JP2019078608A - Physical quantity sensor, inertia measuring device, moving body positioning device, portable electronic apparatus, electronic apparatus and moving body - Google Patents

Abstract

To provide a physical quantity sensor having a stopper having good positional accuracy and being capable of being relatively easily formed, allowing for suppression of excessive displacement of an element unit, an inertia measuring device, a moving body positioning device, a portable electronic apparatus, an electronic apparatus, and a moving body.SOLUTION: A physical quantity sensor of the present invention comprises a substrate, and an element unit having a portion that is displaceable relative to the substrate. The element unit includes a movable detection electrode, a detection spring for supporting the movable detection electrode in a first direction moving toward and away from the substrate in a displaceable manner, and a stopper that is displaced together with the movable detection electrode and can come in contact with the substrate earlier than the movable detection electrode.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a physical quantity sensor, an inertial measurement device, a mobile object positioning device, a portable electronic device, an electronic device, and a mobile object.

  For example, Patent Document 1 is used in the field of physical quantity sensors such as acceleration sensors and angular velocity sensors using MEMS technology, and the formation of a stopper that regulates excessive displacement of an element part that displaces according to an external force. The method is described. Specifically, in Patent Document 1, a step of preparing a first substrate, a step of forming a bonding layer on the first substrate, and a step of forming a second substrate on the first substrate through the bonding layer. And bonding the second substrate and removing the portion other than the portion bonded by the bonding layer.

JP, 2011-089822, A

  However, in the method of manufacturing the stopper described in Patent Document 1, there is a risk that the position of the bonding layer may be shifted with respect to the first substrate, or the patterning of the second substrate may be shifted, The position accuracy of is bad. In addition, the formation process is many, and the formation of the stopper requires a complicated process.

  An object of the present invention is a physical quantity sensor, an inertial measurement device, a mobile body positioning device, a portable quantity sensor, which has a stopper that can be formed relatively easily with high positional accuracy and can suppress excessive displacement of an element part. An electronic device, an electronic device, and a mobile object.

  The present invention has been made to solve at least a part of the above-mentioned problems, and can be realized as the following invention.

The physical quantity sensor of the present invention comprises a substrate,
And an element portion having a portion displaceable with respect to the substrate,
The element unit is
Movable detection electrode,
A detection spring which displaceably supports the movable detection electrode in a first direction toward and away from the substrate;
And a stopper which is displaced together with the movable detection electrode and which can come into contact with the substrate earlier than the movable detection electrode.
As a result, it is possible to obtain a physical quantity sensor that has a stopper that can be formed relatively easily with high positional accuracy, and that can suppress excessive displacement of the element unit.

In the physical quantity sensor according to the present invention, it is preferable that the stopper has a larger amount of displacement in the first direction than the movable detection electrode.
Thus, the stopper can be brought into contact with the substrate earlier than the movable detection electrode more reliably.

In the physical quantity sensor of the present invention, the stopper is preferably disposed on the detection spring.
This facilitates the placement of the stopper.

In the physical quantity sensor of the present invention, the detection spring is
A plurality of arms extending in a second direction orthogonal to the first direction and spaced apart in a third direction orthogonal to the first direction and the second direction;
And a connecting portion connecting the arms adjacent to each other in the third direction,
The stopper is preferably disposed at the connection portion.
Thereby, the characteristic change of the detection spring by providing a stopper can be restrained small. In addition, it becomes easy to control the displacement of the stopper.

In the physical quantity sensor of the present invention, the detection spring has three or more of the connection parts.
The stopper is disposed in one of three or more of the connection portions except the connection portion closest to one end of the detection spring and the connection portion closest to the other end of the detection spring. Is preferred.
Thus, the amount of displacement of the stopper in the first direction can be further increased, and the stopper can be more reliably brought into contact with the substrate before the movable detection electrode.

In the physical quantity sensor according to the present invention, the stopper preferably has a long end whose free end is a free end, and has a tapered portion whose width gradually decreases toward the free end.
Thereby, the impact when the stopper contacts the substrate can be alleviated. Therefore, breakage of the element portion can be effectively suppressed, and a physical quantity sensor with high mechanical strength can be obtained.

In the physical quantity sensor of the present invention, it is preferable that the stopper is located on the tip side of the tapered portion and has a wider portion that is thicker than the width of the tip of the tapered portion.
Thereby, the impact when the stopper contacts the substrate can be alleviated. Therefore, breakage of the element portion can be effectively suppressed, and a physical quantity sensor with high mechanical strength can be obtained.

In the physical quantity sensor according to the present invention, the physical quantity sensor may have an electrode disposed at a position where it can be in contact with the stopper of the substrate,
The electrode is preferably at the same potential as the stopper.
Thereby, the movement of the charge from the substrate to the element portion is eliminated, so that the decrease in the detection accuracy of the physical quantity can be effectively suppressed.

In the physical quantity sensor of the present invention, it is preferable to have a fixed detection electrode which is disposed on the substrate and is disposed to face the movable detection electrode.
As a result, the physical quantity can be detected based on the change in capacitance between the movable detection electrode and the fixed detection electrode, and the configuration of the physical quantity sensor is simplified.

In the physical quantity sensor of the present invention, the movable detection electrode includes a first movable detection electrode and a second movable detection electrode.
It is preferable that the first movable detection electrode and the second movable detection electrode are displaced in reverse phase in the first direction.
Thereby, noise is obtained by taking the difference between the detection signal (potential) generated in the fixed detection electrode facing the first movable detection electrode and the detection signal generated in the fixed detection electrode facing the second movable detection electrode. Can be canceled and the physical quantity can be detected accurately.

An inertial measurement device of the present invention is a physical quantity sensor of the present invention,
And a control circuit that controls driving of the physical quantity sensor.
Thereby, the effect of the physical quantity sensor of the present invention can be obtained, and a highly reliable inertial measurement device can be obtained.

A mobile positioning device according to the present invention comprises the inertial measurement device according to the present invention;
A receiver for receiving a satellite signal on which position information is superimposed from a positioning satellite;
An acquisition unit that acquires position information of the reception unit based on the received satellite signal;
An arithmetic unit that calculates the attitude of the moving object based on the inertial data output from the inertial measurement device;
And calculating a position of the moving body by correcting the position information based on the calculated attitude.
Thereby, the effect of the inertial measurement device of the present invention can be enjoyed, and a highly reliable mobile positioning device can be obtained.

A portable electronic device of the present invention is the physical quantity sensor of the present invention,
A case containing the physical quantity sensor;
A processing unit housed in the case and processing output data from the physical quantity sensor;
A display unit housed in the case;
And a translucent cover closing the opening of the case.
Thereby, the effect of the physical quantity sensor of the present invention can be enjoyed, and a highly reliable portable electronic device can be obtained.

An electronic device of the present invention includes the physical quantity sensor of the present invention,
And a control unit that performs control based on a detection signal output from the physical quantity sensor.
Thereby, the effect of the physical quantity sensor of the present invention can be obtained, and a highly reliable electronic device can be obtained.

A mobile according to the present invention is a physical quantity sensor according to the present invention,
And a control unit that performs control based on a detection signal output from the physical quantity sensor.
Thereby, the effect of the physical quantity sensor of the present invention can be enjoyed, and a highly reliable mobile object can be obtained.

It is a top view showing a physical quantity sensor concerning a 1st embodiment of the present invention. It is the sectional view on the AA line in FIG. It is a top view which shows the element part which the physical quantity sensor of FIG. 1 has. It is a figure which shows the voltage applied to the physical quantity sensor of FIG. It is a schematic diagram for demonstrating the vibration mode of the element part shown in FIG. It is a side view which shows the stopper which the element part shown in FIG. 3 has. It is a side view which shows the stopper which the element part shown in FIG. 3 has. It is the elements on larger scale top view of the element part shown in FIG. It is the elements on larger scale top view of the element part shown in FIG. It is a side view which shows the state which the detection spring elastically deformed. It is a side view for explaining a pull-in critical point. It is a side view for explaining a pull-in critical point. It is a side view which shows the modification of the physical quantity sensor shown in FIG. It is a side view which shows the modification of the physical quantity sensor shown in FIG. It is a partial enlarged plan view which shows the element part of the physical quantity sensor which concerns on 2nd Embodiment of this invention. It is a partial enlarged plan view which shows the element part of the physical quantity sensor which concerns on 3rd Embodiment of this invention. It is a partial enlarged plan view which shows the element part of the physical quantity sensor which concerns on 4th Embodiment of this invention. It is a disassembled perspective view of the inertial measurement device concerning a 5th embodiment of the present invention. FIG. 19 is a perspective view of a substrate included in the inertial measurement device shown in FIG. 18. It is a block diagram showing the whole system of the mobile positioning device concerning a 6th embodiment of the present invention. It is a figure which shows the effect | action of the mobile positioning device shown in FIG. It is a perspective view showing the electronic equipment concerning a 7th embodiment of the present invention. It is a perspective view which shows the electronic device which concerns on 8th Embodiment of this invention. It is a perspective view showing the electronic equipment concerning a 9th embodiment of the present invention. It is a top view showing the portable electronic equipment concerning a 10th embodiment of the present invention. It is a functional block diagram which shows schematic structure of the portable electronic device shown in FIG. It is a perspective view showing the mobile concerning a 11th embodiment of the present invention.

  Hereinafter, a physical quantity sensor, an inertial measurement device, a mobile positioning device, a portable electronic device, an electronic device and a mobile according to the present invention will be described in detail based on embodiments shown in the attached drawings.

First Embodiment
First, the physical quantity sensor according to the first embodiment of the present invention will be described.

  FIG. 1 is a plan view showing a physical quantity sensor according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a plan view showing an element portion of the physical quantity sensor of FIG. FIG. 4 is a diagram showing voltages applied to the physical quantity sensor of FIG. FIG. 5 is a schematic view for explaining a vibration mode of the element portion shown in FIG. 6 and 7 are side views showing the stoppers of the element portion shown in FIG. 3, respectively. 8 and 9 are partially enlarged plan views of the element portion shown in FIG. FIG. 10 is a side view showing a state in which the detection spring is elastically deformed. 11 and 12 are side views for explaining the pull-in critical point, respectively. 13 and 14 are side views showing modifications of the physical quantity sensor shown in FIG. 1, respectively.

