JP2019078607A - Physical quantity sensor, inertia measuring device, moving object positioning device, portable electronic apparatus, electronic apparatus, and moving object - Google Patents

Abstract

To provide an inertia measuring device with which it is possible to reduce an output drift, a moving object positioning device, a portable electronic apparatus, an electronic apparatus, and a moving object.SOLUTION: A physical quantity sensor of the present invention comprises: a substrate; a movable electrode part equipped with a first movable electrode part located on one side thereof via an oscillation axis and a second movable electrode part located on the other side larger in rotation moment around the oscillation axis than the first movable electrode part; a first fixed electrode arranged on the substrate and facing the first movable electrode part; a second fixed electrode arranged on the substrate and facing the second movable electrode part; a dummy electrode arranged on the substrate by being spaced apart from the second fixed electrode facing the second movable electrode part and having the same potential as the movable electrode part; and a first shield part fixed to the substrate and facing an exposed part that is an exposed portion of the substrate between the second fixed electrode and the dummy electrode.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a physical quantity sensor, an inertial measurement device, a mobile object positioning device, a portable electronic device, an electronic device, and a mobile object.

  For example, the physical quantity sensor (acceleration sensor) described in Patent Document 1 includes a base substrate, a movable portion capable of seesaw rocking with respect to the base substrate, and an electrode provided on the base substrate and opposed to the movable portion. have. The movable portion has a first movable portion located on one side of the swing shaft and a second movable portion located on the other side. Further, the electrode has a first fixed electrode disposed to face the first movable portion, and a second fixed electrode and a dummy electrode disposed to face the second movable portion. In such a physical quantity sensor, when acceleration is applied, the movable portion is rocked by the seesaw, whereby the capacitance between the first movable portion and the first fixed electrode, and the second movable portion and the second fixed electrode Since the capacitance changes during the period, the applied acceleration is detected based on the change in the capacitance.

Japanese Patent Publication No. 2003-519384

  However, in such a configuration, the region exposed from the electrode of the base substrate and facing the movable portion is charged by the drive of the physical quantity sensor, and there is a problem between the region and the movable portion. Cause an unbalanced electrostatic attraction. Then, due to this electrostatic attraction, the movable portion swings despite the fact that no acceleration is applied, resulting in the drift of the output.

  An object of the present invention is to provide an inertial measurement device, a mobile positioning device, a portable electronic device, an electronic device, and a mobile that can reduce output drift.

  The present invention has been made to solve at least a part of the above-mentioned problems, and can be realized as the following invention.

The physical quantity sensor of the present invention comprises a substrate,
A first movable electrode portion positioned on one side via a rocking shaft, and a second movable electrode portion positioned on the other side and having a larger rotational moment about the rocking shaft than the first movable electrode portion; A movable electrode unit comprising
A first fixed electrode disposed on the substrate and facing the first movable electrode portion;
A second fixed electrode disposed on the substrate and facing the second movable electrode portion;
A dummy electrode disposed on the substrate so as to be separated from the second fixed electrode, facing the second movable electrode portion, and having the same potential as the movable electrode portion;
It has a first shield part fixed to the substrate and facing the exposed part which is a part exposed from between the second fixed electrode and the dummy electrode of the substrate.
With such a configuration, generation of an electric line of force between the first shield portion and the exposed portion is suppressed, thereby suppressing generation of the electric line of force between the exposed portion and the movable electrode portion. it can. Therefore, the unintended displacement of the movable electrode portion is suppressed, and the drift is suppressed.

In the physical quantity sensor according to the present invention, preferably, the first shield part is at the same potential as the movable electrode part.
Thus, unintentional displacement of the movable electrode portion can be suppressed, and the physical quantity can be detected more accurately.

In the physical quantity sensor of the present invention, the second movable electrode portion has an opening,
It is preferable that the first shield portion be disposed inside the opening.
This facilitates the placement of the first shield portion.

In the physical quantity sensor according to the present invention, it is preferable that the first shield part has a portion overlapping the dummy electrode in a plan view of the substrate.
This makes it possible to more reliably generate an electric line of force between the exposed portion and the first shield portion.

In the physical quantity sensor of the present invention, the first shield portion has a portion overlapping the second fixed electrode in a plan view of the substrate,
It is preferable to have a second shield portion having a portion overlapping the first fixed electrode in a plan view of the substrate.
This makes it possible to more reliably generate an electric line of force between the exposed portion and the first shield portion. Further, the electrostatic capacitance formed between the first shield portion and the second fixed electrode can be canceled by the electrostatic capacitance formed between the second shield portion and the first fixed electrode.

In the physical quantity sensor according to the present invention, preferably, the second shield part is at the same potential as the movable electrode part.
Thus, unintentional displacement of the movable electrode portion can be suppressed, and the physical quantity can be detected more accurately.

In the physical quantity sensor of the present invention, it is preferable that the second shield part be located outside the movable electrode part.
This facilitates the arrangement of the second shield portion.

An inertial measurement device of the present invention is a physical quantity sensor of the present invention,
And a control circuit that controls driving of the physical quantity sensor.
Thereby, the effect of the physical quantity sensor of the present invention can be obtained, and a highly reliable inertial measurement device can be obtained.

A mobile positioning device according to the present invention comprises the inertial measurement device according to the present invention;
A receiver for receiving a satellite signal on which position information is superimposed from a positioning satellite;
An acquisition unit that acquires position information of the reception unit based on the received satellite signal;
An arithmetic unit that calculates the attitude of the moving object based on the inertial data output from the inertial measurement device;
And calculating a position of the moving body by correcting the position information based on the calculated attitude.
Thereby, the effect of the inertial measurement device of the present invention can be enjoyed, and a highly reliable mobile positioning device can be obtained.

A portable electronic device of the present invention is the physical quantity sensor of the present invention,
A case containing the physical quantity sensor;
A processing unit housed in the case and processing output data from the physical quantity sensor;
A display unit housed in the case;
And a translucent cover closing the opening of the case.
Thereby, the effect of the physical quantity sensor of the present invention can be enjoyed, and a highly reliable portable electronic device can be obtained.

An electronic device of the present invention includes the physical quantity sensor of the present invention,
And a control unit that performs control based on a detection signal output from the physical quantity sensor.
Thereby, the effect of the physical quantity sensor of the present invention can be obtained, and a highly reliable electronic device can be obtained.

A mobile according to the present invention is a physical quantity sensor according to the present invention,
And a control unit that performs control based on a detection signal output from the physical quantity sensor.
Thereby, the effect of the physical quantity sensor of the present invention can be enjoyed, and a highly reliable mobile object can be obtained.

