JP2018187750A - Method for producing polishing liquid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce workload on an operator while securing safety in producing polishing liquid.SOLUTION: A method for producing polishing liquid that is used for a polishing device 1 includes: a step of supplying a solvent with a predetermined weight to an agitation vessel 32; a step of loading the predetermined number of tablet-type chemicals 39 in which a chemical is solidified for each predetermined weight into the solvent; and a step of agitating the tablet-type chemicals 39 and the solvent in the agitation vessel 32 to produce polishing liquid, where concentration of the polishing liquid is adjusted by the number of the tablet-type chemicals 39 to be loaded relative to the solvent.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a method for producing a polishing liquid used for polishing.

  In the manufacturing process of a semiconductor wafer, an ingot is sliced and a plate-like object is taken out. After both surfaces of the plate-like object are flattened by a grinding machine or a lapping device, the integrated circuit is further mirror-polished by a polishing device. It is in a surface state that can be formed. Also, in the process of forming an integrated circuit on the surface of the plate-like material, polishing processing is performed by a polishing apparatus in the flattening of the interlayer insulating film, the formation of the metal plug, the formation of the embedded metal wiring, etc. during the formation of the multilayer wiring. Yes. As described above, the polishing apparatus is an important apparatus indispensable in the processing of semiconductor wafers.

  In CMP (Chemical Mechanical Polishing) polishing, a plate-like material is polished while supplying a polishing liquid to the polishing pad and the plate-like material. A tank containing a polishing liquid is attached to the polishing apparatus, and the polishing liquid is pumped up from the tank by a pump, and the polishing liquid is supplied to the plate-like object and the polishing pad. The tank stores a polishing solution having a concentration suitable for polishing, but the tank replacement work and the transportation work are burdened by the worker and a relatively large storage space is required. Therefore, a method has been proposed in which a concentrated liquid (stock solution) of a polishing liquid is prepared and the concentrated liquid is diluted (see, for example, Patent Document 1).

Japanese Patent Laying-Open No. 2006-015469

  In the method described in Patent Document 1, since the concentrate is diluted, the replacement frequency of the tank can be reduced, but the replacement work is difficult because the weight of the tank itself does not change. Although it can be replaced easily by making the tank smaller and lighter, the replacement frequency of the tank increases. Further, the concentrated liquid of the polishing liquid is alkaline or acidic, and care must be taken in handling the concentrated liquid.

  This invention is made | formed in view of this point, and makes it one of the objectives to provide the manufacturing method of the polishing liquid which can reduce work burden, ensuring safety | security.

  A method for producing a polishing liquid according to one embodiment of the present invention is a method for producing a polishing liquid used in a CMP polishing apparatus, comprising: a tablet-type drug in which a predetermined weight of the drug is solid; and a solvent that dissolves the tablet-type drug. A solvent supply step of supplying a predetermined weight of solvent to the stirring tank; a drug charging step of charging a predetermined amount of the tablet-type drug to the solvent supplied to the stirring tank; and the tablet mold in the stirring tank A stirring step of stirring the drug and the solvent, and adjusting the polishing liquid concentration according to the amount of the tablet-type drug charged into the solvent.

  According to this configuration, since the solid tablet-type drug is charged into the solvent during the production of the polishing liquid, it is easier and safer to transport than when a liquid drug is used, and the tank for the polishing liquid is replaced. Can reduce the work burden. In addition, since the tablet type medicine can be managed by the number instead of being managed by the amount and weight as in the case of liquid or powder, the management burden can be reduced.

  ADVANTAGE OF THE INVENTION According to this invention, it can convey easily and safely by solidifying a chemical | medical agent and making it a tablet-type chemical | medical agent, and can reduce a management burden by managing a tablet-type chemical | medical agent by number.

It is a mimetic diagram of the polish device of this embodiment. It is a perspective view of the tablet-type medicine of this embodiment. It is a schematic diagram of the chemical | medical agent supply mechanism of this Embodiment. It is a figure which shows an example of the manufacturing method of the polishing liquid of this Embodiment.

  Hereinafter, the polishing apparatus of the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a schematic diagram of a polishing apparatus according to the present embodiment. The polishing apparatus is not limited to the configuration shown in FIG. 1 as long as it has a structure capable of supplying a polishing liquid to a plate-like object as in the present embodiment. In FIG. 1, for the convenience of explanation, a polishing liquid production apparatus using an extrusion-type chemical supply mechanism is illustrated.

