JP2019073431A - セラミックス粉体の粒子表面を処理する方法及びかかる方法によって得られるセラミックス粉体粒子 - Google Patents
セラミックス粉体の粒子表面を処理する方法及びかかる方法によって得られるセラミックス粉体粒子 Download PDFInfo
- Publication number
- JP2019073431A JP2019073431A JP2018164205A JP2018164205A JP2019073431A JP 2019073431 A JP2019073431 A JP 2019073431A JP 2018164205 A JP2018164205 A JP 2018164205A JP 2018164205 A JP2018164205 A JP 2018164205A JP 2019073431 A JP2019073431 A JP 2019073431A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- particles
- ceramic material
- ions
- ceramic powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 title claims abstract description 79
- 239000000919 ceramic Substances 0.000 title claims abstract description 75
- 239000000843 powder Substances 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 50
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 47
- 238000005468 ion implantation Methods 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 15
- 150000002500 ions Chemical class 0.000 claims description 54
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 49
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 31
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 29
- 229910052757 nitrogen Inorganic materials 0.000 claims description 29
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 28
- 229910052782 aluminium Inorganic materials 0.000 claims description 25
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 18
- 150000004767 nitrides Chemical class 0.000 claims description 13
- -1 nitrogen ions Chemical class 0.000 claims description 13
- 229910026551 ZrC Inorganic materials 0.000 claims description 6
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 claims description 6
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 6
- 229910052796 boron Inorganic materials 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 229910007948 ZrB2 Inorganic materials 0.000 claims description 4
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 3
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 3
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 abstract description 7
- 238000004381 surface treatment Methods 0.000 abstract description 2
- 238000005245 sintering Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 9
- 239000010410 layer Substances 0.000 description 8
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 7
- 125000004429 atom Chemical group 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 229910052574 oxide ceramic Inorganic materials 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000003574 free electron Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001513 hot isostatic pressing Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- UJVRJBAUJYZFIX-UHFFFAOYSA-N nitric acid;oxozirconium Chemical compound [Zr]=O.O[N+]([O-])=O.O[N+]([O-])=O UJVRJBAUJYZFIX-UHFFFAOYSA-N 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000011449 brick Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000009970 fire resistant effect Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000003758 nuclear fuel Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000000518 rheometry Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910002082 tetragonal zirconia polycrystal Inorganic materials 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/0027—Ion-implantation, ion-irradiation or ion-injection
