JP2018178181A - Electronic component plating device - Google Patents

Electronic component plating device Download PDF

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JP2018178181A
JP2018178181A JP2017077837A JP2017077837A JP2018178181A JP 2018178181 A JP2018178181 A JP 2018178181A JP 2017077837 A JP2017077837 A JP 2017077837A JP 2017077837 A JP2017077837 A JP 2017077837A JP 2018178181 A JP2018178181 A JP 2018178181A
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plating
opening
tank
lid
plated
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JP6916028B2 (en
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利文 溝上
Toshifumi Mizogami
利文 溝上
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Koa Corp
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Koa Corp
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Abstract

PROBLEM TO BE SOLVED: To provide an electronic component plating device capable of reducing plating failures of a plating film of an electronic component by efficiently discharging plating liquid from a plating tank.SOLUTION: A plating tank 15 can rotate in a horizontal direction, and stores a plated object 25 and plating liquid in an internal space formed of an approximately conical lid part 11 and an approximately disk-like bottom 13 including an outer peripheral sidewall 28. Narrowing of the plated object 25, its residues and the like are prevented by providing an opening 20 in a position with which the plated object does not directly come into contact in an inclined side surface 11a of the lid part 11 even when a plating layer rotates. This makes it possible to efficiently and surely discharge only plating liquid and washing water.SELECTED DRAWING: Figure 1

Description

本発明は、例えばチップ型電子部品の電極等にめっきを施すための電子部品のめっき装置に関する。   The present invention relates to a plating apparatus for an electronic component, for example, for plating an electrode or the like of a chip type electronic component.

チップ型抵抗器等の小型電子部品は、回路基板へのはんだ付け性の向上や電気的導通を確保するため、めっきを施して外部電極を形成している。そのような外部電極を形成するめっき装置として、例えば、めっき槽内に被めっき物とめっき液を投入し、めっき槽を水平方向に左右(正逆)交互に、あるいは連続的に、あるいは断続的に回転させてめっきを施す装置が知られている。   Small electronic components such as chip resistors are plated to form external electrodes in order to improve the solderability to the circuit board and ensure electrical continuity. As a plating apparatus for forming such an external electrode, for example, an object to be plated and a plating solution are placed in a plating tank, and the plating tank is horizontally alternated horizontally (forward and reverse) alternately or continuously or intermittently. There is known an apparatus for rotating and plating.

このようなめっき装置では、電解反応によりめっき槽内の金属濃度が徐々に低下するため、めっき槽と、別途設けた母槽との問で常時、めっき液が循環するように構成されている。   In such a plating apparatus, since the metal concentration in the plating tank is gradually decreased by the electrolytic reaction, the plating solution is always circulated between the plating tank and a separately provided mother tank.

例えば、特許文献1には、回転可能に構成されためっき処理室内で、遠心力により被めっき物と導電メディアとが凝集するのを防止するため、めっき処理室の回転速度に変化が生じるような態様で連続的、または断続的に回転させながらめっきを行う方法が開示されている。さらに、特許文献1のめっき装置は、被めっき物を通過させることなくめっき液のみを外部に抜き出して排出することができる、多孔質材料からなる環状のめっき抜き出し部(ポーラス状リング)を備え、抜き出されためっき液が、循環路を経てめっき処理室に循環されるように構成されている。   For example, in Patent Document 1, the rotational speed of the plating treatment chamber changes in order to prevent aggregation of the object to be plated and the conductive medium by centrifugal force in the plating treatment chamber configured to be rotatable. A method of plating while rotating continuously or intermittently in an aspect is disclosed. Furthermore, the plating apparatus of Patent Document 1 includes an annular plating extraction portion (porous ring) made of a porous material that can extract and discharge only the plating solution to the outside without letting the object to be plated pass through. The extracted plating solution is circulated through the circulation path to the plating treatment chamber.

また、特許文献2は、被めっき物等を収容するめっき処理室が、上方に開口部を有し外周部に陰極が設けられた回転体と、回転体の中心に配された筒状部材と、回転体の内部に配された陽極とを備え、筒状部材に対してオーバーフローさせてめっき液を筒状部材に流入させ、流入しためっき液を開口部からめっき処理室に還流することによりめっき液を循環させるめっき装置を開示している。   Further, in Patent Document 2, a plating processing chamber for containing a material to be plated, etc. has a rotary member having an opening at the top and a cathode provided on the outer peripheral portion, and a cylindrical member arranged at the center of the rotary member. And an anode disposed inside the rotating body, and causing the plating solution to flow into the tubular member by causing the tubular member to overflow and allow the plating solution to flow back to the plating treatment chamber from the opening. A plating apparatus for circulating a solution is disclosed.

特開2006−045619号(特許第4725051号)公報Unexamined-Japanese-Patent No. 2006-045619 (patent 4725051) gazette 特開2013−053339号(特許第5741944号)公報Unexamined-Japanese-Patent No. 2013-053339 (patent 5741944) gazette

特許文献1における、めっき液の循環のための排出方法では、陰極電極とともにめっき槽のベース部材(底部)にセットされた、多孔質材料からなる環状のめっき抜き出し部が、上述したように処理液は通過させるが被めっき物は通過しない構造となっており、フィルター(ポーラス状リングフィルター)の役割を果たしている。   In the discharge method for the circulation of the plating solution in Patent Document 1, as described above, the annular plating extraction portion made of porous material, which is set on the base member (bottom) of the plating tank together with the cathode electrode, And the material to be plated does not pass through, and plays the role of a filter (porous ring filter).