It is a top view of a physical quantity sensor concerning a 1st embodiment of the present invention. It is the sectional view on the AA line in FIG. It is a top view of the substrate which the physical quantity sensor shown in FIG. 1 has. It is the BB sectional drawing in FIG. It is a graph which shows a drive voltage. It is sectional drawing explaining the action | operation of the physical quantity sensor shown in FIG. It is sectional drawing explaining the action | operation of the physical quantity sensor shown in FIG. It is sectional drawing which shows a conventional structure. It is the CC sectional view taken on the line in FIG. It is the CC sectional view taken on the line in FIG. It is sectional drawing for demonstrating the formation method of an element part and a shield part. It is sectional drawing for demonstrating the formation method of an element part and a shield part. It is sectional drawing for demonstrating the formation method of an element part and a shield part. It is an exploded perspective view of an inertial measurement device concerning a 2nd embodiment of the present invention. It is a perspective view of the board | substrate which the inertial measurement device shown in FIG. 14 has. It is a block diagram showing the whole system of the mobile positioning device concerning a 3rd embodiment of the present invention. It is a figure which shows the effect | action of the mobile positioning device shown in FIG. It is a perspective view showing the electronic equipment concerning a 4th embodiment of the present invention. It is a perspective view showing the electronic equipment concerning a 5th embodiment of the present invention. It is a perspective view showing the electronic equipment concerning a 6th embodiment of the present invention. It is a top view which shows the portable electronic device which concerns on 7th Embodiment of this invention. It is a functional block diagram which shows schematic structure of the portable electronic device shown in FIG. It is a perspective view showing the mobile concerning a 8th embodiment of the present invention.

  Hereinafter, a physical quantity sensor, an inertial measurement device, a mobile positioning device, a portable electronic device, an electronic device and a mobile according to the present invention will be described in detail based on embodiments shown in the attached drawings.

First Embodiment
First, the physical quantity sensor according to the first embodiment of the present invention will be described.

  FIG. 1 is a plan view of a physical quantity sensor according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a plan view of a substrate of the physical quantity sensor shown in FIG. FIG. 4 is a cross-sectional view taken along the line B-B in FIG. FIG. 5 is a graph showing the drive voltage. 6 and 7 are cross-sectional views for explaining the operation of the physical quantity sensor shown in FIG. FIG. 8 is a cross-sectional view showing a conventional structure. 9 and 10 are cross-sectional views taken along the line C-C in FIG. 1, respectively. 11 to 13 are cross-sectional views for explaining the method of forming the element portion and the shield portion.

  In each of the drawings, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. In the following, a direction parallel to the X axis is also referred to as “X axis direction”, a direction parallel to the Y axis as “Y axis direction”, and a direction parallel to the Z axis as “Z axis direction”. Moreover, the arrow tip side of each axis is also referred to as "plus side", and the opposite side is also referred to as "minus side". Moreover, the Z axis direction plus side is also referred to as "upper", and the Z axis direction minus side is also referred to as "down".

  The physical quantity sensor 1 shown in FIG. 1 is an acceleration sensor capable of measuring an acceleration Az in the Z-axis direction (vertical direction). Such a physical quantity sensor 1 includes a substrate 2, an element unit 3 and a shield unit 4 disposed on the substrate 2, and a lid 5 joined to the substrate 2 so as to cover the element unit 3 and the shield unit 4. have. Hereinafter, these units will be described in detail in order.

(substrate)
As shown in FIG. 1, the substrate 2 is in the form of a plate having a rectangular plan view shape. Further, the substrate 2 has a recess 21 opened on the upper surface side. Further, in plan view from the Z-axis direction, the concave portion 21 is formed larger than the element portion 3 so as to enclose the element portion 3 inside. Such a concave portion 21 functions as a relief portion for preventing (suppressing) the contact between the element portion 3 and the substrate 2.

  Further, as shown in FIG. 2, the substrate 2 has projecting mounts 22 and 23 provided on the bottom surface 211 of the recess 21. The element portion 3 is joined to the mount portion 22. Thus, the element portion 3 can be fixed to the substrate 2 in a state of being separated from the bottom surface 211 of the recess 21. On the other hand, a first shield portion 41, which will be described later, included in the shield portion 4 is joined to the mount portion 23. Thereby, the first shield portion 41 can be fixed to the substrate 2 in a state of being separated from the bottom surface 211 of the recess 21. Further, as shown in FIG. 1, the substrate 2 has groove portions 25, 26 and 27 opened to the upper surface side.

The substrate 2 is made of, for example, a glass material containing alkali metal ions (mobile ions such as Na ⁺ ) (for example, Pyrex glass (registered trademark), borosilicate glass such as Tempax glass (registered trademark)) A glass substrate can be used. However, the substrate 2 is not particularly limited, and for example, a silicon substrate or a ceramic substrate may be used. When a silicon substrate is used as the substrate 2, from the viewpoint of preventing a short circuit, a high resistance silicon substrate is used, or a silicon substrate on which a silicon oxide film (insulating oxide) is formed by thermal oxidation or the like is used. Is preferred.

  Further, as shown in FIG. 1 to FIG. 3, the first fixed electrode 81, the second fixed electrode 82 and the dummy electrode 83 (charge removing portion) are arranged apart from each other as the electrode 8 on the bottom surface 211 of the recess 21. ing.

  Further, as shown in FIG. 1, in the grooves 25, 26, 27, wirings 75, 76, 77 are provided. Further, one end portions of the wirings 75, 76, 77 are exposed to the outside of the lid 5, respectively, and function as electrode pads P for electrically connecting to an external device. Further, as shown in FIG. 2, the wiring 75 is routed to the mount portion 22 through the bottom surface 211 of the recess 21, and electrically connected to the element portion 3 through the conductive bump B on the mount portion 22. It is connected. Further, the wiring 75 is branched halfway and electrically connected to a dummy electrode 83 and a second shield part 42 described later provided in the shield part 4. The wiring 76 is electrically connected to the first fixed electrode 81, and the wiring 77 is electrically connected to the second fixed electrode 82.

(Lid)
As shown in FIG. 1, the lid 5 has a plate shape having a rectangular planar view shape. Further, as shown in FIG. 4, the lid 5 has a recess 51 opened on the lower surface side (substrate 2 side). The lid 5 is joined to the upper surface of the substrate 2 so as to accommodate the element portion 3 and the shield portion 4 in the recess 51. Then, a storage space S for storing the element portion 3 and the shield portion 4 is formed inside the lid 5 and the substrate 2.

  Further, the lid 5 has a communication hole 52 communicating the inside and the outside of the storage space S. The storage space S can be replaced with a desired atmosphere through the communication hole 52. Further, a sealing member 53 is disposed in the communication hole 52, and the communication hole 52 is hermetically sealed by the sealing member 53.

  The storage space S is an airtight space. In addition, it is preferable that the storage space S be filled with an inert gas such as nitrogen, helium, argon, or the like, and be at substantially atmospheric pressure at a use temperature (about -40 ° C to about 120 ° C). By setting the storage space S to the atmospheric pressure, the viscosity resistance is increased, the damping effect is exhibited, and the vibration of the element unit 3 can be rapidly converged. Therefore, the detection accuracy of the acceleration of the physical quantity sensor 1 is improved.

  For example, a silicon substrate can be used as the lid 5. However, the lid 5 is not particularly limited, and, for example, a glass substrate or a ceramic substrate may be used. The method of bonding the substrate 2 and the lid 5 is not particularly limited, and may be appropriately selected depending on the materials of the substrate 2 and the lid 5. For example, bonding surfaces activated by anodic bonding or plasma irradiation For example, activation bonding for bonding, bonding using a bonding material such as glass frit, diffusion bonding for bonding metal films formed on the upper surface of the substrate 2 and the lower surface of the lid 5 may be used. In the present embodiment, the substrate 2 and the lid 5 are bonded via the glass frit 59 (low melting point glass).

