CN116994478B - Crown block teaching method and system - Google Patents
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- H—ELECTRICITY
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Abstract
The invention discloses a crown block teaching method and a teaching system, wherein the teaching method verifies self parameters of all crown blocks through a reference machine table to obtain first teaching parameters. And then, verifying the parameter difference of all the process machines by using one crown block to obtain a correction parameter set. And combining the first teaching parameters of other crown blocks with the correction parameter set to achieve the effect of corresponding verification of all crown blocks and all process machines. The teaching method is quicker and more efficient, and combines the difference between different crown blocks and the difference between different process machines, thereby ensuring the accuracy of carrying the wafer box by the crown blocks.
Description
Technical Field
The invention relates to the technical field of wafer processing equipment, in particular to a crown block teaching method and a crown block teaching system.
Background
In the process of processing a semiconductor, hundreds of processing technologies are needed to finish the manufacturing and processing of a semiconductor product and form a finished product. Different processing steps are performed by using different processing machines, wherein the processing machines of different processing stations comprise a processing machine, a loader (loadport), a storage warehouse (storage), an overhead cache device (OverheadBuffer, OHB) and the like. After processing of the semiconductor on one process tool is completed, the semiconductor is transported to the next process tool by an overhead travelling crane (OHT) on an Automated Material Handling System (AMHS). Meanwhile, in order to improve the conveying efficiency, a plurality of crown blocks are circulated among the process machines, and the different crown blocks are different, so that the on-site debugging work is challenged. However, if the crown block does not teach or teaches inaccurately, the products such as wafers are damaged due to low transmission precision of the products such as wafers.
In semiconductor processing plants, hundreds of process tools are provided with hundreds of crown blocks on an automatic material conveying system. Before machining, teaching and debugging are required to be carried out on the crown block relative to the process machine, and if all crown blocks and machine stations are checked in turn according to the mode that a single crown block is used for correcting a single process machine, a long time is required to be consumed; if the method is applied to all the crown blocks in a mode that only a single crown block corrects all the machine stations, the difference between the crown blocks is ignored, for example, the position deviation of different crown blocks caused by machining errors and installation errors is avoided, and further, the transmission accuracy of other crown blocks is not high due to the difference between the crown blocks, so that the great loss is caused. Therefore, a crown block teaching method is needed, which can quickly teach among a plurality of crown blocks and a plurality of process machines, is suitable for the difference between crown blocks and also is suitable for the difference between different process machines.
Disclosure of Invention
In order to overcome the defects, the invention aims to provide the crown block teaching method which takes the difference between crown blocks and the difference between process machines into consideration and rapidly realizes the teaching of a plurality of crown blocks on a plurality of process machines.
In order to achieve the above purpose, the invention adopts the following technical scheme: a crown block teaching method is used for teaching a plurality of crown blocks on a plurality of process machines and comprises the following steps:
step one, acquiring a first teaching parameter when each crown block teaches the same reference machine;
step two, acquiring a second teaching parameter when any crown block teaches each process machine;
calculating correction parameters of the crown block in the second step relative to each process machine, forming a correction parameter set by all the correction parameters, and recording the correction parameter set, wherein each correction parameter is obtained by a difference value between each group of second teaching parameters and the first teaching parameters corresponding to the crown block in the second step;
and step four, correcting the first teaching parameters of the crown blocks except the crown blocks in the step two according to the correction parameter sets to obtain actual teaching parameter sets of the crown blocks at all process machines, wherein each actual teaching parameter set is obtained by adding the first teaching parameters of the crown blocks to each correction parameter in the correction parameter set and moving the crown blocks according to the corresponding actual teaching parameter sets.
The invention has the beneficial effects that: and verifying the self parameters of all crown blocks through a reference machine table to obtain a first teaching parameter. And then, verifying the parameter difference of all the process machines by using one crown block to obtain a correction parameter set. And combining the parameters of the crown block (first teaching parameters) with the parameter differences (correction parameter sets) of the process machine to achieve the effect of corresponding verification of all crown blocks and all process machines. The teaching method is quicker and more efficient, and combines the difference between different crown blocks and the difference between different process machines, thereby ensuring the accuracy of carrying the wafer box by the crown blocks.
