JP2019036659A - Cutting method - Google Patents

Abstract

To provide a cutting method capable of more reducing processing time.SOLUTION: A cutting method comprises: a cutting height positioning step of positioning a cutting blade 33 to a predetermined height to be cut at a start point P1 of a plate-like workpiece W; a cutting step of cutting the plate-like workpiece W with the cutting blade 33 and forming a cutting groove G; a cutting blade rising step of moving the cutting blade 33 to the start point P1 from an end point E1 of the cutting groove G while rising the cutting blade 33 which reaches to the end point E1; and an index feeding step of feeding the cutting blade 33 to a sequential division line S after a lower end 33a of the cutting blade 33 is positioned at a portion upper than a front surface Wa of the plate-like workpiece W in the cutting blade rising step, and positioning the cutting blade 33 to an upper direction of a sequential start point P2. Since a configuration is constituted so as to repeat the cutting height positioning step to the index feeding step, processing time can be more reduced.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a cutting method for cutting a plate-shaped workpiece.

  In a cutting apparatus that cuts a plate-like workpiece having a division line, the plate-like workpiece can be held by a holding table, and the plate-like workpiece can be cut along the division line while rotating the cutting blade in a certain direction. . When starting the cutting of the plate-shaped workpiece, the cutting feed direction of the cutting blade and the extending direction of the division planned line are positioned in parallel. Then, the cutting blade is positioned at a predetermined cutting height at the starting point of the division line to start cutting with the cutting blade, and the cutting blade and the holding table are moved relative to each other, thereby ending the plate-like workpiece through the starting point. The plate-like workpiece is cut by moving the cutting blade toward the head (for example, see Patent Document 1 below).

  When the cutting blade reaches the end point, the cutting blade is raised and the lower end of the cutting blade is positioned above the upper surface of the plate workpiece, and then the cutting blade is indexed in the direction perpendicular to the cutting feed direction to It is moved to the start point of the line to be divided. In other words, since the cutting blade is cut and fed in the same direction for each line, when the cutting blade reaches the end point, the cutting blade is raised, and then the cutting blade is indexed and the next scheduled division line Is moved in the direction opposite to the cutting feed direction toward the starting point. Thus, according to the cutting method of Patent Document 1, since the index feed of the cutting blade and the return movement in the direction opposite to the cutting feed direction can be performed simultaneously, the plate-like workpiece can be cut efficiently.

Japanese Patent Application Laid-Open No. 2015-076561

  However, even with the above cutting method, when the cutting blade reaches the end point from the start point, the cutting blade is raised, and then the index feed of the cutting blade and the return movement in the reverse direction of the cutting feed direction are performed. Processing time is required. In particular, since the laminated plate-like workpieces are thick, the amount of movement for raising the cutting blade that has reached the end point is increased, which requires more processing time. Therefore, further time reduction is eagerly desired.

  This invention is made | formed in view of said situation, and it aims at providing the cutting method of the plate-shaped workpiece | work which can shorten processing time more.

The present invention relates to a cutting method in which a cutting blade is moved to a starting point and an ending point of a divisional work line of a plate-like workpiece having a divisionation line, and the cutting is performed at the starting point of the plate-like work held by a holding table. After performing the cutting height positioning step for positioning the cutting blade at a predetermined height and the cutting height positioning step, the cutting blade is moved from the start point to the end point to cut the plate workpiece and cut A cutting step for forming a groove, and after the cutting step is performed, the cutting blade is moved from the end point of the cutting groove formed in the cutting step toward the start point while raising the cutting blade reaching the end point. The cutting blade ascending process to be moved, and when the lower end of the cutting blade is positioned above the upper surface of the plate-like workpiece in the cutting blade ascending process, the cutting blade is scheduled to be divided next time An index feed step for positioning the cutting blade above the starting point of the next division line and an index feed step in the next division line, and a plate shape held by the holding table repeatedly from the cut height positioning step to the index feed step Cutting the workpiece.
In the cutting blade raising step, the cutting blade may be moved from the end point to the starting point while raising the cutting blade reaching the end point and tracing the cutting groove formed in the cutting step with the cutting blade.

  In the index feeding step, in the movement of the cutting blade to the start point of the next division line, when the center of the cutting blade passes the outer peripheral edge of the plate-like workpiece, the cutting blade starts to be lowered and the cutting height It is desirable to start the positioning process.

  The plate-like workpiece to be machined according to the present invention may be provided with division scheduled lines having different angles for each line. In this case, the index feeding step may include an angle adjusting step of rotating the holding table so that the cutting feed direction of the cutting blade is parallel to the extending direction of the next division line. desirable.

