JP2019007569A - Tube holding structure - Google Patents

Abstract

To provide a tube holding structure capable of reducing vibration while suppressing dust emission.SOLUTION: A tube holding structure 1 comprises: multiple tubes 10 each of which is formed from a flexible material; and a holder 20 holding the tubes 10 in a belt state in a reciprocally and linearly freely movable manner. The multiple tubes 10 include: a main tube set 11 in which multiple main tubes 10A are joined while being arranged in parallel in an X direction; and sub tube sets 12-14 in which multiple sub tubes 10B-10D are disposed in parallel in the X direction. The sub tube sets 12-14 are stacked at both sides of the main tube set 11, and integrally joined with the main tube set 11. The holder 20 is joined with both side parts of the main tube set 11 in the X direction.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a tube holding structure including a plurality of tubes formed of a flexible material and a holding body that holds these tubes in a bent state so as to be capable of reciprocating linear movement.

  Conventionally, as a technology in such a field, a cable bear (registered trademark) having a multi-joint member used for an electronic component mounting apparatus, a semiconductor manufacturing apparatus, a machining apparatus, and the like is known. For example, in the following patent document, a power supply cable, a signal supply cable, a tube, etc. are accommodated inside a cable bear that can be bent in a U-shape, and follow the movement of a movable part connected to the cable bear. Thus, a structure for reciprocating linear movement is disclosed.

JP 2008-243839 A

  However, since the cable bear and the cable or the tube, the cable and the tube, the cables and the tubes are relatively movable in the above-described structure, there is a problem that friction is generated due to the reciprocation and dust is generated. Recently, as the number of cables and tubes increases with the diversification and speeding up of the apparatus, the load applied to the cable bear increases, and the impact on adjacent articulated members at the bent portion increases. For this reason, there also existed a problem that the vibration transmitted to a movable part via a cable bear became large.

  The present invention has been made to solve such a technical problem, and an object thereof is to provide a tube holding structure capable of reducing vibration while suppressing dust generation.

  A tube holding structure according to the present invention is a tube holding structure comprising a plurality of tubes formed of a flexible material, and a holding body that holds these tubes so as to be capable of reciprocating linear movement in a bent state. The plurality of tubes have a main tube set formed by joining a plurality of main tubes in parallel in one direction, and a sub tube set formed by connecting a plurality of sub tubes in parallel in the one direction. The sub-tube set is stacked on the main tube set and is integrally joined to the main tube set, and the holding body is arranged at a plurality of positions in the longitudinal direction of the main tube set. It is characterized by being joined to both sides of the one direction in the set.

  In the tube holding structure according to the present invention, the main tube set and the sub tube set are stacked and joined together, so that the tubes including the main tube and the sub tube do not move relative to each other. Dust generation due to friction between each other can be suppressed. In addition, since the holding body is joined to both sides in one direction in the main tube set, there is no friction between the holding body and the tube, and dust generation due to friction between the holding body and the tube can be prevented.

  Furthermore, since a bending repulsive force is generated by the bending of the integrated main tube set and sub tube set, the load applied to the bent portion of the holding body can be reduced. For this reason, the impact which generate | occur | produces in a bending part is relieve | moderated and vibration reduction can be aimed at.

  In the tube holding structure according to the present invention, it is preferable that the main tube has a higher bending rigidity than the sub tube.

  In the tube holding structure according to the present invention, it is preferable that there are a plurality of the sub tube sets, and the sub tube sets are laminated on one side or both sides of the main tube set.

  Further, in the tube holding structure according to the present invention, when a plurality of the sub tube sets are laminated on one side or both sides of the main tube set, the bending rigidity of the sub tube decreases from the main tube set side outward. It is preferable to become.

  In the tube holding structure according to the present invention, it is preferable that the main tube set is formed of main tubes having the same material and the same size.

  Furthermore, in the tube holding structure according to the present invention, the holding body is extended in the longitudinal direction of the main tube set, and a pair of bendable supports disposed on both sides of the one direction in the main tube set. And a plurality of arm members that are disposed at predetermined intervals in the extending direction of the support member, the plurality of arm members that span the pair of support members, and are disposed for each of the arm members. It is preferable to have a pair of clamp members that hold both sides in one direction.

  According to the present invention, it is possible to reduce vibration while suppressing dust generation.

It is a perspective view which shows the tube holding structure which concerns on embodiment. It is a side view which shows the tube holding structure which concerns on embodiment. It is sectional drawing which follows AA of FIG. It is a figure which shows the model of an Example and a comparative example. It is a figure which shows the result (Back-> Front) of an Example and a comparative example. It is a figure which shows the result (Front-> Back) of an Example and a comparative example.

