JP2018151552A - Optical module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical module in which an optical element can be reliably mounted.SOLUTION: An optical module 1 includes a base B and a movable mirror 5 mounted on the base B. The base B has a first surface Ba and a second surface Bb opposing to each other. The base B has a first opening 31b open in the first surface Ba and the second surface Bb, and a second opening 31c open in the second surface Bb. The movable mirror 5 has a mirror part 51 having a mirror surface 51a, and support part 53 supporting the mirror part 51 in the base B. The support part 53 includes a locking part 56 protruding from the second surface Bb through the first opening 31b, and a back-folded part 57 extending from the locking part 56 toward the second surfaced Bb and intruding from the second surface Bb side into the second opening 31c.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an optical module configured as, for example, a MEMS (Micro Electro Mechanical Systems) device.

  As a MEMS device, there is known an optical module including a base having a main surface in which a concave portion is formed and an optical element mounted on the base in the concave portion (see, for example, Patent Document 1). In such an optical module, an optical element is inserted into the recess, and the optical element is bonded to the base by reflow of a bond pad formed on the bottom surface of the recess.

US Patent Application Publication No. 2002/0186477

  In the optical module as described above, it is required to securely mount the optical element on the base from the viewpoint of mounting on a portable device and ensuring the resistance to an impact at the time of transfer. However, the optical module as described above is not sufficiently resistant to impact, and when the impact is applied, the optical element may easily fall out of the recess.

  Therefore, an object of the present invention is to provide an optical module that can realize reliable mounting of an optical element.

  An optical module according to the present invention includes a base and an optical element mounted on the base. The base has a first surface and a second surface facing each other. The base includes a first surface and a second surface. A first opening that opens to the surface and a second opening that opens to the second surface are provided, and the optical element includes an optical part having an optical surface and a support part that supports the optical part on a base, and supports The part includes a protruding part protruding from the second surface via the first opening, and a folded part extending from the protruding part toward the second surface and entering the second opening from the second surface side.

  In this optical module, a first opening that opens to the first surface and the second surface and a second opening that opens to the second surface are provided in the base. In addition, the support part that supports the optical part on the base protrudes from the second surface through the first opening, extends from the protruding part toward the second surface, and enters the second opening from the second surface side. And a folding part. Thus, even when the optical element is about to come off in the direction intersecting the first surface due to impact, for example, the folded portion abuts against the edge on the second surface side of the second opening, thereby suppressing the optical element from falling off. can do. Therefore, according to this optical module, it is possible to realize the reliable mounting of the optical element.

  In the optical module of the present invention, a pair of second openings are provided so as to sandwich the first opening, a pair of protrusions are provided, a turn-back part is provided in each of the pair of protrusions, and a pair of second openings is provided. Each may enter. According to this, dropping of the optical element can be more reliably suppressed.

  In the optical module of the present invention, the protrusion may be in contact with at least the edge of the first opening on the first surface side. According to this, dropping of the optical element can be suppressed more reliably.

  In the optical module of the present invention, the folded portion may be in contact with the edge portion on the second surface side of the second opening. According to this, dropping of the optical element can be suppressed more reliably.

  In the optical module of the present invention, the optical element further includes an elastic portion, a pair of protrusions are provided, and the pair of protrusions are given an elastic force according to elastic deformation of the elastic portion and are spaced from each other. Is variable and is inserted into the first opening in a state where the elastic force of the elastic portion is applied, and the optical element is based on the reaction force of the elastic force applied to the pair of protrusions from the inner surface of the first opening. It may be supported by. According to this, the optical element can be mounted on the base using the elastic force of the elastic portion. In this case, the optical element is mounted on the base using elastic force, and the optical element is prevented from falling off by the folded portion, so that the amount of the adhesive used is reduced or the adhesive is unnecessary. It becomes possible. The following advantages are obtained by reducing the amount of adhesive used. That is, it is possible to suppress the occurrence of contamination or the like on the optical surface due to the protrusion of the adhesive material, or the destruction or malfunction of the optical module drive region. Further, the area for forming the adhesive (space between components) is reduced, so that the optical module can be reduced in size.

  In the optical module of the present invention, the pair of projecting portions may be inserted into the first opening in a state where the elastic force of the elastic portion is applied in a direction away from each other. According to this, the optical element can be suitably mounted on the base using the elastic force.

  In the optical module of the present invention, the inner surface of the first opening has a pair of inclined surfaces that are inclined so that the distance from one end to the other increases when viewed from the direction intersecting the first surface; It may include a facing surface that faces the pair of inclined surfaces in a direction that intersects the direction in which the pair of inclined surfaces face each other. According to this, when the protruding portion is inserted into the first opening and a part of the elastic deformation of the elastic portion is released, the protruding portion is slid on the inclined surface by the elastic force and hits the opposing surface. The optical element can be positioned in a direction along the first surface.

  In the optical module of the present invention, when viewed from the direction intersecting the first surface, the inclination angle of the pair of inclined surfaces with respect to a straight line passing through the other end of the one inclined surface and the other end of the other inclined surface is 45. Or less. According to this, the reaction force of the elastic force applied to the projecting portion can be more dispersed in the direction intersecting the direction in which the pair of inclined surfaces oppose each other than in the direction in which the pair of inclined surfaces oppose each other. . For this reason, the tolerance with respect to the impact of the direction which cross | intersects the direction where a pair of inclined surface opposes can be improved.

  In the optical module of the present invention, the base may include a support layer and a device layer provided on the support layer and including the first surface and the second surface. According to this, the structure for reliable mounting of the optical element can be suitably realized.

  In the optical module of the present invention, the base may have an intermediate layer provided between the support layer and the device layer. According to this, the structure for reliable mounting of the optical element can be realized more suitably.

  The optical module of the present invention further includes a fixed mirror mounted on the support layer, the device layer, or the intermediate layer, and a beam splitter mounted on the support layer, the device layer, or the intermediate layer, and the optical element is a mirror surface. The movable mirror includes a certain optical surface, and the device layer has a mounting region in which the optical element is mounted and a driving region connected to the mounting region. The movable mirror, the fixed mirror, and the beam splitter are interference optical devices. You may arrange | position so that a type | system | group may be comprised. For example, when an FTIR (Fourier Transform Infrared Spectrometer) is configured by forming an interference optical system on an SOI (Silicon On Insulator) substrate by MEMS technology, the size of the movable mirror is the achievement level of deep drilling on the SOI substrate. There are the following problems in dependence on That is, since the degree of achievement of deep processing for the SOI substrate is about 500 μm at the maximum, there is a limit to increase the sensitivity in FTIR by increasing the size of the movable mirror. On the other hand, according to this optical module, since the movable mirror formed separately is mounted on the device layer, FTIR with improved sensitivity can be obtained.

  In the optical module of the present invention, the support layer may be a first silicon layer of an SOI substrate, the device layer may be a second silicon layer of the SOI substrate, and the intermediate layer may be an insulating layer of the SOI substrate. According to this, the configuration for surely mounting the movable mirror on the device layer can be suitably realized by the SOI substrate.

