at an exhaust temperature Te that is equal to or higher than the activation temperature of the getter of the gas adsorber 60, thereby recovering the adsorption capability of the gas adsorber 60. Therefore, the gas adsorber 60 can sufficiently adsorb the gas released from the frame body 410 and the partition wall 42 in the second melting step. That is, it is possible to prevent the gas adsorber 60 from sufficiently adsorbing the gas released from the frame body 410 and the partition wall 42 and deteriorating the vacuum degree of the vacuum space 50.

  In the second melting step, the first space 510 is exhausted through the ventilation path 600, the second space 520, and the exhaust port 700 continuously from the exhaust step. In other words, in the second melting step, the partition 420 is deformed while the first space 510 is exhausted through the ventilation path 600, the second space 520, and the exhaust port 700 at the second melting temperature Tm2, so that the ventilation path 600 is formed. A partition wall 42 for closing is formed. This further prevents the vacuum degree of the vacuum space 50 from being deteriorated during the second melting step. However, in the second melting step, it is not always necessary to exhaust the first space 510 through the air passage 600, the second space 520, and the exhaust port 700.

  The assembly 110 shown in FIG. 10 is obtained by the sealing process described above.

  The removing step is a step of obtaining the glass panel unit 10 that is a portion having the vacuum space 50 by removing the portion 11 having the second space 520 from the assembly 110. Specifically, the assembly 110 taken out from the melting furnace is cut along a cutting line 900 shown in FIG. 5, and a predetermined portion (glass panel unit) 10 having a vacuum space 50 and a second space 520 are separated. It is divided into a portion (unnecessary portion) 11 that it has. And the shape of the cutting line 900 is formed in linear form.

  In other words, if the shape of the cutting line 900 is not a straight line but a bent line, when the assembly 110 is cut by a cutting device without human intervention during cutting, the cutting line 900 is expensive and can be cut into a bent line. A cutting device is required. In addition, when the assembly 110 is cut by hand at the time of cutting, it is more difficult for an operator to cut along a bent line than to cut linearly, and the finishing accuracy as a product is also linear. It tends to be lower than cutting. Therefore, in the first embodiment, the shape of the cutting line 900 is linear. As a result, a cutting device becomes unnecessary, it is easy for an operator to manually cut, or finishing accuracy is unlikely to be lowered.

  The straight line includes, of course, a strict straight line, and is not strictly a linear line as long as the above-described effects can be obtained. In other words, the shape of the cutting line 900 has such a degree of linearity that an effect can be obtained that a cutting device is not required, that an operator can easily cut manually, or that finishing accuracy is hardly lowered. It only has to be.

  In the first embodiment, the cutting line 900 has a linear shape along the length direction of the partition wall 42. The cutting line 900 may be formed in a straight line along any side of the glass panel unit 10. In the first embodiment, since the length direction of the partition wall 42 is along the side of the glass panel unit 10, the cutting line 900 is a straight line along both the length direction of the partition wall 42 and the side of the glass panel unit 10. It has become a shape.

  In addition, the assembly 110 is cut and the unnecessary portion 11 is removed. At this time, if the blocking portion 422 extends from the wall portion 421 to the unnecessary portion 11 side, the second space 510 and the ventilation space 520 An unnecessary blocking portion 422 that does not contribute to partitioning is included in the unnecessary portion 11. Thereby, the unnecessary interruption | blocking part 422 which remains in the glass panel unit 10 is reduced.

  The glass panel unit 10 is obtained through the above-described preparation process, assembly process, sealing process, and removal process.

  The manufacturing method of the glass panel unit 10 of 1st embodiment described above is provided with an assembly process, a sealing process, and a removal process. In the assembly process, a temporary assembly 100 is prepared. The temporary assembly 100 includes a first glass substrate 200, a second glass substrate 300, a frame 410, an internal space 500, a partition 420, a ventilation path 600, and an exhaust port 700. The second glass substrate 300 is disposed so as to face the first glass substrate 200. The frame body 410 is disposed between the first glass substrate 200 and the second glass substrate 300 and bonds the first glass substrate 200 and the second glass substrate 300 in an airtight manner. The internal space 500 is a space surrounded by the first glass substrate 200, the second glass substrate 300, and the frame body 410. The partition 420 partitions the internal space 500 into a first space 510 and a second space 520. The ventilation path 600 is formed in the internal space 500 and connects the first space 510 and the second space 520. The exhaust port 700 connects the second space 520 and the external space. In the sealing step, the first space 510 is evacuated through the ventilation path 600, the second space 520, and the exhaust port to form the vacuum space 50, and the partition wall 42 is deformed to form the partition wall 42 that closes the ventilation path 600. Thus, the first glass substrate 200 and the second glass substrate 300 are hermetically bonded from the portion corresponding to the vacuum space 50 in the frame 410 and the partition wall 42, and the seal 40 surrounding the vacuum space 50 is formed, whereby the assembly 110. Get. In the removing step, the assembly 110 is cut in a straight line to remove the portion 11 having the second space 520 from the assembly 100, thereby obtaining the glass panel unit 10 that is a predetermined portion having the vacuum space 50.

