JP2019021499A - Electric heater and heating apparatus including the same, and method of controlling electric heater - Google Patents

Abstract

To provide: an electric heater achieving a uniform temperature distribution and capable of improving response of temperature rise/drop, and a heating apparatus including the same; and a method of controlling an electric heater.SOLUTION: An electric heater includes a plate-like heating element 2 having a current path 20 and made of a metal material, and a support member 3 supporting the plate-like heating element 2. The support member 3 has a holding insulator 5 holding the plate-like heating element 2. A lamp heater 4 is arranged to be opposed to the head 51b of the holding insulator 5.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an electric heater, a heating device including the electric heater, and a method for controlling the electric heater. More specifically, the present invention relates to an electric heater including a plate-like heating element having a current path and made of a metal material, and a support member that supports the plate-like heating element, a heating device including the electric heater, and an electric heater control method.

  Conventionally, as an electric heater as described above, for example, the one described in Patent Document 1 is known. In this electric heater, the insulators are vertically divided into upper and lower parts, the heating elements are locked therebetween, and fixing pins are passed through the insulators in the vertical direction and fixed. For this reason, the insulator becomes wider by the amount corresponding to the fixed pin penetration, and the exposed area of the heating element to the heating space is reduced accordingly, the in-plane temperature distribution of the electric heater becomes uneven, and the heating efficiency is lowered. Furthermore, the plate-like heating element made of a metal material such as iron-chromium-nickel alloy still has insufficient response to increase / decrease temperature as an electric heater.

JP 2002-359061 A

  In view of such conventional circumstances, the present invention provides an electric heater, a heating apparatus including the electric heater, and a method for controlling the electric heater, which can achieve uniform temperature distribution and improve the response of temperature rise and fall. With the goal.

  In order to achieve the above object, the electric heater according to the present invention is characterized in that, in a configuration including a plate-like heating element having a current path and made of a metal material, and a support member that supports the plate-like heating element, The supporting member has a holding insulator for holding the plate-like heating element, and is arranged such that a lamp heater is opposed to the head of the holding insulator.

  According to the above configuration, in the supporting member that supports the plate-like heating element, the holding insulator that holds the plate-like heating element becomes a non-heated portion in the electric heater. Since the lamp heater is disposed so as to face the head of the holding insulator, the non-heated portion in the electric heater is eliminated and the heated portion is increased, so that the heating efficiency is improved and the deterioration of the in-plane temperature deviation can be suppressed.

  In order to achieve the above object, another feature of the electric heater according to the present invention includes a plate-like heating element having a current path and made of a metal material, and a support member that supports the plate-like heating element. The lamp heater is disposed so as to face the surface of the plate-like heating element.

  According to the above configuration, since the lamp heater is disposed so as to face the surface of the plate-shaped heating element (surface facing the heating space), the radiation from the plate-shaped heating element side portion of the lamp heater rises slowly (temperature rise). The plate-like heating element is heated to assist in raising the temperature of the plate-like heating element. Therefore, the temperature increase rate of the plate-like heating element is improved. On the other hand, the radiation from the part (heating space side) opposite to the plate-like heating element side of the lamp heater directly heats the workpiece. Accordingly, the temperature can be quickly shifted to a high temperature and stabilized, and the in-plane heat uniformity of the heating surface can be ensured.

  In order to achieve the above object, still another feature of the electric heater according to the present invention includes a plate-like heating element having a current path and made of a metal material, and a support member that supports the plate-like heating element. The lamp heater is disposed so as to face the back surface of the plate-like heating element.

  According to the above configuration, since the lamp heater is disposed on the back side of the plate-like heating element (the surface facing the support member), the lamp heater exclusively assists the temperature rise of the plate-like heating element. Therefore, the temperature increase rate of the plate-like heating element can be improved, and the temperature is quickly shifted to a high temperature state and stabilized. And since a plate-shaped heat generating body heats a workpiece | work, the fall of the in-plane thermal uniformity of the heating surface by the difference in temperature increase rate can be prevented.

