JP2019139474A - Teaching system, teaching unit, target plate, and teaching method - Google Patents

Abstract

To provide a teaching system, teaching unit, target plate, and teaching method capable of reducing the labor for teaching to be performed by using a target plate, and ensuring accuracy.SOLUTION: A teaching system 100 includes a target plate 60 having positioning pins 66 and a bar code 71, a teaching unit 20 having a touch panel 35 and a bar code reader 57, and a controller 16 that implements position detection control of prompting the touch panel to detect the positions of the positioning pins 66, and identification control of prompting the bar code reader to identify the bar code. The controller 16 corrects teaching data, which is acquired on the basis of the positions of the positioning pins 66 detected through the position detection control, on the basis of the bar code identified through the identification control.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a teaching system, a teaching unit, a target plate, and a teaching method.

  As a conventional teaching system, a ceiling transport vehicle that transports a transported object, and a teaching unit that is used for teaching when the transported object is transferred to a transfer unit on which the transported object is placed by the ceiling transport vehicle, (See, for example, Patent Document 1). In this ceiling guided vehicle system, teaching is performed by bringing the position detection unit of the teaching unit held by the ceiling guided vehicle into contact with the positioning unit provided in the transfer unit.

  For example, there is a case where it is desired to teach a transfer unit (port) that is not provided with a positioning unit, such as a transfer conveyor and a special device. In this case, teaching is performed by preliminarily placing a target plate provided with a positioning portion on a conveyor or the like. The acquired teaching data is corrected by a correction value stored in advance (the amount of deviation between the position where the object is actually placed and the position of the positioning pin provided on the target plate).

JP 2001-71288 A

  When teaching is performed using the target plate in this way, for example, when the target plate is exchanged depending on the status of the transfer unit, the correction value is changed each time, or each target plate is deployed. It is necessary to replace the teaching unit with a dedicated teaching unit, and there is a risk that the correction value is set incorrectly or the teaching unit to be replaced is set incorrectly. In the case of operation using a plurality of types of target plates, these problems become significant.

  Accordingly, an object of the present invention is to provide a teaching system, a teaching unit, a target plate, and a teaching method capable of reducing labor and time when teaching using a plurality of types of target plates. .

  A teaching system according to the present invention is a teaching system that acquires teaching data used when a transport vehicle transfers a transported object to a transfer unit, and is installed in the transfer unit and includes a positioning unit and an identifier. A target plate, a position detection unit for detecting the position of the positioning unit, and an identification unit for identifying the identifier, a teaching unit used by being held by the transport vehicle, and a position of the positioning unit on the position detection unit A control unit that executes position detection control to be detected and identification control that causes the identification unit to identify the identifier, and the control unit acquires teaching data based on the position of the positioning unit detected by the position detection control Is corrected based on the identifier identified by the identification control.

  In the teaching system having this configuration, a target plate with an identifier is used. The teaching unit detects the position of the positioning portion on the target plate and simultaneously identifies the identifier of the target plate. The control unit calculates teaching data based on the detected position of the positioning unit, and automatically corrects the teaching data based on the correction value acquired based on the identified identifier. Thus, appropriate teaching data considering that the target plate is installed is calculated without inputting a correction value or replacing the teaching unit every time the operator replaces the target plate. As a result, it is possible to reduce labor and time when teaching using the target plate and to ensure accuracy. The identifier here includes not only information that can recognize the type of the target plate but also information that indicates the correction value itself.

  In the teaching system of the present invention, the teaching unit is provided so as to be able to be separated from and attached to the main body portion held by the transport vehicle in the vertical direction, and the position of the positioning portion is determined by contacting the positioning portion. You may have the position detection part to detect, and the distance detection part which detects the distance between a main-body part and a position detection part. In this configuration, the position of the positioning portion of the target plate can be accurately recognized with a simple configuration.

  In the teaching system of the present invention, the control unit may execute identification control when the distance detected by the distance detection unit reaches a predetermined distance. In this case, the distance between the identification unit and the identifier becomes a predetermined distance, and the identification unit can be reliably identified.

  In the teaching system of the present invention, the control unit executes the position detection control at least twice, executes the second and subsequent position detection controls based on the teaching data acquired by the immediately preceding position detection control, and finally The identification control may be executed after the position detection control is executed. In the ceiling guided vehicle system with this configuration, the position detection unit can more accurately recognize the position of the positioning unit, and the identification unit can more reliably identify the identifier.

