JP2019049413A - Defect inspection device and defect inspection method - Google Patents

Abstract

To increase detection accuracy of defect coordinates of inspection object.SOLUTION: The defect inspection device according to the present invention is a device for inspecting a defect of an inspection object transported on a transport unit including an inspection object storage unit for storing the inspection object and includes; a first optical system for imaging the inspection object before the inspection object storage unit in the transport direction of the inspection object; a first movement amount detection unit that detects a first movement amount of the inspection object before the inspection object storage unit; a second movement amount detection unit that detects the second movement amount of the inspection object later than the inspection object storage unit; a correction amount calculation unit for calculating the correction amount of the first movement amount or a value corresponding to the first movement amount based on the second movement amount or a value corresponding to the second movement amount, in the case of the inspection object storage unit being not in operation; and a processing unit that processes the coordinates of the defect on the inspection object based on the first image captured by the first optical system and the first movement amount or a value corresponding to the first movement amount corrected by the correction amount.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a defect inspection apparatus and a defect inspection method.

  The defect inspection device for inspecting defects present in the inspection object such as film can cope with the case where there is an accumulator (or looper) that changes the traveling speed between the inspection position and the winding position. There is a thing (patent document 1). Here, the accumulator (or looper) temporarily stores the inspection object when the moving speed of the inspection object (conveyance line speed) is changed in a part of the conveyance line for the inspection of the product and the speed adjustment. It is an installation which changes the amount of storage according to change of movement speed.

  The accumulator is provided, for example, by temporarily storing the film traveling on the line so that the roll on the winding side can be replaced without stopping the film production side. Moreover, the looper is provided, for example, between two steel plate manufacturing facilities with different line speeds. In this case, the looper keeps the line speed of the whole process line constant by absorbing the line speed difference between the two steel plate manufacturing facilities by storing and discharging the steel plates. The accumulator and looper have similar configurations.

  FIG. 12 is a schematic view showing a configuration example of a looper (or an accumulator). FIG. 12 (a) shows an example of a looper as a looper 44a, and FIG. 12 (b) shows another example of a looper as a looper 44b. The looper 44a shown in FIG. 12 (a) is composed of two rollers 441 and 442, and a hole 443 disposed in the lower part between them. The inspection object 1 is conveyed via the inside of the hole 443 and stored between the two rollers 441 and 442. At this time, the amount of the test object 1 stored between the rollers 441 and 442 changes according to the moving speed of the test object 1 before and after the looper 44a. That is, when the moving speed of the test object 1 in front of the looper 44a is larger than the moving speed in the rear, the storage amount of the test object increases, and the moving speed of the test object 1 in front of the looper 44a moves in the rear When it is smaller than the speed, the storage amount of the inspection object 1 decreases.

  Further, the looper 44 b shown in FIG. 12 (b) includes two rollers 441 and 442 and a movable roller 444. The inspection object 1 is conveyed via the roller 441, the movable roller 444 and the outer periphery of the roller 442 sequentially. The looper 44 b changes the amount of the test object 1 stored between the rollers 441 and 442 by moving the movable roller 444 in the moving direction indicated by the arrow in the drawing.

  In the defect inspection apparatus described in Patent Document 1, according to the storage amount of the inspection object detected by the storage amount detection means of the inspection object storage means (looper), the inspection object storage means The defect position displayed on the predetermined output means at the time when the storage of the defect position is started is set, and the defect position of the inspection object in storage stored on the output means is moved. According to this configuration, it is possible to easily grasp at the inspection position which position on the transport line the defect detected at the detection position has reached, and to surely know the arrival of the defect at the inspection position. it can.

  By the way, paragraph [0030] of Patent Document 1 has the following description. "Looper amount detection means (not shown) is provided, and the detected looper amount is input from a line control board (not shown) to an analog value of 0 to 10 V from the analog input unit, and this value is an 8-bit digital signal To the control computer 8 and set the coordinate of the defect position stored in the storage unit 21 of the control computer 8 according to the looper amount. Analog value detected as the looper amount (0 to 10 V Shows the ratio (0 to 100%) of the amount of the test object actually stored to the amount of the test object which the looper can store, for example, the amount of the test object which can be stored in the looper In the case of 400 m, when the amount of looper is 0%, the inspection object stored is 0 m, and when the amount of looper is 100%, it is 400 m. "

Patent No. 3992884

  In the defect inspection apparatus described in Patent Document 1 described above, since 400 m is represented by 8 bits, the resolution is 1.56 m, and the flow direction position (Y coordinate) before and after the accumulator (or looper) is accurate In order to determine the

An object of the present invention is to provide a defect inspection apparatus and a defect inspection method that meet at least one of the following requirements by accurately determining the flow direction position (Y coordinate) before and after an accumulator (or looper) .
1) Increase the accuracy of the defect coordinates of the test object such as a wound film.
2) It can be determined that the defects detected by the optical system before and after the accumulator (or looper) are the same defect.

  In order to solve the above-mentioned subject, one mode of the present invention is a device which inspects a defect of the inspection subject which is conveyed on a conveyance part provided with an inspection subject storage part which stores an inspection subject, A first optical system for imaging the inspection object before the inspection object storage unit in the transport direction of the object, and a first movement amount of the inspection object before the inspection object storage unit When the first movement amount detection unit to perform, the second movement amount detection unit that detects the second movement amount of the inspection object later than the inspection object storage unit, and the inspection object storage unit is not operating A correction amount calculator configured to calculate a first movement amount or a correction amount corresponding to the first movement amount based on the second movement amount or a value corresponding to the second movement amount; The first image captured by the system and the first movement amount or the first movement amount A defect inspection apparatus and a processing unit for processing the coordinates of the defect on the inspection object based on a value that respond to a value corrected by the correction amount.

  Moreover, one aspect of the present invention is the defect inspection apparatus, wherein the processing unit calculates an inspection length of the inspection object based on the second movement amount.

  Moreover, one aspect of the present invention is the defect inspection apparatus described above, further comprising a second optical system for imaging the inspection object later than the inspection object storage portion in the transport direction of the inspection object. The processing unit processes the coordinates of the defect based on a second image captured by the second optical system and the second movement amount or a value corresponding to the second movement amount.

  Further, one aspect of the present invention is the defect inspection apparatus, wherein the processing unit uses a value set based on the distance in the transport direction between the first optical system and the second optical system. Process the coordinates of the defect.

