JP2019009433A - Cooling member - Google Patents

Abstract

To provide a cooling member which achieves excellent cooling effect, enables downsizing and reduction of its thickness to be achieved easily, and enables local cooling.SOLUTION: A cooling member 1 has: a metal fiber sheet 5 formed by metal fiber; and a cooling mechanism 6 including a housing body 10, which houses the metal fiber sheet, and refrigerant introduction means, which introduces a refrigerant into the housing body, and cools the metal fiber sheet.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a cooling member.

  Cooling members are widely used in electrical devices, electronic devices, semiconductor devices, and the like to manage the temperature of circuits that are vulnerable to heat generation. If the electric power used by the electrical equipment increases, the amount of heat generation increases, and the temperature of the electrical equipment tends to become high. Such heat generation may cause malfunction or failure of an electric device or the like. Therefore, a general electric device or the like includes a cooling member as a cooling mechanism for cooling and dissipating generated heat (Patent Documents 1 to 3).

Patent Document 1 discloses a cooling device that cools a semiconductor device such as an IC chip. The cooling device described in Patent Literature 1 includes a plurality of protruding heat radiating portions, and a cotton-like body containing a volatile liquid is filled in the protruding heat radiating portions. Such a cooling device has a plurality of protrusions filled with a cotton-like body, thereby enhancing the cooling effect by the heat of vaporization of the volatile liquid.
Patent Document 2 discloses a heat dissipation member that dissipates heat generated by a printed wiring board on which an electronic component such as an IC chip is mounted. The heat radiating member described in Patent Document 2 includes a heat conducting portion and a heat radiating portion. The heat radiating member described in Patent Document 2 transfers heat from the heat generating element to the heat conducting portion and radiates heat from the heat radiating portion having the three-dimensional network structure. Such a heat dissipation member can increase the heat dissipation efficiency by taking a large surface area of the three-dimensional network structure.
Patent Document 3 discloses a metal heat sink that exhausts heat generated by an IC chip or the like. In the heat sink described in Patent Document 3, a linear coil is provided on bulk copper. Such a heat sink transfers heat generated in an IC chip or the like of an electronic device to bulk copper and radiates heat from a linear coil that is a heat radiating portion.

Japanese Unexamined Patent Publication No. 7-335797 Japanese Patent No. 2951327 JP 2004-311711 A

However, the cooling mechanisms described in Patent Documents 1 to 3 cannot obtain a sufficient cooling effect because the cooling efficiency is increased by simply increasing the surface area of the heat radiating portion.
Since the cooling device described in Patent Document 1 includes a protruding portion, it requires a considerable thickness and is not suitable for space saving. Similarly, since the heat radiating member described in Patent Document 2 has a three-dimensional network structure, it is not suitable for space saving. Moreover, since the heat sink of patent document 3 is provided with bulk copper, it is heavy and is not suitable for weight reduction. In an electric device or the like that is required to save space such as downsizing and thinning, it is difficult to employ the cooling mechanism disclosed in Patent Documents 1 to 3 that requires a considerable thickness.
From the above, the cooling mechanisms of Patent Documents 1 to 3 are not suitable for downsizing and thinning in addition to insufficient cooling effect.

Moreover, in the board | substrate etc. which are used for an electrical equipment etc., the part provided with heat generating bodies, such as a semiconductor device, becomes relatively high temperature, and another part becomes relatively low temperature. In order to efficiently cool such a high-temperature portion, a method of locally cooling the portion having a relatively high temperature is more effective than cooling the entire substrate. Therefore, a cooling member that enables local cooling is desired.
However, since the cooling mechanisms described in Patent Documents 1 to 3 are simply attached so as to entirely cover the heating element such as an IC chip, it is difficult to say that the heating element can be locally cooled.

  This invention is made | formed in view of the said background, and makes it a subject to provide the cooling member which is excellent in the cooling effect, is easy to reduce in size and thickness, and enables local cooling.

The present invention has the following aspects.
[1] A cooling member having a metal fiber sheet made of metal fibers and a cooling mechanism for cooling the metal fiber sheet.
[2] The cooling member according to [1], wherein the cooling mechanism includes a container that stores the metal fiber sheet, and a refrigerant introduction unit that introduces a refrigerant into the container.
[3] The cooling member according to [2], wherein the container is configured by at least one selected from the group consisting of a copper plate, an aluminum plate, a copper foil, and an aluminum foil.
[4] The cooling member according to [1], wherein the cooling mechanism includes a support body that supports the metal fiber sheet, and a hollow portion that serves as a refrigerant flow path is provided inside the support body.
[5] The cooling member according to [4], wherein a through hole through which the coolant is led out is provided in the support body from the hollow portion toward the metal fiber sheet.
[6] The cooling member according to [4] or [5], including a lid that covers the metal fiber sheet.
[7] The cooling member according to any one of [1] to [6], wherein the metal fiber is a copper fiber.

  ADVANTAGE OF THE INVENTION According to this invention, it is excellent in the cooling effect, can be easily reduced in size and thickness, and can provide the cooling member which enables local cooling.

It is a perspective view which shows an example of the cooling member of 1st Embodiment. It is II-II sectional drawing of the cooling member of FIG. It is a perspective view which shows an example of the cooling member of 2nd Embodiment. It is a top view which shows the cooling mechanism of the cooling member of FIG. It is VV sectional drawing of the cooling member of FIG. It is a figure which shows an example of the method of manufacturing the cooling mechanism which concerns on the cooling member of this invention. It is VII-VII sectional drawing of each cooling mechanism shown in FIG. It is a perspective view which shows an example of the cooling member of 3rd Embodiment. It is a top view which shows the support body of the cooling member of FIG. It is XX sectional drawing of the cooling member of FIG. It is a perspective view which shows an example of the cooling member of 4th Embodiment. It is XII-XII sectional drawing of the cooling member of FIG. It is a top view of the cooling member of FIG. It is a top view which shows the support body of the cooling member of FIG. It is XV-XV sectional drawing of FIG. It is a top view which shows an example of the cooling member of 5th Embodiment. It is XVII-XVII sectional drawing of the cooling member of FIG. It is a side view of the cooling member of FIG. It is a top view which shows an example of the cooling member of 6th Embodiment. It is XX-XX sectional drawing of the cooling member of FIG. FIG. 20 is a side view of the cooling member of FIG. 19. It is a top view which shows an example of the cooling member of 7th Embodiment. It is XXIII-XXIII sectional drawing of the cooling member of FIG. It is a side view of the cooling member of FIG. It is a top view which shows an example of the cooling member of 8th Embodiment. It is XXVI-XXVI sectional drawing of the cooling member of FIG. It is a side view of the cooling member of FIG. It is a top view which shows an example of the cooling member of 9th Embodiment. It is XXIX-XXIX sectional drawing of the cooling member of FIG. It is a figure for demonstrating an example of the method of manufacturing the cooling member of FIG. It is XXXI-XXXI sectional drawing of FIG. It is a top view which shows an example of the cooling member of 10th Embodiment. It is XXXIII-XXXIII sectional drawing of the cooling member of FIG. It is a side view of the cooling member of FIG. It is a top view which shows an example of the cooling member of 11th Embodiment. It is XXXVI-XXXVI sectional drawing of the cooling member of FIG. It is a side view of the cooling member of FIG. It is a top view which shows an example of the cooling member of 12th Embodiment. It is XXXIX-XXXIX sectional drawing of the cooling member of FIG. FIG. 39 is a cross-sectional view of the cooling member of FIG. 38 taken along XXX-XXXX.

The following definitions of terms apply throughout this specification and the claims.
“Metal fiber” means a fiber mainly composed of metal. For example, “copper fiber” means a fiber mainly composed of copper. Copper as a main component means a state in which a certain amount of other components may be included as long as the effect of the present invention is not prevented, including inevitable impurities.
“Thermal conductivity (unit: W / (m · K))” is a value measured by a laser flash method (manufactured by ULVAC-RIKO, Inc., a laser flash thermal constant measuring device “TC7000 type”).
The “average fiber diameter” means that the cross-sectional area perpendicular to the longitudinal direction of the metal fiber is calculated by a known calculation method based on the vertical cross-sections at arbitrary locations on the metal fiber sheet imaged with a microscope. It is an arithmetic mean value of area diameters derived by calculating the diameter of a perfect circle having the same area as the area. The plurality of locations can be 20 locations, for example.
The “average fiber length” is an arithmetic average value of values obtained by measuring the lengths of the fibers in the longitudinal direction for a plurality of fibers randomly selected with a microscope. When the fiber is not linear, the length of the curve along the fiber is taken. For example, the number of the plurality may be 20.
The “space factor” is the ratio of the portion where the fiber is present to the volume of the fiber sheet, and is calculated from the basis weight, thickness, and true density of the fiber by the following formula. When the fiber sheet includes a plurality of types of fibers, the space factor can be calculated by adopting a true density value reflecting the composition ratio of each fiber.
(Space factor (%)) = (basis weight of fiber sheet) / ((thickness of fiber sheet) × (true density)) × 100.
“Sheet thickness” is a terminal drop-type film thickness meter by air (for example, “Digimatic Indicator ID-C112X” manufactured by Mitutoyo Corporation). It is an arithmetic mean value of.
“Homogeneity” means that there are few variations in the sheet characteristics such as electrical characteristics, physical characteristics, and air permeability characteristics of the sheet composed of fibers. As an index of homogeneity, for example, a basis weight variation coefficient (CV value) defined in JIS Z8101 per 1 cm ² can be employed.
“Porosity” is the ratio of the portion where voids exist to the volume of the fiber sheet, and is calculated from the basis weight, thickness, and true density of the fiber by the following formula. When the fiber sheet includes a plurality of types of fibers, the space factor can be calculated by adopting a true density value reflecting the composition ratio of each fiber.
(Void ratio (%)) = (1- (basis weight of fiber sheet) / ((thickness of fiber sheet) × (true density))) × 100.

[First Embodiment]
Hereinafter, the cooling member 1 of 1st Embodiment to which this invention is applied is demonstrated. In the drawings used in the following description, the dimensional ratios and the like of each component are not necessarily the same as actual.
FIG. 1 is a perspective view showing a cooling member 1 according to the first embodiment. As shown in FIG. 1, the cooling member 1 of 1st Embodiment has the metal fiber sheet 5 and the cooling mechanism 6 of 1st Embodiment. The cooling mechanism 6 cools the metal fiber sheet 5. In the cooling member 1 of the first embodiment, the refrigerant introduced into the cooling mechanism 6 can cool the metal fiber sheet 5.
The refrigerant is not particularly limited, and examples thereof include known refrigerants used in industrial fields such as electrical equipment and electronic equipment. Examples of the refrigerant include air, a fluorine-based inert liquid, and insulating oil.