  The cutting method according to the present invention includes a cutting height positioning step for positioning the cutting blade at a predetermined height at which the cutting blade is cut at the starting point of the plate-like workpiece held by the holding table, and the cutting blade is moved from the starting point to the end point. A cutting process for forming a cutting groove by cutting the cutting blade, a cutting blade raising process for moving the cutting blade from the end point of the cutting groove formed in the cutting process toward the starting point while raising the cutting blade reaching the end point, and the cutting blade When the lower end of the cutting blade is positioned above the upper surface of the plate-like workpiece in the ascending process, the cutting blade is indexed to the next division line, and the cutting blade is positioned above the starting point of the next division line. And repeatedly hold the tape from the notch height positioning process to the index feeding process. As the cutting blade is configured to cut the plate-like workpiece held by the blade, when the cutting blade reaches the end point from the start point, it is possible to simultaneously raise the cutting blade and return the cutting blade in the direction opposite to the cutting feed direction. Thus, the processing time can be further shortened.

  In the index feeding step, when the cutting blade moves to the start point of the next division line, when the center of the cutting blade passes the outer peripheral edge of the plate-like workpiece, the cutting blade is lowered and the cutting height positioning step is started. Since it comprised in this, the cutting process with respect to the following division | segmentation scheduled line can be implemented rapidly, and processing time can further be shortened.

  The plate-like workpiece to be machined according to the present invention may be provided with division-scheduled lines having different angles for each line. In this case, the index feeding step includes the cutting feed direction of the cutting blade, the following Since the angle adjustment step of rotating the holding table so as to be parallel to the extending direction of the division schedule line is included, even if it is a plate-like workpiece having an angular deviation between adjacent division lines, Cutting can be performed efficiently.

It is a perspective view which shows the structure of an example of the cutting device used for the 1st example of the cutting method. (A) is sectional drawing which shows a notch height positioning process. (B) is a top view which shows a notch height positioning process. (A) is sectional drawing which shows a cutting process. (B) is a top view which shows a cutting process. (A) is sectional drawing which shows a cutting blade raising process. (B) is a top view which shows a cutting blade raising process. It is a partially expanded sectional view explaining a cutting blade raising process. (A) is sectional drawing which shows an index feeding process. (B) is a top view which shows an index feeding process. It is a partially expanded sectional view explaining an index feeding process. (A) is sectional drawing which shows the cutting height positioning process with respect to the following division | segmentation scheduled line. (B) is a top view which shows the cutting height positioning process with respect to the following division | segmentation scheduled line. It is a top view which shows the state in which the cutting groove was formed along the division plan line after the 2nd. It is a perspective view which shows the structure of an example of the cutting device used for the 2nd example of the cutting method. It is a top view which shows the cutting height positioning process in a 2nd example. It is a top view which shows the cutting process in a 2nd example. It is explanatory drawing explaining the cutting method which cuts the plate-shaped workpiece | work provided with the division | segmentation planned line from which an angle differs for every line.

  A cutting apparatus 1 shown in FIG. 1 includes an apparatus base 11. On the apparatus base 11, a holding table 13 having a holding surface 14 a that holds a plate-like workpiece W that is a workpiece, and a holding table 13 are provided. A cutting feed means 20 for cutting and feeding in the cutting feed direction (+ X direction in the illustrated example) is provided.

  As shown in FIG. 2A, the holding table 13 includes a disk-shaped porous plate 14, and the upper surface of the porous plate 14 serves as a holding surface 14a. A suction source 16 is connected to the porous plate 14, and the plate-like workpiece W can be sucked and held by the holding surface 14a. Frame holding means 15 for holding the annular frame F is disposed on the outer peripheral side of the holding table 13. The frame holding unit 15 includes a frame mounting table 150 on which the frame F is mounted, and a clamp unit 151 that fixes the frame F mounted on the frame mounting table 150.

  1 includes a ball screw 21 extending in the X-axis direction, a motor 22 connected to one end of the ball screw 21, a pair of guide rails 23 extending in parallel with the ball screw 21, and a cutting feed. And a movable base 24 that can move horizontally in the direction. On the upper surface of the movable base 24, a rotation support base 17 that supports the holding table 13 is erected. A pair of guide rails 23 are in sliding contact with the lower surface of the moving base 24, and a ball screw 21 is screwed into a nut formed in the center of the moving base 24. When the ball screw 21 is rotated by being driven by the motor 22, the holding table 13 together with the moving base 24 can be cut and fed in the + X direction along the guide rail 23.

