JP2019061218A5 - - Google Patents

Download PDF

Info

Publication number
JP2019061218A5
JP2019061218A5 JP2018076824A JP2018076824A JP2019061218A5 JP 2019061218 A5 JP2019061218 A5 JP 2019061218A5 JP 2018076824 A JP2018076824 A JP 2018076824A JP 2018076824 A JP2018076824 A JP 2018076824A JP 2019061218 A5 JP2019061218 A5 JP 2019061218A5
Authority
JP
Japan
Prior art keywords
polarizing element
layer
element according
dielectric layer
grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018076824A
Other languages
Japanese (ja)
Other versions
JP7101028B2 (en
JP2019061218A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2018076824A priority Critical patent/JP7101028B2/en
Priority claimed from JP2018076824A external-priority patent/JP7101028B2/en
Publication of JP2019061218A publication Critical patent/JP2019061218A/en
Publication of JP2019061218A5 publication Critical patent/JP2019061218A5/ja
Application granted granted Critical
Publication of JP7101028B2 publication Critical patent/JP7101028B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (16)

ワイヤグリッド構造を有する偏光素子であって、
透明基板と、
使用帯域の光の波長よりも短いピッチで前記透明基板上に配列され、所定方向に延在する格子状凸部と、を備え、
前記格子状凸部が、前記透明基板側から順に、台座と、第１吸収層と、第１誘電体層と、反射層と、第２誘電体層と、第２吸収層と、を有し、
前記台座が、前記所定方向から見たときに台形状を有する偏光素子。 A polarizing element having a wire grid structure.
With a transparent board
It is provided with a grid-like convex portion arranged on the transparent substrate at a pitch shorter than the wavelength of light in the use band and extending in a predetermined direction.
The grid-shaped convex portions, in order from the transparent substrate side, possess a pedestal, a first absorber layer, a first dielectric layer, a reflective layer, a second dielectric layer, and a second absorbent layer, the ,
A polarizing element in which the pedestal has a trapezoidal shape when viewed from the predetermined direction . 前記台座が、使用帯域の光の波長に対して透明なＳｉ酸化物で構成される請求項１に記載の偏光素子。 The polarizing element according to claim 1, wherein the pedestal is made of a Si oxide that is transparent to the wavelength of light in the band of use. 前記第１吸収層と前記第２吸収層とが同一材料で構成される請求項１又は２に記載の偏光素子。 The polarizing element according to claim 1 or 2 , wherein the first absorbing layer and the second absorbing layer are made of the same material. 前記第１誘電体層と前記第２誘電体層とが同一材料で構成される請求項１から３のいずれかに記載の偏光素子。 The polarizing element according to any one of claims 1 to 3 , wherein the first dielectric layer and the second dielectric layer are made of the same material. 前記第１吸収層の膜厚と前記第２吸収層の膜厚とが略同一であり、且つ、前記第１誘電体層の膜厚と前記第２誘電体層の膜厚とが略同一である請求項１から４のいずれかに記載の偏光素子。 The film thickness of the first absorption layer and the film thickness of the second absorption layer are substantially the same, and the film thickness of the first dielectric layer and the film thickness of the second dielectric layer are substantially the same. The polarizing element according to any one of claims 1 to 4 . 前記透明基板が、使用帯域の光の波長に対して透明であり、且つ、ガラス、水晶、又はサファイアで構成される請求項１から５のいずれかに記載の偏光素子。 The polarizing element according to any one of claims 1 to 5 , wherein the transparent substrate is transparent to the wavelength of light in the band of use and is made of glass, quartz, or sapphire. 前記反射層が、アルミニウム又はアルミニウム合金で構成される請求項１から６のいずれかに記載の偏光素子。 The polarizing element according to any one of claims 1 to 6 , wherein the reflective layer is made of aluminum or an aluminum alloy. 前記第１誘電体層及び前記第２誘電体層が、Ｓｉ酸化物で構成される請求項１から７のいずれかに記載の偏光素子。 The polarizing element according to any one of claims 1 to 7 , wherein the first dielectric layer and the second dielectric layer are made of Si oxide. 