JP2019066175A - Vapor chamber, electronic equipment and metal sheet for vapor chamber - Google Patents

Abstract

To provide a vapor chamber capable of reflowing working liquid over the whole region of an outer peripheral part of a metal sheet, and a metal sheet for vapor chamber.SOLUTION: A vapor chamber comprises a first metal sheet and a second metal sheet provided on the first metal sheet. On at least one of the first metal sheet and the second metal sheet, a steam flow passage part is formed, where steam of working fluid circulates, and on at least one of the first metal sheet and the second metal sheet, a liquid flow passage part is formed, where liquefied working fluid circulates. On the first metal sheet, a first peripheral liquid flow passage part is formed along the periphery of the first metal sheet, where liquefied working fluid circulates. The first periphery liquid flow passage is formed over the whole circumference of the first metal sheet.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a vapor chamber, an electronic device, and a metal sheet for the vapor chamber.

  A device with heat generation such as a central processing unit (CPU) used in a mobile terminal or the like such as a portable terminal or a tablet terminal is cooled by a heat dissipation member such as a heat pipe (see, for example, Patent Document 1). In recent years, in order to reduce the thickness of mobile terminals and the like, it is also required to reduce the thickness of the heat dissipation member, and development of a vapor chamber capable of achieving the reduction in thickness more than a heat pipe has been advanced. A hydraulic fluid is sealed in the vapor chamber, and the hydraulic fluid absorbs the heat of the device and discharges it to the outside to cool the device.

  More specifically, the hydraulic fluid in the vapor chamber receives heat from the device in a portion (evaporator) close to the device and evaporates into a vapor, and then the vapor moves to a position away from the evaporator. Cool and condense to a liquid state. In the vapor chamber, a capillary structure (wick) is provided as a liquid flow passage, and the hydraulic fluid which has become liquid passes through the liquid flow passage, is transported to the evaporation unit, and is again carried out by the evaporation unit. Heat and evaporate. In this way, the working fluid moves the heat of the device by refluxing the inside of the vapor chamber while repeating phase change, that is, evaporation and condensation, thereby enhancing the heat radiation efficiency.

JP, 2016-50682, A

  By the way, in patent document 1, the wick is arrange | positioned along the outer periphery of a sheet | seat body. For this reason, regardless of where in the steam passage the steam condenses and becomes the working fluid, the working fluid can be returned to the heat receiving portion by the capillary force of the wick. However, in Patent Document 1, since the wick is not continuously formed in the vicinity of the injection port (pouring nozzle), the return of the hydraulic fluid is disturbed especially in the outer peripheral portion of the sheet near the injection port. There is a risk of getting tired.

  The present invention has been made in consideration of these points, and provides a vapor chamber, an electronic device, and a metal sheet for vapor chamber capable of refluxing the working fluid over the entire periphery of the metal sheet. The purpose is

The present invention
A vapor chamber filled with hydraulic fluid,
A first metal sheet,
A second metal sheet laminated on the first metal sheet;
A vapor flow passage portion through which the vapor of the hydraulic fluid passes is formed in at least one of the first metal sheet and the second metal sheet,
A liquid passage portion through which the liquid working fluid passes is formed in at least one of the first metal sheet and the second metal sheet,
A first peripheral liquid flow passage portion through which the liquid working fluid passes is formed in the first metal sheet along the peripheral edge of the first metal sheet,
The first peripheral liquid flow passage portion is a vapor chamber formed over the entire circumference of the first metal sheet,
I will provide a.

In the above-mentioned vapor chamber,
A second peripheral liquid flow passage portion through which the liquid working fluid passes is formed in the second metal sheet along the peripheral edge of the second metal sheet,
At least a portion of the first peripheral liquid flow passage portion and at least a portion of the second peripheral liquid flow passage portion overlap with each other;
You may do so.

Also, in the above-described vapor chamber,
The width of the first peripheral liquid flow passage portion is different from the width of the second peripheral liquid flow passage portion,
You may do so.

Also, in the above-described vapor chamber,
The second metal sheet has an injection flow passage concave portion communicating with the steam flow passage portion through the conduction portion, and the second peripheral liquid flow passage portion is the second metal sheet except for the conduction portion. It is formed over the entire periphery,
You may do so.

Also, in the above-described vapor chamber,
The first peripheral liquid flow channel portion has a plurality of main flow grooves extending in parallel to one another, and a communication groove connecting the main flow grooves adjacent to each other.
You may do so.

Also, in the above-described vapor chamber,
A convex portion is formed so as to be surrounded by the main flow groove and the connection groove, and the plurality of convex portions are arranged in a zigzag shape in a plan view.
You may do so.

Also, in the above-described vapor chamber,
The second metal sheet is provided on the first metal sheet,
You may do so.

Also, in the above-described vapor chamber,
And a third metal sheet interposed between the first metal sheet and the second metal sheet,
The steam channel portion is formed in the second metal sheet,
The liquid channel portion is formed in the first metal sheet,
The third metal sheet is provided with a communicating portion for communicating the vapor flow path portion with the liquid flow path portion.
You may do so.

The present invention also relates to a vapor chamber in which hydraulic fluid is sealed,
A first metal sheet,
A second metal sheet laminated on the first metal sheet;
A third metal sheet interposed between the first metal sheet and the second metal sheet,
The third metal sheet includes a first surface provided on the side of the first metal sheet, and a second surface provided on the side of the second metal sheet,
A vapor flow passage portion through which the vapor of the hydraulic fluid passes is formed in at least one of the first surface and the second surface of the third metal sheet,
A liquid passage portion through which the liquid working fluid passes is formed in at least one of the first surface and the second surface of the third metal sheet,
A third peripheral liquid flow passage portion through which the liquid working fluid passes is formed along the peripheral edge of the third metal sheet on the first surface of the third metal sheet,
The third peripheral liquid flow passage portion is a vapor chamber formed over the entire circumference of the third metal sheet,
I will provide a.

Also, the present invention is
With the housing,
A device housed within the housing;
An electronic device comprising the above-described vapor chamber in thermal contact with the device;
I will provide a.

Also, the present invention is
A metal sheet for a vapor chamber for a vapor chamber in which a hydraulic fluid is enclosed, comprising:
First side,
And a second surface provided on the side opposite to the first surface,
A first peripheral liquid flow passage portion through which the liquid working fluid passes is formed on the first surface along the peripheral edge of the first surface,
The first peripheral liquid flow channel portion is a metal sheet for a vapor chamber, which is formed over the entire circumference of the first surface,
I will provide a.

  According to the present invention, the working fluid can be refluxed over the entire area of the outer peripheral portion of the metal sheet.

FIG. 1 is a schematic perspective view illustrating an electronic device according to a first embodiment of the present invention. FIG. 2 is a top view showing the vapor chamber according to the first embodiment of the present invention. FIG. 3 is a cross-sectional view of the vapor chamber of FIG. 2 taken along line A-A. FIG. 4 is a top view of the lower metal sheet of the vapor chamber of FIG. 5 is a bottom view of the upper metal sheet of the vapor chamber of FIG. 2; FIG. 6 is an enlarged top view showing the liquid flow path portion and the peripheral liquid flow path portion of the vapor chamber of FIG. FIG. 7 is a cross-sectional view showing an upper metal sheet added to the cross section taken along the line B-B in FIG. FIG. 8 is an enlarged top view showing a modification of the liquid flow passage and the peripheral liquid flow passage of FIG. FIG. 9 is an enlarged top view showing another modification of the liquid flow passage portion and the peripheral liquid flow passage portion of FIG. FIGS. 10 (a) to 10 (c) are diagrams showing a manufacturing method (first half) of the vapor chamber according to the first embodiment of the present invention. FIGS. 11 (a) to 11 (c) are diagrams showing a method of manufacturing a vapor chamber (second half) according to the first embodiment of the present invention. FIG. 12 is a view showing a modification (modification 1) of the vapor chamber of FIG. FIG. 13 is a view showing another modification (modification 2) of the vapor chamber of FIG. FIG. 14 is a view showing another modification (modification 3) of the vapor chamber of FIG. 3; FIG. 15 is a view showing another modification (modification 4) of the vapor chamber of FIG. 3; FIG. 16 is a view showing another modification (modification 5) of the vapor chamber of FIG. FIG. 17 is a view showing another modification (modification 6) of the vapor chamber of FIG. FIG. 18 is a view showing another modification (modification 7) of the vapor chamber of FIG. 2; FIG. 19 is a cross-sectional view showing a vapor chamber according to a second embodiment of the present invention. FIG. 20 is a bottom view of the upper metal sheet of FIG. 21 is a top view of the intermediate metal sheet of FIG. 19; FIG. 22 is a bottom view of the intermediate metal sheet of FIG. FIG. 23 is a cross-sectional view showing a vapor chamber in the third embodiment of the present invention. FIG. 24 is a top view of the intermediate metal sheet of FIG. FIG. 25 is a bottom view of the intermediate metal sheet of FIG. FIG. 26 is a top view of the lower metal sheet of FIG. FIG. 27 is a cross-sectional view showing a modification of the vapor chamber of FIG.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the drawings attached to the present specification, for the sake of illustration and ease of understanding, the scale, vertical and horizontal dimensional ratios, etc. are appropriately changed from those of a real thing and exaggerated.

  In addition, as used herein, the terms such as “parallel”, “orthogonal”, “identical”, lengths, angles, and physical characteristics, which specify the shape, geometrical conditions, physical characteristics, and their degree, are specified. The value etc. of the term shall be interpreted without including the strict meaning and including the range in which the same function can be expected. Furthermore, in the drawings, for the sake of clarity, although the shapes of a plurality of parts which may expect similar functions are regularly described, the functions may be expected without being bound by a strict meaning. The shapes of the portions may be different from each other as long as Further, in the drawings, a boundary line indicating a bonding surface between members is shown as a simple straight line for convenience, but it is not restricted to being a straight straight line, and a desired bonding performance can be expected. To the extent possible, the shape of the boundary is arbitrary.

First Embodiment
A vapor chamber, an electronic device, and a metal sheet for vapor chamber according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 18. The vapor chamber 1 in the present embodiment is a device mounted on the electronic device E in order to cool the device D as a heating element housed in the electronic device E. Examples of the device D include a central processing unit (CPU) used in a mobile terminal such as a portable terminal and a tablet terminal, a light emitting diode (LED), and an electronic device (cooled device) with heat generation such as a power semiconductor. Be

  Here, first, an electronic device E on which the vapor chamber 1 according to the present embodiment is mounted will be described by taking a tablet terminal as an example. As shown in FIG. 1, the electronic device E (tablet terminal) includes a housing H, a device D housed in the housing H, and the vapor chamber 1. In the electronic device E shown in FIG. 1, a touch panel display TD is provided on the front surface of the housing H. The vapor chamber 1 is housed in a housing H and arranged to be in thermal contact with the device D. This allows the vapor chamber 1 to receive the heat generated by the device D when the electronic device E is used. The heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via a working fluid 2 described later. In this way, device D is effectively cooled. When the electronic device E is a tablet terminal, the device D corresponds to a central processing unit or the like.

  Next, the vapor chamber 1 in the present embodiment will be described. The vapor chamber 1 has a sealed space 3 in which the hydraulic fluid 2 is enclosed, and the hydraulic fluid 2 in the sealed space 3 repeats the phase change to effectively cool the device D of the electronic device E described above. It is supposed to

  The vapor chamber 1 is formed in a substantially thin flat plate shape. The planar shape of the vapor chamber 1 is arbitrary, but may be rectangular as shown in FIG. In this case, the vapor chamber 1 has four straight outer edges 1a, 1b which have an out-of-plane contour. Among these, two outer edges 1a are formed along a first direction X described later, and the remaining two outer edges 1b are formed along a second direction Y described later. The planar shape of the vapor chamber 1 may be, for example, a rectangle of 1 cm on one side and 3 cm on the other side, or a square of 15 cm on one side, and the planar dimension of the vapor chamber 1 is arbitrary. . Further, the planar shape of the vapor chamber 1 is not limited to the rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L shape, a T shape, and the like.

  As shown in FIG. 2 and FIG. 3, the vapor chamber 1 is formed of a lower metal sheet 10 (a first metal sheet or a second metal sheet, a metal sheet for vapor chamber) and an upper metal laminated on the lower metal sheet 10. And a sheet (a second metal sheet or a first metal sheet, a metal sheet for a vapor chamber). In the present embodiment, the upper metal sheet 20 is provided on the lower metal sheet 10. The lower metal sheet 10 has an upper surface 10a (first surface) and a lower surface 10b (second surface) provided on the side opposite to the upper surface 10a. The upper metal sheet 20 is opposite to the lower surface 20a (surface at the side of the lower metal sheet 10) superimposed on the upper surface 10a (surface at the side of the upper metal sheet 20) of the lower metal sheet 10 and the lower surface 20a. And a top surface 20b provided. The device D, which is an object to be cooled, is attached to the lower surface 10 b of the lower metal sheet 10 (in particular, the lower surface of the evaporation unit 11 described later).

