JP2018162993A - Magnetic sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a magnetic sensor that is able to detect a magnetic field in directions other than a direction in which a magnetic detection element has sensitivity and that is able to hinder an output-signal change resulting from displacement.SOLUTION: A magnetic sensor comprises a magnetic field conversion part 10 and a magnetic field detection part. The magnetic field conversion part 10 receives an input magnetic field including an input magnetic field component in a direction parallel to a direction Z, and generates an output magnetic field including an output magnetic field component in a direction parallel to a direction X. The magnetic field detection part receives an output magnetic field and generates an output signal corresponding to the input magnetic field component. The magnetic field detection part includes a first magnetic detection element 20A and a second magnetic detection element 20B connected in parallel or in series. When displacement occurs between the magnetic field conversion part 10 and the magnetic field detection part, one of the intensity of the output magnetic field component that the first magnetic detection element 20A receives and the intensity of the output magnetic field component that the second magnetic detection element 20B receives increases and the other decreases.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a magnetic sensor that uses a magnetic detection element to detect a magnetic field in a direction other than the direction in which the magnetic detection element has sensitivity.

  In recent years, geomagnetic sensors may be incorporated in mobile communication devices such as mobile phones. A geomagnetic sensor for such an application is required to be small and to detect the three-dimensional direction of an external magnetic field. Such a geomagnetic sensor is realized using, for example, a magnetic sensor. As a magnetic sensor, one using a plurality of magnetic detection elements provided on a substrate is known. As the magnetic detection element, for example, a magnetoresistance effect element is used.

  Magnetic detection elements provided on a substrate are often configured to detect a magnetic field in a direction parallel to the surface of the substrate. In order to realize a geomagnetic sensor using a magnetic sensor, a magnetic sensor capable of detecting a magnetic field in a direction perpendicular to the surface of the substrate is required.

  Patent Document 1 describes a magnetic sensor that can detect a magnetic field in a direction perpendicular to the surface of the substrate by using a magnetoresistive effect element that detects a magnetic field in a direction parallel to the surface of the substrate. The magnetic sensor includes a soft magnetic material that converts a vertical magnetic field component in a direction perpendicular to the surface of the substrate into a horizontal magnetic field component in a direction parallel to the surface of the substrate, and applies the horizontal magnetic field component to the magnetoresistive effect element. ing.

JP 2013-32989 A

  As in the magnetic sensor described in Patent Document 1, a magnetic sensor including a magnetic detection element such as a magnetoresistive effect element and a soft magnetic material that converts a vertical magnetic field component into a horizontal magnetic field component is used. There is a problem that the conversion efficiency from the vertical magnetic field component to the horizontal magnetic field component is likely to change greatly due to the positional deviation from the magnetic material, and as a result, the output signal is likely to change greatly.

  Patent Document 1 describes a technique that can reduce disturbance sensitivity even when an offset occurs between a soft magnetic material and a magnetoresistive element. Patent Document 1 describes that disturbance sensitivity refers to detection of a disturbance magnetic field in a direction parallel to the sensitivity axis direction. Patent Document 1 describes that the conventional magnetic sensor has a disturbance sensitivity even in a state where no magnetic field is applied to the magnetoresistive effect element. However, Patent Document 1 does not consider that the conversion efficiency from the vertical magnetic field component to the horizontal magnetic field component changes due to the positional deviation between the magnetoresistive effect element and the soft magnetic material. Moreover, with the technique described in Patent Document 1, it is difficult to suppress the change in the conversion efficiency due to the positional deviation between the magnetoresistive element and the soft magnetic material.

  The present invention has been made in view of such a problem, and an object of the present invention is to detect a magnetic field in a direction other than the direction in which the magnetic detection element has sensitivity by using the magnetic detection element, and to output by positional deviation. An object of the present invention is to provide a magnetic sensor capable of suppressing a change in signal.

  The magnetic sensor of the 1st thru | or 3rd viewpoint of this invention is provided with the magnetic field conversion part and the magnetic field detection part. The magnetic field conversion unit is made of a soft magnetic material, receives an input magnetic field including an input magnetic field component in a direction parallel to the first virtual straight line, and generates an output magnetic field. The magnetic field detector receives the output magnetic field and generates an output signal corresponding to the input magnetic field component. The output magnetic field includes an output magnetic field component in a direction parallel to the second virtual straight line that intersects the first virtual straight line and changes in accordance with the input magnetic field component.

  In the magnetic sensor according to the first aspect of the present invention, the magnetic field converter has an end face located at one end in a direction parallel to the first virtual straight line. A first element placement area and a second element placement area exist on a virtual plane that intersects the first virtual straight line and includes the second virtual straight line. When the area obtained by vertically projecting the end face of the magnetic field conversion unit on the virtual plane is defined as the end face projection area, each of the first and second element placement areas is only on the inside or the outside of the end face projection area. Existing.

  The ratio of the intensity of the output magnetic field component at an arbitrary point in the virtual plane to the intensity of the input magnetic field component is defined as the conversion efficiency at the arbitrary point, and the arbitrary point is set in one direction parallel to the second virtual line. When the ratio of the change amount of the conversion efficiency at an arbitrary point to the change amount of the position of an arbitrary point when moving is defined as the slope of the conversion efficiency at an arbitrary point, an arbitrary value in the first element arrangement region One of the slope of the conversion efficiency at the first point and the slope of the conversion efficiency at an arbitrary second point in the second element arrangement region is a positive value, and the other is a negative value.

  The magnetic field detector includes a first magnetic detection element and a second magnetic detection element. The first magnetic detection element is arranged so as to intersect the first element arrangement region without intersecting the second element arrangement region. The second magnetic detection element is arranged so as to intersect with the second element arrangement region without intersecting with the first element arrangement region. The first magnetic detection element generates a first detection value corresponding to the output magnetic field component received by itself. The second magnetic detection element generates a second detection value corresponding to the output magnetic field component received by itself. The output signal depends on a combined value obtained by combining the first detection value and the second detection value.

  In the magnetic sensor according to the first aspect of the present invention, each of the first and second magnetic detection elements is in a direction parallel to the third virtual line on the virtual plane orthogonal to the second virtual line. May have a long shape.

  In the magnetic sensor according to the first aspect of the present invention, the first magnetic detection element may be a first magnetoresistance effect element, and the second magnetic detection element is a second magnetoresistance effect element. May be. In this case, the first detection value may be the resistance value of the first magnetoresistance effect element, and the second detection value may be the resistance value of the second magnetoresistance effect element. The combined value may be a combined resistance value of the first magnetoresistive effect element and the second magnetoresistive effect element. The first magnetoresistive element and the second magnetoresistive element may be connected in parallel or may be connected in series.

  In the magnetic sensor according to the first aspect of the present invention, the second imaginary straight line may be orthogonal to the first imaginary straight line.

  The magnetic sensor according to the first aspect of the present invention may further include a substrate that holds the first magnetic detection element and the second magnetic detection element.

  In the magnetic sensor according to the first aspect of the present invention, the center of gravity of the portion of the first element arrangement region that intersects the first magnetic detection element is the first center of gravity, and the second element arrangement region is the first of the second element arrangement region. The ratio of the absolute value of the slope of the conversion efficiency at the second centroid to the absolute value of the slope of the conversion efficiency at the first centroid when the centroid of the portion intersecting the magnetic detection element 2 is the second centroid. In the range of 0.48 to 2.1.

  In the magnetic sensor according to the first aspect of the present invention, the first element arrangement region may exist only outside the end face projection area, and the second element arrangement area is located inside the end face projection area. May be present only. In this case, the end face projection area may be an edge located between the first element arrangement area and the second element arrangement area, and may have an edge perpendicular to the second virtual straight line. .

  In the magnetic sensor according to the first aspect of the present invention, the magnetic field converter may include a yoke. The yoke may have a yoke end surface located at one end in a direction parallel to the first imaginary straight line. Further, the end face projection area may include a yoke end face projection area formed by vertically projecting the yoke end face onto a virtual plane.

  In this case, the first element placement area and the second element placement area exist only outside the end face projection area, and are opposite to each other in a direction parallel to the second virtual straight line across the yoke end face projection area. May be located.

  Alternatively, the first element arrangement area and the second element arrangement area may exist only inside the yoke end surface projection area. The yoke end surface projection region may have a first edge and a second edge located at opposite ends in a direction parallel to the second imaginary straight line. The first element arrangement region may be located between the first edge and the second element arrangement region, and the second element arrangement region is the second edge and the first element arrangement region. It may be located between.

  In the magnetic sensor according to the first aspect of the present invention, the magnetic field conversion unit may include a first yoke and a second yoke. The first yoke has a first yoke end face located at one end in a direction parallel to the first virtual straight line. The second yoke has a second yoke end surface located at one end in a direction parallel to the first imaginary straight line. The first element arrangement region is closer to the first yoke end surface than the second yoke end surface, and the second element arrangement region is closer to the second yoke end surface than the first yoke end surface. The first yoke end surface has a first end edge closest to the first element arrangement region. The second yoke end surface has a second end edge closest to the second element arrangement region. The distance between the first point in the first element arrangement region and the first edge is the first distance, and the distance between the second point in the second element arrangement region and the second edge is the first distance. When the distance is the second distance, if the first point and the second point are changed in one direction parallel to the second imaginary straight line, one of the first distance and the second distance decreases, The other increases.

  In the magnetic sensor of the second aspect of the present invention, the magnetic field detection unit includes a first resistance unit and a second resistance unit each having a resistance value that changes in accordance with the input magnetic field component. The first resistance unit and the second resistance unit are configured to be connected in series and energized. When the input magnetic field component changes, one of the resistance value of the first resistance unit and the resistance value of the second resistance unit increases and the other decreases. The output signal depends on the potential at the connection point between the first resistance unit and the second resistance unit. Each of the first and second resistance units includes a first resistance effect element and a second magnetoresistance effect element.

  In the magnetic sensor according to the third aspect of the present invention, the magnetic field detector includes a power supply port, a ground port, a first output port, and a second output port, and resistance values that change according to input magnetic field components, respectively. The first resistor unit, the second resistor unit, the third resistor unit, and the fourth resistor unit are included. The first resistance portion is provided between the power supply port and the first output port. The second resistance portion is provided between the first output port and the ground port. The third resistance portion is provided between the power supply port and the second output port. The fourth resistance portion is provided between the second output port and the ground port. The magnetic field detection unit is configured to be energized between the power supply port and the ground port. When the input magnetic field component changes, the resistance values of the first to fourth resistance portions increase as the resistance values of the first and fourth resistance portions decrease and the resistance values of the second and third resistance portions decrease, respectively. Alternatively, the resistance values of the first and fourth resistance portions are decreased and the resistance values of the second and third resistance portions are increased. The output signal depends on the potential difference between the first output port and the second output port. Each of the first to fourth resistance portions includes a first resistance effect element and a second magnetoresistance effect element.

  In the magnetic sensor according to the second and third aspects of the present invention, the magnetic field converter has an end face located at one end in a direction parallel to the first virtual straight line. A first element placement area and a second element placement area exist on a virtual plane that intersects the first virtual straight line and includes the second virtual straight line. When the area obtained by vertically projecting the end face of the magnetic field conversion unit on the virtual plane is defined as the end face projection area, each of the first and second element placement areas is only on the inside or the outside of the end face projection area. Existing.

  The ratio of the intensity of the output magnetic field component at an arbitrary point in the virtual plane to the intensity of the input magnetic field component is defined as the conversion efficiency at the arbitrary point, and the arbitrary point is set in one direction parallel to the second virtual line. When the ratio of the change amount of the conversion efficiency at an arbitrary point to the change amount of the position of an arbitrary point when moving is defined as the slope of the conversion efficiency at an arbitrary point, an arbitrary value in the first element arrangement region One of the slope of the conversion efficiency at the first point and the slope of the conversion efficiency at an arbitrary second point in the second element arrangement region is a positive value, and the other is a negative value.

  In the magnetic sensor according to the second and third aspects of the present invention, the first magnetoresistive element is arranged so as to intersect the first element arrangement region without intersecting the second element arrangement region. ing. The second magnetoresistive element is arranged so as to intersect the second element arrangement region without intersecting the first element arrangement region. The first magnetoresistance effect element has a first resistance value corresponding to the output magnetic field component received by itself. The second magnetoresistance effect element has a second resistance value corresponding to the output magnetic field component received by itself. The first magnetoresistive element and the second magnetoresistive element are connected in parallel or in series.

  In the magnetic sensor according to the first aspect of the present invention, when the position shift between the magnetic field conversion unit and the magnetic field detection unit occurs, the intensity of the output magnetic field component received by the first magnetic detection element and the second magnetic detection element receive One of the strengths of the output magnetic field component increases and the other decreases. In the magnetic sensor according to the second and third aspects of the present invention, when the magnetic field converting unit and the magnetic field detecting unit are displaced, the intensity of the output magnetic field component received by the first magnetoresistive element and the second One of the strengths of the output magnetic field components received by the magnetoresistive effect element increases and the other decreases. Therefore, according to the magnetic sensor of the first to third aspects of the present invention, it is possible to detect a magnetic field in a direction other than the direction in which the magnetic detection element has sensitivity using the magnetic detection element, and There is an effect that the change of the output signal due to the positional deviation between the magnetic field conversion unit and the magnetic field detection unit can be suppressed.

