JP2019027728A - Tabular work-piece dryer - Google Patents

Abstract

To efficiently dry a tabular work-piece subsequent to machining.SOLUTION: There is provided a tabular work-piece dryer 1 comprising a box 2 provided with an entrance/exit port 210 for a tabular work-piece W to enter into/exit from the box 2 therethrough, a pair of air knives 3 each provided with an air ejection port 330 disposed to face each other via a tabular work-piece W entering into or exiting from the box 2 to eject air onto either face of the tabular work-piece W.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a dryer for drying a plate-like workpiece.

  For example, in a cutting apparatus that cuts a plate-like workpiece held by a holding table with a rotating cutting blade, the cutting water is supplied to and around the contact portion between the cutting blade and the plate-like workpiece to cool and cut the contact portion. Cutting is carried out while removing scraps (see, for example, Patent Document 1).

JP 2011-254036 A

  When the cutting device is configured not to include a conveying means for conveying the plate-shaped workpiece after cutting to the cleaning mechanism, the operator removes the plate-shaped workpiece from the holding table after cutting, The cutting water is blown off with an air gun.

  When blowing off the cutting water, air is blown on one side of the plate-like workpiece to dry one side, then the plate-like workpiece is inverted, and air is blown to the other side of the plate-like workpiece to dry. However, when air is blown onto the other surface, water droplets wrap around one surface and wet one surface. Therefore, it is necessary to blow air on one side again and dry it, and further, it is necessary to blow off the water droplets that circulates on the other side. It is carried out.

  Therefore, after performing cutting or the like while supplying processing water (for example, cutting water) to the plate-shaped workpiece, there is a problem that the processed plate-shaped workpiece can be efficiently dried.

  The present invention for solving the above-mentioned problems is a plate-like workpiece dryer for drying a plate-like workpiece, the box having an entry outlet through which the plate-like workpiece enters or advances, and the box entering or exiting the box An air knife provided with an air knife that faces and opposes a plate-like workpiece that advances from the inside and blows out air on both sides of the plate-like workpiece.

  It is preferable that the plate-like workpiece dryer includes a top plate on which the entry / exit is formed, and the plate-like workpiece is vertically moved to enter or advance from the entry / exit to dry the plate-like workpiece.

  The plate-like workpiece dryer includes a moving means for moving the air knife in the surface direction of the plate-like workpiece in the box, and dries the plate-like workpiece entered into the box while moving the air knife. It is preferable.

  The moving means includes a piston connected to the air knife, a cylinder for movably accommodating the piston from one end to the other end, a first air supply portion formed at the one end, and the other A second air supply section formed at the end, and an air operation valve that selectively supplies air supplied from an air source to the first air supply section and the second air supply section. The air operation valve includes: a first path for communicating the air source and the first air supply unit; a second path for communicating the air source and the second air supply unit; A switching portion including: a spring disposed on one end side of the switching portion; and an air source disposed on the other end side of the switching portion so as to communicate with the second path against the spring. An air actuator for moving the switching unit, and the switching unit and the first air supply unit. A path switching unit having a first pressure adjustment path and a second pressure adjustment path is provided between the air, and air is supplied to the first air supply part via the first pressure adjustment path. When the pressure in the cylinder increases from the one end portion to the other end portion, air flows into the second pressure adjusting path, the air actuator is actuated and resists the spring. The second path is communicated with an air source, air is supplied to the second air supply unit, the piston is moved from the other end to the one end, and the first When the air in the pressure adjusting path is exhausted and the pressure in the second pressure adjusting path becomes low, the switching portion is moved by the biasing force of the spring so that the first path communicates with the air source This is preferable.

  The plate-shaped workpiece dryer according to the present invention is installed beside the processing device, for example, and can efficiently dry the plate-shaped workpiece unloaded from the processing device with an air knife in the box.

  The plate-shaped workpiece dryer includes a top plate on which an entrance and exit is formed, and the plate-like workpiece is dried vertically by moving the plate-shaped workpiece vertically or entering and advancing from the entry and exit. The processing water blown off from both surfaces of the workpiece can be dropped to the bottom of the box, and drying can be performed while suppressing the wrapping of the processing water to one surface or the other surface of the workpiece during drying of the workpiece.

  The plate-like workpiece dryer is provided with moving means for moving the air knife in the plane direction of the plate-like workpiece in the box, and the plate-like workpiece entered into the box is dried while moving the air knife. The plate-like workpiece can be dried by efficiently injecting air onto the entire surface of the both-side workpiece.