  On the path of the holding table 13 in the cutting feed direction, a cutting means 30 for cutting the plate-like workpiece W held on the holding table 13 and a camera 18 for imaging the plate-like workpiece W held on the holding table 13 from above. And. The cutting means 30 includes a spindle 31 having an axis in the rotation axis direction (Y-axis direction), a spindle housing 32 that rotatably surrounds the spindle 31, and a cutting blade 33 attached to the tip of the spindle 31. Yes. The cutting blade 33 can be rotated at a predetermined rotational speed by rotating the spindle 31 at a predetermined rotational speed by a motor (not shown). The camera 18 incorporates a CCD image sensor or a CMOS image sensor, for example. The camera 18 can detect an area to be cut of the plate-like workpiece W held on the holding table 13.

  On the upper surface of the apparatus base 11, index feed means 40 that feeds the cutting means 30 in the direction orthogonal to the cutting feed direction (Y-axis direction) is disposed. The index feeding means 40 includes a ball screw 41 extending in the Y-axis direction, a motor 42 connected to the tip of the ball screw 41, a pair of guide rails 43 extending in parallel to the ball screw 41, and the cutting means 30 in the Y-axis direction. And a movable column 44 having a substantially L-shaped cross section that is moved in the direction. A pair of guide rails 43 are in sliding contact with the lower part of the movable column 44, and a ball screw 41 is screwed to a nut formed at the center of the movable column 44. A spindle housing 32 held by the holder 12 is supported on the side surface of the movable column 44 via a cutting feed means 50. Then, the ball screw 41 is rotated by being driven by the motor 42, whereby the cutting means 30 can be indexed in the Y-axis direction together with the movable column 44.

  The cutting feed means 50 includes a ball screw 51 extending in the Z-axis direction, a motor 52 connected to one end of the ball screw 51, and a guide rail extending in parallel with the ball screw 51. When the ball screw 51 is rotated by being driven by the motor 52, the cutting means 30 can be cut and fed in the Z-axis direction together with the holder 12.

  The cutting apparatus 10 includes a control unit 19 that controls various drive mechanisms. The control means 19 is connected to the holding table 13, the camera 18, the cutting feed means 20, the cutting means 30, the index feed means 40, and the cutting feed means 50. The control means 19 has a storage element such as a CPU and a memory, and processing conditions and the like are stored in the memory.

[First example of cutting method]
Next, the 1st example of the cutting method which cuts the plate-shaped workpiece W using the cutting device 10 is demonstrated. The plate-like workpiece W is an example of a workpiece having a circular plate-like substrate, and includes a grid-like division planned line S on the upper surface (front surface Wa) of the substrate, and each divided by the division division line S. The device D is formed in the region. A tape T is attached to the back surface Wb opposite to the front surface Wa. When cutting the plate-like workpiece W, the plate-like workpiece W is formed integrally with the annular frame F via the tape T. Processing conditions are set in advance in the control means 19. The processing conditions include, for example, information on the plate-like workpiece W such as the diameter and thickness of the plate-like workpiece W, the number of division lines S and the length of each division line S in the extending direction, and cutting feed of the holding table 13. The speed, the cutting feed speed and cutting feed amount of the cutting blade 33, the index feed width of the cutting blade 33 in the Y-axis direction (interval between adjacent division lines S), and the like are included.

  First, the plate-like workpiece W integrated with the frame F is conveyed to the holding table 13 via the tape T. Specifically, the back surface Wb side of the plate-like workpiece W is placed on the holding surface 14 a of the holding table 13 via the tape T, and the frame F is placed on the frame placing table 150. As shown in FIG. 2A, the suction force of the suction source 16 acts on the holding surface 14 a to suck and hold the plate-like workpiece W, and the upper surface of the frame F is pressed and fixed by the clamp portion 151. Since the frame F is held at a position lower than the holding surface 14a of the holding table 13, it is possible to prevent the cutting blade 33 from coming into contact with the frame F during cutting.

(1) Cutting height positioning step After the plate-like workpiece W is held by the holding table 13, the holding table 13 is moved to the lower side of the cutting means 30 by the cutting feed means 20. At this time, by picking up an image of the plate-like workpiece W from above with the camera 18 shown in FIG. 1 and performing image processing such as pattern matching, the first division line S to start cutting with the cutting blade 33 is detected. The detection result is sent to the control means 19.