  A sealed space 3 in which the hydraulic fluid 2 is sealed is formed between the lower metal sheet 10 and the upper metal sheet 20. In the present embodiment, the sealed space 3 mainly includes the vapor flow passage 80 (a lower steam flow passage recess 12 and an upper steam flow passage recess 21 described later) through which the steam of the working fluid 2 passes. And the peripheral liquid flow paths 18, 27. Examples of the hydraulic fluid 2 include pure water, ethanol, methanol, acetone and the like.

  The lower metal sheet 10 and the upper metal sheet 20 are joined by diffusion bonding described later. Although the lower metal sheet 10 and the upper metal sheet 20 are both formed in a rectangular shape in plan view in the embodiment shown in FIGS. 2 and 3, the present invention is not limited thereto. Here, in plan view, the direction perpendicular to the surface (the lower surface 10b of the lower metal sheet 10) to which the vapor chamber 1 receives heat from the device D and the surface (the upper surface 20b of the upper metal sheet 20) to release the received heat. This corresponds to, for example, a state in which the vapor chamber 1 is viewed from above (see FIG. 2) or a state in which it is viewed from below.

  When the vapor chamber 1 is installed in a mobile terminal, the vertical relationship between the lower metal sheet 10 and the upper metal sheet 20 may be broken depending on the attitude of the mobile terminal. However, in the present embodiment, for convenience, the metal sheet that receives heat from the device D is referred to as the lower metal sheet 10, the metal sheet that releases the received heat is referred to as the upper metal sheet 20, and the lower metal sheet 10 is It will be described that the lower metal sheet 20 is disposed at the upper side while being disposed at the lower side.

  As shown in FIG. 2, the vapor chamber 1 further includes an injection unit 4 for injecting the hydraulic fluid 2 into the sealed space 3 at one of the pair of end portions in the first direction X. The injection portion 4 corresponds to the lower injection protrusion 16 projecting from the end surface of the lower metal sheet 10 (the surface corresponding to the outer edge 1 b in FIG. 2) and the end surface of the upper metal sheet 20 (corresponding to the outer edge 1 b in FIG. And an upper injection protrusion 25 projecting from the surface). The lower injection channel recess 17 is formed on the upper surface of the lower injection protrusion 16 (the surface corresponding to the upper surface 10 a of the lower metal sheet 10), and the lower surface of the upper injection protrusion 25 (lower surface of the upper metal sheet 20). The upper injection channel recess 26 is formed on the surface corresponding to 20a. The lower injection passage recess 17 is in communication with the lower steam passage recess 12, and the upper injection passage recess 26 is in communication with the upper steam passage recess 21. When the lower metal sheet 10 and the upper metal sheet 20 are joined, the lower injection channel recess 17 and the upper injection channel recess 26 integrally form an injection channel of the hydraulic fluid 2. The hydraulic fluid 2 is injected into the sealed space 3 through the injection flow path. In the present embodiment, an example is shown in which the injection unit 4 is provided at one end of the pair of ends in the first direction X of the vapor chamber 1, but the present invention is limited thereto. It can be provided at any position. Moreover, two or more injection parts 4 may be provided.

  As shown in FIG. 4, the lower metal sheet 10 is provided on the evaporation portion 11 where the working fluid 2 evaporates to generate steam, and the upper surface 10 a, and is a lower steam flow path formed in a rectangular shape in plan view And a concave portion 12 (first vapor flow passage portion). Among these, the lower side steam passage concave portion 12 constitutes a part of the sealed space 3 described above, and is mainly configured to pass the vapor generated in the evaporation portion 11.

  The evaporation portion 11 is disposed in the lower steam flow passage recess 12, and the vapor in the lower steam flow passage recess 12 diffuses in the direction away from the evaporation portion 11, and most of the vapor is relatively It is transported towards the lower temperature edge. In addition, the evaporation part 11 is a part which receives the heat from the device D attached to the lower surface 10b of the lower side metal sheet 10, and the hydraulic fluid 2 in the sealed space 3 evaporates. For this reason, the term evaporation unit 11 is not limited to the portion overlapping the device D, and is used as a concept including the portion where the hydraulic fluid 2 can evaporate even if the portion does not overlap the device D. Here, although the evaporation part 11 can be provided in the arbitrary places of the lower side metal sheet 10, in FIG.2 and FIG.4, the example provided in the center part of the lower side metal sheet 10 is shown. . In this case, the operation of the vapor chamber 1 can be stabilized regardless of the attitude of the mobile terminal in which the vapor chamber 1 is installed.

  In the present embodiment, as shown in FIG. 3 and FIG. 4, from the bottom surface 12 a (described later) of the lower steam channel recess 12 in the lower steam channel recess 12 of the lower metal sheet 10 (bottom surface 12 a Lower channel wall portions 13 (first channel projecting portions) projecting in a direction perpendicular to In the present embodiment, an example is shown in which the lower flow path wall portion 13 extends in a slender shape along the first direction X (longitudinal direction, left and right direction in FIG. 4) of the vapor chamber 1. The lower flow passage wall portion 13 includes an upper surface 13 a (a contact surface, a protruding end surface) which is in contact with a lower surface 22 a of an upper flow passage wall portion 22 described later. The upper surface 13 a is a surface which is not etched by an etching process described later, and is formed on the same plane as the upper surface 10 a of the lower metal sheet 10. Moreover, each lower side flow path wall part 13 is mutually spaced apart at equal intervals, and is mutually arrange | positioned in parallel.

  As shown in FIGS. 3 and 4, the lower steam channel recess 12 includes a plurality of lower steam channels 81 (first steam channels) partitioned by the lower channel wall 13. The lower steam passages 81 extend in a slender shape along the first direction X, and are arranged parallel to one another. Both ends of each lower steam passage 81 are in communication with a lower communicating steam passage 82 elongated in the second direction Y, and each lower steam passage 81 passes through the lower communicating steam passage 82. Communicate with each other. In this manner, the steam of the hydraulic fluid 2 flows around the lower flow passage walls 13 (the lower steam passage 81 and the lower communication steam passage 82), and the peripheral portion of the lower steam flow passage recess 12 The steam is configured to be transported to prevent the flow of the steam from being obstructed. In FIG. 3, the shape of the cross section (the cross section in the second direction Y) of the lower steam passage 81 of the lower steam passage concave portion 12 is rectangular. However, the present invention is not limited to this, and the cross-sectional shape of the lower steam passage 81 may be, for example, a curved shape, a semicircular shape, or a V shape, and the vapor of the hydraulic fluid 2 may be diffused. It is optional if possible. The lower communication steam passage 82 is also the same. The width (dimension in the second direction Y) w7 of the lower steam passage 81 corresponds to the distance between the lower flow passage wall portions 13 described later. The width (the dimension in the first direction X) of the lower communication steam passage 82 is also the same.

  As described above, the lower steam passages 81 communicate with each other through the lower communication steam passage 82. As a result, the steam of the hydraulic fluid 2 can pass between the lower steam passages 81. For this reason, the vapor of the hydraulic fluid 2 can be further diffused.

  The lower flow path wall portion 13 is disposed to overlap with the corresponding upper flow path wall portion 22 (described later) of the upper metal sheet 20 in plan view, and the mechanical strength of the vapor chamber 1 is improved. . The lower steam passage 81 is formed to overlap the corresponding upper steam passage 83 (described later) in plan view. Similarly, the lower communication steam passage 82 is formed to overlap the corresponding upper communication steam passage 84 (described later) in plan view.

  The width w0 of the lower flow passage wall 13 is, for example, 0.05 mm to 30 mm, preferably 0.05 mm to 2.0 mm, and the distance d between the adjacent lower flow passage wall portions 13 is 0. 0. It is 05 mm to 30 mm, preferably 0.05 mm to 2.0 mm. Here, the width w0 is the dimension of the lower flow passage wall 13 in the second direction Y orthogonal to the first direction X of the lower flow passage wall 13, and the dimension at the upper surface 10a of the lower metal sheet 10 , And corresponds to, for example, the dimension in the vertical direction in FIG. Further, the height (in other words, the maximum depth of the lower steam channel recess 12) h0 (see FIG. 3) of the lower channel wall 13 is at least 10 μm or more smaller than the thickness T1 of the lower metal sheet 10. Is preferred. When the remainder obtained by subtracting h0 from T1 is 10 μm or more, the lower steam flow passage concave portion 12 can be prevented from being damaged due to insufficient strength. The thickness of the vapor chamber 1 may be 0.1 mm to 2.0 mm, and the thickness T1 of the lower metal sheet 10 and the thickness T2 of the upper metal sheet 20 may be equal. For example, when the thickness of the vapor chamber 1 is 0.5 mm and T1 and T2 are the same, h0 is preferably 200 μm.

  As shown in FIGS. 3 and 4, a lower peripheral wall 14 is provided at the peripheral edge of the lower metal sheet 10. The lower peripheral wall 14 is formed to surround the sealed space 3, in particular, the lower steam channel recess 12, and defines the sealed space 3. Further, lower alignment holes 15 for positioning the lower metal sheet 10 and the upper metal sheet 20 are provided at the four corners of the lower peripheral wall 14 in plan view.

  Further, in the lower peripheral wall 14, a ring-shaped lower peripheral liquid flow passage portion 18 (first peripheral liquid flow passage portion or 2 Peripheral liquid flow path portion) is formed. The lower peripheral liquid channel portion 18 is formed along the peripheral edge of the lower metal sheet 10 in the inner portion of the lower peripheral wall 14 in a plan view. The lower peripheral liquid flow passage portion 18 is formed so as to surround the sealed space 3, in particular, the lower steam flow passage concave portion 12. That is, the lower steam passage 81 or the lower communication steam passage 82 of the lower steam passage concave portion 12 is interposed between the liquid passage portion 30 and the lower peripheral liquid passage portion 18 in plan view. The liquid flow passage portion 30 and the lower peripheral liquid flow passage portion 18 are divided. The lower peripheral liquid flow passage portion 18 has a rectangular ring shape in a plan view, and each side thereof is parallel to the first direction X or the second direction Y.

  As shown in FIG. 4, the lower peripheral liquid flow passage 18 is formed over the entire circumference of the lower metal sheet 10. That is, the lower peripheral liquid channel portion 18 is formed without interruption in all four sides of the rectangular lower metal sheet 10. Further, the lower peripheral liquid flow passage portion 18 is formed to cross the injection flow passage of the working fluid 2 formed by the lower injection flow passage concave portion 17 and in the vicinity of the lower injection flow passage concave portion 17 as well. It is possible to circulate the hydraulic fluid 2. In FIG. 4, although the lower injection flow passage concave portion 17 enters the middle of the lower peripheral liquid flow passage 18 in the width direction (first direction X), the present invention is not limited to this. The recess 17 may not enter the lower peripheral liquid flow passage 18.

  The lower peripheral liquid flow passage portion 18 is formed on a part (inner portion) of the annular lower peripheral wall 14 that protrudes upward (in the direction perpendicular to the bottom surface 12 a) from the bottom surface 12 a of the lower steam flow passage recess 12. It is done. The lower peripheral wall 14 has an upper surface 14 a that abuts on a lower surface 23 a of the upper peripheral wall 23 described later. The upper surface 14 a is a surface not etched by an etching process described later, and is formed on the same plane as the upper surface 10 a of the lower metal sheet 10.

  The width w7 of the lower peripheral liquid flow passage 18 is, for example, 0.03 mm to 30 mm, preferably 0.03 mm to 2.0 mm. Here, the width w7 means a dimension in a direction perpendicular to the longitudinal direction of the lower peripheral liquid channel portion 18 in a plan view. The width w 7 means the dimension in the second direction Y in the portion parallel to the first direction X of the lower peripheral liquid flow passage portion 18, and the width w 7 in the first direction X in the portion parallel to the second direction Y Means the dimensions. Further, the height of the lower peripheral wall 14 is the same as the height of the lower flow path wall portion 13 and is preferably 10 μm to 200 μm.

  In the present embodiment, the upper metal sheet 20 is different from the lower metal sheet 10 in that the liquid channel portion 30 described later is not provided and the configuration of the upper peripheral liquid channel portion 27 is different. . Hereinafter, the configuration of the upper metal sheet 20 will be described in more detail.

  As shown in FIGS. 3 and 5, the upper metal sheet 20 has an upper steam channel recess 21 (a second steam channel portion) provided in the lower surface 20 a. The upper steam flow passage concave portion 21 constitutes a part of the sealed space 3 and is mainly configured to diffuse and cool the vapor generated in the evaporation portion 11. More specifically, the vapor in the upper steam passage recess 21 diffuses in the direction away from the evaporation portion 11, and much of the vapor is transported toward the relatively low temperature peripheral portion. In addition, as shown in FIG. 3, on the upper surface 20 b of the upper metal sheet 20, a housing member Ha which constitutes a part of a housing such as a mobile terminal is disposed. As a result, the steam in the upper steam passage recess 21 is cooled by the outside air through the upper metal sheet 20 and the housing member Ha.