  In each figure, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. A direction parallel to the X axis is also referred to as "X axis direction", a direction parallel to the Y axis as "Y axis direction", and a direction parallel to the Z axis as "Z axis direction". Moreover, the arrow tip side of each axis is also referred to as "plus side", and the opposite side is also referred to as "minus side". Moreover, the Z axis direction plus side is also referred to as "upper", and the Z axis direction minus side is also referred to as "down".

  In the specification of the present application, the term "orthogonal" includes the case where they intersect at an angle slightly inclined from 90 ° (for example, 90 ° ± 5 °), in addition to the case where they intersect at 90 °. Specifically, when the X axis is inclined by about ± 5 ° with respect to the normal direction of the YZ plane, the Y axis is inclined by about ± 5 ° with respect to the normal direction of the XZ plane. The case of being inclined by about ± 5 ° with respect to the normal direction of the XY plane is also included in “orthogonal”.

  The physical quantity sensor 1 shown in FIG. 1 is an angular velocity sensor capable of detecting an angular velocity ωy around the Y axis. The physical quantity sensor 1 includes a substrate 2, a lid 3, and an element unit 4.

  As shown in FIG. 1, the substrate 2 has a rectangular shape in plan view. Further, the substrate 2 has a recess 21 opened on the top surface. The concave portion 21 functions as a relief portion for preventing (suppressing) the contact between the element portion 4 and the substrate 2. The substrate 2 also has a plurality of mounts 22 (221, 222, 224, 225) protruding from the bottom surface of the recess 21. The element portion 4 is bonded to the upper surface of the mount 22. Thereby, the element portion 4 can be fixed to the substrate 2 in a state where the contact with the substrate 2 is prevented. Further, the substrate 2 has groove portions 23, 24, 25, 26, 27, 28 opened on the upper surface.

As the substrate 2, for example, a glass material containing mobile ions (alkali metal ions) such as sodium ion (Na ⁺ ), lithium ion (Li ⁺ ), etc. (eg, Tempax glass (registered trademark), Pyrex glass (registered trademark) And the like can be used. Thus, for example, as described later, the substrate 2 and the element portion 4 can be anodically bonded, and these can be strongly bonded. In addition, since the light transmitting substrate 2 is obtained, it is possible to visually recognize the state of the element unit 4 from the outside of the physical quantity sensor 1 through the substrate 2. However, the constituent material of the substrate 2 is not particularly limited, and a silicon substrate, a ceramic substrate or the like may be used.

  As shown in FIG. 1, fixed detection electrodes 81 and 82 are disposed on the bottom of the recess 21. Wirings 73, 74, 75, 76, 77, 78 are disposed in the grooves 23, 24, 25, 26, 27, 28. The wires 73, 74, 77, 78 are electrically connected to the element unit 4, and the wires 75, 76 are electrically connected to the fixed detection electrodes 81, 82. In addition, one end portions of the wires 73, 74, 75, 76, 77, 78 are exposed to the outside of the lid 3 and function as electrode pads P for electrical connection with an external device.

  As shown in FIG. 1, the lid 3 has a rectangular plan view shape. Moreover, as shown in FIG. 2, the cover 3 has the recessed part 31 opened to a lower surface. The lid 3 is joined to the top surface of the substrate 2 so as to accommodate the element portion 4 in the recess 31. Then, a storage space S for storing the element portion 4 is formed inside the lid 3 and the substrate 2.

  Further, as shown in FIG. 2, the lid 3 has a communication hole 32 communicating the inside and the outside of the storage space S. Therefore, the storage space S can be replaced with a desired atmosphere via the communication hole 32. Further, a sealing member 33 is disposed in the communication hole 32, and the communication hole 32 is hermetically sealed by the sealing member 33. The storage space S is preferably in a reduced pressure state, particularly in a vacuum state. Thereby, the viscous resistance is reduced, and the element unit 4 can be vibrated efficiently.

  For example, a silicon substrate can be used as such a lid 3. However, the lid 3 is not particularly limited, and for example, a glass substrate or a ceramic substrate may be used. The method of bonding the substrate 2 and the lid 3 is not particularly limited, and may be appropriately selected depending on the materials of the substrate 2 and the lid 3. However, for example, bonding surfaces activated by anodic bonding or plasma irradiation Examples include activation bonding for bonding together, bonding using a bonding material such as glass frit, and diffusion bonding for bonding metal films formed on the upper surface of the substrate 2 and the lower surface of the lid 3. In the present embodiment, the substrate 2 and the lid 3 are bonded via the glass frit 39 (low melting point glass).

  The element unit 4 is disposed in the storage space S, and is joined to the upper surface of the mount 22. The element portion 4 may be formed, for example, by patterning a conductive silicon substrate doped with an impurity such as phosphorus (P) or boron (B) by a dry etching method (silicon deep etching, particularly a Bosch method). it can. Hereinafter, the element unit 4 will be described in detail based on FIG. Hereinafter, a straight line that intersects with the center O of the element unit 4 and extends in the Y-axis direction in plan view from the Z-axis direction is also referred to as a “virtual straight line α”.

  As shown in FIG. 3, the shape of the element unit 4 is symmetrical with respect to the imaginary straight line α. Further, the element unit 4 includes two drive units 41A and 41B disposed on both sides of the imaginary straight line α. The drive portion 41A has a comb-shaped movable drive electrode 411A, and a fixed drive electrode 412A which has a comb shape and is disposed so as to be engaged with the movable drive electrode 411A. Similarly, the drive unit 41B has a comb-shaped movable drive electrode 411B and a fixed drive electrode 412B which has a comb shape and is disposed so as to be engaged with the movable drive electrode 411B.

  The fixed drive electrodes 412A and 412B are each bonded to the upper surface of the mount 221 and fixed to the substrate 2. The movable drive electrodes 411A and 411B are electrically connected to the wiring 73, respectively, and the fixed drive electrodes 412A and 412B are electrically connected to the wiring 74, respectively.

  Further, the element unit 4 includes four fixing portions 42A arranged around the driving portion 41A and four fixing portions 42B arranged around the driving portion 41B. The fixing portions 42 </ b> A and 42 </ b> B are bonded to the top surface of the mount 222 and fixed to the substrate 2.

  Further, the element unit 4 has four drive springs 43A for connecting the fixed portions 42A and the movable drive electrodes 411A, and four drive springs 43B for connecting the fixed portions 42B and the movable drive electrodes 411B. ing. Each drive spring 43A is elastically deformed in the X-axis direction to allow displacement of the movable drive electrode 411A in the X-axis direction, and each drive spring 43B is elastically deformed in the X-axis direction to move the X-axis of the movable drive electrode 411B. Displacement in the direction is allowed.

  To vibrate the movable drive electrodes 411A and 411B, for example, the voltage V1 shown in FIG. 4 is applied to the movable drive electrodes 411A and 411B via the wiring 73, and the voltage V2 shown in FIG. The voltage is applied to the electrodes 412A and 412B. The voltage V1 is a constant voltage of about 15 V larger than the GND reference (for example, a potential of about 0.9 V), and the voltage V2 is a rectangular wave centered on the GND reference.

  As a result, electrostatic attraction is generated between movable drive electrode 411A and fixed drive electrode 412A and between movable drive electrode 411B and fixed drive electrode 412B, and movable drive electrode 411A moves drive spring 43A in the X-axis direction. The movable drive electrode 411B vibrates in the X axis direction while elastically deforming the drive spring 43B in the X axis direction while vibrating in the X axis direction while being elastically deformed. As described above, since the drive parts 41A and 41B are disposed symmetrically with respect to the imaginary straight line α, the movable drive electrodes 411A and 411B vibrate in the opposite phase in the X axis direction so as to approach and separate from each other. Do. Therefore, the vibration of the movable drive electrodes 411A and 411B is cancelled, and the vibration leakage can be reduced. Hereinafter, this vibration mode is also referred to as "drive vibration mode".

  The voltages V1 and V2 are not particularly limited as long as the driving vibration mode can be excited. Further, in the physical quantity sensor 1 of the present embodiment, an electrostatic drive system in which the drive vibration mode is excited by electrostatic attraction is used, but a system in which excitation is not particularly limited, for example, a piezoelectric drive system, Lorentz of a magnetic field It is also possible to apply an electromagnetic drive system or the like using power.

  The element unit 4 further includes a detection unit 44A located between the drive unit 41A and the virtual straight line α, and a detection unit 44B located between the drive unit 41B and the virtual straight line α. The detection unit 44A is configured of a plate-like movable detection electrode 441A. Similarly, the detection unit 44B is configured of a plate-like movable detection electrode 441B. The movable detection electrode 441A is disposed to face the fixed detection electrode 81, and the movable detection electrode 441B is disposed to face the fixed detection electrode 82.

  The movable detection electrodes 441A and 441B are electrically connected to the wiring 73, the fixed detection electrode 81 is electrically connected to the wiring 75, and the fixed detection electrode 82 is electrically connected to the wiring 76. . When the physical quantity sensor 1 is driven, a capacitance Ca is formed between the movable detection electrode 441A and the fixed detection electrode 81, and a capacitance Cb is formed between the movable detection electrode 441B and the fixed detection electrode 82. Ru.

  Further, the element unit 4 includes two fixing portions 451 and 452 disposed between the detection units 44A and 44B. The fixing portions 451 and 452 are respectively bonded to the upper surface of the mount 224 and fixed to the substrate 2. In the present embodiment, the movable drive electrodes 411A and 411B and the movable detection electrodes 441A and 441B are electrically connected to the wiring 73 through the fixed portions 451 and 452, respectively.