(Metal fiber sheet)
The metal fiber sheet 5 may be composed of metal fibers alone or in combination with fibers other than metal fibers.
Examples of the metal component constituting the metal fiber include, but are not limited to, copper, stainless steel, iron, aluminum, nickel, and chromium. The metal component may be a noble metal such as gold, platinum, silver, palladium, rhodium, iridium, ruthenium, and osmium. Among these, copper, stainless steel, and aluminum are preferable as the metal component constituting the metal fiber. In particular, a copper fiber is preferable because it has an excellent balance between rigidity and plastic deformability. Therefore, it is preferable that the metal fiber sheet 5 is a copper fiber sheet composed of copper fibers.
Components other than metal include polyolefins such as polyethylene terephthalate (PET) resin, polyvinyl alcohol (PVA), polyethylene, and polypropylene, polyvinyl chloride resin, aramid resin, nylon, acrylic resin, and fibrous materials thereof. Organic materials having a binding property and a supporting property. These organic substances can be used, for example, for assisting / improving the form maintainability and functionality during the production of the metal fiber sheet 5.

The metal fiber sheet 5 is preferably bound with metal fibers. The fact that the metal fibers are bound means that the metal fibers are physically fixed to form a binding portion. In the metal fiber sheet 5, the metal fibers may be directly fixed at the binding portion, or part of the metal fibers may be indirectly fixed via a component other than the metal component. .
A gap can be formed between the metal fibers constituting the metal fiber sheet 5 by binding the metal fibers. Such voids may be formed by entanglement of metal fibers, for example. Since the metal fiber sheet 5 includes the voids, a refrigerant described later is introduced into the metal fiber sheet 5, and for example, it is easy to efficiently take away the heat conducted from the heating element to the metal fiber sheet 5. It becomes easy to raise the cooling efficiency of 5. The porosity of the metal fiber sheet 5 is preferably 5 to 95%, and more preferably 5 to 60%.

The thermal conductivity of the metal fiber sheet 5 is preferably 5 W / m · K or more. If the thermal conductivity of the metal fiber sheet 5 is 5 W / m · K or more, the cooling efficiency of the cooling member 1 of the first embodiment is likely to be excellent.
In the metal fiber sheet 5, it is preferable that the metal fiber is sintered at the binding portion. By sintering the metal fiber, the thermal conductivity and homogeneity of the metal fiber sheet 5 are easily stabilized.

  The structure of the metal fiber sheet 5 is not particularly limited as long as it is a sheet shape, and can have an arbitrary sheet structure. For example, the sheet structure of the metal fiber sheet 5 may be a nonwoven fabric in which metal fibers are randomly entangled, or may be a woven fabric having regularity, or a mesh material. Further, the surface of the metal fiber sheet 5 may be flat, corrugated or the like, may have irregularities, and is not particularly limited.

FIG. 2 is a II-II cross-sectional view of the cooling member 1 of FIG. The thickness D _{1 in} the vertical direction of the metal fiber sheet 5 shown in FIG. 2 is preferably in the range of 0.5 mm to 5 mm. When the thickness _{D 1} of the metal fiber sheet 5 is 0.5mm or more, the cooling effect of the cooling member 1 is likely superior. If less thickness D ₁ is 5mm metal fiber sheet 5, it made the cooling member 1 easily thinned. The thickness D ₁ of the metal fiber sheet 5 can be appropriately adjusted in the pressing process to be described later.

The basis weight of the metal fiber sheet 5 ^is preferably in the range of ^{10g / m 2 ~1000g / m 2} . When the basis weight of the metal fiber sheet 5 is 10 g / m ² or more, the cooling effect by the cooling member 1 is likely to be excellent. If the basic weight of the metal fiber sheet 5 is 1000 g / m ² or less, the metal fiber sheet 5 is easily reduced in weight, and the cooling member 1 is easily reduced in weight.

The average fiber diameter of the metal fibers can be arbitrarily set within a range not impairing the effects of the present invention. The average fiber diameter of the metal fibers is preferably 1 μm to 30 μm, and preferably 2 μm to 20 μm. When the average fiber diameter of the metal fibers is less than 1 μm, the rigidity of the metal fibers is lowered, and so-called lumps are likely to occur when the metal fiber sheet 5 is manufactured. Due to the occurrence of lumps, the thermal conductivity and homogeneity of the metal fiber sheet 5 are difficult to stabilize. If the average fiber diameter of the metal fibers exceeds 30 μm, the rigidity of the metal fibers may hinder fiber entanglement.
The shape of the cross section perpendicular to the longitudinal direction of the metal fiber can be any shape. The cross-sectional shape may be any shape such as a circle, an ellipse, a substantially quadrangle, and an indefinite shape.

The average fiber length of the metal fibers can be arbitrarily set as long as the effects of the present invention are not impaired. The average fiber length of the metal fibers is preferably in the range of 1 mm to 10 mm, more preferably in the range of 3 mm to 5 mm. When the average fiber length of the metal fibers is in the range of 1 mm to 10 mm, the thermal conductivity and homogeneity of the cooling member 1 are likely to be stable.
The aspect ratio of the metal fiber is preferably 33 to 10,000. When the aspect ratio is less than 33, the metal fibers are hardly entangled, and the strength of the cooling member 1 may be reduced. If the aspect ratio exceeds 10,000, the homogeneity of the metal fiber sheet 5 may be reduced, and the thermal conductivity of the cooling member 1 may be difficult to stabilize.

  The lower limit value of the space factor of the metal fiber sheet 5 is preferably 2% or more, more preferably 4% or more, and further preferably 5% or more. The upper limit of the space factor of the metal fiber sheet 5 is preferably 65% or less, and more preferably 60% or less. When the volume ratio is less than 2%, the pressure loss at the time of introducing the refrigerant can be suppressed, but the cooling effect may be reduced due to the shortage of fiber. Further, if the space factor exceeds 65%, the pressure loss at the time of introducing the refrigerant may increase.

The basis weight variation coefficient (CV value) defined in JIS Z8101 per cm ^{2 of the} metal fiber sheet 5 is preferably 10% or less. Since the basis weight is an index indicating the weight per unit volume, it is a stable value for the thermal conductivity and the space factor of the metal fiber sheet 5 that the variation coefficient of the basis weight is not more than a certain value. It can be said that there is. That is, if the variation coefficient of the basis weight of the metal fiber sheet 5 is 10% or less, extremely small lumps and voids are not easily present in the metal fiber sheet 5, the homogeneity of the metal fiber sheet 5 is excellent, and the cooling member The thermal conductivity value of 1 tends to be stable.

  Examples of the method for producing the metal fiber sheet 5 include a dry method for compression molding and a method for paper making by a wet paper making method. When the metal fiber sheet 5 is obtained by a dry method, a web mainly composed of metal fibers obtained by a card method, an airlaid method or the like can be compression-molded. In compression molding, a metal fiber may be impregnated with a binder in order to provide a bond between the metal fibers. As such a binder, a known organic binder such as an acrylic adhesive and a known inorganic binder such as colloidal silica can be used.

When the metal fiber sheet 5 is manufactured by a wet papermaking method, wet papermaking can be performed with a paper machine using a slurry in which metal fibers and the like are dispersed in an aqueous medium. Known additives such as fillers, dispersants, thickeners, antifoaming agents, paper strength enhancing agents, sizing agents, flocculants, colorants, and fixing agents can be appropriately added to the slurry.
The wet sheet obtained by wet papermaking may be subjected to a fiber entanglement treatment step in which metal fibers and the like are entangled with each other. As the fiber entanglement treatment step, a method of spraying a high-pressure jet water stream onto the wet sheet surface can be adopted, and by this method, the fibers mainly composed of metal fibers or metal fibers are entangled throughout the sheet. Can do. After this step, the wet sheet is wound up through a dryer step.

The sheet obtained through the fiber entanglement process and the dryer process can be subjected to a pressing process before binding the metal fibers or the like. By carrying out the pressing step, extremely large voids formed between the metal fibers can be reduced and the homogeneity can be enhanced. Also, during the pressing step, by appropriately adjusting the pressure during the press, it is possible to adjust the thickness D ₁ of the metal fiber sheet 5. For example, when the metal fiber sheet 5 having a thickness of about 170 μm is manufactured, the homogeneity of the metal fiber sheet 5 can be improved by pressing at a linear pressure of less than 300 kg / cm.

As a method for binding metal fibers or the like, it is preferable to perform a sintering step of sintering the metal fiber sheet 5. By sintering and binding the metal fiber sheet 5, the metal fibers can be securely bound and the metal fibers can be fixed, and the basis weight variation coefficient (CV value) of the metal fiber sheet 5 is It becomes easier to stabilize. By carrying out the sintering step, the contact points between the metal fibers are bound and a binding part can be reliably provided, and the homogeneity and thermal conductivity of the metal fiber sheet 5 are easily stabilized.
The metal fiber sheet 5 that has undergone the sintering process preferably further undergoes a pressing process. After the sintering process, the metal fiber sheet 5 can be made thinner while the homogeneity of the metal fiber sheet 5 can be improved more easily by passing through a pressing process. Due to the pressing process after sintering, not only the thickness direction but also the surface direction shifts metal fibers and the like. As a result, metal fibers and the like are also arranged at the gaps at the time of sintering, the homogeneity is improved, and this state is maintained by the plastic deformation characteristics of the metal fibers. The pressure pressing step carried out after the sintering step may be appropriately set in consideration of the thickness D ₁ of the metal fiber sheet 5.

(Cooling mechanism of the first embodiment)
The cooling mechanism 6 of the first embodiment cools the metal fiber sheet 5. The cooling mechanism 6 includes a container 10 and refrigerant introduction means (not shown) for introducing a refrigerant into the container. The container 10 houses the metal fiber sheet 5.

The shape of the container 10 is not particularly limited, and can be an arbitrary structure and shape. The container 10 can be made of a known metal material, a known ceramic material, a known resin material, or the like. Examples of the metal material include stainless steel, copper, aluminum, and alumina. Examples of the ceramic material include zirconia, barium titanate, silicon carbide, silicon nitride, and aluminum nitride. Examples of the resin material include polyacrylic acid resins such as polymethacrylic acid and polycyanoacrylic acid (polycyanoacrylate); polyvinylpyrrolidone resins; polyester resins such as polyethylene terephthalate; polypropylene resins; fluorine resins such as polytetrafluoroethylene; Polyimide resin; Polyamide resin containing aramid; Polyparaphenylene benzobisoxazole resin and the like can be mentioned. Among these, from the viewpoint of cooling efficiency, the material of the container 10 is preferably a metal material having high thermal conductivity such as stainless steel, copper, and aluminum. When the container 10 is comprised with these metal materials, you may perform a sintering process in the aspect which accommodated the metal fiber sheet 5. FIG. By producing the cooling member 1 of the first embodiment by such a method, a cooling member in which the container 10 and the metal fiber sheet 5 are bound can be obtained. In the cooling member in which the container 10 and the metal fiber sheet 5 are bound, heat from the heating element is easily transmitted to the metal fiber sheet 5, and the cooling effect by the cooling member is easily excellent. For example, the container 10 can be composed of at least one selected from the group consisting of a copper plate, an aluminum plate, a copper foil, and an aluminum foil.
Moreover, it is preferable that at least one surface where the container 10 is in contact with the heating element is made of a thermally conductive material such as metal.