  The optical module of the present invention includes a light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside, and a light emission portion arranged to emit the measurement light to the outside from the interference optical system. Further, it may be provided. According to this, FTIR provided with a light incident part and a light emission part can be obtained.

  ADVANTAGE OF THE INVENTION According to this invention, the optical module which can implement | achieve reliable mounting of an optical element can be provided.

It is a top view of the optical module of one Embodiment. It is sectional drawing along the II-II line | wire shown by FIG. It is sectional drawing along the III-III line | wire shown by FIG. (A) is the elements on larger scale of FIG. 2, (b) is sectional drawing along the IVb-IVb line | wire shown by FIG. (A) is sectional drawing which shows the mounting process of a movable mirror, (b) is sectional drawing along the Vb-Vb line | wire shown by (a). (A) is sectional drawing which shows the mounting process of a movable mirror, (b) is sectional drawing along the VIb-VIb line | wire shown by (a). It is sectional drawing along the VII-VII line shown by FIG. It is sectional drawing along the VIII-VIII line shown by FIG. It is sectional drawing which shows the modification of 1st opening. It is sectional drawing which shows the modification of a movable mirror. It is sectional drawing along the XI-XI line | wire shown by FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or an equivalent part, and the overlapping part is abbreviate | omitted.
[Configuration of optical module]

  As shown in FIG. 1, the optical module 1 includes a base B. The base B includes a support layer 2, a device layer 3 provided on the support layer 2, and an intermediate layer 4 provided between the support layer 2 and the device layer 3. The support layer 2, the device layer 3, and the intermediate layer 4 are configured by an SOI substrate. Specifically, the support layer 2 is a first silicon layer of an SOI substrate. The device layer 3 is a second silicon layer of the SOI substrate. The intermediate layer 4 is an insulating layer of the SOI substrate. The support layer 2, the device layer 3, and the intermediate layer 4 have, for example, a rectangular shape with a side of about 10 mm when viewed from the Z-axis direction (a direction parallel to the Z-axis) that is the stacking direction thereof. The thickness of each of the support layer 2 and the device layer 3 is, for example, about several hundred μm. The thickness of the intermediate layer 4 is, for example, about several μm. In FIG. 1, the device layer 3 and the intermediate layer 4 are shown with one corner of the device layer 3 and one corner of the intermediate layer 4 cut out.

  The device layer 3 has a mounting area 31 and a drive area 32 connected to the mounting area 31. The drive region 32 includes a pair of actuator regions 33 and a pair of elastic support regions 34. The mounting region 31 and the drive region 32 (that is, the mounting region 31 and the pair of actuator regions 33 and the pair of elastic support regions 34) are integrally formed on a part of the device layer 3 by MEMS technology (patterning and etching). Yes.

  The pair of actuator regions 33 are disposed on both sides of the mounting region 31 in the X-axis direction (direction parallel to the X-axis orthogonal to the Z-axis). That is, the mounting area 31 is sandwiched between the pair of actuator areas 33 in the X-axis direction. Each actuator region 33 is fixed to the support layer 2 via the intermediate layer 4. A first comb tooth portion 33 a is provided on the side surface of each actuator region 33 on the mounting region 31 side. Each first comb-tooth portion 33 a is in a state of floating with respect to the support layer 2 by removing the intermediate layer 4 immediately below the first comb-tooth portion 33 a. Each actuator region 33 is provided with a first electrode 35.

  The pair of elastic support regions 34 are disposed on both sides of the mounting region 31 in the Y-axis direction (the direction parallel to the Y-axis orthogonal to the Z-axis and the X-axis). That is, the mounting region 31 is sandwiched between the pair of elastic support regions 34 in the Y-axis direction. Both end portions 34 a of each elastic support region 34 are fixed to the support layer 2 through the intermediate layer 4. Each elastic support region 34 has an elastic deformation portion 34b (a portion between both end portions 34a) having a structure in which a plurality of leaf springs are connected. The elastic deformation portion 34b of each elastic support region 34 is in a state of floating with respect to the support layer 2 by removing the intermediate layer 4 immediately below the elastic deformation portion 34b. In each elastic support region 34, a second electrode 36 is provided at each of both end portions 34 a.

  The mounting region 31 is connected to the elastic deformation portion 34 b of each elastic support region 34. The mounting region 31 is in a state of floating with respect to the support layer 2 by removing the intermediate layer 4 immediately below the mounting region 31. That is, the mounting area 31 is supported by the pair of elastic support areas 34. A second comb tooth portion 31 a is provided on the side surface of each mounting region 31 on the side of each actuator region 33. Each second comb tooth portion 31 a is in a state of floating with respect to the support layer 2 by removing the intermediate layer 4 immediately below the second comb tooth portion 31 a. In the first comb tooth portion 33a and the second comb tooth portion 31a facing each other, the comb teeth of the first comb tooth portion 33a are located between the comb teeth of the second comb tooth portion 31a.

  The pair of elastic support regions 34 sandwich the mounting region 31 from both sides with respect to the direction A parallel to the X axis so that when the mounting region 31 moves along the direction A, the mounting region 31 returns to the initial position. An elastic force is applied to the mounting region 31. Therefore, when a voltage is applied between the first electrode 35 and the second electrode 36 and an electrostatic attractive force acts between the first comb tooth portion 33a and the second comb tooth portion 31a facing each other, the electrostatic attractive force is applied. The mounting region 31 is moved along the direction A to a position where the elastic force by the pair of elastic support regions 34 is balanced. Thus, the drive region 32 functions as an electrostatic actuator.

  The optical module 1 further includes a movable mirror 5, a fixed mirror 6, a beam splitter 7, a light incident part 8, and a light emitting part 9. The movable mirror 5, the fixed mirror 6, and the beam splitter 7 are arranged on the device layer 3 so as to constitute an interference optical system 10 that is a Michelson interference optical system.

  The movable mirror 5 is mounted on the mounting region 31 of the device layer 3 on one side of the beam splitter 7 in the X-axis direction. The mirror surface 51 a of the mirror portion 51 included in the movable mirror 5 is located on the opposite side of the support layer 2 with respect to the device layer 3. The mirror surface 51a is, for example, a surface perpendicular to the X-axis direction (that is, a surface perpendicular to the direction A) and faces the beam splitter 7 side.

  The fixed mirror 6 is mounted on the mounting region 37 of the device layer 3 on one side of the beam splitter 7 in the Y-axis direction. The mirror surface 61 a of the mirror portion 61 included in the fixed mirror 6 is located on the opposite side of the support layer 2 with respect to the device layer 3. The mirror surface 61a is, for example, a surface perpendicular to the Y-axis direction and faces the beam splitter 7 side.

  The light incident part 8 is mounted on the device layer 3 on the other side of the beam splitter 7 in the Y-axis direction. The light incident part 8 is constituted by, for example, an optical fiber and a collimating lens. The light incident part 8 is arranged so that measurement light is incident on the interference optical system 10 from the outside.

