JP2018196002A - Tuning fork type crystal oscillating element and tuning fork crystal oscillator including the same - Google Patents

Abstract

To improve oscillation characteristics and reduce degradation of reliability.SOLUTION: The tuning fork type crystal oscillating element includes: a base portion 50; a plurality of oscillating arm portions 60 extending in a first direction D1 from the base portion 50 in a second direction D2 intersecting the first direction D1; at least one supporting arm portion 70 extending from the base portion 50 in the first direction D1 and provided outside the plurality of oscillating arm portions 60 in the second direction D2; and at least one hole 80 provided in the at least one support arm portion 70 and extending along the first direction D1.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a tuning-fork type crystal vibrating element that operates based on the piezoelectric effect of quartz and a tuning-fork type crystal resonator including the same.

  A tuning fork crystal resonator element having a pair of vibrating arms extending in parallel from a base portion of a base material and a tuning fork crystal resonator including the same are known. A drive voltage is applied to the pair of vibrating arms to be excited. Such a tuning fork type crystal resonator is used for a timing device or a vibration gyro sensor mounted on an electronic device such as a mobile computer, a portable game machine, a mobile phone, an IC card, a communication base station, or the like. With the miniaturization and high performance of electronic equipment, tuning fork crystal units and tuning fork crystal resonators built therein are required to have improved vibration characteristics and improved reliability.

  For example, Patent Document 1 discloses a tuning fork type including a base, a pair of vibrating arms extending from the base, and a pair of support arms extending from the base along the vibrating arms. A bent quartz crystal is disclosed. Specifically, the vibrating arm portion is configured to extend from the base portion inside the supporting arm portion provided in pairs, and the supporting arm portion includes a groove-shaped first recess in the width direction. A configuration is disclosed in which the supporting arm portions are provided with a predetermined interval without facing each other while having the first recesses on the front and back main surfaces of the vibrating arm portion. According to this, it is possible to attenuate the vibration leaking from the vibrating arm portion to the supporting arm portion.

JP 2011-015102 A

  However, in the tuning fork-type bent quartz crystal described in Patent Document 1, the mechanical strength of the support arm portion is reduced by the groove-shaped first recess in the width direction. In particular, when a tuning fork-type bending crystal resonator element is mounted on the element connection electrode pad of the element mounting member at the tip of the support arm and is hermetically sealed by the lid, it can be dropped from the outside onto the element mounting portion or the lid. The applied impact is concentrated in the first recess when transmitted to the tuning fork-type bent quartz crystal unit. For this reason, the tuning fork type crystal resonator may be damaged at the support arm portion due to a decrease in impact resistance caused by the first recess.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a tuning-fork type crystal vibrating element capable of improving vibration characteristics and suppressing reduction in reliability.

  A tuning fork type crystal resonator element according to an aspect of the present invention includes a base, a plurality of vibrating arms extending in the first direction from the base and arranged in a second direction intersecting the first direction, and the base in the first direction. And at least one support arm portion provided outside the plurality of vibrating arm portions in the second direction, and at least one support arm portion provided on the at least one support arm portion and extending along the first direction. With holes.

  A tuning fork crystal resonator according to another aspect of the present invention includes a base member, a lid member that forms an internal space between the base member, a tuning fork crystal resonator element housed in the internal space, and a tuning fork type And a tuning fork-type quartz resonator element extending in the first direction from the base portion and arranged in a second direction intersecting the first direction. A plurality of vibrating arm portions, at least one support arm portion extending in the first direction from the base portion and provided outside the plurality of vibrating arm portions in the second direction, and provided on at least one support arm portion , At least one hole extending along the first direction, and at least one support arm portion that is further away from the base than the at least one hole, and is fixed to the base member via the conductive holding member A fixing part.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the piezoelectric vibration element which can aim at improvement of a vibration characteristic and can aim at suppression of the fall of reliability.

FIG. 1 is an exploded perspective view schematically showing a configuration of a tuning fork type crystal resonator according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing a cross-sectional configuration along the line II-II of the tuning fork type crystal resonator shown in FIG. FIG. 3 is a plan view schematically showing the configuration of the tuning fork type crystal resonator element according to the first embodiment. 4 is a cross-sectional view schematically showing a cross-sectional configuration along line IV-IV of the tuning-fork type crystal vibrating element shown in FIG. FIG. 5 is a cross-sectional view schematically showing a cross-sectional configuration along the line VV of the tuning-fork type crystal vibrating element shown in FIG. FIG. 6 is a cross-sectional view schematically showing a configuration of a tuning fork type crystal resonator element according to the second embodiment. FIG. 7 is a plan view schematically showing a configuration of a tuning-fork type crystal resonator element according to the third embodiment. FIG. 8 is a cross-sectional view schematically showing a configuration of a tuning fork type crystal resonator element according to the third embodiment. FIG. 9 is a cross-sectional view schematically showing a configuration of a tuning-fork type crystal resonator element according to the fourth embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, in the second and subsequent embodiments, the same or similar components as those in the first embodiment are denoted by the same or similar reference numerals as those in the first embodiment, and detailed description thereof is omitted as appropriate. Moreover, about the effect acquired in embodiment after 2nd Embodiment, description is abbreviate | omitted suitably about the thing similar to 1st Embodiment. The drawings of the embodiments are exemplifications, the dimensions and shapes of the respective parts are schematic, and the technical scope of the present invention should not be understood as being limited to the embodiments.