In the cooling member 1 of the first embodiment, the cooling mechanism 6 includes refrigerant introduction means (not shown) that introduces refrigerant into the container 10. Thereby, the refrigerant can be introduced into the container 10. The refrigerant introducing means is not particularly limited, and examples thereof include known refrigerant introducing means such as a compressor and a liquid pump.
The metal fiber sheet 5 accommodated in the container 10 can be cooled by introducing the refrigerant into the container 10. Since the metal fiber sheet 5 is made of copper fiber or aluminum fiber, it is efficiently cooled by the refrigerant.

  When the container 10 is a metal, it is preferable that the metal fiber sheet 5 and the container 10 are bound. As a method for binding the metal fiber sheet 5 and the container 10, for example, the container 10 can be arranged on the metal fiber sheet 5 in a manner as shown in FIG. 1 and sintered.

The structure of the container 10 is a structure in which a refrigerant can be introduced into the container 10. In the cooling member 1 of the first embodiment, both ends of the container 10 are open ends. That is, the container 10 includes a first opening end portion 11 and a second opening end portion 12.
The refrigerant introduced into the container 10 from the first opening end 11 cools the cooling member 1 from the inside and is led out from the second opening end 12. By providing the first opening end portion 11 and the second opening end portion 12, the refrigerant is introduced into the housing body 10 from the first end portion of the housing body 10, and from the second opening end portion 12. Can be derived. In addition, in the cooling member 1 of 1st Embodiment, although the both ends of the container 10 are made into the opening edge part, the cooling member 1 of 1st Embodiment is not limited to this, Only either one edge part May be an open end.

  In addition, in the cooling member 1 of 1st Embodiment, the shape of the cross section of the 1st and 2nd opening edge parts 11 and 12 and the area of an opening surface can be selected arbitrarily. The cooling effect by the cooling member 1 can be adjusted by appropriately selecting the areas of the opening surfaces of the first and second opening end portions 11 and 12. For example, when the cooling effect by the cooling member 1 is desired to be further increased, the refrigerant introduction efficiency may be increased by increasing the area of the opening surface of the first opening end 11.

  When the area of the opening surface of the first opening end 11 is small and it is difficult to introduce the refrigerant or when it is desired to improve the cooling efficiency, a known refrigerant introducing means for introducing the refrigerant into the container 10 is known. Pressurizing means can be used. Such pressurizing means is not particularly limited, and examples thereof include known pressurizing means such as a compressor and a pressurizing pump.

Moreover, in the cooling member 1 of 1st Embodiment, although the whole area | region of the metal fiber sheet 5 is accommodated in the container 10, even if a one part area | region of the metal fiber sheet 5 is accommodated in the container 10. Good. In this case, by introducing the refrigerant into the container 10, it is possible to locally cool the metal fiber sheet 5 in a part of the region accommodated in the container 10.
Moreover, in the cooling member 1 of embodiment mentioned above, although the both ends of the container 10 are made into the open end, both ends may be made into the closed end. In this case, a refrigerant inlet for introducing the refrigerant into the interior of the container 10 must be provided at an arbitrary location of the container 10. In the case where such a refrigerant introduction port is provided in the housing body 10, a refrigerant outlet port through which the refrigerant is led out from the inside of the housing body 10 may be further provided at an arbitrary location of the housing body 10.

(Operational effects of the first embodiment)
As for the cooling member 1 of 1st Embodiment, the metal fiber sheet 5 is accommodated in the inside of the accommodating body 10. FIG. By introducing the refrigerant into the housing 10 of the cooling member 1, the cooling member 1 can continuously hold the refrigerant inside the metal fiber sheet 5. Therefore, the metal fiber sheet 5 is easily cooled efficiently. By cooling the metal fiber sheet 5, it is possible to effectively cool the container 10 that is in contact with the metal fiber sheet 5. Therefore, it is possible to effectively cool a heating element that is in contact with or close to the cooled portion of the container 10.

[Second Embodiment]
Hereinafter, although the cooling member of 2nd Embodiment to which this invention is applied is demonstrated in detail using drawing, the cooling member of this invention is not limited to the following description. In addition, in the cooling member 2 of 2nd Embodiment shown to FIG.3, 5, the same code | symbol is attached | subjected to the structure same as the cooling member 1 of 1st Embodiment, and the description is abbreviate | omitted.

  FIG. 3 is a perspective view showing the cooling member 2 of the second embodiment. As shown in FIG. 3, the cooling member 2 of the second embodiment includes a metal fiber sheet 5 and a cooling mechanism 7. The cooling mechanism 7 of the second embodiment cools the metal fiber sheet 5. In the cooling member 2 of the second embodiment, the refrigerant introduced into the cooling mechanism 7 can cool the metal fiber sheet 5.

In the cooling member 2 shown in FIG. 3, the thickness D _{2 in} the vertical direction of the metal fiber sheet 5 is preferably in the range of 100 μm to 5 mm. If the thickness D ₂ of the metal fiber sheet 5 is 100μm or more, the refrigerant is likely to be sufficiently introduced, the cooling effect of the cooling member 2 tends excellent. If less thickness D ₂ is 5mm metal fiber sheet 5, the metal fiber sheet 5 tends to thin, the cooling member 2 easily thinned. The thickness D ₂ of the metal fiber sheet 5 can be appropriately adjusted in the pressing step as described in the section “[First Embodiment]”.

  The cooling member 2 of 2nd Embodiment can be made into arbitrary three-dimensional shapes according to the objective of use. Such a three-dimensional shape may be any shape such as a cylindrical shape, an elliptical column shape, and a polygonal column shape. Hereinafter, although a polygonal column-shaped cooling member will be described as an example of an embodiment of the present invention, the shape of the cooling member of the present invention is not limited to a polygonal columnar shape.

(Cooling mechanism of the second embodiment)
As shown in FIG. 3, the cooling mechanism 7 of the second embodiment includes a support 20. The support 20 supports the metal fiber sheet 5.
A hollow portion 22 serving as a refrigerant flow path is provided inside the support 20. The support 20 is cooled by the coolant flowing through the hollow portion 22. The cooling mechanism 7 of 2nd Embodiment can cool the metal fiber sheet 5 with the refrigerant | coolant derived | led-out from the part which contacts the support body 20 cooled. That is, even when heat from the heating element propagates to the metal fiber sheet 5 and the temperature of the metal fiber sheet rises, the refrigerant introduced into the cooling mechanism 7 cools the metal fiber sheet 5 through the support 20. can do.

  The support 20 can be made of the same material as the container 10 described in the section “[First Embodiment]”. From the viewpoint of cooling efficiency, the material of the support 20 is preferably a metal material having high thermal conductivity.

  4 is a top view showing the cooling mechanism 7 of FIG. As shown in FIG. 4, a plurality of through holes 24 penetrating from the upper surface of the support 20 to the hollow portion 22 inside the support 20 are provided on the upper surface of the support 20. By providing the through hole 24 on the upper surface of the support 20, the refrigerant flowing through the hollow portion 22 is led out from the through hole 24 toward the metal fiber sheet 5. The diameter of the through hole 24 is not particularly limited and can be set arbitrarily. The number of through holes 24 is not particularly limited and can be set arbitrarily. In the cooling mechanism 7 shown in FIG. 4, the interval between the through holes 24 is regular, but the through holes 24 may be provided on the upper surface of the support 20 at irregular intervals.

The arrow in FIG. 4 shows an example of the direction of the refrigerant introduced into the hollow portion 22 from the opening end portion 26 of the support 20. In the cooling mechanism 7 of the second embodiment, the refrigerant can be introduced into the hollow portion 22 from the opening end portion 26 of the support 20.
The shape and structure of the support 20 are not particularly limited as long as the refrigerant can be introduced into the hollow portion 22 inside the support 20. When the area of the opening surface of the opening end portion 26 is small and it is difficult to introduce the refrigerant, or when it is desired to improve the cooling efficiency, a refrigerant introducing means for introducing the refrigerant into the hollow portion 22 can be used. Such a refrigerant introducing means is not particularly limited, and may be a known pressurizing means such as a pressurizing pump.

5 is a VV cross-sectional view of the cooling member 2 of FIG. An arrow in FIG. 5 shows an example of the direction of the refrigerant led out from the through hole 24. When the refrigerant is introduced from the open end portion 26 into the hollow portion 22, the refrigerant flows through the hollow portion 22. The refrigerant flowing through the hollow portion 22 is led out from the through hole 24 toward the metal fiber sheet 5. The refrigerant led out from the through hole 24 cools the metal fiber sheet 5. Since the metal fiber sheet 5 is composed of metal fibers, the metal fiber sheet 5 is efficiently cooled in the process in which the refrigerant enters the gaps between the metal fibers and passes through the gaps.
By providing the through hole 24 in the support body 20, the refrigerant can reach the metal fiber sheet 5 directly from the hollow portion 22. Therefore, the cooling mechanism 7 according to the second embodiment can sufficiently cool the metal fiber sheet 5 when the refrigerant is led out from the through hole 24.
In addition, although the refrigerant | coolant which cooled the metal fiber sheet 5 is derived | led-out from the metal fiber sheet 5, the part to which a refrigerant | coolant is derived | led-out from the metal fiber sheet 5 is not specifically limited, The upper surface of the metal fiber sheet 5, or a metal fiber It may be derived from the side surface of the sheet 5.

As shown in FIG. 5, a partition portion 23 is provided inside the support body 20. By providing the partition portion 23 inside the support body 20, a plurality of hollow portions 22 serving as refrigerant flow paths are formed inside the support body 20.
As shown in FIG. 4, the through hole 24 is provided on the upper surface of the support 20 along the direction of the partition portion 23. Therefore, the direction of flow of the refrigerant flowing through the hollow portion 22 is guided by the partition portion 23 and is efficiently led out from the through hole 24. Therefore, the refrigerant flowing through the hollow portion 22 can effectively cool the metal fiber sheet 5. Thus, in the support body 20 of the cooling member 2 of the second embodiment, the flow direction of the refrigerant can be controlled by the refrigerant flowing through the hollow portion 22.

The method for manufacturing the cooling mechanism according to the cooling member 2 of the second embodiment is not particularly limited. A metal material, a resin material, or the like may be manufactured by cutting or the like, a mold, or the like may be used, or may be manufactured by the following method using a casting.
Drawing 6 is a figure showing an example of a manufacturing method of a cooling mechanism concerning cooling member 2 of a 2nd embodiment in order of Step S1 to Step S6. FIG. 7 is a VII-VII sectional view of each cooling mechanism shown in FIG.