  The light emitting portion 9 is mounted on the device layer 3 on the other side of the beam splitter 7 in the X-axis direction. The light emission part 9 is comprised by the optical fiber, the collimating lens, etc., for example. The light emitting unit 9 is arranged to emit measurement light (interference light) from the interference optical system 10 to the outside.

  The beam splitter 7 is a cube-type beam splitter having an optical function surface 7a. The optical function surface 7 a is located on the opposite side of the support layer 2 with respect to the device layer 3. The beam splitter 7 is positioned by bringing one corner on the bottom side of the beam splitter 7 into contact with one corner of the rectangular opening 3 a formed in the device layer 3. The beam splitter 7 is mounted on the support layer 2 by being fixed to the support layer 2 by bonding or the like in a positioned state.

In the optical module 1 configured as described above, when the measurement light L0 is incident on the interference optical system 10 from the outside via the light incident portion 8, a part of the measurement light L0 is caused by the optical function surface 7a of the beam splitter 7. The reflected light travels toward the movable mirror 5, and the remaining portion of the measurement light L 0 passes through the optical function surface 7 a of the beam splitter 7 and travels toward the fixed mirror 6. A part of the measurement light L0 is reflected by the mirror surface 51a of the movable mirror 5, travels on the same optical path toward the beam splitter 7, and passes through the optical functional surface 7a of the beam splitter 7. The remaining portion of the measurement light L0 is reflected by the mirror surface 61a of the fixed mirror 6, travels toward the beam splitter 7 on the same optical path, and is reflected by the optical function surface 7a of the beam splitter 7. A part of the measurement light L0 transmitted through the optical functional surface 7a of the beam splitter 7 and the remaining part of the measurement light L0 reflected by the optical functional surface 7a of the beam splitter 7 become the measurement light L1 that is interference light, and the measurement light L1 is emitted to the outside from the interference optical system 10 via the light emitting unit 9. According to the optical module 1, since the movable mirror 5 can be reciprocated at high speed along the direction A, a small and highly accurate FTIR can be provided.
[Movable mirror and surrounding structure]

  As shown in FIGS. 2, 3, and 4, the base B includes a first surface Ba and a second surface Bb that face each other. The first surface Ba is a surface of the device layer 3 opposite to the support layer 2, and the second surface Bb is a surface of the device layer 3 on the support layer 2 side. The movable mirror 5 is mounted on the base B in a state where the mirror surface 51a is located on a plane intersecting (for example, orthogonal to) the first surface Ba and the mirror surface 51a is located on the first surface Ba side of the base B. Has been.

  The movable mirror (optical element) 5 includes a mirror part (optical part) 51, an elastic part 52, a support part 53, and a connecting part 54. The movable mirror 5 is integrally formed by MEMS technology (patterning and etching). For this reason, the thickness of the movable mirror 5 (the dimension in the X-axis direction orthogonal to the mirror surface 51a) is constant in each part, and is, for example, about 10 μm or more and 20 μm or less. Moreover, the mirror part 51, the elastic part 52, the support part 53, and the connection part 54 are mutually located on the same plane, when it sees from a Y-axis direction (direction along both the mirror surface 51a and 1st surface Ba). It is provided as follows.

  The mirror unit 51 is formed in a plate shape (for example, a disk shape) having a mirror surface (optical surface) 51a as a main surface. The diameter of the mirror surface 51a is, for example, about 1 mm. The elastic part 52 is formed in an arc shape (for example, a semicircular arc shape) surrounding the mirror part 51 while being separated from the mirror part 51 when viewed from the X-axis direction.

  The support portion 53 includes a pair of leg portions 55 </ b> A and 55 </ b> B, a pair of locking portions (projecting portions) 56, and a pair of folded portions 57. The pair of leg portions 55 </ b> A and 55 </ b> B is provided so as to sandwich the mirror portion 51 in the Y-axis direction, and is connected to both ends of the elastic portion 52.

  Each of the leg portion 55A and the leg portion 55B has a first portion 58a having one end connected to the elastic portion 52 and a second portion 58b connected to the other end of the first portion 58a. The first portion 58a of the leg portion 55A extends along the Z-axis direction (direction orthogonal to the first surface Ba). The first portion 58a of the leg portion 55B extends in an arc shape along the outer edge of the mirror portion 51 when viewed from the X-axis direction. The second portions 58b of the leg portions 55A and the leg portions 55B are inclined and extended so as to approach each other as they move away from the elastic portion 52 (as they go in the negative direction of the Z axis).

  A pair of latching | locking part 56 is each provided in the edge part on the opposite side to the elastic part 52 in each 2nd part 58b. Each of the pair of locking portions 56 is formed so as to be bent in, for example, a V shape on the inner side (side closer to each other) when viewed from the X-axis direction. Each locking portion 56 includes an inclined surface 56a and an inclined surface 56b. The inclined surface 56a and the inclined surface 56b are surfaces opposite to the surfaces facing each other in the pair of locking portions 56 (outer surfaces).

  Between the pair of locking portions 56, the inclined surfaces 56a are inclined so as to approach each other in the negative Z-axis direction. The inclined surfaces 56b are inclined so as to be separated from each other in the Z-axis negative direction. When viewed from the X-axis direction, the inclination angle α of the inclined surface 56a with respect to the Z-axis is equal to or slightly larger than the inclination angle β of the inclined surface 56b with respect to the Z-axis direction. For example, the inclination angle α is about 45 degrees, and the inclination angle β is about 35 degrees.

  The pair of locking portions 56 are connected to the elastic portion 52 via a pair of leg portions 55A and 55B, respectively. Accordingly, for example, by applying force to the pair of leg portions 55A and 55B so as to be sandwiched from both sides in the Y-axis direction, the elastic portion 52 is elastically deformed so as to be compressed in the Y-axis direction. The distance can be reduced. That is, the distance between the pair of locking portions 56 in the Y-axis direction is variable according to the elastic deformation of the elastic portion 52. Further, the elastic force of the elastic portion 52 can be applied to the pair of locking portions 56.

  The pair of folded portions 57 are provided at the end portions of the respective engaging portions 56 on the side opposite to the elastic portion 52. Each of the pair of folded portions 57 extends outward (side away from each other) and toward the Z-axis positive direction when viewed from the X-axis direction. Each folded portion 57 includes an inclined surface 57a. The inclined surface 57 a is a surface facing the locking portion 56 in the folded portion 57. Between the pair of folded portions 57, the inclined surfaces 57a are inclined so as to be separated from each other toward the Z-axis positive direction. When viewed from the X-axis direction, the inclination angle γ of the inclined surface 57a with respect to the Z-axis direction is slightly larger than the inclination angle α. The inclination angle γ is, for example, about 60 degrees.