  As shown in FIG. 1, the polishing apparatus 1 presses the polishing pad 22 against the plate-like object W on the chuck table 10 and relatively rotates the chuck table 10 and the polishing pad 22 while supplying a polishing liquid (slurry). It is configured as follows. In such CMP (Chemical Mechanical Polishing) polishing, the plate-like object W is etched by the chemical component of the polishing liquid, and the plate-like object W is mechanically polished by the abrasive grains dispersed on the polishing pad 22. As a result, the polishing rate of the plate-like object W can be improved, and it is possible to obtain a mirror surface by reducing fine scratches on the surface of the plate-like object W remaining after polishing.

  The chuck table 10 has a holding surface 11 formed of a porous material, and sucks and holds the plate-like object W by a negative pressure generated on the holding surface 11. A motor 12 is connected to the lower part of the chuck table 10, and the chuck table 10 is rotationally driven by driving the motor. A spindle 20 is positioned above the chuck table 10, and a polishing pad 22 is attached to a mount 21 of the spindle 20. A motor 23 and an elevating mechanism 24 are connected to the spindle 20. The polishing pad 22 is rotated by driving the motor, and the polishing pad 22 is separated from and connected to the plate-like object W by the elevating mechanism 24.

  The polishing pad 22 is obtained by dispersing abrasive grains on a pad surface such as urethane, and the abrasive grains are silica, alumina, zirconia, manganese dioxide, ceria, cidal silica, fumed silica, boehmite, bayerite, diamond. Etc. are used. The polishing pad 22 is manufactured by mixing abrasive grains in a predetermined ratio with a urethane material or the like, and the abrasive grains are fixed to the entire polishing surface of the polishing pad 22. In this embodiment, instead of using the polishing liquid in which the abrasive grains are mixed, only the polishing liquid is supplied using the polishing pad 22 to which the abrasive grains are fixed.

  By the way, the polishing liquid generally used in the polishing apparatus is transported and managed in a liquid state. When the polishing liquid is transported to the factory, the transport cost increases depending on the load weight and the tank load space. For this reason, it is considered to reduce the transport cost by diluting and using the polishing liquid concentrate (stock solution), but if the polishing liquid concentration is not managed by volume (volume) or weight Don't be. In addition to the work burden of tank replacement work, there is an industrial accident risk due to chemical handling.

  Therefore, in this embodiment, paying attention to the work burden, safety, and difficulty of management when handling the polishing liquid, a tablet-type drug in which the main component (etching component) of the polishing liquid is solidified is put into the solvent. The polishing liquid is manufactured. Since the polishing liquid is produced by putting the tablet-type chemical into the solvent, the work for the operator can be reduced by eliminating the tank replacement work. Moreover, it becomes easy to carry by solidification of a medicine, and the number of tablet-type medicines can be managed. Furthermore, since handling becomes easy compared with a liquid chemical | medical agent, the safety | security of conveyance work etc. is improved.

  In a general polishing apparatus, a polishing liquid to which abrasive grains have been added is used for polishing, and when the polishing liquid is used to solidify the entire abrasive grains, the abrasive grains are solidified in an aggregated state. And cannot be used as a tablet-type drug. For this reason, in this embodiment, without using a polishing liquid containing abrasive grains, the abrasive grains are fixed to the polishing pad 22 as described above, and only the polishing liquid is supplied to the polishing pad 22. Yes. Since the abrasive liquid is not contained in the polishing liquid, the abrasive grains do not aggregate during the molding of the tablet-type drug, and the tablet-type drug can be generated by solidifying the main component of the polishing liquid.

  Returning to FIG. 1, a manufacturing apparatus 30 for manufacturing a polishing liquid is provided above the chuck table 10. The manufacturing apparatus 30 includes a solvent tank 31 in which a solvent (for example, pure water) is stored, a drug supply mechanism 40 that supplies the tablet-type drug 39 to the solvent, and a stirring tank 32 that mixes the tablet-type drug 39 with the solvent. Is provided. Pure water is stored as a solvent in the solvent tank 31, and the solvent is periodically supplied from the solvent tank 31 to the stirring tank 32 via the opening / closing valve 33. A plurality of tablet-type medicines 39 are stocked in the medicine supply mechanism 40, and the tablet-type medicines 39 are sequentially supplied from the medicine supply mechanism 40 to the stirring tank 32 one by one. Details of the medicine supply mechanism 40 will be described later.

