JP2019082625A - Optical reflection element - Google Patents

Abstract

To provide an optical reflection element with which it is possible to suppress the effect of disturbance vibration.SOLUTION: Provided is an optical reflection element 100 comprising: a reflector 110 that rotationally oscillates around a first revolving shaft 101; a first connector 121 arranged along the first revolving shaft 101 and coupled to the reflector 110; a first vibrator 141 arranged in a direction to intersect the first revolving shaft 101 and coupled to the base part of the first connector 121; a second vibrator 142 arranged on the reverse side of the first revolving shaft 101; a first driver 151 coupled to the first vibrator 141, for causing the first vibrator 141 to vibrate; a second driver 152 coupled to the second vibrator; and a second connector 122 for oscillatably connecting the first vibrator 141 and second vibrator 142 to a first substrate 161. The torsional rigidity per unit length of the first connector 121 is weaker than the torsional rigidity per unit length of the second connector 122.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an optical reflecting element for reciprocating an irradiation position of a laser beam or the like.

  For example, as disclosed in Patent Document 1, a conventional optical reflecting element that reciprocates an irradiation position of a laser beam is a reflector that reflects a laser beam and the like, and reflection is caused by being connected to this reflector and being twisted by itself. A connecting body for rotating and rocking the body, two arm-like vibrating bodies extending in a direction intersecting with the rotating shaft of the reflector for causing the connecting body to reciprocate, and these vibrating bodies And a driver including a piezoelectric element to be vibrated.

JP, 2009-244602, A

  Such an optical reflecting element is smaller and lighter than a reflecting element that causes a polygon mirror to be rotated by a motor, and has less power for rotating and oscillating the reflector. However, when the optical reflecting element is attached to a car or the like where strong vibration occurs, the disturbance vibration is transmitted to the reflector, and stable driving can not be performed.

  Therefore, an object of the present invention is to provide an optical reflecting element that can be stably driven even when disturbance vibration occurs.

  In order to achieve the above object, an optical reflecting element which is one of the present invention is disposed along a first rotational axis, a reflector which pivots around a first rotational axis and reflects light, A first connecting body in which the reflector and the distal end are connected, and a first vibrating body extending in a direction crossing the first rotation axis and connected to a proximal end of the first connecting body; A second vibrating body extending in a direction intersecting the first rotating shaft on the opposite side of the first vibrating body with respect to the first rotating shaft, and connected to a base end of the first connection body; A first driving body connected to the tip end of the first vibrating body and rotationally swinging the first connection body through the first vibrating body, and connected to the tip end of the second vibrating body, the second A second drive body for rotating and rocking the first connection body via the vibrator, the first vibrator and the second vibrator with respect to the first base body; And a second connection body that is movably connected, wherein the torsional rigidity per unit length in the weakest portion of the first connection body is greater than the torsional rigidity per unit length in the weakest portion of the second connection body. Too weak.

  According to the present invention, it is possible to provide an optical reflecting element that can be stably driven even when disturbance vibration occurs.

FIG. 1 is a plan view showing an optical reflecting element according to the first embodiment. FIG. 2 is a perspective view showing the optical reflecting element according to the first embodiment. FIG. 3 is a plan view showing a modified example of the optical reflecting element. FIG. 4 is a perspective view showing a modified example of the optical reflecting element. FIG. 5 is a plan view showing the optical reflecting element according to the second embodiment. FIG. 6 is a plan view showing an optical reflecting element according to the third embodiment.

  Next, an embodiment of the optical reflecting element according to the present invention will be described with reference to the drawings. The embodiments described below are all inclusive or specific examples. Numerical values, shapes, materials, components, arrangement positions and connection forms of components, steps, order of steps, and the like shown in the following embodiments are merely examples, and the present invention is not limited thereto. Further, among the components in the following embodiments, components not described in the independent claim indicating the highest concept are described as arbitrary components.

  In addition, the drawings are schematic diagrams in which emphasis, omission, and adjustment of ratios are appropriately performed to show the present invention, and may differ from actual shapes, positional relationships, and ratios.

Embodiment 1
FIG. 1 is a plan view showing an optical reflecting element according to the first embodiment. FIG. 2 is a perspective view showing the optical reflecting element according to the first embodiment.