  The connecting part 54 connects the mirror part 51 and the leg part 55B to each other. The connecting portion 54 is connected to the mirror portion 51 on the opposite side of the elastic portion 52 with respect to the center of the mirror portion 51 in a predetermined direction when viewed from the X-axis direction. This predetermined direction is a direction that intersects both the Y-axis direction and the Z-axis direction. The connecting portion 54 is connected to the leg portion 55B at the connecting portion between the first portion 58a and the second portion 58b. The center of the mirror part 51 is located on one side (the leg part 55B side) in the Y-axis direction with respect to the center line CL1. The center line CL1 is a virtual straight line that extends in the Z-axis direction through the center of a first opening 31b described later.

  Here, in the mounting region 31 of the base B, a first opening 31b and a pair of second openings 31c are formed. The first opening 31b and each second opening 31c penetrate the device layer 3 in the Z-axis direction, and are open to both the first surface Ba and the second surface Bb. The pair of second openings 31c are provided so as to sandwich the first opening 31b in the Y-axis direction. Details of the first opening 31b and the second opening 31c will be described later.

  The pair of locking portions 56 are inserted into the first opening 31b in a state where the elastic force of the elastic portion 52 is applied in a direction away from each other. Each locking portion 56 protrudes from the second surface Bb through the first opening 31b. Each locking portion 56 is in contact with the edge portion 31d on the first surface Ba side of the first opening 31b on the inclined surface 56a. Each folded portion 57 extends from each locking portion 56 toward the second surface Bb, and enters the second opening 31c from the second surface Bb side. Each folded portion 57 is in contact with the edge portion 31e on the second surface Bb side of the second opening 31c on the inclined surface 57a. Thus, the locking portion 56 contacts the edge 31d of the first opening 31b on the first surface Ba side, and the folded portion 57 contacts the edge 31e of the second opening 31c on the second surface Bb side. As a result, the movable mirror 5 is prevented from coming off in the Z-axis direction.

  Here, an opening 41 is formed in the intermediate layer 4. The openings 41 are open on both sides of the intermediate layer 4 in the Z-axis direction. An opening 21 is formed in the support layer 2. The openings 21 are open on both sides of the support layer 2 in the Z-axis direction. In the optical module 1, a continuous space S <b> 1 is configured by the region in the opening 41 of the intermediate layer 4 and the region in the opening 21 of the support layer 2. That is, the space S <b> 1 includes a region in the opening 41 of the intermediate layer 4 and a region in the opening 21 of the support layer 2.

  The space S <b> 1 is formed between the support layer 2 and the device layer 3, and corresponds to at least the mounting region 31 and the drive region 32. Specifically, the region in the opening 41 of the intermediate layer 4 and the region in the opening 21 of the support layer 2 include a range in which the mounting region 31 moves when viewed from the Z-axis direction. A region in the opening 41 of the intermediate layer 4 is a portion to be separated from the support layer 2 in the mounting region 31 and the drive region 32 (that is, a portion to be floated with respect to the support layer 2, for example, A gap for separating the entire mounting region 31, the elastic deformation portion 34 b of each elastic support region 34, the first comb tooth portion 33 a and the second comb tooth portion 31 a) from the support layer 2 is formed.

  A part of each locking portion 56 of the movable mirror 5 is located in the space S1. Specifically, a part of each locking portion 56 is located in a region in the opening 21 of the support layer 2 via a region in the opening 41 of the intermediate layer 4. A part of each locking portion 56 protrudes from the second surface Bb into the space S1 by about 100 μm, for example. As described above, the region in the opening 41 of the intermediate layer 4 and the region in the opening 21 of the support layer 2 include a range in which the mounting region 31 moves when viewed from the Z-axis direction. Is reciprocated along the direction A, a part of each locking portion 56 of the movable mirror 5 located in the space S1 does not come into contact with the intermediate layer 4 and the support layer 2.

  Here, as shown in FIG. 4B, the inner surface of the first opening 31b includes a pair of inclined surfaces SA facing each other in the Y-axis direction, and a pair of inclined surfaces SB facing each other in the Y-axis direction, including. Each inclined surface SA includes one end SAa and the other end SAb, and each inclined surface SB includes one end SBa and the other end SBb. When viewed from the Z-axis direction, the pair of inclined surfaces SA are inclined so that the mutual distance increases from one end SAa to the other end SAb (for example, with respect to the X-axis direction). The SB is inclined to the opposite side to the pair of inclined surfaces SA so that the distance from one end SBa to the other end SBb increases (for example, with respect to the X-axis direction). The inclined surface SA and the inclined surface SB are opposed to each other in the X-axis direction (a direction orthogonal to the Y-axis direction in which the pair of inclined surfaces SA are opposed to each other).

  On both sides in the Y-axis direction, the other end SAb of the inclined surface SA and the other end SBb of the inclined surface SB are connected to each other via a connection surface SC extending along the X-axis direction. The inclined surface SA, the inclined surface SB, and the connecting surface SC each define one corner on both sides in the Y-axis direction. On both sides in the X-axis direction, one end SAa of the inclined surface SA and one end SBa of the inclined surface SB are connected to each other via a connection surface SD extending in the Y-axis direction. When viewed from the Z-axis direction, the connection surface SD has a shape that is widened in a V shape on the outer side (side away from each other) at the intermediate portion. The first opening 31b has a line-symmetric shape with respect to a center line CL2 that passes through the center of the first opening 31b and is parallel to the Y-axis direction when viewed from the Z-axis direction. The first opening 31b here has a decagonal shape when viewed from the Z-axis direction.

  The inner surface of each second opening 31c includes a pair of inclined surfaces SE that face each other in the X-axis direction. When viewed from the Z-axis direction, the pair of inclined surfaces SE are inclined so as to be separated from each other as the distance from the first opening 31b increases. In the Y-axis direction, one inclined surface SE faces the inclined surface SA, and the other inclined surface SE faces the inclined surface SB. The pair of inclined surfaces SE have a shape that is line-symmetric with respect to the inclined surfaces SA and SB with respect to the Y-axis direction when viewed from the Z-axis direction. Each second opening 31c has a shape symmetrical with respect to the center line CL2 when viewed from the Z-axis direction. Here, the second opening 31c has a hexagonal shape when viewed from the Z-axis direction.

  The maximum value of the dimension of the first opening 31b in the Y-axis direction (that is, the distance between the other ends SAb of the pair of inclined surfaces SA) is determined when the pair of locking portions 56 are disposed in the first opening 31b. Only a part of the elastic deformation of the elastic part 52 can be released (that is, the elastic part 52 does not reach a natural length). Therefore, when the pair of locking portions 56 are arranged in the first opening 31b, the pair of locking portions 56 press the inner surface of the first opening 31b by the elastic force of the elastic portion 52, and the inner surface of the first opening 31b A reaction force is applied to the pair of locking portions 56. The movable mirror 5 is supported on the base B by the reaction force. More specifically, due to the elastic force of the elastic portion 52, each locking portion 56 is inscribed in the corner defined by the inclined surface SA and the inclined surface SB of the first opening 31b, and each folded portion 57 is inclined surface SE. It is in the state which contact | abutted. Thereby, the movable mirror 5 is positioned in the X-axis direction and the Y-axis direction.

