JP2018191840A - Ultraviolet irradiation device - Google Patents

Abstract

To provide an ultraviolet irradiation device having a high efficiency of ultraviolet irradiation and a large bactericidal effect on microbes in a fluid.SOLUTION: An ultraviolet irradiation device 1 includes a flow regulation chamber 5 for regulating a fluid flow in a flow channel 3. The flow regulation chamber 5 has an inflow port 14 and an outflow port 15. A part of a fluid entering from the inflow port 14 is rotated and turned back to the inflow port 14 side. The ultraviolet irradiation device 1 irradiates the fluid in the flow regulation chamber 5 with ultraviolet rays to sterilize the fluid.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an ultraviolet irradiation device that sterilizes bacteria and viruses in a fluid with ultraviolet rays.

  Conventionally, there has been known an ultraviolet irradiation device that irradiates a fluid with ultraviolet rays and sterilizes microorganisms (bacteria, viruses, etc.) in the fluid with ultraviolet rays (see Patent Documents 1 and 2).

  In such an ultraviolet irradiation device, there is an apparatus that causes a fluid to flow in a pipe formed of an ultraviolet transparent resin material, irradiates the fluid in the pipe with ultraviolet rays from an ultraviolet LED, and sterilizes microorganisms in the fluid. is there. And such an ultraviolet irradiation device makes the pipe meander by curving a plurality of places of the pipeline through which the fluid flows, so that the fluid flowing in the pipeline tends to generate turbulent flow. The efficiency of irradiating the fluid flowing through the ultraviolet rays with ultraviolet light is improved (see Patent Document 3).

JP-A 63-302940 JP 2004-50003 A Japanese Patent Laid-Open No. 2006-87071

  However, the ultraviolet irradiation device described in Patent Document 3 has a constant pipe diameter, and the fluid flows at a constant flow rate from the inlet to the outlet of the pipe, so that the ultraviolet irradiation efficiency cannot be sufficiently improved. .

  Therefore, an object of the present invention is to provide an ultraviolet irradiation device that has high ultraviolet irradiation efficiency and a large sterilizing effect on microorganisms in a fluid.

  The present invention relates to ultraviolet irradiation apparatuses 1 and 21 that irradiate a fluid in a flow path 3 with ultraviolet rays and sterilize the fluid with ultraviolet rays. In the present invention, a flow adjusting chamber 5 for adjusting the flow of fluid is formed in the middle of the flow path 3. The flow adjusting chamber 5 has a fluid inlet 14 and a fluid outlet 15, and a part of the fluid flowing in from the fluid inlet 14 is swirled to return to the fluid inlet 14 side. The fluid in the flow control chamber 5 is irradiated with ultraviolet rays.

  In the ultraviolet irradiation apparatus according to the present invention, since a part of the fluid flowing through the flow path temporarily stays in a swirling flow in the flow adjustment chamber and spreads, the amount of ultraviolet irradiation to the fluid per unit time is large. Thus, the ultraviolet irradiation efficiency is increased, and the sterilizing effect on the microorganisms in the fluid is increased.