  The optical reflecting element 100 is a device that periodically changes the reflection angle of light such as laser light to periodically sweep the irradiation position of the light, and as shown in FIG. 1 and FIG. , A first connection body 121 which is a connection body, a second connection body 122, a first vibration body 141 which is a vibration body, a second vibration body 142, a first driving body 151 which is a driving body, and a second driving body And a first base 161 which is a base. Further, in the case of the present embodiment, a part of the reflector 110, a connecting body, a part of the vibrating body, and the base are integrally formed by removing unnecessary parts from one substrate. . Specifically, for example, an unnecessary portion of the silicon substrate is removed using an etching technique used in the semiconductor manufacturing process, and a part of the reflector 110, a connector, a part of the vibrator, and the base are integrally formed. Ru. The optical reflecting element 100 is a so-called MEMS (Mems, Micro Electro Mechanical Systems). The optical reflecting element 100 further includes a first monitoring element 171 which is a monitoring element and a second monitoring element 172.

  Here, the material constituting the substrate is not particularly limited, but a material having mechanical strength and a high Young's modulus, such as metal, crystal, glass, or resin, is preferable. Specifically, metals and alloys such as silicon, titanium, stainless steel, elinvar, and brass alloys are exemplified. If these metals, alloys, etc. are used, the optical reflecting element 100 excellent in vibration characteristics and processability can be realized.

  The reflector 110 is a portion that pivots (repetitive rotational oscillation) about the first rotation axis 101 and reflects light. The shape of the reflector 110 is not particularly limited, but in the case of the present embodiment, it has a rectangular plate shape, and the reflecting portion 111 capable of reflecting the light to be reflected at a high reflectance is on the surface. Have. The material of the reflective portion 111 can be selected arbitrarily, and examples thereof include metals such as gold, silver, copper, aluminum, and metal compounds. In addition, the reflection unit 111 may be configured of a plurality of layers. Furthermore, the reflective portion 111 may be provided by polishing the surface of the reflector 110 smoothly. The reflecting portion 111 may be a curved surface as well as a flat surface.

  The first connection body 121 is disposed along the first rotation axis 101, has the reflector 110 connected to the tip end thereof, the base end of the first vibrating body 141, and the base end of the second vibrating body 142. And the proximal end are connected to each other to hold the reflector 110. The first connector 121 is a member for transmitting a torque for rotating and pivoting the reflector 110 to the reflector 110, and the first connector 121 is twisted around the first rotation axis 101 (θ 1 in the figure). The reflector 110 can be rotationally rocked while holding the reflector 110.

  The shape of the first connection body 121 is not particularly limited, but since the first connection body 121 is a member for rotating and rocking the reflector 110 by twisting itself, the first connector 121 is wider than the reflector 110 (in the X-axis direction in FIG. Length) narrow and thin rod-like. The cross-sectional shape perpendicular to the first rotation axis 101 of the first connector 121 is rectangular, and the thickness of the first connector 121 is the same as that of the reflector 110 and other portions. The first connector 121 has the same cross-sectional shape from the reflector 110 to the base end of the first vibrating body 141 and the base end of the second vibrating body 142. When the optical reflecting element 100 is driven by making the first connection body 121 have a uniform rectangular shape and a uniform area along the first rotation axis 101 in a cross section orthogonal to the first rotation axis 101 One connector 121 twists uniformly as a whole, and breakage due to stress concentration can be avoided.

  In addition, these constituent materials do not need to be the same thickness, for example, if the reflector 110 is thicker than the first connection body 121 and the transmission body 131, distortion of the surface of the reflector 100 can be suppressed, which is convenient. . Also, if the thickness of the first base 161 is increased, the first driver 151, the second driver 152, and the reflector 110 are driven when the optical reflecting element 100 is mounted on, for example, a flat surface of another product. This is convenient because it is possible to secure the space in the Z-axis direction necessary for the Moreover, it is convenient because the structural strength of the entire optical reflecting element 100 is improved.

  Along the first rotation axis 101 is not only the case where the first connection body 121 is straight along, but also the first connection body 121 is curved in a meandering manner or in a zigzag manner as in the present embodiment. Even in the case where it is along the virtually straight first rotation axis 101 as a whole, it is included.

  Also, in the present specification and claims, "crossing" is used to include not only crossings where two lines touch but also crossings where two lines do not touch.

  The vibrating body including the first vibrating body 141 and the second vibrating body 142 vibrates in the circumferential direction centering on the first rotation axis 101 to generate a torque for rotating and pivoting the reflector 110. And extend in the direction intersecting the first rotation axis 101. The first vibrating body 141 is disposed in a direction intersecting the first rotation shaft 101, and is connected to the proximal end portion of the first connection body 121. The second vibrating body 142 is disposed on the opposite side of the first vibrating body 141 with respect to the first rotating shaft 101 in a direction intersecting the first rotating shaft 101 and is connected to the base end of the first connection body 121 .