  In any one of the configurations described above, the support member may have a thin metal layer on an opposing surface facing the plate-like heating element. Thereby, the radiation radiated from the plate-like heating element can be reflected to the heating space side, and the radiant heat can be efficiently used. Further, the temperature can be quickly raised and lowered, and the throughput can be improved.

  Further, the support member may have a flow passage through which a cooling medium flows. Thereby, the excessive temperature rise of support member itself and a heating space (atmosphere) is suppressed.

  The electric heater according to any one of the above can be implemented as a heating device including the electric heater.

  In order to achieve the above object, the electric heater control method according to the present invention is characterized in that, in the electric heater control method according to any one of the above, when the temperature rises, both the plate-like heating element and the lamp heater are energized. When the temperature is stable, only the plate-like heating element is energized and heated.

  According to the above configuration, both the plate-like heating element and the lamp heater are energized and heated at the time of temperature rise, so that the temperature rise rate of the workpiece or the plate-like heating element can be improved, and the processing can be performed quickly. Will improve. In addition, since only the plate-like heating element is energized and heated when the temperature is stable, energy is saved.

  In such a case, it is preferable that the lamp heater is further energized and heated only when a local temperature drop is detected. Since the lamp heater can instantly heat up, it can quickly cover the area where the temperature has decreased and maintain the in-plane thermal uniformity of the heating surface.

  In order to achieve the above object, another feature of the method for controlling an electric heater according to the present invention is that, in the method for controlling an electric heater according to any one of the above, the temperature is lowered by energizing and heating at least the lamp heater when the temperature is lowered. It is to adjust the speed.

  According to the above configuration, the lamp heater can quickly input heat (good responsiveness) and has a small heat capacity, so that the temperature drop rate can be easily adjusted.

  In such a case, it is preferable that at least the plate-like heating element is energized and heated when the temperature falls. By using it as an auxiliary to the lamp heater, it is possible to ensure in-plane thermal uniformity of the heating surface by the plate-like heating element while lowering the temperature.

  According to the characteristics of the electric heater according to the present invention, the heating device provided with the electric heater, and the control method of the electric heater, it is possible to make the temperature distribution uniform and improve the response of raising and lowering the temperature.

  Other objects, configurations, and effects of the present invention will become apparent from the following embodiments of the present invention.

It is a perspective view which shows the electric heater which concerns on 1st embodiment of this invention. It is a perspective view which shows the electric heater of FIG. It is a back surface side perspective view of FIG. FIG. 4 is a view corresponding to FIG. 3 showing a state where a cover is removed. It is a top view of FIG. It is a front view of FIG. It is a side view of FIG. FIG. 2 is a longitudinal center sectional view of FIG. 1. It is the C section expansion perspective view of FIG. It is the D section expansion perspective view of FIG. It is the E section expansion perspective view of FIG. It is the F section expansion perspective view of FIG. It is a perspective view of a plate-shaped heating element. It is a figure which shows typically the positional relationship of the element member of the electric heater which concerns on 1st embodiment. It is a perspective view which shows the heating apparatus provided with the electric heater which concerns on 2nd embodiment of this invention. It is an inner side expansion perspective view of the connection part vicinity of the electric heater of FIG. It is an outer side expansion perspective view of the connection part vicinity of the electric heater of FIG. It is a perspective view of the electric heater of FIG. It is a back surface side perspective view of FIG. It is an inner side expansion perspective view of the edge part vicinity of the electric heater of FIG. It is an outer side expansion perspective view of the edge part vicinity of the electric heater of FIG. It is an expansion perspective view of the holding member vicinity of a lamp heater. It is a perspective view of a holding insulator. It is a perspective view which shows the electric heater which concerns on other embodiment of this invention. It is a top view of FIG. It is the FF sectional view taken on the line of FIG. FIG. 25 is a view corresponding to FIG. 14 schematically showing the electric heater of FIG. 24. It is a perspective view which shows the electric heater which concerns on other embodiment of this invention. It is a top view of FIG. It is the GG sectional view taken on the line of FIG. FIG. 29 is a view corresponding to FIG. 14 schematically showing the electric heater of FIG. 28. It is a perspective view which shows the electric heater which concerns on other embodiment of this invention. It is a top view of FIG. It is a front view of FIG.

