JP6395080B2 - Glass panel unit, glass panel unit assembly, and method of manufacturing glass panel unit - Google Patents

Description

  The present invention relates to a glass panel unit, a glass panel unit assembly, and a glass panel unit manufacturing method, and more particularly to a heat insulating glass panel unit, a glass panel unit assembly, and a glass panel unit manufacturing method.

  Patent document 1 discloses the evacuated glass panel which has a getter. The getter is disposed in a chamber region formed between two glass sheets that are spaced apart from each other. The getter is housed in a cylindrical ring-shaped housing formed of a metal such as stainless steel. In Patent Literature 1, the housing is heated by sending high-frequency energy to the housing, and the getter is activated.

Special table 2003-507845

  In Patent Document 1, the getter can be activated without heating the entire glass panel. However, the glass member (glass sheet) is also partially heated by the high-frequency energy for heating the housing. Therefore, depending on the case, the glass member may be partially thermally expanded, and the glass member may be damaged.

  The problem to be solved by the present invention is to obtain a glass panel unit in which the glass member is not easily damaged when the getter is activated.

  The glass panel unit of the form which concerns on this invention is between the 1st glass panel, the 2nd glass panel arrange | positioned so as to oppose the said 1st glass panel, and the said 1st glass panel and the said 2nd glass panel. A frame-shaped seal that is arranged in an airtight manner to join the first glass panel and the second glass panel, and a vacuum space surrounded by the first glass panel, the second glass panel, and the seal, A gas adsorption device. The gas adsorption device includes a first electrode having a first inner part located in the vacuum space and a first outer part located outside the vacuum space, a second inner part located in the vacuum space, and the vacuum. A second electrode having a second outer portion located outside the space; and a gas adsorbing portion having a gas adsorber including a getter and connected between the first inner portion and the second inner portion. Prepare.

  The assembly of the glass panel unit according to another aspect of the present invention includes a first glass substrate, a second glass substrate disposed so as to face the first glass substrate, the first glass substrate, and the second glass substrate. A frame body disposed between the glass substrate and airtightly bonding the first glass substrate and the second glass substrate, and surrounded by the first glass substrate, the second glass substrate, and the frame body. An internal space, a gas adsorption device, and an exhaust port for exhausting the internal space are provided. The gas adsorption device includes a first electrode having a first inner portion located in the inner space and a first outer portion located outside the inner space, a second inner portion located in the inner space, and the inner portion. A second electrode having a second outer portion located outside the space; and a gas adsorbing portion having a gas adsorber including a getter and connected between the first inner portion and the second inner portion. Prepare.

  The manufacturing method of the glass panel unit of the other form which concerns on this invention is equipped with the assembly process which prepares the assembly product of a glass panel unit, and an exhaust process. The assembly of the glass panel unit is disposed between a first glass substrate, a second glass substrate disposed to face the first glass substrate, and the first glass substrate and the second glass substrate. A frame body that hermetically joins the first glass substrate and the second glass substrate, an internal space surrounded by the first glass substrate, the second glass substrate, and the frame body, and a gas adsorption device And an exhaust port for exhausting the internal space. The gas adsorption device includes a first electrode having a first inner portion located in the inner space and a first outer portion located outside the inner space, a second inner portion located in the inner space, and the inner portion. A second electrode having a second outer portion located outside the space; and a gas adsorbing portion having a gas adsorber including a getter and connected between the first inner portion and the second inner portion. Prepare. In the exhaust step, the internal space is exhausted through the exhaust port while a current is passed through the gas adsorbing portion using the first electrode and the second electrode to activate the getter, thereby forming a vacuum space.

  According to the embodiments of the present invention, a glass panel unit is obtained in which the glass member is not easily damaged when the getter is activated.

It is a schematic perspective view of the glass panel unit of Embodiment 1. 2 is a schematic plan view of the glass panel unit of Embodiment 1. FIG. It is a schematic sectional drawing of the glass panel unit of Embodiment 1. FIG. It is explanatory drawing of the manufacturing method of the glass panel unit of Embodiment 1. FIG. It is a schematic plan view of the glass panel unit of Embodiment 2. It is a schematic sectional drawing of the glass panel unit of Embodiment 2. It is explanatory drawing of the manufacturing method of the glass panel unit of Embodiment 2. FIG. It is explanatory drawing of the manufacturing method of the glass panel unit of Embodiment 2. FIG. It is explanatory drawing of the manufacturing method of the glass panel unit of Embodiment 2. FIG. It is a schematic perspective view of the glass panel unit of Embodiment 3. It is a schematic sectional drawing of the glass panel unit of Embodiment 4. It is a schematic sectional drawing of the glass panel unit of Embodiment 5. It is a schematic plan view of the glass panel unit of Embodiment 5.

[1. Embodiment]
FIGS. 1-12 shows the glass panel unit 10 (10A-10E) of Embodiments 1-5 which concern on this invention. Glass panel units 10A to 10E are vacuum heat insulating glass units. The vacuum heat insulating glass unit is a kind of multilayer glass panel including at least a pair of glass panels, and has a vacuum space between the pair of glass panels.

[1-1. Embodiment 1]
[1-1-1. Constitution]
1-3, the glass panel unit 10 (10A) of this embodiment includes a first glass panel 20 (20A), a second glass panel 30 (30A), and a seal 40 (40A). The vacuum space 50 (50A) and the gas adsorption device 60 (60A) are provided. Further, the glass panel unit 10 </ b> A includes a plurality of spacers 70, an exhaust port 700, and a cap 911.

  The glass panel unit 10A is obtained from an assembly 100 (100A) of the glass panel unit shown in FIG. 4 (hereinafter simply referred to as “assembly” as necessary). That is, the glass panel unit 10A is a finished product of the glass panel unit obtained from the assembly 100A.

  The assembly 100A includes a first glass substrate 200, a second glass substrate 300, a frame 410, an internal space 500, a gas adsorption device 60A, and an exhaust port 700. Further, the assembly 100A includes a plurality of spacers 70.

  The first glass substrate 200 includes a glass plate 210 that defines the planar shape of the first glass substrate 200 and a coating 220.

  The glass plate 210 is a rectangular flat plate and has a first surface and a second surface in the thickness direction parallel to each other. The first surface and the second surface of the glass plate 210 are both flat. The material of the glass plate 210 is, for example, soda lime glass, high strain point glass, chemically tempered glass, alkali-free glass, quartz glass, neoceram, or physically tempered glass.

  The coating 220 is formed on the first surface of the glass plate 210. The coating 220 is a transparent infrared reflective film. The coating 220 is not limited to the infrared reflective film, and may be a film having desired physical characteristics.

  The second glass substrate 300 includes a glass plate 310 that defines the planar shape of the second glass substrate 300. The glass plate 310 is a rectangular flat plate and has a first surface and a second surface in the thickness direction parallel to each other. Both the first surface and the second surface of the glass plate 310 are flat surfaces.

  The planar shape and planar size of the glass plate 310 are the same as those of the glass plate 210 (that is, the planar shape of the second glass substrate 300 is the same as that of the first glass substrate 200). The thickness of the glass plate 310 is the same as that of the glass plate 210. The material of the glass plate 310 is, for example, soda lime glass, high strain point glass, chemically tempered glass, alkali-free glass, quartz glass, neoceram, or physically tempered glass.

  The second glass substrate 300 is composed only of the glass plate 310. That is, the glass plate 310 is the second glass substrate 300 itself.

  The second glass substrate 300 is disposed so as to face the first glass substrate 200. Specifically, the first glass substrate 200 and the second glass substrate 300 are disposed such that the first surface of the glass plate 210 and the first surface of the glass plate 310 are parallel to and face each other. The length direction, the width direction, and the thickness direction of the first glass substrate 200 are the same as the length direction, the width direction, and the thickness direction of the second glass substrate 300, respectively. The length direction, width direction, and thickness direction of the first and second glass substrates 200 and 300 are the length direction, width direction, and thickness direction of the assembly 100A, respectively.

  The frame 410 is arrange | positioned between the 1st glass substrate 200 and the 2nd glass substrate 300, and joins the 1st glass substrate 200 and the 2nd glass substrate 300 airtightly. Thus, an internal space 500 surrounded by the frame body 410, the first glass substrate 200, and the second glass substrate 300 is formed.

  The frame 410 is formed of a thermal adhesive (first thermal adhesive). The first thermal adhesive is, for example, a glass frit. The glass frit is, for example, a low melting point glass frit. The low melting point glass frit is, for example, a bismuth glass frit, a lead glass frit, or a vanadium glass frit.

  The frame 410 has a rectangular frame shape. The planar shape of the frame 410 is the same as that of the glass plates 210 and 310, but the planar size of the frame 410 is smaller than the glass plates 210 and 310. The frame body 410 is formed along the outer periphery of the second glass substrate 300. That is, the frame 410 is formed so as to surround almost all the region on the second glass substrate 300.

  The first glass substrate 200 and the second glass substrate 300 are joined airtightly by the frame body 410 by once melting the first thermal adhesive of the frame body 410.

  The exhaust port 700 is a hole that connects the internal space 500 and the external space. The exhaust port 700 is used to exhaust the internal space 500. The exhaust port 700 is formed in the second glass substrate 300 so as to connect the internal space 500 and the external space. Specifically, the exhaust port 700 is located at a corner portion on the first end side (the right end side in FIG. 4) in the length direction of the second glass substrate 300.

  The gas adsorption device 60 (60A) includes a first electrode 61 (61A), a second electrode 62 (62A), and a gas adsorption unit 63 (63A). The gas adsorption device 60A is disposed at the second end (left end in FIG. 4) in the length direction of the second glass substrate 300 (or the first glass substrate 200).

  The first electrode 61 </ b> A has a first inner portion 610 located in the inner space 500 and a first outer portion 611 located outside the inner space 500. The first electrode 61 </ b> A further includes a first connecting portion 612 that connects the first inner portion 610 and the first outer portion 611.

  The first electrode 61A has a long flat plate shape. That is, both end portions in the length direction of the first electrode 61A are the first inner portion 610 and the first outer portion 611, respectively, and the center portion in the length direction of the first electrode 61A is the first connection portion 612. The first electrode 61A is formed at the second end (left end in FIG. 4) in the length direction of the second glass substrate 300 so as to cross the frame body 410 along the length direction of the second glass substrate 300. ing.

  The first electrode 61A is formed of a metal foil. The metal foil is formed of a desired metal (copper, silver, gold, etc.), for example. The metal foil may have one or more layers.

  The second electrode 62 </ b> A has a second inner portion 620 located in the inner space 500 and a second outer portion 621 located outside the inner space 500. The second electrode 62 </ b> A further includes a second connecting portion 622 that connects the second inner portion 620 and the second outer portion 621.

  The second electrode 62A has a long flat plate shape. That is, both end portions in the length direction of the second electrode 62A are the second inner portion 620 and the second outer portion 621, respectively, and the center portion in the length direction of the second electrode 62A is the second connection portion 622. The second electrode 62A is formed at the second end (left end in FIG. 4) in the length direction of the second glass substrate 300 so as to cross the frame body 410 along the length direction of the second glass substrate 300. ing.

  The second electrode 62A is formed of a metal foil. The metal foil is formed of a desired metal (copper, silver, gold, etc.), for example. The metal foil may have one or more layers.

  The first electrode 61A and the second electrode 62A are separated from each other in a predetermined direction. The predetermined direction is a direction intersecting with a direction in which the first glass substrate 200 and the second glass substrate 300 face each other (a thickness direction of the first glass substrate 200 and a thickness direction of the second glass substrate 300). In particular, the predetermined direction is a direction orthogonal to the direction in which the first glass substrate 200 and the second glass substrate 300 face each other (the width direction of the first glass substrate 200 and the width direction of the second glass substrate 300). The first electrode 61A and the second electrode 62A are parallel to each other. However, the first electrode 61A and the second electrode 62A may not be parallel to each other.