  In the teaching system of the present invention, the identifier may be a one-dimensional code or a two-dimensional code, and the identification unit may be a code reader. The overhead conveyance vehicle system having this configuration can identify the target plate with an easy and inexpensive configuration.

  The teaching unit of the present invention has a positioning unit and an identifier in a teaching system for acquiring teaching data used when a transport vehicle transfers a transported object to a transfer unit, and is installed in the transfer unit. A teaching unit used together with the target plate, which is provided so as to be held in the transport vehicle, and has a position detection unit for detecting the position of the positioning unit and an identification unit for identifying the identifier.

  In the teaching unit configured as described above, the position of the positioning portion in the target plate is detected, and at the same time, the identifier of the target plate is identified. Thereby, the control unit included in the teaching system calculates teaching data based on the detected position of the positioning unit, and corrects the teaching data based on the correction value acquired based on the identified identifier. Will be able to. Therefore, appropriate teaching data considering that the target plate has been installed is calculated without inputting a correction value or replacing the teaching unit every time the operator replaces the target plate. As a result, it is possible to reduce labor and time when teaching using the target plate and to ensure accuracy.

  The target plate of the present invention is a target plate used in a teaching system that acquires teaching data used when a transport vehicle transfers a transported object to a transfer unit, and is installed in the transfer unit. And a positioning unit that can be detected by a detection unit provided in the teaching unit held by the transport vehicle, and an identifier that can be identified by an identification unit provided in the teaching unit.

  The target plate having this configuration is provided with an identifier for identifying the target plate. Thereby, the teaching unit having the identification unit for identifying the identifier can detect the identifier of the target plate simultaneously with detecting the position of the positioning unit in the target plate. Further, the control unit included in the teaching system calculates teaching data based on the detected position of the positioning unit, and corrects the teaching data based on the correction value acquired based on the identified identifier. Thus, appropriate teaching data considering that the target plate is installed is calculated without inputting a correction value or replacing the teaching unit every time the operator replaces the target plate. As a result, it is possible to reduce labor and time when teaching using the target plate and to ensure accuracy.

  The teaching method of the present invention includes teaching data used when a transport vehicle transfers a transferred object to a transfer unit, a positioning unit and an identifier, a target plate installed in the transfer unit, and positioning A teaching method that uses a teaching unit that has a position detection unit that detects the position of a part and an identification unit that identifies an identifier and that is used by being held by a transport vehicle. Obtained based on an installation step for installing the plate, a position detection step for causing the position detection unit to detect the position of the positioning unit, an identification step for causing the identification unit to identify the identifier, and a position of the positioning unit detected by the position detection step A correction step of correcting the teaching data based on the identifier identified by the identification step.

  In this teaching method, it is possible to calculate appropriate teaching data considering that the target plate is installed without inputting a correction value or replacing the teaching unit every time the operator replaces the target plate. As a result, it is possible to reduce labor and time when teaching using the target plate and to ensure accuracy.

  The position detection step of the teaching method of the present invention is executed at least twice, and the second and subsequent position detection steps are based on the teaching data acquired based on the position of the positioning unit detected by the immediately preceding position detection step. The identification unit may be executed after the last position detection step is executed, after the teaching unit is controlled on the basis. As a result, the position acquisition unit can more accurately recognize the position of the positioning unit of the target plate, and the identification unit can more reliably identify the identifier.

  According to the present invention, it is possible to reduce time and labor when teaching using a target plate and to ensure accuracy.

It is a front view which shows the teaching system which concerns on one Embodiment. It is a perspective view of the target plate of FIG. It is the figure which showed the barcode provided in the target plate of FIG. It is the perspective view which looked at the teaching unit of FIG. 1 from the front. It is the cross-sectional perspective view which looked at the teaching unit of FIG. 1 from the side. It is the cross-sectional perspective view which looked at the target plate of FIG. 2 and the teaching unit of FIG. 4 from the side. It is a block diagram which shows the function structure of the overhead conveyance vehicle system of FIG. It is a flowchart which shows an example of the teaching operation | movement of the overhead conveyance vehicle system which concerns on one Embodiment.

  Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  A teaching system 100 according to an embodiment teaches (teaches) the position of a load port (transfer unit) 103 (to be described later) to a ceiling transport vehicle (transport vehicle) 10 in the ceiling transport vehicle system 1 shown in FIG. Used for. Here, the ceiling conveyance vehicle system 1 will be described first. The overhead conveyance vehicle system 1 includes a traveling rail 2, a ceiling conveyance vehicle 10, a load port 3, and a load port 103.