<First Embodiment>
First, the tuning fork type crystal resonator element 10 according to the first embodiment of the present invention and the tuning fork type crystal resonator 1 including the tuning fork type crystal resonator element 10 will be described with reference to FIGS. FIG. 1 is an exploded perspective view schematically showing a configuration of a tuning fork type crystal resonator according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing a cross-sectional configuration along the line II-II of the tuning fork type crystal resonator shown in FIG. FIG. 3 is a plan view schematically showing the configuration of the tuning fork type crystal resonator element according to the first embodiment.

  In FIG. 1 to FIG. 3, the excitation electrode, the connection electrode, and the like provided in the tuning fork type crystal resonator element 10 are not shown. Further, the first direction D1, the second direction D2, and the third direction D3 shown in the figure are, for example, directions orthogonal to each other, but are not limited to these as long as they intersect each other. The directions may intersect with each other at an angle other than 90 °. In addition, the first direction D1, the second direction D2, and the third direction D3 mean the three reference directions shown in FIG. 1, and the positive direction (the direction of the arrow) and the negative direction (the opposite of the arrow), respectively. Direction).

  The tuning fork type crystal resonator 1 is a kind of crystal resonator (Quartz Crystal Resonator Unit). The tuning fork type crystal resonator element 10 is a kind of crystal resonator element (Quartz Crystal Resonator), and an excitation portion that excites in accordance with an applied voltage is a crystal resonator element corresponding to parallel arm portions in a tuning fork shape. The quartz resonator element uses a quartz piece (Quartz Crystal Piece) that vibrates according to an applied voltage.

  As shown in FIG. 1, the tuning fork crystal resonator 1 includes a tuning fork crystal resonator element 10, a lid member 20, a base member 30, and a bonding member 40. The base member 30 and the lid member 20 are holders for housing the tuning fork type crystal resonator element 10. In the example illustrated here, the lid member 20 has a concave shape, specifically, a box shape having an opening, and the base member 30 has a flat plate shape. The shapes of the lid member 20 and the base member 30 are not limited to the above. For example, the base member may have a concave shape, and both the lid member and the base member have a concave shape having openings on the sides facing each other. It may be.

  The tuning fork type crystal resonator element 10 includes a crystal piece 11. The crystal piece 11 is a tuning-fork type Z-plate crystal piece. Specifically, the Z plate crystal piece is rotated in the range of 0 degrees to 5 degrees clockwise around the Z axis in the orthogonal coordinate system including the X axis, the Y axis, and the Z axis. A plane parallel to the plane specified by the axis (hereinafter referred to as “XY plane”; the same applies to planes specified by other axes or other directions) is the main plane, and a direction parallel to the Z axis Is obtained by cutting and polishing an artificial quartz crystal so that the thickness becomes a thickness. The crystal piece 11 is not limited to the XY plane, and may be a plane inclined several degrees from the XY plane. Note that the X axis, the Y axis, and the Z axis are crystal axes of the artificial quartz crystal, the X axis corresponds to the electrical axis, the Y axis corresponds to the mechanical axis, and the Z axis corresponds to the optical axis. The X axis is a polar axis having a positive direction. Hereinafter, a direction parallel to the Y axis is referred to as a Y axis direction. The same applies to other axial directions. Note that different cuts other than the Z-plate crystal piece may be applied to the crystal piece.

  In the first embodiment, the tuning fork type crystal resonator element 10 has a Y-axis parallel to the first direction D1, an X-axis parallel to the second direction D2, and a Z-axis parallel to the third direction D3. Is arranged. In the X-axis direction that is the polar axis, the + X-axis direction is the positive direction of the second direction D2, and the -X-axis direction is the negative direction of the second direction D2. However, the first direction D1 only needs to be along the Y-axis direction. For example, the first direction D1 may be tilted in the range of −5 degrees to +5 degrees from the Y-axis direction. Similarly, the second direction D2 may be along the X-axis direction, and the third direction D3 may be along the Z-axis direction.

  As shown in FIGS. 1 and 3, the tuning fork type crystal resonator element 10 including a Z-plate crystal piece 11 includes a base 50, a pair of vibrating arms 60, and a pair of support arms 70. In addition, a plurality of holes 80 are formed in the pair of support arm portions 70.