(Element part)
As shown in FIG. 1, the element unit 3 has a fixed portion 31 joined and fixed to the upper surface of the mount portion 22, a movable electrode portion 32 displaceable with respect to the fixed portion 31, a fixed portion 31 and a movable electrode portion And 32 a beam portion connecting them. Then, when the acceleration Az acts, the movable electrode 32 causes the seesaw rocking with respect to the fixed part 31 while torsionally deforming the beam 33 with the beam 33 as the rocking axis J.

  The movable electrode portion 32 has a longitudinal shape extending in the X direction. The portion on the negative side (one side) in the X-axis direction with respect to the rocking axis J is the first movable electrode portion 321, and the portion on the positive side (the other side) in the X-axis direction with respect to the rocking axis J is the second The movable electrode portion 322 is provided. Further, the second movable electrode portion 322 is longer in the X-axis direction than the first movable electrode portion 321, and the rotational moment (torque) when the acceleration Az is applied is larger than that of the first movable electrode portion 321. When acceleration Az is applied due to the difference in the rotational moment, the movable electrode portion 32 seesaws rocking around the rocking axis J.

  Further, the second movable electrode portion 322 is formed with an elongated opening 323 extending in the Y-axis direction. The opening 323 overlaps the mount portion 23 in plan view from the Z-axis direction. The first shield portion 41 is disposed in the opening 323, and the first shield portion 41 is fixed to the mount portion 23 as described above.

  Here, returning to the explanation of the electrode 8, the first fixed electrode 81 is disposed to face the first movable electrode portion 321 in a plan view from the Z-axis direction (a plan view of the substrate 2), and the second fixing The electrode 82 is disposed to be opposed to a portion on the proximal end side (side closer to the swing axis J) than the opening 323 of the second movable electrode portion 322. When driving the physical quantity sensor 1, for example, the voltage V1 shown in FIG. 5 is applied to the element unit 3, and the first fixed electrode 81 and the second fixed electrode 82 are respectively connected to the QV amplifier (charge voltage conversion circuit) . Therefore, a capacitance C1 is formed between the first fixed electrode 81 and the first movable electrode portion 321, and a capacitance C2 is formed between the second fixed electrode 82 and the second movable electrode portion 322. Be done.

  Here, the first and second fixed electrodes 81 and 82 are provided substantially symmetrically with respect to the swing axis J in plan view from the Z-axis direction. Therefore, in the natural state where the acceleration Az does not act, the capacitances C1 and C2 are substantially equal to each other. Further, in the natural state, the torque acting on the movable electrode portion 32 due to the electrostatic attractive force acting between the first fixed electrode 81 and the first movable electrode portion 321, the second fixed electrode 82 and the second movable The torque acting on the movable electrode portion 32 due to the electrostatic attractive force acting between the electrode portion 322 and the movable electrode portion 32 is substantially equal, and the unintended seesaw oscillation of the movable electrode portion 32 is suppressed.

  As shown in FIG. 6, when acceleration -Az to the negative side in the Z-axis direction is applied to the physical quantity sensor 1, the movable electrode portion 32 swings due to the difference in rotational moment of the first and second movable electrode portions 321 and 322. The seesaw rocking counterclockwise around the axis J, and conversely, as shown in FIG. 7, when the acceleration + Az to the positive side in the Z-axis direction is applied to the physical quantity sensor 1, the movable electrode portion 32 is a rocking axis Swing the seesaw clockwise around J. By such seesaw rocking of the movable electrode portion 32, the gap between the first movable electrode portion 321 and the first fixed electrode 81 and the gap between the second movable electrode portion 322 and the second fixed electrode 82 are changed, and accordingly The capacitances C1 and C2 change respectively. Therefore, the acceleration Az can be detected based on the amount of change in the capacitances C1 and C2.

  As shown in FIG. 1, the dummy electrode 83 is disposed to face the portion on the tip end side (the side farther from the swing axis J) than the opening 323 of the second movable electrode portion 322 in plan view from the Z-axis direction. It is done. As described above, the dummy electrode 83 is electrically connected to the wiring 75 and has the same potential as the movable electrode portion 32. Therefore, an electrostatic capacitance is not substantially formed between the second movable electrode portion 322 and the dummy electrode 83.

  Here, as shown in FIG. 2, the portion where the dummy electrode 83 of the recess 21 is disposed, that is, the portion facing the portion on the tip end side of the second movable electrode portion 322 is the first and second fixed electrodes 81, It is deeper than the part where 82 is arranged. Thereby, the contact between the movable electrode portion 32 and the bottom surface 211 can be effectively suppressed. Further, the separation distance between the first and second fixed electrodes 81 and 82 and the movable electrode portion 32 can be reduced, and the capacitances C1 and C2 can be formed larger. However, the configuration of the recess 21 is not particularly limited, and the portion where the dummy electrode 83 is disposed and the portion where the first and second fixed electrodes 81 and 82 are disposed may have the same depth.

The dummy electrode 83 has, for example, the following function. For example, mobile ions (Na ⁺ ) in the substrate 2 may move by the electric field applied during driving, and the bottom surface 211 of the recess 21 may be charged. When the bottom surface 211 is charged, an electrostatic attractive force is generated between the bottom surface 211 and the movable electrode portion 32. Then, the second movable electrode portion 322 is attracted to the bottom surface 211 by the electrostatic attractive force, and the movable electrode portion 32 seesaws (tilts) even though the acceleration Az is not applied. As a result, output drift occurs. In addition, the second movable electrode portion 322 attracted to the substrate 2 by the electrostatic attractive force may be stuck to the bottom surface 211 to cause “sticking” and the sensor may not function as a sensor. Therefore, the dummy electrode 83 of the same potential as the movable electrode portion 32 is disposed in the region of the bottom surface 211 facing the movable electrode portion 32 to reduce the influence of the charging of the bottom surface 211, thereby making it difficult to cause the above problems. There is. The arrangement of the dummy electrode 83 is not particularly limited as long as the above-described function can be exhibited.

  However, the dummy electrode 83 must be physically separated from the second fixed electrode 82 in order to insulate the second fixed electrode 82. Therefore, as shown in FIG. 2 and FIG. 3, an exposed portion 212 to which the bottom surface 211 is exposed is always formed between them. In the conventional structure as shown in FIG. 8, the exposed portion 212 is opposed to the second movable electrode portion 322, and the movable electrode portion 32 does not receive the acceleration Az due to the electrostatic attractive force generated therebetween. There is a possibility that the seesaw rocking (tilting) may cause an output drift. That is, just providing the dummy electrode 83 can not sufficiently solve the above problem.

  Therefore, in the physical quantity sensor 1, the shield part 4 is disposed in order to effectively suppress the occurrence of the above-mentioned problem. As shown in FIG. 1, the shield part 4 has a first shield part 41 and a second shield part 42. In addition, the second shield portion 42 has a first portion 421 and a second portion 422. The first and second shield portions 41 and 42 are electrically connected to the wiring 75, and have the same potential as the movable electrode portion 32 and the dummy electrode 83. Thereby, an electrostatic attractive force does not substantially occur between the shield part 4 and the element part 3, and it is possible to suppress unintended displacement (displacement in the XY plane direction) of the element part 3. Therefore, the physical quantity sensor 1 can be stably driven, and the decrease in detection accuracy of the acceleration Az and the fluctuation can be suppressed. In the present embodiment, as shown in FIG. 2, the first shield portion 41 and the second portion 422 are each electrically connected to the wiring 75 through the dummy electrode 83.

