JP4543833B2 - Teaching device for transport carriage in suspension type lifting transport device - Google Patents

Description

The present invention accommodates a large number of semiconductor wafers in a semiconductor clean room and transports them in a suspended lifting transport device (hereinafter referred to as OHT) for transporting a cassette for transporting various processing steps (cleaning, CVD, etc.) and various other carriers. The present invention relates to a teaching device for a cart (hereinafter referred to as an OHT cart).
More specifically, with respect to the control of the hand portion provided with the pair of fingers with respect to the OHT carriage that suspends the hand portion provided with the pair of fingers gripping the flange portion of the carrier and the approach / separation mechanism so as to be movable up and down. The present invention relates to a teaching device that provides a manual operation as a correction value with a deviation between each element of a spatial coordinate position of a stop position and each element of a spatial coordinate at a predetermined stop position as a correction value.

For example, a cassette for storing and unloading semiconductor wafers to sequentially perform various processes (cleaning, CVD, etc.) in the semiconductor manufacturing process, as well as for transferring plate-like bodies to various processing units in liquid crystal manufacturing, FA, etc. In recent years, OHT has become the mainstream carrier transport means from the viewpoint of improving productivity.
This OHT has a configuration in which the carrier is lifted and lowered at a predetermined position by a lifting mechanism of the OHT carriage, and the OHT carriage is transported in a suspended state to a rail disposed along a predetermined track. .

As a prior art related to the teaching device for the OHT cart according to each invention of the present application, there is the following Patent Document 1. The prior art of the teaching device for the OHT cart will be described with reference to Patent Document 1 as follows.
First, an outline of a semiconductor clean room to which OHT is applied will be described with reference to FIG. In FIG. 5, a plurality of process processing apparatuses 51 and a stocker 52 are arranged in a semiconductor clean room. Each process processing apparatus 51 and stocker 52 has a load port (a wafer carrier (cassette) W) loaded thereon ( A carrier mounting table 53 is installed. Further, an OHT 61 that transports the wafer carrier W between the process control device 51 and the stocker 52 is installed near the ceiling. The OHT 61 includes a track 62 disposed near the ceiling so as to connect the process processing device 51 and the stocker 52, an OHT cart 63 that travels along the track 62, and a suspension material from the OHT cart 63. The hand unit 65 is suspended by 64. The hand portion 65 moves up and down by winding / unwinding the suspension member 64 by a winding device (not shown) provided in the OHT carriage 63.

By the way, the spatial coordinate position (X ₀ , Y ₀ , Z ₀ , θ) of the hand unit 65 when the OHT carriage 63 detecting the stop mark provided at a predetermined position where the stocker 52 and the load port 53 are located stops. ₀ ) is stored in advance in the teaching device.
Here, X and Y are two orthogonal directions in the horizontal plane, X is a spatial coordinate element in the traveling direction of the OHT carriage 63, Z is a spatial coordinate element orthogonal to X and Y, and θ is in the horizontal plane. The spatial coordinate elements in the rotation direction are shown respectively.

Next, by operating the teaching device, the hand unit 65 can be visually set so as to grip the flange portion of the wafer carrier W set at the regular position on the load port 53 in a desired state.
The data of the spatial coordinate position (X _i , Y _i , Z _i , θ _i ) at this time is input to the teaching device, and position correction data (X _i −X ₀ , Y _i −Y ₀ , Z _i −Z ₀ , θ _i −θ ₀ ) is obtained. The position correction data (X _i −X ₀ , Y _i −Y ₀ , Z _i −Z ₀ , θ _i −θ ₀ ) is stored in the memory in the OHT carriage 63.

This position correction data is required for each OHT carriage and each load port, and hundreds (specifically, 30 process processing apparatuses in a semiconductor manufacturing apparatus, two load ports in each process processing apparatus, carrier) In this case, it is necessary to create data that covers 360 data).
When such a work has 10 bays, the data becomes 3600 data, and if 10 minutes are required for one work, the teaching time is 600 hours in total, and enormous time is required.
Therefore, the invention of Patent Document 1 discloses a technique for obtaining teaching means that greatly shortens teaching time that requires such a long time and does not cause individual differences among operators.