In step S <b> 1, the organic mold frame layer 27 having adhesiveness is adhered on the first substrate 31.
The material of the first substrate 31 is not particularly limited as long as it does not change due to melting or the like due to a casting to be described later. Specific examples of the material of the first substrate 31 include metal materials such as stainless steel, copper, aluminum, and alumina; polyacrylic acid resins such as polymethacrylic acid and polycyanoacrylic acid (polycyanoacrylate); polyvinylpyrrolidone resins; Polyester resin such as polyethylene terephthalate; Polypropylene resin; Fluorine resin such as polytetrafluoroethylene; Polyimide resin; Polyamide resin containing aramid; Polyparaphenylene benzobisoxazole resin.
The organic mold layer 27 is formed from an organic layered material. Materials for the organic layered material include polyvinyl alcohol (PVA) resin; polyacrylic acid resin such as polymethacrylic acid and polycyanoacrylic acid (polycyanoacrylate); polyvinylpyrrolidone resin; polyester resin such as polyethylene terephthalate; polypropylene resin A fluororesin such as polytetrafluoroethylene; a polyimide resin; a polyamide resin containing aramid; a polyparaphenylene benzobisoxazole resin; a starch; a mannan; a pulp material; a non-pulp material;

  In step S <b> 2, a penetration pattern 28 for injecting a casting material onto the first substrate 31 is formed in the organic frame layer 27. The penetration pattern 28 can be formed by irradiating the organic mold layer 27 with a laser. Besides a laser, a punching die, a knife, scissors, an ultrasonic cutter, a cutter, a water jet, or the like can be used. In addition, the shape of the penetration pattern 28 can be set arbitrarily.

In step S3, the casting material 29 is injected into the penetrating pattern 28 formed in step S2 and cured. As shown in FIG. 6, the casting material 29 can be cured on the first substrate 31 in accordance with the shape of the penetration pattern 28 by injecting the casting material 29 into the penetration pattern 28. The injection material 29 injected into the penetrating pattern 28 becomes a casting 231 by curing.
Examples of the casting material include silicon resin, fluorine resin, urethane resin, and ABS resin. The method for filling the casting material into the mold is not particularly limited, and examples thereof include a blade filling method.

  In step S <b> 4, the organic mold layer 27 is removed from the first substrate 31. As shown in FIG. 6, when the organic mold layer 27 is removed from the first substrate 31, a casting 231 is formed on the first substrate 31. The method for removing the organic mold layer 27 is not particularly limited, but when the organic mold layer 27 has water decomposability, it can be removed by washing with water.

  In step S5, the above-described steps S1 to S4 are separately repeated to prepare the second substrate 32 on which the casting 232 is provided. In step S <b> 5, the through hole 24 is provided in the second substrate 32. A method for providing the through hole 24 on the second substrate 32 is not particularly limited, and examples thereof include a laser, a punching die, a knife, scissors, and a cutter.

In step S <b> 6, the first substrate 31 and the second substrate 32 are bonded together with the castings. At the time of bonding, surface modification such as primer treatment and corona treatment can be applied to the bonding surface of the casting for the purpose of improving adhesion.
As shown in step S6 of FIG. 7, the first substrate 31 and the second substrate 32 are bonded to each other by casting, so that a plate-like support having a hollow portion therein is provided. Can be manufactured. At this time, the casting part 231 and the casting object 232 are bonded together to form the partition portion 23. By manufacturing by the method using the casting described above, a cooling mechanism suitable for miniaturization, thinning, and space saving can be obtained without using a mold or the like.

  It is preferable that the height H of the partition part 23 shown by step S6 of FIG. 7 shall be 0.5 mm-5.0 mm. If the height H of the partition part 23 is more than the said lower limit, it will become easy to introduce a refrigerant | coolant. If the height H of the partition part 23 is below the said upper limit, the cooling member 2 will be easy to make thin. The height H of the partition 23 can be set to an arbitrary height by adjusting the thickness of the organic mold layer 27 and the like.

The cooling member 2 of 2nd Embodiment can have the well-known structure which a well-known cooling member has other structures besides the metal fiber sheet 5 and the support body 20 which were mentioned above. Examples of other configurations include a mounting part for mounting the cooling member 2 on a cooling target such as a heating element, an auxiliary member for introducing the refrigerant from the opening end 26, and the like.
3 and 5, the lower surface of the metal fiber sheet 5 is covered with the support 20, and the side surface and the upper surface of the metal fiber sheet 5 are open surfaces. However, the cooling member of 2nd Embodiment is not limited to the form by which the side surface and upper surface of the metal fiber sheet 5 are made into the open surface, In the form by which the side surface and upper surface of the metal fiber sheet 5 are not made into the open surface. There may be. In the form in which the side surface and the upper surface of the metal fiber sheet 5 are not open surfaces, the refrigerant is not led out from the closed surface of the metal fiber sheet 5, and therefore is efficiently led out to the open surface of the metal fiber sheet 5.

(Operational effect of the second embodiment)
In the cooling member 2 of the second embodiment described above, the support 20, the metal fiber sheet 5, and the like are cooled by the coolant flowing through the hollow portion 22. Moreover, since the cooling member 2 has the partition part 23, the refrigerant introduced into the hollow part 22 is easily guided to the flow path formed by the partition part 23. Therefore, the refrigerant flowing through the hollow portion 22 is efficiently led out from the through hole 24, and the metal fiber sheet 5 can be efficiently cooled. Therefore, since the cooling member 2 is the metal fiber sheet 5 excellent in cooling efficiency and can cool the heating element to be cooled, the cooling effect is easily excellent.
Moreover, since the cooling member 2 of 2nd Embodiment can adjust cooling efficiency by adjusting the magnitude | size of the space | gap formed in the inside of the metal fiber sheet 5, it can cool without impairing cooling efficiency. It is easy to make the member 2 thinner and lighter.
Furthermore, the cooling member 2 of 2nd Embodiment can adjust cooling efficiency locally within the surface of the metal fiber sheet 5 by adjusting the hole diameter of the through-hole 24. FIG. Therefore, the cooling member 2 can control the flow rate of the refrigerant by adjusting the hole diameter of the through hole 24, and can enhance the cooling effect at an arbitrary location. Therefore, according to the cooling member 2, a heat generating body etc. can be locally cooled with the metal fiber sheet 5 of the locally cooled part.

[Third Embodiment]
Hereinafter, the cooling member 3 of 3rd Embodiment to which this invention is applied is demonstrated. In addition, in the cooling member 3 of 3rd Embodiment shown to FIG. 8, 10, the same code | symbol is attached | subjected to the structure same as the cooling member 1 of 1st Embodiment, and the cooling member 2 of 2nd Embodiment, The Description is omitted.
FIG. 8 is a perspective view showing the cooling member 3 of the third embodiment. As shown in FIG. 8, the cooling member 3 of the third embodiment includes a metal fiber sheet 5 and a cooling mechanism 8. The cooling mechanism 8 of the third embodiment cools the metal fiber sheet 5. In the cooling member 3 of the third embodiment, the refrigerant introduced into the cooling mechanism 8 can cool the metal fiber sheet 5.

(Cooling mechanism of the third embodiment)
As shown in FIG. 8, the cooling mechanism 8 of the third embodiment includes a support body 20 and a lid body 25. In the cooling member 3 of the third embodiment, the lid body 25 covers the upper surface of the metal fiber sheet 5.
The shape of the lid body 25 is not limited to a plate shape as shown in FIG. 8, and can have any structure and shape. The lid 25 can be made of a heat conductive material such as a known metal. Examples of the heat conductive material include stainless steel, copper, and aluminum. From the viewpoint of cooling efficiency, the material of the lid 25 is preferably a metal material having high thermal conductivity. For example, the lid body 25 can be made of a copper plate or a copper foil. For example, when the heating element and the lid 25 come into contact with each other, heat propagates from the heating element to the lid 25 and the metal fiber sheet 5. At this time, heat exchange is performed between the propagated heat and the refrigerant by the refrigerant passing while being held inside the metal fiber sheet 5. As described above, the lid 25 is preferably made of a material that easily takes heat from the heating element, that is, a material that easily propagates heat to the metal fiber sheet 5 that mainly exchanges heat with the refrigerant.

  FIG. 9 is a top view showing the support 20 of the cooling member 3 of FIG. As shown in FIG. 9, a plurality of through holes 24 a and 24 b are provided on the upper surface of the support 20. Since the through hole 24a is provided on the upper surface of the support 20, the refrigerant flowing through the hollow portion 22a is led out from the through hole 24a. The diameters of the through holes 24a and 24b are not particularly limited and can be set arbitrarily. The number of the through holes 24a and 24b is not particularly limited and can be set arbitrarily. In the support body 20 shown in FIG. 9, the interval between the through holes 24a and 24b is regular, but the through holes 24a and 24b are provided on the upper surface of the support body 20 at irregular intervals. Also good.

The arrows in FIG. 9 show an example of the direction of the refrigerant introduced into the hollow portion 22a from the opening end portion 26 of the support 20, and an example of the direction of the refrigerant derived from the hollow portion 22b. In the cooling mechanism 8 of the third embodiment, the refrigerant is introduced from the opening end portion 26 into the hollow portion 22a.
When the area of the opening surface of the opening end portion 26 is small and it is difficult to derive the refrigerant, or when it is desired to improve the cooling efficiency, a refrigerant deriving means for deriving the refrigerant from the hollow portion 22b can be used. Such refrigerant deriving means is not particularly limited, and includes known pressure reducing means such as a pressure reducing pump.

  FIG. 10 is a sectional view taken along line XX of the cooling member 3 of FIG. An arrow in FIG. 10 shows an example of the direction of the refrigerant flowing inside the cooling member 3. When the refrigerant is introduced into the hollow portion 22a of the cooling member 3, the refrigerant flows through the hollow portion 22a. The refrigerant flowing through the hollow portion 22a is led out from the through hole 24a. The refrigerant led out from the through hole 24 a can cool the metal fiber sheet 5.

In the cooling member 3 of the third embodiment, since the lid 25 covers the upper surface of the metal fiber sheet 5, the refrigerant that has entered the gaps in the metal fiber sheet 5 flows from the upper surface of the metal fiber sheet 5 to the cooling member 3. Difficult to be derived outside. Therefore, the cooling member 3 of the third embodiment is easier to control the flow direction of the refrigerant than the cooling member 2 of the second embodiment, and when the heating element comes into contact with the lid body 25, It is easy to take heat away from the heating element. That is, since the heat taken from the heating element can be efficiently propagated to the metal fiber sheet 5, the cooling effect can be enhanced.
The refrigerant that has cooled the metal fiber sheet 5 is introduced into the hollow portion 22b from the through hole 24b, flows through the hollow portion 22b, and is led out from the opening end portion 26.

  The cooling member 3 of the third embodiment can have a known configuration of a known cooling member as another configuration in addition to the metal fiber sheet 5, the support 20, and the lid 25 described above. . As an example of the other configuration, there can be cited a mounting portion for mounting the cooling member 3 on the object to be cooled, an auxiliary member for introducing the refrigerant from the opening end portion 26, and the like.

  In addition, in the cooling member 3 shown to FIG. 8, 10, the side surface of the metal fiber sheet 5 is made into the open surface. However, the cooling member 3 of 3rd Embodiment is not limited to the form by which the side surface of the metal fiber sheet 5 is made into the open surface, The form by which the side surface of the metal fiber sheet 5 is not made into the open surface may be sufficient. . In the form in which the side surface of the metal fiber sheet 5 is not an open surface, the refrigerant is efficiently led out from the hollow portion 22b.