  The gas adsorption part 63A has a gas adsorber 630 (630A) and is connected between the first inner part 610 and the second inner part 620. The gas adsorption unit 63A further includes a heating electrode 631.

  The heating electrode 631 is connected between the first inner portion 610 and the second inner portion 620. The heating electrode 631 has a long flat plate shape and extends along the predetermined direction described above.

  The heating electrode 631 is formed of a metal foil. The metal foil is formed of a desired metal (copper, silver, gold, etc.), for example. The metal foil may have one or more layers. The heating electrode 631, the first electrode 61A, and the second electrode 62A are formed using a single metal foil. Note that the heating electrode 631, the first electrode 61A, and the second electrode 62A may not be formed using the same metal foil.

  The gas adsorber 630A has a long flat plate shape. The gas adsorber 630 </ b> A is disposed so as to contact the heating electrode 631. The gas adsorber 630A is supported by the heating electrode 631 so that the gas adsorber 630A does not come into contact with either the first glass substrate 200 or the second glass substrate 300.

  The gas adsorber 630A is used to adsorb unnecessary gas (residual gas or the like). The unnecessary gas is, for example, a gas released from the frame 410 or the like when the frame 410 or the like is heated.

  The gas adsorber 630A has a getter. A getter is a material that has the property of adsorbing molecules smaller than a predetermined size. The getter is, for example, an evaporation type getter. The evaporable getter has a property of releasing adsorbed molecules when the temperature is higher than a predetermined temperature (activation temperature). Therefore, even if the adsorption ability of the evaporable getter is reduced, the adsorption ability of the evaporable getter can be recovered by heating the evaporable getter to the activation temperature or higher. The evaporative getter is, for example, a zeolite or an ion exchanged zeolite (eg, a copper ion exchanged zeolite).

  The gas adsorber 630A includes the getter powder. Specifically, the gas adsorber 630A is a liquid containing a getter powder (for example, a dispersion obtained by dispersing a getter powder in a liquid, or a getter powder dissolved in a liquid). It is formed by applying and solidifying a solution. In this case, the gas adsorber 630A can be made small. Therefore, the gas adsorber 630A can be arranged even if the internal space 500 is narrow.

  In the gas adsorption device 60A, when a voltage is applied between the first and second outer portions 611 and 621, a current flows through the heating electrode 631 of the gas adsorption unit 63A. As a result, the temperature of the heating electrode 631 increases, so that the temperature of the gas adsorber 630A (getter) in contact with the heating electrode 631 also increases. Therefore, the getter can be activated by applying a voltage between the first and second outer portions 611 and 621. Therefore, the getter can be activated without heating the entire glass panel unit 10A. Further, in order to activate the getter, the possibility that the glass member (glass plates 210, 310, etc.) is partially heated excessively and is damaged can be reduced.

  The plurality of spacers 70 are used to maintain the distance between the first glass substrate 200 and the second glass substrate 300 at a predetermined distance. That is, the plurality of spacers 70 are used to maintain the distance between the first glass panel 20A and the second glass panel 30A at a desired value.

  The plurality of spacers 70 are arranged in the internal space 500. Specifically, the plurality of spacers 70 are arranged at intersections of virtual rectangular grids. For example, the interval between the plurality of spacers 70 is 2 cm. However, the size of the spacers 70, the number of the spacers 70, the interval between the spacers 70, and the arrangement pattern of the spacers 70 can be selected as appropriate.

  The spacer 70 has a cylindrical shape having a height substantially equal to the predetermined interval. For example, the spacer 70 has a diameter of 1 mm and a height of 100 μm. Each spacer 70 may have a desired shape such as a prismatic shape or a spherical shape.

  The spacer 70 is formed using a transparent material. However, each spacer 70 may be formed using an opaque material as long as it is sufficiently small.

  The assembly 100A is subjected to the following process in order to obtain the glass panel unit 10A.

  First, using the first electrode 61A and the second electrode 62A, an electric current is passed through the gas adsorbing portion 63A to activate the getter and exhaust the internal space 500 through the exhaust port 700 to form the vacuum space 50A. As a result, the exhaust of the internal space 500 and the recovery of the adsorption ability of the getter can be performed simultaneously. Next, the exhaust port 700 is closed with the cap 911. Thereby, the glass panel unit 10A is obtained.

  As described above, the glass panel unit 10A thus obtained includes the first glass panel 20A, the second glass panel 30A, the seal 40A, the vacuum space 50A, the gas adsorption device 60A, and a plurality of spacers. 70, an exhaust port 700, and a cap 911. Since the gas adsorption device 60A, the plurality of spacers 70, and the exhaust port 700 have already been described, detailed description thereof is omitted here.

  In the glass panel unit 10A, the first glass substrate 200, the second glass substrate 300, and the frame body 410 of the assembly 100A become the first glass panel 20A, the second glass panel 30A, and the seal 40A, respectively.

  The first glass panel 20A includes a main body 21 (21A) that defines a planar shape of the first glass panel 20A, and a coating 22 (22A). Since the first glass panel 20A is the first glass substrate 200, the main body 21A is the glass plate 210, and the coating 22A is the coating 220. Therefore, the main body 21A is also rectangular and has a first surface (a lower surface in FIG. 3) and a second surface (an upper surface in FIG. 3) in the thickness direction parallel to each other. The first surface and the second surface of the main body 21A are both flat surfaces.

  The second glass panel 30A includes a main body 31 that defines a planar shape of the second glass panel 30A. Since the second glass panel 30 </ b> A is the second glass substrate 300, the main body 31 </ b> A is the glass plate 310. Therefore, the main body 31A is also rectangular and has a first surface (upper surface in FIG. 3) and a second surface (lower surface in FIG. 3) in the thickness direction parallel to each other. The first surface and the second surface of the main body 31A are both flat surfaces. The planar shape of the main body 31A is the same as that of the main body 21A (that is, the planar shape of the second glass panel 30A is the same as that of the first glass panel 20A).

  The second glass panel 30A is composed of only the main body 31A. That is, the main body 31A itself is the second glass panel 30A.

  The first glass panel 20A and the second glass panel 30A are arranged so that the second surface of the main body 21A and the first surface of the main body 31A are parallel to and opposed to each other. That is, the second surface of the main body 21 </ b> A is directed to the outside of the glass panel unit 10, and the first surface of the main body 21 </ b> A is directed to the inside of the glass panel unit 10. The first surface of the main body 31 </ b> A is directed to the inside of the glass panel unit 10, and the second surface of the main body 31 </ b> A is directed to the outside of the glass panel unit 10.

  Here, the length direction, the width direction, and the thickness direction of the first glass panel 20A are the same as the length direction, the width direction, and the thickness direction of the second glass panel 30A, respectively. The length direction, width direction, and thickness direction of the first and second glass panels 20A and 30A are the length direction, width direction, and thickness direction of the glass panel unit 10A, respectively.

  The seal 40A completely surrounds the vacuum space 50 and airtightly joins the first glass panel 20A and the second glass panel 30A. Since the seal 40A is the frame body 410, it has a rectangular frame shape and is formed of a thermal adhesive (first thermal adhesive).

  The vacuum space 50 </ b> A is a space surrounded by the first glass panel 20 </ b> A, the second glass panel 30 </ b> A, and the seal 40. As described above, the vacuum space 50 </ b> A is formed by exhausting the internal space 500 through the exhaust port 700. In other words, the vacuum space 50A is the internal space 500 whose degree of vacuum is a predetermined value or less. The predetermined value is, for example, 0.1 Pa. Since the vacuum space 50A is completely sealed by the first glass panel 20A, the second glass panel 30A, the seal 40, and the cap 911, it is separated from the external space.

  As described above, the gas adsorption device 60A includes the first electrode 61A, the second electrode 62A, and the gas adsorption unit 63A. However, in the glass panel unit 10A, the first and second inner portions 610, 620 are located in the vacuum space 50A, and the first and second outer portions 611, 621 are located outside the vacuum space 50A.

  The cap 911 closes the exhaust port 700. The cap 911 is attached to the second surface of the main body 31A of the second glass panel 30A. The cap 911 is formed using, for example, an exhaust pipe 910 (see FIG. 4) used to exhaust the internal space 500 through the exhaust port 700. Specifically, the cap 911 is obtained by deforming the exhaust pipe 910 and closing the opening at one end of the exhaust pipe 910 after exhausting the internal space 500. Note that the exhaust pipe 910 is formed of, for example, an appropriate material (for example, metal, glass, or the like).

[1-1-2. Production method]
Next, a manufacturing method of the glass panel unit 10A will be described with reference to FIG.

  The manufacturing method of the glass panel unit 10A includes a preparation process, an assembly process, an exhaust process, and a sealing process. Note that the preparation step may be omitted.

  The preparation step is a step of forming the first glass substrate 200, the second glass substrate 300, the frame body 410, the internal space 500, the exhaust port 700, the gas adsorption device 60A, and the plurality of spacers 70 in order to obtain the assembly 100A. It is. The preparation step has first to sixth steps. In addition, you may change the order of a 2nd-5th process suitably.

  The first step is a step of forming the first glass substrate 200 and the second glass substrate 300 (substrate forming step). For example, in the first step, the first glass substrate 200 and the second glass substrate 300 are produced. In the first step, the first glass substrate 200 and the second glass substrate 300 are cleaned as necessary. Further, in the first step, the first and second electrodes 61A, 62A and the heating electrode 631 are formed at predetermined positions on the second glass substrate 300 using a metal foil. Note that the first and second electrodes 61A and 62A and the heating electrode 631 are not necessarily formed in the first step.

  The second step is a step of forming the exhaust port 700. In the second step, the exhaust port 700 is formed in the second glass substrate 300. In the second step, the second glass substrate 300 is cleaned as necessary.

  The third step is a step of forming the frame body 410 (sealing material forming step). In the third step, the material of the frame 410 (first thermal adhesive) is applied onto the second glass substrate 300 (the first surface of the glass plate 310) using a dispenser or the like. Then, the material of the frame body 410 is dried and temporarily fired. For example, the second glass substrate 300 to which the material of the frame body 410 and the material of the partition 420 are applied is heated at 480 ° C. for 20 minutes. Note that the first glass substrate 200 may be heated together with the second glass substrate 300. That is, the first glass substrate 200 may be heated under the same conditions as the second glass substrate 300 (20 minutes at 480 ° C.). Thereby, the difference of the curvature of the 1st glass substrate 200 and the 2nd glass substrate 300 can be reduced.

  The fourth step is a step of forming the spacer 70 (spacer forming step). In the fourth step, a plurality of spacers 70 are formed in advance, and the plurality of spacers 70 are arranged at predetermined positions on the second glass substrate 300 using a chip mounter or the like. The plurality of spacers 70 may be formed using a photolithography technique and an etching technique. In this case, the plurality of spacers 70 are formed using a photocurable material or the like. Alternatively, the plurality of spacers 70 may be formed using a known thin film forming technique.

  The fifth step is a step of forming the gas adsorber 630A (gas adsorber forming step). In the fifth step, the gas adsorber 630A is formed by applying a solution in which getter powder is dispersed to a predetermined position of the heating electrode 631 and drying the solution.

  By completing the first to fifth steps, the second glass substrate 300 on which the frame body 410, the exhaust port 700, the gas adsorption device 60A, and the plurality of spacers 70 are formed is obtained.