  As shown in FIG. 2B, the number of division lines S of the plate-like workpiece W shown in the present embodiment is, for example, six in the vertical direction and the horizontal direction, respectively, and in the X-axis direction on the lowest side in plan view. It is assumed that the planned division line S extending to the first division planned line S that starts cutting. The control means 19 calculates the coordinate positions of the start point P1 and the end point E1 of the detected division planned line S, respectively. The starting point P <b> 1 is a position spaced a predetermined distance from one end of the scheduled division line S where cutting with the cutting blade 33 starts. The end point E1 is a position separated from the other end of the scheduled division line S that has been cut through the plate-like workpiece W by the cutting blade 33 by a predetermined distance. The predetermined distance is not particularly limited, but may be set to a sufficient width so that the cutting blade 33 and the plate-like workpiece W do not come into contact with each other when the cutting blade 33 is lowered to the cutting height position.

  As shown in FIGS. 2A and 2B, the index feed means 40 aligns the cutting blade 33 and the starting point P1. That is, the index feed means 40 indexes the cutting means 30 in the Y-axis direction, thereby positioning the cutting blade 33 above the starting point P1. Next, the cutting feed means 50 lowers the cutting blade 33 in the −Z direction approaching the plate workpiece W, thereby cutting the cutting blade 33 at the start point P1 of the division line S of the plate workpiece W. Position it at height.

(2) Cutting Step After performing the cutting height positioning step, as shown in FIG. 3A, the cutting means 30 rotates the spindle 31 so that the cutting blade 33 is centered on the axis in the Y-axis direction. The cutting blade 33 is cut to a predetermined depth from the surface Wa side of the plate-like workpiece W while being rotated. The cutting feed means 20 moves the holding table 13 in the + X direction, for example, to move the cutting blade 33 from the start point P1 to the end point E1, as shown in FIG. The plate-like workpiece W is cut to form, for example, a cutting groove G in which the front and back surfaces of the plate-like workpiece W are fully cut (completely cut). The cutting groove G may be a groove that is half-cut at a depth that does not completely cut the plate-like workpiece W.

(3) Cutting blade raising process After performing the cutting process, as shown in FIGS. 4A and 4B, the cutting feed means 50 separates the cutting blade 33 that has reached the end point E1 from the plate-like workpiece W. The cutting blade 33 is moved from the end point E1 of the cutting groove G formed in the cutting process toward the start point P1 by moving the holding table 13 in the −X direction, for example, by the cutting feed means 20 while being raised in the + Z direction. When the cutting blade 33 moves from the end point E1 of the cutting groove G toward the starting point P1, the cutting blade 33 may be raised in the + Z direction while tracing the cutting groove G.

  Here, in the cutting blade ascending step, as shown in FIG. 5, the ascending operation of the cutting blade 33 and the returning operation in the direction opposite to the cutting feed direction (the moving operation of the holding table 13 in the −X direction) are performed simultaneously. The cutting blade 33 is moved to, for example, the position indicated by the leftmost two-dot chain line, and the lower end 33a of the cutting blade 33 is positioned above the surface Wa of the plate-like workpiece W. Note that when the cutting blade 33 is raised, the cutting blade 33 may come into contact with the end portion of the plate-like workpiece W, but the processing result is not adversely affected.

  In addition, after the first cutting groove G is formed in the cutting process, the control means 19 shown in FIG. 1 uses the diameter of the plate-like workpiece W stored in the memory and the index feed width as shown in FIG. The coordinate positions of the start point P2 and the end point E2 of the next division line S adjacent to the first division line S in which the cutting groove G shown in FIG.

(4) Index feeding step When the lower end 33a of the cutting blade 33 is positioned above the surface Wa of the plate-like workpiece W in the above-described cutting blade raising step, as shown in FIG. The cutting feed means 20 moves the holding table 13 in the -X direction while indexing the cutting means 30 in the Y-axis direction with a predetermined index feed width, and as shown in FIG. The position of the cutting blade 33 is aligned with the planned line S. Then, the cutting blade 33 is positioned above the start point P2 calculated by the control means 19 by the return operation of the holding table 13 in the -X direction.

  In the index feed process, the cutting blade 33 is moved down when the cutting blade 33 reaches a predetermined position in the movement of the cutting blade 33 to the start point P2 of the next division line S. Specifically, as shown in FIG. 7, the cutting blade 33 is lowered by the cutting feed means 50 at the timing when the center 330 of the cutting blade 33 passes at least the outer peripheral edge Wc of the plate-like workpiece W indicated by the one-dot chain line. For the first time, the above-described cutting height positioning process is started. Thereby, time until the cutting process of the next division | segmentation scheduled line S is started can be shortened.

