JP2019140019A - Manufacturing method for ceramic composite component - Google Patents

Abstract

To provide a manufacturing method for a ceramic composite component that improves productivity by suppressing deformation or destruction of a metal terminal when a ceramic composite component is desorbed from a base after high temperature processing on the ceramic composite component at the time of coupling or after the coupling between a ceramic component and the metal terminal.SOLUTION: A manufacturing method for a ceramic composite component having a ceramic component 20 and a metal terminal 22 coupled to the ceramic component includes: a high temperature processing process of performing high temperature processing, using a base 2 having positioning units 4, 6, 8 for positioning the ceramic component and the metal terminal individually at predetermined positions so that at least part of the metal terminal protrudes to the outside of the ceramic component when viewed from a first direction, on the ceramic component and the metal terminal in a state of being positioned at the positioning units at the time of coupling or after the coupling between the ceramic component and the metal terminal; and an adsorption/desorption process of separately adsorbing the coupled ceramic component and metal terminal after the high temperature processing and pulling to the first direction side from the base to desorb the coupled ceramic component and metal terminal from the base.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a method for manufacturing a ceramic composite member having a ceramic member and a metal terminal.

Conventionally, in a gas sensor using a solid electrolyte body such as an oxygen sensor, a ceramic heater has been arranged to heat the solid electrolyte body (Patent Document 1).
As shown in FIG. 1, a ceramic heater 30 in which a heating resistor 20h made of a metal such as tungsten or molybdenum is embedded in a cylindrical ceramic member 20 such as alumina is widely used. Further, a pair of electrode pads 20p electrically connected to the heating resistor 20h is provided on the outer surface of the ceramic member 20. A metal terminal 22 for applying a voltage from the outside to the heating resistor 20h is brazed to the electrode pad 20p at a brazing joint BR. Then, when the metal terminal 22 is energized, the heating resistor 20h generates heat.

The metal terminal 22 is brazed to the ceramic member 20 using a base 2 as shown in FIG. On the upper surface of the base 2, there are provided a positioning part 4 for holding and positioning the ceramic member 20 at a predetermined position, and positioning parts 6 and 8 for similarly holding and positioning the metal terminal 22 at a predetermined position. It has been. For example, as shown in FIG. 3, the positioning portion 4 has a corrugated and extending shape, and is accommodated in the concave portion so that the axial direction of the ceramic member 20 is orthogonal. Further, as shown in FIG. 4, the positioning portion 8 has a U-shaped concave shape, and the U-shaped portion 22 e at the rear end of the metal terminal 22 is accommodated in the concave portion.
In this way, the ceramic member 20 and the metal terminal 22 are positioned and placed on the positioning portions 4, 6, and 8, and the electrode pad 20 p and the metal terminal 22 are in close proximity to the brazing joint BR. The solidified solder is placed, the whole is processed at a high temperature, the solder is melted and joined by brazing. When the brazing is finished, the operator pulls the ceramic heater 30 in which the ceramic member 20 and the metal terminal 22 are joined upward from the base 2 and proceeds to the next step.

JP 2017-107732 A

By the way, in order to improve productivity, there is a demand for automating the work of removing the brazed ceramic heater 30 from the base 2. And vacuum suction etc. are known as a general technique which grasps a member.
However, when the ceramic member 20 joined to the metal terminal 22 is vacuum-sucked and automatically pulled up from the base 2, the metal terminal 22 (particularly the U-shaped portion 22 e) is caught by the positioning portions 6 and 8 and deformed. There is.
This is because brazing also flows to the base 2 side and the metal terminal 22 is slightly fixed to the base 2 or the metal terminal 22 is softened by heating at the time of brazing and is easily deformed even by a slight catch. it is conceivable that.

  Therefore, the present invention suppresses deformation and breakage of the metal terminal when it is detached from the base after the high temperature treatment of the ceramic composite member at the time of joining or after joining the ceramic member and the metal terminal. It aims at providing the manufacturing method of the improved ceramic composite member.

