JP2019052645A - Gas transport device - Google Patents

Abstract

To provide a gas transport device enabling volume contraction, micronization, sound quietness effect, and control for size accuracy, and capable of overcoming a problem on insufficient flow rate.SOLUTION: A gas transport device are composed of a first flow guide unit set 10a, a second flow guide unit set 10b, and an air collection chamber. A plurality of flow guide units each comprises an inlet hole 170 and an outlet hole 160. After the plurality of flow guide units is activated, gas is introduced from each inlet hole 170, and then discharged from the outlet hole 160. The air collection chamber is installed between the first flow guide unit set 10a and the second flow guide unit set 10b, and comprises a discharge port A. The first flow guide unit set 10a and second flow guide unit set 10b are each configured to suction gas from the plurality of inlet holes 170, transport the gas from the plurality of outlet holes 160 to the air collection chamber, and further discharge the gas from the discharge port A of the air collection chamber, to appropriately adjust a gas transport amount.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a gas transport device, and more particularly a micro-type, thin and quiet gas transport device.

  At present, regardless of industries such as medicine, computer technology, printing, energy sources, etc., products are developing toward precision and microfabrication, of which the gas transport structure included in micropumps is the key technology. Therefore, how to create a new structure and break through the conventional technology is required.

  With the progress of science and technology, gas transport devices have been applied in multiple ways, such as industrial applications, medical applications, medical insurance, and electronic heat dissipation. Conventional gas transport devices are gradually becoming micro and maximizing the flow rate.

  In the current technology, gas transport devices are mainly constructed by stacking conventional structural components, and each component of each component is miniaturized or slimmed to achieve miniaturization and slimming of the entire device. doing. However, it is difficult to control the size accuracy of a conventional structural component after microfabrication, and the assembly accuracy is not as simple as that, resulting in a mismatch in the yield rate of products, and further, the flow rate of transport fluid is inconsistent. There are problems such as stability.

  In addition, conventional gas transport devices also have the problem of insufficient transport volume, making it difficult to meet the demand for large quantities of gas transport through a single gas transport device, and conventional gas transport devices usually project outward. There is a conductive pin used for electrical connection, so even if many conventional gas transport devices are arranged in parallel and trying to increase the transport amount, the assembly accuracy is similarly difficult to control. However, it is difficult to improve the flow rate through this method, and the arrangement method is relatively low in flexibility and difficult to operate.

  As described above, the drawbacks of the conventional technology are improved, the volume of the instrument or equipment of the conventional gas transport device is reduced, the micro size and the silence are achieved, the size accuracy control by the micro size is difficult, and the flow rate is insufficient. Therefore, there is currently a need for a microfluidic transport device that overcomes these problems and can be widely used in various devices.

  The main object of the present invention is to provide a gas transport device, produce a monolithic micro gas transport device by a micro-electromechanical system manufacturing process, and the conventional gas transport device has a volume reduction, micro-ization, and a silent effect. To overcome the problems that could not be combined with size accuracy control and lack of flow at the same time.

  In order to achieve the above object, a relatively broad embodiment of the present invention provides a gas transport device, which includes a first diversion unit set and a second diversion unit set, and an air collection chamber, The first diversion unit set and the second diversion unit set each include a plurality of diversion units, and the plurality of diversion units each include an inlet hole and an outlet hole, and a plurality of the diversion units. When the flow unit is activated, gas is introduced from each of the inlet holes and discharged from each of the outlet holes, and the air collecting chamber is installed between the first flow guide unit set and the second flow guide unit set. And an exhaust port, wherein the first flow guide unit set and the second flow guide unit set each sucks gas from a plurality of inlet holes and collects the air from a plurality of outlet holes. Cha Transported to server, and further discharged from the outlet port of the collection gas chamber, to achieve the adjustment of the suitable gas transport volume.

The external structure instruction | indication figure of the gas transport apparatus in the 1st preferable example of this invention. The cross-section structure instruction | indication figure of the gas transport apparatus shown in FIG. FIG. 3 is a partial enlarged structure instruction diagram of a single flow guide unit in the cross-sectional view of the gas transport device shown in FIG. FIG. 3B is a partial enlarged instruction view of the operation process of the single flow guide unit of the gas transport device shown in FIG. 3A. FIG. 3B is a partial enlarged instruction view of the operation process of the single flow guide unit of the gas transport device shown in FIG. 3A. FIG. 3B is a partial enlarged instruction view of the operation process of the single flow guide unit of the gas transport device shown in FIG. 3A. The external structure instruction | indication figure of the gas transport apparatus in the 2nd preferred Example of this invention. The external structure instruction | indication figure of the gas transport apparatus in the 3rd preferred Example of this invention. The external structure instruction | indication figure of the gas transport apparatus in the 4th Example of this invention. The operation | movement instruction diagram of the 1st, 2nd, 3rd embodiment of the valve | bulb of this invention. The operation | movement instruction diagram of the 1st, 2nd, 3rd embodiment of the valve | bulb of this invention. The operation | movement instruction diagram of the 4th, 5th embodiment of the valve | bulb of this invention. The operation | movement instruction diagram of the 4th, 5th embodiment of the valve | bulb of this invention.