  The sixth step is a step (arrangement step) for arranging the first glass substrate 200 and the second glass substrate 300. In the sixth step, the first glass substrate 200 and the second glass substrate 300 are arranged such that the first surface of the glass plate 210 and the first surface of the glass plate 310 are parallel to and face each other.

  The assembly process is a process for preparing an assembly 100A. Specifically, in the assembly process, the first glass substrate 200 and the second glass substrate 300 are bonded to prepare an assembly 100A. That is, the assembly process is a process (melting process) in which the first glass substrate 200 and the second glass substrate 300 are hermetically bonded by the frame body 41.

  In the assembling step, the first glass substrate 200 and the second glass substrate 300 are hermetically joined by once melting the first thermal adhesive. Specifically, the first glass substrate 200 and the second glass substrate 300 are placed in a melting furnace and heated at a predetermined melting temperature for a predetermined melting time. The predetermined melting time at the predetermined melting temperature is set so that the first glass substrate 200 and the second glass substrate 300 are hermetically bonded by the first thermal adhesive of the frame 410.

  By the assembly process (melting process) described above, an assembly 100A shown in FIG. 4 is obtained.

  The evacuation process is a process of evacuating the internal space 500 through the exhaust port 700 to form the vacuum space 50A while activating the getter by passing a current through the gas adsorption part 63A using the first electrode 61A and the second electrode 62A. is there.

  The internal space 500 is evacuated using, for example, a vacuum pump. The vacuum pump is connected to the assembly 100A by an exhaust pipe 910 and a seal head 920, as shown in FIG. For example, the exhaust pipe 910 is joined to the second glass substrate 300 so that the inside of the exhaust pipe 910 and the exhaust port 700 communicate with each other. Then, a seal head 920 is attached to the exhaust pipe 910, whereby the suction port of the vacuum pump is connected to the exhaust port 700.

  In the exhaust process, the getter is activated. Therefore, molecules (gas) adsorbed by the getter are released from the getter. Then, molecules (that is, gas) released from the getter are discharged through the exhaust port 700. Therefore, in the exhaust process, the adsorption capacity of the gas adsorber 630A is recovered.

  In the exhaust process, the internal space 500 is exhausted through the exhaust port 700 for a predetermined time (exhaust time). The exhaust time is set so that a vacuum space 50 having a desired degree of vacuum (for example, a degree of vacuum of 0.1 Pa or less) is obtained.

  In the sealing process, the exhaust port 700 is closed. Specifically, a cap 911 that closes the exhaust port 700 is formed by closing an opening at one end of the exhaust pipe 910. Thereby, 10A of glass panel units shown by FIGS. 1-3 are obtained.

  In the melting process, the frame 410 is heated, and thus gas may be released from the frame 410. Since the gas released from the frame 410 is adsorbed by the gas adsorber 630A, the adsorption capacity of the gas adsorber 630A may be reduced by the melting process. However, in the exhaust process, the adsorption capacity of the gas adsorber 630A is restored. Therefore, the gas adsorber 630A can sufficiently adsorb the gas generated in the vacuum space 50A. That is, it is possible to prevent the gas adsorber 630A from sufficiently adsorbing the gas generated in the vacuum space 50A and deteriorating the vacuum degree of the vacuum space 50A.

  In the melting step, it is preferable to activate the getter. When a thermal adhesive having a melting point (softening point) higher than the activation temperature of the getter is used as the material of the seal 40, the melting temperature in the melting process becomes higher than the activation temperature, so that the getter is activated. Here, in the gas adsorption device 60 </ b> A, the getter can be activated directly by passing a current through the gas adsorption unit 63. Therefore, the melting temperature in the melting step does not need to be higher than the activation temperature of the getter only for activating the getter. Therefore, when a thermal adhesive (for example, glass frit) having a melting point (softening point) lower than the activation temperature of the getter is used as the material of the seal 40, the melting temperature in the melting step is lower than the activation temperature of the getter. it can. Therefore, a glass panel unit (10) can be manufactured by a low temperature process, and manufacturing cost can be reduced.

[1-1-3. Feature]
The glass panel unit 10A of the present embodiment described above includes the first glass panel 20A, the second glass panel 30A disposed so as to face the first glass panel 20A, the first glass panel 20A, and the second glass panel. 30A, and is surrounded by a frame-like seal 40A that hermetically joins the first glass panel 20A and the second glass panel 30A, and the first glass panel 20A, the second glass panel 30A, and the seal 40A. A vacuum space 50A and a gas adsorption device 60A. The gas adsorption device 60A includes a first electrode 61A having a first inner portion 610 located in the vacuum space 50A and a first outer portion 611 located outside the vacuum space 50A, and a second inner portion located in the vacuum space 50A. 620 and a second electrode 62A having a second outer portion 621 located outside the vacuum space 50A, and a gas adsorber 630A including a getter, and is connected between the first inner portion 610 and the second inner portion 620. Gas adsorbing part 63A.

  In addition, the gas adsorption unit 63A includes a heating electrode 631 connected between the first inner portion 610 and the second inner portion 620. The gas adsorber 630 </ b> A is disposed so as to contact the heating electrode 631.

  Further, the first electrode 61A and the second electrode 62A are separated in a predetermined direction. The predetermined direction is a direction that intersects the direction in which the first glass panel 20A and the second glass panel 30A face each other. The gas adsorber 630A is supported by the heating electrode 631 so that the gas adsorber 630A does not contact any of the first glass panel 20A and the second glass panel 30A.

  The first electrode 61A, the second electrode 62A, and the heating electrode 631 are formed of a metal foil.

  An assembly 100A of the glass panel unit 10A of the present embodiment includes a first glass substrate 200, a second glass substrate 300 disposed so as to face the first glass substrate 200, the first glass substrate 200, and the second glass. A frame body 410 disposed between the substrate 300 and hermetically bonding the first glass substrate 200 and the second glass substrate 300, and surrounded by the first glass substrate 200, the second glass substrate 300, and the frame body 410. The internal space 500, the gas adsorption device 60A, and the exhaust port 700 for exhausting the internal space 500 are provided. The gas adsorption device 60 </ b> A includes a first electrode 61 </ b> A having a first inner portion 610 located in the inner space 500 and a first outer portion 611 located outside the inner space 500, and a second inner portion located in the inner space 500. 620 and a second electrode 62A having a second outer portion 621 located outside the inner space 500, and a gas adsorber 630A including a getter, and are connected between the first inner portion 610 and the second inner portion 620. Gas adsorbing part 63A.

  The manufacturing method of the glass panel unit 10A of the present embodiment includes an assembling process for preparing an assembly 100A of the glass panel unit and an exhausting process. In the exhaust process, the internal space 500 is exhausted through the exhaust port 700 to form the vacuum space 50A while flowing the current through the gas adsorbing portion 63A using the first electrode 61A and the second electrode 62A to activate the getter.

  Moreover, the manufacturing method of 10 A of glass panel units is further equipped with the sealing process. In the sealing process, the exhaust port 700 is closed.

[1-2. Embodiment 2]
[1-2-1. Constitution]
The glass panel unit 10 (10B) of the present embodiment is different from the glass panel unit 10A mainly in that the exhaust port 700 and the cap 911 (exhaust pipe 910) that closes the exhaust port 700 are not provided. In addition, the structure common to glass panel unit 10A, 10B is shown with the same code | symbol for the purpose of abbreviate | omitting description.

  As shown in FIGS. 5 and 6, the glass panel unit 10B includes a first glass panel 20 (20B), a second glass panel 30 (30B), a seal 40 (40B), and a vacuum space 50 (50B). A gas adsorption device 60 (60A) and a plurality of spacers 70.

  The glass panel unit 10B is a predetermined part separated from the assembly 100 (100C) shown in FIG. Specifically, the glass panel unit 10B is a part obtained by removing the unnecessary part 11 from the assembly 100 (100C), as shown in FIG.

  The assembly 100C is obtained by performing predetermined processing on the assembly 100 (100B) shown in FIG. Hereinafter, in order to clearly distinguish the assembly 100B from the assembly 100C, the assembly 100B is referred to as a temporary assembly as necessary.

  The temporary assembly 100B includes a first glass substrate 200, a second glass substrate 300, a frame 410, an internal space 500, a partition 420, two air passages 800, an exhaust port 700, and a gas adsorption device 60A. And a plurality of spacers 70. In addition, the structure common to assembly goods 100A and 100B is shown with the same code | symbol for the purpose of abbreviate | omitting description.

  The partition 420 is disposed in the internal space 500. The partition 420 partitions the internal space 500 into an exhaust space 510 and a ventilation space 520. However, both ends in the length direction of the partition 420 are not in contact with the frame body 410.

  The exhaust space 510 is a space to be exhausted later, and the ventilation space 520 is a space used for exhausting the exhaust space 510. The exhaust port 700 is formed so as to connect the ventilation space 520 and the external space. In other words, the space directly connected to the external space by the exhaust port 700 in the internal space 500 is the ventilation space 520.

  The partition 420 is formed on the first end side in the length direction of the second glass substrate 300 (the right end side in FIG. 7) from the center of the second glass substrate 300 so that the exhaust space 510 is larger than the ventilation space 520. Is done.

  The partition 420 is formed with a thermal adhesive (second thermal adhesive). The second thermal adhesive is, for example, a glass frit. The glass frit is, for example, a low melting point glass frit. The low melting point glass frit is, for example, a bismuth glass frit, a lead glass frit, or a vanadium glass frit. The second thermal adhesive is the same as the first thermal adhesive, and the softening point (second softening point) of the second thermal adhesive is equal to the softening point (first softening point) of the first adhesive.

  The two ventilation paths 800 connect the exhaust space 510 and the ventilation space 520 in the internal space 500. One of the two ventilation paths 800 is a space formed between one end of the partition 420 and the frame 410, and the other is a space formed between the other end of the partition 420 and the frame 410.

  In the predetermined process, the internal space 500 is exhausted through the exhaust port 700 to form the vacuum space 50B while activating the getter by flowing current through the gas adsorbing portion 63A using the first electrode 61A and the second electrode 62A. .

  In the predetermined process, the partition 420 is deformed to form the partition wall 42 that closes the air passage 800, thereby forming the seal 40B surrounding the vacuum space 50B (see FIG. 8). Since the partition 420 includes the second thermal adhesive, the partition 420 can be formed by deforming the partition 420 by once melting the second thermal adhesive.

  The partition 420 is deformed so as to block the two ventilation paths 800. The partition wall 42 obtained by deforming the partition 420 in this manner separates (vacually) the vacuum space 50B from the ventilation space 520. A part (first part) 41 and a partition wall (second part) 42 corresponding to the vacuum space 50B in the frame 410 constitute a seal 40B surrounding the vacuum space 50B.

  As shown in FIG. 8, the assembled product 100C thus obtained includes a first glass substrate 200, a second glass substrate 300, a seal 40B, a vacuum space 50B, a ventilation space 520, and a gas adsorption device. 60A, a plurality of spacers 70, and an exhaust port 700 are provided.

  As described above, the vacuum space 50 </ b> B is formed by exhausting the exhaust space 510 via the ventilation space 520 and the exhaust port 700. In other words, the vacuum space 50B is an exhaust space 510 whose degree of vacuum is a predetermined value or less. The predetermined value is, for example, 0.1 Pa. Since the vacuum space 50B is completely sealed by the first glass substrate 200, the second glass substrate 300, and the seal 40B, it is separated from the ventilation space 520 and the exhaust port 700.