  In order to solve the above problems, a method for producing a ceramic composite member of the present invention is a method for producing a ceramic composite member comprising a ceramic member and a metal terminal joined to the ceramic member, as viewed from the first direction. Using a base having positioning portions for positioning the ceramic member and the metal terminal at predetermined positions so that at least a part of the metal terminal protrudes outside the ceramic member, the ceramic member and the metal terminal are The high temperature processing step of performing high temperature processing while being positioned on the positioning portion at the time of and / or after the bonding, and the bonded ceramic member and the metal terminal after the high temperature processing are separately adsorbed And an adsorption / desorption step of pulling from the base toward the first direction and desorbing from the base.

According to this method for manufacturing a ceramic composite member, the ceramic member and the metal terminal are subjected to high-temperature processing in a state where the ceramic member and the metal terminal are positioned on the positioning portion at and / or after the bonding. Next, the bonded metal terminal and the ceramic member are separately adsorbed, pulled from the base toward the first direction, and detached from the base 2.
As a result, when the ceramic member joined to the metal terminal is detached from the base 2 even when the positioning portion is arranged so that at least a part of the metal terminal 22 protrudes outside the ceramic member when viewed from the first direction. The metal terminal is prevented from being caught by the positioning portion and deformed, or the metal terminal slightly fixed to the base is prevented from being deformed.
As a result, even if the ceramic member joined to the metal terminal is automatically detached from the base, deformation and breakage of the metal terminal can be suppressed and productivity can be improved.

In the method for producing a ceramic composite member of the present invention, in the adsorption / desorption step, when the metal terminal has magnetism, the metal terminal is adsorbed by magnetic force, and when the metal terminal is nonmagnetic, the metal terminal is You may carry out pressure reduction or vacuum adsorption.
According to this method for producing a ceramic composite member, an adsorption method that can be most reliably adsorbed can be selected according to the presence or absence of magnetism of the metal terminal. Here, that the metal terminal has magnetism means that the metal terminal is paramagnetic.

In the method for producing a ceramic composite member of the present invention, the metal terminal has magnetism, and the adsorption and desorption step includes a permanent magnet and an adsorption made of a magnetic material interposed between the permanent magnet and the metal terminal. The metal terminal attracted to the permanent magnet through the attracting member may be detached from the permanent magnet by separating the attracting member from the permanent magnet.
According to this method for producing a ceramic composite member, by performing adsorption and desorption of a metal terminal using a permanent magnet and an adsorption member, the magnetic force is more uniform in the surface direction than when using an electromagnet. A large number of metal terminals corresponding to the ceramic member can be adsorbed and desorbed at a time by one adsorbing member, and the productivity can be further improved.

  In the method for producing a ceramic composite member of the present invention, the ceramic composite member may be a ceramic heater.

  According to this invention, after joining the ceramic member and the metal terminal or after the high temperature treatment of the ceramic composite member after joining, the metal terminal is prevented from being deformed or damaged when being detached from the base, thereby improving productivity. Can be made.

It is a perspective view which illustrates the ceramic composite member manufactured by the manufacturing method which concerns on embodiment of this invention. It is a top view of the base which arrange | positions a ceramic composite member in the case of a high temperature process. It is sectional drawing which follows the AA line of FIG. It is sectional drawing which follows the BB line of FIG. It is a side view which shows an example of the adsorption / desorption apparatus used for an adsorption / desorption process. It is a bottom view of an adsorption / desorption apparatus. It is process drawing which shows an example of embodiment of this invention using an adsorption / desorption apparatus. FIG. 8 is a process diagram following FIG. 7.

Embodiments of the present invention will be described below with reference to the drawings.
As a ceramic composite member to which the method for manufacturing a ceramic composite member according to the embodiment of the present invention is applied, the ceramic heater 30 shown in FIG. 1 is exemplified, and the base 2 is a positioning portion shown in FIGS. Examples having 4, 6, and 8 are illustrated, and since these have already been described, description thereof will be omitted.
The ceramic composite member (ceramic heater) 30 has a ceramic member 20 and metal terminals 22 joined to the ceramic member 20.