  A propeller type agitator 34 is attached to the agitation tank 32, and the solvent supplied from the solvent tank 31 and the tablet-type medicine 39 supplied from the medicine supply mechanism 40 are mixed in the agitation tank 32 by the agitator 34. The At this time, the tablet-type medicine 39 is solidified at a predetermined weight corresponding to a predetermined weight of the solvent, and the tablet-type medicine 39 is dissolved in the predetermined weight of the solvent in the stirring tank 32 so that the polishing liquid having a predetermined concentration is obtained. Generated. A supply nozzle 35 is attached to the lower part of the agitation tank 32, and the polishing liquid in the agitation tank 32 is supplied little by little from the supply nozzle 35 to the upper surface of the plate-like object W on the chuck table 10 for polishing.

  In the polishing apparatus 1 configured as described above, the polishing pad 22 is pressed against the plate-like object W on the chuck table 10, and the plate-like object W and the polishing pad 22 are relatively rotated while the polishing liquid is supplied from the supply nozzle 35. As a result, CMP polishing is performed. In addition, since the polishing liquid is generated by dissolving the tablet-type chemical 39 in the solvent in the stirring tank 32, it is not necessary to store the chemical in the polishing liquid in a liquid state. The tablet-type medicine 39 is small and lightly shaped, so it is easy to carry. Furthermore, since the medicine is solidified for each predetermined weight, the concentration of the polishing liquid can be adjusted by the number of tablet-type medicines used. It has become.

  Here, with reference to FIG. 2, a tablet-type medicine will be described. FIG. 2 is a perspective view of the tablet-type medicine of the present embodiment.

  As shown in FIG. 2, the tablet-type medicine 39 is formed into a flat shape by compression molding alkaline powder as a solid medicine at room temperature, for example. When the tablet-type medicine 39 is charged into the solvent, the tablet-type medicine 39 is dissolved in the solvent. At this time, since the tablet-type medicine 39 has a flat shape, it has a large surface area and is easily dissolved in a solvent, and it is easily broken by touching water. Therefore, the tablet-type medicine 39 can be dissolved well in the solvent, and the polishing liquid can be generated in a short time. The tablet-type medicine 39 is formed into a shape that is easily solidified and easily dissolved in a solvent in consideration of productivity as well as convenience of transportation and management.

  Thus, the tablet-type medicine 39 is formed into a flat shape in which the width is given priority over the thickness. Although the strength is reduced by increasing the width (area) beyond the thickness of the tablet-type medicine 39, the strength is at least strong enough not to collapse during transportation. The tablet-type medicine 39 is preferably transported in a state where it is accommodated in a dedicated cartridge so that the tablet-type medicine 39 can be protected from impact or the like during transportation.

  The tablet-type medicine 39 is not limited to the flat shape described above, and may be formed with a thickness such as a lens shape or a granule shape. In this case, a powder that generates carbon dioxide gas such as sodium hydrogen carbonate may be added to the tablet-type medicine 39. Since the carbon dioxide gas foams from the tablet-type drug 39 in the solvent, the tablet-type drug 39 collapses in the solvent and the tablet-type drug 39 is easily dissolved in the solvent. As a result, the tablet-type medicine 39 is thickened to ensure strength, while the tablet-type medicine 39 is easily broken by the foaming of carbon dioxide gas, and the ease of dissolution of the tablet-type medicine 39 in the solvent is improved. .

  Further, the tablet type medicine 39 may be coated on the outer surface with a water-soluble resin or the like. By coating the outer surface of the tablet-type drug 39, the strength of the tablet-type drug 39 can be increased. Even if the tablet-shaped medicine 39 is formed into a flat shape and thin, sufficient strength can be secured by coating. Further, by charging the tablet type drug 39 into the solvent and dissolving the coating film, the tablet type drug 39 is broken in the solvent and easily dissolved in the solvent. The coating agent is not limited to the water-soluble resin described above as long as it is soluble in the solvent, and may be appropriately changed according to the type of the solvent.