  In the case of the present embodiment, the first vibrating body 141 is a rectangular rod-like member extending in the direction orthogonal to the first rotation axis 101, and the second vibrating body 142 is orthogonal to the first rotation axis 101 and It is a rectangular rod-shaped member extending in the opposite direction of the one vibration body 141.

  Further, the base end of the first vibrating body 141 and the base end of the second vibrating body 142 are integrally connected by the connecting body 149, and the first vibrating body 141 and the second vibrating body 142 are the first It has a straight rod shape extending in the orthogonal direction about the rotation axis 101.

  The driving body including the first driving body 151 and the second driving body 152 is a member that generates a driving force for vibrating the tip end portion of the vibrating body in the circumferential direction around the first rotation shaft 101. The first driving body 151 is a member that is connected to the tip end portion of the first vibrating body 141, vibrates the first vibrating body 141 around the first rotation shaft 101, and causes the first connecting body 121 to rotationally swing. The second driving body 152 is a member that is connected to the tip of the second vibrating body 142, vibrates the second vibrating body 142 around the first rotation axis 101, and causes the first connecting body 121 to rotationally swing.

  In the case of the present embodiment, the first drive body 151 is a cross section in which the base end portion is integrally connected to the tip end portion of the first vibration body 141 and extends toward the reflector 110 along the first rotation axis 101 A rectangular rod-shaped first drive main body portion 183 is provided, and on the surface of the first drive main body portion 183, there is provided a first piezoelectric element 185 which is an elongated plate-shaped piezoelectric element disposed along the first rotation axis 101 . The first piezoelectric element 185 repeats expansion and contraction by applying a periodically fluctuating voltage to the first piezoelectric element 185. In response to the movement of the first piezoelectric element 185, the first drive main body 183 repeats bending and return. In the first drive main body portion 183, the tip end protruding from the base end portion connected to the first vibrating body 141 vibrates largely, and the vibration energy of the entire first drive body 151 is the tip of the first vibrating body 141 To communicate.

  Similar to the first drive body 151, the second drive body 152 also includes the second drive main body portion 184 and the second piezoelectric element 186, and includes a first rotation axis 101 and is an imaginary plane orthogonal to the surface of the reflector 110. On the other hand, the first drive body 151 is disposed at the target position, and the base end portion is connected to the tip end of the second vibrating body 142. Further, the operation of the second driving body 152 is also similar to the operation of the first driving body 151.

  In the case of the present embodiment, the piezoelectric element is a thin film laminated type piezoelectric actuator formed of a laminated body structure in which an electrode and a piezoelectric body are laminated in the thickness direction, which is formed on the surface of the driver main body. This makes it possible to make the driver thinner.

  The driving body is not only one that vibrates due to the strain of the piezoelectric element, but also includes a member that generates a force due to an interaction with a magnetic field or an electric field, a device, etc. It is also possible to oscillate by changing at least one of the magnetic field generated by itself and the electric field generated. Moreover, as a material which comprises a piezoelectric material, the piezoelectric material which has high piezoelectric constants, such as a lead zirconate titanate (PZT), can be illustrated.

  The first base 161 is a member for attaching the optical reflecting element 100 to an external structural member or the like, and the second base 141 vibratably connects the first vibrating body 141 and the second vibrating body 142 to the first base 161. It is connected to the connector 122.

  The second connection body 122 is disposed along the first rotation axis 101, the base end is connected to the first base 161, the tip end is the base end of the first vibrating body 141, and the second vibrating body It is connected to the proximal end of 142.

  The shape of the second connection body 122 is not particularly limited, but the first connection with respect to the first base body 161 is caused by the torsion of itself by the vibration of the first vibrating body 141 and the second vibrating body 142. Since it is a member that allows the body 121 to twist, it has a rod-like shape that has higher torsional rigidity than the first connection body 121. In the case of the present embodiment, the cross-sectional shape perpendicular to the first rotation axis 101 of the second connection body 122 is rectangular, and the thickness of the second connection body 122 is the same as that of the first connection body 121 and other portions. It is Accordingly, the width (the length in the X-axis direction in the drawing) of the second connection body 122 is wider than that of the first connection body 121. In addition, the second connection body 122 has the same cross-sectional shape from the first base body 161 to the vibrating body. Thus, as in the case of the first connection body 121, concentration of stress is avoided to prevent the second connection body 122 from breaking.