  The seal 40B completely surrounds the vacuum space 50B and bonds the first glass substrate 200 and the second glass substrate 300 in an airtight manner. The seal 40 </ b> B has a rectangular frame shape and includes a first portion 41 and a second portion 42. The first portion 41 is a portion corresponding to the vacuum space 50 </ b> B in the frame body 410. That is, the first portion 41 is a portion facing the vacuum space 50 </ b> B in the frame body 410. The first portion 41 is substantially U-shaped and constitutes three sides of the four sides of the seal 40. The second portion 42 is a partition wall obtained by deforming the partition 420. The second portion 42 is I-shaped and constitutes the remaining one of the four sides of the seal 40.

  Such an assembly 100C is divided into a part (glass panel unit) 10B having a vacuum space 50B and a part (unnecessary part) 11 having a ventilation space 520, as shown in FIG.

  The unnecessary portion 11 mainly includes a portion 230 corresponding to the ventilation space 520 in the first glass substrate 200, a portion 320 corresponding to the ventilation space 520 in the second glass substrate 300, and a ventilation space in the frame 410. And a portion 411 corresponding to 520. In consideration of the manufacturing cost of the glass panel unit 10, it is preferable that the unnecessary portion 11 is small.

  As shown in FIGS. 5 and 6, the glass panel unit 10B includes a first glass panel 20B, a second glass panel 30B, a seal 40B, a vacuum space 50B, a gas adsorption device 60A, and a plurality of spacers 70. And comprising. Since the seal 40B, the vacuum space 50B, the gas adsorption device 60A, and the plurality of spacers 70 have already been described, they will not be described in detail here.

  The first glass panel 20 </ b> B is a portion corresponding to the vacuum space 50 </ b> B in the first glass substrate 200. The first glass panel 20B includes a main body 21 (21B) that defines a planar shape of the first glass panel 20B, and a coating 22 (22B).

  The main body 21 </ b> B is a portion corresponding to the vacuum space 50 </ b> B in the glass plate 210 of the first glass substrate 200. The main body 21B has a rectangular shape, and has a first surface (a lower surface in FIG. 6) and a second surface (an upper surface in FIG. 6) parallel to each other in the thickness direction. Both the first surface and the second surface of the main body 21 are flat surfaces.

  The coating 22B is formed on the second surface of the main body 21B. The coating 22B is a portion corresponding to the vacuum space 50B in the coating 220 of the first glass substrate 200.

  The second glass panel 30 </ b> B is a part corresponding to the vacuum space 50 </ b> B in the second glass substrate 300. The exhaust port 700 for forming the vacuum space 50 </ b> B exists in the portion 320 corresponding to the ventilation space 520 in the second glass substrate 300, and the exhaust pipe 910 is connected to the portion 320. Therefore, the exhaust pipe 910 is not connected to the second glass panel 30 and the exhaust port 700 does not exist.

  The second glass panel 30B includes a main body 31 (31B) that defines the planar shape of the second glass panel 30B. The main body 31 </ b> B is a portion corresponding to the vacuum space 50 </ b> B in the glass plate 310 of the second glass substrate 300.

  The main body 31B has a rectangular shape and has a first surface (upper surface in FIG. 6) and a second surface (lower surface in FIG. 6) parallel to each other in the thickness direction. Both the first surface and the second surface of the main body 31B are flat surfaces. The planar shape of the main body 31B is the same as that of the main body 21B (that is, the planar shape of the second glass panel 30B is the same as that of the first glass panel 20B).

  The second glass panel 30B is composed only of the main body 31B. That is, the main body 31B itself is the second glass panel 30B.

  The first glass panel 20B and the second glass panel 30B are arranged such that the second surface of the main body 21B and the first surface of the main body 31B are parallel to and opposed to each other.

[1-2-2. Production method]
Next, the manufacturing method of glass panel unit 10B is demonstrated with reference to FIGS.

  The manufacturing method of the glass panel unit 10B includes a preparation process, an assembly process (first melting process), an exhaust process, a sealing process (second melting process), and a removal process. Note that the preparation step may be omitted.

  In the preparation step, in order to obtain the temporary assembly 100B, the first glass substrate 200, the second glass substrate 300, the frame body 410, the partition 420, the internal space 500, the air passage 800, the exhaust port 700, the gas adsorption device 60A, and This is a step of forming a plurality of spacers 70. The preparation step has first to sixth steps. In addition, you may change the order of a 2nd-5th process suitably. Moreover, in the preparatory process in this embodiment, processes (1st, 2nd, 4th-6th processes) other than a 3rd process are the same as Embodiment 1, and description is abbreviate | omitted.

  The third step is a step of forming the frame body 410 and the partition 420 (seal material forming step). In the third step, the material of the frame 410 (first thermal adhesive) and the material of the partition 420 (second thermal adhesive) are used for the second glass substrate 300 (first surface of the glass plate 310) using a dispenser or the like. ) Apply on top. Then, the material of the frame 410 and the material of the partition 420 are dried and temporarily fired.

  The first melting step is a step of preparing a temporary assembly 100B. Specifically, in the assembling process, the first glass substrate 200 and the second glass substrate 300 are bonded to prepare a temporary assembly 100B. That is, the assembly process is a process of airtightly bonding the first glass substrate 200 and the second glass substrate 300 by the frame body 410.

  In the first melting step, the first glass substrate 200 and the second glass substrate 300 are hermetically bonded by once melting the first thermal adhesive at a predetermined temperature (first melting temperature) equal to or higher than the first softening point. . Specifically, the first glass substrate 200 and the second glass substrate 300 are placed in a melting furnace and heated at a first melting temperature for a predetermined time (first melting time).

  The first melting temperature and the first melting time are such that the first glass substrate 200 and the second glass substrate 300 are hermetically bonded by the first thermal adhesive of the frame body 410, but the ventilation path 800 is blocked by the partition 420. It is set so that it does not occur. That is, the lower limit of the first melting temperature is the first softening point, but the upper limit of the first melting temperature is set so that the air passage 800 is not blocked by the partition 420. In the first melting step, gas is released from the frame 410, and this gas is adsorbed by the gas adsorber 630A.

  A temporary assembly 100B shown in FIG. 7 is obtained by the first melting step described above.

  The exhaust process in the present embodiment is the same process as the exhaust process in the first embodiment. In other words, in the exhaust process, the internal space 500 is exhausted through the exhaust port 700 to form the vacuum space 50B while activating the getter by using the first electrode 61A and the second electrode 62A to flow a current through the gas adsorbing portion 63A. . However, in the present embodiment, the exhaust space 510 is exhausted through the ventilation path 800, the ventilation space 520, and the exhaust port 700 to become the vacuum space 50B.

  The first melting step, the exhausting step, and the second melting step include the first glass substrate 200 and the second glass substrate 300 (frame body 410, partition 420, air passage 800, exhaust port 700, gas adsorption device 60A, a plurality of spacers. The second glass substrate 300 on which the 70 is formed is performed while being placed in the melting furnace. Therefore, the exhaust pipe 910 is joined to the second glass substrate 300 at least before the first melting step.

  The second melting step is a step of closing the air passage 800 by deforming the partition 420. Specifically, in the second melting step, the partition 420 is deformed to form the partition wall 42 that closes the air passage 800, thereby forming the seal 40B that surrounds the vacuum space 50B. In the second melting step, the partition wall 42 is formed by deforming the partition 420 by once melting the second thermal adhesive at a predetermined temperature (second melting temperature) equal to or higher than the second softening point. Specifically, the first glass substrate 200 and the second glass substrate 300 are heated in the melting furnace at the second melting temperature for a predetermined time (second melting time).

  The second melting temperature and the second melting time are set so that the second thermal adhesive softens and the partition wall 42 that blocks the air passage 800 is formed.

  When the partition wall 42 is formed, the vacuum space 50 </ b> B is separated from the ventilation space 520. Therefore, the vacuum space 50B cannot be exhausted with the vacuum pump. Until the second melting step is completed, the frame body 410 and the partition wall 42 are heated, and thus gas may be released from the frame body 410 and the partition wall 42. However, the gas released from the frame 410 and the partition wall 42 is adsorbed by the gas adsorber 630A in the vacuum space 50B. Therefore, the vacuum degree of the vacuum space 50B is prevented from deteriorating. That is, it is prevented that the heat insulation of glass panel unit 10B deteriorates.

  Even in the first melting step, since the frame body 410 and the partition wall 42 are heated, gas may be released from the frame body 410 and the partition wall 42. Since the gas released from the frame 410 and the partition wall 42 is adsorbed by the gas adsorber 630A, the adsorption capacity of the gas adsorber 630A may be reduced by the first melting step. However, in the exhaust process, the adsorption capacity of the gas adsorber 630A is restored. Therefore, the gas adsorber 630A can sufficiently adsorb the gas released from the frame body 410 and the partition wall 42 in the second melting step. In other words, it is possible to prevent the gas adsorber 630A from sufficiently adsorbing the gas released from the frame body 410 and the partition wall 42 and deteriorating the degree of vacuum in the vacuum space 50B.

  In the second melting step, the exhaust space 510 is exhausted through the vent path 800, the vent space 520, and the exhaust port 700 continuously from the exhaust step. That is, in the second melting step, the partition wall 42 that blocks the air passage 800 by deforming the partition 420 while exhausting the exhaust space 510 through the air passage 800, the air passage space 520, and the exhaust port 700 at the second melting temperature. Form. This further prevents the vacuum degree of the vacuum space 50B from being deteriorated during the second melting step. However, in the second melting step, it is not always necessary to exhaust the exhaust space 510 through the air passage 800, the air space 520, and the exhaust port 700.

  The assembly 100C shown in FIG. 8 is obtained by the sealing process described above.

  The removal step is a step of obtaining the glass panel unit 10B that is a portion having the vacuum space 50B by removing the portion 11 having the ventilation space 520 from the assembly 100C. Specifically, the assembly 100C taken out from the melting furnace is cut along a predetermined cutting line, and a predetermined portion (glass panel unit) 10B having a vacuum space 50B and a portion (unnecessary portion) having a ventilation space 520. ) 11. The shape of the cutting line is determined by the shape of the glass panel unit 10B.

  The glass panel unit 10B is obtained through the above-described preparation process, assembly process, exhaust process, sealing process, and removal process.

[1-2-3. Feature]
The glass panel unit 10B of the present embodiment described above includes the first glass panel 20B, the second glass panel 30B disposed so as to face the first glass panel 20B, the first glass panel 20B, and the second glass panel. 30B, and is surrounded by a frame-like seal 40B that hermetically joins the first glass panel 20B and the second glass panel 30B, and the first glass panel 20B, the second glass panel 30B, and the seal 40B. A vacuum space 50B and a gas adsorption device 60A. The gas adsorption device 60A includes a first electrode 61A having a first inner portion 610 located in the vacuum space 50B and a first outer portion 611 located outside the vacuum space 50B, and a second inner portion located in the vacuum space 50B. 620 and a second electrode 62A having a second outer portion 621 located outside the vacuum space 50B, and a gas adsorber 630A including a getter, and is connected between the first inner portion 610 and the second inner portion 620. Gas adsorbing part 63A.

  In addition, the gas adsorption unit 63A includes a heating electrode 631 connected between the first inner portion 610 and the second inner portion 620. The gas adsorber 630 </ b> A is disposed so as to contact the heating electrode 631.

  Further, the first electrode 61A and the second electrode 62A are separated in a predetermined direction. The predetermined direction is a direction intersecting with the direction in which the first glass panel 20B and the second glass panel 30B are opposed to each other. The gas adsorber 630B is supported by the heating electrode 631 so that the gas adsorber 630A does not come into contact with either the first glass panel 20B or the second glass panel 30B.

  The first electrode 61A, the second electrode 62A, and the heating electrode 631 are formed of a metal foil.