  As described above, the first shield portion 41 is disposed in the opening 323 formed in the second movable electrode portion 322. Then, as shown in FIG. 9, the first shield portion 41 is opposed to the exposed portion 212 located between the second fixed electrode 82 and the dummy electrode 83 in a plan view from the Z-axis direction. By arranging the first shield portion 41 in the opening 323 as described above, the arrangement of the first shield portion 41 is facilitated, and the first shield portion 41 can be easily made to face the exposed portion 212.

  By arranging such a first shield portion 41, as shown in FIG. 9, an electric line of force Le can be generated between the charged exposed portion 212 and the first shield portion 41, and the charged exposure is performed. It is possible to suppress the occurrence of the electric line of force Le between the portion 212 and the second movable electrode portion 322. Therefore, it is possible to effectively suppress the occurrence of an unwanted electrostatic attractive force between the exposed portion 212 and the second movable electrode portion 322. As a result, the movable electrode portion 32 is rocked (slanted) to the seesaw despite the fact that the acceleration Az is not applied, or the unnecessary electrostatic attraction is superimposed on the acceleration Az actually acting on the physical quantity sensor 1. Thus, the occurrence of output drift can be effectively suppressed, and the physical quantity sensor 1 with higher detection accuracy can be obtained.

  In particular, in the present embodiment, the end 41 a on the plus side of the first shield portion 41 in the X-axis direction overlaps the dummy electrode 83 in plan view from the Z-axis direction. That is, the first shield portion 41 overlaps the dummy electrode 83. As a result, the exposed portion 212 and the second movable electrode portion 322 can be further separated, and the electric line of force Le can be more reliably generated between the charged exposed portion 212 and the first shield portion 41. it can. Also, for example, even if the positional deviation of the first shield part 41 to the negative side in the X-axis direction occurs during manufacturing, the first shield part 41 and the exposed part 212 can be made to face each other, and an electric force is generated between them. The line Le can be generated. However, the first shield portion 41 is not limited to this, and may not overlap with the dummy electrode 83 in plan view from the Z-axis direction. Specifically, in plan view from the Z-axis direction, the end 41a of the first shield portion 41 on the plus side in the X-axis direction is flush with the end on the plus side of the exposed portion 212 in the X-axis direction. Alternatively, it may be located on the X axis direction minus side with respect to the end of the exposed part 212 on the X axis direction plus side. That is, in plan view from the Z-axis direction, a part of the exposed portion 212 may be exposed from the plus side of the first shield portion 41 in the X-axis direction.

  Further, in the present embodiment, the end 41 b on the negative side in the X-axis direction of the first shield portion 41 overlaps the second fixed electrode 82 in plan view from the Z-axis direction. That is, the first shield portion 41 overlaps the second fixed electrode 82. As a result, the exposed portion 212 and the second movable electrode portion 322 can be further separated, and the electric line of force Le can be more reliably generated between the charged exposed portion 212 and the first shield portion 41. it can. Also, for example, even if the positional deviation of the first shield portion 41 to the positive side in the X-axis direction occurs during manufacturing, the first shield portion 41 and the exposed portion 212 can be opposed to each other, and an electric force is generated between them. The line Le can be generated. However, the first shield portion 41 is not limited to this, and may not overlap the second fixed electrode 82 in a plan view from the Z-axis direction. Specifically, in plan view from the Z-axis direction, the end 41 b of the first shield portion 41 on the negative side in the X-axis direction is flush with the end on the negative side of the exposed portion 212 in the X-axis direction. Alternatively, it may be located on the plus side in the X-axis direction with respect to the end on the minus side in the X-axis direction of the exposed portion 212. That is, in plan view from the Z-axis direction, a part of the exposed portion 212 may be exposed from the negative side of the first shield portion 41 in the X-axis direction.

  As shown in FIG. 1, a pair of second shield portions 42 is disposed outside the movable electrode portion 32. Specifically, the second shield portion 42 includes a first portion 421 located on the negative side of the movable electrode portion 32 in the X-axis direction, and a second portion 422 located on the positive side of the movable electrode portion 32 in the X-axis direction. have. The first and second portions 421 and 422 are each fixed to the upper surface of the substrate 2 and protrude above the recess 21 so that a part thereof overlaps with the recess 21.

  Here, as shown in FIG. 9, an exposed portion 213 where the surface of the substrate 2 is exposed is also formed on the negative side in the X-axis direction with respect to the first fixed electrode 81. Therefore, the first portion 421 is disposed so as to overlap the exposed portion 213 in a plan view from the Z-axis direction. Therefore, the electric field of force Le can be generated between the charged exposed portion 213 and the first portion 421, and the electric field of force Le will be generated between the charged exposed portion 213 and the movable electrode portion 32. Can be suppressed. Therefore, the physical quantity sensor 1 can effectively suppress the drift of the output.

  Similarly, an exposed portion 214 where the surface of the substrate 2 is exposed is also formed on the negative side in the X-axis direction than the dummy electrode 83. Therefore, the second portion 422 is disposed so as to overlap the exposed portion 214 in a plan view from the Z-axis direction. Therefore, an electric line of force Le can be generated between the charged exposed portion 214 and the second portion 422, and an electric line of force Le will be generated between the charged exposed portion 214 and the movable electrode portion 32. Can be suppressed. Therefore, the physical quantity sensor 1 can effectively suppress the drift of the output.

  Furthermore, the first portion 421 overlaps the first fixed electrode 81 in plan view from the Z-axis direction. That is, the first portion 421 overlaps the first fixed electrode 81. Therefore, as shown in FIG. 10, a capacitance C4 is formed between the first portion 421 and the first fixed electrode 81. As described above, since the first shield portion 41 overlaps the second fixed electrode 82, an unnecessary capacitance C3 is formed between them. Therefore, the first portion 421 is overlapped with the first fixed electrode 81 to form a capacitance C4 between them, and the capacitance C4 cancels the capacitance C3 (acceleration) to obtain acceleration Az. It is possible to suppress the decrease in the detection accuracy of The capacitances C3 and C4 are preferably equal to each other, which makes the above-described effects more remarkable. Here, “electrostatic capacitances C3 and C4 are equal” means a slight difference (for example, a technically unavoidable difference, 0.95 ≦, in addition to the case where the electrostatic capacitances C3 and C4 coincide with each other). This is a meaning that includes the case where there is a C3 / C4 ≦ 1.05 difference).

  The configuration of the second shield portion 42 is not particularly limited. For example, the second portion 422 may be omitted. Alternatively, the second shield portion 42 may be shaped like a frame surrounding the element portion 3 to integrate the first and second portions 421 and 422. Also, the second shield portion 42 may be omitted.

  As mentioned above, although the element part 3 and the shield part 4 were demonstrated, these are formed by patterning the silicon substrate (doped silicon substrate) in which impurities, such as phosphorus (P) and boron (B), were doped, for example There is. Here, the method for forming the element portion 3 and the shield portion 4 will be briefly described. First, as shown in FIG. 11, the substrate 2 on which the electrodes 8 and the wirings 75, 76, 77 are formed is prepared. The doped silicon substrate 30 is anodically bonded on the top surface. Next, as shown in FIG. 12, the doped silicon substrate 30 is thinned to a predetermined thickness as necessary by CMP (chemical mechanical polishing) or the like. Next, the doped silicon substrate 30 is patterned by dry etching (in particular, the Bosch method). Thereby, as shown in FIG. 13, the element part 3 and the shield part 4 can be formed collectively. However, the method of forming the element portion 3 and the shield portion 4 is not particularly limited, and the materials of the element portion 3 and the shield portion 4 are not particularly limited.