  In the case of the present embodiment, with regard to the torsional rigidity, the first connection body 121 and the second connection body 122 are all equal along the first rotation axis 101, so the whole is considered to be the portion with the lowest torsional rigidity. be able to. Therefore, the torsional rigidity per unit length of the first connection body 121 is weaker than the torsional rigidity per unit length of the second connection body 122. In addition, even if the first connector 121 has a portion having a weaker torsional rigidity than the other portions, and the second connector 122 has a portion having a weaker torsional rigidity than the other portions, the torsional rigidity is the weakest. The torsional rigidity of the first connection body may be weaker than the torsional rigidity of the second connection body 122 by comparing the parts.

  In the same manner as the first connection member 121, the second connection member 122 may not only be straight along the first rotation axis 101, but may be curved in a meandering manner or zigzag. Also in such a case, when the torsional rigidity around the first rotation axis 101 is compared between the first connection body 121 and the second connection body 122, the torsional rigidity of the first connection body 121 is weak.

  In the case of the present embodiment, the monitor elements including the first monitor element 171 and the second monitor element 172 are attached to the first vibrator 141 and the second vibrator, respectively, and the bending state of these vibrators is taken as distortion. It is an element to detect. By measuring the output from the monitor element, the state of the rotational rocking of the reflector 110 can be accurately monitored.

  In the case of the present embodiment, the first monitor element 171 and the second monitor element 172 are attached to both the first vibrating body 141 and the second vibrating body. The first monitor element 171 and the second monitor element 172 are connected to a detection circuit (not shown), and the outputs of the two monitor elements are differentially detected. As a result, it is possible to cancel various noises and to monitor the state of rotational swing of the reflector 110 with high accuracy, and to feed back to control of the drive.

  According to the optical reflecting element 100 described in the first embodiment, the first vibrating body 141 and the second vibrating body 142 are driven by driving the first driving body 151 and the second driving body 152 in opposite phases. Oscillates in the opposite phase to generate torque in the same rotational direction around the first rotation axis 101. By transmitting this torque to the proximal end of the first connection body 121, it is possible to transmit the torque with high efficiency. Also, even when disturbance vibration is transmitted to the optical reflecting element 100 via the first base, the second connection member 122 suppresses transmission of disturbance vibration to the first connection member 121, and the reflector is stabilized. It can rotate and swing.

  Furthermore, since the vibration (torque) generated by the first vibrating body 141 and the second vibrating body 142 is transmitted to the first connection body 121 with high efficiency, the vibration (torque) is configured by the reflector 110 and the first connection body 121. The resonance sharpness (Q value) of the structure is increased. In other words, since the transmission loss of the vibration (torque) transmitted to the first connection body 121 is reduced, the resonance sharpness (Q value) of the structure formed of the reflector 110 and the first connection body 121 is high. Become. The increase in the resonance sharpness (Q value) narrows the drive frequency band of the reflector 110. As a result, the influence of disturbance vibration is less likely to occur, and stable rotational rocking of the reflector 110 is possible.

  The present invention is not limited to the above embodiment. For example, another embodiment realized by arbitrarily combining the components described in the present specification and excluding some of the components may be used as an embodiment of the present invention. Further, modifications obtained by applying various modifications to those skilled in the art without departing from the spirit of the present invention, that is, the meaning indicated by the language described in the claims, are also included in the present invention. Be

  For example, as shown in FIG. 3, the second connector 122 may be separated into a plurality of locations so as to connect the base end of the first vibrating body 141 and the base end of the second vibrating body 142, respectively. I do not mind. In this case, the torsional rigidity around the first rotation axis 101 of the second connection body 122 is the rigidity when the plurality of second connection bodies 122 are twisted in their entirety. Therefore, the torsional rigidity can be structurally increased by arranging the plurality of second connection members 122 far from each other with the first rotation shaft 101 interposed therebetween.

  In addition, as shown in FIG. 4, the length (thickness) of the second connecting member 122 in the direction (the Z-axis direction in the drawing) orthogonal to the reflecting surface (the XY plane in the drawing) of the reflector 110 is the first connection The torsional rigidity of the second connection body 122 per unit length may be higher than that of the first connection body 121 by making the length longer than the length of the body.

  Although the method of making the thickness of the second connection body 122 thicker than the thickness of the first connection body 121 is not particularly limited, for example, by increasing the reinforcing member 129 by attaching it to the surface of the second connection body 122 I don't care. Further, the material of the reinforcing member 129 is not particularly limited, but for example, by using the same material as the piezoelectric element, the reinforcing member 129 may be formed in the second connection body 122 in the same process as the piezoelectric element. It is preferable because it can be done.

