JP2018164118A - Substrate processing apparatus and substrate processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reliably replace a cleaning water on the substrate surface with a volatile solvent to effectively prevent pattern collapse during drying of a substrate and to improve the productivity of the substrate.SOLUTION: A substrate processing apparatus 10 includes moisture removal means 110, and when a volatile solvent is supplied to the surface of a substrate W by a solvent supply unit 58, the moisture removal means 110 supplies a moisture removing agent to the surface of the substrate W, and promotes replacement of washing water on the surface of the substrate W with the volatile solvent.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a substrate processing apparatus and a substrate processing method.

  A substrate processing apparatus supplies a processing liquid to the surface of a substrate such as a wafer or a liquid crystal substrate in a manufacturing process of a semiconductor or the like to process the substrate surface, and then supplies cleaning water such as ultrapure water to the substrate surface. This is an apparatus for cleaning the substrate surface and drying it. In this drying process, there is a problem that, for example, a pattern around a memory cell on a substrate and a gate collapses due to miniaturization associated with high integration and high capacity of a semiconductor in recent years. This is due to the spacing and structure between patterns, the surface tension of cleaning water, and the like. When the patterns are attracted to each other due to the surface tension of the cleaning water remaining between the patterns when the substrate is dried, the patterns collapse elastically and cause pattern collapse.

  Therefore, a substrate drying method using IPA (2-propanol: isopropyl alcohol) whose surface tension is smaller than that of ultrapure water has been proposed for the purpose of suppressing the above-described pattern collapse (see, for example, Patent Document 1). ), A method of drying the substrate by substituting the ultrapure water on the substrate surface with IPA is used in a mass production factory or the like.

JP 2008-34779 A

  However, in the prior art, it is difficult to sufficiently replace the cleaning water supplied to the surface of the substrate with a volatile solvent such as IPA having a low surface tension, and pattern collapse when the substrate is dried cannot be effectively prevented. . This pattern collapse becomes prominent as semiconductors become finer.

  An object of the present invention is to reliably replace the cleaning water on the substrate surface with a volatile solvent to effectively prevent pattern collapse when the substrate is dried.

A substrate processing apparatus according to the present invention comprises:
A cleaning water supply unit for supplying cleaning water to the surface of the substrate;
A substrate processing apparatus having a solvent supply unit for supplying a volatile solvent to the surface of the substrate supplied with the cleaning water and replacing the cleaning water on the surface of the substrate with a volatile solvent,
Having water removal means,
When the volatile solvent is supplied to the surface of the substrate by the solvent supply unit, the moisture removing means supplies a moisture removing agent to the surface of the substrate and promotes replacement of the cleaning water on the surface of the substrate with the volatile solvent. It is what I did.

The substrate processing method according to the present invention comprises:
Supplying cleaning water to the surface of the substrate;
A substrate processing method comprising: supplying a volatile solvent to the surface of the substrate supplied with the cleaning water, and replacing the cleaning water on the surface of the substrate with a volatile solvent,
When a volatile solvent is supplied to the surface of the substrate, a moisture removing agent is supplied to the surface of the substrate using a moisture removing means to promote replacement of cleaning water on the surface of the substrate with a volatile solvent. Is.

  According to the substrate processing apparatus and the substrate processing method of the present invention, it is possible to effectively replace the cleaning water on the surface of the substrate with a volatile solvent, and to effectively prevent pattern collapse when the substrate is dried.

FIG. 1 is a schematic view showing a substrate processing apparatus. FIG. 2 is a schematic diagram showing the configuration of the substrate cleaning chamber in the substrate processing apparatus. FIG. 3 is a schematic diagram showing a state of replacement of cleaning water on the substrate surface. FIG. 4 is a schematic diagram showing the configuration of the substrate drying chamber in the substrate processing apparatus. FIG. 5 is a schematic diagram showing the configuration of the transfer means in the substrate processing apparatus. FIG. 6 is a schematic view showing a modification of the moisture removing means. FIG. 7 is a schematic diagram showing a modification of the moisture removing means. FIG. 8 is a schematic view showing a drying state of the volatile solvent on the substrate surface.

  As shown in FIG. 1, the substrate treatment apparatus 10 includes a substrate supply / discharge unit 20, a substrate storage buffer unit 30, and a plurality of substrate processing chambers 40, and the substrate supply / discharge unit 20 and the substrate storage buffer unit 30. The transfer robot 11 is provided between the substrate storage buffer unit 30 and the substrate processing chamber 40. Here, the substrate processing chamber 40 includes a set of a substrate cleaning chamber 50 and a substrate drying chamber 70 as described later.