  The base 50 connects the pair of vibrating arm portions 60 at the end of the crystal piece 11 on the negative direction side in the first direction D1. Similarly, the base 50 is connected to a pair of support arm portions 70. The base 50 has a surface (first main surface) 50 a on the side facing the lid member 20, and a back surface (second main surface) 50 b on the side facing the base member 30.

  The pair of vibrating arm portions 60 is a general term for the first vibrating arm portion 61 and the second vibrating arm portion 62 that extend from the base portion 50 in the positive direction of the first direction D1 and are aligned in the second direction D2. The first vibrating arm portion 61 is provided on the second direction D2 positive direction side of the second vibrating arm portion 62. The pair of vibrating arms 60 also has a surface (first main surface) 60 a on the side facing the lid member 20, and the back surface (second main surface) on the side facing the base member 30, similarly to the base 50. 60b. The first main surface 60a and the second main surface 60b of the pair of vibrating arm portions 60 are continuous with the first main surface 50a and the second main surface 50b of the base portion 50, respectively.

  Each of the first vibrating arm portion 61 and the second vibrating arm portion 62 is provided with a bottomed first groove 63a along the first direction D1 in the first main surface 60a, and in the first direction on the second main surface 60b. A bottomed second groove 63b along D1 is provided. The first groove 63a and the second groove 63b are opposed in the third direction D3. Thus, by providing the first groove 63a and the second groove 63b, the tuning fork type crystal vibrating element 10 improves the ease of movement of the first vibrating arm part 61 and the second vibrating arm part 62, and the first vibration. Vibration leakage from the arm portion 61 and the second vibrating arm portion 62 to the base portion 50 can be suppressed. Note that the number of vibrating arm portions is not limited to two, and may be three or more.

  The pair of support arm portions 70 extend in the positive direction of the first direction D1 from the base portion 50, and are provided with a first support arm portion 71 and a second support arm provided outside the pair of vibrating arm portions 60 in the second direction D2. The part 72 is a general term. The first support arm portion 71 is provided on the positive side of the first vibrating arm portion 61 in the second direction D2, and the second support arm portion 72 is provided on the negative side of the second vibrating arm portion 62 in the second direction D2. It has been. That is, the pair of vibrating arm portions 60 and the pair of support arm portions 70 are arranged in the second direction D2. The pair of support arm portions 70 also has a surface (first main surface) 70 a on the side facing the lid member 20 and the back surface (second main surface) on the side facing the base member 30, similarly to the base portion 50. 70b. The first main surface 70a and the second main surface 70b of the pair of support arm portions 70 are continuous with the first main surface 50a and the second main surface 50b of the base portion 50, respectively.

  The lengths of the first support arm portion 71 and the second support arm portion 72 in the first direction D1 (hereinafter simply referred to as “length”. The same applies to the first vibration arm portion 61 and the second vibration arm portion 62. .) Are substantially the same and are shorter than the lengths of the first vibrating arm portion 61 and the second vibrating arm portion 62, respectively. Further, the lengths of the first support arm portion 71 and the second support arm portion 72 are about ½ of the lengths of the first vibration arm portion 61 and the second vibration arm portion 62, respectively. Fixing portions 76 a and 76 b that are fixed to the base member 30 are provided at the distal ends of the first support arm portion 71 and the second support arm portion 72, respectively. That is, the attitude of the tuning fork type crystal resonator element 10 is held through the fixing portions 76a and 76b. Since the fixing portions 76a and 76b are provided in the vicinity of the intermediate point in the first direction D1 of the tuning fork type crystal resonator element 10, the posture of the tuning fork type crystal resonator element 10 with respect to the base member 30 is stabilized, and the tuning fork type crystal resonator element 10 is It is possible to suppress deterioration of vibration characteristics due to contact with the lid member 20 or the base member 30.

  The lengths of the first support arm portion 71 and the second support arm portion 72 are not particularly limited, and are ½ or less of the lengths of the first vibration arm portion 61 and the second vibration arm portion 62, respectively. Or 1/2 or more of the lengths of the first vibrating arm portion 61 and the second vibrating arm portion 62. Further, the positions of the fixing portions 76 a and 76 b are not limited to the tip portions of the first support arm portion 71 and the second support arm portion 72. For example, when the lengths of the first support arm portion 71 and the second support arm portion 72 are equal to the lengths of the first vibration arm portion 61 and the second vibration arm portion 62, respectively, the attitude of the tuning fork type crystal vibration element 10 In order to stabilize, it is desirable that the fixing portions 76a and 76b are provided at the intermediate portion in the first direction D1 of the first support arm portion 71 and the second support arm portion 72. The length of the first support arm portion 71 may be different from the length of the second support arm portion 72. Further, the position of the fixing portion 76 a in the first support arm portion 71 may be different from the position of the fixing portion 76 b in the second support arm portion 72. The number of support arm portions is not particularly limited, and may be one. That is, one of the first support arm portion 71 and the second support arm portion 72 may be omitted. The fixing portion may also be provided on the base portion 50.