しかしながら、近時において、めっき装置の被めっき物である電子部品の小型化が進んでおり、数μm〜数mm程度の微小な穴が無数に開いたポーラス状フィルターの場合、被めっき物、通電用メディア等が多数挟まる。そのため、めっき装置においてめっき液が循環せず、めっき未着等の不具合が生じるおそれがある。また、一旦フィルターに挟まっためっき物が脱落して、めっき未着や異常めっき等の不具合も多発する問題がある。さらには、挟まっためっき物に徐々にめっきが施されて微小な穴が塞がれ、めっき液循環や排出そのものが困難となり、短時間においてめっき装置としての機能を果たさなくなるという事態も想定される。   However, in the case of a porous filter in which minute holes of several μm to several mm have been opened innumerably in recent years, miniaturization of electronic parts which are objects to be plated of a plating apparatus is progressing. A lot of media etc. are caught. Therefore, the plating solution does not circulate in the plating apparatus, which may cause problems such as non-plating. In addition, there is a problem that the plated material once caught in the filter falls off, and problems such as non-plating and abnormal plating frequently occur. In addition, it is possible that the plated material is gradually plated to close minute holes, making it difficult to circulate and discharge the plating solution itself and not to function as a plating apparatus in a short time. .

また、特許文献2のめっき装置のように、回転体の中央に設けられた筒状部材に対してめっき液をオーバーフローさせ、筒状部材に流入させて排出して、めっき処理室に還流する構成では、被めっき物である電子部品が小型であることにより浮力によって液面に浮いてしまい、めっき液の排出とともに電子部品も一緒に排出されてしまうという問題がある。   In addition, as in the plating apparatus of Patent Document 2, a configuration in which the plating solution is made to overflow the cylindrical member provided at the center of the rotating body, flowed into and discharged from the cylindrical member, and returned to the plating treatment chamber However, the small size of the electronic component to be plated causes floating on the liquid surface due to buoyancy, and there is a problem that the electronic component is also discharged together with the discharge of the plating solution.

本発明は、上述した課題に鑑みなされたものであり、めっき槽から効率的にめっき液を排出することにより、チップ状電子部品に形成されるめっき皮膜の厚みバラツキ等、めっき不良を低減する電子部品のめっき装置を提供することを目的とする。   The present invention has been made in view of the above-described problems, and by efficiently discharging the plating solution from the plating tank, it is an electron that reduces plating defects such as thickness variations of a plating film formed on a chip-like electronic component. An object of the present invention is to provide a plating apparatus for parts.

かかる目的を達成し、上述した課題を解決する一手段として、例えば、以下の構成を備える。すなわち、本発明の電子部品のめっき装置は、略円錐状の蓋部と、外周側壁を有する略円板状の底部とで形成される内部空間に被めっき物およびめっき液を貯留し、水平方向に回転可能なめっき槽と、前記めっき槽内の略中央に配設された陽極電極と、前記めっき槽の内周側に露出するとともに前記外周側壁の一部を構成する陰極電極と、前記蓋部に設けられためっき液を排出する開口部とを備えることを特徴とする。   As means for achieving the object and solving the above-mentioned problems, for example, the following configuration is provided. That is, in the plating apparatus for electronic parts of the present invention, the object to be plated and the plating solution are stored in the internal space formed by the substantially conical lid portion and the substantially disc-like bottom portion having the outer peripheral side wall. A rotatable plating tank, an anode electrode disposed substantially at the center of the plating tank, a cathode electrode exposed on the inner peripheral side of the plating tank and constituting a part of the outer peripheral side wall, the lid And an opening for discharging the plating solution provided in the part.

例えば、前記開口部は、前記蓋部の下方部の周方向に間隔を置いて複数設けられていることを特徴とする。例えば、前記開口部を設けた前記蓋部の下方部は、前記めっき槽の回転時において前記被めっき物が到達しない部位であることを特徴とする。また、例えば、前記外周側壁の高さを変えることで、前記めっき槽における前記開口部の垂直方向の位置を調整可能としたことを特徴とする。   For example, a plurality of the opening portions may be provided at intervals in the circumferential direction of the lower portion of the lid portion. For example, the lower portion of the lid provided with the opening is characterized in that the object to be plated does not reach when the plating tank is rotated. Further, for example, by changing the height of the outer peripheral side wall, the vertical position of the opening in the plating tank can be adjusted.

さらには、例えば、前記開口部は、前記蓋部の傾斜側面下方部に設けた貫通孔であることを特徴とする。また、例えば、前記開口部は、前記蓋部の傾斜側面下方部に設けた貫通孔に、該蓋部の外側に突出する筒状部材を挿入してなることを特徴とする。さらに例えば、前記開口部は、前記蓋部の傾斜側面下方部に設けた貫通孔に、該蓋部の外側に突出する筒状部材を挿入するとともに該貫通孔を覆うネット状部材を設けてなることを特徴とする。   Furthermore, for example, the opening is a through hole provided in a lower portion of the inclined side surface of the lid. Further, for example, the opening portion is characterized in that a cylindrical member which protrudes to the outside of the lid portion is inserted into a through hole provided in a lower portion of the inclined side surface of the lid portion. Furthermore, for example, the opening portion is formed by inserting a tubular member protruding to the outside of the lid portion into a through hole provided in a lower portion of the inclined side surface of the lid portion and providing a net-like member covering the through hole. It is characterized by

本発明によれば、めっき槽の回転時において被めっき物が直接接触しない位置に開口部を設けることで、被めっき物の挟まり、残留等を防止でき、めっき液および水洗水の循環や排出に支障をきたすことなく被めっき物への均一なめっき処理が可能となる。   According to the present invention, by providing the opening at a position where the object to be plated does not come into direct contact when the plating tank rotates, pinching and remaining of the object to be plated can be prevented, and circulation and discharge of the plating solution and washing water are possible. A uniform plating process can be performed on the object without any problems.