That is, the invention of Patent Document 1 includes a predetermined feature provided on the hand portion side of the OHT carriage or the carrier mounting table side, and a predetermined feature portion provided on the carrier mounting table side or the hand portion side. The position detection means for detecting the position of the hand part, and the amount of deviation between the current stop position of the hand part and the desired stop position based on the relative position of the hand part with respect to the mounting table obtained by the position detection means is automatically Therefore, the gist is to appropriately determine the spatial coordinate position of the hand unit based on the amount of deviation.
JP-A-11-349280

In Japanese Patent Application Laid-Open No. 2004-228561, a correction value for a matter described as the prior art, that is, a deviation between a stop position on the control of the hand portion in the OHT carriage and a stop position at which the hand portion properly grips the carrier flange. The manual teaching technique obtained as follows has the following problems (a) and (b).
(A) The carrier used as the teaching object is a highly versatile one that is mass-produced, such as a cassette that is actually used for carrying wafers and the like. Therefore, even if an accurate teaching operation is performed, the teaching contents of the spatial coordinate positions (X _i , Y _i , Z _i , θ _i ) in the hand portion of the OHT carriage vary in basic teaching data, If the teaching data error is large, the accuracy is not sufficient, and the hand portion of the OHT cart cannot properly grip the flange of the carrier after teaching, which may cause a carrier dropping accident.

(B) The teaching method of the control amount of the driving element in the hand portion of the OHT cart that is based on the manual work by the worker is often used as a conventional means. Then, the correction data (X _i −X ₀ , Y _i −Y ₀ , Z _i −Z ₀ , θ) of the spatial coordinate position (X _i , Y _i , Z _i , θ _i ) in the hand portion of the OHT cart. _{In order} to teach _i- θ ₀ ) to the control unit of the OHT carriage, so-called scribing is used for positioning recognition on the plane of the pair of fingers as the components of the hand section of the OHT carriage and the teaching carrier facing the pair of fingers. Lines are used. However, it takes a considerable time to teach the correction data (X _i −X ₀ , Y _i −Y ₀ , Z _i −Z ₀ , θ _i −θ ₀ ) based only on the marking line. The work requires skill and tends to cause variations in the accuracy of teaching work depending on the operator.

On the other hand, as in the invention of Patent Document 1, when teaching a control amount by which a pair of fingers in the hand portion of the OHT carriage can properly grip the flange portion of the carrier, automating the manual teaching means is effective in teaching accuracy. Even if the teaching time can be shortened in addition to the improvement, the cost required for this automation has reached a considerable level, and it can not be easily implemented as necessary, so it is practically adopted without turning around. There are aspects that are difficult to do.

  Accordingly, an object of the present invention is to provide a stop position on the control of the hand portion having a pair of fingers in the OHT carriage, and a pair of fingers in the hand portion of the OHT carriage to form the essential portions of the flange portion and its peripheral portion.・ Accurately grasps the position of the hand part in the state that the height position is the same as the carrier that actually operates and the flange part of the reference jig for position correction formed with high accuracy is properly grasped. Based on the positional information, the correction value required for controlling the hand unit with high accuracy is taught to the control unit of the OHT carriage.

Means and effects for solving the problems

In order to solve the above-described problem, the teaching device for an OHT carriage according to claim 1 is a pair of gripping the flange portion of the carrier or approaching and separating from each other so as to release the engagement with the flange portion. A finger, a mechanism for suspending the pair of fingers and its approach / separation control member so as to be lifted and lowered, a mechanism for traveling along a predetermined track, a direction orthogonal to the traveling direction, a vertical axis direction at the center, and its rotation A deviation value between a predetermined position and a control position of the conveyance carriage with respect to the carriage on which the carrier is placed and a carriage on which the carrier is placed is obtained in advance, and the deviation value is used as a correction value. is stored in the controller for each of the conveying carriage, for each conveying carriage, the correction value used for each table, suspended, lifting consisting comprises a control means of the access to the table of the transport carriage In feeding device, the conveying carriage for measuring the correction value
A teaching device for position correction having a bottom plate, an upper plate, a flange portion, and a mark member
When a reference jig is provided , the position correction reference jig is placed at a regular position on the mounting table, and the flange portion is held in a desired state by the pair of fingers. The difference between the spatial coordinate position of the transport carriage and the preset spatial coordinate position on the control is measured as a correction value, and the spatial coordinates
The elements that determine the position are orthogonal to the traveling direction of the transport carriage and the traveling direction of the transport carriage.
The position in the direction of travel, the position in the vertical direction at the center of the transport carriage, and the inside of the transport carriage
Four coordinate values consisting of rotation angles with respect to the vertical axis in the center, and the mark member
When the finger is in a position to properly grip the flange portion of the reference jig for position correction
The projection is fixed to the projection position from above the pair of fingers on the plane of the upper plate .

