JP2018200971A - Optical heating device - Google Patents

Optical heating device Download PDF

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JP2018200971A
JP2018200971A JP2017105473A JP2017105473A JP2018200971A JP 2018200971 A JP2018200971 A JP 2018200971A JP 2017105473 A JP2017105473 A JP 2017105473A JP 2017105473 A JP2017105473 A JP 2017105473A JP 2018200971 A JP2018200971 A JP 2018200971A
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partition wall
reflector
heating device
heater
heater lamp
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JP6916988B2 (en
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雄揮 福原
Yuki Fukuhara
雄揮 福原
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Ushio Denki KK
Ushio Inc
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Ushio Denki KK
Ushio Inc
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Abstract

To provide a structure in which a partition wall of the reflector located between adjacent heater lamps is cooled and heat from the entire reflector can be effectively exhausted in an optical heating device including a plurality of irradiation units each comprising a heater lamp and a reflector having a concave reflecting surface.SOLUTION: A reflector is formed with a partition wall located between heater lamps, and a dividing plane between adjacent irradiation units is formed so as to avoid the partition wall, and in the inside of the partition wall, a cooling medium flow path is formed.SELECTED DRAWING: Figure 1

Description

この発明は、ヒータランプを用いた光加熱装置に関し、特に、ワーク（例えば、紙、金属板、ディスプレイ、半導体ウエハ、ハンダ、処理溶液等の加熱対象物）に対して複数のヒータランプを並列配置させた光加熱装置に係わる。   The present invention relates to a light heating apparatus using a heater lamp, and in particular, a plurality of heater lamps are arranged in parallel on a workpiece (for example, a heating object such as paper, a metal plate, a display, a semiconductor wafer, solder, or a processing solution). Relates to the light heating apparatus.

一般にヒータランプを使った光加熱装置では、棒状のヒータランプとリフレクタとを組み合わせたものが使用されており、特開平０５−１３３５５号公報（特許文献１）には、このヒータランプとリフレクタとからなる照射ユニットを複数並列配置したものが開示されている。
図３にその概略構造が示されていて、複数の棒状ヒータランプ５１と、その背面側に配置されて、凹面反射面５３を有するリフレクタ５２とからなる照射ユニット５０を複数並列配置して、ワークＷに対向配置している。このような照射ユニット５０を複数配置して構成したものでは、その照射ユニット５０の数を増減することで、ワークＷの大きさに対応できるというメリットがある。 In general, in a light heating apparatus using a heater lamp, a combination of a rod-shaped heater lamp and a reflector is used, and Japanese Patent Application Laid-Open No. 05-13355 (Patent Document 1) includes a heater lamp and a reflector. A plurality of irradiation units arranged in parallel are disclosed.
The schematic structure is shown in FIG. 3, and a plurality of irradiation units 50 each including a plurality of rod-shaped heater lamps 51 and a reflector 52 having a concave reflecting surface 53 disposed on the back side thereof are arranged in parallel. Opposing to W. A configuration in which a plurality of such irradiation units 50 are arranged has an advantage that the size of the workpiece W can be accommodated by increasing or decreasing the number of irradiation units 50.

ところで、このように配置された照射ユニット５０では、ヒータランプ５１により加熱されたリフレクタ５２を冷却する必要があり、そのためには、リフレクタ５２の内部に冷却流路を形成することが必要となる。
しかして、ヒータランプ５１とリフレクタ５２とからなる照射ユニット５０を複数配列した構造においては、隣接するヒータランプ５１間にリフレクタ５２により区画壁５４が形成され、特許文献１のものでは、各照射ユニット５０の分割面５５はその区画壁５４の中央に位置している。
このような構造において、リフレクタ５２に冷却媒体流路５６を形成しようとすると、図４に示すように、凹面反射面５３の後方上方の領域に形成することになる。 By the way, in the irradiation unit 50 arrange | positioned in this way, it is necessary to cool the reflector 52 heated with the heater lamp 51, and it is necessary to form a cooling flow path in the inside of the reflector 52 for that purpose.
Thus, in the structure in which a plurality of irradiation units 50 each composed of the heater lamp 51 and the reflector 52 are arranged, a partition wall 54 is formed by the reflector 52 between the adjacent heater lamps 51. The 50 dividing surfaces 55 are located at the center of the partition wall 54.
In such a structure, when the cooling medium flow path 56 is formed in the reflector 52, the cooling medium flow path 56 is formed in the rear upper region of the concave reflecting surface 53 as shown in FIG.