本発明の実施の形態例に係る電子部品のめっき装置の一部を破断して、その構造を示す斜視図である。It is a perspective view which fractures a part of plating device of electronic parts concerning an example of an embodiment of the present invention, and shows the structure. 本実施の形態例に係るめっき装置のめっき槽の蓋部に設けた、めっき液排出のための開口部の詳細構造を示す断面図である。It is sectional drawing which was provided in the cover part of the plating tank of the plating apparatus which concerns on the example of this Embodiment, and which shows the detailed structure of the opening part for a plating solution discharge. めっき槽の蓋部に設けた開口部の他の構成例を示す図である。It is a figure which shows the other structural example of the opening part provided in the cover part of the plating tank. 本実施の形態例に係るめっき装置のめっき槽の蓋部に設けた開口部の配置例を示す図である。It is a figure which shows the example of arrangement | positioning of the opening part provided in the cover part of the plating tank which concerns on the example of this Embodiment. 本実施の形態例に係るめっき装置におけるめっき液等の循環ルートを模式的に示す図である。It is a figure which shows typically the circulation route, such as a plating solution in the plating apparatus which concerns on the example of this Embodiment. 外部電極にめっき層が形成されたチップ状抵抗器の断面構成を示す図である。It is a figure which shows the cross-sectional structure of the chip-like resistor in which the plating layer was formed in the exterior electrode.

以下、添付図面等を参照して本発明に係る一実施の形態例を詳細に説明する。図1は、本実施の形態例に係る電子部品のめっき装置の一部を破断して、その構造を示す斜視図である。図1に示すめっき装置10は、外形がほぼ円錐形の蓋部11と、その蓋部11の底面側に配置された底部13とで構成される内部空間をめっき槽15とする、回転型のめっき装置(ドーム型めっき装置)である。   Hereinafter, an embodiment according to the present invention will be described in detail with reference to the accompanying drawings and the like. FIG. 1 is a perspective view showing a structure in which a part of a plating apparatus for electronic parts according to the present embodiment is broken. The plating apparatus 10 shown in FIG. 1 is a rotary type in which an internal space constituted by a lid portion 11 having a substantially conical outer shape and a bottom portion 13 disposed on the bottom surface side of the lid portion 11 is a plating tank 15. It is a plating apparatus (dome type plating apparatus).

蓋部11は、傾斜する側面の最下方端の周縁部(最外周部)が外周方向に鍔状に突出した突起部26を有し、その突起部26は環状のリング部材29によって覆われている。また、蓋部11の傾斜側面の下方部には、めっき槽15に貯留されためっき液等を排出するための開口部20が設けられている。なお、開口部20の詳細については後述する。   The lid portion 11 has a protrusion 26 in which the peripheral portion (the outermost peripheral portion) of the lowermost end of the inclined side surface protrudes like a hook in the outer peripheral direction, and the protrusion 26 is covered by an annular ring member 29 There is. Further, an opening 20 for discharging a plating solution or the like stored in the plating tank 15 is provided below the inclined side surface of the lid 11. The details of the opening 20 will be described later.

底部13は、蓋部11の最外周部分の外径と同一の外径を有する円板形状の底板(ベース部材)18と、底板18の上面側の外周縁部に沿って配置された、一定の幅を有するリング状の陰極電極(陰極接点)17と、陰極電極17の上部であって、蓋部11の突起部26の下部に位置し、陰極電極17と同一径の環状部材であるスペーサリング19とを有して構成される。めっき槽15において、底板18の外周縁部、陰極電極17、スペーサリング19、および突起部26によって外周側壁28が形成される。   The bottom portion 13 is disposed along a disk-shaped bottom plate (base member) 18 having the same outer diameter as the outer diameter of the outermost peripheral portion of the lid portion 11 and an outer peripheral edge on the upper surface side of the bottom plate 18 A spacer which is an annular member located at the upper part of the ring-shaped cathode electrode (cathode contact) 17 having the following width and the cathode electrode 17 and below the projection 26 of the lid 11 and having the same diameter as the cathode electrode 17 And a ring 19. In the plating tank 15, an outer peripheral side wall 28 is formed by the outer peripheral edge portion of the bottom plate 18, the cathode electrode 17, the spacer ring 19, and the protrusion 26.

リング部材29、突起部26、スペーサリング19、および陰極電極17には、その周方向に複数の貫通孔が設けられている。そして、これらを重ね合わせた状態で貫通孔に固定部材27を挿通し、その固定部材27の先端部分に設けた雄ネジ部と、底板18に設けた雌ネジ部とを螺着することで、蓋部11と底部13とを相互に固定する。これら蓋部11と底部13とにより形成された内部空間がめっき槽15となる。   The ring member 29, the protrusion 26, the spacer ring 19, and the cathode electrode 17 are provided with a plurality of through holes in the circumferential direction. Then, the fixing member 27 is inserted into the through hole in a state in which these are superimposed, and the male screw portion provided at the tip of the fixing member 27 and the female screw portion provided on the bottom plate 18 are screwed together, The lid 11 and the bottom 13 are fixed to each other. An internal space formed by the lid 11 and the bottom 13 is a plating tank 15.