  Further, one aspect of the present invention is a method of inspecting a defect of the inspection object transported on a transport unit including an inspection object storage unit for storing an inspection object, the first optical system being configured to The inspection object is imaged before the inspection object storage unit in the transport direction of the inspection object, and the first movement amount detection unit detects the first inspection object before the inspection object storage unit. The movement amount is detected, and the second movement amount detection unit detects the second movement amount of the inspection object later than the inspection object storage unit, and the correction amount calculation unit causes the inspection object storage unit to operate. If not, the correction amount of the first movement amount or the value corresponding to the first movement amount is calculated based on the second movement amount or a value corresponding to the second movement amount, and the processing unit calculates the correction amount of the first movement amount or the value corresponding to the first movement amount. The first image captured by the first optical system and the first movement amount The other is a defect inspection method for processing the coordinates of the defect on the inspection object based on a value obtained by correcting the value corresponding to the first moving amount by the correction amount.

  According to the present invention, the inspection target is based on the second movement amount or the first movement amount calculated on the basis of the value corresponding to the second movement amount, or the value corrected using the correction amount of the value corresponding to the first movement amount. Since the coordinates of the defect on the object are calculated, the accuracy of the defect coordinates of the inspection object can be increased.

FIG. 1A is a plan view showing an arrangement example of a defect inspection apparatus according to an embodiment of the present invention, and FIG. 1A shows an optical system upstream from an accumulator, and FIG. 1B shows an optical system before and after the accumulator. In some cases, FIG. 1 (c) shows the case where the pass line between the front and back optical systems is changed. It is a block diagram which shows the structural example of the defect inspection apparatus 100a shown in FIG. It is a block diagram which shows the structural example of the defect inspection apparatus 100b shown in FIG. It is a flowchart which shows the operation example of defect inspection apparatus 100a, 100b shown in FIGS. 1-3, and 100c. 5 (a) is a flowchart showing an operation example of the defect inspection apparatus 100a shown in FIG. 1 (a) and FIG. 2, and FIG. 5 (b) is a flowchart of the defect inspection apparatus 100b shown in FIG. It is a flowchart which shows an operation example. It is a figure for demonstrating the speed fluctuation of encoder (1) 2 and encoder (2) 6 at the time of accumulator working shown in FIG. It is a figure for demonstrating the timing at the time of the test | inspection start of the defect inspection apparatus 100b shown in FIG.1 (b) and FIG. It is a figure for demonstrating the timing at the time of the cutting process of the defect inspection apparatus 100b shown in FIG.1 (b) and FIG. It is a figure for demonstrating the timing at the time of test | inspection stop of the defect inspection apparatus 100b shown in FIG.1 (b) and FIG. It is a figure which shows the test object of the Example of the defect inspection apparatus 100b shown in FIG.1 (b) and FIG. It is a figure which shows the apparatus structure of the Example of the defect inspection apparatus 100b shown in FIG.1 (b) and FIG. FIG. 12 (a) is a schematic view showing an example of a looper, and FIG. 12 (b) is a schematic view showing another example of the looper.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view showing an arrangement example of defect inspection apparatuses 100a, 100b and 100c according to an embodiment of the present invention. 1A shows an optical system detection unit (1) 3 upstream of the accumulator 4, and FIG. 1B shows an optical system detection unit (1) 3 and an optical system detection unit (2) before and after the accumulator 4. When there are five, FIG. 1 (c) shows the case where the pass line between the front and back optical systems is changed. FIG. 2 is a block diagram showing a configuration example of the defect inspection apparatus 100 a shown in FIG. FIG. 3 is a block diagram showing a configuration example of the defect inspection apparatus 100b shown in FIG. 1 (b) and the defect inspection apparatus 100c shown in FIG. 1 (c). The same code | symbol or the same code | symbol which attached | subjected the different alphabet to the end is used for the structure which is the same or corresponding in FIG. The defect inspection apparatus 100b shown in FIG. 1 (b) and the defect inspection apparatus 100c shown in FIG. 1 (c) have the same basic configuration, and the operation examples shown in FIG. 4 and FIG. The inspection apparatus 100b and the defect inspection apparatus 100c are common. In the description of the following operation example, the description of the defect inspection apparatus 100c is omitted as appropriate, and the defect inspection apparatus 100b is described as an example.

  The defect inspection apparatus 100 a shown in FIGS. 1A and 2 includes an encoder (1) 2, an optical system detection unit (1) 3, an accumulator 4, an encoder (2) 6, a marker 7, and a control unit 22a (FIG. 2) and an output unit 24 (FIG. 2). The defect inspection apparatus 100b shown in FIGS. 1 (b) and 3 includes an encoder (1) 2, an optical system detection unit (1) 3, an accumulator 4, an optical system detection unit (2) 5, and an encoder (2) 6, the marker 7, the control unit 22b (FIG. 3), and the output unit 24 (FIG. 3). The defect inspection apparatus 100 c shown in FIG. 1C includes an encoder (1) 2, an optical system detection unit (1) 3, an accumulator 4, an optical system detection unit (2) 5, and an encoder (2) 6 , Marker 7 is provided. Further, the defect inspection apparatus 100c shown in FIG. 1 (c) includes the control unit 22b and the output unit 24 shown in FIG. 3 as the defect inspection apparatus 100b. The defect inspection apparatus 100a does not include the defect inspection apparatus 100b and the optical system detection unit (2) 5 included in the defect inspection apparatus 100c.

  The encoder (1) 2 and the encoder (2) 6 measure the moving distance of the inspection object 1 moving in the fixed direction (traveling direction indicated by the arrow in FIG. 1) on the transporting line (transporting portion) not shown. A pulse signal (for example, a signal of 0.05 mm / pulse) is output each time the inspection object 1 moves a predetermined distance. In FIG. 1, the traveling direction is taken as the Y direction, and the direction perpendicular to the traveling direction is taken as the X direction. The encoder (1) 2 and the encoder (2) 6 each have, for example, a rotating portion for converting the horizontal displacement of the transport target carrying the inspection object 1 or the inspection object 1 into displacement of a rotation angle, It can be an incremental type rotary encoder that generates a pulse signal each time it rotates. For example, the moving speed of the inspection object 1 can be detected from the time interval when the pulse signal is output from the encoder (1) 2 and the encoder (2) 6, and the moving amount can be detected by counting the number of pulses. Can.