It is a figure which shows the ultraviolet irradiation device which concerns on 1st Embodiment of this invention, FIG.1 (a) is a side view of a ultraviolet irradiation device, FIG.1 (b) is a top view of the to-be-irradiated body which comprises a ultraviolet irradiation device, 1C is a cross-sectional view showing the flow path of the irradiated object (a cross-sectional view cut along the line A1-A1 in FIG. 1A), and FIG. 1D is a cross-sectional view of FIG. It is sectional drawing of the to-be-irradiated body shown cut | disconnected along A2-A2 line. It is a figure which shows the 1st modification of the to-be-irradiated body which comprises the ultraviolet irradiation device which concerns on 1st Embodiment of this invention, and is sectional drawing (FIG.1 (b)) which shows the flow path and flow control chamber of to-be-irradiated body Corresponding figure). It is a figure which shows the 2nd modification of the to-be-irradiated body which comprises the ultraviolet irradiation device which concerns on 1st Embodiment of this invention, Fig.3 (a) is a top view of to-be-irradiated body, FIG.3 (b) is irradiated It is sectional drawing (sectional drawing cut | disconnected and shown along the A3-A3 line | wire of FIG.3 (c)) which shows the flow path of a body. It is an external appearance perspective view which shows the ultraviolet irradiation device which concerns on 2nd Embodiment of this invention seeing from right diagonally upward. It is a top view of the ultraviolet irradiation device concerning a 2nd embodiment of the present invention. It is a front view of the ultraviolet irradiation device concerning a 2nd embodiment of the present invention. It is a figure which shows the to-be-irradiated body which comprises the ultraviolet irradiation device which concerns on 2nd Embodiment of this invention, FIG.7 (a) is a front view of an to-be-irradiated body, FIG.7 (b) is a side view of an to-be-irradiated body, FIG.7 (c) is sectional drawing of the to-be-irradiated body shown cut | disconnected along the A4-A4 line | wire of Fig.7 (a). It is a figure for demonstrating the shaping | molding method of the flow-path block of the to-be-irradiated body shown in FIG.7 (c). It is a figure which shows the division | segmentation panel which comprises a flow path block, Fig.9 (a) is a top view of a division | segmentation panel, FIG.9 (b) is a side view of a division | segmentation panel, FIG.9 (c) is FIG.9 (a). FIG. 9 is a cross-sectional view (a diagram corresponding to FIG. 8B) of the divided panel shown cut along the line A5-A5, and FIG. 9D is a rear view of the divided panel. It is a figure which shows an ultraviolet-ray output part, Fig.10 (a) is a top view of an ultraviolet-ray output part, FIG.10 (b) is a side view of an ultraviolet-ray output part, FIG.10 (c) is A6-A6 of Fig.10 (a). It is sectional drawing of the ultraviolet-ray output part cut | disconnected and shown along a line. It is a use condition figure of the ultraviolet irradiation device concerning a 2nd embodiment of the present invention. It is an external appearance perspective view which shows the modification of the ultraviolet irradiation device which concerns on 2nd Embodiment of this invention. It is a figure which shows the modification of the ultraviolet irradiation device which concerns on 2nd Embodiment of this invention, Fig.13 (a) is a top view of a ultraviolet irradiation device, FIG.13 (b) is a front view of a ultraviolet irradiation device, FIG. c) is a back view of the ultraviolet irradiation device.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[First Embodiment]
FIG. 1 is a diagram showing an ultraviolet irradiation apparatus 1 according to the first embodiment of the present invention. 1A is a side view of the ultraviolet irradiation apparatus 1, FIG. 1B is a plan view of an irradiated body 2 constituting the ultraviolet irradiation apparatus 1, and FIG. 1C is an irradiated body. 2 is a cross-sectional view (a cross-sectional view taken along the line A1-A1 in FIG. 1A) showing the flow path 3 of FIG. 1, and FIG. 1D is a line A2-A2 in FIG. It is sectional drawing of the to-be-irradiated body 2 cut | disconnected and shown along.

  As shown in FIG. 1, the ultraviolet irradiation device 1 includes an irradiated body 2 in which a flow path 3 is formed, and an ultraviolet emitting section 4 disposed so as to face the irradiated body 2. ing. The irradiated object 2 is manufactured by a 3D printer or by injection molding.

  The irradiated body 2 is formed of a resin that transmits ultraviolet rays (ultraviolet transparent resin such as fluororesin), and a flow adjusting chamber 5 is formed in the middle of the flow path 3. The flow control chamber 5 has a circular shape in plan view, and is a crossing point 10, 10 between a center line 7 passing through the center 6 and extending in the Y direction and a wall surface 8 forming a circular contour. An upstream flow path 11 is connected to one side, and a downstream flow is formed at the other side of the intersections 10 and 10 between the center line 7 passing through the center 6 and extending in the Y direction and the wall surface 8 forming a circular outline. The path 12 is connected. The upstream channel 11 and the downstream channel 12 both have a rectangular channel cross-sectional shape, and are formed so as to be symmetrical twice with respect to the center 6 of the flow adjusting chamber 5. In addition, the upstream flow path 11 and the downstream flow path 12 have flow guide flow path portions 13 and 13 that change the cross-sectional area of the flow path so that the shape in plan view is a substantially triangular shape. , 13 are connected to the flow control chamber 5. The connecting portion between the flow guide channel portion 13 of the upstream channel 11 and the flow adjusting chamber 5 is connected to the fluid inlet 14 through which the fluid (gas or liquid) of the upstream channel 11 flows into the flow adjusting chamber 5. It has become. In addition, the connection portion between the flow guide channel portion 13 and the flow adjustment chamber 5 of the downstream channel 12 is a fluid outlet 15 through which the fluid in the flow adjustment chamber 5 flows out to the downstream channel 12. The fluid inlet 14 and the fluid outlet 15 are positioned so as to be symmetrical twice with respect to the center 6 of the flow adjusting chamber 5. In addition, as shown in FIG.1 (c), the diameter of the flow control chamber 5 is several times the width dimension w of the upstream flow path 11. As shown in FIG.