  As shown in FIGS. 8A and 8B, the cutting feed means 50 lowers the cutting blade 33 in the −Z direction approaching the plate-like workpiece W, thereby holding the plate-like workpiece W held by the holding table 13. The cutting blade 33 is positioned at a predetermined height at which the cutting blade 33 is cut at the start point P2 of the scheduled division line S.

  As shown in FIG. 9, the cutting process for the start point P2 to the end point E2, the start point P3 to the end point E3, the start point P4 to the end point E4, the start point P5 to the end point E5, and the start point P6 to the end point E6 of the second and subsequent divisional lines S By cutting the plate-like workpiece W held by the holding table 13 repeatedly from the cutting height positioning process to the index feeding process, the cutting grooves G are formed along all the division lines S oriented in the X-axis direction. Thereafter, the holding table 13 is rotated by 90 ° so that the planned division line S oriented in the Y-axis direction is directed in the X-axis direction, and then the above-described cutting height positioning process to index feeding process are repeated to form a plate shape. The work W is divided into individual devices D.

Thus, in the cutting method according to the present invention, the cutting height positioning step for positioning the cutting blade 33 at the predetermined height at which the cutting blade 33 is cut at the starting point P1 of the plate-like workpiece W held by the holding table 13, and the cutting blade 33 are performed. From the cutting process of moving the starting point P1 to the end point E1 to cut the plate workpiece W to form the cutting groove G, and from the end point E1 of the cutting groove G formed in the cutting process while raising the cutting blade 33 reaching the end point E1 A cutting blade ascending step for moving the cutting blade 33 toward the starting point P1, and when the lower end 33a of the cutting blade 33 is positioned above the surface Wa of the plate-like workpiece W in the cutting blade ascending step, the cutting blade 33 is scheduled to be divided next. The index blade is fed to the line S and the cutting blade 33 is positioned above the starting point P2 of the next division line S. The cutting groove G is formed along the scheduled dividing line S because the plate-like workpiece W held by the holding table 13 is repeatedly cut from the cutting height positioning step to the index feeding step. Each time the cutting blade 33 is lifted and the cutting blade 33 is moved back in the direction opposite to the cutting feed direction, the processing time can be further shortened.
Further, according to the present invention, in the movement of the cutting blade 33 to the starting point P2 of the next division line S in the index feeding process, the cutting is performed when the center 330 of the cutting blade 33 passes the outer peripheral edge Wc of the plate-like workpiece W. Since the cutting height positioning process can be started by lowering the blade 33, the cutting process for the next division line S can be quickly performed, and the processing time can be further shortened.

  The cutting device used in the cutting method of the present invention is not limited to the cutting device 10 provided with the single-axis spindle 31, and may be, for example, a cutting device 10A shown in FIG. The cutting apparatus 10A has an apparatus base 11A. On the apparatus base 11A, a holding table 13A that holds a plate-like workpiece W, and a holding table 13A are cut and fed in a cutting feed direction (+ X direction in the illustrated example). A cutting feed means 60 is disposed. Frame holding means 15A for holding the frame F is disposed on the outer peripheral side of the holding table 13A.

  The cutting feed means 60 includes a ball screw 61 extending in the X-axis direction, a motor 62 connected to one end of the ball screw 61, a pair of guide rails 63 extending in parallel with the ball screw 61, and horizontally in the X-axis direction. And a movable base 64 that is movable. On the upper surface of the movable base 64, a rotation support base 17A that supports the holding table 13A is erected. A pair of guide rails 63 are in sliding contact with the lower surface of the moving base 64, and a ball screw 61 is screwed into a nut formed at the center of the moving base 64. The ball screw 61 is driven by the motor 62 to rotate, so that the holding table 13 </ b> A can be moved along the guide rail 63 in the + X direction together with the moving base 64.

  A portal column 110 is erected so as to straddle the cutting feed means 60 at the rear portion in the X-axis direction of the apparatus base 11A. On the side of the column 110, cutting means 70A and 70B for cutting the plate-like workpiece W, index feeding means 80A and 80A for index feeding the cutting means 70A and 70B in the indexing feeding direction (Y-axis direction), and cutting Cutting feed means 90A and 90B for cutting and feeding the means 70A and 70B in the Z-axis direction are provided.

  The cutting means 70A and 70B include a spindle 71 having an axis in the rotation axis direction (Y-axis direction), a spindle housing 72 that rotatably surrounds the spindle 71, and cutting blades 73a and 73b attached to the tips of the spindle 71. And. The cutting blades 73a and 73b can be rotated by rotating the spindle 71 with a motor (not shown). Cameras 18A and 18B for detecting a region to be cut of the plate-like workpiece W held on the holding table 13A are attached to the side portions of the respective spindle housings 72.

