JP2019174134A - Temperature sensor - Google Patents

Temperature sensor Download PDF

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JP2019174134A
JP2019174134A JP2018059201A JP2018059201A JP2019174134A JP 2019174134 A JP2019174134 A JP 2019174134A JP 2018059201 A JP2018059201 A JP 2018059201A JP 2018059201 A JP2018059201 A JP 2018059201A JP 2019174134 A JP2019174134 A JP 2019174134A
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insulating film
temperature sensor
heat collecting
heat
adhesive
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JP7008189B2 (en
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文夫 松本
Fumio Matsumoto
文夫 松本
飯田 照幸
Teruyuki Iida
照幸 飯田
薫 西澤
Kaoru Nishizawa
薫 西澤
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Abstract

To provide a temperature sensor capable of further improving responsiveness by enhancing a heat collection effect from a measurement object.SOLUTION: A temperature sensor includes: a heat sensitive element part 2; and a crimping terminal 3 having a screw mounting part capable of being fixed to a measurement object S on the tip side and also having an element mounting part, on which the heat sensitive element part is mounted, on the rear end side. The heat sensitive element part includes: an insulating film 5 adhered onto the crimping terminal with an adhesive 4; a thermistor element 6 provided on the surface of the insulating film; and a pair of onboard wiring lines which are formed on the surface of the insulating film and whose one ends are connected to the thermistor element and other ends are connected to a pair of external wiring lines. On the rear surface of the insulating film, a heat collection part 9 is provided, which is formed by a material having higher thermal conductivity than the insulating film.SELECTED DRAWING: Figure 1

Description

本発明は、測定対象物への取り付けが容易な温度センサに関する。   The present invention relates to a temperature sensor that can be easily attached to a measurement object.

従来、温度センサとして、チップ状やフレーク状のサーミスタ素子にリード線を取り付けて、リード線の接続部と共にサーミスタ素子を樹脂モールドし、この部分を圧着や接着等で圧着端子に取り付けたものが知られている(例えば、特許文献1及び2参照)。
この温度センサでは、圧着端子にネジ止め取り付けが可能な円環部が設けられているので、この部分にネジを挿通させた状態で測定対象物の雌ネジ部等に螺着させることで、温度センサを測定対象物に容易にネジ止めすることができる。
Conventionally, as a temperature sensor, a lead wire is attached to a chip-like or flake-like thermistor element, the thermistor element is resin-molded together with the lead wire connecting portion, and this portion is attached to a crimp terminal by crimping or bonding. (For example, see Patent Documents 1 and 2).
In this temperature sensor, an annular part that can be screwed to the crimp terminal is provided, so that the screw can be screwed into this part and screwed into the female thread part of the object to be measured. The sensor can be easily screwed to the measurement object.

特許文献1に記載の温度センサでは、ガラスで封止されたサーミスタ素子の周囲をさらに封止樹脂で覆っている。このガラス封止のサーミスタ素子を樹脂で封止した構造では、製造上素子の位置が安定しないため、応答性がばらついてしまう不都合があった。
これに対して特許文献2に記載の温度センサでは、感熱素子部が、圧着端子に取り付けた絶縁性フィルムと、絶縁性フィルム上に形成された薄膜サーミスタ部と、薄膜サーミスタ部に接続され絶縁性フィルム上に形成されたパターン電極とを備えている。すなわち、この温度センサは、圧着端子からの熱をガラスや封止樹脂を介さずに絶縁性フィルムで直接受けることで、より高い応答性が安定して得られるものである。
In the temperature sensor described in Patent Document 1, the periphery of the thermistor element sealed with glass is further covered with a sealing resin. In the structure in which the glass-sealed thermistor element is sealed with a resin, the position of the element is not stable in manufacturing, and there is a disadvantage that the responsiveness varies.
On the other hand, in the temperature sensor described in Patent Document 2, the heat-sensitive element portion is connected to the insulating film attached to the crimp terminal, the thin film thermistor portion formed on the insulating film, and the thin film thermistor portion. And a pattern electrode formed on the film. That is, this temperature sensor can receive higher heat responsiveness stably by directly receiving the heat from the crimp terminal with the insulating film without passing through the glass or the sealing resin.

