JP2019004250A - High frequency transmission window body structure and high frequency input coupler - Google Patents

High frequency transmission window body structure and high frequency input coupler Download PDF

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JP2019004250A
JP2019004250A JP2017115925A JP2017115925A JP2019004250A JP 2019004250 A JP2019004250 A JP 2019004250A JP 2017115925 A JP2017115925 A JP 2017115925A JP 2017115925 A JP2017115925 A JP 2017115925A JP 2019004250 A JP2019004250 A JP 2019004250A
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joint
transmission window
frequency transmission
width
high frequency
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JP6845749B2 (en
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尚己 阪本
Naoki Sakamoto
尚己 阪本
恵一 三森
Keiichi Mimori
恵一 三森
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Canon Electron Tubes and Devices Co Ltd
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Toshiba Electron Tubes and Devices Co Ltd
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Abstract

To provide a high frequency input coupler capable of preventing a high frequency transmission window from cracking.SOLUTION: A high frequency input coupler 17 comprises: a high frequency transmission window 30 which has joint surfaces 35a, 35b; and an inner conductor sleeve 31a and an outer conductor sleeve 31b to which the joint surfaces 35a, 35b of the high frequency transmission window 30 are soldered. The inner conductor sleeve 31a and outer conductor sleeve 31b has: joint parts 39a, 39b which are provided to widths narrower than widths of the joint surfaces 35a, 35b of the high frequency transmission window 30 and to which width-directionally center parts 44a, 44b of the joint surfaces 35a, 35b are soldered; and groove parts 40a, 40b which are provided along both sides of the joint parts 39a, 39b and width-directionally outer parts 45a, 45b of the joint surface 35a, 35b projecting from both the sides of the joint parts 39a, 39b face. A depth dimension D1 of the groove parts 40a, 40b is smaller than a width dimension W3 of the width-directionally outer parts 45a, 45b of the joint surfaces 35a, 35b facing the groove parts 40a, 40b.SELECTED DRAWING: Figure 1

Description

本発明の実施形態は、高周波を透過する高周波透過窓を有する高周波透過窓構体および高周波入力結合器に関する。   Embodiments described herein relate generally to a high-frequency transmission window structure having a high-frequency transmission window that transmits high frequencies and a high-frequency input coupler.

従来、荷電粒子(電子、イオン、陽子)加速器において、クライストロンのような高周波増幅器から放出される高周波を加速空胴に入射するとき、加速空胴に対して良好なカップリングを持たせることのできる構造を有した高周波入力結合器(カプラ)が用いられている。   Conventionally, in a charged particle (electron, ion, proton) accelerator, when a high frequency emitted from a high frequency amplifier such as a klystron is incident on the acceleration cavity, a good coupling can be provided to the acceleration cavity. A high-frequency input coupler (coupler) having a structure is used.

高周波入力結合器は、大気側から入射される高周波を高真空に保たれた加速空胴内に入射させるための高周波透過窓構体を備えている。   The high-frequency input coupler includes a high-frequency transmission window structure for allowing a high frequency incident from the atmosphere side to enter an acceleration cavity maintained in a high vacuum.

高周波透過窓構体は、気密を保ちながら高周波を透過させる高周波透過窓と、高周波の伝送路となる外導体スリーブおよび内導体スリーブ等を備えている。高周波透過窓の外周および内周に設けられた接合面が外導体スリーブの内周および内導体スリーブの外周にろう付け接合されている。   The high-frequency transmission window structure includes a high-frequency transmission window that allows high-frequency transmission while maintaining airtightness, an outer conductor sleeve and an inner conductor sleeve that serve as a high-frequency transmission path, and the like. Joining surfaces provided on the outer periphery and inner periphery of the high-frequency transmission window are brazed and joined to the inner periphery of the outer conductor sleeve and the outer periphery of the inner conductor sleeve.

高周波透過窓にはアルミナ等のセラミックが用いられており、各スリーブは銅等の金属が用いられている。   A ceramic such as alumina is used for the high-frequency transmission window, and a metal such as copper is used for each sleeve.