  In addition, the thickness of the first connection body 121 may be thinner than the thickness of the second connection body 122. For example, this can be realized by performing etching only on the surface of the first connection body 121.

  Moreover, even in the case where the shapes and areas of the first connection body 121 and the second connection body 122 are the same in a cross section orthogonal to the first rotation shaft 101, units of the second connection body 122 can be obtained by using mutually different materials. The torsional rigidity per length can also be higher than that of the first connection body 121.

  Furthermore, even if the first connection body 121 and the second connection body 122 are made of the same material, the torsional rigidity per unit length of the second connection body 122 is obtained by reforming by heating such as quenching and annealing. Can be higher than the first connector 121.

Second Embodiment
Next, another embodiment of the optical reflecting element will be described. The same reference numerals may be given to components (portions) having the same operation and function as the first embodiment, and the same shape, mechanism and structure as the first embodiment, and the description may be omitted. In the following, differences from the first embodiment will be mainly described, and the description of the same contents may be omitted.

  FIG. 5 is a plan view showing the optical reflecting element according to the second embodiment.

  The optical reflecting element 200 according to the second embodiment includes one reflector 110 by two rotational rocking mechanisms that are in a plane symmetry relationship with a virtual plane orthogonal to the first rotation axis 101 and including the center of the reflector 110. It is a device that rotates and swings. The connector, the vibrator, the driver, the base, and the monitor element, which are respectively provided in the rotational rocking mechanism, are arranged in plane symmetry. Further, the functions and connection modes of the connection body, the vibration body, the drive body, the base body, and the monitor element provided in the rotational rocking mechanism are the same as in the first embodiment.

  Specifically, as shown in FIG. 5, the second rotational rocking mechanism 202 is thirdly symmetrical with respect to the first connecting body 121 and the second connecting body 122 provided in the first rotational rocking mechanism 201 as connecting bodies. A connector 123 and a fourth connector 124 are provided. The third connection body 123 is disposed on the opposite side of the first connection body 121 with respect to the reflector 110 along the first rotation axis 101, and the reflector 110 and the tip end are connected. The second rotational rocking mechanism 202 includes a third vibrating body 143 and a fourth vibrating body 144 in plane symmetry with the first vibrating body 141 and the second vibrating body 142 included in the first rotational rocking mechanism 201 as vibrating bodies. ing. The second rotational rocking mechanism 202 includes a third driving body 153 and a fourth driving body 154 in plane symmetry with the first driving body 151 and the second driving body 152 provided in the first rotational rocking mechanism 201 as driving bodies. ing. The third driver 153 includes a third driver main body 187 and a third piezoelectric element 189, and the fourth driver 154 includes a fourth driver main body 188 and a fourth piezoelectric element 190, The same as the first rotational rocking mechanism 201. The second rotary rocking mechanism 202 is provided with a second base 162 in plane symmetry with the first base 161 provided in the first rotary rocking mechanism 201 as a base. In the case of the present embodiment, the first base 161 and the second base 162 are integrally connected, and form a rectangular annular frame member as a whole. Further, in the second rotation rocking mechanism 202, as in the first rotation rocking mechanism 201, the third monitor element 173 is attached to the third vibrating body 143, and the fourth monitor element 174 is attached to the fourth vibrating body 144. ing.

  In the optical reflecting element 200 according to the second embodiment described above, in addition to the effects described in the first embodiment, torque for rotational oscillation is transmitted from both sides of the reflector 110 along the first rotation axis 101. Therefore, the reflector 110 is less likely to shake, and it becomes possible to stably rotate and rock around the first rotation axis 101.

  Furthermore, since both ends of the first base 161 and the second base 162 are respectively connected in a frame shape, the structural strength of the entire optical reflecting element 200 is improved, and disturbance vibration is caused by the first connection body 121, And the second connecting member 122 is hard to be transmitted, and the rotational swing of the reflector 110 is stabilized.

  Furthermore, since the resonance sharpness (Q value) of the structure configured of the reflector 110, the first connector 121, the second connector 122, the third connector 123, and the fourth connector is increased, the reflector The band of the drive frequency of 110 is narrowed. As a result, the influence of disturbance vibration is less likely to occur, and stable rotational rocking of the reflector 110 is possible.