  In the present embodiment, as shown in FIG. 2, FIG. 3 and FIG. 5, in the upper steam channel recess 21 of the upper metal sheet 20, the lower side from the bottom surface 21a of the upper steam channel recess 21 (vertical to the bottom surface 21a A plurality of upper flow path wall portions 22 (second flow path wall portions, second flow path protrusion portions) projecting in the direction are provided. In the present embodiment, an example is shown in which the upper channel wall portion 22 extends in a slender shape along the first direction X (the left and right direction in FIG. 5) of the vapor chamber 1. The upper flow passage wall portion 22 has a flat lower surface 22a (contact surface, or the like) that contacts the upper surface 10a of the lower metal sheet 10 (more specifically, the upper surface 13a of the lower flow passage wall portion 13 described above). (Including protruding end face). Moreover, each upper flow path wall part 22 is mutually spaced apart at equal intervals, and is mutually arrange | positioned in parallel.

  As shown in FIGS. 3 and 5, the upper steam channel recess 21 includes a plurality of upper steam channels 83 (second steam channels) partitioned by the upper channel wall 22. The upper steam passages 83 extend in a elongated shape along the first direction X, and are arranged parallel to one another. Both ends of each upper steam passage 83 are in communication with an upper communication steam passage 84 elongated along the second direction Y, and each upper steam passage 83 is in communication via the upper communication steam passage 84. There is. In this manner, the steam of the hydraulic fluid 2 flows around the respective upper flow path wall portions 22 (upper steam path 83 and upper communication steam path 84), and the steam flows toward the peripheral portion of the upper steam flow path recess 21. It is configured to be transported and prevents the flow of steam from being impeded. In FIG. 3, the shape of the cross section (the cross section in the second direction Y) of the upper steam passage 83 of the upper steam passage recess 21 is rectangular. However, the present invention is not limited to this, and the cross-sectional shape of the upper steam passage 83 may be, for example, a curved shape, a semicircular shape, or a V shape, as long as the vapor of the hydraulic fluid 2 can be diffused. It is optional. The cross-sectional shape of the upper connecting steam passage 84 is also the same. The width of the upper steam passage 83 (the dimension in the second direction Y) and the width of the upper communication steam passage 84 are the same as the width of the lower steam passage 81 and the width of the lower communication steam passage 82, as shown in FIG. It may be, but may be different.

  As described above, the upper steam passages 83 communicate with each other through the upper communication steam passage 84. As a result, the steam of the hydraulic fluid 2 can pass between the upper steam passages 83. For this reason, the vapor of the hydraulic fluid 2 can be further diffused.

  The upper flow passage wall portion 22 is disposed to overlap the corresponding lower flow passage wall portion 13 of the lower metal sheet 10 in plan view, and the mechanical strength of the vapor chamber 1 is improved. Further, the upper steam passage 83 is formed to overlap the corresponding lower steam passage 81 in a plan view. Similarly, the upper communication steam passage 84 is formed to overlap the corresponding lower communication steam passage 82 in plan view.

  Preferably, the width and height of the upper flow path wall 22 are the same as the width w0 and height h0 of the lower flow path wall 13 described above. Here, the bottom surface 21a of the upper steam passage recess 21 may be referred to as a ceiling surface in the vertical arrangement relation between the lower metal sheet 10 and the upper metal sheet 20 as shown in FIG. Since it corresponds to the surface on the back side of the recess 21, it is referred to as the bottom surface 21 a in the present specification.

  As shown in FIGS. 3 and 5, an upper peripheral wall 23 is provided at the peripheral edge of the upper metal sheet 20. The upper peripheral wall 23 is formed so as to surround the sealed space 3, in particular, the upper steam channel recess 21, and defines the sealed space 3. Further, upper alignment holes 24 for positioning the lower metal sheet 10 and the upper metal sheet 20 are provided at the four corners of the upper peripheral wall 23 in plan view. That is, each upper alignment hole 24 is disposed so as to overlap each lower alignment hole 15 described above at the time of temporary fixing described later, and the lower metal sheet 10 and the upper metal sheet 20 can be positioned. .

  Further, as shown in FIG. 3 and FIG. 5, an annular upper peripheral liquid flow passage 27 (second A peripheral liquid flow channel portion or a first peripheral liquid flow channel portion) is formed. The upper peripheral liquid channel portion 27 is formed along the peripheral edge of the upper metal sheet 20 in the inner portion of the upper peripheral wall 23 in a plan view. The upper peripheral liquid flow passage 27 is formed to surround the sealed space 3, in particular, the upper steam flow passage recess 21. That is, the upper steam passage 83 or the upper communication steam passage 84 of the upper steam passage recess 21 is interposed between the liquid passage 30 and the upper peripheral liquid passage 27 in plan view, and the liquid passage The portion 30 and the upper peripheral liquid channel portion 27 are divided. Further, the upper peripheral liquid flow passage portion 27 has a rectangular ring shape in a plan view, and each side thereof is parallel to the first direction X or the second direction Y.

  As shown in FIG. 5, the upper peripheral liquid flow passage portion 27 is formed over the entire peripheral edge of the upper metal sheet 20 excluding the conductive portion 28 connecting the upper injection flow passage concave portion 26 and the upper steam flow passage concave portion 21. ing. That is, the upper peripheral liquid flow passage portion 27 is partially interrupted at the conduction portion 28 which injects the working fluid 2 from the upper injection flow passage concave portion 26. Therefore, in the sealing step described later, the working fluid 2 can be injected from the upper injection flow passage concave portion 26 to the upper steam flow passage concave portion 21 through the conduction portion 28. On the other hand, since the upper peripheral liquid flow channel portion 27 is formed over the entire peripheral edge of the upper metal sheet 20 except for the conducting portion 28, the working fluid 2 is made to the evaporation portion 11 side in substantially the entire peripheral edge of the upper metal sheet 20 It is possible to reflux.

  The upper peripheral liquid flow passage 27 is formed on a part (inner portion) of the annular upper peripheral wall 23 projecting downward (in the direction perpendicular to the bottom 21 a) from the bottom surface 21 a of the upper steam flow passage recess 21. . The upper peripheral wall 23 has a lower surface 23 a that abuts on the upper surface 14 a of the lower peripheral wall 14. The lower surface 23 a is a surface not etched by an etching process described later, and is formed on the same plane as the lower surface 20 a of the upper metal sheet 20.

  The width w8 of the upper peripheral liquid flow passage 27 is, for example, 0.02 mm to 20 mm, preferably 0.02 mm to 1.5 mm. Here, the width w8 means a dimension in a direction perpendicular to the longitudinal direction of the upper peripheral liquid channel portion 27 in plan view. The width w 8 means the dimension in the second direction Y in the portion parallel to the first direction X of the upper peripheral liquid flow channel portion 27, and in the portion parallel to the second direction Y, the width w 8 is the dimension in the first direction X Means Further, the height of the upper peripheral wall 23 is the same as the height of the upper flow path wall portion 22 and is preferably 10 μm to 200 μm.

  Further, as shown in FIGS. 3 to 5, the width w 7 of the lower peripheral liquid flow passage 18 of the lower metal sheet 10 is wider than the width w 8 of the upper peripheral liquid flow passage 27 of the upper metal sheet 20. (W7> w8). Specifically, the width w7 of the lower peripheral liquid channel portion 18 is wider than the width w8 of the upper peripheral liquid channel portion 27 over the entire peripheral edge excluding the conducting portion 28. The difference (w7−w8) between the width w7 of the lower peripheral liquid flow passage 18 and the width w8 of the upper peripheral liquid flow passage 27 may be 0.01 mm to 1 mm. The lower peripheral liquid flow passage portion 18 protrudes inward from the upper peripheral liquid flow passage portion 27 in plan view, and the inner portion 18 a of the lower peripheral liquid flow passage portion 18 which protrudes is an upper peripheral peripheral edge. The upper steam flow passage recess 21 is opposed to the liquid flow passage 27 without being in contact with the liquid flow passage 27. On the other hand, the outer peripheral edge of the lower peripheral liquid flow passage 18 is disposed at the same position as the outer peripheral edge of the upper peripheral liquid flow passage 27 in plan view. Thus, the steam of the working fluid 2 in the upper steam channel recess 21 can be directly condensed to the inner portion 18a of the lower peripheral liquid channel portion 18 protruding to the upper steam channel recess 21 side, The condensation and reflux of the hydraulic fluid 2 can be stably performed. The width w8 of the upper peripheral liquid channel 27 may be the same as the width w7 of the lower peripheral liquid channel 18, and the width w8 of the upper peripheral liquid channel 27 is lower. It may be wider than the width w7 of the peripheral liquid flow passage 18.

  Further, in the present embodiment, a part of the lower peripheral liquid flow passage 18 of the lower metal sheet 10 and a part of the upper peripheral liquid flow passage 27 of the upper metal sheet 20 overlap with each other in a plan view. ing. Specifically, the lower peripheral liquid flow passage 18 and the upper peripheral liquid flow passage 27 overlap with each other except for the inner portion 18 a of the lower peripheral liquid flow passage 18 and the conducting portion 28. Thereby, the hydraulic fluid 2 can be efficiently returned by the lower peripheral liquid flow passage 18 and the upper peripheral liquid flow passage 27.

  The lower metal sheet 10 and the upper metal sheet 20 are permanently bonded to each other, preferably by diffusion bonding. More specifically, as shown in FIG. 3, the upper surface 14 a of the lower peripheral wall 14 of the lower metal sheet 10 abuts on the lower surface 23 a of the upper peripheral wall 23 of the upper metal sheet 20, and the lower peripheral wall 14 and the upper peripheral wall 23 are joined together. Thereby, a sealed space 3 in which the hydraulic fluid 2 is sealed is formed between the lower metal sheet 10 and the upper metal sheet 20. In addition, condensation and reflux of the working fluid 2 can be effectively performed between the lower peripheral liquid flow passage portion 18 and the upper peripheral liquid flow passage portion 27 at the peripheries of the metal sheets 10 and 20. Furthermore, the upper surface 13a of the lower flow passage wall 13 of the lower metal sheet 10 and the lower surface 22a of the upper flow passage wall 22 of the upper metal sheet 20 are in contact with each other and correspond to each lower flow passage wall 13 The upper flow passage wall 22 is joined to each other. Thereby, the mechanical strength of the vapor chamber 1 is improved. In particular, since the lower channel wall 13 and the upper channel wall 22 according to the present embodiment are arranged at equal intervals, the mechanical strength at each position of the vapor chamber 1 can be equalized. The lower metal sheet 10 and the upper metal sheet 20 may be joined not by diffusion bonding but by other methods such as brazing as long as they can be permanently joined. The term "permanently bonded" is not strictly limited, and the upper surface 10a of the lower metal sheet 10 is able to maintain the sealing performance of the sealed space 3 when the vapor chamber 1 is operated. It is used as a term which means that it is joined to such an extent that joining with the lower surface 20a of the upper metal sheet 20 can be maintained.

  Next, the configurations of the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 will be described in more detail with reference to FIGS. 6 and 7.

  FIG. 6 is an enlarged plan view of the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27, and FIG. 7 is a cross-sectional view of the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27. In the present embodiment, although the case where the shapes of the liquid flow passage 30, the lower peripheral liquid flow passage 18, and the upper peripheral liquid flow passage 27 are identical to each other will be described as an example, the liquid flow passage 30, lower The shapes of the side peripheral liquid flow passage 18 and the upper peripheral liquid flow passage 27 may be different from each other.

  As described above, the upper surface 10a of the lower metal sheet 10 (more specifically, the upper surface 13a of each lower channel wall 13) is provided with the liquid channel portion 30 through which the liquid hydraulic fluid 2 passes. There is. Further, along the peripheral edge of the metal sheets 10, 20, peripheral liquid flow path portions 18, 27 through which the liquid working fluid 2 passes are provided. The liquid flow passage portion 30 and the peripheral liquid flow passage portions 18 and 27 constitute a part of the sealed space 3 described above, and are in communication with the lower steam flow passage concave portion 12 and the upper steam flow passage concave portion 21. In addition, the liquid flow path part 30 is not restricted to being provided in all the lower side flow path wall parts 13. FIG. For example, the lower flow path wall portion 13 in which the liquid flow path portion 30 is not provided may be present.

  As shown in FIG. 6, each of the liquid flow passage portion 30 and the peripheral liquid flow passage portions 18 and 27 includes a plurality of main flow grooves 31 extending in parallel with each other and a communication groove 32 connecting the main flow grooves 31 adjacent to each other. Have. The main flow groove 31 extends along the main flow direction of the hydraulic fluid 2 (in this case, the first direction X) in the portion parallel to the first direction X of the liquid flow passage portion 30 and the peripheral liquid flow passage portions 18 and 27. ing. Further, the communication groove 32 extends along a direction (second direction Y in this case) orthogonal to the main flow direction of the hydraulic fluid 2, and the hydraulic fluid 2 can be transported between the main flow grooves 31 adjacent to each other. It has become. A liquid hydraulic fluid 2 passes through the main flow groove 31 and the communication groove 32, respectively. The main flow groove 31 and the connection groove 32 mainly serve to transport the working fluid 2 condensed from the vapor generated in the evaporation unit 11 toward the evaporation unit 11. In FIG. 6, for convenience, both the lower peripheral liquid flow passage 18 and the upper peripheral liquid flow passage 27 are shown, but in practice, the lower peripheral liquid flow passage 18 and the upper peripheral liquid flow are shown. The road portions 27 overlap with each other in the vertical direction. A portion of the peripheral liquid flow passages 18 and 27 parallel to the second direction Y extends along the main flow direction of the hydraulic fluid 2 (in this case, the second direction Y). The contact groove 32 extends in the first direction X.