It is explanatory drawing which shows typically the structure of the magnetic sensor which concerns on the 1st Embodiment of this invention. It is a disassembled perspective view which shows a part of magnetic sensor which concerns on the 1st Embodiment of this invention. It is a side view which shows a part of magnetic sensor which concerns on the 1st Embodiment of this invention. It is a circuit diagram which shows the circuit structure of the magnetic field detection part in the 1st Embodiment of this invention. It is a perspective view which shows the 1st magnetoresistive effect element in the 1st Embodiment of this invention. It is a perspective view which shows the magnetic sensor unit containing the magnetic sensor which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the positional relationship of the yoke and the 1st and 2nd magnetic detection element in the 1st Embodiment of this invention. It is a characteristic view which shows an example of the relationship between the position on the 2nd virtual straight line in the 1st Embodiment of this invention, and conversion efficiency. It is explanatory drawing which shows typically the structure of the magnetic sensor which concerns on the 2nd Embodiment of this invention. It is a disassembled perspective view which shows a part of magnetic sensor which concerns on the 2nd Embodiment of this invention. It is explanatory drawing which shows typically the structure of the magnetic sensor which concerns on the 3rd Embodiment of this invention. It is a disassembled perspective view which shows a part of magnetic sensor which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the positional relationship of the yoke and the 1st and 2nd magnetic detection element in the 3rd Embodiment of this invention. It is explanatory drawing which shows typically the structure of the magnetic sensor which concerns on the 4th Embodiment of this invention. It is a disassembled perspective view which shows a part of magnetic sensor which concerns on the 4th Embodiment of this invention. It is explanatory drawing which shows the positional relationship of the yoke and the 1st and 2nd magnetic detection element in the 4th Embodiment of this invention. It is explanatory drawing which shows typically the structure of the magnetic sensor which concerns on the 5th Embodiment of this invention. It is explanatory drawing which shows typically the structure of the magnetic sensor which concerns on the 6th Embodiment of this invention. It is a disassembled perspective view which shows a part of magnetic sensor which concerns on the 6th Embodiment of this invention. It is explanatory drawing which shows the positional relationship of the yoke and the 1st and 2nd magnetic detection element in the 6th Embodiment of this invention. It is explanatory drawing which shows typically the structure of the magnetic sensor which concerns on the 7th Embodiment of this invention. It is explanatory drawing which shows typically the structure of the magnetic sensor which concerns on the 8th Embodiment of this invention. It is a disassembled perspective view which shows a part of magnetic sensor which concerns on the 8th Embodiment of this invention. It is explanatory drawing which shows the positional relationship of the yoke and the 1st and 2nd magnetic detection element in the 8th Embodiment of this invention. It is explanatory drawing which shows typically the structure of the magnetic sensor which concerns on the 9th Embodiment of this invention. It is explanatory drawing which shows the positional relationship of the yoke and the 1st and 2nd magnetic detection element in the 9th Embodiment of this invention.

[First Embodiment]
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. First, the configuration of a magnetic sensor unit including the magnetic sensor according to the first embodiment of the invention will be described with reference to FIG. FIG. 6 is a perspective view showing the magnetic sensor unit 100. The magnetic sensor unit 100 includes a substrate 101 having an upper surface 101a, the magnetic sensor 1 according to the present embodiment, and two magnetic sensors 2 and 3 different from the magnetic sensor 1. The magnetic sensors 1 to 3 are arranged in a line on the upper surface 101 a of the substrate 101.

  Here, as shown in FIG. 6, the X direction, the Y direction, and the Z direction are defined. The X direction, the Y direction, and the Z direction are orthogonal to each other. In this embodiment, a direction from the magnetic sensor 3 toward the magnetic sensor 1 is an X direction, and a direction perpendicular to the upper surface 101a of the substrate 101 is a Z direction. In addition, a direction opposite to the X direction is defined as -X direction, a direction opposite to the Y direction is defined as -Y direction, and a direction opposite to the Z direction is defined as -Z direction. In addition, hereinafter, a position ahead of the reference position in the Z direction is referred to as “upward”, and a position on the opposite side of “upper” with respect to the reference position is referred to as “downward”.

  The magnetic sensor 1 according to the present embodiment is configured to detect a magnetic field in the Z direction. The magnetic sensor 2 is configured to detect a magnetic field in the Y direction. The magnetic sensor 3 is configured to detect a magnetic field in the X direction.

  The magnetic sensor unit 100 further includes a plurality of electrode pads 102 arranged on the upper surface 101a of the substrate 101 so as to be arranged in the X direction. The plurality of electrode pads 102 are electrically connected to the magnetic sensors 1 to 3.

  Next, with reference to FIG. 1 thru | or FIG. 3, the structure of the magnetic sensor 1 which concerns on this Embodiment is demonstrated in detail. FIG. 1 is an explanatory diagram schematically showing the configuration of the magnetic sensor 1. FIG. 2 is an exploded perspective view showing a part of the magnetic sensor 1. FIG. 3 is a side view showing a part of the magnetic sensor 1.

  Here, the first virtual straight line Lz, the second virtual straight line Lx, the third virtual straight line Ly, and the virtual plane P are defined as follows. As shown in FIG. 2, the first virtual straight line Lz is a straight line parallel to the Z direction. The second virtual straight line Lx is a straight line that intersects the first virtual straight line Lz. Particularly in the present embodiment, the second virtual straight line Lx is a straight line that is orthogonal to the first virtual straight line Lz and parallel to the X direction. The virtual plane P is a plane that intersects with the first virtual straight line Lz and includes the second virtual straight line Lx. Particularly in the present embodiment, the virtual plane P is an XY plane. The third virtual straight line Ly is a straight line on the virtual plane P that is orthogonal to the second virtual straight line Lx. Particularly in the present embodiment, the third virtual straight line Ly is a straight line parallel to the Y direction.

  The direction parallel to the first virtual straight line Lz includes the Z direction and the -Z direction. The direction parallel to the second virtual straight line Lx includes the X direction and the −X direction. The direction parallel to the third virtual straight line Ly includes the Y direction and the -Y direction.

  As shown in FIGS. 1 and 2, the magnetic sensor 1 includes a magnetic field conversion unit 10 and a magnetic field detection unit 20. The magnetic field converter 10 is made of a soft magnetic material, receives an input magnetic field including an input magnetic field component in a direction parallel to the first virtual straight line Lz, and generates an output magnetic field. The magnetic field detector 20 receives the output magnetic field and generates an output signal corresponding to the input magnetic field component. The output magnetic field includes an output magnetic field component that is an output magnetic field component in a direction parallel to the second virtual straight line Lx and changes according to the input magnetic field component.

  In the present embodiment, the magnetic field conversion unit 10 is an aggregate of a plurality of elements separated from each other. Particularly in the present embodiment, the magnetic field converter 10 includes a plurality of yokes 11 as the plurality of elements. Each of the plurality of yokes 11 has a rectangular parallelepiped shape that is long in a direction parallel to the third virtual straight line Ly. The arrangement of the plurality of yokes 11 will be described in detail later.

  As shown in FIG. 1, the magnetic field detector 20 includes a first resistor 21, a second resistor 22, a third resistor 23, and a fourth resistor each having a resistance value that changes in accordance with the input magnetic field component. The resistance portion 24 is included. In the present embodiment, the first resistor portion 21 and the third resistor portion 23 are arranged in this order in the X direction. The second resistor portion 22 and the fourth resistor portion 24 are located at positions shifted in the −Y direction from the first and third resistor portions 21 and 23 and are arranged in this order in the X direction.

  Each of the first to fourth resistance portions 21 to 24 includes a first magnetic detection element and a second magnetic detection element. In addition, since the 1st thru | or 4th resistance parts 21-24 are a part of magnetic field detection part 20, it can be said that the magnetic field detection part 20 contains the 1st and 2nd magnetic detection element. The first magnetic detection element generates a first detection value corresponding to the output magnetic field component received by itself. The second magnetic detection element generates a second detection value corresponding to the output magnetic field component received by itself.

  In the present embodiment, the first resistance portion 21 includes a plurality of first magnetic detection elements 21A and a plurality of second magnetic detection elements 21B. The second resistance portion 22 includes a plurality of first magnetic detection elements 22A and a plurality of second magnetic detection elements 22B. The third resistance unit 23 includes a plurality of first magnetic detection elements 23A and a plurality of second magnetic detection elements 23B. The fourth resistance unit 24 includes a plurality of first magnetic detection elements 24A and a plurality of second magnetic detection elements 24B.

  Hereinafter, an arbitrary first magnetic detection element among the first magnetic detection elements 21A, 22A, 23A, and 24A is denoted by reference numeral 20A, and an arbitrary one of the second magnetic detection elements 21B, 22B, 23B, and 24B. The second magnetic detection element is represented by reference numeral 20B. As shown in FIGS. 1 and 2, each of the first and second magnetic detection elements 20 </ b> A and 20 </ b> B has a long shape in a direction parallel to the third virtual straight line Ly.

  In the present embodiment, each of the first to fourth resistance units 21 to 24 includes a plurality of magnetic detection element arrays 120. Each of the plurality of magnetic detection element arrays 120 includes a first portion in which a plurality of first magnetic detection elements 20A are arranged in the Y direction and a second portion in which a plurality of second magnetic detection elements 20B are arranged in the Y direction. Including parts. In each of the first to fourth resistance units 21 to 24, the plurality of magnetic detection element arrays 120 are arranged in the X direction.

  In the first resistor portion 21 and the fourth resistor portion 24, the first portion and the second portion of the magnetic detection element array 120 are arranged in this order in the X direction. In the second resistor portion 22 and the third resistor portion 23, the first portion and the second portion of the magnetic detection element array 120 are arranged in this order in the −X direction.

  The magnetic sensor 1 further includes a substrate that holds the first and second magnetic detection elements 20A and 20B, and a wiring layer 30 that electrically connects the first and second magnetic detection elements 20A and 20B. Yes. In the present embodiment, the substrate 101 shown in FIG. 6 also serves as the substrate of the magnetic sensor 1. As shown in FIG. 1, the entire shape of the wiring layer 30 viewed from the Z direction is a meander shape. The wiring layer 30 includes a plurality of lower electrodes 31 and a plurality of upper electrodes 32. In FIG. 1, the lower electrode 31 and the upper electrode 32 are omitted, and only the entire shape of the wiring layer 30 is shown.

  The plurality of lower electrodes 31 are arranged on the upper surface 101a of the substrate 101 shown in FIG. The first and second magnetic detection elements 20 </ b> A and 20 </ b> B are disposed on the plurality of lower electrodes 31. In the present embodiment, the first and second magnetic detection elements 20 </ b> A and 20 </ b> B are held by the substrate 101 via the plurality of lower electrodes 31. The plurality of upper electrodes 32 are disposed on the first and second magnetic detection elements 20A and 20B. The plurality of yokes 11 are disposed above the plurality of upper electrodes 32. In FIG. 2, the yoke 11 and the upper electrode 32 are drawn away from the magnetic detection elements 20A and 20B and the lower electrode 31 in the Z direction. In FIG. 2, the broken line indicates the position of the lower surface of the upper electrode 32. In the exploded perspective view similar to FIG. 2 used in the following description, the same notation as in FIG. 2 is used for the yoke and the upper electrode. The connection relationship between the first and second magnetic detection elements 20A and 20B, the lower electrode 31, and the upper electrode 32 will be described in detail later.

  Here, the circuit configuration of the magnetic field detection unit 20 will be described with reference to FIG. FIG. 4 is a circuit diagram showing a circuit configuration of the magnetic field detector 20. The magnetic field detection unit 20 further includes a power supply port V, a ground port G, a first output port E1, and a second output port E2. The first resistance portion 21 is provided between the power supply port V and the first output port E1. The second resistor 22 is provided between the first output port E1 and the ground port G. The third resistor portion 23 is provided between the power supply port V and the second output port E2. The fourth resistance unit 24 is provided between the second output port E2 and the ground port G.

  The magnetic field detection unit 20 is configured to be energized between the power supply port V and the ground port G. The first resistor 21 and the second resistor 22 in the magnetic field detector 20 are configured to be connected in series and to be energized. The third resistance unit 23 and the fourth resistance unit 24 in the magnetic field detection unit 20 are also configured to be connected in series and energized. The power supply port V and the ground port G are electrically connected to two electrode pads 102 to which a power supply voltage of a predetermined magnitude is applied between the plurality of electrode pads 102 shown in FIG. The first and second output ports E1 and E2 are electrically connected to the other two electrode pads 102 among the plurality of electrode pads 102. As will be described later, the magnetic field detection unit 20 generates a signal that depends on a potential difference between the first output port E1 and the second output port E2 as an output signal. The output signal depends on the potential of the first output port E1, which is the connection point between the first resistor 21 and the second resistor 22, and the connection between the third resistor 23 and the fourth resistor 24. It depends on the potential of the second output port E2, which is a point.

  Next, the connection relationship between the first and second magnetic detection elements 20A and 20B, the lower electrode 31, and the upper electrode 32 will be described with reference to FIG. In the present embodiment, the first magnetic detection element 20A is a first magnetoresistance effect element, and the second magnetic detection element 20B is a second magnetoresistance effect element. Hereinafter, the first magnetic detection element 20A is also referred to as a first magnetoresistance effect element 20A, and the second magnetic detection element 20B is also referred to as a second magnetoresistance effect element 20B. Here, one magnetic detection element array 120 of the first resistance part 21 or the fourth resistance part 24 will be described as an example. FIG. 2 shows one magnetic detection element array 120 of the first resistor portion 21 or the fourth resistor portion 24.

  As shown in FIG. 2, each of the plurality of lower electrodes 31 has an elongated shape in the Y direction. A gap is formed between two lower electrodes 31 adjacent in the Y direction. On the upper surface of the lower electrode 31, a pair of first and second magnetoresistive elements 20A and 20B adjacent to each other in the X direction are disposed in the vicinity of both ends in the Y direction. Hereinafter, the pair of first and second magnetoresistance effect elements 20A and 20B is referred to as an element pair. In the first and fourth resistance portions 21 and 24, the first and second magnetoresistance effect elements 20A and 20B constituting one element pair are arranged in this order in the X direction.

  Each of the plurality of upper electrodes 32 electrically connects the first and second magnetoresistive effect elements 20A and 20B constituting one element pair. Thereby, the first and second magnetoresistive elements 20A and 20B constituting one element pair are connected in parallel. Each of the plurality of upper electrodes 32 is disposed on two lower electrodes 31 adjacent in the Y direction, and electrically connects two adjacent element pairs. Thereby, a plurality of element pairs are connected in series.

  The connection relationship between the first and second magnetic detection elements 20A, 20B, the lower electrode 31, and the upper electrode 32 in one magnetic detection element array 120 of the second resistance part 22 or the third resistance part 23 is basically the same. Specifically, the connection relation described with reference to FIG. 2 is the same. However, in the second and third resistance portions 22 and 23, the first and second magnetoresistance effect elements 20A and 20B constituting one element pair are arranged in this order in the −X direction.

  The wiring layer 30 further includes a plurality of connection electrodes. The plurality of connection electrodes electrically connect the plurality of lower electrodes 31 so that the plurality of magnetic detection element arrays 120 are connected in series in each of the first to fourth resistance units 21 to 24. With this configuration, each of the first to fourth resistance units 21 to 24 includes a plurality of element pairs connected in series.