  The substrate supply / discharge unit 20 can carry in and out a plurality of substrate storage cassettes 21. The substrate storage cassette 21 stores a plurality of substrates W such as unprocessed wafers and liquid crystal substrates and carries them into the substrate supply / discharge unit 20. The substrate storage cassette 21 stores the substrate W processed in the substrate processing chamber 40 and carries it out of the substrate supply / discharge unit 20. Unprocessed substrates W are sequentially taken out from the storage shelves in multiple stages in the substrate storage cassette 21 in the substrate supply / discharge unit 20 by the transport robot 11 and supplied to an in-dedicated buffer 31 (to be described later) of the substrate storage buffer unit 30. Is done. The unprocessed substrate W supplied to the in-dedicated buffer 31 is further taken out by the transfer robot 12 and supplied to the substrate cleaning chamber 50 of the substrate processing chamber 40 to be cleaned. The substrate W cleaned in the substrate cleaning chamber 50 is transferred from the substrate cleaning chamber 50 to the substrate drying chamber 70 by the transfer robot 12 and dried. The processed substrate W is taken out from the substrate drying chamber 70 by the transfer robot 12 and is put into an out-only buffer 32 (to be described later) of the substrate storage buffer unit 30 to be temporarily stored. The substrates W temporarily stored in the out-only buffer 32 of the substrate storage buffer unit 30 are taken out by the transport robot 11 and sequentially discharged to an empty storage shelf of the substrate storage cassette 21 in the substrate supply / discharge unit 20. The substrate storage cassette 21 filled with the processed substrate W is carried out from the substrate supply / discharge unit 20.

  As shown in FIG. 5, the substrate storage buffer unit 30 includes a plurality of in-dedicated buffers 31 for storing unprocessed substrates W, which are provided in a multi-tiered shelf shape, and are cleaned and dried in the substrate processing chamber 40. A plurality of out-only buffers 32 for storing the substrates W are provided in a multi-tiered shelf shape. Inside the out-only buffer 32, cooling means for cooling the substrate W being temporarily stored can be provided. The in-dedicated buffer 31 and the out-dedicated buffer 32 do not have to be multistage.

  The substrate processing chamber 40 has a pair of substrate cleaning chamber 50 and substrate drying chamber 70 around (or on both sides) of the transfer robot 12 positioned at the moving end near the substrate processing chamber 40 separated from the substrate storage buffer 30. The substrates W cleaned in the same set of substrate cleaning chambers 50 are transferred to the same set of substrate drying chambers 70 for drying. In the substrate processing chamber 40, when the cleaning operation time in the substrate cleaning chamber 50 is N, and the drying operation time in the substrate drying chamber 70 is 1, each of the substrate cleaning chamber 50 and the substrate drying chamber 70 forming a set The number of installations i and j is set so that i to j = N to 1. As a result, when all the substrate cleaning chambers 50 and the substrate drying chamber 70 forming a set in the substrate processing chamber 40 are operated in parallel in the same time zone, the subsequent substrates W are cleaned in those substrate cleaning chambers 50. It is intended to make the production amount to be substantially equal to the production amount in which the preceding substrate W cleaned in the substrate cleaning chamber 50 is dried in the substrate drying chamber 70.

  In the substrate processing chamber 40 according to the present embodiment, a substrate cleaning chamber 50 and a substrate drying chamber 70 forming a set are arranged on each of a plurality of levels, for example, three levels, and the cleaning operation time in the substrate cleaning chamber 50 is N = 3. In this case, since the drying operation time in the substrate drying chamber 70 is 1, i = 3 substrate cleaning chambers 50 and j = 1 substrate drying chambers 70 are installed in each level.

Hereinafter, the substrate cleaning chamber 50 and the substrate drying chamber 70 constituting the substrate processing chamber 40 will be described in detail.
As shown in FIG. 2, the substrate cleaning chamber 50 includes a processing box 51 serving as a processing chamber, a cup 52 provided in the processing box 51, and a table 53 that supports the substrate W in a horizontal state in the cup 52. The rotating mechanism 54 that rotates the table 53 in a horizontal plane and the solvent suction / discharging unit 55 that moves up and down around the table 53 are provided. Further, the substrate cleaning chamber 50 includes a chemical solution supply unit 56 that supplies a chemical solution to the surface of the substrate W on the table 53, a cleaning water supply unit 57 that supplies cleaning water to the surface of the substrate W on the table 53, and volatility. A solvent supply unit 58 that supplies a solvent and a control unit 60 that controls each unit are provided.

  In the processing box 51, a substrate loading / unloading port 51A is opened in a part of the peripheral wall. The substrate loading / unloading port 51A is opened and closed by a shutter 51B.

  The cup 52 is formed in a cylindrical shape, and encloses the table 53 from the periphery and accommodates it inside. The upper portion of the peripheral wall of the cup 52 has a diameter that is obliquely upward and opens so that the substrate W on the table 53 is exposed upward. The cup 52 receives a chemical solution or cleaning water that has flowed down or scattered from the rotating substrate W. A discharge pipe (not shown) for discharging the received chemical solution and washing water is provided at the bottom of the cup 52.

  The table 53 is positioned near the center of the cup 52 and is provided so as to be rotatable in a horizontal plane. The table 53 has a plurality of support members 53A such as pins, and these support members 53A hold a substrate W such as a wafer or a liquid crystal substrate in a detachable manner.

  The rotating mechanism 54 includes a rotating shaft coupled to the table 53, a motor (not shown) serving as a driving source for rotating the rotating shaft, and the like. The table is driven by the motor via the rotating shaft. 53 is rotated. The rotation mechanism 54 is electrically connected to the control unit 60, and the driving thereof is controlled by the control unit 60.