前記第１吸収層及び前記第２吸収層が、Ｆｅ又はＴａを含むとともに、Ｓｉを含んで構成される請求項１から８のいずれかに記載の偏光素子。 The polarizing element according to any one of claims 1 to 8 , wherein the first absorbing layer and the second absorbing layer contain Fe or Ta and also contain Si. 前記偏光素子の前記格子状凸部側の表面が、誘電体からなる保護膜により覆われている請求項１から９のいずれかに記載の偏光素子。 The polarizing element according to any one of claims 1 to 9 , wherein the surface of the polarizing element on the grid-like convex portion side is covered with a protective film made of a dielectric material. 前記偏光素子の前記格子状凸部側の表面が、有機系撥水膜により覆われている請求項１から１０のいずれかに記載の偏光素子。 The polarizing element according to any one of claims 1 to 10 , wherein the surface of the polarizing element on the grid-like convex portion side is covered with an organic water-repellent film. 前記格子状凸部の先端に形成されたグリッド先端部が、前記所定方向から見たときに、先端側ほど幅が狭くなる方向に側面が傾斜した先細形状を有する請求項１から１１のいずれかに記載の偏光素子。 Any of claims 1 to 11 , wherein the grid tip portion formed at the tip of the grid-like convex portion has a tapered shape whose side surface is inclined in a direction in which the width becomes narrower toward the tip side when viewed from the predetermined direction. The polarizing element according to. 前記反射層が、金属層と、前記所定方向から見たときに、前記金属層の側面を覆い、前記金属層を構成する金属の酸化物からなる酸化物層と、を有する請求項１から１２のいずれかに記載の偏光素子。 Claims 1 to 12 wherein the reflective layer has a metal layer and an oxide layer composed of an oxide of a metal that covers the side surface of the metal layer and constitutes the metal layer when viewed from the predetermined direction. The polarizing element according to any one of. 前記反射層の幅が、前記第１誘電体層及び前記第２誘電体層の幅よりも小さい請求項１から１３のいずれかに記載の偏光素子。 The polarizing element according to any one of claims 1 to 13 , wherein the width of the reflective layer is smaller than the width of the first dielectric layer and the second dielectric layer. ワイヤグリッド構造を有する偏光素子の製造方法であって、
透明基板上に、下地層と、第１吸収層と、第１誘電体層と、反射層と、第２誘電体層と、第２吸収層と、を前記透明基板側からこの順で有する積層体を形成する工程と、
前記積層体を選択的にエッチングすることにより、使用帯域の光の波長よりも短いピッチで前記透明基板上に配列される格子状凸部を形成する工程と、を有し、
前記格子状凸部が、前記透明基板と前記第１吸収層との間に台座を有し、
前記台座が、前記所定方向から見たときに台形状を有する偏光素子の製造方法。 A method for manufacturing a polarizing element having a wire grid structure.
A laminate having a base layer, a first absorption layer, a first dielectric layer, a reflection layer, a second dielectric layer, and a second absorption layer on a transparent substrate in this order from the transparent substrate side. The process of forming the body and
Wherein by selectively etching the laminate, possess a step of forming a grid-shaped convex portions arranged on the transparent substrate at a pitch shorter than the wavelength of the light used bandwidth, the,
The lattice-shaped convex portion has a pedestal between the transparent substrate and the first absorption layer.
A method for manufacturing a polarizing element in which the pedestal has a trapezoidal shape when viewed from the predetermined direction . 請求項１から１４のいずれかに記載の偏光素子を備える光学機器。 An optical device comprising the polarizing element according to any one of claims 1 to 14 .
JP2018076824A 2018-04-12 2018-04-12 Polarizing elements, their manufacturing methods, and optical equipment Active JP7101028B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018076824A JP7101028B2 (en) 2018-04-12 2018-04-12 Polarizing elements, their manufacturing methods, and optical equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018076824A JP7101028B2 (en) 2018-04-12 2018-04-12 Polarizing elements, their manufacturing methods, and optical equipment