  Next, an example of the mounting process of the movable mirror 5 will be described with reference to FIGS. First, as shown in FIG. 5, in a state where the distance between the pair of locking portions 56 is reduced, the pair of locking portions 56 are inserted into the first opening 31b from the first surface Ba side. At this time, the pair of locking portions 56 are not in contact with the inner surface of the first opening 31b.

  Subsequently, as shown in FIG. 6, the distance between the pair of locking portions 56 is increased. Thereby, each latching | locking part 56 moves toward the corner | angular part prescribed | regulated by the inclined surface SA and inclined surface SB of the 1st opening 31b. At this time, depending on the posture of the movable mirror 5, each locking portion 56 may first come into contact with one of the inclined surface SA and the inclined surface SB (hereinafter referred to as a contact surface). In this case, each locking portion 56 slides on the contact surface toward the outer side in the Y-axis direction (second opening 31c side) by the elastic force of the elastic portion 52, and is inclined while contacting the contact surface. It abuts against the other of SA and the inclined surface SB (that is, the facing surface facing the contact surface). Thereby, each latching | locking part 56 is inscribed in the corner | angular part prescribed | regulated by the inclined surface SA and the inclined surface SB, and is positioned in the X-axis direction and the Y-axis direction (self-aligned by an elastic force).

In addition, each locking portion 56 contacts the edge portion 51d on the first surface Ba side of the first opening 31b on the inclined surface 56a. Each locking part 56 slides on the edge 51d toward the Z-axis positive direction side by the elastic force of the elastic part 52. Thereby, each folding | returning part 57 enters into the 2nd opening 31c from the 2nd surface Bb side. Each folded portion 57 moves to a position (position in FIG. 4) where the inclined surface 57a contacts the edge portion 51e on the second surface Bb side of the second opening 31c. As a result, the pair of locking portions 56 are locked at the position, and the movable mirror 5 is positioned in the Z-axis direction (self-aligned by elastic force). That is, in the movable mirror 5, self-alignment is performed three-dimensionally using the elastic force of the elastic portion 52.
[Fixed mirror and its peripheral structure]

  The fixed mirror 6 and its peripheral structure are the same as the movable mirror 5 and its peripheral structure except that the mounting area does not move. That is, as shown in FIGS. 7 and 8, the fixed mirror (optical element) 6 includes a mirror part (optical part) 61, an elastic part 62, a support part 63, and a connecting part 64. . The fixed mirror 6 is mounted on the base B in a state where the mirror surface 61a is located on a plane intersecting (for example, orthogonal to) the first surface Ba and the mirror surface 61a is located on the first surface Ba side of the base B. Has been. The fixed mirror 6 is integrally formed by MEMS technology (patterning and etching). For this reason, the thickness of the fixed mirror 6 (the dimension in the Y-axis direction orthogonal to the mirror surface 61a) is constant in each part, and is, for example, about 10 μm or more and 20 μm or less. Moreover, the mirror part 61, the elastic part 62, the support part 63, and the connection part 64 are located on the same plane when viewed from the X-axis direction (the direction along both the mirror surface 61a and the first surface Ba). It is provided as follows.

  The mirror part 61 is formed in a plate shape (for example, a disk shape) having a mirror surface (optical surface) 61a as a main surface. The diameter of the mirror surface 61a is, for example, about 1 mm. The elastic portion 62 is formed in an arc shape (for example, a semicircular arc shape) surrounding the mirror portion 61 while being separated from the mirror portion 61 when viewed from the Y-axis direction.

  The support portion 63 includes a pair of leg portions 65 </ b> A and 65 </ b> B, a pair of locking portions (projecting portions) 66, and a pair of folded portions 67. The pair of leg portions 65A and 65B are provided so as to sandwich the mirror portion 61 in the X-axis direction, and are connected to both ends of the elastic portion 62, respectively.

  Each of the leg portion 65A and the leg portion 65B has a first portion 68a having one end connected to the elastic portion 62, and a second portion 68b connected to the other end of the first portion 68a. The first portion 68a of the leg portion 65A extends along the Z-axis direction (direction orthogonal to the first surface Ba). The first portion 68a of the leg portion 65B extends in an arc shape along the outer edge of the mirror portion 61 when viewed from the Y-axis direction. The second portions 68b of the leg portions 65A and the leg portions 65B extend so as to be closer to each other as they move away from the elastic portion 62 (toward the negative Z-axis direction).

  The pair of locking portions 66 are provided at the end portions of the second portions 68b opposite to the elastic portions 62, respectively. Each of the pair of locking portions 66 is formed so as to be bent in, for example, a V shape on the inner side (side approaching each other) when viewed from the Y-axis direction. Each locking portion 66 includes an inclined surface 66a and an inclined surface 66b. The inclined surface 66a and the inclined surface 66b are surfaces opposite to the surfaces facing each other in the pair of locking portions 66 (outer surfaces).

  Between the pair of locking portions 66, the inclined surfaces 66a are inclined so as to approach each other in the negative Z-axis direction. The inclined surfaces 66b are inclined so as to be separated from each other toward the negative Z-axis direction. When viewed from the Y-axis direction, the inclination angles of the inclined surfaces 66a and 66b with respect to the Z-axis direction are the same as those of the inclined surfaces 56a and 56b in the movable mirror 5.

  The pair of locking portions 66 are connected to the elastic portion 62 via a pair of leg portions 65A and 65B, respectively. Accordingly, for example, by applying force to the pair of leg portions 65A and 65B so as to be sandwiched from both sides in the X-axis direction, the elastic portion 62 is elastically deformed so as to be compressed in the X-axis direction. The distance can be reduced. That is, the distance between the pair of locking portions 66 in the X-axis direction is variable according to the elastic deformation of the elastic portion 62. Further, the elastic force of the elastic portion 62 can be applied to the pair of locking portions 66.

  The pair of folded portions 67 are respectively provided at the end portions of the respective locking portions 66 opposite to the elastic portions 62. Each folded portion 67 extends outward (side away from each other) and toward the Z-axis positive direction when viewed from the Y-axis direction. Each folded portion 67 includes an inclined surface 67a. The inclined surface 67 a is a surface facing the locking portion 66 in the folded portion 67. Between the pair of folded portions 67, the inclined surfaces 67a are inclined so as to be separated from each other in the positive direction of the Z axis. When viewed from the Y-axis direction, the inclination angle of the inclined surface 67a with respect to the Z-axis direction is the same as that of the inclined surface 57a of the movable mirror 5.

  The connecting part 64 connects the mirror part 61 and the leg part 65B to each other. The connection portion 64 is connected to the mirror portion 61 on the side opposite to the elastic portion 62 in the predetermined direction with respect to the center of the mirror portion 61 when viewed from the Y-axis direction. This predetermined direction is a direction that intersects both the X-axis direction and the Z-axis direction. The connecting portion 64 is connected to the leg portion 65B at the connecting portion between the first portion 68a and the second portion 68b. The center of the mirror part 61 is located on one side (the leg part 65B side) in the X-axis direction with respect to the center line CL3. The center line CL3 is a virtual straight line that extends in the Z-axis direction through the center of a first opening 37a described later.