  An assembly (temporary assembly) 100B of the glass panel unit 10B of the present embodiment includes a first glass substrate 200, a second glass substrate 300 disposed so as to face the first glass substrate 200, and a first glass substrate. 200 and the second glass substrate 300 are disposed between the first glass substrate 200 and the second glass substrate 300, and the first glass substrate 200, the second glass substrate 300, and the frame. An internal space 500 surrounded by 410, a gas adsorption device 60A, an exhaust port 700 for exhausting the internal space 500, a partition 420 that partitions the internal space 500 into an exhaust space 510 and a ventilation space 520, and an internal space And an air passage 800 that is formed in 500 and connects the exhaust space 510 and the air space 520. The exhaust port 700 connects the ventilation space 520 and the external space. The gas adsorption device 60A includes a first electrode 61A having a first inner portion 610 located in the exhaust space 510 and a first outer portion 611 located outside the exhaust space 510, and a second inner portion located in the exhaust space 510. 620 and a second electrode 62A having a second outer portion 621 located outside the exhaust space 510, and a gas adsorber 630A including a getter and connected between the first inner portion 610 and the second inner portion 620. A gas adsorbing part 63A.

  The assembly 100C of the glass panel unit 10B of the present embodiment includes a first glass substrate 200, a second glass substrate 300 disposed so as to face the first glass substrate 200, the first glass substrate 200, and the second glass. A frame body 410 disposed between the substrate 300 and hermetically bonding the first glass substrate 200 and the second glass substrate 300, and surrounded by the first glass substrate 200, the second glass substrate 300, and the frame body 410. The internal space 500, the gas adsorption device 60A, the exhaust port 700 for exhausting the internal space 500, and the partition wall 42 that partitions the internal space 500 into the vacuum space 50B and the ventilation space 520 are provided. The exhaust port 700 connects the ventilation space 520 and the external space. The partition wall 42 divides the internal space 500 into the exhaust space 510 and the ventilation space 520, and the ventilation path 800, the ventilation space 520, and the exhaust gas that connect the exhaust space 510 in the internal space 500 to the exhaust space 510 and the ventilation space 520. It is obtained by evacuating through the opening 700 to form the vacuum space 50B and then deforming so as to block the air passage 800. The gas adsorption device 60A includes a first electrode 61A having a first inner portion 610 located in the vacuum space 50B and a first outer portion 611 located outside the vacuum space 50B, and a second inner portion located in the vacuum space 50B. 620 and a second electrode 62A having a second outer portion 621 located outside the vacuum space 50B, and a gas adsorber 630A including a getter and connected between the first inner portion 610 and the second inner portion 620. A gas adsorbing part 63A.

  The manufacturing method of the glass panel unit 10B of this embodiment includes an assembly process for preparing an assembly 100B of the glass panel unit, and an exhaust process. In the exhaust process, the internal space 500 is exhausted through the exhaust port 700 to form a vacuum space 50B while activating the getter by flowing a current through the gas adsorption portion 63A using the first electrode 61A and the second electrode 62A.

  In particular, in the exhaust process, the exhaust space 510 is exhausted through the vent path 800, the vent space 520, and the exhaust port 700 to form the vacuum space 50B.

  Moreover, the manufacturing method of the glass panel unit 10B further includes a sealing step. In the sealing step, the partition 420 is deformed to block the ventilation path 800.

  Moreover, the manufacturing method of the glass panel unit 10B further includes a removing step. In the removing step, the portion 11 having the ventilation space 520 is removed.

[1-3. Embodiment 3]
[1-3-1. Constitution]
The glass panel unit 10 (10C) of the present embodiment is different from the glass panel unit 10A in that a gas adsorption device 60 (60C) is provided instead of the gas adsorption device 60A. In addition, the structure common to glass panel unit 10A, 10C is shown with the same code | symbol for the purpose of abbreviate | omitting description.

  As shown in FIGS. 10 and 11, the glass panel unit 10C includes a first glass panel 20A, a second glass panel 30A, a seal 40A, a vacuum space 50B, a gas adsorption device 60C, and a plurality of spacers 70. And an exhaust port 700 and a cap 911.

  The gas adsorption device 60C includes a first electrode 61A, a second electrode 62A, and a gas adsorption unit 63 (63C). The gas adsorption device 60C is arranged at one end (left end in FIG. 11) in the length direction of the second glass panel 30A (or the first glass panel 20A).

  The gas adsorption part 63C has a gas adsorber 630 (630C) and is connected between the first inner part 610 and the second inner part 620. Unlike the gas adsorption unit 63A, the gas adsorption unit 63C does not have the heating electrode 631.

  The gas adsorber 630C has conductivity. Further, the gas adsorber 630C has a long flat plate shape. The gas adsorber 630C is electrically connected between the first inner portion 610 and the second inner portion 620. In particular, the gas adsorber 630C is supported by the first inner portion 610 and the second inner portion 620 so that the gas adsorber 630C does not contact either the first glass panel 20A or the second glass panel 30A. . For example, the gas adsorber 630C is fixed to the first inner portion 610 and the second inner portion 620 with a conductive adhesive (preferably a conductive thermal adhesive).

  The gas adsorber 630C is formed of a mixture of conductive powder and getter. Here, the conductive powder is, for example, a metal powder. The getter is, for example, an evaporation type getter. The evaporative getter is, for example, a zeolite or an ion exchanged zeolite (eg, a copper ion exchanged zeolite).

  In the gas adsorption device 60C, when a voltage is applied between the first and second outer portions 611 and 621, a current flows through the gas adsorber 630C of the gas adsorption unit 63C. As a result, the temperature of the gas adsorber 630C (getter) increases. Therefore, the getter can be activated by applying a voltage between the first and second outer portions 611 and 621.

[1-3-2. Production method]
The glass panel unit 10C is obtained from an assembly including the gas adsorption device 60C, for example. This assembly includes, for example, a first glass substrate 200, a second glass substrate 300, a frame body 410, an internal space 500, a gas adsorption device 60C, and an exhaust port 700. And the glass panel unit 10C is obtained by implementing the manufacturing method as described in Embodiment 1 using this assembly.

[1-3-3. Feature]
The glass panel unit 10C of the present embodiment described above includes the first glass panel 20A, the second glass panel 30A disposed so as to face the first glass panel 20A, the first glass panel 20A, and the second glass panel. 30A, and is surrounded by a frame-like seal 40A that hermetically joins the first glass panel 20A and the second glass panel 30A, and the first glass panel 20A, the second glass panel 30A, and the seal 40A. The vacuum space 50A and the gas adsorption device 60C are provided. The gas adsorption device 60C includes a first electrode 61A having a first inner portion 610 located in the vacuum space 50A and a first outer portion 611 located outside the vacuum space 50A, and a second inner portion located in the vacuum space 50A. 620 and a second electrode 62A having a second outer portion 621 located outside the vacuum space 50A, and a gas adsorber 630C including a getter, and is connected between the first inner portion 610 and the second inner portion 620. Gas adsorbing part 63C.

  Further, the gas adsorber 630 </ b> C has conductivity and is electrically connected between the first inner portion 610 and the second inner portion 620.

  Further, the first electrode 61A and the second electrode 62A are separated in a predetermined direction. The predetermined direction is a direction that intersects the direction in which the first glass panel 20A and the second glass panel 30A face each other. The gas adsorber 630C is supported by the first inner portion 610 and the second inner portion 620 so that the gas adsorber 630C does not contact any of the first glass panel 20A and the second glass panel 30A.

  The gas adsorber 630C is formed of a mixture of conductive powder and getter.

[1-4. Embodiment 4]
[1-4-1. Constitution]
The glass panel unit 10 (10D) of the present embodiment is different from the glass panel unit 10A mainly in that a gas adsorption device 60 (60D) is provided instead of the gas adsorption device 60A. In addition, the structure common to glass panel unit 10A, 10D is shown with the same code | symbol for the purpose of abbreviate | omitting description.

  As shown in FIG. 11, the glass panel unit 10D includes a first glass panel 20 (20D), a second glass panel 30 (30A), a seal 40 (40A), a vacuum space 50 (50A), and a gas. The suction device 60 </ b> D, a plurality of spacers 70, an exhaust port 700, and a cap 911 are provided.

  The first glass panel 20D is different from the first glass panel 20A in that the coating 22 (22A) is not provided. That is, the first glass panel 20D includes only the main body 21 (21A). However, the first glass panel 20D may include the coating 22A.

  The gas adsorption device 60D includes a first electrode 61 (61D), a second electrode 62 (62D), and a gas adsorption unit 63 (63D).

  The first electrode 61D is a conductive film (first conductive film) formed on the entire surface of the first glass panel 20D that faces the second glass panel 30A (the first surface of the main body 21A). The first conductive film (first electrode 61D) is transparent.

  The first electrode 61D has a first inner portion 610 located in the vacuum space 50A and a first outer portion 611 located outside the vacuum space 50A. The first electrode 61D further includes a first connection portion 612 that connects the first inner portion 610 and the first outer portion 611. Specifically, the first inner portion 610 is a central portion of the first conductive film, the first outer portion 611 is an outer peripheral portion of the first conductive film, and the first connection portion 612 is a central portion of the first conductive film. And a portion between the outer peripheral portion. Note that the first conductive film may not be formed on the entire surface of the first glass panel 20D facing the second glass panel 30A in a strict sense, and at least the first inner portion 610 is the first glass panel. What is necessary is just to be formed so that the whole surface which faces the vacuum space 50A in 20D may be covered.

  For example, the first conductive film (first electrode 61D) has a characteristic of blocking light having a wavelength in a specific range. The specific range is a range corresponding to at least one of infrared rays and ultraviolet rays. Specifically, the first conductive film is a transparent infrared reflective film, and is formed using a transparent conductive material (such as TiO). Therefore, the first conductive film has the same function as the coating 22A.

  The second electrode 62D is a conductive film (second conductive film) formed on the entire surface (the first surface of the main body 31A) facing the first glass panel 20D in the second glass panel 30A. The second conductive film (second electrode 62D) is transparent. In addition, the 2nd electrically conductive film may have the characteristic which interrupts | blocks the light of the wavelength of a specific range. The specific range is a range corresponding to at least one of infrared rays and ultraviolet rays. Here, when the second conductive film has a characteristic of blocking light of a specific range of wavelengths, the first conductive film may not have a characteristic of blocking light of a specific range of wavelengths. .

  The second electrode 62D has a second inner portion 620 located in the vacuum space 50A and a second outer portion 621 located outside the vacuum space 50A. The second electrode 62 </ b> D further includes a second connection portion 622 that connects the second inner portion 620 and the second outer portion 621. Specifically, the second inner portion 620 is a central portion of the second conductive film, the second outer portion 621 is an outer peripheral portion of the second conductive film, and the second connection portion 622 is a central portion of the first conductive film. And a portion between the outer peripheral portion. In the strict sense, the second conductive film may not be formed on the entire surface of the second glass panel 30A that faces the first glass panel 20D, and at least the second inner portion 620 has the second glass panel. It may be formed so as to cover the entire surface facing the vacuum space 50A at 30A.

  The second conductive film (second electrode 62D) is formed of, for example, a transparent conductive material (ITO, IZO, etc.).

  The first electrode 61D and the second electrode 62D are separated in a predetermined direction. The predetermined direction is a direction in which the first glass panel 20D and the second glass panel 30A face each other (the thickness direction of the glass panel unit 10D). The first inner portion 610 and the second inner portion 620 face each other in a predetermined direction.

  The gas adsorption part 63D is arranged at one end (left end in FIG. 11) in the length direction of the second glass panel 30A (or the first glass panel 20D).

  The gas adsorption part 63D has a gas adsorber 630 (630D) and is connected between the first inner part 610 and the second inner part 620. Unlike the gas adsorption unit 63A, the gas adsorption unit 63D does not have the heating electrode 631.