なお、スペーサリング19は、固定部材27による螺着を解除することでめっき槽15から取り外すことが可能である。よって、めっき装置10における製品(被めっき物)の投入条件等に合わせて、厚さの異なるスペーサリング19を用意することで、上述した外周側壁28の高さを変えることができ、その結果、めっき槽15の容積、開口部20の位置(底板18からの高さ)等を調整できる。さらに、めっき槽15の排水能力についても、開口部20のサイズや数を適宜設定することによって調整できる。   The spacer ring 19 can be removed from the plating tank 15 by releasing the screwing by the fixing member 27. Therefore, the height of the outer peripheral side wall 28 described above can be changed by preparing the spacer rings 19 having different thicknesses in accordance with the input conditions of the product (object to be plated) in the plating apparatus 10 and the like. The volume of the plating tank 15, the position of the opening 20 (height from the bottom plate 18), and the like can be adjusted. Furthermore, the drainage capacity of the plating tank 15 can also be adjusted by appropriately setting the size and the number of the openings 20.

めっき槽15の中心部には、めっき液に浸漬される陽極電極16が配置され、さらに、蓋部11の頂部に設けた上部開口部24を貫いてめっき槽15の中心部に至る水洗水導入管21と、処理液導入管22と、槽内のめっき液の量を検知するための液面センサ23とが設けられている。めっき装置10では、後述するように、これら水洗水導入管21、処理液導入管22等により、各種処理液の循環や排出を効率的に行う。   An anodic electrode 16 to be immersed in the plating solution is disposed at the center of the plating tank 15, and washing water is introduced through the upper opening 24 provided at the top of the lid 11 to the center of the plating tank 15. A pipe 21, a treatment liquid introduction pipe 22, and a liquid level sensor 23 for detecting the amount of plating solution in the tank are provided. In the plating apparatus 10, as described later, circulation and discharge of various processing solutions are efficiently performed by the washing water introducing pipe 21, the processing solution introducing pipe 22, and the like.

底部13の下面側中心部には、垂直下方に延びる回転軸12が結合され、その回転軸12は回転可能に軸支されている。ここでは、回転軸12に対して不図示のモータ等で回転力が付与されることで、電子部品等の被めっき物25、およびめっき液(不図示)が貯留されためっき槽15が水平方向に回転する。具体的には、図1において白抜き矢印で示すように、めっき槽15は時計方向と反時計方向(正逆方向)の回転により、所定速度で回転および停止を繰り返す。回転軸12には、電解めっき用電源の負側から結線され、陰極電極17へ通電するための導通部材14が接触している。   A vertically downwardly extending rotary shaft 12 is coupled to the lower surface side central portion of the bottom portion 13, and the rotary shaft 12 is rotatably supported. Here, the rotational force is applied to the rotating shaft 12 by a motor or the like (not shown), whereby the object 25 to be plated such as an electronic component and the plating tank 15 in which the plating solution (not shown) is stored are horizontal. To rotate. Specifically, as shown by the white arrow in FIG. 1, the plating tank 15 repeatedly rotates and stops at a predetermined speed by rotation in the clockwise direction and counterclockwise direction (forward and reverse direction). The rotating shaft 12 is connected from the negative side of the electrolytic plating power supply, and a conductive member 14 for supplying current to the cathode electrode 17 is in contact.

めっき槽15が水平方向に正回転および逆回転を交互に繰り返し、その回転が維持されて、図1に示すように遠心力により被めっき物が陰極電極17へ押し付けられている短時間のみ、陽極電極16と陰極電極17間に通電されてめき処理が行われる。 The plating tank 15 alternately repeats forward and reverse rotation in the horizontal direction, and the rotation is maintained, and as shown in FIG. 1, the anode is only pressed for a short time when the object to be plated is pressed against the cathode electrode 17 by centrifugal force. processing Ki Tsu because is energized between electrode 16 and the cathode electrode 17 is performed.

なお、本実施の形態例に係る電子部品のめっき装置によるめっき対象は、チップ型の抵抗器に限定されず、例えば、チップ型インダクタ、チップ型コンデンサ、これらの複合部品、多連抵抗器等、電極端子を有する電子部品のめっき処理にも使用できる。   The object to be plated by the plating apparatus of the electronic component according to the present embodiment is not limited to a chip type resistor, and for example, a chip type inductor, a chip type capacitor, a composite component thereof, multiple resistors, etc. It can also be used for the plating process of the electronic component which has an electrode terminal.

図2は、本実施の形態例に係るめっき装置においてめっき槽の蓋部に設けた、めっき液を排出するための開口部の詳細構造を示す断面図である。図2に示すように開口部20は、蓋部11の傾斜側面11aの下部であって、めっき槽15が水平方向に回転したときに被めっき物25が直接接触しない位置に設けられた貫通孔33からなる。ここでは、開口部20の孔径Dを例えば3mm以上とするが、これに限定されない。   FIG. 2 is a cross-sectional view showing the detailed structure of the opening for discharging the plating solution, provided in the lid of the plating tank in the plating apparatus according to this embodiment. As shown in FIG. 2, the opening 20 is a lower portion of the inclined side surface 11 a of the lid 11, and is a through hole provided at a position where the object to be plated 25 does not directly contact when the plating tank 15 rotates in the horizontal direction. It consists of 33. Here, the hole diameter D of the opening 20 is, for example, 3 mm or more, but is not limited thereto.