ところが、リフレクタ５２においては、ヒータランプ５１の間に位置する区画壁５４部分が、両側のヒータランプ５１から加熱されることもあり、最も高温になるが、この区画壁５４には分割面５５が存在するために、この部位（図４で×印で示した部位）には冷却媒体流路５６を形成することができず、当該区画壁５４の冷却が困難となり、リフレクタ５２全体からの効果的な排熱が難しいという問題がある。   However, in the reflector 52, the partition wall 54 portion located between the heater lamps 51 is heated from the heater lamps 51 on both sides and becomes the highest temperature, but the partition wall 54 has a dividing surface 55. Therefore, the cooling medium flow path 56 cannot be formed in this part (the part indicated by a cross in FIG. 4), and it becomes difficult to cool the partition wall 54, which is effective from the reflector 52 as a whole. There is a problem that exhaust heat is difficult.

特開平０５−１３３５５号公報Japanese Patent Laid-Open No. 05-13355

この発明が解決しようとする課題は、ヒータランプと、凹面反射面を有するリフレクタとからなる照射ユニットを複数並置してなる光加熱装置において、隣接するヒータランプの間に位置するリフレクタの区画壁を冷却してリフレクタ全体からの排熱を効果的に行うことができるようにした構造を提供することである。   A problem to be solved by the present invention is a light heating apparatus in which a plurality of irradiation units each including a heater lamp and a reflector having a concave reflecting surface are juxtaposed, and a partition wall of the reflector located between adjacent heater lamps is provided. It is to provide a structure that can cool and effectively exhaust heat from the entire reflector.

上記課題を解決するために、この発明に係る光加熱装置は、前記リフレクタには、前記ヒータランプの間に位置する区画壁が形成されており、隣接する前記照射ユニット間の分割面が、前記区画壁を避けるように形成されていて、前記区画壁の内部には冷却媒体流路が形成されていることを特徴とする。
また、前記凹面反射面には、前記ヒータランプの直上において、冷却風の噴出口が設けられており、前記分割面は、前記噴出口を避ける位置に形成されることを特徴とする。
また、前記噴出口は、共通のエアチャンバに接続されていることを特徴とする。 In order to solve the above-described problem, in the light heating device according to the present invention, the reflector is formed with a partition wall positioned between the heater lamps, and a dividing surface between the adjacent irradiation units is It is formed so as to avoid the partition wall, and a cooling medium flow path is formed inside the partition wall.
The concave reflecting surface is provided with an outlet for cooling air immediately above the heater lamp, and the dividing surface is formed at a position avoiding the outlet.
Further, the jet outlet is connected to a common air chamber.

この発明の光加熱装置によれば、隣接する前記照射ユニット間の分割面が、隣接するヒータランプの間の区画壁を避けるように形成されているので、当該区画壁に冷却媒体流路を形成することができ、両側のヒータランプから加熱されて最も高温となる区画壁からの排熱が効果的になされるという効果を奏する。
また、前記分割面を、凹面反射面のヒータランプの直上を避けた位置に設けることで、ヒータランプの直上位置に冷却風の噴出口を設けて、ヒータランプの冷却を効果的に行うことができる。 According to the light heating device of the present invention, since the dividing surface between the adjacent irradiation units is formed so as to avoid the partition wall between the adjacent heater lamps, the cooling medium flow path is formed in the partition wall. This is advantageous in that the exhaust heat from the partition wall that is heated by the heater lamps on both sides and becomes the highest temperature is effectively performed.
In addition, by providing the dividing surface at a position that avoids the directly above the heater lamp on the concave reflecting surface, a cooling air jet outlet is provided at a position directly above the heater lamp, so that the heater lamp can be effectively cooled. it can.

本発明の光加熱装置の断面図Sectional view of the light heating device of the present invention 図１の部分拡大図Partial enlarged view of FIG. 従来の光加熱装置の概略図Schematic diagram of a conventional light heating device 図３の部分拡大図Partial enlarged view of FIG.