  The gas adsorber 630D has conductivity. Further, the gas adsorber 630D has a long flat plate shape. The gas adsorber 630D is electrically connected between the first inner portion 610 and the second inner portion 620. In particular, the gas adsorber 630D is interposed between the first inner portion 610 and the second inner portion 620. For example, the gas adsorber 630D is fixed to the first inner portion 610 and the second inner portion 620 with an appropriate conductive adhesive (for example, a conductive thermal adhesive).

  Similarly to the gas adsorber 630C, the gas adsorber 630D is formed of a mixture of conductive powder and getter.

  In the gas adsorption device 60D, when a voltage is applied between the first and second outer portions 611 and 621, a current flows through the gas adsorber 630D of the gas adsorption unit 63D. As a result, the temperature of the gas adsorber 630D (getter) increases. Therefore, the getter can be activated by applying a voltage between the first and second outer portions 611 and 621.

[1-4-2. Production method]
Next, the manufacturing method of glass panel unit 10D is demonstrated.

  The manufacturing method of glass panel unit 10D has a preparatory process, an assembly process, an exhaust process, and a sealing process similarly to glass panel unit 10A. Note that the preparation step may be omitted.

  In the preparation step, in order to obtain an assembly of the glass panel unit 10D, the first glass substrate 200, the second glass substrate 300, the frame 410, the internal space 500, the exhaust port 700, the gas adsorption device 60D, and the plurality of spacers 70 are obtained. Is a step of forming. The preparation step has first to sixth steps. In addition, you may change the order of a 2nd-5th process suitably.

  The first step is a step of forming the first glass substrate 200 and the second glass substrate 300 (substrate forming step). In the first step, the first glass substrate 200 and the second glass substrate 300 are produced. However, the first glass substrate 200 does not include the coating 220. Further, in the first step, the first conductive film (first electrode 61D) is formed on the first glass substrate 200, and the second conductive layer (second electrode 62D) is formed on the second glass substrate 300. The first and second conductive films are formed by an appropriate method such as sputtering or CVD.

  The second step is a step of forming the exhaust port 700. In the second step, the exhaust port 700 is formed in the second glass substrate 300. In the second step, the second glass substrate 300 is cleaned as necessary. The exhaust port 700 is formed so as to penetrate the second conductive film.

  The third step is a step of forming the frame body 410 (sealing material forming step). In the third step, the material of the frame 410 (first thermal adhesive) is applied onto the first conductive layer or the second conductive layer using a dispenser or the like. Then, the material of the frame body 410 is dried and temporarily fired.

  The fourth step is a step of forming the spacer 70 (spacer forming step). In the fourth step, a plurality of spacers 70 are formed in advance, and the plurality of spacers 70 are arranged at predetermined positions of the first conductive layer or the second conductive layer using a chip mounter or the like.

  The fifth step is a step of forming the gas adsorbing part 63D (gas adsorbent forming step). In the fifth step, the gas adsorption part 63D is formed at a predetermined position of the first conductive layer or the second conductive layer.

  The sixth step is a step (arrangement step) for arranging the first glass substrate 200 and the second glass substrate 300. In the sixth step, the first glass substrate 200 and the second glass substrate 300 are arranged so that the first surface of the glass plate 210 and the first surface of the glass plate 310 are parallel to and face each other.

  The assembly process is a process of preparing an assembly of the glass panel unit 10D. Specifically, in the assembly process, an assembly of the glass panel unit 10D is prepared by bonding the first glass substrate 200 and the second glass substrate 300. That is, the assembly process is a process (melting process) in which the first glass substrate 200 and the second glass substrate 300 are hermetically bonded by the frame body 410. In the assembly process, the gas adsorbing part 63D is joined to the first conductive layer and the second conductive layer.

  The evacuation process is a process of forming the vacuum space 50A by evacuating the internal space 500 through the exhaust port 700 while activating the getter by causing a current to flow through the gas adsorption part 63D using the first electrode 61D and the second electrode 62D. is there.

  In the sealing process, the exhaust port 700 is closed. Specifically, a cap 911 that closes the exhaust port 700 is formed by closing an opening at one end of the exhaust pipe 910. Thereby, the glass panel unit 10D shown in FIG. 11 is obtained.

[1-4-3. Feature]
The glass panel unit 10D of the present embodiment described above includes the first glass panel 20D, the second glass panel 30A disposed so as to face the first glass panel 20D, the first glass panel 20D, and the second glass panel. 30A, and is surrounded by a frame-shaped seal 40A that hermetically joins the first glass panel 20D and the second glass panel 30A, and the first glass panel 20D, the second glass panel 30A, and the seal 40A. A vacuum space 50A and a gas adsorption device 60D. The gas adsorption device 60D includes a first electrode 61D having a first inner part 610 located in the vacuum space 50A and a first outer part 611 located outside the vacuum space 50A, and a second inner part located in the vacuum space 50A. 620 and a second electrode 62D having a second outer portion 621 located outside the vacuum space 50A, and a gas adsorber 630D including a getter, and is connected between the first inner portion 610 and the second inner portion 620. Gas adsorbing part 63D.

  Further, the gas adsorber 630 </ b> D has conductivity and is electrically connected between the first inner portion 610 and the second inner portion 620.

  Further, the first electrode 61D and the second electrode 62D are separated in a predetermined direction. The predetermined direction is a direction in which the first glass panel 20D and the second glass panel 30A face each other. The first inner portion 610 and the second inner portion 620 face each other in a predetermined direction. The gas adsorber 630D is interposed between the first inner portion 610 and the second inner portion 620.

  The first electrode 61D is a first conductive film formed on the entire surface of the first glass panel 20D that faces the second glass panel 30A. The second electrode 62D is a second conductive film formed on the entire surface of the second glass panel 30A that faces the first glass panel 20D. The first conductive film and the second conductive film are transparent.

  In addition, at least one of the first conductive film and the second conductive film has a characteristic of blocking light with a wavelength in a specific range.

  The specific range is a range corresponding to at least one of infrared rays and ultraviolet rays.

  The gas adsorber 630D is formed of a mixture of conductive powder and getter.

[1-5. Embodiment 5]
[1-5-1. Constitution]
The glass panel unit 10 (10E) of the present embodiment is different from the glass panel unit 10D mainly in that a gas adsorption device 60 (60E) is provided instead of the gas adsorption device 60D. In addition, the structure common to glass panel unit 10D, 10E is shown with the same code | symbol for the purpose of abbreviate | omitting description.

  As shown in FIGS. 12 and 13, the glass panel unit 10E includes a first glass panel 20 (20D), a second glass panel 30 (30A), a seal 40 (40A), and a vacuum space 50 (50A). A gas adsorption device 60E, a plurality of spacers 70, an exhaust port 700, and a cap 911.

  The gas adsorption device 60E includes a first electrode 61 (61D), a second electrode 62 (62E), and a gas adsorption unit 63 (63D).

  The second electrode 62E is a conductive film (second conductive film) formed on a part of the surface (first surface of the main body 31A) facing the first glass panel 20D in the second glass panel 30A. The second electrode 62E has a rectangular shape. The second electrode 62E is formed at one end (left end in FIG. 13) in the length direction of the second glass panel 30A so as to cross the frame body 410 along the length direction of the second glass panel 30A. .

  The second electrode 62E has a second inner portion 620 located in the vacuum space 50A and a second outer portion 621 located outside the vacuum space 50A. The second electrode 62E further includes a second connection portion 622 that connects the second inner portion 620 and the second outer portion 621.

  The second conductive film (second electrode 62E) is formed of a metal foil. The metal foil is formed of a desired metal (copper, silver, gold, etc.), for example. The metal foil may have one or more layers.

  The first electrode 61D and the second electrode 62E are separated in a predetermined direction. The predetermined direction is a direction (thickness direction of the glass panel unit 10E) in which the first glass panel 20D and the second glass panel 30A face each other. The first inner portion 610 and the second inner portion 620 face each other in a predetermined direction.

  In the gas adsorption device 60E, when a voltage is applied between the first and second outer portions 611 and 621, a current flows through the gas adsorber 630D of the gas adsorption unit 63D. As a result, the temperature of the gas adsorber 630D (getter) increases. Therefore, the getter can be activated by applying a voltage between the first and second outer portions 611 and 621.

[1-5-2. Production method]
The glass panel unit 10E can be obtained by the same manufacturing method as the glass panel unit 10D. Specifically, a second conductive layer (second electrode 62E) may be formed instead of the second conductive layer (second electrode 62D).

[1-5-3. Feature]
The glass panel unit 10E of the present embodiment described above includes the first glass panel 20D, the second glass panel 30A disposed so as to face the first glass panel 20D, the first glass panel 20D, and the second glass panel. 30A, and is surrounded by a frame-shaped seal 40A that hermetically joins the first glass panel 20D and the second glass panel 30A, and the first glass panel 20D, the second glass panel 30A, and the seal 40A. A vacuum space 50A and a gas adsorption device 60E. The gas adsorption device 60E includes a first electrode 61D having a first inner portion 610 located in the vacuum space 50A and a first outer portion 611 located outside the vacuum space 50A, and a second inner portion located in the vacuum space 50A. 620 and a second electrode 62E having a second outer portion 621 located outside the vacuum space 50A, a gas adsorber 630D including a getter, and connected between the first inner portion 610 and the second inner portion 620. Gas adsorbing part 63D.

  Further, the gas adsorber 630 </ b> D has conductivity and is electrically connected between the first inner portion 610 and the second inner portion 620.

  The first electrode 61D and the second electrode 62E are separated from each other in a predetermined direction. The predetermined direction is a direction in which the first glass panel 20D and the second glass panel 30A face each other. The first inner portion 610 and the second inner portion 620 face each other in a predetermined direction. The gas adsorber 630D is interposed between the first inner portion 610 and the second inner portion 620.

  The first electrode 61D is a first conductive film formed on the entire surface of the first glass panel 20D that faces the second glass panel 30A. The first conductive film is transparent.

  The first conductive film has a characteristic of blocking light with a wavelength in a specific range.

  The specific range is a range corresponding to at least one of infrared rays and ultraviolet rays.

  The gas adsorber 630D is formed of a mixture of conductive powder and getter.

[2. Modified example]
In Embodiments 1 to 5, the glass panel unit (10) has a rectangular shape, but the glass panel unit (10) may have a desired shape such as a circular shape or a polygonal shape. That is, the first glass panel (20), the second glass panel (30), and the seal (40) may have a desired shape such as a circular shape or a polygonal shape instead of a rectangular shape. In addition, each shape of a 1st glass substrate (200), a 2nd glass substrate (300), a frame (410), and a partition (42) is not limited to the shape of the said embodiment, Desired shape What is necessary is just a shape which can obtain a glass panel unit (10). In addition, the shape and magnitude | size of a glass panel unit (10) are determined according to the use of a glass panel unit (10).

  Moreover, the 1st surface and 2nd surface of the main body (21) of a 1st glass panel (20) are not limited to a plane. Similarly, neither the first surface nor the second surface of the main body (31) of the second glass panel (30) is limited to a flat surface.

  Moreover, the main body (21) of the first glass panel (20) and the main body (31) of the second glass panel (30) may not have the same planar shape and planar size. Moreover, the main body (21) and the main body (31) may not have the same thickness. Moreover, the main body (21) and the main body (31) may not be formed of the same material. Similarly, the glass plate (210) of the first glass substrate (200) and the glass plate (310) of the second glass substrate (300) may not have the same planar shape and planar size. Moreover, the glass plate (210) and the glass plate (310) do not need to have the same thickness. The glass plate (210) and the glass plate (310) may not be formed of the same material.