Further, the first step specifically includes:
step 11, the crown block grabs the wafer box and pushes the crown block to an initial position right above the reference machine, and a teaching board is placed on the reference machine;
step 12, the crown block in the step 11 drives the wafer box to descend and place on the demonstrating board, and adjusts the position of the crown block until the wafer box and the demonstrating board are aligned to complete demonstrating, and the first demonstrating parameter of the crown block in the process is recorded;
and 13, repeating the steps 11-12 to finish teaching of all the crown blocks aiming at the reference machine table, and obtaining a first teaching parameter of each crown block.
The step of acquiring the first teaching parameters of each crown block when teaching aiming at the reference machine is the same, namely, the steps 11-12 are repeated, but different crown blocks are adopted each time, and the first teaching parameters of each crown block are sequentially acquired.
Further, the second step specifically comprises
Step 21, optionally picking up the wafer box by a crown block, and pushing the crown block to an initial position right above a process machine, wherein a teaching board is placed on the process machine;
step 22, the crown block in step 21 drives the wafer box to descend and place on the demonstrating board and adjusts the position of the crown block until the wafer box and the demonstrating board are aligned to complete demonstrating, and a second demonstrating parameter of the crown block in the process is recorded;
and 23, repeating the steps 21-22, and completing teaching of the crown block in the step 21 for all process machines to obtain second teaching parameters of the crown block in the step 21 at each process machine.
The step of acquiring the second teaching parameters of the ith crane when teaching each process machine is the same, namely, the steps 21-22 are repeated, but different process machines are adopted each time, and the second teaching parameters of the ith crane when teaching each process machine are sequentially acquired.
Further, each of the first teaching parameters includes a first lifting parameter H i First angle parameter R i And a first translation parameter Y i Wherein i is a positive integer, i represents an ith crown block and i is not greater than the number of crown blocks. Each second teaching parameter comprises a second lifting parameter H ij Second angle parameter R ij And a second translation parameter Y ij J is a positive integer, which indicates that j is the jth process machine and j is not greater than the number of process machines.
Each correction parameter includes a lifting correction parameter DeltaH ij Angle correction parameter Δr ij And a translational correction parameter Δy ij The method comprises the steps of carrying out a first treatment on the surface of the Wherein the elevation correction parameter delta H ij =second lifting parameter H ij -a first lifting parameter H i Angle correction parameter Δr ij =second angle parameter R ij -a first angle parameter R i Translation correction parameter Δy ij =second translation parameter Y ij -a first translation parameter Y i 。
The wafer box can be adjusted to be aligned with the teaching board by adjusting the lifting parameter, the angle parameter and the translation parameter, so that the teaching of the crown block can be realized by controlling the three parameters.
Further, each of the actual teaching parameters includes an actual lifting parameter H' i’j Actual angle parameter R' i’j And the actual translation parameter Y' i’j Wherein i' is a positive integer other than i;
wherein the actual lifting parameter H' i’j =first lifting parameter H i’ +lifting correction parameter ΔH ij Actual angle parameter R' i’j =first angle parameter R i’ +angle correction parameter DeltaR ij Actual translation parameter Y' i’j =first translation parameter Y i’ +translational correction parameters ΔY ij 。
Further, the crown block comprises a lifting motor, a rotating motor and a traversing motor which are used for adjusting positions, wherein the lifting motor, the rotating motor and the traversing motor are respectively internally provided with a first encoder, a second encoder and a third encoder.
The first lifting parameter H i And a second lifting parameter H ij The first angle parameter R is the pulse number of one code i And a second angle parameter R ij The pulse numbers are two codes, and the first translation parameter Y i And a second translation parameter Y ij The number of pulses for code three.
The lifting motor, the rotating motor and the traversing motor jointly act, the position of the wafer box can be adjusted until the wafer box is centered with the demonstrating board, and the demonstration of the crown block is completed, so that the precise demonstration can be realized only by controlling the pulse number of the encoders corresponding to the lifting motor, the rotating motor and the traversing motor.
Furthermore, the first teaching parameters of each crown block are recorded in first storage modules arranged in the crown blocks, and the first storage modules are in one-to-one correspondence with the crown blocks.
The correction parameter sets are stored in a second storage module, the second storage module is arranged in a controller of the automatic material handling system, and each crown block is in communication connection with the controller.
Furthermore, the reference machine is any one of the process machines, and no separate reference machine is required to be additionally arranged. The process machines are the same or different, that is, the method can be applied to the same process machine or different process machines, and the application range is wide.
