JP2019132445A - Humidity generation device - Google Patents

Abstract

To provide a humidity generation device capable of maintaining reliability for a relatively long period while generating target humidity with relatively high accuracy in a relatively wide temperature zone.SOLUTION: A humidity generation device 100 includes: a water removal section 3; a steam flow rate measurement section 5; a first flow rate measurement section 23; a first output switching section 31; and a calibration unit U2 for calibrating the steam flow rate measurement section 5. The water removal section 3 heats saturated wet steam, generates superheated steam, and removes moisture containing in the saturated wet steam. The steam flow rate measurement section 5 measures flow rate of the superheated steam. The first flow rate measurement section 23 measures flow rate of first air. The first output switching section 31 outputs only the superheated steam passing the steam flow rate measurement section 5 or mixes the superheated steam passing the steam flow rate measurement section 5 and the first air passing the first flow rate measurement section 23, and outputs mixed air that the superheated steam and the first air are mixed.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a humidity generator.

  The humidity generator described in Patent Document 1 employs a shunt method. That is, in the humidity generator, dry air is divided into two flow paths. One dry air is led to a saturation tank containing water controlled to a predetermined temperature. As a result, the dry air is bubbled in water or brought into contact with the water surface to become saturated air and led to the target humidity generation tank. In addition, the other dry air is directly led to the target humidity generation tank. As a result, dry air and saturated air are mixed and introduced into the target humidity generation tank, so that the target humidity can be realized.

  The relative humidity H realized in the target humidity generation tank is represented by H = 100γ · Pt / (Ps− (1−γ) es). “Γ” indicates a diversion ratio, “Pt” indicates the total pressure of the gas in the target humidity generation tank, “Ps” indicates the total pressure of the gas in the saturation tank, and “es” indicates the saturated water vapor pressure in the gas in the saturation tank. The diversion ratio γ is obtained by a ratio of values obtained by measuring each flow rate after the diversion of the dry air with a flow meter.

Japanese Patent Application Laid-Open No. 5-71776

  However, the humidity generator described in Patent Document 1 uses a saturation tank. Therefore, in order to obtain a high-humidity gas in a state close to superheated steam that does not contain air, the amount of heat supplied to the saturation tank increases, or the entire apparatus increases in size for temperature control for preventing condensation in the saturation tank. If the amount of bubbles from the saturation tank increases, the flow rate may become unstable. As a result, the humidity generator is not necessarily suitable as a device that generates highly accurate target humidity at a high dew point temperature (for example, a dew point temperature of 95 ° C. or higher and 100 ° C. or lower at atmospheric pressure). That is, it may be difficult to generate the target humidity with relatively high accuracy in a relatively wide temperature range. The relatively wide temperature zone is, for example, a temperature zone having a dew point temperature of 25 ° C. (equivalent to room temperature) or higher and a dew point temperature of 100 ° C. or lower at atmospheric pressure.

  In addition, when a relatively high humidity is generated at a relatively high temperature, there is a possibility that the accuracy of the humidity generator is lowered due to a relatively long period of use. That is, there is a possibility that the reliability of the humidity generator cannot be maintained for a relatively long period of time.

  An object of the present invention is to provide a humidity generator that can maintain the reliability for a relatively long period of time while generating the target humidity with a relatively high accuracy in a relatively wide temperature range.

  According to one aspect of the present invention, the humidity generator includes a water removing unit, a steam flow rate measuring unit, a first flow rate measuring unit, a first output switching unit, and a calibration unit for calibrating the steam flow rate measuring unit. With. The water removal unit heats the saturated wet steam to generate superheated steam, and removes water contained in the saturated wet steam. The steam flow rate measuring unit measures the flow rate of superheated steam. The first flow rate measuring unit measures the flow rate of the first air. The first output switching unit outputs only the superheated steam that has passed through the steam flow rate measurement unit, or the superheated steam that has passed through the steam flow rate measurement unit and the first flow rate measurement unit that has passed through the first flow rate measurement unit. 1 air is mixed, and mixed air in which the superheated steam and the first air are mixed is output. The calibration unit includes a condensing unit and a measuring unit. The condensing unit condenses the superheated steam output from the first output switching unit, and returns the superheated steam to water. The measurement unit measures the weight or volume of the water obtained by condensation of the superheated steam.

  It is preferable that the humidity generator of the present invention further includes a first temperature control unit. The first temperature control unit preferably heats the first air that has passed through the first flow rate measurement unit. The first output switching unit outputs only the superheated steam that has passed through the steam flow rate measuring unit, or mixes the superheated steam that has passed through the steam flow rate measuring unit and the heated first air. And it is preferable to output the said mixed air.

  In the humidity generator according to the aspect of the invention, it is preferable that the condensing unit condenses water vapor contained in the mixed air output from the first output switching unit to return the water vapor to water. It is preferable that the calibration unit further includes a steam / water separation unit and a second flow rate measurement unit. The steam-water separation unit preferably separates moisture contained in the mixed air from the mixed air. The second flow rate measuring unit preferably measures the flow rate of the second air that is the mixed air after the condensation of the water vapor and after the separation of the water. It is preferable that the measurement unit measures the weight or volume of the water obtained by condensation of the water vapor and the water separated from the mixed air.

  In the humidity generator according to the aspect of the invention, it is preferable that the condensing unit condenses water vapor contained in the mixed air output from the first output switching unit to return the water vapor to water. It is preferable that the calibration unit further includes an air / water separation unit, a second temperature control unit, a humidity measurement unit, a temperature measurement unit, and a second flow rate measurement unit. The steam-water separation unit preferably separates moisture contained in the mixed air from the mixed air. The second temperature controller preferably heats the second air, which is the mixed air after the condensation of the water vapor and after the separation of the water. The humidity measuring unit preferably measures the humidity of the heated second air. The temperature measuring unit preferably measures the temperature of the heated second air. The second flow rate measuring unit preferably measures the flow rate of the heated second air. It is preferable that the measurement unit measures the weight or volume of the water obtained by condensation of the water vapor and the water separated from the mixed air.

  The humidity generator of the present invention preferably further includes a flow rate measuring unit. The flow rate measuring unit preferably measures the flow rate of the superheated steam or the mixed air output from the first output switching unit.

  In the humidity generator of the present invention, it is preferable that the water removal unit includes a steam / water separation unit and a heating unit. The steam-water separator preferably separates moisture contained in the saturated wet steam from the saturated wet steam. The heating unit preferably heats the saturated wet steam after the separation of the water to generate the superheated steam.

  The humidity generator of the present invention preferably further includes a chamber and a second output switching unit. The second output switching unit preferably outputs the gas output from the first output switching unit toward the chamber or outputs toward the calibration unit. The gas output from the first output switching unit is preferably the superheated steam or the mixed air. Preferably, the chamber contains the gas output from the first output switching unit and the second output switching unit.

  According to the present invention, it is possible to provide a humidity generator that can maintain the reliability for a relatively long period of time while generating the target humidity with a relatively high accuracy in a relatively wide temperature range.

It is a figure which shows the humidity generation system which concerns on Embodiment 1 of this invention. It is a figure which shows the utilization chart of the humid air which can generate | occur | produce with the humidity generation system which concerns on Embodiment 1, and the humid air of high temperature high humidity. It is a figure which shows the calibration unit of the humidity generation system which concerns on Embodiment 1. FIG. It is a figure which shows the calibration unit of the humidity generation system which concerns on Embodiment 2 of this invention. It is a figure which shows the calibration unit of the humidity generation system which concerns on Embodiment 3 of this invention. It is a figure which shows the humidity generation system which concerns on Embodiment 4 of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals and description thereof is not repeated.