  Moreover, the seal | sticker (40) does not need to have the same planar shape as a 1st glass panel (20) and a 2nd glass panel (30). Similarly, the frame (410) may not have the same planar shape as the first glass substrate (200) and the second glass substrate (300).

  The first glass panel (20) may further include a coating having desired physical properties and formed on the second plane of the main body (21). Alternatively, the first glass panel (20) may not include the coating (22). That is, the 1st glass panel (20) may be comprised only with the main body (21).

  The second glass panel (30) may further include a coating having desired physical properties. The coating only needs to include at least one of thin films formed on the first plane and the second plane of the main body (31), for example. The coating is, for example, a film that reflects light of a specific wavelength (infrared reflective film, ultraviolet reflective film).

  In Embodiments 1 to 5, the frame (410) is formed of the first thermal adhesive. However, the frame (410) may include other elements such as a core material in addition to the first thermal adhesive. That is, the frame (410) only needs to contain the first thermal adhesive. The frame (410) is formed so as to surround almost the entire region of the second glass substrate (300). However, the frame (410) only needs to be formed so as to surround a predetermined region on the second glass substrate (300). That is, the frame (410) does not need to be formed so as to surround almost the entire region of the second glass substrate (300).

  In Embodiment 2, the partition (420) is formed of the second thermal adhesive. However, the partition (420) may include other elements such as a core material in addition to the second thermal adhesive. That is, the partition (420) only needs to contain the second thermal adhesive. Moreover, in Embodiment 2, the both ends of the partition (420) are not connected with the frame (410). And the clearance gap between the both ends of a partition (420) and a frame (410) is a ventilation path (800). However, only one of the both ends of the partition (420) may not be connected to the frame (410). In this case, one air passage (between the partition (420) and the frame (410) is provided. 800) is formed. Or the both ends of the partition (420) may be connected with the frame (410). In this case, the ventilation path (800) may be a through hole formed in the partition (420). Alternatively, the air passage (800) may be a gap between the partition (420) and the first glass substrate (200). Alternatively, the partition (420) may be formed of two or more partitions arranged at intervals. In this case, the ventilation path (800) may be a gap between two or more partitions.

  In the second embodiment, the internal space (500) is divided into one exhaust space (510) and one ventilation space (520). However, the internal space (500) may be partitioned into one or more exhaust spaces (510) and one or more ventilation spaces (520). When the internal space (500) has two or more exhaust spaces (510), two or more glass panel units (10) can be obtained from one assembly (100).

  In the second embodiment, the second thermal adhesive is the same as the first thermal adhesive, and the second softening point and the first softening point are equal. However, the second thermal adhesive may be a material different from the first thermal adhesive. For example, the second thermal adhesive may have a second softening point different from the first softening point of the first thermal adhesive. Here, the second softening point is preferably higher than the first softening point. In this case, the first melting temperature can be set to be equal to or higher than the first softening point and lower than the second softening point. By doing so, it is possible to prevent the partition 420 from being deformed in the first melting step. Further, the first adhesive and the second thermal adhesive are not limited to glass frit, and may be, for example, a low melting point metal or a hot melt adhesive.

  In the first embodiment, a melting furnace is used for heating the frame (410). In the second embodiment, a melting furnace is used for heating the frame (410) and the partition (420). However, the heating can be performed by an appropriate heating means. The heating means is, for example, a laser or a heat transfer plate connected to a heat source.

  In the second embodiment, two air passages (800) are formed, but the number of air passages (800) may be one or more. Further, the shape of the air passage (800) is not particularly limited.

  In Embodiments 1 to 5, the exhaust port (700) is formed in the second glass substrate (300). However, the exhaust port (700) may be formed in the glass plate (210) of the first glass substrate (200), or may be formed in the frame (410).

  In Embodiments 1-5, although the gas adsorption | suction part (63) of a gas adsorption apparatus (60) is arrange | positioned at the end of the length direction of a 2nd glass panel (30), You may arrange | position at the end of the width direction. That is, the gas adsorption device (60) can be arranged at a desired position.

  In the first to fifth embodiments, the first electrode (61) and the second electrode (62) may have a desired shape such as a circular shape or a polygonal shape. Further, the first electrode (61) and the second electrode (62) are not limited to metals, and may be formed of a conductive resin material. The first electrode (61) and the second electrode (62) may be formed of different materials.

  In Embodiments 1 and 2, the heating electrode (631) may be formed of a material different from at least one of the first electrode (61) and the second electrode (62).

  In Embodiments 1 and 2, it is preferable that the heating electrode (631) is disposed so as not to contact either the first glass panel (20) or the second glass panel (30). Moreover, you may arrange | position so that a 1st electrode (61) and a 2nd electrode (62) may not contact any of a 1st glass panel (20) and a 2nd glass panel (30). For example, by fixing the first electrode (61) and the second electrode (62) of the gas adsorption device (60) to the seal (40), the heating electrode (631), the first electrode (61), and the second electrode The electrode (62) can be arranged so as not to contact either the first glass panel (20) or the second glass panel (30). Alternatively, the gas adsorption device (60) may have a thermal insulating film interposed between the heating electrode (631) and the first glass panel (20) or the second glass panel (30).

  In the first and second embodiments, the first outer portion (611) and the second outer portion (621) may be formed so as not to protrude outward from the first and second glass panels (20, 30). . Alternatively, the first outer portion (611) and the second outer portion (621) may be bent to the first glass panel (20) side or the second glass panel (30) side.

  In the fourth and fifth embodiments, the first electrode (61) may be formed so as to cover a part of the first glass panel (20), similarly to the second electrode (62) of the fifth embodiment.

  In the first to fifth embodiments, the getter of the gas adsorber (630) is an evaporative getter, but the getter may be a non-evaporable getter. When the non-evaporable getter reaches a predetermined temperature (activation temperature) or higher, the adsorbed ability is recovered by allowing the adsorbed molecules to enter the inside. However, unlike evaporative getters, it does not release adsorbed molecules, so if non-evaporable getters adsorb more than a certain amount of molecules, the adsorption capacity is restored even if heated above the activation temperature No longer.

  In Embodiments 1 to 5, the gas adsorber (630) has a long flat plate shape, but may have other shapes.

  In the first and second embodiments, a previously formed gas adsorber (630) may be fixed to the heating electrode (631) with an adhesive (preferably a heat conductive adhesive). Further, an appropriate heat transfer member may be interposed between the gas adsorber (630) and the heating electrode (631).

  In Embodiments 3 to 5, the gas adsorber (630) may be directly fixed to the first inner portion (610) and the second inner portion (620). In addition, an appropriate conductive member may be interposed between the gas adsorber (630) and the first inner portion (610), or the gas adsorber (630) and the second inner portion (620). An appropriate conductive member may be interposed between them.

  In Embodiments 1 to 5, the glass panel unit (10) includes a plurality of spacers (70), but the glass panel unit (10) may include one spacer (70). Alternatively, the glass panel unit (10) may not include the spacer (70).

  Similarly to the glass panel unit 10B of the second embodiment, the glass panel units 10C to 10E of the third to fifth embodiments may not have the exhaust port 700 and the cap 911 (exhaust pipe 910). By using the manufacturing method of the glass panel unit 10B of Embodiment 2, glass panel units 10C to 10E without the exhaust port 700 and the cap 911 (exhaust pipe 910) are obtained.

[3. Form according to the present invention]
As apparent from the first to fifth embodiments and the modifications described above, the glass panel unit (10) according to the first embodiment of the present invention includes a first glass panel (20) and the first glass panel (20 ) And the first glass panel (20) disposed between the second glass panel (30) and the first glass panel (20) and the second glass panel (30). And a frame-shaped seal (40) for airtightly joining the second glass panel (30), and the first glass panel (20), the second glass panel (30), and the seal (40). A vacuum space (50) and a gas adsorption device (60). The gas adsorbing device (60) includes a first electrode having a first inner portion (610) positioned in the vacuum space (50) and a first outer portion (611) positioned outside the vacuum space (50). 61), a second electrode (62) having a second inner portion (620) located in the vacuum space (50) and a second outer portion (621) located outside the vacuum space (50), and a getter A gas adsorber (630) including a gas adsorber (63) connected between the first inner portion (610) and the second inner portion (620).

  According to the 1st form, an electric current can be sent through a gas adsorption part (63) by the 1st and 2nd outside parts (611, 621). As a result, the temperature of the gas adsorber (63) rises, and as a result, the temperature of the getter of the gas adsorber (630) also rises, so that the getter can be activated. Therefore, it is possible to reduce the possibility that the glass member is partially heated excessively to be damaged in order to activate the getter. Therefore, a glass panel unit (10) is obtained in which the glass member is not easily damaged when the getter is activated. According to the first embodiment, the getter can be directly activated by passing an electric current through the gas adsorbing portion (63) without heating the glass member. Therefore, the temperature in the step of melting the seal (40) using a thermal adhesive (for example, glass frit) having a melting point (softening point) lower than the activation temperature of the getter as the material of the seal (40) is higher than the activation temperature. Even when it is lowered, the getter can be activated by energization. Therefore, a glass panel unit (10) can be manufactured by a low temperature process, and manufacturing cost can be reduced.

  The glass panel unit (10) of the 2nd form which concerns on this invention is implement | achieved by the combination with a 1st form. In the second mode, the gas adsorption part (63) has a heating electrode (631) connected between the first inner part (610) and the second inner part (620). The gas adsorber (630) is disposed in contact with the heating electrode (631).

  According to the 2nd form, even if the gas adsorption part (63) does not have electroconductivity, a gas adsorption part (63) can be heated with a heating electrode (631).

  The glass panel unit (10) of the 3rd form which concerns on this invention is implement | achieved by the combination with a 2nd form. In the third embodiment, the first electrode (61) and the second electrode (62) are separated in a predetermined direction. The predetermined direction is a direction intersecting with a direction in which the first glass panel (20) and the second glass panel (30) face each other. The gas adsorber (630) includes the heating electrode (631) so that the gas adsorber (630) does not contact either the first glass panel (20) or the second glass panel (30). Supported by

  According to the 3rd form, since a gas adsorption body (630) does not contact a 1st glass panel (20) and a 2nd glass panel (30) directly, possibility that a glass member will be damaged can be reduced more.

  The glass panel unit (10) of the 4th form which concerns on this invention is implement | achieved by the combination with a 2nd or 3rd form. In the fourth embodiment, the first electrode (61), the second electrode (62), and the heating electrode (631) are formed of metal foil.

  According to the 4th form, a gas adsorption apparatus (60) can be formed easily.

  The glass panel unit (10) of the 5th form which concerns on this invention is implement | achieved by the combination with a 1st form. In the fifth embodiment, the gas adsorber (630) has electrical conductivity and is electrically connected between the first inner portion (610) and the second inner portion (620).

  According to the fifth embodiment, since the gas adsorber (630) itself generates heat, the getter can be activated efficiently.

  The glass panel unit (10) of the 6th form which concerns on this invention is implement | achieved by the combination with a 5th form. In the sixth embodiment, the first electrode (61) and the second electrode (62) are separated in a predetermined direction. The predetermined direction is a direction intersecting with a direction in which the first glass panel (20) and the second glass panel (30) face each other. The gas adsorber (630) includes the first inner part (630) so that the gas adsorber (630) does not contact either the first glass panel (20) or the second glass panel (30). 610) and the second inner portion (620).

  According to the 6th form, since a gas adsorber (630) does not contact a 1st glass panel (20) and a 2nd glass panel (30) directly, possibility that a glass member will be damaged can be reduced more.