  The upstream flow path 11 and the downstream flow path 12 are an inner flow path side wall 13 a located closer to the inner side in the radial direction of the flow adjustment chamber 5 and an outer flow path side wall located closer to the outer side in the radial direction of the flow control chamber 5. 13b. The outer flow path side wall 13 b of the upstream flow path 11 is connected to one of the intersections 10, 10 between the wall surface 8 of the flow adjusting chamber 5 and the center line 7. Further, the outer flow path wall surface 13 b of the downstream flow path 12 is connected to the other of the intersections 10, 10 between the wall surface 8 of the flow adjusting chamber 5 and the center line 7. The inner flow passage wall surface 13a of the flow guide flow passage portion 13 of the upstream flow passage 11 is inclined in the vicinity of the flow adjustment chamber 5 so as to approach the outer flow passage wall surface 13b as it approaches the flow adjustment chamber 5. The area is gradually reduced. Further, the inner channel wall surface 13a of the flow guide channel part 13 of the downstream channel 12 is inclined in the vicinity of the flow control chamber 5 so as to be separated from the outer channel wall surface 13b as the distance from the flow control chamber 5 increases. The road cross-sectional area is gradually increased. In addition, since the to-be-irradiated body 2 can use the upstream flow path 11 as a downstream flow path and can use the downstream flow path 12 as an upstream flow path, the upstream flow path 11 and the downstream flow path can be used. 12 is abbreviated as a flow path 3 as appropriate.

  The ultraviolet ray emitting unit 4 radiates the ultraviolet rays emitted from the ultraviolet LED 16 toward the flow adjusting chamber 5 and the flow adjusting chamber 5. In addition, the ultraviolet rays are applied to at least the entire flow control chamber 5, preferably the entire flow path 3 and the entire flow control chamber 5.

  The ultraviolet irradiation device 1 configured as described above is inclined so that the upstream channel 11 near the fluid inlet 14 approaches the outer channel wall 13b as the inner channel wall 13a approaches the flow regulation chamber 5. Therefore, the fluid in the upstream flow path 11 flows from the fluid inlet 14 along the wall surface 8 of the flow adjusting chamber 5. As a result, the fluid that has flowed into the flow adjustment chamber 5 from the upstream flow path 11 tends to generate a swirling flow along the wall surface 8 in the flow adjustment chamber 5, and flows out from the fluid outlet 15 to the downstream flow path 12. A flow and a flow that recirculates to the fluid inlet 14 side while swirling and expands in the flow adjusting chamber 5 are generated.

  In such an ultraviolet irradiation device 1 according to the present embodiment, a part of the fluid flowing through the flow path 3 temporarily stays in a state of being swirled in the flow adjusting chamber 5 and spreads. The amount of irradiation per unit time increases, the ultraviolet irradiation efficiency increases, and the bactericidal effect on microorganisms in the fluid increases.

  In the present embodiment, the flow adjustment chamber 5 has a circular shape in plan view, but is not limited thereto, and the shape in plan view may be elliptical. Further, in the present embodiment, the shape of the flow control chamber 5 in plan view is a polygon (hexagon, octagon, dodecagon, etc.) inscribed in a circle or an ellipse, and the fluid flowing in from the fluid inlet is swirled. Polygons that can be used shall be included in a circular or elliptical shape.

(First modification of the first embodiment)
FIG. 2 is a plan view showing the irradiated object 2 according to the first modified example of the present embodiment, broken away so that the flow path 3 and the flow adjusting chamber 5 are exposed. As shown in FIG. 2, the irradiated body 2 according to this modification has a plurality of flow adjustment chambers 5 arranged in series in the flow path 3. And this irradiated body 2 can sterilize the fluid in all the flow control chambers 5 with an ultraviolet-ray by irradiating all the flow control chambers 5 with an ultraviolet-ray. In the ultraviolet irradiation apparatus 1 using the irradiated object 2 according to this modification, the amount of ultraviolet irradiation to the fluid flowing through the flow path 3 is increased, and the sterilizing effect on the microorganisms in the fluid is further increased.