(Embodiment 1)
With reference to FIGS. 1-3, the humidity generation system 500 which concerns on Embodiment 1 of this invention is demonstrated. FIG. 1 is a diagram illustrating a humidity generation system 500 according to the first embodiment.

  As shown in FIG. 1, the humidity generation system 500 includes a humidity generation device 100, a boiler 200, and an air supply device 300. The boiler 200 generates saturated wet steam by heating water, and supplies the saturated wet steam to the humidity generator 100. Saturated wet steam is saturated steam containing moisture (for example, minute water droplets). Saturated steam is water vapor having a boiling point temperature (for example, 100 ° C. at atmospheric pressure). The boiling point temperature indicates the boiling point temperature of water. The boiling point temperature varies depending on the atmospheric pressure. The saturated steam that does not contain moisture is saturated dry steam.

  The air supply device 300 supplies air in the room where the humidity generation system 500 is installed to the humidity generation device 100. The air supply device 300 is, for example, a compressor. The humidity generator 100 mixes superheated steam generated from saturated wet steam and air to generate mixed air having target humidity.

  In this specification, unless otherwise specified, the mixed air is humid air. Humid air is a gas in which air and water vapor are mixed. And the gas which air and water vapor mixed irrespective of the ratio of water vapor is moist air. Therefore, not only air containing water vapor but also water vapor containing air is moist air. Moreover, generating the mixed air having the target humidity is equivalent to generating the target humidity. “Target humidity” is represented by, for example, dew point temperature, absolute humidity, relative humidity, or water vapor mole fraction.

  Note that the air supplied by the air supply device 300 is wet air or dry air. Therefore, the air supplied by the air supply device 300 is described as “first air AR1” and is distinguished from the humid air that is the mixed air generated by the humidity generator 100. Dry air is air that does not contain water vapor.

  The humidity generator 100 includes a humidity generation unit U1, a calibration unit U2, and a control unit U3. The humidity generation unit U1 generates mixed air obtained by mixing superheated steam and the first air AR1, or superheated steam. Superheated steam is steam at a temperature higher than the boiling point of water. Superheated steam does not contain air.

  The humidity generation unit U1 includes a steam flow rate adjusting unit F1, a steam processing unit 1, an air flow rate adjusting unit F2, an air processing unit 21, a first output switching unit 31, a second output switching unit 41, and a temperature control. A unit 51, a chamber 53, a pressure measurement unit 55, a temperature measurement unit 57, a pressure adjustment unit 59, and a fan 61 are included.

  The steam flow rate adjusting unit F1 adjusts the flow rate of the saturated wet steam supplied from the boiler 200 and supplies it to the steam processing unit 1. The steam flow rate adjusting unit F1 includes a valve VB1. The steam flow rate adjusting unit F1 adjusts the flow rate of the saturated wet steam according to the degree to which the valve VB1 is opened or closed.

  The steam processing unit 1 heats the saturated wet steam supplied from the boiler 200 via the steam flow rate adjusting unit F1 to generate superheated steam, and removes moisture (for example, minute water droplets) contained in the saturated wet steam. Measure the flow rate of superheated steam. In the present specification, “moisture” refers to water that is a liquid.

  Specifically, the steam processing unit 1 includes a water removing unit 3 and a steam flow rate measuring unit 5. The steam flow rate measuring unit 5 is disposed on the downstream side of the water removing unit 3. The water removing unit 3 heats the saturated wet steam supplied from the boiler 200 to generate superheated steam, and removes water contained in the saturated wet steam. The water removal unit 3 includes a steam / water separation unit 7 and a heating unit 9.

  The steam / water separator 7 separates moisture contained in the saturated wet steam from the saturated wet steam. For example, the steam separator 7 separates moisture from saturated wet steam using centrifugal force or gravity. The heating unit 9 heats the saturated wet steam after the moisture separation by the steam separator 7 to a temperature higher than the boiling point temperature of water (for example, 150 ° C. at atmospheric pressure) to generate superheated steam. Therefore, the moisture that could not be separated by the steam / water separator 7 evaporates from the saturated wet steam. The heating unit 9 is, for example, a heater.

  According to the first embodiment, when the water removing unit 3 has only the steam-water separating unit 7 or when the water removing unit 3 has only the heating unit 9, the moisture contained in the saturated wet steam is reduced in a short time. Can be removed. Further, since the steam and water are separated before the heating by the heating unit 9, the power supplied to the heating unit 9 can be reduced and the capacity of the heating unit 9 (for example, the heater capacity) can be reduced.

  Moreover, since the heating unit 9 heats the saturated wet steam to a temperature higher than the boiling point temperature of water, the saturated wet steam becomes superheated steam. Therefore, according to Embodiment 1, superheated steam can be easily generated by the heating unit 9.

  Instead of the valve VB1 or in addition to the valve VB1, a valve may be disposed between the steam / water separation unit 7 and the heating unit 9. Then, the flow rate of the saturated wet steam is adjusted according to the degree of opening or closing of the valve.

  The steam flow rate measuring unit 5 measures the flow rate of superheated steam generated by the heating unit 9. Since the superheated steam does not contain moisture, the steam flow rate measuring unit 5 can measure the flow rate with high accuracy. The steam flow rate measuring unit 5 is, for example, a flow meter that measures a volume flow rate or a mass flow rate. In this specification, “flow rate” indicates the amount of a substance that moves per unit time. “Amount of substance” is, for example, the volume, mass, or molar quantity of a substance. “Volume flow rate” indicates the volume of a substance that moves per unit time. “Mass flow rate” indicates the mass of a substance that moves per unit time. “Molar flow rate” indicates the molar amount of a substance that moves per unit time.

  In the first embodiment, the steam flow rate measuring unit 5 is an orifice flow meter. Therefore, the steam flow rate measuring unit 5 can measure the flow rate of the superheated steam having a relatively small flow rate. Specifically, the steam flow rate measurement unit 5 is a differential pressure type flow meter, and includes an orifice (not shown), a pressure measurement unit 11, a temperature measurement unit 13, and a differential pressure measurement unit 15. The pressure measuring unit 11 measures the primary pressure P1 of superheated steam. The pressure measuring unit 11 is, for example, a pressure gauge. The temperature measurement unit 13 is attached to the upstream side of the orifice and measures the temperature T1 of the superheated steam. The temperature measurement unit 13 is, for example, a temperature sensor (for example, a thermocouple). The differential pressure measurement unit 15 measures the differential pressure of superheated steam before and after the throttle portion of the orifice. The differential pressure measurement unit 15 is, for example, a pressure sensor.

The value of the primary pressure P1 measured by the pressure measuring unit 11, the value of the temperature T1 measured by the temperature measuring unit 13, and the value of the differential pressure ΔP measured by the differential pressure measuring unit 15 are output to the control unit U3. . The control unit U3 calculates the molar flow rate n _steam (mol / s) of the superheated steam based on the formula (1) using the primary side pressure P1, the temperature T1, and the differential pressure ΔP.