  The physical quantity sensor 1 has been described above. As described above, such a physical quantity sensor 1 is located on the other side of the substrate 2 and the first movable electrode portion 321 located on one side via the swing axis J, and around the swing axis J. A movable electrode portion 32 including a second movable electrode portion 322 having a larger rotational moment than the first movable electrode portion 321, and a first fixed electrode 81 disposed on the substrate 2 and facing the first movable electrode portion 321. And a second fixed electrode 82 disposed on the substrate 2 and facing the second movable electrode portion 322, and spaced apart from the second fixed electrode 82 on the substrate 2 and facing the second movable electrode portion 322. A first shield fixed to the dummy electrode 83 having the same potential as the movable electrode portion 32 and the substrate 2 and facing the exposed portion 212 which is a portion exposed from between the second fixed electrode 82 and the dummy electrode 83 of the substrate 2 And a part 41.

  According to such a configuration, an electric line of force Le can be generated between the charged exposed portion 212 and the first shield portion 41, and between the charged exposed portion 212 and the second movable electrode portion 322. It is possible to suppress the generation of the electric lines of force Le. Therefore, it is possible to effectively suppress the occurrence of an unwanted electrostatic attractive force between the exposed portion 212 and the second movable electrode portion 322. As a result, the movable electrode portion 32 is rocked (slanted) to the seesaw despite the fact that the acceleration Az is not applied, or the unnecessary electrostatic attraction is superimposed on the acceleration Az actually acting on the physical quantity sensor 1. Thus, the occurrence of output drift can be effectively suppressed, and the physical quantity sensor 1 with higher detection accuracy can be obtained.

  In addition, as described above, the first shield portion 41 is at the same potential as the movable electrode portion 32. As a result, electrostatic attraction is not substantially generated between the first shield portion 41 and the element portion 3, and unintentional displacement (displacement in the XY plane direction) of the element portion 3 can be suppressed. Therefore, the physical quantity sensor 1 can be stably driven, and the decrease in detection accuracy of the acceleration Az and the fluctuation can be suppressed.

  In addition, as described above, the second movable electrode portion 322 has the opening 323, and the first shield portion 41 is disposed inside the opening 323. As a result, the arrangement of the first shield portion 41 is facilitated, and the first shield portion 41 can be easily made to face the exposed portion 212.

  In addition, as described above, the first shield portion 41 has a portion overlapping the dummy electrode 83 in a plan view of the substrate 2. As a result, the exposed portion 212 and the second movable electrode portion 322 can be further separated, so that the line of electric force Le is more reliably generated between the charged exposed portion 212 and the first shield portion 41. Can. Also, for example, even if the positional deviation of the first shield portion 41 to the negative side in the X-axis direction occurs during manufacturing, the first shield portion 41 and the exposed portion 212 are more reliably opposed to each other between them. An electric line of force Le can be generated.

  In addition, as described above, the first shield portion 41 has a portion overlapping the second fixed electrode 82 in a plan view of the substrate 2. The physical quantity sensor 1 has a second shield part 42 having a portion overlapping the first fixed electrode 81 in a plan view of the substrate 2. Thereby, the capacitance C3 formed between the first shield portion 41 and the second fixed electrode 82 is determined by the capacitance C4 formed between the second shield portion 42 and the first fixed electrode 81. It can be canceled. Therefore, it is possible to suppress the decrease in the detection accuracy of the acceleration Az.

  In addition, as described above, the second shield portion 42 has the same potential as the movable electrode portion 32. As a result, electrostatic attraction is not substantially generated between the second shield portion 42 and the element portion 3, and unintentional displacement (displacement in the XY plane direction) of the element portion 3 can be suppressed. Therefore, the physical quantity sensor 1 can be stably driven, and the decrease in detection accuracy of the acceleration Az and the fluctuation can be suppressed.

  Further, as described above, the second shield portion 42 is located outside the movable electrode portion 32. As a result, the arrangement of the second shield portion 42 is facilitated, and the second shield portion 42 is easily made to face the exposed portions 213 and 214.

Second Embodiment
Next, an inertial measurement device according to a second embodiment of the present invention will be described.

  FIG. 14 is an exploded perspective view of the inertial measurement device according to the second embodiment of the present invention. FIG. 15 is a perspective view of a substrate of the inertial measurement device shown in FIG.

  An inertial measurement device 2000 (IMU: Inertial Measurement Unit) shown in FIG. 14 is a device that detects the posture or behavior (inertial momentum) of a moving object (mounted device) such as a car or a robot. The inertial measurement device 2000 functions as a so-called six-axis motion sensor provided with a three-axis acceleration sensor and a three-axis angular velocity sensor.

  The inertial measurement device 2000 is a rectangular solid having a substantially square planar shape. Further, screw holes 2110 as fixing portions are formed in the vicinity of two apexes located in the diagonal direction of the square. The inertial measurement device 2000 can be fixed to the mounting surface of a mounting object such as a car by passing two screws through the two screw holes 2110. In addition, it is also possible to miniaturize to a size that can be mounted on, for example, a smartphone or a digital camera, by selecting parts or changing the design.

  The inertial measurement device 2000 has an outer case 2100, a joining member 2200, and a sensor module 2300. The inside of the outer case 2100 has the joining member 2200 interposed therein, and the sensor module 2300 is inserted. There is. The sensor module 2300 also includes an inner case 2310 and a substrate 2320.

  The outer shape of the outer case 2100 is a rectangular solid having a substantially square planar shape, similar to the overall shape of the inertial measurement device 2000, and screw holes 2110 are formed in the vicinity of two apexes located in the diagonal direction of the square. There is. The outer case 2100 is box-shaped, and the sensor module 2300 is housed inside.

  The inner case 2310 is a member that supports the substrate 2320 and has a shape that fits inside the outer case 2100. Further, in the inner case 2310, a recess 2311 for preventing contact with the substrate 2320 and an opening 2312 for exposing a connector 2330 described later are formed. Such an inner case 2310 is joined to the outer case 2100 via a joining member 2200 (for example, a packing impregnated with an adhesive). A substrate 2320 is bonded to the lower surface of the inner case 2310 via an adhesive.

  As shown in FIG. 15, on the upper surface of the substrate 2320, a connector 2330, an angular velocity sensor 2340z for detecting an angular velocity around the Z axis, an acceleration sensor 2350 for detecting acceleration in each axial direction of X, Y and Z axes, etc. Has been implemented. Further, on the side surface of the substrate 2320, an angular velocity sensor 2340x for detecting an angular velocity around the X axis and an angular velocity sensor 2340y for detecting an angular velocity around the Y axis are mounted. The angular velocity sensors 2340z, 2340x, and 2340y are not particularly limited, and, for example, vibration gyro sensors using Coriolis force can be used. Further, the acceleration sensor 2350 is not particularly limited, and, for example, a capacitive acceleration sensor can be used. In particular, the configuration of any of the above-described embodiments can be used to detect acceleration in the Z-axis direction.