  The solvent suction / discharge unit 55 includes a solvent suction port 55 </ b> A that surrounds the table 53 and opens in an annular shape. The solvent suction / discharge unit 55 has a lifting mechanism (not shown) that lifts and lowers the solvent suction port 55 </ b> A, a standby position where the solvent suction port 55 </ b> A is positioned below the table surface of the table 53, and the substrate W held on the table 53. The solvent suction port 55A is moved up and down to a work position where the solvent suction port 55A is positioned around The solvent suction port 55A sucks and receives the volatile solvent scattered from the rotating substrate W. The solvent suction port 55A has an exhaust fan or vacuum pump (not shown) for sucking the volatile solvent, and a discharge pipe (not shown) for discharging the volatile solvent received by suction. It is connected.

  The chemical solution supply unit 56 includes a nozzle 56A that discharges the chemical solution from an oblique direction with respect to the surface of the substrate W on the table 53. The chemical solution, for example, organic substance removal is performed on the surface of the substrate W on the table 53 from the nozzle 56A. APM for treatment (a mixture of ammonia water and hydrogen peroxide solution) is supplied. The nozzle 56 </ b> A is mounted on the upper portion of the peripheral wall of the cup 52, and its angle, discharge flow rate, and the like are adjusted so that the chemical solution is supplied near the center of the surface of the substrate W. The chemical solution supply unit 56 is electrically connected to the control unit 60, and the driving thereof is controlled by the control unit 60. The chemical solution supply unit 56 includes a tank that stores the chemical solution, a pump that is a drive source, a valve that is an adjustment valve that adjusts the supply amount (none of which is shown), and the like.

  The cleaning water supply unit 57 includes a nozzle 57A that discharges cleaning water from an oblique direction with respect to the surface of the substrate W on the table 53. The cleaning water is supplied to the surface of the substrate W on the table 53 from the nozzle 57A. For example, pure water (ultra pure water) for cleaning treatment is supplied. Note that the cleaning liquid supplied by the cleaning liquid supply unit 57 may be functional water such as ozone water. The nozzle 57 </ b> A is mounted on the upper part of the peripheral wall of the cup 52, and its angle, discharge flow rate, and the like are adjusted so that cleaning water is supplied near the center of the surface of the substrate W. The washing water supply unit 57 is electrically connected to the control unit 60, and its driving is controlled by the control unit 60. The cleaning water supply unit 57 includes a tank for storing cleaning water, a pump as a driving source, a valve (not shown) as an adjustment valve for adjusting the supply amount, and the like.

  The solvent supply unit 58 includes a nozzle 58 </ b> A that discharges a volatile solvent from an oblique direction with respect to the surface of the substrate W on the table 53, and the volatile solvent is formed on the surface of the substrate W on the table 53 from the nozzle 58 </ b> A. For example, IPA is supplied. The solvent supply unit 58 supplies a volatile solvent to the surface of the substrate W cleaned with the cleaning water supplied from the cleaning water supply unit 57, and replaces the cleaning water on the surface of the substrate W with a volatile solvent. The nozzle 58 </ b> A is mounted on the upper part of the peripheral wall of the cup 52, and the angle, discharge flow rate, and the like are adjusted so that the volatile solvent is supplied near the center of the surface of the substrate W. The solvent supply unit 58 is electrically connected to the control unit 60, and the driving thereof is controlled by the control unit 60. The solvent supply unit 58 includes a tank that stores a volatile solvent, a pump that is a driving source, a valve that is an adjustment valve that adjusts the supply amount (none of which is shown), and the like.

  Here, in addition to IPA, for example, monovalent alcohols such as ethanol, ethers such as diethyl ether and ethyl methyl ether, ethylene carbonate, and the like can be used as the volatile solvent. . The volatile solvent is preferably soluble in water.

  The solvent supply unit 58 includes the solvent supply tank 101 shown in FIG. 2. For example, IPA is introduced into the solvent supply tank 101 via the flow rate adjustment valve 102 and the flow meter 103. The IPA stored in the solvent supply tank 101 is supplied to the substrate W from the nozzle 58A of the solvent supply unit 58 via the filter 106, the flow rate adjusting valve 107, and the flow meter 108 by driving the pump 105 provided in the solvent supply line 104. Discharged on the surface. Reference numeral 109 denotes a return valve when IPA is not discharged from the nozzle 58A. The control unit 60 controls the flow rate adjustment valve 102, the pump 105, the flow rate adjustment valve 107, and the like, and discharges an appropriate amount of IPA from the nozzle 58A at an appropriate time.

  Here, the solvent supply unit 58 has a moisture removing unit 110 incidentally. The moisture removing unit 110 supplies a moisture removing agent to the surface of the substrate W when the volatile solvent is supplied to the surface of the substrate W by the solvent supply unit 58, and the volatilization of the cleaning water on the surface of the substrate W. Accelerates the substitution to a neutral solvent.