  Next, an example of the configuration of the first and second magnetoresistive elements 20A and 20B will be described with reference to FIGS. FIG. 5 is a perspective view showing the first magnetoresistive element 20A. In this example, the first magnetoresistance effect element 20A includes a magnetization fixed layer 202 whose magnetization direction is fixed, and a free layer 204 that is a magnetic layer whose magnetization direction changes according to the direction and intensity of the output magnetic field component. The nonmagnetic layer 203 disposed between the magnetization fixed layer 202 and the free layer 204 and the antiferromagnetic layer 201 are included. The antiferromagnetic layer 201, the magnetization fixed layer 202, the nonmagnetic layer 203, and the free layer 204 are laminated in this order from the lower electrode 31 side. The antiferromagnetic layer 201 is made of an antiferromagnetic material, and causes exchange coupling with the magnetization fixed layer 202 to fix the magnetization direction of the magnetization fixed layer 202.

  The first magnetoresistive element 20A may be a TMR element or a GMR element. In the TMR element, the nonmagnetic layer 203 is a tunnel barrier layer. In the GMR element, the nonmagnetic layer 203 is a nonmagnetic conductive layer.

  The first magnetoresistive element 20A has a first resistance value corresponding to the output magnetic field component received by itself. The first resistance value changes according to the angle formed by the magnetization direction of the free layer 204 with respect to the magnetization direction of the magnetization fixed layer 202. When this angle is 0 °, the first resistance value is the minimum value. When the angle is 180 °, the first resistance value becomes the maximum value.

  The configuration of the second magnetoresistance effect element 20B is the same as the configuration of the first magnetoresistance effect element 20A. Therefore, in the following description, the same reference numerals as those of the first magnetoresistive effect element 20A are used for the constituent elements of the second magnetoresistive effect element 20B. The second magnetoresistive effect element 20B has a second resistance value corresponding to the output magnetic field component received by itself. The second resistance value changes according to the angle formed by the magnetization direction of the free layer 204 with respect to the magnetization direction of the magnetization fixed layer 202. When this angle is 0 °, the second resistance value is the minimum value. When the angle is 180 °, the second resistance value becomes the maximum value.

  In the present embodiment, the magnetization direction of the magnetization fixed layer 202 of the first magnetoresistance effect element 20A and the magnetization direction of the magnetization fixed layer 202 of the second magnetoresistance effect element 20B are both in the −X direction. is there. In FIG. 2, the arrow denoted by reference numeral 41 represents the magnetization direction of the magnetization fixed layer 202 of the first magnetoresistive effect element 20A, and the arrow denoted by reference numeral 42 represents the magnetization of the second magnetoresistive effect element 20B. The direction of magnetization of the fixed layer 202 is shown.

  In the present embodiment, as described above, each of the first and second magnetoresistance effect elements 20A and 20B has a long shape in a direction parallel to the third virtual straight line Ly. Thereby, each free layer 204 of the first and second magnetoresistive effect elements 20A and 20B has a shape anisotropy in which the easy axis direction is parallel to the third virtual straight line Ly. Yes. Therefore, in the state where the output magnetic field component does not exist, the magnetization direction of each free layer 204 of the first and second magnetoresistance effect elements 20A and 20B is parallel to the third virtual straight line Ly. Yes. When an output magnetic field component exists, the magnetization direction of the free layer 204 changes according to the direction and intensity of the output magnetic field component. Therefore, in each of the first and second magnetoresistance effect elements 20A and 20B, the angle formed by the magnetization direction of the free layer 204 with respect to the magnetization direction of the magnetization fixed layer 202 is the first and second magnetoresistance elements. It changes depending on the direction and intensity of the output magnetic field component received by each of the effect elements 20A and 20B. Therefore, the first and second resistance values correspond to output magnetic field components.

  In the present embodiment, the directions of the output magnetic field components received by the first and second magnetoresistive effect elements 20A and 20B constituting one element pair are the same. The direction of the output magnetic field component received by the first and second magnetoresistive elements 24A and 24B in the fourth resistor section 24 is determined by the first and second magnetoresistive elements in the first resistor section 21. The direction of the output magnetic field component received by 21A and 21B is the same. On the other hand, the direction of the output magnetic field component received by the first and second magnetoresistive elements 22A and 22B in the second resistor section 22, and the first and second magnetoresistive elements in the third resistor section 23 The direction of the output magnetic field component received by 23A and 23B is opposite to the direction of the output magnetic field component received by the first and second magnetoresistance effect elements 21A and 21B in the first resistance section 21.

  Here, the first resistance value of the first magnetoresistive effect element 20A is represented by the symbol Ra, the second resistance value of the second magnetoresistive effect element 20B is represented by the symbol Rb, and one element pair is configured. The combined resistance value of the first and second magnetoresistive elements 20A and 20B is represented by the symbol Rc. The combined resistance value Rc is RaRb / (Ra + Rb). When the number of element pairs in each of the first to fourth resistance units 21 to 24 is n, the resistance value of each of the first to fourth resistance units 21 to 24 is nRc = nRaRb / (Ra + Rb). It is.

  The first resistance value Ra corresponds to the first detection value of the first magnetic detection element 20A. The second resistance value Rb corresponds to the second detection value of the second magnetic detection element 20B. The combined resistance value Rc corresponds to the combined value. As will be described later, when the input magnetic field component is changed, the first and second resistance values Ra and Rb and the combined resistance value Rc are changed. As a result, each of the first to fourth resistance units 21 to 24 is changed. The resistance value of changes.

  The configuration of the first and second magnetoresistive elements 20A and 20B is not limited to the example described with reference to FIGS. For example, each of the first and second magnetoresistance effect elements 20A and 20B may be configured not to include the antiferromagnetic layer 201. This configuration includes, for example, an artificial antiferromagnetic structure including two ferromagnetic layers and a nonmagnetic metal layer disposed between the two ferromagnetic layers instead of the antiferromagnetic layer 201 and the magnetization fixed layer 202. The structure including a magnetization fixed layer may be sufficient. The first and second magnetic detection elements 20A and 20B may be elements that detect a magnetic field other than the magnetoresistive effect element, such as a Hall element and a magnetic impedance element.

  Next, the positional relationship between the yoke 11 and the first and second magnetic detection elements 20A and 20B will be described. First, with reference to FIG. 7, the first element arrangement region that defines the position of the first magnetic detection element 20A and the second element arrangement region that defines the position of the second magnetic detection element 20B will be described. To do. FIG. 7 is an explanatory diagram showing the positional relationship between the yoke 11 and the first and second magnetic detection elements 20A and 20B. In FIG. 7, the symbol P indicates the virtual plane. The virtual plane P is at a position that intersects the first and second magnetic detection elements 20A and 20B. The first element arrangement region R1 and the second element arrangement region R2 exist on the virtual plane P.

  The magnetic field converter 10 has an end surface located at one end in a direction parallel to the first virtual straight line Lz. In the present embodiment, the end surface of the magnetic field conversion unit 10 is located at the end in the −Z direction. As described above, the magnetic field conversion unit 10 is an aggregate of a plurality of yokes 11 that are a plurality of elements separated from each other. The end surface of the magnetic field conversion unit 10 includes a plurality of partial end surfaces separated from each other. The plurality of partial end faces are a plurality of end faces located at the −Z direction ends of the plurality of yokes 11, respectively.

  As shown in FIG. 7, an area obtained by vertically projecting the end face of the magnetic field conversion unit 10 onto the virtual plane P is defined as an end face projection area R3. Although not shown, the end surface projection region R3 includes a plurality of partial regions formed by vertically projecting a plurality of partial end surfaces onto a virtual plane P. Each of the first and second element arrangement regions R1, R2 exists only in one of the inside and the outside of the end face projection region R3. In the present embodiment, the first element arrangement region R1 exists only outside the end face projection region R3. The second element arrangement region R2 exists only within the end face projection region R3. The first element arrangement region R1 and the second element arrangement region R2 exist so as not to straddle the inside and outside of the end face projection region R3.

  As shown in FIG. 7, the first magnetic detection element 20A is arranged so as to intersect the first element arrangement region R1 without intersecting the second element arrangement region R2. The second magnetic detection element 20B is arranged so as to intersect with the second element arrangement region R2 without intersecting with the first element arrangement region R1.

  In the present embodiment, the end surface projection area R3 is an edge located between the first element arrangement area R1 and the second element arrangement area R2, and is an edge orthogonal to the second virtual straight line Lx. R3a. In the present embodiment, the first element arrangement region R1 and the second element arrangement region R2 are in contact with each other. The edge R3a of the end surface projection region R3 coincides with the boundary between the first element arrangement region R1 and the second element arrangement region R2.

  Next, the positional relationship between one yoke 11 and the first and second element arrangement regions R1 and R2 will be described. As shown in FIG. 1, the plurality of yokes 11 of the magnetic field conversion unit 10 are, as viewed from the Z direction, the second portions (the second portions of the plurality of magnetic detection element arrays 120 of the first to fourth resistance units 21 to 24). The plurality of second magnetoresistive elements 20B) are arranged so as to overlap. Here, a description will be given by taking, as an example, one yoke 11 that overlaps the magnetic detection element array 120 of the first resistor portion 21 or the fourth resistor portion 24. FIG. 7 shows the magnetic detection element array 120 and the yoke 11 of the first resistor portion 21 or the fourth resistor portion 24.

  As shown in FIG. 7, the yoke 11 has a yoke end surface 11a located at one end in a direction parallel to the first virtual straight line Lz. In the present embodiment, the yoke end surface 11 a is located at the end of the yoke 11 in the −Z direction. The yoke end surface 11a is one of the plurality of partial end surfaces. The end surface projection region R3 includes a yoke end surface projection region R31 formed by vertically projecting the yoke end surface 11a onto the virtual plane P. A yoke end surface projection region R31 corresponding to the yoke end surface 11a shown in FIG. 7 is one of the plurality of partial regions of the end surface projection region R3. As shown in FIG. 7, the first element arrangement region R1 exists only outside the yoke end surface projection region R31. The second element arrangement region R2 exists only inside the yoke end surface projection region R31.

  Further, the yoke end surface 11a has a first end edge 11a1 and a second end edge 11a2 located at both ends in a direction parallel to the second imaginary straight line Lx, and a direction parallel to the third imaginary straight line Ly. It has the 3rd edge 11a3 and the 4th edge 11a4 which are located in both ends. In the yoke 11 that overlaps the magnetic detection element array 120 of the first resistor portion 21 or the fourth resistor portion 24, the first end edge 11a1 is located at the end in the −X direction of the yoke end surface 11a, and the second end edge 11a2 is positioned at the end of the yoke end surface 11a in the X direction, the third end edge 11a3 is positioned at the end of the yoke end surface 11a in the -Y direction, and the fourth end edge 11a4 is positioned at the end of the yoke end surface 11a in the Y direction. To position.

  The yoke end surface projection region R31 has a first edge R31a orthogonal to the second imaginary straight line Lx. The first edge R31a is an edge formed by vertically projecting the first edge 11a1 of the yoke end surface 11a onto the virtual plane P. In the present embodiment, the first edge R31a coincides with the edge R3a of the end surface projection region R3.

  The yoke 11 that overlaps the magnetic detection element array 120 of the second resistance part 22 or the third resistance part 23 and the first and second magnetic detection elements of the second resistance part 22 or the third resistance part 23 The positional relationship between 20A and 20B is basically the same as the positional relationship described with reference to FIG. However, in the yoke 11 that overlaps the magnetic detection element array 120 of the second resistor portion 22 or the third resistor portion 23, the first end edge 11a1 is located at the end in the X direction of the yoke end surface 11a, and the second end The edge 11a2 is located at the end of the yoke end surface 11a in the −X direction.

  Next, the first element arrangement region R1 and the second element arrangement region R2 will be described in more detail. First, the ratio of the intensity of the output magnetic field component at an arbitrary point in the virtual plane P to the intensity of the input magnetic field component is defined as the conversion efficiency at that arbitrary point. FIG. 8 is a characteristic diagram illustrating an example of the relationship between the position on the second virtual straight line Lx and the conversion efficiency. FIG. 8 particularly shows the conversion efficiency for one yoke 11 that overlaps the magnetic detection element array 120 of the first resistor portion 21 or the fourth resistor portion 24. In FIG. 8, the horizontal axis indicates the position on the second virtual straight line Lx, and the vertical axis indicates the conversion efficiency. In FIG. 8, the intersection of the second imaginary straight line Lx and the first edge R31a (see FIG. 7) of the yoke end surface projection region R31 is the origin of the horizontal axis, and is ahead of the origin in the −X direction. The position is represented by a negative value, and the position ahead of the origin in the X direction is represented by a positive value.

  Here, when the arbitrary point is moved in one direction parallel to the second virtual straight line Lx, the ratio of the change amount of the conversion efficiency at the arbitrary point to the change amount of the position of the arbitrary point is expressed as an arbitrary point. The slope of the conversion efficiency at. One of the inclination of the conversion efficiency at an arbitrary first point in the first element arrangement region R1 and the inclination of the conversion efficiency at an arbitrary second point in the second element arrangement region R2 is a positive value. Is a negative value. In FIG. 8, a broken straight line denoted by reference numeral 51 indicates the slope of the conversion efficiency at a certain point in the first element arrangement region R1. A broken straight line denoted by reference numeral 52 indicates the slope of the conversion efficiency at a certain point in the second element arrangement region R2. In the present embodiment, one direction parallel to the second virtual straight line Lx is the X direction. In this case, the slope of the conversion efficiency at an arbitrary first point in the first element placement region R1 (for example, the slope of the broken line with the reference numeral 51) is a positive value, and is within the second element placement region R2. The slope of the conversion efficiency at an arbitrary second point (for example, the slope of the broken line with the reference numeral 52) is a negative value.

  Further, as shown in FIG. 7, the center of gravity of the portion of the first element placement region R1 that intersects the first magnetic detection element 20A is the first center of gravity C1, and the second center of the second element placement region R2 is the first. The center of gravity of the portion intersecting with the second magnetic detection element 20B is defined as a second center of gravity C2. The ratio of the absolute value of the conversion efficiency gradient at the second centroid C2 to the absolute value of the conversion efficiency gradient at the first centroid C1 is preferably in the range of 0.48 to 2.1.

  As shown in FIG. 8, the conversion efficiency becomes maximum near the origin of the horizontal axis. As described above, the origin of the horizontal axis is the intersection of the second virtual straight line and the first edge R31a of the yoke end surface projection region R31, and the first edge R31a is on the virtual plane P. This is an edge formed by vertically projecting the first edge 11a1 of the yoke end surface 11a. FIG. 8 shows that as the distance between an arbitrary point near the yoke 11 on the virtual plane P and the first edge 11a1 decreases, the conversion efficiency at the arbitrary point increases, and this distance increases. This indicates that the conversion efficiency at an arbitrary point decreases.