  A plurality of holes 80 are formed in the pair of support arm portions 70. The plurality of holes 80 collectively refers to the groove-shaped first hole 81, second hole 82, third hole 83, and fourth hole 84 that extend along the first direction D1 and are aligned in the second direction D2. is there. The first hole 81 and the second hole 82 are bottomed grooves having an opening on the first main surface 70 a side of the first support arm 71. The first hole 81 and the second hole 82 are formed in the first support arm portion 71 between the base portion 50 and the fixing portion 76a. The third hole 83 and the fourth hole 84 are bottomed grooves having an opening on the first main surface 70 a side of the second support arm portion 72. The third hole 83 and the fourth hole 84 are formed in the second support arm portion 72 between the base portion 50 and the fixing portion 76b. The first hole 81 and the second hole 82 are formed in parallel, and the third hole 83 and the fourth hole 84 are formed in parallel.

  The plurality of holes 80 may be formed from the pair of support arm portions 70 to the base portion 50. That is, the openings of the first hole 81 and the second hole 82 may extend from the first main surface 70 a of the first support arm 71 to the first main surface 50 a of the base 50. Similarly, the openings of the third hole 83 and the fourth hole 84 may extend from the first main surface 70 a of the second support arm portion 72 to the first main surface 50 a of the base 50. The positions of the first hole 81 and the second hole 82 are not particularly limited. As will be described later, the first hole 81 and the second hole 82 may have an opening in the second main surface 70b of the first support arm portion 71. The through hole which has an opening part in the 1st main surface 70a and the 2nd main surface 70b may be sufficient. Moreover, the 1st hole 81 and the 2nd hole 82 may mutually be shifted | deviated to the 1st direction D1, and may be located in a line with the 1st direction D1. The same applies to the third hole 83 and the fourth hole 84. The number of holes formed in the support arm portion is not particularly limited, and may be one per support arm portion or three or more. The hole may be formed in one of the pair of support arm portions and not formed in the other.

  The lid member 20 has a concave shape and has a box shape opened toward the first main surface 32 a of the base member 30. The lid member 20 is joined to the base member 30 to provide an internal space 26 surrounded by the lid member 20 and the base member 30, and the tuning fork type crystal resonator element 10 is accommodated in the internal space 26. The shape of the lid member 20 is not particularly limited as long as the tuning fork type crystal resonator element 10 can be accommodated. For example, the lid member 20 has a rectangular shape when viewed from the normal direction of the main surface of the top surface portion 21. ing. The lid member 20 has, for example, a long side parallel to the first direction D1, a short side parallel to the second direction D2, and a height parallel to the third direction D3. The material of the lid member 20 is not particularly limited, but is made of a conductive material such as metal. By including a conductive material, the lid member 20 can have an electromagnetic shielding function that shields electromagnetic waves from entering and exiting the internal space 26.

  As shown in FIG. 2, the lid member 20 has an inner surface 24 and an outer surface 25. The inner surface 24 is a surface on the inner space 26 side, and the outer surface 25 is a surface opposite to the inner surface 24. The lid member 20 is connected to the top surface portion 21 facing the first main surface 32 a of the base member 30 and the outer edge of the top surface portion 21 and extends in a direction intersecting the main surface of the top surface portion 21. Part 22. The lid member 20 has a facing surface 23 that faces the first main surface 32a of the base member 30 at the concave opening end (the end of the side wall 22 on the side close to the base member 30). The facing surface 23 extends in a frame shape so as to surround the periphery of the tuning fork type crystal resonator element 10.

  The base member 30 holds the tuning-fork type crystal resonator element 10 so that it can be excited. The base member 30 has a flat plate shape. The base member 30 has a long side parallel to the first direction D1, a short side parallel to the second direction D2, and a thickness parallel to the third direction D3. The base member 30 has a base 31. The base 31 has a first main surface 32a (front surface) and a second main surface 32b (back surface) that face each other. The base 31 is a sintered material such as insulating ceramic (alumina). The base 31 is preferably made of a heat resistant material.

  The base member 30 includes electrode pads 33a and 33b provided on the first main surface 32a and external electrodes 35a, 35b, 35c and 35d provided on the second main surface 32b. The electrode pads 33 a and 33 b are terminals for electrically connecting the base member 30 and the tuning fork type crystal resonator element 10. The external electrodes 35a, 35b, 35c, and 35d are terminals for electrically connecting a circuit board (not shown) and the tuning fork type crystal resonator 1. The external electrodes 35a, 35b, 35c, and 35d are provided at the four corners of the base member 30, respectively. The external electrodes 35a and 35b through which electric signals are input and output are arranged in the second direction D2 at the end of the base member 30 on the negative direction side in the first direction D1. The electrode pad 33a is electrically connected to the external electrode 35a via a via electrode 34a extending in the third direction D3, and extends in the first direction D1. The electrode pad 33b is electrically connected to the external electrode 35b via a via electrode 34b extending in the third direction D3, and extends in the first direction D1. The via electrodes 34a and 34b are formed in via holes that penetrate the base 31 in the third direction D3.