  As the water removing agent supplied by the water removing unit 110, a substance that reacts with water to hydrolyze, for example, triethyl phosphate or trimethyl phosphate can be adopted. When the moisture removing agent 110 is supplied to the surface of the substrate W by a supply path described later by the moisture removing unit 110, the moisture removing agent adheres to the inside of the gap between the patterns P of the substrate W as shown in FIG. It reacts with water and water vapor in the atmosphere (atmosphere) in the processing box 51 existing around the substrate W and hydrolyzes to generate a decomposition product. Thereby, for example, a water removing agent such as triethyl phosphate and trimethyl phosphate generates decomposition products such as acidic phosphate ester and alcohol while removing the water and water vapor. Decomposition products of water removing agents such as acidic phosphates and alcohols are easily mixed or dissolved in volatile solvents such as IPA.

  Accordingly, the water supplied to the surface of the substrate W by the cleaning water supply unit 57 is shaken and removed by the centrifugal force of the rotation of the table 53 while being agitated and mixed with the IPA supplied by the solvent supply unit 58, and the water removing means. 110A is removed by the hydrolysis of the moisture removing agent supplied by 110A. As a result, the entire surface of the substrate W is surely removed, and the surface tension is lower than that of IPA (the decomposition product of the moisture removing agent is mixed). Or it will replace the dissolved IPA).

  In this embodiment, the water removing unit 110 adds the water removing agent (R) to the volatile solvent in the solvent supply tank 101 as shown in FIG. The water removing agent is introduced into the solvent supply tank 101 through the flow rate adjusting valve 111 and the flow meter 112, and is well mixed with IPA in the solvent supply tank 101. The pump 58 passes through the solvent supply line 104 together with IPA to the nozzle 58A. To the surface of the substrate W. In the moisture removing unit 110, the flow rate adjusting valve 111 and the like are electrically connected to the control unit 60, and the driving thereof is controlled by the control unit 60. In order to sufficiently mix the water removing agent R and the volatile solvent in the solvent supply tank 101, the pump 105 is started with the flow rate adjustment valve 107 closed and the return valve 109 opened, and the mixing in the tank solvent supply 101 is performed. It is better to circulate the liquid.

  The water removing agent introduced by the water removing means 110 is well mixed with IPA in the solvent supply tank 101 and spreads to each part of the surface of the substrate W together with the IPA. IPA) in which a decomposition product of the water removing agent is mixed or dissolved can be replaced.

  The control unit 60 includes a microcomputer that centrally controls each unit and a storage unit that stores substrate processing information and various programs related to substrate processing. The control unit 60 controls the rotation mechanism 54, the solvent suction / discharge unit 55, the chemical solution supply unit 56, the cleaning water supply unit 57, the solvent supply unit 58, the moisture removing unit 110, and the like based on the substrate processing information and various programs. Control is performed on the surface of the substrate W on the rotating table 53 such as supply of a chemical solution by the chemical solution supply unit 56, supply of cleaning water by the cleaning water supply unit 57, supply of a volatile solvent by the solvent supply unit 58, and the like.

  As shown in FIG. 4, the substrate drying chamber 70 includes a processing box 71 serving as a processing chamber, a cup 72 provided in the processing box 71, and a table 73 that supports the substrate W in a horizontal state in the cup 72. The rotating mechanism 74 that rotates the table 73 in a horizontal plane, the gas supply unit 75 that supplies gas, the heating unit 76 that heats the surface of the substrate W supplied with the volatile solvent, and the heating unit 76 heat the table 73. In addition, a suction drying means 77 for drying the surface of the substrate W and a control unit 80 for controlling each part are provided.

  The processing box 71, the cup 72, the table 73, and the rotating mechanism 74 are the same as the processing box 51, the cup 52, the table 53, and the rotating mechanism 54 in the substrate cleaning chamber 50. In FIG. 4, 71A denotes a substrate loading / unloading port, 71B denotes a shutter, and 73A denotes a support member such as a pin.

  The gas supply unit 75 includes a nozzle 75A that discharges gas from an oblique direction with respect to the surface of the substrate W on the table 73. A gas, for example, nitrogen gas, is supplied from the nozzle 75A to the surface of the substrate W on the table 73. And a space on the surface of the substrate W in the processing box 71 is made a nitrogen gas atmosphere. The nozzle 75A is mounted on the upper part of the peripheral wall of the cup 72, and its angle, discharge flow rate, and the like are adjusted so that gas is supplied near the center of the surface of the substrate W. The gas supply unit 75 is electrically connected to the control unit 80, and its driving is controlled by the control unit 80. The gas supply unit 75 includes a tank that stores gas, a valve that is an adjustment valve that adjusts the supply amount (none of which is shown), and the like.

  Here, as the gas to be supplied, an inert gas other than nitrogen gas, for example, argon gas, carbon dioxide gas, helium gas, or the like can be used. Since this inert gas is supplied to the surface of the substrate W, oxygen on the surface of the substrate W can be removed, and generation of a watermark (water stain) can be prevented. Dry air may be used. The gas to be supplied is preferably a heated gas.