(Second modification of the first embodiment)
FIG. 3 is a diagram illustrating an irradiated object 2 according to a second modification of the present embodiment. 3A is a plan view of the irradiated object 2, and FIG. 3B is a plan view showing the irradiated object 2 in a broken view so that the flow path 3 and the flow adjusting chamber 5 are exposed (FIG. 3). 3C is a cross-sectional view taken along the line A3-A3 in FIG. 3C, and FIG. 3C is a side view of the irradiation object 2. FIG.

  As shown in FIG. 3, the irradiated body 2 according to this modification has a plurality of flow control chambers 5 arranged in series in a flow path 3 formed to meander. In this irradiation object 2, the flow path 3 and the flow adjustment chamber 5 are closely arranged, so that the fluid outlet 15 of one adjacent flow adjustment chamber 5 and the fluid inlet 14 of the other adjacent flow adjustment chamber 5 Are formed to face each other. The irradiated body 2 is irradiated with ultraviolet rays as a whole, and the fluid in the flow path 3 and the plurality of flow control chambers 5 is sterilized with ultraviolet rays. The ultraviolet irradiation apparatus 1 using the irradiated object 2 according to the present modified example is formed to meander the flow path 3, thereby comparing the entire irradiated object 2 according to the first modified example. Without increasing the size, the flow path 3 can be lengthened and a large number of the flow adjusting chambers 5 can be arranged densely, so that the amount of ultraviolet irradiation to the fluid in the flow path 3 and the flow adjusting chamber 5 increases, The sterilizing effect on microorganisms is further increased.

[Second Embodiment]
4 to 6 are views showing an ultraviolet irradiation device 21 according to the second embodiment of the present invention. FIG. 4 is an external perspective view showing the ultraviolet irradiation device 21 according to the present embodiment as viewed obliquely from the upper right. FIG. 5 is a plan view of the ultraviolet irradiation device 21 according to the present embodiment. FIG. 6 is a front view of the ultraviolet irradiation device 21 according to the present embodiment.

(Overall structure of UV irradiation device)
As shown in these drawings, the ultraviolet irradiation device 21 according to the present embodiment includes an irradiated object assembly 23 in which a plurality of irradiated objects 22 are assembled, and both side surfaces 24 and 24 of the irradiated object assembly 23. It arrange | positions so that it may oppose one of them, and it arrange | positions so that the other of the both-side surfaces 24 and 24 of the ultraviolet-ray emission part 25 which irradiates the to-be-irradiated body assembly 23 with an ultraviolet-ray and 23 UV reflector 26.

(Irradiated object assembly)
As shown in FIGS. 4 to 7, the irradiated object assembly 23 is obtained by stacking and integrating (for example, bonding) a plurality of plate-shaped irradiated objects 22, and adjacent irradiated objects 22 and 22. The flow paths 3 are assembled so as to be connected. The irradiated body 22 includes a plurality of flow paths 3 (flow guide flow path portions 13) and flow control chambers 5 formed in a matrix, and each flow path 3 is formed to open on the front and back of the irradiated body 22. ing.

  FIG. 8 thru | or FIG. 9 is a figure for demonstrating the to-be-irradiated body 22 manufactured with the injection molding method. As shown in these drawings, the irradiated body 22 is divided into a first irradiated body block 22a and a second irradiated body block 22b in the plate thickness direction in consideration of mold release at the time of injection molding. One of the pair of flow guide channel portions 13 and 13 and half of the flow adjusting chamber 5 are formed in the first irradiated block 22a, and the pair of flow guide channel portions 13 and 13 in the second irradiated block 22b. The other of them and the half of the flow control chamber 5 are formed. And as for the 1st to-be-irradiated body block 22a, the flow guide flow-path part 13 is opened to the surface 27a side, and the flow control chamber 5 divided | segmented into half is opened to the back surface 27b side. Further, in the second irradiated object block 22b, the flow guide channel portion 13 is opened on the front surface 27a side, and the flow adjusting chamber 5 divided in half is opened on the back surface 27b side. When the second irradiated object block 22b shown in FIG. 8 (c) is rotated by 180 ° around the virtual axis orthogonal to the paper surface, the irradiated object 22 becomes the first irradiated object shown in FIG. 8 (b). The block 22a and the second irradiated object block 22b are overlapped (so as to have the same shape). Therefore, the ultraviolet irradiation device 21 according to the present embodiment has a mold for injection molding the first irradiated body block 22a or the second irradiated body block 22b when the irradiated body 22 is injection molded. Only the kind needs to be prepared, and the mold cost can be saved. Further, as shown in FIGS. 9A and 9D, the first irradiated body block 22a has a total of 32 flow guide channel portions 13 and four rows of flow control chambers 5 divided in half. Although the aspect formed in the matrix form of 8 columns is illustrated, it is not limited to this illustrated aspect, According to the size etc. of the to-be-irradiated body 22, you may change the number of rows and the number of columns suitably.