  The element unit 4 also includes four detection springs 46A connecting the movable detection electrode 441A and the fixed portions 42A, 451 and 452, and four detection springs connecting the movable detection electrode 441B and the fixed portions 42B, 451 and 452 And 46B. Each detection spring 46A elastically deforms in the X-axis direction to allow displacement of the movable detection electrode 441A in the X-axis direction, and elastic deformation in the Z-axis direction causes displacement of the movable detection electrode 441A in the Z-axis direction Permissible. Similarly, each detection spring 46B elastically deforms in the X-axis direction to allow displacement of the movable detection electrode 441B in the X-axis direction, and elastically deforms in the Z-axis direction to move the movable detection electrode 441B in the Z-axis direction Displacement is acceptable.

  The element unit 4 is located between the movable drive electrode 411A and the movable detection electrode 441A, and is located between the beam 47A connecting these, the movable drive electrode 411B and the movable detection electrode 441B, and these are connected And the beam 47B. Therefore, as shown in FIG. 5, in the drive vibration mode, the movable detection electrodes 441A and 441B also vibrate in the opposite phase in the X-axis direction integrally with the movable drive electrodes 411A and 411B. In other words, in the drive vibration mode, the movable body 4A which is an assembly of the movable drive electrode 411A, the movable detection electrode 441A and the beam 47A, and the movable body 4B which is an assembly of the movable drive electrode 411B, the movable detection electrode 441B and the beam 47B. And oscillate in the opposite phase in the X-axis direction.

  When angular velocity ωy is applied to the physical quantity sensor 1 while driving in such a driving vibration mode, the movable detection electrodes 441A and 441B are detected spring as shown by an arrow A in FIG. It vibrates in the opposite phase in the Z-axis direction while elastically deforming 46A and 46B in the Z-axis direction. In addition, below, this vibration mode is also called "detection vibration mode." In the detection vibration mode, since the movable detection electrodes 441A and 441B vibrate in the Z-axis direction, the gap between the movable detection electrode 441A and the fixed detection electrode 81 and the gap between the movable detection electrode 441B and the fixed detection electrode 82 change, Along with that, the capacitances Ca and Cb change respectively. Therefore, the angular velocity ωy can be obtained based on the changes in the capacitances Ca and Cb.

  In the detection vibration mode, the electrostatic capacitance Cb decreases as the electrostatic capacitance Ca increases, and conversely, the electrostatic capacitance Cb increases as the electrostatic capacitance Ca decreases. Therefore, the detection signal (signal according to the size of the capacitance Ca) output from the wiring 75 and the detection signal (signal according to the size of the capacitance Cb) output from the wiring 76 are differentially By performing calculation (subtraction processing: Ca-Cb), noise can be canceled, and the angular velocity ωy can be detected more accurately.

  Further, as shown in FIG. 3, the element unit 4 has a frame 48 located at the central portion (between the detection units 44A and 44B). The frame 48 has an “H” shape, and includes a defective portion 481 (recessed portion) located on the positive side in the Y-axis direction and a defective portion 482 (recessed portion) located on the negative side in the Y-axis direction. The fixing portion 451 is disposed over the inside and outside of the defect portion 481, and the fixing portion 452 is disposed over the inside and outside of the defect portion 482. As a result, the fixing portions 451 and 452 can be formed long in the Y-axis direction, and the bonding area with the substrate 2 is increased accordingly, and the bonding strength between the substrate 2 and the element portion 4 is increased.

  The element portion 4 is located between the fixed portion 451 and the frame 48, and is connected with a frame spring 488, and between the fixed portion 452 and the frame 48 with a frame spring 489 for connecting these. ,have. The frame springs 488 and 489 respectively extend in the Y-axis direction, and are elastically deformable in the X-axis direction.

  Further, the element portion 4 is located between the frame 48 and the movable detection electrode 441A, and is a connection spring for connecting these, and between the frame 48 and the movable detection electrode 441B, and a connection spring for connecting these. And 40B. The connection spring 40A supports the movable detection electrode 441A together with the detection spring 46A, and the connection spring 40B supports the movable detection electrode 441B together with the detection spring 46B. As a result, the movable detection electrodes 441A and 441B can be supported in a more stable posture, and unnecessary vibration (spurious) of the movable detection electrodes 441A and 441B can be reduced.

  The element unit 4 further includes monitor units 49A and 49B for detecting the vibration state of the movable detection electrodes 441A and 441B in the drive vibration mode. The monitor unit 49A includes a comb-shaped movable monitor electrode 491A disposed on the movable detection electrode 441A, and fixed monitor electrodes 492A and 493A which are comb-shaped and are engaged with the movable monitor electrode 491A. There is. Similarly, the monitor unit 49B includes a comb-like movable monitor electrode 491B disposed on the movable detection electrode 441B, and fixed monitor electrodes 492B and 493B having a comb-like shape and engaged with the movable monitor electrode 491B. Have. The fixed monitor electrodes 492A, 493A, 492B, 493B are respectively bonded to the upper surface of the mount 225 and fixed to the substrate 2.

  In the monitor 49A, the fixed monitor electrode 492A is positioned on the positive side in the X-axis direction of the movable monitor electrode 491A, and the fixed monitor electrode 493A is positioned on the negative side in the X-axis direction. On the other hand, in the monitor unit 49B, the fixed monitor electrode 492B is positioned on the minus side in the X axis direction of the movable monitor electrode 491B, and the fixed monitor electrode 493B is positioned on the plus side in the X axis direction.

  The movable monitor electrodes 491A and 491B are electrically connected to the wiring 73, the fixed monitor electrodes 492A and 492B are electrically connected to the wiring 77, and the fixed monitor electrodes 493A and 493B are electrically connected to the wiring 78. It is connected. When the physical quantity sensor 1 is driven, a capacitance Cc is formed between the movable monitor electrode 491A and the fixed monitor electrode 492A and between the movable monitor electrode 491B and the fixed monitor electrode 492B, and the movable monitor electrode 491A and the fixed monitor A capacitance Cd is formed between the electrode 493A and between the movable monitor electrode 491B and the fixed monitor electrode 493B.

  As described above, in the drive vibration mode, since the movable detection electrodes 441A and 441B vibrate in the X-axis direction, the gap between the movable monitor electrode 491A and the fixed monitor electrodes 492A and 493A and the movable monitor electrode 491B and the fixed monitor electrode 492B, The gap with 493 B changes, and the capacitances Cc and Cd change accordingly. Therefore, the vibration state of the movable detection electrodes 441A and 441B can be detected based on the changes in the capacitances Cc and Cd.

  Further, the element unit 4 has a stopper 5 having a function of restricting excessive displacement of the movable detection electrodes 441A and 441B in the Z-axis direction. The stopper 5 is a stopper 51A provided on a detection spring 46A (46A ′) connecting the fixed portion 451 and the movable detection electrode 441A, and a detection spring 46A (46A ′ ′) connecting the fixed portion 452 and the movable detection electrode 441A. , A stopper 51B provided on a detection spring 46B (46B ') connecting the fixed portion 451 and the movable detection electrode 441B, and a detection spring 46B connecting the fixed portion 452 and the movable detection electrode 441B And a stopper 52B provided at (46B ′ ′). By integrating the stopper 5 with the element portion 4 in this manner, the formation of the stopper 5 is facilitated. Moreover, since the positional deviation with the other part of the element part 4 is suppressed, the position accuracy of the stopper 5 is high, and the function as the stopper 5 can be exhibited with high accuracy.

  The stopper 51A extends from the detection spring 46A 'to the positive side in the X-axis direction. Similarly, the stopper 52A extends from the detection spring 46A' 'to the positive side in the X-axis direction. The stopper 51A is a movable detection electrode. The stopper 52A is located outside (the Y axis direction minus side) of the movable detection electrode 441A so as to avoid contact with the 441A, and the stopper 52A is outside the movable detection electrode 441A so as to avoid contact with the movable detection electrode 441A. (Y-axis direction plus side) is located.

  The stopper 51B extends from the detection spring 46B 'to the minus side in the X-axis direction, and similarly, the stopper 52B extends from the detection spring 46B "to the minus side in the X-axis direction. The movable detection electrode 441B is located outside the movable detection electrode 441B (the negative side in the Y-axis direction) so as to avoid contact with the detection electrode 441B, and the stopper 52B is prevented from contact with the movable detection electrode 441B. (Y axis direction plus side) of the

  Here, with respect to the stoppers 51A and 51B arranged in line in the Y-axis direction, the stopper 51A is extended toward the opposite side (plus side in the X-axis direction) to the stopper 51B, and the stopper 51B is opposite to the stopper 51A (X Since it extends toward the negative side in the axial direction, these contacts can be prevented. Therefore, each of the stoppers 51A and 51B can be formed sufficiently long. Similarly, with respect to the stoppers 52A and 52B arranged side by side in the Y-axis direction, the stopper 52A is extended toward the opposite side (plus side in the X-axis direction) to the stopper 52B, and the stopper 52B is opposite to the stopper 52A (X Since it extends toward the negative side in the axial direction, these contacts can be prevented. Therefore, each of the stoppers 52A and 52B can be formed sufficiently long. Therefore, as described later, the stoppers 51A, 52A, 51B, 52B can be brought into contact with the bottom surface of the recess 21 earlier than the movable detection electrodes 441A, 441B, and the Z axis of the movable detection electrodes 441A, 441B Excessive displacement in the direction can be suppressed.

  As shown in FIGS. 6 and 7, when the movable detection electrodes 441A and 441B vibrate in the opposite phase in the X-axis direction in the detection vibration mode, the detection springs 46A ', 46A ", 46B', 46B" It is elastically deformed as it swings (rotates) around the imaginary straight line α. Then, the stoppers 51A, 52A, 51B, 52B are inclined so as to swing (rotate) around the imaginary straight line α in accordance with the elastic deformation of the detection springs 46A ′, 46A ′ ′, 46B ′, 46B ′ ′. When the inclination is increased, the tip end contacts the substrate 2 (the bottom surface of the recess 21).