…（１）

... (1)

In Expression (1), “C” is a flow rate count, “ε” is an expansion correction coefficient of superheated steam, “A” is a cross-sectional area (m ² ) of the throttle portion, and “ΔP” is a differential pressure (Pa ), “Ρ _steam ” indicates the density (kg / m ³ ) of superheated steam in the measurement section upstream of the throttle, and “M _H2O ” indicates the molar mass of water (kg / mol). Here, the flow coefficient C is constant in a range where the Reynolds number is a certain value or more. In addition, the expansion correction coefficient ε is expressed by a linear expression of ΔP / P1, and is obtained by experiments. Therefore, in the first embodiment, the product of the flow coefficient C and the expansion correction coefficient ε is obtained as an outflow coefficient K _steam by experiments. The density ρ _steam is calculated based on the temperature T1 and the primary pressure P1.

  The air flow rate adjustment unit F <b> 2 adjusts the flow rate of the first air AR <b> 1 that is the air supplied by the air supply device 300, and supplies it to the air processing unit 21. The air flow rate adjusting unit F2 includes a valve VB2. The air flow rate adjusting unit F2 adjusts the flow rate of the first air AR1 according to the degree to which the valve VB2 is opened or closed.

  The air processing unit 21 measures the flow rate of the first air AR1 supplied from the air supply device 300 via the air flow rate adjusting unit F2, and heats the first air AR1 whose flow rate is measured.

  Specifically, the air treatment unit 21 includes a first flow rate measurement unit 23 and a first temperature control unit 25. The first flow rate measurement unit 23 is disposed on the upstream side of the first temperature control unit 25. The first flow rate measurement unit 23 measures the flow rate of the first air AR1. The first flow rate measurement unit 23 outputs the value of the flow rate of the first air AR1 to the control unit U3. The first flow rate measurement unit 23 is, for example, a flow meter that measures a volume flow rate or a mass flow rate. The first flow rate measuring unit 23 includes a temperature measuring unit (not shown) such as a temperature sensor that measures the temperature of the first air AR1, and a pressure measuring unit (not shown) such as a pressure sensor that measures the pressure of the first air AR1. And the like. The first temperature control unit 25 heats the first air AR1 that has passed through the first flow rate measurement unit 23. The first temperature control unit 25 is, for example, a heater.

  Specifically, the first temperature control unit 25 heats the first air AR1 to a temperature (for example, 200 ° C.) higher than the boiling point temperature of water. Therefore, according to the first embodiment, when the superheated steam generated by the steam processing unit 1 and the first air AR1 are mixed, it is possible to suppress the steam contained in the superheated steam from returning to water by the first air AR1. Further, in order to heat the first air AR1 after measuring the flow rate of the first air AR1, the first flow rate measurement unit 23 measures the flow rate of the first air AR1 at room temperature. As a result, the durability of the first flow rate measurement unit 23 can be improved and the inexpensive first flow rate measurement unit 23 can be used as compared with the case of measuring the high temperature first air AR1.

  In addition, the air processing part 21 does not need to have the 1st temperature control part 25, when the superheated steam which the steam processing part 1 produced | generated satisfies predetermined conditions. The predetermined condition is that the superheated steam has a temperature and a flow rate at which condensation does not occur after the superheated steam and the first air AR1 are mixed.

  The first output switching unit 31 outputs only the superheated steam that has passed through the steam flow rate measuring unit 5, or the superheated steam that has passed through the steam flow rate measuring unit 5 and the first air that has passed through the first flow rate measuring unit 23. AR1 is mixed and mixed air in which superheated steam and first air AR1 are mixed is output. Therefore, superheated steam or mixed air can be supplied to the chamber 53 in accordance with the intended use of the humidity generator 100.

  Specifically, the first output switching unit 31 outputs only the superheated steam that has passed through the steam flow rate measuring unit 5, or the superheated steam that has passed through the steam flow rate measuring unit 5 and the first temperature control unit 25. The heated first air AR1 is mixed to output mixed air in which superheated steam and first air AR1 are mixed.

  The second output switching unit 41 outputs the gas output from the first output switching unit 31 toward the chamber 53 or outputs toward the calibration unit U2. The gas output from the first output switching unit 31 is superheated steam or mixed air.

  Therefore, according to the first embodiment, when the second output switching unit 41 outputs the gas output from the first output switching unit 31 toward the chamber 53, superheated steam is used in accordance with the purpose of use of the humidity generator 100. Alternatively, mixed air can be supplied to the chamber 53. On the other hand, when the second output switching unit 41 outputs the superheated steam output from the first output switching unit 31 toward the calibration unit U2, the steam flow rate measuring unit 5 can be calibrated.

  Specifically, the humidity generation unit U1 further includes a pipe PP1, a pipe PP2, and a pipe PP3. The pipe PP1 extends from the steam flow rate measuring unit 5 to the calibration unit U2. The pipe PP2 extends from the first temperature control unit 25 to the pipe PP1, and is connected to the pipe PP1. The pipe PP3 is connected to the pipe PP1 and extends from the pipe PP1 to the chamber 53. The first output switching unit 31 includes a valve 33. The valve 33 is provided in the pipe PP2. The second output switching unit 41 includes a valve 43 and a valve 45. The valve 43 is provided in the pipe PP3, and the valve 45 is provided in the pipe PP1.

  When the valve 33 is closed, only the superheated steam that has passed through the steam flow rate measuring unit 5 is supplied to the pipe PP1. On the other hand, when the valve 33 is opened, the superheated steam that has passed through the steam flow rate measuring unit 5 and the first air AR1 heated by the first temperature control unit 25 are mixed, and the mixed air is supplied to the pipe PP1.

  When only the superheated steam is supplied to the pipe PP1 and the valve 43 is opened and the valve 45 is closed, only the superheated steam is supplied to the pipe PP3 and supplied to the chamber 53. On the other hand, when the mixed air is supplied to the pipe PP1 and the valve 43 is opened and the valve 45 is closed, the mixed air is supplied to the pipe PP3 and supplied to the chamber 53.

  When only the superheated steam is supplied to the pipe PP1, when the valve 43 is closed and the valve 45 is opened, only the superheated steam is supplied to the calibration unit U2 through the pipe PP1.

  The temperature adjustment unit 51 heats the superheated steam or mixed air output from the first output switching unit 31 and the second output switching unit 41 and supplies the superheated steam or mixed air to the chamber 53. That is, the temperature adjustment unit 51 adjusts the temperature of superheated steam or mixed air accommodated in the chamber 53. The temperature adjustment unit 51 may be disposed outside the chamber 53 or may be disposed inside the chamber 53. The temperature adjustment unit 51 is, for example, a heater.

  For example, the temperature control unit 51 further heats the superheated steam or mixed air, and supplies the heated superheated steam or mixed air to the chamber 53. Therefore, according to the first embodiment, the temperature adjusting unit 51 can easily generate high-temperature superheated steam or high-temperature mixed air.

  The chamber 53 stores the gas output from the first output switching unit 31 and the second output switching unit 41. Specifically, the chamber 53 accommodates superheated steam or mixed air output from the first output switching unit 31 and the second output switching unit 41. The chamber 53 is, for example, a test tank. In the chamber 53, for example, calibration of a hygrometer or various tests (for example, material tests) are performed.