Third Embodiment
Next, another embodiment of the optical reflecting element will be described. The same reference numerals may be given to components (portions) having the same operation and function as the first and second embodiments and the same shape, mechanism and structure as the first and second embodiments and the description may be omitted. In the following, differences from the first and second embodiments will be mainly described, and the description of the same contents may be omitted.

  FIG. 6 is a plan view showing an optical reflecting element according to the third embodiment. In addition, the detailed agreement of the 1st rotation rocking mechanism 201 and the 2nd rotation rocking mechanism 202 is abbreviate | omitted.

  The optical reflecting element 300 according to the third embodiment can rotate the whole of the reflector 110, the first rotational rocking mechanism 201, and the second rotational rocking mechanism 202 described in the second embodiment. A three-rotation rocking mechanism 203 and a fourth rotation rocking mechanism 204 are further provided.

  The third rotation rocking mechanism 203 intersects the first rotation rocking mechanism 201 and the first rotation shaft 101 that causes the second rotation rocking mechanism 202 to rock the reflector 110 (in the present embodiment, at right angles) ) Is a device for integrally rotating and rocking the reflector 110, the first rotation and rocking mechanism 201, and the second rotation and rocking mechanism 202 around the second rotation axis 102). , A connector, a vibrator, a driver, a base, and a monitor element. Further, the functions and connection modes of the connector, the vibrator, the driver, the base, and the monitor element are the same as in the second embodiment.

  Specifically, as shown in FIG. 6, the third rotational rocking mechanism 203 is provided with a fifth connection body 125 and a sixth connection body 126 as connection bodies. The fifth connector 125 is disposed along the second rotation axis 102 passing through the reflector 110, and the tip portion is connected to the frame member including the first base 161 and the second base 162. A fifth vibrating body 145 and a sixth vibrating body 146 are provided as vibrating bodies. A fifth driver 155 and a sixth driver 156 are provided as drivers. The fifth driving body 155 includes a fifth driving body main portion 191 and a fifth piezoelectric element 192, and the sixth driving body 156 includes a sixth driving body main portion 193 and a sixth piezoelectric element 194. . A third base 163 is provided as a base. In the case of the present embodiment, the third base 163 is a member for attaching the optical reflecting element 300 to an external structural member, and the first base 161 is the tip of the fifth connector 125 of the third rotational rocking mechanism 203. Are integrally attached to the Further, in the third rotation rocking mechanism 203, the fifth monitor element 175 is attached to the fifth vibrating body 145, and the sixth monitoring element 176 is attached to the sixth vibration body 146, similarly to the first rotation rocking mechanism 201 and the like. It is done.

  The fourth rotation rocking mechanism 204 is in a positional relationship of plane symmetry with the third rotation rocking mechanism 203 with respect to a virtual plane orthogonal to the second rotation axis 102 and including the center of the reflector 110. The connection body, the vibration body, the driving body, the base body, and the monitor element, which are respectively provided in the fourth rotation rocking mechanism 204, are arranged in plane symmetry with respect to each of the third rotation rocking mechanism 203.

  Specifically, the fourth rotational rocking mechanism 204 is a seventh connecting body 127, an eighth connecting body 127, an eighth symmetrical body with the fifth connecting body 125 and the sixth connecting body 126 provided in the third rotational rocking mechanism 203 as connecting bodies. A connector 128 is provided. The seventh connection body 127 is disposed on the opposite side of the fifth connection body 125 with respect to the reflector 110 along the second rotation axis 102, and the second base body 162 and the tip end are connected. The fourth rotational rocking mechanism 204 includes a seventh vibrating body 147 and an eighth vibrating body 148 in plane symmetry with the fifth vibrating body 145 and the sixth vibrating body 146 included in the third rotational rocking mechanism 203 as vibrating bodies. ing. The fourth rotational rocking mechanism 204 includes a seventh driving body 157 and an eighth driving body 158 in plane symmetry with the fifth driving body 155 and the sixth driving body 156 provided in the third rotational rocking mechanism 203 as driving bodies. ing. The seventh driver 157 includes a seventh driver main body 195 and a seventh piezoelectric element 196, and the eighth driver 158 includes an eighth driver main body 197 and an eighth piezoelectric element 198. Similar to the third rotation rocking mechanism 203. The fourth rotary rocking mechanism 204 is provided with a fourth base 164 in plane symmetry with the third base 163 provided in the third rotary rocking mechanism 203 as a base. In the case of the present embodiment, the third base 163 and the fourth base 164 are integrally connected, and form a rectangular annular frame member as a whole. In the fourth rotational rocking mechanism 204, the seventh monitoring element 177 is attached to the seventh vibrating body 147 in plane symmetry with the third rotational rocking mechanism 203, and the eighth monitoring element 178 is mounted on the eighth vibrating body 148. It is attached.