  Specifically, as shown in FIG. 6, when the movable detection electrode 441A is displaced to the negative side in the Z-axis direction and the movable detection electrode 441B is displaced to the positive side in the Z-axis direction, it precedes the movable detection electrode 441A. The tips of the stoppers 51A and 52A contact the bottom of the recess 21. Conversely, as shown in FIG. 7, when the movable detection electrode 441A is displaced to the positive side in the Z-axis direction and the movable detection electrode 441B is displaced to the negative side in the Z-axis direction, the stopper is provided earlier than the movable detection electrode 441B. The tips of 51 B and 52 B come in contact with the bottom of the recess 21. In this manner, when the stoppers 51A, 52A or the stoppers 51B, 52B contact the bottom surface of the recess 21 earlier than the movable detection electrode 441A or the movable detection electrode 441B, the Z direction of the movable detection electrodes 441A, 441B is further increased. Displacement is regulated. Therefore, according to the stoppers 51A, 52A, 51B, 52B, excessive displacement of the movable detection electrodes 441A, 441B in the Z-axis direction can be effectively suppressed.

  In particular, as shown in FIG. 8, the stoppers 51A, 52A extend from the detection springs 46A ′, 46A ′ ′ in the direction away from the imaginary straight line α, which is the rotation center axis, and their tip portions (locations in contact with the recess 21). The separation distance Da1 between the virtual straight line α and the virtual straight line α is larger than the separation distance Da2 between the movable detection electrode 441A and the virtual straight line α, that is, the relationship of Da1> Da2 is satisfied. Thus, the displacement amount La1 in the Z-axis direction of the tips of the stoppers 51A and 52A is larger than the displacement amount La2 in the Z-axis direction of the movable detection electrode 441A, that is, the relationship of La1> La2 is satisfied. Thereby, the stoppers 51A and 52A can be brought into contact with the recess 21 more reliably than the movable detection electrode 441A.

  Similarly, as shown in FIG. 8, the stoppers 51B and 52B extend from the detection springs 46B ′ and 46B ′ ′ in a direction away from the imaginary straight line α which is the rotation center axis, and their tip portions (locations in contact with the recess 21 Is larger than the separation distance Db2 between the movable detection electrode 441B and the virtual straight line .alpha .. That is, the relationship of Db1> Db2 is satisfied. As shown, the displacement Lb1 in the Z-axis direction of the tips of the stoppers 51B and 52B is larger than the displacement Lb2 in the Z-axis direction of the movable detection electrode 441 B. That is, the relationship of Lb1> Lb2 is satisfied. Thus, the stoppers 51B and 52B can be brought into contact with the recess 21 more reliably than the movable detection electrode 441B.

  Here, the shapes of the detection springs 46A ', 46A ", 46B', 46B" will be described in detail. However, since the detection springs 46A ′, 46A ′ ′, 46B ′, 46B ′ ′ are formed symmetrically, the shape of the detection spring 46A ′ will be representatively described below, and the other detection springs 46A ′ ′, 46B ′ ′ The description of ', 46B' is omitted.

  As shown in FIG. 9, the detection spring 46A 'has a serpentine shape that reciprocates a plurality of times in the Y-axis direction. Specifically, the detection spring 46A 'includes six arms 461a, 461b, 461c, 461d, 461e, and 461f which extend in the Y-axis direction and are spaced apart in the X-axis direction. The arm 461a is shared with the detection spring 46B ', and is connected to the fixing portion 451 at the end on the plus side in the Y-axis direction.

  Further, the detection spring 46A ′ is connected to a connecting portion 462 connecting the ends of the arms 461a and 461b on the negative side in the Y-axis direction and a connecting portion 463 connecting ends on the positive side of the arms 461b and 461c on the Y-axis direction. A connecting portion 464 connecting the ends of the arms 461c and 461d on the negative side in the Y-axis direction; a connecting portion 465 connecting the ends on the positive side of the Y-axis direction of the arms 461d and 461e; and arms 461e and 461f And a connection portion 467 for connecting the end portion of the arm 461f on the Y axis direction plus side and the movable detection electrode 441A.

  In the following, for convenience of explanation, the arms 461a, 461b, 461c, 461d, 461e, and 461f are also referred to as "arms 461a to 461f", and the connection portions 462, 463, 464, 465, 466, and 467 are referred to as "connection portions 462 to 462f. It is also called 467 ".

  In the detection spring 46A 'having such a shape, the stopper 51A is disposed at the connection portion 464. The reason will be described in detail below. In the detection spring 46A ', first, it is preferable to provide the stopper 51A in any of the connection portions 462-467. The connection portions 462 to 467 have less influence on the characteristics (e.g., spring constant) of the detection spring 46A 'than the arms 461a to 461f. Therefore, the characteristic change of detection spring 46A 'by providing stopper 51A can be restrained small. The connection portions 462 to 467 are less likely to be torsionally deformed as compared to the arms 461a to 461f, and the degree of torsion is stable as compared with the arms 461a to 461f. Therefore, it becomes easy to control the displacement of the stopper 51A.

  Furthermore, it is preferable to provide the stopper 51A in any one of the connection parts 462, 464, and 464 located in the Y axis direction minus side among the connection parts 462-467. Since these connection portions 462, 464, 466 face the outside of the element portion 4, the stopper 51A can be disposed without being disturbed by other portions, and the stopper 51A can be formed long. it can.

  Furthermore, among the connection portions 462, 464, 466, it is preferable to provide the stopper 51A in the connection portion 464 located at a position (central portion) far from both ends of the detection spring 46A '. As shown in FIG. 10, the connecting portion 464 located at the central portion has a larger rotation angle θz around the Z axis than the connecting portions 462 and 466 located at both ends. Therefore, by providing the stopper 51A in the connection portion 464, the displacement amount La1 of the stopper 51A in the Z-axis direction can be made larger, and the bottom surface of the recess 21 contacts the movable detection electrode 441A more surely than the movable detection electrode 441A. It can be done. In addition, the stopper 51A can be shortened as much as the displacement amount La1 of the stopper 51A in the Z-axis direction is increased. Therefore, the rigidity of the stopper 51A can be enhanced, and breakage of the stopper 51A can be effectively suppressed.

  For the above reasons, the stopper 51A is disposed at the connection portion 464. However, the arrangement of the stopper 51A is not particularly limited. For example, the stopper 51A may be disposed in any of the arms 461a to 461f, or may be disposed in any of the connection portions 462, 463, 465, 466, and 467 other than the connection portion 464. Further, two or more stoppers 51A may be arranged on the detection spring 46A.

  In the above description, although the stopper 5 can regulate the excessive displacement of the movable detection electrodes 441A and 441B in the Z-axis direction, this “excessive displacement in the Z-axis direction” For example, there is a displacement that causes the movable detection electrodes 441A and 441B to collide with the substrate 2 (the bottom of the recess 21). When such a displacement occurs, the electrostatic attraction force generated between the movable detection electrode 441A and the fixed detection electrode 81 causes them to stick, or between the movable detection electrode 441B and the fixed detection electrode 82. The electrostatic attraction force causes them to stick, making it impossible to vibrate the element unit 4. That is, the angular velocity ωy can not be detected. In addition, the detection springs 46A and 46B may be deformed excessively, and the portions may be damaged.

  Therefore, the stoppers 51A and 52A contact the bottom surface of the recess 21 before the movable detection electrode 441A contacts the bottom surface of the recess 21, and the stoppers 51B and 52B before the movable detection electrode 441B contacts the bottom surface of the recess 21 Contact the bottom of the recess 21. Thereby, the sticking of the movable detection electrodes 441A and 441B and the fixed detection electrodes 81 and 82 described above and the breakage of the element unit 4 can be effectively suppressed.

  Further, the “excessive displacement in the Z-axis direction” is, for example, as shown in FIG. 11, the mechanical spring force Fa1 (the elastically deformed portion of the element portion 4) for returning the movable detection electrode 441A to the natural state. 12 is a force that causes the relationship between the movable detection electrode 441A and the fixed detection electrode 81 to become a natural state, and the electrostatic attraction force Fa2 generated between the movable detection electrode 441A and the fixed detection electrode 81 becomes Fa1 <Fa2, or As shown in the following, the relationship between the mechanical spring force Fb1 for returning the movable detection electrode 441B to the natural state and the electrostatic attractive force Fb2 generated between the movable detection electrode 441B and the fixed detection electrode 82 is Fb1 <Fb2 There is a displacement that makes it When such displacement occurs, the mechanical spring can not resist the electrostatic attraction, and the movable detection electrode 441A and the fixed detection electrode 81 stick, or the movable detection electrode 441B and the fixed detection electrode 82 stick As a result, the element unit 4 can not be vibrated. That is, the angular velocity ωy can not be detected. The position of the movable detection electrode 441A where Fa1 = Fa2 and the position of the movable detection electrode 441B where Fb1 = Fb2 are respectively referred to as “pull-in critical point Zp”.

  Therefore, as shown in FIG. 11, the stoppers 51A, 52A contact the bottom of the recess 21 before the movable detection electrode 441A is displaced to the pull-in critical point Zp, that is, in the state of Fa1> Fa2. Similarly, as shown in FIG. 12, the stoppers 51B and 52B contact the bottom of the recess 21 before the movable detection electrode 441B is displaced to the pull-in critical point Zp, that is, in the state of Fb1> Fb2. Thereby, the sticking between the movable detection electrodes 441A and 441B described above and the fixed detection electrodes 81 and 82 can be effectively suppressed.

  Here, as an excellent point of the stoppers 51A, 52A, 51B, 52B, the movable detection electrode 441A, by adjusting the extension length (length in the X-axis direction) of the stoppers 51A, 52A, 51B, 52B, It is possible to limit the displacement range of 441 B in the Z-axis direction. As described above, the element unit 4 is formed by patterning the silicon substrate by dry etching, and according to the method, the extension lengths of the stoppers 51A, 52A, 51B, 52B are accurately controlled. be able to. Therefore, the stopper 5 can exhibit its function more reliably and precisely.

  The stopper 5 has been described above. However, the configuration of the stoppers 51A, 52A, 51B, and 52B is not particularly limited, and is not limited to, for example, a linear shape as in the present embodiment, and may be curved or bent halfway. Moreover, it is not limited to one thing extended in the X-axis direction like this embodiment, For example, you may branch into two or more in the middle.