  The pressure adjustment unit 59 adjusts the pressure of superheated steam or mixed air accommodated in the chamber 53. The pressure adjustment unit 59 includes, for example, a valve, and adjusts the pressure of superheated steam or mixed air accommodated in the chamber 53 according to the degree to which the valve is opened or closed.

  The pressure measurement unit 55 measures the pressure of superheated steam or mixed air in the chamber 53 and outputs the pressure value to the control unit U3. The pressure measurement unit 55 is, for example, a pressure gauge. The temperature measuring unit 57 measures the temperature of superheated steam or mixed air in the chamber 53 and outputs the temperature value to the control unit U3. The temperature measurement unit 57 is, for example, a temperature sensor. The fan 61 sucks and discharges superheated steam or mixed air.

  The control unit U3 has a flow rate of superheated steam measured by the steam flow rate measurement unit 5 (hereinafter referred to as “flow rate FA”) and a flow rate of the first air AR1 measured by the first flow rate measurement unit 23 (hereinafter referred to as “flow rate FA”). The humidity of the mixed air supplied to the chamber 53 is calculated based on “the flow rate FB”.

In the first embodiment, the control unit U3 calculates a water vapor mole fraction x _gen (mol / mol) representing the humidity of the mixed air supplied to the chamber 53 based on the formula (2).

…（２）

... (2)

In Equation (2), “n _air ” is the molar flow rate (mol / s) of the first air AR1, “n _steam ” is the molar flow rate (mol / s) of superheated steam, and “x _air ” is the first air AR1. The water vapor mole fraction (mol / mol) is shown. The molar flow rate n _air of the first air AR1 is calculated based on the volume flow rate or mass flow rate of the first air AR1 measured by the first flow rate measurement unit 23. The molar flow rate n _steam of the superheated _steam is calculated according to the formula (1) based on the measurement result of the steam flow rate measuring unit 5. The water vapor molar fraction x _air of the first air AR1 is calculated by the control unit U3 based on the humidity of the first air AR1. The humidity of the first air AR1 is measured by a hygrometer (not shown).

According to the first embodiment, the humidity generator 100 can supply the chamber 53 with mixed air having a water vapor molar fraction x _gen . That is, the humidity generator 100 can generate the target humidity represented by the water vapor mole fraction x _gen in the chamber 53.

  The control unit U3 controls the humidity generation unit U1 and the calibration unit U2. Specifically, the control unit U3 includes a steam flow rate adjustment unit F1, a water removal unit 3, a steam flow rate measurement unit 5, an air flow rate adjustment unit F2, a first flow rate measurement unit 23, a first temperature control unit 25, and a first output. The switching unit 31, the second output switching unit 41, the temperature adjustment unit 51, the pressure adjustment unit 59, and the fan 61 are controlled.

  The control unit U3 is a computer, and includes a processor such as a CPU (Central Processing Unit) and a storage device. The storage device stores data and a computer program. The storage device includes a main storage device such as a semiconductor memory and an auxiliary storage device such as a semiconductor memory and / or a hard disk drive. The processor of the control unit U3 executes a computer program stored in the storage device of the control unit U3 to control the humidity generation unit U1 and the calibration unit U2.

  As described above with reference to FIG. 1, according to the first embodiment, the humidity generator 100 generates mixed air or superheated steam without having a saturation tank used in the diversion method. Therefore, there are problems such as an increase in the amount of heat supplied to the saturation tank, an increase in the size of the temperature management device for preventing condensation in the saturation tank, and an unstable flow rate due to an increase in the amount of bubbles from the saturation tank. do not do. As a result, the target humidity can be generated with relatively high accuracy in a relatively wide temperature range. For example, not only in a temperature range where the dew point temperature is 25 ° C. (equivalent to room temperature) or more and 95 ° C. or less, but particularly in the temperature range on the high temperature side, that is, in the temperature range where the dew point temperature is 95 ° C. or more and dew point temperature is 100 ° C. or less However, the target humidity can be generated with relatively high accuracy. For example, in an environment having a pressure higher than atmospheric pressure, the target humidity can be generated with relatively high accuracy in a temperature range of a dew point temperature higher than 100 ° C.

  Moreover, according to Embodiment 1, since the humidity generator 100 does not have a saturation tank, the humidity generator 100 can be reduced in size.

  Further, according to the first embodiment, the flow rate of the superheated steam is adjusted by the steam flow rate adjusting unit F1, and the flow rate of the first air AR1 is adjusted by the air flow rate adjusting unit F2, so that the mixed air supplied to the chamber 53 is adjusted. Humidity can be adjusted easily. That is, the target humidity can be set easily.

  Further, according to the first embodiment, the temperature adjustment unit 51 and / or the pressure adjustment unit 59 adjusts the temperature and / or pressure in the chamber 53, so that the mixed air has an arbitrary relative humidity and / or dew point temperature. Can be generated.

  Furthermore, according to the first embodiment, the temperature adjusting unit 51 and / or the pressure adjusting unit 59 adjust the temperature and / or pressure in the chamber 53 to generate superheated steam having a desired temperature and a desired pressure. it can.

  Furthermore, according to the first embodiment, since the target humidity can be generated with relatively high accuracy, the humidity generator 100 is suitable for generating the humidity standard. The humidity standard is a humidity that serves as a standard for confirming the measurement value of the humidity measuring device. Conventionally, humidity adjustment (adjustment of water vapor flow rate) has been performed by empirical operation. However, by preparing a humidity standard using the humidity generator 100, the accuracy (uncertainty) of the humidity measuring device can be clarified. In addition, the meaning of humidity above the boiling point of water is arranged from an engineering point of view, and the state of superheated steam and humid air on the utilization chart of superheated steam and high-temperature and high-humidity humid air (Fig. 2 described later) Can be quantified. As a result, it can be expected that the technology for utilizing gases in a wide temperature range and humidity range, which has been used empirically in various fields of use, is further advanced. “Various fields of application” are, for example, the fields of measurement engineering, thermal engineering, equipment engineering, and chemical engineering related to humidity and water vapor flow, and the fields of food engineering, agricultural engineering, material engineering, and drying engineering. Furthermore, the humidity generator 100 can contribute to energy saving (for example, reduction of the amount of steam used or heat recovery) of various processing apparatuses.

  Next, with reference to FIG. 2, superheated steam and high-temperature and high-humidity humid air will be described. FIG. 2 is a diagram showing a utilization chart of superheated steam and high-temperature and high-humidity humid air. In FIG. 2, the horizontal axis indicates the temperature T from 0 ° C. to 250 ° C., and the vertical axis indicates the water vapor partial pressure Ps (kPa).

  As shown in FIG. 2, the utilization chart shows a state of only steam at 100 ° C. or higher (atmospheric pressure = steam partial pressure), that is, a state of superheated steam. For atmospheric superheated steam (top of usage chart), the dew point temperature is 100 ° C. The usage chart is created based on an air diagram generally used in the field of air conditioning. A frame G indicated by a broken line indicates a region indicated by a general air diagram. In the usage chart, for example, the dew point temperature of the humid air at point A is temperature C, and the wet bulb temperature of the humid air at point A is temperature B. The usage chart includes examples of gas names. Names surrounded by broken lines indicate common names.

  In the usage chart, the realizable humidity (water vapor partial pressure) region is greatly expanded as the temperature increases. The humidity generator 100 can generate superheated steam and wet air in a wide temperature range shown in the usage chart.