  The traveling rail 2 is laid, for example, near the ceiling in a clean room where semiconductor devices are manufactured. The load port 3 is provided, for example, in a processing apparatus that performs various processes on a semiconductor wafer. Hereinafter, the direction parallel to the traveling direction of the ceiling transport vehicle 10 is defined as the X direction, the direction parallel to the horizontal plane and perpendicular to the traveling direction of the ceiling transport vehicle 10 is defined as the Y direction, and the direction parallel to the vertical direction is defined as the Z direction. Although only two load ports 3 and 103 are illustrated in FIG. 1, two or more load ports 3 and 103 may be provided in the ceiling guided vehicle system 1.

  The overhead transport vehicle 10 travels along the travel rail 2 and transports, for example, a cassette (so-called FOUP (Front Opening Unified Pod)) containing a plurality of semiconductor wafers as the transported object A and the load port 3. , 103, the transferred object is transferred. The load port 3 is provided with a positioning pin 3A, and the FOUP has a recess that engages with the positioning pin 3A. The load port 103 is a transfer unit set on, for example, a transport conveyor and is not provided with the positioning pin 3A.

  The overhead conveyance vehicle 10 includes a traveling unit 11, a lateral feed unit 12, a rotation unit 13, an elevating unit 14, a holding unit 15, and a controller (control unit) 16. The traveling unit 11 travels along the traveling rail 2 by receiving electric power from the high-frequency current line laid along the traveling rail 2 in a non-contact manner. The lateral feed unit 12 moves the rotating unit 13, the elevating unit 14, and the holding unit 15 along the Y direction. The rotating unit 13 rotates the elevating unit 14 and the holding unit 15 in both directions in a horizontal plane. The elevating part 14 raises and lowers the holding part 15 with respect to the load ports 3 and 103 by feeding or winding a plurality of belts 14 a having the holding part 15 attached to the lower end part. The holding part 15 has a pair of claw members 15a. The holding unit 15 holds the object to be conveyed by opening and closing the pair of claw members 15a.

  The controller 16 controls the operation of each part of the ceiling transport vehicle 10. The controller 16 controls the operation of the ceiling transport vehicle 10 based on the set teaching data, and transfers the transported object to the load ports 3 and 103. The teaching data is a control parameter (or transfer condition) for transferring the object to be transferred to the load ports 3 and 103. The controller 16 also controls the teaching operation when the teaching unit 20 is mounted on the ceiling transport vehicle 10.

  The teaching data includes the translation (X, Y) that is the position in the X direction and the Y direction of the holding unit 15 and the position in the Z direction (height Z) when the transferred object is transferred to the load ports 3 and 103. And a rotation angle (rotation θ) in the horizontal plane of the holding portion 15 may be included. Further, for example, the teaching data includes the position of the traveling unit 11 in the X direction (or the driving amount of the traveling unit 11), the rotating unit 13, and the lifting unit 14 when the transported object A is transferred to the load ports 3 and 103. And the translation (X, Y) which is the position in the Y direction of the holding unit 15 (or the driving amount of the lateral feeding unit 12) and the rotation angle of the lifting unit 14 and the holding unit 15 (or the driving amount of the rotating unit 13). The rotation θ, the height Z that is the position of the holding unit 15 in the Z direction (or the driving amount of the elevating unit 14), and the inclinations (αx, αy) that are inclinations from the horizontal direction in the X direction and the Y direction are included. You may go out. Teaching data (translation (X, Y), height Z, rotation θ, inclination (αx, αy)) is stored in the storage unit 16 a of the controller 16.

  In such a ceiling guided vehicle system 1, teaching is carried out when the article A is transferred to the load ports 3 and 103 by the overhead guided vehicle 10 at regular intervals during construction or maintenance of the ceiling guided vehicle system 1. . Teaching means that the traveling unit 11 stops at a predetermined position of the traveling rail 2 and the holding unit 15 is lowered by a predetermined distance in order for the overhead traveling vehicle 10 to transfer the object A to be transferred at the load ports 3 and 103. In this state, it is an operation that should be performed on the ceiling transport vehicle 10 so as to know how much the position of the holding unit 15 is shifted from the target position and to eliminate the shift from the target position when the ceiling transport vehicle system 1 is operated. Teaching data is calculated or stored. Hereinafter, the teaching system 100 used when performing the said teaching is demonstrated.

  The teaching system 100 of this embodiment is also used when teaching a load port (transfer unit) 103 that is not provided with the positioning pin 3A as shown in FIG. 1 such as a transfer conveyor and a special device. be able to. In this case, teaching is performed by previously setting a target plate 60 provided with positioning pins (positioning portions) 66 as shown in FIG. Hereinafter, a case where teaching is performed using the target plate 60 will be described as an example.