  The external electrodes 35a and 35b may be provided at the center of the base member 30 in the first direction D1 so as to face the fixed portions 76a and 76b in the third direction D3, respectively. In this case, the via electrodes 34a and 34b are formed in via holes penetrating through regions facing the fixing portions 76a and 76b in the third direction D3, respectively. The external electrodes 35c and 35d may be dummy electrodes through which an electric signal or the like is not input / output, or may be ground electrodes that improve the electromagnetic shielding function of the lid member 20 by supplying a ground potential to the lid member 20. The external electrodes 35c and 35d may be omitted.

  The conductive holding members 36 a and 36 b are provided between the first main surface 32 a of the base member 30 and the fixing portions 76 a and 76 b of the tuning fork type crystal resonator element 10. The conductive holding members 36 a and 36 b electrically connect the tuning fork type crystal vibrating element 10 to the pair of electrode pads 33 a and 33 b of the base member 30. Further, the conductive holding members 36 a and 36 b hold the tuning fork type crystal resonator element 10 on the base member 30 so as to be excited by fixing the fixing portions 76 a and 76 b to the first main surface 32 a of the base member 30. . The conductive holding members 36a and 36b are formed of, for example, a conductive adhesive containing a thermosetting resin, an ultraviolet curable resin, or the like. An additive such as conductive particles for imparting conductivity to the holding member is included.

  A sealing member 37 is provided on the first main surface 32 a of the base member 30. In the example illustrated in FIG. 1, the sealing member 37 has a rectangular frame shape when viewed in plan from the normal direction of the first main surface 32 a. When viewed in plan from the normal direction of the first main surface 32a, the electrode pads 33a and 33b are disposed inside the sealing member 37, and the sealing member 37 surrounds the tuning fork type crystal resonator element 10. Is provided. The sealing member 37 is made of a conductive material. For example, by forming the sealing member 37 with the same material as the electrode pads 33a and 33b, the sealing member 37 can be provided simultaneously in the step of providing the electrode pads 33a and 33b.

  The joining member 40 is provided over the entire circumference of the lid member 20 and the base member 30. Specifically, the joining member 40 is provided on the sealing member 37 and is formed in a rectangular frame shape. The sealing member 37 and the joining member 40 are sandwiched between the facing surface 23 of the side wall portion 22 of the lid member 20 and the first main surface 32 a of the base member 30.

  When the lid member 20 and the base member 30 are joined together with the sealing member 37 and the joining member 40 interposed therebetween, the tuning fork type crystal resonator element 10 is surrounded by the lid member 20 and the base member 30 (inside space ( Cavity) 26 is sealed. The internal space 26 preferably has an atmospheric pressure lower than the atmospheric pressure, and more preferably in a vacuum state. According to this, it is possible to reduce a variation with time in frequency characteristics of the tuning fork type crystal resonator 1 due to oxidation of a first excitation electrode 91 and a second excitation electrode 92 which will be described later. The sealing member 37 may be provided in a discontinuous frame shape, and the joining member 40 may be provided in a discontinuous frame shape.

  Next, the operation of the tuning fork type crystal resonator element 10 will be described with reference to FIG. 4 is a cross-sectional view schematically showing a cross-sectional configuration along line IV-IV of the tuning-fork type crystal vibrating element shown in FIG. The IV-IV line is a line parallel to the second direction D2 passing through the fixing portion 76a of the first support arm portion 71 and the fixing portion 76b of the second support arm portion 72.

  A first excitation electrode 91 and a second excitation electrode 92 are provided on the surfaces of the first vibrating arm portion 61 and the second vibrating arm portion 62, respectively. The first excitation electrode 91 is provided on each side surface of the first vibrating arm portion 61 and the second vibrating arm portion 62. Both side surfaces are a pair of side surfaces that connect the first main surface 60a and the second main surface 60b. That is, the first excitation electrode 91 is opposed to sandwich the first vibrating arm portion 61 and the second vibrating arm portion 62 in the second direction D2. The second excitation electrode 92 is provided in each of the first groove 63a and the second groove 63b on the first main surface 60a and the second main surface 60b. The second excitation electrode 92 is also provided outside the first groove 63a and the second groove 63b.

  A first connection electrode 93 is provided on the second main surface 70 b of the first support arm portion 71, and a second connection electrode 94 is provided on the second main surface 70 b of the second support arm portion 72. The first connection electrode 93 electrically connects the first excitation electrode 91 and the conductive holding member 36a. The second connection electrode 94 electrically connects the second excitation electrode 92 and the conductive holding member 36b.