  Further, in the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27, a plurality of convex portions 33 are arranged in a zigzag shape in plan view. Each convex portion 33 is formed to be surrounded by the main flow groove 31 and the connection groove 32, respectively. In FIG. 6, the plurality of convex portions 33 have the same shape, and each convex portion 33 is formed in a rectangular shape so that the first direction X is a longitudinal direction in a plan view. In the present embodiment, the arrangement pitch of the projections 33 along the main flow direction (the first direction X in this case) of the hydraulic fluid 2 is constant. That is, the plurality of convex portions 33 are arranged at regular intervals in the first direction X, and for the convex portions 33 adjacent in the second direction Y, the length of the convex portions 33 is approximately half the length in the first direction X It is arranged in a staggered manner.

  The width (dimension in the second direction Y) w1 of the main flow groove 31 is preferably larger than the width (dimension in the second direction Y) w2 of the convex portion 33. In this case, the ratio of the mainstream groove 31 to the upper surface 13a of the lower flow passage wall 13, the upper surface 14a of the lower peripheral wall 14 and the lower surface 23a of the upper peripheral wall 23 can be increased. For this reason, the flow channel density of the mainstream groove 31 in the lower flow path wall portion 13, the lower peripheral wall 14 and the upper peripheral wall 23 can be increased, and the transport function of the liquid working fluid 2 can be improved. For example, the width w1 of the main flow groove 31 may be 20 μm to 200 μm, and the width w2 of the convex portion 33 may be 20 μm to 180 μm.

  The depth h1 of the main flow groove 31 is preferably smaller than the height h0 (see FIG. 3) of the lower flow path wall portion 13 described above. In this case, the capillary action of the mainstream groove 31 can be enhanced. For example, the depth h1 of the main flow groove 31 is preferably about half of the height h0 of the lower flow passage wall portion 13 and may be 5 μm to 200 μm.

  In addition, it is preferable that the width (dimension in the first direction X) w3 of the connection groove 32 be smaller than the width w1 of the main flow groove 31. Thereby, while the working fluid 2 in liquid form is transported toward the evaporation portion 11 in each main flow groove 31, it is possible to suppress the flow of the working fluid 2 to the connection groove 32, and improve the transport function of the working fluid 2. Can. On the other hand, when dryout occurs in any of the main flow grooves 31, the hydraulic fluid 2 can be moved from the adjacent main flow grooves 31 through the corresponding communication grooves 32, and dryout is eliminated quickly. The transport function of the hydraulic fluid 2 can be secured. That is, the connection groove 32 can exhibit its function even if it is smaller than the width w1 of the main flow groove 31 as long as the main flow grooves 31 adjacent to each other can be communicated with each other. The width w3 of such a communication groove 32 may be, for example, 50 μm.

  The depth (not shown) of the connection groove 32 may be shallower than the depth of the main flow groove 31 according to the width w3. For example, the depth of the connection groove 32 may be 10 μm to 200 μm. Further, the cross-sectional shape of the main flow groove 31 is not particularly limited, and can be, for example, rectangular, C-shaped, semicircular, semi-elliptical, curved or V-shaped. The cross-sectional shape of the connection groove 32 is also the same.

  As shown in FIG. 7, the liquid flow path portion 30 is formed on the upper surface 13 a of the lower flow path wall portion 13 of the lower metal sheet 10. On the other hand, in the present embodiment, the lower surface 22 a of the upper flow passage wall portion 22 of the upper metal sheet 20 is formed flat. Thus, the main flow grooves 31 of the liquid flow path portion 30 are covered by the flat lower surface 22 a. In this case, as shown in FIG. 7, the pair of side walls 35 and 36 of the main flow groove 31 extending in the first direction X and the lower surface 22a of the upper flow path wall 22 Can be formed, and the capillary action at this corner 37 can be enhanced.

  Further, the upper surface 14a of the lower peripheral wall 14 and the lower surface 23a of the upper peripheral wall 23 are in contact with each other, whereby at least a part of the lower peripheral liquid flow passage portion 18 and the upper peripheral liquid flow passage portion At least a part of 27 overlaps with each other. In this case, in the region where the peripheral liquid flow passages 18 and 27 overlap, the main flow groove 31, the communication groove 32 and the convex portion 33 of the lower peripheral liquid flow passage 18 are respectively the main flow of the upper peripheral liquid flow passage 27 The groove 31, the communication groove 32 and the protrusion 33 overlap. That is, the main flow groove 31, the communication groove 32, and the convex portion 33 of the lower peripheral liquid flow passage portion 18 are arranged mirror-symmetrically to the main flow groove 31, the communication groove 32, and the convex portion 33 of the upper peripheral liquid flow passage portion 27, respectively. ing. The main groove 31 of the lower peripheral liquid flow passage portion 18 and the main flow groove 31 of the upper peripheral liquid flow passage 27 are disposed to face each other, so that the main flow grooves in the lower peripheral wall 14 and the upper peripheral wall 23 The cross-sectional area of 31 can be increased, and the transport function of the hydraulic fluid 2 can be improved. However, the present invention is not limited to this, and at least a portion of the main flow groove 31, the communication groove 32 and the convex portion 33 of the lower peripheral liquid flow channel 18 is the main flow groove 31 of the upper peripheral liquid flow channel 27, the communication groove 32 and the convex It may be disposed offset from at least a part of the portion 33.

  In the present embodiment, the liquid flow path portion 30 is formed only on the lower metal sheet 10. Further, the steam flow path concave portions 12 and 21 and the peripheral liquid flow path portions 18 and 27 are formed in both the lower metal sheet 10 and the upper metal sheet 20, respectively. However, the present invention is not limited to this, and the liquid flow path portion 30, the steam flow path concave portions 12 and 21, and the peripheral liquid flow path portions 18 and 27 may be formed on at least one of the lower metal sheet 10 and the upper metal sheet 20, respectively. It should just be formed.

  The shapes of the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 of the lower metal sheet 10 are not limited to the above.

  For example, as shown in FIG. 8, the liquid flow passage portion 30 and the peripheral liquid flow passage portions 18 and 27 are elongated shapes formed between a plurality of main flow grooves 31 extending parallel to each other and the main flow grooves 31 adjacent to each other. And the convex portion 33A. In this case, each convex portion 33A extends along substantially the entire longitudinal direction of the liquid flow passage 30 and the peripheral liquid flow passages 18 and 27 along the main flow direction of the hydraulic fluid 2 (in this case, the first direction X). ing. Thus, the working fluid 2 in liquid form can be efficiently transported toward the evaporation portion 11 in each of the main flow grooves 31. Although not shown, a communication groove is provided in a part of the convex portion 33A, and the main flow groove 31 is communicated with the lower steam passage recess 12 or the upper steam passage recess 21 by the communication groove. You may

  Alternatively, as shown in FIG. 9, the liquid flow passage portion 30 and the peripheral liquid flow passage portions 18 and 27 have capillary structure members 39 filled in the concave portions 38 formed in the metal sheets 10 and 20 respectively. May be The capillary structure member 39 is a member for flowing the liquid working fluid 2 toward the evaporation portion 11 by capillary phenomenon, and is configured separately from the metal sheets 10 and 20. As such a capillary structure member 39, for example, a metal mesh, a metal powder, a metal non-woven fabric and the like can be mentioned.

  The material used for the lower metal sheet 10 and the upper metal sheet 20 is not particularly limited as long as the material has a good thermal conductivity, but it is preferable to use, for example, copper (oxygen-free copper) or a copper alloy It is. In this case, the heat conductivity of the lower metal sheet 10 and the upper metal sheet 20 can be increased, and the heat radiation efficiency of the vapor chamber 1 can be improved. The thickness of the vapor chamber 1 may be 0.1 mm to 2.0 mm. Although FIG. 3 shows the case where the thickness T1 of the lower metal sheet 10 and the thickness T2 of the upper metal sheet 20 are equal to each other, the present invention is not limited thereto. The thickness T2 of the metal sheet 20 may not be equal. The entire size of the vapor chamber 1 (the total size of the metal sheets 10 and 20) is about 1 cm × 3 cm to about 15 cm square.

  Next, the operation of the present embodiment having such a configuration will be described. Here, first, a method of manufacturing the vapor chamber 1 will be described with reference to FIGS. 10A to 10C and FIGS. 11A to 11C, but the description of the half etching step of the upper metal sheet 20 is the same. Simplify. 10 (a) to (c) and FIGS. 11 (a) to (c) show the same cross section as the cross sectional view of FIG.

  First, as shown in FIG. 10A, a flat metal material sheet M is prepared as a preparation step.

  Subsequently, as shown in FIG. 11B, a resist film 41 is formed on the upper surface Ma and the lower surface Mb of the metal material sheet M by the photolithography method. The resist film 41 formed on the upper surface Ma of the metal material sheet M has a pattern shape corresponding to the lower flow path wall portion 13 and the lower peripheral wall 14.

  Next, as shown in FIG. 11C, the metal material sheet M is half-etched to form the lower steam channel recess 12 which constitutes a part of the sealed space 3. Thereby, the part corresponding to the resist opening 41a of the resist film 41 among the upper surfaces Ma of the metal material sheet M is half-etched. Thereafter, the resist film 41 is removed from the metal material sheet M. As a result, as shown in FIG. 11C, the lower steam flow passage concave portion 12, the lower flow passage wall portion 13 and the lower peripheral wall 14 are formed. At the same time, the liquid flow path 30 is formed in the lower flow path wall 13 by half etching, and the lower peripheral liquid flow path 18 is formed in the lower peripheral wall 14. In the resist opening 41a, the width of the portions corresponding to the main flow grooves 31 and the communication grooves 32 of the liquid flow passage portion 30 and the lower peripheral liquid flow passage portion 18 is narrow, so that the etching solution is less inflow. For this reason, the depths of the main flow groove 31 and the connection groove 32 are formed shallower than the depth of the lower steam flow passage concave portion 12. At this time, the lower injection channel recess 17 shown in FIGS. 2 and 4 is also formed simultaneously, and the lower metal sheet 10 having a predetermined outer contour shape as shown in FIG. 4 is obtained.

  In addition, half etching means etching for etching a to-be-etched material halfway to the thickness direction, and forming the recessed part which does not penetrate a to-be-etched material. Therefore, the depth of the recess formed by half etching is not limited to half the thickness of the material to be etched. The thickness of the material to be etched after half etching is, for example, 30% to 70%, preferably 40% to 60% of the thickness of the material to be etched before half etching. As the etching solution, for example, an iron chloride-based etching solution such as a ferric chloride aqueous solution or a copper chloride-based etching solution such as a copper chloride aqueous solution can be used.

  In addition, first, the lower steam flow channel concave portion 12 is formed in the metal material sheet M by half etching (first half etching step), and thereafter, in another etching step (second half etching step), the liquid in the metal material sheet M The flow path portion 30 and the peripheral liquid flow path portions 18 and 27 may be formed.

  On the other hand, although not shown, the upper metal sheet 20 is half-etched from the lower surface 20 a in the same manner as the lower metal sheet 10 to form the upper steam channel recess 21, the upper channel wall 22 and the upper peripheral wall 23. Ru. At the same time, the upper peripheral liquid flow passage 27 is formed in the upper peripheral wall 23 by half etching. Thus, the upper metal sheet 20 described above is obtained.

  Next, as shown in FIG. 11A, in the temporary fixing step, the lower metal sheet 10 having the lower steam channel recess 12 and the upper metal sheet 20 having the upper steam channel recess 21 are opposed to each other. Temporarily fix.

  In this case, first, lower side using lower alignment hole 15 of lower metal sheet 10 (see FIGS. 2 and 4) and upper alignment hole 24 of upper metal sheet 20 (see FIGS. 2 and 5) The metal sheet 10 and the upper metal sheet 20 are positioned. Subsequently, the lower metal sheet 10 and the upper metal sheet 20 are fixed. The fixing method is not particularly limited. For example, the lower metal sheet 10 and the upper metal sheet 20 are fixed by performing resistance welding on the lower metal sheet 10 and the upper metal sheet 20. May be In this case, as shown in FIG. 11A, it is preferable to perform resistance welding spotwise using the electrode bar 40. Laser welding may be performed instead of resistance welding. Alternatively, the lower metal sheet 10 and the upper metal sheet 20 may be ultrasonically bonded and fixed by irradiating ultrasonic waves. Furthermore, although an adhesive may be used, it is preferable to use an adhesive which does not have an organic component or has a small amount of an organic component. Thus, the lower metal sheet 10 and the upper metal sheet 20 are fixed in a positioned state.