  The teaching system 100 is mounted on the ceiling transport vehicle 10 shown in FIG. 1, the target plate 60 as shown in FIG. 2, the teaching unit 20 as shown in FIGS. 4 and 5, and the ceiling transport vehicle 10. Controller 16. Since the ceiling conveyance vehicle 10 has been described above, the description thereof will be omitted.

  As shown in FIGS. 2 and 6, the target plate 60 includes an upper plate 61, a lower plate 62, a placement portion 63, a side plate 64, a column 65 (see FIG. 6), and positioning pins 66 and 66. , 66 and an identifier display unit 70. The lower plate 62 is a plate-like member, and is disposed so as to straddle the prismatic mounting portion 63 disposed to face the X direction. The placement unit 63 is a part that is placed in contact with a conveyor or the like. The upper plate 61 is disposed in parallel with the lower plate 62 and is supported by three support columns 65, 65, 65 standing from the lower plate 62. Three positioning pins 66, 66, 66 are arranged on the upper plate 61. Each of the three positioning pins 66, 66, 66 is disposed immediately above each of the three columns 65, 65, 65. A side plate 64 is provided on the front side in the Y direction. The lower plate 62 is provided with a pair of handles 67 and 67.

  An identifier display section 70 as shown in FIG. 3 is arranged at the central portion of the upper plate 61. The identifier display unit 70 has a portion where a barcode (one-dimensional code) 71 as an identifier is displayed and a portion where a numerical value 73 corresponding to the barcode 71 is displayed. Note that the portion where the numerical value 73 is displayed may be omitted. A numerical value 73 corresponding to the barcode 71 is provided on the first plate 73A (second to sixth digits) indicating the type of the target plate 60, the position where the object A is actually placed, and the target plate 60. The second portion 73B (the seventh digit to the eighth digit) indicating the amount of deviation (correction value) from the position of the positioning pin 66 is included. The first digit indicates whether the correction value is + or − in the Z direction. Specifically, “1” indicates + in the Z direction, and “0” indicates − in the Z direction.

  The controller 16 can determine what kind of target plate 60 is arranged by reading the numerical value of the first portion 73A, and has read that the target plate 60 has been arranged by reading the numerical value of the second portion 73B. Thus, it is possible to determine how much the position of the positioning pin 66 acquired by the teaching unit 20 should be corrected in the Z direction (height direction) when teaching. In the present embodiment, the numerical values of the first portion 73A and the second portion 73B are read by a bar code reader (identification unit / code reader) 57 provided in the teaching unit 20 described later.

  As shown in FIGS. 5 and 6, the teaching unit 20 includes a main body 22, a pair of first detection units 30 and 30, a second detection unit 40, deceleration sensors 27 and 27, and a barcode reader 57. And a teaching control unit 29 (see FIG. 7). The teaching unit 20 is a unit for a ceiling transport vehicle that transports the FOUP. The teaching unit 20 has the same size as the FOUP.

  The main body portion 22 includes a flange portion 23, a first main body portion 24, and a second main body portion 25. The flange portion 23 is held by the holding portion 15 that is lifted and lowered by the lifting and lowering portion 14 of the ceiling transport vehicle 10. The flange portion 23 is disposed at the upper center of the teaching unit 20. The first main body portion 24 extends in the Z direction and is erected from the second main body portion 25. First detection units 30 and 30 and a second detection unit 40, which will be described in detail later, are fixed to the first main body 24. The 2nd main-body part 25 is a plate-shaped member extended in a horizontal direction. The second main body 25 is fixed with deceleration sensors 27 and 27 and a teaching controller 29 which will be described in detail later.

  Each of a pair of 1st detection units 30 and 30 is arrange | positioned along the X direction. The first detection unit 30 includes a support member 31, a linear guide 33, a touch panel (position detection unit) 35, and a first distance measurement sensor (distance detection unit) 53.

  The support member 31 is provided so as to be movable in the Z direction with respect to the main body portion 22. The support member 31 extends in the Z direction, and the touch panel 35 is connected to one end. The linear guide 33 supports the support member 31 so as to be slidable in the Z direction with respect to the main body 22. The touch panel 35 is fixed to a support member 31 provided so as to be slidable with respect to the main body portion 22, so that the touch panel 35 can be separated from the main body portion 22. The touch panel 35 has a touch surface on the lower surface that is substantially parallel to the lower surface of the second main body portion 25. The touch panel 35 detects the position of the positioning pin 66 by contacting the tip of the positioning pin 66 (see FIG. 3) provided on the target plate 60.