めっき槽15内でのめっき液30の液面(液位)は、めっき処理前あるいはめっき処理終了直後等においてめっき槽15が静止しているとき、および、めっき処理中あるいは洗浄処理時においてめっき槽15が回転しているときには、めっき槽15の上部開口部24の近傍に位置する(図2の液面31a)。このときめっき液30は、開口部20からめっき槽15の外部に排出されるが、後述する循環ルートによって、処理液導入管22を介して新しいめっき液がめっき槽15に供給されるため、液面31aの位置に変化はない。一方、めっき処理等が完了して脱水(排出)する段階では、めっき液30が開口部20から外部に排出され、処理液導入管22からのめっき液の供給が停止しているので、液面は底板18の上面付近まで下降する(図2の液面31b)。   The liquid level (liquid level) of the plating solution 30 in the plating tank 15 is the plating tank when the plating tank 15 is stationary before the plating treatment or immediately after the plating treatment, etc., and during the plating treatment or during the washing treatment When 15 is rotating, it is located near the upper opening 24 of the plating tank 15 (liquid level 31 a in FIG. 2). At this time, the plating solution 30 is discharged from the opening 20 to the outside of the plating tank 15. However, since a new plating solution is supplied to the plating tank 15 through the treatment solution introduction pipe 22 by the circulation route described later There is no change in the position of the surface 31a. On the other hand, at the stage of completion of the plating process and the like and dehydration (discharge), the plating solution 30 is discharged from the opening 20 to the outside, and the supply of the plating solution from the processing solution introduction pipe 22 is stopped. Drops to near the upper surface of the bottom plate 18 (liquid level 31 b in FIG. 2).

なお、開口部20は、図2に示す例では蓋部11に形成した貫通孔33のみで構成されているが、これに限定されない。例えば、図3(a)に示す開口部20aのように、貫通孔33に金属あるいはフッ素樹脂等からなる、孔径Dが例えば3mmの中空パイプ(チューブ)35を装着し、中空パイプ35の一部を蓋部11の外側に例えば、H=3〜5mm突出させた構成としてもよい。こうすることで、めっき槽15が回転したとき、仮に被めっき物25が貫通孔33の下端部に接触して飛び出る位置に至っても、被めっき物は所定長の中空パイプ35によって捕捉され、しかも中空パイプ35は摩擦係数の低い材料からなるとともに傾斜しているため、捕捉された被めっき物が再び、めっき槽15内に戻されるので、排水効率を低下させずに被めっき物のめっき槽外部への飛散を有効に阻止できる。また、中空パイプ35を蓋部11の外側に突出させたことで、中空パイプの交換時等に容易に引き抜くことができる。   In addition, although the opening part 20 is comprised only by the through-hole 33 formed in the cover part 11 in the example shown in FIG. 2, it is not limited to this. For example, as in the opening 20a shown in FIG. 3A, a hollow pipe (tube) 35 having a hole diameter D of, for example, 3 mm and made of metal or fluorine resin is attached to the through hole 33. For example, H = 3 to 5 mm may be protruded outside the lid 11. Thus, even if the plating object 25 comes in contact with the lower end of the through hole 33 and jumps out when the plating tank 15 rotates, the plating object is captured by the hollow pipe 35 having a predetermined length, and Since the hollow pipe 35 is made of a material having a low coefficient of friction and is inclined, the captured object to be plated is returned again into the plating tank 15, so the outside of the plating tank for the object to be plated is not reduced Can be effectively prevented. Further, by projecting the hollow pipe 35 to the outside of the lid portion 11, the hollow pipe can be easily pulled out, for example, when replacing the hollow pipe.

一方、図3(b)に示す開口部20bは、図3(a)に示す開口部20aに対して、蓋部11の内側において貫通孔33をネット状部材37で覆った構成となっている。ネット状部材37は、例えばフッ素樹脂等からなり、めっき液を容易に通過させるが、例えば1mm以下の微小な被めっき物を通過させない程度の網目を有する。その結果、被めっき物25が貫通孔33の開口部に触れる位置に至っても、ネット状部材37によりパイプ35内への侵入が阻止されるので、めっき槽15の外部への被めっき物の飛散を確実に防止できる。   On the other hand, the opening 20b shown in FIG. 3 (b) is configured such that the through hole 33 is covered with the net-like member 37 inside the lid 11 with respect to the opening 20a shown in FIG. 3 (a) . The net-like member 37 is made of, for example, a fluorine resin or the like, and allows the plating solution to easily pass through, but has a mesh of such a degree as not passing fine objects to be plated of 1 mm or less. As a result, even if the object 25 comes in contact with the opening of the through hole 33, the net-like member 37 prevents entry into the pipe 35, so that the object to be plated is scattered outside the plating tank 15. Can be reliably prevented.

すなわち、めっき槽15の蓋部11に、図3(b)に示すように貫通孔33にネット状部材37を張った開口部20bを設けることで、被めっき物25の浮遊品や移動時の舞上がり品等がめっき液とともにめっき槽15の外部に漏れ出ることを防止できる。   That is, as shown in FIG. 3B, by providing the opening portion 20b in which the net-like member 37 is stretched in the through hole 33 in the lid portion 11 of the plating tank 15, floating objects of the object 25 to be plated It is possible to prevent the leaked product etc. from leaking out of the plating tank 15 together with the plating solution.

なお、図3(b)に示す開口部20bを作製する場合、貫通孔33の孔径を超える大きさのネット状部材37を用意し、そのネット状部材37を貫通孔33の外側(蓋部11の外側)に当接させたまま、ネット状部材37とともに中空パイプ35を貫通孔33に挿入する。こうすることで、ネット状部材37の端部をめっき槽15の内部に露出させずに、貫通孔33全体を覆うようにネットを張ることができる。また、中空パイプ35を貫通孔33から引き抜くことで、ネット状部材37を容易に交換できる。   In the case of producing the opening 20b shown in FIG. 3B, a net-like member 37 having a size exceeding the diameter of the through hole 33 is prepared, and the net-like member 37 is The hollow pipe 35 is inserted into the through hole 33 together with the net-like member 37 while being in contact with the outside of the By doing this, it is possible to stretch the net so as to cover the entire through hole 33 without exposing the end of the net-like member 37 to the inside of the plating tank 15. Further, by pulling out the hollow pipe 35 from the through hole 33, the net-like member 37 can be easily replaced.