  After temporary tacking, as shown in FIG. 11B, the lower metal sheet 10 and the upper metal sheet 20 are permanently bonded by diffusion bonding as a permanent bonding step. In diffusion bonding, the lower metal sheet 10 and the upper metal sheet 20 to be bonded are brought into close contact, and pressure is applied in a direction in which the respective metal sheets 10, 20 are brought into contact in a controlled atmosphere such as vacuum or inert gas. In addition, it is a method of heating by using diffusion of atoms generated at the bonding surface. Diffusion bonding heats the materials of the lower metal sheet 10 and the upper metal sheet 20 to a temperature close to the melting point, but is lower than the melting point, so that melting and deformation of the respective metal sheets 10 and 20 can be avoided. More specifically, the upper surface 14a of the lower peripheral wall 14 of the lower metal sheet 10 and the lower surface 23a of the upper peripheral wall 23 of the upper metal sheet 20 are diffusion bonded as bonding surfaces. Thereby, the sealed space 3 is formed between the lower metal sheet 10 and the upper metal sheet 20 by the lower peripheral wall 14 and the upper peripheral wall 23. Further, the lower injection channel recess 17 (see FIGS. 2 and 4) and the upper injection channel recess 26 (see FIGS. 2 and 5) form an injection channel for the hydraulic fluid 2 communicated with the sealed space 3 Be done. Further, the upper surface 13 a of the lower flow passage wall 13 of the lower metal sheet 10 and the lower surface 22 a of the upper flow passage wall 22 of the upper metal sheet 20 are diffusion bonded as bonding surfaces. Mechanical strength is improved. The liquid flow path portion 30 formed on the upper surface 13 a of the lower flow path wall portion 13 remains as a flow path of the liquid working fluid 2.

  After the permanent bonding, as shown in FIG. 11 (c), the hydraulic fluid 2 is injected from the injection part 4 (see FIG. 2) into the sealed space 3 as the sealing step. At this time, first, the sealed space 3 is evacuated and depressurized (for example, 5 Pa or less, preferably 1 Pa or less), and then the working fluid 2 is injected into the sealed space 3. At the time of injection, the hydraulic fluid 2 passes through the injection flow passage formed by the lower injection flow passage recess 17 and the upper injection flow passage recess 26 and the conduction portion 28. For example, the amount of the hydraulic fluid 2 sealed may be 10% to 40% of the total volume of the sealed space 3 depending on the configuration of the liquid flow path portion 30 inside the vapor chamber 1.

  After the injection of the hydraulic fluid 2, the above-described injection channel is sealed. In this case, for example, the injection portion 4 may be irradiated with a laser, and the injection portion 4 may be partially melted to seal the injection flow path. Alternatively, the injection portion 4 may be closed by caulking to seal the sealed space 3. Thus, the communication between the sealed space 3 and the outside air is shut off, and the hydraulic fluid 2 is sealed in the sealed space 3. Thus, the hydraulic fluid 2 in the sealed space 3 is prevented from leaking to the outside.

  As described above, the vapor chamber 1 according to the present embodiment is obtained.

  In the present embodiment, an example in which the vapor chamber 1 is manufactured mainly by etching has been described. However, the present invention is not limited to this, and may be manufactured by a 3D printer. For example, the vapor chamber 1 may be assembled together in one 3D printer at a time, or each metal sheet 10, 20 may be separately manufactured in a 3D printer and then joined.

  Next, an operation method of the vapor chamber 1, that is, a method of cooling the device D will be described.

  The vapor chamber 1 obtained as described above is installed in a housing such as a mobile terminal, and a device D such as a CPU to be cooled is attached to the lower surface 10 b of the lower metal sheet 10. Since the amount of the hydraulic fluid 2 injected into the sealed space 3 is small, the liquid hydraulic fluid 2 in the sealed space 3 has a wall surface of the sealed space 3, that is, the lower steam channel recess 12 by its surface tension. It adheres to the wall surface, the wall surface of the upper steam flow passage recess 21, and the wall surfaces of the liquid flow passage portion 30 and the peripheral liquid flow passage portions 18 and 27.

  When the device D generates heat in this state, the working fluid 2 present in the evaporation portion 11 of the lower steam flow passage concave portion 12 receives heat from the device D. The received heat is absorbed as latent heat and the hydraulic fluid 2 is evaporated (vaporized) to generate a vapor of the hydraulic fluid 2. Most of the generated steam diffuses in the lower steam passage recess 12 and the upper steam passage recess 21 that constitute the sealed space 3 (see solid arrows in FIG. 4). The steam in the upper steam channel recess 21 and in the lower steam channel recess 12 leaves the evaporation portion 11, and most of the steam is transported to the peripheral portion of the vapor chamber 1 having a relatively low temperature. The diffused vapor dissipates heat to the lower metal sheet 10 and the upper metal sheet 20 to be cooled. The heat received by the lower metal sheet 10 and the upper metal sheet 20 from the steam is transmitted to the outside air through the housing member Ha (see FIG. 3).

  The steam dissipates heat to the lower metal sheet 10 and the upper metal sheet 20 to lose latent heat absorbed in the evaporation section 11 and condenses. The working fluid 2 condensed to be liquid adheres to the wall surface of the lower steam channel recess 12 or the wall surface of the upper steam channel recess 21. Here, since the working fluid 2 continues to evaporate in the evaporating unit 11, the working fluid 2 in portions other than the evaporating unit 11 in the liquid flow passage unit 30 and the peripheral liquid flow passage units 18 and 27 is the evaporation unit 11. (See dashed arrows in FIG. 4). As a result, the liquid working fluid 2 adhering to the wall surface of the lower steam flow passage concave portion 12 and the wall surface of the upper steam flow passage concave portion 21 moves toward the liquid flow passage portion 30 and the peripheral liquid flow passage portions 18 and 27. , And flow into the liquid flow passage 30 and the peripheral liquid flow passages 18 and 27. For this reason, the working fluid 2 filled in the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27 obtains a propelling force toward the evaporation portion 11 by the capillary action of each of the main flow grooves 31. It will be transported smoothly towards you.

  By the way, in the present embodiment, the peripheral liquid flow path portions 18 and 27 are formed along the peripheral edges of the metal sheets 10 and 20, respectively. For this reason, the working fluid 2 condensed and liquefied at the peripheral edge of the metal sheets 10 and 20 returns the peripheral fluid flow path portions 18 and 27 by capillary action and is transported toward the evaporation portion 11. In particular, the lower peripheral liquid flow passage portion 18 is formed continuously over the entire circumference of the lower metal sheet 10. Therefore, the hydraulic fluid 2 in a liquid state flows smoothly along the entire peripheral edge of the lower metal sheet 10 through the lower peripheral liquid channel portion 18 without being blocked in the vicinity of the lower injection channel concave portion 17. It is transported towards the evaporation section 11. The upper peripheral liquid flow passage portion 27 is interrupted by the conduction portion 28, but the lower peripheral liquid flow passage portion 18 is also formed in a portion facing the conduction portion 28, so that the upper peripheral liquid flow passage portion 27 is formed. It promotes 27 circumferential flows.

  The hydraulic fluid 2 that has reached the evaporation unit 11 receives heat again from the device D and evaporates. In this way, the hydraulic fluid 2 circulates in the vapor chamber 1 while repeating phase change, that is, evaporation and condensation, and the heat of the device D is moved and released. As a result, the device D is cooled.

  Thus, according to the present embodiment, since the lower peripheral liquid flow passage 18 is formed over the entire peripheral area of the lower metal sheet 10, for example, the lower peripheral liquid in the vicinity of the lower injection flow passage recess 17 It is possible to prevent the flow path portion 18 from becoming discontinuous. For this reason, it is possible to prevent the capillary force from being interrupted. Thereby, it is possible to prevent the inhibition of the reflux of the hydraulic fluid 2 at the outer peripheral portion of the vapor chamber 1, and the hydraulic fluid 2 can be smoothly refluxed all over the outer peripheral portion of the vapor chamber 1. As a result, the condensation and reflux of the hydraulic fluid 2 at the outer peripheral portion of the vapor chamber 1 can be stabilized, and the heat transfer capability of the vapor chamber 1 can be improved.

  Further, according to the present embodiment, since the lower peripheral liquid flow passage portion 18 is formed over the entire peripheral edge of the lower metal sheet 10, the lower injection flow passage concave portion 17 and the lower steam flow passage concave portion 12 The lower peripheral liquid flow passage 18 may be interposed between the two. For this reason, it can prevent that water collects in conduction part 28. That is, when the lower injection passage recess 17 is directly connected to the lower steam passage recess 12, the lower injection passage recess 17 (in particular, the lower side of the lower injection passage recess 17) Water may be accumulated in the portion on the side of the steam flow passage concave portion 12 and the conduction portion 28 and may be frozen. In this case, the lower metal sheet 10 or the upper metal sheet 20 may expand and be deformed or torn. However, in the present embodiment, since it is possible to prevent water from being accumulated in the conductive portion 28, it is possible to prevent such deformation and breakage of the metal sheet 10. Therefore, the quality can be improved.

  Further, according to the present embodiment, the upper peripheral liquid flow passage 27 is formed along the peripheral edge of the upper metal sheet 20, and at least a part of the lower peripheral liquid flow passage 18 and the upper peripheral liquid flow passage 27 And at least part of the two overlap each other. Therefore, a wide liquid flow path for refluxing the working fluid 2 is formed in a portion where the upper peripheral liquid flow path 27 and the lower peripheral liquid flow path 18 overlap, and the operation in the outer peripheral portion of the vapor chamber 1 is performed. The reflux of the liquid 2 can be performed efficiently.

  Further, according to the present embodiment, the width w7 of the lower peripheral liquid flow passage 18 is wider than the width w8 of the upper peripheral liquid flow passage 27. As a result, the inner portion 18a of the lower peripheral liquid flow channel portion 18 protruding from the upper peripheral liquid flow channel portion 27 faces the upper steam flow channel recess 21 and the inner side of the lower peripheral liquid flow channel portion 18 protruding therefrom. The condensation and reflux of the hydraulic fluid 2 are stably performed by the portion 18a.

  Furthermore, according to the present embodiment, the peripheral liquid flow passages 18, 27 have a plurality of main flow grooves 31 extending in parallel to one another and a communication groove 32 connecting the main flow grooves 31 adjacent to each other. . As a result, the liquid working fluid 2 is transported between the main flow grooves 31 adjacent to each other, and the occurrence of dryout in the main flow grooves 31 is suppressed. For this reason, capillary action is imparted to the hydraulic fluid 2 in each of the main flow grooves 31, and the hydraulic fluid 2 is smoothly transported toward the evaporation portion 11.

  Furthermore, according to the present embodiment, in the peripheral liquid flow channel portions 18 and 27, the plurality of convex portions 33 are arranged in a zigzag shape in plan view. Thereby, the capillary action acting on the hydraulic fluid 2 in the main flow groove 31 can be equalized in the width direction of the main flow groove 31. That is, since the plurality of convex portions 33 are arranged in a staggered manner in a plan view, the connection grooves 32 are alternately connected to both sides of the main flow groove 31. For this reason, unlike the case where the connection grooves 32 are connected to the same position on both sides of each main flow groove 31, loss of capillary action in the direction toward the evaporation portion 11 can be suppressed by the connection grooves 32. For this reason, it is possible to suppress reduction of the capillary action at the intersection of the main flow groove 31 and the communication groove 32, and to continuously impart the capillary action to the hydraulic fluid 2 directed to the evaporation portion 11.

  Further, since the inside of the sealed space 3 is decompressed as described above, the lower metal sheet 10 and the upper metal sheet 20 receive pressure from the outside air in a direction in which the thickness direction is recessed inward. Here, if the communication grooves 32 are connected to the same positions on both sides in the longitudinal direction of the main flow grooves 31, the lower metal sheet 10 and the upper metal sheet 20 extend in a direction parallel to the communication grooves 32. It is conceivable to dent inward in the thickness direction. In this case, the flow passage cross-sectional area of each main flow groove 31 is reduced, and the flow passage resistance of the hydraulic fluid 2 may be increased. On the other hand, in the present embodiment, in the liquid flow path portion 30 and the peripheral liquid flow path portions 18 and 27, the plurality of convex portions 33 are arranged in a zigzag in a plan view. Thereby, even if the lower metal sheet 10 and the upper metal sheet 20 are recessed inward in the thickness direction along the communication groove 32, the recess is prevented from crossing the main flow groove 31, and The channel cross-sectional area can be secured, and the flow of the hydraulic fluid 2 is prevented from being impeded.

  Next, each modification of the vapor chamber will be described with reference to FIG. 12 to FIG. 12 to FIG. 15, the same parts as in FIG. 1 to FIG. 11 are assigned the same reference numerals and detailed explanations thereof will be omitted.