Furthermore, when one of the crown blocks is added or replaced, only the first teaching parameters of the crown block are acquired again according to the first step and the original first teaching parameters are covered, and the acquired first teaching parameters are corrected according to the correction parameter set in the third step, so that the actual teaching parameter set of the crown block is obtained.
Furthermore, when a process machine is updated or added, only the correction parameters of the crown block in the second step relative to the updated or added process machine are calculated, and the correction parameters obtained by recalculation replace the original correction parameters to form a new correction parameter set, wherein the new correction parameter set covers the original correction parameter set.
The invention also discloses a crown block teaching system, which comprises:
the acquisition module is used for acquiring a first teaching parameter when each crown block teaches on the same reference machine and a second teaching parameter when any crown block teaches on each process machine;
the computing module is used for receiving the first teaching parameters and the second teaching parameters, and computing correction parameters of the crown block with the second teaching parameters relative to each process machine table to form a correction parameter set;
the first storage module is arranged corresponding to the crown block and used for storing first teaching parameters of the corresponding crown block;
the second storage module is used for storing correction parameter sets of all correction parameter shapes and sending the correction parameter sets to each crown block;
the correction module is arranged corresponding to the first storage module, and can call the first teaching parameters corresponding to the first storage module and receive the correction parameter set, and the correction module corrects the corresponding first teaching parameters according to the correction parameter set so as to obtain the actual teaching parameter set of the corresponding crown block at all process machines.
The teaching system gives consideration to the difference between the crown blocks and the process machine and the difference between the process machine, and rapidly realizes the teaching of a plurality of crown blocks on a plurality of process machines.
Further, the acquisition module is a first encoder of a lifting motor, a second encoder of a rotating motor and a third encoder of a traversing motor of the crown block; the first storage module and the correction module are located in the corresponding crown block, and the second storage module and the calculation module are located in a controller of the automatic material handling system.
Drawings
FIG. 1 is a flow chart of a teaching method in a first embodiment of the invention;
FIG. 2 is a schematic view of a structure of an initial position of a parking space in an embodiment of the present invention;
FIG. 3 is a schematic view of a wafer cassette according to an embodiment of the present invention when an offset angle is generated on a teaching board;
FIG. 4 is a schematic view of a wafer cassette according to an embodiment of the present invention when a lateral offset is generated on a teaching board;
fig. 5 is a block diagram of a teaching system in an embodiment of the present invention.
In the figure:
1. a process machine; 2. a crown block; 21. an acquisition module; 22. a first storage module; 23. a correction module; 3. a wafer cassette; 4. a teaching board; 5. a controller; 51. a second storage module; 52. and a calculation module.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making clear and defining the scope of the present invention.
The invention relates to a crown block teaching method which is used for teaching a plurality of crown blocks 2 on a plurality of process machine tables 1 so as to realize the accurate carrying of each crown block 2 on each process machine table 1, and during teaching, all crown blocks 2 are installed on a material automatic carrying system, and the material automatic carrying system drives the crown blocks 2 to move to the initial teaching position. After the crown block 2 clamps the wafer box 3, the wafer box 3 can be driven to lift, rotate and horizontally move to reach the designated position of the process machine 1.
Referring to fig. 1, the teaching method comprises the following steps:
step one, acquiring a first teaching parameter when each crown block 2 teaches aiming at the same reference machine.
Each first teaching parameter comprises a first lifting parameter H i First angle parameter R i And a first translation parameter Y i Wherein i is a positive integer, i represents an ith crown block and i is not greater than the number of crown blocks.