  The first excitation electrode 91 and the second excitation electrode 92 are electrodes made of a metal film having a multilayer structure in which, for example, nickel (Ni) or chromium (Cr) is used as a base layer and gold (Au) is used as an outermost layer. Chromium has high adhesion to the crystal piece, and therefore can suppress peeling of the excitation electrode due to long-term continuous operation or the like. Since gold has high chemical stability, fluctuations in vibration characteristics due to oxidation of the excitation electrode can be suppressed. The first connection electrode 93 and the second connection electrode 94 are respectively made of the same material as the first excitation electrode 91 and the second excitation electrode 92, and are integrated with the first excitation electrode 91 and the second excitation electrode 92. Is formed. According to this, the 1st excitation electrode 91 and the 2nd excitation electrode 92, the 1st connection electrode 93, and the 2nd connection electrode 94 can be formed simultaneously by the same process.

  An alternating electric field input from the electrode pad 33a and the electrode pad 33b is applied to the inside of the first vibrating arm portion 61 and the second vibrating arm portion 62 via the first excitation electrode 91 and the second excitation electrode 92, respectively. . Then, both side surfaces of the first vibrating arm portion 61 and the second vibrating arm portion 62 expand and contract based on the magnitude of the voltage of the alternating electric field. By applying an alternating electric field of a specific drive voltage between the first excitation electrode 91 and the second excitation electrode 92, the first vibrating arm portion 61 and the second vibrating arm portion 62 become a pair of vibrating arms in FIG. 3. It vibrates at a specific resonance frequency so as to approach or separate from each other in the direction of the arrow shown at the tip of the portion 60.

  Next, functions of the plurality of holes 80 in the tuning fork type crystal resonator element 10 will be described with reference to FIG. FIG. 5 is a cross-sectional view schematically showing a cross-sectional configuration along the line VV of the tuning-fork type crystal vibrating element shown in FIG.

  The plurality of holes 80 leak from the pair of vibrating arm portions 60 and attenuate the leakage vibration W propagating through the pair of support arm portions 70 through the base portion 50. In particular, since the plurality of holes 80 have openings on the first main surface 70a side of the pair of support arm portions 70, the plurality of holes 80 attenuate the one that propagates on the first main surface 70a side in the leakage vibration W. From the viewpoint of the damping efficiency of the leakage vibration W, the depth of the plurality of holes 80 in the third direction D3 (hereinafter simply referred to as “depth”. The same applies to the depths of other grooves and holes). Larger is preferred. If the plurality of holes 80 have the same depth as the first groove 63a of the pair of vibrating arm portions 60, the plurality of holes 80 and the first groove 63a can be formed simultaneously in the same process.

Second Embodiment
Next, the configuration of the tuning-fork type crystal vibrating element 210 according to the second embodiment will be described with reference to FIG. FIG. 6 is a cross-sectional view schematically showing a configuration of a tuning fork type crystal resonator element according to the second embodiment. In the following embodiments, description of matters common to the first embodiment will be omitted, and only different points will be described. In particular, the same operation effect by the same configuration will not be mentioned sequentially. In addition, the configuration given the same reference numerals as in the first embodiment has the same configuration and function as the configuration in the first embodiment.

  The tuning fork type crystal resonator element 210 according to the second embodiment is different from the first embodiment in that the second hole 282 and the third hole 283 have openings on the second main surface 270b side of the pair of support arm portions 270. This is different from the tuning fork type crystal resonator element 10. Further, the first hole 281 and the fourth hole 284 are deeper than the first groove 263a of the pair of vibrating arm portions 260, and the second hole 282 and the third hole 283 are longer than the second groove 263b of the pair of vibrating arm portions 260. deep. The first hole 281 and the second hole 282 are partially opposed in the second direction D2. A part of each of the third hole 283 and the fourth hole 284 faces each other in the second direction D2. The second hole 282 and the third hole 283 attenuate the leakage vibration W that propagates on the second main surface 270b side.

<Third Embodiment>
Next, the configuration of a tuning fork type crystal resonator element 310 according to the third embodiment will be described with reference to FIGS. FIG. 7 is a plan view schematically showing a configuration of a tuning-fork type crystal resonator element according to the third embodiment. FIG. 8 is a cross-sectional view schematically showing a configuration of a tuning fork type crystal resonator element according to the third embodiment.