According to the first aspect of the present invention, from the control stop position of the OHT carriage (at this time, the spatial coordinate position of the central portion of the hand portion is X ₀ , Y ₀ , Z ₀ , θ ₀ ), a pair The hand part including the fingers of the hand part descends, and the spatial coordinate position (X _i , Y _i , Z _i , θ _i ) becomes highly accurate data as the shape accuracy of the position correction reference jig is high, and the teaching accuracy is improved as compared with the teaching in the conventional general-purpose carrier.

Further, an operation of a pair of fingers in the hand portion of the OHT carriage is positioned in suitability to the flange position correction reference jig, it can be done efficiently.

Furthermore, since the proper relative positional relationship between the pair of fingers and the flange portion of the position correction reference jig can be easily confirmed visually, the hand portion having the pair of fingers can be efficiently used without requiring much skill. It is possible to perform teaching work for shifting from the stop point on the control of the OHT carriage to a desired position.

The teaching device for an OHT cart according to claim 2 is the teaching device for an OHT cart according to claim 1 , wherein the pair of fingers and the position correcting reference jig are opposed to each other. It is characterized by comprising a deviation display means.
According to this invention , a larger deviation is adjusted in a short time to a smaller deviation of a certain value or less,
Based on a two-step adjustment method in which the remaining fine adjustment is performed by means of a shift display means of the relative position between the faces where the pair of fingers and the position correction reference jig face each other, even if there is a large shift, in a short time, In addition, the alignment operation between the pair of fingers and the position correction jig can be terminated with high accuracy.

The teaching device for an OHT carriage according to claim 3 is the teaching device for an OHT carriage according to claim 2 , wherein the relative position deviation display means is provided in at least one of a traveling direction of the transport carriage and a direction orthogonal thereto. In a suitable place located along, a pair of fingers and a position correcting reference jig, one side is marked with a marking line and the other is marked with a scale line for confirming the position of the marking line. Features.
According to the present invention, the degree of deviation of the relative position between the surfaces of the pair of fingers and the reference jig for position correction that are opposed to each other can be visually confirmed, and the deviation can be adjusted in a short time.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
First, the outline of the drawing will be described. FIG. 1 is a front view showing a main configuration of the positional relationship between the OHT carriage and the position correcting reference jig according to the present invention, and FIG. 2 is a perspective view showing an internal mechanism of the hand unit. 3 is a perspective view showing a driving mechanism of a pair of fingers in the hand portion, FIG. 4 is a configuration diagram of a reference jig for position correction, (A) is a plan view, (B) is a front view, and (C). FIG. 5 is a side view (D) is a bottom view, and FIG. 5 is a schematic view of a principal part showing a specific example of a relative display device for a relative position where a pair of fingers and a position correction reference jig face each other. (B) is a deviation display means in a direction orthogonal to the running direction of the OHT carriage.

In FIG. 1, reference numeral 1 denotes a rail, which is a path connecting several semiconductor processing process control devices and a stocker, and is arranged along the vicinity of the ceiling in the clean room. Reference numeral 2 denotes an OHT cart, the details of which will be described later. A traveling unit 21 for traveling along the rail 1, orthogonal to the traveling direction of the OHT cart 2 with respect to the traveling unit 21. The positioning mechanism 22 is configured to adjust the rotation angle θ with respect to the Y direction and the vertical axis of the central portion, and the hand portion 24 is suspended by a suspension member 23 controlled to be extendable and contractable from the positioning mechanism 22. Reference numerals 24ca and 24cb denote a pair of fingers which are controlled to approach or separate from each other by a mechanism (described later) of the hand portion 24. Reference numeral 3 denotes a mounting table for a process control device or a carrier of a stocker. Reference numeral 4 denotes a kinematic pin that always positions a carrier (semiconductor wafer storage cassette or the like) mounted on the mounting table 3 in a fixed state.

Reference numeral 5 denotes a position correction reference jig as a basic component of the present invention, and the overall shape error including the spatial coordinate position (position determined by each element of X, Y, Z, and θ) of the center of the flange 5a is small. It is extremely small and highly accurate compared to a general-purpose carrier that normally operates. Therefore, the correction values (δX,...) Of spatial coordinate elements from the control stop position of the OHT carriage 2 until the pair of fingers 24ca and 24cb properly grip the flange 5a of the position correction reference jig 5 are obtained. (δY, δZ, δθ) can be obtained with high accuracy as a teaching value.