Next, the first embodiment of the present invention will be described in more detail with reference to FIGS.
(overall structure)
As shown in FIGS. 1, 2, and 5, the electric heater 1 </ b> A according to the first embodiment of the present invention generally includes a plate-like heating element 2 having a current path 20 and made of a metal material, and a plate-like heating element 2. A support member 3 to be supported and a lamp heater 4 are provided. The support member 3 has a plate shape and a rectangular shape, and has a holding insulator 5 for holding the plate-like heating element 2. And the heating apparatus 10 is comprised by connecting this electric heater 1A with two or more in the horizontal direction X, for example. For example, it is implemented as a heating device at the bottom of a heating furnace. In the present embodiment, the plate-like heating elements 2 are juxtaposed in four rows in the horizontal direction X perpendicular to the longitudinal direction Y on the support member 3 (water-cooled plate 30), and the lamp heater 4 and the holding insulator 5 are arranged. Are arranged side by side in five rows in the horizontal direction X, but their number and length are not limited to this example.

(Plate heating element)
As shown in FIGS. 1, 2, 5, 6, and 13, the plate-like heating element 2 is formed in a substantially planar shape and rectangular shape, and a plurality of slits 21 are alternately formed in the horizontal direction X from the width direction end portions 22 and 22. A meandering current path 20 is formed by cutting along the line. The linear portion 20a between the pair of width direction end portions 22 and 22 is curved in a convex shape on the upper side in the vertical direction Z so as to form a gentle arc shape (arch shape) when viewed in the longitudinal direction Y. The ends 20x and 20y of the current path 20 are connected to a lead member 29 that is electrically connected to the outside of the electric heater 1A by welding or the like. The width direction end portion 22 is bent substantially orthogonal to the straight portion 20 a of the current path 20. The plate-like heating element 2 is made of a conductive metal material such as Fe-Cr-Al or nickel chrome alloy, for example, and is appropriately selected according to the operating temperature or the like.

(Support member)
As shown in FIGS. 1 to 5, the support member 3 generally has a thin metal layer 30 a on the opposing surface (front surface) facing the plate-like heating element 2 and a water cooling path 30 b on the back surface side (inside, inside). A water cooling plate 30 having a first support member 31 that supports the lamp heater 4, and a second support member 32 that supports the holding insulator 5. These members 30, 31, and 32 are made of a metal material such as plate-like SUS, for example.

  The metal layer 30a is formed by, for example, any one of gold plating, gold coating, platinum plating, and platinum coating. Heat rays and radiant heat radiated from the back side of the plate-like heating element 2 (the side opposite to the heating space S side) are reflected to the heating space S side by the metal layer 30a made of gold, platinum, or the like. What is necessary is just to provide the metal layer 30a in the part (this example between the holding insulators 5 and 5 adjacent to the horizontal direction X) facing the back surface 2b of the plate-shaped heat generating body 2 at least. The metal layer 30a is formed by film forming means such as adhesion of metal foil, vapor deposition, CVD, PVD, sputtering, ion plating, plating, coating, and printing.

  As shown in FIGS. 3 and 4, the water cooling path 30b is a meandering flow path sealed with a cover 33, and for example, a cooling medium such as water is circulated through the input port 30x and the discharge port 30y. Thereby, excessive heating in the heating space S is suppressed, and the ambient temperature is maintained to be equal to or lower than the heat resistant temperature of the quartz tube 42 of the lamp heater 4 described later. Further, the water cooling path 30b also cools the metal layer 30a facing the plate-like heating element 2, so that the metal layer 30a that is weak at high temperature is prevented from being peeled off or missing.