  The tuning fork type crystal resonator element 310 according to the third embodiment is different from the tuning fork type crystal resonator element 10 according to the first embodiment in that a plurality of holes 380 extend in a direction intersecting the first direction D1. doing. Specifically, the first hole 381 extends in the fifth direction D5 inclined by the angle θ2 from the first direction D1 to the second direction D2 positive side. The second hole 382 extends in the fourth direction D4 inclined by the angle θ1 from the first direction D1 toward the negative direction side of the second direction D2. The angle θ1 and the angle θ2 are smaller than 45 degrees. The first hole 381 has an opening on the first main surface 370a side of the first support arm 371, and the second hole 382 has an opening on the second main surface 370b side. The first hole 381 and the second hole 382 are formed so as to intersect when viewed from the normal direction of the first main surface 370a. The first hole 381 and the second hole 382 are separated from each other in the third direction D3 in the intersecting region. Thereby, the rigidity fall of the 1st support arm part 371 in the field where the 1st hole 381 and the 2nd hole 382 cross is controlled. In addition, when the 1st hole 381 and the 2nd hole 382 are connected in the area | region which cross | intersects, the damping efficiency of the leakage vibration W can be improved. The first hole 381 and the second hole 382 may have openings on the same main surface side, and may be arranged without intersecting in plan view.

  The third hole 383 and the fourth hole 384 are formed in the same manner. That is, the third hole 383 extends in the fifth direction D5 and has an opening on the second main surface 370b side. The fourth hole 384 extends in the fourth direction D4 and has an opening on the first main surface 370a side. The third hole 383 and the fourth hole 384 are also formed so as to intersect when viewed from the normal direction of the first main surface 370a.

<Fourth embodiment>
Next, the configuration of a tuning fork type crystal vibrating element 410 according to the fourth embodiment will be described with reference to FIG. FIG. 9 is a cross-sectional view schematically showing a configuration of a tuning-fork type crystal resonator element according to the fourth embodiment.

  The tuning fork type crystal vibration element 410 according to the fourth embodiment is a tuning fork type crystal vibration according to the first embodiment in that the plurality of holes 480 are through holes penetrating the pair of support arm portions 470 in the third direction D3. This is different from the element 10. That is, the first hole 481 and the second hole 482 have openings on both sides of the first main surface 470a and the second main surface 470b of the first support arm portion 471. The third hole 483 and the fourth hole 484 have openings on both sides of the first main surface 470a and the second main surface 470b of the second support arm portion 472. The plurality of holes 480 attenuate the leakage vibration W propagating through the pair of support arm portions 470 that propagates on both the first main surface 470a side and the second main surface 470b side.

  As described above, according to one aspect of the present invention, the base portion 50 and the plurality of vibrating arm portions 60 extending from the base portion 50 in the first direction D1 and arranged in the second direction D2 intersecting the first direction D1, Extending from the base 50 in the first direction D1, and provided in the at least one support arm 70 and at least one support arm 70 provided outside the plurality of vibrating arms 60 in the second direction D2, A tuning fork type crystal vibrating element 10 is provided that includes at least one hole 80 extending along a first direction D1.

  According to the said aspect, the hole formed in the support arm part can attenuate the leak vibration which leaks from a vibration arm part and propagates through a support arm part. Moreover, since the hole is formed along the extending direction of the support arm portion, it is possible to suppress a decrease in rigidity of the support arm portion due to the hole.

  The at least one hole 80 may be a groove having a bottom surface, in other words, a recess. According to this, the rigidity fall of the support arm part resulting from the hole can be suppressed.

  The at least one hole 480 may be a through hole. According to this, the hole can attenuate the leakage vibration W propagating through the support arm portion more efficiently.

  A fixing portion 76 a provided on the at least one support arm portion 70 is further provided, and the fixing portion 76 a may be further away from the base portion 50 than the at least one hole 80. According to this, when the tuning fork type quartz vibrating element is displaced with respect to the cage due to a drop impact or the like, stress is concentrated in the hole of the support arm part, but the hole is formed along the extending direction of the support arm part. Therefore, damage to the support arm portion due to the hole can be suppressed. Further, since the attitude of the tuning fork type quartz vibrating element when mounted on the base member can be stabilized, interference with the base member or the lid member of the tuning fork type quartz vibrating element is reduced, and deterioration of the vibration characteristics is suppressed. be able to.

  The at least one hole 380 may extend in directions D4 and D5 intersecting the first direction D1 at angles θ1 and θ2 smaller than 45 degrees. According to this, the hole can attenuate the leakage vibration W propagating through the support arm portion more efficiently.

  The at least one hole 80 may extend in a direction parallel to the first direction D1. According to this, the rigidity fall of the support arm part resulting from the hole can be suppressed.

  The at least one hole 80 may have a plurality of holes 81 and 82 arranged in the second direction D2 in one of the at least one support arm portion 70. According to this, the hole can attenuate the leakage vibration W propagating through the support arm portion more efficiently.

  The at least one hole 280 includes a first hole 281 having an opening in one main surface 270a of the at least one support arm 270 in one of the at least one support arm 270, and the other main surface 270b. And a second hole 282 having an opening. According to this, the hole can attenuate the leakage vibration W propagating through the support arm portion more efficiently.