  In addition, the encoder (1) 2 (first movement amount detection unit) is a movement amount of the inspection object 1 before the accumulator 4 (inspection object storage portion) with respect to the traveling direction (conveyance direction) of the inspection object 1 (1st movement amount) is detected. The encoder (2) 6 (second movement amount detection unit) detects the movement amount (second movement amount) of the inspection object 1 later than the accumulator 4. In the present embodiment, it is assumed that the encoder (1) 2 and the encoder (2) 6 have the same correspondence between the movement distance and the number of pulses. However, in the encoder (1) 2 and the encoder (2) 6, the correspondence relationship between the movement distance and the number of pulses may be different from each other.

  In the present embodiment, the inspection object 1 is made of a long strip-like metal plate, a film, a cloth, a non-woven fabric, a resin plate or the like, and in the traveling direction indicated by the arrow on a transport line not shown. It is transported. For defect inspection using the defect inspection apparatuses 100a, 100b and 100c, for example, a film made of a metal plate such as a steel plate, a plated steel plate, a pickled steel plate, a coated steel plate, a copper plate, an aluminum plate or resin is suitably used. .

  The optical system detection unit (1) 3 (first optical system) and the optical system detection unit (2) 5 (second optical system) include a line sensor, linear illumination, and a control unit. The line sensor is a line-like optical sensor disposed so that the longitudinal direction of the imaging range is orthogonal to the traveling direction of the inspection object 1. The line sensor receives the reflected light or the transmitted light of the linear illumination from the inspection object 1, and the intensity distribution of the reflected light or the transmitted light of the inspection object 1 for each line orthogonal to the traveling direction of the inspection object 1 Output the corresponding image signal. As the line sensor, for example, a CMOS image sensor having 8192 elements (number of pixels) is used. On the other hand, line-shaped illumination is arranged in a linear illumination device which is disposed so that the longitudinal direction of the irradiation range of light on the inspection object 1 is orthogonal to the traveling direction of the inspection object 1 and illuminates the entire width of the inspection object 1 It is. The linear illumination is configured using, for example, an LED (light emitting diode), a fluorescent lamp, a rod illumination, an optical fiber illumination, and the like. For example, by arranging both the line sensor and the line-shaped illumination on the surface side of the inspection object 1, the reflected light of the line-shaped illumination can be imaged by the line sensor. Alternatively, the line sensor may be disposed on the back side of the inspection object 1, and light may be emitted from the back of the inspection object 1, and the transmission light may be received by the line sensor. Further, the line sensor and the line-shaped illumination may be arranged, for example, at a predetermined distance in the traveling direction and at a predetermined angle with respect to the inspection object 1.

  Further, the optical system detection unit (1) 3 is disposed at a position at which the inspection object 1 is imaged before the accumulator 4 with respect to the movement direction of the inspection object 1. The optical system detection unit (1) 3 also receives the count value of the pulse signal output from the encoder (1) 2 and the coordinate value in the Y direction based on the count value input for each pixel of the captured image. The signals to be represented are correlated and output. The optical system detection unit (2) 5 is disposed at a position at which the inspection object 1 is imaged after the accumulator 4 in the moving direction of the inspection object 1. The optical system detection unit (2) 5 receives the count value of the pulse signal output from the encoder (2) 6 and inputs the coordinate value in the Y direction based on the count value input for each pixel of the captured image. The signals to be represented are correlated and output.

  The configurations of the optical system detection unit (1) 3 and the optical system detection unit (2) 5 are not limited to those described above. The optical system detection unit (1) 3 and the optical system detection unit (2) 5 capture an image in synchronization with the movement of the inspection object 1, and control unit 22a or control unit 22b that inputs and processes the captured image. In the above, any configuration may be used as long as the correspondence between each image and the position of the inspection object 1 can be grasped. For example, in the control unit 22a or 22b, the correspondence between each imaging timing of the optical system detection unit (1) 3 and the count value of the encoder (1) 2 or each imaging of the optical system detection unit (2) 5 If the correspondence relationship between the timing and the count value of the encoder (2) 6 can be grasped, the optical system detection unit (1) 3 and the optical system detection unit (2) 5 output the value of the Y coordinate corresponding to each pixel You do not have to.

  The accumulator 4 is a facility having the same configuration as the looper 44a and the looper 44b described with reference to FIG. 12, and has a function of storing the inspection object 1 while changing the storage amount. In the present embodiment, the accumulator 4 temporarily stops the inspection object 1 to stop the inspection object 1 when cutting the inspection object 1 at the cutting position 80 shown in FIGS. 1 (a) to 1 (c). Operated to store.

  Further, as shown in FIG. 2 or 3, the accumulator 4 outputs an accumulator 0 signal to the control unit 22a or 22b. The accumulator 0 signal is a signal indicating the operating state of the accumulator 4. If the accumulator 4 is not in operation, the accumulator 4 turns on the accumulator 0 signal and outputs it. Here, the case where the accumulator 4 is not in operation is the case where the storage amount of the inspection object 1 does not change at zero or a predetermined amount or less (for example, the minimum amount). Also, when the accumulator 4 is in operation, the accumulator 4 is operating to change the storage amount of the inspection object 1, or the accumulator 4 is larger than a predetermined amount and the inspection object 1 is stored. If you are When the accumulator 4 is in operation, the accumulator 4 turns off the accumulator 0 signal and outputs it.

  When the accumulator 0 signal is ON, the storage amount of the inspection object 1 is zero or does not change, so if there is no detection error, the speed of the inspection object 1 detected by the encoder (1) 2 and the encoder (2) 6 The speed of the inspection object 1 detected by the same is the same. Similarly, when the accumulator 0 signal is ON, if there is no detection error, the movement amount per unit time of the inspection object 1 detected by the encoder (1) 2 and the inspection object detected by the encoder (2) 6 The moving amount per unit time of the object 1 is the same.

  On the other hand, when the accumulator 0 signal is OFF, the speed of the inspection object 1 detected by the encoder (1) 2 may be different from the speed of the inspection object 1 detected by the encoder (2) 6. When the accumulator 0 signal is OFF, the movement amount per unit time of the inspection object 1 detected by the encoder (1) 2 and the movement amount per unit time of the inspection object 1 detected by the encoder (2) 6 May differ. When the accumulator 0 signal is OFF, the accumulator 4 is detected based on the difference between the movement amount of the inspection object 1 detected by the encoder (1) 2 and the movement amount of the inspection object 1 detected by the encoder (2) 6 It is possible to calculate the length (storage amount) of the inspection object 1 stored in the storage area.