  Next, the calibration unit U2 will be described with reference to FIGS. The calibration unit U2 corresponds to an example of a “calibration unit”. As shown in FIG. 1, the calibration unit U <b> 2 is a unit for calibrating the steam flow rate measuring unit 5.

  FIG. 3 is a diagram showing the calibration unit U2. As shown in FIG. 3, the calibration unit U <b> 2 includes a condensing unit 71 and a measuring unit 73. The calibration unit U2 may include a temperature measurement unit 77.

  The condensing unit 71 condenses the superheated steam output from the humidity generation unit U1 (specifically, the first output switching unit 31 and the second output switching unit 41) and returns the superheated steam to water. That is, when the valve 33 and the valve 43 are closed and the valve 45 is opened, the condensing unit 71 condenses the superheated steam and returns the superheated steam to water.

  Specifically, the condensing unit 71 includes a heat exchanger having a cooling pipe 75 through which cooling water passes. And the condensation part 71 cools superheated steam with the cooling pipe 75, and returns superheated steam to water. The temperature measuring unit 77 measures the temperature of the surface of the cooling pipe 75 and outputs the temperature value to the control unit U3. The temperature measuring unit 77 is, for example, a temperature sensor.

  The measuring unit 73 measures the weight of water obtained by condensation of superheated steam. Specifically, the measurement unit 73 includes a storage unit 81 and a weight measurement unit 83. The accommodating part 81 accommodates the water obtained by condensation of superheated steam. The accommodating part 81 is a container, for example. The weight measuring unit 83 measures the weight of water stored in the storage unit 81. The weight measuring unit 83 is, for example, an electronic balance. The weight measuring unit 83 outputs the value of the weight of water to the control unit U3 at predetermined time intervals.

  The control unit U3 stores the value of the weight of water output at predetermined time intervals. And control unit U3 calculates the variation | change_quantity of the weight of the water per unit time based on the value of the stored weight of the water. The amount of change in the weight of water per unit time indicates the mass flow rate M1 of superheated steam.

  Then, the control unit U3 calibrates the steam flow rate measuring unit 5 based on the mass flow rate M1 of superheated steam. Therefore, according to the first embodiment, even when a relatively high target humidity is generated at a relatively high temperature, it is possible to suppress the accuracy of the steam flow rate measuring unit 5 from being lowered due to a relatively long period of use. That is, the reliability of the humidity generator 100 (humidity generation unit U1) can be maintained over a relatively long period.

  In particular, the accuracy of the steam flow rate measurement unit 5 that measures the flow rate of the high-temperature superheated steam is likely to be lowered by long-term use, as compared with the first flow rate measurement unit 23 that measures the flow rate of the first air AR1. Therefore, calibrating the steam flow rate measuring unit 5 is particularly effective for maintaining the reliability of the humidity generator 100.

  Specifically, the control unit U3 calibrates the steam flow rate measuring unit 5 based on the mass flow rate M1 of superheated steam and the equation (1).

That is, the control unit U3 converts the mass flow rate M1 of superheated steam into a molar flow rate of superheated steam. The molar flow rate of superheated steam corresponds to the molar flow rate n _steam of the formula (1). Then, the control unit U3 calculates the outflow coefficient K _steam based on the molar flow rate n _steam , the cross-sectional area A, the differential pressure ΔP, the density ρ _steam, and the molar mass M _H2O based on the equation (1).

The control unit U3 calculates the outflow coefficient K _steam for each different value of ΔP / P1 when ΔP / P1 is changed at a predetermined interval with the temperature T1 kept constant. The control unit U3 represents the outflow coefficient K _steam as a linear function of ΔP / P1. For example, K _steam = −Q1 × (ΔP / P1) + Q2. “Q1” and “Q2” are constants.

According to the first embodiment, the steam flow rate measuring unit 5 can be calibrated with high accuracy by determining the outflow coefficient K _steam based on the mass flow rate M1 of superheated steam.

(Embodiment 2)
With reference to FIG.1 and FIG.4, the humidity generation system 500 which concerns on Embodiment 2 of this invention is demonstrated. The second embodiment is mainly different from the first embodiment in that the humidity generation system 500 according to the second embodiment includes a calibration unit U2A for calibration of humidity in addition to the calibration of the steam flow rate measuring unit 5. Hereinafter, the points of the second embodiment different from the first embodiment will be mainly described.

  FIG. 4 is a diagram illustrating the humidity generator 100 of the humidity generation system 500 according to the second embodiment. As shown in FIG. 4, the humidity generator 100 according to the second embodiment includes a calibration unit U2A instead of the calibration unit U2 according to the first embodiment. The calibration unit U2A corresponds to an example of a “calibration unit”. The calibration unit U2A is a unit for calibrating the steam flow rate measuring unit 5.

  The calibration unit U2A further includes an extraction unit 85, a second flow rate measurement unit 87, and a fan 89 in addition to the configuration of the calibration unit U2 according to the first embodiment. The condensing unit 71 further includes a steam / water separating unit 79 in addition to the configuration of the condensing unit 71 according to the first embodiment.

  The operations of the condensing unit 71, the measuring unit 73, and the control unit U3 when calibrating the steam flow rate measuring unit 5 are the same as those in the first embodiment.

  When the humidity is calibrated, the calibration unit U2A operates as follows. That is, as shown in FIGS. 1 and 4, the condensing unit 71 generates water vapor contained in the mixed air output from the humidity generation unit U <b> 1 (specifically, the first output switching unit 31 and the second output switching unit 41). Condensate and return water vapor to water. That is, when the valve 33 is opened, the valve 43 is closed, and the valve 45 is opened, the condensing unit 71 condenses the water vapor contained in the mixed air and returns the water vapor to the water.

  The steam-water separation unit 79 separates moisture contained in the mixed air from the mixed air. For example, the air / water separator 79 separates moisture from the mixed air using centrifugal force or gravity.

  The measuring unit 73 measures the weight of water obtained by condensation of water vapor and the weight of water separated from the mixed air.

  Specifically, the storage unit 81 of the measurement unit 73 stores water obtained by condensation of water vapor and moisture separated from the mixed air. The weight measuring unit 83 measures the weight of water and moisture stored in the storage unit 81. Hereinafter, water and moisture stored in the storage unit 81 are referred to as “water W”. The weight measuring unit 83 outputs the value of the weight of the water W to the control unit U3 at predetermined time intervals.

  The control unit U3 stores the value of the weight of the water W output at predetermined time intervals. Then, the control unit U3 calculates the amount of change in the weight of the water W per unit time based on the stored value of the weight of the water W. The amount of change in the weight of water W per unit time indicates the mass flow rate of water vapor (hereinafter referred to as “mass flow rate FL1”) contained in the mixed air.

  The extraction unit 85 extracts the second air (hereinafter referred to as “second air AR2”) from the condensing unit 71. The second air AR2 is mixed air after condensation of water vapor and separation of moisture. Specifically, the extraction unit 85 includes a valve 91, and extracts the second air AR2 from the condensing unit 71 by opening the valve 91. The temperature measuring unit 77 measures the temperature of the surface of the cooling pipe 75 and outputs the temperature value to the control unit U3. It can be considered that the temperature of the surface of the cooling pipe 75 is substantially equal to the temperature of the second air AR2. Therefore, the control unit U3 processes the temperature of the surface of the cooling pipe 75 as the temperature of the second air AR2.