  Several exemplary embodiments embodying the features and advantages of the present invention are described in detail below. The invention is capable of various modifications in different embodiments, none of which depart from the scope of the invention, and the description and drawings of the invention are essentially used for illustration and to limit the invention. It should be understood that this is not the case.

  1 to 3D, the present invention provides a gas transport device 1, which includes at least one first diversion unit set 10a, at least one second diversion unit set 10b, and a plurality of diversion units. The flow unit 10, at least one inlet hole 170, at least one outlet hole 160, at least one air collection chamber 1 c, and at least one exhaust port A; Although the flow guide unit set 10a, the second flow guide unit set 10b, the inlet hole 170, the outlet hole 160, the air collecting chamber 1c, and the exhaust port A are described as one, Without limitation, the first diversion unit set 10a, the second diversion unit set 10b, the inlet hole 170, the outlet hole 160, the air collecting chamber 1c, Serial outlet A can also be a plurality of combinations.

  Referring to FIGS. 1, 2, and 3A, the gas transport device according to the present invention includes, in the first preferred embodiment, the gas transport device 1 includes a first diversion unit set 10a, a second diversion unit set 10b, And the air collecting chamber 1c. Each of the first and second diverting unit sets 10a and 10b includes a plurality of diverting units 10, and the air collecting chamber 1c includes the first collecting unit 10a. It is installed between the one diversion unit set 10a and the second diversion unit set 10b, and the air collection chamber 1c has an exhaust port A. Each one of the flow guide units 10 is configured by sequentially stacking parts such as an inlet plate 17, a base material 11, a resonance plate 13, an actuator plate 14, a piezoelectric unit 15, an outlet plate 16, and the like. 17 includes an inlet hole 170, the resonance plate 13 includes a hollow hole 130 and a movable portion 131, and a merging chamber 12 is formed between the resonance plate 13 and the inlet plate 17. A suspension part 141, an outer frame part 142, and a plurality of gaps 143 are provided. The outlet plate 16 is provided with an outlet hole 160, and the structure, features, and installation method will be described in more detail in the following description.

  The first diversion unit set 10 a and the second diversion unit set 10 b of the gas transport device 1 according to the present embodiment include a plurality of the inlet holes 170 of the inlet plate 17 and a plurality of the base material 11. The merging chamber 12, the plurality of hollow holes 130 and the plurality of movable portions 131 of the resonance plate 13, the plurality of suspension portions 141 and the plurality of gaps 143 of the actuator plate 14, a plurality of The plurality of flow guiding units 10 are configured through the piezoelectric unit 15 and the plurality of outlet holes 160. In other words, each one of the flow guiding units 10 includes one merging chamber 12 and , One hollow hole 130, one movable part 131, one suspension part 141, one gap 143, one piezoelectric unit 15, and one The outlet hole 160 and the one inlet hole 170 are included, but the present invention is not limited thereto, and a gap g0 is provided between the resonance plate 13 and the actuator plate 14 of each one of the flow guide units 10. A first chamber 18 (shown in FIG. 3A) is formed, and a second chamber 19 (shown in FIG. 3A) is formed between the actuator plate 14 and the outlet plate 16. In order to simplify the description of the structure of the gas transport device 1 and the gas control method, the following contents will be described using the single flow guide unit 10, which is to explain the present invention. The flow transport unit 1 is not limited to have only the flow unit 10, and a plurality of the flow guide units 10 includes the gas transport device 1 composed of a single flow guide unit 10 having a plurality of similar structures. The quantity can be arbitrarily changed based on the actual situation.

  Referring to FIG. 1, in the first preferred embodiment, the number of the plurality of diversion units 10 of the first diversion unit set 10a and the second diversion unit set 10b is forty pieces, The gas transport device 1 includes eighty units capable of transporting gas independently, as shown in FIG. 1, each one of the inlet holes 170 corresponds to each one of the flow guide units 10, and The forty flow guide units 10 of the first flow guide unit set 10a and the second flow guide unit set 10b are further arranged in a row corresponding to two, each in a row of twenty. Not limited to this, the quantity and arrangement method can be arbitrarily changed based on the actual situation.

  Referring to FIG. 2, in the present embodiment, the inlet plate 17 includes the inlet hole 170, the inlet hole 170 passes through a hole in the inlet plate 17, and each of the one diversion unit 10 includes: One inlet hole 170 is provided, and gas is circulated. In some embodiments, the inlet plate 17 further includes a filtration device (not shown), but the present invention is not limited thereto, and the filtration device is installed to seal the inlet hole 170 in a gas. It is used to filter dust or other contaminants in the gas, preventing the impurities and dust from flowing into the gas transport device 1 and damaging the parts.