  The heating means 76 has a plurality of lamps 76A, is provided above the table 73, and irradiates the surface of the substrate W on the table 73 with light when each lamp 76A is turned on. The heating unit 76 is configured to be movable in the vertical direction (up and down direction) by the moving mechanism 76B, and an irradiation position close to the cup 72 (a position close to the surface of the substrate W as indicated by a solid line in FIG. 4). ) And a standby position separated from the cup 72 by a predetermined distance (a position separated from the surface of the substrate W as indicated by a one-dot chain line in FIG. 4). When the substrate W is set on the table 73 of the substrate drying chamber 70, the heating unit 76 is positioned at the standby position, so that the heating unit 76 is prevented from interfering with the loading of the substrate W. The heating means 76 may be either lowered after the lamp is turned on or turned on after the lamp is lowered. The heating unit 76 is electrically connected to the control unit 80, and its driving is controlled by the control unit 80.

  Here, as the heating means 76, for example, a plurality of straight tube type lamps 76A provided in parallel or a plurality of light bulb type lamps 76A provided in an array can be used. As the lamp 76A, for example, a halogen lamp or a xenon flash lamp can be used.

  In the heating process of the substrate W using the heating unit 76, the volatile solvent liquid A1 that is in contact with the pattern P on the surface of the substrate W as shown in FIG. Starts to vaporize earlier than the other part of the volatile solvent liquid A1. In other words, in the volatile solvent liquid A1 supplied to the surface of the substrate W, only the portion in contact with the surface of the substrate W is rapidly heated so as to be in a gas phase. Thereby, around the pattern P on the surface of the substrate W, a gas layer (a collection of bubbles) due to vaporization (boiling) of the liquid A1 of the volatile solvent, that is, the gas layer A2 of the volatile solvent seems to be a thin film. Formed. For this reason, the liquid A1 of the volatile solvent between the adjacent patterns P becomes a large number of liquid balls by its own surface tension while being pushed out to the surface of the substrate W by the gas layer A2. In FIG. 8B, when the liquid dries, the drying speed of each part of the substrate surface becomes uneven, and when the liquid A1 remains between some patterns P, the surface of the liquid A1 in that part. This shows the phenomenon that the pattern collapses due to tension.

  The suction drying means 77 is substantially the same as the above-described solvent suction / discharge unit 55 in the substrate cleaning chamber 50, and the substrate W holding the table 73 with a solvent suction port 77 </ b> A opening in an annular shape toward the periphery of the table 73. It is set to work position that is positioned around. The solvent suction port 77A sucks and receives the volatile solvent scattered from the rotating substrate W. The suction drying unit 77 is electrically connected to the control unit 80, and the driving thereof is controlled by the control unit 80. The solvent suction port 77A has a vacuum pump (not shown) for sucking volatile solvent liquid balls, and a discharge pipe (not shown) for discharging volatile solvent liquid balls received by suction. Connected).

  The control unit 80 includes a microcomputer that centrally controls each unit and a storage unit that stores substrate processing information and various programs related to substrate processing. The control unit 80 controls the rotation mechanism 74, the gas supply unit 75, the heating unit 76, the suction drying unit 77, and the like based on the substrate processing information and various programs, and controls the surface of the substrate W on the rotating table 73. Control of gas supply by the gas supply unit 75, heating by the heating means 76, suction by the suction drying means 77, and the like are performed.

Hereinafter, a procedure for cleaning and drying the substrate W by the substrate processing apparatus 10 will be described.
(1) The substrate W supplied from the substrate storage cassette 21 of the substrate supply / discharge unit 20 to the in-dedicated buffer 31 of the substrate storage buffer unit 30 by the transfer robot 11 is taken out by the transfer robot 12, and the substrate W is removed from the substrate processing chamber 40. The controller 60 of the substrate cleaning chamber 50 controls the rotation mechanism 54 to rotate the table 53 at a predetermined number of revolutions, and then the solvent suction / discharge unit 55 is set on the table 53 of the substrate cleaning chamber 50. In the state of being positioned at the standby position, the chemical solution supply unit 56 is controlled to supply the chemical solution, that is, APM, from the nozzle 56A to the surface of the substrate W on the rotating table 53 for a predetermined time. APM as a chemical solution is discharged from the nozzle 56A toward the center of the substrate W on the rotating table 53, and spreads over the entire surface of the substrate W due to the centrifugal force generated by the rotation of the substrate W. Thereby, the surface of the substrate W on the table 53 is covered with the APM and processed.

  The control unit 60 continuously rotates the table 53 from the above (1) to (3) described later. At this time, the processing conditions such as the rotational speed of the table 53 and the predetermined time are set in advance, but can be arbitrarily changed by the operator.

  (2) Next, after the supply of the chemical solution is stopped, the control unit 60 controls the cleaning water supply unit 57, and the cleaning water from the nozzle 57A on the surface of the substrate W on the rotating table 53, that is, ultrapure water. Is supplied for a predetermined time. Ultrapure water as cleaning water is discharged from the nozzle 57 </ b> A toward the center of the substrate W on the rotating table 53, and spreads over the entire surface of the substrate W due to the centrifugal force generated by the rotation of the substrate W. As a result, the surface of the substrate W on the table 53 is covered and cleaned with the ultrapure water.