  The index feeding means 80A, 80B includes a ball screw 81 extending in the Y-axis direction, a motor 82 connected to the tip of the ball screw 81, a guide rail 83 extending parallel to the ball screw 81, and cutting means 70A, 70B. And a moving plate 84 that is moved in the Y-axis direction. Each guide rail 83 is in sliding contact with the side portion of the moving plate 84, and a ball screw 81 is screwed into a nut formed at the center of the moving plate 84. When the ball screw 81 is rotated by being driven by the motor 82, the cutting means 70A and 70B can be indexed in the Y-axis direction together with the moving plate 84.

  The cut-in feeding means 90A and 90B are attached to the moving plates 84, respectively. The incision feeding means 90A and 90B include a ball screw 91 extending in the Z-axis direction, a motor 92 connected to one end of the ball screw 91, a pair of guide rails 93 extending in parallel to the ball screw 91, and cutting means 70A, Elevating plates 94 that elevate and lower 70B in the Z-axis direction are provided. A pair of guide rails 93 are in sliding contact with the side portions of the elevating plate 94, and a ball screw 91 is screwed into a nut formed in the central portion of the elevating plate 94. When the ball screw 91 is rotated by being driven by the motor 92, the cutting means 70A and 70B can be cut and fed in the Z-axis direction together with the lifting plate 94.

  The apparatus base 11A is provided with a control means 19A for controlling various drive mechanisms. The configuration of the control means 19A is the same as that of the control means 19, and includes a holding table 13A, cameras 18A and 18B, cutting feed means 60, cutting means 70A and 70B, index feed means 80A and 80B, and cutting feed means 90A and 90B. It is connected.

[Second example of cutting method]
Next, the 2nd example of the cutting method which cuts the plate-shaped workpiece W using 10 A of cutting devices is demonstrated. The holding operation of the plate-like workpiece W by the holding table 13A is the same as in the first example. Further, similarly to the first example, machining conditions are set in advance in the control means 19A.

(1) Cutting height positioning step After the plate-like workpiece W is held by the holding table 13A, the holding table 13A is moved below the cutting means 70A and 70B by the cutting feed means 60. At this time, the plate-like workpiece W is imaged from above by the cameras 18A and 18B, and image processing such as pattern matching is performed, thereby detecting the first division line S that starts cutting with the cutting blades 73a and 73b. Then, the detection result is sent to the control means 19A.

  In the second example, as shown in FIG. 11, the division line S that extends in the X-axis direction on the uppermost side in plan view is the first division line S that starts to be cut by the cutting blade 73a. It is assumed that the planned division line S extending in the X-axis direction on the lowest side when viewed is the first division planned line S that starts cutting with the cutting blade 73b. The control means 19A calculates the coordinate positions of the start points P1 and P6 and the end points E1 and E6 of the two detected division lines S, respectively. The distance from the start point P1 to the end point E1 is equal to the distance from the start point P6 to the end point E6, and the lengths of the two division lines S are the same.

  The index feed means 80A shown in FIG. 10 aligns the cutting blade 73a with the start point P6, and the index feed means 80B aligns the cutting blade 73b with the start point P1. The cutting feed means 90A is positioned at a predetermined height at which the cutting blade 73a is cut at the starting point P6 by lowering the cutting blade 73a in the −Z direction approaching the plate-like workpiece W. The cutting feed means 90B By lowering the blade 73b in the −Z direction approaching the plate-like workpiece W, the blade 73b is positioned at a predetermined height at which the cutting blade 73b is cut at the start point P1.

(2) Cutting Step After performing the cutting height positioning step, the cutting means 70A and 70B shown in FIG. 10 rotate the spindle 71 to rotate the cutting blades 73a and 73b around the Y-axis direction center. The cutting blades 73a and 73b are cut to a predetermined depth from the surface Wa side of the plate-like workpiece W. The cutting feed means 60 moves the cutting blade 73a from the start point P6 to the end point E6 and also moves the cutting blade 73b from the start point P1 to the end point E1 by cutting and feeding the holding table 13A in the + X direction, for example, as shown in FIG. Then, the two division lines S are simultaneously cut to form the cutting grooves G, respectively.