  Hereinafter, an embodiment of a tube holding structure according to the present invention will be described with reference to the drawings. 1 is a perspective view showing a tube holding structure according to the embodiment, FIG. 2 is a side view showing the tube holding structure according to the embodiment, and FIG. 3 is a cross-sectional view taken along line AA of FIG.

  The tube holding structure 1 of the present embodiment is used in, for example, a display panel exposure apparatus, and collects cables for supplying power and signals necessary for the operation of the exposure apparatus, and tubes for supplying cooling water, air, and the like. It is a structure to hold. As shown in FIG. 1, the tube holding structure 1 is bent in a U shape, and is disposed between a pair of straight portions 1A and 1C extending in parallel to each other on the Y axis, and the straight portions 1A and 1C. It consists of a bent portion 1B. The tip of the straight portion 1 </ b> C is attached to the fixing base 2 and becomes a fixed end of the tube holding structure 1. On the other hand, the tip of the straight portion 1 </ b> A is attached to the moving table 3 and becomes the moving end of the tube holding structure 1. Although not shown, the moving end of the tube holding structure 1 is connected to the movable part of the exposure apparatus via the moving table 3.

  The tube holding structure 1 mainly includes a plurality of tubes 10 formed of a flexible resin material and a holding body 20 that holds the tubes 10 in a bent state so as to be reciprocally linearly movable.

  As shown in FIG. 3, the plurality of tubes 10 includes a plurality of types of tubes, and these tubes 10 are arranged in parallel in one direction (that is, the X direction) for each type, and in the one direction. It is a multistage continuous tube that is laminated along an orthogonal direction (that is, the Z direction). More specifically, the plurality of tubes 10 includes a main tube set 11 disposed at a substantially middle position of the multistage continuous tube, and three sub tube sets 12 to 14 stacked on both sides of the main tube set 11. And have.

  The main tube set 11 is a so-called multiple tube, and is formed by joining adjacent main tubes 10A with a plurality of main tubes 10A arranged in parallel in the X direction. Examples of the joining method of the main tubes 10A include welding and adhesion. Of the sub-tube sets 12 to 14, the sub-tube set 12 is on one side of the main tube set 11 (upper side in FIG. 3), and the sub-tube sets 13 and 14 are on the other side of the main tube set 11 (lower side in FIG. 3). ).

  The sub-tube set 12 is formed by juxtaposing a plurality of sub-tubes 10B in the X direction with a predetermined interval. Each sub-tube 10B has an outer diameter larger than that of the main tube 10A, is arranged in a staggered manner with respect to the main tube 10A, and is joined to the main tube 10A adjacent in the Z direction by welding or bonding. Yes.

  The sub-tube set 13 is formed by juxtaposing a plurality of sub-tubes 10C in the X direction with a predetermined interval. Each sub-tube 10C has an outer diameter smaller than that of the main tube 10A, is arranged in a staggered manner with respect to the main tube 10A, and is joined to the main tube 10A adjacent in the Z direction by welding or bonding. Yes.

  On the other hand, the sub-tube set 14 is formed by juxtaposing a plurality of sub-tubes 10D in the X direction with a predetermined interval. Each sub-tube 10D is arranged in a staggered manner with respect to the adjacent sub-tube 10C, and is joined to the sub-tube 10C adjacent in the Z direction by welding, adhesion, or the like. That is, the sub tube set 14 is not directly joined to the main tube set 11, but is joined to the main tube set 11 via the sub tube set 13.

  As the main tube set 11 and the sub tube sets 12, 13, and 14, the same type of tube may be used for each set, or different types of tubes may be used. It is preferable to use tubes of the same material and the same size. In other words, by using the same type of tube, the bending load at the time of bending can be kept even in parallel and easy to manufacture.

  Moreover, although mentioned later for details, only the main tube group 11 is joined to the holding body 20 among this multistage-type continuous tube, and the member holding a multistage-type continuous tube is provided in the tube holding structure 1 from the downward direction. As a result, the main tube set 11 is the most loaded part. For this reason, it is necessary to maintain the strength of the main tube set 11 high, and the main tube set 11 is preferably formed of the same material and the same size of the main tube 10A.

  The main tube 10A and the sub tubes 10B, 10C, and 10D may have a multilayer structure or a single layer structure. Moreover, as materials of the main tube 10A and the sub tubes 10B, 10C, 10D, it is suitable for welding or adhesion from the viewpoint of joining the tubes, ensuring reciprocal movement in a bent state, and ensuring a used bending radius, It is required to have resistance to bending fatigue and to have a certain degree of flexibility. For this reason, when the main tube 10A and the sub-tubes 10B, 10C, and 10D have a multilayer structure, it is preferable that at least each outer layer is formed of thermoplastic resin polyurethane or soft vinyl chloride. On the other hand, when the main tube 10A and the sub tubes 10B, 10C, 10D have a single layer structure, it is desirable that the material has a Shore A hardness of about 60 to 98.