  As shown in FIGS. 3, 6 and 7, the physical quantity sensor 1 has an electrode 83 disposed on the bottom of the recess 21 and in contact with the stoppers 51A, 52A, 51B, 52B. The electrode 83 is electrically connected to the wiring 73, and has the same potential as the stoppers 51A, 52A, 51B, and 52B. Thereby, the following effects can be exhibited.

The alkali metal ions (Na ⁺ ) in the substrate 2 move to the bottom side of the recess 21 by the electric field generated during driving of the physical quantity sensor 1, and the bottom of the recess 21 is charged. Then, when the surface of the substrate 2 is exposed from the point of contact with the stoppers 51A, 52A, 51B, 52B, the charge on the surface of the substrate 2 will occur when the stoppers 51A, 52A, 51B, 52B are in contact with the substrate 2. It moves to the element unit 4 through the stoppers 51A, 52A, 51B, 52B, and the movement of the charge causes the characteristics of the element unit 4 to fluctuate. Therefore, the detection accuracy of the angular velocity ωy may be reduced. On the other hand, by disposing the electrode 83 having the same potential as the stoppers 51A, 52A, 51B, 52B in a place where it can contact the stoppers 51A, 52A, 51B, 52B, the movement of the charge as described above is eliminated. The decrease in detection accuracy of the angular velocity ωy can be effectively suppressed.

  The physical quantity sensor 1 of the present embodiment has been described above. As described above, such a physical quantity sensor 1 includes the substrate 2 and the element unit 4 having a portion that can be displaced with respect to the substrate 2. The element unit 4 includes movable detection electrodes 441A and 441B, a detection spring 46A which displaceably supports the movable detection electrode 441A in the Z-axis direction (first direction) in which the movable detection electrode 441A approaches and separates from the substrate 2, A detection spring 46B supporting the electrode 441B so as to be displaceable in the Z-axis direction (first direction) approaching and separating with respect to the substrate 2, and the movable detection electrodes 441A and 441B displace in the Z-axis direction. And a stopper 5 which can come into contact with the substrate 2 before 441 B. As described above, by having the stopper 5, excessive displacement of the movable detection electrodes 441A and 441B in the Z-axis direction can be restricted, and sticking and breakage of the movable detection electrodes 441A and 441B to the substrate 2 are effective. Can be suppressed. Further, by integrating the stopper 5 with the element portion 4, the formation of the stopper 5 is facilitated. Moreover, since the positional deviation with the other part of the element part 4 is suppressed, the position accuracy of the stopper 5 is high, and the function as the stopper 5 can be exhibited with high accuracy.

  In the present embodiment, the substrate 2 is the “substrate of the present invention”. However, the present invention is not limited thereto. For example, the lid 3 may be the “substrate of the present invention”. That is, as shown in FIG. 13, the stopper 5 may not be in contact with the substrate 2 (bottom of the recess 21) but may be in contact with the lid 3 (bottom of the recess 31). In this case, the electrode 83 may be omitted. Further, as shown in FIG. 14, the stopper 5 may be in contact with both the substrate 2 (bottom of the recess 21) and the lid 3 (bottom of the recess 31).

  Further, as described above, in the physical quantity sensor 1, the stopper 5 (51A, 52A, 51B, 52B) has a larger amount of displacement in the Z-axis direction than the movable detection electrodes 441A, 441B. That is, the relationships of La1> La2 and Lb1> Lb2 are satisfied. Thereby, the stoppers 51B and 52B can be brought into contact with the recess 21 more reliably than the movable detection electrode 441B. As described above, La1 is the amount of displacement of the tips of the stoppers 51A and 52A in the Z-axis direction, La2 is the amount of displacement of the movable detection electrode 441A in the Z-axis direction, and Lb1 is the tip of the stoppers 51B and 52B The displacement amount of the portion in the Z-axis direction, Lb2 is the displacement amount of the movable detection electrode 441B in the Z-axis direction.

  Further, as described above, in the physical quantity sensor 1, the stoppers 5 (51A, 52A, 51B, 52B) are disposed in the detection springs 46A, 46B. Specifically, the stoppers 51A, 52A are disposed on the detection spring 46A, and the stoppers 51B, 52B are disposed on the detection spring 46B. Thereby, arrangement | positioning of the stopper 5 (51A, 52A, 51B, 52B) becomes easy. However, the arrangement of the stoppers 5 (51A, 52A, 51B, 52B) is not particularly limited, and may be arranged in the connection springs 40A, 40B as described in the fourth embodiment to be described later, for example.

  Further, as described above, in the physical quantity sensor 1, the detection spring 46A ′ extends in the Y-axis direction (the second direction orthogonal to the first direction), and is orthogonal to the X-axis direction (Z-axis direction and Y-axis direction) And a plurality of arms 461a to 461f spaced apart in the third direction) and connection portions 462 to 467 connecting arms adjacent in the X-axis direction. And the stopper 51A is arrange | positioned at the connection parts 462-467 (this embodiment connection part 464). The connection portions 462 to 467 have less influence on the characteristics of the detection spring 46A 'than the arms 461a to 461f. Therefore, the characteristic change of detection spring 46A 'by providing stopper 51A can be restrained small. The connection portions 462 to 467 are less likely to be torsionally deformed as compared to the arms 461a to 461f, and the degree of torsion is stable as compared with the arms 461a to 461f. Therefore, it becomes easy to control the displacement of the stopper 51A. The same applies to the detection spring 46A ′ ′ where the stopper 52A is disposed, the detection spring 46B ′ where the stopper 51B is disposed, and the detection spring 46B ′ ′ where the stopper 52B is disposed.

  Further, as described above, in the physical quantity sensor 1, the detection spring 46A ′ has three or more (seven in the present embodiment) connection portions 462 to 467, and the stopper 51A has three or more connection portions 462 The connection portion 462 closest to one end of the detection spring 46A ′ and one of the connection portions 467 closest to the other end of the detection spring 46A ′ are arranged in one of 467 (in the present embodiment, the connection portion 464) ing. The connection portion 464 located at the center portion has a larger rotation angle θz around the Z axis than the connection portions 462 and 467 located at both ends. Therefore, by providing the stopper 51A in the connection portion 464, the displacement amount of the stopper 51A in the Z-axis direction can be further increased, and the contact of the bottom surface of the recess 21 with the movable detection electrode 441A can be made more reliably. be able to. Further, the length of the stopper 51A can be shortened by the amount that the displacement amount of the stopper 51A in the Z-axis direction can be increased. Therefore, the rigidity of the stopper 51A can be enhanced, and breakage of the stopper 51A can be effectively suppressed. The same applies to the detection spring 46A ′ ′ where the stopper 52A is disposed, the detection spring 46B ′ where the stopper 51B is disposed, and the detection spring 46B ′ ′ where the stopper 52B is disposed.

  In addition, as described above, the physical quantity sensor 1 includes the electrode 83 disposed at a position that can come in contact with the stopper 5 of the substrate 2. The electrode 83 is at the same potential as the stopper 5. As a result, the movement of the charge from the substrate 2 to the element unit 4 is eliminated, so that the decrease in the detection accuracy of the angular velocity ωy can be effectively suppressed.

  Further, as described above, the physical quantity sensor 1 includes the fixed detection electrodes 81 and 82 disposed on the substrate 2 and disposed to face the movable detection electrodes 441A and 441B. Thus, based on the change in capacitance Ca between movable detection electrode 441A and fixed detection electrode 81 and the change in capacitance Cb between movable detection electrode 441B and fixed detection electrode 82, the angular velocity ωy Can be detected, so that the configuration of the physical quantity sensor 1 is simplified.

  Further, as described above, in the physical quantity sensor 1, the movable detection electrode includes the movable detection electrode 441A (first movable detection electrode) and the movable detection electrode 441B (second movable detection electrode). The movable detection electrode 441A and the movable detection electrode 441B are displaced in the opposite phase in the Z-axis direction. The vibration of the movable detection electrodes 441A and 441B is canceled, and the vibration leakage to the substrate 2 can be reduced. In addition, a detection signal (a signal corresponding to the size of the electrostatic capacitance Ca) output from the fixed detection electrode 81 and a detection signal (a signal corresponding to the size of the electrostatic capacitance Cb) output from the fixed detection electrode 82 By performing a differential operation (subtraction process: Ca-Cb), the noise can be canceled and the angular velocity ωy can be detected more accurately.

Second Embodiment
Next, a physical quantity sensor according to a second embodiment of the present invention will be described.

  FIG. 15 is a partially enlarged plan view showing the element unit of the physical quantity sensor according to the second embodiment of the present invention.

  The physical quantity sensor 1 according to the present embodiment is the same as the physical quantity sensor 1 according to the first embodiment described above, except that the configurations of the element units 4 (the stoppers 51A, 52A, 51B, 52B) are different.

  In the following description, the physical quantity sensor 1 according to the second embodiment will be described focusing on the differences from the first embodiment described above, and the description of the same matters will be omitted. Further, in FIG. 15, the same components as those in the first embodiment described above are denoted by the same reference numerals. In addition, since the stoppers 51A, 52A, 51B, and 52B have the same configuration, the stopper 51A will be representatively described below, and the description of the stoppers 52A, 51B, and 52B will be omitted.

  As shown in FIG. 15, in the element portion 4 of the present embodiment, the tip end portion of the stopper 51A is tapered. That is, the stopper 51A has a tapered portion 511A whose width W (length in the Y-axis direction) gradually decreases toward the tip end side. Thus, for example, as in the first embodiment described above, the distal end portion of the stopper 51A can be softened as compared with a configuration in which the width W does not have the tapered portion 511A and is substantially constant. Therefore, the impact when the stopper 51A contacts the bottom surface of the recess 21 can be mitigated by the deformation of the tip end of the stopper 51A. Thereby, breakage of the element portion 4 can be effectively suppressed, and the physical quantity sensor 1 with high mechanical strength can be obtained. Although the gradual decrease rate of the width W is constant in the taper portion 511A of the present embodiment, the gradual decrease rate of the width W may be changed without being limited thereto.