  The second flow rate measurement unit 87 measures the flow rate of the second air AR2 (hereinafter referred to as “flow rate FL2”). The second flow rate measuring unit 87 outputs the value of the flow rate FL2 of the second air AR2 to the control unit U3. The second flow rate measuring unit 87 is, for example, a flow meter that measures a volume flow rate or a mass flow rate. The fan 89 sucks and discharges the second air AR2.

  The control unit U3 calculates the humidity HM1 of the mixed air supplied to the condensing unit 71 based on the mass flow rate FL1 of water vapor contained in the mixed air and the flow rate FL2 of the second air AR2.

In the second embodiment, the control unit U3 calculates a water vapor mole fraction y _gen (mol / mol) representing the humidity HM1 of the mixed air based on the formula (3).

…（３）

... (3)

In the formula (3), “FL1” indicates the mass flow rate of water vapor contained in the mixed air. “FL2” indicates the mass flow rate of the second air AR2. “MW _H2O ” indicates the molecular weight of water (= 18). “MW _air ” indicates the molecular weight of air (= 28). “X _FL2 ” indicates the water vapor mole fraction (mol / mol) of the second air AR2. In the second embodiment, “x _FL2 ” is estimated from the temperature of the second air AR2 on the assumption that the second air AR2 is saturated air.

On the other hand, the control unit U3 uses the flow rate FA of the superheated steam measured by the steam flow rate measurement unit 5 and the flow rate FB of the first air AR1 measured by the first flow rate measurement unit 23 to supply the mixed air supplied to the chamber 53. The humidity HM2 is calculated. In the second embodiment, similarly to the first embodiment, the control unit U3 calculates a water vapor mole fraction x _gen representing the humidity HM2 of the mixed air supplied to the chamber 53 based on the equation (2).

  The control unit U3 calibrates the humidity HM2 with the humidity HM1. Therefore, according to the second embodiment, the target humidity can be generated with higher accuracy in the chamber 53 than in the case where the calibration of the humidity HM2 is not executed. In addition, the second embodiment has the same effects as the first embodiment.

(Embodiment 3)
With reference to FIG.1 and FIG.5, the humidity generation system 500 which concerns on Embodiment 3 of this invention is demonstrated. The third embodiment is mainly different from the second embodiment in that the humidity generation system 500 according to the third embodiment heats the second air AR2 in the calibration unit U2B. Hereinafter, the points of the third embodiment different from the second embodiment will be mainly described.

  FIG. 5 is a diagram illustrating the humidity generation device 100 of the humidity generation system 500 according to the third embodiment. As shown in FIG. 5, the humidity generator 100 according to the third embodiment includes a calibration unit U2B instead of the calibration unit U2A according to the second embodiment. The calibration unit U2B corresponds to an example of a “calibration unit”.

  The calibration unit U2B further includes a second temperature control unit 93, a humidity measurement unit 95, and a temperature measurement unit 97 in addition to the configuration of the calibration unit U2A according to the second embodiment. The second temperature control unit 93 heats the second air AR2. Specifically, the second temperature control unit 93 heats the second air AR2 to a temperature at which the humidity of the second air AR2 becomes a predetermined value. When the second air AR2 is heated, moisture that cannot be separated by the steam-water separation unit 79 included in the second air AR2 evaporates. The second temperature control unit 93 is a heater, for example.

  For example, the second temperature control unit 93 heats the second air AR2 to a temperature at which the relative humidity of the second air AR2 becomes a predetermined value. For example, the “predetermined value” is a value between 20% and 80%, and the “temperature at which the predetermined value is reached” is a temperature between 25 ° C. and 65 ° C.

  The humidity measuring unit 95 measures the humidity of the second air AR <b> 2 heated by the second temperature control unit 93. In the third embodiment, the humidity measuring unit 95 measures the relative humidity of the second air AR2. The humidity measuring unit 95 outputs the humidity value of the second air AR2 to the control unit U3. The humidity measuring unit 95 is, for example, a humidity sensor.

  The temperature measurement unit 97 measures the temperature of the second air AR <b> 2 heated by the second temperature control unit 93. The temperature measuring unit 97 outputs the temperature value of the second air AR2 to the control unit U3. The temperature measuring unit 97 is, for example, a temperature sensor. Note that the order of measurement of the humidity and temperature of the second air AR2 is not particularly limited.

  The second flow rate measuring unit 87 measures the flow rate of the second air AR2 heated by the second temperature control unit 93 (hereinafter referred to as “flow rate FL3”). The second flow rate measuring unit 87 outputs the value of the flow rate FL3 of the second air AR2 to the control unit U3. The second flow rate measuring unit 87 is, for example, a flow meter that measures a volume flow rate or a mass flow rate. The fan 89 sucks and discharges the second air AR2.

  The control unit U3 calculates the water vapor partial pressure of the second air AR2 based on the temperature and humidity of the second air AR2. Then, the control unit U3 determines the flow rate of water vapor (hereinafter referred to as “water vapor”) contained in the second air AR2 based on the partial pressure of water vapor, the temperature, the pressure (for example, atmospheric pressure), and the flow rate FL3 of the second air AR2. , “Flow rate FL4”). Further, the control unit U3 subtracts the flow rate FL4 from the flow rate FL3 to calculate the flow rate of the second air AR2 excluding water vapor (hereinafter referred to as “flow rate FL5”).

  And control unit U3 is the sum total of the water vapor | steam contained in the mixed air supplied to the condensation part 71 based on the flow volume FL4 of the water vapor | steam contained in 2nd air AR2, and the mass flow rate FL1 of the water vapor | steam contained in mixed air. The flow rate FLS is calculated. Further, the control unit U3 calculates the humidity HM3 of the mixed air supplied to the condensing unit 71 based on the total flow rate FLS of the water vapor contained in the mixed air and the flow rate FL5 of the second air AR2 excluding the water vapor. .

In the third embodiment, the control unit U3 calculates a water vapor mole fraction y _gen (mol / mol) representing the humidity HM3 of the mixed air based on the equation (4).

…（４）

... (4)

In Expression (4), “FLS” indicates the total flow rate of water vapor contained in the mixed air, and is represented by the mass flow rate. “FL5” indicates the mass flow rate of the second air AR2 excluding water vapor. “MW _H2O ” indicates the molecular weight of water (= 18). “MW _air ” indicates the molecular weight of air (= 28). “X _FL5 ” indicates the water vapor mole fraction (mol / mol) of the second air AR2 excluding water vapor. In the third embodiment, “x _FL5 ” is calculated based on the temperature, humidity, and pressure of the second air AR2. Specifically, “x _FL5 ” indicates the temperature of the second air AR2 measured by the temperature measuring unit 97, the humidity of the second air AR2 measured by the humidity measuring unit 95, and the pressure of the second air AR2 (for example, (Atmospheric pressure).

On the other hand, as shown in FIGS. 1 and 5, the control unit U3 is based on the flow rate FA of the superheated steam measured by the steam flow rate measurement unit 5 and the flow rate FB of the first air AR1 measured by the first flow rate measurement unit 23. Then, the humidity HM2 of the mixed air supplied to the chamber 53 is calculated. In the third embodiment, similarly to the second embodiment, the control unit U3 calculates a water vapor mole fraction x _gen representing the humidity HM2 of the mixed air supplied to the chamber 53 based on the formula (2).