  Further, a control IC 2360 is mounted on the lower surface of the substrate 2320. The control IC 2360 is an MCU (Micro Controller Unit), incorporates a storage unit including a non-volatile memory, an A / D converter, and the like, and controls each unit of the inertial measurement device 2000. The storage unit stores a program that defines the order and content for detecting acceleration and angular velocity, a program that digitizes detection data and incorporates it into packet data, and accompanying data. A plurality of other electronic components are mounted on the substrate 2320.

  The inertial measurement device 2000 has been described above. Such an inertial measurement device 2000 includes angular velocity sensors 2340z, 2340x, 2340y and an acceleration sensor 2350 as physical quantity sensors, and a control IC 2360 (control circuit) for controlling driving of the respective sensors 2340z, 2340x, 2340y, 2350. It contains. Thereby, the effect of the physical quantity sensor of the present invention can be obtained, and a highly reliable inertial measurement device 2000 can be obtained.

Third Embodiment
Next, a mobile positioning device according to a third embodiment of the present invention will be described.

  FIG. 16 is a block diagram showing an entire system of a mobile positioning device according to a third embodiment of the present invention. FIG. 17 shows the operation of the mobile positioning device shown in FIG.

  A mobile body positioning device 3000 shown in FIG. 16 is a device mounted on a mobile body and used to perform positioning of the mobile body. The moving body is not particularly limited, and may be a bicycle, a car (including a four-wheeled car and a motorcycle), a train, an airplane, a ship, etc., but in the present embodiment, it will be described as a four-wheeled car. The mobile positioning device 3000 includes an inertial measurement device 3100 (IMU), an arithmetic processing unit 3200, a GPS receiving unit 3300, a receiving antenna 3400, a position information obtaining unit 3500, a position combining unit 3600, and a processing unit 3700. , A communication unit 3800, and a display unit 3900. Note that, as the inertial measurement device 3100, for example, the inertial measurement device 2000 of the embodiment described above can be used.

  Further, the inertial measurement device 3100 has a 3-axis acceleration sensor 3110 and a 3-axis angular velocity sensor 3120. Arithmetic processing unit 3200 receives acceleration data from acceleration sensor 3110 and angular velocity data from angular velocity sensor 3120, performs inertial navigation arithmetic processing on these data, and performs inertial navigation positioning data (data including acceleration and attitude of moving body) Output).

  Also, the GPS reception unit 3300 receives a signal from a GPS satellite (GPS carrier wave, satellite signal on which position information is superimposed) via the reception antenna 3400. The position information acquisition unit 3500 also outputs GPS positioning data representing the position (latitude, longitude, altitude), velocity, and direction of the mobile positioning device 3000 (mobile) based on the signal received by the GPS reception unit 3300. Do. The GPS positioning data also includes status data indicating a reception state, a reception time, and the like.

  The position synthesis unit 3600 determines the position of the moving object, specifically, the moving object on the ground, based on the inertial navigation positioning data output from the arithmetic processing unit 3200 and the GPS positioning data output from the position information acquisition unit 3500. Calculate if you are traveling in position. For example, even if the position of the moving object included in the GPS positioning data is the same, as shown in FIG. 17, if the attitude of the moving object is different due to the influence of the inclination of the ground, the different position of the ground The moving body is traveling. Therefore, it is not possible to calculate the accurate position of the mobile using GPS positioning data alone. Therefore, the position synthesis unit 3600 calculates which position on the ground the moving body is traveling using the inertial navigation positioning data (in particular, data on the attitude of the moving body). Note that the determination can be made relatively easily by calculation using a trigonometric function (slope θ with respect to the vertical direction).

  The position data output from the position combining unit 3600 is subjected to predetermined processing by the processing unit 3700, and is displayed on the display unit 3900 as a positioning result. The position data may be transmitted to the external device by the communication unit 3800.

  The mobile positioning device 3000 has been described above. As described above, such a mobile positioning device 3000 includes the inertial measurement device 3100, the GPS receiving unit 3300 (receiving unit) for receiving the satellite signal on which the position information is superimposed from the positioning satellite, and the received satellite signal Based on the position information acquisition unit 3500 (acquisition unit) that acquires position information of the GPS reception unit 3300 and the inertial navigation positioning data (inertial data) output from the inertial measurement device 3100, It includes an arithmetic processing unit 3200 (arithmetic unit) to calculate, and a position synthesis unit 3600 (calculator) that calculates the position of the moving body by correcting the position information based on the calculated attitude. As a result, the effect of the inertial measurement device of the present invention can be enjoyed, and a highly reliable mobile positioning device 3000 can be obtained.

Fourth Embodiment
Next, an electronic device according to a fourth embodiment of the present invention will be described.
FIG. 18 is a perspective view showing an electronic device according to a fourth embodiment of the present invention.

  A mobile (or notebook) personal computer 1100 shown in FIG. 18 is an application of the electronic device of the present invention. In this figure, the personal computer 1100 comprises a main unit 1104 having a keyboard 1102 and a display unit 1106 having a display unit 1108. The display unit 1106 is connected to the main unit 1104 via a hinge structure. It is rotatably supported.

  Such a personal computer 1100 incorporates the physical quantity sensor 1 and a control circuit 1110 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. The physical quantity sensor 1 is not particularly limited, but, for example, any one of the above-described embodiments can be used.

  Such a personal computer 1100 (electronic device) includes the physical quantity sensor 1 and a control circuit 1110 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the personal computer 1100 (electronic device) can receive the effects of the physical quantity sensor 1 described above, and can exhibit high reliability.

Fifth Embodiment
Next, an electronic device according to a fifth embodiment of the present invention will be described.
FIG. 19 is a perspective view showing an electronic device according to a fifth embodiment of the present invention.

  A mobile phone 1200 (including a PHS) shown in FIG. 19 is an application of the electronic device of the present invention. In this figure, the mobile phone 1200 includes an antenna (not shown), a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is provided between the operation button 1202 and the earpiece 1204. It is arranged.

  Such a mobile phone 1200 incorporates the physical quantity sensor 1 and a control circuit 1210 (control unit) that performs control based on the detection signal output from the physical quantity sensor 1. The physical quantity sensor 1 is not particularly limited, but, for example, any one of the above-described embodiments can be used.

  Such a mobile phone 1200 (electronic device) includes the physical quantity sensor 1 and a control circuit 1210 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the mobile phone 1200 (electronic device) can receive the effects of the physical quantity sensor 1 described above and can exhibit high reliability.

Sixth Embodiment
Next, an electronic device according to a sixth embodiment of the present invention will be described.
FIG. 20 is a perspective view showing an electronic device according to a sixth embodiment of the present invention.

  The digital still camera 1300 shown in FIG. 20 is an application of the electronic device of the present invention. In this figure, a display unit 1310 is provided on the back of the case 1302, and is configured to perform display based on an image pickup signal from a CCD, and the display unit 1310 functions as a finder for displaying an object as an electronic image. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the rear side in the drawing) of the case 1302. Then, when the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the imaging signal of the CCD at that time is transferred and stored in the memory 1308.

  The digital still camera 1300 incorporates the physical quantity sensor 1 and a control circuit 1320 (control unit) that performs control based on the detection signal output from the physical quantity sensor 1. The physical quantity sensor 1 is not particularly limited, but, for example, any one of the above-described embodiments can be used.