  The base material 11 of the gas transport device 1 further includes a drive circuit (not shown), is used for electrical connection with the positive electrode and the negative electrode of the piezoelectric unit 15, and is used for providing a drive power source. Not limited to. In some embodiments, the drive circuit can be installed at an arbitrary position inside the gas transport device 1, but is not limited thereto, and can be arbitrarily changed based on an actual situation.

  Referring to FIGS. 2 and 3A, in the gas transport device 1 of the present embodiment, the resonance plate 13 has a suspended structure, and the resonance plate 13 further includes the hollow hole 130 and a plurality of movable parts 131. Each of the one diversion unit 10 that is included includes one hollow hole 130 and the movable portion 131 corresponding thereto. In the flow guiding unit 10 of the present embodiment, the hollow hole 130 is installed at the center of the movable portion 131, and the hollow hole 130 is a hole that penetrates the resonance plate 13. Between the first chamber 18 and the first chamber 18 to circulate and transport the gas. The movable part 131 of this embodiment is a part of the resonance plate 13, which has a flexible structure, and is curved and vibrated up and down as the actuator plate 14 is driven, thereby transporting gas. The operation method will be described in detail later in the manual.

  2 and 3A, in the gas transport device 1 of the present embodiment, the actuator plate 14 is formed of a thin film of a metal material or a polycrystalline silicon thin film, but is not limited thereto, and the actuator plate 14 is not limited thereto. Is a hollow suspension structure, and the actuator plate 14 further includes the suspension portion 141 and the outer frame portion 142, and each one of the flow guide units 10 has one suspension portion 141. Is provided. In the flow guide unit 10 of the present embodiment, the suspension portion 141 includes a plurality of connection portions (not shown) connected to the outer frame portion 142, so that the suspension portion 141 is connected to the outer frame portion. 142, and a plurality of gaps 143 are defined between the suspension part 141 and the outer frame part 142 to help gas flow, and the suspension part 141 and the outer frame 142 The installation method, implementation mode, and quantity of the portion 142 and the gap 143 are not limited to these, and can be arbitrarily changed based on the actual situation. In some embodiments, the suspension 141 has a stepped surface structure, that is, the suspension 141 further includes a protrusion (not shown), and the protrusion has a circular protrusion structure. However, the present invention is not limited to this, and the depth of the first chamber 18 is maintained at one specific section value by installing it on the lower surface of the suspension part 141 and installing the convex part. The first chamber 18 has a depth that is too shallow, and the movable portion 131 of the resonance plate 13 contacts the actuator plate 14 when resonating to prevent noise and the like. Although the depth of 18 is too deep, the problem of insufficient gas transportation pressure can also be prevented, but this is not a limitation.

  Referring to FIGS. 2 and 3A, in the gas transport device 1 of this embodiment, each of the flow guide units 10 includes one piezoelectric unit 15, and the piezoelectric unit 15 includes the actuator plate 14. The piezoelectric unit 15 is affixed to the upper surface of the suspension part 141, and further includes a positive electrode and a negative electrode (not shown). The piezoelectric unit 15 is used for electrical connection, and generates deformation after the piezoelectric unit 15 receives a voltage. The actuator plate 14 is driven to reciprocate in the vertical direction, and the resonance plate 13 is interlocked to generate resonance so that the first resonance plate 13 and the actuator plate 14 are resonated. A pressure change is caused in one chamber 18 to transport the gas. This method of operation will be described in more detail later.

  Referring to FIGS. 1 to 3A, in the gas transport apparatus 1 of the present embodiment, the outlet plate 16 further includes the outlet hole 160, and each of the one diversion unit 10 is one. The outlet hole 160 is provided. In the flow guide unit 10 of the present embodiment, the outlet hole 160 communicates between the second chamber 19 and the outside of the outlet plate 16, and gas passes from the second chamber 19 through the outlet hole 160, It flows to the outside of the outlet plate 16 to realize gas transportation.

  Referring to FIGS. 3A to 3D, FIGS. 3B to 3D are operation process partial enlarged instruction views of the single flow guide unit 10 of the gas transport device shown in FIG. 3A. First, the flow guide unit 10 of the gas transport device 1 shown in FIG. 3A is in a disabled state (that is, an initial state), and the gap g0 is provided between the resonance plate 13 and the actuator plate 14 among them. Thus, the depth of the gap g0 can be maintained between the resonance plate 13 and the suspension portion 141 of the actuator plate 14, gas can be guided to flow more quickly, and the suspension By maintaining an appropriate distance between the hanging portion 141 and the resonance plate 13, the mutual interference is reduced and the generation of noise is reduced, but is not limited thereto.