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/5607—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on refractory metal carbides
- C04B35/5611—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on refractory metal carbides based on titanium carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62828—Non-oxide ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62802—Powder coating materials
- C04B35/62828—Non-oxide ceramics
- C04B35/62836—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62844—Coating fibres
- C04B35/62857—Coating fibres with non-oxide ceramics
- C04B35/62865—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62844—Coating fibres
- C04B35/62857—Coating fibres with non-oxide ceramics
- C04B35/62865—Nitrides
- C04B35/62871—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62844—Coating fibres
- C04B35/62878—Coating fibres with boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62884—Coating the powders or the macroscopic reinforcing agents by gas phase techniques
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0676—Oxynitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3244—Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
- C04B2235/3826—Silicon carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3817—Carbides
- C04B2235/3839—Refractory metal carbides
- C04B2235/3843—Titanium carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3856—Carbonitrides, e.g. titanium carbonitride, zirconium carbonitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3873—Silicon nitrides, e.g. silicon carbonitride, silicon oxynitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3895—Non-oxides with a defined oxygen content, e.g. SiOC, TiON
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/95—Products characterised by their size, e.g. microceramics
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Composite Materials (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Carbon And Carbon Compounds (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Abstract
Description
これは、食べ物や装飾的な用途(陶磁器、テーブルウェア、土器、磁器)、又は建築用途(タイル、れんが、屋根用タイル)のために意図される。
このうち下記について言及する。
* 弱い電流を利用する用途において用いられる電子的又は機能的なセラミックス(誘電体(絶縁)セラミックス、圧電セラミックス、導電性セラミック、磁性セラミックス、セラミックス超伝導体)
* 大きい電力を利用する用途のために意図された電子技術的なセラミックス
* 熱的用途のための耐火性のセラミックス
* 機械的な用途のためのセラミックス
例えば、構造的なセラミックスや機械加工のために意図されたセラミックスである(研磨操作のための研磨セラミックスや切断工具のための炭化物挿入物)
* 化学工業における触媒支持体、及び特に自動車産業において触媒コンバーターを作るために用いられるセラミックス
* 光学的用途(光透過度、発光)のためのセラミックス
* 核燃料格納に用いられることを意図されたセラミックス
すなわち、
* シリカSiO2によって形成された珪質の製品
* アルミナAl2O3を30〜100%含むアルミニウム系製品
* マグネシアMgOで作られる基礎製品
* ジルコニアZrO2やイットリウム安定化正方晶ジルコニア多結晶体(Y−TZP)のような特別な製品
すなわち、炭化物、窒化物、ホウ化物である。
− 前記単価又は多価のイオンの供給源は、電子サイクロトロン共鳴(ECR)タイプのものである。
− 前記セラミックス粉体粒子は、前記イオン注入プロセスの全体にわたって動かされる。
− イオン化される材料は、炭素、窒素及びホウ素から選択されるものである。
− 単価又は多価のイオンは、15000〜35000ボルトの電圧で加速される。
− 注入されるイオン線量は、1×1014〜5×1017イオン・cm-2であり、好ましくは、1×1016及び1×1017イオン・cm-2である。