ところで、高周波透過窓構体は、ろう付けによる組み立て時に1000℃以上の高温にさらされ、さらに、その後の高周波窓構体と高周波入力結合器の各部品をろう付けにより組み立てる際に700℃以上の高温にさらされる。その際、高周波透過窓と各スリーブとでは材料の熱膨張率が異なるため、ろう付けでの温度上昇時や温度降下時に、高周波透過窓に引張応力が生じる。その結果、高周波透過窓の接合面の端部を起点として、高周波透過窓の内部に向かいクラックが発生することがある。このクラックが高周波透過窓を貫通すると、高周波入力結合器の気密を保てなくなるという課題がある。   By the way, the high-frequency transmission window structure is exposed to a high temperature of 1000 ° C. or higher when assembled by brazing, and further, the high-frequency transmission window structure is heated to a high temperature of 700 ° C. or higher when each component of the high-frequency window structure and high-frequency input coupler is assembled by brazing. Exposed. At that time, since the thermal expansion coefficient of the material differs between the high frequency transmission window and each sleeve, tensile stress is generated in the high frequency transmission window when the temperature is increased or decreased during brazing. As a result, cracks may occur inside the high-frequency transmission window starting from the end of the joint surface of the high-frequency transmission window. When this crack penetrates the high-frequency transmission window, there is a problem that the high-frequency input coupler cannot be kept airtight.

特開2015-141848号公報JP 2015-141848 A

本発明が解決しようとする課題は、高周波透過窓にクラックが生じるのを防止できる高周波透過窓構体および高周波入力結合器を提供することである。   The problem to be solved by the present invention is to provide a high-frequency transmission window structure and a high-frequency input coupler that can prevent cracks in the high-frequency transmission window.

本実施形態の高周波透過窓構体は、接合面を有する高周波透過窓と、高周波透過窓の接合面がろう付け接合されるスリーブとを備える。スリーブは、高周波透過窓の接合面の幅よりも小さい幅に設けられ接合面の幅方向中央部がろう付け接合される接合部、および接合部の両側に沿って設けられ接合部の両側から突出する接合面の幅方向外側部が対向する溝部を有する。溝部の深さ寸法が溝部に対向する接合面の幅方向外側部の幅寸法よりも小さく設けられている。   The high-frequency transmission window structure of this embodiment includes a high-frequency transmission window having a joint surface and a sleeve to which the joint surface of the high-frequency transmission window is brazed. The sleeve is provided with a width that is smaller than the width of the joint surface of the high-frequency transmission window, and a joint portion in which the center portion in the width direction of the joint surface is brazed and joined along both sides of the joint portion and protrudes from both sides of the joint portion. The outer surface of the joining surface in the width direction has an opposite groove. The depth dimension of the groove part is provided smaller than the width dimension of the width direction outer side part of the joint surface facing the groove part.

一実施形態を示す高周波入力結合器の高周波透過窓構体の一部の断面図である。It is sectional drawing of a part of high frequency transmission window structure of the high frequency input coupler which shows one Embodiment. 同上高周波入力結合器の断面図である。It is sectional drawing of a high frequency input coupler same as the above.

以下、一実施形態を、図面を参照して説明する。   Hereinafter, an embodiment will be described with reference to the drawings.

図2に高周波入力結合器10の断面図を示す。   FIG. 2 shows a cross-sectional view of the high-frequency input coupler 10.

高周波入力結合器10は、例えばクライストロンなどの高周波増幅器から放射された高周波(マイクロ波)を伝送する導波管11と加速器12の加速空胴13との間を結合するとともに、導波管11内の大気圧と加速空胴13内の高真空とを隔絶し、高周波を加速空胴13に入射するのに用いられる。   The high frequency input coupler 10 couples between the waveguide 11 that transmits a high frequency (microwave) radiated from a high frequency amplifier such as a klystron and the acceleration cavity 13 of the accelerator 12, and Is used to isolate the high pressure in the accelerating cavity 13 and the high frequency in the accelerating cavity 13.

そして、高周波入力結合器10は、結合器本体16、およびこの結合器本体16に組み込まれた高周波透過窓構体17を備えている。   The high-frequency input coupler 10 includes a coupler main body 16 and a high-frequency transmission window structure 17 incorporated in the coupler main body 16.