Reference numeral 6 denotes a manual controller, which can manually operate the movement of each element of the spatial coordinate position (X, Y, Z, θ) of the OHT carriage 2 and the opening / closing operation of the hand unit 24. In the teaching operation of the manual controller 6, first, the OHT carriage 2 reads a stop mark (not shown) on the track and stops at the stop mark position. At this time, the OHT carriage 2 is stopped and each element of the spatial coordinate position stored so far is reset to the spatial coordinate position (X ₀ , Y ₀ , Z ₀ , θ ₀ ). 2 is stored in the built-in controller.
Next, by operating the manual controller 6, the hand unit 25 is visually observed at a position where the flange portion 5 a of the reference jig 5 for position correction set on the mounting table 3 at a proper position is gripped in a desired state. It can be set.
When the positioning of the hand unit 24 is completed in a desired state by the operation of the manual controller 6, the manual controller 6 is operated to transmit a positioning completion signal to the controller of the OHT carriage 2. In response to this signal, the OHT carriage 2 reads the spatial coordinate position (X _i , Y _i , Z _i , θ _i ) after alignment into a built-in controller and stores the stored spatial coordinate position (X ₀ , Y ₀ , Z _0, θ ₀₎ position correction data from the _{(X i -X 0, Y i} -Y 0, Z i -Z 0, to calculate the θ _i -θ _0), stored in the controllers which incorporate.

First, among the elements (X, Y, Z, θ) that specify the spatial coordinates of the central portion of the hand portion 24 in the OHT carriage, the element X in the traveling direction of the OHT carriage 2 is obtained by the traveling control device. The vertical element Z is obtained with a known optical distance sensor.
On the other hand, an internal mechanism of the positioning mechanism 22 for adjusting the rotation angle θ with respect to the Y direction perpendicular to the traveling direction of the OHT carriage 2 and the vertical axis of the central portion will be described with reference to FIG. In FIG. 2, reference numeral 22 c denotes a gear, which is installed so as to be allowed to rotate in the horizontal direction together with the hand portion 24 having a pair of fingers 24 ca and 24 cb. 22da and 22db are rods. A series of tooth portions having the same pitch as that of the gear 22c are formed on opposite surfaces, arranged in parallel to each other, and each tooth portion meshes with the gear 22c. 22ea and 22eb are actuators for controlling the displacement of the longitudinal positions of the rods 22da and 22db, respectively. At this time, the rods 22da and 22db are displaced in the directions of arrows Da and Db, respectively. The gear 22c rotates in the arrow D direction, and the angle θ of the hand portion 24 in the vertical axis direction can be adjusted. Further, when the rods 22da and 22db are moved in the same direction by the same amount, the hand portion 24 can be moved in the Y direction orthogonal to the traveling direction of the OHT carriage 2. Reference numeral 22f denotes a winding / feeding mechanism for the suspension member 23.

Next, referring to FIG. 3, a pair of fingers 24ca and 24cb in the hand portion 24 are driven toward and away from each other when the flange 5a of the reference jig 5 for position correction is gripped and released from this gripped state. To explain. In FIG. 3, 24da and 24db are frames corresponding to the fingers 24ca and 24cb, respectively, and the outer ends of the frames are integrally fixed at predetermined positions on the inner surfaces of the support portions of the fingers 24ca and 24cb, respectively.

The frames 24da and 24db are supported by a guide mechanism (not shown) so as to be movable in the longitudinal direction. Reference numerals 24ea and 24eb denote stopper members which are fixed to the inner ends of the frames 24da and 24db, respectively, and are brought into close proximity to the fingers 24ca and 24cb (appropriate gripping state of the flange 5a of the carrier 5 by the fingers 24ca and 24cb). ) Is regulated.

24f is a ball screw, and the spiral direction with respect to a specific direction is opposite from the central part in the longitudinal direction, and the male screws 24fa and 24fb of equal pitch are formed to reach the support portions at both ends. 24ga and 24gb are power receiving members, and female screws (not shown) that are respectively engaged with the male screws 24fa and 24fb of the ball screw 24f are formed, and these female screws are respectively equidistant from the longitudinal center of the ball screw 24f. It is assumed that the initial setting is performed so that the male screws 24fa and 24fb are positioned. The pair of power receiving members 24ga and 24gb are fixed to the stopper members 24ea and 24eb, respectively.