  As shown in FIGS. 5 and 9 to 12, a pair of the first support members 31 are provided at both ends in the longitudinal direction Y of the plate-like heating element 2 with the water cooling plate 30 interposed therebetween, and hold the lamp heater 4. A pillar 34 is erected. The holding column 34 is formed, for example, by bending a pair of metal plate members 34 a and 34 a, and holds the end of the lamp heater 4 while holding it. In addition, the first support member 31 is provided with a cylindrical insulating member 31b through which a fixture 29x for attaching and fixing the lead member 29 passes, and a rectangular insulating member 31c through which the bent portion 29a of the lead member 29 passes, Insulation with the plate-like heating element 2 is ensured.

  As shown in FIGS. 5 and 7 to 10, the second support member 32 includes a pedestal 35 on which a later-described holding insulator 5 is placed (installed), and a holding member 36 that is attached to the pedestal 35 and holds the holding insulator 5. Have. The pedestal 35 is provided along the longitudinal direction Y between the paired first support members 31, 31, and is attached to the water-cooled plate 30 by a fixture 39 x such as a bolt and nut. The clamping member 36 is made of, for example, a metal plate-like member that has a U-shape when viewed in the longitudinal direction Y.

(Lamp heater)
As shown in FIGS. 1, 2, 5 to 8, the lamp heater 4 generally includes a filament 41, a tubular body 42 that accommodates the filament 41, a sealing member 43 that seals the tubular body 42, and a sealing member. The lead wire 44 penetrates the stopper member 43 and electrically connects the external connection line 45 and the filament 41. Such a lamp heater 4 can put a large electric capacity in a small space. For example, when the heat escape from the wall (support member 3) of the heating device 10 is large and affects the soaking in the furnace (heating space S), the lamp heater 4 is given a high capacity to cover the heat escape. , To ensure a wide soaking area Further, as described above, since the heat capacity is small, the rise time of the heater is extremely short, and it is possible to respond quickly. Furthermore, if the capacity is increased, the service life is shortened. However, the lamp heater 4 is easy to replace, and thus maintainability is good. In the present embodiment, for example, a halogen lamp heater that includes a filament 41 made of tungsten and a quartz tube 42 made of transparent quartz glass and in which a trace amount of a halogen compound is sealed together with an inert gas is used.

(Holding eggplant)
As shown in FIGS. 1, 6, 9, and 10, the holding insulator 5 includes a first insulator 51 that has a substantially T shape in the longitudinal direction Y, and a pair of plate-like and rectangular second insulators 52 and 52. . The first insulator 51 includes a plate-like column part 51a and a plate-like head part 51b substantially orthogonal to the column part 51a. The second insulator 52 is formed with a pair of upper and lower plate-like parts 52a and 52c via a step part 52a. The first and second levers 51 and 52 are clamped (clamped and held) by a fastener 36x such as a bolt and nut of the previous clamping member 36. A pair of groove parts 53 and 53 along the longitudinal direction Y are formed by the column part 51a and the upper plate-like part 52b. And the width direction edge part 22 is inserted in this groove part 53, and the plate-shaped heat generating body 2 will be latched (hold | maintained). The first and second insulators 51 and 52 are made of, for example, a so-called ceramic material or silicon nitride material mainly composed of alumina, alumina silica, mullite, zircon, or cordierite. Further, in this example, a plurality of first and second insulators 51 and 52 and the sandwiching member 36 are arranged along the longitudinal direction Y, but the number, length, and the like are not limited to this example.