  FIG. 6 is a diagram for explaining the speed fluctuation of the inspection object 1 detected by the encoder (1) 2 and the encoder (2) 6 when the accumulator is in operation. The horizontal axis in FIG. 6 is the elapsed time, and the vertical axis is the traveling speed of the inspection object 1. When the accumulator 0 signal is ON, the traveling speed detected by the encoder (1) 2 and the traveling speed detected by the encoder (2) 6 are the same. On the other hand, when the accumulator 0 signal is OFF, the traveling speed detected by the encoder (1) 2 does not change, but the traveling speed detected by the encoder (2) 6 changes as follows. That is, after the accumulator 0 signal changes from ON to OFF, the traveling speed of the inspection object 1 detected by the encoder (2) 6 decreases. Then, after the inspection object 1 is stopped, the cut signal is input, and the inspection object 1 is cut. After that, the traveling speed of the inspection object 1 detected by the encoder (2) 6 accelerates and becomes higher than the traveling speed detected by the encoder (1) 2, and then returns to the same speed.

  A marker 7 shown in FIG. 1 is a pen, an IJP (Ink Jet Printer), a laser marker or the like, and is controlled by the control unit 22a or the control unit 22b shown in FIG.

  In the defect inspection apparatus 100a shown in FIG. 1A, the optical system detection unit (1) 3 is disposed at the position of the movement distance L1 in the Y direction from the predetermined reference position. Further, the accumulator 4 is disposed at the position of the movement distance L2. Moreover, the marker 7 is arrange | positioned in the position of the movement distance L4. Further, the position of the movement distance L5 is the cut position 80 of the inspection object 1. The movement distance L4, the movement distance L5, and the movement distance L3 described later change depending on the storage amount of the inspection object 1 in the accumulator 4.

  Further, in the defect inspection apparatus 100b shown in FIG. 1B, the optical system detection unit (1) 3 is disposed at the position of the moving distance L1 in the Y direction from the predetermined reference position. Further, the accumulator 4 is disposed at the position of the movement distance L2. In addition, the optical system detection unit (2) 5 is disposed at the position of the movement distance L3. Moreover, the marker 7 is arrange | positioned in the position of the movement distance L4. Further, the position of the movement distance L5 is the cut position 80 of the inspection object 1.

  Further, in the defect inspection apparatus 100c shown in FIG. 1 (c), in comparison with the defect inspection apparatus 100b shown in FIG. 1 (b), between the optical system detection unit (1) 3 and the optical system detection unit (2) 5 The pass line has been changed. In the defect inspection apparatus 100c, the optical system detection unit (1) 3 is disposed at the position of the movement distance L1c in the Y direction from the predetermined reference position. Further, the accumulator 4 is disposed at the position of the movement distance L2c. The optical system detection unit (2) 5 is disposed at the position of the movement distance L3c. Further, the marker 7 is disposed at the position of the movement distance L4c. Further, the position of the movement distance L5c is the cut position 80 of the inspection object 1.

  Next, a configuration example of the control unit 22a or the control unit 22b that controls each unit in the defect inspection apparatus 100a, 100b or 100c shown in FIG. 1 will be described with reference to FIG. 2 or 3. The control unit 22a or the control unit 22b is, for example, a computer, includes a CPU (central processing unit), a main storage device, an auxiliary storage device, an input / output device, a communication device, etc., and operates by executing a predetermined program by the CPU. Do. In the configuration example shown in FIG. 2, the control unit 22a includes a defect detection unit (1) 25, a counter unit (1) 12, a counter unit (2) 13, a correction amount calculation unit 14, a Y coordinate conversion unit 17, and a processing unit 20a. Equipped with In the configuration example shown in FIG. 3, the control unit 22 b includes a defect detection unit (1) 25, a defect detection unit (2) 26, a counter unit (1) 12, a counter unit (2) 13, a correction amount calculation unit 14, Y The coordinate conversion unit 17 and the processing unit 20b are provided.

  The counter unit (1) 12 counts the number of pulses of the pulse signal train output by the encoder (1) 2. The counter unit (2) 13 counts the number of pulses of the pulse signal train output by the encoder (2) 6. The count value of the counter unit (1) 12 and the count value of the counter unit (2) 13 are reset to 0 when the inspection start signal is input when the accumulator 0 signal is ON. The inspection start signal is a pulse signal generated when the inspection of the inspection object 1 is started.

  The defect detection unit (1) 25 detects a defect by performing image processing on an image signal associated with a signal representing a coordinate value in the Y direction from the optical system detection unit (1) 3, and a defect including a Y coordinate Output information The defect detection unit (2) 26 detects a defect by performing image processing on the image signal associated with the signal representing the coordinate value in the Y direction from the optical system detection unit (2) 5, and detects the defect Defect information including the Y coordinate obtained from the count value of 13 is output.

  While the accumulator 0 signal from the accumulator 4 is ON, the correction amount calculator 14 calculates the correction amount at predetermined intervals. Here, the predetermined interval may be, for example, a predetermined time interval, or an interval of a predetermined movement amount.

  When the accumulator 0 signal is ON, theoretically, the value of the counter unit (1) 12 and the value of the counter unit (2) 13 from the time when the inspection start signal is input change equally. That is, after the time when the inspection start signal is input, the movement amount of the inspection object 1 detected by the encoder (1) 2 and the movement amount of the inspection object 1 detected by the encoder (2) 6 are equal. For example, in the defect inspection apparatus 100b, after the time when the inspection start signal is input, the length (referred to as inspection length) of the inspection object 1 for which the optical system detection unit (1) 3 inspected the inspection object 1 The inspection lengths of the inspection object 1 by the system detection unit (2) 5 are equal. However, in practice, due to an error or the like of mechanical accuracy in the encoder (1) 2 or the encoder (2) 6, a deviation occurs between the value of the counter unit (1) 12 and the value of the counter unit (2) 13. That is, the Y coordinate obtained from the value of the counter unit (1) 12 counting the output pulse signal train of the encoder (1) 2 and the counter unit counting the output pulse signal train of the encoder (2) 6 2) The Y coordinate obtained from the value of 13 has a deviation due to an error. This deviation accumulates with the inspection length. Therefore, it is necessary to make corrections at predetermined intervals. The correction amount at the time of correcting this deviation is, for example, a value corresponding to the value (or its value) of the counter unit (1) 12 with reference to the value of the counter unit (2) 13 (or a value corresponding to that value). Can be a value for correcting. The correction amount calculation unit 14 calculates the correction amount of the value corresponding to the value of the counter unit (1) 12 on the basis of the value corresponding to the value of the counter unit (2) 13 using, for example, the following equation. Here, the value corresponding to the value of the counter unit (1) 12 is the Y coordinate obtained from the value of the counter unit (1) 12, and the value corresponding to the value of the counter unit (2) 13 is the counter unit (2) Y coordinate obtained from the value of 13.