図4は、本実施の形態例に係るめっき装置のめっき槽を平面視したときの蓋部に設けた開口部の配置例を示している。図4(a)は、蓋部11の傾斜側面下部の円周方向に等間隔に複数の開口部20を設けた例である。また、図4(b)は、蓋部11の傾斜側面下部の円周方向に、中心線41に対して対称となるように複数の開口部20を設けた例を示す。開口部20の孔形状は、円形または楕円形のいずれであってもよい。   FIG. 4 shows an arrangement example of the openings provided in the lid when the plating tank of the plating apparatus according to this embodiment is viewed in plan. FIG. 4A shows an example in which a plurality of openings 20 are provided at equal intervals in the circumferential direction on the lower side of the inclined side surface of the lid 11. Further, FIG. 4B shows an example in which a plurality of openings 20 are provided in the circumferential direction on the lower side of the inclined side surface of the lid 11 so as to be symmetrical with respect to the center line 41. The hole shape of the opening 20 may be either circular or oval.

図4(a)に示す例では、6個の開口部20をそれぞれ等間隔に配置したが、例えば、めっき槽の大きさ、必要な排水量等に応じて開口部の個数を増減し、それらをランダムな間隔で配置してもよい。また、めっき対象のサイズおよび投入量に応じて開口部の孔径、開口部の個数、および開口部同士の間隔を適宜変えた蓋部を複数、用意してもよい。   In the example shown in FIG. 4A, the six openings 20 are arranged at equal intervals, but, for example, the number of openings may be increased or decreased according to the size of the plating tank, the amount of drainage required, etc. It may be arranged at random intervals. In addition, a plurality of lids may be prepared in which the hole diameter of the openings, the number of the openings, and the distance between the openings are appropriately changed according to the size of the plating target and the input amount.

図5は、本実施の形態例に係るめっき装置におけるめっき液等の循環ルートを模式的に示している。図5に示すめっき装置10において、めっき槽15の回転とともに蓋部11に設けた開口部20よりめっき液が排出されると、それと同時にめっき液母槽51内の新しいめっき液が、処理液導入管22を経由してめっき槽15に供給される。また、開口部20より排出されためっき液は、めっき槽15の外部全体を覆う容器50によって受けられ、処理液導出管42を経由してめっき液母槽51に至る。   FIG. 5 schematically shows a circulation route of a plating solution or the like in the plating apparatus according to the present embodiment. In the plating apparatus 10 shown in FIG. 5, when the plating solution is discharged from the opening 20 provided in the lid 11 as the plating tank 15 rotates, new plating solution in the plating solution mother tank 51 is introduced with the treatment solution at the same time. It is supplied to the plating tank 15 via the pipe 22. Further, the plating solution discharged from the opening 20 is received by the container 50 which covers the entire exterior of the plating tank 15 and reaches the plating solution mother tank 51 via the treatment solution outlet pipe 42.

なお、めっき装置10におけるめっき種の変更にともなう処理液の排出時には、めっき槽15を所定方向に高速回転させ、そのときの遠心力を利用して開口部20よりめっき液等を排出し、容器50で受ける。   At the time of discharge of the processing solution due to the change of the plating type in the plating apparatus 10, the plating tank 15 is rotated at high speed in a predetermined direction, and the plating solution etc. is discharged from the opening 20 using the centrifugal force at that time. Receive at 50

めっき物の水洗工程では、水洗水槽53より水洗水導入管21を介してめっき槽15内へ水洗水が供給され、水洗後の水洗水の排出も、上記処理液の排出時と同様、めっき槽を高速回転してその遠心力を利用して行われる。そして、容器50で受けた水洗水は、水洗水導出管41を介して水洗水槽53に戻される。   In the step of washing the plating material, the washing water is supplied from the washing water tank 53 into the plating tank 15 through the washing water introduction pipe 21 and the discharge of the washing water after the washing is also the plating tank as in the case of discharging the treatment liquid. The rotation is performed at high speed using its centrifugal force. Then, the flush water received by the container 50 is returned to the flush tank 53 through the flush water outlet pipe 41.

めっき装置10でのめっき処理における電解反応により、めっき槽15内の金属濃度が徐々に低下するので、めっき槽15と、別に設けためっき液母槽51との間で常にめっき液の循環が行われる。そのため、処理液および水洗水の循環や排出が確実に行われない場合、めっき時における電流異常、各処理液の混入等によって様々なめっき品質の不具合が発生する。   Since the metal concentration in the plating tank 15 gradually decreases due to the electrolytic reaction in the plating treatment in the plating apparatus 10, circulation of the plating solution is always performed between the plating tank 15 and the plating solution mother tank 51 provided separately. It will be. Therefore, when the treatment liquid and the washing water are not circulated or discharged with certainty, various problems of the plating quality occur due to abnormal current at the time of plating, mixing of each treatment liquid, and the like.

次に、本実施の形態例に係るめっき装置を使用してめっき処理したチップ抵抗器のめっき品質の評価結果について、実施例を参照して説明する。ここでは、表1に示すロット数量の実施例1〜5について、Ni(ニッケル)めっき層の膜厚(μm)およびSn(錫)めっき層の膜厚(μm)を測定した。各めっき層の膜厚測定は、サンプル数n=20で実施した。   Next, the evaluation results of the plating quality of the chip resistor plated using the plating apparatus according to the present embodiment will be described with reference to examples. Here, the film thickness (μm) of the Ni (nickel) plating layer and the film thickness (μm) of the Sn (tin) plating layer were measured for the lots of Examples 1 to 5 shown in Table 1. The film thickness of each plating layer was measured at a sample number n = 20.