結合器本体16は、同軸に配置される円柱状の内導体20および円筒状の外導体21を有している。これら内導体20と外導体21との間を通じて高周波を伝送する。内導体20は、高周波透過窓構体17の内側が接合されており、加速器12の加速空胴13に突出配置されるアンテナ部22を有している。外導体21は、高周波透過窓構体17の外側が接合されており、加速器12に取り付けられている。   The coupler main body 16 has a columnar inner conductor 20 and a cylindrical outer conductor 21 that are arranged coaxially. High frequency is transmitted between the inner conductor 20 and the outer conductor 21. The inner conductor 20 is joined to the inner side of the high-frequency transmission window structure 17 and has an antenna portion 22 that protrudes from the acceleration cavity 13 of the accelerator 12. The outer conductor 21 is joined to the accelerator 12 at the outer side of the high-frequency transmission window structure 17.

また、高周波透過窓構体17は、気密を保ち高周波を透過する高周波透過窓30と、伝送路を構成するスリーブとしての内導体スリーブ31aおよび外導体スリーブ31bとを備えている。   The high-frequency transmission window structure 17 includes a high-frequency transmission window 30 that is hermetically sealed and transmits high frequencies, and an inner conductor sleeve 31a and an outer conductor sleeve 31b as sleeves that constitute a transmission path.

高周波透過窓30の材料には、例えばアルミナなどのセラミックが用いられている。高周波透過窓30は、中央に円形の孔を有する円板状(円環状)に形成されている。   As a material of the high-frequency transmission window 30, for example, ceramic such as alumina is used. The high-frequency transmission window 30 is formed in a disc shape (annular shape) having a circular hole in the center.

内導体スリーブ31aおよび外導体スリーブ31bの材料には、例えば銅などの金属が用いられている。内導体スリーブ31aおよび外導体スリーブ31aは、円筒状に形成され、高周波透過窓30を介して同軸に配置されている。   For example, a metal such as copper is used as the material of the inner conductor sleeve 31a and the outer conductor sleeve 31b. The inner conductor sleeve 31a and the outer conductor sleeve 31a are formed in a cylindrical shape and are arranged coaxially with the high-frequency transmission window 30 interposed therebetween.

そして、高周波透過窓30の孔33に内導体スリーブ31aが挿入され、高周波透過窓30が外導体スリーブ31bの内側に挿入され、高周波透過窓30と内導体スリーブ31aおよび外導体スリーブ31bとがろう付け接合されている。また、内導体スリーブ31aは内導体20の外周にろう付け接合され、外導体スリーブ31bは外導体21の端部にろう付け接合されている。   Then, the inner conductor sleeve 31a is inserted into the hole 33 of the high frequency transmission window 30, the high frequency transmission window 30 is inserted inside the outer conductor sleeve 31b, and the high frequency transmission window 30, the inner conductor sleeve 31a, and the outer conductor sleeve 31b are brazed. It is attached. The inner conductor sleeve 31a is brazed to the outer periphery of the inner conductor 20, and the outer conductor sleeve 31b is brazed to the end of the outer conductor 21.

次に、図1に高周波透過窓構体17の一部の断面図を示す。   Next, FIG. 1 shows a partial cross-sectional view of the high-frequency transmission window structure 17.

高周波透過窓30の内周および外周には、内導体スリーブ31aの外周面および外導体スリーブ31bの内周面にろう付け接合される接合面(窓側接合面)35a,35bが形成されている。高周波透過窓30の内周および外周の幅方向両側の角部には、斜めにカットされた面取り部である傾斜面36a,36bが形成されている。接合面35a,35bには、メタライズ層が形成され、このメタライズ層上にろう材37a,37bが設けられている。   Joint surfaces (window-side joint surfaces) 35a and 35b that are brazed and joined to the outer peripheral surface of the inner conductor sleeve 31a and the inner peripheral surface of the outer conductor sleeve 31b are formed on the inner periphery and the outer periphery of the high-frequency transmission window 30. Inclined surfaces 36a and 36b, which are chamfered portions that are cut obliquely, are formed at the corners on both sides in the width direction of the inner periphery and outer periphery of the high-frequency transmission window 30. A metallized layer is formed on the joint surfaces 35a and 35b, and brazing materials 37a and 37b are provided on the metallized layer.

