JP2018165638A - Hardness testing machine and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hardness testing machine and a program capable of improving an accuracy of the measurement result by accurately extracting a recess from a measurement image.SOLUTION: A hardness testing machine includes: background image acquisition means (CPU61) for acquiring a background image before a recess is formed; preparing means (CPU61) for splitting the back ground image into a plurality of blocks and preparing a histogram of luminance information for each split block; measurement image acquisition means (CPU61) for acquiring the measurement image after the recess is formed; determination means (CPU61) for splitting the measurement image into the plurality of blocks and referring to a histogram prepared in the block inside the background image corresponding to the block including the pixel for every pixel in each split block and determining a likelihood of the background image of the pixel; extraction means (CPU61) for extracting a recess image based on a determination result; and hardness calculating means (CPU61) for calculating a hardness of a sample based on the recess image.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a hardness tester and a program.

  Conventionally, a hardness tester that measures the hardness of a sample based on the size of a recess formed by pressing an indenter against the sample (work) with a predetermined test force is known. For example, the Vickers hardness tester measures the diagonal length of a depression formed by pressing a square pyramid indenter into the surface of the sample, and calculates the hardness based on the measured diagonal length of the depression. .

  In the hardness tester described above, first, before forming a dent in the sample (before embossing), the surface of the sample is imaged to obtain a background image G101 (see FIG. 12A) to form a dent in the sample. Then, after subtracting (after embossing), the background image G101 is subtracted from the measurement image G102 (see FIG. 12B) obtained by imaging the surface of the sample to obtain a differential image G103 (see FIG. 12C) A technique for measuring the vertex position of a dent by performing processing (background difference processing) is known (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 9-210893

  However, since the technique described in Patent Document 1 uses the luminance information as it is, the imaging unit (imaging region) is captured when the measurement image G102 is captured as the imaging unit moves before and after forming the depression in the sample. Misalignment may occur. If the position of the imaging unit is shifted when the measurement image G102 is captured, noise remains in the difference image G104 (see FIG. 12D) obtained by subtracting the background image G101 from the measurement image G102, so that the dent is accurately There is a problem in that it cannot be extracted well and adversely affects the measurement of the vertex position.

  An object of this invention is to provide the hardness tester and program which can extract a hollow from a measurement image accurately, and can improve the precision of a measurement result.

The invention described in claim 1 has been made to achieve the above object,
In a hardness tester that measures the hardness of a sample by applying a predetermined test force to the surface of the sample with an indenter to form a recess and measuring the size of the recess,
Background image acquisition means for acquiring, as a background image, an image of the surface of the sample imaged by the imaging means before the depression is formed;
Creating means for dividing the background image obtained by the background image obtaining means into a plurality of blocks and creating a histogram of luminance information for each of the divided blocks;
Measurement image acquisition means for acquiring, as a measurement image, an image of the surface of the sample imaged by the imaging means after the depression has been formed;
The measurement image acquired by the measurement image acquisition unit is divided into the plurality of blocks, and each pixel in each divided block is created in the block in the background image corresponding to the block including the pixel. Determining means for referring to the histogram to determine the likelihood of the background image of the pixel;
Extraction means for extracting a hollow image based on the determination result by the determination means;
A hardness calculating means for calculating the hardness of the sample based on the indentation image extracted by the extracting means;
It is characterized by providing.

The invention according to claim 2 is the hardness tester according to claim 1,
The extraction means extracts the indentation image based on the background image likelihood of each pixel and the background image likelihood of the peripheral pixels of each pixel.

The invention according to claim 3 is the hardness tester according to claim 1 or 2,
The creating means creates the RGB three-dimensional histogram for each of the divided blocks.

The invention according to claim 4 is the hardness tester according to any one of claims 1 to 3,
The creating unit divides the background image into a plurality of first blocks, and further divides the background image into a plurality of second blocks shifted by a half block, and a histogram of luminance information for each of the divided first blocks and second blocks. make,
The determination unit divides the measurement image into the plurality of first blocks, and further divides the measurement image into the plurality of second blocks with a half block shift, and for each pixel in each of the divided first blocks and second blocks. In addition, referring to a histogram created in the first block or the second block in the background image corresponding to the first block or the second block in which the pixel is included, determining the likelihood of the background image of the pixel Features.

