JP2019174254A5 - - Google Patents

Claims (10)

It has a base part formed of a plate-shaped quartz material and a plurality of resonators extending from the base part.
The plurality of resonators are sized so as to resonate with vibration waves of different frequencies and have a groove portion, and an electrode film for detecting the resonance intensity of each resonator is formed on the inner peripheral surface of the groove portion. The AE sensor element that has been used. The AE sensor element according to claim 1, wherein the groove is formed at least in the longitudinal direction of the front surface and the back surface of the resonator. The AE sensor element according to claim 1 or 2, wherein the groove portion is formed at least one or more in the longitudinal direction of the front surface and the back surface of the resonator. The AE sensor element includes a first AE sensor element and a second AE sensor element.
The AE sensor element according to claim 1, wherein the first AE sensor element and the second AE sensor element are arranged with a plurality of resonators extending from their respective bases facing each other. An AE sensor comprising the AE sensor element according to any one of claims 1 to 4 and a case accommodating the AE sensor element. The AE sensor according to claim 5, wherein the AE sensor element and the case are made of a wafer level package. The AE sensor according to claim 5 or 6 , wherein the AE sensor element and the case are made of a plate-shaped quartz material. A pair of electrodes having a resonator provided on the front surface and the back surface so that two grooves face each other, an electrode film is formed on the inner peripheral surface of each groove, and two grooves on the front surface are formed. The films have different polarities from each other, and the pair of electrode films formed in the two grooves on the back surface are AE sensor elements having different polarities from the electrode films formed in the grooves on the opposite surface. A resonator is provided so that two grooves are opposed to each other on the front surface and the back surface, and electrode films are formed on the inner peripheral surface of each groove portion and both side surfaces close to the back surface of the resonator. The pair of electrode films formed in the groove of the book have different polarities from each other, and the pair of electrode films formed in the two grooves on the back surface have the same polarity. An AE sensor element having different polarities from the pair of electrode films formed in the two grooves. The eighth aspect of the present invention, wherein one electric field blocking groove is provided adjacent to each of two groove portions provided on the front surface and the back surface of the resonator, and the electric field blocking groove does not have an electrode film on the inner peripheral surface. AE sensor element.