As shown in FIG. 2, the method for manufacturing a ceramic composite member according to the embodiment of the present invention first includes a positioning portion of the base 2 so that at least a part of the metal terminal 22 protrudes outside the ceramic member 20 when viewed from above. Positioned at 2, 4 and 6.
When the metal terminal 22 does not protrude outside the ceramic member 20 and the metal terminal 22 is disposed inside the ceramic member 20, the metal terminal 22 is removed even if the ceramic member 20 joined to the metal terminal 22 is pulled away from the base 2. Since it is not caught and deformed, it is not a subject of the present invention.
Here, the upper direction D (see FIG. 7D) corresponds to the “first direction” in the claims.

Next, the ceramic member 20 and the metal terminal 22 are subjected to a high temperature treatment in a state where the ceramic member 20 and the metal terminal 22 are positioned on the positioning portions 2, 4 and 6 at the time of and / or after the bonding (high temperature processing step).
As the high temperature treatment at the time of joining, brazing to the above-mentioned brazing joint BR is exemplified. In this case, as described above, the ceramic member 20 and the metal terminal 22 are positioned and placed on the positioning portions 4, 6, and 8, and the brazing joint is performed in a state where the electrode pad 20 p and the metal terminal 22 are close to each other. A solidified solder is disposed in the part BR, and the whole is subjected to a high temperature treatment to melt and braze the solder.
As the high-temperature treatment after joining, the ceramic heater 30 that has been brazed (joined) is once detached from the base 2 and separately plated on the brazed joint BR, and then the adhesion of the plating film is improved. For the purpose of improving the corrosion resistance, the ceramic heater 30 is again positioned and placed on the positioning portions 4, 6, 8 of the base 2, and the base 2 is subjected to high-temperature processing and sintered.

Further, the high temperature treatment step may be at least one of the high temperature treatment at the time of joining and the high temperature treatment after the joining, and both may be performed.
However, before joining, the metal terminal 22 is not integrated with the ceramic member 20, and even if the ceramic member 20 is removed from the base 2, there is no problem that the metal terminal 22 is deformed. Not included.

Next, the ceramic member 20 and the metal terminal 22 after the high temperature treatment are separately adsorbed and pulled upward from the base 2 and desorbed from the base 2 (adsorption / desorption process).
Here, “separately adsorbing” means adsorbing the ceramic member 20 and the metal terminal 22 respectively.

FIG. 5 is a side view showing an example of the adsorption / desorption apparatus 100 used in the adsorption / desorption process.
The adsorption / desorption device 100 includes an adsorption / desorption unit 110 and a moving unit 102 that moves the adsorption / desorption unit 110 three-dimensionally. The moving unit 102 includes a track 102a extending in the horizontal direction, a traveling body 102b traveling on the track 102a, and a cylinder 102c attached between the lower surface of the traveling body 102b and the upper surface of the adsorption / desorption unit 110.
The cylinder 102c suspends the adsorption / desorption unit 110 from the traveling body 102b and expands / contracts vertically to move the adsorption / desorption unit 110 up and down.
The traveling body 102b travels on the track 102a in the horizontal direction, and moves the adsorption / desorption unit 110 in the horizontal direction.

The adsorption / desorption portion 110 has a rectangular plate shape and a base 110b to which one end of the cylinder 102c is attached, and a vacuum adsorption portion 120 and a magnetic force adsorption portion 130 that are respectively attached to the lower surface of the base 110b.
The vacuum suction unit 120 sucks the ceramic member 20, and the magnetic force suction unit 130 sucks the metal terminal 22.