  A moving means is formed on the piston connected to the air knife, a cylinder for accommodating the piston movably between one end and the other end, a first air supply portion formed on one end, and the other end. A second air supply unit, and an air operation valve that selectively supplies air supplied from an air source to the first air supply unit and the second air supply unit. A switching unit comprising: a first path for communicating the air source and the first air supply unit; and a second path for communicating the air source and the second air supply unit; and one end side of the switching unit And an air actuator disposed on the other end side of the switching unit and moving the switching unit so that the air source communicates with the second path against the spring. Between the first air supply section and the first pressure adjustment path. By providing a path switching unit having a pressure, air is supplied to the first air supply unit via the first pressure adjustment path, and the piston moves from one end to the other end, and the pressure in the cylinder When the air pressure becomes high, air flows through the second pressure adjustment path, the air actuator is activated, and the switching portion can be moved against the spring so that the second path communicates with the air source. Furthermore, when air is supplied to the second air supply unit, the piston is moved from the other end to one end, the air in the first pressure adjustment path is exhausted, and the pressure in the second pressure adjustment path becomes low In this case, since the switching portion can be moved by the biasing force of the spring so that the first path communicates with the air source, the moving means reciprocates the air knife up and down only by supplying air from the air source. Can reduce the cost and save space of the plate-shaped workpiece dryer. Gasification can be realized.

It is a perspective view which shows an example of a plate-shaped workpiece dryer. It is sectional drawing which shows an example of an air knife. It is typical explanatory drawing which shows the state which has dried the plate-shaped workpiece | work which entered the box, moving the air knife down by the moving means. It is typical explanatory drawing which shows the state which the piston of the moving means moved to the other end part. It is a perspective view which shows the state which the piston of the moving means moved to the other end part. When the piston moves to the other end of the cylinder and the pressure in the cylinder increases, air flows through the second pressure adjustment path, the air actuator is activated, and the second path of the switching section communicates with the air source. It is typical explanatory drawing which shows the state which carried out. When the air in the first pressure adjusting path is exhausted and the pressure in the second pressure adjusting path becomes low, the switching unit moves so that the first path communicates with the air source by the force of the spring. It is typical explanatory drawing.

  A plate-like workpiece W to be dried by the plate-like workpiece dryer 1 shown in FIG. 1 is, for example, a semiconductor wafer having a circular outer shape, and a lattice-like region partitioned by a planned cutting line S on its surface Wa. In addition, a device D such as an IC or an LSI is formed. For example, the back surface Wb of the plate-like workpiece W is stuck to the sticking surface of the adhesive tape T, and the outer peripheral part of the adhesive tape T is stuck to the annular frame F. Thereby, the plate-like workpiece W is in a state of a workpiece unit that can be handled using the annular frame F. The plate-like workpiece W is not limited to the semiconductor wafer as described above, and may be a rectangular package substrate or the like in which the device is sealed with resin, and is not supported by the annular frame F. It may be.

  The plate-like workpiece dryer 1 that dries the plate-like workpiece W includes, for example, a box 2 provided with an entry outlet 210 through which the plate-like workpiece W enters or advances, and a plate-like shape that enters or exits from the box 2. An air knife 3 provided with an air outlet 330 for jetting air to the adhesive tape T on the front surface Wa of the plate-like workpiece W and the back surface Wb of the plate-like workpiece W facing each other across the workpiece W, and the air knife 3 in the box 2 Moving means 4 for moving in the surface direction of the workpiece W (in the present embodiment, the Z-axis direction).

  For example, the box 2 having a rectangular parallelepiped outer shape includes a bottom plate 20, a top plate 21, and four side plates 22. The top plate 21 is formed with a narrow entrance / exit 210 extending in the longitudinal direction (X-axis direction) of the top plate 21, and the plate-like workpiece W supported by the annular frame F is placed on the box 2. In a vertical state, the vehicle can enter the inside of the box 2 from the entrance / exit 210, or can advance from the entrance / exit 210 to the outside of the box 2.

  A drain port 200 is formed in the bottom plate 20, and water blown off from both surfaces of the plate-like workpiece W by the air knife 3 falls to the bottom plate 20 and is then discharged from the drain port 200 to the outside of the box 2.