  Next, resistance values of the first to fourth resistance units 21 to 24 and output signals generated by the magnetic field detection unit 20 will be described. In the present embodiment, in the absence of the output magnetic field component, the magnetization direction of each free layer 204 of the first and second magnetoresistance effect elements 20A and 20B is parallel to the third virtual straight line Ly. It is in the direction. When the direction of the input magnetic field component is the Z direction, the direction of the output magnetic field component received by the first and second magnetoresistance effect elements 20A and 20B in the first and fourth resistance portions 21 and 24 is the X direction, The direction of the output magnetic field component received by the first and second magnetoresistance effect elements 20A and 20B in the second and third resistance portions 22 and 23 is the -X direction. In this case, the magnetization direction of the free layer 204 of the first and second magnetoresistive elements 20A and 20B in the first and fourth resistance portions 21 and 24 is a direction parallel to the third virtual straight line Ly. Tilt toward X direction. As a result, the first and second resistance values Ra and Rb are increased, and the resistance values of the first and fourth resistance units 21 and 24 are also increased, as compared with a state where there is no output magnetic field component. The magnetization direction of the free layer 204 of the first and second magnetoresistive elements 20A and 20B in the second and third resistance portions 22 and 23 is −X from the direction parallel to the third virtual straight line Ly. Tilt in the direction. As a result, the first and second resistance values Ra and Rb are reduced, and the resistance values of the second and third resistance portions 22 and 23 are also reduced, compared to a state where no output magnetic field component exists.

  When the direction of the input magnetic field component is in the −Z direction, the change in the direction of the output magnetic field component and the resistance values of the first to fourth resistance units 21 to 24 are as follows. The opposite is true.

  The amount of change in the first and second resistance values Ra and Rb depends on the strength of the output magnetic field component received by the first and second magnetoresistance effect elements 20A and 20B, respectively. When the intensity of the output magnetic field component increases, the first and second resistance values Ra and Rb change in a direction in which the increase amount or the decrease amount increases. When the intensity of the output magnetic field component decreases, the first and second resistance values Ra and Rb change in the direction in which the increase amount or the decrease amount decreases. The strength of the output magnetic field component depends on the strength of the input magnetic field component.

  As described above, when the direction and intensity of the input magnetic field component are changed, the resistance values of the first to fourth resistance units 21 to 24 are increased by the resistance values of the first and fourth resistance units 21 and 24, respectively. And the resistance values of the second and third resistance units 22 and 23 decrease or the resistance values of the first and fourth resistance units 21 and 24 decrease and the second and third resistance units 22 and 23 decrease. It changes so that the resistance value increases. As a result, the potential difference between the first output port E1 and the second output port E2 shown in FIG. 4 changes. The magnetic field detection unit 20 generates a signal that depends on the potential difference between the first output port E1 and the second output port E2 as an output signal.

  As described above, when the first and second resistance values Ra and Rb change, the combined resistance value Rc also changes. Since the resistance values of the first to fourth resistance units 21 to 24 depend on the combined resistance value Rc, it can be said that the output signal also depends on the combined resistance value Rc.

  Next, the operation and effect of the magnetic sensor 1 according to the present embodiment will be described. First, a magnetic sensor of a comparative example will be described. The magnetic sensor of the comparative example includes a plurality of magnetic detection elements connected in series instead of the first and second magnetic detection elements 20A and 20B in the present embodiment. In the comparative example, all the magnetic detection elements are arranged across the inside and outside of the end surface projection region R3 so as to intersect the edge R3a (see FIG. 7) of the end surface projection region R3.

  In the comparative example, all the magnetic detection elements are arranged so that, for example, the center of gravity of the portion of the virtual plane P that intersects the magnetic detection element coincides with the edge R3a of the end surface projection region R3 by design. In this case, when the positional deviation between the magnetic field conversion unit 10 and the magnetic field detection unit 20 occurs, the center of gravity is shifted from the edge R3a of the end surface projection region R3. In the example shown in FIG. 8 where the conversion efficiency of the yoke 11 is shown, if the center of gravity is shifted by 0.5 μm in the −X direction, the conversion efficiency is reduced by about 15%. As described above, in the magnetic sensor of the comparative example, when the displacement between the magnetic field conversion unit 10 and the magnetic field detection unit 20 occurs, the conversion efficiency changes greatly, and as a result, the output signal changes greatly.

  On the other hand, in the present embodiment, the first magnetic detection element 20A is arranged so as to intersect the first element arrangement region R1 without intersecting the second element arrangement region R2. The second magnetic detection element 20B is arranged so as to intersect with the second element arrangement region R2 without intersecting with the first element arrangement region R1. Each of the first and second element arrangement regions R1, R2 exists only in one of the inside and the outside of the end face projection region R3. Particularly in the present embodiment, the first element arrangement region R1 exists only outside the end face projection area R3, and the second element arrangement area R2 exists only inside the end face projection area R3.

  Here, the first center of gravity C1 shown in FIG. 7 is the first point in the first element arrangement region R1, and the second center of gravity C2 shown in FIG. 7 is the second point in the second element arrangement region R2. Consider the case of a point. Further, the distance between the first point and the first end edge 11a1 of the yoke end surface 11a of the yoke 11 is defined as a first distance, and the distance between the second point and the first end edge 11a1 is defined as a second distance. Distance. When the positional deviation between the magnetic field conversion unit 10 and the magnetic field detection unit 20 occurs, the first distance and the second distance change.

  When the first point and the second point are changed in one direction parallel to the second virtual straight line Lx, one of the first distance and the second distance decreases and the other increases. When the first distance decreases, the conversion efficiency at the first point increases, and as a result, the strength of the output magnetic field component at the first point increases. As the first distance increases, the conversion efficiency at the first point decreases, and as a result, the strength of the output magnetic field component at the first point decreases. When the second distance decreases, the conversion efficiency at the second point increases, and as a result, the strength of the output magnetic field component at the second point increases. When the second distance increases, the conversion efficiency at the second point decreases, and as a result, the strength of the output magnetic field component at the second point decreases.

  For example, in the first and fourth resistance portions 21 and 24, when the first point and the second point are changed in the X direction, the first distance decreases and the second distance increases. As a result, the conversion efficiency and the strength of the output magnetic field component at the first point increase, and the conversion efficiency and the strength of the output magnetic field component at the second point decrease. Further, when the first point and the second point are changed in the −X direction, the first distance increases and the second distance decreases. As a result, the conversion efficiency and the intensity of the output magnetic field component at the first point decrease, and the conversion efficiency and the intensity of the output magnetic field component at the second point increase. In any of these cases, the amount of change in conversion efficiency and the amount of change in the intensity of the output magnetic field component due to misregistration are larger than in the comparative example when viewed in the entirety of each of the first and fourth resistance units 21 and 24. As a result, the amount of change in the resistance values of the first and fourth resistance portions 21 and 24 due to the displacement is also reduced.

  The above description of the first and fourth resistance portions 21 and 24 also applies to the second and third resistance portions 22 and 23. In the second and third resistance portions 22 and 23, when the first point and the second point are changed in the X direction, the first distance increases and the second distance decreases. Further, when the first point and the second point are changed in the −X direction, the first distance decreases and the second distance increases.

  From the above, according to the present embodiment, it is possible to suppress the change in the output signal due to the positional deviation.

  By the way, in order to reduce the amount of change in the resistance value of each of the first to fourth resistance units 21, 22, 23, and 24 due to the displacement, the absolute value of the slope of the conversion efficiency at the first centroid C1 and the first The absolute value of the gradient of the conversion efficiency at the center of gravity C2 of 2 is preferably close. From this point of view, the ratio of the absolute value of the slope of the conversion efficiency at the second centroid C2 to the absolute value of the slope of the conversion efficiency at the first centroid C1 may be in the range of 0.83 to 1.20. More preferred.

  Here, the reason why it is difficult to suppress the change in conversion efficiency due to the positional deviation between the magnetoresistive effect element and the soft magnetic material in the technique described in Patent Document 1 will be described. In Patent Document 1, all the magnetoresistive effect elements have the center of the magnetoresistive effect element positioned outside the end face projection area of the soft magnetic material corresponding to the end face projection area R3, and the entire magnetoresistive effect element is soft magnetic. It is arranged so as to straddle the inside and outside of the end face projection area of the body. In Patent Document 1, two magnetoresistive elements are connected in series to form an element group. If the magnetoresistive effect element and the soft magnetic material are misaligned, one of the two magnetoresistive effect elements that the element group constitutes is centered away from the boundary between the inside and the outside of the end face projection region, and the element group constitutes The other of the two magnetoresistive effect elements has a center approaching the boundary between the inside and outside of the end face projection region. In this case, the magnetoresistance effect element whose center is far from the boundary between the inside and outside of the end face projection area has a large reduction in conversion efficiency, and the magnetoresistive element whose center is close to the boundary between the inside and outside of the projection area. In the effect element, the increase in conversion efficiency is small. Therefore, in the technique described in Patent Document 1, when the positional deviation between the magnetoresistive element and the soft magnetic material occurs, the amount of change in conversion efficiency in the element group increases.

  Next, the configuration of the magnetic sensors 2 and 3 of the magnetic sensor unit 100 shown in FIG. 6 will be briefly described. The configuration of the magnetic sensors 2 and 3 is basically the same as the configuration of the magnetic sensor 1 according to the present embodiment. However, the magnetic sensors 2 and 3 are not provided with the magnetic field conversion unit 10. The magnetic sensor 2 is configured to detect a magnetic field in the Y direction. Specifically, for example, in the magnetic sensor 2, the magnetization direction of the magnetization fixed layer 202 of the first and second magnetic detection elements 20A and 20B included in the first and fourth resistance units 21 and 24 is expressed as Y The magnetization direction of the magnetization fixed layer 202 of the first and second magnetic detection elements 20A and 20B included in the first and fourth resistance portions 21 and 24 of the magnetic sensor 2 is defined as a −Y direction.

  The magnetic sensor 3 is configured to detect a magnetic field in the X direction. Specifically, for example, in the magnetic sensor 3, the magnetization direction of the magnetization fixed layer 202 of the first and second magnetic detection elements 20A and 20B included in the first and fourth resistance portions 21 and 24 is expressed as X The magnetization direction of the magnetization fixed layer 202 of the first and second magnetic detection elements 20A and 20B included in the first and fourth resistance portions 21 and 24 of the magnetic sensor 2 is defined as a −X direction.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. First, the configuration of the magnetic sensor according to the present embodiment will be described with reference to FIGS. 9 and 10. FIG. 9 is an explanatory diagram schematically showing the configuration of the magnetic sensor according to the present embodiment. FIG. 10 is an exploded perspective view showing a part of the magnetic sensor according to the present embodiment. The magnetic sensor 1 according to the present embodiment is different from the first embodiment in the following points. The magnetic sensor 1 according to the present embodiment includes a wiring layer 130 instead of the wiring layer 30 in the first embodiment. The wiring layer 130 electrically connects the first and second magnetic detection elements 20A and 20B. The overall shape of the wiring layer 130 viewed from the Z direction is a meander shape. The wiring layer 130 includes a plurality of lower electrodes 131 and a plurality of upper electrodes 132. In FIG. 9, the lower electrode 131 and the upper electrode 132 are omitted, and only the entire shape of the wiring layer 130 is shown.

  The plurality of lower electrodes 131 are arranged on the upper surface 101a of the substrate 101 shown in FIG. 6 in the first embodiment. In the present embodiment, the first and second magnetic detection elements 20 </ b> A and 20 </ b> B are disposed on the plurality of lower electrodes 131. The plurality of upper electrodes 132 are disposed on the first and second magnetic detection elements 20A and 20B. In the present embodiment, the plurality of yokes 11 are disposed above the plurality of upper electrodes 132.

  In the present embodiment, the first magnetic detection element 20A is a first magnetoresistance effect element, and the second magnetic detection element 20B is a second magnetoresistance effect element. Hereinafter, the first magnetic detection element 20A is also referred to as a first magnetoresistance effect element 20A, and the second magnetic detection element 20B is also referred to as a second magnetoresistance effect element 20B. Hereinafter, the connection relationship between the first and second magnetic detection elements 20A and 20B, the lower electrode 131, and the upper electrode 132 will be described. Here, one magnetic detection element array 120 of the first resistance part 21 or the fourth resistance part 24 will be described as an example. FIG. 10 shows one magnetic detection element array 120 of the first resistor portion 21 or the fourth resistor portion 24.

  As shown in FIG. 10, the plurality of lower electrodes 131 includes a plurality of first electrodes 131A and a plurality of second electrodes 131B. Each of the first and second electrodes 131A and 131B has an elongated shape in the Y direction. A gap is formed between two first electrodes 131A adjacent in the Y direction. On the upper surface of the first electrode 131A, the first magnetoresistance effect element 20A is disposed in the vicinity of both ends in the Y direction. A gap is formed between two second electrodes 131B adjacent in the Y direction. On the upper surface of the second electrode 131B, the second magnetoresistance effect element 20B is disposed in the vicinity of both ends in the Y direction.

  As shown in FIG. 10, the plurality of upper electrodes 132 include a plurality of third electrodes 132A and a plurality of fourth electrodes 132B. Each of the plurality of third electrodes 132A is disposed on the two first electrodes 131A adjacent in the Y direction and electrically connects the two adjacent first magnetoresistive elements 20A. Each of the plurality of fourth electrodes 132B is disposed on the two second electrodes 131B adjacent in the Y direction and electrically connects the two adjacent second magnetoresistance effect elements 20B.

  The connection relationship between the first and second magnetic detection elements 20A, 20B, the lower electrode 131, and the upper electrode 132 in one magnetic detection element array 120 of the second resistance section 22 or the third resistance section 23 is basically the same. Specifically, the connection relationship described with reference to FIG. 10 is the same.

  The wiring layer 130 further includes a plurality of first connection electrodes and a plurality of second connection electrodes. The first connection electrode electrically connects the first electrode 131A and the second electrode 131B so that the first portion and the second portion are connected in series in each of the plurality of magnetic detection element arrays 120. Connecting. The second connection electrode electrically connects the first electrode 131A and the second electrode 131B so that the plurality of magnetic detection element arrays 120 are connected in series in each of the first to fourth resistance portions 21 to 24. Connect. With such a configuration, each of the first to fourth resistance units 21 to 24 includes a plurality of first magnetoresistance effect elements 20A and a plurality of second magnetoresistance effect elements 20B connected in series. Yes.

  In the present embodiment, the directions of the output magnetic field components received by the first and second magnetoresistive elements 20A and 20B connected in series in each of the first to fourth resistance units 21 to 24 are the same. .