The invention described in claim 5
A hardness tester computer that measures the hardness of the sample by applying a predetermined test force to the surface of the sample with an indenter to form a dent and measuring the size of the dent.
Background image acquisition means for acquiring, as a background image, an image of the surface of the sample imaged by the imaging means before the depression is formed;
Creating means for dividing the background image obtained by the background image obtaining means into a plurality of blocks and creating a histogram of luminance information for each of the divided blocks;
Measurement image acquisition means for acquiring, as a measurement image, an image of the surface of the sample imaged by the imaging means after the depression is formed;
The measurement image acquired by the measurement image acquisition unit is divided into the plurality of blocks, and each pixel in each divided block is created in the block in the background image corresponding to the block including the pixel. Determining means for determining the likelihood of the background image of the pixel with reference to the histogram;
Extraction means for extracting a hollow image based on the determination result by the determination means;
Hardness calculation means for calculating the hardness of the sample based on the indentation image extracted by the extraction means;
It is a program to make it function as.

  According to the present invention, it is possible to accurately extract a recess from a measurement image and improve the accuracy of a measurement result.

It is a perspective view which shows the whole structure of the hardness tester based on this invention. It is a schematic diagram which shows the testing machine main body of the hardness testing machine which concerns on this invention. It is a schematic diagram which shows the hardness measurement part of the hardness tester which concerns on this invention. It is a block diagram which shows the control structure of the hardness tester which concerns on this invention. It is a flowchart which shows operation | movement of the hardness tester based on this invention. It is a figure which shows an example of a background image. It is a figure which shows an example of a mode that the background image was divided | segmented into the some block. It is a figure which shows an example of a measurement image. It is a figure which shows an example of a mode that the measurement image was divided | segmented into the some block. It is a figure which shows an example of the extraction image containing the hollow image extracted from the measurement image. It is a figure which shows an example of a mode that the background image was further divided into a plurality of blocks after being divided by a half block after being divided into a plurality of blocks. It is a figure which shows the conventional background difference process.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following description, the X direction in FIG. 1 is the left-right direction, the Y direction is the front-back direction, and the Z direction is the up-down direction. The XY plane is a horizontal plane.

[1. Description of configuration]
The hardness tester 100 is, for example, a Vickers hardness tester in which the planar shape of the indenter 14a (see FIG. 3) is formed in a rectangular shape. As shown in FIGS. 1 to 4, the hardness tester 100 includes a tester main body 10, a control unit 6, an operation unit 7, and a monitor 8.

  As shown in FIG. 2, the test machine body 10 includes a hardness measurement unit 1 that measures the hardness of the sample S, a sample table 2 on which the sample S is placed, an XY stage 3 that moves the sample table 2, An AF stage 4 for focusing on the surface of the sample S and an elevating mechanism unit 5 for elevating and lowering the sample stage 2 (XY stage 3 and AF stage 4) are provided.

  As shown in FIG. 3, the hardness measuring unit 1 includes an illumination device 11 that illuminates the surface of the sample S, a CCD camera 12 that images the surface of the sample S, an indenter shaft 14 including an indenter 14a, and an objective lens 15. And a turret 16 capable of switching between the indenter shaft 14 and the objective lens 15 by rotating.

  The illumination device 11 illuminates the surface of the sample S by irradiating light. The light emitted from the illumination device 11 reaches the surface of the sample S via the lens 1a, the half mirror 1d, the mirror 1e, and the objective lens 15.

The CCD camera 12 is based on the reflected light input from the surface of the sample S through the objective lens 15, the mirror 1e, the half mirror 1d, the mirror 1g, and the lens 1h, and the surface of the sample S by the indenter 14a. Image data is obtained by imaging the indentation formed on the surface. Then, the CCD camera 12 outputs the acquired image data to the control unit 6 via a frame grabber 17 capable of simultaneously storing and storing a plurality of frames of image data.
That is, the CCD camera 12 functions as an imaging unit of the present invention.

  The indenter shaft 14 is moved toward the sample S placed on the sample stage 2 by a load mechanism unit (not shown) driven in accordance with a control signal output from the control unit 6, and an indenter 14a provided at the distal end portion. Is pressed against the surface of the sample S with a predetermined test force. In the present embodiment, a Vickers quadrangular pyramid indenter (with a facing angle of 136 ± 0.5 °) is used as the indenter 14a.