The method for acquiring the first teaching parameters of each crown block for teaching aiming at the reference machine specifically comprises the following steps:
step 11, a crown block 2 grabs the wafer box 3 and pushes the crown block 2 to an initial position right above a reference machine, and a teaching board 4 is placed on the reference machine;
step 12, the crown block 2 in step 11 drives the wafer box 3 to descend and place on the teaching board 4, adjusts the crown block position until the wafer box 3 and the teaching board 4 are aligned to complete teaching, records the first lifting parameter H of the crown block 2 in the process 1 First angle parameter R 1 And a first translation parameter Y 1 ；
Step 13, repeating the steps 11-12 to complete the teaching of all the crown blocks 2 on the reference machine table and obtain the first lifting parameter H of each crown block i First angle parameter R i And a first translation parameter Y i 。
The step of acquiring the first teaching parameters of each crown block when teaching the reference machine is the same, that is, the steps 11-12 are repeated, but each time different crown blocks are adopted, the first teaching parameters (H 1 、R 1 、Y 1 ) A second stageFirst teaching parameter of crown block (H 2 、R 2 、Y 2 ) First teaching parameter of third crown block (H 3 、R 3 、Y 3 ) First teaching parameter of fourth crown block (H 4 、R 4 、Y 4 ）……
In the first step, the parameters of all the crown blocks 2 are verified through a reference machine, namely the first teaching parameters of all the crown blocks. Wherein the first teaching parameters of each crown block are recorded in a first memory module 22 built into the respective crown block 2. Because the different crown blocks 2 accumulate part machining errors, assembly errors and the like, the parameters of the crown blocks cannot be completely identical when all crown blocks move, and therefore, the first teaching parameters of the crown blocks are obtained through testing in the first step and recorded in the crown blocks as the parameters of the crown blocks, so that the deviation among the different crown blocks is eliminated.
In one embodiment, the first storage module 22 is a data card built into the crown block 2, that is, the data card of each crown block 2 has the first teaching parameters of the crown block stored thereon.
The reference machine may be any one of the process machines 1, that is, any one of the process machines 1 is selected as the reference machine. Referring to fig. 2, the initial position is located right above the process machine 1, and the vertical distance from the lower end surface of the wafer box 3 to the upper end surface of the teaching board 4 is the distance H that the crown block 2 needs to descend in the vertical direction. When the cassette 3 is lowered onto the teaching board 4, the cassette 3 may not be aligned with the teaching board 4 due to a deviation of processing or assembling of the crown block 2 itself. Referring to fig. 3, the wafer cassette 3 is offset by an angle R with respect to the teaching board 4. Referring to fig. 4, since the wafer cassette 3 is offset from the teaching board 4 by the lateral distance Y, it is necessary to adjust the crown block offset angle R and move the traverse distance Y in the lateral direction in order to align the wafer cassette 3 with the teaching board 4. Naturally, the crown block 2 may also be longitudinally offset from the teaching board by a longitudinal displacement distance X (shown in the figure), and in this case, the position of the crown block needs to be adjusted so as to be longitudinally displaced by the longitudinal displacement distance X.
And the movement of the wafer box 3 depends on a lifting motor, a rotating motor and a traversing motor of the crown block 2, wherein the crown block 2 comprises a clamping device, the clamping device is used for driving the clamping device to lift after grabbing the wafer box 3, the rotating angle is used for driving the clamping device to rotate to adjust the angle, and the traversing motor is used for driving the clamping device to move along a cross in the X direction and the Y direction so as to traverse or longitudinally move the wafer box. The lifting motor, the rotating motor and the traversing motor jointly act to adjust the position of the wafer box 3 until the wafer box 3 and the teaching board 4 are centered, and the teaching of the crown block 2 is completed.
The lifting motor, the rotating motor and the traversing motor are respectively provided with a corresponding encoder, namely a first encoder, a second encoder and a third encoder, wherein the pulse number of the first encoder is equivalent to the rotation number of the lifting motor, namely the descending distance H of the crown block; the pulse number of the second encoder is equivalent to the rotation number of the rotating motor, namely the crown block offset angle R; the pulse number of the encoder III is equivalent to the rotation number of the traversing motor, namely the traversing distance Y and the longitudinal distance X of the crown block. Therefore, only the pulse numbers of the first encoder, the second encoder and the third encoder are respectively recorded, and the first lifting parameter H i First angle parameter R i And a first translation parameter Y i I.e. the number of pulses of encoder one, encoder two and encoder three, respectively.
Referring to fig. 3 and 4, the teaching board 4 is provided with a positioning column and a scale mark, the position of the wafer box 3 is positioned through the positioning column and the scale mark, when the wafer box 3 is aligned with the scale mark, that is, the wafer box 3 reaches the aligned position, and the crown block finishes teaching at the moment.
Step two, acquiring second teaching parameters when any crown block 2 teaches each process machine 1.