  Correction amount = (Y coordinate obtained from the value of counter section (1) 12)-(Y coordinate obtained from the value of counter section (2) 13)

  The calculation of the correction amount by the correction amount calculation unit 14 is performed at predetermined intervals while the accumulator 0 signal is input. The calculated correction amount is updated to a new value at predetermined intervals while the accumulator 0 signal is ON. By using this correction amount, for example, the Y coordinate obtained from the value of the counter unit (1) 12 can be corrected to the Y coordinate obtained based on the value of the counter unit (2) 13. The Y coordinate is, for example, a coefficient representing the correspondence between the movement distance corresponding to one cycle of the change of the pulse signal of the encoder (1) 2 and the coordinate value of the Y coordinate. It can obtain | require by multiplying by count value. Alternatively, for the Y coordinate, for example, the value of the counter unit (2) 13 is multiplied by a coefficient representing the correspondence between the movement distance corresponding to one cycle of the change of the pulse signal of the encoder (2) 6 and the coordinate value of the Y coordinate. It can be determined by

  The Y coordinate conversion unit 17 uses the correction amount calculated by the correction amount calculation unit 14 to count the Y coordinate included in the defect information detected by the defect detection unit (1) 25 by the counter unit (2) 13 Convert to the reference Y coordinate. The Y coordinate conversion unit 17 uses, for example, the Y coordinate of the optical system detection unit (1) 3 as the reference value of the counter unit (2) 13 according to the following equation based on the correction amount calculated by the correction amount calculation unit 14 The coordinates are converted and input to the processing unit 20a or the processing unit 20b.

  (Y coordinate after correction of defect detection unit (1) 25) = (Y coordinate before correction of defect detection unit (1) 25) −correction amount

  Note that while the accumulator 4 is in operation, the accumulator 0 signal is turned OFF, and the correction amount calculation unit 14 does not calculate the correction amount. When the accumulator 0 signal is ON, the Y coordinate conversion unit 17 performs the above-mentioned Y coordinate conversion using the latest correction amount calculated by the correction amount calculation unit 14. The Y coordinate value obtained from the value of the counter unit (1) 12 in operation of the accumulator 4 is obtained by adding the accumulator amount (storage amount) to the Y coordinate value when the accumulator 0 signal is ON. Therefore, when the Y-coordinate conversion unit 17 performs the above-described Y-coordinate conversion, the Y-coordinate of the optical system detection unit (1) 3 becomes the Y-coordinate based on the value of the counter unit (2) 13 including the accumulator amount. It will be converted.

  For example, in the defect inspection apparatus 100b shown in FIG. 1B, in the processing unit 20b, the same determination of the defect detected by the defect detection unit (1) 25 and the defect detected by the defect detection unit (2) 26, specific range The defect distribution state such as the number of defects can be measured, marked, etc., but since the Y coordinate of the defect is aligned with the Y coordinate of the defect detection unit (2) 26, The impact can be ignored.

  Further, the processing unit 20b inputs from the Y-coordinate conversion unit 17 the defect information detected by the defect detection unit (1) 25 and the corrected Y-coordinate signal associated with the defect information from the defect detection unit (2 And 26) the defect information detected, the Y coordinate signal associated with the defect information, and the value of the counter section (2) 13 are input. The processing unit 20a also receives the defect information detected by the defect detection unit (1) 25 and the corrected Y coordinate signal associated with the defect information from the Y coordinate conversion unit 17, and the counter unit (2). Enter a value of 13. The processing unit 20a or the processing unit 20b can convert the value of the counter unit (2) 13 into a Y coordinate value using a predetermined coefficient. The corrected Y coordinate signal input to the processing unit 20a or 20b is corrected by the Y coordinate conversion unit 17 to a Y coordinate based on the count value of the counter unit (2) 13. Therefore, in the processing unit 20a or 20b, the Y-coordinates of all the defects are aligned with the Y-coordinate based on the count value of the counter unit (2) 13.

  The defect detection unit (1) 25 performs predetermined image processing based on the image captured by the optical system detection unit (1) 3, and a defect on the inspection object 1 based on the result of the image processing and the Y coordinate of the image. Calculate the coordinates of The defect detection unit (2) 26 performs predetermined image processing based on the image captured by the optical system detection unit (2) 5, and a defect on the inspection object 1 based on the result of the image processing and the Y coordinate of the image. Calculate the coordinates of That is, the processing unit 20a or the processing unit 20b is an image (first image) captured by the optical system detection unit (1) (first optical system) and a value (first movement) corresponding to the value of the counter unit (1) 12 The coordinates of the defect on the inspection object 1 are processed based on the value obtained by correcting the value corresponding to the amount by the correction amount. Further, the processing unit 20a or the processing unit 20b generates an image (first image) captured by the optical system detection unit (1) 3 based on the movement amount (second movement amount) based on the value of the counter unit (2) 13. The inspection length of the inspection object 1 based on the above is calculated.

  Further, the defect detection unit (2) 26 is based on the image (second image) captured by the optical system detection unit (2) 5 (second optical system) and the Y coordinate of the image (that is, the counter unit (2) 13). The coordinates of the defect on the inspection object 1 are calculated based on the value corresponding to the value of. At that time, the defect detection unit (2) 26 corresponds to, for example, the moving distance (L3-L1) between the optical system detection unit (2) 5 and the optical system detection unit (1) 3 from the Y coordinate value of the defect center. Subtract coordinate values. In this process, the processing unit 20b can match the defect coordinates detected by the defect detection unit (1) 25 with the defect coordinates detected by the defect detection unit (2) 26 for the same defect. In addition, the movement distance (L3-L1) at the time of calculating a Y coordinate becomes L3c-L1c in the defect inspection apparatus 100c shown in FIG.1 (c). That is, in the defect detection unit (2) 26, when the pass line is changed, the parameter used when calculating the Y coordinate of the defect detected based on the image captured by the optical system detection unit (2) 5 is changed Be done.

  Further, the processing unit 20 a or 20 b controls the marker 7 to perform marking at a position where a defect is detected on the inspection object 1. Further, the processing unit 20a or the processing unit 20b outputs, to the output unit 24, information indicating the coordinates of the defect. Here, the output unit 24 is, for example, a display device, a portable terminal, a printing device, or the like.