(Positional relationship of each member)
Here, in the electric heater 1A according to the present embodiment, as shown in FIG. 14, since the adjacent holding insulators 5 and 5 hold the width direction end portions 22 and 22 of the plate-like heating element 2, the holding insulator 5 is heated. It becomes a non-heating part (surface) of the heater with respect to the space S. However, in the present embodiment, since the lamp heater 4 is disposed so as to face the head 51b of the first insulator 51, the holding insulator 5 portion also becomes a heating portion for the heating space S, and the non-heating portion is eliminated. Therefore, the in-plane temperature on the heating surface with respect to the heating space S is made uniform. Moreover, the holding insulator 5 is made of a ceramic material as described above. Since such a ceramic insulator has a reflectance of about 80%, the radiation H2 from the lower part of the lamp heater 4 can be reflected (R2) to be efficiently transmitted to the heating space S, and the thermal efficiency is further improved. . Of course, the radiation H1 from the upper part of the lamp heater 4 directly heats the work (object to be processed) in the heating space S, so that the transmission efficiency is high and the work can be heated quickly.

  Further, since the lamp heater 4 has a small heat capacity of the filament 41, the rise time of the heater is extremely short, and rapid temperature increase / decrease control is possible. Further, since the temperature of the filament 41 is high, the amount of heat radiation with respect to the input energy is large. In addition, in the case of a near-infrared lamp heater such as a halogen lamp heater, since the wavelength of the heat ray is short, the plate-like heating element 2 made of a metal material absorbs the heat ray more and is efficiently heated. As described above, the plate-like (planar) heating element 2 made of a metal material has a large heating area with respect to the heating space S, so that the radiated heat rays and the radiant heat are uniform, but the heat capacity is large, so the temperature increase / decrease rate. Is slow. Accordingly, the plate-like heating element 2 can be heated by a part of the radiation H2 'from the lower part of the lamp heater 4, and the temperature rise of the plate-like heating element 2 can be assisted.

  In addition, since the thin metal layer 30a is provided on the surface (heating space S side) of the water cooling plate 30 (supporting member 3), the back surface 2b side (not exposed to the heating space S) of the plate heating element 2 is provided. Heat rays and radiation H4 radiated from the surface side, the surface side facing the support member 3) are reflected to the heating space S side by the metal layer 30a (R4). For example, if gold or platinum is used as a thin film, the heat capacity is small and a high reflectance can be obtained. Therefore, the loss of energy of radiant heat from the plate-like heating element 2 can be suppressed, and temperature increase / decrease control can be performed quickly. Thus, it becomes possible to improve heating efficiency.

(Control method of electric heater)
By the way, in 1 A of electric heaters in this embodiment, for example, at the time of a temperature rising process, rapid heating control is performed by energizing and heating both the plate-like heating element 2 and the lamp heater 4. When the desired temperature is reached, the energization of the lamp heater 4 is stopped, and only the plate-like heating element 2 is energized and heated. Since the plate-like (planar) heating element 2 made of a metal material has a larger heating area than the heating space S, the ambient temperature can be stabilized.

  On the other hand, for example, when a temperature drop at the head 51b of the first insulator 51 is detected, the lamp heater 4 is energized and heated. As described above, since the lamp heater 4 can be instantly started up even with a large capacity, heat can be supplied quickly in response to the local temperature decrease as described above, so that the temperature decrease is suppressed. Prevents decrease in in-plane temperature deviation.

  And at the time of temperature fall, electricity supply to both the plate-shaped heat generating body 2 and the lamp heater 4 is stopped. However, at that time, the temperature lowering rate may be controlled by energizing and heating the lamp heater 4. As described above, since the lamp heater 4 can be instantly started even with a large electric capacity, temperature adjustment is easy. On the other hand, when it is desired to maintain soaking when the temperature is lowered, only the plate-like heating element 2 is energized and heated. Since the plate-like heating element 2 made of a metal material has a larger heating area than the heating space S, the ambient temperature can be stabilized.

(Second embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS. In the following embodiments, the same reference numerals are given to the same members as those in the first embodiment.