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2017185286A Division JP6410906B1 (en) 2017-09-26 2017-09-26 Polarizing element and optical device

Publications (3)

Publication Number Publication Date
JP2019061218A JP2019061218A (en) 2019-04-18
JP2019061218A5 true JP2019061218A5 (en) 2020-09-17
JP7101028B2 JP7101028B2 (en) 2022-07-14

Family

ID=66177383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018076824A Active JP7101028B2 (en) 2018-04-12 2018-04-12 Polarizing elements, their manufacturing methods, and optical equipment

Country Status (1)

Country Link
JP (1) JP7101028B2 (en)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6288840B1 (en) * 1999-06-22 2001-09-11 Moxtek Imbedded wire grid polarizer for the visible spectrum
JP4842763B2 (en) * 2006-10-23 2011-12-21 株式会社リコー Optical element and optical device
JP2010066571A (en) * 2008-09-11 2010-03-25 Sony Corp Polarizing element and production method, and liquid crystal projector
JP5682437B2 (en) * 2010-09-07 2015-03-11 ソニー株式会社 Solid-state imaging device, solid-state imaging device, imaging apparatus, and polarizing element manufacturing method
JP2012103468A (en) * 2010-11-10 2012-05-31 Asahi Kasei Corp Optical element and projection type liquid crystal display device
JP2012181420A (en) * 2011-03-02 2012-09-20 Sony Chemical & Information Device Corp Polarization element
JP6100492B2 (en) * 2012-09-05 2017-03-22 デクセリアルズ株式会社 Polarizing element, projector, and manufacturing method of polarizing element
JP6285131B2 (en) * 2013-07-10 2018-02-28 デクセリアルズ株式会社 Polarizing plate and manufacturing method of polarizing plate
JP6199247B2 (en) * 2013-07-11 2017-09-20 デクセリアルズ株式会社 Polarizer
JP5960319B1 (en) * 2015-04-30 2016-08-02 デクセリアルズ株式会社 Polarizing element
CN108139531B (en) * 2015-10-28 2020-09-18 迪睿合株式会社 Polarizing element and method for manufacturing the same
JP2017083718A (en) * 2015-10-30 2017-05-18 キヤノン株式会社 Polarization element and using the same

Similar Documents

Publication Publication Date Title
KR102364526B1 (en) Polarizing plate and method of manufacturing the same
JP5996587B2 (en) Inorganic polarizing plate and method for producing the same
JP4935209B2 (en) Polarizing element and manufacturing method thereof
JP6117828B2 (en) Inorganic polarizing plate
JP2017167561A5 (en) Wire grid type light absorbing polarizing element, transmissive projector, and liquid crystal display device
JP6312917B1 (en) Inorganic polarizing plate, method for producing the same, and optical instrument
JP6302040B1 (en) Polarizing plate, method for producing the same, and optical instrument
JP2017037158A5 (en)
JP2013167824A (en) Polarization element, and manufacturing method of polarization element
JP2016119454A5 (en)
JP2008507851A5 (en)
JP2019061218A5 (en)
JP6722832B2 (en) Polarizing plate and optical device including the same
JP2019144334A (en) Polarizer, method for manufacturing the same, and optical equipment
JP2020064326A5 (en)
JP2019152872A5 (en)
US10859742B2 (en) Polarizing plate and optical device
JP6484373B1 (en) Polarizing plate and optical apparatus including the same
JP2015018947A (en) Light-emitting device
JP2019061226A5 (en)
JP2018109754A5 (en)
JP2019519812A (en) Optically transparent electromagnetic shielding element comprising a plurality of regions
JP6474623B2 (en) Patterning method and patterned article
JP6826073B2 (en) Polarizing plate and its manufacturing method, and optical equipment
TW201302047A (en) Electromagnetic shielding materials