  Next, an operation example of the defect inspection apparatuses 100a, 100b and 100c shown in FIGS. 1 to 3 will be described with reference to FIG. FIG. 4 shows the flow of processing when the correction amount is calculated in the control unit 22a shown in FIG. 2 or the control unit 22b shown in FIG. After the defect inspection apparatus 100a, 100b or 100c starts operation, the processing shown in FIG. 4 is repeatedly executed for each inspection by the control unit 22a or the control unit 22b shown in FIG. When the process shown in FIG. 4 is started, the control unit 22a or the control unit 22b first determines whether the inspection start signal is turned on (step S102). When the inspection start signal is ON (in the case of "YES" in step S102), the control unit 22a or the control unit 22b resets both the counter unit (1) 12 and the counter unit (2) 13 to "0". (Step S103) Further, the correction amount is reset to "0" (step S104). If the inspection start signal is not ON (in the case of "NO" in step S102), the process waits until the inspection start signal is ON. Next, after calculating the correction amount last time (or after resetting the correction amount), the correction amount calculation unit 14 determines whether or not a predetermined interval has been reached (step S105). After calculating the correction amount last time (or after resetting the correction amount), if the predetermined interval is reached (in the case of “YES” in step S105), it is determined whether the accumulator 0 signal is ON (step S101). When the accumulator 0 signal is ON (in the case of “YES” in step S101), the correction amount calculation unit 14 uses the Y coordinate obtained from the value of the counter unit (2) 13 as a reference. The correction amount is calculated (updated) according to the Y coordinate obtained from the value and the Y coordinate obtained from the value of the counter section (1) 12 (step S106). On the other hand, if the predetermined interval has not been reached (in the case of "NO" in step S105), or if the accumulator 0 signal is not ON (in the case of "NO" in step S101), control unit 22a or control The unit 22b does not calculate (update) the correction amount. Next, it is determined whether the inspection stop signal is ON (step 107). When the inspection stop signal is ON, the control unit 22a or the control unit 22b ends the process. If the inspection stop signal is not ON, after calculating the correction amount last time (or after resetting the correction amount), the process returns to the determination (step S105) whether or not a predetermined interval has been reached.

  After calculating the correction amount last time (or after resetting the correction amount) as described above, it is judged whether the predetermined interval has been reached (step S105) to the calculation (update) of the correction amount (step S106) The correction amount calculation unit 14 updates the correction amount at a predetermined interval while the accumulator 0 signal is ON, by repeatedly executing the process at a predetermined cycle until the stop signal is turned ON (step 107).

  Next, with reference to FIG. 5A, an operation example of the defect inspection apparatus 100a shown in FIGS. 1 and 2 will be described. FIG. 5A shows the flow of processing for calculating the coordinates of the defect on the inspection object 1 and the inspection length in the control unit 22a shown in FIG. The process shown in FIG. 5A is repeatedly executed in a predetermined cycle by the control unit 22a shown in FIG. 2 after the defect inspection apparatus 100a starts its operation. When the process shown in FIG. 5A is started, the defect detection unit (1) 25 first performs predetermined image processing on the captured image of the input optical system detection unit (1) 3 and the result of the image processing It is determined whether or not a defect has been detected based on (step S201). When it is determined that a defect is detected (in the case of “YES” in step S201), the processing unit 20a causes the Y-coordinate conversion unit 17 to convert the Y coordinate associated with the defect detected by the defect detection unit (1) 25. Processing is performed based on the corrected Y coordinate corrected using the correction amount calculated in step S105 of FIG. 4 (step S202). In step S202, the processing unit 20a stores the processed defect in a predetermined storage area. When the defect detection unit (1) 25 does not determine that a defect is detected (in the case of “NO” in step S201), or when the defect is processed in step S202, the processing unit 20a 2) Calculate the inspection length based on the value of 13 (step S203). Here, the control unit 22a ends one process.

  By the above processing, the defect inspection apparatus 100a can correct the Y coordinate based on the detection result of the encoder (1) 2 using the correction amount based on the detection result of the encoder (2) 6. Further, the defect inspection apparatus 100a can calculate the inspection length based on the detection result of the encoder (2) 6.

  Next, with reference to FIG. 5B, an operation example of the defect inspection apparatuses 100b and 100c shown in FIGS. 1 and 3 will be described. FIG. 5B shows a flow of processing the coordinates of the defect on the inspection object 1 and the inspection length in the control unit 22b shown in FIG. The process shown in FIG. 5B is repeatedly executed in a predetermined cycle by the control unit 22b shown in FIG. 3 after the defect inspection apparatus 100b or 100a starts operation. Steps S201 to S203 in the process shown in FIG. 5 (b) are the same as steps S201 to S203 in the process shown in FIG. 5 (a). After starting the process shown in FIG. 5B and performing the processes of steps S201 to S202, the defect detection unit (2) 26 performs a predetermined process on the input captured image of the optical system detection unit (2) 5. Image processing is performed, and it is determined whether or not a defect is detected based on the result of the image processing (step S204). In step S204, the defect detection unit (2) 26 corresponds to, for example, the movement distance (L3-L1) between the optical system detection unit (2) 5 and the optical system detection unit (1) 3 from the Y coordinate value of the defect center. Subtract coordinate values. When it is determined that a defect is detected (in the case of “YES” in step S204), the processing unit 20b performs processing based on the Y coordinate associated with the defect detected by the defect detection unit (2) 26 (step S205). ). Further, the processing unit 20b stores the processed defect in a predetermined storage area. When it is not determined that a defect is detected (in the case of “NO” in step S204) or when a defect is processed in step S205, the processing unit 20b checks the inspection length based on the value of the counter unit (2) 13 Are calculated (step S203). Further, the processing unit 20b outputs the defect by the defect detection unit (1) 25 (when “YES” in step S201) and the defect by the defect detection unit (2) 26 (when “YES” in step S204). Output (step S206). Here, the control unit 22b ends the process.

  By the above processing, the defect inspection apparatuses 100b and 100c can correct the Y coordinate based on the encoder (1) 2 using the correction amount based on the encoder (2) 6. The defect inspection apparatuses 100 b and 100 c can calculate the inspection length based on the encoder (2) 6. Further, the defect inspection apparatuses 100b and 100c can detect a defect based on the image captured by the optical system detection unit (2) 5, and calculate the Y coordinate of the defect based on the encoder (2) 6.