− 最大のイオン注入深さは、150〜250nmである。
− 本発明のイオン注入プロセスによって処理されるセラミックス材料は、炭化物であり、特に、炭化チタンTiC又は炭化ケイ素SiCである。
− 炭化物タイプのセラミックス材料は、窒素イオンNを照射して、カルボ窒化物、特に、カルボ窒化チタンTiCN又はカルボ窒化ケイ素SiCNを形成する。
− 本発明のイオン注入プロセスによって処理されるセラミックス材料は、窒化物、特に、窒化ケイ素Si3N4である。
− 窒化物タイプのセラミックス材料には、1×1016cm-2〜1×1017cm-2のイオン線量が照射される。
− 本発明のイオン注入プロセスによって処理されるセラミックス材料は、酸化物、特に、ジルコニアZrO2又はアルミナAl2O3である。
− 酸化物タイプのセラミックス材料には、窒素イオンを照射して、オキシ窒化物、特に、オキシ硝酸ジルコニウム水和物ZrO(NO3)2又はイオン照射が十分に長い間続いた場合には窒化ジルコニウムZrNを形成し、又はオキシ窒化アルミニウムAlOxNyを形成する。
− 酸化物セラミック材料に炭素イオンを照射して、カルボ窒化物、特に、炭化ジルコニアZrO2C又は炭化ジルコニウムZrCを形成する。
− 酸化物セラミック材料にホウ素イオンを照射して、オキシホウ化物、特に、ホウ化ジルコニアZrO2B、又はイオン照射が十分に長い間継続される場合には二ホウ化ジルコニウムZrB2を形成する。
したがって、このような粉体によって作られた表面被覆及び固体の部品の性質が改善する。例えば、硬度である。
2 注入ステージ
4 イオン化される気体の体積
6 超周波数波
8 磁場閉じ込めステージ
10 プラズマ
12 抽出ステージ
12a アノード
12b カソード
14 イオンビーム
16 表面
18 処理される部品
20 アルミナ粒子Al2O3
R 半径
22 窒素イオンビームN+
24 コア又は中心
26 外側層又はシェル
e 厚み
28 外表面
30 セラミックス粉体粒子
− 前記単価又は多価のイオンの供給源は、電子サイクロトロン共鳴(ECR)タイプのものである。
− 前記セラミックス粉体粒子は、前記イオン注入プロセスの全体にわたって動かされる。
− イオン化される材料は、炭素、窒素及びホウ素から選択されるものである。
− 単価又は多価のイオンは、15000〜35000ボルトの電圧で加速される。
− 注入されるイオン線量は、1×1014〜5×1017イオン・cm-2であり、好ましくは、1×1016及び1×1017イオン・cm-2である。
− 最大のイオン注入深さは、150〜250nmである。
− 本発明のイオン注入プロセスによって処理されるセラミックス材料は、炭化物であり、特に、炭化チタンTiC又は炭化ケイ素SiCである。
− 炭化物タイプのセラミックス材料は、窒素イオンNを照射して、カルボ窒化物、特に、カルボ窒化チタンTiCN又はカルボ窒化ケイ素SiCNを形成する。
− 本発明のイオン注入プロセスによって処理されるセラミックス材料は、窒化物、特に、窒化ケイ素Si3N4である。
− 窒化物タイプのセラミックス材料には、1×1016cm-2〜1×1017cm-2のイオン線量が照射される。
− 本発明のイオン注入プロセスによって処理されるセラミックス材料は、酸化物、特に、ジルコニアZrO2又はアルミナAl2O3である。
− 酸化物タイプのセラミックス材料には、窒素イオンを照射して、オキシ窒化物、特に、オキシ硝酸ジルコニウム水和物ZrO(NO3)2又はイオン照射が十分に長い間続いた場合には窒化ジルコニウムZrNを形成し、又はオキシ窒化アルミニウムAlOxNyを形成する。
− 酸化物セラミック材料に炭素イオンを照射して、オキシ炭化物(オキシカーバイド)、特に、炭化ジルコニアZrO2C又は炭化ジルコニウムZrCを形成する。
− 酸化物セラミック材料にホウ素イオンを照射して、オキシホウ化物、特に、ホウ化ジルコニアZrO2B、又はイオン照射が十分に長い間継続される場合には二ホウ化ジルコニウムZrB2を形成する。
Claims (23)
- 粉末形態のセラミックス材料を表面処理する方法であって、
処理されるセラミックス材料の複数の粒子によって形成された粉体(30)を用意し、
単価又は多価のイオンの供給源によって作られた単価又は多価のイオンのビーム(14)を前記セラミックス粉体粒子(30)の外表面の方に向けることによって、前記セラミックス粉体粒子(30)に対してイオン注入プロセスを施すステップを有する
ことを特徴とする方法。 - 前記セラミックス粉体粒子(30)は、前記イオン注入プロセスの全体にわたって動かされる
ことを特徴とする請求項1に記載の方法。 - 用いられるセラミックス粉体粒子(30)は、すべての粒子のうちの実質的に50%が2μmよりも小さい寸法を有するような粒径を有する
ことを特徴とする請求項1又は2に記載の方法。 - 用いられるセラミックス粉体粒子(30)の粒径は、1.2μm〜63μmである
ことを特徴とする請求項3に記載の方法。 - 前記セラミックス材料は、炭化物、窒化物、ホウ化物又は酸化物である
ことを特徴とする請求項1〜4のいずれかに記載の方法。 - 前記セラミックス材料は、炭化物であり、窒化炭素を形成するように窒素イオンNが照射される
ことを特徴とする請求項5に記載の方法。 - 前記セラミックス材料は、炭化チタンTiC又は炭化ケイ素SiCであり、
照射の後に得られる製品は、カルボ窒化チタンTiCN又はカルボ窒化ケイ素SiCNである
ことを特徴とする請求項6に記載の方法。 - 前記セラミックス材料は、窒化物であり、1×1016cm-2〜1×1017cm-2のイオン線量が照射される
ことを特徴とする請求項5に記載の方法。 - 前記セラミックス材料は、窒化ケイ素Si3N4である
ことを特徴とする請求項8に記載の方法。 - 前記セラミック材料は、酸化物であり、オキシ窒化物を形成するように窒素イオンが照射される
ことを特徴とする請求項5に記載の方法。 - 前記セラミックス材料は、ジルコニアZrO2又はアルミナAl2O3であり、
照射の後に得られる製品は、窒化ジルコニアZrxOyNz、窒化ジルコニウムZrN又はオキシ窒化アルミニウムAlxOyNzである
ことを特徴とする請求項10に記載の方法。 - 前記セラミック材料は、酸化物であり、カルボ窒化物を形成するように炭素イオンが照射される
ことを特徴とする請求項5に記載の方法。 - 前記セラミックス材料は、ジルコニアZrO2又はアルミナAl2O3であり、
照射の後に得られる製品はそれぞれ、炭化ジルコニアZrO2C又は炭化ジルコニウムZrCである
ことを特徴とする請求項12に記載の方法。 - 前記セラミック材料は、酸化物であり、オキシホウ化物、特に、ホウ化ジルコニアZrO2B、を形成するように、ホウ素イオンが照射される
ことを特徴とする請求項5に記載の方法。 - イオンの照射が十分に長い時間継続すると、二ホウ化ジルコニウムZrB2が得られる
ことを特徴とする請求項14に記載の方法。 - 前記イオン注入プロセスは、電子サイクロトロン共鳴(ECR)タイプのものである