  As described above, in the physical quantity sensor 1 of the present embodiment, the stopper 51A has an elongated shape whose free end is the tip, and has the tapered portion 511A whose width gradually decreases toward the tip side. Therefore, the impact when the stopper 51A contacts the bottom surface of the recess 21 can be mitigated by the deformation of the tip end of the stopper 51A. Thereby, breakage of the element portion 4 can be effectively suppressed, and the physical quantity sensor 1 with high mechanical strength can be obtained. The same applies to the stoppers 52A, 51B, 52B.

  Also by such a second embodiment, the same effect as that of the first embodiment described above can be exhibited.

Third Embodiment
Next, a physical quantity sensor according to a third embodiment of the present invention will be described.

  FIG. 16 is a partially enlarged plan view showing the element part of the physical quantity sensor according to the third embodiment of the present invention.

  The physical quantity sensor 1 according to this embodiment is the same as the physical quantity sensor 1 according to the second embodiment described above, except that the configurations of the element units 4 (the stoppers 51A, 52A, 51B, 52B) are different.

  In the following description, the physical quantity sensor 1 of the third embodiment will be described focusing on differences from the second embodiment described above, and the description of the same matters will be omitted. Further, in FIG. 16, the same components as those in the second embodiment described above are denoted by the same reference numerals. In addition, since the stoppers 51A, 52A, 51B, and 52B have the same configuration, the stopper 51A will be representatively described below, and the description of the stoppers 52A, 51B, and 52B will be omitted.

  As shown in FIG. 16, in the element unit 4 of the present embodiment, the stopper 51A has a wide portion 512A located on the tip side of the tapered portion 511A, and the wide portion 512A contacts the bottom surface of the recess 21. It has become. Further, the width W2 of the wide portion 512A is larger than the width W1 (ie, the minimum width) of the tip of the tapered portion 511A. Thus, by providing the wide portion 512A and making the wide portion 512A contact the bottom surface of the recess 21, the bottom surface of the recess 21 of the stopper 51A can be compared with the configuration of the second embodiment described above, for example. Contact area can be increased. Therefore, the stress concentration when the stopper 51A comes in contact with the bottom surface of the recess 21 can be relaxed, and the impact can be mitigated by the tapered portion 511A. Thereby, breakage of the element portion 4 can be more effectively suppressed, and the physical quantity sensor 1 with high mechanical strength can be obtained. In the present embodiment, the plan view shape of the wide portion 512A is a rectangle, but is not limited to this. For example, each corner may be chamfered, a circle, an oval, an ellipse, a triangle, It may be a pentagon or more polygon or the like.

  As described above, in the physical quantity sensor 1 of the present embodiment, the stopper 51A is located on the tip side of the tapered portion 511A, and has the wide portion 512A that is thicker than the width W1 of the tip of the tapered portion 511A. Therefore, the stress concentration when the stopper 51A comes in contact with the bottom surface of the recess 21 can be relaxed, and the impact can be mitigated by the tapered portion 511A. Thereby, breakage of the element portion 4 can be more effectively suppressed, and the physical quantity sensor 1 with high mechanical strength can be obtained. The same applies to the stoppers 52A, 51B, 52B.

  Also by such a third embodiment, the same effect as that of the first embodiment described above can be exhibited.

Fourth Embodiment
Next, a physical quantity sensor according to a fourth embodiment of the present invention will be described.

  FIG. 17 is a partially enlarged plan view showing the element unit of the physical quantity sensor according to the fourth embodiment of the present invention.

  The physical quantity sensor 1 according to the present embodiment is the same as the physical quantity sensor 1 according to the first embodiment described above, except that the configurations of the element units 4 (the stoppers 51A, 52A, 51B, 52B) are different.

  In the following description, the physical quantity sensor 1 according to the fourth embodiment will be described focusing on differences from the first embodiment described above, and the description of the same matters will be omitted. Further, in FIG. 17, the same components as those of the second embodiment described above are denoted by the same reference numerals.

  As shown in FIG. 17, in the element portion 4 of the present embodiment, the stoppers 51A and 52A are disposed in the connection spring 40A, and the stoppers 51B and 52B are disposed in the connection spring 40B. Further, in order to arrange the stoppers 51A, 52A, a pair of notches K11, K12 are formed in the movable detection electrode 441A, and in order to arrange the stoppers 51B, 52B, a pair of notches K21, K22 in the movable detection electrode 441B. Is formed.

  Also by such a fourth embodiment, the same effect as that of the first embodiment described above can be exhibited.

Fifth Embodiment
Next, an inertial measurement device according to a fifth embodiment of the present invention will be described.

  FIG. 18 is an exploded perspective view of an inertial measurement device according to a fifth embodiment of the present invention. FIG. 19 is a perspective view of a substrate of the inertial measurement device shown in FIG.

  An inertial measurement device 2000 (IMU: Inertial Measurement Unit) shown in FIG. 18 is an inertial measurement device that detects the posture or behavior (inertial momentum) of a moving object (mounted device) such as a car or a robot. The inertial measurement device 2000 functions as a so-called six-axis motion sensor provided with a three-axis acceleration sensor and a three-axis angular velocity sensor.

  The inertial measurement device 2000 is a rectangular solid having a substantially square planar shape. In addition, screw holes 2110 as fixing portions are formed in the vicinity of two apexes located in the diagonal direction of the square. The inertial measurement device 2000 can be fixed to the mounting surface of a mounting object such as a car by passing two screws through the two screw holes 2110. In addition, it is also possible to miniaturize to a size that can be mounted on, for example, a smartphone or a digital camera, by selecting parts or changing the design.

  The inertial measurement device 2000 has an outer case 2100, a joining member 2200, and a sensor module 2300. The inside of the outer case 2100 has the joining member 2200 interposed therein, and the sensor module 2300 is inserted. There is. The sensor module 2300 also includes an inner case 2310 and a substrate 2320.

  The outer shape of the outer case 2100 is a rectangular solid having a substantially square planar shape, similar to the overall shape of the inertial measurement device 2000 described above, and screw holes 2110 are formed in the vicinity of two apexes located in the diagonal direction of the square. It is done. The outer case 2100 is box-shaped, and the sensor module 2300 is housed inside.

  The inner case 2310 is a member that supports the substrate 2320 and has a shape that fits inside the outer case 2100. Further, in the inner case 2310, a recess 2311 for preventing contact with the substrate 2320 and an opening 2312 for exposing a connector 2330 described later are formed. Such an inner case 2310 is joined to the outer case 2100 via a joining member 2200 (for example, a packing impregnated with an adhesive). A substrate 2320 is bonded to the lower surface of the inner case 2310 via an adhesive.

  As shown in FIG. 19, on the upper surface of the substrate 2320, a connector 2330, an angular velocity sensor 2340z for detecting an angular velocity around the Z axis, an acceleration sensor 2350 for detecting acceleration in each axial direction of X, Y and Z axes, etc. Has been implemented. Further, on the side surface of the substrate 2320, an angular velocity sensor 2340x for detecting an angular velocity around the X axis and an angular velocity sensor 2340y for detecting an angular velocity around the Y axis are mounted. The angular velocity sensors 2340z, 2340x, and 2340y are not particularly limited, and, for example, vibration gyro sensors using Coriolis force can be used. In particular, the configuration of the embodiment described above can be used to detect the angular velocity in the Y-axis direction. Further, the acceleration sensor 2350 is not particularly limited, and, for example, a capacitive acceleration sensor can be used.

  Further, a control IC 2360 is mounted on the lower surface of the substrate 2320. The control IC 2360 is an MCU (Micro Controller Unit), incorporates a storage unit including a non-volatile memory, an A / D converter, and the like, and controls each unit of the inertial measurement device 2000. The storage unit stores a program that defines the order and content for detecting acceleration and angular velocity, a program that digitizes detection data and incorporates it into packet data, and accompanying data. A plurality of other electronic components are mounted on the substrate 2320.

  The inertial measurement device 2000 has been described above. Such an inertial measurement device 2000 includes angular velocity sensors 2340z, 2340x, 2340y and an acceleration sensor 2350 as physical quantity sensors, and a control IC 2360 (control circuit) for controlling driving of the respective sensors 2340z, 2340x, 2340y, 2350. It contains. Thereby, the effect of the physical quantity sensor of the present invention can be obtained, and a highly reliable inertial measurement device 2000 can be obtained.

Sixth Embodiment
Next, a mobile positioning device according to a sixth embodiment of the present invention will be described.

  FIG. 20 is a block diagram showing an entire system of a mobile positioning device according to a sixth embodiment of the present invention. FIG. 21 is a diagram showing an operation of the mobile positioning device shown in FIG.

  A mobile body positioning device 3000 shown in FIG. 20 is a device mounted on a mobile body and used to position the mobile body. The moving body is not particularly limited, and may be a bicycle, a car (including a four-wheeled car and a motorcycle), a train, an airplane, a ship, etc., but in the present embodiment, it will be described as a four-wheeled car. The mobile positioning device 3000 includes an inertial measurement device 3100 (IMU), an arithmetic processing unit 3200, a GPS receiving unit 3300, a receiving antenna 3400, a position information obtaining unit 3500, a position combining unit 3600, and a processing unit 3700. , A communication unit 3800, and a display unit 3900. As the inertial measurement device 3100, for example, the above-described inertial measurement device 2000 can be used.

  Further, the inertial measurement device 3100 has a 3-axis acceleration sensor 3110 and a 3-axis angular velocity sensor 3120. Arithmetic processing unit 3200 receives acceleration data from acceleration sensor 3110 and angular velocity data from angular velocity sensor 3120, performs inertial navigation arithmetic processing on these data, and performs inertial navigation positioning data (data including acceleration and attitude of moving body) Output).

  Also, the GPS reception unit 3300 receives a signal from a GPS satellite (GPS carrier wave, satellite signal on which position information is superimposed) via the reception antenna 3400. The position information acquisition unit 3500 also outputs GPS positioning data representing the position (latitude, longitude, altitude), velocity, and direction of the mobile positioning device 3000 (mobile) based on the signal received by the GPS reception unit 3300. Do. The GPS positioning data also includes status data indicating a reception state, a reception time, and the like.