The second teaching parameters comprise a second lifting parameter H ij Second angle parameter R ij And a second translation parameter Y ij Wherein i is the ith crown block, j is a positive integer, and represents the jth process machine and j is not more than the number of process machines.
The method for acquiring the second teaching parameters of any crown block for teaching each process machine specifically comprises the following steps:
step 21, the ith crown block grabs the wafer box and pushes the crown block to an initial position right above a process machine, and a teaching board is placed on the process machine;
step 22, the ith trolley in step 21 drives the wafer box to descend and place on the teaching board, adjusts the position of the trolley until the wafer box is aligned with the teaching board to complete teaching, and records a second lifting parameter H of the ith trolley in the process i1 Second angle parameter R i1 And a second translation parameter Y i1 ；
Step 23, repeating the steps 21-22 to complete teaching of the ith trolley for all process machines and obtain a second lifting parameter H of the ith trolley at each process machine ij Second angle parameter R ij And a second translation parameter Y ij 。
The step of acquiring the second teaching parameters of the ith crane when teaching each process machine is the same, namely, the steps 21-22 are repeated, but each time different process machines are adopted, the second teaching parameters (H i1 、R i1 、Y i1 ) A second teaching parameter (H) i2 、R i2 、Y i2） A second teaching parameter (H) i3 、R i3 、Y i3 ) A second teaching parameter (H i4 、R i4 、Y i4 ）……
In the step, teaching is carried out on all the process machines by using one crown block, which is equivalent to using one crown block as a reference crown block, and the machine attributes of all the process machines are verified, namely, the second teaching parameters of the reference crown block at each process machine.
In the present embodiment, the second lifting parameter H ij Second angle parameter R ij And a second translation parameter Y ij The same is the number of pulses of encoder one, encoder two and encoder three on the ith crown block, respectively.
Calculating correction parameters of the crown block in the second step relative to each process machine, forming a correction parameter set by all the correction parameters, and recording the correction parameter set, wherein each correction parameter is obtained by a difference value of each group of second teaching parameters and a first teaching parameter corresponding to the ith crown block in the second step.
The number of correction parameters in the correction parameter set is the number of process machines, wherein each correction parameter corresponds to a process machine one by one.
Each correction parameter includes a lifting correction parameter delta H ij Angle correction parameter Δr ij And a translational correction parameter Δy ij Wherein the correction parameter DeltaH is lifted ij =second lifting parameter H ij -a first lifting parameter H i Angle correction parameter Δr ij =second angle parameter R ij -a first angle parameter R i Translation correction parameter Δy ij =second translation parameter Y ij -a first translation parameter Y i 。
The correction parameter sets are stored in a second memory module 51. In one embodiment, the second memory module 51 is disposed in a controller 5 of the automated material handling system, each crown block 2 is communicatively coupled to the controller 5, and the controller 5 can send the correction parameter sets into each crown block 2.
And step four, correcting the first teaching parameters of the crown blocks except the crown blocks in the step two according to the correction parameter sets to obtain actual teaching parameter sets of the crown blocks at all process machines, wherein the crown blocks move according to the corresponding actual teaching parameter sets, and each actual teaching parameter set is obtained by adding the first teaching parameters of the crown blocks to each correction parameter in the correction parameter set.
The actual teaching parameter sets are in one-to-one correspondence with other crown blocks, and each actual teaching parameter set comprises actual teaching parameters in one-to-one correspondence with the process machine.
Each actual teaching parameter comprises an actual lifting parameter H' i’j Actual angle parameter R' i’j And the actual translation parameter Y' i’j Wherein i' is a positive integer other than i, that is, other crown blocks except the ith crown block in the second step, a first lifting parameter H i’ First angle parameterR i’ And a first translation parameter Y i’ The first teaching parameters of the crown blocks except the ith crown block in the step one. Wherein the actual lifting parameter H' i’j =first lifting parameter H i’ +lifting correction parameter ΔH ij Actual angle parameter R' i’j =first angle parameter R i’ +angle correction parameter DeltaR ij Actual translation parameter Y' i’j =first translation parameter Y i’ +translational correction parameters ΔY ij 。
And step four, transmitting the correction parameter set obtained in the step three to each other crown block, correcting the other crown blocks according to the correction parameter set, and finally obtaining the actual teaching parameters of each other crown block at each process machine, namely the pulse numbers of the encoder I, the encoder II and the encoder III of each other crown block at each process machine, wherein the teaching of all crown blocks for all process machines is finished at the moment, and the other crown blocks all move according to the final actual teaching parameters.