  According to another aspect of the present invention, the base member 30, the lid member 20 that forms the internal space 26 between the base member 30, the tuning-fork type crystal resonator element 10 accommodated in the internal space 26, and the tuning fork And a conductive holding member 36a for holding the quartz crystal resonator element 10 on the base member 30 in an excitable manner. The tuning fork crystal resonator element 10 extends in the first direction D1 from the base portion 50 and in the first direction. A plurality of vibrating arm portions 60 arranged in the second direction D2 intersecting with D1, and at least one extending from the base portion 50 in the first direction D1 and provided outside the plurality of vibrating arm portions 60 in the second direction D2. Two support arms 70, at least one hole 80 provided in at least one support arm 70 and extending in the first direction D1, and at least one so as to be farther from the base 50 than at least one hole 80. Two branches Provided in the arm portion 70, the tuning fork type quartz resonator 1 and a fixing portion 76a fixed to the base member 30 via the conductive holding member 36a, it is provided.

  According to the said aspect, the hole formed in the support arm part can attenuate the leak vibration which leaks from a vibration arm part and propagates through a support arm part. That is, vibration leakage to the base member can be suppressed. Moreover, since the hole is formed along the extending direction of the support arm portion, it is possible to suppress a decrease in rigidity of the support arm portion due to the hole. That is, it is possible to suppress damage to the support arm due to the stress applied to the support arm being concentrated in the hole.

  As described above, according to one aspect of the present invention, it is possible to provide a tuning-fork type crystal resonator element capable of improving vibration characteristics and suppressing reduction in reliability.

  The embodiments described above are for facilitating the understanding of the present invention, and are not intended to limit the present invention. The present invention can be changed / improved without departing from the spirit thereof, and the present invention includes equivalents thereof. In other words, those obtained by appropriately modifying the design of each embodiment by those skilled in the art are also included in the scope of the present invention as long as they include the features of the present invention. For example, each element included in each embodiment and its arrangement, material, condition, shape, size, and the like are not limited to those illustrated, and can be changed as appropriate. In addition, each element included in each embodiment can be combined as much as technically possible, and combinations thereof are included in the scope of the present invention as long as they include the features of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Tuning fork type crystal resonator 10 ... Tuning fork type crystal vibration element 11 ... Crystal piece 30 ... Base member 40 ... Joining member 50 ... Base 60 ... A pair of vibration arm part 61 ... 1st vibration arm part 62 ... 2nd vibration arm part 70: a pair of support arm portions 71: a first support arm portion 72 ... a second support arm portion 76a ... a fixed portion 80 ... a plurality of holes 81 ... a first hole 82 ... a second hole 83 ... a third hole 84 ... a fourth hole W ... Leak vibration

Claims (9)

The base,
A plurality of vibrating arm portions extending in a first direction from the base and arranged in a second direction intersecting the first direction;
At least one support arm portion extending from the base portion in the first direction and provided outside the plurality of vibrating arm portions in the second direction;
A tuning-fork type crystal vibrating element comprising: at least one hole provided in the at least one support arm portion and extending along the first direction. The at least one hole is a groove having a bottom;
The tuning-fork type crystal vibrating element according to claim 1. The at least one hole is a through hole;
The tuning-fork type crystal vibrating element according to claim 1. A fixing portion provided on the at least one supporting arm portion;
The fixing portion is further away from the base than the at least one hole;
The tuning-fork type crystal vibrating element according to any one of claims 1 to 3. The at least one hole extends in a direction intersecting the first direction at an angle of less than 45 degrees;
The tuning-fork type crystal vibrating element according to any one of claims 1 to 4. The at least one hole extends in a direction parallel to the first direction;
The tuning-fork type crystal vibrating element according to any one of claims 1 to 4. The at least one hole has a plurality of holes arranged in the second direction in one of the at least one support arm portion;
The tuning fork type crystal vibrating element according to any one of claims 1 to 6. The at least one hole includes a first hole having an opening on one main surface of the at least one support arm and an opening on the other main surface in one of the at least one support arm. A second hole having
The tuning-fork type crystal vibrating element according to any one of claims 1 to 7. A base member;
A lid member that forms an internal space with the base member;
A tuning fork-type crystal resonator element housed in the internal space;
A conductive holding member that holds the tuning fork type crystal resonator element in an excitable manner on the base member;
The tuning fork type crystal vibrating element is
The base,
A plurality of vibrating arm portions extending in a first direction from the base and arranged in a second direction intersecting the first direction;
At least one support arm portion extending from the base portion in the first direction and provided outside the plurality of vibrating arm portions in the second direction;
At least one hole provided in the at least one support arm and extending along the first direction;
A tuning fork type crystal resonator comprising: a fixing portion that is provided on the at least one supporting arm portion so as to be farther from the base portion than the at least one hole, and is fixed to the base member via the conductive holding member. .