Next, a support / drive mechanism for the ball screw 24f will be described. In FIG. 3, reference numerals 24ha and 24hb denote support plates which rotatably support both end portions of the ball screw 24f. Reference numeral 24i denotes a substrate which fixes the support plates 24ha and 24hb at predetermined positions, and is provided with a motor 24j for driving the ball screw 24f. The rotating shaft of the motor 24j is connected to the input side of the universal joint 24k. A gear 24m is provided on the output side of the universal joint 24k. Reference numeral 24n denotes a gear that meshes with the gear 24m and receives power from the motor 24j. The gear 24n is fixed to one end of the ball screw 24f and rotates integrally with the ball screw 24f.

  Next, the configuration of the position correction reference jig 5 as an essential component of each invention of the present application will be described with reference to FIG. In FIG. 4, 5b is a bottom plate, 5c and 5d are side plates, and 5e is an upper plate, which are formed with high accuracy. And the connection location in these board members other than these baseplates 5b is connected at right angle by the angle member 5f. 5 g is a groove, and the kinematic pin 4 (see FIG. 1) is engaged with the groove 5, whereby the position correction reference jig 5 is properly positioned on the predetermined mounting table 3 (see FIG. 1). The Reference numeral 5h denotes a pair of handles, which are fixed to the side plates 5c and 5d. After the position correction reference jig 5 is placed on the placement table 3 or after the teaching operation is completed, the position correction reference jig 5 is removed from the placement table 3. Use when removing.

Reference numerals 5i and 5j denote mark members, and the plane of the upper plate 5e when the pair of fingers 24ca and 24cb provided in the hand portion 24 is in a position to properly hold the flange 5a of the reference jig 5 for position correction. On the upper side, the pair of fingers 24ca and 24cb is fixed to a projection position from above.
Spatial coordinate position for properly gripping the flange 5a of the reference jig 5 for position correction from the spatial coordinate position on the control of the hand portion 24 of the carriage 2 by the mark member 5i, 5j from the pair of fingers 24ca, 24cb by the operator. It is possible to accurately teach the correction values up to the control unit of the carriage 2.

At this time, means for further improving efficiency and accuracy in this teaching will be described with reference to FIG. FIG. 5 shows positioning displacement detecting means for properly holding the pair of fingers 24ca and 24cb on the flange 5a of the position correction reference jig 5, which is displayed at an appropriate position on the plane of the upper plate 5e of the position correction reference jig 5. The marking line 7 and the scale line 8 corresponding to the marking line 7 are displayed at appropriate positions of the pair of fingers 24ca and 24cb.
The marking line 7 and the graduation line 8 indicate that when the pair of fingers 24ca and 24cb are in positions where the flange 5a of the reference jig 5 for position correction is properly gripped, the marking line 7 is the center of the graduation line. It is assumed that it is set in advance so as to face the position.

Next, the operation of the embodiments of the present invention will be described as follows.
(1) The OHT carriage 2 reads the stop mark on the track on the mounting table 3 such as the process control device or the stocker, and stops at the stop mark position. At this time, the OHT carriage 2 is stopped, and each element specifying the spatial coordinate position stored so far is reset to the spatial coordinate position (X ₀ , Y ₀ , Z ₀ , θ ₀ ) for control. Store in the built-in controller.
(2) By the operation of the controller 6 by the operator, the spatial coordinate element X based on the travel control function, the spatial coordinate element Z based on a well-known distance detecting means (not shown), and the spatial coordinate elements Y and θ by the mechanism shown in FIG. Thus, the pair of fingers 24ca and 24cb is moved to a position where the flange 5a of the reference jig 5 for position correction is sandwiched with the pair of fingers 24ca and 24cb being kept apart from each other.
(3) The spatial coordinate elements X, Y, and θ are finely displaced in this state where the gripping operation performed by bringing the pair of fingers 24ca and 24cb close to each other is not performed.

(4) Through this process, the operator operates the manual controller 6 to visually match the projection positions of the pair of fingers 24ca and 24cb on the upper surface plate 5e of the position correction reference jig 5 with the mark members 5i and 5j. Let
(5) Further, as shown in FIG. 5, the marking line 7 displayed on the upper surface plate 5e of the reference jig 5 for position correction matches the center position of the scale line 8 displayed on the pair of fingers 24ca and 24cb. Make adjustments as follows.
(6) After this adjustment, the manual controller 6 is operated to transmit an alignment completion signal to the controller of the OHT carriage 2. Upon receiving this signal, the OHT carriage 2 reads the spatial coordinate positions (X _i , Y _i , Z _i , θ _i ) after the alignment into the controller built in the OHT carriage 2.
(7) Correction values (δX, Y, Y _i , Z _i , θ _i ) and the adjusted spatial coordinate positions (X ₀ , Y ₀ , Z ₀ , θ ₀ ) and adjusted spatial coordinate positions (X _i , Y _i , θ _i ) (δY, δZ, δθ) are calculated and stored in the controller built in the OHT carriage, and the teaching is terminated.