図１は本発明の光加熱装置１の全体断面図で、複数の棒状のヒータランプ２と、リフレクタ３とからなる。
リフレクタ３は、第１端部材３１と第２端部材３２と複数の中央部材３３とからなる。第１端部材３１と中央部材３３、中央部材３３同士、中央部材３３と第２端部材３２が組み合わされることで、凹面反射面４が形成され、各ヒータランプ２に対応している。
中央部材３３には各ヒータランプ２の間に位置して区画壁５が形成されていて、前記第１端部材３１と中央部材３３、中央部材３３同士、中央部材３３と第２端部材３２が組み合わされる分割面６は、この区画壁５を避けた位置に設けられている。
なお、これらの３部材３１、３２、３３には、それぞれ凸部７と凹部８が形成されていて、これらを嵌合させることで容易に組み立てられる。
こうして組み立てられた各部材３１、３２、３３と凹面反射面４およびヒータランプ２によって複数の照射ユニット９が形成される。 FIG. 1 is an overall sectional view of a light heating apparatus 1 according to the present invention, which includes a plurality of rod-shaped heater lamps 2 and a reflector 3.
The reflector 3 includes a first end member 31, a second end member 32, and a plurality of central members 33. By combining the first end member 31 and the central member 33, the central members 33, and the central member 33 and the second end member 32, the concave reflecting surface 4 is formed and corresponds to each heater lamp 2.
A partition wall 5 is formed between the heater lamps 2 in the central member 33, and the first end member 31 and the central member 33, the central members 33, the central member 33 and the second end member 32 are provided. The divided surfaces 6 to be combined are provided at positions avoiding the partition walls 5.
The three members 31, 32, and 33 have a convex portion 7 and a concave portion 8, respectively, and can be easily assembled by fitting them.
A plurality of irradiation units 9 are formed by the members 31, 32, 33 assembled in this way, the concave reflecting surface 4 and the heater lamp 2.

そして、前記区画壁５には、冷却媒体流路１０が形成されている。
図２にも示されるように、前記分割面６は、ヒータランプ２の直上位置も避けられていて、凹面反射面４には、前記ヒータランプ２の直上位置に、ヒータランプ２の管軸方向に沿って冷却風の噴出口１１が形成されている。この噴出口１１は、ヒータランプ２の管軸方向に沿って延在する共通のエアチャンバ１２に接続開口している。
つまり、分割面６は、区画壁５とヒータランプ２の直上位置（より厳密には、噴出口１１の端部、より好ましくはエアチャンバ１２の端部）との間の範囲Ｘに設けることが好ましい。 A cooling medium flow path 10 is formed in the partition wall 5.
As shown in FIG. 2, the dividing surface 6 is also avoided from the position directly above the heater lamp 2, and the concave reflecting surface 4 is positioned immediately above the heater lamp 2 in the tube axis direction of the heater lamp 2. A cooling air outlet 11 is formed along the line. The ejection port 11 is connected and opened to a common air chamber 12 extending along the tube axis direction of the heater lamp 2.
That is, the dividing surface 6 is provided in a range X between the partition wall 5 and a position immediately above the heater lamp 2 (more strictly, the end of the jet port 11, more preferably the end of the air chamber 12). preferable.

また、リフレクタ３には蓋部材１３が被せられており、これにより、エアチャンバ１２は密閉構造とされている。そして、不図示のエア供給管がこのエアチャンバ１２に接続されて冷却風が供給され、冷却風が噴出口１１から噴出して、ヒータランプ２を冷却する。
なお、噴出口１１は、図２の断面視で、管軸方向に沿って２列形成したものを示したが、１列であってもよく、更には、その形状も断面円形形状でも管軸方向に延びるスリット形状であってもよい。 The reflector 3 is covered with a lid member 13, whereby the air chamber 12 has a sealed structure. An air supply pipe (not shown) is connected to the air chamber 12 to supply cooling air, and the cooling air is ejected from the ejection port 11 to cool the heater lamp 2.
In addition, although the jet nozzle 11 showed what formed two rows along the pipe-axis direction in the cross-sectional view of FIG. 2, it may be one row, and also the shape and the cross-section of the tube shaft It may have a slit shape extending in the direction.