  Here, the number of the plurality of first magnetoresistance effect elements 20A included in each of the first to fourth resistance portions 21 to 24 is n. The number of the plurality of second magnetoresistive elements 20B included in each of the first to fourth resistance units 21 to 24 is n. In this case, when the first resistance value of the first magnetoresistance effect element 20A is represented by the symbol Ra and the second resistance value of the second magnetoresistance effect element 20B is represented by the symbol Rb, the first to fourth Each resistance value of the resistance units 21 to 24 is n (Ra + Rb).

  Other configurations, operations, and effects in the present embodiment are the same as those in the first embodiment.

[Third Embodiment]
Next, a third embodiment of the present invention will be described. First, the configuration of the magnetic sensor according to the present embodiment will be described with reference to FIGS. 11 and 12. FIG. 11 is an explanatory diagram schematically showing the configuration of the magnetic sensor according to the present embodiment. FIG. 12 is an exploded perspective view showing a part of the magnetic sensor according to the present embodiment. The magnetic sensor 1 according to the present embodiment is different from the first embodiment in the following points. In the present embodiment, each of the first to fourth resistance units 21 to 24 of the magnetic field detection unit 20 has one magnetic detection element array instead of the plurality of magnetic detection element arrays 120 in the first embodiment. 220 is included.

  The magnetic detection element array 220 includes a first portion in which a plurality of first magnetic detection elements 20A are arranged in the Y direction, and a second portion in which a plurality of second magnetic detection elements 20B are arranged in the Y direction. It is out. In the first resistance part 21 and the second resistance part 22, the first part and the second part of the magnetic detection element array 220 are arranged in this order in the X direction. In the third resistor portion 23 and the fourth resistor portion 24, the first portion and the second portion of the magnetic detection element array 220 are arranged in this order in the −X direction.

  Further, in the present embodiment, the magnetic field conversion unit 10 includes two yokes 12 instead of the plurality of yokes 11 in the first embodiment. Each of the two yokes 12 has a rectangular parallelepiped shape that is long in a direction parallel to the third virtual straight line Ly. One of the two yokes 12 is disposed so as to overlap the second portion of the magnetic detection element array 220 of the first and third resistance units 21 and 23. The other of the two yokes 12 is disposed so as to overlap the second portion of the magnetic detection element array 220 of the second and fourth resistance portions 22 and 24. The two yokes 12 are arranged in the Y direction.

  In the present embodiment, the first and second magnetoresistive effects that are the first and second magnetic detection elements 20A and 20B included in the first and third resistance units 21 and 23 of the magnetic field detection unit 20 are also described. The magnetization direction of the magnetization fixed layer 202 (see FIG. 5) of the elements 20A and 20B is the −X direction. Magnetization pinned layers of the first and second magnetoresistance effect elements 20A and 20B, which are the first and second magnetic detection elements 20A and 20B included in the second and fourth resistance sections 22 and 24 of the magnetic field detection section 20. The magnetization direction of 202 is the X direction. In FIG. 12, an arrow with a reference numeral 41 represents the magnetization direction of the magnetization fixed layer 202 of the first magnetoresistive effect element 20 </ b> A included in the first and third resistance units 21 and 23, and is attached with a reference numeral 42. The arrows indicated indicate the magnetization directions of the magnetization fixed layer 202 of the second magnetoresistance effect element 20B included in the first and third resistance portions 21 and 23.

  In the present embodiment, the directions of the output magnetic field components received by the first and second magnetoresistive elements 22A and 22B in the second resistor 22 are the first and second in the first resistor 21. The direction of the output magnetic field component received by the magnetoresistive effect elements 21A and 21B is the same. On the other hand, the direction of the output magnetic field component received by the first and second magnetoresistance effect elements 23A and 23B in the third resistance section 23, and the first and second magnetoresistance effect elements in the fourth resistance section 24 The direction of the output magnetic field component received by 24A and 24B is opposite to the direction of the output magnetic field component received by the first and second magnetoresistance effect elements 21A and 21B in the first resistance section 21.

  Next, the positional relationship between the yoke 12 and the first and second magnetic detection elements 20A and 20B will be described with reference to FIG. FIG. 13 is an explanatory diagram showing the positional relationship between the yoke 12 and the first and second magnetic detection elements 20A and 20B. Here, a description will be given by taking, as an example, the yoke 12 that overlaps the magnetic detection element array 120 of the first resistance section 21 and the magnetic detection element array 120 of the third resistance section 23. FIG. 13 shows the magnetic detection element array 120 of the first resistance section 21, the magnetic detection element array 120 of the third resistance section 23, and the yoke 12.

  As shown in FIG. 13, the yoke 12 has a yoke end surface 12a located at one end in a direction parallel to the first virtual straight line Lz. In the present embodiment, the yoke end surface 12 a is located at the end of the yoke 12 in the −Z direction. As described in the first embodiment, the end surface projection region R3 is a region obtained by vertically projecting the end surface of the magnetic field conversion unit 10 on the virtual plane P. The end surface projection region R3 includes a yoke end surface projection region R32 formed by vertically projecting the yoke end surface 12a onto the virtual plane P. Here, in the first element arrangement area R1, the first element arrangement area R1 that defines the position of the first magnetic detection element 21A of the first resistance section 21 is denoted by reference numeral R11, and the third resistance section The first element arrangement region R1 that defines the position of the 23 first magnetic detection elements 23A is denoted by reference numeral R13. In addition, in the second element arrangement region R2, the second element arrangement region R2 that defines the position of the second magnetic detection element 21B of the first resistor 21 is denoted by reference numeral R21, and the third resistor 23 The second element arrangement region R2 that defines the position of the second magnetic detection element 23B is denoted by reference numeral R23. As shown in FIG. 13, the first element arrangement regions R11 and R13 exist only outside the yoke end surface projection region R32. The second element arrangement regions R21 and R23 exist only inside the yoke end surface projection region R32.

  The yoke end surface 12a has a first end edge 12a1 and a second end edge 12a2 positioned at both ends in a direction parallel to the second virtual straight line Lx, and a direction parallel to the third virtual straight line Ly. It has the 3rd edge 12a3 and the 4th edge 12a4 which are located in both ends. The first end edge 12a1 is located at the end of the yoke end face 12a in the −X direction, the second end edge 12a2 is located at the end of the yoke end face 12a in the X direction, and the third end edge 12a3 is located on the yoke end face 12a. The fourth end edge 12a4 is located at the end in the Y direction of the yoke end surface 12a.

  The yoke end surface projection region R32 has a first end edge R32a and a second end edge R32b located at opposite ends in a direction parallel to the second imaginary straight line Lx. The first end edge R32a is located at the −X direction end of the yoke end surface projection region R32. The second edge R32b is located at the end of the yoke end surface projection region R32 in the X direction. The first edge R32a is an edge formed by vertically projecting the first edge 12a1 of the yoke end surface 12a onto the virtual plane P. The second edge R32b is an edge formed by vertically projecting the second edge 12a2 of the yoke end surface 12a onto the virtual plane P.

  The first edge R32a coincides with the edge R3a of the end surface projection region R3. The end surface projection region R3 further has an end edge R3b orthogonal to the second virtual straight line Lx. The second end edge R32b of the yoke end surface projection region R32 coincides with the end edge R3b of the end surface projection region R3.

  In the present embodiment, the first element arrangement region R11 and the second element arrangement region R21 are in contact with each other. The edge R3a of the end surface projection region R3 and the first edge R32a of the yoke end surface projection region R32 coincide with the boundary between the first element placement region R11 and the second element placement region R21. In the present embodiment, the first element arrangement region R13 and the second element arrangement region R23 are in contact with each other. The edge R3b of the end surface projection region R3 and the second edge R32b of the yoke end surface projection region R32 coincide with the boundary between the first element placement region R13 and the second element placement region R23.

  The first magnetic detection element 21A is arranged so as to intersect with the first element arrangement region R11 without intersecting with the second element arrangement region R21. The second magnetic detection element 21B is arranged so as to intersect the second element arrangement region R21 without intersecting the first element arrangement region R11.

  The first magnetic detection element 23A is arranged so as to intersect the first element arrangement region R13 without intersecting the second element arrangement region R23. The second magnetic detection element 23B is arranged so as to intersect with the second element arrangement region R23 without intersecting with the first element arrangement region R13.

  The positional relationship between the yoke 12 and the magnetic detection elements 22A, 22B, 24A, and 24B is basically the same as the positional relationship described with reference to FIG. Here, in the first element arrangement area R1, the first element arrangement area R1 that defines the position of the first magnetic detection element 22A of the second resistance section 22 is denoted by reference numeral R12, and the fourth resistance section The first element arrangement region R1 that defines the positions of the 24 first magnetic detection elements 24A is denoted by reference numeral R14. Further, in the second element arrangement region R2, the second element arrangement region R2 that defines the position of the second magnetic detection element 23B of the third resistance unit 23 is denoted by reference numeral R23, and the fourth resistance unit 24 is provided. A second element arrangement region R2 that defines the position of the second magnetic detection element 24B is denoted by reference numeral R24. The magnetic detection elements 21A, 21B, 23A, 23B and the element arrangement regions R11, R21, R13, R23 in the description of the positional relationship described with reference to FIG. If replaced with R12, R22, R14, R24, the positional relationship between the yoke 12 and the magnetic detection elements 22A, 22B, 24A, 24B will be described.

  Next, resistance values of the first to fourth resistance portions 21 to 24 in the present embodiment will be described. Hereinafter, the first resistance value of the first magnetoresistance effect element 20A is represented by the symbol Ra, and the second resistance value of the second magnetoresistance effect element 20B is represented by the symbol Rb. As described in the first embodiment, in the state where the output magnetic field component does not exist, the magnetization direction of each free layer 204 (see FIG. 5) of each of the first and second magnetoresistance effect elements 20A and 20B is The direction is parallel to the third virtual straight line Ly. When the direction of the input magnetic field component is the Z direction, the direction of the output magnetic field component received by the first and second magnetoresistive elements 20A and 20B in the first and second resistance units 21 and 22 is the X direction, The direction of the output magnetic field component received by the first and second magnetoresistance effect elements 20A and 20B in the third and fourth resistance portions 23 and 24 is the -X direction. In this case, in the first resistance unit 21, the first and second resistance values Ra and Rb are increased and the resistance value of the first resistance unit 21 is also increased as compared to a state where no output magnetic field component is present. In the second resistance unit 22, the first and second resistance values Ra and Rb are reduced, and the resistance value of the second resistance unit 22 is also reduced, compared to a state where there is no output magnetic field component. In the third resistance portion 23, the first and second resistance values Ra and Rb are reduced and the resistance value of the third resistance portion 23 is also reduced as compared with a state in which no output magnetic field component exists. In the fourth resistance unit 24, the first and second resistance values Ra and Rb are increased and the resistance value of the fourth resistance unit 24 is increased as compared with a state in which no output magnetic field component is present.

  When the direction of the input magnetic field component is in the −Z direction, the change in the direction of the output magnetic field component and the resistance values of the first to fourth resistance units 21 to 24 are as follows. The opposite is true.

  Other configurations, operations, and effects in the present embodiment are the same as those in the first embodiment.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described. First, the configuration of the magnetic sensor according to the present embodiment will be described with reference to FIGS. 14 and 15. FIG. 14 is an explanatory diagram schematically showing the configuration of the magnetic sensor according to the present embodiment. FIG. 15 is an exploded perspective view showing a part of the magnetic sensor according to the present embodiment.

  The magnetic sensor 1 according to the present embodiment is different from the first embodiment in the following points. In the present embodiment, the magnetization direction of the magnetization fixed layer 202 (see FIG. 5) of the second magnetoresistance effect element 20B is the X direction. The magnetization direction of the magnetization fixed layer 202 of the first magnetoresistive effect element 20A is the −X direction, as in the first embodiment. In FIG. 15, an arrow with a reference numeral 41 indicates the direction of magnetization of the magnetization fixed layer 202 of the first magnetoresistance effect element 20A, and an arrow with a reference numeral 42 indicates the magnetization of the second magnetoresistance effect element 20B. The direction of magnetization of the fixed layer 202 is shown.

  In the present embodiment, the positional relationship between the yoke 11 of the magnetic field conversion unit 10 and the first and second magnetic detection elements 20A and 20B is different from that of the first embodiment. Hereinafter, the positional relationship between the yoke 11 and the first and second magnetic detection elements 20A and 20B will be described with reference to FIGS. FIG. 16 is an explanatory diagram showing the positional relationship between the yoke 11 and the first and second magnetic detection elements 20A and 20B.

  As shown in FIG. 14, the plurality of yokes 11 are, when viewed from the Z direction, the first portions (the plurality of first detection elements) of the plurality of magnetic detection element arrays 120 of the first to fourth resistance units 21 to 24. The magnetic detection element 20A) and the second portion (a plurality of second magnetic detection elements 20B) are arranged so as not to overlap. Here, the positional relationship between the magnetic detection element array 120 of the first resistance part 21 or the fourth resistance part 24 and the yoke 11 will be described as an example. FIG. 16 shows the magnetic detection element array 120 and the yoke 11 of the first resistor portion 21 or the fourth resistor portion 24.

  As described in the first embodiment, the first element arrangement region R1 is an area that defines the position of the first magnetic detection element 20A, and the second element arrangement region R2 is the second magnetic element. The end surface projection region R3 is a region that is formed by vertically projecting the end surface of the magnetic field conversion unit 10 onto a virtual plane P, and the yoke end surface projection region R31 is a virtual plane. This is an area formed by vertically projecting the yoke end surface 11a onto P. As shown in FIG. 16, in the present embodiment, the first element arrangement region R1 and the second element arrangement region R2 exist only outside the end face projection area R3 and sandwich the yoke end face projection area R31. And located on opposite sides in the direction parallel to the second virtual straight line Lx.

  Further, as described in the first embodiment, the yoke end surface projection region R31 has the first edge R31a. The yoke end surface projection region R31 further has a second end edge R31b orthogonal to the second imaginary straight line Lx. The first edge R31a and the second edge R31b are located at opposite ends of the yoke end surface projection region R31 in a direction parallel to the second virtual straight line. The first edge R31a is located at the end in the −X direction of the yoke end surface projection region R31. The second edge R31b is located at the end of the yoke end surface projection region R31 in the X direction. The second edge R31b is an edge formed by vertically projecting the second edge 11a2 of the yoke end surface 11a onto the virtual plane P.