  The powder for forming the tablet-type drug 39 may be any powder that shows alkalinity when dissolved in a solvent. For example, potassium acetate, potassium chloride, anhydrous piperazine, piperazine hexahydrate, potassium hydroxide, water Sodium oxide, ammonium carbonate, potassium bicarbonate, sodium bicarbonate, 1,4-ethylenepiperazine, imidazole, pyrazole, pyrazine may be used. The tablet-type medicine 39 is not limited to a configuration formed from one type of alkaline powder, and may be formed from two or more types of alkaline powder.

  In addition to the alkaline powder that is the main component, a powdery additive may be added to the tablet-type medicine 39. As the additive, for example, a surfactant, a chelating agent, a disintegrant, a binder, and an excipient may be used. Not only one type of additive but also two or more types of additives may be added to the tablet-type drug 39.

  The solvent is not particularly limited as long as it is mixed with the tablet-type drug 39 and exhibits alkalinity. In addition to pure water, a polar solvent such as alcohol may be used. The ratio between the solvent and the tablet-type drug is preferably adjusted so that the polishing liquid has a pH of 10 to 12.5, and more preferably adjusted to have a pH of 12.5. In addition, the solvent is configured to be supplied from the solvent tank 31 to the stirring tank 32, but is not limited to this configuration. When the solvent is pure water, it may be supplied directly from the pure water equipment in the factory to the stirring tank 32 through a pipe.

Furthermore, although the tablet type | mold chemical | medical agent 39 was made into the structure formed in a pellet form by compressing alkaline powder, it is not limited to this structure. The tablet-type medicine 39 may be formed by agglomerating alkaline powder and may be formed into a granule by granulation molding, for example. Thus, when the tablet-type medicine 39 is formed only with alkaline dry powder, it may be formed into a pellet by compression molding or may be formed into a granule by dry granulation molding. The tablet-type medicine 39 may be formed by containing alkaline powder in a tablet-like capsule.
Moreover, you may dry, after forming into a pellet form containing a liquid component.

  In addition, the tablet-type medicine 39 is not limited to a structure formed by drying only with a solid powder, and may be formed including a liquid component. For example, the tablet-type medicine 39 may be formed into granules by wet granulation molding with an alkaline powder and an alkaline / neutral (pure water) liquid, or may be compression-molded after wet granulation molding to form a tablet-type medicine. 39 may be formed into a pellet. In the wet granulation molding, the liquid content with respect to the tablet-type drug 39 is preferably 30% or less. Moreover, the kind of alkaline liquid is not specifically limited, The tablet-type chemical | medical agent 39 may contain two or more types of alkaline liquid.

  Furthermore, in the present embodiment, the tablet type drug 39 is formed with an alkaline powder, but it may be formed with an acidic powder. The tablet-type drug 39 may be formed by adding powdery additives such as a surfactant, a chelating agent, a disintegrant, a binder, and an excipient. As the solvent, a solvent that is mixed with the tablet-type drug 39 and exhibits acidity is used. Further, the tablet type drug 39 may be formed by agglomerating acidic powder as in the case of alkaline powder, and may be formed by the above-described compression molding, dry granulation molding, wet granulation molding, wet granulation. You may shape | mold by either the compression molding after a grain shaping | molding.

  With reference to FIG. 3, the medicine supply mechanism will be described. FIG. 3 is a schematic diagram of the medicine supply mechanism of the present embodiment. Note that the drug supply mechanism may be configured in any way as long as the tablet-type drug can be charged into the solvent. For example, in the polishing liquid manufacturing apparatus according to the present embodiment, an extrusion-type drug supply mechanism shown in FIG. 3A, a revolver-type drug supply mechanism shown in FIG. 3B, a screw-type drug supply mechanism shown in FIG. 3C, and FIG. Any of the conveyor-type drug supply mechanisms shown may be used.

  As shown in FIG. 3A, the push-out type drug supply mechanism 40 has a tablet-type medicine 39 vertically stacked on a cylindrical cartridge 41, and the tablet-type medicine 39 dropped from the lower end of the cartridge 41 is Extruding one by one. A receiving tray 43 that receives the tablet-type medicine 39 is provided below the cartridge 41, and the tablet-type medicine 39 that has fallen on the receiving tray 43 is pushed out by the pushing mechanism 42, and is directly above the stirring tank 32 along the slope 44. It has been sent out. A photosensor 45 for counting the quantity of the tablet-type medicine 39 is provided at the outlet of the slope 44, and the number of the tablet-type medicine 39 is counted each time the photosensor 45 is shielded from light.