  The first irradiated body block 22a formed in this way has the back surface 27b side bonded to the back surface 27b side of the second irradiated body block 22b (for example, bonded and fixed), whereby the second irradiated body block The irradiated body 22 is configured together with 22b. The first irradiated body block 22a and the second irradiated body block 22b have the side on which the flow guide channel portion 13 is opened as the surface 27a side, and the side on which the flow control chamber 5 divided in half is opened as the back side. 27b side.

  The irradiated object assembly 23 is formed by stacking eight irradiated objects 22. When the irradiated object 22 located on the rightmost side in FIG. 7C is formed by overlapping the first irradiated body 22 to the eighth irradiated body 22 from the right side to the left side in FIG. In the irradiated body assembly 23, the second irradiated body 22 is obtained by inverting the first irradiated body 22 upside down, and the third irradiated body 22 moves the second irradiated body 22 upside down. Inverted, the irradiated object 22 is sequentially stacked up to the eighth irradiated object 22 while being reversed. In the irradiated object assembly 23, the first to eighth irradiated bodies 22 are fixed by adhesion, or the first to eighth irradiated bodies 22 are fixed so as to be disassembled by bolts or clips. The

  As described above, the irradiated object assembly 23 is sequentially stacked from the first irradiated object 22 to the eighth irradiated object 22, whereby the flow guide flow on the fluid outflow side of the adjacent irradiated objects 22 and 22. The passage 13 and the flow guide channel 13 on the fluid inflow side are connected, and a total of eight channels 3 are arranged in parallel. In the present embodiment, for convenience of explanation, the irradiated object assembly 23 has the right side in FIG. 7C as the fluid inflow side (IN side) and the left side in FIG. 7C as the fluid. Outflow side (OUT side).

(UV reflector)
The ultraviolet reflector 26 is formed by forming a coating of a metal oxide (titanium oxide, zinc oxide, etc.) that reflects ultraviolet rays on the surface of a plastic plate or a metal plate. Among them, the ultraviolet light transmitted through the irradiated object 22 is reflected toward the irradiated object 22. Compared with the case where the ultraviolet reflector 26 is not disposed, the ultraviolet irradiation device 21 provided with such an ultraviolet reflector 26 increases the ultraviolet irradiation efficiency to the irradiated object 22 (the flow path 3 and the flow adjusting chamber 5). The sterilizing effect of the fluid in the flow path 3 and the flow adjusting chamber 5 of the irradiated body 22 can be improved.

(Ultraviolet emission part)
As shown in FIG. 4 to FIG. 6 and FIG. 10, the ultraviolet emitting unit 25 has a plurality of ultraviolet LEDs 16 attached to the substrate 30 in the box 28, and the ultraviolet rays emitted from these ultraviolet LEDs 16 pass through the diffusion plate 31. At this time, the irradiated object assembly 23 is uniformly diffused and irradiated. Such an ultraviolet emitting unit 25 can uniformly irradiate the respective flow paths 3 and the flow control chambers 5 of the irradiated object assembly 23 with the ultraviolet rays, and the fluids in the plurality of flow paths 3 and the flow control chambers 5. The sterilizing effect on the varieties is less likely to vary.