  Next, a second embodiment will be described with reference to FIG. The second embodiment is mostly the same as the first embodiment, the description of the same parts as the first embodiment is omitted, and different parts are mainly described.

The glass panel unit 10 is obtained by removing the unnecessary portion 11 having the second space 520 from the assembly 100. At this time, if a large amount of unnecessary portions 11 are generated, the yield of the material is lowered. Moreover, when the unnecessary part 11 is large, the length which cut | disconnects the assembly 110 will also become long, and will require time and effort for cutting. For this reason, in the second embodiment, in the first glass substrate 200 and the second glass substrate 300, a glass panel in which a portion that becomes the unnecessary portion 11 having the second space 520 in advance is a predetermined portion having the vacuum space 50. It is formed smaller than the unit 10.

  The unnecessary portion 11 is connected to the glass panel unit 10 at a length shorter than the entire length of the side of the glass panel unit 10 (short side in the second embodiment) before being cut from the assembly 100.

  Thus, the unnecessary part 11 is formed smaller than the glass panel unit 10, thereby reducing the useless part and improving the yield and reducing the manufacturing cost.

  Moreover, the length of the part cut | disconnected linearly in the assembly 110 is formed shorter than the edge | side of the predetermined part which has the vacuum space 50, and a cut part becomes short. Thereby, it is suppressed that time and effort are required for cutting.

  Next, a third embodiment will be described based on FIGS. 13A and 13B. The third embodiment is mostly the same as the second embodiment, and the description of the same parts as the second embodiment is omitted, and different parts are mainly described.

  In the third embodiment, as in the second embodiment, in the first glass substrate 200 and the second glass substrate 300, a portion that becomes the unnecessary portion 11 having the second space 520 in advance has the vacuum space 50. It is formed smaller than the glass panel unit 10 which is a part.

  In the third embodiment, unlike the second embodiment, the part that becomes the unnecessary part 11 in the first glass substrate 200 and the second glass substrate 300 is formed separately from the part that becomes the glass panel unit 10. Are bonded by an adhesive 43. Examples of the adhesive 43 include a thermal adhesive. The thermal adhesive is, for example, a glass frit. The glass frit is, for example, a low melting point glass frit. The low melting point glass frit is, for example, a bismuth glass frit, a lead glass frit, or a vanadium glass frit. The adhesive 43 may be the same as the first thermal adhesive or the second thermal adhesive, or may be an adhesive other than the thermal adhesive.

  Thus, the unnecessary part 11 is formed smaller than the glass panel unit 10, thereby reducing the useless part and improving the yield and reducing the manufacturing cost.

  In the third embodiment, the unnecessary portion 11 can be removed from the assembly 110 by cutting with the adhesive 43. At this time, in the assembled product 110, the portion that becomes the glass panel unit 10 and the unnecessary portion 11 are bent and cut by the adhesive 43. This makes it easier to cut the assembly 110 as compared to cutting with a cutting blade.

  In the embodiment described above (that is, in any of the first embodiment to the third embodiment, the same applies hereinafter), the glass panel unit (10) is rectangular, but the glass panel unit (10) is circular. Or a desired shape such as a polygonal shape. That is, the first glass panel (20), the second glass panel (30), and the seal (40) may have a desired shape such as a circular shape or a polygonal shape instead of a rectangular shape. In addition, each shape of a 1st glass substrate (200), a 2nd glass substrate (300), a frame (410), and a partition (42) is not limited to the shape of the said embodiment, Desired shape What is necessary is just a shape which can obtain a glass panel unit (10). In addition, the shape and magnitude | size of a glass panel unit (10) are determined according to the use of a glass panel unit (10).