  For example, a support base 23 that supports the plate-like workpiece W that has entered the box 2 in a vertical state is disposed in the box 2. The support base 23 having a rectangular parallelepiped outer shape has a slit-like fixing groove 230 formed on the upper surface thereof. Then, by inserting a part of the outer peripheral portion of the annular frame F into the fixing groove 230, the plate-like workpiece W is supported by the support base 23 in a vertical state.

  As shown in FIG. 2, the air knife 3 includes, for example, a tubular main body 30 having a substantially quadrangular cross section, and an air flow path 31 extending in the longitudinal direction (X-axis direction) at the center of the cross section of the tubular main body 30. , A long port 32 formed on the upper surface of the tubular main body 30 and communicating with the air flow path 31, and a plate that guides the air blown upward from the long port 32 in the horizontal direction and blows it out of the air knife 3. Part 33.

  As shown in FIG. 1, the tubular main body 30 has a cylindrical outer shape that extends in the longitudinal direction of the box 2 and is closed at the tip (−X direction side end). The tubular main body 30 has, for example, a length equal to or larger than the diameter of a work unit made of a plate-like workpiece W or the like (the diameter of the plate-like workpiece W when the plate-like workpiece W is not supported by the annular frame F). Two are arranged in parallel inside the box 2. A T-shaped tube 39 communicates with a rear end (+ X direction side end) of each tubular main body 30, and the tubular main body 30 is supported in the box 2 by the T-shaped tube 39.

  As shown in FIG. 1, one end of an air supply pipe 391 made of a resin tube or a metal pipe is connected to the base portion of the T-shaped tube 39 via a joint 390. The air supply pipe 391 is connected to an air source 8 (see FIG. 2) that can supply compressed air including a compressor and a compressed air storage tank. The air supplied from the air source 8 passes through the air supply pipe 391, is divided in the T-shaped pipe 39, and flows in the air flow path 31.

  The flat plate portion 33 shown in FIG. 2 protrudes horizontally toward the inner side of the tubular main body 30 so as to form a slit-like air outlet 330 on the upper surface of the tubular main body 30. . The lower surface of the plate portion 33 faces the long port 32 in the Z-axis direction, and the air flowing into the air flow path 31 is directed upward from the long port 32 and is guided in the horizontal direction by the plate portion 33. The air is ejected from the air outlet 330 to the outside of the tubular main body 30. The ejected air flows along the inner corner portion 300 of the tubular main body 30 and is blown onto both surfaces of the plate-like workpiece W sandwiched between the two air knives 3. In addition, as shown in FIG. 2, when the corner part 300 inside the tubular main-body part 30 is R shape, it is preferable. In FIG. 2, the annular frame F and the adhesive tape T that support the plate-like workpiece W are omitted, and the T-shaped tube 39 is also shown in a simplified manner.

  The moving means 4 shown in FIGS. 1 and 3 for moving the air knife 3 up and down in the Z-axis direction includes a piston 40 connected to the air knife 3 and a cylinder that accommodates the piston 40 movably between one end 430 and the other end 431. 43, the first air supply unit 41 formed at one end 430, the second air supply unit 42 formed at the other end 431, and the air supplied from the air source 8 as the first air supply. And an air operation valve 5 (not shown in FIG. 1) that selectively supplies the unit 41 and the second air supply unit 42.

  As shown in FIG. 1, a root portion of a T-shaped tube 39 is connected to a piston 40 that is disposed in a cylinder 43 whose outer shape is movable up and down. The piston 40 and the air knife 3 are connected. When air is supplied (or discharged) to the cylinder 43 and the pressure in the cylinder 43 changes, the piston 40 moves up and down, and the air knife 3 connected to the T-shaped tube 39 also moves up and down. The connecting portion between the piston 40 and the T-shaped tube 39 is sealed, and the airtightness in the cylinder 43 is maintained.

  The air operation valve 5 shown in FIG. 3 includes a first path 511 for communicating the air source 8 and the first air supply unit 41, and a second path for communicating the air source 8 and the second air supply unit 42. A switching unit 51 provided with a path 512, a spring 53 disposed on one end side of the switching unit 51 and biasing the switching unit 51 toward the first path 511, and disposed on the other end side of the switching unit 51. An air actuator 54 that moves the switching unit 51 so that the air source 8 communicates with the second path 512 against the spring 53 and exhaust valves 516 and 517 equipped with silencers are provided. It has.

  The air source 8 and the switching unit 51 are connected by a pipe 81, and a lever-type two-port manual valve 82 is connected to the pipe 81, for example. The air sent from the air source 8 and passed through the manual valve 82 reaches the switching unit 51 after the pressure is adjusted by the regulator 83, and also flows to the air supply pipe 391 connected to the pipe 81. Go. The compressed air that has flowed into the air supply pipe 391 is supplied to the above-described air knife 3 after dust and the like are removed by the filter 392.