Niめっき層、およびSnめっき層とは、図6に例示する断面構造のチップ抵抗器における外部電極を構成する2つのめっき層であり、通常、チップ抵抗器の製造工程において、端面電極を形成した後、Niめっき層を形成し、そのNiめっき層に重ねてSnめっきを施してSnめっき層を形成する。   The Ni plating layer and the Sn plating layer are two plating layers that constitute the external electrode in the chip resistor having the cross-sectional structure illustrated in FIG. 6, and generally, the end surface electrode is formed in the manufacturing process of the chip resistor. Thereafter, a Ni plating layer is formed, and the Ni plating layer is overlaid and subjected to Sn plating to form a Sn plating layer.

めっき処理におけるチップ抵抗器のめっき層形成に使用しためっき液は、Niめっき:ワット浴、Snめっき:中性浴である。また、被めっき物は0603サイズの抵抗チップ、および通電用φ0.55mmメディアである。   The plating solution used to form the plating layer of the chip resistor in the plating process is Ni plating: Watt bath, Sn plating: neutral bath. Further, the object to be plated is a 0603 size resistance chip and φ0.55 mm medium for energization.

従来のめっき装置を使用した試作例では、めっき槽内(ポーラスリング)への被めっき物の挟まり、および水洗後の残留数が約20〜30個確認された。これに対して、本実施の形態例に係るめっき装置を使用してめっき処理したチップ抵抗器の試作例(表1の実施例1〜5)では、被めっき物の挟まり等が0個であった。また、従来のめっき装置を使用した試作例では、ポーラスリングへの挟まりが原因と思われる未めっき品(めっき未着品)が多数見られたのに対して、本実施の形態例に係るめっき装置を使用した試作例では未めっき品がなく、さらに、膜厚の最大値と最小値の差が小さいことから、めっきの膜厚バラツキについても良好な結果が得られた。   In the trial production example using the conventional plating apparatus, about 20-30 pieces of the remaining number after pinching | pinching of the to-be-plated thing in the plating tank (porous ring) and the water washing were confirmed. On the other hand, in the trial manufacture example (Examples 1-5 of Table 1) of the chip resistor which carried out the plating process using the plating apparatus which concerns on the example of this Embodiment, the pinch etc. of a thing to be plated are 0 pieces. The Moreover, in the trial production example using the conventional plating apparatus, although many non-plated products (plating non-adhered products) that are considered to be caused by the pinching to the porous ring were seen, the plating according to the present embodiment example In the trial production example using the apparatus, there is no unplated product, and further, since the difference between the maximum value and the minimum value of the film thickness is small, good results are obtained also for the film thickness variation of the plating.

以上説明したように、本実施の形態例に係る電子部品のめっき装置では、めっき層を構成する蓋部の傾斜側面のうち、めっき層が回転しても被めっき物が直接、接触しない位置に開口部を設けることによって、被めっき物の挟まり、残留等を防止でき、めっき液や水洗水のみを効率良く確実に排出することが可能となる。すなわち、めっき槽が水平方向に回転し、遠心力により被めっき物がめっき槽の端部へ移動して内壁に押し付けられても、それらの被めっき物と重ならない位置に開口部を設けたことで、めっき液等の循環や排出に支障をきたすことなく対象物に均一なめっき処理ができる。   As described above, in the plating apparatus of the electronic component according to the present embodiment, among the inclined side surfaces of the lid constituting the plating layer, at a position where the object to be plated does not directly contact even if the plating layer rotates. By providing the opening, the object to be plated can be prevented from being pinched, remaining, etc., and only the plating solution and the washing water can be discharged efficiently and reliably. That is, even if the plating tank is rotated in the horizontal direction and the material to be plated is moved to the end of the plating tank by centrifugal force and pressed against the inner wall, the opening is provided at a position not overlapping with the material to be plated Thus, the object can be uniformly plated without affecting the circulation and discharge of the plating solution and the like.

また、めっき層の底部を構成するスペーサリングの厚さを変えて外周側壁の高さを調整可能な構成としたことで、被めっき物の投入条件等に合わせて、めっき槽における開口部の垂直方向の位置、めっき槽の容積を迅速に調整できる。   In addition, by changing the thickness of the spacer ring that constitutes the bottom of the plating layer to adjust the height of the outer peripheral side wall, the verticality of the opening in the plating tank can be adjusted according to the input conditions of the object to be plated, etc. The position of the direction and the volume of the plating tank can be adjusted quickly.

さらには、上記のような開口部を設けた本実施の形態例に係る電子部品のめっき装置は、従来のポーラス状フィルターリングのような強固な構造、取付が不要となり、めっき装置の構成を簡略化できるだけでなく、処理液の循環や排出を効率的に行うことができ、簡単な構成でめっき品質の異常発生を確実に防止できる。   Furthermore, the plating apparatus for electronic parts according to the present embodiment provided with the opening as described above does not require a strong structure and attachment like the conventional porous filter ring, and the structure of the plating apparatus is simplified. Not only that, it is possible to efficiently circulate and discharge the processing solution, and it is possible to reliably prevent the occurrence of abnormal plating quality with a simple configuration.

また、めっき槽の蓋部の内側において貫通孔にネット状部材を張った構成の開口部とした場合、ネット交換等の定期的なメンテナンスも短時間、簡便、かつ容易に行うことができる。   Moreover, when it is set as the opening part of the structure which stretched the net-like member to the through-hole inside the cover part of the plating tank, periodic maintenance, such as net replacement | exchange, can also be performed simply and easily for a short time.