  Moreover, the 1st surface and 2nd surface of the main body (21) of a 1st glass panel (20) are not limited to a plane. Similarly, neither the first surface nor the second surface of the main body (31) of the second glass panel (30) is limited to a flat surface.

  Moreover, the main body (21) of the first glass panel (20) and the main body (31) of the second glass panel (30) may not have the same planar shape and planar size. Moreover, the main body (21) and the main body (31) may not have the same thickness. Moreover, the main body (21) and the main body (31) may not be formed of the same material. Similarly, the glass plate (210) of the first glass substrate (200) and the glass plate (310) of the second glass substrate (300) may not have the same planar shape and planar size. Moreover, the glass plate (210) and the glass plate (310) do not need to have the same thickness. The glass plate (210) and the glass plate (310) may not be formed of the same material.

  Moreover, the seal | sticker (40) does not need to have the same planar shape as a 1st glass panel (20) and a 2nd glass panel (30). Similarly, the frame (410) may not have the same planar shape as the first glass substrate (200) and the second glass substrate (300).

  The first glass panel (20) may further include a coating having desired physical properties and formed on the second plane of the main body (21). Alternatively, the first glass panel (20) may not include the coating (22). That is, the 1st glass panel (20) may be comprised only with the main body (21).

  The second glass panel (30) may further include a coating having desired physical properties. The coating only needs to include at least one of thin films formed on the first plane and the second plane of the main body (31), for example. The coating is, for example, a film that reflects light of a specific wavelength (infrared reflective film, ultraviolet reflective film).

  In the said embodiment, the frame (410) is formed with the 1st thermal adhesive. However, the frame (410) may include other elements such as a core material in addition to the first thermal adhesive. That is, the frame (410) only needs to contain the first thermal adhesive. Moreover, in the said embodiment, the frame (410) is formed so that the substantially all area | region of the 2nd glass substrate (300) may be enclosed. However, the frame (410) only needs to be formed so as to surround a predetermined region on the second glass substrate (300). That is, the frame (410) does not need to be formed so as to surround almost the entire region of the second glass substrate (300). Moreover, the assembly (110) may have two or more frames (410). That is, the assembly (110) may have two or more internal spaces (500). In this case, two or more glass panel units (10) can be obtained from one assembly (110).

  In the said embodiment, the partition (420) is formed with the 2nd thermal adhesive. However, the partition (420) may include other elements such as a core material in addition to the second thermal adhesive. That is, the partition (420) only needs to contain the second thermal adhesive. Moreover, in the said embodiment, the both ends of the partition (420) are not connected with the frame (410). And the clearance gap between the both ends of a partition (420) and a frame (410) is a ventilation path (610,620). However, only one of the both ends of the partition (420) may not be connected to the frame (410). In this case, one air passage (between the partition (420) and the frame (410) is provided. 600) is formed. Or the both ends of the partition (420) may be connected with the frame (410). In this case, the ventilation path (600) may be a through hole formed in the partition (420). Alternatively, the air passage (600) may be a gap between the partition (420) and the first glass substrate (200). Alternatively, the partition (420) may be formed of two or more partitions arranged at intervals. In this case, the ventilation path (600) may be a gap between two or more partitions.

  In the above embodiment, the internal space (500) is partitioned into one first space (510) and one second space (520). However, the internal space (500) may be partitioned into one or more first spaces (510) and one or more second spaces (520). When the internal space (500) has two or more first spaces (510), two or more glass panel units (10) can be obtained from one assembly (110).

  In the above embodiment, the second thermal adhesive is the same as the first thermal adhesive, and the second softening point and the first softening point are equal. However, the second thermal adhesive may be a material different from the first thermal adhesive. For example, the second thermal adhesive may have a second softening point different from the first softening point of the first thermal adhesive. Here, the second softening point is preferably higher than the first softening point. In this case, the first melting temperature Tm1 can be set to be equal to or higher than the first softening point and lower than the second softening point. By doing so, it is possible to prevent the partition 420 from being deformed in the first melting step.

  Further, the first adhesive and the second thermal adhesive are not limited to glass frit, and may be, for example, a low melting point metal or a hot melt adhesive.

  In the said embodiment, a melting furnace is utilized for the heating of a frame (410), a gas adsorbent (60), and a partition (420). However, the heating can be performed by an appropriate heating means. The heating means is, for example, a laser or a heat transfer plate connected to a heat source.