Between the switching unit 51 and the first air supply unit 41, a path switching unit 52 including a first pressure adjustment path 521 and a second pressure adjustment path 522 is disposed. The first pressure adjustment path 521 is provided with a first speed controller 521a in which a variable throttle valve and a check valve are combined in parallel to adjust the flow velocity of air in the first pressure adjustment path 521. . The check valve of the first speed controller 521a is attached in a direction allowing air flow in the direction toward the first air supply unit 41 in the first pressure adjustment path 521.
The second pressure adjustment path 522 is provided with a second speed controller 522a in which a variable throttle valve and a check valve are combined in parallel. One end of the second pressure adjustment path 522 is connected to the air actuator 54, and the other end is connected to the first air supply unit 41 together with the first pressure adjustment path 521. The check valve of the second pressure adjustment path 522 is attached in a direction that does not allow air flow in the direction toward the air actuator 54 in the second pressure adjustment path 522.

  One end of a pipe 420 communicates with the second air supply unit 42, and the other end of the pipe 420 is connected to an exhaust port PA connected to the exhaust valve 517 of the switching unit 51 in FIG. A third speed controller 423 in which a variable throttle valve and a check valve are combined in parallel is disposed on the pipe 420. The check valve of the third speed controller 423 is attached in a direction allowing air flow in the direction toward the second air supply unit 42 in the pipe 420.

Hereinafter, for example, a plate in the case where the plate-like workpiece W in a state where the cutting fluid is attached to the adhesive tape T on the front surface Wa and the rear surface Wb side by being subjected to cutting is dried by the plate-like workpiece dryer 1 described above. The operation of the workpiece dryer 1 will be described.
First, the plate-like workpiece W supported by the annular frame F shown in FIG. 1 is inserted into the box 2 in a state of being vertically arranged from the entrance / exit 210 of the box 2, and fixed on the support base 23. The air knife 3 is sandwiched from both sides in the Y-axis direction.

  Next, the air source 8 shown in FIG. 3 is activated to flow the compressed air into the pipe 81, and the operator operates the manual valve 82 to open the air so that the air is connected to the pipe 81. It is supplied to the tubular main body 30 of the air knife 3 through the supply pipe 391. Then, the air is ejected from the slit-like air ejection port 330 (see FIG. 2) of the air knife 3 toward the front surface Wa and the rear surface Wb of the plate-like workpiece W. As a result, the cutting fluid is blown off from both surfaces of the plate-like workpiece W by the air, and the plate-like workpiece W is dried. The blown-off cutting fluid falls onto the bottom plate 20 of the box 2 and is drained from the drain outlet 200 to the outside of the box 2.

  In parallel with the supply of air from the air source 8 to the air knife 3, the moving means 4 lowers the air knife 3. After the air supplied to the pipe 81 is adjusted to a predetermined pressure by the regulator 83, the air passes through the first path 511 of the air operation valve 5 and further passes through the first pressure adjustment path 521, and the first pressure is adjusted. The air flows from the air supply unit 41 into the cylinder 43.

When the piston 40 descends due to the pressure of the air flowing into the cylinder 43, the air below the piston 40 in the cylinder 43 is sent from the second air supply unit 42 to the pipe 420. Since the air flowing through the pipe 420 passes only through the variable throttle valve of the third speed controller 423, the amount of air sent from the second air supply unit 42 is kept constant, and the piston 40 maintains a predetermined speed. And descend. As shown in FIG. 3, the air flowing through the pipe 420 passes through the exhaust valve 517 of the air operation valve 5 and escapes to the outside. As the piston 40 descends, the air knife 3 that ejects air dries both surfaces of the plate-like workpiece W while descending. Since the flow rate of the variable throttle valve of the second speed controller 522a is smaller than that of the variable throttle valve of the third speed controller 423, almost no air flows into the second pressure adjustment path 522.
As described above, the adjustment of the descending speed of the piston 40 is performed by adjusting the flow rate of the air with the third speed controller 423 of the pipe 420 on the air exhaust side in order to make the controllability of the descending speed of the piston 40 more stable. Although it is preferable to perform control by throttle (meter-out), the control may be performed by control (meter-in) of reducing the flow rate of air by the first speed controller 521a in the first pressure adjustment path 521 for supplying air. .