  The position synthesis unit 3600 determines the position of the moving object, specifically, the moving object on the ground, based on the inertial navigation positioning data output from the arithmetic processing unit 3200 and the GPS positioning data output from the position information acquisition unit 3500. Calculate if you are traveling in position. For example, even if the position of the moving object included in the GPS positioning data is the same, as shown in FIG. 21, if the posture of the moving object is different due to the influence of the inclination of the ground or the like, different positions of the ground are The moving body is traveling. Therefore, it is not possible to calculate the accurate position of the mobile using GPS positioning data alone. Therefore, the position synthesis unit 3600 calculates which position on the ground the moving body is traveling using the inertial navigation positioning data (in particular, data on the attitude of the moving body). Note that the determination can be made relatively easily by calculation using a trigonometric function (slope θ with respect to the vertical direction).

  The position data output from the position combining unit 3600 is subjected to predetermined processing by the processing unit 3700, and is displayed on the display unit 3900 as a positioning result. The position data may be transmitted to the external device by the communication unit 3800.

  The mobile positioning device 3000 has been described above. As described above, such a mobile positioning device 3000 includes the inertial measurement device 3100, the GPS receiving unit 3300 (receiving unit) for receiving the satellite signal on which the position information is superimposed from the positioning satellite, and the received satellite signal Based on the position information acquisition unit 3500 (acquisition unit) that acquires position information of the GPS reception unit 3300 and the inertial navigation positioning data (inertial data) output from the inertial measurement device 3100, It includes an arithmetic processing unit 3200 (arithmetic unit) to calculate, and a position synthesis unit 3600 (calculator) that calculates the position of the moving body by correcting the position information based on the calculated attitude. As a result, the effect of the inertial measurement device 3100 (2000) can be obtained, and a highly reliable mobile positioning device 3000 can be obtained.

Seventh Embodiment
Next, an electronic device according to a seventh embodiment of the present invention will be described.
FIG. 22 is a perspective view showing an electronic device according to a seventh embodiment of the present invention.

  A mobile (or notebook) personal computer 1100 shown in FIG. 22 is an application of the electronic device of the present invention. In this figure, the personal computer 1100 comprises a main unit 1104 having a keyboard 1102 and a display unit 1106 having a display unit 1108. The display unit 1106 is connected to the main unit 1104 via a hinge structure. It is rotatably supported.

  Such a personal computer 1100 incorporates the physical quantity sensor 1 and a control circuit 1110 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. The physical quantity sensor 1 is not particularly limited, but, for example, any one of the above-described embodiments can be used.

  Such a personal computer 1100 (electronic device) includes the physical quantity sensor 1 and a control circuit 1110 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the effects of the physical quantity sensor 1 described above can be obtained, and high reliability can be exhibited.

Eighth Embodiment
Next, an electronic device according to an eighth embodiment of the present invention will be described.
FIG. 23 is a perspective view showing an electronic device according to an eighth embodiment of the present invention.

  A mobile phone 1200 (including a PHS) shown in FIG. 23 is an application of the electronic device of the present invention. In this figure, the mobile phone 1200 includes an antenna (not shown), a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is provided between the operation button 1202 and the earpiece 1204. It is arranged.

  Such a mobile phone 1200 incorporates the physical quantity sensor 1 and a control circuit 1210 (control unit) that performs control based on the detection signal output from the physical quantity sensor 1. The physical quantity sensor 1 is not particularly limited, but, for example, any one of the above-described embodiments can be used.

  Such a mobile phone 1200 (electronic device) includes the physical quantity sensor 1 and a control circuit 1210 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the effects of the physical quantity sensor 1 described above can be obtained, and high reliability can be exhibited.

The Ninth Embodiment
Next, an electronic device according to a ninth embodiment of the present invention will be described.
FIG. 24 is a perspective view showing an electronic device according to a ninth embodiment of the present invention.

  The digital still camera 1300 shown in FIG. 24 is an application of the electronic device of the present invention. In this figure, a display unit 1310 is provided on the back of the case 1302, and is configured to perform display based on an image pickup signal from a CCD, and the display unit 1310 functions as a finder for displaying an object as an electronic image. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the rear side in the drawing) of the case 1302. Then, when the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the imaging signal of the CCD at that time is transferred and stored in the memory 1308.

  The digital still camera 1300 incorporates the physical quantity sensor 1 and a control circuit 1320 (control unit) that performs control based on the detection signal output from the physical quantity sensor 1. The physical quantity sensor 1 is not particularly limited, but, for example, any one of the above-described embodiments can be used.

  Such a digital still camera 1300 (electronic device) includes the physical quantity sensor 1 and a control circuit 1320 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the effects of the physical quantity sensor 1 described above can be obtained, and high reliability can be exhibited.

  The electronic device according to the present invention may be, for example, a smartphone, a tablet terminal, a watch (including a smart watch), an inkjet discharge, in addition to the personal computer and the mobile phone of the above-described embodiment and the digital still camera of the present embodiment. Devices (for example, inkjet printers), laptop personal computers, televisions, wearable terminals such as HMDs (head mounted displays), video cameras, video tape recorders, car navigation devices, pagers, electronic organizers (including communication function included), electronics Dictionaries, calculators, electronic game devices, word processors, workstations, video phones, television monitors for crime prevention, electronic binoculars, POS terminals, medical devices (such as electronic thermometers, sphygmomanometers, blood glucose meters, electrocardiogram measuring devices, ultrasound examinations Devices, electronic endoscopes), fish finders, various measuring devices, devices for mobile terminal base stations, instruments (for example, instruments of vehicles, aircraft, ships), flight simulators, network servers, etc. it can.

Tenth Embodiment
Next, a portable electronic device according to a tenth embodiment of the present invention will be described.

  FIG. 25 is a plan view showing a portable electronic device according to a tenth embodiment of the present invention. FIG. 26 is a functional block diagram showing a schematic configuration of the portable electronic device shown in FIG.

  The wristwatch-type activity meter 1400 (active tracker) shown in FIG. 25 is a wrist device to which the portable electronic device of the present invention is applied. The activity meter 1400 is attached to a site (subject) such as the user's wrist by a band 1401. Further, the activity meter 1400 is equipped with a display portion 1402 of digital display, and is capable of wireless communication. The physical quantity sensor 1 according to the present invention described above is incorporated in the activity meter 1400 as an acceleration sensor 1408 that measures acceleration and an angular velocity sensor 1409 that measures angular velocity.

  The activity meter 1400 includes a case 1403 in which the physical quantity sensor 1 is accommodated, a processing unit 1410 which is accommodated in the case 1403 and processes output data from the physical quantity sensor 1, and a display unit 1402 which is accommodated in the case 1403. And a translucent cover 1404 closing the opening of the case 1403. In addition, a bezel 1405 is provided on the outside of the translucent cover 1404. A plurality of operation buttons 1406 and 1407 are provided on the side surface of the case 1403.

  As shown in FIG. 26, the acceleration sensor 1408 detects accelerations in directions of three axes intersecting (ideally orthogonal) with each other, and signals (acceleration (acceleration according to the magnitude and direction of the detected three-axis acceleration) Output signal). Further, the angular velocity sensor 1409 detects angular velocities in the directions of three axes intersecting (ideally orthogonal) with each other, and outputs a signal (angular velocity signal) according to the magnitude and direction of the detected three axial angular velocity. .

  In the liquid crystal display (LCD) constituting the display unit 1402, for example, position information using the GPS sensor 1411 or the geomagnetic sensor 1412, an acceleration sensor 1408 included in the movement amount or physical quantity sensor 1, an angular velocity according to various detection modes. The exercise information such as the amount of exercise using the sensor 1409 or the like, the biological information such as the pulse rate using the pulse sensor 1413 or the like, or the time information such as the current time is displayed. In addition, the environmental temperature using the temperature sensor 1414 can also be displayed.

  The communication unit 1415 performs various controls for establishing communication between the user terminal and an information terminal (not shown). The communication unit 1415 may be, for example, Bluetooth (registered trademark) (including BTLE: Bluetooth Low Energy), Wi-Fi (registered trademark) (Wireless Fidelity), Zigbee (registered trademark), NFC (Near field communication), ANT + (registered trademark) It is configured to include a transceiver corresponding to a short distance wireless communication standard such as a trademark, and a connector corresponding to a communication bus standard such as USB (Universal Serial Bus).

  The processing unit 1410 (processor) is configured of, for example, a micro processing unit (MPU), a digital signal processor (DSP), an application specific integrated circuit (ASIC), or the like. The processing unit 1410 executes various processes based on the program stored in the storage unit 1416 and the signals input from the operation unit 1417 (for example, operation buttons 1406 and 1407). The processing by the processing unit 1410 includes data processing for each output signal of the GPS sensor 1411, the geomagnetic sensor 1412, the pressure sensor 1418, the acceleration sensor 1408, the angular velocity sensor 1409, the pulse sensor 1413, the temperature sensor 1414, and the timer unit 1419, Display processing for displaying an image on the screen, sound output processing for outputting sound to the sound output unit 1420, communication processing for communicating with an information terminal via the communication unit 1415, power control processing for supplying power from the battery 1421 to each unit, etc. Is included.

Such an activity meter 1400 can have at least the following functions.
1. Distance: Measure the total distance from the start of measurement by high precision GPS function.
2. Pace: Displays the current running pace from the pace distance measurement.
3. Average Speed: Average Speed Calculates and displays the average speed from the start of driving to the present.
4. Elevation: Measure and display elevation by GPS function.
5. Stride: Measures and displays stride even in a tunnel where GPS radio waves do not reach.
6. Pitch: Measure and display the number of steps per minute.
7. Heart rate: The heart rate is measured and displayed by the pulse sensor.
8. Slope: Measure and display the slope of the ground during training or trail running in mountainous areas.
9. Auto lap: Automatic lap measurement is performed when running a certain distance or certain time set in advance.
10. Exercise calories burned: Display calories burned.
11. Number of steps: Display the total number of steps from the start of exercise.