  (3) Next, after the supply of the cleaning liquid by the cleaning water supply unit 57 is stopped, the control unit 60 positions the solvent suction / discharge unit 55 at the work position, controls the solvent supply unit 58, and rotates on the rotating table 53. A volatile solvent, that is, IPA is supplied to the surface of the substrate W from the nozzle 58A for a predetermined time. When the supply of IPA by the solvent supply unit 58 has elapsed for a predetermined time, the supply of IPA by the solvent supply unit 58 is stopped, and the rotation of the substrate W by the table 53 is stopped. IPA as a volatile solvent is discharged from the nozzle 58A toward the center of the substrate W on the rotating table 53, and spreads over the entire surface of the substrate W due to the centrifugal force generated by the rotation of the substrate W. At this time, IPA scattered from the rotating substrate W is sucked into the solvent suction / discharge section 55. As a result, the surface of the substrate W on the table 53 is replaced with IPA from ultrapure water. The rotation speed of the table 53, that is, the substrate W at this time is set so that the film of the volatile solvent becomes a thin film on the surface of the substrate W so that the surface of the substrate W is not exposed.

  Further, the temperature of the IPA discharged from the nozzle 58A of the solvent supply unit 58 is less than its boiling point, and the entire surface of the substrate W is supplied by ensuring that the IPA is supplied to the surface of the substrate W in a liquid state. To ensure that ultrapure water is evenly replaced with IPA. In this example, IPA is continuously supplied to the substrate W in a liquid state.

  Here, when the nozzle 58A of the solvent supply unit 58 discharges IPA onto the surface of the substrate W, the control unit 60 supplies the moisture removing agent to the surface of the substrate W using the moisture removing unit 110 as described above. Then, the replacement of the cleaning water on the surface of the substrate W with IPA (IPA in which the decomposition product of the water removing agent is mixed or dissolved) is promoted.

  (4) Next, the controller 60 stops the rotation of the table 53 in the substrate cleaning chamber 50, and the transfer robot 12 takes out the substrate W on the table 53 whose rotation has been stopped from the substrate cleaning chamber 50. It is set on the table 73 of the substrate drying chamber 70 in the substrate processing chamber 40. The control unit 80 of the substrate drying chamber 70 controls the rotation mechanism 74 to rotate the table 73 and also controls the gas supply unit 75, so that the gas from the nozzle 75 </ b> A on the surface of the substrate W on the rotating table 73, that is, nitrogen. Gas is supplied for a predetermined time. Nitrogen gas is discharged from the nozzle 75 </ b> A toward the entire area of the substrate W on the table 73. Thereby, the space surrounding the substrate W on the table 73 becomes a nitrogen atmosphere. By making this space a nitrogen atmosphere, the oxygen concentration can be reduced and the generation of watermarks on the surface of the substrate W can be suppressed.

  The controller 80 continuously rotates the table 73 from the above (4) to the later described (6). At this time, processing conditions such as the rotation speed of the table 73 and a predetermined time are set in advance, but can be arbitrarily changed by the operator.

  (5) Next, the control unit 80 controls the heating means 76, positions the heating means 76 that has been in the standby position until now to the irradiation position, lights each lamp 76A of the heating means 76, and rotates the table 73. The upper substrate W is heated for a predetermined time. At this time, the heating means 76 can perform heating that allows the temperature of the substrate W to reach 100 degrees or more in 10 seconds. As a result, the liquid A1 of the volatile solvent that is in contact with the pattern P on the surface of the substrate W (liquid in which the decomposition product of the moisture removing agent is mixed or dissolved) is instantly vaporized, and the other on the surface of the substrate W. It becomes possible to immediately liquefy the liquid A1 of the volatile solvent in the portion.

  Here, in the heat drying by the heating means 76, the volatile solvent IPA (IPA in which the decomposition product of the water removing agent is mixed or dissolved) that is in contact with the pattern P of the substrate W is instantaneously vaporized. It is important to heat the substrate W to a high temperature of several hundred degrees. Also, it is necessary to heat only the substrate W without heating the IPA. For this purpose, it is desirable to use a lamp 76A having a peak intensity at a wavelength of 500 to 3000 nm. Further, for reliable drying, the final temperature of the substrate W (the final temperature reached by heating) is desirably a heating temperature that is 20 ° C. higher than the boiling point at atmospheric pressure of the processing solution or solvent. Thus, it is desirable that the time to reach the final temperature is within 10 seconds, for example, within the range of several tens of milliseconds to several seconds.

  (6) The liquid balls of IPA (IPA in which the decomposition product of the water removing agent is mixed or dissolved) generated on the surface of the substrate W by the heating action of the heating means 76 fly to the outer periphery by the centrifugal force generated by the rotation of the substrate W. The suction drying means 77 is reached. At this time, since a suction force is applied to the solvent suction port 77A, the IPA liquid balls that have reached the suction drying means 77 are sucked and removed via the solvent suction port 77A. Next, the rotation of the rotary table 73 is stopped and the drying is finished. Therefore, in this embodiment, the rotary table 73, the rotation mechanism 74, the suction drying means 77 and the like remove the liquid balls of the volatile solvent generated on the surface of the substrate by the heating action of the heating means 76, and remove the surface of the substrate. It constitutes a drying means for drying.