(Modification 1)
FIG. 12 shows a vapor chamber 1A according to one modification (Modification 1). In the vapor chamber 1A shown in FIG. 12, unlike the present embodiment shown in FIG. 1 to FIG. 11, the lower injection passage recess 16 is not formed in the lower injection protrusion 16 of the lower metal sheet 10. . In this case, when the hydraulic fluid 2 is injected from the injection portion 4 into the sealed space 3 in the sealing step (see FIG. 11C), the lower peripheral liquid flow channel portion 18 prevents the hydraulic fluid 2 from being prevented from being injected. The hydraulic fluid 2 can be injected smoothly.

(Modification 2)
FIG. 13 shows a vapor chamber 1B according to another modification (Modification 2). In the vapor chamber 1B shown in FIG. 13, unlike the present embodiment shown in FIG. 1 to FIG. 11, the lower injection passage concave portion 17 is not formed in the lower injection protrusion 16 of the lower metal sheet 10. . Further, the upper peripheral liquid channel portion 27 is not formed in the upper metal sheet 20. The width of the lower peripheral liquid channel portion 18 of the lower metal sheet 10 may be narrower than in the embodiment shown in FIG. In this case, since it is unnecessary to laminate peripheral liquid flow path portions 18 and 27 having a minute shape so as to face each other, it is not necessary to increase the alignment accuracy of the metal sheets 10 and 20.

(Modification 3)
FIG. 14 shows a vapor chamber 1C according to another modification (Modification 3). In the vapor chamber 1C shown in FIG. 14, unlike the present embodiment shown in FIGS. 1 to 11, the lower metal sheet 10 does not have the lower steam channel recess 12 and the liquid channel portion 30 is on the lower side. It is provided on the upper surface 10 a of the metal sheet 10. Further, the region of the upper surface 10 a where the liquid flow passage portion 30 is formed is formed not only in the region facing the upper flow passage wall portion 22 but also in the region facing the upper steam flow passage concave portion 21. In this case, the number of main flow grooves 31 constituting the liquid flow path portion 30 can be increased, and the transport function of the liquid working fluid 2 can be improved. However, the region for forming the liquid flow passage portion 30 is not limited to the region shown in FIG. 14, and is arbitrary as long as the transport function of the liquid hydraulic fluid 2 can be secured.

(Modification 4)
FIG. 15 shows a vapor chamber 1D according to one modification (Modification 4). In the vapor chamber 1D shown in FIG. 15, the lower metal sheet 10 does not have the lower steam passage concave portion 12 unlike the present embodiment shown in FIGS. Further, a liquid flow passage portion 30 is provided on the upper surface 10 a of the lower metal sheet 10. Furthermore, the upper flow path wall portion 22 is not formed in the upper metal sheet 20, and one upper steam flow path concave portion 21 is formed so as to face substantially the entire area of the liquid flow path portion 30. In this case, the cross-sectional area of the upper steam passage recess 21 can be made wider, and the steam of the hydraulic fluid 2 can be transported efficiently.

(Modification 5)
FIG. 16 shows a vapor chamber 1E according to one modification (Modification 5). In the vapor chamber 1E shown in FIG. 16, the lower flow passage wall 13 of the lower metal sheet 10 and the upper flow passage wall 22 of the upper metal sheet 20 are different from the present embodiment shown in FIGS. And are each formed radially in plan view. That is, the lower flow passage wall portion 13 has a central portion 13 b substantially circular in plan view and a plurality of radial portions 13 c radially extending from the central portion 13 b. Similarly, the upper flow passage wall portion 22 has a central portion 22b substantially circular in plan view and a plurality of radial portions 22c radially extending from the central portion 22b. The liquid flow path portion 30 is formed in the lower flow path wall portion 13 and is not formed in the upper flow path wall portion 22. In this case, since the lower flow passage wall portions 13 are formed radially, the liquid working fluid 2 can be efficiently transported to the evaporation portion 11 side. In FIG. 16, the liquid flow path (the liquid flow path 30 and the peripheral liquid flow paths 18 and 27) is hatched (the same applies to FIGS. 17 and 18 described later).

(Modification 6)
FIG. 17 shows a vapor chamber 1F according to one modification (Modification 6). In the vapor chamber 1F shown in FIG. 17, unlike the present embodiment shown in FIG. 1 to FIG. 11, the lower injection passage concave portion 17 is not formed in the lower injection protrusion 16 of the lower metal sheet 10. . Further, the upper peripheral liquid channel portion 27 is not formed in the upper metal sheet 20. Furthermore, the lower flow passage wall portion 13 of the lower metal sheet 10 is configured by a plurality of block portions 13 d having a substantially triangular shape or a substantially trapezoidal shape in a plan view. Similarly, the upper flow passage wall portion 22 of the upper metal sheet 20 is configured by a plurality of block portions 22 d having a substantially triangular shape or a substantially trapezoidal shape in a plan view. Further, a steam passage of the lower steam flow passage concave portion 12 is formed between the block portions 13 d and 13 d of the lower flow passage wall portion 13, and an upper steam flow is generated between the block portions 22 d and 22 d of the upper flow passage wall portion 22. A steam passage of the passage recess 21 is formed. The liquid flow path portion 30 is formed in the lower flow path wall portion 13 and is not formed in the upper flow path wall portion 22. In this case, since the area of the liquid flow path portion 30 of the lower flow path wall portion 13 is secured wide, the liquid hydraulic fluid 2 can be efficiently transported to the evaporation portion 11 side.

(Modification 7)
FIG. 18 shows a vapor chamber 1G according to one modification (Modification 7). In the vapor chamber 1G shown in FIG. 18, unlike the present embodiment shown in FIGS. 1 to 11, a plurality of lower flow path wall portions 13 of the lower metal sheet 10 have a plurality of comb teeth in plan view (this In the case, four comb teeth 13e are provided. Each comb-tooth-like portion 13e of the lower flow passage wall portion 13 has a base 13f extending in the first direction X, and a plurality of combs 13g connected to the base 13f and extending in the second direction Y. Similarly, the upper flow passage wall portion 22 of the upper metal sheet 20 is constituted by a plurality of (in this case, four) comb-tooth-shaped portions 22 e having a substantially comb-tooth shape in plan view. Each comb-tooth-like portion 22e of the upper flow path wall portion 22 has a base 22f extending in the first direction X, and a plurality of combs 22g connected to the base 22f and extending in the second direction Y. The liquid flow path portion 30 is formed in both the lower flow path wall portion 13 and the upper flow path wall portion 22. In this case, the liquid working fluid 2 is collected from the combs 13g and 22g toward the bases 13f and 22f, and then flows toward the evaporation section 11 through the bases 13f and 22f. Therefore, the liquid hydraulic fluid 2 can be efficiently transported to the evaporation section 11 side.

Second Embodiment
Next, a vapor chamber, an electronic device, and a metal sheet for vapor chamber according to a second embodiment of the present invention will be described with reference to FIGS. 19 to 22.

  In the second embodiment shown in FIGS. 19 to 22, an intermediate metal sheet is interposed between the lower metal sheet and the upper metal sheet, and a steam flow passage portion is formed in the upper metal sheet, and the lower metal is formed. The main difference is that the liquid flow path portion is formed in the sheet, and the intermediate metal sheet is provided with a communication portion for connecting the steam flow path portion and the liquid flow path portion, and the other configurations are shown in FIGS. This is substantially the same as the first embodiment shown in FIG. In FIGS. 19 to 22, the same parts as those of the first embodiment shown in FIGS. 1 to 18 are indicated by the same reference numerals and the detailed description will be omitted.

  As shown in FIG. 19, in the present embodiment, an intermediate metal sheet 70 (third metal sheet) is provided between the lower metal sheet 10 (first metal sheet) and the upper metal sheet 20 (second metal sheet). Is intervened. That is, in the vapor chamber 1 according to the present embodiment, the lower metal sheet 10, the intermediate metal sheet 70, and the upper metal sheet 20 are stacked in this order. The intermediate metal sheet 70 is provided on the lower metal sheet 10, and the upper metal sheet 20 is provided on the intermediate metal sheet 70. In FIG. 19, the hydraulic fluid 2 is not shown in order to clarify the drawing. The same applies to FIGS. 23 and 27 described later.

  The intermediate metal sheet 70 has a lower surface 70 a (first surface) provided on the side of the lower metal sheet 10 and an upper surface 70 b provided on the side opposite to the lower surface 70 a and provided on the side of the upper metal sheet 20 (first 2) and. Among them, the lower surface 70 a is overlapped with the upper surface 10 a of the lower metal sheet 10, and the upper surface 70 b is overlapped with the lower surface 20 a of the upper metal sheet 20. The lower metal sheet 10 and the intermediate metal sheet 70 are joined by diffusion bonding, and the intermediate metal sheet 70 and the upper metal sheet 20 are joined by diffusion bonding. The intermediate metal sheet 70 can be formed of the same material as the lower metal sheet 10 and the upper metal sheet 20. The thickness of the intermediate metal sheet 70 is, for example, 10 μm to 300 μm.

  The sealed space 3 is formed between the lower metal sheet 10 and the upper metal sheet 20, and a part of the sealed space 3 is also formed in the intermediate metal sheet 70. In the present embodiment, the sealed space 3 has a vapor flow passage 80 through which the vapor of the hydraulic fluid 2 mainly passes, and a liquid flow passage 30 through which the hydraulic fluid 2 mainly flows. The vapor flow passage portion 80 and the liquid flow passage portion 30 are in communication so that the working fluid 2 can be returned. The steam flow passage portion 80 has a lower steam flow passage concave portion 12 (first steam flow passage portion) and an upper steam flow passage concave portion 21 (second steam flow passage portion).

  The lower metal sheet 10 including the lower steam channel recess 12 and the liquid channel portion 30 can have the same configuration as the lower metal sheet 10 in the first embodiment shown in FIGS. 1 to 18. . For this reason, detailed description is omitted here.

  As shown in FIGS. 19 and 20, in the present embodiment, the upper metal sheet 20 is not provided with the liquid flow path portion 30. Further, the upper metal sheet 20 has the upper steam passage recess 21 (second steam passage portion) similar to that of the first embodiment. An upper flow passage wall 22 (second flow passage protrusion) similar to that of the first embodiment is provided in the upper steam flow passage recess 21.

  As shown in FIG. 19, FIG. 21 and FIG. 22, the intermediate metal sheet 70 is provided with a communicating portion 71 for communicating the liquid flow path portion 30 with the upper steam flow path concave portion 21. More specifically, the communication unit 71 communicates the liquid flow passage 30 with the upper steam flow passage recess 21 via the lower steam flow passage recess 12. The communicating portion 71 is formed to extend from the upper surface 70 b to the lower surface 70 a of the intermediate metal sheet 70, and penetrates the intermediate metal sheet 70. The communication portion 71 constitutes a part of the sealed space 3 described above. As a result, the liquid working fluid 2 generated by condensing from the steam of the working fluid 2 in the upper steam flow passage concave portion 21 passes through the communication portion 71 to form the liquid flow passage portion 30 and the lower peripheral liquid flow passage portion It is configured to enter 18 main flow grooves 31. On the other hand, the vapor of the working fluid 2 evaporated in the evaporation section 11 can not only be diffused in the lower steam channel recess 12 but also diffused to the upper steam channel recess 21 through the communicating portion 71. There is.

  As shown in FIGS. 21 and 22, the intermediate metal sheet 70 has a frame portion 73 formed in a rectangular frame shape in plan view, and a plurality of land portions 74 provided in the frame portion 73. doing. The frame portion 73 and the land portions 74 are portions where the material of the intermediate metal sheet 70 remains without being etched when the intermediate metal sheet 70 is etched. The land portions 74 extend in a slender shape along the first direction X, and a plurality of land portions 74 are disposed in the communication portion 71. The lands 74 are supported by each other via a support (not shown) and supported by the frame 73. The support portion is formed to prevent the flow of the vapor of the working fluid 2 flowing in the intermediate communication passage 77 described later from being obstructed. For example, the support may be partially formed in the intermediate communication passage 77 and in the intermediate communication passage 78 in plan view.

  The communication portion 71 includes a plurality of intermediate communication passages 77 partitioned by the land portion 74. The intermediate communication passages 77 extend in a slender shape along the first direction X, and are arranged parallel to one another. Both end portions of each intermediate communication passage 77 are in communication with an intermediate communication passage 78 elongated in the second direction Y, and each intermediate communication passage 77 is in communication via the intermediate communication passage 78. There is. In FIG. 19, the shape of the cross section (the cross section in the second direction Y) of the intermediate communication passage 77 is rectangular. However, the present invention is not limited to this, and the cross-sectional shape of the intermediate communication passage 77 may be, for example, a curved shape, a semicircular shape, or a V shape, as long as the vapor of the hydraulic fluid 2 can be diffused. It is optional. The same is true for the intermediate communication passage 78.

  The lands 74 are arranged to overlap the corresponding upper flow passage walls 22 and lower flow passage walls 13 in a plan view, so as to improve the mechanical strength of the vapor chamber 1. The intermediate communication passage 77 is formed to overlap the corresponding lower steam passage 81 and upper steam passage 83 in plan view. Similarly, the intermediate communication passage 78 is formed to overlap the corresponding lower communication steam passage 82 and the upper communication steam passage 84 in plan view.