  Thus, by counting the number of tablet-type medicines 39 charged by the photosensor 45, the amount of tablet-type medicine 39 charged into the agitation tank 32 can be managed and the remaining amount of the tablet-type medicine 39 in the cartridge 41 can be managed. You can manage the number. In addition, each time the push-out mechanism 42 pushes the tablet-type medicine 39 from the receiving tray 43, the tablet-type medicine 39 is supplied to the receiving tray 43 by natural fall, so that the structure of the medicine supply mechanism 40 can be simplified. In addition, it is preferable that the extrusion speed of the extrusion mechanism 42 is suppressed to such an extent that the tablet-type medicine 39 is not collapsed by an impact at the time of extrusion.

  As shown in FIG. 3B, the revolver type drug supply mechanism 50 includes a cylindrical cartridge 51 in which tablet type drugs 39 are vertically stacked, and the tablet type drug 39 dropped from the lower end of the cartridge 51 is disc-shaped. One by one is sent out by 52. A plurality of recesses are formed in the upper surface of the revolver 52 in the circumferential direction, and a motor 54 is connected to the lower surface of the revolver 52. Each time the tablet-type medicine 39 is placed in the recess of the revolver 52, the revolver 52 rotates intermittently at a predetermined angle, and the tablet-type medicine 39 is delivered to the input port 56. A photo sensor 55 is provided below the input port 56, and the number of tablet-type medicines 39 input to the stirring tank 32 is counted.

  Even with such a configuration, it is possible to manage the number of tablet-type medicines 39 charged into the agitation tank 32 and to manage the remaining number of tablet-type medicines 39 in the cartridge 51. Further, each time the revolver 52 rotates intermittently, the tablet-type medicine 39 is supplied to the concave portion by natural fall, so that the structure of the medicine supply mechanism 50 can be simplified. Since the tablet-type medicine 39 is inserted every time the revolver 52 rotates intermittently at a predetermined angle, the number of steps of the motor 54 may be monitored instead of the photosensor 55. In addition, it is preferable that the rotation speed of the revolver 52 is suppressed to such an extent that the tablet-type medicine 39 does not protrude from the recess.

  As shown in FIG. 3C, the screw-type medicine supply mechanism 60 includes a cylindrical cartridge 61 in which a tablet-type medicine 39 is accommodated, and one tablet-type medicine 39 that has dropped from the lower end of the cartridge 61 is Sending out one by one. A transport cartridge 62 is connected to the lower end of the cartridge 61, and a screw plate 63 is accommodated inside the transport cartridge 62. A motor 64 is connected to one end of the screw plate 63, and the tablet type medicine 39 in the transport cartridge 62 is pushed out by the rotation of the screw plate 63. A photo sensor 65 is provided below the outlet of the transport cartridge 62, and the number of tablet-type medicines 39 charged into the stirring tank 32 is counted.

  Even with such a configuration, it is possible to manage the number of tablet-type medicines 39 charged into the stirring tank 32 and to manage the remaining number of tablet-type medicines 39 in the cartridge 61. In addition, since the tablet-type medicine 39 is supplied to the screw board 63 by natural fall as the screw plate 63 rotates, the structure of the medicine supply mechanism 60 can be simplified. The tablet type medicine 39 is conveyed at low speed in the conveying cartridge 62 by the rotation of the screw plate 63. Therefore, wear and disintegration of the tablet-type medicine 39 are suppressed, and the tablet-type medicine 39 can be supplied to the stirring tank 32 with an appropriate weight.

  As shown in FIG. 3D, the conveyor-type medicine supply mechanism 70 includes a cylindrical cartridge 71 in which tablet-type medicines 39 are vertically stacked, and one tablet-type medicine 39 dropped from the lower end of the cartridge 71 is conveyed by the conveyor 72. Sending out one by one. The conveyor 72 has a pair of pulleys 73 around which a belt 74 is stretched, and a large number of trays 76 are attached to the outer surface of the belt 74. A motor is connected to the pulley 73 on one side, and the tablet-type medicine 39 accommodated in the tray 76 is sent out directly above the stirring tank 32 by the circular movement of the belt 74. A photo sensor 75 is provided below the conveyor 72, and the number of tablet-type medicines 39 charged into the stirring tank 32 is counted.