  Here, in the mounting region 37 of the base B, a first opening 37a and a pair of second openings 37b are formed. The first opening 37a and each second opening 37b penetrate the device layer 3 in the Z-axis direction, and are open to both the first surface Ba and the second surface Bb. The pair of second openings 37b are provided so as to sandwich the first opening 37a in the X-axis direction.

  The pair of locking portions 66 are inserted into the first opening 37a in a state where the elastic force of the elastic portion 62 is applied in a direction away from each other. Each locking portion 66 protrudes from the second surface Bb via the first opening 37a. Each locking portion 66 is in contact with the edge of the first opening 37a on the first surface Ba side on the inclined surface 66a. The pair of folded portions 67 extends from the respective locking portions 66 toward the second surface Bb, and enters the second opening 37b from the second surface Bb side. Each folded portion 67 is in contact with the edge of the second opening 37b on the second surface Bb side on the inclined surface 67a. As described above, the locking portion 66 is in contact with the edge of the first opening 37a on the first surface Ba side, and the folded portion 67 is in contact with the edge of the second opening 37b on the second surface Bb side. Thus, the fixed mirror 6 is prevented from coming off in the Z-axis direction.

  Here, an opening 42 is formed in the intermediate layer 4. The opening 42 includes the first opening 37a of the mounting region 37 when viewed from the Z-axis direction, and opens on both sides of the intermediate layer 4 in the Z-axis direction. An opening 22 is formed in the support layer 2. The opening 22 includes the first opening 37a of the mounting region 37 when viewed from the Z-axis direction, and opens on both sides of the support layer 2 in the Z-axis direction. In the optical module 1, a continuous space S <b> 2 is configured by the region in the opening 42 of the intermediate layer 4 and the region in the opening 22 of the support layer 2. That is, the space S <b> 2 includes a region in the opening 42 of the intermediate layer 4 and a region in the opening 22 of the support layer 2.

  A part of each locking portion 66 of the fixed mirror 6 is located in the space S2. Specifically, a part of each locking portion 66 is located in a region in the opening 22 of the support layer 2 via a region in the opening 42 of the intermediate layer 4. A part of each locking portion 66 protrudes from the surface of the device layer 3 on the intermediate layer 4 side into the space S2, for example, about 100 μm.

Here, the inner surfaces of the first opening 37a and the second opening 37b are configured similarly to the inner surfaces of the first opening 31b and the second opening 31c in the mounting region 31, respectively. Therefore, when the pair of locking portions 66 are disposed in the first opening 37a, the pair of locking portions 66 press the inner surface of the first opening 37a by the elastic force of the elastic portion 62, and the first opening 37a is separated from the inner surface of the first opening 37a. A reaction force is applied to the pair of locking portions 66. The fixed mirror 6 is supported on the base B by the reaction force. Also in the fixed mirror 6, as in the case of the movable mirror 5, three-dimensional self-alignment using the inner surface of the first opening 37a and the elastic force is performed.
[Action and effect]

  In the optical module 1, the base B is provided with a first opening 31b that opens to the first surface Ba and the second surface Bb, and a second opening 31c that opens to the second surface Bb. Further, a support portion 53 for supporting the optical portion on the base B has a locking portion 56 protruding from the second surface Bb through the first opening 31b, and extends from the locking portion 56 toward the second surface Bb. 2 and a folded portion 57 that enters the second opening 31c from the surface Bb side. Thereby, for example, even when the movable mirror 5 is about to come off in a direction intersecting the first surface Ba due to an impact, the folded portion 57 abuts on the edge 31e on the second surface Bb side of the second opening 31c, Dropping of the movable mirror 5 can be suppressed. Therefore, according to the optical module 1, the movable mirror 5 can be reliably mounted.

  In the optical module 1, a pair of second openings 31 c are provided so as to sandwich the first opening 31 b, and a folded portion 57 is provided in each of the pair of locking portions 56 and enters the pair of second openings 31 c, respectively. It is out. Thereby, dropping of the movable mirror 5 can be more reliably suppressed.

  In the optical module 1, the locking portion 56 is in contact with the edge 31d on the first surface Ba side of the first opening 31b. Thereby, dropping of the movable mirror 5 can be further reliably suppressed.

  In the optical module 1, the folded portion 57 is in contact with the edge 31e on the second surface Bb side of the second opening 31c. Thereby, dropping of the movable mirror 5 can be further reliably suppressed. Particularly, when the locking portion 56 is in contact with the edge 31d on the first surface Ba side of the first opening 31b and the folded portion 57 is in contact with the edge 31e on the second surface Bb side of the second opening 31c. In addition, since the base B is sandwiched and supported between the two adjacent points by the locking portion 56 and the folded portion 57, the resistance to impacts in the X-axis direction and the Z-axis direction can be further improved.

  In the optical module 1, the pair of locking portions 56 are applied with an elastic force according to the elastic deformation of the elastic portion 52, the distance between them is variable, and the elastic force of the elastic portion 52 is applied. Are inserted into the first opening 31b. The movable mirror 5 is supported on the base B by the reaction force of the elastic force applied to the pair of locking portions 56 from the inner surface of the first opening 31b. Thereby, the movable mirror 5 can be mounted on the base B using the elastic force of the elastic portion 52. Furthermore, since the movable mirror 5 is mounted on the base B using elastic force and the falling off of the movable mirror 5 is suppressed by the folded portion 57, the amount of adhesive used can be reduced, or the adhesive can be used. It becomes possible to make it unnecessary. The following advantages are obtained by reducing the amount of adhesive used. That is, it is possible to suppress the occurrence of contamination or the like on the mirror surface 51a or the destruction or malfunction of the drive region 32 of the optical module 1 due to the protrusion of the adhesive. Further, the optical module 1 can be reduced in size by reducing the region for forming the adhesive (space between components).

  In the optical module 1, the pair of locking portions 56 are inserted into the first opening 31 b in a state where the elastic force of the elastic portion 52 is applied in a direction away from each other. Thereby, the movable mirror 5 can be suitably mounted on the base B using the elastic force.

  Further, in the optical module 1, when the inner surface of the first opening 31b is viewed from the Z-axis direction, a pair of inclined surfaces SA that are inclined so that the mutual distance increases from the one end SAa to the other end SAb; And a pair of inclined surfaces SB facing the pair of inclined surfaces SA in the X-axis direction orthogonal to the Y-axis direction where the pair of inclined surfaces SA face each other. As a result, when the locking portion 56 is inserted into the first opening 31b and a part of the elastic deformation of the elastic portion 52 is released, the locking portion 56 is slid on the inclined surface SA by the elastic force, and the inclined surface SB. The movable mirror 5 can be positioned in the direction along the first surface Ba.

