JP2019023732A5 - - Google Patents

Download PDF

Info

Publication number
JP2019023732A5
JP2019023732A5 JP2018150800A JP2018150800A JP2019023732A5 JP 2019023732 A5 JP2019023732 A5 JP 2019023732A5 JP 2018150800 A JP2018150800 A JP 2018150800A JP 2018150800 A JP2018150800 A JP 2018150800A JP 2019023732 A5 JP2019023732 A5 JP 2019023732A5
Authority
JP
Japan
Prior art keywords
illumination
optical
substrate
pattern
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018150800A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019023732A (ja
JP6547887B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2018150800A priority Critical patent/JP6547887B2/ja
Priority claimed from JP2018150800A external-priority patent/JP6547887B2/ja
Publication of JP2019023732A publication Critical patent/JP2019023732A/ja
Publication of JP2019023732A5 publication Critical patent/JP2019023732A5/ja
Application granted granted Critical
Publication of JP6547887B2 publication Critical patent/JP6547887B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2018150800A 2018-08-09 2018-08-09 照明光学系、露光装置およびデバイス製造方法 Expired - Fee Related JP6547887B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018150800A JP6547887B2 (ja) 2018-08-09 2018-08-09 照明光学系、露光装置およびデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018150800A JP6547887B2 (ja) 2018-08-09 2018-08-09 照明光学系、露光装置およびデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2017094910A Division JP6493445B2 (ja) 2017-05-11 2017-05-11 照明光学装置、露光装置および露光方法

Publications (3)

Publication Number Publication Date
JP2019023732A JP2019023732A (ja) 2019-02-14
JP2019023732A5 true JP2019023732A5 (ru) 2019-03-28
JP6547887B2 JP6547887B2 (ja) 2019-07-24

Family

ID=65368923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018150800A Expired - Fee Related JP6547887B2 (ja) 2018-08-09 2018-08-09 照明光学系、露光装置およびデバイス製造方法

Country Status (1)

Country Link
JP (1) JP6547887B2 (ru)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111830616B (zh) * 2019-04-16 2021-11-09 致晶科技（北京）有限公司 利用晶体制成的消色差相位延迟器和制作方法

Similar Documents

Publication Publication Date Title
TWI620036B (zh) 照明光學裝置、曝光裝置、以及元件製造方法
JP2014179631A5 (ru)
TWI358615B (en) Illumination system
JP2010192914A5 (ru)
JP2014195094A5 (ru)
JP2012155330A5 (ja) 露光装置、露光方法、およびデバイス製造方法
TW200935181A (en) Optical unit, illumination optical apparatus, exposure appartus, exposure method, and device manufacturing method
JP2016001308A5 (ja) 露光装置、およびデバイス製造方法
JP2015132848A5 (ja) 照明光学系、露光装置、照明方法、露光方法、およびデバイス製造方法
JP5365982B2 (ja) 照明光学系、露光装置、およびデバイス製造方法
JP2013502703A (ja) 偏光変換ユニット、照明光学系、露光装置、およびデバイス製造方法
TW200949459A (en) Spatial light modulating unit, illumination optical system, aligner, and device manufacturing method
US7511826B2 (en) Symmetrical illumination forming system and method
JP2008298772A (ja) 座標測定機および基板の構造化照明方法
JP2005156592A5 (ru)
JP2014081452A (ja) 露光装置、およびデバイス製造方法
US10747116B2 (en) Pattern forming apparatus and article manufacturing method
JPWO2009048051A1 (ja) 照明光学装置、並びに露光方法及び装置
JP2007258575A5 (ru)
JP2007194537A (ja) 光学特性計測方法及び装置、並びに露光装置
JP2019023732A5 (ru)
TW200928603A (en) Illumination optical system, exposure apparatus, and device manufacturing method
JP2010197628A5 (ru)
CN105474104A (zh) 曝光装置
JP2011114041A (ja) 光束分割装置、空間光変調ユニット、照明光学系、露光装置、およびデバイス製造方法