  Then, the control unit U3 calibrates the humidity HM2 with the humidity HM3. Therefore, according to the third embodiment, the target humidity can be generated with higher accuracy in the chamber 53 than in the case where the calibration of the humidity HM2 is not executed. In addition, the third embodiment has the same effects as the second embodiment.

  In particular, since the humidity of the second air AR2 is measured and the flow rate of the water vapor contained in the second air AR2 is calculated, the humidity HM3 of the mixed air supplied to the condensing unit 71 is compared with the second embodiment. Can be calculated with higher accuracy. As a result, the humidity HM2 can be calibrated with higher accuracy. Further, after the moisture contained in the second air AR2 is evaporated, the flow rate of the second air AR2 is measured. Therefore, it is possible to measure the flow rate FL3 of the second air AR2 that has zero or little moisture. As a result, the humidity HM3 of the mixed air can be calculated more accurately than in the case where moisture is not evaporated.

(Embodiment 4)
With reference to FIG. 6, the humidity generation system 500 which concerns on Embodiment 4 of this invention is demonstrated. The fourth embodiment differs from the first embodiment in that a humidity generation system 500 according to the fourth embodiment includes a heating unit 63 and a flow rate measuring unit 65 in addition to the first flow rate measuring unit 23 and the first temperature control unit 25. Hereinafter, the points of the fourth embodiment different from the first embodiment will be mainly described.

  FIG. 6 is a diagram illustrating a humidity generation system 500 according to the fourth embodiment. As illustrated in FIG. 6, the humidity generation device 100 of the humidity generation system 500 includes a humidity generation unit U1A instead of the humidity generation unit U1 according to the first embodiment. The humidity generation unit U1A further includes a heating unit 63 and a flow rate measurement unit 65 in addition to the configuration of the humidity generation unit U1 according to the first embodiment.

  The heating unit 63 and the flow rate measuring unit 65 are disposed between the second output switching unit 41 and the temperature adjusting unit 51. The heating unit 63 is disposed on the upstream side of the flow rate measuring unit 65. The heating unit 63 heats the superheated steam or mixed air output from the first output switching unit 31 and the second output switching unit 41. The flow rate measuring unit 65 measures the flow rate of superheated steam or mixed air heated by the heating unit 63. The flow rate measuring unit 65 outputs the value of the flow rate of superheated steam or mixed air to the control unit U3. The flow rate measuring unit 65 is, for example, a flow meter that measures a volume flow rate or a mass flow rate. The superheated steam or mixed air whose flow rate is measured by the flow rate measuring unit 65 is output toward the chamber 53.

  The control unit U3 is based on the flow rate of the mixed air measured by the flow rate measuring unit 65 (hereinafter referred to as “flow rate FC”) and the flow rate FB of the first air AR1 measured by the first flow rate measuring unit 23. The humidity HM4 of the mixed air supplied to the chamber 53 is calculated.

In the fourth embodiment, the control unit U3 calculates the water vapor mole fraction x _gen (mol / mol) representing the humidity HM4 of the mixed air based on the formula (5).

…（５）

... (5)

In the formula (5), “n _FC ” indicates the molar flow rate (mol / s) of the mixed air. “N _FC ” is calculated based on the volume flow rate or mass flow rate of the mixed air measured by the flow rate measuring unit 65. “X _air ” indicates the water vapor mole fraction (mol / mol) of the first air AR1. “X _air ” is calculated by the control unit U3 based on the humidity of the first air AR1. The humidity of the first air AR1 is measured by a hygrometer (not shown). “N _air ” indicates the molar flow rate (mol / s) of the first air AR1. “N _air ” is calculated based on the volume flow rate or mass flow rate of the first air AR 1 measured by the first flow rate measurement unit 23.

  Or, similarly to the first embodiment, the control unit U3, based on the flow rate FA of the superheated steam measured by the steam flow rate measurement unit 5 and the flow rate FB of the first air AR1 measured by the first flow rate measurement unit 23, The humidity HM2 of the mixed air supplied to the chamber 53 is calculated.

  As described above with reference to FIG. 6, according to the fourth embodiment, the user calculates the humidity of the mixed air supplied to the chamber 53 based on the flow rate FC measured by the flow rate measurement unit 65, or Alternatively, it is possible to select whether to calculate based on the flow rate FA measured by the steam flow rate measuring unit 5. Therefore, the flow rate of the superheated steam or the flow rate of the mixed air can be appropriately measured according to the characteristics of the flow rate measuring unit 65 and the steam flow rate measuring unit 5 and the magnitude of the flow rate.

  For example, by changing the flow rate measurement range between the flow rate measuring unit 65 and the steam flow rate measuring unit 5, the flow rate of the superheated steam or the flow rate of the mixed air can be accurately measured according to the flow rate of the superheated steam. For example, the measurement range of the steam flow rate measurement unit 5 is smaller than the measurement range of the flow rate measurement unit 65. That is, the steam flow rate measurement unit 5 has a measurement range with a relatively small flow rate, and the flow rate measurement unit 65 has a measurement range with a larger flow rate than the steam flow rate measurement unit 5. In this case, when the flow rate of the superheated steam is relatively small, the control unit U3 calculates the humidity HM2 of the mixed air based on the measurement result of the steam flow rate measuring unit 5. On the other hand, when the flow rate of the superheated steam is relatively large, the control unit U3 calculates the humidity HM4 of the mixed air based on the measurement result of the flow rate measuring unit 65.

  In addition, the fourth embodiment has the same effects as the first embodiment. In the second and third embodiments described with reference to FIGS. 4 and 5, the humidity generation device 100 may include the humidity generation unit U1A according to the fourth embodiment instead of the humidity generation unit U1. . In this case, the humidity HM4 is calibrated by the humidity HM1 or the humidity HM3.

  The embodiments and examples of the present invention have been described above with reference to the drawings. However, the present invention is not limited to the above-described embodiments and examples, and can be carried out in various modes without departing from the gist thereof (for example, (1) to (6 shown below) )). In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the above embodiments. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different embodiments may be appropriately combined. In order to facilitate understanding, the drawings schematically show each component as a main component, and the thickness, length, number, interval, etc. of each component shown in the drawings are actual for convenience of drawing. May be different. In addition, the material, shape, dimensions, and the like of each component shown in the above embodiment are merely examples, and are not particularly limited, and various changes can be made without departing from the effects of the present invention. is there.

  (1) In the first to fourth embodiments described with reference to FIGS. 3 to 6, when calibrating the steam flow rate measuring unit 5, the measuring unit 73 is a volume of water obtained by condensation of superheated steam. May be measured. In this case, for example, the measurement unit 73 includes a time measurement unit 84 such as a stopwatch. Moreover, the accommodating part 81 is a graduated cylinder, for example. And an operator reads the volume of the water accommodated in the measuring cylinder from the scale of the measuring cylinder for every fixed time measured with the stopwatch, and inputs the value of the volume of water into the control unit U3.

  The control unit U3 stores the value of the volume of water input at regular intervals. And control unit U3 calculates the variation | change_quantity of the volume of water per unit time based on the value of the volume of water memorize | stored. The amount of change in the volume of water per unit time indicates the volume flow rate of the superheated steam supplied to the condensing unit 71. Then, the control unit U3 calibrates the steam flow rate measuring unit 5 based on the volume flow rate of superheated steam.