  FIG. 7 is a diagram for explaining the timing at the start of the inspection in the defect inspection apparatus 100b shown in FIG. 1 (b). In the operation example shown in FIG. 7, in the defect inspection apparatus 100b, detection of a defect using the optical system detection unit (1) 3 and detection of a defect using the optical system detection unit (2) 5 are performed on the inspection object 1 This is an example starting from the same position above. When the inspection start signal is input, the defect inspection apparatus 100b resets the values of the counter unit (1) 12 and the counter unit (2) 13, and starts an inspection using the optical system detection unit (1) 3. The defect inspection apparatus 100b starts an inspection using the optical system detection unit (2) 5 after the inspection object 1 travels along (L3-L1). The Y coordinate of the defect when the defect is detected by the defect detection unit (1) 25 using the optical system detection unit (1) 3 is obtained from the counter value of the counter unit (1) 12 at the defect center position. The Y coordinate of the defect when the defect is detected by the defect detection unit (2) 26 using the optical system detection unit (2) 5 is from the Y coordinate obtained from the counter value of the counter unit (2) 13 at the defect center position. It is obtained by subtracting (L3-L1). In this process, defects at the same position of the inspection object 1 have the same Y coordinate.

  At this time, when the accumulator 0 signal is ON, the traveling speed of the optical system detection unit (1) 3 and the traveling speed of the optical system detection unit (2) 5 are the same, but a slight deviation occurs. The value of encoder (1) 2 is updated to the correction amount for correcting the value of encoder (2) 6 every time When the accumulator 0 signal is OFF, the traveling speed of the optical system detection unit (1) 3 and the traveling speed of the optical system detection unit (2) 5 are different, and the above correction is not updated.

  Moreover, FIG. 8 is a figure for demonstrating an example of the timing at the time of the cut process in the defect inspection apparatus 100b shown in FIG.1 (b). In the defect inspection apparatus 100b, when the cut signal described with reference to FIG. 6 is input, the downstream of the cut position 80 can be a product. The inspection of the optical system detection unit (1) 3 has already been performed for L1 to L5, and the inspection of the optical system detection unit (2) 5 has been performed for L3 to L5. Since this inspection data is the start position of the next product, the inspection data is moved. L3 to L5 have a fixed length, but L1 to L5 change according to the state of accumulator 4, so Y coordinate and encoder (1) based on encoder (2) 6 in L1 to L5 when accumulator 0 signal is ON This can be calculated by adding the difference between the Y coordinate based on 2 and the Y coordinate corrected by the correction amount.

  Further, FIG. 9 is a diagram for explaining an example of timing when inspection is stopped in the defect inspection apparatus 100b shown in FIG. 1 (b). When the inspection stop signal is input, the defect inspection apparatus 100b stops the inspection of the optical system detection unit (1) 3 and after the inspection object 1 travels (L3-L1), the optical system detection unit (2) 5 Stop the examination of

  In the defect inspection apparatus 100c shown in FIG. 1 (c), the pass line is changed with respect to the defect inspection apparatus 100b shown in FIG. 1 (b). Therefore, the timings shown in FIGS. 8 and 9 can be made similar to the above by setting the flow direction position of each inspection optical system in advance.

  As described above, the defect inspection apparatuses 100a, 100b and 100c of the present embodiment have the following configuration. That is, the defect inspection apparatuses 100a, 100b and 100c are provided with an optical system detection unit (1) 3 (inspection optical system) in front of the accumulator 4, an encoder (1) 2 for detecting displacement of the inspection object 1 before and after the accumulator 4 When the encoder (2) 6 and the accumulator 0 signal are input and the accumulator 0 signal is ON, the value of the encoder (1) 2 before the accumulator 4 is corrected to the value of the encoder (2) 6 after the accumulator 4 And a correction amount calculation unit that calculates the correction amount. The defect inspection apparatuses 100a, 100b and 100c process the defect Y coordinate based on the encoder (1) 2 in front of the accumulator 4 with a value corrected by the correction amount. The defect inspection apparatuses 100a, 100b and 100c calculate the inspection length using the value based on the encoder (2) 6 after the accumulator 4. Further, the defect inspection apparatuses 100b and 100c process the defect Y coordinate with a value based on the encoder (2) 6 after the accumulator 4. When there is a change in the pass line, such as from the defect inspection apparatus 100b to the defect inspection apparatus 100c, the flow direction position of each inspection optical system is set in advance to correspond to the change in the pass line. It can be corrected.

According to this embodiment, even when the accumulator 4 (or looper) is in operation, the flow direction position (Y coordinate) before and after the accumulator 4 can be accurately determined, and the following object can be achieved.
1) Increase the accuracy of the defect coordinates of the wound film (defect inspection apparatuses 100a, 100b and 100c).
2) It can be determined that the defects detected by the optical system before and after the accumulator are the same defect (defect inspection apparatuses 100b and 100c).

Example 1
The inspection was performed with the arrangement of the defect inspection apparatus 100 b of FIG. 1 (b). The inspection object is as shown in FIG. That is, the inspection object was a film having a width of 1200 mm, and the conveyance speed was 0 to 40 m / min. The apparatus configuration is two as shown in FIG. That is, the optical system detection unit (1) 3 is a reflection type, and the optical system detection unit (2) 5 is a transmission type. The line-shaped illumination device was an LED illumination device (manufactured by Mec Co., Ltd.), and the line sensor was an 8192 element line sensor (manufactured by Mec Co., Ltd.) with a resolution of 50 × 50 μm / pixel. The inspection apparatus main body is LSC-6000 (manufactured by MEC Corporation), the encoder (1) 2 and the encoder (2) 6 are rotary encoders of 0.05 mm / scan, and the operating range of the accumulator 4 is 10 m. When the coordinates at which the same defect was detected by the optical system detection unit (1) 3 and the optical system detection unit (2) 5 were confirmed, the Y coordinate was detected within 10 mm and the X coordinate was detected within 1 mm.

  The embodiment of the present invention has been described in detail with reference to the drawings, but the specific configuration is not limited to this embodiment, and includes design and the like within the scope of the present invention. For example, the processing unit 20 a or 20 b shown in FIG. 2 or 3 may include the Y coordinate conversion unit 17 or may include the correction amount calculation unit 14.