  The first edge R31a coincides with the edge R3a of the end surface projection region R3. The end surface projection region R3 further includes an edge R3b that is located between the first element arrangement region R1 and the second element arrangement region R2 and is orthogonal to the second virtual straight line Lx. ing. The second end edge R31b of the yoke end surface projection region R31 coincides with the end edge R3b of the end surface projection region R3.

  The first element arrangement region R1 is in contact with the first edge R31a of the yoke end surface projection region R31. The second element arrangement region R2 is in contact with the second edge R31b of the yoke end surface projection region R32.

  The first magnetic detection element 20A is arranged so as to intersect with the first element arrangement region R1 without intersecting with the second element arrangement region R2. The second magnetic detection element 20B is arranged so as to intersect with the second element arrangement region R2 without intersecting with the first element arrangement region R1.

  The positional relationship between the first and second magnetic detection elements 20A and 20B of the second resistor 22 or the third resistor 23 and the yoke 11 is basically the position described with reference to FIG. Same as relationship. However, in the yoke 11 related to the second and third resistance portions 22 and 23, the first end edge 11a1 is located at the end of the yoke end surface 11a in the X direction, and the second end edge 11a2 is the yoke end surface 11a. -Located at the end in the X direction. Further, in the yoke end surface projection region R31 obtained by vertically projecting the yoke end surface 11a of the yoke 11 on the virtual plane P, the first end edge R31a is located at the end of the yoke end surface projection region R31 in the X direction, and The second edge R31b is located at the −X direction end of the yoke end surface projection region R31.

  Here, the direction of the output magnetic field component in the present embodiment will be described. In the present embodiment, the directions of the output magnetic field components received by the first and second magnetic detection elements 20A and 20B constituting one element pair are opposite to each other. The direction of the output magnetic field component received by the first magnetic detection element 24A is the same as the direction of the output magnetic field component received by the first magnetic detection element 21A, and the direction of the output magnetic field component received by the second magnetic detection element 24B is the same. The direction is the same as the direction of the output magnetic field component received by the second magnetic detection element 21B. On the other hand, the direction of the output magnetic field component received by the first magnetic detection elements 22A and 23A is opposite to the direction of the output magnetic field component received by the first magnetic detection element 21A, and the second magnetic detection elements 22B and 23B The direction of the output magnetic field component received is opposite to the direction of the output magnetic field component received by the second magnetic detection element 21B.

  Next, resistance values of the first to fourth resistance portions 21 to 24 in the present embodiment will be described. Hereinafter, the first resistance value of the first magnetoresistance effect element 20A is represented by the symbol Ra, and the second resistance value of the second magnetoresistance effect element 20B is represented by the symbol Rb. As described in the first embodiment, in the state where the output magnetic field component does not exist, the magnetization direction of each free layer 204 (see FIG. 5) of each of the first and second magnetoresistance effect elements 20A and 20B is The direction is parallel to the third virtual straight line Ly. When the direction of the input magnetic field component is the Z direction, the first and second magnetoresistance effect elements 20A in the first and fourth resistance portions 21 and 24 and the second resistance portions 22 and 23 in the second resistance portions 22 and 23 are used. The direction of the output magnetic field component received by the second magnetoresistive effect element 20B is the X direction, and the second magnetoresistive effect element 20B and the second and third resistance parts in the first and fourth resistance parts 21 and 24. The direction of the output magnetic field component received by the first and second magnetoresistive elements 20A in 22 and 23 is the -X direction. In this case, in the first and fourth resistance portions 21 and 24, the first and second resistance values Ra and Rb increase compared to the state where no output magnetic field component exists, and the first and fourth resistance portions. The resistance values of 21 and 24 also increase. In the second and third resistance units 22 and 23, the first and second resistance values Ra and Rb are reduced compared to a state in which no output magnetic field component exists, and the second and third resistance units 22 and 23 are reduced. The resistance value of is also reduced.

  When the direction of the input magnetic field component is in the −Z direction, the change in the direction of the output magnetic field component and the resistance values of the first to fourth resistance units 21 to 24 are as follows. The opposite is true.

  The magnetic sensor 1 according to the present embodiment may include the wiring layer 130 described in the second embodiment instead of the wiring layer 30. Other configurations, operations, and effects in the present embodiment are the same as those in the first or second embodiment.

[Fifth Embodiment]
Next, a fifth embodiment of the present invention will be described with reference to FIG. FIG. 17 is an explanatory diagram schematically showing the configuration of the magnetic sensor according to the present embodiment. The magnetic sensor 1 according to the present embodiment is different from the fourth embodiment in the following points. In the magnetic sensor 1 according to the present embodiment, the third and fourth resistance portions 23 and 24 in the fourth embodiment are not provided. Further, the magnetic field detection unit 20 includes one output port E instead of the first and second output ports E1 and E2 in the fourth embodiment.

  In the present embodiment, the first resistor portion 21 and the second resistor portion 22 are configured to be connected in series and energized. Specifically, the first resistance portion 21 and the second resistance portion 22 are provided between the power supply port V and the ground port G in this order. A connection point between the first resistor portion 21 and the second resistor portion 22 is electrically connected to the output port E.

  The mode of change of the resistance value of the first resistance unit 21 and the resistance value of the second resistance unit 22 depending on the input magnetic field component is the same as that of the fourth embodiment. That is, when the input magnetic field component changes, one of the resistance value of the first resistance unit 21 and the resistance value of the second resistance unit 22 increases and the other decreases. As a result, the potential at the connection point between the first resistor 21 and the second resistor 22 changes. The magnetic field detection unit 20 generates a signal depending on the potential of the output port E, which is a connection point between the first resistance unit 21 and the second resistance unit 22, as an output signal.

  In the present embodiment, each of the first and second resistance units 21 and 22 of the magnetic field detection unit 20 is the third implementation instead of the plurality of magnetic detection element arrays 120 in the fourth embodiment. One magnetic detection element row 220 described in the form is included. The magnetic detection element array 220 includes a first portion in which a plurality of first magnetic detection elements 20A are arranged in the Y direction, and a second portion in which a plurality of second magnetic detection elements 20B are arranged in the Y direction. It is out. In the first resistance unit 21, the first part and the second part of the magnetic detection element array 220 are arranged in this order in the X direction. In the second resistance portion 22, the first portion and the second portion of the magnetic detection element array 220 are arranged in this order in the −X direction.

  In the present embodiment, the magnetic field conversion unit 10 includes the two yokes 12 described in the third embodiment instead of the plurality of yokes 11 in the fourth embodiment. As shown in FIG. 17, the two yokes 12 do not overlap the first and second portions of the magnetic detection element array 220 of the first and second resistance portions 21 and 22 when viewed from the Z direction. Has been placed. The positional relationship between the magnetic detection elements 21A, 21B, 22A, 22B and the yoke 12 is the same as the positional relationship between the magnetic detection elements 21A, 21B, 22A, 22B and the yoke 11 in the fourth embodiment.

  Other configurations, operations, and effects in the present embodiment are the same as those in the fourth embodiment.

[Sixth Embodiment]
Next, a sixth embodiment of the present invention will be described. First, the configuration of the magnetic sensor according to the present embodiment will be described with reference to FIGS. FIG. 18 is an explanatory diagram schematically showing the configuration of the magnetic sensor according to the present embodiment. FIG. 19 is an exploded perspective view showing a part of the magnetic sensor according to the present embodiment. FIG. 20 is an explanatory diagram showing the positional relationship between the yoke 11 and the first and second magnetic detection elements 20A and 20B.

  The magnetic sensor 1 according to the present embodiment is different from the fourth embodiment in the following points. As shown in FIG. 18, in the present embodiment, the plurality of yokes 11 are the first portions of the plurality of magnetic detection element arrays 120 of the first to fourth resistance units 21 to 24 as viewed from the Z direction. It arrange | positions so that it may overlap with (a plurality of 1st magnetic detection elements 20A) and a 2nd part (a plurality of 2nd magnetic detection elements 20B). Here, the positional relationship between the magnetic detection element array 120 of the first resistance part 21 or the fourth resistance part 24 and the yoke 11 will be described as an example. FIG. 20 shows the magnetic detection element array 120 and the yoke 11 of the first resistor portion 21 or the fourth resistor portion 24.

  As described in the fourth embodiment (the first embodiment), the first element arrangement region R1 is an area that defines the position of the first magnetic detection element 20A, and the second element arrangement region R1. The region R2 is a region that defines the position of the second magnetic detection element 20B, and the end surface projection region R3 is a region formed by vertically projecting the end surface of the magnetic field conversion unit 10 onto the virtual plane P, and the yoke end surface The projection region R31 is a region formed by vertically projecting the yoke end surface 11a onto the virtual plane P. The yoke end surface projection region R31 has a first edge R31a and a second edge R31b.

  As shown in FIG. 20, in the present embodiment, the first element arrangement region R1 and the second element arrangement region R2 exist only inside the yoke end surface projection region R31. The first element arrangement region R1 is located between the first edge R31a and the second element arrangement region R2. The second element arrangement region R2 is located between the second edge R31b and the first element arrangement region R1. Particularly in the present embodiment, the first element arrangement region R1 is in contact with the first end edge R31a. The second element arrangement region R2 is in contact with the second edge R31b. In the present embodiment, the first element arrangement region R1 and the second element arrangement region R2 are not directly adjacent to each other.

  The first magnetic detection element 20A is arranged so as to intersect with the first element arrangement region R1 without intersecting with the second element arrangement region R2. The second magnetic detection element 20B is arranged so as to intersect with the second element arrangement region R2 without intersecting with the first element arrangement region R1.

  The positional relationship between the first and second magnetic detection elements 20A and 20B of the second resistor 22 or the third resistor 23 and the yoke 11 is basically the position described with reference to FIG. Same as relationship. However, in the yoke 11 related to the second and third resistance portions 22 and 23, the first end edge 11a1 is located at the end of the yoke end surface 11a in the X direction, and the second end edge 11a2 is the yoke end surface 11a. -Located at the end in the X direction. Further, in the yoke end surface projection region R31 obtained by vertically projecting the yoke end surface 11a of the yoke 11 on the virtual plane P, the first end edge R31a is located at the end of the yoke end surface projection region R31 in the X direction, and The second edge R31b is located at the −X direction end of the yoke end surface projection region R31.

  The magnetic sensor 1 according to the present embodiment may include the wiring layer 130 described in the second embodiment instead of the wiring layer 30. Other configurations, operations, and effects in the present embodiment are the same as those in the second or fourth embodiment.

[Seventh Embodiment]
Next, a seventh embodiment of the present invention will be described with reference to FIG. FIG. 21 is an explanatory diagram schematically showing the configuration of the magnetic sensor according to the present embodiment. The magnetic sensor 1 according to the present embodiment is different from the fifth embodiment in the following points. In the magnetic sensor 1 according to the present embodiment, the positional relationship between the first and second magnetic detection elements 21A and 21B of the first resistor 21 and the yoke 11 is the first resistor in the sixth embodiment. This is the same as the positional relationship between the yoke 11 and the first and second magnetic detection elements 20A and 20B of the 21 or the fourth resistance portion 24. The positional relationship between the first and second magnetic detection elements 22A and 22B of the second resistor 22 and the yoke 11 is the same as that of the second resistor 22 or the third resistor 23 in the sixth embodiment. The positional relationship between the first and second magnetic detection elements 20A, 20B and the yoke 11 is the same.

  Other configurations, operations, and effects in the present embodiment are the same as those in the fifth or sixth embodiment.

[Eighth Embodiment]
Next, an eighth embodiment of the present invention will be described. First, the configuration of the magnetic sensor according to the present embodiment will be described with reference to FIGS. FIG. 22 is an explanatory diagram schematically showing the configuration of the magnetic sensor according to the present embodiment. FIG. 23 is an exploded perspective view showing a part of the magnetic sensor according to the present embodiment. FIG. 24 is an explanatory diagram showing the positional relationship between the yoke and the first and second magnetic detection elements 20A and 20B.

  The magnetic sensor 1 according to the present embodiment is different from the fourth embodiment in the following points. In the present embodiment, the magnetization direction of the magnetization fixed layer 202 (see FIG. 5) of the first magnetoresistance effect element 20A is the X direction, and the magnetization of the magnetization fixed layer 202 of the second magnetoresistance effect element 20B. The direction of is the -X direction. In FIG. 23, an arrow with a reference numeral 41 indicates the direction of magnetization of the magnetization fixed layer 202 of the first magnetoresistance effect element 20A, and an arrow with a reference numeral 42 indicates the magnetization of the second magnetoresistance effect element 20B. The direction of magnetization of the fixed layer 202 is shown.

  In the present embodiment, the magnetic field conversion unit 10 includes a plurality of yokes 13 instead of the plurality of yokes 11 in the fourth embodiment. Each of the plurality of yokes 13 has a rectangular parallelepiped shape that is long in a direction parallel to the third virtual straight line Ly.

  As shown in FIG. 22, the plurality of yokes 13 are arranged so as not to overlap the plurality of magnetic detection element arrays 120 of the first to fourth resistance portions 21 to 24 when viewed from the Z direction. One magnetic detection element array 120 is disposed between two yokes 13 arranged in the X direction. Here, the positional relationship between one magnetic detection element array 120 of the first resistance portion 21 or the fourth resistance portion 24 and the two yokes 13 will be described as an example. FIG. 24 shows one magnetic detection element array 120 and two yokes 13 of the first resistor portion 21 or the fourth resistor portion 24.

  In the present embodiment, the two yokes 13 arranged on both sides in the X direction of one magnetic detection element array 120 correspond to the “first yoke” and the “second yoke” in the present invention. In FIG. 23 and FIG. 24, the yoke 13 ahead of the magnetic detection element array 120 in the −X direction is denoted by reference numeral 13A, and the yoke 13 ahead of the magnetic detection element array 120 in the X direction is denoted by reference numeral 13B. The yokes 13A and 13B correspond to a “first yoke” and a “second yoke”, respectively.

  The yoke 13A has a first yoke end surface 13Aa located at one end of the first virtual straight line Lz. In the present embodiment, the first yoke end surface 13Aa is located at the −Z direction end of the yoke 13A. The yoke 13B has a second yoke end surface 13Ba located at one end of the first virtual straight line. In the present embodiment, the second yoke end surface 13Ba is located at the end in the −Z direction of the yoke 13B.