  The glass panel unit (10) of the 7th form which concerns on this invention is implement | achieved by the combination with a 5th form. In the seventh embodiment, the first electrode (61) and the second electrode (62) are separated in a predetermined direction. The predetermined direction is a direction in which the first glass panel (20) and the second glass panel (30) face each other. The first inner portion (610) and the second inner portion (620) face each other in the predetermined direction. The gas adsorber (630) is interposed between the first inner part (610) and the second inner part (620).

  According to the 7th form, since a gas adsorption body (630) does not contact a 1st glass panel (20) and a 2nd glass panel (30) directly, possibility that a glass member will be damaged can be reduced more.

  The glass panel unit (10) of the 8th form which concerns on this invention is implement | achieved by the combination with a 7th form. In the eighth embodiment, the first electrode (61) is a first conductive film formed on the entire surface of the first glass panel (20) facing the second glass panel (30). The second electrode (62) is a second conductive film formed on the entire surface of the second glass panel (30) facing the first glass panel (20). The first conductive film and the second conductive film are transparent.

  According to the eighth embodiment, the gas adsorption device (60) can be made inconspicuous.

  The glass panel unit (10) of the 9th form which concerns on this invention is implement | achieved by the combination with an 8th form. In the ninth embodiment, at least one of the first conductive film and the second conductive film has a characteristic of blocking light in a specific range of wavelengths.

  According to the ninth embodiment, it is not necessary to separately provide a film that blocks light in a specific range of wavelengths.

  The glass panel unit (10) of the 10th form which concerns on this invention is implement | achieved by the combination with a 9th form. The specific range is a range corresponding to at least one of infrared rays and ultraviolet rays.

  According to the 10th form, it is not necessary to provide an infrared reflective film and an ultraviolet reflective film separately.

  The glass panel unit (10) of the 11th form which concerns on this invention is implement | achieved by the combination with any one of the 5th-10th form. In the eleventh mode, the gas adsorber (630) is formed of a mixture of conductive powder and the getter.

  According to the eleventh embodiment, a gas adsorbent (630) having a desired shape and conductivity can be easily produced.

  The assembly (100) of the glass panel unit according to the twelfth aspect of the present invention is a first glass substrate (200) and a second glass substrate (so-called second glass substrate (200)) arranged to face the first glass substrate (200). 300) and the first glass substrate (200) and the second glass substrate (300), and the first glass substrate (200) and the second glass substrate (300) are hermetically bonded. A frame body (410), an internal space (500) surrounded by the first glass substrate (200), the second glass substrate (300), and the frame body (410), and a gas adsorption device (60) And an exhaust port (700) for exhausting the internal space (500). The gas adsorption device (60) includes a first electrode having a first inner part (610) located in the inner space (500) and a first outer part (611) located outside the inner space (500). 61), a second electrode (62) having a second inner portion (620) located in the inner space (500) and a second outer portion (621) located outside the inner space (500), and a getter A gas adsorber (630) including a gas adsorber (63) connected between the first inner portion (610) and the second inner portion (620).

  According to the twelfth embodiment, the glass panel unit (10) is obtained in which the glass member is not easily damaged when the getter is activated.

  The manufacturing method of the glass panel unit of the 13th form which concerns on this invention is equipped with the assembly process which prepares the assembly (100) of a glass panel unit, and an exhaust process. The assembly (100) of the glass panel unit includes a first glass substrate (200), a second glass substrate (300) disposed to face the first glass substrate (200), and the first glass. A frame (410) disposed between the substrate (200) and the second glass substrate (300) to hermetically bond the first glass substrate (200) and the second glass substrate (300); An internal space (500) surrounded by the first glass substrate (200), the second glass substrate (300), and the frame (410), a gas adsorption device (60), and the internal space (500). And an exhaust port (700) for exhausting the air. The gas adsorption device (60) includes a first electrode having a first inner part (610) located in the inner space (500) and a first outer part (611) located outside the inner space (500). 61), a second electrode (62) having a second inner portion (620) located in the inner space (500) and a second outer portion (621) located outside the inner space (500), and a getter A gas adsorber (630) including a gas adsorber (63) connected between the first inner portion (610) and the second inner portion (620). In the exhaust step, the first electrode (61) and the second electrode (62) are used to pass the current through the gas adsorbing part (63) to activate the getter, and the exhaust port (700) through the exhaust port (700). The internal space (500) is evacuated to form a vacuum space (50).

  According to the thirteenth embodiment, a glass panel unit (10) is obtained in which the glass member is not easily damaged when the getter is activated.

  The manufacturing method of the glass panel unit of the 14th form which concerns on this invention is implement | achieved by the combination with a 13th form. In the 14th form, the manufacturing method of a glass panel unit is further equipped with the sealing process. In the sealing step, the exhaust port (700) is closed.

  According to the 14th form, a glass panel unit (10) can be produced easily.

  The manufacturing method of the glass panel unit of the 15th form which concerns on this invention is implement | achieved by the combination with a 13th form. In the thirteenth aspect, the method for manufacturing a glass panel unit further includes a sealing step. The glass panel unit assembly (100) is formed in the internal space (500), a partition (420) that partitions the internal space (500) into an exhaust space (510) and a ventilation space (520), A ventilation path (800) connecting the exhaust space (510) and the ventilation space (520). The exhaust port (700) connects the ventilation space (520) and the external space. In the exhaust process, the exhaust space (510) is exhausted through the vent path (800), the vent space (520), and the exhaust port (700) to form a vacuum space (50). In the sealing step, the partition (420) is deformed to block the ventilation path (800).

  According to the 15th form, it becomes possible to obtain the glass panel unit (10) without an exhaust port (700).

DESCRIPTION OF SYMBOLS 10 Glass panel unit 20 1st glass panel 30 2nd glass panel 40 Seal 50 Vacuum space 60 Gas adsorption apparatus 61 1st electrode 610 1st inner part 611 1st outer part 62 2nd electrode 620 2nd inner part 621 2nd outer side Portion 63 Gas adsorber 630 Gas adsorber

Claims (13)

A first glass panel;
A second glass panel arranged to face the first glass panel;
A frame-shaped seal that is disposed between the first glass panel and the second glass panel and hermetically joins the first glass panel and the second glass panel;
A vacuum space surrounded by the first glass panel, the second glass panel and the seal;
A gas adsorption device;
With
The gas adsorption device is:
A first electrode having a first inner portion located within the vacuum space and a first outer portion located outside the vacuum space;
A second electrode having a second inner portion located within the vacuum space and a second outer portion located outside the vacuum space;
A gas adsorber having a gas adsorber including a getter and connected between the first inner portion and the second inner portion;
Bei to give a,
The gas adsorption part has a heating electrode connected between the first inner part and the second inner part,
The gas adsorber is disposed so as to contact the heating electrode.
Glass panel unit. The first electrode and the second electrode are separated in a predetermined direction,
The predetermined direction is a direction intersecting a direction in which the first glass panel and the second glass panel are opposed to each other,
The gas adsorber is supported by the heating electrode such that the gas adsorber does not contact either the first glass panel or the second glass panel.
The glass panel unit according to claim 1. The first electrode, the second electrode, and the heating electrode are formed of a metal foil.
The glass panel unit according to claim 1 or 2. A first glass panel;
A second glass panel arranged to face the first glass panel;
A frame-shaped seal that is disposed between the first glass panel and the second glass panel and hermetically joins the first glass panel and the second glass panel;
A vacuum space surrounded by the first glass panel, the second glass panel and the seal;
A gas adsorption device;
With
The gas adsorption device is:
A first electrode having a first inner portion located within the vacuum space and a first outer portion located outside the vacuum space;
A second electrode having a second inner portion located within the vacuum space and a second outer portion located outside the vacuum space;
A gas adsorber having a gas adsorber including a getter and connected between the first inner portion and the second inner portion;
With
The gas adsorber has electrical conductivity and is electrically connected between the first inner portion and the second inner portion;
The first electrode and the second electrode are separated in a predetermined direction,
The predetermined direction is a direction in which the first glass panel and the second glass panel face each other.
The first inner portion and the second inner portion are opposed to each other in the predetermined direction,
The gas adsorber is interposed between the first inner portion and the second inner portion;
Glass panel unit. The first electrode is a first conductive film formed on the entire surface of the first glass panel facing the second glass panel;
The second electrode is a second conductive film formed on the entire surface of the second glass panel facing the first glass panel,
The first conductive film and the second conductive film are transparent.
The glass panel unit according to claim 4 . At least one of the first conductive film and the second conductive film has a characteristic of blocking light in a specific range of wavelengths.
The glass panel unit according to claim 5. The specific range is a range corresponding to at least one of infrared rays and ultraviolet rays,
The glass panel unit according to claim 6 . The gas adsorbent is formed of a mixture of conductive powder and the getter,
The glass panel unit as described in any one of Claims 4-7 . A first glass substrate;
A second glass substrate disposed to face the first glass substrate;
A frame that is disposed between the first glass substrate and the second glass substrate and hermetically bonds the first glass substrate and the second glass substrate;
An internal space surrounded by the first glass substrate, the second glass substrate and the frame;
A gas adsorption device;
An exhaust port for exhausting the internal space;
With
The gas adsorption device is:
A first electrode having a first inner portion located in the inner space and a first outer portion located outside the inner space;
A second electrode having a second inner portion located within the inner space and a second outer portion located outside the inner space;
A gas adsorber having a gas adsorber including a getter and connected between the first inner portion and the second inner portion;
With
The gas adsorption part has a heating electrode connected between the first inner part and the second inner part,
The gas adsorber is disposed so as to contact the heating electrode .
Glass panel unit assembly.   A first glass substrate;
  A second glass substrate disposed to face the first glass substrate;
  A frame that is disposed between the first glass substrate and the second glass substrate and hermetically bonds the first glass substrate and the second glass substrate;
  An internal space surrounded by the first glass substrate, the second glass substrate and the frame;
  A gas adsorption device;
  An exhaust port for exhausting the internal space;
  With
  The gas adsorption device is:
    A first electrode having a first inner portion located in the inner space and a first outer portion located outside the inner space;
    A second electrode having a second inner portion located within the inner space and a second outer portion located outside the inner space;
    A gas adsorber having a gas adsorber including a getter and connected between the first inner portion and the second inner portion;
  With
  The gas adsorber has electrical conductivity and is electrically connected between the first inner portion and the second inner portion;
  The first electrode and the second electrode are separated in a predetermined direction,
  The predetermined direction is a direction in which the first glass substrate and the second glass substrate face each other,
  The first inner portion and the second inner portion are opposed to each other in the predetermined direction,
  The gas adsorber is interposed between the first inner portion and the second inner portion;
  Glass panel unit assembly.   An assembly step of preparing an assembly of the glass panel unit according to claim 9 or 10;
  An exhaust process;
  With
  In the exhausting step, an electric current is passed through the gas adsorbing unit using the first electrode and the second electrode to activate the getter and exhaust the internal space through the exhaust port to form a vacuum space.
  Manufacturing method of glass panel unit.   Furthermore, a sealing process is provided,
  In the sealing step, the exhaust port is closed.
  The manufacturing method of the glass panel unit of Claim 11.   Furthermore, a sealing process is provided,
  The assembly of the glass panel unit is
    A partition that partitions the internal space into an exhaust space and a ventilation space;
    A ventilation path formed in the internal space and connecting the exhaust space and the ventilation space;
  With
  The exhaust port connects the ventilation space and the external space,
  In the exhaust step, the exhaust space is exhausted through the vent path, the vent space, and the exhaust port to form a vacuum space,
  In the sealing process, the partition is deformed to block the air passage,
  The manufacturing method of the glass panel unit of Claim 11.

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