特開2012−141164号公報JP 2012-141164 A 特開2016−161434号公報Japanese Patent Application Laid-Open No. 2006-161434

上記従来の技術には、以下の課題が残されている。
すなわち、絶縁性フィルムにサーミスタ素子を設けて圧着端子に実装した従来の構造では、測定対象物からの熱をさらに効率的に集めて応答性をより高めたいとの要望があった。
The following problems remain in the conventional technology.
That is, in the conventional structure in which the thermistor element is provided on the insulating film and mounted on the crimp terminal, there has been a demand for more efficiently collecting heat from the measurement object and improving the response.

本発明は、前述の課題に鑑みてなされたもので、測定対象物からの集熱効果を高めて応答性をさらに向上させることができる温度センサを提供することを目的とする。   The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a temperature sensor that can enhance the heat collection effect from the measurement object and further improve the responsiveness.

本発明は、前記課題を解決するために以下の構成を採用した。すなわち、第1の発明に係る温度センサは、感熱素子部と、測定対象物に固定可能なネジ取り付け部を先端側に有すると共に後端側に前記感熱素子部が取り付けられる素子取り付け部を有した圧着端子とを備え、前記感熱素子部が、前記素子取り付け部の上に接着剤で接着された絶縁性フィルムと、前記絶縁性フィルムの表面に設けられたサーミスタ素子と、前記絶縁性フィルムの表面に形成され一端が前記サーミスタ素子に接続されていると共に他端が一対の外部配線に接続される一対の基板上配線とを備え、前記絶縁性フィルムの裏面に、前記絶縁性フィルムよりも熱伝導率の高い材料で形成された集熱部が設けられていることを特徴とする。   The present invention employs the following configuration in order to solve the above problems. That is, the temperature sensor according to the first aspect of the present invention has a heat sensitive element part and an element attaching part to which the heat sensitive element part can be attached to the rear end side and a screw attaching part that can be fixed to the measurement object. An insulating film in which the thermosensitive element portion is bonded to the element mounting portion with an adhesive, a thermistor element provided on the surface of the insulating film, and a surface of the insulating film. One end of which is connected to the thermistor element and the other end of which is connected to a pair of external wirings, and the back surface of the insulating film is more thermally conductive than the insulating film. A heat collecting portion formed of a material having a high rate is provided.

この温度センサでは、絶縁性フィルムの裏面に、絶縁性フィルムよりも熱伝導率の高い材料で形成された集熱部が設けられているので、圧着端子から絶縁性フィルムへ熱伝導率の高い集熱部を介して早く熱が伝わることで、応答性を向上させることができる。   In this temperature sensor, a heat collecting part formed of a material having a higher thermal conductivity than that of the insulating film is provided on the back surface of the insulating film, so that a high heat conductivity is collected from the crimp terminal to the insulating film. Responsiveness can be improved because heat is quickly transmitted through the heat section.

第2の発明に係る温度センサは、第1の発明において、前記集熱部が、前記絶縁性フィルムの裏面の略全面に設けられていることを特徴とする。
すなわち、この温度センサでは、集熱部が、絶縁性フィルムの裏面の略全面に設けられているので、絶縁性フィルムの裏面の略全面で集熱させることができ、全体でより高い応答性を得ることができる。
The temperature sensor according to a second aspect of the present invention is characterized in that, in the first aspect, the heat collecting part is provided on substantially the entire back surface of the insulating film.
That is, in this temperature sensor, since the heat collecting part is provided on substantially the entire back surface of the insulating film, heat can be collected on almost the entire back surface of the insulating film, and the overall response is higher. Obtainable.