  For example, in the cooling member 3 shown in FIG. 8, instead of the metal fiber sheet 5 and the lid body 25, the cooling member 1 of the first embodiment described in the section “[First Embodiment]” is the support member 20. It may be laminated. In this case, by providing a through hole in the lower surface of the container 10 included in the cooling member 1, the refrigerant introduced from the hollow portion 22 a is transferred to the through hole 24 a and the lower surface of the container 10. The metal fiber sheet that flows through the provided through hole and is accommodated in the interior of the container 10 may be cooled.

(Operational effect of the third embodiment)
Since the cooling member 3 of the third embodiment described above has the lid body 25, it is easy to control the flow direction of the refrigerant, and when the heating body abuts on the lid body 25, the heating body It is easy to take heat from. That is, since the cooling member 3 of the third embodiment can efficiently propagate the heat taken from the heating element to the metal fiber sheet 5, the cooling efficiency is dramatically increased and the cooling effect is excellent. .
The cooling member 3 of 3rd Embodiment can adjust cooling efficiency locally within the surface of the metal fiber sheet 5 by adjusting the hole diameter of the through-holes 24a and 24b. Therefore, the cooling member 3 can control the flow rate of the refrigerant by adjusting the hole diameters of the through holes 24a and 24b, and can enhance the cooling effect at an arbitrary location. Therefore, according to the cooling member 3, a heat generating body etc. can be locally cooled with the metal fiber sheet 5 of the locally cooled part.
Moreover, since the cooling member 3 of 3rd Embodiment can adjust cooling efficiency by adjusting the magnitude | size of the space | gap formed in the inside of the metal fiber sheet 5, it can cool without impairing cooling efficiency. It is easy to make the member 3 thinner and lighter.

[Fourth Embodiment]
Hereinafter, the cooling member 4 of 4th Embodiment to which this invention is applied is demonstrated. In addition, in the cooling member 4 or the cooling mechanism 9 of the fourth embodiment shown in FIGS. 11, 13, and 15, the cooling member 1 of the first embodiment, the cooling member 2 of the second embodiment, or the cooling of the third embodiment. The same components as those of the member 3 are denoted by the same reference numerals, and the description thereof is omitted.
FIG. 11 is a perspective view showing the cooling member 4 of the fourth embodiment. As shown in FIG. 11, the cooling member 4 of the fourth embodiment includes a metal fiber sheet 5 and a cooling mechanism 9. The cooling mechanism 9 of the fourth embodiment cools the metal fiber sheet 5. In the cooling member 4 according to the fourth embodiment, the refrigerant introduced via the cooling mechanism 9 can cool the metal fiber sheet 5.

(Cooling mechanism of the fourth embodiment)
As shown in FIG. 11, the cooling mechanism 9 of the fourth embodiment includes a support body 21 and a lid body 25. A hollow portion serving as a refrigerant flow path is provided inside the support 21. The first end surface 40 of the support 21 is provided with a refrigerant introduction port 41 for introducing a refrigerant into the hollow portion. Further, the second end face 42 of the support 21 is provided with a refrigerant outlet port 43 for leading out the refrigerant from the hollow portion.

  12 is an XII-XII cross-sectional view of the cooling member 4 of FIG. The arrows in FIG. 12 indicate an example of the direction of the refrigerant introduced into the cooling member 4 and an example of the direction of the refrigerant derived from the cooling member 4. As shown in FIG. 12, a hollow portion 223 and a hollow portion 224 serving as a refrigerant flow path are provided inside the support 21 of the cooling member 4. The hollow part 223 and the hollow part 224 are formed by the partition part 233, respectively. This partition part 233 can be manufactured by the manufacturing method using the casting shown in FIGS. Specifically, in step S2 shown in FIGS. 6 and 7, the penetration pattern can be formed to have the shape of the partition portion 233, and the casting material can be injected into the penetration pattern. In addition to the method of using a casting, a metal material, a resin material, or the like may be manufactured by cutting or a mold or the like may be used.

  FIG. 13 is a top view of the cooling member 4 of FIG. In the cooling member 4 of FIG. 11, the lid body 25 covers the upper surface of the metal fiber sheet 5. As shown in FIG. 13, a plurality of mounting portions 251 to 256 for mounting IC chips and semiconductor devices (elements) such as LEDs are provided on the upper surface of the lid body 25. Among these mounting parts 251 to 256, the heating element 51 and the heating element 53 are arranged in the mounting part 251 and the mounting part 253, respectively.

The dotted lines in FIG. 13 indicate the hollow part 223 and the hollow part 224 provided inside the support 21. When the refrigerant is introduced into the cooling member 4, the hollow part 223 becomes a flow path for the refrigerant introduced from the refrigerant introduction port 41, and the hollow part 224 becomes the flow path for the refrigerant led out from the refrigerant outlet port 43.
As shown in FIG. 13, the hollow portion 223 is branched into a plurality according to the positions of the mounting portions 251 to 256. Each end portion of the hollow portion 223 branched into a plurality is located below each of the mounting portions 251 to 256. Therefore, when a refrigerant is introduced into the cooling member 4, the flow of the refrigerant is induced according to the positions of the mounting portions 251 to 256 and branches into a plurality.
The area of the flow path surface of the hollow part 223 that becomes the flow path of the refrigerant is not particularly limited and can be arbitrarily set. For example, when it is desired to relatively increase the cooling efficiency by the refrigerant, the area of the flow path surface may be increased. When the cooling efficiency is desired to be set relatively low, the area of the flow path surface may be decreased.

FIG. 14 is a top view showing the support 21 of the cooling member 4 of FIG. As shown in FIG. 14, through holes 241 to 246 that penetrate from the upper surface of the support 21 to the hollow portion 223 are provided on the upper surface of the support 21. These through holes 241 to 246 are provided on the upper surface of the support 21 in accordance with the positions of the mounting portions 251 to 256.
As shown in FIG. 14, a plurality of through holes 247 that penetrate from the upper surface of the support 21 to the hollow portion 224 are provided on the upper surface of the support 21. The plurality of through holes 247 are provided on the upper surface of the support body 21 located around each of the through holes 241 to 246.

15 is a cross-sectional view taken along the line XV-XV in FIG. The flow of the refrigerant branched into a plurality in the hollow portion 223 is guided to the positions of the through holes 241 to 246 and led out from the through holes 241 to 246. For example, as shown in FIG. 15, the refrigerant derived from the through hole 243 can efficiently take away the heat propagated from the heating element 53 to the metal fiber sheet 5 through the lid body 25. The through hole 243 is provided in the support body 21 according to the position of the mounting portion 253. Therefore, the mounting portion 253 that is close to a part of the metal fiber sheet 5 whose cooling efficiency is locally improved can be similarly cooled locally. Therefore, the cooling member 4 of the fourth embodiment can locally cool the mounting portion 253 and locally cool the heating element 53 disposed in the mounting portion 253 with the refrigerant derived from the through hole 243. it can.
As described above, the refrigerant derived from the through holes 241 to 246 locally cools the mounting portions 251 to 256 via the metal fiber sheet 5 around the through holes 241 to 246, and It is possible to locally cool the heating elements attached to 251 to 256.

  As shown in FIG. 15, in the cooling member 4 of the fourth embodiment, the lid 25 covers the upper surface of the metal fiber sheet 5, similarly to the cooling member 3 of the third embodiment. Furthermore, in the cooling member 4 of 4th Embodiment, the support body 21 has covered the side surface of the metal fiber sheet 5. FIG. Therefore, the refrigerant that has entered the gap of the metal fiber sheet 5 is not led out of the cooling member 4 from either the upper surface or the side surface of the metal fiber sheet 5. Therefore, the cooling member 4 of 4th Embodiment can control the flow of a refrigerant | coolant more reliably than the cooling member 3 of 3rd Embodiment, and improves the cooling effect of the desired location of the metal fiber sheet 5 drastically. be able to.

  As shown in FIG. 13, the hollow portion 224 is branched into a plurality according to the position of the through hole 247. Each of these hollow portions branched into a plurality merges in the vicinity of the refrigerant outlet port 43. The refrigerant that has cooled the heating element 53 is introduced into the hollow portion 224 from the through hole 247 provided around the through hole 243 and is led out from the refrigerant outlet port 43.

The hole diameters of the through holes 241 to 246 and the through hole 247 are not particularly limited and can be arbitrarily set. For example, in order to realize more local cooling with the cooling member 4, the diameter of the through holes 241 to 246 that serve as refrigerant outlet holes may be reduced, and higher cooling efficiency may be realized with the cooling member 4. For this purpose, the hole diameters of the through holes 241 to 246 may be increased.
In addition, the cooling member 4 of 4th Embodiment has the well-known structure which a well-known cooling member has other than the metal fiber sheet 5, the support body 21, the cover body 25, and the mounting parts 251-256 mentioned above. It can have as another structure.

(Operational effect of the fourth embodiment)
The cooling member 4 according to the fourth embodiment described above includes the hollow portion 223 branched into a plurality according to the positions of the mounting portions 251 to 256. Therefore, the cooling member 4 can efficiently guide the refrigerant introduced from the refrigerant introduction port 41 to the positions of the mounting portions 251 to 256. Further, as described above, the refrigerant guided to the positions of the mounting portions 251 to 256 can locally cool the metal fiber sheet 5 around the through holes 241 to 246. When the metal fiber sheet is locally cooled, the lid body 25 in the portion where the mounting portions 251 to 256 are provided is also locally cooled, so that the heating element disposed in each of the mounting portions 251 to 256 Can be locally cooled.
Moreover, the cooling member 4 of 4th Embodiment adjusts cooling efficiency by selecting suitably the shape of the hollow part 223, and the hole diameter of the through-holes 241-246, and is arrange | positioned at each mounting part 251-256. The heating element can be selectively cooled. Therefore, the cooling member 4 of the fourth embodiment can locally cool the heating element to be cooled in accordance with the heat generation state of the heating element mounted on each mounting portion, and locally cool it. For example, in a substrate or the like used for an electric device or the like, the upper limit of the allowable heat-resistant temperature may be different for each element having different types and materials mounted on the same substrate. In this case, it is required to cool an element having a lower allowable temperature preferentially than other elements. In such a case, it is more efficient to perform local cooling for each element, for example, than to cool the entire substrate in accordance with the element having the lowest allowable temperature.
Moreover, the cooling member 4 of 4th Embodiment can achieve thickness reduction and weight reduction similarly to the cooling member 2 of 2nd Embodiment, and the cooling member 3 of 3rd Embodiment.

[Fifth Embodiment]
Hereinafter, the cooling member 50 of 5th Embodiment to which this invention is applied is demonstrated. In addition, in the cooling member 50 of 5th Embodiment shown to FIGS. 16-18, the cooling member 1 of 1st Embodiment, the cooling member 2 of 2nd Embodiment, the cooling member 3 of 3rd Embodiment, and 4th Embodiment. The same reference numerals are given to the same components as those of the cooling member 4, and the description thereof is omitted.