内導体スリーブ31aの外周面には、高周波透過窓30の内周の接合面35aをろう付け接合する接合部39aが形成されているとともに、この接合部39aの両側に溝部40aが形成されている。外導体スリーブ31bの内周面には、高周波透過窓30の外周の接合面35bをろう付け接合する接合部39bが形成されているとともに、この接合部39bの両側に溝部40bが形成されている。   On the outer peripheral surface of the inner conductor sleeve 31a, a joint portion 39a for brazing and joining the inner peripheral joint surface 35a of the high-frequency transmission window 30 is formed, and groove portions 40a are formed on both sides of the joint portion 39a. . On the inner peripheral surface of the outer conductor sleeve 31b, a joint portion 39b for brazing and joining the outer joint surface 35b of the high-frequency transmission window 30 is formed, and groove portions 40b are formed on both sides of the joint portion 39b. .

接合部39a,39bには、高周波透過窓30の接合面35a,35bがろう付け接合されるスリープ側接合面41a,41bが形成されている。   In the joint portions 39a and 39b, sleep-side joint surfaces 41a and 41b to which the joint surfaces 35a and 35b of the high-frequency transmission window 30 are brazed are formed.

溝部40a,40bは、溝幅方向両側の側面42a,42b、および溝奥側の底面43a,43bを有している。側面42a,42bは、底面43a,43bから開口側に向けて拡開するように傾斜状に形成されている。接合部39a,39bの側面は溝部40a,40bの側面42a,42bによって構成されており、接合部39a,39bの断面形状は台形状となっている。   The groove portions 40a and 40b have side surfaces 42a and 42b on both sides in the groove width direction, and bottom surfaces 43a and 43b on the groove back side. The side surfaces 42a and 42b are formed in an inclined shape so as to expand from the bottom surfaces 43a and 43b toward the opening side. The side surfaces of the joint portions 39a and 39b are constituted by the side surfaces 42a and 42b of the groove portions 40a and 40b, and the cross-sectional shapes of the joint portions 39a and 39b are trapezoidal.

接合部39a,39bの幅W1は、高周波透過窓30の接合面35a,35bの幅W2よりも小さく設けられている。接合部39a,39bには、高周波透過窓30の接合面35a,35bの幅方向中央部44a,44bがろう付け接合される。そのため、高周波透過窓30の接合面35a,35bの幅方向中央部44a,44bの両側に位置する幅方向外側部45a,45bは、接合部39a,39bから突出(露出)されて、溝部40a,40bに対向するように配置されている。   The width W1 of the joint portions 39a and 39b is provided smaller than the width W2 of the joint surfaces 35a and 35b of the high-frequency transmission window 30. Center portions 44a and 44b in the width direction of the joint surfaces 35a and 35b of the high-frequency transmission window 30 are brazed and joined to the joint portions 39a and 39b. Therefore, the width direction outer side portions 45a and 45b located on both sides of the width direction central portions 44a and 44b of the joint surfaces 35a and 35b of the high frequency transmitting window 30 are projected (exposed) from the joint portions 39a and 39b, and the groove portions 40a, It is arranged to face 40b.

溝部40a,40bの深さ寸法D1は、溝部40a,40bに対向する接合面35a,35bの幅方向外側部45a,45bの幅寸法W3よりも小さく設けられている。   The depth dimension D1 of the groove portions 40a and 40b is set smaller than the width dimension W3 of the width direction outer side portions 45a and 45b of the joint surfaces 35a and 35b facing the groove portions 40a and 40b.

また、ろう材37a,37bは、高周波透過窓30の接合面35a,35bの幅方向中央部44a,44bと接合部39a,39bのスリープ側接合面41a,41bとの間に介在されて接合している。   Further, the brazing materials 37a and 37b are interposed between the joint portions 35a and 35b in the width direction of the high-frequency transmission window 30 and the sleep-side joint surfaces 41a and 41b of the joint portions 39a and 39b. ing.