  The first distance measuring sensor 53 is fixed to the second main body portion 25. The first distance measuring sensor 53 detects the distance between the main body 22 and the touch panel 35. The optical axis of the first distance measuring sensor 53 intersects the touch panel 35 through a through hole 25 b provided in the second main body portion 25. The first distance measuring sensor 53 outputs the measured distance to the teaching control unit 29. For example, the first distance measuring sensor 53 outputs the distance between the main body 22 and the touch panel 35 when the positioning pin 66 is detected by the touch panel 35 to the teaching control unit 29.

  The second detection unit 40 is disposed behind the pair of first detection units 30 and 30 when the direction in which the pair of first detection units 30 and 30 are disposed is viewed from the front. Only one second detection unit 40 is arranged. The first detection unit 30 and the second detection unit 40 are arranged in the Y direction orthogonal to the X direction and the Z direction. The second detection unit 40 includes a bumper plate 41, a linear guide 43, and a second distance measuring sensor 55.

  The bumper plate 41 has a support portion 41a extending in the Z direction and a contact portion 41b extending in the horizontal direction. The support portion 41 a is a portion that is fixed to the second main body portion 25 of the main body portion 22 via the linear guide 43. The contact part 41b is a plate-like member, and the touch panel 35 like the first detection unit 30 is not fixed. The support portion 41 a is inserted through a through hole 25 a provided in the second main body portion 25. The linear guide 43 supports the bumper plate 41 so as to be slidable in the Z direction with respect to the main body 22. The second distance measuring sensor 55 is fixed to the second main body portion 25. The second distance measuring sensor 55 detects the distance between the main body 22 and the bumper plate 41. The optical axis of the second distance measuring sensor 55 intersects the contact portion of the bumper plate 41 through a through hole 25 b provided in the second main body portion 25. The second distance measuring sensor 55 outputs the measured distance to the teaching control unit 29. For example, the second distance measuring sensor 55 outputs the distance between the main body 22 and the bumper plate 41 when the bumper plate 41 contacts the positioning pin 66 to the teaching control unit 29.

  The deceleration sensors 27, 27 are fixed to the second main body portion 25, and the optical axis is directed downward from the second main body portion 25. Two deceleration sensors 27 are provided in the Y direction. The deceleration sensors 27 and 27 measure the distance to an object existing below the teaching unit 20. For example, the deceleration sensors 27 and 27 measure the distance from the target plate 60 used for teaching. The deceleration sensors 27 and 27 output the measured distance to the controller 16. For example, when the deceleration sensors 27 and 27 detect that the distance between the main body 22 and the load ports 3 and 103 has become a predetermined distance, the deceleration sensors 27 and 27 output the fact to the controller 16.

  The barcode reader 57 is provided on the upper surface of the central portion of the second main body portion 25. The barcode reader 57 is a device that optically reads (identifies) the barcode 71. The barcode reader 57 of this embodiment can read the barcode 71 without contacting the barcode 71. The barcode reader 57 reads the barcode 71 provided on the target plate 60 through the opening 25 d provided on the second main body portion 25. The operation of the barcode reader 57, that is, the barcode reading timing is controlled by the controller 16.

  The teaching control unit 29 is a control unit that controls various functions of the teaching unit 20. The teaching control unit 29 measures the position information of the positioning pins 66 acquired by each of the pair of touch panels 35 and 35, and the measurement of the first distance measuring sensor 53 when each of the pair of touch panels 35 and 35 comes into contact with the positioning pins 66. Teaching data (translation (X, Y), height Z, rotation θ, inclination (αx, αy) based on the value and the measurement value of the second distance sensor 55 when the bumper plate 41 contacts the positioning pin 66. )) Is calculated. The teaching control unit 29 sends the calculated teaching data to the controller 16.

  The controller 16 controls the ceiling transport vehicle 10 based on teaching data stored in advance. The controller 16 executes position detection control for causing the touch panel 35 to detect the position of the positioning pin 66 and identification control for causing the barcode reader 57 to read the barcode 71. The controller 16 executes the position detection control at least twice, and executes the second and subsequent position detection controls based on the teaching data acquired by the immediately preceding position detection control and the last position detection control. Identification control is executed later. In this embodiment, position detection control is executed twice. Further, the controller 16 executes identification control when the distance detected by the first distance measuring sensor 53 becomes a predetermined distance.