In this embodiment, the self parameters of all crown blocks are verified through one reference machine to obtain the first teaching parameters. And then, verifying the parameter difference of all the process machines by using one crown block to obtain a correction parameter set. And combining the parameters of the crown block (first teaching parameters) with the parameter differences (correction parameter sets) of the process machine to achieve the effect of corresponding verification of all crown blocks and all process machines. Compared with the prior art that the crown block teaches the same type of process machine, different types of process machine are required to be separated, and compared with the teaching of the process machine, the teaching method in the embodiment is quicker and more efficient, the difference between the crown block and the difference between different process machines are considered, and the accuracy of carrying the wafer box by the crown block is ensured.
In one embodiment, in the second step, when teaching all the process machines with the first crown block, a second teaching parameter (H 11 、R 11 、Y 11 ）、（H 12 、R 12 、Y 12 ）、（H 13 、R 13 、Y 13 ）……
The correction parameter set [ (delta H) obtained in step three 11 、ΔR 11 、ΔY 11 )，(ΔH 12 、ΔR 12 、ΔY 12 )，(ΔH 13 、ΔR 13 、ΔY 13 )…]。
ΔH 11 =H 11 -H 1 ，ΔR 11 =R 11 -R 1 ，ΔY 11 =Y 11 -Y 1 ；
ΔH 12 =H 12 -H 1 ，ΔR 12 =R 12 -R 1 ，ΔY 12 =Y 12 -Y 1 ；
ΔH 13 =H 13 -H 1 ，ΔR 13 =R 13 -R 1 ，ΔY 13 =Y 13 -Y 1 ……
In the fourth step, all other crown blocks except the first crown block correct the first teaching parameters of the crown block according to the correction parameter set so as to obtain the actual teaching parameter set of the crown block at all process machines.
Actual teaching parameter set of second crown block [ (H' 21 、R’ 21 、Y’ 21 )，(H’ 22 、R’ 22 、Y’ 22 )，(H’ 23 、R’ 23 、Y’ 23 )…]。
H’ 21 =H 2 +ΔH 11 ，R’ 21 =R 2 +ΔR 11 ，Y’ 21 =Y 2 +ΔY 11 ；
H’ 22 =H 2 +ΔH 12 ，R’ 22 =R 2 +ΔR 12 ，Y’ 21 =Y 2 +ΔY 12 ；
H’ 23 =H 2 +ΔH 13 ，R’ 23 =R 2 +ΔR 13 ，Y’ 23 =Y 2 +ΔY 13 ……
Actual teaching parameter set of third crown block [ (H' 31 、R’ 31 、Y’ 31 )，(H’ 32 、R’ 32 、Y’ 32 )，(H’ 33 、R’ 33 、Y’ 33 )…]。
H’ 31 =H 3 +ΔH 11 ，R’ 31 =R 3 +ΔR 11 ，Y’ 31 =Y 3 +ΔY 11 ；
H’ 32 =H 3 +ΔH 12 ，R’ 32 =R 3 +ΔR 12 ，Y’ 31 =Y 3 +ΔY 12 ；
H’ 33 =H 3 +ΔH 13 ，R’ 33 =R 3 +ΔR 13 ，Y’ 33 =Y 3 +ΔY 13 ……
And by analogy, obtaining the actual teaching parameter sets of all the crown blocks.
In the teaching method of the embodiment, because the crown blocks are independent from each other when the crown block is maintained and replaced, only the first teaching parameters of the crown block need to be recalculated when one crown block is maintained and replaced, the updated first teaching parameters cover the original first teaching parameters, the updated first teaching parameters are corrected according to the correction parameter set, the updated actual teaching parameter set is obtained, and the crown block moves according to the updated actual teaching parameter set.
In the teaching method of the present embodiment, the process machine may be any one or more of a loader (loadport), a store (storage), and an overhead cache (OverheadBuffer, OHB), and the plurality of process machines may be the same or different.
Because the process machine and the process machine are independent from each other, when one process machine needs to be maintained or moved, the correction parameters of the crown block in the second step relative to the new process machine are only needed to be recalculated, the changed correction parameter set covers the original correction parameter set, the crown block corrects according to the new correction parameter set to obtain a new actual teaching parameter set, and the crown block moves according to the updated actual teaching parameter set.