  The objective lens 15 is a condensing lens having different magnifications, and a plurality of objective lenses 15 are held on the lower surface of the turret 16. The objective lens 15 is disposed above the sample S by the rotation of the turret 16 so that the surface of the sample S is uniformly irradiated with the light irradiated from the illumination device 11.

  The turret 16 is configured such that an indenter shaft 14 and a plurality of objective lenses 15 can be attached to the lower surface. The turret 16 is configured such that any one of the indenter shaft 14 and the plurality of objective lenses 15 can be disposed above the sample S by rotating around the Z-axis direction. That is, a depression can be formed on the surface of the sample S by disposing the indenter shaft 14 above the sample S, and a depression formed by arranging the objective lens 15 above the sample S can be observed. It can be done.

The sample stage 2 fixes the sample S placed on the upper surface by the sample fixing part 2a.
The XY stage 3 is driven by a drive mechanism unit (not shown) that is driven in accordance with a control signal output from the control unit 6, and the sample stage 2 is moved in a direction (X, Y) perpendicular to the moving direction (Z direction) of the indenter 14a. Direction).
The AF stage 4 is driven according to a control signal output from the control unit 6 and focuses the surface of the sample S by moving the sample table 2 up and down finely based on image data captured by the CCD camera 12.
The lifting mechanism unit 5 is driven according to a control signal output from the control unit 6, and moves the sample table 2 (XY stage 3, AF stage 4) in the Z direction, so that the sample table 2 and the objective lens 15 are moved. Change the relative distance between.

The operation unit 7 includes a keyboard 71 and a mouse 72, and accepts an input operation by a user when performing a hardness test. When the operation unit 7 accepts a predetermined input operation by the user, the operation unit 7 generates a predetermined operation signal corresponding to the input operation and outputs it to the control unit 6.
Specifically, the operation unit 7 receives an operation in which the user selects a condition for determining the in-focus position of the depression.
In addition, the operation unit 7 receives an operation in which the user designates a range in which the sample table 2 (the lifting mechanism unit 5 and the AF stage 4) moves (range of relative distance between the sample table 2 and the objective lens 15). .
In addition, the operation unit 7 receives an operation in which a user inputs a test condition value when performing a hardness test by the hardness tester 100. The input test condition value is transmitted to the control unit 6. Here, the test condition values are values such as the material of the sample S, the test force (N) applied to the sample S by the indenter 14a, the magnification of the objective lens 15, and the like.
In addition, the operation unit 7 accepts an operation in which the user selects either the manual mode in which the determination of the in-focus position of the depression is manually performed or the automatic mode in which the depression is automatically performed.
In addition, the operation unit 7 receives an operation of programming a test position when the user performs a hardness test.

  The monitor 8 is configured by a display device such as an LCD, for example. The monitor 8 displays the hardness test setting conditions inputted in the operation unit 7, the result of the hardness test, and the surface of the sample S imaged by the CCD camera 12 and the image of the depression formed on the surface of the sample S. To do.

  As shown in FIG. 4, the control unit 6 includes a CPU 61, a RAM 62, and a storage unit 63, and a predetermined hardness stored by executing a predetermined program stored in the storage unit 63. It has a function of performing operation control and the like for performing tests.

The CPU 61 reads the processing program stored in the storage unit 63, develops it in the RAM 62, and executes it, thereby controlling the entire hardness tester 100.
The RAM 62 develops the processing program executed by the CPU 61 in the program storage area in the RAM 62, and stores the input data and the processing result generated when the processing program is executed in the data storage area.
The storage unit 63 includes, for example, a recording medium (not shown) that stores programs, data, and the like, and this recording medium is configured by a semiconductor memory or the like. In addition, the storage unit 63 stores various data, various processing programs, data processed by executing these programs, and the like for realizing the function of the CPU 61 controlling the entire hardness tester 100.

[2. Explanation of operation]
Next, the operation of the hardness tester 100 according to the present embodiment will be described with reference to the flowchart of FIG. This process is started, for example, when the CPU 61 detects a hardness test start operation by the operator via the operation unit 7.