  Referring to FIGS. 2 and 3B, when the piezoelectric unit 15 applies a voltage and the actuator plate 14 is actuated by driving the piezoelectric unit 15 in the flow guide unit 10, The suspension 141 oscillates upward, the volume of the first chamber 18 increases, the pressure decreases, the gas enters in conformity with the external pressure from the inlet hole 170 on the inlet plate 17, and the The base material 11 is collected in the merging chamber 12 and further flows into the first chamber 18 upward through the central hole 130 installed corresponding to the merging chamber 12 on the resonance plate 13. Next, referring to FIGS. 2 and 3C, the movable portion 131 of the resonance plate 13 resonates and vibrates upward in response to the vibration of the suspension portion 141 of the actuator plate 14, and the The suspension part 141 of the actuator plate 14 also vibrates downward at the same time, and the movable part 131 of the resonance plate 13 is stuck on the suspension part 141 of the actuator plate 14 to be in contact with the first chamber. 18 to close the flow space, thereby compressing the first chamber 18 to reduce the volume, increase the pressure, increase the volume of the second chamber 19, decrease the pressure, By forming the gas, the gas inside the first chamber 18 is driven to flow on both sides, and the second chamber 1 passes through the plurality of gaps 143 of the actuator plate 14. To flow into the inside.

  Referring to FIGS. 2 and 3D, the suspension part 141 of the actuator plate 14 continues to vibrate downward, and the movable part 131 of the resonance plate 13 is interlocked, and the movable part 131 is lowered downward accordingly. Oscillates to further compress the first chamber 18 and allow most of the airflow to flow into the second chamber 19 for temporary storage.

  Finally, the suspension part 141 of the actuator plate 14 vibrates upward and compresses the second chamber 19 to reduce the volume, increase the pressure, and allow the gas in the second chamber 19 to flow out to the outlet. The gas is led out from the outlet hole 160 of the plate 16 to the outside of the outlet plate 16 to complete the gas transport. The operation shown in FIG. 3B is repeated to increase the volume of the first chamber 18, decrease the pressure, and again allow gas to enter from the inlet holes 170 on the inlet plate 17 in conformity with the external pressure, and The base material 11 is joined to the joining chamber 12, and further flows into the first chamber 18 through the central hole 130 installed corresponding to the joining chamber 12 on the resonance plate 13. By repeating the gas transport operation of the flow guide unit 10 of FIGS. 3B to 3D described above, the reciprocating vertical vibration continues to the suspension part 141 of the actuator plate 14 and the movable part 131 of the resonance plate 13. The gas is continuously guided from the inlet hole 170 toward the outlet hole 160 to realize gas transportation.

  As described above, the gas transport device 1 of the present embodiment causes the gas to flow at high speed by generating a pressure gradient in the flow path design of each of the flow guide units 10, and through the resistance difference in the entrance / exit direction of the flow path, Can be continuously extruded from the suction side to the discharge side and pressure can be continuously applied to the discharge side, and a silent effect can be achieved. In some embodiments, the frequency of the vertical reciprocating vibration of the resonant plate 13 can be the same as the vibration frequency of the actuator plate 14, i.e., both can vibrate simultaneously upward or downward simultaneously. . It can be arbitrarily changed based on the actual implementation status, and is not limited to the operation shown in the present embodiment.

  Referring to FIG. 2, in the present embodiment, a plurality of the diversion units 10 are installed in tandem to form the first diversion unit set 10a and the second diversion unit set 10b, respectively, The first diversion unit set 10a stacks the second diversion unit set 10b vertically upward, and the air collection chamber is between the first diversion unit set 10a and the second diversion unit set 10b. 1c is installed, and the air collecting chamber 1c communicates with the outlet holes 160 of the plurality of the diversion units 10 of the first diversion unit set 10a and the second diversion unit set 10b. When a plurality of the diversion units 10 in the first diversion unit set 10a and the second diversion unit set 10b are activated, gas can be sucked from the plural inlet holes 170, and more Gas is accumulated by transporting from the outlet holes 160 to the air collecting chamber 1c, and the air collecting chamber 1c is transported from the first diversion unit set 10a and the second diversion unit set 10b. The gas is collected and finally discharged from the outlet A. Thus, the gas transport device 1 can adjust an appropriate gas transport amount by using the operations of the first flow guide unit set 10a and the second flow guide unit set 10b. In addition, the quantity and arrangement method between the first diversion unit set 10a and the second diversion unit set 10b are the same, but not limited thereto, in another embodiment, The quantity and arrangement method of the diversion unit set 10a and the second diversion unit set 10b may not be the same.

