JP2019165108A5 - - Google Patents

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Publication number
JP2019165108A5
JP2019165108A5 JP2018052022A JP2018052022A JP2019165108A5 JP 2019165108 A5 JP2019165108 A5 JP 2019165108A5 JP 2018052022 A JP2018052022 A JP 2018052022A JP 2018052022 A JP2018052022 A JP 2018052022A JP 2019165108 A5 JP2019165108 A5 JP 2019165108A5
Authority
JP
Japan
Prior art keywords
pipe
forming apparatus
film forming
opening area
liquid storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2018052022A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019165108A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2018052022A priority Critical patent/JP2019165108A/ja
Priority claimed from JP2018052022A external-priority patent/JP2019165108A/ja
Priority to US16/110,184 priority patent/US20190291040A1/en
Publication of JP2019165108A publication Critical patent/JP2019165108A/ja
Publication of JP2019165108A5 publication Critical patent/JP2019165108A5/ja
Abandoned legal-status Critical Current

Links

JP2018052022A 2018-03-20 2018-03-20 成膜装置及び気液分離装置 Abandoned JP2019165108A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2018052022A JP2019165108A (ja) 2018-03-20 2018-03-20 成膜装置及び気液分離装置
US16/110,184 US20190291040A1 (en) 2018-03-20 2018-08-23 Film forming apparatus and gas-liquid separating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018052022A JP2019165108A (ja) 2018-03-20 2018-03-20 成膜装置及び気液分離装置

Publications (2)

Publication Number Publication Date
JP2019165108A JP2019165108A (ja) 2019-09-26
JP2019165108A5 true JP2019165108A5 (https=) 2020-03-12

Family

ID=67984315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018052022A Abandoned JP2019165108A (ja) 2018-03-20 2018-03-20 成膜装置及び気液分離装置

Country Status (2)

Country Link
US (1) US20190291040A1 (https=)
JP (1) JP2019165108A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114733270B (zh) * 2022-05-23 2024-02-27 北京北方华创微电子装备有限公司 一种反流冷凝水分离装置及半导体工艺设备

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