ことを特徴とする請求項1〜15のいずれかに記載の方法。 - 前記単価又は多価のイオンは、15000〜35000ボルトの電圧で加速される
ことを特徴とする請求項16に記載の方法。 - 注入されるイオン線量は、1×1014〜5×1017イオン・cm-2であり、好ましくは、1×1016〜1×1017イオン・cm-2である
ことを特徴とする請求項16又は17に記載の方法。 - 前記イオンは、粒子の寸法の約20%に対応する深さまで前記セラミックス材料粉体を形成する粒子に浸透する
ことを特徴とする請求項16又は17に記載の方法。 - セラミックスの外側層(26)及びセラミックスのコア(24)がある複数の粒子によって形成される粉末形態の材料であって、
前記粒子は、全体として多面体の形を有し、
前記外側層(26)は、前記セラミックス粉体粒子の前記コア(24)が作られているセラミックス材料の、ホウ化物、炭化物又は窒化物に対応するもので作られている
ことを特徴とする材料。 - 前記粒子の約50%は、粒径が2μmよりも小さい
ことを特徴とする請求項20に記載の材料。 - 用いられるセラミックス粉体粒子(30)の寸法は、1.2μm〜63μmである
ことを特徴とする請求項21に記載の材料。 - 前記セラミックス粉体粒子(30)が作られているセラミックス材料は、ホウ化物、炭化物、酸化物又は窒化物である
ことを特徴とする請求項20又は22に記載の材料。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP17196219.4A EP3470384A1 (fr) | 2017-10-12 | 2017-10-12 | Procédé de traitement de surface de particules d'une poudre céramique et particules de poudre céramique obtenues grâce à ce procédé |
EP17196219.4 | 2017-10-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019073431A true JP2019073431A (ja) | 2019-05-16 |
JP6792599B2 JP6792599B2 (ja) | 2020-11-25 |
Family
ID=60201815
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018164205A Active JP6792599B2 (ja) | 2017-10-12 | 2018-09-03 | セラミックス粉体の粒子表面を処理する方法及びかかる方法によって得られるセラミックス粉体粒子 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20190112700A1 (ja) |
EP (2) | EP3470384A1 (ja) |
JP (1) | JP6792599B2 (ja) |
KR (1) | KR102204766B1 (ja) |
CN (1) | CN109650905B (ja) |
SG (1) | SG10201806426VA (ja) |
TW (1) | TWI801404B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9850570B2 (en) * | 2015-07-06 | 2017-12-26 | Intevac, Inc. | Ion implantation for modification of thin film coatings on glass |
EP3425085A1 (fr) * | 2017-07-07 | 2019-01-09 | The Swatch Group Research and Development Ltd | Procede de traitement de surface de particules d'une poudre metallique et particules de poudre metallique obtenues grace a ce procede |
CN112092277B (zh) * | 2020-08-05 | 2022-02-25 | 江苏佳境生态工程技术有限公司 | 透水塑胶道路面层颗粒制造工艺 |
EP4079713A1 (fr) * | 2021-04-21 | 2022-10-26 | Comadur S.A. | Procédé de réalisation d'une pièce en céramique à effet nacré, notamment pour l'horlogerie |
CN113416077B (zh) * | 2021-06-24 | 2022-07-19 | 齐鲁工业大学 | 一种双复合结构的高温陶瓷刀具材料及其制备方法与应用 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57149867A (en) * | 1981-03-12 | 1982-09-16 | Asahi Glass Co Ltd | Treatment of ceramic sintering raw material |
JPS57149866A (en) * | 1981-03-12 | 1982-09-16 | Asahi Glass Co Ltd | Treatment of ceramic sintering raw material |
JPS6172697A (ja) * | 1984-09-17 | 1986-04-14 | 株式会社豊田中央研究所 | ジルコニアの強化方法 |
JPH01108142A (ja) * | 1987-09-23 | 1989-04-25 | Westinghouse Electric Corp <We> | セラミックス材料の耐破砕性を向上させる方法 |
JPH01243359A (ja) * | 1988-03-25 | 1989-09-28 | Matsushita Electric Ind Co Ltd | プラズマドーピング方法 |
JPH06135743A (ja) * | 1992-10-28 | 1994-05-17 | Olympus Optical Co Ltd | 絶縁物質へのイオン注入法および装置 |
CN102875157A (zh) * | 2012-11-07 | 2013-01-16 | 毕鹏云 | 一种氧化铝陶瓷的制备方法 |
JP2016520502A (ja) * | 2013-03-28 | 2016-07-14 | ケルテック | 超親水性ガラス材料を製造するためのイオンビーム処理方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3546113A1 (de) * | 1985-12-24 | 1987-06-25 | Santrade Ltd | Verbundpulverteilchen, verbundkoerper und verfahren zu deren herstellung |