  In the optical module 1, the base B includes the support layer 2 and the device layer 3 provided on the support layer 2 and including the first surface Ba and the second surface Bb. Thereby, the structure for reliable mounting of the movable mirror 5 is suitably realizable.

  In the optical module 1, the base B has an intermediate layer 4 provided between the support layer 2 and the device layer 3. Thereby, the structure for reliable mounting of the movable mirror 5 can be more suitably realized.

  In the optical module 1, the movable mirror 5, the fixed mirror 6, and the beam splitter 7 are arranged so as to constitute the interference optical system 10. Thereby, FTIR with improved sensitivity can be obtained.

  In the optical module 1, the support layer 2 is the first silicon layer of the SOI substrate, the device layer 3 is the second silicon layer of the SOI substrate, and the intermediate layer 4 is the insulating layer of the SOI substrate. Thereby, the structure for the reliable mounting of the movable mirror 5 with respect to the device layer 3 can be suitably realized by the SOI substrate.

  In the optical module 1, the light incident part 8 is arranged so that the measurement light is incident on the interference optical system 10 from the outside, and the light emitting part 9 emits the measurement light from the interference optical system 10 to the outside. Are arranged as follows. Thereby, FTIR provided with the light-incidence part 8 and the light-projection part 9 can be obtained.

In the optical module 1, the movable mirror 5 passes through the mounting region 31 of the device layer 3, and a part of each locking portion 56 of the movable mirror 5 is formed between the support layer 2 and the device layer 3. Located in the space S1. Thereby, for example, since the size of the locking portion 56 and the folded portion 57 is not limited, the movable mirror 5 can be stably and firmly fixed to the mounting region 31 of the device layer 3. In other words, in the optical module 1, by adopting the configuration having the space S <b> 1, it is possible to adopt a shape including the folded portion 57 as the shape of the movable mirror 5, and the shape of the fragile movable mirror 5. As a result, the optical module 1 that can withstand mounting on portable devices and the like is realized by increasing the resistance to external forces and environmental changes.
[Modification]

  Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. For example, the materials and shapes of each component are not limited to the materials and shapes described above, and various materials and shapes can be employed.

  Moreover, the 1st opening 31b may be comprised like the 1st modification shown by FIG. In the first modification, the other end SAb of the inclined surface SA and the other end SBb of the inclined surface SB are directly connected to each other on both sides in the Y-axis direction. When viewed from the Z-axis direction, the inclination angle δ of the pair of inclined surfaces SA with respect to a straight line (here, the center line CL2) passing through the other end SAb of the one inclined surface SA and the other end SAb of the other inclined surface SA. Is 45 degrees or less. The inclination angle δ is, for example, about 35 degrees. Also in the first modified example, as in the above-described embodiment, the first opening 31b has a shape that is line-symmetric with respect to the center line CL2 when viewed from the Z-axis direction. Also according to the first modified example, the mounting of the movable mirror 5 can be realized as in the above embodiment. Further, the reaction force of the elastic force applied to the locking portion 56 can be distributed more in the X axis direction than in the Y axis direction. Thereby, the tolerance to the impact in the X-axis direction which is important for improving the reliability of FTIR can be improved.

  In the above embodiment, the first opening 31b includes the pair of inclined surfaces SA and the pair of inclined surfaces SB. However, the first opening 31b includes the pair of inclined surfaces SA and the pair of inclined surfaces SA. And a reference plane extending along a reference line (center line CL2 in FIG. 4) connecting the ends SAb to each other. In this case, when the locking portion 56 is inserted into the first opening 31b and a part of the elastic deformation of the elastic portion 52 is released, the locking portion 56 is slid on the inclined surface SA by the elastic force, and the reference surface The movable mirror 5 can be positioned in the direction along the first surface Ba.

  In the above embodiment, the mirror surface 51a is positioned on the first surface Ba side of the base B. However, in the movable mirror 5, part or all of the mirror surface 51a protrudes on the second surface Bb side of the base B. In this state, it may be mounted on the base B. In this case, a portion of the mounting region 31 that defines the first opening 31b that is opposed to the mirror surface 51a is notched in order to pass the measurement light L0. The elastic part 52 may be formed in an annular shape (for example, an annular shape) so as to surround the mirror part 51 while being separated from the mirror part 51 when viewed from the X-axis direction. Moreover, in the said embodiment, although the latching | locking part 56 contact | abutted the edge part 31d by the side of the 1st surface Ba of the 1st opening 31b in the inclined surface 56a, in addition to this, the latching | locking part 56 is an inclined surface. In 56b, you may contact | abut to the edge part by the side of the 2nd surface Bb of the 1st opening 31b.

  Moreover, in the said embodiment, each 2nd opening 31c does not need to open to 1st surface Ba, For example, the recessed part opened to 2nd surface Bb may be sufficient. The first opening 31b and the second opening 31c may communicate with each other. For example, a recess opening in the second surface Bb may be provided between the first opening 31b and the second opening 31c, and the first opening 31b and the second opening 31c may communicate with each other via the recess. Moreover, the folding | returning part 57 should just enter into the 2nd opening 31c, and may be spaced apart from the edge part 31e by the side of the 2nd surface Bb of the 2nd opening 31c.

  Further, the movable mirror 5A may be configured as in the modification shown in FIGS. In the movable mirror 5A, the leg portion 55A and the leg portion 55B of the support portion 53 extend in parallel with each other along the Z-axis direction. Each of the pair of locking portions 56 is formed so as to be bent in a V shape outward (side away from each other) when viewed from the X-axis direction. The inclined surface 56 a and the inclined surface 56 b of each locking portion 56 are surfaces facing each other (inner surfaces) in the pair of locking portions 56. Between the pair of locking portions 56, the inclined surfaces 56a are inclined so as to be separated from each other in the negative Z-axis direction. The inclined surfaces 56b are inclined so as to approach each other in the Z-axis negative direction. Each of the pair of folded portions 57 extends toward the inside (the side approaching each other) and toward the Z-axis positive direction when viewed from the X-axis direction. Between the pair of folded portions 57, the inclined surfaces 57a are inclined so as to approach each other as they go in the positive Z-axis direction. The connecting portion 54 is connected to the mirror portion 51 and the elastic portion 52 on the center line CL1. The center of the mirror part 51 is located on the center line CL1.

  The movable mirror 5A further includes a handle 59. The handle 59 has a pair of displacement portions 59a connected to both ends of the elastic portion 52, respectively. The pair of displacement portions 59a are provided so as to face each other in the Y-axis direction, and extend from the end portion of the elastic portion 52 toward the Z-axis positive direction. An intermediate portion of each displacement portion 59a is bent in a V shape inward when viewed from the X-axis direction. The pair of displacement portions 59a are located on the Z axis positive direction side with respect to the mirror portion 51, the elastic portion 52, and the support portion 53 in a state where the movable mirror 5A is mounted in the mounting region 37. In this modified example, one second opening 31c is formed in the mounting region 31, and a pair of first openings 31b are formed so as to sandwich the second opening 31c in the Y-axis direction. The pair of locking portions 56 are respectively inserted into the pair of first openings 31b in a state where the elastic force of the elastic portion 52 is applied in a direction approaching each other.