  The controller 16 is calculated by the teaching control unit 29 based on the position information of the positioning pin 66, the measured value of the first distance sensor 53, and the measured value of the second distance sensor 55 detected by the position detection control. Correct teaching data. Specifically, the controller 16 is a part of the bar code 71 read by the identification control, and a position where the article A is actually placed and a position of the positioning pin 66 provided on the target plate 60. The height Z of the teaching data is corrected based on the numerical value acquired from the second portion 73B indicating the amount of deviation (correction value). The controller 16 updates the teaching data as the initial condition stored in the storage unit 16a to the teaching data corrected with the above contents.

  Next, the operation when teaching is performed in the teaching system 100 will be described. FIG. 8 is a flowchart illustrating an example of the teaching operation (teaching method) of the overhead guided vehicle system according to the embodiment.

  In the teaching system 100 of the above embodiment, the touch panels 35 and 35 of the teaching unit 20 held by the holding unit 15 of the elevating unit 14 of the ceiling transport vehicle 10 are brought into contact with the positioning pins 66 provided on the target plate 60. Teaching is performed using the acquired information. Therefore, the worker installs the target plate 60 shown in FIG. 2 at a predetermined position (load port 103) such as a transfer conveyor, for example, a transfer conveyor, etc. to be taught (step S1: installation step).

  The controller 16 controls the overhead transport vehicle based on the initial teaching data stored in the storage unit 16a (step S2). Specifically, the controller 16 stops the load port 103 that is the object of teaching above the Z direction. At this time, the controller 16 stops the ceiling transport vehicle 10 above the load port 103 in the Z direction using the teaching data (X-direction position of the traveling unit 11) stored as the initial setting. Next, the controller 16 lowers the elevating unit 14 in order to place the teaching unit 20 on the load port 103. Also in this case, the controller 16 stores the teaching data stored as the initial settings (the Y-direction positions of the rotation unit 13, the lifting unit 14, and the holding unit 15, the θ-direction positions of the lifting unit 14 and the holding unit 15, and the holding unit. 15 in the Z direction) is used to control the lateral feed section 12, the rotation section 13, and the elevating section 14 of the ceiling guided vehicle 10.

  When the controller 16 detects that the distance between the main body 22 of the teaching unit 20 and the target plate 60 installed in the load port 103 has become a predetermined distance by the deceleration sensors 27, 27, the descending speed of the elevating unit 14 is detected. Is decelerated (deceleration operation). Thereby, the descending speed when the touch panels 35 and 35 are in contact with the positioning pins 66 of the target plate 60 is slowed to prevent the touch panels 35 and 35 from being damaged.

  Next, the controller 16 lowers the elevating unit 14 until all of the pair of touch panels 35 and 35 and the bumper plate 41 come into contact with the positioning pins 66. When the controller 16 detects that all of the pair of touch panels 35 and 35 and the bumper plate 41 are in contact with the positioning pins 66, the controller 16 raises the elevating unit 14. At this time, both of the pair of touch panels 35 and 35 output position information of the positioning pin 66 obtained by contacting the positioning pin 66 to the teaching control unit 29 (step S3: position detection step).

  The teaching control unit 29 measures the position information of the positioning pins 66 acquired by each of the pair of touch panels 35 and 35, and the measurement of the first distance measuring sensor 53 when each of the pair of touch panels 35 and 35 comes into contact with the positioning pins 66. Teaching data (translation (X, Y), height Z, rotation θ, inclination (αx, αy) based on the value and the measurement value of the second distance sensor 55 when the bumper plate 41 contacts the positioning pin 66. )) Is calculated (step S4). Then, the teaching control unit 29 sends the calculated teaching data to the controller 16. The controller 16 updates the teaching data as the initial condition stored in the storage unit 16a to the teaching data calculated based on the position information of the positioning pin 66 acquired in step S2.

  In the present embodiment, the position detection control in step S2 is performed twice. The second position detection control (step S3) is performed based on the teaching data calculated based on the position information of the positioning pin 66 acquired by the previous position detection control (first position detection control). 12, the rotation part 13 and the raising / lowering part 14 are controlled.

  However, the teaching data calculated based on the position information of the positioning pin 66 obtained by such position detection control is originally shifted upward in the Z direction from the position where the transported object A is to be placed. That is, it is shifted upward in the Z direction by the height H of the target plate (see FIG. 2). Therefore, in the teaching system 100 of the present embodiment, a correction process for automatically correcting the teaching data shifted upward in the Z direction is executed.