  (7) Next, the control unit 80 stops the rotation of the table 73, and the transfer robot 12 takes out the substrate W that has been dried on the rotation-stopped table 73 from the substrate drying chamber 70. W is put into the out-only buffer 32 of the substrate storage buffer unit 30. As described above, when the cooling means is provided in the out-only buffer 32, the substrate W is forcibly cooled by the cooling means.

  Prior to taking out the substrate W in (7) above, the control unit 80 turns off the lamp 76A of the heating means 76 and positions it at the standby position. Thereby, the heating means 76 does not get in the way when the substrate W is taken out.

  (8) The transfer robot 11 takes out the substrate W from the out-only buffer 32 of the substrate storage buffer unit 30 and discharges it to the substrate storage cassette 21 of the substrate supply / discharge unit 20.

  Note that the supply of the nitrogen gas that has been supplied by the gas supply unit 75 in the above (4) for a predetermined time may be stopped simultaneously with the start of the heat treatment by each lamp 76A of the heating means 76 in (5), or The supply may be stopped when the substrate W that has been subjected to the drying process (6) is taken out of the substrate drying chamber 70 in (7).

  Therefore, in the substrate processing apparatus 10, the substrate processing chamber 40 includes the substrate cleaning chamber 50 and the substrate drying chamber 70, and the transfer robot 12 as a substrate transfer means is provided between the substrate cleaning chamber 50 and the substrate drying chamber 70. Provided. Thereby, in the substrate cleaning chamber 50, a step of supplying cleaning water to the surface of the substrate W, a volatile solvent is supplied to the surface of the substrate W to which the cleaning water is supplied, and the substrate W is removed using the moisture removing unit 110. The process of promoting the replacement of the surface cleaning water with the volatile solvent is performed, and the substrate W supplied with the volatile solvent in the substrate cleaning chamber 50 is transferred to the substrate drying chamber 70 by the transfer robot 12. In the substrate drying chamber 70, the step of heating the substrate W supplied with the volatile solvent in the substrate cleaning chamber 50 and the liquid balls of the volatile solvent generated on the surface of the substrate W by the heating of the substrate W are removed. And a step of drying the surface of the substrate W.

According to the present embodiment, the following operational effects can be obtained.
After supplying cleaning water to the surface of the substrate W by the cleaning water supply unit 57, when the solvent supply unit 58 supplies IPA to the surface of the substrate W, the water removal unit 110 mixes and supplies the IPA with the IPA. The agent reacts with water adhering to the inside of the pattern gap of the substrate W and water vapor in the atmosphere (atmosphere) in the processing box 51 existing around the substrate W to hydrolyze the water, Remove water vapor. As a result, the remaining amount of the cleaning water adhering to the surface of the substrate W, particularly the pattern gap, is reduced. As a result, this cleaning water has a low surface tension IPA (IPA in which the decomposition product of the water removing agent is mixed or dissolved). Thus, it is possible to effectively prevent the pattern collapse when the substrate W is dried.

  Due to the effect of removing the cleaning water by the moisture removing means 110, the cleaning water on the surface of the substrate W can be efficiently replaced with the volatile solvent by supplying a relatively small amount of the volatile solvent, and the consumption of the volatile solvent can be reduced. In addition, the volatile solvent can be smoothly fed into the pattern gap of the substrate W where the remaining amount of cleaning water is reduced by using the water removing agent, and the execution time of the solvent replacement step can be shortened. Thereby, the productivity of the substrate W can be improved.

  The water removing agent introduced by the water removing means 110 is well mixed with IPA in the solvent supply tank 101 and spreads to each part of the surface of the substrate W together with the IPA. Therefore, the entire surface of the substrate W is efficiently IPA (moisture removed). IPA) in which the decomposition product of the agent is mixed or dissolved can be substituted.

  FIG. 6 shows a water removal means 120 as a modification of the water removal means 110 attached to the solvent supply unit 58 in the embodiment of FIGS. The water removing unit 120 adds the water removing agent (R) to the volatile solvent in the solvent supply line 104 of the solvent supply unit 58. The water removing agent is introduced into the solvent supply line 104 through the flow rate adjustment valve 121, the flow meter 122, and the filter 123, and is actively taken into the flow of IPA pumped by the pump 105 in the solvent supply line 104. Then, they are mixed and discharged together with IPA from the nozzle 58A onto the surface of the substrate W. The moisture removing unit 120 is electrically connected to the control unit 60 with the flow rate adjusting valve 121 and the like, and the driving thereof is controlled by the control unit 60.

  The water removing agent introduced by the water removing means 120 is actively mixed in the flow of the IPA pumped through the solvent supply pipe 104 and spreads to each part of the surface of the substrate W together with the IPA. The entire surface can be efficiently replaced with IPA (IPA in which the decomposition product of the water removing agent is mixed or dissolved).