  In the present embodiment, the first and second flow conduction unit sets 10a and 10b of the gas transport device 1 can be adapted to various arrangement scheme designs and drive circuit connection, with a degree of freedom. It is very high and can be applied to various electronic units, and can operate at the same time to transport gas and meet the demands of mass gas transportation. Besides, each one of the current-carrying units 10 operates independently. Alternatively, the stop can be controlled, for example, a certain one of the diversion units 10 is operated, and the other diversion units 10 are stopped, or a certain one of the diversion units 10 and the other diversion units 10 are alternately arranged. However, the present invention is not limited thereto, and various gas transport flow rate needs can be easily achieved, and power consumption can be greatly reduced.

  Referring to FIG. 4, FIG. 4 is an external structure instruction diagram of the gas transport device in the second preferred embodiment of the present invention. In the second preferred embodiment, the first diversion unit set 20a (not shown) and the second diversion unit set 20b of the gas transport device 2 are stacked in the vertical direction and installed in the first direction. The number of the plurality of flow guiding units 20 of the flow flow unit set 20a and the second flow guiding unit set 20b is all eighty, and the arrangement method thereof is that each of the inlet holes 270 of the inlet plate 27 is one of the aforementioned flow guide units. In other words, the gas transport apparatus 2 includes 160 units that can transport gas independently, and the first flow guide unit set 20a (not shown) And the structure of the second flow guiding unit set 20b is the same as that of the first preferred embodiment described above, and the difference is only in the quantity and arrangement method, and therefore the structure will not be described again here. In the present embodiment, the eight convection units 20 of the first convection unit set 20a (not shown) and the second convection unit set 20b are also arranged in four rows in parallel with twenty rows. Although it installs correspondingly, it is not restricted to these, The quantity and the arrangement | sequence system can be changed arbitrarily based on an actual condition. The first diversion unit set 20a (not shown) and the second diversion unit set 20b each include eighty diversion units 20 and simultaneously enable gas transport. A larger gas transport amount can be achieved, and each one of the flow guide units 20 can be operated independently to conduct the flow. The control range of the fluid transmission amount is further large, and various large flow rates of gas transport are possible. Although it can be flexibly applied to a required apparatus, it is not limited to these. In some other embodiments of the present invention, the number of the plurality of diversion units 20 of the first diversion unit set 20a and the second diversion unit set 20b of the gas transport device 2 is twenty. The arrangement method may be a vertical arrangement or a horizontal arrangement, but is not limited thereto.

  Referring to FIG. 5, FIG. 5 is an external structure instruction diagram of the gas transport device in the third preferred embodiment of the present invention. In the third preferred embodiment of the present invention, the gas transport device 3 has a circular structure, and the quantity of the diversion units 30 of the first diversion unit set 30a (not shown) and the second diversion unit set 30b is determined. For example, each inlet hole 370 of the inlet plate 37 corresponds to each one of the flow guide units 30, in other words, the first flow guide unit set of the gas transport device 3. 30a and the second diversion unit set 30b each include forty units each capable of transporting a gas, and the structure of each one of the diversion units 30 is the same as that of the first preferred embodiment. The difference is only in quantity and arrangement, and therefore will not be described again here in terms of structure. The first diversion unit set 30a (not shown) and the second diversion unit set 30b according to the present embodiment are arranged by arranging forty diversion units 30 in a ring shape. However, the present invention is not limited to this, and the quantity and arrangement method can be arbitrarily changed based on the actual situation. Through the ring-shaped arrangement of the forty flow guide units 30, various circular or ring-shaped gas transport passages can be used. Can be applied. By changing the arrangement method of each one of the flow guide units 30, it is possible to cope with various shapes required in the apparatus, and more flexibly apply to various fluid transmission apparatuses.

  Referring to FIG. 6, FIG. 6 is an external structure instruction diagram of the gas transport device according to the fourth preferred embodiment of the present invention. In the fourth preferred embodiment, the first diversion unit set 40a (not shown) of the gas transport device 4 and the diversion unit 40 of the second diversion unit set 40b are arranged in a honeycomb shape.

  Referring to FIG. 1, the gas transport device 1 of the present invention further includes at least one valve 5, and the valve 5 can be installed in the inlet hole 170 or the outlet hole 160 of the gas transport device 1. Alternatively, it can be installed in the inlet hole 170 and the outlet hole 160 at the same time.

  Referring to FIGS. 7A and 7B, the first embodiment of the valve 5 includes a holding part 51, a sealing part 52, and a valve piece 53. The valve piece 53 is installed in a storage space 55 formed between the holding portion 51 and the sealing portion 52, and includes at least two vent holes 511 on the holding portion 51. Ventilation holes 531 are also installed at the positions of the vent holes 511 on the holding portion 51 corresponding to the positions of the vent holes 511 of the holding portion 51 and the vent holes 531 of the valve piece 53. Aiming, at least one vent hole 521 is provided on the sealing part 52, and the positions of the vent hole 521 of the sealing part 52 and the vent hole 511 of the holding part 51 are shifted to aim. Not.