FIG. 16 is a top view of the cooling member 50 of the fifth embodiment. FIG. 17 is an XVII-XVII sectional view of the cooling member 50 of the fifth embodiment. FIG. 18 is a side view of the cooling member 50 of the fifth embodiment.
As shown in FIGS. 17 and 18, the cooling member 50 of the fifth embodiment includes a metal fiber sheet 5 and a cooling mechanism 93.
The cooling mechanism 93 includes a first metal layer 91, a second metal layer 52, and a refrigerant introduction unit (not shown).
As shown in FIG. 17, the first metal layer 91 is a layer in contact with the first surface A of the metal fiber sheet 5. In the cooling member 50, the first surface A is the upper surface of the metal fiber sheet 5. The second metal layer 52 is a layer in contact with the second surface B of the metal fiber sheet 5. In the cooling member 50, the second surface B is the lower surface of the metal fiber sheet 5, and is a parallel surface facing the first surface A. Thus, the metal fiber sheet 5 is sandwiched between the first metal layer 91 and the second metal layer 52.

The first metal layer 91 and the second metal layer 52 may be a metal plate or a metal foil. It does not specifically limit as a kind of material of a metal plate or metal foil. Details and preferred embodiments of the metal plate or metal foil material are the same as those described for the material of the metal fiber sheet 5.
The material of the first metal layer 91 and the material of the second metal layer 52 may be different from each other or the same.

The thicknesses of the first metal layer 91 and the second metal layer 52 are not particularly limited. From the viewpoint of the flexibility of the cooling member 50, the thickness of the first metal layer 91 is preferably 18 to 500 μm, and the thickness of the second metal layer 52 is preferably 100 to 5000 μm.
The durability of the cooling member 50 is improved when the thicknesses of the first metal layer 91 and the second metal layer 52 are equal to or greater than the lower limit values. When the thickness of each of the first metal layer 91 and the second metal layer 52 is not more than the above upper limit values, the cooling member 50 is excellent in flexibility.
The thickness of the first metal layer 91 and the thickness of the second metal layer 52 may be different from each other or the same.

In the cooling member 50, the first metal layer 91 is a metal foil, and the second metal layer 52 is a metal plate. In this case, as the metal foil (first metal layer 91), a copper foil or an aluminum foil is preferable, and a copper foil is more preferable. And as a metal plate (2nd metal layer 52), a copper plate or an aluminum plate is preferable, and a copper plate is more preferable.
In the cooling member 50, the thickness of the first metal layer 91 (metal foil) is thicker than the thickness of the second metal layer 52 (metal plate). In this case, considering the durability, flexibility, and ease of processing of the cooling member 50, the thickness of the first metal layer 91 (metal foil) is preferably 18 to 500 μm. And as for the thickness of the 2nd metal layer 52 (metal plate), 100-500 micrometers is preferable.
As described above, when the first metal layer 91 is a metal foil and the second metal layer is a metal plate, the cooling member 50 is further excellent in flexibility, and the processing of the cooling member 50 is further facilitated.
In the cooling member 50, the first metal layer 91 and the second metal layer 52 are parallel to each other. However, in the present invention, the first metal layer 91 and the second metal layer 52 are parallel to each other. It is not limited to.

The refrigerant introduction means (not shown) is not particularly limited as long as the refrigerant can be directly introduced into the metal fiber sheet 5. Specific examples of the refrigerant introduction unit include the same refrigerant introduction unit as described in the first embodiment.
As described above, the cooling mechanism 93 includes the first metal layer 91, the second metal layer 52, and a refrigerant introduction unit (not shown). Therefore, the metal fiber sheet 5 is introduced by introducing the refrigerant into the gap of the metal fiber sheet 5. Can be cooled.

As described above, in the cooling member 50, the metal fiber sheet 5 is sandwiched between the first metal layer 91 and the second metal layer 52. Therefore, it can be said that the cooling member 50 is a laminate including the metal fiber sheet 5, the first metal layer 91, and the second metal layer 52. Since the metal fiber sheet 5 is a sheet-like flexible material, such a laminate is excellent in workability. Therefore, by preparing the cooling member 50 (laminated body) having a relatively large size in advance, the cooling member 50 can be used as a cooling member of any shape and a precursor (matrix material) of a cooling member of any size. . That is, the cooling member 50 can be used as a base material when the size is relatively large.
Such a base material may be used by forming a plurality of grooves on the surface of the metal layer by processing and arbitrarily deforming the surface of the metal layer, as will be described later in the sixth embodiment. As in the tenth embodiment, the cooling member may be used for manufacturing a relatively finely divided cooling member. That is, the base material can be used as a laminate for manufacturing a cooling member having an arbitrary shape and size.

(Operational effects of the fifth embodiment)
Since the cooling member 50 of the fifth embodiment includes the metal fiber sheet 5 and the cooling mechanism 93, the cooling effect is excellent. The cooling member 50 of the fifth embodiment can be used as a cooling member of any shape and a precursor of a cooling member of any size.

[Sixth Embodiment]
Hereinafter, the cooling member 54 of 6th Embodiment to which this invention is applied is demonstrated. In addition, in the cooling member 54 of 6th Embodiment shown in FIGS. 19-21, the cooling member 1 of 1st Embodiment, the cooling member 2 of 2nd Embodiment, the cooling member 3 of 3rd Embodiment, and 4th Embodiment. The same code | symbol is attached | subjected to the structure same as the cooling member 4 and the cooling member 50 of 5th Embodiment, and the description is abbreviate | omitted.

FIG. 19 is a top view of the cooling member 54 of the sixth embodiment. FIG. 20 is an XX-XX cross-sectional view of the cooling member 54 of the sixth embodiment. FIG. 21 is a side view of the cooling member 54 of the sixth embodiment.
As shown in FIG. 20, the cooling member 54 of the sixth embodiment includes a metal fiber sheet 5 and a cooling mechanism 55.
The cooling mechanism 55 includes a first metal layer 56, a second metal layer 52, and a refrigerant introduction unit (not shown). In the cooling member 54, a plurality of grooves 57 are formed on the surface of the first metal layer 56. The shape of the groove 57 is not particularly limited. Further, the number of the groove portions may be one or plural. And the position on the surface of the 1st metal layer 56 in which the groove part 57 is formed is not specifically limited, For example, it can form according to the position of the flow path of the desired refrigerant | coolant.

As shown in FIG. 20, in the cooling member 54, the metal fiber sheet 5 is divided into regions C1, C2, and C3 by a plurality of grooves 57. The regions C1, C2, and C3 of the metal fiber sheet 5 divided into a plurality function as refrigerant flow paths.
Since the cooling mechanism 55 includes the first metal layer 56, the second metal layer 52, and a refrigerant introduction unit (not shown), the refrigerant is introduced into the gaps of the regions C1, C2, and C3 of the metal fiber sheet 5. The metal fiber sheet 5 can be effectively cooled. In addition, each flow path of area | region C1, C2, C3 may be interrupted | blocked completely, and the grade by which the flow path is narrowed by the groove part 57 may be sufficient.

The cooling member 54 can be manufactured, for example, by pressurizing the surface of the first metal layer 91 on the upper surface of the cooling member 50 in FIG. 16 to form one or more grooves 57 in an arbitrary shape.
When forming the groove portion 57, the first metal layer 56, the metal fiber sheet 5, and the second metal layer 52 are formed by applying an external force to the surface of the first metal layer 91 on the upper surface of the cooling member 50. They may be fixed and joined in this order. As a method of applying an external force to the surface of the first metal layer 91, pressurization or driving may be used, and any molding method can be applied.
Before forming the groove portion 57, the cooling member 50 may be cut to a desired size, and the groove portion 57 may be formed after adjusting the size.

(Operational effects of the sixth embodiment)
Since the metal fiber sheet 5 between the regions C1, C2, and C3 is bound, the number of voids is relatively small, and the size of the voids is also small. Therefore, the refrigerant introduced into the regions C1, C2, and C3 of the metal fiber sheet 5 is difficult to pass through the metal fiber sheet 5 in the portion fixed by the groove portion 57. As a result, according to the cooling member 54, the cooling effect of each area | region C1, C2, C3 of the metal fiber sheet 5 becomes still higher compared with the cooling member 50 of 5th Embodiment. Furthermore, each area | region C1, C2, C3 of the metal fiber sheet 5 can be locally cooled by introduce | transducing a refrigerant | coolant into the space | gap of each area | region C1, C2, C3 of the metal fiber sheet 5. FIG. Therefore, it is possible to selectively and locally cool an object to be cooled that is in contact with or close to the first metal layer 56 or the second metal layer 52 in a portion in contact with each of the regions C1, C2, and C3.

Thus, according to the cooling member 54, the 1st metal layer 56 and the 2nd metal layer 52 of the part which contact | connects each area | region C1, C2, C3 of the metal fiber sheet 5 can be cooled locally. For example, the refrigerant may be simultaneously introduced into all of the plurality of regions C1, C2, and C3, or the refrigerant is selectively introduced into at least one of the plurality of regions C1, C2, and C3. May be.
The position where the groove 57 is formed can be changed as appropriate. And the position of the metal fiber sheet 5, the 1st metal layer 56, and the 2nd metal layer 52 which are locally cooled can be changed by changing the position in which the groove part 57 is formed. As described above, the cooling member 54 is one of the features that the degree of freedom in design is high and the cooling member 54 can be easily applied to the surface of a cooling object having various shapes.

[Seventh Embodiment]
Hereinafter, a cooling member 58 according to a seventh embodiment to which the present invention is applied will be described. In addition, in the cooling member 58 of 7th Embodiment shown to FIGS. 22-24, the cooling member 1 of 1st Embodiment, the cooling member 2 of 2nd Embodiment, the cooling member 3 of 3rd Embodiment, and 4th Embodiment. The same components as those of the cooling member 4, the cooling member 50 of the fifth embodiment, and the cooling member 54 of the sixth embodiment are denoted by the same reference numerals, and the description thereof is omitted.

FIG. 22 is a top view of the cooling member 58 of the seventh embodiment. FIG. 23 is a XXIII-XXIII cross-sectional view of the cooling member 58 of the seventh embodiment. FIG. 24 is a side view of the cooling member 58 of the seventh embodiment.
As shown in FIG. 23, the cooling member 58 of the seventh embodiment includes a metal fiber sheet 5 and a cooling mechanism 59.

The cooling mechanism 59 includes a first metal layer 60, a second metal layer 61, and a refrigerant introduction unit (not shown). As shown in FIGS. 22 and 23, the cooling member 58 has fixed portions 62 at both ends. In the fixing part 62, the first metal layer 60, the metal fiber sheet 5, and the second metal layer 61 are fixed.
In the cooling member 58, the fixing part 62 is formed so that the first metal layer 60, the metal fiber sheet 5, and the second metal layer 61 are wound and folded in this order. The portion of the metal fiber sheet 5 delimited by the fixing portions 62 at both ends functions as a refrigerant flow path.
Since the cooling mechanism 59 includes the first metal layer 60, the second metal layer 61, and a refrigerant introduction unit (not shown), the refrigerant is supplied to the gap in the portion delimited by the fixing portions 62 at both ends of the metal fiber sheet 5. By introducing, the metal fiber sheet 5 can be cooled effectively.