First, the CPU 61 acquires an image (background image) of the surface of the sample S (step S101). That is, the CPU 61 functions as background image acquisition means of the present invention.
Specifically, first, the CPU 61 rotates the turret 16 to place the objective lens 15 at a predetermined position facing the sample S. Next, the CPU 61 raises and lowers the elevating mechanism unit 5 and the AF stage 4 based on the image captured by the CCD camera 12 via the objective lens 15 and performs focusing on the surface of the sample S. Then, the CPU 61 causes the CCD camera 12 to image the surface of the sample S, and acquires an image of the surface of the sample S output from the CCD camera 12. Then, the CPU 61 causes the monitor 8 to display the acquired image of the surface of the sample S. FIG. 6 shows an example of the background image G1 acquired in step S101.

  Next, the CPU 61 divides the background image G1 acquired in step S101 into a plurality of blocks (step S102). FIG. 7 shows an example of how the background image G1 is divided into a plurality of blocks B1. For example, in the example shown in FIG. 7, the background image G1 is divided into 6 × 6 = 36 blocks B1.

  Next, the CPU 61 creates a histogram of luminance information for each block divided in step S102 (step S103). That is, the CPU 61 functions as a creation unit of the present invention. Here, the histogram shows the number (appearance frequency) of each luminance value (gradation value) in the region. For example, the CPU 61 divides RGB into 64 gradations for each block divided in step S102, and creates a 64 * 64 * 64 three-dimensional histogram.

Next, the CPU 61 forms a dent on the surface of the sample S by the indenter 14a (step S104).
Specifically, first, the CPU 61 rotates the turret 16 to place the indenter shaft 14 at a predetermined position facing the sample S instead of the objective lens 15. Then, the CPU 61 drives the load mechanism portion (not shown) to lower the indenter shaft 14, and forms a recess on the surface of the sample S by the indenter 14 a provided at the tip of the indenter shaft 14.

  Next, the CPU 61 obtains an image (measurement image) of the surface of the sample S on which the depression is formed in step S104 (step S105). That is, the CPU 61 functions as a measurement image acquisition unit of the present invention. FIG. 8 shows an example of the measurement image G2 acquired in step S105.

  Next, the CPU 61 divides the measurement image G2 acquired in step S105 into a plurality of blocks (step S106). In step S106, the CPU 61 divides the measurement image G2 in the same division format as the background image G1. FIG. 9 shows an example of a state in which the measurement image G2 is divided into a plurality of blocks B1. For example, in the example shown in FIG. 9, the measurement image G2 is divided into 6 × 6 = 36 blocks B1 like the background image G1 shown in FIG.

  Next, for each pixel in each block B1 divided in step S106, the CPU 61 refers to the histogram created in the block B1 in the background image G1 corresponding to the block B1 including the pixel, and The background image likelihood is determined (step S107). That is, the CPU 61 functions as a determination unit of the present invention. For example, when the frequency of the histogram is large in the luminance value of the pixel to be determined, the CPU 61 determines that the value of the background image is high, and when the frequency of the histogram is small, the value of the background image is low. Judgment. In step S107, the background image likelihood is determined probabilistically, for example, and is output as a value between 0 (0%) and 1.0 (100%).

Next, the CPU 61 determines whether each pixel is a hollow image that is a background image based on the determination result of step S107, and extracts the hollow image (step S108). That is, the CPU 61 functions as the extraction unit of the present invention. For example, using a predetermined threshold value, the CPU 61 considers that the background image is a background image when the background image likelihood is equal to or greater than the threshold value, and determines that the background image is a hollow image when the background image likelihood is less than the threshold value. Try to take a look. FIG. 10 shows an example of the extracted image G3 including the hollow image G31 extracted in step S108.
With the above processing, even if the CCD camera 12 (imaging area) is displaced when the measurement image G2 is captured, only the recessed image G31 can be extracted with high accuracy.

  Next, the CPU 61 extracts a dent measurement vertex for measuring the size of the dent formed on the surface of the sample S based on the dent image G31 extracted in step S108 (step S109). In addition, a conventionally well-known technique can be used about the process which extracts the vertex for hollow measurement.