  Referring to FIGS. 7A and 7B, in the first embodiment of the present invention, the valve 5 can be installed in the inlet hole 170 of the inlet plate 17, and when the gas transport device 1 is activated, gas is supplied to the inlet. The gas is introduced into the gas transporting device 1 from the inlet hole 170 of the plate 17, and at this time, the gas transporting device 1 forms a suction force, and the valve piece 53 generates an air flow in the direction of the arrow as shown in FIG. 7B. The valve piece 53 is pushed up along the same, causing the valve piece 53 to come into contact with the holding portion 51, and simultaneously opening the vent hole 521 of the sealing portion 52, and letting gas pass through the vent hole 521 of the sealing portion 52. The position of the vent hole 531 of the valve piece 53 is approximately aimed at the vent hole 511 of the holding portion 51. Therefore, the vent hole 531 and the vent hole 511 communicate with each other. Flow upward in flowing, thereby entering the gas transport device 1. When the actuator 14 of the gas transport device 1 vibrates downward, the volume of the first chamber 18 is further compressed, so that gas flows upward into the second chamber 19 through the gap 143 and at the same time the valve 5 receives the pressure of the gas, recovers the operation of the vent hole 521 of the sealing portion 52 as shown in 7A, and the gas forms a single flow and enters the merging chamber 12. In addition, when gas is accumulated in the merging chamber 12 and the actuator 14 of the gas transport device 1 vibrates upward, a relatively large amount of gas can be discharged from the outlet hole 160, and gas export can be performed. Increase the amount.

  The holding part 51, the sealing part 52, and the valve piece 53 of the valve 5 of the present invention can be made of graphene material to form a micro-type valve part. In the second embodiment of the bulb 5 of the present invention, the bulb piece 53 is made of a charged material, and the holding portion 51 is made of a bipolar conductive material. The holding unit 51 is electrically connected to a control circuit (not shown), and the control circuit is used to control the polarity (positive electrode or negative electrode) of the holding unit 51. If the valve piece 53 is made of a negatively charged material, when the valve 5 is controlled and opened, the control circuit controls the holding portion 51 to form a positive electrode. At this time, the valve piece 53 And the holding part 51 maintain different polarities so that the valve piece 53 approaches the holding part 51 and constitutes the opening of the valve 5 (see FIG. 7B). In contrast, when the valve piece 53 is made of a negatively charged material, when the valve 5 is controlled and closed, the control circuit controls the holding portion 51 to form a negative electrode. Since the piece 53 and the holding part 51 maintain the same polarity, the valve piece 53 approaches toward the sealing part 52 and constitutes the closing of the valve 5 (see FIG. 7A).

  In the third embodiment of the valve 5 of the present invention, the valve piece 53 may be a magnetic band material, and the holding portion 51 may be a magnetic material that is controlled and changes its polarity. The holding unit 51 is electrically connected to a control circuit (not shown), and the control circuit is used to control the polarity (positive electrode or negative electrode) of the holding unit 51. If the valve piece 53 is made of a magnetic material having a negative electrode, when the valve 5 is controlled and opened, the holding portion 51 forms a positive magnetism, and at this time, the control circuit controls the valve piece 53. And the holding part 51 are controlled to maintain different polarities, whereby the valve piece 53 approaches the holding part 51 and constitutes the opening of the valve 5 (see FIG. 7B). In contrast, if the valve piece 53 is made of a magnetic material having a negative electrode, when the valve 5 is controlled and closed, the holding part 51 forms a negative magnet, and the control circuit By controlling the valve piece 53 and the holding portion 51 to maintain the same polarity, the valve piece 53 approaches the sealing portion 52 and constitutes the closing of the valve 5 (see FIG. 7A).

  Referring to FIGS. 8A and 8B, it is an operation instruction diagram of the fourth embodiment of the valve of the present invention. As shown in FIG. 8A, the valve 5 includes the holding part 51, the sealing part 52, and a soft film 54. On the holding part 51, at least two vent holes 511 are provided, and the container space 55 is provided between the holding part 51 and the sealing part 52. The soft film 54 is made of a flexible material, is affixed to a side surface of the holding portion 51 and is placed in the storage space 55, and a position corresponding to the vent hole 511 on the holding portion 51. Further, the vent hole 541 is provided, and the positions of the vent hole 511 of the holding portion 51 and the vent hole 541 of the soft film 54 are substantially aimed at each other. At least one vent hole 521 is provided on the sealing portion 52, and the positions of the vent hole 521 of the sealing portion 52 and the vent hole 511 of the holding portion 51 are misaligned and are not aimed.