  The optical reflecting element 300 according to the third embodiment described above has the first rotational rocking mechanism 201 and the second rotational rocking mechanism in addition to the effects described in the first embodiment and the effects described in the second embodiment. By means of 202, it is possible to make the reflector 110, which rotates and swings around the first rotating shaft 101, rotate and swings around the second rotating shaft 102 that intersects the first rotating shaft 101. Therefore, for example, even when only one laser beam is reflected, the irradiation position of the laser beam can be two-dimensionally swept.

  In the present embodiment, the first rotation axis 101 and the second rotation axis 102 are formed to be orthogonal to each other substantially at the center of the reflector 110. As a result, the center of the reflector 110 becomes a fixed point, and if light is incident on this fixed part, the optical path of the light projected onto the screen becomes constant, and if the optical reflecting element 300 is used for a projector etc. It can be projected to accuracy.

  Furthermore, the resonance sharpness of the optical reflecting element 300 configured of the reflector 110, the first rotation rocking mechanism 201, the second rotation rocking mechanism 202, the third rotation rocking mechanism 203, and the fourth rotation rocking mechanism 204. Since the (Q value) is increased, the band of the drive frequency of the reflector 110 is narrowed. As a result, the influence of disturbance vibration is less likely to occur, and stable rotational rocking of the reflector 110 is possible.

  In the first to third embodiments, the tuning fork is generally formed by the pair of vibrators and the pair of drivers. This arrangement not only makes it possible to miniaturize the optical reflecting element by arranging it so as to surround the reflector 110, but also because the tip of the vibrator and the tip of the driver become free ends, the deflection angle of the reflector 110 It is because it can be made large efficiently and large vibrational energy can be obtained with small energy. However, the present invention is not limited to the first to third embodiments. For example, the vibrating body and the driving body may be formed in a single rod shape.

  For example, although the first rotation rocking mechanism 201 and the second rotation rocking mechanism 202 are arranged in a plane symmetry, and the third rotation rocking mechanism 203 and the fourth rotation rocking mechanism 204 are arranged in a plane symmetry, It may be arranged in rotational symmetry.

  Further, although the piezoelectric element is formed on one side of the drive body main part, it may be formed on both sides. Furthermore, a piezoelectric element may be formed on the surface of the vibrating body.

  The optical reflecting element according to the present invention has the effect of being miniaturized, for example, a small display device, a small projector, a vehicle head-up display device, an electrophotographic copying machine, a laser printer, an optical scanner, an optical radar It can be used to

100, 100A, 100B, 200, 300 Optical reflecting element 101 First rotating shaft 102 Second rotating shaft 110 Reflector 111 Reflecting portion 121 First connector 122 Second connector 123 Third connector 124 Fourth connector 125 Fourth connector Fifth connection body 126 sixth connection body 127 seventh connection body 128 eighth connection body 141 first vibrating body 142 second vibrating body 143 third vibrating body 144 fourth vibrating body 145 fifth vibrating body 146 sixth vibrating body 147 fourth Seventh oscillator 148 eighth oscillator 149 connected body 151 first driver 152 second driver 153 third driver 154 fourth driver 155 fifth driver 156 sixth driver 157 seventh driver 158 eighth drive Body 161 first base 162 second base 163 third base 164 fourth base 171 first monitor element 172 second monitor element 173 third monitor element 174 fourth monitor element 175 fifth monitor element 176 sixth monitor element 177 seventh monitor element 178 eighth monitor element 183 first drive main body 184 second drive main body 185 first piezoelectric element 186 second piezoelectric element 187 third driver main body 188 Fourth drive body portion 189 Third piezoelectric element 190 Fourth piezoelectric element 191 Fifth drive body portion 192 Fifth piezoelectric element 193 Sixth drive body portion 194 Sixth piezoelectric element 195 Seventh drive body portion 196 Seventh Piezoelectric element 197 eighth drive body portion 198 eighth piezoelectric element 201 first rotation rocking mechanism 202 second rotation rocking mechanism 203 third rotation rocking mechanism 204 fourth rotation rocking mechanism

Claims (8)