The vacuum suction portion 120 has a plurality of suction holes 120a on its lower surface, and the suction holes 120a are brought into close contact with the outer surface of the ceramic member 20 so that the inside of the suction holes 120a is evacuated to a reduced pressure or a vacuum. 20 is adsorbed.
The magnetic force adsorbing unit 130 includes an adsorbing member 130a made of a plate-like magnetic material (paramagnetic material), a plate-like permanent magnet (ferromagnetic material) 130b disposed so as to overlap the adsorbing member 130a, and a cylinder 130d. And a support stay 130e. The adsorption member 130a is made of, for example, SUS430, and has no magnetism when there is no external magnetic field, and has magnetism when there is an external magnetic field.

The cylinder 130d is attached between the lower surface of the base 110b and the upper surface of the permanent magnet 130b, and moves the permanent magnet 130b up and down with respect to the base 110b.
The support stay 130e is inserted through the insertion hole of the permanent magnet 130b, and is attached between the lower surface of the base 110b and the upper surface of the attracting member 130a, and fixes the attracting member 130a to the base 110b, and the upper and lower portions of the permanent magnet 130b. The movement is not hindered.
When the cylinder 130d is extended and the permanent magnet 130b is lowered and brought into contact with the attracting member 130a, the attracting member 130a is also magnetized by the permanent magnet 130b, and the metal terminal 22 having magnetism can be attracted. On the other hand, when the cylinder 130d is contracted and the permanent magnet 130b is raised and separated from the attracting member 130a, the attracting member 130a loses magnetism, and the metal terminal 22 is detached.

FIG. 6 is a bottom view of the adsorption / desorption device 100.
On the lower surface of the vacuum suction portion 120, a recess 120r having a substantially semicircular cross section for accommodating the ceramic member 20 extends along the axial direction of the ceramic member 20, and a plurality of recesses 120r are formed adjacent to each other with the axial direction aligned. Has been.
A plurality (six in FIG. 5 and FIG. 6) of suction holes 120a are arranged in a line along the axial direction of the ceramic member 20, so that the front and rear of the ceramic member 20 can be sucked in a balanced manner.
Thus, by attracting and desorbing the metal terminal 22 using the permanent magnet 130b and the attracting member 130a, the magnetic force becomes more uniform in the surface direction than when using the electromagnet. A number of corresponding (even numbers in the example of FIG. 2) metal terminals 22 can be adsorbed and desorbed at a time by one adsorbing member 130a, and productivity can be further improved.

Next, an example of an embodiment of the present invention using the adsorption / desorption device 100 will be specifically described with reference to FIGS. 7 and 8.
First, as shown in FIG. 2, the ceramic member 20 and the metal terminal 22 are disposed on the positioning portions 2, 4, 6, and 8 of the base 2 so that at least a part of the metal terminal 22 protrudes outside the ceramic member 20. Both are brazed at the brazed joint BR (high temperature processing step).
Then, as shown in FIG. 7A, the adsorption / desorption device 100 is approached from above toward the brazed ceramic member 20 and the metal terminal 22.
Further, as shown in FIG. 7B, the vacuum suction part 120 (suction hole 120a) and the suction member 130a of the suction / desorption device 100 are brought into close contact with the ceramic member 20 and the metal terminal 22, respectively.

Next, as shown in FIG. 7C, the vacuum suction part 120 (suction hole 120a) is evacuated (V), and the permanent magnet 130b is lowered and brought into contact with the suction member 130a. As a result, the vacuum suction unit 120 and the suction member 130a suck the ceramic member 20 and the metal terminal 22, respectively.
Then, as shown in FIG. 7 (d), the adsorption / desorption device 100 is pulled upward D from the base 2, and the ceramic member 20 and the metal terminal 22 are separately adsorbed by the vacuum adsorption unit 120 and the adsorption member 130a, respectively. In this state, it is desorbed from the base 2 (adsorption / desorption process).