  As described above, when air is continuously supplied to the first air supply unit 41 via the first pressure adjustment path 521, the piston 40 at the one end 430 is moved to the other end as shown in FIGS. It moves to 431, the discharge of the air from the 2nd air supply part 42 finishes, and the pressure in the cylinder 43 becomes high. When this state is reached, the air supplied from the air source 8 flows from the first pressure adjustment path 521 to the second pressure adjustment path 522 as shown in FIG. The air actuator 54 disposed on the other end side is actuated by the air to resist the spring 53 having a natural length, that is, while the spring 53 is contracted from the natural length, an air source is supplied to the second path 512. The switching unit 51 is moved in the direction of arrow R1 so that 8 communicates. The spring 53 stores a biasing force.

  As shown in FIG. 6, when the air source 8 communicates with the second path 512 of the air operation valve 5, the other end of the pipe 420 communicates with the second path 512, and the first pressure adjustment path 521 is the switching unit. The exhaust port PB connected to the 51 exhaust valve 516 is connected. As a result, the air supplied from the air source 8 passes through the second path 512, passes through the pipe 420, flows into the cylinder 43 from the second air supply unit 42, and raises the piston 40. As the piston 40 moves up, the air knife 3 that blows out air dries both surfaces of the plate-like workpiece W while moving up.

  When the piston 40 ascends in the cylinder 43 from the other end 431 toward the one end 430, the air above the piston 40 in the cylinder 43 is sent from the first air supply unit 41 to the path switching unit 52. The When the air passes through the variable throttle valve in the second pressure adjustment path 522 and reaches the air actuator 54, the air actuator 54 resists the biasing force of the spring 53 and restricts the movement of the switching unit 51. The air passing through the variable throttle valve in the first pressure adjustment path 521 is exhausted to the outside from the exhaust valve 516 of the switching unit 51. The ascending speed of the piston 40 is maintained at a predetermined speed by the first speed controller 521a reducing the air flow rate.

  As shown in FIG. 7, when the piston 40 rises to the one end 430 of the cylinder 43, the exhaust of air from the first pressure adjustment path 521 is finished, and the air pressure in the second pressure adjustment path 522 is reduced. Lower. As a result, the switching portion 51 moves in the direction of the arrow R <b> 2 by the urging force stored in the spring 53, and the first path 511 communicates with the air source 8. Then, as the piston 40 descends again, the air knife 3 that ejects air dries both surfaces of the plate-like workpiece W while descending.

  The plate-like workpiece dryer 1 according to the present invention is installed beside the processing device, for example, and can efficiently dry the plate-like workpiece W carried out of the processing device as described above by the air knife 3 in the box 2. .

  Furthermore, the plate-shaped workpiece dryer 1 includes the top plate 21 in which the entry / exit 210 is formed, and the plate-like workpiece W is vertically moved to enter or advance from the entry / exit 210 to dry the plate-like workpiece W. Thus, the processing water blown off from both surfaces of the plate-like workpiece W by air is dropped on the bottom plate 20 of the box 2, and drying is further suppressed while preventing the processing water from entering the front surface Wa or the back surface Wb of the plate-like workpiece W. Can be done.

  The plate-shaped workpiece dryer 1 includes a moving means 4 that moves the air knife 3 in the surface direction of the plate-shaped workpiece W in the box 2, and dries the plate-shaped workpiece W that has entered the box 2 while moving the air knife 3. By doing so, it is possible to efficiently eject air onto the entire surface Wa and back surface Wb of the plate-like workpiece W to dry the plate-like workpiece W.