以上説明したように、リフレクタに、ヒータランプの間に位置する区画壁が形成されており、隣接する照射ユニット間の分割面が、区画壁を避けるように形成されていて、区画壁の内部には冷却媒体流路が形成されている構成としたことにより、隣接するヒータランプにより加熱されて最も高温となる区画壁を直接冷却することができ、リフレクタ全体からの排熱が効果的となるという効果が奏せられる。
また、この分割面は、ヒータランプの直上位置を避けた位置に設けられることにより、当該部位に冷却風の噴出口を支障なく形成することができて、ヒータランプを効率的に冷却することができる。 As described above, a partition wall located between the heater lamps is formed in the reflector, and a dividing surface between adjacent irradiation units is formed so as to avoid the partition wall, and is formed inside the partition wall. Since the cooling medium flow path is formed, the partition wall that is heated to the highest temperature by the adjacent heater lamp can be directly cooled, and the exhaust heat from the entire reflector is effective. An effect is produced.
In addition, by providing this dividing surface at a position that avoids the position directly above the heater lamp, it is possible to form a cooling air jet outlet at that location without hindrance, and to efficiently cool the heater lamp. it can.

１ 光加熱装置
２ ヒータランプ
３ リフレクタ
３１ 第１端部材
３２ 第２端部材
３３ 中央部材
４ 凹面反射面
５ 区画壁
６ 分割面
９ 照射ユニット
１０ 冷却媒体流路
１１ 冷却風噴出口
１２ エアチャンバ
１３ 蓋部材


DESCRIPTION OF SYMBOLS 1 Light heating apparatus 2 Heater lamp 3 Reflector 31 1st end member 32 2nd end member 33 Central member 4 Concave reflective surface 5 Partition wall 6 Dividing surface 9 Irradiation unit 10 Cooling medium flow path 11 Cooling-air ejection port 12 Air chamber 13 Cover Element


Claims (3)

ヒータランプと、凹面反射面を有するリフレクタとからなる照射ユニットを複数並置してなる光加熱装置において、
前記リフレクタには、前記ヒータランプの間に位置する区画壁が形成されており、
隣接する前記照射ユニット間の分割面が、前記区画壁を避けるように形成されていて、
前記区画壁の内部には冷却媒体流路が形成されていることを特徴とする光加熱装置。 In a light heating device in which a plurality of irradiation units each including a heater lamp and a reflector having a concave reflecting surface are juxtaposed,
A partition wall located between the heater lamps is formed in the reflector,
A dividing surface between adjacent irradiation units is formed so as to avoid the partition wall,
A light heating device, wherein a cooling medium flow path is formed inside the partition wall. 前記凹面反射部には、前記ヒータランプの直上において、冷却風の噴出口が設けられており、
前記分割面は、前記噴出口を避ける位置に形成されることを特徴とする請求項１に記載の光加熱装置。 The concave reflecting portion is provided with an outlet for cooling air immediately above the heater lamp,
The light heating device according to claim 1, wherein the dividing surface is formed at a position that avoids the ejection port. 前記噴出口は、共通のエアチャンバに接続されていることを特徴とする請求項２に記載の光加熱装置。


The light heating device according to claim 2, wherein the ejection port is connected to a common air chamber.


JP2017105473A 2017-05-29 2017-05-29 Light heating device Active JP6916988B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023146742A1 (en) * 2022-01-25 2023-08-03 Applied Materials, Inc. Active cooling of quartz enveloped heaters in vacuum

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100412A (en) * 1979-12-17 1981-08-12 Sony Corp Manufacture of semiconductor device
JPH02242086A (en) * 1989-03-15 1990-09-26 Natl Inst For Res In Inorg Mater Multi-stage reflection type electric furnace
JP2006505123A (en) * 2002-11-01 2006-02-09 コルニック システムズ コーポレーション Heating module for rapid thermal processing equipment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100412A (en) * 1979-12-17 1981-08-12 Sony Corp Manufacture of semiconductor device
JPH02242086A (en) * 1989-03-15 1990-09-26 Natl Inst For Res In Inorg Mater Multi-stage reflection type electric furnace
JP2006505123A (en) * 2002-11-01 2006-02-09 コルニック システムズ コーポレーション Heating module for rapid thermal processing equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023146742A1 (en) * 2022-01-25 2023-08-03 Applied Materials, Inc. Active cooling of quartz enveloped heaters in vacuum

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