1: Inspection object 2: Encoder (1)
3: Optical system detection unit (1)
4: Accumulator 5: Optical system detector (2)
6: Encoder (2)
7: Marker 12: Counter section (1)
13: Counter part (2)
14: correction amount calculation unit 17: Y coordinate conversion unit 20a, 20b: processing unit 22a, 22b: control unit 24: output unit 25: defect detection unit (1)
26: Defect detection unit (2)
80: Cut position 100a, 100b, 100c: Defect inspection device

In order to solve the above-mentioned subject, one mode of the present invention is a device which inspects a defect of the inspection subject which is conveyed on a conveyance part provided with an inspection subject storage part which stores an inspection subject, and starts inspection When the first movement amount detection unit, the counter unit that resets the second movement amount detection unit, and the first inspection object before the inspection object storage unit in the conveyance direction of the inspection object an optical system, said first moving amount detection unit for detecting a first movement of the test object in front than the inspection target substance reservoir, a second said object substance reservoir later the test object from said second moving amount detection unit for detecting a moving amount based on the prior SL first image and the first moving amount by the first optical system is captured, processing the coordinates of the defect on the inspection object, said first based on the second movement amount, a processing unit for calculating a test length of said inspection object, said If査target substance reservoir is not running, a defect inspection apparatus comprising, a correction amount calculation unit for calculating a correction amount of the first moving amount based on the second movement amount.

Further, one aspect of the present invention is a method of inspecting a defect of the inspection object transported on a transport unit including an inspection object storage unit for storing an inspection object, the counter unit being configured to start the inspection. The first movement amount detection unit and the second movement amount detection unit are reset, and the first optical system images the inspection object before the inspection object storage unit in the conveyance direction of the inspection object. , by the first moving amount detection unit detects the first moving amount of the inspection object at a prior said object substance reservoir, by the second movement amount detection unit later than the inspection target substance reservoir detecting the second movement amount of the inspection object, the processing unit, based on prior Symbol first image and the first moving amount by the first optical system is captured, processing the coordinates of the defect on the inspection object The inspection length of the inspection object based on the second movement amount Calculated and, by the correction amount calculation unit, when the inspection target reservoir is not running, a defect inspection method for calculating a correction amount of the first moving amount based on the second movement amount.

In order to solve the above-mentioned subject, one mode of the present invention is the above-mentioned inspection conveyed on a conveyance part provided with a test object storage part which stores a test object which is a film which consists of a metal plate and resin whose property is continuous. An apparatus for inspecting a defect of an object, wherein the first movement amount detection unit, the counter unit resetting the second movement amount detection unit at the start of the inspection, and the inspection object in the transport direction of the inspection object A first optical system that images the inspection object before the storage unit; a first movement amount detection unit that detects a first movement amount of the inspection object before the inspection object storage unit; and the inspection The inspection based on the second movement amount detection unit that detects the second movement amount of the inspection object later than the object storage unit, the first image captured by the first optical system, and the first movement amount Processing the coordinates of the defect on the object, based on the second movement amount A processing unit for calculating a test length of the inspection object, if the said object substance reservoir is not running, calculates a correction amount of the first moving amount based on the second movement amount, said object While the object storage unit is in operation, the first movement amount is calculated using the correction amount calculated when the inspection object storage unit is not operating without calculating the correction amount of the first movement amount. Alternatively, the defect inspection apparatus may include a correction amount calculation unit that corrects a value corresponding to the first movement amount .

Further, according to an aspect of the present invention, there is provided a defect of the inspection object transported on a transport unit including an inspection object storage unit for storing an inspection object that is a film made of a metal plate or resin having continuous properties. The inspection method, wherein the first movement amount detection unit and the second movement amount detection unit are reset by the counter unit at the start of the inspection, and the inspection is performed in the transport direction of the inspection object by the first optical system. The inspection object is imaged before the object storage unit, and the first movement amount detection unit detects a first movement amount of the inspection object before the inspection object storage unit, and the second movement is performed. The amount detection unit detects the second movement amount of the inspection object later than the inspection object storage unit, and the processing unit detects the first image captured by the first optical system and the first movement amount. Processing the coordinates of defects on the inspection object, The inspection length of the inspection object is calculated based on the second movement amount, and the correction amount calculation unit calculates the first movement based on the second movement amount when the inspection object storage unit is not in operation. The correction amount of the amount is calculated, and the correction amount of the first movement amount is calculated while the inspection object storage unit is not in operation while the inspection object storage unit is in operation. According to the defect inspection method, the first movement amount or a value corresponding to the first movement amount is corrected using the correction amount .

Claims (5)

An apparatus for inspecting a defect of the inspection object transported on a transport unit including an inspection object storage unit storing an inspection object,
A first optical system for imaging the inspection object before the inspection object storage unit in the transport direction of the inspection object;
A first movement amount detection unit that detects a first movement amount of the inspection object before the inspection object storage unit;
A second movement amount detection unit that detects a second movement amount of the inspection object later than the inspection object storage unit;
When the inspection object storage unit is not in operation, the correction amount of the first movement amount or the value corresponding to the first movement amount is set based on the second movement amount or a value corresponding to the second movement amount. A correction amount calculation unit to calculate
Processing a coordinate of a defect on the inspection object based on a first image captured by the first optical system and a value obtained by correcting the first movement amount or a value corresponding to the first movement amount using the correction amount A defect inspection device comprising a part. The defect inspection apparatus according to claim 1, wherein the processing unit calculates an inspection length of the inspection object based on the second movement amount. It further comprises a second optical system for imaging the inspection object later than the inspection object storage section in the transport direction of the inspection object,
The defect according to claim 1 or 2, wherein the processing unit processes the coordinates of the defect based on a second image captured by the second optical system and the second movement amount or a value corresponding to the second movement amount. Inspection device. The defect inspection apparatus according to claim 3, wherein the processing unit processes the coordinates of the defect using a value set based on a distance in the transport direction between the first optical system and the second optical system. A method of inspecting a defect of the inspection object transported on a transport unit including an inspection object storage unit storing an inspection object,
The first optical system captures an image of the inspection object before the inspection object storage unit in the transport direction of the inspection object;
The first movement amount detection unit detects a first movement amount of the inspection object before the inspection object storage unit,
The second movement amount detection unit detects a second movement amount of the inspection object later than the inspection object storage unit,
The correction amount calculation unit copes with the first movement amount or the first movement amount based on the second movement amount or a value corresponding to the second movement amount when the inspection object storage unit is not in operation. Calculate the correction amount of the
The coordinates of the defect on the inspection object based on the first image captured by the first optical system and the first movement amount or a value corresponding to the first movement amount corrected by the correction amount by the processing unit. How to handle defect inspection methods.

Images