ろう材37a,37bの一部は、高周波透過窓30の接合面35a,35bの幅方向外側部45a,45bと接合部39a,39bの側面42a,42bとの間で、メニスカス部47a,47bを形成している。メニスカス部47a,47bは、接合面35a,35bの幅方向外側部45a,45bの端部48a,48b側の厚みが薄く、接合面35a,35bの幅方向外側部45a,45bの端部48a,48b側から接合部39a,39bの側面42a,42bに向かって徐々に厚みが増し、接合部39a,39bの側面42a,42bの全域に接合され、溝部40a,40bの底面43a,43bに達している。   Part of the brazing material 37a, 37b has meniscus portions 47a, 47b between the width direction outer side portions 45a, 45b of the joint surfaces 35a, 35b of the high frequency transmission window 30 and the side surfaces 42a, 42b of the joint portions 39a, 39b. Forming. The meniscus portions 47a, 47b are thin on the end portions 48a, 48b side of the width direction outer side portions 45a, 45b of the joint surfaces 35a, 35b, and are end portions 48a of the width direction outer side portions 45a, 45b of the joint surfaces 35a, 35b, The thickness gradually increases from the 48b side toward the side surfaces 42a and 42b of the joint portions 39a and 39b, joined to the entire area of the side surfaces 42a and 42b of the joint portions 39a and 39b, and reaches the bottom surfaces 43a and 43b of the groove portions 40a and 40b. Yes.

そして、このように構成される高周波透過窓構体17は、高周波透過窓構体17自体のろう付けによる組み立て時に例えば1000度以上の高温にさらされ、さらに、その後の高周波透過窓構体17と高周波入力結合器10の各部品をろう付けにより組み立てる際に700℃以上の高温にさらされる。   The high-frequency transmission window assembly 17 configured as described above is exposed to a high temperature of, for example, 1000 ° C. or more when assembled by brazing the high-frequency transmission window assembly 17 itself. When the parts of the vessel 10 are assembled by brazing, they are exposed to a high temperature of 700 ° C. or higher.

その際、セラミック製の高周波透過窓30と銅製の内導体スリーブ31aおよび外導体スリーブ31bとでは材料の熱膨張率が異なるため、ろう付けでの温度上昇時や温度降下時に、高周波透過窓30に応力が生じやすい。   At this time, the ceramic high frequency transmission window 30 and the copper inner conductor sleeve 31a and outer conductor sleeve 31b have different thermal expansion coefficients. Stress is likely to occur.

仮に、高周波透過窓30の接合面35a,35bの幅方向全体が内導体スリーブ31aおよび外導体スリーブ31bにろう付け接続する場合、高周波透過窓30の接合面35a,35bの端部48a,48bを起点として、高周波透過窓30の内部に向かいクラックが発生することがある。   If the entire width direction of the joint surfaces 35a and 35b of the high-frequency transmission window 30 is brazed to the inner conductor sleeve 31a and the outer conductor sleeve 31b, the end portions 48a and 48b of the joint surfaces 35a and 35b of the high-frequency transmission window 30 are As a starting point, a crack may occur toward the inside of the high-frequency transmission window 30.