  As described in the fourth embodiment (the first embodiment), the first element arrangement region R1 is an area that defines the position of the first magnetic detection element 20A, and the second element arrangement region R1. The region R2 is a region that defines the position of the second magnetic detection element 20B, and the end surface projection region R3 is a region formed by vertically projecting the end surface of the magnetic field conversion unit 10 on the virtual plane P. In the present embodiment, the end face projection region R3 is a first yoke formed by vertically projecting the first yoke end surface 13Aa on the virtual plane P instead of the yoke end face projection region R31 in the fourth embodiment. An end surface projection region R33A and a second yoke end surface projection region R33B formed by vertically projecting the second yoke end surface 13Ba onto the virtual plane P are included. In the present embodiment, the end surface projection region R3 does not have the edge R3a in the first embodiment.

  As shown in FIG. 24, the first element disposition region R1 is closer to the first yoke end surface 13Aa than to the second yoke end surface 13Ba. The second element arrangement region R2 is closer to the second yoke end surface 13Ba than to the first yoke end surface 13Aa. Particularly in the present embodiment, the first element arrangement region R1 and the second element arrangement region R2 exist only outside the end face projection area R3, and the first yoke end face projection area R33A and the second yoke end face. It is located between the projection regions R33B.

  The first yoke end surface 13Aa has a first end edge 13Aa1 that is closest to the first element arrangement region R1. The first yoke end surface projection region R33A has a first end edge R33Aa orthogonal to the second imaginary straight line Lx. The first edge R33Aa is an edge formed by vertically projecting the first edge 13Aa1 of the first yoke end surface 13Aa onto the virtual plane P. The second yoke end surface 13Ba has a second end edge 13Ba1 closest to the second element arrangement region R2. The second yoke end surface projection region R33B has a second end edge R33Ba orthogonal to the second imaginary straight line. The second edge R33Ba is an edge formed by vertically projecting the second edge 13Ba1 of the second yoke end surface 13Ba onto the virtual plane P.

  In the present embodiment, the first element arrangement region R1 is in contact with the first edge R33Aa of the first yoke end surface projection region R33A. The second element arrangement region R2 is in contact with the second end edge R33Ba of the second yoke end surface projection region R33B. In the present embodiment, the first element arrangement region R1 and the second element arrangement region R2 are not directly adjacent to each other.

  The first magnetic detection element 20A is arranged so as to intersect with the first element arrangement region R1 without intersecting with the second element arrangement region R2. The second magnetic detection element 20B is arranged so as to intersect with the second element arrangement region R2 without intersecting with the first element arrangement region R1.

  The positional relationship between the first and second magnetic detection elements 20A and 20B and the yokes 13A and 13B of the second resistor portion 22 or the third resistor portion 23 is basically described with reference to FIG. The positional relationship is the same. However, the yoke 13A related to the second and third resistance parts 22 and 23 is ahead of the magnetic detection element array 120 in the X direction, and the yoke 13B related to the second and third resistance parts 22 and 23 is , Ahead of the magnetic detection element array 120 in the −X direction.

  Incidentally, in FIG. 24, the first center of gravity C1, which is the center of gravity of the portion intersecting the first magnetic detection element 20A in the first element arrangement region R1, and the second of the second element arrangement region R2 are shown. A second center of gravity C2, which is the center of gravity of the portion intersecting with the magnetic detection element 20B, is shown. The definitions of the first and second distances in the present embodiment are as follows. The first distance is a distance between the first point in the first element arrangement region R1 and the first end edge 13Aa1 of the first yoke end surface 13Aa. The second distance is a distance between the second point in the second element arrangement region R2 and the second end edge 13Ba1 of the second yoke end surface 13Ba. Hereinafter, a case where the first center of gravity C1 is the first point and the second center of gravity C2 is the second point will be considered.

  When the positional deviation between the magnetic field conversion unit 10 and the magnetic field detection unit 20 occurs, the first distance and the second distance change. When the first point and the second point are changed in one direction parallel to the second virtual straight line Lx, one of the first distance and the second distance decreases and the other increases. For example, in the first and fourth resistance portions 21 and 24, when the first point and the second point are changed in the X direction, the first distance increases and the second distance decreases. Further, when the first point and the second point are changed in the −X direction, the first distance is decreased and the second distance is decreased. The relationship between the increase / decrease in the first distance and the increase / decrease in the conversion efficiency and the strength of the output magnetic field component at the first point, and the relationship between the increase / decrease in the second distance and the conversion efficiency and the strength of the output magnetic field component at the second point are: This is the same as in the first embodiment.

  In the second and third resistance portions 22 and 23, when the first point and the second point are changed in the X direction, the first distance decreases and the second distance increases. Further, when the first point and the second point are changed in the −X direction, the first distance increases and the second distance decreases.

  Next, resistance values of the first to fourth resistance portions 21 to 24 in the present embodiment will be described. Hereinafter, the first resistance value of the first magnetoresistance effect element 20A is represented by the symbol Ra, and the second resistance value of the second magnetoresistance effect element 20B is represented by the symbol Rb. As described in the fourth embodiment (first embodiment), in the state where no output magnetic field component exists, each free layer 204 (FIG. 20) of each of the first and second magnetoresistance effect elements 20A and 20B. 5) is parallel to the third imaginary straight line Ly. When the direction of the input magnetic field component is the Z direction, the first magnetoresistance effect element 20A in the first and fourth resistance portions 21 and 24 and the second magnetism in the second and third resistance portions 22 and 23 are used. The direction of the output magnetic field component received by the resistance effect element 20B is the −X direction, and the second magnetoresistance effect element 20B and the second and third resistance parts 22 in the first and fourth resistance portions 21 and 24, The direction of the output magnetic field component received by the first magnetoresistive effect element 20A in 23 is the X direction. In this case, in the first and fourth resistance portions 21 and 24, the first and second resistance values Ra and Rb increase compared to the state where no output magnetic field component exists, and the first and fourth resistance portions. The resistance values of 21 and 24 also increase. In the second and third resistance units 22 and 23, the first and second resistance values Ra and Rb are reduced compared to a state in which no output magnetic field component exists, and the second and third resistance units 22 and 23 are reduced. The resistance value of is also reduced.

  When the direction of the input magnetic field component is in the −Z direction, the change in the direction of the output magnetic field component and the resistance values of the first to fourth resistance units 21 to 24 are as follows. The opposite is true.

  The magnetic sensor 1 according to the present embodiment may include the wiring layer 130 described in the second embodiment instead of the wiring layer 30. Other configurations, operations, and effects in the present embodiment are the same as those in the first or fourth embodiment.

[Ninth Embodiment]
Next, a ninth embodiment of the present invention will be described. First, the configuration of the magnetic sensor according to the present embodiment will be described with reference to FIG. 25 and FIG. FIG. 25 is an explanatory diagram schematically showing the configuration of the magnetic sensor according to the present embodiment. FIG. 26 is an explanatory diagram showing the positional relationship between the yoke 13 and the first and second magnetic detection elements 20A and 20B.

  The magnetic sensor 1 according to the present embodiment is different from the eighth embodiment in the following points. In the present embodiment, each of the plurality of yokes 13 has a first portion (a plurality of first magnetic detection elements 20A) or a second portion (a plurality of plural magnetic detection element arrays 120) as viewed from the Z direction. The second magnetic detection element 20B) is disposed so as to overlap. Here, the magnetic detection element array 120 of the first resistor portion 21 or the fourth resistor portion 24 and the yokes 13A and 13B will be described as an example. FIG. 26 shows the magnetic detection element array 120 and the yokes 13A and 13B of the first resistor portion 21 or the fourth resistor portion 24.

  As described in the eighth embodiment, the first element arrangement region R1 is an area that defines the position of the first magnetic detection element 20A, and the second element arrangement region R2 is the second magnetic element. The end surface projection region R3 is a region that defines the position of the detection element 20B. The end surface projection region R3 is a region formed by vertically projecting the end surface of the magnetic field conversion unit 10 on the virtual plane P. The first yoke end surface projection region R33A is The second yoke end surface projection region R33B is a region formed by vertically projecting the second yoke end surface 13Ba onto the virtual plane P, and is a region formed by vertically projecting the first yoke end surface 13Aa onto the virtual plane P. It is an area. In the present embodiment, in particular, the first element arrangement region R1 exists only in the first yoke end surface projection region R33A, and the second element arrangement region R2 exists in the second yoke end surface projection region R33B. Only exists.

  The magnetic sensor 1 according to the present embodiment may include the wiring layer 130 described in the second embodiment instead of the wiring layer 30. Other configurations, operations, and effects in the present embodiment are the same as those in the second or eighth embodiment.

  In addition, this invention is not limited to said each embodiment, A various change is possible. For example, as long as the requirements of the claims are satisfied, the numbers, shapes, and arrangements of the yoke, the first magnetic detection element, and the second magnetic detection element are not limited to the examples shown in the embodiments, and are arbitrary. For example, the planar shape of the first and second magnetic detection elements may be circular. In this case, the magnetic field detection unit 20 may include a plurality of magnets that apply a bias magnetic field in a direction parallel to the third virtual straight line Ly to the first and second magnetic detection elements.

  Further, the magnetic field conversion unit 10 may include a plurality of yokes disposed below the plurality of lower electrodes in addition to the plurality of yokes disposed above the plurality of upper electrodes. The plurality of yokes arranged below the lower electrode are arranged in a direction parallel to the second virtual straight line Lx with respect to the plurality of yokes arranged above the upper electrode so as to increase the conversion efficiency. Arranged so as to shift.

  Further, in the third and seventh embodiments, the magnetic field conversion unit 10 may include one yoke that connects the two yokes 12 in the Y direction instead of the two yokes 12.

  DESCRIPTION OF SYMBOLS 1 ... Magnetic sensor, 10 ... Magnetic field conversion part, 11 ... Yoke, 20 ... Magnetic field detection part, 21 ... 1st resistance part, 22 ... 2nd resistance part, 23 ... 3rd resistance part, 24 ... 4th Resistance section, 20A, 21A, 22A, 23A, 24A ... first magnetic detection element, 20B, 21B, 22B, 23B, 24B ... second magnetic detection element, 30 ... wiring layer, 31 ... lower electrode, 32 ... upper part Electrode, 100: Magnetic sensor unit, 101: Substrate, 102: Electrode pad

In the magnetic sensor of the second aspect of the present invention, the magnetic field detection unit includes a first resistance unit and a second resistance unit each having a resistance value that changes in accordance with the input magnetic field component. The first resistance unit and the second resistance unit are configured to be connected in series and energized. When the input magnetic field component changes, one of the resistance value of the first resistance unit and the resistance value of the second resistance unit increases and the other decreases. The output signal depends on the potential at the connection point between the first resistance unit and the second resistance unit. Each of the first and second resistance units includes a first magnetoresistive element and a second magnetoresistive element.

In the magnetic sensor according to the third aspect of the present invention, the magnetic field detector includes a power supply port, a ground port, a first output port, and a second output port, and resistance values that change according to input magnetic field components, respectively. The first resistor unit, the second resistor unit, the third resistor unit, and the fourth resistor unit are included. The first resistance portion is provided between the power supply port and the first output port. The second resistance portion is provided between the first output port and the ground port. The third resistance portion is provided between the power supply port and the second output port. The fourth resistance portion is provided between the second output port and the ground port. The magnetic field detection unit is configured to be energized between the power supply port and the ground port. When the input magnetic field component changes, the resistance values of the first to fourth resistance portions increase as the resistance values of the first and fourth resistance portions decrease and the resistance values of the second and third resistance portions decrease, respectively. Alternatively, the resistance values of the first and fourth resistance portions are decreased and the resistance values of the second and third resistance portions are increased. The output signal depends on the potential difference between the first output port and the second output port. Each of the first to fourth resistance portions includes a first magnetoresistance effect element and a second magnetoresistance effect element.

On the other hand, in the present embodiment, the first magnetic detection element 20A is arranged so as to intersect the first element arrangement region R1 without intersecting the second element arrangement region R2. The second magnetic detection element 20B is arranged so as to intersect with the second element arrangement region R2 without intersecting with the first element arrangement region R1. Each of the first and second element arrangement regions R1, R2 exists only in one of the inside and the outside of the end face projection region R3. Particularly in the present embodiment, the first element arrangement region R1 is present only outside of the end surface projection region R3, the second element arrangement region R2 is present only within the end surface projection region R3.

Here, the reason why it is difficult to suppress the change in conversion efficiency due to the positional deviation between the magnetoresistive effect element and the soft magnetic material in the technique described in Patent Document 1 will be described. In Patent Document 1, all the magnetoresistive effect elements have the center of the magnetoresistive effect element positioned outside the end face projection area of the soft magnetic material corresponding to the end face projection area R3, and the entire magnetoresistive effect element is soft magnetic. It is arranged so as to straddle the inside and outside of the end face projection area of the body. In Patent Document 1, two magnetoresistive elements are connected in series to form an element group. If positional deviation between the magnetoresistive element and the soft magnetic material is produced, one of the two magnetoresistive elements forming the element group, its center moves away from the internal and external boundaries of the end face projection region, constituting the element group The other of the two magnetoresistive effect elements has a center approaching the boundary between the inside and outside of the end face projection region. In this case, the magnetoresistance effect element whose center is far from the boundary between the inside and outside of the end face projection area has a large reduction in conversion efficiency, and the magnetoresistive element whose center is close to the boundary between the inside and outside of the projection area. In the effect element, the increase in conversion efficiency is small. Therefore, in the technique described in Patent Document 1, when the positional deviation between the magnetoresistive element and the soft magnetic material occurs, the amount of change in conversion efficiency in the element group increases.

Next, the configuration of the magnetic sensors 2 and 3 of the magnetic sensor unit 100 shown in FIG. 6 will be briefly described. The configuration of the magnetic sensors 2 and 3 is basically the same as the configuration of the magnetic sensor 1 according to the present embodiment. However, the magnetic sensors 2 and 3 are not provided with the magnetic field conversion unit 10. The magnetic sensor 2 is configured to detect a magnetic field in the Y direction. Specifically, for example, in the magnetic sensor 2, the magnetization direction of the magnetization fixed layer 202 of the first and second magnetic detection elements 20A and 20B included in the first and fourth resistance units 21 and 24 is expressed as Y The magnetization direction of the magnetization fixed layer 202 of the first and second magnetic detection elements 20A and 20B included in the second and third resistance portions 22 and 23 of the magnetic sensor 2 is defined as a −Y direction.

The magnetic sensor 3 is configured to detect a magnetic field in the X direction. Specifically, for example, in the magnetic sensor 3, the magnetization direction of the magnetization fixed layer 202 of the first and second magnetic detection elements 20A and 20B included in the first and fourth resistance portions 21 and 24 is expressed as X The magnetization direction of the magnetization fixed layer 202 of the first and second magnetic detection elements 20A and 20B included in the second and third resistance portions 22 and 23 of the magnetic sensor 3 is defined as a −X direction.