CN1028321C (zh) * | 1991-08-22 | 1995-05-03 | 清华大学 | 生物医学陶瓷材料的离子束轰击接枝方法 |
US6024909A (en) * | 1993-08-12 | 2000-02-15 | Agency Of Industrial Science & Technology | Coated ceramic particles, a ceramic-base sinter and a process for producing the same |
JP4016091B2 (ja) * | 1993-08-12 | 2007-12-05 | 独立行政法人産業技術総合研究所 | 被覆セラミックス粒子、セラミックス基焼結体及びその製造法 |
JP2001269937A (ja) * | 2000-03-23 | 2001-10-02 | Olympus Optical Co Ltd | 複合型光学素子成型用金型の製造方法 |
US7444955B2 (en) * | 2004-05-19 | 2008-11-04 | Sub-One Technology, Inc. | Apparatus for directing plasma flow to coat internal passageways |
FR3009217B1 (fr) * | 2013-08-01 | 2016-10-28 | Quertech | Procede de traitement de poudre a base d'oxyde de cerium |
EP3146086B1 (en) * | 2014-05-23 | 2019-10-02 | Quertech | Single- and/or multi-charged gas ion beam treatment method for producing an anti-glare sapphire material |
-
2017
- 2017-10-12 EP EP17196219.4A patent/EP3470384A1/fr not_active Ceased
- 2017-10-12 EP EP19206092.9A patent/EP3632876A1/fr active Pending
-
2018
- 2018-07-27 SG SG10201806426VA patent/SG10201806426VA/en unknown
- 2018-07-31 TW TW107126441A patent/TWI801404B/zh active
- 2018-08-27 US US16/112,821 patent/US20190112700A1/en not_active Abandoned
- 2018-09-03 JP JP2018164205A patent/JP6792599B2/ja active Active
- 2018-09-14 KR KR1020180110261A patent/KR102204766B1/ko active IP Right Grant
- 2018-09-27 CN CN201811128433.XA patent/CN109650905B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57149867A (en) * | 1981-03-12 | 1982-09-16 | Asahi Glass Co Ltd | Treatment of ceramic sintering raw material |
JPS57149866A (en) * | 1981-03-12 | 1982-09-16 | Asahi Glass Co Ltd | Treatment of ceramic sintering raw material |
JPS6172697A (ja) * | 1984-09-17 | 1986-04-14 | 株式会社豊田中央研究所 | ジルコニアの強化方法 |
JPH01108142A (ja) * | 1987-09-23 | 1989-04-25 | Westinghouse Electric Corp <We> | セラミックス材料の耐破砕性を向上させる方法 |
JPH01243359A (ja) * | 1988-03-25 | 1989-09-28 | Matsushita Electric Ind Co Ltd | プラズマドーピング方法 |
JPH06135743A (ja) * | 1992-10-28 | 1994-05-17 | Olympus Optical Co Ltd | 絶縁物質へのイオン注入法および装置 |
CN102875157A (zh) * | 2012-11-07 | 2013-01-16 | 毕鹏云 | 一种氧化铝陶瓷的制备方法 |
JP2016520502A (ja) * | 2013-03-28 | 2016-07-14 | ケルテック | 超親水性ガラス材料を製造するためのイオンビーム処理方法 |
Non-Patent Citations (1)
Title |
---|
HIOKI T ET AL.: "modification of the mechanical properties of ceramics by ion implantation", NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH, vol. B39, JPN6019033834, 1989, pages 657 - 664, XP000068738, ISSN: 0004108138, DOI: 10.1016/0168-583X(89)90869-0 * |
Also Published As
Publication number | Publication date |
---|---|
JP6792599B2 (ja) | 2020-11-25 |
EP3470384A1 (fr) | 2019-04-17 |
TW201925143A (zh) | 2019-07-01 |
CN109650905B (zh) | 2022-04-19 |
CN109650905A (zh) | 2019-04-19 |
US20190112700A1 (en) | 2019-04-18 |
EP3632876A1 (fr) | 2020-04-08 |
TWI801404B (zh) | 2023-05-11 |
KR102204766B1 (ko) | 2021-01-19 |
SG10201806426VA (en) | 2019-05-30 |
KR20190041399A (ko) | 2019-04-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6792599B2 (ja) | セラミックス粉体の粒子表面を処理する方法及びかかる方法によって得られるセラミックス粉体粒子 | |