  Such a digital still camera 1300 (electronic device) includes the physical quantity sensor 1 and a control circuit 1320 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the digital still camera 1300 (electronic device) can receive the effects of the physical quantity sensor 1 described above, and can exhibit high reliability.

  The electronic device according to the present invention may be, for example, a smartphone, a tablet terminal, a watch (including a smart watch), an inkjet discharge, in addition to the personal computer and the mobile phone of the above-described embodiment and the digital still camera of the present embodiment. Devices (for example, inkjet printers), laptop personal computers, televisions, wearable terminals such as HMDs (head mounted displays), video cameras, video tape recorders, car navigation devices, pagers, electronic organizers (including communication function included), electronics Dictionaries, calculators, electronic game devices, word processors, workstations, video phones, television monitors for crime prevention, electronic binoculars, POS terminals, medical devices (such as electronic thermometers, sphygmomanometers, blood glucose meters, electrocardiogram measuring devices, ultrasound examinations Devices, electronic endoscopes), fish finders, various measuring devices, devices for mobile terminal base stations, instruments (for example, instruments of vehicles, aircraft, ships), flight simulators, network servers, etc. it can.

Seventh Embodiment
Next, a portable electronic device according to a seventh embodiment of the present invention will be described.

  FIG. 21 is a plan view showing a portable electronic device according to a seventh embodiment of the present invention. FIG. 22 is a functional block diagram showing a schematic configuration of the portable electronic device shown in FIG.

  The wristwatch-type activity meter 1400 (active tracker) shown in FIG. 21 is a wrist device to which the portable electronic device of the present invention is applied. The activity meter 1400 is attached to a site (subject) such as the user's wrist by a band 1401. Further, the activity meter 1400 is equipped with a display portion 1402 of digital display, and is capable of wireless communication. The physical quantity sensor 1 according to the present invention described above is incorporated in the activity meter 1400 as an acceleration sensor 1408 that measures acceleration and an angular velocity sensor 1409 that measures angular velocity.

  The activity meter 1400 includes a case 1403 in which the physical quantity sensor 1 is accommodated, a processing unit 1410 which is accommodated in the case 1403 and processes output data from the physical quantity sensor 1, and a display unit 1402 which is accommodated in the case 1403. And a translucent cover 1404 closing the opening of the case 1403. In addition, a bezel 1405 is provided on the outside of the translucent cover 1404. A plurality of operation buttons 1406 and 1407 are provided on the side surface of the case 1403.

  As shown in FIG. 22, the acceleration sensor 1408 detects accelerations in the directions of three axes intersecting (ideally orthogonal) with each other, and signals (acceleration (acceleration according to the magnitude and direction of the detected three-axis acceleration) Output signal). Further, the angular velocity sensor 1409 detects angular velocities in the directions of three axes intersecting (ideally orthogonal) with each other, and outputs a signal (angular velocity signal) according to the magnitude and direction of the detected three axial angular velocity. .

  In the liquid crystal display (LCD) constituting the display unit 1402, for example, position information using the GPS sensor 1411 or the geomagnetic sensor 1412, an acceleration sensor 1408 included in the movement amount or physical quantity sensor 1, an angular velocity according to various detection modes. The exercise information such as the amount of exercise using the sensor 1409 or the like, the biological information such as the pulse rate using the pulse sensor 1413 or the like, or the time information such as the current time is displayed. In addition, the environmental temperature using the temperature sensor 1414 can also be displayed.

  The communication unit 1415 performs various controls for establishing communication between the user terminal and an information terminal (not shown). The communication unit 1415 may be, for example, Bluetooth (registered trademark) (including BTLE: Bluetooth Low Energy), Wi-Fi (registered trademark) (Wireless Fidelity), Zigbee (registered trademark), NFC (Near field communication), ANT + (registered trademark) It is configured to include a transceiver corresponding to a short distance wireless communication standard such as a trademark, and a connector corresponding to a communication bus standard such as USB (Universal Serial Bus).

  The processing unit 1410 (processor) is configured of, for example, a micro processing unit (MPU), a digital signal processor (DSP), an application specific integrated circuit (ASIC), or the like. The processing unit 1410 executes various processes based on the program stored in the storage unit 1416 and the signals input from the operation unit 1417 (for example, operation buttons 1406 and 1407). The processing by the processing unit 1410 includes data processing for each output signal of the GPS sensor 1411, the geomagnetic sensor 1412, the pressure sensor 1418, the acceleration sensor 1408, the angular velocity sensor 1409, the pulse sensor 1413, the temperature sensor 1414, and the timer unit 1419, Display processing for displaying an image on the screen, sound output processing for outputting sound to the sound output unit 1420, communication processing for communicating with an information terminal via the communication unit 1415, power control processing for supplying power from the battery 1421 to each unit, etc. Is included.

Such an activity meter 1400 can have at least the following functions.
1. Distance: Measure the total distance from the start of measurement by high precision GPS function.
2. Pace: Displays the current running pace from the pace distance measurement.
3. Average Speed: Average Speed Calculates and displays the average speed from the start of driving to the present.
4. Elevation: Measure and display elevation by GPS function.
5. Stride: Measures and displays stride even in a tunnel where GPS radio waves do not reach.
6. Pitch: Measure and display the number of steps per minute.
7. Heart rate: The heart rate is measured and displayed by the pulse sensor.
8. Slope: Measure and display the slope of the ground during training or trail running in mountainous areas.
9. Auto lap: Automatic lap measurement is performed when running a certain distance or certain time set in advance.
10. Exercise calories burned: Display calories burned.
11. Number of steps: Display the total number of steps from the start of exercise.

  The activity meter 1400 (portable electronic device) includes a physical quantity sensor 1, a case 1403 in which the physical quantity sensor 1 is housed, and a case 1403, and a processing unit 1410 that processes output data from the physical quantity sensor 1. And a light transmitting cover 1404 closing the opening of the case 1403. Therefore, the activity meter 1400 (portable electronic device) can receive the effects of the physical quantity sensor 1 described above, and can exhibit high reliability.

  The activity meter 1400 can be widely applied to a running watch, a runner's watch, a runner's watch for multi sports such as a duathlon or a triathlon, an outdoor watch, and a satellite positioning system, for example, a GPS watch equipped with GPS.

  Also, although the above description has been made using the GPS (Global Positioning System) as a satellite positioning system, another Global Navigation Satellite System (GNSS) may be used. For example, one or more of satellite positioning systems such as EGNOS (European Geostationary-Satellite Navigation Overlay Service), QZSS (Quasi Zenith Satellite System), GLONASS (GLO Bal NAvigation Satellite System), GALILEO, BeiDou (BeiDou Navigation Satellite System), etc. You may use In addition, using at least one of the satellite positioning systems, the Satellite-based Augmentation System (SBAS) such as Wide Area Augmentation System (WAAS), European Geostationary-Satellite Navigation Overlay Service (EGNOS), etc. It is also good.

Eighth Embodiment
Next, a mobile unit according to an eighth embodiment of the present invention will be described.
FIG. 23 is a perspective view showing a mobile unit according to the eighth embodiment of the present invention.