  Specifically, when the touch panel 35 of the teaching unit 20 detects the position of the positioning pin 66, the controller 16 operates the barcode reader 57 to read the barcode 71 attached to the target plate 60 (step S5: Identification step). More specifically, the controller 16 executes the identification control in step S5 when the distance between the second main body 25 detected by the first distance measuring sensor 53 and the touch panel 35 becomes a predetermined distance.

  The controller 16 determines the value of the second portion 73B from the information read by the barcode reader 57, that is, the position where the article A is actually placed and the position of the positioning pin 66 provided on the target plate 60. A deviation amount (correction value) is acquired (step S6). The controller 16 corrects the teaching data calculated in step S4 based on the correction value (step S7: correction step). The controller 16 teaches the teaching data calculated based on the position information of the positioning pin 66 acquired by the first position detection control (step S2) stored in the storage unit 16a and corrected in the above step S7. Data (translation (X, Y), height Z1, rotation θ, inclination (αx, αy)) is updated and stored (step S8).

  In the present embodiment, teaching of the load port 103 is performed by a series of operations in the above-described steps S1 to S8.

  In the teaching system 100 of the present embodiment, a target plate 60 to which a barcode 71 is attached is used. The teaching unit 20 of the present embodiment detects the position of the positioning pin 66 on the target plate 60 and simultaneously reads the barcode 71 on the target plate 60. The controller 16 calculates teaching data based on the detected position of the positioning pin 66, and automatically calculates teaching data based on the correction value acquired based on the read numerical value of the second portion 73B of the barcode 71. To correct. Accordingly, appropriate teaching data considering that the target plate 60 has been installed is calculated without inputting a correction value or replacing the teaching unit 20 every time the operator replaces the target plate 60. The As a result, it is possible to reduce time and labor when teaching using the target plate 60 and to ensure accuracy. Moreover, since it is not necessary to arrange the teaching units 20 for each type of target plate 60, it is not necessary to secure a storage space.

  In the teaching system 100 of the present embodiment, the controller 16 executes identification control when the distance detected by the first distance measuring sensor 53 becomes a predetermined distance. As a result, the distance between the barcode reader 57 and the barcode 71 when the barcode reader 57 reads the barcode 71 becomes a predetermined distance, and the barcode reader 57 can reliably read the barcode 71. become.

  In the teaching system 100 of the present embodiment, the controller 16 executes the position detection control twice, executes the second position detection control based on the teaching data acquired by the first position detection control, and performs the second time. The identification control is executed at the timing of the position detection control. Thereby, the position detection of the positioning pin 66 by the touch panel 35 becomes more accurate, and the barcode reader 57 can read the barcode 71 more reliably.

  In the teaching system 100 of the present embodiment, a barcode is adopted as the identifier, and a barcode reader is adopted as the identification unit. Thereby, the target plate 60 can be identified with an easy and inexpensive configuration.

  Although one embodiment has been described above, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the invention.

  The barcode 71 displayed on the identifier display unit 70 of the above-described embodiment mainly includes a first portion 73A indicating the type of the target plate 60 and a second portion 73B indicating a correction value. However, the present invention is not limited to this. For example, the barcode 71 may be a barcode indicating only a correction value used for correction when teaching is performed using the target plate 60.

  Further, for example, the barcode 71 may be a barcode indicating only code information indicating the type of the target plate 60. In this case, for example, correction value information in which a correction value is associated with each piece of code information indicating the type of the target plate 60 may be stored in the storage unit 16a. Thereby, the controller 16 can read the correction value associated with the code information of the target plate 60 read by the barcode reader 57 from the storage unit 16a.

  In the above-described embodiment or modification, the barcode 71 has been described as an example of the identifier for identifying the target plate 60. However, a two-dimensional code may be used, and identification from a longer distance may be performed as a color barcode. It may be possible. Moreover, you may employ | adopt the tag which embedded the identification information or correction value information of the target plate 60. FIG. A technique (RFID: radio frequency identifier) may be employed in which the tag is attached to the target plate 60 and the information is read by short-range wireless communication using an electromagnetic field or radio wave.

  In the above-described embodiment or modification, the example in which the position detection control is executed twice has been described, but the control may be executed three or more times or may not be repeatedly executed. In the teaching system 100 in which the position detection control is executed three or more times, the controller 16 executes the position detection control three or more times, and performs the third (Nth) or subsequent position detection control immediately before (N-1). The identification control may be executed at the timing of the last (N-th) position detection control. Thereby, the position detection of the positioning pin 66 by the touch panel 35 becomes more accurate, and the barcode reader 57 can read the barcode 71 more reliably. Further, when position detection control is executed twice or more, control for further shake correction may be introduced between the position detection controls. The shake correction is an operation of bringing the teaching unit 20 into contact with the positioning pin 66 and an operation of converging the shake amount by repeating a predetermined amount of rise operation after the drop operation.