  Referring to FIGS. 8A and 8B, in the fourth preferred embodiment of the valve 5 according to the present invention, the holding portion 51 is made of a material that expands upon receiving heat, and is electrically connected to a control circuit (not shown). The control circuit controls the heat receiving of the holding unit 51. When the valve 5 is controlled and opened, the control circuit controls the holding portion 51 so as not to expand due to heat, holds it in the storage space 55, and the sealing portion 52. A distance is formed between them to constitute opening of the valve 5 (see FIG. 8A). In contrast, when the valve 5 is controlled and closed, the control circuit controls the holding part 51 to expand by receiving heat, causing the holding part 51 to contact the sealing part 52, At this time, the soft film 54 seals the vent hole 521 of the sealing portion 52 and constitutes the closing of the valve 5 (see FIG. 8B).

  Referring to FIGS. 8A and 8B, in the fifth embodiment of the valve 5 of the present invention, the holding portion 51 is made of a piezoelectric material, and its deformation is controlled by a control circuit (not shown). When the valve 5 is controlled and opened, the holding part 51 is not deformed, is held in the storage space 55, forms a distance with the sealing part 52, and opens the valve 5 ( (See FIG. 8A). In contrast, when the valve 5 is closed under control, the control circuit controls the holding part 51, and the holding part 51 is deformed and comes into contact with the sealing part 52. The soft membrane 54 seals the vent hole 521 of the sealing portion 52 and constitutes the closing of the valve 5 (see FIG. 8B). Naturally, the holding portion 51 which is a block of each interval to which the plurality of vent holes 521 of the sealing portion 52 correspond can be independently controlled by a control circuit, and the flow of the variable valve 5 can be controlled. Forming an action and achieving the function of adjusting the gas flow rate appropriately.

  As described above, the gas transport device provided by the present invention includes a plurality of flow guiding units, and generates a pressure gradient through the operation of the flow guiding unit, thereby allowing the gas to flow quickly and the plurality of the flow guiding units. A diversion unit constitutes the first diversion unit set and the second diversion unit set, and a plurality of the diversion units in the first diversion unit set and the second diversion unit set are arranged according to a specific arrangement method. Installed and used for control and adjustment of gas transmission. In addition, when the piezoelectric unit enables and operates the actuator, the gas creates a pressure gradient in the designed flow path and pressure chamber, the gas flows at high speed, and is quickly transported from the entry side to the exit side. Realize transportation. Furthermore, the present invention can respond to the demands of various different devices and gas transmission flow rate through a high change in the number of current-carrying units, installation method, drive method, high transmission amount, high function, high degree of freedom, etc. Can be achieved.

1, 2, 3, 4 Gaseous transport devices 10a, 20a, 30a, 40a First diversion unit sets 10b, 20b, 30b, 40b Second diversion unit set 1c Air collection chamber A Exhaust ports 10, 20, 30, 40 Flow guide unit 11 Base 12 Merge chamber 13 Resonant plate 130 Hollow hole 131 Movable part 14 Actuator plate 141 Suspension part 142 Outer frame part 143 Air gap 15 Piezoelectric unit 16, 26, 36 Outlet plate 160, 260, 360 Outlet hole 17 Inlet Plate 170 Inlet hole 18 First chamber 19 Second chamber g0 Gap 5 Valve 51 Holding part 52 Sealing part 53 Valve piece 54 Soft membrane 511, 521, 531, 541 Vent hole 55 Storage space

Claims (13)