  In the first embodiment, the plate-like heating element 2, the lamp heater 4, and the holding insulator 5 are arranged in parallel in the horizontal direction X on the plate-like rectangular support member 3 (water-cooled plate 30). However, as shown in FIGS. 15 to 19, the electric heater 1 </ b> B according to the second embodiment includes a curved support member 3 </ b> B, a plate-like heating element 2 </ b> B and a holding insulator 5 </ b> B provided on the inner side along the circumferential direction. The lamp heater 4B extends along the circumferential direction, and these members are stacked in a plurality of stages in the vertical direction Z. And the electric heaters 1B and 1B are connected by the connection member 6, and the cylindrical heating apparatus 10B is comprised. Of course, these numbers and lengths are not limited to this example.

  As shown in FIGS. 16 and 18, the plate-like heating element 2 </ b> B is formed in a substantially planar shape and a rectangle, and by cutting a plurality of slits 21 along the vertical direction Z alternately from the vertical end portions 25 and 25. A serpentine current path 20 is formed. Then, the current path 20 is bent along the curved strip member 30B by being bent at the bent portion 26 (vertical end portion 25) of the plate-like heating element 2B between the holding insulators 5B, 5B adjacent in the circumferential direction. There is. A lead member 29 is connected to the end of the current path 20 and is electrically connected to the outside.

  As shown in FIGS. 15 to 19, the support member 3 </ b> B includes a plurality of curved band plate members 30 </ b> B made of, for example, metal, connected in the circumferential direction via the connection member 37, and stacked and supported in the vertical direction Z. ing. A metal layer 30a is formed on the inner peripheral surface (heating space S side) of the band plate member 30B as in the above embodiment. A cutout 38 for attaching the lamp heater 4B is formed at the side end of the support member 3B, and the lamp heater 4B is held by the holding member 38a. Further, the lamp heater 4B is held by the previous plate-like members 34a and 34a also on the back surface side of the side end portion of the support member 3B. Although the water cooling path 30b is omitted in the second embodiment, it may be provided on the outer peripheral side (back side) of the support member 3B as in the first embodiment.

  The lamp heater 4B is different from the linear lamp heater 4 of the first embodiment in that the lamp heater 4B is curved along the inner surface of the support member 3B, but the other configurations are the same as those of the above embodiment.

  As shown in FIGS. 15 and 23, the holding insulator 5 </ b> B has a base end portion 55 having a substantially H-shaped cross section, an enlarged portion 56 that expands from the base end portion 55 in a tapered shape, and is wider than the base end portion 55. It consists of the front-end | tip part 57 formed in cross-sectional substantially H shape. In this example, a plurality are arranged at appropriate intervals in the circumferential direction and in the vertical direction. The base end portion 55 has a pair of linear grooves 55a and 55a in the vertical direction, and fits and holds the strip plate members 30B and 30B adjacent in the vertical direction Z. On the other hand, the front end portion 57 also has a pair of straight grooves 57a and 57a in the vertical direction, and the vertical end portions 25 and 25 of the plate-like heating elements 2B and 2B adjacent in the vertical direction Z are fitted and held. As a result, insulation between the support member 3B and the plate-like heating element 2B is ensured.

  Also in the second embodiment, since the lamp heater 4B is disposed so as to face the head portion 57b of the tip portion 57 of the holding insulator 5B, the same effects as those of the above embodiment can be obtained.

(Other embodiments)
Finally, the possibilities of yet another embodiment of the present invention will be described.
In the electric heater 1A (1B) in the first and second embodiments, the head 51b (57b) of the holding insulator 5 (5B) that holds the widthwise end 22 (25) of the plate-like heating element 2 (2B). The lamp heater 4 (4B) is disposed so as to face the surface, but is not limited to this mode.