Referring to fig. 5, the invention also discloses an overhead travelling crane teaching system, which comprises an acquisition module 21, a first storage module 22, a second storage module 51, a calculation module 52 and a correction module 23.
The acquisition module 21 is used for acquiring a first teaching parameter when each crown block 2 teaches on the same reference machine and a second teaching parameter when any crown block 2 teaches on each process machine 1.
The calculating module 52 is configured to receive the first teaching parameter and the second teaching parameter, and calculate, according to a built-in algorithm, correction parameters of the crown block 2 having the second teaching parameter with respect to each process machine 1, thereby forming a correction parameter set.
The first storage module 22 is disposed corresponding to the crown block 2, and is configured to store a first teaching parameter corresponding to the crown block 2.
The second storage module 51 is configured to store correction parameter sets of all correction parameter shapes, and send the correction parameter sets to each crown block 2.
The correction module 23 is correspondingly arranged with the first storage module 22, the correction module 23 can call the first teaching parameters in the corresponding first storage module 22 and receive the correction parameter set, and the correction module 23 corrects the corresponding first teaching parameters according to the correction parameter set so as to obtain the actual teaching parameter set of the corresponding crown block 2 at all the process machine stations 1.
In one embodiment, the first storage module 22 and the correction module 23 are located within the corresponding crown block 2 and the second storage module 51 and the calculation module 52 are located in an integral controller 5 provided in the automated material handling system. The acquisition module 21 is a first encoder of a lifting motor, a second encoder of a rotating motor and a third encoder of a traversing motor of the crown block 2.
The algorithm built in the calculation module 52 subtracts the first teaching parameters of the corresponding crown block from each set of second teaching parameters to obtain a correction parameter, and the correction parameters obtained by calculation of the calculation module correspond to the process machines one by one.
The correction method of the correction module 23 obtains an actual correction parameter set by adding each correction parameter in the correction parameter set to the first teaching parameter, wherein the actual teaching parameter set corresponds to other crown blocks one by one, and each actual teaching parameter set comprises the actual teaching parameters corresponding to the process machine one by one.
The present invention also discloses a storage medium storing a program for causing a computer to execute the overhead traveling crane teaching method.
The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and to implement the same, but are not intended to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.
Claims (8)
1. The crown block teaching method is used for teaching a plurality of crown blocks on a plurality of process machines and is characterized in that: the method comprises the following steps:
step one, acquiring a first teaching parameter when each crown block teaches the same reference machine, wherein the reference machine is any one of the process machines, and a plurality of process machines are the same or different; the method specifically comprises the following steps of;
step 11, the crown block grabs the wafer box and pushes the crown block to an initial position right above the reference machine, and a teaching board is placed on the reference machine;
step 12, the crown block in the step 11 drives the wafer box to descend and place on the demonstrating board, and adjusts the position of the crown block until the wafer box and the demonstrating board are aligned to complete demonstrating, and the first demonstrating parameter of the crown block in the process is recorded;
step 13, repeating the steps 11-12, and completing teaching of all the crown blocks aiming at the reference machine table to obtain a first teaching parameter of each crown block;
step two, acquiring a second teaching parameter when any crown block teaches each process machine;
calculating correction parameters of the crown block in the second step relative to each process machine, forming a correction parameter set by all the correction parameters, and recording the correction parameter set, wherein each correction parameter is obtained by a difference value between each group of second teaching parameters and the first teaching parameters corresponding to the crown block in the second step;
correcting the first teaching parameters of the crown blocks except the crown blocks in the step two according to the correction parameter sets to obtain actual teaching parameter sets of the crown blocks at all process machines, and moving the crown blocks according to the corresponding actual teaching parameter sets, wherein each actual teaching parameter set is obtained by adding the first teaching parameters of the crown blocks to each correction parameter in the correction parameter set;
wherein each first teaching parameter comprises a first lifting parameter H i First angle parameter R i And a first translation parameter Y i Wherein i is a positive integer, i represents an ith crown block and i is not greater than the number of crown blocks;
each second teaching parameter comprises a second lifting parameter H ij Second angle parameter R ij And a second translation parameter Y ij J is a positive integer, which indicates that j is the jth process machine and j is not more than the number of process machines;