  When the movable mirror 5A is mounted on the base B, the pair of locking portions 56 is paired with the pair of locking portions 56 in a state where the distance between the pair of locking portions 56 is increased by applying force to the pair of displacement portions 59a. Each is inserted into the first opening 31b. For example, after one locking portion 56 is first inserted into the first opening 31b and brought into contact with the edge portion of the first opening 31b, a force is applied to the pair of displacement portions 59a, whereby In a state where the other locking portion 56 is displaced so as to move away from the locking portion 56, the other locking portion 56 is inserted into the first opening 31b. Subsequently, by releasing the force applied to the pair of displacement portions 59a, the pair of locking portions 56 are brought into contact with the inner surface of the first opening 31b to fix the movable mirror 5 to the base B. The point where self-alignment is made three-dimensionally using the elastic force of the elastic part 52, and the pair of folded parts 57 enter the second opening 31c from the second surface Bb side, respectively, and the second surface of the second opening 31c. The point of contact with the edge on the Bb side is the same as in the above embodiment. Also according to such a modification, the mounting of the movable mirror 5 can be realized as in the above embodiment. In the modification, one second opening 31c is formed, but a pair of second openings 31c may be formed so as to be sandwiched between the pair of first openings 31b.

  In the above embodiment, the fixed mirror 6 is mounted on the device layer 3, but the fixed mirror 6 may be mounted on the support layer 2 or the intermediate layer 4. In the above embodiment, the beam splitter 7 is mounted on the support layer 2, but the beam splitter 7 may be mounted on the device layer 3 or the intermediate layer 4. The beam splitter 7 is not limited to a cube type beam splitter, and may be a plate type beam splitter.

  Further, the optical module 1 may include a light emitting element that generates measurement light incident on the light incident portion 8 in addition to the light incident portion 8. Alternatively, the optical module 1 may include a light emitting element that generates measurement light incident on the interference optical system 10 instead of the light incident portion 8. The optical module 1 may include a light receiving element that detects measurement light (interference light) emitted from the light emitting unit 9 in addition to the light emitting unit 9. Alternatively, the optical module 1 may include a light receiving element that detects measurement light (interference light) emitted from the interference optical system 10 instead of the light emitting unit 9.

  In addition, the first through electrode electrically connected to each actuator region 33 and the second through electrode electrically connected to each of both end portions 34a of each elastic support region 34 are the support layer 2 and the intermediate layer 4. (Only the support layer 2 when the intermediate layer 4 does not exist) may be provided, and a voltage may be applied between the first through electrode and the second through electrode. The actuator that moves the mounting region 31 is not limited to an electrostatic actuator, and may be a piezoelectric actuator, an electromagnetic actuator, or the like. Moreover, the optical module 1 is not limited to what comprises FTIR, and may comprise another optical system.

  Furthermore, in the said embodiment, the movable mirror and the fixed mirror were illustrated as an optical element mounted in the base B. In this example, the optical surface is a mirror surface. However, the optical element to be mounted is not limited to a mirror, and may be an arbitrary element such as a grating or an optical filter.

DESCRIPTION OF SYMBOLS 1 ... Optical module, 2 ... Support layer, 3 ... Device layer, 4 ... Intermediate layer, 5 ... Movable mirror, 6 ... Fixed mirror, 7 ... Beam splitter, 8 ... Light incident part, 9 ... Light emitting part, 10 ... Interference Optical system 31 ... Mounting region 31b ... First opening 31c ... Second opening 32 ... Drive region 51 ... Mirror part 51a ... Mirror surface 52 ... Elastic part 53 ... Supporting part 56 ... Locking part (Projecting part), 57 ... folded portion, B ... base, Ba ... first surface, Bb ... second surface, SA ... inclined surface, SAa ... one end, SAb ... other end.

Claims (13)

A base, and an optical element mounted on the base,
The base has a first surface and a second surface facing each other. The base has a first opening that opens on the first surface and the second surface, and a second opening that opens on the second surface. Is provided,
The optical element includes an optical unit having an optical surface, and a support unit that supports the optical unit on the base,
The support portion protrudes from the second surface through the first opening, extends from the protrusion toward the second surface, and is turned back into the second opening from the second surface side. And an optical module. A pair of the second openings are provided so as to sandwich the first opening,
A pair of the protruding portions are provided,
2. The optical module according to claim 1, wherein the folded portion is provided in each of the pair of projecting portions and enters each of the pair of second openings.   The optical module according to claim 1, wherein the projecting portion is in contact with at least an edge portion on the first surface side of the first opening.   The optical module according to claim 1, wherein the folded portion is in contact with an edge of the second opening on the second surface side. The optical element further includes an elastic part,
A pair of the protruding portions are provided,
The pair of projecting portions are inserted into the first opening in a state where an elastic force is applied according to elastic deformation of the elastic portion and a distance between the pair of protruding portions is variable and the elastic force of the elastic portion is applied. And
5. The light according to claim 1, wherein the optical element is supported on the base by a reaction force of the elastic force applied to the pair of protrusions from an inner surface of the first opening. module.   The optical module according to claim 5, wherein the pair of projecting portions are inserted into the first opening in a state where the elastic force of the elastic portion is applied in a direction away from each other.   The inner surface of the first opening has a pair of inclined surfaces inclined so that the distance from each other increases from one end to the other end when viewed from a direction intersecting the first surface, and the pair of inclined surfaces The optical module according to claim 5, comprising an opposing surface that faces the pair of inclined surfaces in a direction that intersects with each other.   When viewed from the direction intersecting the first surface, the inclination angle of the pair of inclined surfaces with respect to a straight line passing through the other end of the one inclined surface and the other end of the other inclined surface is 45 degrees. The optical module according to claim 7, wherein:   The optical module according to claim 1, wherein the base includes a support layer and a device layer provided on the support layer and including the first surface and the second surface.   The optical module according to claim 9, wherein the base includes an intermediate layer provided between the support layer and the device layer. A fixed mirror mounted on the support layer, the device layer or the intermediate layer;
A beam splitter mounted on the support layer, the device layer, or the intermediate layer, and
The optical element is a movable mirror including the optical surface which is a mirror surface;
The device layer has a mounting area where the optical element is mounted, and a driving area connected to the mounting area,
The optical module according to claim 10, wherein the movable mirror, the fixed mirror, and the beam splitter are arranged to constitute an interference optical system. The support layer is a first silicon layer of an SOI substrate;
The device layer is a second silicon layer of the SOI substrate;
The optical module according to claim 11, wherein the intermediate layer is an insulating layer of the SOI substrate. A light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside;
The optical module according to claim 11, further comprising: a light emitting unit arranged to emit the measurement light to the outside from the interference optical system.

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