A reflector that pivots about the first axis of rotation and reflects light;
A first connection body disposed along the first rotation axis, the reflector and the tip portion being connected;
A first vibrating body extending in a direction intersecting the first rotation axis and coupled to a proximal end of the first connector;
A second vibrating body extending in a direction intersecting the first rotating shaft on the opposite side of the first vibrating body with respect to the first rotating shaft, and connected to a base end of the first connection body;
A first driving body connected to a tip end of the first vibrating body, for rotating and rocking the first connection body via the first vibrating body;
A second driving body connected to a tip end of the second vibrating body, for rotating and rocking the first connection body via the second vibrating body;
And a second connecting body that vibratably connects the first vibrating body and the second vibrating body to a first base body,
The optical reflecting element in which the torsional rigidity per unit length in the weakest portion of the first connection body is weaker than the torsional rigidity per unit length in the weakest portion of the second connection body. A third connection body disposed along the first rotation axis on the opposite side of the first connection body with respect to the reflector, and in which the reflector and a tip end portion are connected;
A third vibrating body extending in a direction intersecting the first rotation axis and coupled to a proximal end of the third connector;
A fourth vibrating body extending in a direction intersecting the first rotation axis on the opposite side of the third connection body with respect to the first rotation axis, and connected to a proximal end of the third connection body;
A third driving body connected to a tip end of the third vibrating body and rotating the third connection body in a swinging state via the third vibrating body;
A fourth driving body connected to a tip end of the fourth vibrating body, and rotating the third connection body in a swinging state via the fourth vibrating body;
The torsional rigidity per unit length in the weakest portion of the third connection body includes the fourth connection body vibratably connecting the third vibration body and the fourth vibration body to a second base body, The optical reflecting element according to claim 1, which is weaker than the torsional rigidity per unit length in the weakest portion of the second connector. A fifth connector disposed along a second rotation axis extending in a direction intersecting with the first rotation axis, the first base and the tip portion being connected;
A fifth oscillator extending in a direction intersecting with the second rotation axis and coupled to a proximal end of the fifth connector;
A sixth vibrating body extending in a direction intersecting with the second rotating shaft on the opposite side of the fifth vibrating body with respect to the second rotating shaft, and connected to a base end of the fifth connection body;
A fifth driving body connected to a tip end portion of the fifth vibrating body, which rotationally swings the fifth connection body via the fifth vibrating body;
A sixth driving body connected to a tip end portion of the sixth vibrating body, which rotationally swings the fifth connection body via the sixth vibrating body;
And a sixth connector vibratably connecting the fifth vibrator and the sixth vibrator to a third base,
The optical reflecting element according to claim 1 or 2, wherein the torsional rigidity per unit length in the weakest portion of the fifth connection body is weaker than the torsional rigidity per unit length in the weakest portion of the sixth connection body. . A seventh connection body disposed along the second rotation axis on the opposite side of the fifth connection body with respect to the reflector, and in which the first base and the tip end portion are connected;
A seventh vibrator extending in a direction intersecting with the second rotation axis and coupled to a proximal end of the seventh connection body;
An eighth vibrating body extending in a direction intersecting the second rotating shaft on the opposite side of the seventh vibrating body with respect to the second rotating shaft, and connected to a proximal end of the seventh connection body;
A seventh driving body connected to a tip end portion of the seventh vibrating body, for rotating and rocking the seventh connection body via the seventh vibrating body;
An eighth driving body connected to a tip end portion of the eighth vibrating body, for rotating and rocking the seventh connection body via the eighth vibrating body;
And an eighth connecting body that vibratably connects the seventh vibrating body and the eighth vibrating body to a fourth base body,
The optical reflecting element according to claim 3, wherein the torsional rigidity per unit length in the weakest part of the seventh connection body is weaker than the torsional rigidity per unit length in the weakest part of the eighth connection body. In a cross section orthogonal to the first rotation axis, the first connection body has a uniform shape and a uniform area along the first rotation axis, and the second connection body extends along the first rotation axis. The optical reflecting element according to any one of claims 1 to 4, which has a uniform shape and a uniform area. The length of the said 1st connection body in the direction orthogonal to the said 1st rotation axis in the surface parallel to the reflective surface of the said reflector is shorter than the length of the said 2nd connection body in any one of Claim 1 to 5 The optical reflective element as described in one term. The optical reflecting element according to any one of claims 1 to 6, wherein a length of the first connection body in a direction orthogonal to the reflection surface of the reflector is shorter than a length of the second connection body. The optical reflecting element according to any one of claims 1 to 7, wherein the second connection body includes an attachment portion that enhances torsional rigidity.

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