Next, as shown in FIG. 8E, the adsorption / desorption device 100 is moved to a post-process arrangement member (for example, a post-process basket) 200 with the ceramic member 20 and the metal terminal 22 adsorbed. .
Then, as shown in FIG. 8 (f), the ceramic member 20 and the metal terminal 22 adsorbed by the adsorption / desorption device 100 are arranged on the arrangement member 200.
Further, as shown in FIG. 8G, the vacuum suction (V) of the vacuum suction portion 120 (suction hole 120a) is stopped, and the permanent magnet 130b is raised and separated from the suction member 130a. As a result, the adsorption / desorption device 100 does not adsorb the ceramic member 20 and the metal terminal 22, so that the adsorption / desorption device 100 is lifted from the arrangement member 200 as shown in FIG. Return.

As described above, in the present embodiment, first, at the time of joining and / or after joining, the ceramic member 20 and the metal terminal 22 are subjected to high temperature processing while being positioned at the positioning portions 4, 6, and 8. Next, the bonded metal terminal 22 and the ceramic member 20 are separately adsorbed and pulled upward D (first direction side) from the base 2 to be detached from the base 2.
Thus, even when the metal terminals 22 are arranged in the positioning portions 4, 6, and 8 so that at least a part of the metal terminals 22 protrudes outside the ceramic member 20 when viewed from above D (first direction), the ceramics joined to the metal terminals 22. When the member 20 is detached from the base 2, the metal terminal 22 is prevented from being caught by the positioning portions 4, 6, 8 and deformed, or the metal terminal 22 slightly fixed to the base 2 is prevented from being deformed.
As a result, even if the ceramic member 20 joined to the metal terminal 22 is automatically detached from the base 2, deformation and breakage of the metal terminal 22 can be suppressed and productivity can be improved.

It goes without saying that the present invention is not limited to the above-described embodiment, but extends to various modifications and equivalents included in the spirit and scope of the present invention.
The first direction is not limited to the above, and may be, for example, a side. In this case, the ceramic member and the metal terminal are positioned and installed at the positioning portion of the base so that at least a part of the metal terminal protrudes outside the ceramic member when viewed from the side. Then, the ceramic member and the metal terminal are pulled sideways from the base and detached from the base.
The ceramic member is not limited to a ceramic heater member in which a heating resistor is embedded in a cylindrical ceramic member such as alumina.
When the ceramic member and the metal terminal are adsorbed, if the metal member is adsorbed after the ceramic member is adsorbed slightly first, the ceramic member and the metal terminal are likely to be stabilized when pulled out. On the other hand, when detaching these, the reverse is preferable.

2 Base 4, 6, 8 Positioning part 20 Ceramic member 22 Metal terminal 30 Ceramic composite member (ceramic heater)
D First direction (upward)
130a Adsorption member 130b Permanent magnet

Claims (4)

A method for producing a ceramic composite member having a ceramic member and a metal terminal bonded to the ceramic member,
Using a base having positioning portions for positioning the ceramic member and the metal terminal at predetermined positions so that at least a part of the metal terminal protrudes outside the ceramic member when viewed from the first direction,
The ceramic member and the metal terminal are subjected to a high-temperature treatment step in which the ceramic member and the metal terminal are subjected to a high-temperature treatment in a state where the ceramic member and the metal terminal are positioned in the positioning portion after the joining.
An adsorption / desorption step in which the bonded ceramic member and the metal terminal after the high-temperature treatment are separately adsorbed, pulled from the base toward the first direction, and desorbed from the base;
The manufacturing method of the ceramic composite member which has this.   The said adsorption / desorption process WHEREIN: When the said metal terminal has magnetism, this metal terminal is adsorbed by magnetic force, and when the said metal terminal is non-magnetic, this metal terminal is decompressed or vacuum-adsorbed. Manufacturing method of ceramic composite member. The metal terminal has magnetism;
In the adsorption / desorption step, a permanent magnet and an adsorption member made of a magnetic material interposed between the permanent magnet and the metal terminal are used, and the metal terminal adsorbed on the permanent magnet through the adsorption member The method for producing a ceramic composite member according to claim 1, wherein the attraction member is separated from the permanent magnet by separating the attraction member from the permanent magnet.   The method for producing a ceramic composite member according to any one of claims 1 to 3, wherein the ceramic composite member is a ceramic heater.

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