  Further, when the multistage continuous tube configured as described above is bent into a U-shape, tensile stress is generated on the outer side and compressive stress is generated on the inner side. In order to reduce the stress load, it is preferable to arrange a tube having high bending rigidity at a position that becomes the bending radius of the entire multistage continuous tube (that is, the boundary between the tensile stress generation side and the compression stress generation side). Therefore, in this embodiment, the main tube 10A has a higher bending rigidity than the sub tubes 10B, 10C, and 10D, and is outward from the main tube set 11 side (in FIG. 3, above or below the main tube set 11). The sub-tube sets 12, 13, and 14 are arranged so that the bending rigidity becomes smaller toward. More specifically, as shown in FIG. 3, when two sub tube sets 13, 14 are laminated on the lower side of the main tube set 11, the sub tube 10 </ b> D disposed at the farthest position from the main tube set 11 The bending rigidity is smaller than that of the secondary tube 10 </ b> C arranged at a position close to the main tube set 11.

  Further, when the main tube 10A and the sub tubes 10B, 10C, and 10D are used for supplying cooling water and air, if the same material and the same structure are used, the larger the outer diameter, the thicker the wall thickness. For this reason, it becomes easy to reduce the stress load on the entire multistage continuous tube by disposing a tube having a large outer diameter at an intermediate position of the multistage continuous tube.

  On the other hand, when the sub-tubes 10B, 10C, and 10D are used for cable insertion, pressure resistance is not required, so the material can be made thinner and thinner than the cooling water or air supply tube. In this case, the demand for the bending rigidity of the tube is lowered. Therefore, like the secondary tube 10B shown in FIG. 3, even if the outer diameter is large, the secondary tube 10B may be disposed outside the multistage continuous tube (that is, on the side where the tensile stress is generated).

  As shown in FIG. 1, the holding body 20 extends in the longitudinal direction of the main tube set 11, and is a pair disposed on both sides of the main tube set 11 in the X direction (left and right direction in FIG. 3). Bendable support members 21L, 21R, a plurality of arm members 22 arranged at predetermined intervals in the extending direction of the support members 21L, 21R, and a pair of support members 21L, 21R, and arm members And a pair of clamp members 23L and 23R that hold both sides of the main tube set 11 in the X direction.

  As shown in FIG. 3, the support member 21L and the support member 21R, or the clamp member 23L and the clamp member 23R are symmetrical with respect to the multistage continuous tube, and the structure is the same. The left support member 21L and the clamp member 23L will be described.

  The support member 21L is formed to be bendable by connecting a plurality of piece members 24 in series. One end of the support member 21L extends to the moving end of the tube holding structure 1 and is connected to the moving end bracket 20A attached to the moving end, and the other end extends to the fixed end of the tube holding structure 1 and is fixed. It is connected to a fixed end bracket 20B attached to the end.

  The top member 24 corresponds to a multi-joint member used for a chain or the like. Since the connection method between the adjacent top members 24 is already known, detailed description thereof is omitted here, and only the structure of the top member 24 will be described.

  The top member 24 is disposed outside the support member 21L (that is, on the side where the tensile stress is generated during bending), and has an outer extension 24a having a break separating the adjacent top member 24, and the inside of the support member 21L (bending) An inner compression portion 24b that is disposed on the compression stress generation side) and has a notch separating from the adjacent piece member 24, and an intermediate portion 24c disposed between the outer extension portion 24a and the inner compression portion 24b. ing. The outer extension portion 24a, the inner compression portion 24b, and the intermediate portion 24c are connected and integrated with a connecting rod 24d extending in the Z direction.

  As shown in FIG. 3, in the connecting rod 24d, a through hole 24e penetrating the thickness of the connecting rod 24d, an intermediate portion 24c, and an inner portion are provided at the approximate center of the portion located between the outer extending portion 24a and the intermediate portion 24c. A through hole 24f is formed in the approximate center of the portion located between the compression portion 24b. These through holes 24e and 24f are for passing screws when the top member 24 and the arm member 22 or the clamp member 23L are fixed. The top member 24 is preferably formed of a metal material or a hard resin material.