  Even with such a configuration, it is possible to manage the number of tablet-type medicines 39 charged into the agitation tank 32 and to manage the remaining number of tablet-type medicines 39 in the cartridge 71. In addition, since the tablet-type medicine 39 is supplied to the tray 76 by natural dropping in accordance with the movement of the tray 76 by the conveyor 72, the structure of the medicine supply mechanism 70 can be simplified. Since the tablet-type medicine 39 is transported while being placed on the tray 76, no external force is applied to the tablet-type medicine 39 during transportation. Therefore, wear and disintegration of the tablet-type medicine 39 are suppressed, and the tablet-type medicine 39 can be supplied to the stirring tank 32 with an appropriate weight.

  Then, with reference to FIG. 4, the manufacturing method of polishing liquid is demonstrated. FIG. 4 is a diagram illustrating an example of a manufacturing method of the polishing liquid of the present embodiment. In addition, although the structure which manufactures polishing liquid using an extrusion-type chemical | medical agent supply mechanism is illustrated here, polishing liquid can be manufactured by the same method also in the above other chemical | medical agent supply mechanisms.

  As shown to FIG. 4A, a solvent supply process is first implemented. In the solvent supply step, the opening / closing valve 33 is opened and a predetermined weight of solvent is supplied from the solvent tank 31 to the stirring tank 32. In this case, the on-off valve 33 may be opened for a predetermined time so that a predetermined flow rate of solvent may be supplied from the solvent tank 31 to the stirring tank 32, or the weight of the solvent in the stirring tank 32 may be measured with a load cell or the like. The supply of the solvent may be stopped when reaching the value. Moreover, the solvent is not limited to the configuration in which the solvent is supplied from the solvent tank 31 to the stirring tank 32, and a predetermined weight of solvent may be supplied to the stirring tank 32 from the water supply pipe or the like in the factory via the open / close valve 33.

  Next, as shown to FIG. 4B, a chemical | medical agent injection | pouring process is implemented after a solvent supply process. In the drug charging step, a predetermined quantity of tablet-type drug 39 is charged with respect to the solvent supplied to the stirring tank 32. In this case, the tablet-type medicine 39 dropped from the cartridge 41 is pushed out by the push-out mechanism 42, and the tablet-type medicine is put into the stirring tank 32 supplied with the solvent one by one. Each time the tablet-type medicine 39 is put into the stirring tank 32, the number of the tablet-type medicine 39 is counted by the photosensor 45. When the count reaches a predetermined quantity, the push-out mechanism 42 pushes out the tablet-type medicine 39. Is stopped.

  Next, as shown in FIG. 4C, an agitation step is performed after the medicine charging step. In the stirring step, the tablet type drug 39 and the solvent are stirred in the stirring tank 32 by the stirrer 34. The solvent is stirred by the stirrer 34 in the stirring tank 32, and the tablet-type medicine 39 is dissolved in a predetermined amount of solvent to produce a polishing liquid having a predetermined concentration. In this case, since the tablet-type medicine 39 is formed in a flat shape, the tablet-type medicine 39 is broken by the stirring of the solvent and melts in a short time to produce a polishing liquid having a predetermined concentration. When the agitator 34 is stopped and the polishing liquid is manufactured, the count of the number of inputs is reset and the amount of inputs is set to zero.

As described above, since the polishing liquid is produced by charging the solidified tablet type drug 39 into the solvent, it is possible to adjust the concentration of the polishing liquid according to the number of tablet type drug 39 charged. Therefore, the polishing liquid can be adjusted to an appropriate concentration according to the number of tablet-type medicines 39 charged without measuring the weight of the tablet-type medicine 39. Note that since the tablet-type drug 39 is solidified at a predetermined weight, the tablet-type drug 39 can be charged only at a predetermined weight, but the concentration of the polishing liquid is finely adjusted by adjusting the supply amount of the solvent. be able to. The concentration of the polishing liquid is adjusted by the following equation (1), for example.