  An automobile 1500 shown in FIG. 23 is an automobile to which the mobile unit of the present invention is applied. In this figure, a physical quantity sensor 1 is built in an automobile 1500, and the physical quantity sensor 1 can detect the posture of a vehicle body 1501. A detection signal of the physical quantity sensor 1 is supplied to a vehicle body posture control device 1502 (a posture control unit), and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and according to the detection result Control the brakes of the individual wheels 1503. Here, as the physical quantity sensor 1, for example, the same ones as those in the above-described embodiments can be used.

  Such an automobile 1500 (moving body) includes the physical quantity sensor 1 and a vehicle body posture control device 1502 (control unit) that performs control based on a detection signal output from the physical quantity sensor 1. Therefore, the automobile 1500 (mobile body) can receive the effects of the physical quantity sensor 1 described above, and can exhibit high reliability.

  In addition, the physical quantity sensor 1 also includes car navigation systems, car air conditioners, antilock brake systems (ABS), airbags, tire pressure monitoring systems (TPMS: Tire Pressure Monitoring System), engine control, hybrid vehicles It can be widely applied to electronic control units (ECUs) such as battery monitors of electric vehicles and electric vehicles.

  Also, the moving body is not limited to the car 1500, and can be applied to, for example, airplanes, rockets, artificial satellites, ships, AGVs (unmanned transport vehicles), biped robots, unmanned airplanes such as drone etc. .

  The physical quantity sensor, inertial measurement device, mobile body positioning device, portable electronic device, electronic device and mobile body according to the present invention have been described above based on the illustrated embodiments, but the present invention is not limited thereto. The configuration of each part can be replaced with any configuration having the same function. In addition, any other component may be added to the present invention. Also, the embodiments described above may be combined as appropriate.

  In the embodiment described above, an acceleration sensor that detects acceleration as a physical quantity sensor has been described, but the physical quantity detected by the physical quantity sensor is not limited to acceleration, and may be, for example, angular velocity, pressure, or the like.

  DESCRIPTION OF SYMBOLS 1 ... Physical quantity sensor, 2 ... board | substrate, 21 ... recessed part, 211 ... bottom face, 212, 213, 214 ... exposed part, 22, 23 ... mount part, 25, 26, 27 ... groove part, 3 ... element part, 30 ... doped silicon Substrate 31 31 fixed portion 32 movable electrode portion 321 first movable electrode portion 322 second movable electrode portion 323 aperture opening 33 beam portion 4 shield portion 41 first shield portion 41a: end portion, 41b: end portion, 42: second shield portion, 421: first portion, 422: second portion, 5: lid body, 51: recess, 52: communication hole, 53: sealing member, 59 ... glass frit, 75, 76, 77 ... wiring, 8 ... electrode, 81 ... first fixed electrode, 82 ... second fixed electrode, 83 ... dummy electrode, 1100 ... personal computer, 1102 ... keyboard, 1104 ... main body, 1106 ... Display unit , 1108 ... display unit, 1110 ... control circuit, 1200 ... mobile phone, 1202 ... operation button, 1204 ... earpiece, 1206 ... mouthpiece, 1208 ... display unit, 1210 ... control circuit, 1300 ... digital still camera, 1302 ... Case, 1304 ... light receiving unit, 1306 ... shutter button, 1308 ... memory, 1310 ... display unit, 1320 ... control circuit, 1400 ... activity meter, 1401 ... band, 1402 ... display unit, 1403 ... case, 1404 ... translucent cover , 1405 ... bezel, 1406 ... operation button, 1407 ... operation button, 1408 ... acceleration sensor, 1409 ... angular velocity sensor, 1410 ... processing unit, 1411 ... GPS sensor, 1412 ... geomagnetic sensor, 1413 ... pulse sensor, 1414 ... temperature sensor, 1415 ... communication unit 1416 ... memory unit, 1417 ... operation unit, 1418 ... pressure sensor, 1419 ... clocking unit, 1420 ... sound output unit, 1421 ... battery, 1500 ... car, 1501 ... car body, 1502 ... car body attitude control device, 1503 ... wheel, 2000 ... Inertial measurement device, 2100 ... outer case, 2110 ... screw hole, 2200 ... junction member, 2300 ... sensor module, 2310 ... inner case, 2311 ... recess, 2312 ... opening, 2320 ... board, 2330 ... connector, 2340 x ... angular velocity sensor , 2340 y ... angular velocity sensor, 2340 z ... angular velocity sensor, 2350 ... acceleration sensor, 2360 ... control IC, 3000 ... moving body positioning device, 3100 ... inertial measurement device, 3110 ... acceleration sensor, 3120 ... angular velocity sensor, 3200 ... arithmetic processing unit, 3300 GPS reception unit 3400 reception antenna 3500 position information acquisition unit 3600 position combining unit 3700 processing unit 3800 communication unit 3900 display unit Az acceleration B conductive bump C1 C2, C3, C4: electrostatic capacitance, J: rocking shaft, Le: electric line of force, P: electrode pad, S: storage space, V1: voltage, θ: inclination

Claims (12)

A substrate,
A first movable electrode portion positioned on one side via a rocking shaft, and a second movable electrode portion positioned on the other side and having a larger rotational moment about the rocking shaft than the first movable electrode portion; A movable electrode unit comprising
A first fixed electrode disposed on the substrate and facing the first movable electrode portion;
A second fixed electrode disposed on the substrate and facing the second movable electrode portion;
A dummy electrode disposed on the substrate so as to be separated from the second fixed electrode, facing the second movable electrode portion, and having the same potential as the movable electrode portion;
A physical quantity sensor comprising: a first shield portion fixed to the substrate and facing an exposed portion which is a portion exposed from between the second fixed electrode and the dummy electrode of the substrate.   The physical quantity sensor according to claim 1, wherein the first shield portion has the same potential as the movable electrode portion. The second movable electrode portion has an opening,
The physical quantity sensor according to claim 1, wherein the first shield portion is disposed inside the opening.   The physical quantity sensor according to any one of claims 1 to 3, wherein the first shield portion has a portion overlapping the dummy electrode in a plan view of the substrate. The first shield portion has a portion overlapping the second fixed electrode in a plan view of the substrate,
The physical quantity sensor according to any one of claims 1 to 4, further comprising a second shield portion having a portion overlapping the first fixed electrode in a plan view of the substrate.   The physical quantity sensor according to claim 5, wherein the second shield part has the same potential as the movable electrode part.   The physical quantity sensor according to claim 5, wherein the second shield part is located outside the movable electrode part. A physical quantity sensor according to any one of claims 1 to 7,
And a control circuit that controls driving of the physical quantity sensor. An inertial measurement device according to claim 8;
A receiver for receiving a satellite signal on which position information is superimposed from a positioning satellite;
An acquisition unit that acquires position information of the reception unit based on the received satellite signal;
An arithmetic unit that calculates the attitude of the moving object based on the inertial data output from the inertial measurement device;
And a calculator configured to calculate the position of the mobile body by correcting the position information based on the calculated attitude. A physical quantity sensor according to any one of claims 1 to 7,
A case containing the physical quantity sensor;
A processing unit housed in the case and processing output data from the physical quantity sensor;
A display unit housed in the case;
And a translucent cover closing the opening of the case. A physical quantity sensor according to any one of claims 1 to 7,
And a control unit configured to perform control based on a detection signal output from the physical quantity sensor. A physical quantity sensor according to any one of claims 1 to 7,
And a control unit configured to perform control based on a detection signal output from the physical quantity sensor.

Images