10 めっき装置
11 蓋部
12 回転軸
13 底部
14 導通部材
15 めっき槽
16 陽極電極
17 陰極電極
18 底板(ベース部材)
19 スペーサリング
20,20a,20b 開口部
21 水洗水導入管
22 処理液導入管
23 液面センサ
24 上部開口部
25 被めっき物
26 突起部
27 固定部材
28 外周側壁
29 リング部材
30 めっき液
31 液面(液位)
33 貫通孔
35 中空パイプ
37 ネット状部材
41 水洗水導出管
42 処理液導出管
50 容器
51 めっき液母槽
53 水洗水槽
DESCRIPTION OF SYMBOLS 10 Plating apparatus 11 Cover part 12 Rotary shaft 13 Bottom part 14 Conduction member 15 Plating tank 16 Anode electrode 17 Cathode electrode 18 Bottom plate (base member)
19 spacer ring 20, 20a, 20b opening 21 washing water introduction pipe 22 treatment liquid introduction pipe 23 liquid level sensor 24 upper opening 25 to be plated 26 projection 27 fixed member 28 outer peripheral side wall 29 ring member 30 plating liquid 31 liquid surface (Liquid level)
33 through hole 35 hollow pipe 37 net-like member 41 flush water outlet pipe 42 treatment liquid outlet pipe 50 container 51 plating solution mother tank 53 flush water tank

Claims (7)

略円錐状の蓋部と、外周側壁を有する略円板状の底部とで形成される内部空間に被めっき物およびめっき液を貯留し、水平方向に回転可能なめっき槽と、
前記めっき槽内の略中央に配設された陽極電極と、
前記めっき槽の内周側に露出するとともに前記外周側壁の一部を構成する陰極電極と、
前記蓋部に設けられためっき液を排出する開口部と、
を備えることを特徴とする電子部品のめっき装置。
A plating tank capable of storing an object to be plated and a plating solution in an internal space formed by a substantially conical lid portion and a substantially disc-like bottom portion having outer peripheral side walls, and capable of rotating in the horizontal direction;
An anode electrode disposed substantially at the center of the plating tank;
A cathode electrode exposed on the inner peripheral side of the plating tank and constituting a part of the outer peripheral side wall;
An opening for discharging a plating solution provided in the lid;
An apparatus for plating electronic parts, comprising:
前記開口部は、前記蓋部の下方部の周方向に間隔を置いて複数設けられていることを特徴とする請求項1に記載の電子部品のめっき装置。 The plating apparatus according to claim 1, wherein a plurality of the opening portions are provided at intervals in a circumferential direction of a lower portion of the lid portion. 前記開口部を設けた前記蓋部の下方部は、前記めっき槽の回転時において前記被めっき物が到達しない部位であることを特徴とする請求項2に記載の電子部品のめっき装置。 The plating apparatus according to claim 2, wherein a lower portion of the lid provided with the opening is a portion to which the object to be plated does not reach when the plating tank is rotated. 前記外周側壁の高さを変えることで、前記めっき槽における前記開口部の垂直方向の位置を調整可能としたことを特徴とする請求項3に記載の電子部品のめっき装置。 The apparatus according to claim 3, wherein the vertical position of the opening in the plating tank is adjustable by changing the height of the outer peripheral side wall. 前記開口部は、前記蓋部の傾斜側面下方部に設けた貫通孔であることを特徴とする請求項1から4のいずれか1項に記載の電子部品のめっき装置。 The said opening part is a through-hole provided in the inclined side lower part of the said cover part, The metal-plating apparatus of the electronic component of any one of Claim 1 to 4 characterized by the above-mentioned. 前記開口部は、前記蓋部の傾斜側面下方部に設けた貫通孔に、該蓋部の外側に突出する筒状部材を挿入してなることを特徴とする請求項1から4のいずれか1項に記載の電子部品のめっき装置。 The said opening part inserts the cylindrical member which protrudes in the outer side of this cover part in the through-hole provided in the inclined side lower part of the said cover part, It is characterized by the above-mentioned. The plating apparatus of the electronic component as described in a term. 前記開口部は、前記蓋部の傾斜側面下方部に設けた貫通孔に、該蓋部の外側に突出する筒状部材を挿入するとともに該貫通孔を覆うネット状部材を設けてなることを特徴とする請求項1から4のいずれか1項に記載の電子部品のめっき装置。 The opening has a net-like member for inserting a cylindrical member projecting to the outside of the lid into the through hole provided in the lower part of the inclined side surface of the lid and covering the through hole. The plating apparatus of the electronic component of any one of Claim 1 to 4 made into any one.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110318089A (en) * 2018-03-29 2019-10-11 上村工业株式会社 Rotary surface treatment assembly, the endless member for treatment trough
JP2021075741A (en) * 2019-11-05 2021-05-20 Koa株式会社 Rotary type plating device
JP2021095624A (en) * 2019-12-19 2021-06-24 Koa株式会社 Rotary type plating apparatus and plating method using the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110318089A (en) * 2018-03-29 2019-10-11 上村工业株式会社 Rotary surface treatment assembly, the endless member for treatment trough
JP2021075741A (en) * 2019-11-05 2021-05-20 Koa株式会社 Rotary type plating device
JP7381296B2 (en) 2019-11-05 2023-11-15 Koa株式会社 Rotary plating equipment
JP2021095624A (en) * 2019-12-19 2021-06-24 Koa株式会社 Rotary type plating apparatus and plating method using the same
JP7340441B2 (en) 2019-12-19 2023-09-07 Koa株式会社 Rotary plating equipment and plating method using it

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