  The arm member 22 is a rod-shaped member having a rectangular cross section, and screw holes extending in the longitudinal direction of the arm member 22 are provided at both left and right ends thereof. The arm member 22 is inserted into a through hole 24e formed in the connecting rod 24d, and is further fixed to the piece member 24 by a screw 25 screwed into the screw hole. The arm member 22 may be formed of a metal material or a hard resin material.

  On the other hand, the clamp member 23L includes a C-shaped gripping portion 26a that is recessed toward the main tube set 11, an arm connection portion 26b that is integrally formed with the gripping portion 26a and that is connected to the arm member 22, and a top piece. A band connecting portion 26c connected to the member 24 is provided.

  The grip portion 26a is made of a weldable resin and is formed to have a C-shaped recess. The main tube 10A located at the left end of the main tube set 11 is joined to the grip portion 26a by welding in a state of being disposed in the concave portion of the grip portion 26a. Here, the main tube 10A and the gripping portion 26a may be joined by bonding instead of welding.

  The arm connecting portion 26b extends in the Z direction so as to contact the arm member 22, and a screw hole extending in the extending direction of the arm connecting portion 26b is provided therein. Correspondingly, a through hole 22 a that penetrates the thickness of the arm member 22 is provided at a position where the arm member 22 contacts the arm connecting portion 26 b. The clamp member 23L is fixed to the arm member 22 by a screw 27 inserted through a through hole 22a formed in the arm member 22 and further screwed into the screw hole.

  On the other hand, the band connecting portion 26c extends in the X direction, and the tip thereof reaches the through hole 24f formed in the connecting rod 24d. A screw hole extending in the extending direction of the band connecting portion 26c is provided inside the band connecting portion 26c. The clamp member 23L is fixed to the top member 24 by a screw 28 inserted through a through hole 24f formed in the connecting rod 24d and further screwed into the screw hole. The clamp member 23L is preferably formed of a metal material or a hard resin material.

  In the tube holding structure 1 having the above configuration, the main tube set 11 is held by the holding body 20 via the clamp members 23L and 23R at both left and right ends thereof. The sub tube sets 12, 13, and 14 laminated and integrated with the main tube set 11 are not directly joined to the holding body 20 but are held by the holding body 20 via the main tube set 11. Yes. That is, the multistage continuous tube including the main tube set 11 and the sub tube sets 12 to 14 is joined and held to the holding body 20 only through the clamp members 23L and 23R.

  The main tube set 11 is formed by welding a plurality of main tubes 10A in parallel with each other in the X direction, and the sub tube sets 12 to 14 each have a plurality of sub tubes 10B to 10D arranged in parallel in the X direction. Therefore, for example, some of these main tubes and sub tubes can be used for inserting electric cables and signal cables, and the other portions can be used for supplying cooling water and air. In addition, since the auxiliary tube sets 12 to 14 are stacked on the main tube set 11, it is possible to cope with an increase in the number of tubes and cables without being affected by the limitation of the allowable installation width in the X direction and the limitation of the installation length in the Y direction.

  In addition, since the plurality of main tubes 10A constituting the main tube set 11 are joined to each other, and the sub tube sets 12 to 14 are integrally joined to the main tube set 11, these tubes are Does not move relative to each other. For this reason, dust generation due to friction between tubes can be suppressed. Moreover, since the clamp members 23L and 23R of the holding body 20 are joined to both sides in the X direction of the main tube set 11, there is no friction between the holding body 20 and the main tube 10A or the sub tubes 10B to 10C. Dust generation due to friction between the tube and the tube can be prevented.

  Furthermore, since a bending repulsive force is generated by bending of the integrated main tube set 11 and sub tube sets 12 to 14, it is possible to suppress the drooping of the straight portion of the holding body 20 and to apply a load to the bent portion of the holding body 20. Can be reduced. For this reason, the impact between the piece members 24 in the bent portion is relieved, and the vibration of the holding body 20 can be reduced. As a result, vibration to the movable part connected to the holding body 20 can be reduced.

  In the present embodiment, in order to reduce the load on the joint portion between the main tube set 11 and the clamp members 23L and 23R, and further to move the bent portions of the support members 21L and 21R more smoothly, the multi-stage continuous connection is performed. It is preferable to match the bending radius of the tube with the bending radius of the support members 21L and 21R.

  EXAMPLES Hereinafter, although an Example demonstrates this invention, this invention is not limited to the range of an Example.