  FIG. 7 shows a moisture removing unit 130 as a modification of the moisture removing unit 110 attached to the solvent supply unit 58. The moisture removing unit 130 includes a nozzle 130 </ b> A that discharges the moisture removing agent onto the surface of the substrate W on the table 53 via the flow rate adjusting valve 131, the flow meter 132, and the filter 133. The moisture removing means 130 supplies the moisture removing agent (R) directly to the surface of the substrate W without passing through the solvent supply conduit 104 communicating with the solvent supply tank 101, and volatilized by the nozzle 58 </ b> A of the solvent supply unit 58. It can be added to an organic solvent. The nozzle 130 </ b> A is installed under the ceiling of the processing box 51, and the installation angle, the discharge flow rate, and the like are adjusted so that the moisture removing agent is supplied near the center of the surface of the substrate W. The moisture removing unit 130 is directly connected to the control unit 60 with a flow rate adjusting valve 131 and the like, and the driving thereof is controlled by the control unit 60.

  The timing at which the supply of the water removing agent from the nozzle 130A is started may be the same as the timing at which the supply of the volatile solvent from the nozzle 58A is started, but is earlier than the timing at which the supply of the volatile solvent from the nozzle 58A is started. It's good or late. The timing for stopping the supply of the water removing agent from the nozzle 130A may be the same as the timing for stopping the supply of the volatile solvent from the nozzle 58A, or may be earlier.

  The moisture removing agent introduced by the moisture removing means 130 immediately mixes with the IPA supplied from the solvent supply unit 58 on the surface of the substrate W and spreads to each part of the surface of the substrate W together with the IPA. The entire area can be efficiently replaced with IPA (IPA in which the decomposition product of the water removing agent is mixed or dissolved).

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration of the present invention is not limited to this embodiment, and even if there is a design change or the like without departing from the gist of the present invention. It is included in the present invention.

  The supply operation of the inert gas such as nitrogen gas or the dry air by the gas supply unit 75 is started after the substrate W is positioned at the supply position, but the supply is started before the substrate W is positioned. Also good.

  In the embodiment, the heating of the substrate W by the heating means 76 may be performed while the inside of the processing box 71 is decompressed. Since the boiling point of a volatile solvent such as IPA in the processing box 71 is lowered and boils at a lower temperature than under atmospheric pressure, thermal damage to the substrate can be reduced.

  In the embodiment, the supply of the volatile solvent such as IPA is started after the supply of the cleaning water to the substrate W is stopped, but the cleaning water is still supplied to the substrate W at the end of the cleaning with the cleaning water. From time to time, the supply of the volatile solvent may be started.

  According to the present invention, the cleaning water on the substrate surface can be surely replaced with a volatile solvent to effectively prevent pattern collapse when the substrate is dried.

DESCRIPTION OF SYMBOLS 10 Substrate processing apparatus 50 Substrate cleaning room 57 Cleaning water supply part 58 Solvent supply part 70 Substrate drying room 76 Heating means 77 Suction drying means (drying means)
101 Solvent Supply Tank 104 Solvent Supply Pipe Lines 110, 120, 130 Moisture Removal Means W Substrate

Claims (9)

A cleaning water supply unit for supplying cleaning water to the surface of the substrate;
A substrate processing apparatus having a solvent supply unit for supplying a volatile solvent to the surface of the substrate supplied with the cleaning water and replacing the cleaning water on the surface of the substrate with a volatile solvent,
Having water removal means,
When the volatile solvent is supplied to the surface of the substrate by the solvent supply unit, the moisture removing means supplies a moisture removing agent to the surface of the substrate and promotes replacement of the cleaning water on the surface of the substrate with the volatile solvent. Substrate processing equipment.   The substrate processing apparatus according to claim 1, wherein the moisture removing agent is made of a substance that hydrolyzes.   Claims comprising heating and drying means for heating the surface of the substrate supplied with the volatile solvent, removing liquid balls of the volatile solvent generated on the surface of the substrate by a heating action, and drying the surface of the substrate. Item 3. The substrate processing apparatus according to Item 1 or 2.   The substrate processing apparatus according to claim 1, wherein the moisture removing unit adds a moisture removing agent to the volatile solvent in the solvent supply tank.   The substrate processing apparatus according to claim 1, wherein the moisture removing unit adds a moisture removing agent to a volatile solvent in a solvent supply pipe that pumps a volatile solvent in a solvent supply tank.   The substrate processing apparatus according to claim 1, wherein the moisture removing unit supplies the moisture removing agent to the surface of the substrate without passing through the solvent supply conduit communicating with the solvent supply tank. Supplying cleaning water to the surface of the substrate;
A substrate processing method comprising: supplying a volatile solvent to the surface of the substrate supplied with the cleaning water, and replacing the cleaning water on the surface of the substrate with a volatile solvent,
A substrate processing method for supplying a moisture removing agent to a surface of a substrate using a moisture removing means when the volatile solvent is supplied to the surface of the substrate, and promoting the replacement of the cleaning water on the surface of the substrate with a volatile solvent. .   The substrate processing method according to claim 7, wherein the moisture removing agent is made of a substance that hydrolyzes.   8. The method includes heating the surface of the substrate to which the volatile solvent is supplied, removing liquid balls of the volatile solvent generated on the surface of the substrate by a heating action, and drying the surface of the substrate. Or the substrate processing method of 8.

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