Grasso et al. | Flash spark plasma sintering (FSPS) of pure ZrB 2 | |
Wang et al. | Processing and mechanical properties of zirconium diboride‐based ceramics prepared by spark plasma sintering | |
Xu et al. | High‐temperature flexural strength of SiC ceramics prepared by additive manufacturing | |
CN111996473B (zh) | 一种变结构超高温陶瓷基复合材料及其制备方法 | |
Cheng et al. | Structure design, fabrication, properties of laminated ceramics: A review | |
CN104072182A (zh) | 由含有修复和偏移裂纹的基体相的陶瓷基体复合材料制成的部件的制造方法 | |
Li et al. | Sintering of high‐performance silicon nitride ceramics under vibratory pressure | |
Leslie et al. | Development and characterization of continuous SiC fiber‐reinforced HfB2‐based UHTC matrix composites using polymer impregnation and slurry infiltration techniques | |
Hussainova et al. | Densification and characterization of spark plasma sintered ZrC–ZrO2 composites | |
Yan et al. | In situ synthesis of ultrafine ZrB2–SiC composite powders and the pressureless sintering behaviors | |
Zhou et al. | Effect of ZrC amount and distribution on the thermomechanical properties of Cf/SiC‐ZrC composites | |
Shi et al. | Fine TiC dispersed Al2O3 composites fabricated via in situ reaction synthesis and conventional process | |
Román‐Manso et al. | Effects of current confinement on the spark plasma sintering of silicon carbide ceramics | |
Lackey et al. | Laminated C‐SiC matrix composites produced by CVI | |
Ma et al. | Pressureless densification and properties of TiB2–B4 C composite ceramics with Ni as additives | |
US3416944A (en) | Ablative product and method for its manufactur | |
EP0219319A2 (en) | Method of producing ceramic articles | |
JPH09175870A (ja) | 反応焼結セラミックス及びその製造方法 | |
Yang et al. | Ultra‐high strength medium‐entropy (Ti, Zr, Ta) C ceramics at 1800° C by consolidating a core‐shell structured powder | |
Manocha et al. | Silica/silica composites through electrophoretic infiltration-Effect of processing conditions on densification of composites | |
CN105585324A (zh) | 晶须增韧强化碳陶瓷复合材料 | |
Mentz et al. | Carbon-fibre-reinforced carbon composite filled with SiC particles forming a porous matrix | |
Kaplan Akarsu et al. | Comparative study of reactive and nonreactive spark plasma sintering routes for the production of TaB2‐TaC composites | |
Kim et al. | Enhanced sintering of SiC using infiltration of preceramic polymer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180903 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181002 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190830 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190910 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20191210 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200210 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200526 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200820 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20201104 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20201106 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6792599 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |