JP2019036620A5 - - Google Patents

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Publication number
JP2019036620A5
JP2019036620A5 JP2017156641A JP2017156641A JP2019036620A5 JP 2019036620 A5 JP2019036620 A5 JP 2019036620A5 JP 2017156641 A JP2017156641 A JP 2017156641A JP 2017156641 A JP2017156641 A JP 2017156641A JP 2019036620 A5 JP2019036620 A5 JP 2019036620A5
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JP
Japan
Prior art keywords
mold
cured product
imprint material
pattern
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2017156641A
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English (en)
Japanese (ja)
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JP2019036620A (ja
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Publication date
Application filed filed Critical
Priority to JP2017156641A priority Critical patent/JP2019036620A/ja
Priority claimed from JP2017156641A external-priority patent/JP2019036620A/ja
Priority to KR1020180091213A priority patent/KR20190018391A/ko
Publication of JP2019036620A publication Critical patent/JP2019036620A/ja
Publication of JP2019036620A5 publication Critical patent/JP2019036620A5/ja
Withdrawn legal-status Critical Current

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JP2017156641A 2017-08-14 2017-08-14 インプリント装置、および物品製造方法 Withdrawn JP2019036620A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2017156641A JP2019036620A (ja) 2017-08-14 2017-08-14 インプリント装置、および物品製造方法
KR1020180091213A KR20190018391A (ko) 2017-08-14 2018-08-06 임프린트 장치 및 물품 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017156641A JP2019036620A (ja) 2017-08-14 2017-08-14 インプリント装置、および物品製造方法

Publications (2)

Publication Number Publication Date
JP2019036620A JP2019036620A (ja) 2019-03-07
JP2019036620A5 true JP2019036620A5 (enrdf_load_stackoverflow) 2020-08-20

Family

ID=65584815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017156641A Withdrawn JP2019036620A (ja) 2017-08-14 2017-08-14 インプリント装置、および物品製造方法

Country Status (2)

Country Link
JP (1) JP2019036620A (enrdf_load_stackoverflow)
KR (1) KR20190018391A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102244514B1 (ko) * 2019-11-28 2021-04-26 연세대학교 산학협력단 외부 전기장 및 적외선 대역 레이저 투과형 몰드를 이용하는 금속 임프린팅 성형 장치 및 성형 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015149390A (ja) 2014-02-06 2015-08-20 キヤノン株式会社 インプリント装置、型、および物品の製造方法

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