JP2019146365A5 - - Google Patents

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Publication number
JP2019146365A5
JP2019146365A5 JP2018028549A JP2018028549A JP2019146365A5 JP 2019146365 A5 JP2019146365 A5 JP 2019146365A5 JP 2018028549 A JP2018028549 A JP 2018028549A JP 2018028549 A JP2018028549 A JP 2018028549A JP 2019146365 A5 JP2019146365 A5 JP 2019146365A5
Authority
JP
Japan
Prior art keywords
piezoelectric
electrode
actuator according
piezoelectric actuator
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2018028549A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019146365A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2018028549A priority Critical patent/JP2019146365A/ja
Priority claimed from JP2018028549A external-priority patent/JP2019146365A/ja
Publication of JP2019146365A publication Critical patent/JP2019146365A/ja
Publication of JP2019146365A5 publication Critical patent/JP2019146365A5/ja
Withdrawn legal-status Critical Current

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JP2018028549A 2018-02-21 2018-02-21 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター Withdrawn JP2019146365A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018028549A JP2019146365A (ja) 2018-02-21 2018-02-21 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018028549A JP2019146365A (ja) 2018-02-21 2018-02-21 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター

Publications (2)

Publication Number Publication Date
JP2019146365A JP2019146365A (ja) 2019-08-29
JP2019146365A5 true JP2019146365A5 (cg-RX-API-DMAC7.html) 2021-02-25

Family

ID=67774071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018028549A Withdrawn JP2019146365A (ja) 2018-02-21 2018-02-21 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター

Country Status (1)

Country Link
JP (1) JP2019146365A (cg-RX-API-DMAC7.html)

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