Next, the positional relationship between the yoke 12 and the first and second magnetic detection elements 20A and 20B will be described with reference to FIG. FIG. 13 is an explanatory diagram showing the positional relationship between the yoke 12 and the first and second magnetic detection elements 20A and 20B. Here, description will be given by taking the yoke 12 that overlaps the magnetic detection element row 220 of the first resistance portion 21 and the magnetic detection element row 220 of the third resistance portion 23 as an example. Figure 13 shows a magnetic detection element rows 220 and the yoke 12 of the first magnetic detection element array 220 and the third resistor 23 of the resistance portion 21.

The first element arrangement region R1 is in contact with the first edge R31a of the yoke end surface projection region R31. Second element arrangement region R2 is in contact with the second edge R31b yoke end face projected region R 31.

Next, resistance values of the first to fourth resistance portions 21 to 24 in the present embodiment will be described. Hereinafter, the first resistance value of the first magnetoresistance effect element 20A is represented by the symbol Ra, and the second resistance value of the second magnetoresistance effect element 20B is represented by the symbol Rb. As described in the first embodiment, in the state where the output magnetic field component does not exist, the magnetization direction of each free layer 204 (see FIG. 5) of each of the first and second magnetoresistance effect elements 20A and 20B is The direction is parallel to the third virtual straight line Ly. If the direction of the input magnetic field component in the Z direction, the first and fourth first magnetoresistive element 20A in the resistance portion 21, 24 and the second magnetic in the second and third resistor 22, 23 The direction of the output magnetic field component received by the resistance effect element 20B is the X direction, and the second magnetoresistance effect element 20B and the second and third resistance portions 22 and 23 in the first and fourth resistance portions 21 and 24 are provided. The direction of the output magnetic field component received by the first magnetoresistive element 20A is the −X direction. In this case, in the first and fourth resistance portions 21 and 24, the first and second resistance values Ra and Rb increase compared to the state where no output magnetic field component exists, and the first and fourth resistance portions. The resistance values of 21 and 24 also increase. In the second and third resistance units 22 and 23, the first and second resistance values Ra and Rb are reduced compared to a state in which no output magnetic field component exists, and the second and third resistance units 22 and 23 are reduced. The resistance value of is also reduced.

When the positional deviation between the magnetic field conversion unit 10 and the magnetic field detection unit 20 occurs, the first distance and the second distance change. When the first point and the second point are changed in one direction parallel to the second virtual straight line Lx, one of the first distance and the second distance decreases and the other increases. For example, in the first and fourth resistance portions 21 and 24, when the first point and the second point are changed in the X direction, the first distance increases and the second distance decreases. Further, when the first point and the second point are changed in the −X direction, the first distance decreases and the second distance increases . The relationship between the increase / decrease in the first distance and the increase / decrease in the conversion efficiency and the strength of the output magnetic field component at the first point, and the relationship between the increase / decrease in the second distance and the conversion efficiency and the strength of the output magnetic field component at the second point are: This is the same as in the first embodiment.

Further, the magnetic field conversion unit 10 may include a plurality of yokes disposed below the plurality of lower electrodes in addition to the plurality of yokes disposed above the plurality of upper electrodes. The plurality of yokes arranged below the lower electrode are shifted in a direction parallel to the second virtual straight line Lx with respect to the plurality of yokes arranged above the upper electrode so as to increase the conversion efficiency. Placed in.

Claims (14)

A magnetic sensor comprising a magnetic field converter and a magnetic field detector,
The magnetic field conversion unit is made of a soft magnetic material, receives an input magnetic field including an input magnetic field component in a direction parallel to the first virtual straight line, and generates an output magnetic field,
The magnetic field detector receives the output magnetic field and generates an output signal corresponding to the input magnetic field component,
The output magnetic field includes an output magnetic field component in a direction parallel to a second virtual straight line that intersects the first virtual straight line and changes according to the input magnetic field component,
The magnetic field converter has an end face located at one end in a direction parallel to the first virtual straight line,
A first element arrangement region and a second element arrangement region exist on a virtual plane that intersects the first virtual line and includes the second virtual line;
When an area obtained by vertically projecting the end face of the magnetic field conversion unit on the virtual plane is defined as an end face projection area, each of the first and second element arrangement areas includes an inside of the end face projection area. Exists only on one outside,
The ratio of the intensity of the output magnetic field component at an arbitrary point in the virtual plane to the intensity of the input magnetic field component is defined as the conversion efficiency at the arbitrary point, and the arbitrary point is defined as the second virtual straight line. When the ratio of the change amount of the conversion efficiency at the arbitrary point to the change amount of the position of the arbitrary point when moving in one parallel direction is the slope of the conversion efficiency at the arbitrary point, One of the inclination of the conversion efficiency at an arbitrary first point in the first element arrangement region and the inclination of the conversion efficiency at an arbitrary second point in the second element arrangement region is a positive value. The other is negative,
The magnetic field detection unit includes a first magnetic detection element and a second magnetic detection element,
The first magnetic detection element is arranged so as to intersect the first element arrangement region without intersecting the second element arrangement region,
The second magnetic detection element is arranged so as to intersect the second element arrangement region without intersecting the first element arrangement region,
The first magnetic detection element generates a first detection value corresponding to an output magnetic field component received by the first magnetic detection element;
The second magnetic detection element generates a second detection value corresponding to an output magnetic field component received by the second magnetic detection element;
The magnetic sensor according to claim 1, wherein the output signal depends on a combined value obtained by combining the first detected value and the second detected value.   Each of the first and second magnetic detection elements has a long shape in a direction parallel to the third virtual line on the virtual plane, which is orthogonal to the second virtual line. The magnetic sensor according to claim 1. The first magnetic sensing element is a first magnetoresistive element;
The second magnetic sensing element is a second magnetoresistive element;
The first detection value is a resistance value of the first magnetoresistive element,
The second detection value is a resistance value of the second magnetoresistive element,
3. The magnetic sensor according to claim 1, wherein the combined value is a combined resistance value of the first magnetoresistive effect element and the second magnetoresistive effect element.   The magnetic sensor according to claim 3, wherein the first magnetoresistive element and the second magnetoresistive element are connected in parallel.   The magnetic sensor according to claim 3, wherein the first magnetoresistive element and the second magnetoresistive element are connected in series.   6. The magnetic sensor according to claim 1, wherein the second imaginary straight line is orthogonal to the first imaginary straight line.   The magnetic sensor according to claim 1, further comprising a substrate that holds the first magnetic detection element and the second magnetic detection element.   A center of gravity of a portion of the first element arrangement region that intersects the first magnetic detection element is defined as a first center of gravity, and a portion of the second element arrangement region that intersects the second magnetic detection element When the center of gravity is the second center of gravity, the ratio of the absolute value of the slope of the conversion efficiency at the second center of gravity to the absolute value of the slope of the conversion efficiency at the first center of gravity is 0.48-2. The magnetic sensor according to claim 1, wherein the magnetic sensor falls within a range of .1. The first element arrangement region exists only outside the end face projection region,
The second element arrangement region exists only inside the end surface projection region,
The end face projection area is an edge located between the first element arrangement area and the second element arrangement area, and has an edge perpendicular to the second imaginary straight line. The magnetic sensor according to claim 1, wherein: The magnetic field converter includes a yoke,
The yoke has a yoke end surface located at one end in a direction parallel to the first virtual straight line;
The end face projection area includes a yoke end face projection area formed by vertically projecting the yoke end face on the virtual plane,
The first element placement area and the second element placement area exist only outside the end face projection area, and are mutually in a direction parallel to the second virtual straight line across the yoke end face projection area. The magnetic sensor according to claim 1, wherein the magnetic sensor is located on the opposite side. The magnetic field converter includes a yoke,
The yoke has a yoke end surface located at one end in a direction parallel to the first virtual straight line;
The end face projection area includes a yoke end face projection area formed by vertically projecting the yoke end face on the virtual plane,
The first element arrangement region and the second element arrangement region exist only inside the yoke end surface projection region,
The yoke end surface projection region has a first edge and a second edge located at opposite ends in a direction parallel to the second imaginary straight line,
The first element arrangement region is located between the first edge and the second element arrangement region,
The magnetic sensor according to claim 1, wherein the second element arrangement region is located between the second edge and the first element arrangement region. The magnetic field conversion unit includes a first yoke and a second yoke,
The first yoke has a first yoke end surface located at one end in a direction parallel to the first imaginary straight line,
The second yoke has a second yoke end surface located at one end in a direction parallel to the first virtual straight line;
The first element arrangement region is closer to the first yoke end surface than the second yoke end surface;
The second element disposition region is closer to the second yoke end surface than the first yoke end surface;
The first yoke end surface has a first edge closest to the first element arrangement region;
The second yoke end surface has a second edge closest to the second element arrangement region,
A distance between the first point in the first element arrangement region and the first edge is defined as a first distance, and the second point in the second element arrangement region and the second point When the distance from the edge is a second distance, the first point and the second point are changed in one direction parallel to the second imaginary straight line. 9. The magnetic sensor according to claim 1, wherein one of the second distances decreases and the other increases. A magnetic sensor comprising a magnetic field converter and a magnetic field detector,
The magnetic field conversion unit is made of a soft magnetic material, receives an input magnetic field including an input magnetic field component in a direction parallel to the first virtual straight line, and generates an output magnetic field,
The magnetic field detector receives the output magnetic field and generates an output signal corresponding to the input magnetic field component,
The output magnetic field includes an output magnetic field component in a direction parallel to a second virtual straight line that intersects the first virtual straight line and changes according to the input magnetic field component,
The magnetic field detection unit includes a first resistance unit and a second resistance unit each having a resistance value that varies according to the input magnetic field component,
The first resistor unit and the second resistor unit are configured to be connected in series and energized,
When the input magnetic field component changes, one of the resistance value of the first resistance unit and the resistance value of the second resistance unit increases, and the other decreases.
The output signal depends on a potential at a connection point between the first resistance unit and the second resistance unit,
Each of the first and second resistance portions includes a first resistance effect element and a second magnetoresistance effect element,
The magnetic field converter has an end face located at one end in a direction parallel to the first virtual straight line,
A first element arrangement region and a second element arrangement region exist on a virtual plane that intersects the first virtual line and includes the second virtual line;
When an area obtained by vertically projecting the end face of the magnetic field conversion unit on the virtual plane is defined as an end face projection area, each of the first and second element arrangement areas includes an inside of the end face projection area. Exists only on one outside,
The ratio of the intensity of the output magnetic field component at an arbitrary point in the virtual plane to the intensity of the input magnetic field component is defined as the conversion efficiency at the arbitrary point, and the arbitrary point is defined as the second virtual straight line. When the ratio of the change amount of the conversion efficiency at the arbitrary point to the change amount of the position of the arbitrary point when moving in one parallel direction is the slope of the conversion efficiency at the arbitrary point, One of the inclination of the conversion efficiency at an arbitrary first point in the first element arrangement region and the inclination of the conversion efficiency at an arbitrary second point in the second element arrangement region is a positive value. The other is negative,
The first magnetoresistive element is arranged so as to intersect the first element arrangement region without intersecting the second element arrangement region,
The second magnetoresistive element is arranged so as to intersect the second element arrangement region without intersecting the first element arrangement region,
The first magnetoresistive element has a first resistance value corresponding to an output magnetic field component received by the first magnetoresistive element,
The second magnetoresistive element has a second resistance value corresponding to an output magnetic field component received by itself.
The magnetic sensor, wherein the first magnetoresistive element and the second magnetoresistive element are connected in parallel or in series. A magnetic sensor comprising a magnetic field converter and a magnetic field detector,
The magnetic field conversion unit is made of a soft magnetic material, receives an input magnetic field including an input magnetic field component in a direction parallel to the first virtual straight line, and generates an output magnetic field,
The magnetic field detector receives the output magnetic field and generates an output signal corresponding to the input magnetic field component,
The output magnetic field includes an output magnetic field component in a direction parallel to a second virtual straight line that intersects the first virtual straight line and changes according to the input magnetic field component,
The magnetic field detection unit includes a power supply port, a ground port, a first output port, a second output port, a first resistance unit having a resistance value that changes according to the input magnetic field component, and a second output port. Including a resistance portion, a third resistance portion, and a fourth resistance portion,
The first resistance unit is provided between the power supply port and the first output port,
The second resistance portion is provided between the first output port and the ground port,
The third resistance unit is provided between the power supply port and the second output port,
The fourth resistance portion is provided between the second output port and the ground port,
The magnetic field detection unit is configured to be energized between the power port and the ground port,
When the input magnetic field component changes, the resistance values of the first to fourth resistance units increase as the resistance values of the first and fourth resistance units increase. The resistance value decreases or changes so that the resistance value of the first and fourth resistance portions decreases and the resistance value of the second and third resistance portions increases.
The output signal depends on a potential difference between the first output port and the second output port;
Each of the first to fourth resistance units includes a first resistance effect element and a second magnetoresistance effect element,
The magnetic field converter has an end face located at one end in a direction parallel to the first virtual straight line,
A first element arrangement region and a second element arrangement region exist on a virtual plane that intersects the first virtual line and includes the second virtual line;
When an area obtained by vertically projecting the end face of the magnetic field conversion unit on the virtual plane is defined as an end face projection area, each of the first and second element arrangement areas includes an inside of the end face projection area. Exists only on one outside,
The ratio of the intensity of the output magnetic field component at an arbitrary point in the virtual plane to the intensity of the input magnetic field component is defined as the conversion efficiency at the arbitrary point, and the arbitrary point is defined as the second virtual straight line. When the ratio of the change amount of the conversion efficiency at the arbitrary point to the change amount of the position of the arbitrary point when moving in one parallel direction is the slope of the conversion efficiency at the arbitrary point, One of the inclination of the conversion efficiency at an arbitrary first point in the first element arrangement region and the inclination of the conversion efficiency at an arbitrary second point in the second element arrangement region is a positive value. The other is negative,
The first magnetoresistive element is arranged so as to intersect the first element arrangement region without intersecting the second element arrangement region,
The second magnetoresistive element is arranged so as to intersect the second element arrangement region without intersecting the first element arrangement region,
The first magnetoresistive element has a first resistance value corresponding to an output magnetic field component received by the first magnetoresistive element,
The second magnetoresistive element has a second resistance value corresponding to an output magnetic field component received by itself.
The magnetic sensor, wherein the first magnetoresistive element and the second magnetoresistive element are connected in parallel or in series.

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