The cooling member 58 can be manufactured, for example, by forming the fixing portions 62 at both ends of the cooling member 50 in FIG. When the fixing portion 62 is formed, the first metal layer 56, the metal fiber sheet 5, and the second metal layer 52 at both ends of the cooling member 50 in FIG. The end may be stopped by folding. Thus, the fixing | fixed part 62 can be formed by crimping the both ends of the cooling member 50 of FIG.
Before forming the fixing portion 62, the cooling member 50 may be cut to a desired size, and the fixing portion 62 may be formed after adjusting the size.

(Operational effects of the seventh embodiment)
In the cooling member 58, since the side surfaces of the cooling member 58 are closed surfaces by the fixing portions 62 at both ends of the metal fiber sheet 5, it is difficult for the refrigerant to be led out from the side surfaces of the cooling member 58. Therefore, compared with the cooling member 50 of 5th Embodiment, the cooling effect of the metal fiber sheet 5 becomes still higher, and the cooling effect of the cooling member 58 becomes still higher.

[Eighth Embodiment]
Hereinafter, the cooling member 63 of the eighth embodiment to which the present invention is applied will be described. In addition, in the cooling member 63 of 8th Embodiment shown to FIGS. 25-27, the cooling member 1 of 1st Embodiment, the cooling member 2 of 2nd Embodiment, the cooling member 3 of 3rd Embodiment, and 4th Embodiment. The same components as those of the cooling member 4, the cooling member 50 of the fifth embodiment, the cooling member 54 of the sixth embodiment, and the cooling member 58 of the seventh embodiment are denoted by the same reference numerals, and the description thereof is omitted.

FIG. 25 is a top view of the cooling member 63 of the eighth embodiment. FIG. 26 is a XXVI-XXVI cross-sectional view of the cooling member 63 of the eighth embodiment. FIG. 27 is a side view of the cooling member 63 of the eighth embodiment.
As shown in FIG. 26, the cooling member 63 of the eighth embodiment includes a metal fiber sheet 5 and a cooling mechanism 64.

As shown in FIG. 26, the cooling mechanism 64 includes a first metal layer 65, a second metal layer 66, and a refrigerant introduction unit (not shown). The cooling member 63 has a crimping portion 67 at both ends. In the crimping portion 67, the first metal layer 65, the metal fiber sheet 5, and the second metal layer 66 are integrally crimped and fixed.
In the cooling member 63, the first metal layer 65, the metal fiber sheet 5, and the second metal layer 66 are wound and folded in this order, and are further crimped so that they are fixed in a folded state. A portion 67 is formed. In the cooling member 63, the portion of the metal fiber sheet 5 delimited by the crimping portions 67 at both ends functions as a refrigerant flow path.
Since the cooling mechanism 64 includes the first metal layer 65, the second metal layer 66, and a refrigerant introduction unit (not shown), the refrigerant is supplied to the gap in the portion delimited by the crimping portions 67 at both ends of the metal fiber sheet 5. By introducing, the metal fiber sheet 5 can be cooled effectively.

The cooling member 63 can be manufactured, for example, by forming the crimping portions 67 at both ends of the cooling member 50 of FIG. When forming the crimping portion 67, first, the first metal layer 56, the metal fiber sheet 5, and the second metal layer 52 at both ends of the cooling member 50 in FIG. Roll in and fold. Next, the first metal layer 56, the metal fiber sheet 5, and the second metal layer 52 that are overlapped by folding are integrally pressed and pressed. In this manner, the crimping portion 67 may be formed by crimping both ends of the cooling member 50 of FIG.
Before forming the crimping part 67, the cooling member 50 may be cut into a desired size and the crimping part 67 may be formed after adjusting the size.

(Effect of 8th Embodiment)
In the cooling member 63, the side surfaces of the cooling member 63 are closed by the crimp portions 67 at both ends of the metal fiber sheet 5, so that it is difficult for the refrigerant to be led out from the side surfaces of the cooling member 63. Therefore, compared with the cooling member 50 of 5th Embodiment, the cooling effect of the metal fiber sheet 5 becomes still higher, and the cooling effect of the cooling member 63 becomes still higher.

[Ninth Embodiment]
Hereinafter, the cooling member 68 of 9th Embodiment to which this invention is applied is demonstrated. In the cooling member 68 of the ninth embodiment shown in FIGS. 28 and 29, the cooling member 1 of the first embodiment, the cooling member 2 of the second embodiment, the cooling member 3 of the third embodiment, and the fourth embodiment. The same components as those of the cooling member 4, the cooling member 50 of the fifth embodiment, the cooling member 54 of the sixth embodiment, the cooling member 58 of the seventh embodiment, and the cooling member 63 of the eighth embodiment are denoted by the same reference numerals. A description thereof will be omitted.

FIG. 28 is a top view of the cooling member 68 of the ninth embodiment. FIG. 29 is an XXIX-XXIX cross-sectional view of the cooling member 68 of the ninth embodiment.
As shown in FIG. 29, the cooling member 68 of the ninth embodiment includes a metal fiber sheet 5 and a cooling mechanism 69.

The cooling mechanism 69 includes a first metal layer 65, a second metal layer 66, a plurality of partition portions 70, and a refrigerant introduction unit (not shown). As shown in FIGS. 28 and 29, the cooling member 68 has a crimping part 67 at both ends, and the metal fiber sheet 5 and the first metal layer 65 are divided into a plurality of parts by a plurality of partition parts 70.
Specifically, the metal fiber sheet 5 is divided into a plurality of regions C4, C5, C6, and C7 by a plurality of partition portions 70. The regions C4, C5, C6, and C7 of the metal fiber sheet 5 divided into a plurality function as refrigerant flow paths.
Since the cooling mechanism 69 includes the first metal layer 65, the second metal layer 66, the plurality of partition portions 70, and the refrigerant introduction means (not shown), each region C4, C5, C6, C7 of the metal fiber sheet 5 is provided. The metal fiber sheet 5 can be effectively cooled by introducing a refrigerant into the gap.

  It can be said that each of the regions C4, C5, C6, and C7 of the metal fiber sheet 5 divided into a plurality is a metal fiber body that is an aggregate of metal fibers. The metal fiber constituting the metal fiber body is the same as the metal fiber constituting the metal fiber sheet 5. The physical properties and chemical properties such as physical property values of the metal fiber body are the same as the physical properties and chemical properties of the metal fiber sheet 5. Thus, in the cooling member 68, the structure that functions as the refrigerant flow path is not necessarily limited to the sheet-like form.

  The plurality of partition portions 70 are provided in the second metal layer 66. The partition part 70 will not be specifically limited if the metal fiber sheet 5 is a form which can be divided | segmented into plurality. The partition part 70 can be comprised with a resin material, for example. Specific examples of the resin material include those similar to the specific examples of the resin of the casting material described above. The shape and number of the partition portions 70 are not particularly limited.

An example of a method for manufacturing the cooling member 68 will be described. FIG. 30 is a diagram for explaining an example of a method for manufacturing the cooling member 68. 31 is a cross-sectional view taken along XXXI-XXXI in FIG. The cooling member 68 can be manufactured by the following method, for example.
First, the first metal layer 65 and the metal fiber sheet 5 in a portion sandwiched between the crimping portions 67 at both ends of the cooling member 63 shown in FIG. 25 are cut, and the penetrating pattern 71 is formed on the second metal layer 66. It is formed on the upper side (see FIGS. 30 and 31). Next, a partition 70 is provided in the second metal layer 66 by injecting resin or the like into the penetration pattern 71 and curing it.

(Effect of 9th Embodiment)
In the cooling member 68, C4, C5, C6, and C7 are divided by a plurality of partition portions 70, and a closed surface is formed between each of them. For this reason, when the refrigerant is introduced into the gaps of the respective regions C4, C5, C6, and C7, the refrigerant is hardly led out from the side surfaces of the respective regions. As a result, as compared with the cooling member 50 of the fifth embodiment, the cooling effect of the metal fiber sheet 5 in each region C4, C5, C6, C7 is further increased, and the cooling effect of the cooling member 68 is further increased.
Further, the regions C4, C5, C6, and C7 are partitioned by a plurality of partition portions 70. Therefore, in the cooling member 68, by introducing the refrigerant into the gaps of the regions C4, C5, C6, and C7 of the metal fiber sheet 5, the regions C4, C5, C6, and C7 of the metal fiber sheet 5 are locally disposed. Can be cooled.

Thus, according to the cooling member 68, the 1st metal layer 65 and the 2nd metal layer 66 of the part which contact | connects each area | region C4, C5, C6, C7 of the metal fiber sheet 5 can be cooled locally. For example, the refrigerant may be simultaneously introduced into all of the plurality of regions C4, C5, C6, and C7, and selective to at least one of the plurality of regions C4, C5, C6, and C7. A refrigerant may be introduced into the tank. Thereby, the position by which the 1st metal layer 65, the 2nd metal layer 66, and the metal fiber sheet 5 are cooled can be changed by selecting the flow path of a refrigerant | coolant from several area | region C4, C5, C6, C7. . As a result, according to the cooling member 68, it is possible to selectively and locally cool an object to be cooled that is in contact with or close to the first metal layer 65 and the second metal layer 66.
The position where the partition part 70 is provided in the second metal layer 66 can be changed as appropriate. By changing the position where the partition part 70 is provided, the positions of the metal fiber sheet 5, the first metal layer 65, and the second metal layer 66 that are locally cooled can be changed.

[Tenth embodiment]
Hereinafter, a cooling member 72 according to a tenth embodiment to which the present invention is applied will be described. In addition, in the cooling member 72 of 10th Embodiment shown to FIGS. 32-34, the cooling member 1 of 1st Embodiment, the cooling member 2 of 2nd Embodiment, the cooling member 3 of 3rd Embodiment, and 4th Embodiment. The cooling member 4, the cooling member 50 of the fifth embodiment, the cooling member 54 of the sixth embodiment, the cooling member 58 of the seventh embodiment, the cooling member 63 of the eighth embodiment, and the cooling member 68 of the ninth embodiment. The same components are denoted by the same reference numerals, and the description thereof is omitted.

FIG. 32 is a top view of the cooling member 72 of the tenth embodiment. FIG. 33 is a cross-sectional view of the cooling member 72 according to the tenth embodiment, taken along XXXIII-XXXIII. FIG. 34 is a side view of the cooling member 72 of the tenth embodiment.
As shown in FIG. 33, the cooling member 72 of the tenth embodiment has a metal fiber sheet 5 and a cooling mechanism 73.

The cooling mechanism 73 includes a first metal layer 74, a second metal layer 75, and a refrigerant introduction unit (not shown). As shown in FIGS. 32 and 33, the cooling member 72 has joints 76 at both ends.
In the cooling member 72, the first metal layer 74 and the second metal layer 75 are laminated and overlapped so as to be in contact with the joint portions 76 at both ends. In the cooling member 72, the part of the metal fiber sheet 5 delimited by the joints 76 at both ends functions as a refrigerant flow path.
Since the cooling mechanism 73 includes the first metal layer 74, the second metal layer 75, and a refrigerant introduction unit (not shown), the refrigerant is supplied to the gap in the portion delimited by the joint portions 76 at both ends of the metal fiber sheet 5. By introducing, the metal fiber sheet 5 can be cooled effectively. In the cooling member 72 as well, the configuration that functions as the refrigerant flow path is not necessarily limited to a sheet-like form. That is, in the cooling member 72, the structure functioning as the coolant flow path may be in the form of a prismatic metal fiber body.