  For example, as shown in FIGS. 24 to 26, in the electric heater 1 </ b> C, the lamp heater 4 is disposed so as to face the surface 2 a of the plate-like heating element 2 (the surface in contact with (facing) the heating space S). In this case, as shown in FIG. 27, the plate-like heating element 2 whose radiation H2 from the portion (lower half) on the plate-like heating element 2 side (lower half) of the lamp heater 4 rises (heats up) slowly is heated, and the plate-like heating is generated. Assist the body 2 in raising the temperature. Therefore, the temperature increase rate of the plate-like heating element 2 can be improved. On the other hand, the radiation H1 from the part (upper half) of the lamp heater 4 on the heating space S side directly heats the workpiece in the heating space S. Therefore, while heating a workpiece | work rapidly, the in-plane thermal uniformity of the heating surface with respect to the heating space S is also securable. The filament 41 of the lamp heater 4 is sufficiently smaller than the plate-like heating element 2, and the quartz tube 42 has a very high radiation transmittance. Therefore, even if the lamp heater 4 is disposed so as to face the surface 2a of the plate-like heating element 2 facing (exposed) the heating space S (in this example, directly above the horizontal center of the plate-like heating element 2), the plate The radiation H3 from the surface 2a of the heating element 2 is not inhibited.

  On the other hand, for example, as shown in FIGS. 28 to 30, in the electric heater 1 </ b> D, the lamp heater 4 is disposed so as to face the back surface 2 b (surface facing the support member 3) of the plate-like heating element 2. In such a case, as shown in FIG. 31, the radiation H1 from the portion (upper half) of the lamp heater 4 on the plate-like heating element 2 side heats the plate-like heating element 2 whose rise (temperature rise) is slow. On the other hand, the radiation H2 from the portion (lower half) of the lamp heater 4 on the support member 3 side is reflected by the metal layer 30a of the support member 3 (R2). Thus, since the lamp heater 4 exclusively assists the temperature rise of the plate-like heating element 2, the temperature increase rate of the plate-like heating element 2 can be improved. Since only the plate-like heating element 2 is exposed to the heating space S, the plate-like heating element 2 heats the workpiece and reduces the in-plane thermal uniformity of the heating surface due to the difference in the heating rate. Can be prevented. As in the above example, the lamp heater 4 is disposed facing the back surface 2b of the plate-like heating element 2 facing the support member 3 (not exposed to the heating space S) (in this example, the horizontal plate-like heating element 2). Even immediately below the central part of the plate-like heating element 2, the radiation H4 from the back surface 2b of the plate-like heating element 2 and the reflection R4 from the metal layer 30a are not inhibited.

  Moreover, in each said embodiment, each member was arrange | positioned so that the longitudinal direction Y of the plate-shaped heat generating body 2 and the longitudinal direction of the lamp heater 4 may become parallel. However, for example, as shown in FIGS. 32 to 34, the plate-like heating element 2 and the lamp heater 4 may be arranged orthogonally. It is not limited to the orthogonal arrangement.

  The shape of the plate-like heating element 2 in each of the above embodiments is not limited to the meandering shape. The lamp heater 4 is not limited to the halogen lamp heater, but may be other lamp heaters, various lamp heaters such as near infrared rays and far infrared rays, and other tubular heaters. Further, the shape of the holding insulator 5 is not limited to the shape of the above embodiment.

  In the first embodiment, the water cooling plate 30 having the metal layer 30a on the front surface and the water cooling path 30b formed on the back surface is used for the support member 3. However, for example, a reflector in which the water cooling path 30b is omitted may be used. . Moreover, in each said embodiment, although the supporting members 3 and 3B were comprised by the metal members, it is also possible to set it as a ceramic board, for example. Thus, as long as the supporting member 3 is a member that can support the plate-like heating element 2, the structure, the shape of the member, the material, and the like are not limited to the above-described embodiments.