(3) Cutting blade raising step After performing the cutting step, the same cutting blade raising step as in the first example is carried out. That is, the cutting feed means 90A and 90B shown in FIG. 10 raises the cutting blades 73a and 73b in the + Z direction away from the plate-like workpiece W, while the cutting feed means 60 moves the holding table 13A in the direction opposite to the cutting feed direction. The cutting blade 73a is moved from the end point E6 of the uppermost cutting groove G shown in FIG. 12 toward the starting point P6, and the starting point is from the end point E1 of the lowermost cutting groove G. The cutting blade 73b is moved toward P1. When the cutting blade 73a moves from the end point E6 of the cutting groove G toward the starting point P6, the cutting blade G may be raised in the + Z direction while tracing the cutting groove G, or the cutting blade 73b may start from the end point E1 of the cutting groove G. When moving toward P1, it may be raised in the + Z direction while tracing the cutting groove G.

  After the two first cutting grooves G are formed in the cutting process, the control means 19A shown in FIG. 10 uses the cutting blade 73a, based on the diameter and index feed width of the plate-like workpiece W stored in the memory. The coordinate positions of the start point P2, end point E2, and the start point P5, end point E5 of the next division line S adjacent to the first division line S in which the cutting groove G is formed by 73b are calculated in advance.

(4) Index feeding step When the lower ends of the cutting blades 73a and 73b are positioned above the surface Wa of the plate-like workpiece W in the above-described cutting blade ascending step, the index feeding means 80A and 80B set a predetermined index feeding width. The cutting means 70A is indexed in the + Y direction and the cutting means 70B is indexed in the -Y direction so that the cutting means 70A and the cutting means 70B come close to each other. By moving in the direction, the positions of the cutting blades 73a and 73b are aligned with the next division line S, respectively. Then, by the return operation in the −X direction of the holding table 13A, the cutting blade 73a is positioned above the start point P2 calculated by the control means 19A, and the cutting blade 73b is positioned above the start point P5.

  Thereafter, similarly to the first example, the plate-like workpiece W is divided into individual devices D by cutting the plate-like workpiece W held by the holding table 13A by repeating the above-described cutting height positioning step to the index feeding step. To do. In the second example, the cutting blade 73a and the cutting blade 73b are index-feeded in the direction approaching each other from the outer peripheral side to the center side of the plate-like workpiece W, and the division lines S having the same length are cut two by two. However, while cutting the cutting blade 73a and the cutting blade 73b in the direction away from each other from the center side to the outer peripheral side of the plate-like workpiece W, the divided division lines S having the same length are cut two by two. Also good.

[Third example of cutting method]
The workpiece to be cut by the present invention is not limited to the configuration of the plate-like workpiece W described above. For example, a rectangular plate-like workpiece W1 shown in FIG. 13 (a) may be a cutting target of the present invention. The plate-like workpiece W1 is a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded Package) substrate. The plate-like workpiece W1 includes division planned lines S1 extending in the short direction and having different angles for each line. The angle being different for each line means that there is an angle shift between the adjacent division planned lines S1. The cutting apparatus used in the third example is equipped with a holding table 13B having a rectangular holding surface for holding the plate-like workpiece W1, and a cutting blade 34 for cutting the plate-like workpiece W1 held by the holding table 13B. Cutting means. The holding table 13B includes a rotating shaft 130 that rotates the holding table 13B.

(1) Cutting height positioning step As shown in FIG. 13A, the number of division lines S1 of the plate-like workpiece W1 shown in the present embodiment is, for example, nine, and the division plan on the uppermost side in plan view It is assumed that the line S1 is the first division-scheduled line S1 that starts cutting. When the coordinate positions of the start point P1 and the end point E1 of the planned division line S1 are detected by a control means (not shown), the control blade is positioned at a predetermined height at which the cutting blade 34 is cut at the start point P1 of the planned division line S1.

(2) Cutting process After performing the cutting height positioning process, the cutting blade 34 is cut to a predetermined depth from the surface side of the plate-like workpiece W1 while the cutting blade 34 is rotated about the axis in the Y-axis direction. Let me. By cutting and feeding the holding table 13B in the + X direction, as shown in FIG. 13B, the cutting blade 34 is moved from the start point P1 to the end point E1, and the plate-like workpiece W1 is cut along the scheduled division line S1. Thus, the same cutting groove G as in the first example is formed.

(3) Cutting blade raising step After performing the cutting step, the same cutting blade raising step as in the first example is carried out. That is, by moving the holding table 13B in the −X direction opposite to the cutting feed direction while raising the cutting blade 34 in the Z-axis direction, from the end point E1 to the start point P1 of the uppermost cutting groove G. The cutting blade 34 is moved. When the cutting blade 34 moves from the end point E1 of the cutting groove G toward the starting point P1, the cutting blade 34 may be raised in the + Z direction while tracing the cutting groove G.