第3の発明に係る温度センサは、第1又は第2の発明において、前記集熱部が、前記絶縁性フィルムの裏面の外周縁よりも隙間を空けて内側に形成された集熱膜であり、前記集熱部の外周縁と前記絶縁性フィルムの裏面とで段差部が形成され、前記段差部における前記圧着端子と前記絶縁フィルムとの間の前記接着剤の厚さが、前記集熱部の直下の前記接着剤よりも厚いことを特徴とする。
すなわち、この温度センサでは、段差部における圧着端子と絶縁フィルムとの間の接着剤の厚さが、集熱部の直下の接着剤よりも厚いので、集熱部の直下は薄い接着剤であることで熱伝導性が向上すると共に、絶縁性フィルムの外周部分の段差部では厚い接着剤によって高い接着性を確保することができる。したがって、高い集熱効果と接着性とを両立させることが可能になる。
A temperature sensor according to a third invention is the heat collection film according to the first or second invention, wherein the heat collection part is formed on the inner side with a gap from the outer peripheral edge of the back surface of the insulating film. A stepped portion is formed between the outer peripheral edge of the heat collecting portion and the back surface of the insulating film, and the thickness of the adhesive between the crimp terminal and the insulating film in the stepped portion is the heat collecting portion. It is characterized by being thicker than the adhesive immediately below.
That is, in this temperature sensor, since the thickness of the adhesive between the crimp terminal and the insulating film in the step portion is thicker than the adhesive immediately below the heat collecting portion, the adhesive immediately below the heat collecting portion is a thin adhesive. As a result, the thermal conductivity is improved, and high adhesiveness can be ensured by the thick adhesive at the step portion of the outer peripheral portion of the insulating film. Therefore, it is possible to achieve both a high heat collecting effect and adhesiveness.

本発明によれば、以下の効果を奏する。
すなわち、本発明に係る温度センサによれば、絶縁性フィルムの裏面に、前記絶縁性フィルムよりも熱伝導率の高い材料で形成された集熱部が設けられているので、圧着端子から絶縁性フィルムへ熱伝導率の高い集熱部を介して早く熱が伝わることで、応答性を向上させることができる。
したがって、本発明の温度センサは、測定対象物に取り付ける必要がある装置等において、高い応答性を有することができる。
The present invention has the following effects.
That is, according to the temperature sensor according to the present invention, since the heat collecting part formed of a material having a higher thermal conductivity than the insulating film is provided on the back surface of the insulating film, the insulating film is insulated from the crimp terminal. Responsiveness can be improved by quickly transferring heat to the film through the heat collecting portion having high thermal conductivity.
Therefore, the temperature sensor of the present invention can have high responsiveness in an apparatus or the like that needs to be attached to a measurement object.

本発明に係る温度センサの一実施形態を示す要部の拡大断面図である。It is an expanded sectional view of the important section showing one embodiment of the temperature sensor concerning the present invention. 本実施形態において、温度センサを示す平面図である。In this embodiment, it is a top view which shows a temperature sensor. 図2のA−A線断面図である。It is the sectional view on the AA line of FIG. 本実施形態において、絶縁性フィルムを示す平面図(a)及び裏面図(b)である。In this embodiment, it is the top view (a) and back view (b) which show an insulating film. 図2のB−B線断面図である。FIG. 3 is a sectional view taken along line B-B in FIG. 2.

以下、本発明に係る温度センサの一実施形態を、図1から図5を参照しながら説明する。なお、以下の説明に用いる各図面では、各部材を認識可能又は認識容易な大きさとするために縮尺を適宜変更している。   Hereinafter, an embodiment of a temperature sensor according to the present invention will be described with reference to FIGS. In each drawing used for the following description, the scale is appropriately changed in order to make each member recognizable or easily recognizable.

本実施形態の温度センサ1は、図1から図3に示すように、感熱素子部2と、測定対象物Sに固定可能なネジ取り付け部3Aを先端側に有すると共に後端側に感熱素子部2が取り付けられる素子取り付け部3Bを有した圧着端子3とを備えている。
上記感熱素子部2は、素子取り付け部3Bの上に接着剤4で接着された絶縁性フィルム5と、絶縁性フィルム5の表面に設けられたサーミスタ素子6と、絶縁性フィルム5の表面に形成され一端がサーミスタ素子6に接続されていると共に他端が一対の外部配線7に接続される一対の基板上配線8とを備えている。
As shown in FIGS. 1 to 3, the temperature sensor 1 of the present embodiment has a thermal element portion 2 and a screw attachment portion 3 </ b> A that can be fixed to the measurement object S on the front end side and a thermal element portion on the rear end side. And a crimp terminal 3 having an element attachment portion 3B to which 2 is attached.
The heat-sensitive element portion 2 is formed on the surface of the insulating film 5, the insulating film 5 bonded to the element mounting portion 3 </ b> B with the adhesive 4, the thermistor element 6 provided on the surface of the insulating film 5, and the insulating film 5. And a pair of on-substrate wirings 8 having one end connected to the thermistor element 6 and the other end connected to a pair of external wirings 7.