  1 A of electric heaters of the said 1st embodiment provided the plate-shaped heat generating body 2, the lamp heater 4, and the holding insulator 5 above the perpendicular direction Z of the supporting member 3, and set it as the heating apparatus 10 of the bottom part of a heating furnace. However, the electric heater 1A is not limited to the bottom of the heating device 1 (furnace), and can be installed on a wall or a ceiling. Of course, the electric heater 1B in the second embodiment is not limited to the furnace wall. In addition, the electric heater of each said embodiment does not prevent implementing in combination.

  The electric heater according to the present invention can be used as an electric heater for heat treatment of an object to be heated such as glass, ceramic, or metal. Moreover, it is applicable also to a reaction furnace and a diffusion furnace. Furthermore, an electric heater and a heating apparatus (furnace) provided with the electric heater can be applied to, for example, a semiconductor manufacturing apparatus for semiconductor wafers, a substrate processing apparatus for heating a glass substrate, and the like. It can also be used as a heating device for various hot presses such as automobile steel plates.

1A, 1B, 1C, 1D: Electric heater, 2, 2B: Plate-like heating element, 2a: Front surface, 2b: Back surface, 3, 3B: Support member, 4, 4B: Lamp heater (tubular heater), 5, 5B: Holding insulator, 6: connecting member, 10: heating device, 20, 20B: current path, 20a: linear portion, 20x, 20y: end, 21: slit, 22: end in width direction, 25: end in vertical direction , 26: bent portion, 29: lead member, 29x: fixture, 30: water-cooled plate, 30B: strip plate member, 30 ': water-cooled plate, 30a: metal layer, 30b: water-cooled route (distribution route), 30x: Input port, 30y: discharge port, 31: first support member, 31b, 31c: insulating member, 32: second support member, 33: cover, 34: holding column, 34a: plate member, 35: pedestal, 36: Mounting member, 36x: Fastener, 37: Connection member, 38: Cut Part, 38a: holding member, 39x: fixing tool, 41: filament, 42: tubular body (quartz glass tube), 43: sealing member, 44: lead wire, 45: connecting wire, 51: first insulator, 51a: Column part, 51b: Head part, 52: Second insulator, 52a: Step part, 52b: Upper plate part, 52c: Lower plate part, 55: Base end part, 55a: Groove part, 56: Enlarged part, 57: Tip portion, 57a: groove portion, 57b: head portion, X: horizontal direction, Y: longitudinal direction, Z: vertical direction, S: heating space

Claims (10)

An electric heater comprising a plate-like heating element made of a metal material having a current path, and a support member for supporting the plate-like heating element,
The support member has a holding insulator for holding the plate-like heating element,
An electric heater in which a lamp heater is disposed to face the head of the holding insulator. An electric heater comprising a plate-like heating element made of a metal material having a current path, and a support member for supporting the plate-like heating element,
An electric heater in which a lamp heater is arranged to face the surface of the plate-like heating element. An electric heater comprising a plate-like heating element made of a metal material having a current path, and a support member for supporting the plate-like heating element,
An electric heater in which a lamp heater is arranged to face the back surface of the plate-like heating element. The electric heater according to any one of claims 1 to 3, wherein the support member has a thin metal layer on a facing surface facing the plate-like heating element. The electric heater according to any one of claims 1 to 4, wherein the support member has a flow passage through which a cooling medium flows. The heating apparatus provided with the electric heater in any one of Claims 1-5. It is the control method of the electric heater in any one of Claims 1-5,
An electric heater control method in which both the plate-like heating element and the lamp heater are energized and heated when the temperature rises, and only the plate-like heating element is energized and heated when the temperature is stable. The method for controlling an electric heater according to claim 7, wherein only when a local temperature drop is detected, the lamp heater is further energized and heated. It is the control method of the electric heater in any one of Claims 1-5,
An electric heater control method for adjusting a temperature lowering rate by energizing and heating at least the lamp heater at the time of temperature lowering. 9. The method of controlling an electric heater according to claim 8, wherein at the time of cooling, the soaking is maintained by energizing and heating at least the plate-like heating element.