  The moving means 4 includes a piston 40 coupled to the air knife 3, a cylinder 43 that accommodates the piston 40 so as to be movable between the one end 430 and the other end 431, and a first air supply unit formed at the one end 430. 41, the second air supply unit 42 formed in the other end 431, and the air supplied from the air source 8 are selectively supplied to the first air supply unit 41 and the second air supply unit 42. The air operation valve 5 includes: a first path 511 for communicating the air source 8 and the first air supply unit 41; an air source 8 and a second air supply unit 42; A switching path 51 having a second path 512 that communicates with each other, a spring 53 disposed on one end side of the switching section 51, and a spring 53 disposed on the other end side of the switching section 51 against the spring 53. The air source 8 communicates with the second path 512. A path switching unit that includes an air actuator 54 that moves the switching unit 51 and includes a first pressure adjustment path 521 and a second pressure adjustment path 522 between the switching unit 51 and the first air supply unit 41. 52, the air is supplied to the first air supply portion 41 via the first pressure adjustment path 521, and the piston 40 moves from the one end portion 430 to the other end portion 431 to move into the cylinder 43. When the pressure increases, air flows through the second pressure adjustment path 522 and the air actuator 54 operates to resist the spring 53 so that the second path 512 communicates with the air source 8. Furthermore, air is supplied to the second air supply unit 42 to move the piston 40 from the other end 431 to the one end 430, and the air in the first pressure adjustment path 521 is exhausted. 2 pressure adjustment path 522 When the pressure decreases, the switching unit 51 can be moved by the biasing force of the spring 53 so that the first path 511 communicates with the air source 8. Thus, the air knife 3 can be reciprocated up and down only by supplying the same, and the cost reduction and space saving of the plate-like workpiece dryer 1 can be realized.

  In addition, the plate-shaped workpiece dryer 1 which concerns on this invention is not limited to the said embodiment, Moreover, it is not limited to this about each structure of the plate-shaped workpiece dryer 1 illustrated by the attached drawing. These can be appropriately changed within a range where the effects of the present invention can be exhibited. For example, the plate-shaped workpiece dryer 1 may not be provided with the moving means 4 and may be dried by moving the plate-shaped workpiece W that has been entered into the box 2 by the operator up and down with respect to the air knife 3.

W: Plate-shaped workpiece Wa: Surface of the plate-shaped workpiece Wb: Back surface of the plate-shaped workpiece S: Planned cutting line D: Device T: Tape F: Circular frame 1: Plate-shaped workpiece dryer 2: Box 20: Bottom plate 200: Drainage Port 21: Top plate 210: Entrance / exit 22: Side plate 23: Support base 230: Fixed groove
3: Air knife 30: Tubular body part 300: R-shaped corner part 31: Air flow path 32: Long port 33: Plate part 330: Air jet 39: T-shaped pipe 390: Joint 391: Air supply pipe
4: Moving means 40: Piston 41: First air supply unit 42: Second air supply unit 420: Piping 423: Third speed controller 43: Cylinder
5: Air operation valve 51: Switching section 511: First path 512: Second path 52: Path switching section 521: First pressure adjustment path 521a: First speed controller 522: Second pressure adjustment path 522a : Second speed controller 53: Spring 54: Air actuator 8: Air source 81: Piping 82: Manual valve 83: Regulator

Claims (4)

A plate-shaped workpiece dryer for drying a plate-shaped workpiece,
A box with an entry / exit through which the plate workpiece enters or advances,
A plate-like workpiece dryer comprising: an air knife provided with air outlets that are opposed to each other with a plate-like workpiece entering or advancing from within the box and jetting air to both surfaces of the plate-like workpiece. A top plate on which the entrance and exit are formed;
The plate-like workpiece dryer according to claim 1, wherein the plate-like workpiece is dried vertically by entering or advancing from the entrance / exit.   The plate according to claim 1 or 2, further comprising a moving means for moving the air knife in the surface direction of the plate-shaped workpiece in the box, and drying the plate-shaped workpiece entered into the box while moving the air knife. Shaped work dryer. The moving means includes a piston connected to the air knife, a cylinder for movably accommodating the piston from one end to the other end, a first air supply portion formed at the one end, and the other A second air supply section formed at the end, and an air operation valve that selectively supplies air supplied from an air source to the first air supply section and the second air supply section. Prepared,
The air operation valve is
A switching unit comprising: a first path for communicating the air source and the first air supply unit; and a second path for communicating the air source and the second air supply unit; A spring disposed on one end side of the switching unit and an air disposed on the other end side of the switching unit to move the switching unit so that an air source communicates with the second path against the spring. An actuator,
A path switching unit having a first pressure adjusting path and a second pressure adjusting path is provided between the switching unit and the first air supply unit,
When the air is supplied to the first air supply section through the first pressure adjustment path and the piston moves from the one end to the other end, and the pressure in the cylinder increases, the first air supply section The air flows through the pressure adjustment path 2 and the air actuator operates to move the switching unit against the spring so that the second path communicates with the air source. When the air is supplied to the piston to move the piston from the other end to the one end, the air in the first pressure adjustment path is exhausted and the pressure in the second pressure adjustment path becomes low. The plate-like workpiece dryer according to claim 3, wherein the switching portion is moved by a biasing force of a spring so that the first path communicates with an air source.

Images