  In the above-described embodiment or modification, the touch panel 35 has been described with an example in which the touch panel 35 is arranged in the X direction (traveling direction). However, the touch panel 35 may be a single sheet or may be arranged in the Y direction. . When the touch panel 35 is arranged in the Y direction, the touch panel 35 and the bumper plate 41 may be arranged in the X direction.

  In the said embodiment or modification, although the example provided with the bumper plate 41 was given and demonstrated, you may comprise as a teaching unit without the bumper plate 41.

  DESCRIPTION OF SYMBOLS 1 ... Ceiling conveyance vehicle system, 3 ... Load port (transfer part), 10 ... Ceiling conveyance vehicle (conveyance vehicle), 16 ... Controller (control part), 16a ... Memory | storage part, 20 ... Teaching unit, 29 ... Teaching control part , 30 ... 1st detection unit, 31 ... Support member, 35 ... Touch panel (position detection part), 53 ... 1st distance sensor (distance detection part), 55 ... 2nd distance sensor, 57 ... Bar code reader (identification) Part), 60 ... target plate, 66 ... positioning pin (positioning part), 71 ... bar code (identifier), 100 ... teaching system, 103 ... load port (transfer part), A ... conveyed object.

Claims (9)

A teaching system that acquires teaching data used when a transport vehicle transfers a transferred object to a transfer unit,
A target plate installed in the transfer unit and having a positioning unit and an identifier;
A teaching unit that has a position detection unit that detects the position of the positioning unit and an identification unit that identifies the identifier, and is used by being held by the transport vehicle;
A control unit that executes position detection control that causes the position detection unit to detect the position of the positioning unit, and identification control that causes the identification unit to identify the identifier;
The said control part correct | amends the said teaching data acquired based on the position of the said positioning part detected by the said position detection control based on the said identifier identified by the said identification control.   The teaching unit is provided so as to be detachable in a vertical direction with respect to the main body portion held by the conveyance vehicle and the main body portion, and detects the position of the positioning portion by contacting the positioning portion. The teaching system according to claim 1, further comprising: a position detection unit; and a distance detection unit that detects a distance between the main body unit and the position detection unit.   The teaching system according to claim 2, wherein the control unit executes the identification control when a distance detected by the distance detection unit reaches a predetermined distance.   The control unit executes the position detection control at least twice, executes the position detection control after the second time based on the teaching data acquired by the immediately preceding position detection control, and the last The teaching system according to claim 1, wherein the identification control is executed after the position detection control is executed.   The teaching system according to any one of claims 1 to 4, wherein the identifier is a one-dimensional code or a two-dimensional code, and the identification unit is a code reader. A teaching system for acquiring teaching data used when a transport vehicle transfers a transported object to a transfer unit, having a positioning unit and an identifier, and used together with a target plate installed in the transfer unit A unit,
A teaching unit that is provided so as to be held by the transport vehicle and includes a position detection unit that detects a position of the positioning unit and an identification unit that identifies the identifier. A target plate used in a teaching system that acquires teaching data used when a transport vehicle transfers a transferred object to a transfer unit,
A positioning unit that can be detected by a position detection unit provided in a teaching unit held by the transport vehicle when installed in the transfer unit, and an identifier that can be identified by an identification unit provided in the teaching unit; Having a target plate. The teaching data used when the transport vehicle transfers the object to be transferred to the transfer unit has a positioning unit and an identifier, and detects the target plate installed in the transfer unit and the position of the positioning unit. A teaching method for obtaining using a teaching unit that has a position detection unit that performs identification and an identification unit that identifies the identifier, and is used by being held by the transport vehicle,
An installation step of installing the target plate in the transfer unit;
A position detecting step for causing the position detecting unit to detect the position of the positioning unit;
An identification step for causing the identification unit to identify the identifier;
A teaching method, comprising: a correction step of correcting the teaching data acquired based on the position of the positioning unit detected by the position detecting step based on the identifier identified by the identifying step. The position detection step is executed at least twice.
The second and subsequent position detection steps are executed after the teaching unit is controlled based on the teaching data acquired based on the position of the positioning unit detected by the previous position detection step.
The teaching method according to claim 8, wherein the identification step is executed after the last position detection step is executed.

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