  In the examples, the vibration measurement during the reciprocating linear movement was performed on the model having the tube holding structure 1 according to the embodiment under the conditions shown in FIG. 4 (the unit of each numerical value is mm). In this example, a vibration measuring machine of FFT analyzer “DS-3204” manufactured by Ono Sokki Co., Ltd. and an acceleration pickup of TRIAXIAL ACCELEROMETER “NP-3578N10” manufactured by Ono Sokki Co., Ltd. were used. The main tube assembly 11 has 24 urethane tubes (φ10) manufactured by Aoi Co., Ltd., the sub tube assembly 12 has 11 urethane tubes manufactured by Aoi Co., Ltd. (φ12), and the auxiliary tube assembly 13 has an Aoi Co., Ltd. 21 urethane tubes (φ6) and 20 Aoi Co., Ltd. urethane tubes (φ6) were used for the sub-tube set 14, respectively. Then, a Hyflon fluororesin insulated cable manufactured by Nissei Electric Co., Ltd. was inserted into each sub tube of the sub tube set 12. On the other hand, as the holding body 20, a TKQ type cable bear “TKQ25H58E122R170C-115L” manufactured by Tsubakimoto Chain Co., Ltd. was used so as to have the same structure as the above-described holding body 20.

  Further, for comparison, vibration measurement was performed under the same conditions as in the example using the current product having the following structure. Specifically, 20 Aoi Co., Ltd. flat tubes (φ10) were joined in parallel using an energy chain “E6.52.275.075.0-72” made by Igus Co., Ltd. In this structure, 40 flat tubes (φ6) joined in parallel and a high flex flat cable manufactured by Japan Gore Co., Ltd. were accommodated.

  5 and 6 are diagrams showing the results of Examples and Comparative Examples. As shown in these figures, it was proved that the vibration was reduced in the example compared to the comparative example in both “Back → Front” and “Front → Back”. In particular, in the case of “Back → Front”, it was confirmed that the effect of vibration reduction was great.

  Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various designs can be made without departing from the spirit of the present invention described in the claims. It can be changed. For example, in the above-described embodiment, an example in which one layer of the sub tube set (sub tube set 12) is provided on one side of the main tube set 11, and two layers (sub tube sets 13 and 14) of the sub tube set are stacked on the other side. As described above, the number of sub-tube sets may be increased or decreased as necessary. Further, the sub tube set may be laminated only on one side of the main tube set 11.

  In the above embodiment, the welding or adhesion has been described for the joining method of the main tube set 11 and the clamp members 23L and 23R, but other methods such as bolt fastening and fitting are also conceivable. Welding or bonding is desirable when emphasizing dust generation suppression, and bolt fastening and fitting are desirable when emphasizing ease of disassembly and assembly. In the case of bolt fastening or fitting, the material of the clamp members 23L and 23R is preferably metal or hard resin. On the other hand, in the case of welding or bonding, the material of the clamp members 23L and 23R is preferably the same as the outer layer material of the main tube 10A.

DESCRIPTION OF SYMBOLS 1 Tube holding structure 10A Main tube 10B, 10C, 10D Subtube 11 Main tube set 12,13,14 Subtube set 20 Holding body 21L, 21R Support member 22 Arm member 23L, 23R Clamp member 24 Top member 24a Outer extension part 24b Inner compression portion 24c Intermediate portion 24d Connecting rod 26a Holding portion 26b Arm connecting portion 26c Band connecting portion

Claims (6)

A tube holding structure comprising a plurality of tubes formed of a flexible material and a holding body that holds these tubes in a bent state so as to be reciprocally linearly movable.
The plurality of tubes have a main tube set formed by joining a plurality of main tubes in parallel in one direction, and a sub tube set formed by connecting a plurality of sub tubes in parallel in the one direction. And
The sub tube set is stacked on the main tube set and integrally joined with the main tube set,
The said holding body is joined to the both sides of the said one direction in the said main tube set in the multiple places of the longitudinal direction of the said main tube set, The tube holding structure characterized by the above-mentioned.   The tube holding structure according to claim 1, wherein the main tube has higher bending rigidity than the sub tube.   The tube holding structure according to claim 1 or 2, wherein a plurality of the sub tube sets are provided and are laminated on one side or both sides of the main tube set.   The tube holding structure according to claim 3, wherein when a plurality of the sub tube sets are stacked on one side or both sides of the main tube set, the bending rigidity of the sub tube decreases from the main tube set side toward the outside.   The tube holding structure according to any one of claims 1 to 4, wherein the main tube set is formed of main tubes having the same material and the same size. The holder is
A pair of bendable support members extending in the longitudinal direction of the main tube set and disposed on both sides of the one direction in the main tube set;
A plurality of arm members that are arranged at predetermined intervals in the extending direction of the support member, and span the pair of support members;
A pair of clamp members that are arranged for each arm member and grip both side portions in the one direction of the main tube set;
The tube holding structure according to any one of claims 1 to 5.

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