(Usage example of UV irradiation device)
FIG. 11 is a diagram illustrating a usage example of the ultraviolet irradiation device 21 according to the present embodiment. As shown in FIG. 11, the ultraviolet irradiation device 21 according to the present embodiment has an upstream flow path joint 32 connected to the fluid inflow side (IN side in FIG. 7C) of the irradiated object assembly 23, This upstream-side channel joint 32 connects the fluid supply channel 33 and each channel 3 on the fluid inflow side (IN side) of the irradiated object assembly 23. In the fluid supply path 33, fluid supply means 34 (fan, pump, etc.) that pressurizes the fluid and sends it to the upstream side flow path joint 32 is disposed. Further, in the ultraviolet irradiation device 21 according to the present embodiment, a downstream channel joint 35 is connected to the fluid outflow side (OUT side in FIG. 7C) of the irradiated assembly 23, and this downstream channel joint. 35 connects each flow path 3 on the fluid outflow side (OUT side) of the irradiated object assembly 23 and the fluid discharge path.

(Effect of this embodiment)
In such an ultraviolet irradiation device 21 according to the present embodiment, a part of the fluid flowing through the flow path 3 flows into the adjustment chamber 5 as a swirling flow, similarly to the ultraviolet irradiation device 1 according to the first embodiment. Since the liquid stays temporarily in an expanded state, the amount of UV irradiation to the fluid per unit time increases, the UV irradiation efficiency increases, and the bactericidal effect on microorganisms in the fluid increases.

  Further, the ultraviolet irradiation device 21 according to the present embodiment has a plurality of flow paths 3 formed in parallel in the irradiated object assembly 23 and a plurality of flow adjustment chambers 5 formed in each flow path 3. The fluid can be sterilized efficiently.

  In addition, although the ultraviolet irradiation device 21 which concerns on this embodiment illustrated the aspect which forms the to-be-irradiated-body assembly 23 by superimposing two or more injection-molded to-be-irradiated bodies 22, it is not limited to this, It is not limited to this, The entire solid 23 may be formed by a 3D printer.

  Further, in the ultraviolet irradiation device 21 according to the present embodiment, when the fluid is a liquid, the fluid supply means 34 is omitted, the fluid supply path 33 is disposed above the irradiated body assembly 23, and the fluid is operated by gravity. It may be allowed to flow into each flow path 3 of the irradiated object assembly 23 alone.

(Modification of the second embodiment)
FIG.12 and FIG.13 is a figure which shows the ultraviolet irradiation device 21 which concerns on the modification of 2nd Embodiment of this invention. FIG. 12 is an external perspective view of the ultraviolet irradiation device 21 according to this modification. FIG. 13A is a plan view of the ultraviolet irradiation device 21 according to this modification, FIG. 13B is a front view of the ultraviolet irradiation device 21 according to this modification, and FIG. It is a reverse view of the ultraviolet irradiation device 21 which concerns on this modification.

  As shown in these drawings, the ultraviolet irradiation device 21 according to this modification example has an ultraviolet emitting unit 25 arranged on the bottom surface 37 side of the irradiated object assembly 23, and both side surfaces 24, 24 of the irradiated object assembly 23 and The upper surface 38 is configured to be covered with the ultraviolet reflector 26. The ultraviolet irradiation device 21 according to this modification can obtain the same effects as the ultraviolet irradiation device 21 according to the second embodiment.

  1, 21 ... UV irradiation device, 3 ... flow path, 5 ... flow control chamber, 14 ... fluid inlet, 15 ... fluid outlet

Claims (5)

In the ultraviolet irradiation device that irradiates the fluid in the flow path with ultraviolet rays and sterilizes the fluid with ultraviolet rays,
In the middle of the flow path, a flow adjusting chamber for adjusting the flow of the fluid is formed,
The flow adjustment chamber has a fluid inlet and a fluid outlet, and is configured to recirculate a part of the fluid that has flowed in from the fluid inlet and return to the fluid inlet side.
UV light is applied to the fluid in the flow control chamber,
An ultraviolet irradiation device characterized by that. The flow adjusting chamber has a wall surface whose shape in plan view forms a circular or elliptical outline, and the fluid flows from the fluid inlet along the wall surface.
The ultraviolet irradiation device according to claim 1. The fluid inlet and the fluid outlet are in a two-fold symmetrical position with respect to the center of the flow adjustment chamber when the flow adjustment chamber is viewed in plan view.
The ultraviolet irradiation device according to claim 3. A plurality of the flow control chambers are arranged in series along the flow path,
The ultraviolet irradiation device according to any one of claims 1 to 3, wherein The flow path formed by arranging a plurality of the flow control chambers in series is arranged in parallel.
The ultraviolet irradiation device according to claim 4.

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