A series of actions of the teaching is basically performed for every mounting table 3 and every OHT carriage.
By the way, with the high accuracy of the components of the position correction reference jig 5, the shape accuracy of the position correction reference jig 5 is high, and the correction values (δX, δY, δZ, δθ) are Since the relevant OHT cart 2 and the relevant mounting table 3 have a reference accuracy, even if the carrier operates in transporting a wafer or the like having a lower shape accuracy than the reference jig 5 for position correction, the teaching data The pair of fingers 24ca and 24cb can accurately grasp the flange portion of the carrier.

The mark members 5i and 5j provided on the plane of the upper plate 5e of the position correction reference jig 5 are substituted for displaying the mark on the upper plate 5e of the position correction reference jig 5 without using a separate member. be able to.

  The marking line 7 may be displayed on the finger 24 ca and 24 cb side, and the scale line 8 may be displayed on the surface of the upper plate 5 e of the position correction reference jig 5.

It is a front view which shows the principal part structure of the positional relationship of the OHT cart and position correction reference | standard jig | tool which concerns on this invention. It is a perspective view which shows the internal mechanism of the raising / lowering mechanism of a hand part. It is a perspective view which shows the drive mechanism of a pair of fingers in a hand part. It is a block diagram of the reference jig | tool for position correction | amendment, (A) is a top view, (B) is a front view, (C) is a side view (D) is a bottom view. The principal part schematic diagram which shows the specific example of the shift | offset | difference display means of the relative position which a pair of finger and the position correction reference | standard jig | tool mutually opposes, (A) is the principal part schematic diagram which shows the shift | offset | difference display means of the running direction of the OHT cart (B) is a principal part schematic diagram which shows the shift | offset | difference display means of the direction orthogonal to the running direction of the cart for OHT.

Explanation of symbols

2. OHT carts 24ca, 24cb. Finger 5. Position correction reference jig 2a. Flange 5i, 5j. Mark member 7. Scribing line8. Scale line

Claims (3)

A pair of fingers that grip the flange portion of the carrier or approach and separate from each other so as to release the engagement with the flange portion, and a mechanism that suspends the pair of fingers and the approach / separation control member so as to be movable up and down A transport carriage having a mechanism that travels along a predetermined track, a direction orthogonal to the travel direction, a vertical axis direction in the center portion, and a displacement mechanism in the rotation direction thereof,
And the deviation value between the control position of the transport carriage relative to the mounting table on which the carrier is placed and the predetermined position is obtained individually in advance, and this deviation value is stored as a correction value in the controller for each transport carriage, A carriage for measuring the correction value in the suspension type lifting and lowering conveying apparatus using the correction value for each carriage and each loading table, and having a control means for accessing each loading table of each carriage. Teaching
A display device,
A position correction reference jig having a bottom plate, an upper plate, a flange portion, and a mark member ;
The position correction reference jig was placed into a normal position on the mounting table, and the spatial coordinate position of the transport carriage when said flange portion and the pair of finger was gripped in a desired state, set in advance Measure the difference from the spatial coordinate position on the control as a correction value ,
The elements that determine the spatial coordinate position are the position in the travel direction of the transport carriage, the travel of the transport carriage.
A position in a direction orthogonal to the row direction, a position in a vertical direction at the center of the transport carriage, and the
4 coordinate values consisting of the rotation angle with respect to the vertical axis at the center of the transport carriage,
The mark member, and the pair of fingers are connected to the flange portion of the reference jig for position correction.
When in the normal gripping position, above the pair of fingers on the plane of the upper plate
A conveying cart teaching device in a suspended lifting and lowering conveying device characterized by being fixed at the projection position . The teaching apparatus of the conveyance carriage in the suspension type raising / lowering conveyance apparatus of Claim 1 provided with the shift | offset | difference display means of the relative position of the surfaces where the said pair of fingers and the said position correction reference | standard jig | tool mutually oppose. In a suitable position where the relative position deviation display means is located along at least one of the traveling direction of the transport carriage and the direction orthogonal thereto, the pair of fingers and the reference jig for position correction have a scribing line on one side, The teaching device of the transport carriage in the suspended lift transport apparatus according to claim 2 , wherein a scale line for confirming the position of the marking line is displayed on the other side.

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