本実施形態の高周波透過窓構体17では、内導体スリーブ31aおよび外導体スリーブ31bの接合部39a,39bの幅W1が高周波透過窓30の接合面35a,35bの幅W2よりも小さく、接合部39a,39bには高周波透過窓30の接合面35a,35bの幅方向中央部44a,44bがろう付け接合され、さらに、溝部40a,40bの深さ寸法D1が溝部40a,40bに対向する接合面35a,35bの幅方向外側部45a,45bの幅寸法W3よりも小さく設けられている。これにより、高周波透過窓30の接合面35a,35bの幅方向外側部45a,45bと接合部39a,39bの側面42a,42bとの間に形成されるろう材37a,37bのメニスカス部47a,47bは、接合面35a,35bの幅方向外側部45a,45bの端部48a,48b側の厚みが薄く、接合面35a,35bの幅方向外側部45a,45bの端部48a,48b側から接合部39a,39bの側面42a,42bに向かって徐々に厚みが増し、接合部39a,39bの側面42a,42bの全域に接合され、溝部40a,40bの底面43a,43bに達する。そのため、高周波透過窓30の接合面積はこれまでと変わらず、高周波透過窓30の接合面35a,35bの端部48a,48bに加わる応力を分散、緩和することにより、接合強度を高くすることができる。これにより、高周波透過窓30にクラックが発生するのを防止できる。   In the high frequency transmission window structure 17 of the present embodiment, the width W1 of the joint portions 39a and 39b of the inner conductor sleeve 31a and the outer conductor sleeve 31b is smaller than the width W2 of the joint surfaces 35a and 35b of the high frequency transmission window 30, and the joint portion 39a. , 39b are brazed to the width direction central portions 44a, 44b of the joint surfaces 35a, 35b of the high-frequency transmission window 30, and the depth dimension D1 of the groove portions 40a, 40b is the joint surface 35a facing the groove portions 40a, 40b. , 35b is provided smaller than the width dimension W3 of the outer side portions 45a, 45b in the width direction. As a result, the meniscus portions 47a and 47b of the brazing materials 37a and 37b formed between the width direction outer side portions 45a and 45b of the joint surfaces 35a and 35b of the high-frequency transmission window 30 and the side surfaces 42a and 42b of the joint portions 39a and 39b. The thicknesses of the end portions 48a and 48b of the width direction outer side portions 45a and 45b of the joint surfaces 35a and 35b are thin, and the joint portions 35a and 35b are joined from the end portions 48a and 48b side of the width direction outer side portions 45a and 45b. The thickness gradually increases toward the side surfaces 42a and 42b of 39a and 39b, and is joined to the entire area of the side surfaces 42a and 42b of the joint portions 39a and 39b and reaches the bottom surfaces 43a and 43b of the groove portions 40a and 40b. Therefore, the bonding area of the high-frequency transmission window 30 remains the same as before, and the bonding strength can be increased by dispersing and relaxing the stress applied to the end portions 48a and 48b of the bonding surfaces 35a and 35b of the high-frequency transmission window 30. it can. Thereby, it is possible to prevent cracks from occurring in the high-frequency transmission window 30.

なお、高周波透過窓構体17の高周波透過窓30とスリーブ(内導体スリーブ31aおよび外導体スリーブ31b)とのろう付け接合構造は、上述した高周波入力結合器10に限らず、例えば、クライストロン等のマイクロ波電子管において、増幅した高周波を出力する出力導波管に設けられる高周波透過窓構体にも適用することができる。   The brazed joint structure between the high-frequency transmission window 30 and the sleeve (the inner conductor sleeve 31a and the outer conductor sleeve 31b) of the high-frequency transmission window structure 17 is not limited to the high-frequency input coupler 10 described above. The wave electron tube can also be applied to a high-frequency transmission window structure provided in an output waveguide that outputs an amplified high frequency.

本発明のいくつかの実施形態を説明したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これら新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれる。   Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

10 高周波入力結合器
17 高周波透過窓構体
30 高周波透過窓
31a スリーブとしての内導体スリーブ
31b スリーブとしての外導体スリーブ
35a,35b 接合面
37a,37b ろう材
39a,39b 接合部
40a,40b 溝部
42a,42b 側面
44a,44b 幅方向中央部
45a,45b 幅方向外側部
47a,47b メニスカス部
48a,48b 端部
10 High frequency input coupler
17 High-frequency transmission window structure
30 High-frequency transmission window
31a Inner conductor sleeve as sleeve
31b Outer conductor sleeve as sleeve
35a, 35b joint surface
37a, 37b Brazing material
39a, 39b joint
40a, 40b Groove
42a, 42b side
44a, 44b Center in the width direction
45a, 45b Width direction outer side
47a, 47b Meniscus section
48a, 48b end

Claims (4)