each correction parameter includes a lifting correction parameter DeltaH ij Angle correction parameter Δr ij And a translational correction parameter Δy ij ；
Wherein the elevation correction parameter delta H ij =second lifting parameter H ij -a first lifting parameter H i Angle correction parameter Δr ij =second angle parameter R ij -a first angle parameter R i Translation correction parameter Δy ij =second translation parameter Y ij -a first translation parameter Y i ；
Each of the actual teaching parameters comprises an actual lifting parameter H' i’j Actual angle parameter R' i’j And the actual translation parameter Y' i’j Wherein i' is a positive integer other than i;
wherein the actual lifting parameter H' i’j =first lifting parameter H i’ +lifting correction parameter ΔH ij Actual angle parameter R' i’j =first angle parameter R i’ +angle correction parameter DeltaR ij Actual translation parameter Y' i’j =first translation parameter Y i’ +translational correction parameters ΔY ij 。
2. The crown block teaching method according to claim 1, characterized in that: the second step specifically comprises the following steps:
step 21, optionally picking up the wafer box by a crown block, and pushing the crown block to an initial position right above a process machine, wherein a teaching board is placed on the process machine;
step 22, the crown block in step 21 drives the wafer box to descend and place on the demonstrating board and adjusts the position of the crown block until the wafer box and the demonstrating board are aligned to complete demonstrating, and a second demonstrating parameter of the crown block in the process is recorded;
and 23, repeating the steps 21-22, and completing teaching of the crown block in the step 21 for all process machines to obtain second teaching parameters of the crown block in the step 21 at each process machine.
3. The crown block teaching method according to claim 1, characterized in that: the overhead travelling crane comprises a lifting motor, a rotating motor and a traversing motor which are used for adjusting positions, wherein the lifting motor, the rotating motor and the traversing motor are respectively internally provided with a first encoder, a second encoder and a third encoder;
the first lifting parameter H i And a second lifting parameter H ij The first angle parameter R is the pulse number of one code i And a second angle parameter R ij The pulse numbers are two codes, and the first translation parameter Y i And a second translation parameter Y ij The number of pulses for code three.
4. The crown block teaching method according to claim 1, characterized in that: the first teaching parameters of each crown block are recorded in first storage modules arranged in each crown block, and the first storage modules are in one-to-one correspondence with the crown blocks;
the correction parameter sets are stored in a second storage module, the second storage module is arranged in a controller of the automatic material handling system, and each crown block is in communication connection with the controller.
5. The crown block teaching method according to claim 1, characterized in that: when one of the crown blocks is added or replaced, only the first teaching parameters of the crown block are required to be re-acquired according to the first step and the original first teaching parameters are covered, and the re-acquired first teaching parameters are corrected according to the correction parameter set in the third step, so that the actual teaching parameter set of the crown block is obtained.
6. The crown block teaching method according to claim 1, characterized in that: when one process machine is added or replaced, only the correction parameters of the crown block in the second step are needed to be calculated and the correction parameters obtained by recalculation replace the original correction parameters to form a new correction parameter set, and the new correction parameter set covers the original correction parameter set.
7. The utility model provides a crown block teaching system which characterized in that: comprising
The acquisition module is used for acquiring a first teaching parameter when each crown block teaches on the same reference machine and a second teaching parameter when any crown block teaches on each process machine;
the computing module is used for receiving the first teaching parameters and the second teaching parameters, and computing correction parameters of the crown block with the second teaching parameters relative to each process machine table to form a correction parameter set;
the first storage module is arranged corresponding to the crown block and used for storing first teaching parameters of the corresponding crown block;
the second storage module is used for storing correction parameter sets of all correction parameter shapes and sending the correction parameter sets to each crown block;
the correction module is arranged corresponding to the first storage module, and can call the first teaching parameters corresponding to the first storage module and receive the correction parameter set, and the correction module corrects the corresponding first teaching parameters according to the correction parameter set so as to obtain the actual teaching parameter set of the corresponding crown block at all process machines.
8. The overhead traveling crane teaching system according to claim 7, wherein: the acquisition module is a first encoder of a lifting motor, a second encoder of a rotating motor and a third encoder of a traversing motor of the crown block; the first storage module and the correction module are located in the corresponding crown block, and the second storage module and the calculation module are located in a controller of the automatic material handling system.
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