  Next, the CPU 61 refers to the coordinate value of the vertex for depression measurement extracted in step S109, measures the diagonal length of the depression, and calculates the hardness of the sample S based on the measured diagonal length ( Step S110). That is, the CPU 61 functions as a hardness calculation unit of the present invention. Thereafter, the CPU 61 controls the monitor 8 to display the hardness of the sample S calculated in step S110.

[3. effect]
As described above, the hardness tester 100 according to this embodiment acquires a background image by acquiring, as a background image, the surface image of the sample S imaged by the imaging means (CCD camera 12) before the depression is formed. Means (CPU 61), a creation means (CPU 61) for dividing the background image acquired by the background image acquisition means into a plurality of blocks, and creating a histogram of luminance information for each of the divided blocks, and after the depression is formed A measurement image acquisition unit (CPU 61) that acquires an image of the surface of the sample S imaged by the imaging unit as a measurement image, and a measurement image acquired by the measurement image acquisition unit is divided into a plurality of blocks, and each of the divided blocks For each pixel in the image, refer to the histogram created in the block in the background image corresponding to the block containing the pixel, A determination unit (CPU 61) for determining the likelihood of the background image of the pixel, an extraction unit (CPU 61) for extracting a dent image based on a determination result by the determination unit, and a sample based on the dent image extracted by the extraction unit Hardness calculation means (CPU 61) for calculating the hardness of S.
Therefore, according to the hardness tester 100 according to the present embodiment, the dent can be extracted from the measurement image with high accuracy, so that the vertex position of the dent can be extracted with high accuracy, and the accuracy of the measurement result is improved. Can be made.

Further, according to the hardness tester 100 according to the present embodiment, the creation unit creates an RGB three-dimensional histogram for each divided block.
Therefore, according to the hardness tester 100 according to the present embodiment, since the luminance value of each pixel can be analyzed in detail, it becomes possible to extract the indent from the measurement image with higher accuracy, and to improve the accuracy of the measurement result. It can be improved further.

  As mentioned above, although concretely demonstrated based on embodiment which concerns on this invention, this invention is not limited to the said embodiment, It can change in the range which does not deviate from the summary.

[4. Modified example]
For example, in the above-described embodiment, when the hollow image is extracted in step S108 of FIG. 5, the extraction is performed based on the background image likeness of each pixel. However, the present invention is not limited to this. For example, in addition to the background image likeness of each pixel, the indentation image may be extracted in consideration of the background image likeness of surrounding pixels of each pixel. That is, when a certain pixel is a hollow image, it is natural that there is a high possibility that the peripheral pixel is also a hollow image. Therefore, the hollow image can be extracted with higher accuracy by adding information on the peripheral pixels.

  As described above, the extraction unit (CPU 61) extracts the indentation image based on the background image likelihood of each pixel and the background image appearance of the peripheral pixels of each pixel, thereby removing the indentation from the measurement image. It is possible to extract with high accuracy, and the accuracy of the measurement result can be further improved.

  In the above embodiment, when creating a histogram in step S103 of FIG. 5, an RGB three-dimensional histogram is created. However, the present invention is not limited to this. For example, instead of creating an RGB three-dimensional histogram, a monochrome one-dimensional histogram may be created.

  In the above-described embodiment, the background image G1 and the measurement image G2 are each divided into a plurality of blocks B1, and various subsequent processes are performed. However, the present invention is not limited to this. For example, as shown in FIG. 11, the background image G1 and the measurement image G2 (in FIG. 11, the measurement image G2 is omitted) are each divided into a plurality of blocks B1, and further divided by a half block and divided into a plurality of blocks B2. You may make it do.

In this case, in step S102 and step S103, the CPU 61 divides the background image G1 into a plurality of first blocks (block B1), and further divides the background image G1 into a plurality of second blocks (block B2) by shifting by half a block. A histogram of luminance information is created for each divided first block and second block. In step S106 and step S107, the CPU 61 divides the measurement image G2 into a plurality of first blocks (block B1), and further divides the measurement image G2 into a plurality of second blocks (block B2) by shifting by half a block. For each pixel in each of the first block and the second block, refer to the histogram created in the first block or the second block in the background image G1 corresponding to the first block or the second block including the pixel. Then, the background image likelihood of the pixel is determined.
Then, the CPU 61 integrates the process using the block B1 by the initial block division and the process using the block B2 by the block division performed by shifting by half a block by the max process, thereby affecting the influence of the block boundary. Can be avoided.