  In the above embodiment, the air passage (600) includes two air passages (610, 620). However, the air passage (600) may include only one air passage, or three or more air passages (600, 620). You may be comprised with the ventilation path. Moreover, the shape of the ventilation path (600) is not specifically limited.

  In the said embodiment, the exhaust port (700) is formed in the 2nd glass substrate (300). However, the exhaust port (700) may be formed in the glass plate (210) of the first glass substrate (200), or may be formed in the frame (410). In short, the exhaust port (700) should just be formed in the unnecessary part (11).

  In the above embodiment, the getter of the gas adsorber (60) is an evaporative getter, but the getter may be a non-evaporable getter. When the non-evaporable getter reaches a predetermined temperature (activation temperature) or higher, the adsorbed ability is recovered by allowing the adsorbed molecules to enter the inside. However, unlike evaporative getters, it does not release adsorbed molecules, so if non-evaporable getters adsorb more than a certain amount of molecules, the adsorption capacity is restored even if heated above the activation temperature. No longer.

  In the above embodiment, the gas adsorber (60) has a long shape, but may have other shapes. Further, the gas adsorber (60) does not necessarily have to be at the end of the vacuum space (50). In the above-described embodiment, the gas adsorber (60) is formed by applying a solution in which getter powder is dispersed. However, the gas adsorber (60) may include a substrate and a getter fixed to the substrate. Such a gas adsorbent (60) can be obtained by immersing the substrate in a solution in which getter powder is dispersed and drying the substrate. The substrate may have a desired shape, for example, a long rectangular shape.

  Alternatively, the gas adsorber (60) may be a film formed entirely or partially on the surface (first surface) of the glass plate (310) of the second glass substrate (300). Such a gas adsorbent (60) can be obtained by coating the surface (first surface) of the glass plate (310) of the second glass substrate (300) with a solution in which getter powder is dispersed.

  Alternatively, the gas adsorber (60) may be included in the spacer (70). For example, if the spacer (70) is formed of a material including a getter, the spacer (70) including the gas adsorbent (60) can be obtained.

  Alternatively, the gas adsorber (60) may be a solid formed by a getter. Such a gas adsorber (60) is comparatively large and may not be disposed between the first glass substrate (200) and the second glass substrate (300). In this case, a recess may be formed in the glass plate (310) of the second glass substrate (300), and the gas adsorber (60) may be disposed in this recess.

  Alternatively, the gas adsorber (60) may be arranged in advance in the package so that the getter does not adsorb molecules. In this case, after the second melting step, the package is broken and the gas adsorber (60) is exposed to the vacuum space (50).

  In the said embodiment, although the glass panel unit (10) is provided with the some spacer (70), the glass panel unit (10) may be provided with one spacer (70). Alternatively, the glass panel unit (10) may not include the spacer (70).

  As apparent from the above-described embodiments and modifications, the method of manufacturing the glass panel unit (10) of the first embodiment according to the present invention includes the first glass substrate (200) and the first glass substrate (200). The first glass substrate (200) and the second glass disposed between the second glass substrate (300) and the first glass substrate (200) and the second glass substrate (300) disposed to face each other. A frame (410) for hermetically bonding the substrate (300), an internal space (500) surrounded by the first glass substrate (200), the second glass substrate (300), and the frame (410); A partition (420) that divides the internal space (500) into a first space (510) and a second space (520); and a ventilation path (600) that connects the first space (510) and the second space (520). The second space (520) and the external space An assembly step of preparing a temporary assembly (100) including a gas exhaust port (700), a first space (510), an air passage (600), a second space (520), and an exhaust port (700). The frame (410) corresponds to the vacuum space (50) by forming the partition wall (42) that deforms the partition (420) and closes the air passage (600) by evacuating through the space. The first glass substrate (200) and the second glass substrate (300) are hermetically bonded from the portion to be formed and the partition wall (42), and a seal (40) surrounding the vacuum space (50) is formed, and an assembled product ( 110) and a predetermined portion having a vacuum space (50) by cutting the assembly (110) in a straight line and removing the portion having the second space (520) from the assembly (110). (10) is a glass panel Comprising a removal step to obtain a dot and.

  According to the 1st form, there is no exhaust port (700) and an exhaust pipe (810), and also a glass panel unit (10) with good heat insulation performance is obtained.