  (2) In the second and third embodiments described with reference to FIGS. 4 and 5, when the humidity is calibrated, the measuring unit 73 is separated from the water and the mixed air obtained by condensation of water vapor. The volume with moisture may be measured. In this case, for example, the measurement unit 73 includes a time measurement unit 84 such as a stopwatch. Moreover, the accommodating part 81 is a graduated cylinder, for example. Then, the operator reads the volume of water and moisture contained in the graduated cylinder (hereinafter referred to as “water W”) from the scale of the graduated cylinder at regular intervals measured by the stopwatch, and the water W Is input to the control unit U3.

  The control unit U3 stores the value of the volume of the water W that is input at regular intervals. And control unit U3 calculates the variation | change_quantity of the volume of water per unit time based on the value of the volume of water memorize | stored. The amount of change in the volume of water per unit time indicates the volumetric flow rate of water vapor contained in the mixed air supplied to the condensing unit 71.

  In the second embodiment, the control unit U3 calculates the humidity of the mixed air supplied to the condensing unit 71 based on the volume flow rate of water vapor contained in the mixed air and the flow rate FL2 of the second air AR2. Further, in the third embodiment, the control unit U3 converts the mixed air supplied to the condensing unit 71 based on the flow rate FL4 of water vapor contained in the second air AR2 and the volume flow rate of water vapor contained in the mixed air. The total flow rate of the contained water vapor is calculated. Then, the control unit U3 calculates the humidity of the mixed air supplied to the condensing unit 71 based on the total flow rate of the water vapor contained in the mixed air and the flow rate FL5 of the second air AR2 excluding the water vapor.

  (3) In the first to fourth embodiments described with reference to FIGS. 3 to 6, the measurement unit 73 may include a time measurement unit 84 such as a stopwatch. In this case, the operator inputs the value of the weight of water displayed by the weight measuring unit 83 into the control unit U3 at regular intervals measured by the stopwatch. The control unit U3 stores the value of the weight of water input at regular intervals. And control unit U3 calculates the variation | change_quantity of the weight of the water per unit time based on the value of the stored weight of the water.

  (4) In the first to fourth embodiments described with reference to FIGS. 1 to 6, the calibration unit U <b> 2, the calibration unit U <b> 2 </ b> A, or the calibration unit U <b> 2 </ b> B may be disposed downstream of the chamber 53. Then, superheated steam or mixed air may be supplied from the chamber 53 to the calibration unit U2, the calibration unit U2A, or the calibration unit U2B. For example, the calibration unit U2, the calibration unit U2A, or the calibration unit U2B is disposed downstream of the fan 61. Then, the fan 61 supplies the superheated steam or mixed air accommodated in the chamber 53 to the calibration unit U2, the calibration unit U2A, or the calibration unit U2B.

  (5) In the first to fourth embodiments described with reference to FIGS. 1 to 6, the first temperature control unit 25 may cool the first air AR <b> 1. In this case, the first temperature control unit 25 is a cooling device. The first output switching unit 31 can output saturated wet steam or air with water droplets by mixing the cooled first air AR1 and superheated steam. The water-containing air is, for example, air including mist such as minute water droplets (fog-containing air). Further, the temperature adjustment unit 51 may cool the superheated steam or mixed air and supply saturated wet steam or air with water droplets to the chamber 53. In this case, the temperature adjustment unit 51 is a cooling device.

  (6) In the first to fourth embodiments described with reference to FIG. 1 and FIG. 6, the air supply device 300 dehumidifies the air in the room where the humidity generation system 500 is installed, and first removes the dehumidified air. The air AR1 may be supplied to the humidity generator 100. As a result, the minimum target humidity that can be generated by the humidity generator 100 can be lowered. In this case, the air supply device 300 includes a dehumidifying device.

  The present invention relates to a humidity generator and has industrial applicability.

DESCRIPTION OF SYMBOLS 3 Water removal part 5 Steam flow measurement part 7 Air-water separation part 9 Heating part 23 1st flow measurement part 25 1st temperature control part 31 1st output switching part 41 2nd output switching part 53 Chamber 65 Flow measurement part 71 Condensing part 73 Measurement unit 79 Air / water separation unit 87 Second flow rate measurement unit 93 Second temperature control unit 95 Humidity measurement unit 97 Temperature measurement unit 100 Humidity generator 500 Humidity generation system U1, U1A Humidity generation unit U2, U2A, U2B Calibration unit ( Calibration section)
U3 control unit

Claims (7)

A water removal unit for heating the saturated wet steam to generate superheated steam, and removing water contained in the saturated wet steam;
A steam flow rate measuring unit for measuring the flow rate of the superheated steam;
A first flow rate measuring unit for measuring a flow rate of the first air;
Only the superheated steam that has passed through the steam flow rate measuring unit is output, or the superheated steam that has passed through the steam flow rate measuring unit and the first air that has passed through the first flow rate measuring unit are mixed. A first output switching unit that outputs mixed air in which the superheated steam and the first air are mixed;
A calibration unit for calibrating the steam flow rate measurement unit,
The calibration unit is
A condensing unit for condensing the superheated steam output from the first output switching unit and returning the superheated steam to water;
And a measuring unit that measures the weight or volume of the water obtained by condensation of the superheated steam. A first temperature control unit for heating the first air that has passed through the first flow rate measurement unit;
The first output switching unit outputs only the superheated steam that has passed through the steam flow rate measuring unit, or mixes the superheated steam that has passed through the steam flow rate measuring unit and the heated first air. The humidity generator according to claim 1, wherein the mixed air is output. The condensing unit condenses water vapor contained in the mixed air output from the first output switching unit, and returns the water vapor to water,
The calibration unit is
An air-water separator that separates moisture contained in the mixed air from the mixed air;
A second flow rate measuring unit that measures a flow rate of the second air that is the mixed air after the condensation of the water vapor and after the separation of the moisture,
The humidity generator according to claim 1 or 2, wherein the measurement unit measures the weight or volume of the water obtained by condensation of the water vapor and the water separated from the mixed air. The condensing unit condenses water vapor contained in the mixed air output from the first output switching unit, and returns the water vapor to water,
The calibration unit is
An air-water separator that separates moisture contained in the mixed air from the mixed air;
A second temperature controller for heating the second air, which is the mixed air after the condensation of the water vapor and after the separation of the water;
A humidity measuring unit for measuring the humidity of the heated second air;
A temperature measuring unit for measuring the temperature of the heated second air;
A second flow rate measuring unit for measuring a flow rate of the heated second air,
The humidity generator according to claim 1 or 2, wherein the measurement unit measures the weight or volume of the water obtained by condensation of the water vapor and the water separated from the mixed air.   The humidity generator according to any one of claims 1 to 4, further comprising a flow rate measuring unit that measures a flow rate of the superheated steam or the mixed air output from the first output switching unit. The water removing unit is
A steam-water separator for separating moisture contained in the saturated wet steam from the saturated wet steam;
The humidity generator according to claim 1, further comprising: a heating unit that heats the saturated wet steam after the separation of the water to generate the superheated steam. A chamber;
A gas output from the first output switching unit is output to the chamber, or a second output switching unit is output to the calibration unit;
The gas output from the first output switching unit is the superheated steam or the mixed air,
The humidity generator according to any one of claims 1 to 6, wherein the chamber stores the gas output from the first output switching unit and the second output switching unit.

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