  As described above, after the background image G1 and the measurement image G2 are each divided into a plurality of blocks B1, and further divided by a half block and divided into a plurality of blocks B2, the influence of block boundaries can be avoided. It becomes possible to extract the indent from the measurement image with higher accuracy, and the accuracy of the measurement result can be further improved.

  Moreover, each aspect shown in this application can also be grasped | ascertained as a method, a program, etc. For the method and program categories, “means” shown in the device category is appropriately replaced with “process” or “step”, for example. In addition, the order of processes and steps is not limited to the one directly specified in the present application, and the order can be changed, or a part of processes can be collectively or changed to be executed one by one at any time.

  In addition, the detailed configuration of each device constituting the hardness tester and the detailed operation of each device can be changed as appropriate without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 100 Hardness testing machine 10 Testing machine main body 1 Hardness measurement part 11 Illumination device 12 CCD camera (imaging means)
14 Indenter shaft 14a Indenter 15 Objective lens 16 Turret 17 Frame grabber 2 Sample stage 3 XY stage 4 AF stage 5 Lifting mechanism unit 6 Control unit 61 CPU (background image acquisition unit, creation unit, measurement image acquisition unit, determination unit, extraction unit) , Hardness calculation means)
62 RAM
63 Storage unit 7 Operation unit 8 Monitor S Sample G1 Background image G2 Measurement image G3 Extracted image G31 Recessed image

Claims (5)

In a hardness tester that measures the hardness of a sample by applying a predetermined test force to the surface of the sample with an indenter to form a recess and measuring the size of the recess,
Background image acquisition means for acquiring, as a background image, an image of the surface of the sample imaged by the imaging means before the depression is formed;
Creating means for dividing the background image obtained by the background image obtaining means into a plurality of blocks and creating a histogram of luminance information for each of the divided blocks;
Measurement image acquisition means for acquiring, as a measurement image, an image of the surface of the sample imaged by the imaging means after the depression has been formed;
The measurement image acquired by the measurement image acquisition unit is divided into the plurality of blocks, and each pixel in each divided block is created in the block in the background image corresponding to the block including the pixel. Determining means for referring to the histogram to determine the likelihood of the background image of the pixel;
Extraction means for extracting a hollow image based on the determination result by the determination means;
A hardness calculating means for calculating the hardness of the sample based on the indentation image extracted by the extracting means;
A hardness tester comprising:   2. The hardness according to claim 1, wherein the extraction unit extracts the hollow image based on the background image-likeness of each pixel and the background-imagelikeness of a peripheral pixel of each pixel. testing machine.   The hardness tester according to claim 1, wherein the creating unit creates the three-dimensional RGB histogram for each of the divided blocks. The creating unit divides the background image into a plurality of first blocks, and further divides the background image into a plurality of second blocks shifted by a half block, and a histogram of luminance information for each of the divided first blocks and second blocks. make,
The determination unit divides the measurement image into the plurality of first blocks, and further divides the measurement image into the plurality of second blocks with a half block shift, and for each pixel in each of the divided first blocks and second blocks. In addition, referring to a histogram created in the first block or the second block in the background image corresponding to the first block or the second block in which the pixel is included, determining the likelihood of the background image of the pixel The hardness tester according to claim 1, wherein the hardness tester is characterized in that A hardness tester computer that measures the hardness of the sample by applying a predetermined test force to the surface of the sample with an indenter to form a dent and measuring the size of the dent.
Background image acquisition means for acquiring, as a background image, an image of the surface of the sample imaged by the imaging means before the depression is formed;
Creating means for dividing the background image obtained by the background image obtaining means into a plurality of blocks and creating a histogram of luminance information for each of the divided blocks;
Measurement image acquisition means for acquiring, as a measurement image, an image of the surface of the sample imaged by the imaging means after the depression is formed;
The measurement image acquired by the measurement image acquisition unit is divided into the plurality of blocks, and each pixel in each divided block is created in the block in the background image corresponding to the block including the pixel. Determining means for determining the likelihood of the background image of the pixel with reference to the histogram;
Extraction means for extracting a hollow image based on the determination result by the determination means;
Hardness calculation means for calculating the hardness of the sample based on the indentation image extracted by the extraction means;
Program to function as.

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