  As described above, according to the polishing apparatus 1 of the present embodiment, the solid tablet-type drug 39 is charged into the solvent at the time of manufacturing the polishing liquid. It is safe, and furthermore, the work load can be reduced by eliminating the need to replace the polishing liquid tank. In addition, since the tablet-type medicine 39 can be managed by the number instead of being managed by the amount or weight as in the case of liquid or powder, the management burden can be reduced.

  Moreover, in this Embodiment, although the chemical | medical agent injection | pouring process was implemented after the solvent supply process, it is not limited to this structure. The chemical injection step may be performed before the solvent supply step, or the solvent supply step and the chemical input step may be performed simultaneously.

  Moreover, in the stirring process of this Embodiment, it was set as the structure which dissolves a tablet-type chemical | medical agent in a solvent by stirring a solvent with a stirrer, However, It is not limited to this structure. In the stirring step, it is only necessary that the tablet-type drug can be dissolved in the solvent. For example, the tablet-type drug may be dissolved in the solvent by ultrasonic vibration of the solvent.

  Moreover, in the stirring process of this Embodiment, it was set as the structure which counts the injection quantity of a tablet-type chemical | medical agent with a photosensor, However, It is not limited to this structure. The number of tablet-type medicines input may be configured in any way as long as the number of tablet-type medicines input can be detected.

  In this embodiment, the slurry is exemplified as the polishing liquid, but the present invention is not limited to this configuration. The polishing liquid may be any liquid that is supplied to the plate-like material during the polishing process. For example, the polishing liquid may be a liquid for preventing metal adhesion and improving cleaning ability. That is, the polishing process of the present embodiment is not limited to CMP polishing, but includes other wet polishing.

  Further, in the present embodiment, a polishing apparatus that separates a workpiece as an example of the processing apparatus has been described, but the present invention is not limited to this configuration. The present invention can be applied to other processing apparatuses that perform a polishing process, and may be applied to other processing apparatuses such as a cluster apparatus including a polishing apparatus.

  In addition, as a plate-like object to be processed, various types such as, for example, a semiconductor device wafer, an optical device wafer, a package substrate, a semiconductor substrate, an inorganic material substrate, an oxide wafer, a raw ceramic substrate, a piezoelectric substrate, etc. A workpiece may be used. As the semiconductor device wafer, a silicon wafer or a compound semiconductor wafer after device formation may be used. As the optical device wafer, a sapphire wafer or silicon carbide wafer after device formation may be used. Further, a CSP (Chip Size Package) substrate may be used as the package substrate, silicon or gallium arsenide may be used as the semiconductor substrate, and sapphire, ceramics, glass, or the like may be used as the inorganic material substrate. Furthermore, as the oxide wafer, lithium tantalate or lithium niobate after device formation or before device formation may be used.

  Moreover, although this Embodiment and the modified example were demonstrated, what combined the said embodiment and modified example entirely or partially as another embodiment of this invention may be sufficient.

  The embodiments of the present invention are not limited to the above-described embodiments, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in another way by technological advancement or another derived technique, the method may be used. Accordingly, the claims cover all embodiments that can be included within the scope of the technical idea of the present invention.

  In the present embodiment, the configuration in which the present invention is applied to a polishing apparatus has been described. However, the present invention can also be applied to other processing apparatuses that require supply of a polishing liquid.

  As described above, the present invention has the effect of reducing the work load while ensuring safety, and is particularly useful for a polishing liquid manufacturing method used in a CMP polishing apparatus.

1 Polishing device (CMP polishing device)
DESCRIPTION OF SYMBOLS 30 Manufacturing apparatus 31 Solvent tank 32 Stirrer tank 34 Stirrer 39 Tablet-type medicine 40, 50, 60, 70 Medicine supply mechanism 45, 55, 65, 75 Photosensor

Claims (1)

A method for producing a polishing liquid used in a CMP polishing apparatus,
Using a tablet-type drug in which a predetermined weight of the drug is solid, and a solvent for dissolving the tablet-type drug,
A solvent supply step of supplying a predetermined weight of solvent to the stirring tank;
A drug charging step of charging a predetermined amount of the tablet-type drug with respect to the solvent supplied to the stirring tank;
A stirring step of stirring the tablet-type drug and the solvent in the stirring tank,
A method for producing a polishing liquid, characterized in that the polishing liquid concentration is adjusted according to the amount of the tablet-type drug introduced into the solvent.

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