A gas transport device, including a first diversion unit set and a second diversion unit set, and an air collection chamber;
The first diversion unit set and the second diversion unit set are each composed of a plurality of diversion units, and the plurality of diversion units have their own inlet holes and outlet holes, and a plurality of the diversion units. After the flow unit is activated, gas is introduced from the inlet hole of each person, discharged from the outlet hole,
The air collection chamber is installed between the first and second flow-conducting unit sets and includes an exhaust port;
Among them, the first diversion unit set and the second diversion unit set respectively suck the gas from the plurality of inlet holes and transport the gas from the plurality of outlet holes to the air collecting chamber. A gas transport device which discharges from the exhaust port of the air collecting chamber and realizes appropriate gas transport amount adjustment.   2. The gas transport device according to claim 1, wherein the first diversion unit set and the second diversion unit set are arranged and arranged in a row in a row.   The gas transport device according to claim 1, wherein the first diversion unit set and the second diversion unit set are arranged by arranging the diversion units in a line.   The gas transport device according to claim 1, wherein the first diversion unit set and the second diversion unit set are arranged by arranging the diversion units in an annular manner.   The gas transport device according to claim 1, wherein the first diversion unit set and the second diversion unit set are arranged by arranging the diversion units in a honeycomb manner. Each one of the flow guide units includes an inlet plate, a base material, a resonance plate, an actuator plate, a piezoelectric unit, an outlet plate, and at least one valve,
The inlet plate comprises the inlet hole;
The resonant plate includes a hollow hole and a junction chamber between the resonant plate and the inlet plate;
The actuator plate includes one suspension, an outer frame, and at least one gap;
The piezoelectric unit is affixed to the surface of the suspension part of the actuator plate,
The outlet plate includes the outlet hole;
At least one of the valves is installed in at least one of the inlet hole and the outlet hole;
Among them, the inlet hole, the base material, the resonance plate, the actuator, and the outlet plate are sequentially stacked and installed, and a first chamber is provided with a gap between the resonance plate and the actuator plate. And a second chamber is formed between the actuator and the outlet plate, and the piezoelectric unit drives the actuator to generate a bending vibration, whereby pressure is applied to the first chamber and the second chamber. Forming a difference, opening the valve, allowing gas to enter the merging chamber from the inlet hole of the inlet plate, enter the first chamber through the hollow hole of the resonant plate, and at least one The gas is introduced into the second chamber from one of the gaps and finally led out from the outlet hole of the outlet plate, thereby transporting a flow of gas. Gas transport apparatus according to claim 1.   The valve includes a holding part, a sealing part, and a valve piece, a holding space is held between the holding part and the sealing part, and the valve piece is installed in the holding space, At least two vent holes are provided on the holding portion, the vent piece is installed at a position corresponding to the vent hole of the holding portion, the vent hole of the holding portion, and the valve piece of the valve piece The positions of the vent holes are generally aimed at each other, at least one vent hole is provided on the sealing portion, and a gap is formed between the vent hole positions of the holding portion, and the aim is not aimed. The gas transport device according to claim 6.   The valve includes a holding part made of graphene material, a sealing part, and a valve piece, and a storage space is held between the holding part and the sealing part, and the valve piece is the container. Installed in the installation space, provided with at least two vent holes on the holding part, and provided with a vent hole at a position where the valve piece corresponds to the vent hole of the holding part, and the vent hole of the holding part And the position of the vent hole of the valve piece is approximately aimed at each other, at least one vent hole is provided on the sealing portion, and a gap is formed between the position of the vent hole of the holding portion, The gas transport device according to claim 6, wherein the gas transport device is not.   When the valve piece is a charged material, the holding part is a bipolar conductive material, the polarity is controlled by a control circuit, and the valve piece and the holding part maintain different polarities, the valve piece When approaching the holding part and constituting the opening of the valve, and when the valve piece and the holding part hold the same polarity, the valve piece approaches the sealing part and closes the valve. The gas transport device according to claim 7 or 8, wherein the gas transport device is configured.   The valve piece is a magnetic band material, the holding unit is a magnetic material that is controlled and changes its polarity, the polarity is controlled by a control circuit, and when the valve piece and the holding unit hold different polarities, When the valve piece approaches the holding part and constitutes the opening of the valve, and when the valve piece and the holding part hold the same polarity, the valve piece approaches the sealing part, The gas transport device according to claim 7 or 8, wherein the gas transport device is configured to close a valve.   The valve includes a holding portion, a sealing portion, and a soft membrane, a storage space is held between the holding portion and the sealing portion, and the soft membrane is stuck on a surface of the holding portion. And at least two vent holes provided on the holding portion, and the soft membrane is provided with a vent hole at a position corresponding to the vent hole of the holding portion. The vents of the soft film and the vents of the soft membrane are approximately aimed at each other, and at least one vent hole is provided on the sealing part, and the position of the vent hole of the holding part is shifted. The gas transport device according to claim 6, wherein the gas transport device is formed and not aimed.   The holding part is a thermal expansion material or a piezoelectric material, and its heat receiving or deformation is controlled by a control circuit, and when the holding part is expanded or deformed by receiving heat, the soft film comes into contact with the sealing part, By sealing at least one of the vent holes of the sealing portion, the valve is closed, and when the holding portion does not expand due to heat, the container space is interposed between the sealing portion and the holding portion. The gas transport device according to claim 11, wherein the distance is maintained and constitutes the opening of the valve. A gas transport device comprising at least one first diversion unit set and at least one second diversion unit set, and at least one air collection chamber;
Each of the at least one first diversion unit set and the at least one second diversion unit set includes a plurality of diversion units, and each of the plurality of diversion units includes at least one inlet hole and at least one A single outlet hole, a plurality of the flow guide units are activated, gas is introduced from the inlet hole of each, exhausted from the outlet hole,
At least one of the air collecting chambers is disposed between the first diversion unit set and the second diversion unit set, and includes at least one exhaust port;
Among them, the first diversion unit set and the second diversion unit set respectively suck the gas from the plurality of inlet holes and transport the gas from the plurality of outlet holes to the air collecting chamber. A gas transport device which discharges from the exhaust port of the air collecting chamber and realizes appropriate gas transport amount adjustment.