  The manufacturing method of the glass panel unit (10) of the 2nd form which concerns on this invention is implement | achieved by the combination with a 1st form. In the manufacturing method of the second glass panel unit (10), the end on the side where the air passage (600) is formed between the partition (420) and the frame (410) is the length of the partition (420). It extends in a direction that intersects the direction. According to the second embodiment, when the material of the partition (420) is applied onto the second glass substrate (300) using the dispenser, the length from the frame (410) to the length of the ventilation path (600) is short. It is not necessary to stop the discharge of the material of the partition (420) from the dispenser at the position. Thereby, the precision of the discharge control of the material of the partition (420) from a dispenser may be low, and it becomes easy to perform control.

  In the manufacturing method of the glass panel unit (10) of the 3rd form which concerns on this invention, it implement | achieves by the combination with a 1st form or a 2nd form. In the manufacturing method of the third glass panel unit (10), a plurality of ventilation paths (600) are formed.

  According to the 3rd form, it becomes easy to shorten the time concerning exhaust.

  In the manufacturing method of the glass panel unit (10) of the 4th form which concerns on this invention, it implement | achieves by the combination with any one of a 1st form thru | or a 3rd form. The manufacturing method of the fourth glass panel unit (10) is such that the portion having the second space (520) is smaller than the predetermined portion (10) having the vacuum space (50), and is cut linearly in the assembly (110). The length of the portion to be formed is shorter than the side of the predetermined portion (10) having the vacuum space (50).

  According to the 4th form, an unnecessary part (11) is formed smaller than a glass panel unit (10). As a result, wasted portions are reduced, yield is improved, and manufacturing costs are reduced.

  In the manufacturing method of the glass panel unit (10) of the 5th form which concerns on this invention, it implement | achieves by the combination with a 4th form. The manufacturing method of the fifth glass panel unit (10) is a predetermined portion having a second space (520) and a vacuum space (50) in the first glass substrate (200) and the second glass substrate (300). (10) is bonded with an adhesive (43).

  According to the 5th form, an unnecessary part (11) is removed by cut | disconnecting with an adhesive agent (43). Thereby, cutting | disconnection becomes easy compared with the case where a 1st glass substrate (200) and a 2nd glass substrate (300) are cut | disconnected.

Claims (6)

A first glass substrate; a second glass substrate disposed to face the first glass substrate; and the first glass substrate and the second glass substrate disposed between the first glass substrate and the second glass substrate. A frame for airtightly bonding the second glass substrate, an internal space surrounded by the first glass substrate, the second glass substrate and the frame, and the internal space as a first space and a second space. An assembling step of preparing a temporary assembly comprising: a partition that divides the first space and the second space; and an exhaust port that connects the second space and the external space;
In the frame body, the first space is evacuated through the ventilation path, the second space, and the exhaust port to form a vacuum space, and a partition that deforms the partition to close the ventilation path is formed. The first glass substrate and the second glass substrate are hermetically bonded from the portion corresponding to the vacuum space and the partition, and the portion corresponding to the vacuum space in the frame and the partition are in series. Forming a seal surrounding the vacuum space to obtain an assembly,
The assembly is cut in a straight line along the longitudinal direction of the partition wall, and divided into two parts, a predetermined part having the vacuum space and an unnecessary part having the second space, and the second space from the assembly. A removal step of obtaining a glass panel unit that is a predetermined portion having the vacuum space by removing unnecessary portions having
Comprising
Manufacturing method of glass panel unit.   The manufacturing method of the glass panel unit of Claim 1 with which the said air flow path is formed between the edge part of the said partition, and the said frame.   The manufacturing method of the glass panel unit of Claim 2 with which the said edge part by the side in which the said ventilation path of the said partition is formed extends in the direction which cross | intersects the length direction of the said partition.   The manufacturing method of the glass panel unit as described in any one of Claim 1 thru | or 3 with which the said ventilation path is formed in multiple numbers.   The part having the second space is smaller than the predetermined part having the vacuum space, and the length of the part cut in a straight line in the assembly is shorter than the side of the predetermined part having the vacuum space. Item 5. A method for producing a glass panel unit according to any one of Items 1 to 4.   The method for manufacturing a glass panel unit according to claim 5, wherein a portion having the second space and the predetermined portion having the vacuum space in the first glass substrate and the second glass substrate are bonded with an adhesive.

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