  As shown in FIGS. 21 and 22, the width w5 (the dimension in the second direction Y) of the land portion 74 of the intermediate metal sheet 70 is, for example, 50 μm to 2000 μm in the maximum dimension in the range from the upper surface 70b to the lower surface 70a. It may be The width w6 (the dimension in the second direction Y) of the intermediate communication passage 77 may be, for example, 50 μm to 2000 μm in the case of the minimum dimension in the range from the upper surface 70b to the lower surface 70a. The width (dimension in the first direction X) of the intermediate communication passage 78 is also the same.

  The communication portion 71 may be formed by etching from the upper surface 70 b of the intermediate metal sheet 70. In this case, the intermediate communication passage 77 of the communication portion 71 may be curved in a shape that bulges toward the lower surface 70a. Alternatively, the communication portion 71 may be etched from the lower surface 70a of the intermediate metal sheet 70. In this case, the intermediate communication passage 77 may be curved in a shape that bulges toward the upper surface 70b. Furthermore, the communication part 71 may be formed by half etching from the lower surface 70a and half etching from the upper surface 70b. In this case, the shape or the size of the portion of the communication portion 71 on the side of the upper surface 70b may be different from that of the portion on the side of the lower surface 70a.

  Further, as shown in FIGS. 21 and 22, the intermediate metal sheet 70 is provided with an intermediate alignment hole 72 for positioning the respective metal sheets 10, 20, 70. That is, each intermediate alignment hole 72 is arranged to overlap each of the lower alignment hole 15 and the upper alignment hole 24 described above at the time of temporary fixing, and positioning of each metal sheet 10, 20, 70 is possible. .

  As shown in FIG. 22, in the lower surface 70a of the intermediate metal sheet 70, an annular peripheral liquid channel portion 79 (third peripheral liquid channel portion) through which the liquid working fluid 2 passes is formed. The intermediate peripheral liquid channel portion 79 is formed along the peripheral edge of the intermediate metal sheet 70 in the inner portion of the frame portion 73 in a plan view. The intermediate peripheral liquid flow passage 79 is formed to surround the sealed space 3, in particular, the communication portion 71. That is, in a plan view, the intermediate communication passage 77 or the intermediate communication passage 78 of the communication portion 71 is interposed between the land portion 74 and the intermediate peripheral liquid passage portion 79. The intermediate peripheral liquid flow passage 79 has a rectangular ring shape in a plan view, and each side thereof is parallel to the first direction X or the second direction Y.

  As shown in FIG. 22, the intermediate peripheral liquid flow passage 79 is formed over the entire peripheral edge of the intermediate metal sheet 70 except for the conductive portion 90 connecting the intermediate injection flow passage 76 described later and the communication portion 71. There is. That is, the intermediate peripheral liquid flow passage 79 is partially interrupted at the conduction portion 90 (similar to the conduction portion 28 of the first embodiment) which injects the working fluid 2 from the intermediate injection flow passage 76. For this reason, in the sealing step, the hydraulic fluid 2 can be injected from the intermediate injection flow passage portion 76 into the communication portion 71 via the conduction portion 90. On the other hand, since the intermediate peripheral liquid flow path 79 is formed over the entire peripheral area of the intermediate metal sheet 70 except for the conducting part 90, the working fluid 2 is made to the evaporation part 11 side substantially over the peripheral area of the intermediate metal sheet 70. It is possible to reflux.

  The width w9 of the intermediate peripheral liquid flow passage 79 may be the same as the width w8 of the upper peripheral liquid flow passage 27 in the first embodiment. Then, as shown in FIGS. 4 and 22, similarly to the first embodiment, the width w7 of the lower peripheral liquid channel portion 18 of the lower metal sheet 10 is the middle peripheral liquid flow of the intermediate metal sheet 70. It may be wider than the width w9 of the passage portion 79 (w7> w9).

  Further, in the present embodiment, a part of the lower peripheral liquid flow passage 18 of the lower metal sheet 10 and a part of the intermediate peripheral liquid flow passage 79 of the intermediate metal sheet 70 overlap with each other in a plan view. ing. Specifically, the lower peripheral liquid flow passage 18 and the intermediate peripheral liquid flow passage 79 overlap with each other except for the inner portion 18 a of the lower peripheral liquid flow passage 18 and the conducting portion 90. Thus, the hydraulic fluid 2 can be efficiently returned by the lower peripheral fluid channel 18 and the intermediate peripheral fluid channel 79.

  As shown in FIG. 21, no peripheral liquid flow passage portion is formed on the upper surface 70b of the intermediate metal sheet 70, and as shown in FIG. 20, the peripheral liquid flow passage is on the lower surface 20a of the upper metal sheet 20. The part is not formed. However, the present invention is not limited to this, and in addition to or instead of the lower peripheral liquid flow passage portion 18 and the intermediate peripheral liquid flow passage portion 79 in the present embodiment, the upper surface 70b of the intermediate metal sheet 70 is The peripheral liquid channel is formed in the same manner as the peripheral liquid channel 79, and the peripheral liquid channel is formed on the lower surface 20a of the upper metal sheet 20 in the same manner as the lower peripheral liquid channel 18. It is also good. In this case, the liquid flow passage 30 may be provided on the lower surface 20 a of the upper metal sheet 20.

  In the present embodiment, the injection portion 4 may be formed in the same manner as the injection portion 4 of the first embodiment shown in FIGS. 1 to 18. That is, as shown in FIG. 3, the lower metal sheet 10 has the lower injection protrusion 16, and the lower injection passage recess (injection passage recess) 17 is formed on the upper surface of the lower injection protrusion 16. ing. However, as shown in FIG. 20, although the upper metal sheet 20 has the upper injection protrusion 25, the lower surface of the upper injection protrusion 25 is formed in a flat shape without being formed with a recess. ing.

  As shown in FIGS. 21 and 22, the intermediate metal sheet 70 has an intermediate injection projection 75 projecting laterally from the end face. As shown in FIG. 22, on the lower surface of the intermediate injection protrusion 75, an intermediate injection passage 76 is formed in a concave shape. As shown in FIG. 21, no recess is formed on the upper surface of the intermediate injection protrusion 75, and the intermediate injection protrusion 75 is formed in a flat shape. When the lower metal sheet 10 and the intermediate metal sheet 70 are joined, the lower injection channel concave portion 17 and the intermediate injection channel portion 76 integrally form an injection channel of the hydraulic fluid 2. When the lower metal sheet 10, the upper metal sheet 20 and the intermediate metal sheet 70 are joined, the respective injection protrusions 16, 25, 75 overlap each other. The middle injection protrusion 75 can be formed in the same manner as the upper injection protrusion 25 of the first embodiment.

  The intermediate injection passage portion 76 is not limited to being formed in a concave shape. For example, the intermediate injection passage portion 76 may be formed to extend from the lower surface 70 a to the upper surface 70 b of the intermediate metal sheet 70 so as to penetrate the intermediate metal sheet 70.

  However, this is not restrictive. For example, in addition to the lower injection channel recess 17 or instead of the lower injection channel recess 17, an injection channel recess (injection channel recess) may be formed on the lower surface of the upper injection protrusion 25. In this case, the injection channel recess may also be formed on the upper surface of the intermediate injection protrusion 75. Alternatively, instead of the injection portion 4 described above, an injection hole may be provided in the lower metal sheet 10 or the upper metal sheet 20, and the hydraulic fluid 2 may be injected from the injection hole.

  In the vapor chamber 1 according to the present embodiment, the lower steam passage recess 12 and the liquid passage portion 30 of the lower metal sheet 10 and the upper steam passage recess 21 of the upper metal sheet 20 are shown in FIGS. It can be formed in the same manner as the first embodiment shown in FIG. Further, the communicating portion 71 of the intermediate metal sheet 70 can also be formed by etching. Thereafter, the lower metal sheet 10 and the upper metal sheet 20 are joined via the intermediate metal sheet 70. That is, the lower metal sheet 10 and the intermediate metal sheet 70 are diffusion bonded, and the upper metal sheet 20 and the intermediate metal sheet 70 are diffusion bonded. By this, the sealed space 3 is formed. The lower metal sheet 10, the intermediate metal sheet 70, and the upper metal sheet 20 may be diffusion bonded at one time.

  As described above, according to the present embodiment, the intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20, and the upper steam flow path recess 21 is provided on the lower surface 20a of the upper metal sheet 20. The liquid flow passage 30 is provided on the upper surface 10 a of the lower metal sheet 10. Further, the intermediate metal sheet 70 is provided with a communicating portion 71 which causes the upper steam flow passage concave portion 21 and the liquid flow passage portion 30 to communicate with each other. By this, even in the case where the vapor chamber 1 is configured by the three metal sheets 10, 20, 70, the working fluid 2 is circulated in the vapor chamber 1 while repeating the phase change in the sealed space 3. , The heat of the device D can be transferred and released. Moreover, since the upper steam flow path concave portion 21 of the upper metal sheet 20 is widely communicated, the steam of the working fluid 2 can be diffused smoothly, and the heat transport efficiency can be improved.

  Further, according to the present embodiment, as in the first embodiment shown in FIGS. 1 to 18, the lower peripheral liquid flow passage 18 is formed over the entire peripheral edge of the lower metal sheet 10. For example, the lower peripheral liquid channel portion 18 can be prevented from becoming discontinuous in the vicinity of the lower injection channel concave portion 17. For this reason, it is possible to prevent the capillary force from being interrupted. Thereby, it is possible to prevent the inhibition of the reflux of the hydraulic fluid 2 at the outer peripheral portion of the vapor chamber 1, and the hydraulic fluid 2 can be smoothly refluxed all over the outer peripheral portion of the vapor chamber 1. As a result, the condensation and reflux of the hydraulic fluid 2 at the outer peripheral portion of the vapor chamber 1 can be stabilized, and the heat transfer capability of the vapor chamber 1 can be improved.

  In the example shown in FIG. 19, the cross-sectional shape of the lower steam flow passage concave portion 12 and the cross-sectional shape of the upper steam flow passage concave portion 21 are rectangular. However, the present invention is not limited to this, and the cross-sectional shape of the steam flow passage recesses 12 and 21 may be formed in a curved shape. Further, the same applies to the main flow grooves 31 and the communication grooves 32 of the liquid flow path portion 30.

  In the above-described embodiment, an example in which one intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20 has been described. However, the present invention is not limited to this, and two or more intermediate metal sheets 70 may be interposed between the lower metal sheet 10 and the upper metal sheet 20.

Third Embodiment
Next, a vapor chamber, an electronic device, and a metal sheet for vapor chamber according to a third embodiment of the present invention will be described with reference to FIGS.

  In the third embodiment shown in FIGS. 23 to 27, the intermediate metal sheet is interposed between the lower metal sheet and the upper metal sheet, and the steam flow passage portion is provided on the upper surface of the intermediate metal sheet, The liquid flow passage portion and the intermediate peripheral liquid flow passage portion are provided on the lower surface of the intermediate metal sheet, and the intermediate peripheral liquid flow passage portion is mainly formed over the entire circumference of the intermediate metal sheet, The configuration is substantially the same as that of the second embodiment shown in FIGS. In FIG. 23 to FIG. 27, the same parts as those of the second embodiment shown in FIG. 19 to FIG.

  As shown in FIG. 2, in the present embodiment, the steam flow passage portion 80 is provided on the upper surface 70 b of the intermediate metal sheet 70. That is, the steam flow passage portion 80 according to the present embodiment is formed to extend from the upper surface 70 b to the lower surface 70 a of the intermediate metal sheet 70, and penetrates the intermediate metal sheet 70. The liquid flow path portion 30 is provided on the lower surface 70 a of the intermediate metal sheet 70. Therefore, the intermediate metal sheet 70 according to the present embodiment may be referred to as a wick sheet. The vapor flow passage portion 80 and the liquid flow passage portion 30 are in communication so that the working fluid 2 can be returned.

  As shown in FIGS. 24 and 25, the intermediate metal sheet 70 is provided in the frame portion 73 formed in a rectangular frame shape in plan view, and in the frame portion 73 as in the second embodiment. And a plurality of land portions 74. The support portion (not shown) for supporting the land portion 74 is formed to prevent the flow of the steam of the hydraulic fluid 2 flowing in the intermediate steam passage 85 described later from being obstructed. For example, the support portion may be formed in part of a range extending from the upper surface 70b to the lower surface 70a of the intermediate metal sheet 70 in the vertical direction in FIG.