接合面を有する高周波透過窓と、
前記高周波透過窓の前記接合面がろう付け接合されるスリーブと
を具備し、
前記スリーブは、前記高周波透過窓の前記接合面の幅よりも小さい幅に設けられ前記接合面の幅方向中央部がろう付け接合される接合部、およびこの接合部の両側に沿って設けられ前記接合部の両側から突出する前記接合面の幅方向外側部が対向する溝部を有し、前記溝部の深さ寸法が前記溝部に対向する前記接合面の幅方向外側部の幅寸法よりも小さく設けられている
ことを特徴とする高周波透過窓構体。
A high-frequency transmission window having a joint surface;
A sleeve to which the joint surface of the high-frequency transmission window is brazed,
The sleeve is provided with a width that is smaller than the width of the joint surface of the high-frequency transmission window and the width direction center portion of the joint surface is brazed and joined along both sides of the joint portion. The outer surface of the joint surface protruding from both sides of the joint portion has a groove portion facing the groove portion, and the depth dimension of the groove portion is smaller than the width dimension of the outer width portion of the joint surface facing the groove portion. A high-frequency transmission window structure characterized by that.
前記接合面に設けられ、前記接合部にろう付け接合されるろう材を備え、
前記ろう材は、前記接合面の幅方向外側部と前記接合部の側面との間に、前記接合面の幅方向外側部の端部から前記接合部の側面に向かって徐々に厚みが増すとともに前記接合部の側面全域に接合されるメニスカス部を有する
ことを特徴とする請求項1記載の高周波透過窓構体。
A brazing material provided on the joint surface and brazed to the joint;
The brazing material gradually increases in thickness from an end portion of the widthwise outer side portion of the bonding surface toward a side surface of the bonding portion between the widthwise outer side portion of the bonding surface and the side surface of the bonding portion. The high-frequency transmission window structure according to claim 1, further comprising a meniscus portion bonded to the entire side surface of the bonding portion.
環状で、外周および内周に接合面を有する高周波透過窓と、
前記高周波透過窓の内周の前記接合面がろう付け接合される内導体スリーブと、
前記高周波透過窓の外周の前記接合面がろう付け接合される外導体スリーブと
を具備し、
前記内導体スリーブおよび前記外導体スリーブは、前記高周波透過窓の前記接合面の幅よりも小さい幅に設けられ前記接合面の幅方向中央部がろう付け接合される接合部、およびこの接合部の両側に沿って設けられ前記接合部の両側から突出する前記接合面の幅方向外側部が対向する溝部を有し、前記溝部の深さ寸法が前記溝部に対向する前記接合面の幅方向外側部の幅寸法よりも小さく設けられている
ことを特徴とする高周波入力結合器。
A high-frequency transmission window that is annular and has joint surfaces on the outer periphery and inner periphery;
An inner conductor sleeve to which the joint surface of the inner periphery of the high-frequency transmission window is brazed,
An outer conductor sleeve to which the joint surface on the outer periphery of the high-frequency transmission window is brazed,
The inner conductor sleeve and the outer conductor sleeve are provided in a width smaller than the width of the joint surface of the high-frequency transmission window, and a joint portion in which a central portion in the width direction of the joint surface is brazed and joined. A widthwise outer portion of the joint surface that is provided along both sides and that has a groove portion facing the widthwise outer portion of the joint surface that protrudes from both sides of the joint portion, and the depth dimension of the groove portion faces the groove portion. A high frequency input coupler characterized in that it is provided smaller than the width dimension.
前記接合面に設けられ、前記接合部にろう付け接合されるろう材を備え、
前記ろう材は、前記接合面の幅方向外側部と前記接合部の側面との間に、前記接合面の幅方向外側部の端部から前記接合部の側面に向かって徐々に厚みが増すとともに前記接合部の側面全域に接合されるメニスカス部を有する
ことを特徴とする請求項3記載の高周波入力結合器。
A brazing material provided on the joint surface and brazed to the joint;
The brazing material gradually increases in thickness from an end portion of the widthwise outer side portion of the bonding surface toward a side surface of the bonding portion between the widthwise outer side portion of the bonding surface and the side surface of the bonding portion. The high frequency input coupler according to claim 3, further comprising a meniscus portion that is bonded to the entire side surface of the bonding portion.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020177820A (en) * 2019-04-18 2020-10-29 キヤノン電子管デバイス株式会社 Protective member for high frequency input coupler, protection device for high frequency input coupler and high frequency input coupler

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020177820A (en) * 2019-04-18 2020-10-29 キヤノン電子管デバイス株式会社 Protective member for high frequency input coupler, protection device for high frequency input coupler and high frequency input coupler
JP7177571B2 (en) 2019-04-18 2022-11-24 キヤノン電子管デバイス株式会社 High-frequency input coupler protective member, high-frequency input coupler protective device, and high-frequency input coupler

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