(4-1) Index feeding process When the lower end of the cutting blade 34 is positioned above the surface of the plate-like workpiece W1 in the above-described cutting blade raising process, the index feeding process similar to the first example is performed. By moving the holding table 13A in the -X direction while feeding the cutting blade 34 in the + Y direction, for example, with a predetermined index feed width, the position of the cutting blade 34 is aligned with the next scheduled division line S1.

(4-2) Angle Adjustment Step The index feed step in the third example includes an angle adjustment step for adjusting the angle of the division planned line S1. Specifically, after performing the cutting blade raising step, the rotating shaft 130 shown in FIG. 13B is rotated to rotate the holding table 13B by an angle θ, thereby cutting as shown in FIG. 13C. The plate-like workpiece W is tilted so as to adjust the angle of the planned division line S1 so that the cutting feed direction of the blade 34 and the extending direction of the next planned division line S1 are parallel to each other. After adjusting the angle of the division line S1, the cutting blade 34 is positioned above the start point P2 by the return operation of the holding table 13B in the −X direction.

  When the cutting blade 34 is positioned above the starting point P2, the cutting height positioning step and the cutting step are sequentially performed, and cutting is performed along the next scheduled division line S1, as shown in FIG. 13 (d). A second cutting groove G is formed. Thus, in the third example as well as the first example, the above-described cutting height positioning process to index feeding process are repeated to cut along all the planned division lines S1 of the plate-like workpiece W1, Finally, the plate-like workpiece W1 is divided into individual devices. As described above, in the third example of the cutting method, since the angle adjusting process for adjusting the angle of the scheduled division line S1 is performed in the index feeding process, the plate shape has an angular deviation between the adjacent scheduled division lines S1. Even the workpiece W1 can be efficiently cut.

DESCRIPTION OF SYMBOLS 10,10A: Cutting apparatus 11, 11A: Apparatus base 12: Holder 13, 13A, 13B: Holding table 14: Porous board 14a: Holding surface 15, 15A: Frame holding means 150: Frame mounting table 151: Clamp parts 16, 16A : Suction source 17, 17A: rotation support base 18, 18A, 18B: camera 19, 19A: control means 20: cutting feed means 21: ball screw 22: motor 23: guide rail 24: moving base 30: cutting means 31: spindle 32: spindle housing 33: cutting blade 40: index feeding means 41: ball screw 42: motor 43: guide rail 44: movable column 50: notch feeding means 51: ball screw 52: motor 60: cutting feeding means 61: ball screw 62: motor 63 : Guide rail 64: Moving base 70A, 70B: Cutting means 71: Spindle 72: Spindle housing 73a, 73b: Cutting blades 80A, 80B: Index feed means 81: Ball screw 82: Motor 83: Guide rail 84: Moving plates 90A, 90B: Cut feed means 91: Ball screw 92: Motor 93: Guide rail 94: Lift plate

Claims (4)

A cutting method in which a cutting blade is moved to a starting point and an ending point of a planned dividing line of a plate-shaped workpiece having a dividing line, and cutting is performed.
A cutting height positioning step for positioning the cutting blade at a predetermined height at which the cutting blade is cut at the starting point of the plate-like workpiece held by the holding table;
After performing the cutting height positioning step, the cutting step of moving the cutting blade from the start point to the end point to cut the plate-like workpiece to form a cutting groove;
A cutting blade raising step of moving the cutting blade from the end point of the cutting groove formed in the cutting step toward the starting point while raising the cutting blade reaching the end point after performing the cutting step;
When the lower end of the cutting blade is positioned above the upper surface of the plate-like workpiece in the cutting blade ascending step, the cutting blade is indexed to the next scheduled division line, and above the starting point of the next scheduled division line. An index feed process for positioning the cutting blade;
A cutting method for cutting a plate-like workpiece held by the holding table by repeating the cutting height positioning step to the index feeding step.   In the cutting blade raising step, the cutting blade is moved from the end point toward the starting point while tracing the cutting groove formed in the cutting step while raising the cutting blade that has reached the end point. The cutting method according to claim 1.   In the index feeding step, in the movement of the cutting blade to the start point of the next division line, when the center of the cutting blade passes the outer peripheral edge of the plate workpiece, the cutting blade starts to be lowered and the cutting height The cutting method according to claim 1, wherein the positioning step is started. The plate-like workpiece has division planned lines with different angles for each line,
The index feed step includes an angle adjustment step of rotating the holding table so that a cutting feed direction of the cutting blade is parallel to an extending direction of the next division line. Cutting method.

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