  The steam flow passage portion 80 includes a plurality of intermediate steam passages 85 (third steam passage, steam passage) partitioned by the land portion 74. The intermediate steam passages 85 extend in a slender shape along the first direction X, and are arranged parallel to one another. Both ends of each intermediate steam passage 85 are in communication with an intermediate communication steam passage 86 elongated along the second direction Y, and each intermediate steam passage 85 is in communication via the intermediate communication steam passage 86. There is. In this manner, the steam of the working fluid 2 flows around the lands 74 (the intermediate steam passage 85 and the intermediate communication steam passage 86) so that the steam is transported toward the peripheral portion of the steam passage 80. To prevent the flow of steam from being blocked. In addition, in FIG. 23, the shape of the cross section (cross section in the second direction Y) of the intermediate steam passage 85 is rectangular. However, the present invention is not limited to this, and the cross-sectional shape of the intermediate steam passage 85 may be, for example, curved, semicircular, or V-shaped, as long as the steam of the hydraulic fluid 2 can be diffused. It is optional. The intermediate communication steam passage 86 is also the same. The intermediate steam passage 85 and the intermediate communication steam passage 86 can be formed by etching similarly to the intermediate communication passage 77 and the intermediate communication communication passage 78 in the second embodiment shown in FIGS. It can have the same cross-sectional shape as 77 and the intermediate communication passage 78. The width of the intermediate steam passage 85 and the width of the intermediate communication steam passage 86 may be the same as the width w6 of the intermediate communication passage 77.

  As shown in FIG. 25, the liquid flow path portion 30 is provided on the land portion 74 on the lower surface 70 a of the intermediate metal sheet 70. That is, the liquid flow path portion 30 is provided on the lower surface of the land portion 74. Further, on the lower surface of the frame portion 73, an intermediate peripheral liquid flow passage 79 (third peripheral liquid flow passage) is provided. The intermediate peripheral liquid channel portion 79 can be formed in the same manner as the lower peripheral liquid channel portion 18 of the first embodiment. That is, the intermediate peripheral liquid flow passage 79 is formed over the entire circumference of the intermediate metal sheet 70, and the intermediate peripheral liquid flow passage 79 is interrupted at all of the four sides forming the rectangular intermediate metal sheet 70. It is formed without. The intermediate peripheral liquid flow path 79 is formed to cross the injection flow path of the working fluid 2 formed by the intermediate injection flow path 76, and the working liquid 2 is also formed in the vicinity of the intermediate injection flow path 76. It is possible to circulate the In FIG. 25, although the intermediate injection flow passage portion 76 enters the middle of the width direction (first direction X) of the intermediate peripheral liquid flow passage portion 79, the present invention is not limited thereto. It does not have to enter the intermediate peripheral liquid flow passage 79.

  As shown in FIGS. 23 and 26, on the upper surface 10a of the lower metal sheet 10 in the present embodiment, the lower steam flow passage concave portion 12 similar to that of the first embodiment is provided. The flow path unit 30 is not provided. However, the lower peripheral liquid channel portion 18 is provided on the upper surface 10 a. The lower peripheral liquid flow passage 18 shown in FIG. 26 can be formed in the same manner as the upper peripheral liquid flow passage 27 of the first embodiment. The thickness of the lower metal sheet 10 according to the present embodiment can be the same as the thickness of the lower metal sheet 10 of the first embodiment.

  As shown in FIG. 23, the upper steam flow passage concave portion 21 is not provided on the lower surface 20 a of the upper metal sheet 20, and the liquid flow passage portion 30 is not provided. The lower surface 20a is formed flat. The thickness of the upper metal sheet 20 according to the present embodiment is, for example, 8 μm to 100 μm.

  In the vapor chamber 1 according to the present embodiment, the vapor flow passage portion 80 and the liquid flow passage portion 30 of the intermediate metal sheet 70 can be formed by etching. Thereafter, the lower metal sheet 10 and the upper metal sheet 20 are joined via the intermediate metal sheet 70. That is, the lower metal sheet 10 and the intermediate metal sheet 70 are diffusion bonded, and the upper metal sheet 20 and the intermediate metal sheet 70 are diffusion bonded. By this, the sealed space 3 is formed. The lower metal sheet 10, the intermediate metal sheet 70, and the upper metal sheet 20 may be diffusion bonded at one time.

  In the present embodiment, an intermediate injection flow passage 76 (injection flow passage) is formed in a concave shape on the lower surface of the intermediate injection protrusion 75 that constitutes the injection unit 4. In FIG. 26, although the intermediate injection flow passage portion 76 enters the middle of the width direction (first direction X) of the intermediate peripheral liquid flow passage portion 79, the present invention is not limited thereto. It does not have to enter the intermediate peripheral liquid flow passage 79. A lower injection passage recess 17 is formed on the upper surface of the lower injection protrusion 16. However, in the present embodiment, the lower injection passage recess 17 communicates with the lower steam passage recess 12. When the lower metal sheet 10 and the intermediate metal sheet 70 are joined, the lower injection channel concave portion 17 and the intermediate injection channel portion 76 integrally form an injection channel of the hydraulic fluid 2.

  As described above, according to the present embodiment, the intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20, and the steam flow passage portion 80 is provided on the upper surface 70b of the intermediate metal sheet 70. The liquid flow passage 30 is provided on the lower surface 70 a of the intermediate metal sheet 70. By this, even in the case where the vapor chamber 1 is configured by the three metal sheets 10, 20, 70, the working fluid 2 is circulated in the vapor chamber 1 while repeating the phase change in the sealed space 3. , The heat of the device D can be transferred and released.

  Further, according to the present embodiment, as in the first embodiment shown in FIGS. 1 to 18, since the intermediate peripheral liquid flow passage 79 is formed over the entire peripheral edge of the intermediate metal sheet 70, for example, It is possible to prevent the intermediate peripheral liquid channel portion 79 from becoming discontinuous in the vicinity of the lower injection channel concave portion 17. For this reason, it is possible to prevent the capillary force from being interrupted. Thereby, it is possible to prevent the inhibition of the reflux of the hydraulic fluid 2 at the outer peripheral portion of the vapor chamber 1, and the hydraulic fluid 2 can be smoothly refluxed all over the outer peripheral portion of the vapor chamber 1. As a result, the condensation and reflux of the hydraulic fluid 2 at the outer peripheral portion of the vapor chamber 1 can be stabilized, and the heat transfer capability of the vapor chamber 1 can be improved.

  Further, according to the present embodiment, the steam flow passage portion 80 extends from the upper surface 70 b to the lower surface 70 a of the intermediate metal sheet 70. As a result, the flow path resistance of the steam flow path portion 80 can be reduced. For this reason, the liquid hydraulic fluid 2 generated by condensing from the steam of the hydraulic fluid 2 in the steam channel portion 80 can be smoothly introduced into the main flow groove 31 of the liquid channel portion 30. On the other hand, the vapor of the working fluid 2 evaporated in the evaporation section 11 can be diffused to the vapor flow channel section 80 smoothly.

  In the above-described embodiment, the example in which the liquid flow passage 30 is provided on the lower surface 70 a of the intermediate metal sheet 70 has been described. However, the present invention is not limited to this, and as shown in FIG. 27, the liquid flow passage 30 may be provided not only on the lower surface 70a but also on the upper surface 70b. In this case, it is possible to increase the number of flow paths for transporting the liquid hydraulic fluid 2 to a portion close to the evaporator 11 among the evaporator 11 or the intermediate metal sheet 70, and to improve the transport efficiency of the liquid hydraulic fluid 2 . Therefore, the heat transfer efficiency of the vapor chamber 1 can be improved. In this case, the upper peripheral liquid flow passage 27 may be provided on the lower surface 20 a of the upper metal sheet 20, and the upper injection flow passage recess 26 may be formed on the lower surface of the upper injection protrusion 25. In addition, an intermediate peripheral liquid flow passage 79 may be provided on the upper surface 70 b of the intermediate metal sheet 70, and an intermediate injection flow passage 76 may be formed on the upper surface of the intermediate injection protrusion 75.

  Further, in the above-described embodiment, an example in which the steam flow passage portion 80 is formed to extend from the upper surface 70 b to the lower surface 70 a of the intermediate metal sheet 70 has been described. However, the present invention is not limited thereto, and the steam flow passage portion 80 may be like the lower steam flow passage recess 12 shown in FIGS. 1 to 18 or the upper steam flow passage recess shown in FIGS. 19 and 20. Like 21, the upper surface 70 b of the intermediate metal sheet 70 may be concavely formed. In this case, the intermediate metal sheet 70 may be provided with a communication hole (not shown) for communicating the vapor flow passage portion 80 with the liquid flow passage portion 30.

  In the above-described embodiment, an example in which one intermediate metal sheet 70 is interposed between the lower metal sheet 10 and the upper metal sheet 20 has been described. However, the present invention is not limited to this, and another metal sheet (not shown) may be interposed between the lower metal sheet 10 and the intermediate metal sheet 70, and the upper metal sheet 20 and the intermediate metal sheet 70 In the meantime, another metal sheet (not shown) may be interposed.

  The present invention is not limited to the above-described embodiments and modifications as it is, and in the implementation stage, the components can be modified and embodied without departing from the scope of the invention. In addition, various inventions can be formed by appropriate combinations of a plurality of constituent elements disclosed in the above-described embodiments and modifications. Some components may be deleted from all the components shown in each embodiment and each modification. Further, in each of the embodiments and the modifications described above, the configuration of the lower metal sheet 10 and the configuration of the upper metal sheet 20 may be interchanged.

REFERENCE SIGNS LIST 1 vapor chamber 2 hydraulic fluid 10 lower metal sheet 12 lower vapor flow channel recess 18 lower peripheral liquid flow channel section 20 upper metal sheet 21 upper vapor flow channel concave section 27 upper peripheral liquid flow channel section 28 conductive section 30 liquid flow channel Part 31 Mainstream groove 32 Connecting groove 33 Convex part 70 Intermediate metal sheet 70a Lower surface 70b Upper surface 71 Communication part 79 Intermediate peripheral liquid flow path part 90 Conduction part

Claims (11)

A vapor chamber filled with hydraulic fluid,
A first metal sheet,
A second metal sheet laminated on the first metal sheet;
A vapor flow passage portion through which the vapor of the hydraulic fluid passes is formed in at least one of the first metal sheet and the second metal sheet,
A liquid passage portion through which the liquid working fluid passes is formed in at least one of the first metal sheet and the second metal sheet,
A first peripheral liquid flow passage portion through which the liquid working fluid passes is formed in the first metal sheet along the peripheral edge of the first metal sheet,
The vapor chamber, wherein the first peripheral liquid flow passage portion is formed over the entire circumference of the first metal sheet. A second peripheral liquid flow passage portion through which the liquid working fluid passes is formed in the second metal sheet along the peripheral edge of the second metal sheet,
The vapor chamber according to claim 1, wherein at least a part of the first peripheral liquid flow passage and at least a part of the second peripheral liquid flow passage overlap with each other.   The vapor chamber according to claim 2, wherein a width of the first peripheral liquid flow passage portion and a width of the second peripheral liquid flow passage portion are different from each other.   The second metal sheet has an injection flow passage concave portion communicating with the steam flow passage portion through the conduction portion, and the second peripheral liquid flow passage portion is the second metal sheet except for the conduction portion. The vapor chamber according to claim 2 or 3, which is formed over the entire periphery.   The vapor according to any one of claims 1 to 4, wherein the first peripheral liquid flow passage portion has a plurality of main flow grooves extending in parallel to one another and a communication groove connecting the main flow grooves adjacent to each other. Chamber.   The vapor chamber according to claim 5, wherein a convex portion is formed so as to be surrounded by the main flow groove and the connection groove, and the plurality of convex portions are arranged in a zigzag shape in plan view.   The vapor chamber according to any one of claims 1 to 6, wherein the second metal sheet is provided on the first metal sheet. And a third metal sheet interposed between the first metal sheet and the second metal sheet,
The steam channel portion is formed in the second metal sheet,
The liquid channel portion is formed in the first metal sheet,
The vapor chamber according to any one of claims 1 to 7, wherein the third metal sheet is provided with a communicating portion for communicating the vapor flow path portion and the liquid flow path portion. A vapor chamber filled with hydraulic fluid,
A first metal sheet,
A second metal sheet laminated on the first metal sheet;
A third metal sheet interposed between the first metal sheet and the second metal sheet,
The third metal sheet includes a first surface provided on the side of the first metal sheet, and a second surface provided on the side of the second metal sheet,
A vapor flow passage portion through which the vapor of the hydraulic fluid passes is formed in at least one of the first surface and the second surface of the third metal sheet,
A liquid passage portion through which the liquid working fluid passes is formed in at least one of the first surface and the second surface of the third metal sheet,
A third peripheral liquid flow passage portion through which the liquid working fluid passes is formed along the peripheral edge of the third metal sheet on the first surface of the third metal sheet,
The vapor chamber, wherein the third peripheral liquid flow passage portion is formed over the entire circumference of the third metal sheet. With the housing,
A device housed within the housing;
10. A vapor chamber according to any one of the preceding claims, in thermal contact with the device. A metal sheet for a vapor chamber for a vapor chamber in which a hydraulic fluid is enclosed, comprising:
First side,
And a second surface provided on the side opposite to the first surface,
A first peripheral liquid flow passage portion through which the liquid working fluid passes is formed on the first surface along the peripheral edge of the first surface,
The first peripheral liquid channel portion is a metal sheet for a vapor chamber, which is formed over the entire circumference of the first surface.