上記絶縁性フィルム5の裏面には、絶縁性フィルム5よりも熱伝導率の高い材料で形成された集熱部9が設けられている。
上記集熱部9は、絶縁性フィルム5の裏面の略全面に設けられている。すなわち、集熱部9は、長方形状の絶縁性フィルム5の裏面より若干小さい長方形状にパターン形成されている。
On the back surface of the insulating film 5, a heat collecting portion 9 formed of a material having a higher thermal conductivity than the insulating film 5 is provided.
The heat collecting portion 9 is provided on substantially the entire back surface of the insulating film 5. That is, the heat collecting portion 9 is patterned in a rectangular shape slightly smaller than the back surface of the rectangular insulating film 5.

この集熱部9は、図4に示すように、絶縁性フィルム5の裏面の外周縁よりも隙間を空けて内側に形成された集熱膜であり、図5に示すように、集熱部9の外周縁と絶縁性フィルム5の裏面とで段差部9aが形成されている。
段差部9aにおける圧着端子3と絶縁性フィルム5との間の接着剤4の厚さD2は、集熱部9の直下の接着剤4の厚さD1よりも厚くなっている。
As shown in FIG. 4, the heat collecting portion 9 is a heat collecting film formed inside with a gap from the outer peripheral edge of the back surface of the insulating film 5, and as shown in FIG. A step portion 9 a is formed by the outer peripheral edge of 9 and the back surface of the insulating film 5.
The thickness D2 of the adhesive 4 between the crimp terminal 3 and the insulating film 5 in the stepped portion 9a is thicker than the thickness D1 of the adhesive 4 immediately below the heat collecting portion 9.

また、本実施形態の温度センサ1は、絶縁性フィルム5上でサーミスタ素子6と共に外部配線7の接続部を覆う封止樹脂部10を備えている。
上記素子取り付け部3Bは、絶縁性フィルム5が接着される底面部3cと、底面部3cの両側に立設された一対の壁面部3dと、一対の壁面部3dの先端側に底面部3cから立設された前面部3eとを備えている。
すなわち、底面部3c上における一対の壁面部3dと前面部3eとによる平面視コ字状の領域が、感熱素子部2を三方向から囲んだ感熱素子部2用の設置領域とされている。
Further, the temperature sensor 1 of the present embodiment includes a sealing resin portion 10 that covers the connecting portion of the external wiring 7 together with the thermistor element 6 on the insulating film 5.
The element mounting portion 3B includes a bottom surface portion 3c to which the insulating film 5 is bonded, a pair of wall surface portions 3d erected on both sides of the bottom surface portion 3c, and a bottom surface portion 3c on the tip side of the pair of wall surface portions 3d. And a front surface portion 3e.
That is, a U-shaped region in plan view formed by the pair of wall surface portions 3d and the front surface portion 3e on the bottom surface portion 3c is an installation region for the heat sensitive element portion 2 that surrounds the heat sensitive element portion 2 from three directions.

上記封止樹脂部10は、例えばエポキシ樹脂が採用され、底面部3c上の一対の壁面部3d及び前面部3eで囲まれた部分に、サーミスタ素子6、絶縁性フィルム5及び外部配線7の先端部を覆って充填されている。
上記絶縁性フィルム5は、例えば金属フィラーを含有した接着剤4で底面部3c上に接着されている。
絶縁性フィルム5は、例えば厚さ7.5〜125μmのポリイミド樹脂シート等で形成されている。
The sealing resin portion 10 is made of, for example, epoxy resin, and the tip of the thermistor element 6, the insulating film 5, and the external wiring 7 is formed in a portion surrounded by the pair of wall surfaces 3 d and the front surface portion 3 e on the bottom surface portion 3 c. It covers and fills the part.
The insulating film 5 is bonded onto the bottom surface portion 3c with an adhesive 4 containing a metal filler, for example.
The insulating film 5 is formed of, for example, a polyimide resin sheet having a thickness of 7.5 to 125 μm.

上記一対の基板上配線8の先端には、一対の素子実装部8bが形成され、一対の素子実装部8bにサーミスタ素子6の両端電極部が接続されている。
一対の基板上配線8及び集熱部9は、例えばCu膜等の金属膜でパターン形成されている。
上記サーミスタ素子6は、例えばチップ状やフレーク状のサーミスタ素子等が採用可能である。
A pair of element mounting portions 8b are formed at the tips of the pair of substrate wirings 8, and both end electrode portions of the thermistor element 6 are connected to the pair of element mounting portions 8b.
The pair of on-substrate wirings 8 and the heat collecting portion 9 are patterned with a metal film such as a Cu film, for example.
As the thermistor element 6, for example, a chip-like or flake-like thermistor element can be employed.

上記一対の外部配線7は、先端が一対の基板上配線8の他端にあるパッド部8aに半田材等で接合され接続されている。なお、外部配線7と基板上配線8とを、溶接又は導電性接着剤で接合しても構わない。また、外部配線7としてリードフレームを採用しても構わない。
上記ネジ取り付け部3Aは、先端側にネジ取付孔3aを有している。なお、図中において、ネジ取り付け部3Aにネジは取り付けていない。
The pair of external wirings 7 are joined and connected to a pad portion 8 a at the other end of the pair of substrate wirings 8 by a solder material or the like. In addition, you may join the external wiring 7 and the board | substrate wiring 8 with welding or a conductive adhesive. A lead frame may be adopted as the external wiring 7.
The screw attachment portion 3A has a screw attachment hole 3a on the tip side. In the drawing, no screw is attached to the screw attachment portion 3A.

このように本実施形態の温度センサ1では、絶縁性フィルム5の裏面に、絶縁性フィルム5よりも熱伝導率の高い材料で形成された集熱部9が設けられているので、圧着端子3から絶縁性フィルム5へ熱伝導率の高い集熱部9を介して早く熱が伝わることで、応答性を向上させることができる。   Thus, in the temperature sensor 1 of this embodiment, since the heat collecting part 9 formed of a material having a higher thermal conductivity than the insulating film 5 is provided on the back surface of the insulating film 5, the crimp terminal 3. Responsiveness can be improved because heat is quickly transmitted from the heat collecting portion 9 having high thermal conductivity to the insulating film 5.

また、集熱部9が、絶縁性フィルム5の裏面の略全面に設けられているので、絶縁性フィルム5の裏面の略全面で集熱させることができ、全体でより高い応答性を得ることができる。
さらに、段差部9aにおける圧着端子3と絶縁性フィルム5との間の接着剤4の厚さD2が、集熱部9の直下の接着剤の厚さD1よりも厚いので、集熱部9の直下は薄い接着剤4であることで熱伝導性が向上すると共に、絶縁性フィルム5の外周部分の段差部9aでは厚い接着剤4によって高い接着性を確保することができる。したがって、高い集熱効果と接着性とを両立させることが可能になる。
Moreover, since the heat collection part 9 is provided in the substantially whole surface of the back surface of the insulating film 5, it can heat-collect on the substantially whole surface of the back surface of the insulating film 5, and obtain a higher response as a whole. Can do.
Further, since the thickness D2 of the adhesive 4 between the crimp terminal 3 and the insulating film 5 in the stepped portion 9a is thicker than the thickness D1 of the adhesive immediately below the heat collecting portion 9, the heat collecting portion 9 The thin adhesive 4 immediately below improves the thermal conductivity, and the thick adhesive 4 can ensure high adhesion at the step portion 9a in the outer peripheral portion of the insulating film 5. Therefore, it is possible to achieve both a high heat collecting effect and adhesiveness.

なお、本発明の技術範囲は上記実施形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。   The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

例えば、上記実施形態では、いわゆる丸形端子の圧着端子を採用したが、ネジ止め可能なネジ取り付け部であればY端子等の他の形状のネジ取り付け部としても構わない。
また、上記サーミスタ素子は、チップ状やフレーク状のサーミスタ素子を採用しているが、サーミスタ素子として、薄膜サーミスタ等を採用しても構わない。
For example, in the above-described embodiment, a so-called round terminal crimp terminal is employed, but a screw mounting portion having another shape such as a Y terminal may be used as long as the screw mounting portion can be screwed.
Moreover, although the thermistor element employs a chip-like or flake-like thermistor element, a thin film thermistor or the like may be adopted as the thermistor element.

1…温度センサ、2…感熱素子部、3…圧着端子、3A…ネジ取り付け部、3B…素子取り付け部、4…接着剤、5…絶縁性フィルム、6…サーミスタ素子、7…外部配線、8…基板上配線、9…集熱部、9a…段差部、S…測定対象物   DESCRIPTION OF SYMBOLS 1 ... Temperature sensor, 2 ... Thermal sensitive element part, 3 ... Crimp terminal, 3A ... Screw attachment part, 3B ... Element attachment part, 4 ... Adhesive, 5 ... Insulating film, 6 ... Thermistor element, 7 ... External wiring, 8 ... Wiring on substrate, 9 ... Heat collecting part, 9a ... Step part, S ... Measurement object

Claims (3)

感熱素子部と、
測定対象物に固定可能なネジ取り付け部を先端側に有すると共に後端側に前記感熱素子部が取り付けられる素子取り付け部を有した圧着端子とを備え、
前記感熱素子部が、前記素子取り付け部の上に接着剤で接着された絶縁性フィルムと、前記絶縁性フィルムの表面に設けられたサーミスタ素子と、前記絶縁性フィルムの表面に形成され一端が前記サーミスタ素子に接続されていると共に他端が一対の外部配線に接続される一対の基板上配線とを備え、
前記絶縁性フィルムの裏面に、前記絶縁性フィルムよりも熱伝導率の高い材料で形成された集熱部が設けられていることを特徴とする温度センサ。
A thermal element part;
A crimping terminal having an element attachment part to which the thermosensitive element part is attached to the rear end side and a screw attachment part that can be fixed to the measurement object;
The heat-sensitive element part is formed on the surface of the insulating film, the insulating film adhered on the element mounting part with an adhesive, the thermistor element provided on the surface of the insulating film, and one end of the heat-sensitive element part A pair of on-substrate wirings connected to the thermistor element and the other end connected to a pair of external wirings;
A temperature sensor, wherein a heat collecting part formed of a material having a higher thermal conductivity than the insulating film is provided on the back surface of the insulating film.
請求項1に記載の温度センサにおいて、
前記集熱部が、前記絶縁性フィルムの裏面の略全面に設けられていることを特徴とする温度センサ。
The temperature sensor according to claim 1,
The temperature sensor, wherein the heat collecting part is provided on substantially the entire back surface of the insulating film.
請求項1又は2に記載の温度センサにおいて、
前記集熱部が、前記絶縁性フィルムの裏面の外周縁よりも隙間を空けて内側に形成された集熱膜であり、
前記集熱部の外周縁と前記絶縁性フィルムの裏面とで段差部が形成され、
前記段差部における前記圧着端子と前記絶縁性フィルムとの間の前記接着剤の厚さが、前記集熱部の直下の前記接着剤よりも厚いことを特徴とする温度センサ。
The temperature sensor according to claim 1 or 2,
The heat collecting part is a heat collecting film formed on the inner side with a gap from the outer peripheral edge of the back surface of the insulating film;
A step portion is formed between the outer peripheral edge of the heat collecting portion and the back surface of the insulating film,
The temperature sensor, wherein a thickness of the adhesive between the crimp terminal and the insulating film in the stepped portion is thicker than the adhesive immediately below the heat collecting portion.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH072938U (en) * 1993-06-10 1995-01-17 ニッテツ北海道制御システム株式会社 Temperature measuring device for conducting conductors
JP2013015430A (en) * 2011-07-05 2013-01-24 Shibaura Electronics Co Ltd Temperature sensor and sensor mounting terminal
JP2014182086A (en) * 2013-03-21 2014-09-29 Mitsubishi Materials Corp Temperature sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH072938U (en) * 1993-06-10 1995-01-17 ニッテツ北海道制御システム株式会社 Temperature measuring device for conducting conductors
JP2013015430A (en) * 2011-07-05 2013-01-24 Shibaura Electronics Co Ltd Temperature sensor and sensor mounting terminal
JP2014182086A (en) * 2013-03-21 2014-09-29 Mitsubishi Materials Corp Temperature sensor

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