  The activity meter 1400 (portable electronic device) includes a physical quantity sensor 1, a case 1403 in which the physical quantity sensor 1 is housed, and a case 1403, and a processing unit 1410 that processes output data from the physical quantity sensor 1. And a light transmitting cover 1404 closing the opening of the case 1403. Therefore, the effects of the physical quantity sensor 1 described above can be obtained, and high reliability can be exhibited.

  The activity meter 1400 can be widely applied to a running watch, a runner's watch, a runner's watch for multi sports such as a duathlon or a triathlon, an outdoor watch, and a satellite positioning system, for example, a GPS watch equipped with GPS.

  Also, although the above description has been made using the GPS (Global Positioning System) as a satellite positioning system, another Global Navigation Satellite System (GNSS) may be used. For example, one or more of satellite positioning systems such as EGNOS (European Geostationary-Satellite Navigation Overlay Service), QZSS (Quasi Zenith Satellite System), GLONASS (GLO Bal NAvigation Satellite System), GALILEO, BeiDou (BeiDou Navigation Satellite System), etc. You may use In addition, using at least one of the satellite positioning systems, the Satellite-based Augmentation System (SBAS) such as Wide Area Augmentation System (WAAS), European Geostationary-Satellite Navigation Overlay Service (EGNOS), etc. It is also good.

Eleventh Embodiment
Next, a mobile unit according to an eleventh embodiment of the present invention will be described.
FIG. 27 is a perspective view showing a mobile unit according to the eleventh embodiment of the present invention.

  An automobile 1500 shown in FIG. 27 is an automobile to which the mobile unit of the present invention is applied. In this figure, a physical quantity sensor 1 is built in an automobile 1500, and the physical quantity sensor 1 can detect the posture of a vehicle body 1501. A detection signal of the physical quantity sensor 1 is supplied to a vehicle body posture control device 1502 (a posture control unit), and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and according to the detection result Control the brakes of the individual wheels 1503. Here, as the physical quantity sensor 1, for example, the same ones as those in the above-described embodiments can be used.

  Such an automobile 1500 (moving body) includes the physical quantity sensor 1 and a vehicle body posture control device 1502 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the effects of the physical quantity sensor 1 described above can be obtained, and high reliability can be exhibited.

  In addition, the physical quantity sensor 1 also includes car navigation systems, car air conditioners, antilock brake systems (ABS), airbags, tire pressure monitoring systems (TPMS: Tire Pressure Monitoring System), engine control, hybrid vehicles It can be widely applied to electronic control units (ECUs) such as battery monitors of electric vehicles and electric vehicles.

  Also, the moving body is not limited to the car 1500, and can be applied to, for example, airplanes, rockets, artificial satellites, ships, AGVs (unmanned transport vehicles), biped robots, unmanned airplanes such as drone etc. .

  The physical quantity sensor, inertial measurement device, mobile body positioning device, portable electronic device, electronic device and mobile body according to the present invention have been described above based on the illustrated embodiments, but the present invention is not limited thereto. The configuration of each part can be replaced with any configuration having the same function. In addition, any other component may be added to the present invention. Also, the embodiments described above may be combined as appropriate.

  Further, in the embodiment described above, the physical quantity sensor that detects angular velocity has been described. However, the present invention is not limited to this, and for example, acceleration may be detected. In addition, both acceleration and angular velocity may be detected.

  DESCRIPTION OF SYMBOLS 1 ... Physical quantity sensor, 2 ... board | substrate, 21 ... recessed part 22, 22, 221, 222, 224, 225 ... mount, 23, 24, 25, 26, 27, 28 ... groove part, 3 ... lid body, 31 ... recessed part, 32 ... Communication hole, 33: Sealing member, 39: Glass frit, 4: Element part, 4A, 4B: Movable body, 40A, 40B: Connection spring, 41A, 41B: Drive part, 411A, 411B: Movable drive electrode, 412A, 412B: fixed drive electrode, 42A, 42B: fixed portion, 43A, 43B: drive spring, 44A, 44B: detection portion, 441A, 441B: movable detection electrode, 451, 452: fixed portion, 46A, 46A ', 46A ", 46B, 46B ', 46B "... detection spring 461a, 461b, 461c, 461d, 461e, 461f ... arm, 462, 463, 464, 465, 466, 46 ... connection part 47A, 47B ... beam, 48 ... frame, 481, 482 ... defect part, 488, 489 ... frame spring, 49A, 49B ... monitor part, 491A, 491B ... movable monitor electrode, 492A, 492B, 493A, 493B ... Fixed monitor electrode 5, 51A, 51B, 52A, 52B ... Stopper, 511A ... Tapered portion, 512A ... Wide portion, 73, 74, 75, 76, 77, 78 ... Wiring, 81, 82 ... Fixed detection electrode, 83 ... electrode, personal computer, 1102 ... keyboard, 1104 ... main unit, 1106 ... display unit, 1108 ... display unit, 1110 ... control circuit, 1200 ... mobile phone, 1202 ... operation button, 1204 ... earpiece, 1206 ... transmission Mouth, 1208 ... display unit, 1210 ... control circuit, 1300 ... digita Steel camera, 1302 ... case, 1304 ... light receiving unit, 1306 ... shutter button, 1308 ... memory, 1310 ... display unit, 1320 ... control circuit, 1400 ... activity meter, 1401 ... band, 1402 ... display unit, 1403 ... case, 1404 ... Translucent cover, 1405 ... bezel, 1406 ... operation button, 1407 ... operation button, 1408 ... acceleration sensor, 1409 ... angular velocity sensor, 1410 ... processing unit, 1411 ... GPS sensor, 1412 ... geomagnetic sensor, 1413 ... pulse sensor, 1414 ... temperature sensor, 1415 ... communication unit, 1416 ... storage unit, 1417 ... operation unit, 1418 ... pressure sensor, 1419 ... clock unit, 1420 ... sound output unit, 1421 ... battery, 1500 ... car, 1501 ... vehicle body, 1502 ... Body attitude control Device, 1503: Wheel, 2000: Inertial measurement device, 2100: Outer case, 2110: Screw hole, 2200: Joint member, 2300: Sensor module, 2310: Inner case, 2311: Recess, 2312: Opening, 2320: Substrate, 2330 ... connector, 2340x, 2340y, 2340z ... angular velocity sensor, 2350 ... acceleration sensor, 2360 ... control IC, 3000 ... moving body positioning device, 3100 ... inertial measurement device, 3110 ... acceleration sensor, 3120 ... angular velocity sensor, 3200 ... arithmetic processing unit 3300 GPS reception unit 3400 reception antenna 3500 position information acquisition unit 3600 position combining unit 3700 processing unit 3800 communication unit 3900 display unit A arrow A1 Da2 Da2 Db1 Db2 ... separation distance, Fa1 Fb1: mechanical spring force, Fa2, Fb2: electrostatic attraction, K11, K12, K21, K22: notches, La1, La2, Lb1, Lb2: displacement amount, O: center, P: electrode pad, S: storage space, V1, V2 ... voltage, Zp ... pull-in critical point, α ... virtual straight line, θ ... inclination, θz ... rotation angle, ωy ... angular velocity

Claims (15)

A substrate,
And an element portion having a portion displaceable with respect to the substrate,
The element unit is
Movable detection electrode,
A detection spring which displaceably supports the movable detection electrode in a first direction toward and away from the substrate;
A physical quantity sensor comprising: a stopper which is displaced together with the movable detection electrode and which can come into contact with the substrate earlier than the movable detection electrode.   The physical quantity sensor according to claim 1, wherein the stopper has a displacement amount in the first direction larger than that of the movable detection electrode.   The physical quantity sensor according to claim 1, wherein the stopper is disposed in the detection spring. The detection spring is
A plurality of arms extending in a second direction orthogonal to the first direction and spaced apart in a third direction orthogonal to the first direction and the second direction;
And a connecting portion connecting the arms adjacent to each other in the third direction,
The physical quantity sensor according to claim 3, wherein the stopper is disposed at the connection portion. The detection spring has three or more connection parts,
The stopper is disposed in one of three or more of the connection portions except the connection portion closest to one end of the detection spring and the connection portion closest to the other end of the detection spring. The physical quantity sensor according to claim 4.   The physical quantity sensor according to any one of claims 1 to 5, wherein the stopper has an elongated shape whose free end is a tip, and has a tapered portion whose width gradually decreases toward the tip.   The physical quantity sensor according to claim 6, wherein the stopper is positioned on the tip side of the tapered portion and has a wider portion that is thicker than the width of the tip of the tapered portion. It has an electrode disposed at a place where it can abut on the stopper of the substrate,
The physical quantity sensor according to any one of claims 1 to 7, wherein the electrode has the same potential as the stopper.   The physical quantity sensor according to any one of claims 1 to 8, further comprising a fixed detection electrode disposed on the substrate and disposed to face the movable detection electrode. The movable detection electrode includes a first movable detection electrode and a second movable detection electrode.
The physical quantity sensor according to any one of claims 1 to 9, wherein the first movable detection electrode and the second movable detection electrode are displaced in reverse phase in the first direction. A physical quantity sensor according to any one of claims 1 to 10,
And a control circuit that controls driving of the physical quantity sensor. An inertial measurement device according to claim 11;
A receiver for receiving a satellite signal on which position information is superimposed from a positioning satellite;
An acquisition unit that acquires position information of the reception unit based on the received satellite signal;
An arithmetic unit that calculates the attitude of the moving object based on the inertial data output from the inertial measurement device;
And a calculator configured to calculate the position of the mobile body by correcting the position information based on the calculated attitude. A physical quantity sensor according to any one of claims 1 to 10,
A case containing the physical quantity sensor;
A processing unit housed in the case and processing output data from the physical quantity sensor;
A display unit housed in the case;
And a translucent cover closing the opening of the case. A physical quantity sensor according to any one of claims 1 to 10,
And a control unit configured to perform control based on a detection signal output from the physical quantity sensor. A physical quantity sensor according to any one of claims 1 to 10,
And a control unit configured to perform control based on a detection signal output from the physical quantity sensor.

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