The thickness of the first metal layer 74 is preferably 18 to 500 μm, more preferably 30 to 400 μm, and still more preferably 50 to 200 μm. When the thickness of the first metal layer 74 is equal to or greater than the lower limit, the cooling member 72 can be easily manufactured. When the thickness of the first metal layer 74 is equal to or less than the upper limit value, the flexibility of the cooling member 72 is further improved.
The width W of the second metal layer 75 is preferably 2 to 20 mm, more preferably 3 to 12 mm, and still more preferably 5 to 10 mm. When the width W is equal to or greater than the lower limit value, it becomes easy to form a cooling body of any form by combining the cooling members 72. When the width W is less than or equal to the upper limit value, it becomes easier to reduce the size and thickness of the electric device and the electronic device.
The thickness of the second metal layer 75 is not particularly limited. For example, it can be set to 100-5000 micrometers.

For example, the cooling member 72 cuts the respective base materials of the first metal layer 74 and the second metal layer 75 to a desired size, cuts the metal fiber sheet 5 to a desired size, It can be manufactured by joining the first metal layer 74 and the second metal layer 75 at both ends in a state where the metal fiber sheet 5 is disposed between the metal layer 74 and the second metal layer 75.
In the cooling member 72, similarly to the cooling member 68 of the ninth embodiment, a partition portion that divides the metal fiber sheet 5 into a plurality of regions may be provided in the second metal layer 75.

(Operational effects of the tenth embodiment)
Since the cooling member 72 has a relatively short width compared to the cooling member 63 of the eighth embodiment, the cooling member 72 can be suitably applied to electrical and electronic devices that are required to be small and thin.
In particular, since the metal fiber sheet 5 is a flexible material, the cooling member 72 is excellent in flexibility. Therefore, the cooling member 72 can be easily applied to a surface other than a flat surface such as a curved surface or an uneven surface, and can be easily applied to the surface of a cooling object having various shapes. By using a plurality of cooling members 72, it is possible to locally cool a portion to be cooled.

[Eleventh embodiment]
Hereinafter, the cooling member 77 of 11th Embodiment to which this invention is applied is demonstrated. In addition, in the cooling member 77 of 11th Embodiment shown to FIGS. 35-37, the cooling member 1 of 1st Embodiment, the cooling member 2 of 2nd Embodiment, the cooling member 3 of 3rd Embodiment, and 4th Embodiment. The cooling member 4, the cooling member 50 of the fifth embodiment, the cooling member 54 of the sixth embodiment, the cooling member 58 of the seventh embodiment, the cooling member 63 of the eighth embodiment, the cooling member 68 of the ninth embodiment, and The same components as those of the cooling member 72 of the tenth embodiment are denoted by the same reference numerals, and the description thereof is omitted.

FIG. 35 is a top view of the cooling member 77 of the eleventh embodiment. FIG. 36 is a sectional view of the cooling member 77 according to the eleventh embodiment, taken along XXXVI-XXXVI. FIG. 37 is a side view of the cooling member 77 of the eleventh embodiment.
As illustrated in FIG. 36, the cooling member 77 of the eleventh embodiment includes the metal fiber sheet 5 and a cooling mechanism 78.

The cooling mechanism 78 includes a resin layer 79, a metal layer 80, and a refrigerant introduction unit (not shown).
The resin layer 79 is provided on the upper surface of the metal fiber sheet 5 in contact with the metal fiber sheet 5 so as to cover the upper surface of the metal fiber sheet 5. The metal layer 80 is provided on the lower surface of the metal fiber sheet 5 in contact with the lower surface of the metal fiber sheet 5.
The material of the resin layer 79 is not particularly limited as long as flexibility is ensured. The thickness of the resin layer 79 is preferably 0.5 to 5 mm, more preferably 0.8 to 4 mm, and further preferably 1 to 3 mm from the viewpoint of flexibility. When the thickness of the resin layer 79 is equal to or greater than the lower limit, the cooling member 77 can be easily manufactured. When the thickness of the resin layer 79 is not more than the above upper limit value, the flexibility of the cooling member 77 is further improved.
The width of the resin layer 79 is the same as the width W of the second metal layer 75 described above, and the preferred embodiment thereof is also the same.

At both ends of the cooling member 77, the resin layer 79 and the metal layer 80 are joined. In the cooling member 77, the portion of the metal fiber sheet 5 between the resin layer 79 and the metal layer 80 functions as a refrigerant flow path.
Since the cooling mechanism 78 includes the resin layer 79, the metal layer 80, and a refrigerant introduction unit (not shown), the metal fiber sheet 5 can be effectively cooled by introducing the refrigerant into the gaps of the metal fiber sheet 5. In the cooling member 77 as well, the structure that functions as the refrigerant flow path is not necessarily limited to the sheet-like form. That is, in the cooling member 77, the structure functioning as the coolant flow path may be in the form of a prismatic metal fiber body.

  For example, the cooling member 77 cuts the base material of each of the resin layer 79 and the metal layer 80 to a desired size, cuts the metal fiber sheet 5 to a desired size, and the metal fiber sheet 5 on the metal layer 80. Can be manufactured by covering the upper surface of the metal fiber sheet 5 with the resin layer 79.

(Effect of 11th Embodiment)
Since the cooling member 77 has a relatively short width as compared with the cooling member 63 of the eighth embodiment, the cooling member 77 can be suitably applied to electrical and electronic devices that are required to be reduced in size and thickness.
And since the metal fiber sheet 5 and the resin layer 79 are flexible materials, the cooling member 77 is more excellent in flexibility than the cooling member 72. Therefore, the cooling member 77 is easier to apply to a surface other than a flat surface such as a curved surface or a concavo-convex surface than the cooling member 72, and is more easily applied to the surface of a cooling object having various shapes.

[Twelfth embodiment]
Hereinafter, the cooling member 81 of 12th Embodiment to which this invention is applied is demonstrated. In addition, in the cooling member 81 of 12th Embodiment shown to FIGS. 38-40, the cooling member 1 of 1st Embodiment, the cooling member 2 of 2nd Embodiment, the cooling member 3 of 3rd Embodiment, and 4th Embodiment. The cooling member 4, the cooling member 50 of the fifth embodiment, the cooling member 54 of the sixth embodiment, the cooling member 58 of the seventh embodiment, the cooling member 63 of the eighth embodiment, the cooling member 68 of the ninth embodiment, The same components as those of the cooling member 72 of the tenth embodiment and the cooling member 77 of the eleventh embodiment are denoted by the same reference numerals, and the description thereof is omitted.

FIG. 38 is a top view of the cooling member 81 of the twelfth embodiment. FIG. 39 is a sectional view of the cooling member 81 according to the twelfth embodiment, XXXIX-XXXIX. FIG. 40 is a cross-sectional view of the cooling member 81 according to the twelfth embodiment, XXX-XXXX.
As shown in FIGS. 39 and 40, the cooling member 81 of the twelfth embodiment includes a metal fiber sheet 5 and a cooling mechanism 82.

  The cooling mechanism 82 includes a first metal layer 74, a second metal layer 75, a port portion 83, and a refrigerant introduction unit (not shown). As shown in FIGS. 38 and 40, the cooling member 81 has joint portions 76 at both ends. In the cooling member 81, the metal fiber sheet 5 in the portion between the first metal layer 74 and the second metal layer 75 functions as a refrigerant flow path. Also in the cooling member 81, the structure which functions as a refrigerant flow path is not necessarily limited to a sheet-like form. That is, in the cooling member 81, the configuration that functions as the coolant flow path may be in the form of a prismatic metal fiber body.

As shown in FIG. 39, the port portion 83 has a fixing portion 84 and an introduction pipe 85. The fixing portion 84 is a member for fixing so that the one end face E of the metal fiber sheet 5 and the opening face F at one end of the introduction pipe 85 are in contact with each other. The introduction pipe 85 is a member for introducing a refrigerant into the gap of the metal fiber sheet 5. The material of the fixing portion 84 and the introduction pipe 85 is not particularly limited.
In the cooling member 81, the refrigerant can be introduced into the gap of the metal fiber sheet 5 by introducing the refrigerant from the opening surface G of the introduction pipe 85. A refrigerant may be introduced by connecting a hose or the like to the opening surface G side of the introduction pipe.

(Operational effects of the twelfth embodiment)
In the cooling member 81, since the cooling mechanism 82 has the port portion 83, the refrigerant can be easily and effectively introduced into the gap of the metal fiber sheet 5.
When a plurality of cooling members 81 are used, if the introduction pipes 85 of the plurality of cooling members 81 are connected with a hose or the like, a cooling member having an arbitrary shape can be provided, and the degree of freedom in design is improved. Therefore, according to the cooling member 81, the application to the surface of the cooling target object of various shapes becomes easy.

  As mentioned above, although several embodiment of the cooling member of this invention was described, this is shown as an example and it does not intend limiting the range of invention. The cooling member of the above-described embodiment can be implemented in various other forms, and various replacements and changes can be made without departing from the scope of the invention.

  The cooling member of the present invention is used in a wide range of industries such as a cooling member for a substrate such as a power semiconductor, a power source, a DC-DC converter, an inverter circuit, and a solar cell, and a cooling member for industrial machine parts having a heating element. It can be used for various purposes.

1, 2, 3, 4, 50, 54, 58, 63, 68, 72, 77, 81 Cooling member 5 Metal fiber sheet 6, 7, 8, 9, 93, 55, 59, 64, 69, 73, 78 , 82 Cooling mechanism 10 Container 11, 12 Open end 20, 21 Support 22, 22 a, 22 b, 223, 224 Hollow part 23, 233 Partition part 231, 232 Casting object 24, 24 a, 24 b, 241 to 247 Through hole 25 lid 251-256 mounting portion 26 open end 27 organic formwork layer 28 through the pattern 29 casting material 31, 32 substrate 40, 42 the end face 41 a refrigerant inlet 43 coolant outlet port 51, 53 heating elements D _1, D ₂ Thickness of metal fiber sheet H Height of partition

Claims (7)

A metal fiber sheet composed of metal fibers;
A cooling mechanism for cooling the metal fiber sheet;
A cooling member. The cooling mechanism is a container that houses the metal fiber sheet;
Refrigerant introduction means for introducing a refrigerant into the container;
The cooling member according to claim 1, comprising:   The cooling member according to claim 2, wherein the container is composed of at least one selected from the group consisting of a copper plate, an aluminum plate, a copper foil, and an aluminum foil. The cooling mechanism includes a support that supports the metal fiber sheet,
The cooling member according to claim 1, wherein a hollow portion serving as a refrigerant flow path is provided inside the support.   The cooling member according to claim 4, wherein a through hole through which the refrigerant is led out is provided in the support body from the hollow portion toward the metal fiber sheet.   The cooling member according to claim 4 or 5 which has a lid which covers said metal fiber sheet.   The cooling member according to any one of claims 1 to 6, wherein the metal fiber is a copper fiber.

Images